Export to PDF

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@@ -0,0 +1,263 @@
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+*.lof
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+*.lot
+*.fls
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notes.org

@@ -1,5 +1,10 @@
 #+TITLE: EUSPEN
 :DRAWER:
+#+LATEX_CLASS: scrartcl
+#+LATEX_CLASS_OPTIONS: [a4paper,10pt,twoside,DIV=14]
+
+#+OPTIONS: toc:2 todo:nil
+
 #+STARTUP: overview
 
 #+LANGUAGE: en
@@ -38,6 +43,20 @@
 #+PROPERTY: header-args:latex+ :post pdf2svg(file=*this*, ext="png")
 :END:
 
+* Build                                                            :noexport:
+#+NAME: startblock
+#+BEGIN_SRC emacs-lisp :results none
+  (add-to-list 'org-latex-classes
+               '("scrartcl"
+                 "\\documentclass{scrartcl}"
+                 ("\\section{%s}" . "\\section*{%s}")
+                 ("\\subsection{%s}" . "\\subsection*{%s}")
+                 ("\\subsubsection{%s}" . "\\subsubsection*{%s}")
+                 ("\\paragraph{%s}" . "\\paragraph*{%s}")
+                 ("\\subparagraph{%s}" . "\\subparagraph*{%s}"))
+               )
+#+END_SRC
+
 * Tutorial: Design concepts for sub-micrometer positioning     :@huub_janssen:
 ** Positioning Terminology
 - *Accuracy*:
@@ -52,14 +71,17 @@
 
 #+name: fig:position_terminology
 #+caption: Accuracy and Repeatability
+#+attr_latex: :scale 0.5
 [[file:./figs/position_terminology.png]]
 
 #+name: fig:position_resolution
 #+caption: Position Resolution
+#+attr_latex: :scale 0.5
 [[file:./figs/position_resolution.png]]
 
 #+name: fig:position_stability
 #+caption: Position Stability
+#+attr_latex: :scale 0.5
 [[file:./figs/position_stability.png]]
 
 ** Principles of accuracy
@@ -69,6 +91,7 @@ The hysteresis can actually help estimating the play and friction present in the
 
 #+name: fig:stiffness_friction
 #+caption: Stiffness, play and Friction
+#+attr_latex: :width \linewidth
 [[file:figs/stiffness_friction.png]]
 
 Ways to make the hysteresis smaller:
@@ -87,6 +110,7 @@ where the virtual play can be estimated as follow:
 
 #+name: fig:position_uncertainty
 #+caption: Hysterestis, play and virtual play
+#+attr_latex: :scale 0.5
 [[file:figs/position_uncertainty.png]]
 
 When considering dynamics, the goal is to make the first resonance frequency much higher than the frequency of the wanted motion.
@@ -110,6 +134,7 @@ Estimate the virtual play of the system in Figure [[fig:case_1]] with following
 
 #+name: fig:case_1
 #+caption: Studied system for "Case 1"
+#+attr_latex: :scale 0.5
 [[file:./figs/case_1.png]]
 
 First the friction force can be calculated as the vertical mass times the friction coefficient:
@@ -142,18 +167,22 @@ Some of them are:
 
 #+name: fig:ball_joint
 #+caption: Ball Joint
+#+attr_latex: :scale 0.5
 [[file:./figs/ball_joint.png]]
 
 #+name: fig:ball_bearing
 #+caption: Ball Bearing
+#+attr_latex: :scale 0.5
 [[file:./figs/ball_bearing.png]]
 
 #+name: fig:roller_bearing
 #+caption: Roller Bearing
+#+attr_latex: :scale 0.5
 [[file:./figs/roller_bearing.png]]
 
 #+name: fig:roller_rail_guide
 #+caption: Roller Rail Guide
+#+attr_latex: :scale 0.5
 [[file:./figs/roller_rail_guide.png]]
 
 ** Compliant elements for constraining DoFs
@@ -163,6 +192,7 @@ An example of a complaint element is shown in Figure [[fig:compliant_leaf]].
 
 #+name: fig:compliant_leaf
 #+caption: Example of 1dof constrained compliant element
+#+attr_latex: :scale 0.5
 [[file:figs/compliant_1dof.png]]
 
 Other types of compliant elements include:
@@ -173,14 +203,17 @@ Other types of compliant elements include:
 
 #+name: fig:leaf_springs
 #+caption: Leaf springs
+#+attr_latex: :scale 0.5
 [[file:./figs/leaf_springs.png]]
 
 #+name: fig:folded_leaf_springs
 #+caption: Folded Leaf springs
+#+attr_latex: :scale 0.5
 [[file:./figs/folded_leaf_springs.png]]
 
 #+name: fig:flexure_pivots
 #+caption: Flexure Pivots (5dof constrained)
+#+attr_latex: :scale 0.5
 [[file:./figs/flexure_pivots.png]]
 
 *** 1dof Parallel Guiding
@@ -199,14 +232,17 @@ Parallel guiding can be made using two leaf springs (Figure [[fig:parallel_guidi
 
 #+name: fig:parallel_guiding
 #+caption: Parallel guiding
+#+attr_latex: :scale 0.5
 [[file:./figs/parallel_guiding.png]]
 
 #+name: fig:buckling
 #+caption: Example of bucklink
+#+attr_latex: :scale 0.5
 [[file:./figs/buckling.png]]
 
