commit 8c4aeeb8bf82b5870f580e9f18c099f230c186e5 Author: Thomas Dehaeze Date: Fri Feb 17 11:28:06 2023 +0100 Initial commit diff --git a/.gitignore b/.gitignore new file mode 100644 index 0000000..6b7e1a4 --- /dev/null +++ b/.gitignore @@ -0,0 +1,260 @@ +mat/ +figures/ +ltximg/ +slprj/ +matlab/slprj/ +*.slxc + + +# ============================================================ +# ============================================================ +# LATEX +# ============================================================ +# ============================================================ + +## Core latex/pdflatex auxiliary files: +*.aux +*.lof +*.log +*.lot +*.fls +*.out +*.toc +*.fmt +*.fot +*.cb +*.cb2 +.*.lb + +## Intermediate documents: +*.dvi +*.xdv +*-converted-to.* +# these rules might exclude image files for figures etc. +# *.ps +# *.eps +# *.pdf + +## Generated if empty string is given at "Please type another file name for output:" +.pdf + +## Bibliography auxiliary files (bibtex/biblatex/biber): +*.bbl +*.bcf +*.blg +*-blx.aux +*-blx.bib +*.run.xml + +## Build tool auxiliary files: +*.fdb_latexmk +*.synctex +*.synctex(busy) +*.synctex.gz +*.synctex.gz(busy) +*.pdfsync + +## Build tool directories for auxiliary files +# latexrun +latex.out/ + +## Auxiliary and intermediate files from other packages: +# algorithms +*.alg +*.loa + +# achemso +acs-*.bib + +# amsthm +*.thm + +# beamer +*.nav +*.pre +*.snm +*.vrb + +# changes +*.soc + +# cprotect +*.cpt + +# elsarticle (documentclass of Elsevier journals) +*.spl + +# endnotes +*.ent + +# fixme +*.lox + +# feynmf/feynmp +*.mf +*.mp +*.t[1-9] +*.t[1-9][0-9] +*.tfm + +#(r)(e)ledmac/(r)(e)ledpar +*.end +*.?end +*.[1-9] +*.[1-9][0-9] +*.[1-9][0-9][0-9] +*.[1-9]R +*.[1-9][0-9]R +*.[1-9][0-9][0-9]R +*.eledsec[1-9] +*.eledsec[1-9]R +*.eledsec[1-9][0-9] +*.eledsec[1-9][0-9]R +*.eledsec[1-9][0-9][0-9] +*.eledsec[1-9][0-9][0-9]R + +# glossaries +*.acn +*.acr +*.glg +*.glo +*.gls +*.glsdefs + +# gnuplottex +*-gnuplottex-* + +# gregoriotex +*.gaux +*.gtex + +# htlatex +*.4ct +*.4tc +*.idv +*.lg +*.trc +*.xref + +# hyperref +*.brf + +# knitr +*-concordance.tex +# TODO Comment the next line if you want to keep your tikz graphics files +*.tikz +*-tikzDictionary + +# listings +*.lol + +# makeidx +*.idx +*.ilg +*.ind +*.ist + +# minitoc +*.maf +*.mlf +*.mlt +*.mtc[0-9]* +*.slf[0-9]* +*.slt[0-9]* +*.stc[0-9]* + +# minted +_minted* +*.pyg + +# morewrites +*.mw + +# nomencl +*.nlg +*.nlo +*.nls + +# pax +*.pax + +# pdfpcnotes +*.pdfpc + +# sagetex +*.sagetex.sage +*.sagetex.py +*.sagetex.scmd + +# scrwfile +*.wrt + +# sympy +*.sout +*.sympy +sympy-plots-for-*.tex/ + +# pdfcomment +*.upa +*.upb + +# pythontex +*.pytxcode +pythontex-files-*/ + +# thmtools +*.loe + +# TikZ & PGF +*.dpth +*.md5 +*.auxlock + +# todonotes +*.tdo + +# easy-todo +*.lod + +# xmpincl +*.xmpi + +# xindy +*.xdy + +# xypic precompiled matrices +*.xyc + +# endfloat +*.ttt +*.fff + +# Latexian +TSWLatexianTemp* + +## Editors: 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0000000..8710abc --- /dev/null +++ b/matlab/uniaxial_1_micro_station_model.m @@ -0,0 +1,159 @@ +%% Clear Workspace and Close figures +clear; close all; clc; + +%% Intialize Laplace variable +s = zpk('s'); + +%% Path for functions, data and scripts +addpath('./mat/'); % Path for data +addpath('./src/'); % Path for functions + +%% Colors for the figures +colors = colororder; + +%% Uniaxial Simscape model name +mdl = 'nass_uniaxial_model'; + +%% Frequency Vector [Hz] +freqs = logspace(0, 3, 1000); + + + +% #+name: fig:micro_station_meas_dynamics_schematic +% #+caption: Measurement setup - Schematic +% #+RESULTS: +% [[file:figs/micro_station_meas_dynamics_schematic.png]] + +% Due to the bad coherence at low frequency, the frequency response functions are only shown between 20 and 200Hz (Figure ref:fig:uniaxial_measured_frf_vertical). + + +%% Load measured FRF +load('meas_microstation_frf.mat'); + +%% Measured Frequency Response Functions in the vertical direction +figure; +tiledlayout(3, 1, 'TileSpacing', 'Compact', 'Padding', 'None'); + +ax1 = nexttile([2,1]); +hold on; +plot(f(f>20), abs(frf_Fhx_to_Dhx(f>20)), ... + 'DisplayName', '$D_{h}/F_{h}$'); +plot(f(f>20), abs(frf_Fgx_to_Dhx(f>20)), ... + 'DisplayName', '$D_{h}/F_{g}$'); +plot(f(f>20), abs(frf_Fgx_to_Dgx(f>20)), ... + 'DisplayName', '$D_{g}/F_{g}$'); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +ylabel('Amplitude [m/N]'); set(gca, 'XTickLabel',[]); +ylim([1e-10, 2e-6]); +legend('location', 'northwest', 'FontSize', 8, 'NumColumns', 1); + +ax2 = nexttile; +hold on; +plot(f(f>20), 180/pi*unwrap(angle(frf_Fhx_to_Dhx(f>20)))); +plot(f(f>30), 180/pi*unwrap(angle(frf_Fgx_to_Dhx(f>30)))); +plot(f(f>20), 180/pi*unwrap(angle(frf_Fgx_to_Dgx(f>20)))); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'lin'); +xlabel('Frequency [Hz]'); ylabel('Phase [deg]'); +hold off; +yticks(-360:90:360); +ylim([-360, 10]); + +linkaxes([ax1,ax2],'x'); +xlim([1, 500]); + + + +% #+name: fig:uniaxial_model_micro_station +% #+caption: Uniaxial model of the micro-station +% #+RESULTS: +% [[file:figs/uniaxial_model_micro_station.png]] + +% Masses are estimated from the CAD. + +%% Parameters - Mass +mh = 15; % Micro Hexapod [kg] +mt = 1200; % Ty + Ry + Rz [kg] +mg = 2500; % Granite [kg] + + + +% And stiffnesses from the data-sheet of stage manufacturers. + +%% Parameters - Stiffnesses +kh = 6.11e+07; % [N/m] +kt = 5.19e+08; % [N/m] +kg = 9.50e+08; % [N/m] + + + +% The damping coefficients are tuned to match the identified damping from the measurements. + +%% Parameters - damping +ch = 2*0.05*sqrt(kh*mh); % [N/(m/s)] +ct = 2*0.05*sqrt(kt*mt); % [N/(m/s)] +cg = 2*0.08*sqrt(kg*mg); % [N/(m/s)] + +%% Save model parameters +save('./mat/uniaxial_micro_station_parameters.mat', 'mh', 'mt', 'mg', 'ch', 'ct', 'cg', 'kh', 'kt', 'kg') + +%% Disable the Nano-Hexpod for now +model_config = struct(); +model_config.nhexa = "none"; +model_config.controller = "open_loop"; + +%% Identify the transfer function from u to taum +clear io; io_i = 1; +io(io_i) = linio([mdl, '/micro_station/Fg'], 1, 'openinput'); io_i = io_i + 1; % Hammer on Granite +io(io_i) = linio([mdl, '/micro_station/Fh'], 1, 'openinput'); io_i = io_i + 1; % Hammer on Hexapod +io(io_i) = linio([mdl, '/micro_station/xg'], 1, 'openoutput'); io_i = io_i + 1; % Absolute motion of Granite +io(io_i) = linio([mdl, '/micro_station/xh'], 1, 'openoutput'); io_i = io_i + 1; % Absolute motion of Hexapod + +%% Perform the model extraction +G_id = linearize(mdl, io, 0.0); +G_id.InputName = {'Fg', 'Fh'}; +G_id.OutputName = {'Dg', 'Dh'}; + +% Comparison of the model and measurements +% The comparison between the measurements and the model is done in Figure ref:fig:uniaxial_comp_frf_meas_model. + +% As the model is simplistic, the goal is not to match exactly the measurement but to have a first approximation. +% More accurate models will be used later on. + + +%% Comparison of the measured FRF and identified ones from the uni-axial model +figure; +tiledlayout(3, 1, 'TileSpacing', 'Compact', 'Padding', 'None'); + +ax1 = nexttile([2,1]); +hold on; +plot(f(f>20), abs(frf_Fhz_to_Dhz(f>20)), '-', 'color', colors(1,:), 'DisplayName', '$D_{h,z}/F_{h,z}$'); +plot(f(f>20), abs(frf_Fgz_to_Dhz(f>20)), '-', 'color', colors(2,:), 'DisplayName', '$D_{h,z}/F_{g,z}$'); +plot(f(f>20), abs(frf_Fgz_to_Dgz(f>20)), '-', 'color', colors(3,:), 'DisplayName', '$D_{g,z}/F_{g,z}$'); +plot(freqs, abs(squeeze(freqresp(G_id('Dh', 'Fh'), freqs, 'Hz'))), '--', 'color', colors(1,:), 'DisplayName', '$D_{h,z}/F_{h,z}$ (model)'); +plot(freqs, abs(squeeze(freqresp(G_id('Dh', 'Fg'), freqs, 'Hz'))), '--', 'color', colors(2,:), 'DisplayName', '$D_{h,z}/F_{g,z}$ (model)'); +plot(freqs, abs(squeeze(freqresp(G_id('Dg', 'Fg'), freqs, 'Hz'))), '--', 'color', colors(3,:), 'DisplayName', '$D_{g,z}/F_{g,z}$ (model)'); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +ylabel('Amplitude [m/N]'); set(gca, 'XTickLabel',[]); +ylim([1e-10, 2e-7]); +legend('location', 'northwest', 'FontSize', 8, 'NumColumns', 2); + +ax2 = nexttile; +hold on; +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_id('Dh', 'Fh'), freqs, 'Hz')))), '--', 'color', colors(1,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_id('Dh', 'Fg'), freqs, 'Hz')))), '--', 'color', colors(2,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_id('Dg', 'Fg'), freqs, 'Hz')))), '--', 'color', colors(3,:)); +plot(f(f>20), 180/pi*unwrap(angle(frf_Fhx_to_Dhx(f>20))), '-', 'color', colors(1,:)); +plot(f(f>30), 180/pi*unwrap(angle(frf_Fgx_to_Dhx(f>30))), '-', 'color', colors(2,:)); +plot(f(f>20), 180/pi*unwrap(angle(frf_Fgx_to_Dgx(f>20))), '-', 'color', colors(3,:)); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'lin'); +xlabel('Frequency [Hz]'); ylabel('Phase [deg]'); +hold off; +yticks(-360:90:360); +ylim([-360, 90]); + +linkaxes([ax1,ax2],'x'); +xlim([1, 500]); diff --git a/matlab/uniaxial_2_nano_hexapod_model.m b/matlab/uniaxial_2_nano_hexapod_model.m new file mode 100644 index 0000000..32b4539 --- /dev/null +++ b/matlab/uniaxial_2_nano_hexapod_model.m @@ -0,0 +1,224 @@ +%% Clear Workspace and Close figures +clear; close all; clc; + +%% Intialize Laplace variable +s = zpk('s'); + +%% Path for functions, data and scripts +addpath('./mat/'); % Path for data +addpath('./src/'); % Path for functions + +%% Colors for the figures +colors = colororder; + +%% Uniaxial Simscape model name +mdl = 'nass_uniaxial_model'; + +%% Frequency Vector [Hz] +freqs = logspace(0, 3, 1000); + +%% Load the micro-station parameters +load('uniaxial_micro_station_parameters.mat') + +% Nano-Hexapod Parameters +% The parameters for the nano-hexapod and sample are: +% - $m_s$ the sample mass that can vary from 1kg up to 50kg +% - $m_n$ the nano-hexapod mass which is set to 15kg +% - $k_n$ the nano-hexapod stiffness, which can vary depending on the chosen architecture/technology + +% As a first example, let's choose a nano-hexapod stiffness of $10\,N/\mu m$ and a sample mass of 10kg. + + +%% Nano-Hexapod Parameters +mn = 15; % [kg] +kn = 1e7; % [N/m] +cn = 2*0.01*sqrt(mn*kn); % [N/(m/s)] + +%% Sample Mass +ms = 10; % [kg] + +% Obtained Dynamics +% The sensitivity to disturbances (i.e. $x_f$, $f_t$ and $f_s$) are shown in Figure ref:fig:uniaxial_sensitivity_dist_first_params. +% The /plant/ (i.e. the transfer function from actuator force $f$ to measured displacement $d$) is shown in Figure ref:fig:uniaxial_plant_first_params. + +% For further analysis, 9 configurations are considered: three nano-hexapod stiffnesses ($k_n = 0.01\,N/\mu m$, $k_n = 1\,N/\mu m$ and $k_n = 100\,N/\mu m$) combined with three sample's masses ($m_s = 1\,kg$, $m_s = 25\,kg$ and $m_s = 50\,kg$). + + +%% Use 1DoF Nano-Hexpod model +model_config = struct(); +model_config.nhexa = "1dof"; +model_config.controller = "open_loop"; + +%% Identify the transfer function from disturbances and force actuator to d +clear io; io_i = 1; +io(io_i) = linio([mdl, '/controller'], 1, 'openinput'); io_i = io_i + 1; % Force Actuator +io(io_i) = linio([mdl, '/fs'], 1, 'openinput'); io_i = io_i + 1; % Force applied on the sample +io(io_i) = linio([mdl, '/micro_station/xf'], 1, 'openinput'); io_i = io_i + 1; % Floor Motion +io(io_i) = linio([mdl, '/micro_station/ft'], 1, 'openinput'); io_i = io_i + 1; % Stage disturbances +io(io_i) = linio([mdl, '/d'] , 1, 'openoutput'); io_i = io_i + 1; % Metrology + +%% Perform the model extraction +G_ol = linearize(mdl, io, 0.0); +G_ol.InputName = {'f', 'fs', 'xf', 'ft'}; +G_ol.OutputName = {'d'}; + +%% Sensitivity to disturbances +figure; +tiledlayout(1, 3, 'TileSpacing', 'Compact', 'Padding', 'None'); + +ax1 = nexttile(); +hold on; +plot(freqs, abs(squeeze(freqresp(G_ol('d', 'fs'), freqs, 'Hz')))); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +ylabel('Amplitude $d/f_{s}$ [m/N]'); xlabel('Frequency [Hz]'); +xticks([1e0, 1e1, 1e2]); + +ax2 = nexttile(); +hold on; +plot(freqs, abs(squeeze(freqresp(G_ol('d', 'ft'), freqs, 'Hz')))); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +ylabel('Amplitude $d/f_{t}$ [m/N]'); xlabel('Frequency [Hz]'); +xticks([1e0, 1e1, 1e2]); + +ax3 = nexttile(); +hold on; +plot(freqs, abs(squeeze(freqresp(G_ol('d', 'xf'), freqs, 'Hz')))); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +ylabel('Amplitude $d/x_{f}$ [m/m]'); xlabel('Frequency [Hz]'); +xticks([1e0, 1e1, 1e2]); + +linkaxes([ax1,ax2,ax3],'x'); +xlim([1, 500]); + + + +% #+name: fig:uniaxial_sensitivity_dist_first_params +% #+caption: Sensitivity to disturbances +% #+RESULTS: +% [[file:figs/uniaxial_sensitivity_dist_first_params.png]] + + +%% Bode Plot of the transfer function from actuator forces to measured displacement by the metrology +figure; +tiledlayout(3, 1, 'TileSpacing', 'Compact', 'Padding', 'None'); + +ax1 = nexttile([2,1]); +hold on; +plot(freqs, abs(squeeze(freqresp(G_ol('d', 'f'), freqs, 'Hz')))); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +ylabel('Amplitude $d/f$ [m/N]'); set(gca, 'XTickLabel',[]); + +ax2 = nexttile; +hold on; +plot(freqs, 180/pi*angle(squeeze(freqresp(G_ol('d', 'f'), freqs, 'Hz')))); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'lin'); +xlabel('Frequency [Hz]'); ylabel('Phase [deg]'); +hold off; +yticks(-360:90:360); +ylim([-180, 0]); + +linkaxes([ax1,ax2],'x'); +xlim([1, 500]); + +% Identification of all combination of stiffnesses / masses :noexport: + +%% Use 1DoF Nano-Hexpod model +model_config = struct(); +model_config.nhexa = "1dof"; +model_config.controller = "open_loop"; + +%% Nano-Hexapod Mass +mn = 15; % Nano-Hexapod mass [kg] + +%% Identification of all combination of stiffnesses / masses +clear io; io_i = 1; +io(io_i) = linio([mdl, '/controller'], 1, 'openinput'); io_i = io_i + 1; % Actuator Force +io(io_i) = linio([mdl, '/micro_station/xf'], 1, 'openinput'); io_i = io_i + 1; % Floor Motion +io(io_i) = linio([mdl, '/micro_station/ft'], 1, 'openinput'); io_i = io_i + 1; % Stage vibrations +io(io_i) = linio([mdl, '/fs'], 1, 