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@ -443,6 +443,9 @@ A nice way to have a 1dof flexure guiding with stiff frame is shown in Figure [[
[[file:./figs/z_stage_triangles.png]] [[file:./figs/z_stage_triangles.png]]
* Keynote: Mechatronic challenges in optical lithography :@hans_butler: * Keynote: Mechatronic challenges in optical lithography :@hans_butler:
yt:DF8GrWlMwEE
** Introduction ** Introduction
*Question*: in chip manufacturing, how do developments in optical lithography impact the mechatronic design? *Question*: in chip manufacturing, how do developments in optical lithography impact the mechatronic design?
@ -605,6 +608,280 @@ The conclusions are:
- EUV: all-vacuum stages - EUV: all-vacuum stages
- High-NA EUV: new optics, much larger accelerations - High-NA EUV: new optics, much larger accelerations
* Keynote: High precision mechatronic approaches for advanced nanopositioning and nanomeasuring technologies :@eberhard_manske:
yt:6hSWI1wtjfo
** Coordinate Measurement Machines (CMM)
Examples of Nano Coordinate Measuring Machines are shown in Figure [[fig:prec_cmm]].
#+name: fig:prec_cmm
#+caption: Example of Coordinate Measuring Machines
#+attr_latex: :width \linewidth
[[file:./figs/prec_cmm.png]]
** Difference between CMM and nano-CMM
With classical CMM, the Abbe-principle is not fulfilled in the x and y directions (Figure [[fig:prec_cmm_nano_cmm]]).
The Abbe error can be determined with:
\begin{equation}
\Delta l_{x,y,z} = l_{x,y,z} \sin \Delta \phi_{x,y,z}
\end{equation}
Even with the best spindle: $l_{x,y} = 100 mm$ and $\Delta \phi = 2 \text{arcsec}$, we obtain an error of:
\begin{equation}
\Delta l = 0.1 \mu m
\end{equation}
which is not compatible with nano-meter precisions.
Then, the classical CMM will not work for nano precision
#+name: fig:prec_cmm_nano_cmm
#+caption: Schematic of a CMM
#+attr_latex: :scale 0.5
[[file:./figs/prec_cmm_nano_cmm.png]]
** How to do nano-CMM
High precision mechatronic approaches are required for advanced nano-positionign and nano-measuring technologies:
- High precision measurement concept
- High precision measurement systems
- High precision nano-sensors
Combined with:
- Advanced automatic control
- Advanced measuring strategies
** Concept - Minimization of the Abbe Error
In order to minimize the Abbe error, the measuring "lines" should have a common point of intersection (Figure [[fig:prec_nano_cmm_concept]]).
The 3D-realization of Abbe-principle is as follows:
- 3 interferometers: cartesian coordinate system
- probe located as the intersection point of the interferometers
#+name: fig:prec_nano_cmm_concept
#+caption: Error minimal measuring principle
#+attr_latex: :scale 0.5
[[file:./figs/prec_nano_cmm_concept.png]]
** Minimization of residual Abbe error
Still some residual Abbe error can happen as shown in Figure [[fig:prec_abbe_min]] due to both a change of angle and change of position.
#+name: fig:prec_abbe_min
#+caption: Residual Abbe error
#+attr_latex: :width \linewidth
[[file:./figs/prec_abbe_min.png]]
** Compare of long travel guiding systems
In order to have the Abbe error compatible with nano-meter precision, the precision of the spindle should be less and one arcsec which is not easily feasible with air bearing of precision roller bearing technologies as shown in Figure [[fig:prec_comp_guid]].
#+name: fig:prec_comp_guid
#+caption: Characteristics of guidings
#+attr_latex: :scale 0.5
[[file:./figs/prec_comp_guid.png]]
** Extended 6 DoF Abbe comparator principle
The solution used was to measure in real time the angles of the frame using autocollimators as shown in Figure [[fig:prec_6dof_abbe]] and then to minimize this tilt by close loop operation with additional actuators.
The angular measurement error and control is less than $0.05 \text{arcses}$ which make the residual Abbe error:
\begin{equation}
\Delta l < 0.05\,nm
\end{equation}
Without an error-minimal approach, nano-meter precision cannot be achieved in large areas.
#+name: fig:prec_6dof_abbe
#+caption: Use of additional autocollimator and actuators for Abbe minimization
#+attr_latex: :width \linewidth
[[file:./figs/prec_6dof_abbe.png]]
** Practical Realisation
A practical realization of the Extended 6 DoF Abbe comparator principle is shown in Figure [[fig:prec_practical_6dof]].