 #+name: fig:reinforced_leaf_springs
 #+caption: Reinforced leaf springs
+#+attr_latex: :scale 0.5
 [[file:./figs/reinforced_leaf_springs.png]]
 
 *** Rotation Compliant Mechanism
@@ -217,6 +253,7 @@ Figure [[fig:rotation_leaf_springs]] shows a rotation compliant mechanism:
 
 #+name: fig:rotation_leaf_springs
 #+caption: Example of rotation stage using leaf springs
+#+attr_latex: :scale 0.5
 [[file:./figs/rotation_leaf_springs.png]]
 
 *** Z translation
@@ -229,12 +266,14 @@ This parasitic rotation is however predictable.
 
 #+name: fig:vertical_stage_compliant
 #+caption: Z translation using 5 struts
+#+attr_latex: :scale 0.5
 [[file:./figs/vertical_stage_compliant.png]]
 
 An alternative is to use folder leaf springs (Figure [[fig:vertical_stage_leafs]]), and this avoid the parasitic rotation.
 
 #+name: fig:vertical_stage_leafs
 #+caption: Z translation using 5 folded leaf springs
+#+attr_latex: :scale 0.5
 [[file:./figs/vertical_stage_leafs.png]]
 
 *** X-Y-Rz Stage
@@ -242,10 +281,12 @@ An X-Y-Rz stage can be done either using 3 struts (Figure [[fig:x_y_rz_stage]])
 
 #+name: fig:x_y_rz_stage
 #+caption: X,Y,Rz using 3 struts
+#+attr_latex: :scale 0.5
 [[file:./figs/x_y_rz_stage.png]]
 
 #+name: fig:x_y_rz_leafs
 #+caption: X,Y,Rz using 3 folded leaf springs
+#+attr_latex: :scale 0.5
 [[file:./figs/x_y_rz_leafs.png]]
 
 *** Compliant mechanism with only one fixed dof
@@ -254,6 +295,7 @@ The compliant mechanism shown in Figure [[fig:case_1_leaf_springs]] only constra
 
 #+name: fig:case_1_leaf_springs
 #+caption: 5dof motion, only the Ry is constrained
+#+attr_latex: :scale 0.5
 [[file:./figs/case_1_leaf_springs.png]]
 
 *** Summary
@@ -268,12 +310,14 @@ An example of a complex compliant mechanism is shown in Figure [[fig:compliant_e
 
 #+name: fig:compliant_example_1
 #+caption: Design concept
+#+attr_latex: :scale 0.5
 [[file:./figs/compliant_example_1.png]]
 
 Figure [[fig:linear_bearing_leafs]] shown a reinforced part to avoid buckling and improve vertical stiffness.
 
 #+name: fig:linear_bearing_leafs
 #+caption: Use leaf springs instead of linear roller bearings
+#+attr_latex: :scale 0.5
 [[file:./figs/linear_bearing_leafs.png]]
 
 *** Mechatronics positioning challenge
@@ -299,6 +343,7 @@ To make this stage usable for nano-metric positioning, the following ideas where
 
 #+name: fig:xyRz_positioning_challenge
 #+caption: Example of X-Y-Rz positioning stage
+#+attr_latex: :scale 0.5
 [[file:./figs/xyRz_positioning_challenge.png]]
 
 yt:OjNnHa6O9A8
@@ -315,6 +360,7 @@ Its characteristics are:
 
 #+name: fig:play_free_parallel_stage
 #+caption: Example of a parallel stage that should be converting to a compliant mechanism
+#+attr_latex: :scale 0.5
 [[file:./figs/play_free_parallel_stage.png]]
 
 The goals are to:
@@ -326,6 +372,7 @@ The solution is shown in Figure [[fig:play_free_parallel_stage_solution]].
 
 #+name: fig:play_free_parallel_stage_solution
 #+caption: Case Solution
+#+attr_latex: :width \linewidth
 [[file:./figs/play_free_parallel_stage_solution.png]]
 
 ** Thin plate design
@@ -350,6 +397,7 @@ where $A$ is the area of the cross section.
 
 #+name: fig:thin_plate_torsion
 #+caption: A plate under torsion
+#+attr_latex: :scale 0.5
 [[file:./figs/thin_plate_torsion.png]]
 
 *** Difference between open and close profile
@@ -359,6 +407,7 @@ Just by opening the tube, we have a much smaller torsional stiffness (but almost
 
 #+name: fig:open_close_profil_torsion_stiffness
 #+caption: Stiffness comparison open and closed tube (torsion)
+#+attr_latex: :scale 0.5
 [[file:./figs/open_close_profil_torsion_stiffness.png]]
 
 
@@ -367,12 +416,14 @@ If we remove one side of the cube shown in Figure [[fig:closed_box]], we would h
 
 #+name: fig:closed_box
 #+caption: Closed box.
+#+attr_latex: :scale 0.5
 [[file:./figs/closed_box.png]]
 
 If we use triangles, we obtain high torsional stiffness as shown in Figure [[fig:torsion_stiffness_box_double_triangle]].
 