'openinput'); io_i = io_i + 1; % Direct sample forces +io(io_i) = linio([mdl, '/dL'], 1, 'openoutput'); io_i = io_i + 1; % Relative Motion Sensor +io(io_i) = linio([mdl, '/fm'], 1, 'openoutput'); io_i = io_i + 1; % Force Sensor +io(io_i) = linio([mdl, '/vn'] , 1, 'openoutput'); io_i = io_i + 1; % Geophone +io(io_i) = linio([mdl, '/d'] , 1, 'openoutput'); io_i = io_i + 1; % Metrology Output + +%% Light Sample +ms = 1; % Sample Mass [kg] + +% Voice Coil (i.e. soft) Nano-Hexapod +kn = 1e4; % Nano-Hexapod Stiffness [N/m] +cn = 2*0.01*sqrt((ms + mn)*kn); % Nano-Hexapod Damping [N/(m/s)] +G_vc_light = linearize(mdl, io, 0.0); +G_vc_light.InputName = {'f', 'xf', 'ft', 'fs'}; +G_vc_light.OutputName = {'dL', 'fm', 'vn', 'd'}; + +% APA (i.e. relatively stiff) Nano-Hexapod +kn = 1e6; % Nano-Hexapod Stiffness [N/m] +cn = 2*0.01*sqrt((ms + mn)*kn); % Nano-Hexapod Damping [N/(m/s)] +G_md_light = linearize(mdl, io, 0.0); +G_md_light.InputName = {'f', 'xf', 'ft', 'fs'}; +G_md_light.OutputName = {'dL', 'fm', 'vn', 'd'}; + +% Piezoelectric (i.e. stiff) Nano-Hexapod +kn = 1e8; % Nano-Hexapod Stiffness [N/m] +cn = 2*0.01*sqrt((ms + mn)*kn); % Nano-Hexapod Damping [N/(m/s)] +G_pz_light = linearize(mdl, io, 0.0); +G_pz_light.InputName = {'f', 'xf', 'ft', 'fs'}; +G_pz_light.OutputName = {'dL', 'fm', 'vn', 'd'}; + +%% Mid Sample +ms = 25; % Sample Mass [kg] + +% Voice Coil (i.e. soft) Nano-Hexapod +kn = 1e4; % Nano-Hexapod Stiffness [N/m] +cn = 2*0.01*sqrt((ms + mn)*kn); % Nano-Hexapod Damping [N/(m/s)] +G_vc_mid = linearize(mdl, io, 0.0); +G_vc_mid.InputName = {'f', 'xf', 'ft', 'fs'}; +G_vc_mid.OutputName = {'dL', 'fm', 'vn', 'd'}; + +% APA (i.e. relatively stiff) Nano-Hexapod +kn = 1e6; % Nano-Hexapod Stiffness [N/m] +cn = 2*0.01*sqrt((ms + mn)*kn); % Nano-Hexapod Damping [N/(m/s)] +G_md_mid = linearize(mdl, io, 0.0); +G_md_mid.InputName = {'f', 'xf', 'ft', 'fs'}; +G_md_mid.OutputName = {'dL', 'fm', 'vn', 'd'}; + +% Piezoelectric (i.e. stiff) Nano-Hexapod +kn = 1e8; % Nano-Hexapod Stiffness [N/m] +cn = 2*0.01*sqrt((ms + mn)*kn); % Nano-Hexapod Damping [N/(m/s)] +G_pz_mid = linearize(mdl, io, 0.0); +G_pz_mid.InputName = {'f', 'xf', 'ft', 'fs'}; +G_pz_mid.OutputName = {'dL', 'fm', 'vn', 'd'}; + +%% Heavy Sample +ms = 50; % Sample Mass [kg] + +% Voice Coil (i.e. soft) Nano-Hexapod +kn = 1e4; % Nano-Hexapod Stiffness [N/m] +cn = 2*0.01*sqrt((ms + mn)*kn); % Nano-Hexapod Damping [N/(m/s)] +G_vc_heavy = linearize(mdl, io, 0.0); +G_vc_heavy.InputName = {'f', 'xf', 'ft', 'fs'}; +G_vc_heavy.OutputName = {'dL', 'fm', 'vn', 'd'}; + +% APA (i.e. relatively stiff) Nano-Hexapod +kn = 1e6; % Nano-Hexapod Stiffness [N/m] +cn = 2*0.01*sqrt((ms + mn)*kn); % Nano-Hexapod Damping [N/(m/s)] +G_md_heavy = linearize(mdl, io, 0.0); +G_md_heavy.InputName = {'f', 'xf', 'ft', 'fs'}; +G_md_heavy.OutputName = {'dL', 'fm', 'vn', 'd'}; + +% Piezoelectric (i.e. stiff) Nano-Hexapod +kn = 1e8; % Nano-Hexapod Stiffness [N/m] +cn = 2*0.01*sqrt((ms + mn)*kn); % Nano-Hexapod Damping [N/(m/s)] +G_pz_heavy = linearize(mdl, io, 0.0); +G_pz_heavy.InputName = {'f', 'xf', 'ft', 'fs'}; +G_pz_heavy.OutputName = {'dL', 'fm', 'vn', 'd'}; + +%% Save All Identified Plants +save('./mat/uniaxial_plants.mat', 'G_vc_light', 'G_md_light', 'G_pz_light', ... + 'G_vc_mid', 'G_md_mid', 'G_pz_mid', ... + 'G_vc_heavy', 'G_md_heavy', 'G_pz_heavy'); diff --git a/matlab/uniaxial_3_disturbances.m b/matlab/uniaxial_3_disturbances.m new file mode 100644 index 0000000..ea4492f --- /dev/null +++ b/matlab/uniaxial_3_disturbances.m @@ -0,0 +1,183 @@ +%% Clear Workspace and Close figures +clear; close all; clc; + +%% Intialize Laplace variable +s = zpk('s'); + +%% Path for functions, data and scripts +addpath('./mat/'); % Path for data +addpath('./src/'); % Path for functions + +%% Colors for the figures +colors = colororder; + +%% Uniaxial Simscape model name +mdl = 'nass_uniaxial_model'; + +%% Frequency Vector [Hz] +freqs = logspace(0, 3, 1000); + +%% Load the micro-station parameters +load('uniaxial_micro_station_parameters.mat'); + +% Ground Motion +% The geophone fixed to the floor to measure the floor motion. + + +%% Load floor motion data +% t: time in [s] +% V: measured voltage genrated by the geophone and amplified by a 60dB gain voltage amplifier [V] +load('ground_motion_measurement.mat', 't', 'V'); + + + +% The voltage generated by each geophone is amplified using a voltage amplifier (gain of 60dB) before going to the ADC. +% The sensitivity of the geophone as well as the gain of the voltage amplifier are then taken into account to reconstruct the floor displacement. + +%% Sensitivity of the geophone +S0 = 88; % Sensitivity [V/(m/s)] +f0 = 2; % Cut-off frequency [Hz] + +S = S0*(s/2/pi/f0)/(1+s/2/pi/f0); % Geophone's transfer function [V/(m/s)] + +%% Gain of the voltage amplifier +G0_db = 60; % [dB] +G0 = 10^(G0_db/20); % [abs] + +%% Transfer function from measured voltage to displacement +G_geo = 1/S/G0/s; % [m/V] + + + +% The PSD $S_{V_f}$ of the measured voltage $V_f$ is computed. + +%% Compute measured voltage PSD +Fs = 1/(t(2)-t(1)); % Sampling Frequency [Hz] +win = hanning(ceil(2*Fs)); % Hanning window + +[psd_V, f] = pwelch(V, win, [], [], Fs); % [V^2/Hz] + + + +% The PSD of the corresponding displacement can be computed as follows: +% \begin{equation} +% S_{x_f}(\omega) = \frac{S_{V_f}(\omega)}{|S_{\text{geo}}(j\omega)| \cdot G_{\text{amp}} \cdot \omega} +% \end{equation} +% with: +% - $S_{\text{geo}}$ the sensitivity of the Geophone in $[Vs/m]$ +% - $G_{\text{amp}}$ the gain of the voltage amplifier +% - $\omega$ is here to integrate and have the displacement instead of the velocity + + +%% Ground Motion ASD +psd_xf = psd_V.*abs(squeeze(freqresp(G_geo, f, 'Hz'))).^2; % [m^2/Hz] + + + +% The amplitude spectral density $\Gamma_{x_f}$ of the measured displacement $x_f$ is shown in Figure ref:fig:asd_floor_motion_id31. + + +%% Measured Amplitude Spectral Density of the Floor motion on ID31 +figure; +hold on; +plot(f, sqrt(psd_xf), 'DisplayName', '$\Gamma_{x_{f}}$'); +hold off; +set(gca, 'xscale', 'log'); set(gca, 'yscale', 'log'); +xlabel('Frequency [Hz]'); ylabel('Ampl. Spectral Density $\left[\frac{m}{\sqrt{Hz}}\right]$') +xlim([1, 500]); +legend('location', 'northeast', 'FontSize', 8, 'NumColumns', 1); + +% Stage Vibration +% During Spindle rotation (here at 6rpm), the granite velocity and micro-hexapod's top platform velocity are measured with the geophones. + + +%% Measured velocity of granite and hexapod during spindle rotation +% t: time in [s] +% vg: measured granite velocity [m/s] +% vg: measured micro-hexapod's top platform velocity [m/s] +load('meas_spindle_on.mat', 't', 'vg', 'vh'); +spindle_off = load('meas_spindle_off.mat', 't', 'vg', 'vh'); % No Rotation + + + +% The Power Spectral Density of the relative velocity between the hexapod and the granite is computed. + +%% Compute Power Spectral Density of the relative velocity between granite and hexapod during spindle rotation +Fs = 1/(t(2)-t(1)); % Sampling Frequency [Hz] +win = hanning(ceil(2*Fs)); % Hanning window + +[psd_vft, f] = pwelch(vh-vg, win, [], [], Fs); % [(m/s)^2/Hz] +[psd_off, ~] = pwelch(spindle_off.vh-spindle_off.vg, win, [], [], Fs); % [(m/s)^2/Hz] + + + +% It is then integrated to obtain the Amplitude Spectral Density of the relative motion which is compared with a non-rotating case (Figure ref:fig:asd_vibration_spindle_rotation). +% It is shown that the spindle rotation induces vibrations in a wide frequency spectrum. + + +%% Measured Amplitude Spectral Density of the relative motion between the granite and the micro-hexapod's top platform during Spindle rotating +figure; +hold on; +plot(f, sqrt(psd_vft)./(2*pi*f), 'DisplayName', '6rpm'); +plot(f, sqrt(psd_off)./(2*pi*f), 'DisplayName', '0rpm'); +hold off; +set(gca, 'xscale', 'log'); set(gca, 'yscale', 'log'); +xlabel('Frequency [Hz]'); ylabel('Ampl. Spectral Density $\left[\frac{m}{\sqrt{Hz}}\right]$') +legend('location', 'northeast', 'FontSize', 8, 'NumColumns', 1); +xlim([1, 500]); ylim([1e-12, 1e-7]) + + + +% #+name: fig:asd_vibration_spindle_rotation +% #+caption: Measured Amplitude Spectral Density of the relative motion between the granite and the micro-hexapod's top platform during Spindle rotating +% #+RESULTS: +% [[file:figs/asd_vibration_spindle_rotation.png]] + +% In order to compute the equivalent disturbance force $f_t$ that induces such motion, the transfer function from $f_t$ to the relative motion of the hexapod's top platform and the granite is extracted from the model. + +%% Disable the Nano-Hexpod for now +model_config = struct(); +model_config.nhexa = "none"; +model_config.controller = "open_loop"; + +%% Identify the transfer function from u to taum +clear io; io_i = 1; +io(io_i) = linio([mdl, '/micro_station/ft'], 1, 'openinput'); io_i = io_i + 1; % Stage Disturbance Force +io(io_i) = linio([mdl, '/micro_station/xg'], 1, 'openoutput'); io_i = io_i + 1; % Absolute motion of Granite +io(io_i) = linio([mdl, '/micro_station/xh'], 1, 'openoutput'); io_i = io_i + 1; % Absolute motion of Hexapod + +%% Perform the model extraction +G = linearize(mdl, io, 0.0); +G.InputName = {'ft'}; +G.OutputName = {'Dg', 'Dh'}; + + + +% The power spectral density $\Gamma_{f_{t}}$ of the disturbance force can be computed as follows: +% \begin{equation} +% \Gamma_{f_{t}}(\omega) = \frac{\Gamma_{v_{t}}(\omega)}{|G_{\text{model}}(j\omega)|^2} +% \end{equation} +% with: +% - $\Gamma_{v_{t}}$ the measured power spectral density of the relative motion between the micro-hexapod's top platform and the granite during the spindle's rotation +% - $G_{\text{model}}$ the transfer function (extracted from the uniaxial model) from $f_t$ to the relative motion between the micro-hexapod's top platform and the granite + + +%% Power Spectral Density of the equivalent force ft +psd_ft = (psd_vft./(2*pi*f).^2)./abs(squeeze(freqresp(G('Dh', 'ft') - G('Dg', 'ft'), f, 'Hz'))).^2; + + + +% The obtained amplitude spectral density of the disturbance force $f_t$ is shown in Figure ref:fig:asd_disturbance_force. + +%% Estimated disturbance force ft from measurement and uniaxial model +figure; +hold on; +plot(f, sqrt(psd_ft), 'DisplayName', '$\Gamma_{f_{t}}$'); +hold off; +set(gca, 'xscale', 'log'); set(gca, 'yscale', 'log'); +xlabel('Frequency [Hz]'); ylabel('Ampl. Spectral Density $\left[\frac{N}{\sqrt{Hz}}\right]$') +xlim([1, 500]); +legend('location', 'northeast', 'FontSize', 8, 'NumColumns', 1); + +%% Save PSD of disturbances +save('./mat/uniaxial_disturbance_psd.mat', 'f', 'psd_ft', 'psd_xf'); diff --git a/matlab/uniaxial_4_dynamic_noise_budget.m b/matlab/uniaxial_4_dynamic_noise_budget.m new file mode 100644 index 0000000..a7e4b85 --- /dev/null +++ b/matlab/uniaxial_4_dynamic_noise_budget.m @@ -0,0 +1,150 @@ +%% Clear Workspace and Close figures +clear; close all; clc; + +%% Intialize Laplace variable +s = zpk('s'); + +%% Path for functions, data and scripts +addpath('./mat/'); % Path for data +addpath('./src/'); % Path for functions + +%% Colors for the figures +colors = colororder; + +%% Frequency Vector [Hz] +freqs = logspace(0, 3, 1000); + +%% Load the PSD of disturbances +load('uniaxial_disturbance_psd.mat', 'f', 'psd_ft', 'psd_xf'); + +%% Load Plants Dynamics +load('uniaxial_plants.mat', 'G_vc_light', 'G_md_light', 'G_pz_light', ... + 'G_vc_mid', 'G_md_mid', 'G_pz_mid', ... + 'G_vc_heavy', 'G_md_heavy', 'G_pz_heavy'); + +% Sensitivity to disturbances +% From the Uni-axial model, the transfer function from the disturbances ($f_s$, $x_f$ and $f_t$) to the displacement $d$ are computed. + +% This is done for *two extreme sample masses* $m_s = 1\,\text{kg}$ and $m_s = 50\,\text{kg}$ and *three nano-hexapod stiffnesses*: +% - $k_n = 0.01\,N/\mu m$ that could represent a voice coil actuator with soft flexible guiding +% - $k_n = 1\,N/\mu m$ that could represent a voice coil actuator with a stiff flexible guiding or a mechanically amplified piezoelectric actuator +% - $k_n = 100\,N/\mu m$ that could represent a stiff piezoelectric stack actuator + +% The obtained sensitivity to disturbances for the three nano-hexapod stiffnesses are shown in Figure ref:fig:uniaxial_sensitivity_disturbances_nano_hexapod_stiffnesses for the light sample (same conclusions can be drawn with the heavy one). + +% #+begin_important +% From Figure ref:fig:uniaxial_sensitivity_disturbances_nano_hexapod_stiffnesses, following can be concluded for the *soft nano-hexapod*: +% - It is more sensitive to forces applied on the sample (cable forces for instance), which is expected due to the lower stiffness +% - Between the suspension mode of the nano-hexapod (here at 5Hz) and the first mode of the micro-station (here at 70Hz), the disturbances induced by the stage vibrations are filtered out. +% - Above the suspension mode of the nano-hexapod, the sample's motion is unaffected by the floor motion, and therefore the sensitivity to floor motion is almost $1$. +% #+end_important + + +%% Sensitivity to disturbances for three different nano-hexpod stiffnesses +figure; +tiledlayout(1, 3, 'TileSpacing', 'Compact', 'Padding', 'None'); + +ax1 = nexttile(); +hold on; +plot(freqs, abs(squeeze(freqresp(G_vc_light('d', 'fs'), freqs, 'Hz')))); +plot(freqs, abs(squeeze(freqresp(G_md_light('d', 'fs'), freqs, 'Hz')))); +plot(freqs, abs(squeeze(freqresp(G_pz_light('d', 'fs'), freqs, 'Hz')))); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +ylabel('Amplitude $d/f_{s}$ [m/N]'); xlabel('Frequency [Hz]'); +xticks([1e0, 1e1, 1e2]); + +ax2 = nexttile(); +hold on; +plot(freqs, abs(squeeze(freqresp(G_vc_light('d', 'ft'), freqs, 'Hz')))); +plot(freqs, abs(squeeze(freqresp(G_md_light('d', 'ft'), freqs, 'Hz')))); +plot(freqs, abs(squeeze(freqresp(G_pz_light('d', 'ft'), freqs, 'Hz')))); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +ylabel('Amplitude $d/f_{t}$ [m/N]'); xlabel('Frequency [Hz]'); +xticks([1e0, 1e1, 1e2]); + +ax3 = nexttile(); +hold on; +plot(freqs, abs(squeeze(freqresp(G_vc_light('d', 'xf'), freqs, 'Hz'))), 'DisplayName', '$k_n = 0.01\,N/\mu m$'); +plot(freqs, abs(squeeze(freqresp(G_md_light('d', 'xf'), freqs, 'Hz'))), 'DisplayName', '$k_n = 1 \,N/\mu m$'); +plot(freqs, abs(squeeze(freqresp(G_pz_light('d', 'xf'), freqs, 'Hz'))), 'DisplayName', '$k_n = 100 \,N/\mu m$'); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +ylabel('Amplitude $d/x_{f}$ [m/m]'); xlabel('Frequency [Hz]'); +xticks([1e0, 1e1, 1e2]); +legend('location', 'southeast', 'FontSize', 8, 'NumColumns', 1); + +linkaxes([ax1,ax2,ax3],'x'); +xlim([1, 500]); + +% Open-Loop Dynamic Noise Budgeting +% Now, the power spectral density of the disturbances is taken into account to estimate the residual motion $d$ in each case. + +% The Cumulative Amplitude Spectrum of the relative motion $d$ due to both the floor motion $x_f$ and the stage vibrations $f_t$ are shown in Figure ref:fig:uniaxial_cas_d_disturbances_stiffnesses for the three nano-hexapod stiffnesses. + +% It is shown that the effect of the floor motion is much less than the stage vibrations, except for the soft nano-hexapod below 5Hz. + + +%% Cumulative Amplitude Spectrum of the relative motion d, due to both the floor motion and the stage vibrations +figure; +tiledlayout(1, 1, 'TileSpacing', 'Compact', 'Padding', 'None'); + +ax1 = nexttile(); +hold on; +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_vc_light('d', 'ft'), f, 'Hz'))).