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@ -77,30 +77,15 @@ The presented development approach is foreseen to be applied more frequently to
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#+end_abstract
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#+end_abstract
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* INTRODUCTION
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* INTRODUCTION
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** Establish Significance :ignore:
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With the new $4^\text{th}$ generation machines, there is an increasing need of fast and accurate positioning systems cite:dimper15_esrf_upgrad_progr_phase_ii.
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A good overview of the mechatronic approach is given in cite:schmidt20_desig_high_perfor_mechat_third_revis_edition.
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These systems are usually including feedback control loops and therefore their performances are not depending on the mechanical system alone, but also on its interaction with the actuators, sensors and control electronics.
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Need of high precision systems with high control bandwidth
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In order to optimize the performances of such system, it is essential to consider a design approach in which the structural design and the control design are integrated.
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=> the static behavior of the system is not enough, dynamical models are required
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This approach is called the "mechatronic approach" and was shown to be very effective for the design many complex systems cite:rankers98_machin,schmidt20_desig_high_perfor_mechat_third_revis_edition.
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Also include actuators, sensors, control electronics
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Such design methodology was recently used for the development of several systems used by the synchrotron community cite:geraldes17_mechat_concep_new_high_dynam_dcm_sirius,holler18_omny_tomog_nano_cryo_stage,brendike19_esrf_doubl_cryst_monoc_protot.
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=> mechatronic approach
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** Previous and/or current research and contributions :ignore:
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In this paper, such approach is described for the design of a Nano Active Stabilization System (NASS).
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Such mechatronic approach is widely used in the dutch industry cite:rankers98_machin
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Systems at Synchrotron using mechatronic approach:
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cite:geraldes17_mechat_concep_new_high_dynam_dcm_sirius
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cite:holler18_omny_tomog_nano_cryo_stage
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cite:brendike19_esrf_doubl_cryst_monoc_protot
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** Locate a gap in the research / problem / question / prediction :ignore:
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** The present work :ignore:
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This work shows how the mechatronic approach was used for the development of a nano active stabilization system at the ESRF.
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cite:dehaeze18_sampl_stabil_for_tomog_exper
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* NASS - MECHATRONIC APPROACH
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* NASS - MECHATRONIC APPROACH
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** The ID31 Micro-Station
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** The ID31 Micro-Station
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@ -109,7 +94,7 @@ It is composed of several stacked stages (represented in yellow in Fig.\nbsp{}re
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Such architecture allows to obtain high mobility, however, this however limits the position accuracy to tens of $\mu m$.
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Such architecture allows to obtain high mobility, however, this however limits the position accuracy to tens of $\mu m$.
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** The Nano Active Stabilization System
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** The Nano Active Stabilization System
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The Nano Active Stabilization System (NASS) is a system whose goal is to improve the positioning accuracy of the micro-station.
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The NASS is a system whose goal is to improve the positioning accuracy of the micro-station.
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It is represented in Fig.\nbsp{}ref:fig:nass_concept_schematic and consists of three main elements:
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It is represented in Fig.\nbsp{}ref:fig:nass_concept_schematic and consists of three main elements:
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- A nano-hexapod located between the sample to be positioned and the micro-station
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- A nano-hexapod located between the sample to be positioned and the micro-station
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- An interferometric metrology system measuring the sample's position with respect to the focusing optics
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- An interferometric metrology system measuring the sample's position with respect to the focusing optics
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@ -117,7 +102,7 @@ It is represented in Fig.\nbsp{}ref:fig:nass_concept_schematic and consists of t
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#+name: fig:nass_concept_schematic
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#+name: fig:nass_concept_schematic
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#+attr_latex: :scale 0.9
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#+attr_latex: :scale 0.9
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#+caption: Nano Active Stabilization System - Schematic representation. 1) micro-station, 2) nano-hexapod, 3) sample, 4) metrology system
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#+caption: NASS - Schematic representation. 1) Micro-station, 2) Nano-hexapod, 3) Sample, 4) Metrology system
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[[file:figs/nass_concept_schematic.pdf]]
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[[file:figs/nass_concept_schematic.pdf]]
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** Mechatronic Approach - Overview
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** Mechatronic Approach - Overview
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@ -347,22 +332,17 @@ Even the off-diagonal elements (effect of one actuator on the encoder fixed to a
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#+end_export
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#+end_export
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* CONCLUSION
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* CONCLUSION
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The mechatronic approach used for the development of a nano active stabilization system was presented.
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Such approach allowed to design the system in a predictive and optimal way.
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A mechatronic approach used for the development of a nano active stabilization system was presented.
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Measurements made on the nano-hexapod were found to match very well with the models indicating proper design.
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This allows to design the system in a predictive way, can help
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The current performance limitation is coming from the flexible modes of the top platform and future work will focus on overcoming this limitation.
