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% Created 2021-07-20 mar. 14:23
% Created 2021-07-22 jeu. 08:10
% Intended LaTeX compiler: pdflatex
\documentclass[aspectratio=169, t]{clean-beamer}
\usepackage[utf8]{inputenc}
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\institute[shortinst]{\inst{1} European Synchrotron Radiation Facility, Grenoble, France \and %
\inst{2} Precision Mechatronics Laboratory, University of Liege, Belgium \and %
\inst{3} BEAMS Department, Free University of Brussels, Belgium}
\vspace{-0.5em}
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\includegraphics[height=1.5cm]{figs/logo_esrf.pdf} \hspace{5em} %
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\hspace{1em}%
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}
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\setbeamertemplate{itemize items}[circle]
\usefonttheme[onlymath]{serif}
\AtBeginSection[]{
\begin{frame}<beamer>{Outline}
\tableofcontents[currentsection, hideothersubsections, sectionstyle=show/shaded]
\end{frame}
}
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\begin{document}
\maketitle
\section*{Introduction}
\begin{frame}[label={sec:org4b0545d}]{The ID31 Micro Station}
\begin{frame}[label={sec:orgdc51d45}]{The ID31 Micro Station}
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/assemblage.png}
\includegraphics[scale=1,width=0.95\linewidth]{figs/micro_hexapod_render.pdf}
\end{center}
\textbf{Objective}: Position samples along complex trajectories with high precision\newline
\textbf{Stacked Positioning Stages}: \(\approx 10\,\mu m\) precision limited by stages vibrations, thermal effects, ground motion, \ldots{}
\begin{tikzpicture}[remember picture,overlay]
\node[anchor=north east, padding=5pt] at (current page.north east){%
\includegraphics[width=2em]{figs/icon_animation.pdf}};
\end{tikzpicture}
\end{frame}
\begin{frame}[label={sec:orgb7c2959}]{Introduction - The Nano Active Stabilization System}
\begin{frame}[label={sec:orgd54db4c}]{Introduction - The Nano Active Stabilization System}
\textbf{Objective}: Improve the position accuracy from \(\approx 10\,\mu m\) down to \(\approx 10\,nm\) \newline
\textbf{Design approach}: ``Model based design'' (extensive use of models and test benches)
\textbf{Design approach}: ``Model based design'' / ``Predictive Design''
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/nass-concept.pdf}
\end{center}
\end{frame}
\begin{frame}[label={sec:orgaf8e005}]{The Nano-Hexapod - Why such mechanical architecture?}
\begin{itemize}
\item Why stewart architecture
\begin{itemize}
\item 6 DoF to control / 6 actuators
\end{itemize}
\item Only flexible elements
\begin{itemize}
\item no backlash
\item no play
\end{itemize}
\item How it is working
\begin{itemize}
\item Jacobian matrix both for actuation and sensing
\end{itemize}
\item Forward / Inverse kinematics : meaning. Easy to compute for small displacements
\item[{$\square$}] Schematic of Stewart platform
\end{itemize}
\begin{frame}[label={sec:org58304ff}]{Overview of the Mechatronic Approach - Model Based Design}
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/nano_hexapod_elements.red.pdf}
\includegraphics[scale=1,width=\linewidth]{figs/nass_mechatronics_approach.png}
\end{center}
\end{frame}
\begin{frame}[label={sec:orgb9ee458}]{Stewart Platforms Architecture}
\vspace{-2em}
\section{Conceptual Phase}
\begin{frame}[label={sec:org95b2a1a}]{Outline - Conceptual Phase}
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/nass_mechatronics_approach_conceptual_phase.png}
\end{center}
\end{frame}
\begin{columns}
\begin{column}{0.5\columnwidth}
\begin{figure}[htbp]
\centering
\includegraphics[scale=1,width=\linewidth]{figs/stewart_schematic.png}
\caption{\label{fig:stewart_schematic}Geometry of a Stewart Platform}
\end{figure}
\begin{frame}[label={sec:org612b41f}]{Feedback Control - The Control Loop}
\vspace{-1em}
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/classical_feedback_schematic.png}
\end{center}
\vspace{-1em}
\begin{tcolorbox}[title=Advantages]
\begin{columns}
\begin{column}{0.4\columnwidth}
\begin{tcolorbox}[title=Why Feedback?]