 #+name: fig:torsion_stiffness_box_double_triangle
 #+caption: Open box (double triangle)
+#+attr_latex: :scale 0.5
 [[file:./figs/torsion_stiffness_box_double_triangle.png]]
 
 Frames are usually corresponding to open-boxes with have a small stiffness in torsion.
@@ -382,6 +433,7 @@ A nice way to have a 1dof flexure guiding with stiff frame is shown in Figure [[
 
 #+name: fig:z_stage_triangles
 #+caption: Box with integrated flexure guiding
+#+attr_latex: :scale 0.5
 [[file:./figs/z_stage_triangles.png]]
 
 * Keynote: Mechatronic challenges in optical lithography        :@hans_butler:
@@ -400,6 +452,7 @@ In this presentation, only the exposure step is discussed (lithography).
 
 #+name: fig:asml_chip_manufacturing_loop
 #+caption: Chip manufacturing loop
+#+attr_latex: :width \linewidth
 [[file:./figs/asml_chip_manufacturing_loop.png]]
 
 ** Imaging process - Basics
@@ -412,6 +465,7 @@ In this presentation, only the exposure step is discussed (lithography).
 
 #+name: fig:asml_imaging_process
 #+caption: Imaging process - basics
+#+attr_latex: :scale 0.5
 [[file:./figs/asml_imaging_process.png]]
 
 ** From stepper to scanner
@@ -424,6 +478,7 @@ This implied many requirements in dynamics and accuracy!
 
 #+name: fig:asml_stepper_to_scanner
 #+caption: From stepper to scanner
+#+attr_latex: :width \linewidth
 [[file:./figs/asml_stepper_to_scanner.png]]
 
 ** Dual stage scanners
@@ -442,6 +497,7 @@ Which are solved by:
 
 #+name: fig:asml_dual_stage_scanners
 #+caption: Machine based on the dual stage scanners
+#+attr_latex: :width \linewidth
 [[file:./figs/asml_dual_stage_scanners.png]]
 
 ** Immersion technology
@@ -458,10 +514,12 @@ Three solutions are used for the positioning control of the "hood" system (Figur
 
 #+name: fig:asml_hood_system
 #+caption: Hood System
+#+attr_latex: :scale 0.5
 [[file:./figs/asml_hood_system.png]]
 
 #+name: fig:asml_immersion
 #+caption: Control system for the "hood"
+#+attr_latex: :scale 0.5
 [[file:./figs/asml_immersion.png]]
 
 ** Multiple Patterning
@@ -481,6 +539,7 @@ The magnet stage can move horizontally (due to reaction forces of the wafer stag
 
 #+name: fig:asml_machine_layout_bis
 #+caption: Machine layout
+#+attr_latex: :width \linewidth
 [[file:./figs/asml_machine_layout_bis.png]]
 
 ** EUV Lithography
@@ -500,18 +559,21 @@ Wafer stage:
 
 #+name: fig:asml_euv
 #+caption: Schematic of the ASML EUV machine
+#+attr_latex: :width \linewidth
 [[file:./figs/asml_euv.png]]
 
 ** The future: high-NA EUV
 
 #+name: fig:asml_na_euv
 #+caption: The CD will be 8nm
+#+attr_latex: :width 0.5\linewidth
 [[file:./figs/asml_na_euv.png]]
 
 In order to do so, high "opening" of the optics is required which is very challenges because the reflectiveness of mirror is decreasing as high angle of incidence (Figure [[fig:asml_reflection_angle]]).
 
 #+name: fig:asml_reflection_angle
 #+caption: Change of reflection of a mirror as a function of the angle of indicence
+#+attr_latex: :scale 0.5
 [[file:./figs/asml_reflection_angle.png]]
 
 ** Challenges for future Optical Lithography machines
@@ -545,6 +607,7 @@ For discrete time controlled systems, there can be an additional limitation: ali
 
 #+name: fig:aliasing_resonances
 #+caption: Example of high frequency lighlty damped resonances
+#+attr_latex: :scale 0.5
 [[file:./figs/aliasing_resonances.png]]
 
 The aliasing of signals is well known (Figure [[fig:aliasing_signals]]).
@@ -553,10 +616,12 @@ However, aliasing in systems can also happens and is schematically shown in Figu
 
 #+name: fig:aliasing_signals
 #+caption: Aliasing of Signals
+#+attr_latex: :scale 0.5
 [[file:./figs/aliasing_signals.png]]
 
 #+name: fig:aliasing_system
 #+caption: Aliasing of Systems
+#+attr_latex: :scale 0.5
 [[file:./figs/aliasing_system.png]]
 
 The poles of the system will be aliased and their location will change in the complex plane as shown in Figure [[fig:aliasing_poles]].
@@ -569,6 +634,7 @@ Therefore, the damping of the aliased resonances are foreseen to have larger dam
 
 #+name: fig:aliasing_poles
 #+caption: Aliasing of poles in the complex plane
+#+attr_latex: :scale 0.5
 [[file:./figs/aliasing_poles.png]]
 
 Let's consider two systems with a resonance:
@@ -583,10 +649,12 @@ Therefore, when identifying a low damped resonance, it could be that it comes fo
 
 #+name: fig:aliasing_above_nyquist
 #+caption: Aliazed resonance shown on the Bode Diagram
+#+attr_latex: :scale 0.5
 [[file:./figs/aliasing_above_nyquist.png]]
 
 #+name: fig:alising_much_above_nyquist
 #+caption: Higher resonance frequency
+#+attr_latex: :scale 0.5
 [[file:./figs/alising_much_above_nyquist.png]]
 
 ** Nature, Modelling and Mitigation of potentially aliasing resonances
@@ -594,12 +662,14 @@ The aliased modes can for instance comes from local modes in the actuators that
 
 #+name: fig:alising_nature
 #+caption: Local vibration mode that will be alized
+#+attr_latex: :scale 0.5
 [[file:./figs/alising_nature.png]]
 
 The proposed idea to better model aliasing resonances is to include more modes in the FEM software as shown in Figure [[fig:aliasing_modeling]] and then perform an order reduction in matlab.
 