^2)))), '-', 'color', colors(1,:), 'DisplayName', '$f_t$'); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_md_light('d', 'ft'), f, 'Hz'))).^2)))), '-', 'color', colors(2,:), 'DisplayName', '$f_t$'); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_pz_light('d', 'ft'), f, 'Hz'))).^2)))), '-', 'color', colors(3,:), 'DisplayName', '$f_t$'); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_xf.*abs(squeeze(freqresp(G_vc_light('d', 'xf'), f, 'Hz'))).^2)))), '--', 'color', colors(1,:), 'DisplayName', '$x_f$ ($k_n = 0.01\,N/\mu m$)'); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_xf.*abs(squeeze(freqresp(G_md_light('d', 'xf'), f, 'Hz'))).^2)))), '--', 'color', colors(2,:), 'DisplayName', '$x_f$ ($k_n = 1 \,N/\mu m$)'); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_xf.*abs(squeeze(freqresp(G_pz_light('d', 'xf'), f, 'Hz'))).^2)))), '--', 'color', colors(3,:), 'DisplayName', '$x_f$ ($k_n = 100 \,N/\mu m$)'); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +ylabel('Cumulative Ampl. Spectrum [m]'); xlabel('Frequency [Hz]'); +legend('location', 'southwest', 'FontSize', 8, 'NumColumns', 2); + +xlim([1, 500]); +ylim([1e-12, 1e-6]) + + + +% #+name: fig:uniaxial_cas_d_disturbances_stiffnesses +% #+caption: Cumulative Amplitude Spectrum of the relative motion d, due to both the floor motion and the stage vibrations (light sample) +% #+RESULTS: +% [[file:figs/uniaxial_cas_d_disturbances_stiffnesses.png]] + +% The total cumulative amplitude spectrum for the three nano-hexapod stiffnesses and for the two sample's masses are shown in Figure ref:fig:uniaxial_cas_d_disturbances_payload_masses. +% The conclusion is that the sample's mass has little effect on the cumulative amplitude spectrum of the relative motion $d$. + + +%% Cumulative Amplitude Spectrum of the relative motion d due to all disturbances, for two sample masses +figure; +tiledlayout(1, 1, 'TileSpacing', 'Compact', 'Padding', 'None'); + +ax1 = nexttile(); +hold on; +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_vc_light('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_vc_light('d', 'xf'), f, 'Hz'))).^2)))), '-', ... + 'color', colors(1,:), 'DisplayName', '$m_s = 1\,kg$'); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_md_light('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_md_light('d', 'xf'), f, 'Hz'))).^2)))), '-', ... + 'color', colors(2,:), 'DisplayName', '$m_s = 1\,kg$'); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_pz_light('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_pz_light('d', 'xf'), f, 'Hz'))).^2)))), '-', ... + 'color', colors(3,:), 'DisplayName', '$m_s = 1\,kg$'); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_vc_heavy('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_vc_heavy('d', 'xf'), f, 'Hz'))).^2)))), '--', ... + 'color', colors(1,:), 'DisplayName', '$m_s = 50\,kg$ ($k_n = 0.01\,N/\mu m$)'); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_md_heavy('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_md_heavy('d', 'xf'), f, 'Hz'))).^2)))), '--', ... + 'color', colors(2,:), 'DisplayName', '$m_s = 50\,kg$ ($k_n = 1\,N/\mu m$)'); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_pz_heavy('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_pz_heavy('d', 'xf'), f, 'Hz'))).^2)))), '--', ... + 'color', colors(3,:), 'DisplayName', '$m_s = 50\,kg$ ($k_n = 100\,N/\mu m$)'); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +ylabel('Cumulative Ampl. Spectrum [m]'); xlabel('Frequency [Hz]'); +legend('location', 'southwest', 'FontSize', 8, 'NumColumns', 2); + +xlim([1, 500]); +ylim([1e-11, 3e-6]) diff --git a/matlab/uniaxial_5_active_damping.m b/matlab/uniaxial_5_active_damping.m new file mode 100644 index 0000000..8ad1346 --- /dev/null +++ b/matlab/uniaxial_5_active_damping.m @@ -0,0 +1,908 @@ +%% Clear Workspace and Close figures +clear; close all; clc; + +%% Intialize Laplace variable +s = zpk('s'); + +%% Path for functions, data and scripts +addpath('./mat/'); % Path for data +addpath('./src/'); % Path for functions + +%% Colors for the figures +colors = colororder; + +%% Frequency Vector [Hz] +freqs = logspace(0, 3, 1000); + +%% Load the PSD of disturbances +load('uniaxial_disturbance_psd.mat', 'f', 'psd_ft', 'psd_xf'); + +%% Load Plants Dynamics +load('uniaxial_plants.mat', 'G_vc_light', 'G_md_light', 'G_pz_light', ... + 'G_vc_mid', 'G_md_mid', 'G_pz_mid', ... + 'G_vc_heavy', 'G_md_heavy', 'G_pz_heavy'); + +% Plant Dynamics for Active Damping +% The plant dynamics for all three active damping techniques are shown in Figure ref:fig:uniaxial_plant_active_damping_techniques. +% All have *alternating poles and zeros* meaning that the phase is bounded to $\pm 90\,\text{deg}$ which makes the controller very robust. + +% When the nano-hexapod's suspension modes are at lower frequencies than the resonances of the micro-station (blue and red curves in Figure ref:fig:uniaxial_plant_active_damping_techniques), the resonances of the micro-stations have little impact on the transfer functions from IFF and DVF. + +% For the stiff nano-hexapod, the micro-station dynamics can be seen on the transfer functions in Figure ref:fig:uniaxial_plant_active_damping_techniques. +% Therefore, it is expected that the micro-station dynamics might impact the achievable damping if a stiff nano-hexapod is used. + + +%% Damped plants for three considered payload masses - Comparison of active damping techniques +figure; +tiledlayout(3, 3, 'TileSpacing', 'Compact', 'Padding', 'None'); + +ax1 = nexttile([2,1]); +hold on; +plot(freqs, abs(squeeze(freqresp(G_vc_light('fm', 'f'), freqs, 'Hz'))), '-', 'color', colors(1,:), 'DisplayName', '$m_s = 1\,kg$'); +plot(freqs, abs(squeeze(freqresp(G_vc_mid( 'fm', 'f'), freqs, 'Hz'))), '-.', 'color', colors(1,:), 'DisplayName', '$m_s = 25\,kg$'); +plot(freqs, abs(squeeze(freqresp(G_vc_heavy('fm', 'f'), freqs, 'Hz'))), '--', 'color', colors(1,:), 'DisplayName', '$m_s = 50\,kg$'); +plot(freqs, abs(squeeze(freqresp(G_md_light('fm', 'f'), freqs, 'Hz'))), '-', 'color', colors(2,:), 'HandleVisibility', 'off'); +plot(freqs, abs(squeeze(freqresp(G_md_mid( 'fm', 'f'), freqs, 'Hz'))), '-.', 'color', colors(2,:), 'HandleVisibility', 'off'); +plot(freqs, abs(squeeze(freqresp(G_md_heavy('fm', 'f'), freqs, 'Hz'))), '--', 'color', colors(2,:), 'HandleVisibility', 'off'); +plot(freqs, abs(squeeze(freqresp(G_pz_light('fm', 'f'), freqs, 'Hz'))), '-', 'color', colors(3,:), 'HandleVisibility', 'off'); +plot(freqs, abs(squeeze(freqresp(G_pz_mid( 'fm', 'f'), freqs, 'Hz'))), '-.', 'color', colors(3,:), 'HandleVisibility', 'off'); +plot(freqs, abs(squeeze(freqresp(G_pz_heavy('fm', 'f'), freqs, 'Hz'))), '--', 'color', colors(3,:), 'HandleVisibility', 'off'); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +ylabel('Amplitude [N/N]'); set(gca, 'XTickLabel',[]); +title('IFF: $f_m/f$'); +ldg = legend('location', 'southeast', 'FontSize', 8, 'NumColumns', 1); +ldg.ItemTokenSize = [20, 1]; + +ax2 = nexttile([2,1]); +hold on; +plot(freqs, abs(squeeze(freqresp(G_vc_light('dL', 'f'), freqs, 'Hz'))), '-', 'color', colors(1,:)); +plot(freqs, abs(squeeze(freqresp(G_vc_mid( 'dL', 'f'), freqs, 'Hz'))), '-.', 'color', colors(1,:)); +plot(freqs, abs(squeeze(freqresp(G_vc_heavy('dL', 'f'), freqs, 'Hz'))), '--', 'color', colors(1,:)); +plot(freqs, abs(squeeze(freqresp(G_md_light('dL', 'f'), freqs, 'Hz'))), '-', 'color', colors(2,:)); +plot(freqs, abs(squeeze(freqresp(G_md_mid( 'dL', 'f'), freqs, 'Hz'))), '-.', 'color', colors(2,:)); +plot(freqs, abs(squeeze(freqresp(G_md_heavy('dL', 'f'), freqs, 'Hz'))), '--', 'color', colors(2,:)); +plot(freqs, abs(squeeze(freqresp(G_pz_light('dL', 'f'), freqs, 'Hz'))), '-', 'color', colors(3,:)); +plot(freqs, abs(squeeze(freqresp(G_pz_mid( 'dL', 'f'), freqs, 'Hz'))), '-.', 'color', colors(3,:)); +plot(freqs, abs(squeeze(freqresp(G_pz_heavy('dL', 'f'), freqs, 'Hz'))), '--', 'color', colors(3,:)); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +ylabel('Amplitude [m/N]'); set(gca, 'XTickLabel',[]); +title('RDC: $d\mathcal{L}/f$'); + +ax3 = nexttile([2,1]); +hold on; +plot(freqs, abs(squeeze(freqresp(G_vc_light('vn', 'f'), freqs, 'Hz'))), '-', 'color', colors(1,:), 'DisplayName', '$k_n = 0.01\,N/\mu m$'); +plot(freqs, abs(squeeze(freqresp(G_vc_mid( 'vn', 'f'), freqs, 'Hz'))), '-.', 'color', colors(1,:), 'HandleVisibility', 'off'); +plot(freqs, abs(squeeze(freqresp(G_vc_heavy('vn', 'f'), freqs, 'Hz'))), '--', 'color', colors(1,:), 'HandleVisibility', 'off'); +plot(freqs, abs(squeeze(freqresp(G_md_light('vn', 'f'), freqs, 'Hz'))), '-', 'color', colors(2,:), 'DisplayName', '$k_n = 1\,N/\mu m$'); +plot(freqs, abs(squeeze(freqresp(G_md_mid( 'vn', 'f'), freqs, 'Hz'))), '-.', 'color', colors(2,:), 'HandleVisibility', 'off'); +plot(freqs, abs(squeeze(freqresp(G_md_heavy('vn', 'f'), freqs, 'Hz'))), '--', 'color', colors(2,:), 'HandleVisibility', 'off'); +plot(freqs, abs(squeeze(freqresp(G_pz_light('vn', 'f'), freqs, 'Hz'))), '-', 'color', colors(3,:), 'DisplayName', '$k_n = 100\,N/\mu m$'); +plot(freqs, abs(squeeze(freqresp(G_pz_mid( 'vn', 'f'), freqs, 'Hz'))), '-.', 'color', colors(3,:), 'HandleVisibility', 'off'); +plot(freqs, abs(squeeze(freqresp(G_pz_heavy('vn', 'f'), freqs, 'Hz'))), '--', 'color', colors(3,:), 'HandleVisibility', 'off'); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +ylabel('Amplitude [m/s/N]'); set(gca, 'XTickLabel',[]); +title('DVF: $v_n/f$'); +ldg = legend('location', 'southeast', 'FontSize', 8, 'NumColumns', 1); +ldg.ItemTokenSize = [20, 1]; + +ax1b = nexttile(); +hold on; +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_vc_light('fm', 'f'), freqs, 'Hz')))), '-', 'color', colors(1,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_vc_mid( 'fm', 'f'), freqs, 'Hz')))), '-.', 'color', colors(1,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_vc_heavy('fm', 'f'), freqs, 'Hz')))), '--', 'color', colors(1,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_md_light('fm', 'f'), freqs, 'Hz')))), '-', 'color', colors(2,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_md_mid( 'fm', 'f'), freqs, 'Hz')))), '-.', 'color', colors(2,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_md_heavy('fm', 'f'), freqs, 'Hz')))), '--', 'color', colors(2,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_pz_light('fm', 'f'), freqs, 'Hz')))), '-', 'color', colors(3,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_pz_mid( 'fm', 'f'), freqs, 'Hz')))), '-.', 'color', colors(3,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_pz_heavy('fm', 'f'), freqs, 'Hz')))), '--', 'color', colors(3,:)); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'lin'); +xlabel('Frequency [Hz]'); ylabel('Phase [deg]'); +xticks([1e0, 1e1, 1e2]); +yticks(-360:90:360); +ylim([-200, 20]); + +ax2b = nexttile(); +hold on; +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_vc_light('dL', 'f'), freqs, 'Hz')))), '-', 'color', colors(1,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_vc_mid( 'dL', 'f'), freqs, 'Hz')))), '-.', 'color', colors(1,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_vc_heavy('dL', 'f'), freqs, 'Hz')))), '--', 'color', colors(1,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_md_light('dL', 'f'), freqs, 'Hz')))), '-', 'color', colors(2,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_md_mid( 'dL', 'f'), freqs, 'Hz')))), '-.', 'color', colors(2,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_md_heavy('dL', 'f'), freqs, 'Hz')))), '--', 'color', colors(2,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_pz_light('dL', 'f'), freqs, 'Hz')))), '-', 'color', colors(3,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_pz_mid( 'dL', 'f'), freqs, 'Hz')))), '-.', 'color', colors(3,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_pz_heavy('dL', 'f'), freqs, 'Hz')))), '--', 'color', colors(3,:)); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'lin'); +xlabel('Frequency [Hz]'); ylabel('Phase [deg]'); +xticks([1e0, 1e1, 1e2]); +yticks(-360:90:360); +ylim([-200, 20]); + +ax3b = nexttile(); +hold on; +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_vc_light('vn', 'f'), freqs, 'Hz')))), '-', 'color', colors(1,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_vc_mid( 'vn', 'f'), freqs, 'Hz')))), '-.', 'color', colors(1,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_vc_heavy('vn', 'f'), freqs, 'Hz')))), '--', 'color', colors(1,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_md_light('vn', 'f'), freqs, 'Hz')))), '-', 'color', colors(2,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_md_mid( 