\begin{itemize}
\item Compact
\item Allows 6dof motion
\item Can be ``monolithic''
\item Model uncertainties
\item Unknown disturbances
\end{itemize}
\end{tcolorbox}
\end{column}
\begin{column}{0.5\columnwidth}
\begin{tcolorbox}[title=Definition of the Geomtry]
\begin{column}{0.6\columnwidth}
\begin{tcolorbox}[title=Every elements can limit the performances]
\begin{itemize}
\item \(\bm{a}_i\): position of the attachment points on the fixed base
\item \(\bm{b}_i\): position of moving attachment points
\item \(l_i\): length of each limb
\item \(\hat{\bm{s}}_i\): unit vector representing the direction of each limb
\item Drivers, Actuators, Sensors
\item Mechanical System
\item Controller
\end{itemize}
\end{tcolorbox}
\end{column}
\end{columns}
\end{frame}
\begin{frame}[label={sec:org09981cc}]{Stewart Platform Architecture - Kinematics}
\begin{itemize}
\item \(\bm{\mathcal{L}} = \left[ l_1, l_2, \ldots, l_6 \right]^T\): vector of actuated joint coordinates
\item \(\bm{\mathcal{X}} = \left[ {}^A\bm{P}, \bm{}^A\hat{\bm{s}} \right]^T\): vector of platform motion variables
\end{itemize}
\begin{frame}[label={sec:orga5ea61a}]{Noise Budgeting and Required Control Bandwidth}
\vspace{-1em}
\begin{align*}
\bm{\mathcal{X}} & \xrightarrow[\text{Simple}]{\text{Inverse Kinematics}} \bm{\mathcal{L}} \\
\bm{\mathcal{L}} & \xrightarrow[\text{Complex}]{\text{Forward Kinematics}} \bm{\mathcal{X}}
\end{align*}
For small displacements: \textbf{Jacobian} matrix
\begin{equation*}
\bm{J} = \begin{bmatrix}
{\hat{\bm{s}}_1}^T & (\bm{b}_1 \times \hat{\bm{s}}_1)^T \\
{\hat{\bm{s}}_2}^T & (\bm{b}_2 \times \hat{\bm{s}}_2)^T \\
{\hat{\bm{s}}_3}^T & (\bm{b}_3 \times \hat{\bm{s}}_3)^T \\
{\hat{\bm{s}}_4}^T & (\bm{b}_4 \times \hat{\bm{s}}_4)^T \\
{\hat{\bm{s}}_5}^T & (\bm{b}_5 \times \hat{\bm{s}}_5)^T \\
{\hat{\bm{s}}_6}^T & (\bm{b}_6 \times \hat{\bm{s}}_6)^T
\end{bmatrix}
\end{equation*}
\begin{align*}
\delta\bm{\mathcal{L}} &= \bm{J} \delta\bm{\mathcal{X}} \\
\delta\bm{\mathcal{X}} &= \bm{J}^{-1} \delta\bm{\mathcal{L}}
\end{align*}
As an example, for the Nano-Hexapod:
\begin{equation*}
\bm{J} = \begin{bmatrix*}[r]
0.69 & -0.38 & 0.61 & -0.13 & -0.10 & 0.08 \\
-0.69 & -0.38 & 0.61 & -0.13 & 0.10 & -0.08 \\
-0.02 & 0.80 & 0.61 & 0.15 & -0.06 & 0.08 \\
0.68 & -0.41 & 0.61 & -0.02 & -0.16 & -0.08 \\
-0.68 & -0.41 & 0.61 & -0.02 & 0.16 & 0.08 \\
0.02 & 0.80 & 0.61 & 0.15 & 0.06 & -0.08
\end{bmatrix*}, \quad \bm{J}^{-1} = \begin{bmatrix*}[r]
0.84 & -0.84 & -1.00 & -0.15 & 0.15 & 1.00 \\
0.66 & 0.66 & 0.39 & -1.06 & -1.06 & 0.39 \\
0.27 & 0.27 & 0.27 & 0.27 & 0.27 & 0.27 \\
-4.51 & -4.51 & 0.12 & 4.39 & 4.39 & 0.12 \\
2.46 & -2.46 & -5.14 & -2.67 & 2.67 & 5.14 \\
1.96 & -1.96 & 1.96 & -1.96 & 1.96 & -1.96
\end{bmatrix*}
\end{equation*}
\begin{itemize}
\item[{$\square$}] Control architecture in the frame of the legs with the Jacobian matrix
\end{itemize}
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/identification_control_noise_budget.red.pdf}
\end{center}
\end{frame}
\begin{frame}[label={sec:orgec6681e}]{Control Challenges - Analogy}
\begin{frame}[label={sec:orgd23064f}]{Limitation of the Controller Bandwidth?}
\begin{columns}
\begin{column}{0.6\columnwidth}
\vspace{-2em}
\only<1>{
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/001_Room.pdf}
\includegraphics[scale=1,width=\linewidth]{figs/control_bandwidth_1_classical.pdf}
\end{center}
}\only<2>{
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/002_Analogies.pdf}