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This design methodology can be easily transposed to other complex mechatronic systems.
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This design methodology can be easily transposed to other complex mechatronic systems and are foreseen to be applied for future mechatronic systems at the ESRF.
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One main limitation is the flexible modes of the top platform.
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Active damping techniques
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- actively damp the top plate flexible modes
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- make the controller robust to change of payload mass
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- integrate it on top of the micro-station
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* ACKNOWLEDGMENTS
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* ACKNOWLEDGMENTS
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This research was made possible by a grant from the FRIA.
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This research was made possible by a grant from the FRIA.
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The authors wish to thank Damien Coulon, Philipp Brumund, Marc Lesourd and Youness Benyakhlef.
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The authors wish to thank L. Ducotte, D. Coulon, P. Brumund, M. Lesourd and Y. Benyakhlef for their help throughout the project.
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* REFERENCES :ignore:
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* REFERENCES :ignore:
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\printbibliography{}
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\printbibliography{}
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% Created 2021-07-15 jeu. 15:35
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% Created 2021-07-15 jeu. 17:26
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% Intended LaTeX compiler: pdflatex
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% Intended LaTeX compiler: pdflatex
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\documentclass[a4paper, keeplastbox, biblatex, boxit]{jacow}
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\documentclass[a4paper, keeplastbox, biblatex, boxit]{jacow}
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@ -35,20 +35,15 @@ The presented development approach is foreseen to be applied more frequently to
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\end{abstract}
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\end{abstract}
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\section{INTRODUCTION}
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\section{INTRODUCTION}
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A good overview of the mechatronic approach is given in \cite{schmidt20_desig_high_perfor_mechat_third_revis_edition}.
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With the new \(4^\text{th}\) generation machines, there is an increasing need of fast and accurate positioning systems \cite{dimper15_esrf_upgrad_progr_phase_ii}.
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Need of high precision systems with high control bandwidth
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These systems are usually including feedback control loops and therefore their performances are not depending on the mechanical system alone, but also on its interaction with the actuators, sensors and control electronics.
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=> the static behavior of the system is not enough, dynamical models are required
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Also include actuators, sensors, control electronics
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=> mechatronic approach
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Such mechatronic approach is widely used in the dutch industry \cite{rankers98_machin}
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Systems at Synchrotron using mechatronic approach:
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In order to optimize the performances of such system, it is essential to consider a design approach in which the structural design and the control design are integrated.
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\cite{geraldes17_mechat_concep_new_high_dynam_dcm_sirius}
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This approach is called the ``mechatronic approach'' and was shown to be very effective for the design many complex systems \cite{rankers98_machin,schmidt20_desig_high_perfor_mechat_third_revis_edition}.
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\cite{holler18_omny_tomog_nano_cryo_stage}
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Such design methodology was recently used for the development of several systems used by the synchrotron community \cite{geraldes17_mechat_concep_new_high_dynam_dcm_sirius,holler18_omny_tomog_nano_cryo_stage,brendike19_esrf_doubl_cryst_monoc_protot}.
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\cite{brendike19_esrf_doubl_cryst_monoc_protot}
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This work shows how the mechatronic approach was used for the development of a nano active stabilization system at the ESRF.
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In this paper, such approach is described for the design of a Nano Active Stabilization System (NASS).
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\cite{dehaeze18_sampl_stabil_for_tomog_exper}
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\section{NASS - MECHATRONIC APPROACH}
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\section{NASS - MECHATRONIC APPROACH}
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\subsection{The ID31 Micro-Station}
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\subsection{The ID31 Micro-Station}
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@ -57,7 +52,7 @@ It is composed of several stacked stages (represented in yellow in Fig.~\ref{fig
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Such architecture allows to obtain high mobility, however, this however limits the position accuracy to tens of \(\mu m\).
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Such architecture allows to obtain high mobility, however, this however limits the position accuracy to tens of \(\mu m\).
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\subsection{The Nano Active Stabilization System}
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\subsection{The Nano Active Stabilization System}
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The Nano Active Stabilization System (NASS) is a system whose goal is to improve the positioning accuracy of the micro-station.
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The NASS is a system whose goal is to improve the positioning accuracy of the micro-station.