'vn', 'f'), freqs, 'Hz')))), '-.', 'color', colors(2,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_md_heavy('vn', 'f'), freqs, 'Hz')))), '--', 'color', colors(2,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_pz_light('vn', 'f'), freqs, 'Hz')))), '-', 'color', colors(3,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_pz_mid( 'vn', 'f'), freqs, 'Hz')))), '-.', 'color', colors(3,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_pz_heavy('vn', 'f'), freqs, 'Hz')))), '--', 'color', colors(3,:)); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'lin'); +xlabel('Frequency [Hz]'); ylabel('Phase [deg]'); +xticks([1e0, 1e1, 1e2]); +yticks(-360:90:360); +ylim([-110, 110]); + +linkaxes([ax1,ax2,ax3,ax1b,ax2b,ax3b],'x'); +xlim([1, 1000]); + +% Achievable Damping - Root Locus +% The Root Locus are computed for the three nano-hexapod stiffnesses and for the three active damping techniques. +% They are shown in Figure ref:fig:uniaxial_root_locus_damping_techniques. + +% All three active damping approach can lead to *critical damping* of the nano-hexapod suspension mode. + +% There is even a little bit of authority on micro-station modes with IFF and DVF applied on the stiff nano-hexapod (Figure ref:fig:uniaxial_root_locus_damping_techniques, right) and with RDC for a soft nano-hexapod (Figure ref:fig:uniaxial_root_locus_damping_techniques_micro_station_mode). +% This can be explained by the fact that above the suspension mode of the soft nano-hexapod, the relative motion sensor acts as an inertial sensor for the micro-station top platform. Therefore, it is like DVF was applied (the nano-hexapod acts as a geophone!). + + +%% Active Damping Robustness to change of sample's mass - Root Locus for all three damping techniques with 3 different sample's masses +figure; +tiledlayout(1, 3, 'TileSpacing', 'Compact', 'Padding', 'None'); + +%% Soft Nano-Hexapod +ax1 = nexttile(); +hold on; +% IFF +plot(real(pole(G_vc_light('fm', 'f'))), imag(pole(G_vc_light('fm', 'f'))), 'x', 'color', colors(1,:), ... + 'HandleVisibility', 'off'); +plot(real(zero(G_vc_light('fm', 'f'))), imag(zero(G_vc_light('fm', 'f'))), 'o', 'color', colors(1,:), ... + 'DisplayName', 'IFF'); +for g = logspace(0, 2, 400) + clpoles = pole(feedback(G_vc_light('fm', 'f'), g/s, +1)); + plot(real(clpoles), imag(clpoles), '.', 'color', colors(1,:), ... + 'HandleVisibility', 'off'); +end + +% RDC +plot(real(pole(G_vc_light('dL', 'f'))), imag(pole(G_vc_light('dL', 'f'))), 'x', 'color', colors(2,:), ... + 'HandleVisibility', 'off'); +plot(real(zero(G_vc_light('dL', 'f'))), imag(zero(G_vc_light('dL', 'f'))), 'o', 'color', colors(2,:), ... + 'DisplayName', 'RDC'); +for g = logspace(1,3,400) + clpoles = pole(feedback(G_vc_light('dL', 'f'), -g*s, +1)); + plot(real(clpoles), imag(clpoles), '.', 'color', colors(2,:), ... + 'HandleVisibility', 'off'); +end + +% DVF +plot(real(pole(G_vc_light('vn', 'f'))), imag(pole(G_vc_light('vn', 'f'))), 'x', 'color', colors(3,:), ... + 'HandleVisibility', 'off'); +plot(real(zero(G_vc_light('vn', 'f'))), imag(zero(G_vc_light('vn', 'f'))), 'o', 'color', colors(3,:), ... + 'DisplayName', 'DVF'); +for g = logspace(1,3,400) + clpoles = pole(feedback(G_vc_light('vn', 'f'), -g, +1)); + plot(real(clpoles), imag(clpoles), '.', 'color', colors(3,:), ... + 'HandleVisibility', 'off'); +end +hold off; +axis square; +xlabel('Real Part'); ylabel('Imaginary Part'); +title('$k_n = 0.01\,N/\mu m$') +ldg = legend('location', 'northwest', 'FontSize', 8, 'NumColumns', 1); +ldg.ItemTokenSize = [10, 1]; +xlim([-30, 0]); ylim([0, 30]); + +%% Medium-Stiff Nano-Hexapod +ax2 = nexttile(); +hold on; +% IFF +plot(real(pole(G_md_light('fm', 'f'))), imag(pole(G_md_light('fm', 'f'))), 'x', 'color', colors(1,:), ... + 'HandleVisibility', 'off'); +plot(real(zero(G_md_light('fm', 'f'))), imag(zero(G_md_light('fm', 'f'))), 'o', 'color', colors(1,:), ... + 'HandleVisibility', 'off'); +for g = logspace(0,3,400) + clpoles = pole(feedback(G_md_light('fm', 'f'), g/s, +1)); + plot(real(clpoles), imag(clpoles), '.', 'color', colors(1,:), ... + 'HandleVisibility', 'off'); +end + +% RDC +plot(real(pole(G_md_light('dL', 'f'))), imag(pole(G_md_light('dL', 'f'))), 'x', 'color', colors(2,:), ... + 'HandleVisibility', 'off'); +plot(real(zero(G_md_light('dL', 'f'))), imag(zero(G_md_light('dL', 'f'))), 'o', 'color', colors(2,:), ... + 'HandleVisibility', 'off'); +for g = logspace(2,4,400) + clpoles = pole(feedback(G_md_light('dL', 'f'), -g*s, +1)); + plot(real(clpoles), imag(clpoles), '.', 'color', colors(2,:), ... + 'HandleVisibility', 'off'); +end + +% DVF +plot(real(pole(G_md_light('vn', 'f'))), imag(pole(G_md_light('vn', 'f'))), 'x', 'color', colors(3,:), ... + 'HandleVisibility', 'off'); +plot(real(zero(G_md_light('vn', 'f'))), imag(zero(G_md_light('vn', 'f'))), 'o', 'color', colors(3,:), ... + 'HandleVisibility', 'off'); +for g = logspace(2,4,400) + clpoles = pole(feedback(G_md_light('vn', 'f'), -g, +1)); + plot(real(clpoles), imag(clpoles), '.', 'color', colors(3,:), ... + 'HandleVisibility', 'off'); +end +hold off; +axis square; +xlabel('Real Part'); ylabel('Imaginary Part'); +title('$k_n = 1\,N/\mu m$') +xlim([-300, 0]); ylim([0, 300]); + +%% Stiff Nano-Hexapod +ax3 = nexttile(); +hold on; +% IFF +plot(real(pole(G_pz_light('fm', 'f'))), imag(pole(G_pz_light('fm', 'f'))), 'x', 'color', colors(1,:), ... + 'HandleVisibility', 'off'); +plot(real(zero(G_pz_light('fm', 'f'))), imag(zero(G_pz_light('fm', 'f'))), 'o', 'color', colors(1,:), ... + 'HandleVisibility', 'off'); +for g = logspace(2,5,400) + clpoles = pole(feedback(G_pz_light('fm', 'f'), g/s, +1)); + plot(real(clpoles), imag(clpoles), '.', 'color', colors(1,:), ... + 'HandleVisibility', 'off'); +end + +% RDC +plot(real(pole(G_pz_light('dL', 'f'))), imag(pole(G_pz_light('dL', 'f'))), 'x', 'color', colors(2,:), ... + 'HandleVisibility', 'off'); +plot(real(zero(G_pz_light('dL', 'f'))), imag(zero(G_pz_light('dL', 'f'))), 'o', 'color', colors(2,:), ... + 'HandleVisibility', 'off'); +for g = logspace(3,6,400) + clpoles = pole(feedback(G_pz_light('dL', 'f'), -g*s, +1)); + plot(real(clpoles), imag(clpoles), '.', 'color', colors(2,:), ... + 'HandleVisibility', 'off'); +end + +% DVF +plot(real(pole(G_pz_light('vn', 'f'))), imag(pole(G_pz_light('vn', 'f'))), 'x', 'color', colors(3,:), ... + 'HandleVisibility', 'off'); +plot(real(zero(G_pz_light('vn', 'f'))), imag(zero(G_pz_light('vn', 'f'))), 'o', 'color', colors(3,:), ... + 'HandleVisibility', 'off'); +for g = logspace(3,6,400) + clpoles = pole(feedback(G_pz_light('vn', 'f'), -g, +1)); + plot(real(clpoles), imag(clpoles), '.', 'color', colors(3,:), ... + 'HandleVisibility', 'off'); +end +hold off; +axis square; +xlabel('Real Part'); ylabel('Imaginary Part'); +title('$k_n = 100\,N/\mu m$') +xlim([-4000, 0]); ylim([0, 4000]); + + + +% #+name: fig:uniaxial_root_locus_damping_techniques +% #+caption: Root Loci for the three active damping techniques (IFF in blue, RDC in red and DVF in yellow). This is shown for three nano-hexapod stiffnesses. +% #+RESULTS: +% [[file:figs/uniaxial_root_locus_damping_techniques.png]] + + +%% Root Locus for the three damping techniques +figure; + +hold on; +% IFF +plot(real(pole(G_md_mid('fm', 'f'))), imag(pole(G_md_mid('fm', 'f'))), 'x', 'color', colors(1,:), ... + 'DisplayName', 'IFF'); +plot(real(zero(G_md_mid('fm', 'f'))), imag(zero(G_md_mid('fm', 'f'))), 'o', 'color', colors(1,:), ... + 'HandleVisibility', 'off'); +for g = logspace(1,4,500) + clpoles = pole(feedback(G_md_mid('fm', 'f'), g/s, +1)); + plot(real(clpoles), imag(clpoles), '.', 'color', colors(1,:), ... + 'HandleVisibility', 'off'); +end + +% RDC +plot(real(pole(G_md_mid('dL', 'f'))), imag(pole(G_md_mid('dL', 'f'))), 'x', 'color', colors(2,:), ... + 'DisplayName', 'RDC'); +plot(real(zero(G_md_mid('dL', 'f'))), imag(zero(G_md_mid('dL', 'f'))), 'o', 'color', colors(2,:), ... + 'HandleVisibility', 'off'); +for g = logspace(2,5,500) + clpoles = pole(feedback(G_md_mid('dL', 'f'), -g*s, +1)); + plot(real(clpoles), imag(clpoles), '.', 'color', colors(2,:), ... + 'HandleVisibility', 'off'); +end + +% DVF +plot(real(pole(G_md_mid('vn', 'f'))), imag(pole(G_md_mid('vn', 'f'))), 'x', 'color', colors(3,:), ... + 'DisplayName', 'DVF'); +plot(real(zero(G_md_mid('vn', 'f'))), imag(zero(G_md_mid('vn', 'f'))), 'o', 'color', colors(3,:), ... + 'HandleVisibility', 'off'); +for g = logspace(2,5,500) + clpoles = pole(feedback(G_md_mid('vn', 'f'), -tf(g), +1)); + plot(real(clpoles), imag(clpoles), '.', 'color', colors(3,:), ... + 'HandleVisibility', 'off'); +end +hold off; +xlim([-2100, 0]); ylim([0, 2100]); +axis square; +xlabel('Real Part'); ylabel('Imaginary Part'); +ldg = legend('location', 'northwest', 'FontSize', 8, 'NumColumns', 1); +ldg.ItemTokenSize = [10, 1]; + +% Active Damping Controller Optimization and Damped plants :noexport: + +%% Design of Active Damping controllers to have reasonable damping +% IFF +K_iff_vc = 20/(s + 2*pi*0.01); +K_iff_vc.InputName = {'fm'}; +K_iff_vc.OutputName = {'f'}; +K_iff_md = 200/(s + 2*pi*0.01); +K_iff_md.InputName = {'fm'}; +K_iff_md.OutputName = {'f'}; +K_iff_pz = 4000/(s + 2*pi*0.01); +K_iff_pz.InputName = {'fm'}; +K_iff_pz.OutputName = {'f'}; + +% RDC +K_rdc_vc = -1e3*s; +K_rdc_vc.InputName = {'dL'}; +K_rdc_vc.OutputName = {'f'}; +K_rdc_md = -1e4*s; +K_rdc_md.InputName = {'dL'}; +K_rdc_md.OutputName = {'f'}; +K_rdc_pz = -1e5*s; +K_rdc_pz.InputName = {'dL'}; +K_rdc_pz.OutputName = {'f'}; + +% DVF +K_dvf_vc = -tf(1e3); +K_dvf_vc.InputName = {'vn'}; +K_dvf_vc.OutputName = {'f'}; +K_dvf_md = -tf(8e3); +K_dvf_md.InputName = {'vn'}; +K_dvf_md.OutputName = {'f'}; +K_dvf_pz = -tf(2e5); +K_dvf_pz.InputName = {'vn'}; +K_dvf_pz.OutputName = {'f'}; + +%% Save Active Damping Controller +save('./mat/uniaxial_active_damping_controllers.mat', 'K_iff_vc', 'K_iff_md', 'K_iff_pz', ... + 'K_rdc_vc', 'K_rdc_md', 'K_rdc_pz', ... + 'K_dvf_vc', 'K_dvf_md', 'K_dvf_pz'); + +%% Compute Damped Plants +% IFF +G_iff_vc_light = feedback(G_vc_light, K_iff_vc, 'name', +1); +G_iff_vc_mid = feedback(G_vc_mid , K_iff_vc, 'name', +1); +G_iff_vc_heavy = feedback(G_vc_heavy, K_iff_vc, 'name', +1); +G_iff_md_light = feedback(G_md_light, K_iff_md, 'name', +1); +G_iff_md_mid = feedback(G_md_mid , K_iff_md, 'name', +1); +G_iff_md_heavy = feedback(G_md_heavy, K_iff_md, 'name', +1); +G_iff_pz_light = feedback(G_pz_light, K_iff_pz, 'name', +1); +G_iff_pz_mid = feedback(G_pz_mid , K_iff_pz, 'name', +1); +G_iff_pz_heavy = feedback(G_pz_heavy, K_iff_pz, 'name', +1); + +% RDC +G_rdc_vc_light = feedback(G_vc_light, K_rdc_vc, 'name', +1); +G_rdc_vc_mid = feedback(G_vc_mid , K_rdc_vc, 'name', +1); +G_rdc_vc_heavy = feedback(G_vc_heavy, K_rdc_vc, 'name', +1); +G_rdc_md_light = feedback(G_md_light, K_rdc_md, 'name', +1); +G_rdc_md_mid = feedback(G_md_mid , K_rdc_md, 'name', +1); +G_rdc_md_heavy = feedback(G_md_heavy, K_rdc_md, 'name', +1); +G_rdc_pz_light = feedback(G_pz_light, K_rdc_pz, 'name', +1); +G_rdc_pz_mid = feedback(G_pz_mid , K_rdc_pz, 'name', +1); +G_rdc_pz_heavy = feedback(G_pz_heavy, K_rdc_pz, 'name', +1); + +% DVF +G_dvf_vc_light = feedback(G_vc_light, K_dvf_vc, 'name', +1); +G_dvf_vc_mid = feedback(G_vc_mid , K_dvf_vc, 'name', +1); +G_dvf_vc_heavy = feedback(G_vc_heavy, K_dvf_vc, 'name', +1); +G_dvf_md_light = feedback(G_md_light, K_dvf_md, 'name', +1); +G_dvf_md_mid = feedback(G_md_mid , K_dvf_md, 'name', +1); +G_dvf_md_heavy = feedback(G_md_heavy, K_dvf_md, 'name', +1); +G_dvf_pz_light = feedback(G_pz_light, K_dvf_pz, 'name', +1); +G_dvf_pz_mid = feedback(G_pz_mid , K_dvf_pz, 'name', +1); +G_dvf_pz_heavy = feedback(G_pz_heavy, K_dvf_pz, 'name', +1); + +%% Verify Stability +% IFF +isstable(G_iff_vc_light) && isstable(G_iff_vc_mid) && isstable(G_iff_vc_heavy) && ... +isstable(G_iff_md_light) && isstable(G_iff_md_mid) && isstable(G_iff_md_heavy) && ... +isstable(G_iff_pz_light) && isstable(G_iff_pz_mid) && isstable(G_iff_pz_heavy) + +% RDC +isstable(G_rdc_vc_light) && isstable(G_rdc_vc_mid) && isstable(G_rdc_vc_heavy) && ... +isstable(G_rdc_md_light) && isstable(G_rdc_md_mid) && isstable(G_rdc_md_heavy) && ... +isstable(G_rdc_pz_light) && isstable(G_rdc_pz_mid) && isstable(G_rdc_pz_heavy) + +% DVF +isstable(G_dvf_vc_light) && isstable(G_dvf_vc_mid) && isstable(G_dvf_vc_heavy) && ... +isstable(G_dvf_md_light) && isstable(G_dvf_md_mid) && isstable(G_dvf_md_heavy) && ... +isstable(G_dvf_pz_light) && isstable(G_dvf_pz_mid) && isstable(G_dvf_pz_heavy) + +%% Save Active Damping Controller +save('./mat/uniaxial_damped_plants.mat', 'G_iff_vc_light', 'G_iff_md_light', 'G_iff_pz_light', ... + 'G_rdc_vc_light', 'G_rdc_md_light', 'G_rdc_pz_light', ... + 'G_dvf_vc_light', 'G_dvf_md_light', 'G_dvf_pz_light', ... + 'G_iff_vc_mid', 'G_iff_md_mid', 'G_iff_pz_mid', ... + 'G_rdc_vc_mid', 'G_rdc_md_mid', 'G_rdc_pz_mid', ... + 'G_dvf_vc_mid', 'G_dvf_md_mid', 'G_dvf_pz_mid', ... + 'G_iff_vc_heavy', 'G_iff_md_heavy', 'G_iff_pz_heavy', ... + 'G_rdc_vc_heavy', 'G_rdc_md_heavy', 'G_rdc_pz_heavy', ... + 'G_dvf_vc_heavy', 'G_dvf_md_heavy', 'G_dvf_pz_heavy'); + +% Change of sensitivity to disturbances +% The sensitivity to disturbances (direct forces $f_s$, stage vibrations $f_t$ and floor motion $x_f$) for all three active damping techniques are compared in Figure ref:fig:uniaxial_sensitivity_dist_active_damping. +% The comparison is done with the nano-hexapod having a stiffness $k_n = 1\,N/\mu m$. + +% #+begin_important +% Conclusions from Figure ref:fig:uniaxial_sensitivity_dist_active_damping are: +% - IFF degrades the sensitivity to direct forces on the sample (i.e. the compliance) below the resonance of the nano-hexapod +% - RDC degrades the sensitivity to stage vibrations around the nano-hexapod's resonance as compared to the other two methods +% - both IFF and DVF degrades the sensitivity to floor motion below the resonance of the nano-hexapod +% #+end_important + + +%% Change of sensitivity to disturbance with all three active damping strategies +figure; +tiledlayout(1, 3, 