 #+name: fig:aliasing_modeling
 #+caption: Common procedure and proposed procedure to include aliazed resonances
+#+attr_latex: :width \linewidth
 [[file:./figs/aliasing_modeling.png]]
 
 ** Anti aliasing filter design
@@ -613,10 +683,12 @@ The proposed idea to better model aliasing resonances is to include more modes i
 
 #+name: fig:alising_filter_introduction
 #+caption: Example of the effect of aliased resonance on the open-loop
+#+attr_latex: :scale 0.5
 [[file:./figs/alising_filter_introduction.png]]
 
 #+name: fig:aliasing_sensitivity_effect
 #+caption: Example of the effect of aliased resonance on sensitivity function
+#+attr_latex: :scale 0.5
 [[file:./figs/aliasing_sensitivity_effect.png]]
 
 *** Concept of equivalent delay
@@ -644,6 +716,7 @@ The proposed idea to better model aliasing resonances is to include more modes i
 
 #+name: fig:aliasing_equivalent_delay
 #+caption: Magnitude, Phase and Phase delay of 3 filters
+#+attr_latex: :scale 0.5
 [[file:./figs/aliasing_equivalent_delay.png]]
 
 *** Budgeting of phase lag
@@ -651,12 +724,14 @@ The budgeting of the phase lag is done by expressing the phase lag of each eleme
 
 #+name: fig:aliasing_budget_phase
 #+caption: Typical control loop with several phase lag / time delays
+#+attr_latex: :width \linewidth
 [[file:./figs/aliasing_budget_phase.png]]
 
 The equivalent delay of each element are listed in Figure [[fig:aliasing_budget_table]].
 
 #+name: fig:aliasing_budget_table
 #+caption: Equivalent delay for all the elements of the control loop
+#+attr_latex: :scale 0.5
 [[file:./figs/aliasing_budget_table.png]]
 
 *** Selecting the filter order
@@ -666,10 +741,12 @@ Some example of Butterworth filters are shown in Figure [[fig:aliasing_filter_or
 
 #+name: fig:aliasing_filter_order_bode
 #+caption: Example of few Butterworth filters
+#+attr_latex: :scale 0.5
 [[file:./figs/aliasing_filter_order_bode.png]]
 
 #+name: fig:aliasing_filter_order_table
 #+caption: Butterworth filters
+#+attr_latex: :scale 0.5
 [[file:./figs/aliasing_filter_order_table.png]]
 
 *** Reducing the phase lag
@@ -678,6 +755,7 @@ The equivalent delay of a low pass (here second order) depends on its damping, s
 
 #+name: fig:aliasing_reduce_phase_lag
 #+caption: Change of the phase delay with the damping of the filter
+#+attr_latex: :scale 0.5
 [[file:./figs/aliasing_reduce_phase_lag.png]]
 
 ** Conclusion
@@ -719,10 +797,12 @@ Anti-aliasing filter design:
 
 #+name: fig:flexure_delta_robot
 #+caption: Picture of the Delta Robot
+#+attr_latex: :scale 0.5
 [[file:./figs/flexure_delta_robot.png]]
 
 #+name: fig:flexure_delta_robot_schematic
 #+caption: x1, x2 x3 are the motor positions. f1,f2 f3 are the force motors. x,y,z are the position of the final point in cartesian coordinates
+#+attr_latex: :width \linewidth
 [[file:./figs/flexure_delta_robot_schematic.png]]
 
 *** Modelling and validation of the delta robot
@@ -734,18 +814,21 @@ The system is then linearized around the working point (Figure [[fig:flexure_equ
 
 #+name: fig:flexure_equations
 #+caption: Linearized equations of the Delta Robot
+#+attr_latex: :width \linewidth
 [[file:./figs/flexure_equations.png]]
 
 Then the parameters are identified from experiment (Figure [[fig:flexure_identification]]).
 
 #+name: fig:flexure_identification
 #+caption: Identification fo the transfer function from $F_1$ to $x_1$
+#+attr_latex: :width \linewidth
 [[file:./figs/flexure_identification.png]]
 
 The measurement of the coupling is move complicated as shown in Figure [[fig:flexure_identification_coupling]].
 