\includegraphics[scale=1,width=\linewidth]{figs/control_bandwidth_2_above_res.pdf}
\end{center}
}\only<3>{
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/003_Laser.pdf}
\includegraphics[scale=1,width=\linewidth]{figs/control_bandwidth_3_next_gen.pdf}
\end{center}
}\only<4>{
}
\end{column}
\begin{column}{0.4\columnwidth}
\vspace{-2em}
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/004_Top-Platform.pdf}
\includegraphics[scale=1,width=\linewidth]{figs/test_bench_apa_simple.pdf}
\end{center}
}\only<5>{
\only<1>{
\begin{tcolorbox}[title=Typical Approach, fontupper=\small]
``As stiff as possible'' \newline
Simple controller (e.g. PID)
\end{tcolorbox}
}\only<2>{
\begin{tcolorbox}[title=Alternative Approach, fontupper=\small]
Limited by complex dynamics\newline
Model based controller
\end{tcolorbox}
}\only<3>{
\begin{tcolorbox}[title=Next-Gen Systems, fontupper=\small]
Active research topic\newline
Complex controllers
\end{tcolorbox}
}
\end{column}
\end{columns}
\end{frame}
\begin{frame}[label={sec:org9493c8d}]{Soft or Stiff \(\nu\text{-hexapod}\) ? Interaction with the \(\mu\text{-station}\)}
\vspace{-3em}
\begin{columns}
\begin{column}{0.3\columnwidth}
\onslide<1->{
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/005_Candle.pdf}
\includegraphics[scale=1,width=\linewidth]{figs/nass_example_uncertainty_support_only_hexapod.pdf}
\end{center}
}\only<6>{
}\onslide<2->{
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/006_Objective and Challenges.pdf}
\includegraphics[scale=1,width=\linewidth]{figs/nass_example_uncertainty_support.pdf}
\end{center}
}\only<7>{
}
\end{column}
\begin{column}{0.7\columnwidth}
\onslide<1->{
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/007_Truck.pdf}
\includegraphics[scale=1,width=\linewidth]{figs/nass_example_alone.pdf}
\end{center}
}\only<8>{
\vspace{-2em}
}\onslide<2->{
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/008_Trampoline.pdf}
\includegraphics[scale=1,width=\linewidth]{figs/nass_example_support_uncertainty_d_L.pdf}
\end{center}
}\only<9>{
}
\end{column}
\end{columns}
\end{frame}
\begin{frame}[label={sec:orgddab963}]{Complexity of the Micro-Station Dynamics (Model Analysis)}
\vspace{-1em}
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/009_Spindle.pdf}
\includegraphics[scale=1,width=0.95\linewidth]{figs/modes_annotated.png}
\end{center}
}\only<10>{
\begin{tikzpicture}[remember picture,overlay]
\node[anchor=north east, padding=5pt] at (current page.north east){%
\includegraphics[width=2em]{figs/icon_animation.pdf}};
\end{tikzpicture}
\end{frame}
\begin{frame}[label={sec:org3dfae25}]{Control Strategy: HAC-LAC}
\vspace{-0.5em}
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/010_Metrology.pdf}
\includegraphics[scale=1,width=\linewidth]{figs/nass_schematic_test.pdf}
\end{center}
}\only<11>{
\vspace{-2.0em}
\begin{columns}
\begin{column}{0.5\columnwidth}
\begin{tcolorbox}[title=Low Authority Control]
\begin{itemize}
\item Collocated sensors/actuators
\item Guaranteed Stability
\item Adds damping
\item \(\searrow\) vibration near resonances
\end{itemize}
\end{tcolorbox}
\end{column}
\begin{column}{0.5\columnwidth}
\begin{tcolorbox}[title=High Authority Control]
\begin{itemize}
\item Position sensors
\item Complex dynamics
\item \(\searrow\) vibration in the bandwidth
\item Use transformation matrices
\end{itemize}
\end{tcolorbox}
\end{column}
\end{columns}