'TileSpacing', 'Compact', 'Padding', 'None'); + +ax1 = nexttile(); +hold on; +plot(freqs, abs(squeeze(freqresp(G_md_mid('d', 'fs'), freqs, 'Hz'))), 'k-'); +plot(freqs, abs(squeeze(freqresp(G_iff_md_mid('d', 'fs'), freqs, 'Hz'))), 'color', colors(1,:)); +plot(freqs, abs(squeeze(freqresp(G_rdc_md_mid('d', 'fs'), freqs, 'Hz'))), 'color', colors(2,:)); +plot(freqs, abs(squeeze(freqresp(G_dvf_md_mid('d', 'fs'), freqs, 'Hz'))), 'color', colors(3,:)); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +ylabel('Amplitude $d/f_{s}$ [m/N]'); xlabel('Frequency [Hz]'); +xticks([1e0, 1e1, 1e2]); + +ax2 = nexttile(); +hold on; +plot(freqs, abs(squeeze(freqresp(G_md_mid('d', 'ft'), freqs, 'Hz'))), 'k-'); +plot(freqs, abs(squeeze(freqresp(G_iff_md_mid('d', 'ft'), freqs, 'Hz'))), 'color', colors(1,:)); +plot(freqs, abs(squeeze(freqresp(G_rdc_md_mid('d', 'ft'), freqs, 'Hz'))), 'color', colors(2,:)); +plot(freqs, abs(squeeze(freqresp(G_dvf_md_mid('d', 'ft'), freqs, 'Hz'))), 'color', colors(3,:)); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +ylabel('Amplitude $d/f_{t}$ [m/N]'); xlabel('Frequency [Hz]'); +xticks([1e0, 1e1, 1e2]); + +ax3 = nexttile(); +hold on; +plot(freqs, abs(squeeze(freqresp(G_md_mid('d', 'xf'), freqs, 'Hz'))), 'k-', 'DisplayName', 'OL'); +plot(freqs, abs(squeeze(freqresp(G_iff_md_mid('d', 'xf'), freqs, 'Hz'))), 'color', colors(1,:), 'DisplayName', 'IFF'); +plot(freqs, abs(squeeze(freqresp(G_rdc_md_mid('d', 'xf'), freqs, 'Hz'))), 'color', colors(2,:), 'DisplayName', 'RDC'); +plot(freqs, abs(squeeze(freqresp(G_dvf_md_mid('d', 'xf'), freqs, 'Hz'))), 'color', colors(3,:), 'DisplayName', 'DVF'); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +ylabel('Amplitude $d/x_{f}$ [m/m]'); xlabel('Frequency [Hz]'); +xticks([1e0, 1e1, 1e2]); +legend('location', 'southeast', 'FontSize', 8, 'NumColumns', 1); + +linkaxes([ax1,ax2,ax3],'x'); +xlim([1, 500]); + +% Noise Budgeting after Active Damping +% Cumulative Amplitude Spectrum of the distance $d$ with all three active damping techniques are compared in Figure ref:fig:uniaxial_cas_active_damping. +% All three active damping methods are giving similar results (except the RDC which is a little bit worse for the stiff nano-hexapod). + +% Compare to the open-loop case, the active damping helps to lower the vibrations induced by the nano-hexapod resonance. + + +%% Cumulative Amplitude Spectrum of the distance d with all three active damping techniques +figure; +tiledlayout(1, 3, 'TileSpacing', 'Compact', 'Padding', 'None'); + +ax1 = nexttile(); +hold on; +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_vc_mid('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_vc_mid('d', 'xf'), f, 'Hz'))).^2)))), '-', ... + 'color', 'black', 'DisplayName', 'OL'); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_iff_vc_mid('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_iff_vc_mid('d', 'xf'), f, 'Hz'))).^2)))), '-', ... + 'color', colors(1,:), 'DisplayName', 'IFF'); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_rdc_vc_mid('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_rdc_vc_mid('d', 'xf'), f, 'Hz'))).^2)))), '-', ... + 'color', colors(2,:), 'DisplayName', 'RDC'); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_dvf_vc_mid('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_dvf_vc_mid('d', 'xf'), f, 'Hz'))).^2)))), '-', ... + 'color', colors(3,:), 'DisplayName', 'DVF'); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +ylabel('CAS of $d$ [m]'); xlabel('Frequency [Hz]'); +xticks([1e0, 1e1, 1e2]); +title('$k_n = 0.01\,N/\mu m$') + +ax2 = nexttile(); +hold on; +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_md_mid('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_md_mid('d', 'xf'), f, 'Hz'))).^2)))), '-', ... + 'color', 'black', 'DisplayName', 'OL'); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_iff_md_mid('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_iff_md_mid('d', 'xf'), f, 'Hz'))).^2)))), '-', ... + 'color', colors(1,:), 'DisplayName', 'IFF'); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_rdc_md_mid('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_rdc_md_mid('d', 'xf'), f, 'Hz'))).^2)))), '-', ... + 'color', colors(2,:), 'DisplayName', 'RDC'); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_dvf_md_mid('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_dvf_md_mid('d', 'xf'), f, 'Hz'))).^2)))), '-', ... + 'color', colors(3,:), 'DisplayName', 'DVF'); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +xlabel('Frequency [Hz]'); set(gca, 'YTickLabel',[]); +xticks([1e0, 1e1, 1e2]); +title('$k_n = 1\,N/\mu m$') + +ax3 = nexttile(); +hold on; +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_pz_mid('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_pz_mid('d', 'xf'), f, 'Hz'))).^2)))), '-', ... + 'color', 'black', 'DisplayName', 'OL'); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_iff_pz_mid('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_iff_pz_mid('d', 'xf'), f, 'Hz'))).^2)))), '-', ... + 'color', colors(1,:), 'DisplayName', 'IFF'); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_rdc_pz_mid('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_rdc_pz_mid('d', 'xf'), f, 'Hz'))).^2)))), '-', ... + 'color', colors(2,:), 'DisplayName', 'RDC'); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_dvf_pz_mid('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_dvf_pz_mid('d', 'xf'), f, 'Hz'))).^2)))), '-', ... + 'color', colors(3,:), 'DisplayName', 'DVF'); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +xlabel('Frequency [Hz]'); set(gca, 'YTickLabel',[]); +xticks([1e0, 1e1, 1e2]); +title('$k_n = 100\,N/\mu m$') +legend('location', 'southwest', 'FontSize', 8, 'NumColumns', 1); + +linkaxes([ax1,ax2,ax3], 'xy') +xlim([1, 500]); +ylim([2e-10, 3e-6]) + +% Obtained Damped Plant +% The transfer functions from the plant input $f$ to the relative displacement $d$ while the active damping is implemented are shown in Figure ref:fig:uniaxial_damped_plant_three_active_damping_techniques. +% All three active damping techniques yield similar damped plants. + + +%% Obtained damped transfer function from f to d for the three damping techniques +figure; +tiledlayout(3, 1, 'TileSpacing', 'Compact', 'Padding', 'None'); + +ax1 = nexttile([2,1]); +hold on; +plot(freqs, abs(squeeze(freqresp(G_md_mid('d', 'f'), freqs, 'Hz'))), 'k-', 'DisplayName', 'OL'); +plot(freqs, abs(squeeze(freqresp(G_iff_md_mid('d', 'f'), freqs, 'Hz'))), 'color', colors(1,:), 'DisplayName', 'IFF'); +plot(freqs, abs(squeeze(freqresp(G_rdc_md_mid('d', 'f'), freqs, 'Hz'))), 'color', colors(2,:), 'DisplayName', 'RDC'); +plot(freqs, abs(squeeze(freqresp(G_dvf_md_mid('d', 'f'), freqs, 'Hz'))), 'color', colors(3,:), 'DisplayName', 'DVF'); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +ylabel('Amplitude $d/f$ [m/N]'); set(gca, 'XTickLabel',[]); +legend('location', 'northwest', 'FontSize', 8, 'NumColumns', 1); + +ax2 = nexttile(); +hold on; +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_md_mid('d', 'f'), freqs, 'Hz')))), 'k-'); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_iff_md_mid('d', 'f'), freqs, 'Hz')))), 'color', colors(1,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_rdc_md_mid('d', 'f'), freqs, 'Hz')))), 'color', colors(2,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_dvf_md_mid('d', 'f'), freqs, 'Hz')))), 'color', colors(3,:)); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'lin'); +ylabel('Phase [deg]'); xlabel('Frequency [Hz]'); +yticks(-360:90:360); +ylim([-270, 90]); + +linkaxes([ax1,ax2],'x'); +xlim([1, 500]); + + + +% #+name: fig:uniaxial_damped_plant_three_active_damping_techniques +% #+caption: Obtained damped transfer function from f to d for the three damping techniques +% #+RESULTS: +% [[file:figs/uniaxial_damped_plant_three_active_damping_techniques.png]] + +% The damped plants are shown in Figure ref:fig:uniaxial_damped_plant_change_sample_mass for all three techniques, with the three considered nano-hexapod stiffnesses and sample's masses. + +%% Damped plant - Robustness to change of sample's mass +figure; +tiledlayout(3, 3, 'TileSpacing', 'Compact', 'Padding', 'None'); + +ax1 = nexttile([2,1]); +hold on; +plot(freqs, abs(squeeze(freqresp(G_vc_mid('d', 'f'), freqs, 'Hz'))), '-', 'color', [0, 0, 0, 0.5], 'HandleVisibility', 'off'); +plot(freqs, abs(squeeze(freqresp(G_md_mid('d', 'f'), freqs, 'Hz'))), '-', 'color', [0, 0, 0, 0.5], 'HandleVisibility', 'off'); +plot(freqs, abs(squeeze(freqresp(G_pz_mid('d', 'f'), freqs, 'Hz'))), '-', 'color', [0, 0, 0, 0.5], 'HandleVisibility', 'off'); +plot(freqs, abs(squeeze(freqresp(G_iff_vc_light('d', 'f'), freqs, 'Hz'))), '-', 'color', colors(1,:), 'DisplayName', '$k_n = 0.01\,N/\mu m$'); +plot(freqs, abs(squeeze(freqresp(G_iff_vc_mid( 'd', 'f'), freqs, 'Hz'))), '-.', 'color', colors(1,:), 'HandleVisibility', 'off'); +plot(freqs, abs(squeeze(freqresp(G_iff_vc_heavy('d', 'f'), freqs, 'Hz'))), '--', 'color', colors(1,:), 'HandleVisibility', 'off'); +plot(freqs, abs(squeeze(freqresp(G_iff_md_light('d', 'f'), freqs, 'Hz'))), '-', 'color', colors(2,:), 'DisplayName', '$k_n = 1\,N/\mu m$'); +plot(freqs, abs(squeeze(freqresp(G_iff_md_mid( 'd', 'f'), freqs, 'Hz'))), '-.', 'color', colors(2,:), 'HandleVisibility', 'off'); +plot(freqs, abs(squeeze(freqresp(G_iff_md_heavy('d', 'f'), freqs, 'Hz'))), '--', 'color', colors(2,:), 'HandleVisibility', 'off'); +plot(freqs, abs(squeeze(freqresp(G_iff_pz_light('d', 'f'), freqs, 'Hz'))), '-', 'color', colors(3,:), 'DisplayName', '$k_n = 100\,N/\mu m$'); +plot(freqs, abs(squeeze(freqresp(G_iff_pz_mid( 'd', 'f'), freqs, 'Hz'))), '-.', 'color', colors(3,:), 'HandleVisibility', 'off'); +plot(freqs, abs(squeeze(freqresp(G_iff_pz_heavy('d', 'f'), freqs, 'Hz'))), '--', 'color', colors(3,:), 'HandleVisibility', 'off'); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +ylabel('Amplitude [m/N]'); set(gca, 'XTickLabel',[]); +title('IFF'); +ylim([5e-10, 1e-3]); +ldg = legend('location', 'northeast', 'FontSize', 8, 'NumColumns', 1); +ldg.ItemTokenSize = [20, 1]; + +ax2 = nexttile([2,1]); +hold on; +plot(freqs, abs(squeeze(freqresp(G_vc_mid('d', 'f'), freqs, 'Hz'))), '-', 'color', [0, 0, 0, 0.5]); +plot(freqs, abs(squeeze(freqresp(G_md_mid('d', 'f'), freqs, 'Hz'))), '-', 'color', [0, 0, 0, 0.5]); +plot(freqs, abs(squeeze(freqresp(G_pz_mid('d', 'f'), freqs, 'Hz'))), '-', 'color', [0, 0, 0, 0.5]); +plot(freqs, abs(squeeze(freqresp(G_rdc_vc_light('d', 'f'), freqs, 'Hz'))), '-', 'color', colors(1,:)); +plot(freqs, abs(squeeze(freqresp(G_rdc_vc_mid( 'd', 'f'), freqs, 'Hz'))), '-.', 'color', colors(1,:)); +plot(freqs, abs(squeeze(freqresp(G_rdc_vc_heavy('d', 'f'), freqs, 'Hz'))), '--', 'color', colors(1,:)); +plot(freqs, abs(squeeze(freqresp(G_rdc_md_light('d', 'f'), freqs, 'Hz'))), '-', 'color', colors(2,:)); +plot(freqs, abs(squeeze(freqresp(G_rdc_md_mid( 'd', 'f'), freqs, 'Hz'))), '-.', 'color', colors(2,:)); +plot(freqs, abs(squeeze(freqresp(G_rdc_md_heavy('d', 'f'), freqs, 'Hz'))), '--', 'color', colors(2,:)); +plot(freqs, abs(squeeze(freqresp(G_rdc_pz_light('d', 'f'), freqs, 'Hz'))), '-', 'color', colors(3,:)); +plot(freqs, abs(squeeze(freqresp(G_rdc_pz_mid( 'd', 'f'), freqs, 'Hz'))), '-.', 'color', colors(3,:)); +plot(freqs, abs(squeeze(freqresp(G_rdc_pz_heavy('d', 'f'), freqs, 'Hz'))), '--', 'color', colors(3,:)); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +set(gca, 'XTickLabel',[]); set(gca, 'YTickLabel',[]); +title('RDC'); +ylim([5e-10, 1e-3]); + +ax3 = nexttile([2,1]); +hold on; +plot(freqs, abs(squeeze(freqresp(G_vc_mid('d', 'f'), freqs, 'Hz'))), '-', 'color', [0, 0, 0, 0.5], 'HandleVisibility', 'off'); +plot(freqs, abs(squeeze(freqresp(G_md_mid('d', 'f'), freqs, 'Hz'))), '-', 'color', [0, 0, 0, 0.5], 'HandleVisibility', 'off'); +plot(freqs, abs(squeeze(freqresp(G_pz_mid('d', 'f'), freqs, 'Hz'))), '-', 'color', [0, 0, 0, 0.5], 'HandleVisibility', 'off'); +plot(freqs, abs(squeeze(freqresp(G_dvf_vc_light('d', 'f'), freqs, 'Hz'))), '-', 'color', colors(1,:), 'DisplayName', '$m_s = 1\,kg$'); +plot(freqs, abs(squeeze(freqresp(G_dvf_vc_mid( 'd', 'f'), freqs, 'Hz'))), '-.', 'color', colors(1,:), 'DisplayName', '$m_s = 25\,kg$'); +plot(freqs, abs(squeeze(freqresp(G_dvf_vc_heavy('d', 'f'), freqs, 'Hz'))), '--', 'color', colors(1,:), 'DisplayName', '$m_s = 50\,kg$'); +plot(freqs, abs(squeeze(freqresp(G_dvf_md_light('d', 'f'), freqs, 'Hz'))), '-', 'color', colors(2,:), 'HandleVisibility', 'off'); +plot(freqs, abs(squeeze(freqresp(G_dvf_md_mid( 'd', 'f'), freqs, 'Hz'))), '-.', 'color', colors(2,:), 'HandleVisibility', 'off'); +plot(freqs, abs(squeeze(freqresp(G_dvf_md_heavy('d', 'f'), freqs, 'Hz'))), '--', 'color', colors(2,:), 'HandleVisibility', 'off'); +plot(freqs, abs(squeeze(freqresp(G_dvf_pz_light('d', 'f'), freqs, 'Hz'))), '-', 'color', colors(3,:), 'HandleVisibility', 'off'); +plot(freqs, abs(squeeze(freqresp(G_dvf_pz_mid( 'd', 'f'), freqs, 'Hz'))), '-.', 'color', colors(3,:), 'HandleVisibility', 'off'); +plot(freqs, abs(squeeze(freqresp(G_dvf_pz_heavy('d', 'f'), freqs, 'Hz'))), '--', 'color', colors(3,:), 'HandleVisibility', 'off'); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +set(gca, 'XTickLabel',[]); set(gca, 'YTickLabel',[]); +title('DVF'); +ylim([5e-10, 1e-3]); +ldg = legend('location', 'northeast', 'FontSize', 8, 'NumColumns', 1); +ldg.ItemTokenSize = [20, 1]; + +ax1b = nexttile(); +hold on; +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_vc_mid('d', 'f'), freqs, 'Hz')))), '-', 'color', [0, 0, 0, 0.5]); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_md_mid('d', 'f'), freqs, 'Hz')))), '-', 'color', [0, 0, 0, 0.5]); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_pz_mid('d', 'f'), freqs, 'Hz')))), '-', 'color', [0, 0, 0, 0.5]); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_iff_vc_light('d', 'f'), freqs, 'Hz')))), '-', 'color', colors(1,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_iff_vc_mid( 'd', 'f'), freqs, 'Hz')))), '-.', 