 #+name: fig:flexure_identification_coupling
 #+caption: Problem of identifying the coupling between F1 and x2 at low frequency
+#+attr_latex: :scale 0.5
 [[file:./figs/flexure_identification_coupling.png]]
 
 *** Control design for high trajectory tracking
@@ -758,6 +841,7 @@ Control requirements:
 
 #+name: fig:flexure_control_concept
 #+caption: Control concept used for the Delta robot
+#+attr_latex: :width \linewidth
 [[file:./figs/flexure_control_concept.png]]
 
 *** Electronic board
@@ -767,6 +851,7 @@ A 3 axis servo control board as been developed (Figure [[fig:flexure_electronics
 
 #+name: fig:flexure_electronics_board
 #+caption: Servo control board
+#+attr_latex: :scale 0.5
 [[file:./figs/flexure_electronics_board.png]]]
 
 ** Results
@@ -776,6 +861,7 @@ Step response of the current control loop is shown in Figure [[fig:flexure_curre
 
 #+name: fig:flexure_current_control_results
 #+caption: Step response for the current control loop
+#+attr_latex: :scale 0.5
 [[file:./figs/flexure_current_control_results.png]]
 
 *** Trajectory tracking: results with laser interferometer and encoder
@@ -784,20 +870,24 @@ XY renishaw interferometers used to verify the performance of the system (Figure
 
 #+name: fig:flexure_sensors
 #+caption: Experimental setup to verify the performances of the system
+#+attr_latex: :width \linewidth
 [[file:./figs/flexure_sensors.png]]
 
 Some results are shown in Figures [[fig:flexure_results]], [[fig:flexure_steps]] and [[fig:flexure_dynamics_errors]].
 
 #+name: fig:flexure_results
 #+caption: Circuit motion results and point to point motion results
+#+attr_latex: :width \linewidth
 [[file:./figs/flexure_results.png]]
 
 #+name: fig:flexure_steps
 #+caption: Step response of the system
+#+attr_latex: :width \linewidth
 [[file:./figs/flexure_steps.png]]
 
 #+name: fig:flexure_dynamics_errors
 #+caption: Measured dynamical errors
+#+attr_latex: :width \linewidth
 [[file:./figs/flexure_dynamics_errors.png]]
 
 ** Conclusion
@@ -821,16 +911,19 @@ Flexible eigenmodes are present in every system component and leads to::
 
 #+name: fig:mimo_flexible_modes
 #+caption: Limitation of the control bandwidth due to flexible eigenmodes
+#+attr_latex: :width \linewidth
 [[file:./figs/mimo_flexible_modes.png]]
 
 #+name: fig:mimo_flexible_modes_coupling
 #+caption: Coupling due to flexible eigenmodes
+#+attr_latex: :scale 0.5
 [[file:./figs/mimo_flexible_modes_coupling.png]]
 
 In order to estimate the performances of a system, the sensitivity function can be used (Figure [[fig:mimo_sensitivity_performance]]).
 
 #+name: fig:mimo_sensitivity_performance
 #+caption:Bode plot of a typical Sensitivity function
+#+attr_latex: :scale 0.5
 [[file:./figs/mimo_sensitivity_performance.png]]
 
 ** Performance analysis with different sensitivity functions
@@ -848,6 +941,7 @@ One loop is closed at a time, and the coupling effects are taken into account.
 
 #+name: fig:mimo_sensitivity_functions
 #+caption: Visual representation of the three systems
+#+attr_latex: :scale 0.5
 [[file:./figs/mimo_sensitivity_functions.png]]
 
 ** Example system
@@ -858,6 +952,7 @@ A diagonal PID controller is used.
 
 #+name: fig:mimo_example_system
 #+caption: Schematic representation of the example system
+#+attr_latex: :scale 0.5
 [[file:./figs/mimo_example_system.png]]
 
 
@@ -865,6 +960,7 @@ The bode plot of the MIMO system is shown in Figure [[fig:mimo_example_bode]] wh
 
 #+name: fig:mimo_example_bode
 #+caption: Bode plot of the full MIMO system
+#+attr_latex: :width \linewidth
 [[file:./figs/mimo_example_bode.png]]
 
 In Figure [[fig:mimo_example_sensitivity]] is shown that the sensitivity function computed from the SISO system is not correct.
@@ -873,6 +969,7 @@ However, as expected, the off-diagonal sensibilities are not modelled.
 
 #+name: fig:mimo_example_sensitivity
 #+caption: Bode plots of sensitivity functions
+#+attr_latex: :width \linewidth
 [[file:./figs/mimo_example_sensitivity.png]]
 
 ** Conclusion
@@ -887,6 +984,7 @@ The conclusion are the following and summarized in Figure [[fig:mimo_results]]:
 
 #+name: fig:mimo_results
 #+caption: Comparison of the three methods to deal with a MIMO system
+#+attr_latex: :width \linewidth
 [[file:./figs/mimo_results.png]]
 
 * High-precision motion system design by topology optimization considering additive manufacturing :@arnoud_delissen:
@@ -900,6 +998,7 @@ The goal here is to make the eigen-frequency higher as this will allow more band
 
 #+name: fig:mimoopt_6dof_stage
 #+caption: Schematic of the 6dof levitating stage
+#+attr_latex: :scale 0.5
 [[file:./figs/mimoopt_6dof_stage.png]]
 
 ** Case
@@ -908,6 +1007,7 @@ More precisely, the goal is to automatically maximize the three eigen-frequencie
 
 #+name: fig:mimoopt_case
 #+caption: System to be optimized
+#+attr_latex: :scale 0.3
 [[file:./figs/mimoopt_case.png]]
 
 ** Manufacturing process
@@ -917,6 +1017,7 @@ The process is shown in Figure [[fig:mimoopt_process]].
 
 #+name: fig:mimoopt_process
 #+caption: Manufacturing process
+#+attr_latex: :scale 0.3
 [[file:./figs/mimoopt_process.png]]
 
 ** Topology optimization
@@ -932,6 +1033,7 @@ The number of elements is 1 million (=> 15 minutes per iteration to compute the
 
 #+name: fig:mimoopt_3d_opti
 #+caption: Results of the topology optimization and zoom to see individual elements
+#+attr_latex: :width \linewidth
 [[file:./figs/mimoopt_3d_opti.png]]
 
 ** Performance Comparison
@@ -940,12 +1042,14 @@ The obtained mass and eigen-frequencies of the optimized system and the solid eq
 
 #+name: fig:mimoopt_performance
 #+caption: Comparison of the obtained performances
+#+attr_latex: :width \linewidth
 [[file:./figs/mimoopt_performance.png]]
 
 Identification on the realized system shown that the obtained eigen-frequencies are very closed to the estimated ones (Figure [[fig:mimoopt_frf_identification]]).
 