#+name: fig:prec_practical_6dof
#+caption: Practical Realization of the
#+attr_latex: :width \linewidth
[[file:./figs/prec_practical_6dof.png]]
** Tilt Compensation
To measure compensate for any tilt, two solutions are proposed:
1. Use a zero point angular auto-collimator (Figure [[fig:prec_tilt_corection]])
- Resolution: 0.005 arcsec
- Stability (1h): < 0.05 arcsec
2. 6 DoF laser interferoemter (Figure [[fig:prec_tilt_corection_bis]])
- Resolution: 0.00002 arcsec
- Stability (1h): < 0.00005 arcsec
#+name: fig:prec_tilt_corection
#+caption: Auto-Collimator
#+attr_latex: :scale 0.5
[[file:./figs/prec_tilt_corection.png]]
#+name: fig:prec_tilt_corection_bis
#+caption: 6 Interferometers to measure tilts
#+attr_latex: :scale 0.5
[[file:./figs/prec_tilt_corection_bis.png]]
** Comparison of long travail guiding systems - Bis
Now, if we actively compensate the tilts are shown previously, we can fulfill the requirements as shown in Figure [[fig:prec_comp_guid_bis]].
*Measurement and control technology to minimize Abbe errors to achieve*:
- sub-nanometer precision
- smaller moving mass
- better dynamics
#+name: fig:prec_comp_guid_bis
#+caption: Characteristics of the tilt compensation system
#+attr_latex: :width \linewidth
[[file:./figs/prec_comp_guid_bis.png]]
** Drive concept
Usually, in order to achieve a large range over small resolution, each axis of motion is a combination of a coarse motion and a fine motion stage.
The coarse motion stage generally consist of a stepper motor while the fine motion is a piezoelectric actuator.
The approach here is to use an *homogenous drive concept for increase dynamics* (Figure [[fig:prec_drive_concept]]).
Only one linear voice coil actuator is used which with large moving range and sub-nanometer resolution can be achieve at one time.
#+name: fig:prec_drive_concept
#+caption: Voice Coil Actuator
#+attr_latex: :scale 0.5
[[file:./figs/prec_drive_concept.png]]
** NPMM-200 with extended measuring volume
The NPMM-200 machine can be seen in Figure [[fig:prec_mechanics]].
Characteristics:
- Measuring range: 200 mm x 200 mm x 25 mm
- Resolution: 20 pm
- Abbe comparator principle
- 6 laser interferometers
- Active angular compensation
- Position uncertainty < 4 nm
- Measuring uncertainty up to 30 nm
#+name: fig:prec_mechanics
#+caption: Picture of the NPMM-200
#+attr_latex: :width \linewidth
[[file:./figs/prec_mechanics.png]]
The NPMM-200 actually operates inside a Vacuum chamber as shown in Figure [[fig:prec_vacuum_cham]].
#+name: fig:prec_vacuum_cham
#+caption: Vacuum chamber used
#+attr_latex: :scale 0.5
[[file:./figs/prec_vacuum_cham.png]]
** measurement capability
Some step responses are shown in Figure [[fig:prec_results_meas]] and show the nano-metric precision of the machine.
#+name: fig:prec_results_meas
#+caption: Sub nano-meter position accuracy
#+attr_latex: :width \linewidth
[[file:./figs/prec_results_meas.png]]
Picometer steps can even be achieved as shown in Figure [[fig:prec_results_pico]].
#+name: fig:prec_results_pico
#+caption: Picometer level control
#+attr_latex: :width 0.6\linewidth
[[file:./figs/prec_results_pico.png]]
** Extension of the measuring range (700mm)
If the measuring range is to be increase, there are some limits of the moving stage principle:
- large moving masses (~300kg)
- powerful drive systems required
- nano-meter position capability problematic
- large heat dissipation in the system
- dynamics and dynamic deformation
The proposed solution is to use *inverse dynamic concept for minimization of moving masses*.
** Inverse kinematic concept - Tetrahedrical concept
The proposed concept is shown in Figure [[fig:prec_inverse_kin]]:
- mirrors and object to be measured are fixed
- probe and interferometer heads are moved
- laser beams virtually intersect in the probe tip
- Tetrahedrical measuring volume
This fulfills the Abbe principe but:
- large construction space
- difficult guide and drive concept
#+name: fig:prec_inverse_kin
#+caption: Tetrahedrical concept
#+attr_latex: :scale 0.5
[[file:./figs/prec_inverse_kin.png]]
** Inverse kinematic concept - Scanning probe principle
An other concept, the scanning probe principle is shown in Figure [[fig:prec_inverse_kin_scan]]:
- cuboidal measuring volume
- Fixed x-y-z mirrors
- moving measuring head
- guide and drive system outside measuring volume
#+name: fig:prec_inverse_kin_scan
#+caption: Scanning probe principle
#+attr_latex: :scale 0.5
[[file:./figs/prec_inverse_kin_scan.png]]
** Inverse kinematic concept - Compact measuring head
In order to minimize the moving mass, compact measuring heads have been developed.