'color', colors(1,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_iff_vc_heavy('d', 'f'), freqs, 'Hz')))), '--', 'color', colors(1,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_iff_md_light('d', 'f'), freqs, 'Hz')))), '-', 'color', colors(2,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_iff_md_mid( 'd', 'f'), freqs, 'Hz')))), '-.', 'color', colors(2,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_iff_md_heavy('d', 'f'), freqs, 'Hz')))), '--', 'color', colors(2,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_iff_pz_light('d', 'f'), freqs, 'Hz')))), '-', 'color', colors(3,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_iff_pz_mid( 'd', 'f'), freqs, 'Hz')))), '-.', 'color', colors(3,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_iff_pz_heavy('d', 'f'), freqs, 'Hz')))), '--', 'color', colors(3,:)); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'lin'); +ylabel('Phase [deg]'); xlabel('Frequency [Hz]'); +xticks([1e0, 1e1, 1e2]); +yticks(-360:90:360); +ylim([-200, 20]); + +ax2b = nexttile(); +hold on; +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_vc_mid('d', 'f'), freqs, 'Hz')))), '-', 'color', [0, 0, 0, 0.5]); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_md_mid('d', 'f'), freqs, 'Hz')))), '-', 'color', [0, 0, 0, 0.5]); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_pz_mid('d', 'f'), freqs, 'Hz')))), '-', 'color', [0, 0, 0, 0.5]); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_rdc_vc_light('d', 'f'), freqs, 'Hz')))), '-', 'color', colors(1,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_rdc_vc_mid( 'd', 'f'), freqs, 'Hz')))), '-.', 'color', colors(1,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_rdc_vc_heavy('d', 'f'), freqs, 'Hz')))), '--', 'color', colors(1,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_rdc_md_light('d', 'f'), freqs, 'Hz')))), '-', 'color', colors(2,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_rdc_md_mid( 'd', 'f'), freqs, 'Hz')))), '-.', 'color', colors(2,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_rdc_md_heavy('d', 'f'), freqs, 'Hz')))), '--', 'color', colors(2,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_rdc_pz_light('d', 'f'), freqs, 'Hz')))), '-', 'color', colors(3,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_rdc_pz_mid( 'd', 'f'), freqs, 'Hz')))), '-.', 'color', colors(3,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_rdc_pz_heavy('d', 'f'), freqs, 'Hz')))), '--', 'color', colors(3,:)); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'lin'); +xlabel('Frequency [Hz]'); set(gca, 'YTickLabel',[]); +xticks([1e0, 1e1, 1e2]); +yticks(-360:90:360); +ylim([-200, 20]); + +ax3b = nexttile(); +hold on; +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_vc_mid('d', 'f'), freqs, 'Hz')))), '-', 'color', [0, 0, 0, 0.5]); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_md_mid('d', 'f'), freqs, 'Hz')))), '-', 'color', [0, 0, 0, 0.5]); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_pz_mid('d', 'f'), freqs, 'Hz')))), '-', 'color', [0, 0, 0, 0.5]); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_dvf_vc_light('d', 'f'), freqs, 'Hz')))), '-', 'color', colors(1,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_dvf_vc_mid( 'd', 'f'), freqs, 'Hz')))), '-.', 'color', colors(1,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_dvf_vc_heavy('d', 'f'), freqs, 'Hz')))), '--', 'color', colors(1,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_dvf_md_light('d', 'f'), freqs, 'Hz')))), '-', 'color', colors(2,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_dvf_md_mid( 'd', 'f'), freqs, 'Hz')))), '-.', 'color', colors(2,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_dvf_md_heavy('d', 'f'), freqs, 'Hz')))), '--', 'color', colors(2,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_dvf_pz_light('d', 'f'), freqs, 'Hz')))), '-', 'color', colors(3,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_dvf_pz_mid( 'd', 'f'), freqs, 'Hz')))), '-.', 'color', colors(3,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_dvf_pz_heavy('d', 'f'), freqs, 'Hz')))), '--', 'color', colors(3,:)); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'lin'); +xlabel('Frequency [Hz]'); set(gca, 'YTickLabel',[]); +xticks([1e0, 1e1, 1e2]); +yticks(-360:90:360); +ylim([-200, 20]); + +linkaxes([ax1,ax2,ax3,ax1b,ax2b,ax3b],'x'); +xlim([1, 1e3]); + +% Robustness to change of payload's mass +% The Root Locus for the three damping techniques are shown in Figure ref:fig:uniaxial_active_damping_robustness_mass_root_locus for three sample's mass (1kg, 25kg and 50kg). +% The closed-loop poles are shown by the squares for a specific gain. + +% We can see that having heavier samples yields larger damping for IFF and smaller damping for RDC and DVF. + + +%% Active Damping Robustness to change of sample's mass - Root Locus for all three damping techniques with 3 different sample's masses +figure; +tiledlayout(1, 3, 'TileSpacing', 'Compact', 'Padding', 'None'); + +%% Integral Force Feedback +ax1 = nexttile(); +hold on; +% Light Sample +plot(real(pole(G_md_light('fm', 'f'))), imag(pole(G_md_light('fm', 'f'))), 'x', 'color', colors(1,:), ... + 'HandleVisibility', 'off'); +plot(real(zero(G_md_light('fm', 'f'))), imag(zero(G_md_light('fm', 'f'))), 'o', 'color', colors(1,:), ... + 'HandleVisibility', 'off'); +for g = logspace(1,4,100) + clpoles = pole(feedback(G_md_light('fm', 'f'), g/s, +1)); + plot(real(clpoles), imag(clpoles), '.', 'color', colors(1,:), ... + 'HandleVisibility', 'off'); +end +clpoles = pole(feedback(G_md_light('fm', 'f'), K_iff_md, +1)); +plot(real(clpoles), imag(clpoles), 'square', 'color', colors(1,:), ... + 'DisplayName', '$m_s = 1\,kg$'); + +% Mid Sample +plot(real(pole(G_md_mid('fm', 'f'))), imag(pole(G_md_mid('fm', 'f'))), 'x', 'color', colors(2,:), ... + 'HandleVisibility', 'off'); +plot(real(zero(G_md_mid('fm', 'f'))), imag(zero(G_md_mid('fm', 'f'))), 'o', 'color', colors(2,:), ... + 'HandleVisibility', 'off'); +for g = logspace(1,4,100) + clpoles = pole(feedback(G_md_mid('fm', 'f'), g/s, +1)); + plot(real(clpoles), imag(clpoles), '.', 'color', colors(2,:), ... + 'HandleVisibility', 'off'); +end +clpoles = pole(feedback(G_md_mid('fm', 'f'), K_iff_md, +1)); +plot(real(clpoles), imag(clpoles), 'square', 'color', colors(2,:), ... + 'DisplayName', '$m_s = 25\,kg$'); + +% Heavy Sample +plot(real(pole(G_md_heavy('fm', 'f'))), imag(pole(G_md_heavy('fm', 'f'))), 'x', 'color', colors(3,:), ... + 'HandleVisibility', 'off'); +plot(real(zero(G_md_heavy('fm', 'f'))), imag(zero(G_md_heavy('fm', 'f'))), 'o', 'color', colors(3,:), ... + 'HandleVisibility', 'off'); +for g = logspace(1,4,100) + clpoles = pole(feedback(G_md_heavy('fm', 'f'), g/s, +1)); + plot(real(clpoles), imag(clpoles), '.', 'color', colors(3,:), ... + 'HandleVisibility', 'off'); +end +clpoles = pole(feedback(G_md_heavy('fm', 'f'), K_iff_md, +1)); +plot(real(clpoles), imag(clpoles), 'square', 'color', colors(3,:), ... + 'DisplayName', '$m_s = 50\,kg$'); +hold off; +axis square; +xlabel('Real Part'); ylabel('Imaginary Part'); +title('IFF') +ldg = legend('location', 'northwest', 'FontSize', 8, 'NumColumns', 1); +ldg.ItemTokenSize = [10, 1]; + +%% Relative Damping Control +ax2 = nexttile(); +hold on; +% Light Sample +plot(real(pole(G_md_light('dL', 'f'))), imag(pole(G_md_light('dL', 'f'))), 'x', 'color', colors(1,:), ... + 'DisplayName', '$m_s = 1\,kg$'); +plot(real(zero(G_md_light('dL', 'f'))), imag(zero(G_md_light('dL', 'f'))), 'o', 'color', colors(1,:), ... + 'HandleVisibility', 'off'); +for g = logspace(2,5,100) + clpoles = pole(feedback(G_md_light('dL', 'f'), -g*s, +1)); + plot(real(clpoles), imag(clpoles), '.', 'color', colors(1,:), ... + 'HandleVisibility', 'off'); +end +clpoles = pole(feedback(G_md_light('dL', 'f'), K_rdc_md, +1)); +plot(real(clpoles), imag(clpoles), 'square', 'color', colors(1,:), ... + 'HandleVisibility', 'off'); + +% Mid Sample +plot(real(pole(G_md_mid('dL', 'f'))), imag(pole(G_md_mid('dL', 'f'))), 'x', 'color', colors(2,:), ... + 'DisplayName', '$m_s = 25\,kg$'); +plot(real(zero(G_md_mid('dL', 'f'))), imag(zero(G_md_mid('dL', 'f'))), 'o', 'color', colors(2,:), ... + 'HandleVisibility', 'off'); +for g = logspace(2,5,100) + clpoles = pole(feedback(G_md_mid('dL', 'f'), -g*s, +1)); + plot(real(clpoles), imag(clpoles), '.', 'color', colors(2,:), ... + 'HandleVisibility', 'off'); +end +clpoles = pole(feedback(G_md_mid('dL', 'f'), K_rdc_md, +1)); +plot(real(clpoles), imag(clpoles), 'square', 'color', colors(2,:), ... + 'HandleVisibility', 'off'); + +% Heavy Sample +plot(real(pole(G_md_heavy('dL', 'f'))), imag(pole(G_md_heavy('dL', 'f'))), 'x', 'color', colors(3,:), ... + 'DisplayName', '$m_s = 50\,kg$'); +plot(real(zero(G_md_heavy('dL', 'f'))), imag(zero(G_md_heavy('dL', 'f'))), 'o', 'color', colors(3,:), ... + 'HandleVisibility', 'off'); +for g = logspace(2,5,100) + clpoles = pole(feedback(G_md_heavy('dL', 'f'), -g*s, +1)); + plot(real(clpoles), imag(clpoles), '.', 'color', colors(3,:), ... + 'HandleVisibility', 'off'); +end +clpoles = pole(feedback(G_md_heavy('dL', 'f'), K_rdc_md, +1)); +plot(real(clpoles), imag(clpoles), 'square', 'color', colors(3,:), ... + 'HandleVisibility', 'off'); +hold off; +axis square; +xlabel('Real Part'); ylabel('Imaginary Part'); +title('RDC'); + +%% Direct Velocity Feedback +ax3 = nexttile(); +hold on; +% Light Sample +plot(real(pole(G_md_light('vn', 'f'))), imag(pole(G_md_light('vn', 'f'))), 'x', 'color', colors(1,:), ... + 'DisplayName', '$m_s = 1\,kg$'); +plot(real(zero(G_md_light('vn', 'f'))), imag(zero(G_md_light('vn', 'f'))), 'o', 'color', colors(1,:), ... + 'HandleVisibility', 'off'); +for g = logspace(2,5,100) + clpoles = pole(feedback(G_md_light('vn', 'f'), -g, +1)); + plot(real(clpoles), imag(clpoles), '.', 'color', colors(1,:), ... + 'HandleVisibility', 'off'); +end +clpoles = pole(feedback(G_md_light('vn', 'f'), K_dvf_md, +1)); +plot(real(clpoles), imag(clpoles), 'square', 'color', colors(1,:), ... + 'HandleVisibility', 'off'); + +% Mid Sample +plot(real(pole(G_md_mid('vn', 'f'))), imag(pole(G_md_mid('vn', 'f'))), 'x', 'color', colors(2,:), ... + 'DisplayName', '$m_s = 25\,kg$'); +plot(real(zero(G_md_mid('vn', 'f'))), imag(zero(G_md_mid('vn', 'f'))), 'o', 'color', colors(2,:), ... + 'HandleVisibility', 'off'); +for g = logspace(2,5,100) + clpoles = pole(feedback(G_md_mid('vn', 'f'), -g, +1)); + plot(real(clpoles), imag(clpoles), '.', 'color', colors(2,:), ... + 'HandleVisibility', 'off'); +end +clpoles = pole(feedback(G_md_mid('vn', 'f'), K_dvf_md, +1)); +plot(real(clpoles), imag(clpoles), 'square', 'color', colors(2,:), ... + 'HandleVisibility', 'off'); + +% Heavy Sample +plot(real(pole(G_md_heavy('vn', 'f'))), imag(pole(G_md_heavy('vn', 'f'))), 'x', 'color', colors(3,:), ... + 'DisplayName', '$m_s = 50\,kg$'); +plot(real(zero(G_md_heavy('vn', 'f'))), imag(zero(G_md_heavy('vn', 'f'))), 'o', 'color', colors(3,:), ... + 'HandleVisibility', 'off'); +for g = logspace(2,5,100) + clpoles = pole(feedback(G_md_heavy('vn', 'f'), -g, +1)); + plot(real(clpoles), imag(clpoles), '.', 'color', colors(3,:), ... + 'HandleVisibility', 'off'); +end +clpoles = pole(feedback(G_md_heavy('vn', 'f'), K_dvf_md, +1)); +plot(real(clpoles), imag(clpoles), 'square', 'color', colors(3,:), ... + 'HandleVisibility', 'off'); +hold off; +axis square; +xlabel('Real Part'); ylabel('Imaginary Part'); +title('DVF'); + +linkaxes([ax1,ax2,ax3],'xy'); +xlim([-300, 0]); ylim([0, 300]); diff --git a/matlab/uniaxial_6_hac_lac.m b/matlab/uniaxial_6_hac_lac.m new file mode 100644 index 0000000..e78bd84 --- /dev/null +++ b/matlab/uniaxial_6_hac_lac.m @@ -0,0 +1,495 @@ +%% Clear Workspace and Close figures +clear; close all; clc; + +%% Intialize Laplace variable +s = zpk('s'); + +%% Path for functions, data and scripts +addpath('./mat/'); % Path for data +addpath('./src/'); % Path for functions + +%% Colors for the figures +colors = colororder; + +%% Frequency Vector [Hz] +freqs = logspace(0, 3, 1000); + +%% Load the PSD of disturbances +load('uniaxial_disturbance_psd.mat', 'f', 'psd_ft', 'psd_xf'); + +%% Load Plants Dynamics +load('uniaxial_plants.mat', 'G_vc_light', 'G_md_light', 'G_pz_light', ... + 'G_vc_mid', 'G_md_mid', 'G_pz_mid', ... + 'G_vc_heavy', 'G_md_heavy', 'G_pz_heavy'); + +%% Load Damped Plants +load('uniaxial_damped_plants.mat', 'G_iff_vc_light', 'G_iff_md_light', 'G_iff_pz_light', ... + 'G_rdc_vc_light', 'G_rdc_md_light', 'G_rdc_pz_light', ... + 'G_dvf_vc_light', 'G_dvf_md_light', 'G_dvf_pz_light', ... + 'G_iff_vc_mid', 'G_iff_md_mid', 'G_iff_pz_mid', ... + 'G_rdc_vc_mid', 'G_rdc_md_mid', 'G_rdc_pz_mid', ... + 'G_dvf_vc_mid', 'G_dvf_md_mid', 'G_dvf_pz_mid', ... + 'G_iff_vc_heavy', 'G_iff_md_heavy', 'G_iff_pz_heavy', ... + 'G_rdc_vc_heavy', 'G_rdc_md_heavy', 'G_rdc_pz_heavy', ... + 'G_dvf_vc_heavy', 'G_dvf_md_heavy', 'G_dvf_pz_heavy'); + +% Damped Plant Dynamics +% As was shown in Section ref:sec:uniaxial_active_damping, all three proposed active damping techniques yield similar damping plants. +% Therefore, /Integral Force Feedback/ will be used in this section to study the HAC-LAC performances. + +% The obtained damped plants for the three nano-hexapod stiffnesses are shown in Figure ref:fig:uniaxial_hac_iff_damped_plants_masses. + + +%% Damped plant - Robustness to change of sample's mass +figure; +tiledlayout(3, 3, 'TileSpacing', 'Compact', 'Padding', 'None'); + +ax1 = nexttile([2,1]); +hold on; +plot(freqs, abs(squeeze(freqresp(G_iff_vc_light('d', 'f'), freqs, 'Hz'))), '-', 'DisplayName', '$m_s = 1\,kg$'); +plot(freqs, abs(squeeze(freqresp(G_iff_vc_mid( 'd', 'f'), freqs, 'Hz'))), '-', 'DisplayName', '$m_s = 25\,kg$'); +plot(freqs, abs(squeeze(freqresp(G_iff_vc_heavy('d', 'f'), freqs, 'Hz'))), '-', 'DisplayName', '$m_s = 50\,kg$'); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +ylabel('Amplitude [m/N]'); set(gca, 'XTickLabel',[]); +title('$k_n = 0.01\,N/\mu m$'); +ylim([5e-10, 1e-3]); +ldg = legend('location', 'northeast', 