 #+name: fig:mimoopt_frf_identification
 #+caption: Results very close to simulation (~1% for the eigen frequencies)
+#+attr_latex: :scale 0.5
 [[file:./figs/mimoopt_frf_identification.png]]
 
 ** Conclusion
@@ -973,6 +1077,7 @@ The design trade-off is:
 
 #+name: fig:frf_introduction
 #+caption: schematic of the identification of the FRF
+#+attr_latex: :scale 0.5
 [[file:./figs/frf_introduction.png]]
 
 For SISO systems:
@@ -994,12 +1099,14 @@ This lead to non-optimal FRFs estimation.
 
 #+name: fig:frf_direction_excitation
 #+caption: Example of a SISO approach to identify MIMO FRFs
+#+attr_latex: :width \linewidth
 [[file:./figs/frf_direction_excitation.png]]
 
 When having a MIMO approach and choosing both the direction and gain of the excitation inputs, we can obtained much better FRFs uncertainty while still fulfilling the constraints (Figure [[fig:frf_mimo]]).
 
 #+name: fig:frf_mimo
 #+caption: Example of the MIMO approach that gives much better FRFs
+#+attr_latex: :width \linewidth
 [[file:./figs/frf_mimo.png]]
 
 ** Solving the optimization problem
@@ -1016,6 +1123,7 @@ In this work, two algorithms are proposed and not further detailed here.
 
 #+name: fig:frf_optimization_steps
 #+caption: Two step optimization process
+#+attr_latex: :scale 0.5
 [[file:./figs/frf_optimization_steps.png]]
 
 ** Experimental validation
@@ -1029,6 +1137,7 @@ The obtained FRFs are shown in Figure [[fig:frf_experiment]].
 
 #+name: fig:frf_experiment
 #+caption: Obtained MIMO FRFs
+#+attr_latex: :width \linewidth
 [[file:./figs/frf_experiment.png]]
 
 A comparison of one of the obtained FRFs is shown in Figure [[fig:frf_experiment_optimized]].
@@ -1037,6 +1146,7 @@ The RR proposed algorithm is giving the best results
 
 #+name: fig:frf_experiment_optimized
 #+caption: Example of one of the obtained FRF
+#+attr_latex: :width \linewidth
 [[file:./figs/frf_experiment_optimized.png]]
 
 ** Conclusion
@@ -1055,6 +1165,7 @@ Examples of Nano Coordinate Measuring Machines are shown in Figure [[fig:prec_cm
 
 #+name: fig:prec_cmm
 #+caption: Example of Coordinate Measuring Machines
+#+attr_latex: :width \linewidth
 [[file:./figs/prec_cmm.png]]
 
 ** Difference between CMM and nano-CMM
@@ -1074,7 +1185,8 @@ which is not compatible with nano-meter precisions.
 Then, the classical CMM will not work for nano precision
 
 #+name: fig:prec_cmm_nano_cmm
-#+caption:
+#+caption: Schematic of a CMM
+#+attr_latex: :scale 0.5
 [[file:./figs/prec_cmm_nano_cmm.png]]
 
 ** How to do nano-CMM
@@ -1097,6 +1209,7 @@ The 3D-realization of Abbe-principle is as follows:
 
 #+name: fig:prec_nano_cmm_concept
 #+caption: Error minimal measuring principle
+#+attr_latex: :scale 0.5
 [[file:./figs/prec_nano_cmm_concept.png]]
 
 ** Minimization of residual Abbe error
@@ -1105,6 +1218,7 @@ Still some residual Abbe error can happen as shown in Figure [[fig:prec_abbe_min
 
 #+name: fig:prec_abbe_min
 #+caption: Residual Abbe error
+#+attr_latex: :width \linewidth
 [[file:./figs/prec_abbe_min.png]]
 
 ** Compare of long travel guiding systems
@@ -1113,6 +1227,7 @@ In order to have the Abbe error compatible with nano-meter precision, the precis
 
 #+name: fig:prec_comp_guid
 #+caption: Characteristics of guidings
+#+attr_latex: :scale 0.5
 [[file:./figs/prec_comp_guid.png]]
 
 ** Extended 6 DoF Abbe comparator principle
@@ -1128,6 +1243,7 @@ Without an error-minimal approach, nano-meter precision cannot be achieved in la
 
 #+name: fig:prec_6dof_abbe
 #+caption: Use of additional autocollimator and actuators for Abbe minimization
+#+attr_latex: :width \linewidth
 [[file:./figs/prec_6dof_abbe.png]]
 