\end{frame}
\begin{frame}[label={sec:orgb8b73a0}]{Multi-Body Models - Simulations}
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/simscape_simulation.jpg}
\end{center}
\begin{tikzpicture}[remember picture, overlay]
\node[align=left, anchor=south east, text width=5.5cm,shift={(-1em, 1em)}] at (current page.south east){%
\begin{tcolorbox}
\begin{center}
Validation of the concept
\end{center}
\end{tcolorbox}};
\end{tikzpicture}
\begin{tikzpicture}[remember picture,overlay]
\node[anchor=north east, padding=5pt] at (current page.north east){%
\includegraphics[width=2em]{figs/icon_animation.pdf}};
\end{tikzpicture}
\end{frame}
\section{Detail Design Phase}
\begin{frame}[label={sec:org6378434}]{Outline - Detail Design Phase}
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/nass_mechatronics_approach_detailed_phase.png}
\end{center}
\end{frame}
\begin{frame}[label={sec:orgc57fa9c}]{Nano-Hexapod Overview - Key elements}
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/nano_hexapod_elements.red.pdf}
\end{center}
\end{frame}
\begin{frame}[label={sec:orga847212}]{Include Flexible Elements in a Multi-Body model}
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/super_element_simscape.pdf}
\end{center}
\end{frame}
\begin{frame}[label={sec:org36e74d8}]{Choice of Actuator - Amplifier Piezoelectric Actuator}
\vspace{-2em}
\begin{columns}
\begin{column}{0.5\columnwidth}
\scriptsize
\begin{center}
\begin{tabularx}{0.8\linewidth}{ccc}
\toprule
\textbf{Characteristic} & \textbf{Specs} & \textbf{Doc.}\\
\midrule
Axial Stiff. & \SI{\approx 1}{\newton/\micro\meter} & \SI{1.8}{\newton/\micro\meter}\\
Sufficient Stroke & \SI{> 100}{\micro\meter} & \SI{368}{\micro\meter}\\
Height & \SI{< 50}{\milli\meter} & \SI{30}{\milli\meter}\\
High Resolution & \SI{< 5}{\nano\meter} & \SI{3}{\nano\meter}\\
\bottomrule
\end{tabularx}
\end{center}
\normalsize
\vspace{-1em}
\begin{figure}[htbp]
\centering
\includegraphics[scale=1,width=0.9\linewidth]{figs/apa300ml_picture.jpg}
\caption{Picture of the APA300ML}
\end{figure}
\end{column}
\begin{column}{0.5\columnwidth}
\vspace{-1em}
\begin{columns}
\begin{column}{0.4\columnwidth}
\begin{figure}[htbp]
\centering
\includegraphics[scale=1,width=0.8\linewidth]{figs/2dof_apa_model.pdf}
\caption{2-DoF Model}
\end{figure}
\end{column}
\begin{column}{0.6\columnwidth}
\vspace{-1.6em}
\begin{figure}[htbp]
\centering
\includegraphics[scale=1,width=0.9\linewidth]{figs/mesh_APA_schematic.pdf}
\caption{APA Finite Element Model}
\end{figure}
\end{column}
\end{columns}
\begin{figure}[htbp]
\centering
\includegraphics[scale=1,width=\linewidth]{figs/mode_shapes_annotated.pdf}
\caption{Flexible Modes due to limited APA stiffness}
\end{figure}
\end{column}
\end{columns}
\end{frame}
\begin{frame}[label={sec:orgaefb8a2}]{Flexible Joints - Specifications and Optimization (\href{https://research.tdehaeze.xyz/test-bench-nass-flexible-joints/}{link})}
\vspace{-2em}
\begin{columns}
\begin{column}{0.75\columnwidth}
\scriptsize
\begin{center}
\begin{tabularx}{\linewidth}{ccccc}
\toprule
\textbf{Goal} & \textbf{Stiffness} & \textbf{Specs} & \textbf{FEM} & \textbf{Measured}\\
\midrule
High DVF Damping & Axial & \SI{> 100}{\newton/\micro\meter} & 94 & \\
Low Coupling & Bending & \SI{< 100}{\newton\meter/\radian} & 5 & 3.8\\
Low Coupling & Torsion & \SI{< 500}{\newton\meter/\radian} & 260 & \\
Sufficient Stroke & Bending Stroke & \SI{> 1}{\milli\radian} & 20 & 18\\
