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% Created 2021-07-22 jeu. 11:33
% Created 2021-07-22 jeu. 23:48
% Intended LaTeX compiler: pdflatex
\documentclass[aspectratio=169, t]{clean-beamer}
\usepackage[utf8]{inputenc}
@@ -61,40 +61,42 @@
\maketitle
\section*{Introduction}
\begin{frame}[label={sec:org289143a}]{The ID31 Micro Station}
\label{sec:org2f2f7e5}
\begin{frame}[label={sec:org7a284a6}]{The ID31 Micro Station}
\begin{center}
\includegraphics[scale=1,width=0.95\linewidth]{figs/micro_hexapod_render.pdf}
\end{center}
\begin{tikzpicture}[remember picture,overlay]
\node[anchor=north east, padding=5pt] at (current page.north east){%
\node[anchor=north east] at (current page.north east){%
\includegraphics[width=2em]{figs/icon_animation.pdf}};
\end{tikzpicture}
\end{frame}
\begin{frame}[label={sec:org582891f}]{Introduction - The Nano Active Stabilization System}
\begin{frame}[label={sec:org5dbf487}]{Introduction - The Nano Active Stabilization System}
\textbf{Objective}: Improve the position accuracy from \(\approx 10\,\mu m\) down to \(\approx 10\,nm\) \newline
\textbf{Design approach}: ``Model based design'' / ``Predictive Design''
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/nass-concept.pdf}
\includegraphics[scale=1,width=\linewidth]{figs/nass-concept.red.pdf}
\end{center}
\end{frame}
\begin{frame}[label={sec:orgbb61f47}]{Overview of the Mechatronic Approach - Model Based Design}
\begin{frame}[label={sec:org8665237}]{Overview of the Mechatronic Approach - Model Based Design}
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/nass_mechatronics_approach.png}
\end{center}
\end{frame}
\section{Conceptual Phase}
\begin{frame}[label={sec:orgaeb9beb}]{Outline - Conceptual Phase}
\label{sec:org0e45181}
\begin{frame}[label={sec:org66fab8a}]{Outline - Conceptual Phase}
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/nass_mechatronics_approach_conceptual_phase.pdf}
\end{center}
\end{frame}
\begin{frame}[label={sec:orgf4201d6}]{Feedback Control - The Control Loop}
\begin{frame}[label={sec:org5582b03}]{Feedback Control - The Control Loop}
\vspace{-1em}
\begin{center}
@@ -125,7 +127,7 @@
\end{columns}
\end{frame}
\begin{frame}[label={sec:org79cdad4}]{Noise Budgeting and Required Control Bandwidth}
\begin{frame}[label={sec:org95d167f}]{Noise Budgeting and Required Control Bandwidth}
\vspace{-1em}
\begin{center}
@@ -133,7 +135,7 @@
\end{center}
\end{frame}
\begin{frame}[label={sec:org176e59b}]{Limitation of the Controller Bandwidth?}
\begin{frame}[label={sec:orgce8e920}]{Limitation of the Controller Bandwidth?}
\begin{columns}
\begin{column}{0.6\columnwidth}
\vspace{-2em}
@@ -192,7 +194,7 @@ Complex controllers
\end{columns}
\end{frame}
\begin{frame}[label={sec:org21bb7d1}]{Soft or Stiff \(\nu\text{-hexapod}\) ? Interaction with the \(\mu\text{-station}\)}
\begin{frame}[label={sec:orge61676f}]{Soft or Stiff \(\nu\text{-hexapod}\) ? Interaction with the \(\mu\text{-station}\)}
\vspace{-3em}
\begin{columns}
\begin{column}{0.3\columnwidth}
@@ -231,7 +233,7 @@ Complex controllers
\end{columns}
\end{frame}
\begin{frame}[label={sec:org12c046c}]{Complexity of the Micro-Station Dynamics (Model Analysis)}
\begin{frame}[label={sec:orgfa52d1c}]{Complexity of the Micro-Station Dynamics (Model Analysis)}
\vspace{-1em}
\begin{center}
@@ -239,12 +241,12 @@ Complex controllers
\end{center}
\begin{tikzpicture}[remember picture,overlay]
\node[anchor=north east, padding=5pt] at (current page.north east){%
\node[anchor=north east] at (current page.north east){%
\includegraphics[width=2em]{figs/icon_animation.pdf}};
\end{tikzpicture}
\end{frame}
\begin{frame}[label={sec:org1ffb21e}]{Control Strategy: HAC-LAC}
\begin{frame}[label={sec:org82c9a46}]{Control Strategy: HAC-LAC}