 ** Practical Realisation
@@ -1136,6 +1252,7 @@ A practical realization of the Extended 6 DoF Abbe comparator principle is shown
 
 #+name: fig:prec_practical_6dof
 #+caption: Practical Realization of the
+#+attr_latex: :width \linewidth
 [[file:./figs/prec_practical_6dof.png]]
 
 ** Tilt Compensation
@@ -1150,10 +1267,12 @@ To measure compensate for any tilt, two solutions are proposed:
 
 #+name: fig:prec_tilt_corection
 #+caption: Auto-Collimator
+#+attr_latex: :scale 0.5
 [[file:./figs/prec_tilt_corection.png]]
 
 #+name: fig:prec_tilt_corection_bis
 #+caption: 6 Interferometers to measure tilts
+#+attr_latex: :scale 0.5
 [[file:./figs/prec_tilt_corection_bis.png]]
 
 ** Comparison of long travail guiding systems - Bis
@@ -1167,6 +1286,7 @@ Now, if we actively compensate the tilts are shown previously, we can fulfill th
 
 #+name: fig:prec_comp_guid_bis
 #+caption: Characteristics of the tilt compensation system
+#+attr_latex: :width \linewidth
 [[file:./figs/prec_comp_guid_bis.png]]
 
 ** Drive concept
@@ -1180,6 +1300,7 @@ Only one linear voice coil actuator is used which with large moving range and su
 
 #+name: fig:prec_drive_concept
 #+caption: Voice Coil Actuator
+#+attr_latex: :scale 0.5
 [[file:./figs/prec_drive_concept.png]]
 
 
@@ -1198,12 +1319,14 @@ Characteristics:
 
 #+name: fig:prec_mechanics
 #+caption: Picture of the NPMM-200
+#+attr_latex: :width \linewidth
 [[file:./figs/prec_mechanics.png]]
 
 The NPMM-200 actually operates inside a Vacuum chamber as shown in Figure [[fig:prec_vacuum_cham]].
 
 #+name: fig:prec_vacuum_cham
 #+caption: Vacuum chamber used
+#+attr_latex: :scale 0.5
 [[file:./figs/prec_vacuum_cham.png]]
 
 ** measurement capability
@@ -1212,12 +1335,14 @@ Some step responses are shown in Figure [[fig:prec_results_meas]] and show the n
 
 #+name: fig:prec_results_meas
 #+caption: Sub nano-meter position accuracy
+#+attr_latex: :width \linewidth
 [[file:./figs/prec_results_meas.png]]
 
 Picometer steps can even be achieved as shown in Figure [[fig:prec_results_pico]].
 
 #+name: fig:prec_results_pico
 #+caption: Picometer level control
+#+attr_latex: :width 0.6\linewidth
 [[file:./figs/prec_results_pico.png]]
 
 ** Extension of the measuring range (700mm)
@@ -1245,6 +1370,7 @@ This fulfills the Abbe principe but:
 
 #+name: fig:prec_inverse_kin
 #+caption: Tetrahedrical concept
+#+attr_latex: :scale 0.5
 [[file:./figs/prec_inverse_kin.png]]
 
 ** Inverse kinematic concept - Scanning probe principle
@@ -1257,6 +1383,7 @@ An other concept, the scanning probe principle is shown in Figure [[fig:prec_inv
 
 #+name: fig:prec_inverse_kin_scan
 #+caption: Scanning probe principle
+#+attr_latex: :scale 0.5
 [[file:./figs/prec_inverse_kin_scan.png]]
 
 ** Inverse kinematic concept - Compact measuring head
@@ -1268,6 +1395,7 @@ The interferometer used are fiber coupled laser interferometers with a mass of 3
 
 #+name: fig:prec_interferometers
 #+caption: Micro Interferometers
+#+attr_latex: :scale 0.5
 [[file:./figs/prec_interferometers.png]]
 
 The concept is shown in Figure [[fig:prec_inverse_meas_head]]:
@@ -1279,6 +1407,7 @@ There is some abbe offset between measurement axis of probe and of interferomete
 
 #+name: fig:prec_inverse_meas_head
 #+caption:
+#+attr_latex: :scale 0.5
 [[file:./figs/prec_inverse_meas_head.png]]
 
 ** Inverse kinematic concept - Scanning probe principle
@@ -1289,6 +1418,7 @@ Thus the tilt and Abbe errors can be compensated for with sub-nm resolution.
 
 #+name: fig:prec_abbe_compensation
 #+caption: Use of the interferometers to compensate for the Abbe errors
+#+attr_latex: :scale 0.5
 [[file:./figs/prec_abbe_compensation.png]]
 
 ** Conclusion
@@ -1300,20 +1430,23 @@ Proposed approaches to push the nano-positioning and nano-measuring technology:
 - Abbe-error compensation by closed loop control of angular deviations
 
 * Reducing control delay times to enhance dynamic stiffness of magnetic bearings :@jan_philipp_schmidtmann:
-
+** Introduction
 This projects focuses on reducing the control delay times of a magnetic bearing shown in Figure [[fig:magn_bear_intro]].
 
 #+name: fig:magn_bear_intro
 #+caption: 6 DoF Position System - Concept
+#+attr_latex: :width \linewidth
 [[file:./figs/magn_bear_intro.png]]
 
 Active magnetic bearings are unstable systems and require active control.
 However, the active control of magnet forces leads to a control delay that limits the performances (stiffness) of the bearing.
 