\bottomrule
\end{tabularx}
\end{center}
\normalsize
\end{column}
\begin{column}{0.25\columnwidth}
\vspace{-3em}
\begin{figure}[htbp]
\centering
\includegraphics[scale=1,width=\linewidth]{figs/flexible_joint_dimensions.pdf}
\caption{Dimensions after optimization}
\end{figure}
\end{column}
\end{columns}
\vspace{-3em}
\begin{columns}
\begin{column}{0.45\columnwidth}
\begin{figure}[htbp]
\centering
\includegraphics[scale=1,width=\linewidth]{figs/location_top_flexible_joints.pdf}
\caption{Positioning of the top joint}
\end{figure}
\end{column}
\begin{column}{0.55\columnwidth}
\vspace{2em}
\begin{figure}[htbp]
\centering
\includegraphics[scale=1,width=\linewidth]{figs/simscape_model_flexible_joint.pdf}
\caption{Simscape Model}
\end{figure}
\end{column}
\end{columns}
\end{frame}
\begin{frame}[label={sec:org1666f90}]{Instrumentation}
\begin{itemize}
\item PD200 amplifier
\item Encoders
\item Speedgoat, DAC, ADC
\item PEPU
\item Attocube
\end{itemize}
\end{frame}
\section{Experimental Phase}
\begin{frame}[label={sec:org8c075cc}]{Outline - Experimental Phase}
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/nass_mechatronics_approach_experimental_phase.png}
\end{center}
\end{frame}
\begin{frame}[label={sec:org57e9067}]{Flexible Joints - Measurements}
\vspace{-2em}
\begin{columns}
\begin{column}{0.45\columnwidth}
\begin{figure}[htbp]
\centering
\includegraphics[scale=1,width=\linewidth]{figs/flexible_joint_bench.pdf}
\caption{Measurement bench}
\end{figure}
\end{column}
\begin{column}{0.55\columnwidth}
\begin{figure}[htbp]
\centering
\includegraphics[scale=1,width=\linewidth]{figs/flex_joint_meas_example_F_d_lin_fit.pdf}
\caption{Measured displacement and force}
\end{figure}
\end{column}
\end{columns}
\end{frame}
\begin{frame}[label={sec:org230d623}]{Amplified Piezoelectric Actuator - Test Bench}
\vspace{-1em}
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/011_Flame.pdf}
\includegraphics[scale=1,width=\linewidth]{figs/test_bench_apa300ml.red.pdf}
\end{center}
\begin{tikzpicture}[remember picture, overlay]
\node[align=left, anchor=north east, text width=4.5cm] at (current page.north east){%
\begin{tcolorbox}[title=Goals]
\begin{itemize}
\item Identify Dynamics
\item Tune APA Model
\item Test IFF
\end{itemize}
\end{tcolorbox}};
\end{tikzpicture}
\end{frame}
\begin{frame}[label={sec:org9368c73}]{Amplified Piezoelectric Actuator - Extracted Model}
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/apa_comp_model_frf.pdf}
\end{center}
\end{frame}
\begin{frame}[label={sec:orga3a7c76}]{Amplified Piezoelectric Actuator - Integral Force Feedback}
\vspace{-3em}
\begin{columns}
\begin{column}{0.62\columnwidth}
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/test_bench_apa300ml_iff.pdf}
\end{center}
\[ K_{\text{IFF}}(s) = \frac{g}{s} \]
\end{column}
\begin{column}{0.38\columnwidth}
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/iff_results_apa95ml.pdf}
\end{center}
\end{column}
\end{columns}
\end{frame}
\begin{frame}[label={sec:org4e8f560}]{Strut - Mounting Tool}
\vspace{-2.5em}
\begin{columns}
\begin{column}{0.63\columnwidth}
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/image_mounting_strut_bench.JPG}
\end{center}
\end{column}
\begin{column}{0.37\columnwidth}
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/mounted_strut_picture.jpg}
\end{center}
\begin{tikzpicture}[remember picture,overlay]
\node[anchor=north east, padding=5pt] at (current page.north east){%