\vspace{-0.5em}
\begin{center}
@@ -278,7 +280,7 @@ Complex controllers
\end{columns}
\end{frame}
\begin{frame}[label={sec:org4b89eaa}]{Multi-Body Models - Simulations}
\begin{frame}[label={sec:org8694100}]{Multi-Body Models - Simulations}
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/simscape_simulation.jpg}
\end{center}
@@ -294,33 +296,40 @@ Complex controllers
\end{tikzpicture}
\begin{tikzpicture}[remember picture,overlay]
\node[anchor=north east, padding=5pt] at (current page.north east){%
\node[anchor=north east] at (current page.north east){%
\includegraphics[width=2em]{figs/icon_animation.pdf}};
\end{tikzpicture}
\end{frame}
\section{Detail Design Phase}
\begin{frame}[label={sec:org94436e6}]{Outline - Detail Design Phase}
\label{sec:orgff27fa3}
\begin{frame}[label={sec:orgf7e1c30}]{Outline - Detail Design Phase}
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/nass_mechatronics_approach_detailed_phase.pdf}
\end{center}
\end{frame}
\begin{frame}[label={sec:org7d8abb1}]{Nano-Hexapod Overview - Key elements}
\vspace{2em}
\begin{frame}[label={sec:org133ceaa}]{Nano-Hexapod Overview - Key elements}
\vspace{-1.5em}
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/nano_hexapod_elements.red.pdf}
\end{center}
\begin{tcolorbox}[title=General Specifications, sidebyside]
\begin{itemize}
\item Flexible modes as high as possible
\item Only flexible elements (no backlash, play, etc.)
\end{itemize}
\tcblower
\begin{itemize}
\item Integrated Force Sensor and Displacement Sensor
\item Predictable dynamics
\end{itemize}
\end{tcolorbox}
\end{frame}
\begin{frame}[label={sec:orgf39c76d}]{Include Flexible Elements in a Multi-Body model}
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/super_element_simscape.pdf}
\end{center}
\end{frame}
\begin{frame}[label={sec:orgc3f2ae5}]{Choice of Actuator - Amplifier Piezoelectric Actuator}
\begin{frame}[label={sec:org276a69c}]{Choice of Actuator and Flexible Joint Design}
\vspace{-2em}
\begin{columns}
\begin{column}{0.5\columnwidth}
@@ -349,83 +358,23 @@ High Resolution & \SI{< 5}{\nano\meter} & \SI{3}{\nano\meter}\\
\end{column}
\begin{column}{0.5\columnwidth}
\vspace{-1em}
\begin{columns}
\begin{column}{0.4\columnwidth}
\begin{figure}[htbp]
\centering
\includegraphics[scale=1,width=0.8\linewidth]{figs/2dof_apa_model.pdf}
\caption{2-DoF Model}
\end{figure}
\end{column}
\begin{column}{0.6\columnwidth}
\vspace{-1.6em}
\begin{figure}[htbp]
\centering
\includegraphics[scale=1,width=0.9\linewidth]{figs/mesh_APA_schematic.pdf}
\caption{APA Finite Element Model}
\end{figure}
\end{column}
\end{columns}
\begin{figure}[htbp]
\centering
\includegraphics[scale=1,width=\linewidth]{figs/mode_shapes_annotated.pdf}
\caption{Flexible Modes due to limited APA stiffness}
\end{figure}
\end{column}
\end{columns}
\end{frame}
\begin{frame}[label={sec:orge19396b}]{Flexible Joints - Specifications and Optimization}
\vspace{-2em}
\begin{columns}
\begin{column}{0.7\columnwidth}
\scriptsize
\begin{center}
\begin{tabularx}{0.9\linewidth}{cccc}
\toprule
\textbf{Goal} & \textbf{Stiffness} & \textbf{Specs} & \textbf{FEM}\\
\textbf{Characteristic} & \textbf{Specs} & \textbf{FEM}\\
\midrule
High DVF Damping & Axial & \SI{> 100}{\newton/\micro\meter} & 94\\
Low Coupling & Bending & \SI{< 100}{\newton\meter/\radian} & 5\\
Low Coupling & Torsion & \SI{< 500}{\newton\meter/\radian} & 260\\
Sufficient Stroke & Bending Stroke & \SI{> 1}{\milli\radian} & 20\\
Axial Stiff. & \SI{> 100}{\newton/\micro\meter} & 94\\
Bending Stiff. & \SI{< 100}{\newton\meter/\radian} & 5\\
Torsion Stiff. & \SI{< 500}{\newton\meter/\radian} & 260\\
Bending Stroke & \SI{> 1}{\milli\radian} & 20\\
\bottomrule
\end{tabularx}
\end{center}
\normalsize
\end{column}