The goal was to make a lightweight measuring head (<1kg)
The interferometer used are fiber coupled laser interferometers with a mass of 37g (Figure [[fig:prec_interferometers]]).
#+name: fig:prec_interferometers
#+caption: Micro Interferometers
#+attr_latex: :scale 0.5
[[file:./figs/prec_interferometers.png]]
The concept is shown in Figure [[fig:prec_inverse_meas_head]]:
- 6dof interferometers are used
- one micro-probe
- the total mass of the head is less than 1kg
There is some abbe offset between measurement axis of probe and of interferometer but *Abbe error compensation by closed loop control of angular deviations* is used.
#+name: fig:prec_inverse_meas_head
#+caption:
#+attr_latex: :scale 0.5
[[file:./figs/prec_inverse_meas_head.png]]
** Inverse kinematic concept - Scanning probe principle
As shown in Figure [[fig:prec_abbe_compensation]], the abbe error can be compensated from the two top interferometers as:
\[ \text{for } l_x = a: \quad \Delta l_{\text{Abbe}} = \Delta l_{\text{int}} \]
Thus the tilt and Abbe errors can be compensated for with sub-nm resolution.
#+name: fig:prec_abbe_compensation
#+caption: Use of the interferometers to compensate for the Abbe errors
#+attr_latex: :scale 0.5
[[file:./figs/prec_abbe_compensation.png]]
** Conclusion
Proposed approaches to push the nano-positioning and nano-measuring technology:
- Measurement and control technology to minimize Abbe errors
- Homogeneous drive concept for increased dynamics
- Inverse kinematic concept for minimization of moving mass
- Abbe-error compensation by closed loop control of angular deviations
* Designing anti-aliasing-filters for control loops of mechatronic systems regarding the rejection of aliased resonances :@ulrich_schonhoff: * Designing anti-aliasing-filters for control loops of mechatronic systems regarding the rejection of aliased resonances :@ulrich_schonhoff:
** The phenomenon of aliasing of resonances ** The phenomenon of aliasing of resonances
Weakly damped flexible modes of the mechanism can limit the performance of motion control systems. Weakly damped flexible modes of the mechanism can limit the performance of motion control systems.
@ -1164,277 +1441,6 @@ The RR proposed algorithm is giving the best results
- Computationally tractable design framework for large scale MIMO systems established - Computationally tractable design framework for large scale MIMO systems established
- Near global optimal quality achieved on wafer stage setup using RR algorithm - Near global optimal quality achieved on wafer stage setup using RR algorithm
* Keynote: High precision mechatronic approaches for advanced nanopositioning and nanomeasuring technologies :@eberhard_manske:
** Coordinate Measurement Machines (CMM)
Examples of Nano Coordinate Measuring Machines are shown in Figure [[fig:prec_cmm]].
#+name: fig:prec_cmm
#+caption: Example of Coordinate Measuring Machines
#+attr_latex: :width \linewidth
[[file:./figs/prec_cmm.png]]
** Difference between CMM and nano-CMM
With classical CMM, the Abbe-principle is not fulfilled in the x and y directions (Figure [[fig:prec_cmm_nano_cmm]]).
The Abbe error can be determined with:
\begin{equation}
\Delta l_{x,y,z} = l_{x,y,z} \sin \Delta \phi_{x,y,z}
\end{equation}
Even with the best spindle: $l_{x,y} = 100 mm$ and $\Delta \phi = 2 \text{arcsec}$, we obtain an error of:
\begin{equation}
\Delta l = 0.1 \mu m
\end{equation}
which is not compatible with nano-meter precisions.
Then, the classical CMM will not work for nano precision
#+name: fig:prec_cmm_nano_cmm
#+caption: Schematic of a CMM
#+attr_latex: :scale 0.5
[[file:./figs/prec_cmm_nano_cmm.png]]
** How to do nano-CMM
High precision mechatronic approaches are required for advanced nano-positionign and nano-measuring technologies:
- High precision measurement concept
- High precision measurement systems
- High precision nano-sensors
Combined with:
- Advanced automatic control
- Advanced measuring strategies
** Concept - Minimization of the Abbe Error
In order to minimize the Abbe error, the measuring "lines" should have a common point of intersection (Figure [[fig:prec_nano_cmm_concept]]).
