% Matlab Init :noexport:ignore: %% ustation_1_kinematics.m %% Clear Workspace and Close figures clear; close all; clc; %% Intialize Laplace variable s = zpk('s'); %% Path for functions, data and scripts addpath('./mat/'); % Path for Data addpath('./src/'); % Path for functions addpath('./STEPS/'); % Path for STEPS addpath('./subsystems/'); % Path for Subsystems Simulink files % Simulink Model name mdl = 'ustation_simscape'; load('nass_model_conf_simulink.mat'); %% Colors for the figures colors = colororder; %% Frequency Vector freqs = logspace(log10(10), log10(2e3), 1000); % Micro-Station Kinematics % <> % Each stage is described by two frames; one is attached to the fixed platform $\{A\}$ while the other is fixed to the mobile platform $\{B\}$. % At "rest" position, the two have the same pose and coincide with the point of interest ($O_A = O_B$). % An example of the tilt stage is shown in Figure ref:fig:ustation_stage_motion. % The mobile frame of the translation stage is equal to the fixed frame of the tilt stage: $\{B_{D_y}\} = \{A_{R_y}\}$. % Similarly, the mobile frame of the tilt stage is equal to the fixed frame of the spindle: $\{B_{R_y}\} = \{A_{R_z}\}$. % #+name: fig:ustation_stage_motion % #+caption: Example of the motion induced by the tilt-stage $R_y$. "Rest" position in shown in blue while a arbitrary position in shown in red. Parasitic motions are here magnified for clarity. % [[file:figs/ustation_stage_motion.png]] % The motion induced by a positioning stage can be described by a homogeneous transformation matrix from frame $\{A\}$ to frame $\{B\}$ as explain in Section ref:ssec:ustation_kinematics. % As any motion stage induces parasitic motion in all 6 DoF, the transformation matrix representing its induced motion can be written as in eqref:eq:ustation_translation_stage_errors. % \begin{equation}\label{eq:ustation_translation_stage_errors} % {}^A\mathbf{T}_B(D_x, D_y, D_z, \theta_x, \theta_y, \theta_z) = % \left[ \begin{array}{ccc|c} % & & & D_x \\ % & \mathbf{R}_x(\theta_x) \mathbf{R}_y(\theta_y) \mathbf{R}_z(\theta_z) & & D_y \\ % & & & D_z \cr % \hline % 0 & 0 & 0 & 1 % \end{array} \right] % \end{equation} % The homogeneous transformation matrix corresponding to the micro-station $\mathbf{T}_{\mu\text{-station}}$ is simply equal to the matrix multiplication of the homogeneous transformation matrices of the individual stages as shown in Equation eqref:eq:ustation_transformation_station. % \begin{equation}\label{eq:ustation_transformation_station} % \mathbf{T}_{\mu\text{-station}} = \mathbf{T}_{D_y} \cdot \mathbf{T}_{R_y} \cdot \mathbf{T}_{R_z} \cdot \mathbf{T}_{\mu\text{-hexapod}} % \end{equation} % $\mathbf{T}_{\mu\text{-station}}$ represents the pose of the sample (supposed to be rigidly fixed on top of the positioning-hexapod) with respect to the granite. % If the transformation matrices of the individual stages are each representing a perfect motion (i.e. the stages are supposed to have no parasitic motion), $\mathbf{T}_{\mu\text{-station}}$ then