\begin{column}{0.3\columnwidth}
\vspace{-2em}
\begin{figure}[htbp]
\centering
\includegraphics[scale=1,width=\linewidth]{figs/flexible_joint_dimensions.pdf}
\caption{Opt. geometry}
\end{figure}
\end{column}
\end{columns}
\vspace{-1em}
\begin{columns}
\begin{column}{0.45\columnwidth}
\vspace{-3em}
\begin{figure}[htbp]
\centering
\includegraphics[scale=1,width=\linewidth]{figs/location_top_flexible_joints.pdf}
\caption{Positioning of the top joint}
\end{figure}
\end{column}
\begin{column}{0.55\columnwidth}
\begin{figure}[htbp]
\centering
\includegraphics[scale=1,width=0.9\linewidth]{figs/flexible_joint_picture.jpg}
@@ -435,7 +384,7 @@ Sufficient Stroke & Bending Stroke & \SI{> 1}{\milli\radian} & 20\\
\end{columns}
\end{frame}
\begin{frame}[label={sec:org5368d2f}]{Instrumentation}
\begin{frame}[label={sec:org27824a6}]{Instrumentation}
\vspace{-1em}
\begin{columns}
@@ -526,13 +475,14 @@ All elements could be chosen/design based on the models
\end{frame}
\section{Experimental Phase}
\begin{frame}[label={sec:org70a96b2}]{Outline - Experimental Phase}
\label{sec:orgbc8949c}
\begin{frame}[label={sec:org6e7483a}]{Outline - Experimental Phase}
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/nass_mechatronics_approach_experimental_phase.pdf}
\includegraphics[scale=1,width=\linewidth]{figs/nass_mechatronics_approach_experimental_phase.red.pdf}
\end{center}
\end{frame}
\begin{frame}[label={sec:org77b0197}]{Flexible Joints - Measurements}
\begin{frame}[label={sec:org2b19437}]{Flexible Joints - Measurements}
\vspace{-2em}
\begin{columns}
\begin{column}{0.5\columnwidth}
@@ -561,7 +511,7 @@ All elements could be chosen/design based on the models
\end{columns}
\end{frame}
\begin{frame}[label={sec:orga77e8f6}]{Amplified Piezoelectric Actuator - Test Bench}
\begin{frame}[label={sec:org96a6b68}]{Amplified Piezoelectric Actuator - Test Bench}
\vspace{-1em}
\begin{center}
@@ -580,13 +530,13 @@ All elements could be chosen/design based on the models
\end{tikzpicture}
\end{frame}
\begin{frame}[label={sec:org3e1d2df}]{Amplified Piezoelectric Actuator - Extracted Model}
\begin{frame}[label={sec:orge87ad99}]{Amplified Piezoelectric Actuator - Extracted Model}
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/apa_comp_model_frf.pdf}
\end{center}
\end{frame}
\begin{frame}[label={sec:orgffa6e55}]{Amplified Piezoelectric Actuator - Integral Force Feedback}
\begin{frame}[label={sec:org7af7fba}]{Amplified Piezoelectric Actuator - Integral Force Feedback}
\vspace{-3em}
\begin{columns}
\begin{column}{0.62\columnwidth}
@@ -607,7 +557,7 @@ All elements could be chosen/design based on the models
\end{columns}
\end{frame}
\begin{frame}[label={sec:org1cfa45e}]{Strut - Mounting Tool}
\begin{frame}[label={sec:orgc496afb}]{Strut - Mounting Tool}
\vspace{-2.5em}
\begin{columns}
\begin{column}{0.63\columnwidth}
@@ -622,13 +572,13 @@ All elements could be chosen/design based on the models
\end{center}
\begin{tikzpicture}[remember picture,overlay]
\node[anchor=north east, padding=5pt] at (current page.north east){%
\node[anchor=north east] at (current page.north east){%
\includegraphics[width=2em]{figs/icon_animation.pdf}};
\end{tikzpicture}
\end{column}
\end{columns}
\end{frame}
\begin{frame}[label={sec:orgc27d748}]{Strut - Dynamical Measurements}
\begin{frame}[label={sec:orgaec0a8a}]{Strut - Dynamical Measurements}
\vspace{-1em}
\begin{center}
@@ -648,16 +598,16 @@ All elements could be chosen/design based on the models
\end{tikzpicture}
\end{frame}
\begin{frame}[label={sec:org84d4ec1}]{Strut - Encoders Output and Spurious Modes}
\begin{frame}[label={sec:org965cd42}]{Strut - Encoders Output and Spurious Modes}
\vspace{-3em}
\begin{columns}
\begin{column}{0.45\columnwidth}
\begin{column}{0.43\columnwidth}