The 3D-realization of Abbe-principle is as follows:
- 3 interferometers: cartesian coordinate system
- probe located as the intersection point of the interferometers
#+name: fig:prec_nano_cmm_concept
#+caption: Error minimal measuring principle
#+attr_latex: :scale 0.5
[[file:./figs/prec_nano_cmm_concept.png]]
** Minimization of residual Abbe error
Still some residual Abbe error can happen as shown in Figure [[fig:prec_abbe_min]] due to both a change of angle and change of position.
#+name: fig:prec_abbe_min
#+caption: Residual Abbe error
#+attr_latex: :width \linewidth
[[file:./figs/prec_abbe_min.png]]
** Compare of long travel guiding systems
In order to have the Abbe error compatible with nano-meter precision, the precision of the spindle should be less and one arcsec which is not easily feasible with air bearing of precision roller bearing technologies as shown in Figure [[fig:prec_comp_guid]].
#+name: fig:prec_comp_guid
#+caption: Characteristics of guidings
#+attr_latex: :scale 0.5
[[file:./figs/prec_comp_guid.png]]
** Extended 6 DoF Abbe comparator principle
The solution used was to measure in real time the angles of the frame using autocollimators as shown in Figure [[fig:prec_6dof_abbe]] and then to minimize this tilt by close loop operation with additional actuators.
The angular measurement error and control is less than $0.05 \text{arcses}$ which make the residual Abbe error:
\begin{equation}
\Delta l < 0.05\,nm
\end{equation}
Without an error-minimal approach, nano-meter precision cannot be achieved in large areas.
#+name: fig:prec_6dof_abbe
#+caption: Use of additional autocollimator and actuators for Abbe minimization
#+attr_latex: :width \linewidth
[[file:./figs/prec_6dof_abbe.png]]
** Practical Realisation
A practical realization of the Extended 6 DoF Abbe comparator principle is shown in Figure [[fig:prec_practical_6dof]].
#+name: fig:prec_practical_6dof
#+caption: Practical Realization of the
#+attr_latex: :width \linewidth
[[file:./figs/prec_practical_6dof.png]]
** Tilt Compensation
To measure compensate for any tilt, two solutions are proposed:
1. Use a zero point angular auto-collimator (Figure [[fig:prec_tilt_corection]])
- Resolution: 0.005 arcsec
- Stability (1h): < 0.05 arcsec
2. 6 DoF laser interferoemter (Figure [[fig:prec_tilt_corection_bis]])
- Resolution: 0.00002 arcsec
- Stability (1h): < 0.00005 arcsec
#+name: fig:prec_tilt_corection
#+caption: Auto-Collimator
#+attr_latex: :scale 0.5
[[file:./figs/prec_tilt_corection.png]]
#+name: fig:prec_tilt_corection_bis
#+caption: 6 Interferometers to measure tilts
#+attr_latex: :scale 0.5
[[file:./figs/prec_tilt_corection_bis.png]]
** Comparison of long travail guiding systems - Bis
Now, if we actively compensate the tilts are shown previously, we can fulfill the requirements as shown in Figure [[fig:prec_comp_guid_bis]].
*Measurement and control technology to minimize Abbe errors to achieve*:
- sub-nanometer precision
- smaller moving mass
- better dynamics
#+name: fig:prec_comp_guid_bis
#+caption: Characteristics of the tilt compensation system
#+attr_latex: :width \linewidth
[[file:./figs/prec_comp_guid_bis.png]]
** Drive concept
Usually, in order to achieve a large range over small resolution, each axis of motion is a combination of a coarse motion and a fine motion stage.
The coarse motion stage generally consist of a stepper motor while the fine motion is a piezoelectric actuator.
The approach here is to use an *homogenous drive concept for increase dynamics* (Figure [[fig:prec_drive_concept]]).
Only one linear voice coil actuator is used which with large moving range and sub-nanometer resolution can be achieve at one time.
#+name: fig:prec_drive_concept
#+caption: Voice Coil Actuator
#+attr_latex: :scale 0.5
[[file:./figs/prec_drive_concept.png]]
** NPMM-200 with extended measuring volume
The NPMM-200 machine can be seen in Figure [[fig:prec_mechanics]].
Characteristics:
- Measuring range: 200 mm x 200 mm x 25 mm
- Resolution: 20 pm
- Abbe comparator principle
- 6 laser interferometers
- Active angular compensation
- Position uncertainty < 4 nm
- Measuring uncertainty up to 30 nm
#+name: fig:prec_mechanics
#+caption: Picture of the NPMM-200
#+attr_latex: :width \linewidth
[[file:./figs/prec_mechanics.png]]
The NPMM-200 actually operates inside a Vacuum chamber as shown in Figure [[fig:prec_vacuum_cham]].