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It is represented in Fig.~\ref{fig:nass_concept_schematic} and consists of three main elements:
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It is represented in Fig.~\ref{fig:nass_concept_schematic} and consists of three main elements:
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\begin{itemize}
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\begin{itemize}
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\item A nano-hexapod located between the sample to be positioned and the micro-station
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\item A nano-hexapod located between the sample to be positioned and the micro-station
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@ -68,7 +63,7 @@ It is represented in Fig.~\ref{fig:nass_concept_schematic} and consists of three
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\begin{figure}[htbp]
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\begin{figure}[htbp]
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\centering
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\centering
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\includegraphics[scale=1,scale=0.9]{figs/nass_concept_schematic.pdf}
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\includegraphics[scale=1,scale=0.9]{figs/nass_concept_schematic.pdf}
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\caption{\label{fig:nass_concept_schematic}Nano Active Stabilization System - Schematic representation. 1) micro-station, 2) nano-hexapod, 3) sample, 4) metrology system}
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\caption{\label{fig:nass_concept_schematic}NASS - Schematic representation. 1) Micro-station, 2) Nano-hexapod, 3) Sample, 4) Metrology system}
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\end{figure}
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\end{figure}
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\subsection{Mechatronic Approach - Overview}
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\subsection{Mechatronic Approach - Overview}
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@ -296,24 +291,17 @@ Even the off-diagonal elements (effect of one actuator on the encoder fixed to a
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\end{figure}
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\end{figure}
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\section{CONCLUSION}
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\section{CONCLUSION}
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The mechatronic approach used for the development of a nano active stabilization system was presented.
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Such approach allowed to design the system in a predictive and optimal way.
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A mechatronic approach used for the development of a nano active stabilization system was presented.
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Measurements made on the nano-hexapod were found to match very well with the models indicating proper design.
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This allows to design the system in a predictive way, can help
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The current performance limitation is coming from the flexible modes of the top platform and future work will focus on overcoming this limitation.
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This design methodology can be easily transposed to other complex mechatronic systems.
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This design methodology can be easily transposed to other complex mechatronic systems and are foreseen to be applied for future mechatronic systems at the ESRF.
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One main limitation is the flexible modes of the top platform.
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Active damping techniques
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\begin{itemize}
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\item actively damp the top plate flexible modes
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\item make the controller robust to change of payload mass
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\item integrate it on top of the micro-station
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\end{itemize}
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\section{ACKNOWLEDGMENTS}
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\section{ACKNOWLEDGMENTS}
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This research was made possible by a grant from the FRIA.
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This research was made possible by a grant from the FRIA.
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The authors wish to thank Damien Coulon, Philipp Brumund, Marc Lesourd and Youness Benyakhlef.
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The authors wish to thank L. Ducotte, D. Coulon, P. Brumund, M. Lesourd and Y. Benyakhlef for their help throughout the project.
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\printbibliography{}
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\printbibliography{}
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\end{document}
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\end{document}
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@ -87,3 +87,12 @@
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year = 2018,
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year = 2018,
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doi = {10.1063/1.5020247},
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doi = {10.1063/1.5020247},
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}
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}
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@misc{dimper15_esrf_upgrad_progr_phase_ii,
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author = {R. Dimper and H. Reichert and P. Raimondi and L. Ortiz and
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F. Sette and J. Susini},
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note = {The orange book},
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title = {{ESRF} Upgrade Programme Phase {II} (2015-2022) - Technical
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Design Study},
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year = 2015,
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}
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\begin{tikzpicture}
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\begin{tikzpicture}
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% Styles
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% Styles
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\tikzset{myblock/.style= {draw, dashed, fill=white, text width=3cm, align=center, minimum height=1.4cm}};
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\tikzset{myblock/.style= {draw, thin, color=white!70!black, fill=white, text width=3cm, align=center, minimum height=1.4cm}};
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\tikzset{mylabel/.style= {anchor=north, below, font=\bfseries\small, color=black, text width=3cm, align=center}};
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\tikzset{mylabel/.style= {anchor=north, below, font=\bfseries\small, color=black, text width=3cm, align=center}};
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\tikzset{mymodel/.style= {anchor=south, above, font=\small, color=black, text width=3cm, align=center}};
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\tikzset{mymodel/.style= {anchor=south, above, font=\small, color=black, text width=3cm, align=center}};
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\tikzset{mystep/.style= {->, ultra thick}};
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\tikzset{mystep/.style= {->, ultra thick}};
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% Blocks
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% Blocks
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\node[myblock, solid, fill=lightblue, draw, label={[mylabel, text width=8.0cm] Dynamical Models}, minimum height = 4.5cm, text width = 8.0cm] (model) at (0, 0) {};
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\node[draw, fill=lightblue, align=center, label={[mylabel, text width=8.0cm] Dynamical Models}, minimum height = 4.5cm, text width = 8.0cm] (model) at (0, 0) {};
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\node[myblock, fill=lightgreen, label={[mylabel] Disturbances}, left = 3 of model.west] (dist) {};
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\node[myblock, fill=lightgreen, label={[mylabel] Disturbances}, left = 3 of model.west] (dist) {};
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\node[myblock, fill=lightgreen, label={[mylabel] $\mu$ Station}, below = 2pt of dist] (mustation) {};
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\node[myblock, fill=lightgreen, label={[mylabel] $\mu$ Station}, below = 2pt of dist] (mustation) {};
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