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/frf_model_encoder_strut.pdf}
\includegraphics[scale=1,width=\linewidth]{figs/frf_struts_enc_int.pdf}
\end{center}
\end{column}
\begin{column}{0.55\columnwidth}
\begin{column}{0.57\columnwidth}
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/meas_spur_res_struts_2_encoder.jpg}
\end{center}
@@ -667,33 +617,25 @@ All elements could be chosen/design based on the models
\end{center}
\begin{tikzpicture}[remember picture,overlay]
\node[anchor=north east, padding=5pt] at (current page.north east){%
\node[anchor=north east] at (current page.north east){%
\includegraphics[width=2em]{figs/icon_animation.pdf}};
\end{tikzpicture}
\end{column}
\end{columns}
\end{frame}
\begin{frame}[label={sec:org615e0c9}]{Strut - Extracted Model}
\vspace{-1em}
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/strut_meas_frf_model_int_force.pdf}
\end{center}
\end{frame}
\begin{frame}[label={sec:orgde0ed50}]{Nano-Hexapod Mounting Tool}
\begin{frame}[label={sec:orgda21de8}]{Nano-Hexapod Mounting Tool}
\begin{center}
\includegraphics[scale=1,width=0.9\linewidth]{figs/nano_hexapod_mounting.JPG}
\end{center}
\begin{tikzpicture}[remember picture,overlay]
\node[anchor=north east, padding=5pt] at (current page.north east){%
\node[anchor=north east] at (current page.north east){%
\includegraphics[width=2em]{figs/icon_animation.pdf}};
\end{tikzpicture}
\end{frame}
\begin{frame}[label={sec:org4fbd60d}]{Mounted Nano-Hexapod}
\begin{frame}[label={sec:org79abb20}]{Mounted Nano-Hexapod}
\vspace{-1em}
\begin{center}
@@ -701,23 +643,15 @@ All elements could be chosen/design based on the models
\end{center}
\end{frame}
\begin{frame}[label={sec:org90db8c2}]{Nano-Hexapod - Identified Dynamics}
\begin{frame}[label={sec:orgf59950c}]{Nano-Hexapod - Identified Dynamics}
\vspace{-1em}
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/nano_hexapod_enc_bode_plot.pdf}
\includegraphics[scale=1,width=\linewidth]{figs/nano_hexapod_enc_iff_bode_plot.pdf}
\end{center}
\end{frame}
\begin{frame}[label={sec:orgb51eb5c}]{Nano-Hexapod - Force Sensors}
\vspace{-1em}
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/nano_hexapod_iff_bode_plot.pdf}
\end{center}
\end{frame}
\begin{frame}[label={sec:org7c39e01}]{Nano-Hexapod - Damped Dynamics}
\begin{frame}[label={sec:org00f7894}]{Nano-Hexapod - Damped Dynamics}
\vspace{-1em}
\begin{center}
@@ -725,7 +659,7 @@ All elements could be chosen/design based on the models
\end{center}
\end{frame}
\begin{frame}[label={sec:orgf0421d5}]{The Nano-Hexapod on top of the Micro-Station}
\begin{frame}[label={sec:org89187a0}]{The Nano-Hexapod on top of the Micro-Station}
\vspace{-0.5em}
\only<1>{
@@ -744,6 +678,42 @@ All elements could be chosen/design based on the models
\end{frame}
\section{Conclusion}
\begin{frame}[label={sec:orgbe10643}]{Conclusion}
\label{sec:orgcce0f41}
\begin{frame}[label={sec:org905c81b}]{Conclusion}
\begin{columns}
\begin{column}{0.4\columnwidth}
\textbf{Mechatronics Approach}:
\begin{itemize}
\item Use of several models
\item Predictive design
\item Beneficial in terms of: cost, delays, performances
\end{itemize}
\vspace{0.5em}
\textbf{Future Work}:
\begin{itemize}
\item Optimal/Robust control
\item Control Test Bench
\item Implementation on ID31
\end{itemize}
\end{column}
\begin{column}{0.6\columnwidth}
\vspace{-3em}
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/nass_ref_tracking_results.pdf}
\end{center}
\end{column}
\end{columns}
\begin{tcolorbox}[title=Many thanks to, sidebyside]
Philipp Brumund, Ludovic Ducotte\newline
Jose-Maria Clement, Marc Lesourd
\tcblower
Youness Benyakhlef, Pierrick Got\newline
Damien Coulon and the whole team
\end{tcolorbox}
\end{frame}
\end{document}