#+name: fig:prec_vacuum_cham
#+caption: Vacuum chamber used
#+attr_latex: :scale 0.5
[[file:./figs/prec_vacuum_cham.png]]
** measurement capability
Some step responses are shown in Figure [[fig:prec_results_meas]] and show the nano-metric precision of the machine.
#+name: fig:prec_results_meas
#+caption: Sub nano-meter position accuracy
#+attr_latex: :width \linewidth
[[file:./figs/prec_results_meas.png]]
Picometer steps can even be achieved as shown in Figure [[fig:prec_results_pico]].
#+name: fig:prec_results_pico
#+caption: Picometer level control
#+attr_latex: :width 0.6\linewidth
[[file:./figs/prec_results_pico.png]]
** Extension of the measuring range (700mm)
If the measuring range is to be increase, there are some limits of the moving stage principle:
- large moving masses (~300kg)
- powerful drive systems required
- nano-meter position capability problematic
- large heat dissipation in the system
- dynamics and dynamic deformation
The proposed solution is to use *inverse dynamic concept for minimization of moving masses*.
** Inverse kinematic concept - Tetrahedrical concept
The proposed concept is shown in Figure [[fig:prec_inverse_kin]]:
- mirrors and object to be measured are fixed
- probe and interferometer heads are moved
- laser beams virtually intersect in the probe tip
- Tetrahedrical measuring volume
This fulfills the Abbe principe but:
- large construction space
- difficult guide and drive concept
#+name: fig:prec_inverse_kin
#+caption: Tetrahedrical concept
#+attr_latex: :scale 0.5
[[file:./figs/prec_inverse_kin.png]]
** Inverse kinematic concept - Scanning probe principle
An other concept, the scanning probe principle is shown in Figure [[fig:prec_inverse_kin_scan]]:
- cuboidal measuring volume
- Fixed x-y-z mirrors
- moving measuring head
- guide and drive system outside measuring volume
#+name: fig:prec_inverse_kin_scan
#+caption: Scanning probe principle
#+attr_latex: :scale 0.5
[[file:./figs/prec_inverse_kin_scan.png]]
** Inverse kinematic concept - Compact measuring head
In order to minimize the moving mass, compact measuring heads have been developed.
The goal was to make a lightweight measuring head (<1kg)
The interferometer used are fiber coupled laser interferometers with a mass of 37g (Figure [[fig:prec_interferometers]]).
#+name: fig:prec_interferometers
#+caption: Micro Interferometers
#+attr_latex: :scale 0.5
[[file:./figs/prec_interferometers.png]]
The concept is shown in Figure [[fig:prec_inverse_meas_head]]:
- 6dof interferometers are used
- one micro-probe
- the total mass of the head is less than 1kg
There is some abbe offset between measurement axis of probe and of interferometer but *Abbe error compensation by closed loop control of angular deviations* is used.
#+name: fig:prec_inverse_meas_head
#+caption:
#+attr_latex: :scale 0.5
[[file:./figs/prec_inverse_meas_head.png]]
** Inverse kinematic concept - Scanning probe principle
As shown in Figure [[fig:prec_abbe_compensation]], the abbe error can be compensated from the two top interferometers as:
\[ \text{for } l_x = a: \quad \Delta l_{\text{Abbe}} = \Delta l_{\text{int}} \]
Thus the tilt and Abbe errors can be compensated for with sub-nm resolution.
#+name: fig:prec_abbe_compensation
#+caption: Use of the interferometers to compensate for the Abbe errors
#+attr_latex: :scale 0.5
[[file:./figs/prec_abbe_compensation.png]]
** Conclusion
Proposed approaches to push the nano-positioning and nano-measuring technology:
- Measurement and control technology to minimize Abbe errors
- Homogeneous drive concept for increased dynamics
- Inverse kinematic concept for minimization of moving mass
- Abbe-error compensation by closed loop control of angular deviations
* Reducing control delay times to enhance dynamic stiffness of magnetic bearings :@jan_philipp_schmidtmann: * Reducing control delay times to enhance dynamic stiffness of magnetic bearings :@jan_philipp_schmidtmann:
** Introduction ** Introduction
This projects focuses on reducing the control delay times of a magnetic bearing shown in Figure [[fig:magn_bear_intro]]. This projects focuses on reducing the control delay times of a magnetic bearing shown in Figure [[fig:magn_bear_intro]].