represent the pose setpoint of the sample with respect to the granite. % The transformation matrices for the translation stage, tilt stage, spindle, and positioning hexapod can be written as shown in Equation eqref:eq:ustation_transformation_matrices_stages. % \begin{equation}\label{eq:ustation_transformation_matrices_stages} % \begin{align} % \mathbf{T}_{D_y} &= \begin{bmatrix} % 1 & 0 & 0 & 0 \\ % 0 & 1 & 0 & D_y \\ % 0 & 0 & 1 & 0 \\ % 0 & 0 & 0 & 1 % \end{bmatrix} \quad % \mathbf{T}_{\mu\text{-hexapod}} = % \left[ \begin{array}{ccc|c} % & & & D_{\mu x} \\ % & \mathbf{R}_x(\theta_{\mu x}) \mathbf{R}_y(\theta_{\mu y}) \mathbf{R}_{z}(\theta_{\mu z}) & & D_{\mu y} \\ % & & & D_{\mu z} \cr % \hline % 0 & 0 & 0 & 1 % \end{array} \right] \\ % \mathbf{T}_{R_z} &= \begin{bmatrix} % \cos(\theta_z) & -\sin(\theta_z) & 0 & 0 \\ % \sin(\theta_z) & \cos(\theta_z) & 0 & 0 \\ % 0 & 0 & 1 & 0 \\ % 0 & 0 & 0 & 1 % \end{bmatrix} \quad % \mathbf{T}_{R_y} = \begin{bmatrix} % \cos(\theta_y) & 0 & \sin(\theta_y) & 0 \\ % 0 & 1 & 0 & 0 \\ % -\sin(\theta_y) & 0 & \cos(\theta_y) & 0 \\ % 0 & 0 & 0 & 1 % \end{bmatrix} % \end{align} % \end{equation} %% Stage setpoints Dy = 1e-3; % Translation Stage [m] Ry = 3*pi/180; % Tilt Stage [rad] Rz = 180*pi/180; % Spindle [rad] %% Stage individual Homogeneous transformations % Translation Stage Rty = [1 0 0 0; 0 1 0 Dy; 0 0 1 0; 0 0 0 1]; % Tilt Stage - Pure rotating aligned with Ob Rry = [ cos(Ry) 0 sin(Ry) 0; 0 1 0 0; -sin(Ry) 0 cos(Ry) 0; 0 0 0 1]; % Spindle - Rotation along the Z axis Rrz = [cos(Rz) -sin(Rz) 0 0 ; sin(Rz) cos(Rz) 0 0 ; 0 0 1 0 ; 0 0 0 1 ]; % Micro-Station homogeneous transformation Ttot = Rty*Rry*Rrz; %% Compute translations and rotations (Euler angles) induced by the micro-station ustation_dx = Ttot(1,4); ustation_dy = Ttot(2,4); ustation_dz = Ttot(3,4); ustation_ry = atan2( Ttot(1, 3), sqrt(Ttot(1, 1)^2 + Ttot(1, 2)^2)); ustation_rx = atan2(-Ttot(2, 3)/cos(Ery), Ttot(3, 3)/cos(Ery)); ustation_rz = atan2(-Ttot(1, 2)/cos(Ery), Ttot(1, 1)/cos(Ery)); %% Verification using the Simscape model % All stages are initialized as rigid bodies to avoid any guiding error initializeGround( 'type', 'rigid'); initializeGranite( 'type', 'rigid'); initializeTy( 'type', 'rigid'); initializeRy( 'type', 'rigid'); initializeRz( 'type', 'rigid'); initializeMicroHexapod('type', 'rigid'); initializeLoggingConfiguration('log', 'all'); initializeReferences('Dy_amplitude', Dy, ... 'Ry_amplitude', Ry, ... 'Rz_amplitude', Rz); initializeDisturbances('enable', false); set_param(conf_simulink, 'StopTime', '0.5'); % Simulation is performed sim(mdl); % Sample's motion is computed from "external metrology" T_sim = [simout.y.R.Data(:,:,end), [simout.y.x.Data(end); simout.y.y.Data(end); simout.y.z.Data(end)]; [0,0,0,1]]; sim_dx = T_sim(1,4); sim_dy = T_sim(2,4); sim_dz = T_sim(3,4); sim_ry = atan2( T_sim(1, 3), sqrt(T_sim(1, 1)^2 + T_sim(1, 2)^2)); sim_rx = atan2(-T_sim(2, 3)/cos(Ery), T_sim(3, 3)/cos(Ery)); sim_rz = atan2(-T_sim(1, 2)/cos(Ery), T_sim(1, 1)/cos(Ery));