+** Time Delay Reduction
 Typical contributors to the control delay time are shown in Figure [[fig:magn_bear_delay]].
 
 #+name: fig:magn_bear_delay
 #+caption: Typical Contributors to control delay time
+#+attr_latex: :width \linewidth
 [[file:./figs/magn_bear_delay.png]]
 
 The reduction of the control time delay will increase the dynamic stiffness of the bearing as well as decrease the effects of external disturbances and hence improve the positioning errors (Figure [[fig:magn_bear_distur]]).
@@ -1325,12 +1458,15 @@ The steps to reduce the control delay time are:
 
 #+name: fig:magn_bear_distur
 #+caption: The effect of control delay on stiffness
+#+attr_latex: :scale 0.5
 [[file:./figs/magn_bear_distur.png]]
 
+** Practical Realization
 Therefore, the position and current control have been merged into one controller (Figure [[fig:magn_controller]]).
 
 #+name: fig:magn_controller
 #+caption: Controller for position and current
+#+attr_latex: :scale 0.5
 [[file:./figs/magn_controller.png]]
 
 A dSpace rapid prototyping system is used for fast position and current control.
@@ -1338,8 +1474,10 @@ Characteristics of the used elements are shown in Figure [[fig:magn_bear_setup]]
 
 #+name: fig:magn_bear_setup
 #+caption: Setup for reduced delay times
+#+attr_latex: :scale 0.5
 [[file:./figs/magn_bear_setup.png]]
 
+** Results
 Differences between the previous PWM controller and the new SiC controller are shown in Figure [[fig:magn_bear_results]].
 The delay time is almost completely eliminated.
 
@@ -1347,6 +1485,7 @@ The delay time is almost completely eliminated.
 #+caption: Reduction of delay in PWM Driver
 [[file:./figs/magn_bear_results.png]]
 
+** Conclusion
 Due to all the performed modifications, the control delay time could be reduced by 80%.
 The next steps for this project are shown in Figure [[fig:magn_bear_conclusion]].
 
@@ -1362,6 +1501,7 @@ However, these models are usually not used after control system is implemented (
 
 #+name: fig:twins_motivation
 #+caption: Typical of of models in a mechatronic system
+#+attr_latex: :width \linewidth
 [[file:./figs/twins_motivation.png]]
 
 Here, the models are exploited to monitor the system and predict future possible failures in the system.
@@ -1369,6 +1509,7 @@ Use models as digital twin for *fault detection and Isolation for predictive mai
 
 #+name: fig:twing_fdi
 #+caption: FDI is using the model of the plant
+#+attr_latex: :scale 0.5
 [[file:./figs/twing_fdi.png]]
 
 ** Predictive Maintenance
@@ -1376,12 +1517,14 @@ Classical maintenance happens when the system is not working anymore as shown in
 
 #+name: fig:twins_predictive_maintenance
 #+caption: Maintenance done when a failure is appearing
+#+attr_latex: :width \linewidth
 [[file:./figs/twins_predictive_maintenance.png]]
 
 It is possible to perform some preventive maintenance before a failure happens, but this is still not optimal.
 
 #+name: fig:twins_predictive_maintenance_bis
 #+caption: Preventive Maintenance
+#+attr_latex: :width \linewidth
 [[file:./figs/twins_predictive_maintenance_bis.png]]
 
 The idea here is to predict when the failure will happen in order to only do maintenance only when really necessary.
@@ -1389,6 +1532,7 @@ This will minimize the down time of the machine.
 
 #+name: fig:twins_predictive_maintenance_ter
 #+caption: Predictive maintenance
+#+attr_latex: :width \linewidth
 [[file:./figs/twins_predictive_maintenance_ter.png]]
 
 ** Objectives
@@ -1408,6 +1552,7 @@ This should take into account the control loop, interaction in the system and be
 
 #+name: fig:twings_fdi_test
 #+caption: Test System
+#+attr_latex: :scale 0.5
 [[file:./figs/twings_fdi_test.png]]
 
 The architecture to estimate faults in the system is shown in Figure [[fig:twins_null_space_fdi]].
@@ -1415,12 +1560,14 @@ The goal is to design $Q_u$ and $Q_y$ such that $\epsilon$ is a representation o
 
 #+name: fig:twins_null_space_fdi
 #+caption: Residual Generator
+#+attr_latex: :scale 0.4
 [[file:./figs/twins_null_space_fdi.png]]
 
 When a fault happens (Figure [[fig:twins_results_fdi]]), the outputs signals are not changing that much (because of feedback), however the system is able to find that there is a problem using the residual $\epsilon$.
 
 #+name: fig:twins_results_fdi
 #+caption: Simulation Results
+#+attr_latex: :width \linewidth
 [[file:./figs/twins_results_fdi.png]]
 
 *Procedure*:
@@ -1437,9 +1584,10 @@ Moreover, from the fault detection, predictive maintenance should be performed (
 
 #+name: fig:twins_roadmap
 #+caption: From proof of principle to industrial application
+#+attr_latex: :width \linewidth
 [[file:./figs/twins_roadmap.png]]
 
 #+name: fig:twins_roadmap_bis
 #+caption: From fault detection to predictive maintenance
+#+attr_latex: :width \linewidth
 [[file:./figs/twins_roadmap_bis.png]]
-