\includegraphics[width=2em]{figs/icon_animation.pdf}};
\end{tikzpicture}
\end{column}
\end{columns}
\end{frame}
\begin{frame}[label={sec:orge547304}]{Strut - Dynamical Measurements}
\vspace{-1em}
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/test_bench_strut.red.pdf}
\end{center}
\begin{tikzpicture}[remember picture, overlay]
\node[align=left, anchor=north east, text width=5cm] at (current page.north east){%
\begin{tcolorbox}[title=Goals]
\begin{itemize}
\item Identify Dynamics
\item Tune Model
\item Flexible joints effects
\item Encoder effect
\end{itemize}
\end{tcolorbox}};
\end{tikzpicture}
\end{frame}
\begin{frame}[label={sec:org76a12db}]{Strut - Encoders Output and Spurious Modes}
\vspace{-3em}
\begin{columns}
\begin{column}{0.45\columnwidth}
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/frf_model_encoder_strut.pdf}
\end{center}
\end{column}
\begin{column}{0.55\columnwidth}
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/meas_spur_res_struts_2_encoder.jpg}
\end{center}
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/mode_shapes_annotated.pdf}
\end{center}
\begin{tikzpicture}[remember picture,overlay]
\node[anchor=north east, padding=5pt] at (current page.north east){%
\includegraphics[width=2em]{figs/icon_animation.pdf}};
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\begin{frame}[label={sec:org416c1db}]{Strut - Extracted Model}
\vspace{-1em}
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/strut_meas_frf_model_int_force.pdf}
\end{center}
\end{frame}
\begin{frame}[label={sec:orgd58b991}]{Nano-Hexapod Mounting Tool}
\begin{center}
\includegraphics[scale=1,width=0.9\linewidth]{figs/nano_hexapod_mounting.JPG}
\end{center}
\begin{tikzpicture}[remember picture,overlay]
\node[anchor=north east, padding=5pt] at (current page.north east){%
\includegraphics[width=2em]{figs/icon_animation.pdf}};
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\begin{frame}[label={sec:orgb957064}]{Mounted Nano-Hexapod}
\vspace{-1em}
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/mounted_nano_hexapod_picture.jpg}
\end{center}
\end{frame}
\begin{frame}[label={sec:org92c51de}]{Nano-Hexapod - Identified Dynamics}
Diagonal + off-diagonal transfer function from Va to De (comp with model)
\end{frame}
\begin{frame}[label={sec:orgafcfc6b}]{Nano-Hexapod - Force Sensors}
Diagonal + off-diagonal transfer function from Va to Vs
\end{frame}
\begin{frame}[label={sec:org2608c34}]{Nano-Hexapod - Damped Dynamics}
Damped and Undamped, Diagonal + off-diagonal transfer function from Va to De
\end{frame}
\begin{frame}[label={sec:org9e7c6f4}]{The Nano-Hexapod on top of the Micro-Station}
\vspace{-0.5em}
\only<1>{
\begin{center}
\includegraphics[scale=1,width=0.85\linewidth]{figs/nano_hexapod_id31.jpg}
\end{center}
}\only<2>{
\begin{center}
\includegraphics[scale=1,width=0.85\linewidth]{figs/nano_hexapod_id31_zoom.jpg}
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}
\end{frame}
\begin{frame}[label={sec:orgd25c78f}]{Overview of the Mechatronic Approach - Model Based Design}
\vspace{-1em}
\begin{center}
\includegraphics[scale=1,width=\linewidth]{figs/nass-mechatronics-approach.png}
\end{center}
\end{frame}
\begin{frame}[label={sec:org4f4bab3}]{Outline}
\tableofcontents
\section{Conclusion}
\begin{frame}[label={sec:orgee0f6f0}]{Conclusion}
\end{frame}
\end{document}

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