'FontSize', 8, 'NumColumns', 1); +ldg.ItemTokenSize = [20, 1]; + +ax2 = nexttile([2,1]); +hold on; +plot(freqs, abs(squeeze(freqresp(G_iff_md_light('d', 'f'), freqs, 'Hz')))); +plot(freqs, abs(squeeze(freqresp(G_iff_md_mid( 'd', 'f'), freqs, 'Hz')))); +plot(freqs, abs(squeeze(freqresp(G_iff_md_heavy('d', 'f'), freqs, 'Hz')))); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +set(gca, 'XTickLabel',[]); set(gca, 'YTickLabel',[]); +title('$k_n = 1\,N/\mu m$'); +ylim([5e-10, 1e-3]); + +ax3 = nexttile([2,1]); +hold on; +plot(freqs, abs(squeeze(freqresp(G_iff_pz_light('d', 'f'), freqs, 'Hz')))); +plot(freqs, abs(squeeze(freqresp(G_iff_pz_mid( 'd', 'f'), freqs, 'Hz')))); +plot(freqs, abs(squeeze(freqresp(G_iff_pz_heavy('d', 'f'), freqs, 'Hz')))); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +set(gca, 'XTickLabel',[]); set(gca, 'YTickLabel',[]); +title('$k_n = 100\,N/\mu m$'); +ylim([5e-10, 1e-3]); + +ax1b = nexttile(); +hold on; +plot(freqs, unwrap(180/pi*angle(squeeze(freqresp(G_iff_vc_light('d', 'f'), freqs, 'Hz'))))); +plot(freqs, unwrap(180/pi*angle(squeeze(freqresp(G_iff_vc_mid( 'd', 'f'), freqs, 'Hz'))))); +plot(freqs, unwrap(180/pi*angle(squeeze(freqresp(G_iff_vc_heavy('d', 'f'), freqs, 'Hz'))))); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'lin'); +ylabel('Phase [deg]'); xlabel('Frequency [Hz]'); +xticks([1e0, 1e1, 1e2]); +yticks(-360:90:360); +ylim([-200, 20]); + +ax2b = nexttile(); +hold on; +plot(freqs, unwrap(180/pi*angle(squeeze(freqresp(G_iff_md_light('d', 'f'), freqs, 'Hz'))))); +plot(freqs, unwrap(180/pi*angle(squeeze(freqresp(G_iff_md_mid( 'd', 'f'), freqs, 'Hz'))))); +plot(freqs, unwrap(180/pi*angle(squeeze(freqresp(G_iff_md_heavy('d', 'f'), freqs, 'Hz'))))); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'lin'); +xlabel('Frequency [Hz]'); set(gca, 'YTickLabel',[]); +xticks([1e0, 1e1, 1e2]); +yticks(-360:90:360); +ylim([-200, 20]); + +ax3b = nexttile(); +hold on; +plot(freqs, unwrap(180/pi*angle(squeeze(freqresp(G_iff_pz_light('d', 'f'), freqs, 'Hz'))))); +plot(freqs, unwrap(180/pi*angle(squeeze(freqresp(G_iff_pz_mid( 'd', 'f'), freqs, 'Hz'))))); +plot(freqs, unwrap(180/pi*angle(squeeze(freqresp(G_iff_pz_heavy('d', 'f'), freqs, 'Hz'))))); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'lin'); +xlabel('Frequency [Hz]'); set(gca, 'YTickLabel',[]); +xticks([1e0, 1e1, 1e2]); +yticks(-360:90:360); +ylim([-200, 20]); + +linkaxes([ax1,ax2,ax3,ax1b,ax2b,ax3b],'x'); +xlim([1, 1e3]); + +% Position Feedback Controller +% The objective now is to design a position feedback controller for each of the three nano-hexapods that are robust to the change of sample's mass. + +% The required feedback bandwidth was approximately determined un Section ref:sec:uniaxial_noise_budgeting: +% - $\approx 10\,\text{Hz}$ for the soft nano-hexapod ($k_n = 0.01\,N/\mu m$). +% Near this frequency, the plants are equivalent to a mass line. +% The gain of the mass line can vary up to a fact $\approx 5$ (suspended mass from $16\,kg$ up to $65\,kg$). +% This mean that the designed controller will need to have large gain margins to be robust to the change of sample's mass. +% - $\approx 50\,\text{Hz}$ for the relatively stiff nano-hexapod ($k_n = 1\,N/\mu m$). +% Similarly to the soft nano-hexapod, the plants near the crossover frequency are equivalent to a mass line. +% It will be probably easier to have a little bit more bandwidth in this configuration to be further away from the nano-hexapod suspension mode. +% - $\approx 100\,\text{Hz}$ for the stiff nano-hexapod ($k_n = 100\,N/\mu m$). +% Contrary to the two first nano-hexapod stiffnesses, here the plants have more complex dynamics near the wanted crossover frequency. +% The micro-station is not stiff enough to have a clear stiffness line at this frequency. +% Therefore, there are both a change of phase and gain depending on the sample's mass. +% This makes the robust design of the controller a little bit more complicated. + + +% Position feedback controllers are designed for each nano-hexapod such that it is stable for all considered sample masses with similar stability margins (see Nyquist plots in Figure ref:fig:uniaxial_nyquist_hac). +% These high authority controllers are generally composed of a two integrators at low frequency for disturbance rejection, a lead to increase the phase margin near the crossover frequency and a low pass filter to increase the robustness to high frequency dynamics. +% The loop gains for the three nano-hexapod are shown in Figure ref:fig:uniaxial_loop_gain_hac. +% We can see that: +% - for the soft and moderately stiff nano-hexapod, the crossover frequency varies a lot with the sample mass. +% This is due to the fact that the crossover frequency corresponds to the mass line of the plant. +% - for the stiff nano-hexapod, the obtained crossover frequency is not at high as what was estimated necessary. +% The crossover frequency in that case is close to the stiffness line of the plant, which makes the robust design of the controller easier. + +% Note that these controller were quickly tuned by hand and not designed using any optimization methods. +% The goal is just to have a first estimation of the attainable performances. + + +%% High Authority Controller - Soft Nano-Hexapod +% Lead to increase phase margin +a = 5; % Amount of phase lead / width of the phase lead / high frequency gain +wc = 2*pi*20; % Frequency with the maximum phase lead [rad/s] +H_lead = (1 + s/(wc/sqrt(a)))/(1 + s/(wc*sqrt(a))); + +% Low Pass filter to increase robustness +H_lpf = 1/(1 + s/2/pi/200); + +% Added integrator at low frequency +H_int = (s + 2*pi*5)/(s + 2*pi*0.01); + +% High Authority Controller +K_hac_vc = 4e5 * ... % Gain + H_lead * ... % Lead + H_int * ... % Integrator + H_lpf; % LPF +K_hac_vc.InputName = {'d'}; +K_hac_vc.OutputName = {'f'}; + +%% High Authority Controller - Mid Stiffness Nano-Hexapod +% Integrator as low frequency +H_int = (s + 2*pi*10)/(s + 2*pi*0.01) * (s + 2*pi*20)/(s + 2*pi*0.01); + +% Lead to increase phase margin +a = 4; % Amount of phase lead / width of the phase lead / high frequency gain +wc = 2*pi*70; % Frequency with the maximum phase lead [rad/s] + +H_lead = (1 + s/(wc/sqrt(a)))/(1 + s/(wc*sqrt(a))); + +% Low Pass filter to increase robustness +H_lpf = 1/(1 + s/2/pi/300); + +% High Authority Controller +K_hac_md = 3e6 * ... % Gain + H_lead * ... % Lead + H_lpf * ... % Low Pass Filter + H_int; % Integrator +K_hac_md.InputName = {'d'}; +K_hac_md.OutputName = {'f'}; + +%% High Authority Controller - Stiff Nano-Hexapod +% Integrator as low frequency +H_int = 1/(s + 2*pi*0.01) * 1/(s + 2*pi*0.01); + +% Lead to increase phase margin +a = 5; % Amount of phase lead / width of the phase lead / high frequency gain +wc = 2*pi*100; % Frequency with the maximum phase lead [rad/s] +H_lead = (1 + s/(wc/sqrt(a)))/(1 + s/(wc*sqrt(a))); + +% Low Pass filter to increase robustness +H_lpf = 1/(1 + s/2/pi/500); + +% High Authority Controller +K_hac_pz = 6e12 * ... % Gain + H_lead^2 * ... % Lead + H_lpf * ... % Low Pass Filter + H_int; % Integrator +K_hac_pz.InputName = {'d'}; +K_hac_pz.OutputName = {'f'}; + +%% Compute Loop gain for Nyquist Plot +L_vc_light = squeeze(freqresp(K_hac_vc*G_iff_vc_light('d', 'f'), freqs, 'Hz')); +L_vc_mid = squeeze(freqresp(K_hac_vc*G_iff_vc_mid( 'd', 'f'), freqs, 'Hz')); +L_vc_heavy = squeeze(freqresp(K_hac_vc*G_iff_vc_heavy('d', 'f'), freqs, 'Hz')); + +L_md_light = squeeze(freqresp(K_hac_md*G_iff_md_light('d', 'f'), freqs, 'Hz')); +L_md_mid = squeeze(freqresp(K_hac_md*G_iff_md_mid( 'd', 'f'), freqs, 'Hz')); +L_md_heavy = squeeze(freqresp(K_hac_md*G_iff_md_heavy('d', 'f'), freqs, 'Hz')); + +L_pz_light = squeeze(freqresp(K_hac_pz*G_iff_pz_light('d', 'f'), freqs, 'Hz')); +L_pz_mid = squeeze(freqresp(K_hac_pz*G_iff_pz_mid( 'd', 'f'), freqs, 'Hz')); +L_pz_heavy = squeeze(freqresp(K_hac_pz*G_iff_pz_heavy('d', 'f'), freqs, 'Hz')); + +%% Nyquist Plot - Hight Authority Controller for all three nano-hexapod stiffnesses and all sample masses +figure; +hold on; +plot(real(L_vc_light), +imag(L_vc_light), '-', 'color', [colors(1,:), 0.5], 'DisplayName', '$k_n = 0.01\,N/\mu m$') +plot(real(L_vc_light), -imag(L_vc_light), '-', 'color', [colors(1,:), 0.5], 'HandleVisibility', 'off') +plot(real(L_vc_mid ), +imag(L_vc_mid ), '-', 'color', [colors(1,:), 0.5], 'HandleVisibility', 'off') +plot(real(L_vc_mid ), -imag(L_vc_mid ), '-', 'color', [colors(1,:), 0.5], 'HandleVisibility', 'off') +plot(real(L_vc_heavy), +imag(L_vc_heavy), '-', 'color', [colors(1,:), 0.5], 'HandleVisibility', 'off') +plot(real(L_vc_heavy), -imag(L_vc_heavy), '-', 'color', [colors(1,:), 0.5], 'HandleVisibility', 'off') + +plot(real(L_md_light), +imag(L_md_light), '-', 'color', [colors(2,:), 0.5], 'DisplayName', '$k_n = 1\,N/\mu m$') +plot(real(L_md_light), -imag(L_md_light), '-', 'color', [colors(2,:), 0.5], 'HandleVisibility', 'off') +plot(real(L_md_mid ), +imag(L_md_mid ), '-', 'color', [colors(2,:), 0.5], 'HandleVisibility', 'off') +plot(real(L_md_mid ), -imag(L_md_mid ), '-', 'color', [colors(2,:), 0.5], 'HandleVisibility', 'off') +plot(real(L_md_heavy), +imag(L_md_heavy), '-', 'color', [colors(2,:), 0.5], 'HandleVisibility', 'off') +plot(real(L_md_heavy), -imag(L_md_heavy), '-', 'color', [colors(2,:), 0.5], 'HandleVisibility', 'off') + +plot(real(L_pz_light), +imag(L_pz_light), '-', 'color', [colors(3,:), 0.5], 'DisplayName', '$k_n = 100\,N/\mu m$') +plot(real(L_pz_light), -imag(L_pz_light), '-', 'color', [colors(3,:), 0.5], 'HandleVisibility', 'off') +plot(real(L_pz_mid ), +imag(L_pz_mid ), '-', 'color', [colors(3,:), 0.5], 'HandleVisibility', 'off') +plot(real(L_pz_mid ), -imag(L_pz_mid ), '-', 'color', [colors(3,:), 0.5], 'HandleVisibility', 'off') +plot(real(L_pz_heavy), +imag(L_pz_heavy), '-', 'color', [colors(3,:), 0.5], 'HandleVisibility', 'off') +plot(real(L_pz_heavy), -imag(L_pz_heavy), '-', 'color', [colors(3,:), 0.5], 'HandleVisibility', 'off') +plot(-1, 0, 'kx', 'HandleVisibility', 'off'); +hold off; +set(gca, 'XScale', 'lin'); set(gca, 'YScale', 'lin'); +xlabel('Real'); ylabel('Imag'); +legend('location', 'northeast', 'FontSize', 8, 'NumColumns', 1); +xlim([-3.8, 0.2]); ylim([-2, 2]); +axis square; + + + +% #+name: fig:uniaxial_nyquist_hac +% #+caption: Nyquist Plot - Hight Authority Controller for all three nano-hexapod stiffnesses (soft one in blue, moderately stiff in red and very stiff in yellow) and all sample masses (corresponding to the three curves of each color) +% #+RESULTS: +% [[file:figs/uniaxial_nyquist_hac.png]] + + +%% Loop Gain - High Authority Controller for all three nano-hexapod stiffnesses and all sample masses +figure; +tiledlayout(3, 1, 'TileSpacing', 'Compact', 'Padding', 'None'); + +ax1 = nexttile([2,1]); +hold on; +plot(freqs, abs(L_vc_light), 'color', [colors(1,:), 0.5], 'DisplayName', '$k_n = 0.01\,N/\mu m$'); +plot(freqs, abs(L_vc_mid), 'color', [colors(1,:), 0.5], 'HandleVisibility', 'off'); +plot(freqs, abs(L_vc_heavy), 'color', [colors(1,:), 0.5], 'HandleVisibility', 'off'); +plot(freqs, abs(L_md_light), 'color', [colors(2,:), 0.5], 'DisplayName', '$k_n = 1\,N/\mu m$'); +plot(freqs, abs(L_md_mid), 'color', [colors(2,:), 0.5], 'HandleVisibility', 'off'); +plot(freqs, abs(L_md_heavy), 'color', [colors(2,:), 0.5], 'HandleVisibility', 'off'); +plot(freqs, abs(L_pz_light), 'color', [colors(3,:), 0.5], 'DisplayName', '$k_n = 100\,N/\mu m$'); +plot(freqs, abs(L_pz_mid), 'color', [colors(3,:), 0.5], 'HandleVisibility', 'off'); +plot(freqs, abs(L_pz_heavy), 'color', [colors(3,:), 0.5], 'HandleVisibility', 'off'); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +ylabel('Loop Gain'); set(gca, 'XTickLabel',[]); +ylim([1e-3, 1e3]); +legend('location', 'northeast', 'FontSize', 8, 'NumColumns', 1); + +ax2 = nexttile; +hold on; +plot(freqs, 180/pi*unwrap(angle(L_vc_light)), 'color', [colors(1,:), 0.5]); +plot(freqs, 180/pi*unwrap(angle(L_vc_mid )), 'color', [colors(1,:), 0.5]); +plot(freqs, 180/pi*unwrap(angle(L_vc_heavy)), 'color', [colors(1,:), 0.5]); +plot(freqs, 180/pi*unwrap(angle(L_md_light)), 'color', [colors(2,:), 0.5]); +plot(freqs, 180/pi*unwrap(angle(L_md_mid )), 'color', [colors(2,:), 0.5]); +plot(freqs, 180/pi*unwrap(angle(L_md_heavy)), 'color', [colors(2,:), 0.5]); +plot(freqs, 180/pi*unwrap(angle(L_pz_light)), 'color', [colors(3,:), 0.5]); +plot(freqs, 180/pi*unwrap(angle(L_pz_mid )), 'color', [colors(3,:), 0.5]); +plot(freqs, 180/pi*unwrap(angle(L_pz_heavy)), 'color', [colors(3,:), 0.5]); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'lin'); +xlabel('Frequency [Hz]'); ylabel('Phase [deg]'); +hold off; +yticks(-360:90:360); +ylim([-270, 0]); + +linkaxes([ax1,ax2],'x'); +xlim([1, 500]); + +% Closed-Loop Noise Budgeting +% The high authority position feedback controllers are then implemented and the closed-loop sensitivity to disturbances are computed. +% These are compared with the open-loop and damped plants cases in Figure ref:fig:uniaxial_sensitivity_dist_hac_lac for just one configuration (moderately stiff nano-hexapod with 25kg sample's mass). +% As expected, the sensitivity to disturbances is decreased in the controller bandwidth and slightly increase outside this bandwidth. + + +%% Compute Closed Loop Systems +G_hac_iff_vc_light = feedback(G_iff_vc_light, K_hac_vc, 'name', -1); +G_hac_iff_vc_mid = feedback(G_iff_vc_mid , K_hac_vc, 'name', -1); +G_hac_iff_vc_heavy = feedback(G_iff_vc_heavy, K_hac_vc, 'name', -1); + +G_hac_iff_md_light = feedback(G_iff_md_light, K_hac_md, 'name', -1); +G_hac_iff_md_mid = feedback(G_iff_md_mid , K_hac_md, 'name', -1); +G_hac_iff_md_heavy = feedback(G_iff_md_heavy, K_hac_md, 'name', -1); + +G_hac_iff_pz_light = feedback(G_iff_pz_light, K_hac_pz, 'name', -1); +G_hac_iff_pz_mid = feedback(G_iff_pz_mid , K_hac_pz, 'name', -1); +G_hac_iff_pz_heavy = feedback(G_iff_pz_heavy, K_hac_pz, 'name', -1); + +%% Verify Stability +isstable(G_hac_iff_vc_light) && isstable(G_hac_iff_vc_mid) && isstable(G_hac_iff_vc_heavy) + +isstable(G_hac_iff_md_light) && isstable(G_hac_iff_md_mid) && isstable(G_hac_iff_md_heavy) + +isstable(G_hac_iff_pz_light) && isstable(G_hac_iff_pz_mid) && isstable(G_hac_iff_pz_heavy) + +%% Change of sensitivity to disturbances with LAC and with HAC-LAC +figure; +tiledlayout(1, 3, 'TileSpacing', 'Compact', 'Padding', 'None'); + +ax1 = nexttile(); +hold on; +plot(freqs, abs(squeeze(freqresp(G_md_mid( 'd', 'fs'), freqs, 'Hz'))), 'k-'); +plot(freqs, abs(squeeze(freqresp(G_iff_md_mid('d', 'fs'), freqs, 'Hz'))), 'color', colors(1,:)); +plot(freqs, abs(squeeze(freqresp(G_hac_iff_md_mid('d', 'fs'), freqs, 'Hz'))), 'color', colors(2,:)); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +xticks([1e0, 1e1, 1e2]); +ylabel('Amplitude $d/f_{s}$ [m/N]'); xlabel('Frequency [Hz]'); + +ax2 = nexttile(); +hold on; +plot(freqs, abs(squeeze(freqresp(G_md_mid( 'd', 'ft'), freqs, 'Hz'))), 'k-'); +plot(freqs, abs(squeeze(freqresp(G_iff_md_mid('d', 'ft'), freqs, 'Hz'))), 'color', colors(1,:)); +plot(freqs, abs(squeeze(freqresp(G_hac_iff_md_mid('d', 'ft'), freqs, 'Hz'))), 'color', colors(2,:)); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +xticks([1e0, 1e1, 1e2]); +ylabel('Amplitude $d/f_{t}$ [m/N]'); xlabel('Frequency [Hz]'); + +ax3 = nexttile(); +hold on; +plot(freqs, abs(squeeze(freqresp(G_md_mid( 'd', 'xf'), freqs, 'Hz'))), 'k-', 'DisplayName', 'OL'); +plot(freqs, abs(squeeze(freqresp(G_iff_md_mid('d', 'xf'), freqs, 'Hz'))), 'color', colors(1,:), 'DisplayName', 'IFF'); +plot(freqs, abs(squeeze(freqresp(G_hac_iff_md_mid('d', 'xf'), freqs, 'Hz'))), 'color', colors(2,:), 'DisplayName', 'HAC-IFF'); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +xticks([1e0, 1e1, 1e2]); +ylabel('Amplitude $d/x_{f}$ [m/m]'); xlabel('Frequency [Hz]'); +legend('location', 'southeast', 'FontSize', 8, 'NumColumns', 1); + +linkaxes([ax1,ax2,ax3],'x'); +xlim([1, 500]); + + + +% #+name: fig:uniaxial_sensitivity_dist_hac_lac +% #+caption: Change of sensitivity to disturbances with LAC and with HAC-LAC +% #+RESULTS: +% [[file:figs/uniaxial_sensitivity_dist_hac_lac.png]] + +% The cumulative amplitude spectrum of the motion $d$ is computed for all nano-hexapod configurations, all sample masses and in the open-loop (OL), damped (IFF) and position controlled (HAC-IFF) cases. +% The results are shown in Figure ref:fig:uniaxial_cas_hac_lac. +% Obtained root mean square values of the distance $d$ are better for the soft nano-hexapod ($\approx 25\,nm$ to $\approx 35\,nm$ depending on the sample's mass) than for the stiffer nano-hexapod (from $\approx 30\,nm$ to $\approx 70\,nm$). + + +%% Cumulative Amplitude Spectrum for all three nano-hexapod stiffnesses - Comparison of OL, IFF and HAC-LAC cases +figure; +tiledlayout(1, 3, 'TileSpacing', 'Compact', 'Padding', 'None'); + +ax1 = nexttile(); +hold on; +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_vc_mid('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_vc_mid('d', 'xf'), f, 'Hz'))).^2)))), '-', ... + 'color', [0,0,0,0.5], 'DisplayName', 'OL'); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_vc_light('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_vc_light('d', 'xf'), f, 'Hz'))).^2)))), '-', ... + 'color', [0,0,0,0.5], 'HandleVisibility', 'off'); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_vc_heavy('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_vc_heavy('d', 'xf'), f, 'Hz'))).^2)))), '-', ... + 'color', [0,0,0,0.5], 'HandleVisibility', 'off'); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_iff_vc_mid('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_iff_vc_mid('d', 'xf'), f, 'Hz'))).^2)))), '-', ... + 'color', [colors(1,:), 0.5], 'DisplayName', 'IFF'); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_iff_vc_light('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_iff_vc_light('d', 'xf'), f, 'Hz'))).^2)))), '-', ... + 'color', [colors(1,:), 0.5], 'HandleVisibility', 'off'); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_iff_vc_heavy('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_iff_vc_heavy('d', 'xf'), f, 'Hz'))).^2)))), '-', ... + 'color', [colors(1,:), 0.5], 'HandleVisibility', 'off'); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_hac_iff_vc_mid('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_hac_iff_vc_mid('d', 'xf'), f, 'Hz'))).^2)))), '-', ... + 'color', [colors(2,:), 0.5], 'DisplayName', 'HAC-IFF'); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_hac_iff_vc_light('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_hac_iff_vc_light('d', 'xf'), f, 'Hz'))).^2)))), '-', ... + 'color', [colors(2,:), 0.5], 'HandleVisibility', 'off'); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_hac_iff_vc_heavy('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_hac_iff_vc_heavy('d', 'xf'), f, 'Hz'))).^2)))), '-', ... + 'color', [colors(2,:), 0.5], 'HandleVisibility', 'off'); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +xticks([1e0, 1e1, 1e2]); +ylabel('CAS of $d$ [m]'); xlabel('Frequency [Hz]'); +legend('location', 'southwest', 'FontSize', 8, 'NumColumns', 1); +title('$k_n = 0.01\,N/\mu m$'); + +ax2 = nexttile(); +hold on; +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_md_mid('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_md_mid('d', 'xf'), f, 'Hz'))).^2)))), '-', ... + 'color', [0,0,0,0.5]); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_md_light('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_md_light('d', 'xf'), f, 'Hz'))).^2)))), '-', ... + 'color', [0,0,0,0.5]); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_md_heavy('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_md_heavy('d', 'xf'), f, 'Hz'))).^2)))), '-', ... + 'color', [0,0,0,0.5]); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_iff_md_mid('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_iff_md_mid('d', 'xf'), f, 'Hz'))).^2)))), '-', ... + 'color', [colors(1,:), 0.5]); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_iff_md_light('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_iff_md_light('d', 'xf'), f, 'Hz'))).^2)))), '-', ... + 'color', [colors(1,:), 0.5]); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_iff_md_heavy('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_iff_md_heavy('d', 'xf'), f, 'Hz'))).^2)))), '-', ... + 'color', [colors(1,:), 0.5]); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_hac_iff_md_mid('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_hac_iff_md_mid('d', 'xf'), f, 'Hz'))).^2)))), '-', ... + 'color', [colors(2,:), 0.5]); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_hac_iff_md_light('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_hac_iff_md_light('d', 'xf'), f, 'Hz'))).^2)))), '-', ... + 'color', [colors(2,:), 0.5]); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_hac_iff_md_heavy('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_hac_iff_md_heavy('d', 'xf'), f, 'Hz'))).^2)))), '-', ... + 'color', [colors(2,:), 0.5]); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +xticks([1e0, 1e1, 1e2]); +xlabel('Frequency [Hz]'); set(gca, 'YTickLabel',[]); +title('$k_n = 1\,N/\mu m$'); + +ax3 = nexttile(); +hold on; +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_pz_mid('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_pz_mid('d', 'xf'), f, 'Hz'))).^2)))), '-', ... + 'color', [0,0,0,0.5]); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_pz_light('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_pz_light('d', 'xf'), f, 'Hz'))).^2)))), '-', ... + 'color', [0,0,0,0.5]); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_pz_heavy('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_pz_heavy('d', 'xf'), f, 'Hz'))).^2)))), '-', ... + 'color', [0,0,0,0.5]); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_iff_pz_mid('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_iff_pz_mid('d', 'xf'), f, 'Hz'))).^2)))), '-', ... + 'color', [colors(1,:), 0.5]); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_iff_pz_light('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_iff_pz_light('d', 'xf'), f, 'Hz'))).^2)))), '-', ... + 'color', [colors(1,:), 0.5]); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_iff_pz_heavy('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_iff_pz_heavy('d', 'xf'), f, 'Hz'))).^2)))), '-', ... + 'color', [colors(1,:), 0.5]); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_hac_iff_pz_mid('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_hac_iff_pz_mid('d', 'xf'), f, 'Hz'))).^2)))), '-', ... + 'color', [colors(2,:), 0.5]); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_hac_iff_pz_light('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_hac_iff_pz_light('d', 'xf'), f, 'Hz'))).^2)))), '-', ... + 'color', [colors(2,:), 0.5]); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_hac_iff_pz_heavy('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_hac_iff_pz_heavy('d', 'xf'), f, 'Hz'))).^2)))), '-', ... + 'color', [colors(2,:), 0.5]); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +xticks([1e0, 1e1, 1e2]); +xlabel('Frequency [Hz]'); set(gca, 'YTickLabel',[]); +title('$k_n = 100\,N/\mu m$'); + +linkaxes([ax1,ax2,ax3],'xy'); +xlim([1, 500]); +ylim([2e-10, 3e-6]) diff --git a/nass-uniaxial-model.html b/nass-uniaxial-model.html new file mode 100644 index 0000000..3218a19 --- /dev/null +++ b/nass-uniaxial-model.html @@ -0,0 +1,785 @@ + + + + + + +Unidirectional Model - Report + + + + + + + + +

+ UP + | + HOME +
+

Unidirectional Model - Report

+ +
+

This report is also available as a pdf.

+
+ +
+
(let ((org-export-before-parsing-hook (lambda (backend)
+                                        (let* ((data (org-element-parse-buffer))
+                                               (headline-labels (append
+                                                                 (org-element-map data 'headline
+                                                                   (lambda (hl)
+                                                                     (when (org-element-property :CUSTOM_ID hl)
+                                                                       (org-element-property :CUSTOM_ID hl))))
+                                                                 (org-element-map data 'link
+                                                                   (lambda (lnk)
+                                                                     (when
+                                                                         (and (string= "label" (org-element-property :type lnk))
+                                                                              (eq 'headline (car (org-element-property :parent lnk))))
+                                                                       (org-element-property :path lnk))))))
+                                               (table-labels (append
+                                                              (org-element-map data 'table
+                                                                (lambda (tbl)
+                                                                  (when (org-element-property :name tbl)
+                                                                    (org-element-property :name tbl))))
+                                                              (org-element-map data 'link
+                                                                (lambda (lnk)
+                                                                  (when (and (string= "label" (org-element-property :type lnk))
+                                                                             (eq 'table (car (org-element-property :parent lnk))))
+                                                                    (org-element-property :path lnk)))))))
+                                          ;; now we need to map over these and replace them
+                                          (mapc (lambda (label)
+                                                  (goto-char (point-min))
+                                                  (while (re-search-forward (format "ref:%s" label) nil t)
+                                                    (replace-match (format "[[%s]]" label))))
+                                                headline-labels)
+                                          (mapc (lambda (label)
+                                                  (goto-char (point-min))
+                                                  (while (re-search-forward (format "label:%s" label) nil t)
+                                                    (replace-match (format "<<%s>>" label))))
+                                                headline-labels)
+                                          (mapc (lambda (label)
+                                                  (goto-char (point-min))
+                                                  (while (re-search-forward (format "ref:%s" label) nil t)
+                                                    (replace-match (format "[[%s]]" label))))
+                                                table-labels)))))
+
+  (org-open-file (org-html-export-to-html)))
+
+
+ + +

+The report is organized as follow: +

+
    +
  • section sec:micro_station_model: an uniaxial of the micro-station is developped and compared with measurements.
  • +
  • section sec:nano_station_model: a model of the NASS is added on top of the model of the micro-station and some properties of the obtained model are studied.
  • +
  • section sec:noise_budget: after a definition of the control objective, an open loop noise budgeting is done. It consists of studying the effect of the sources of perturbation on the control objective. Some conclusions can be made on the open loop performances of both systems.
  • +
  • section sec:active_damping: active damping is applied on the system using integral force feedback in order to obtain critical damping of the NASS’s mode.
  • +
  • section sec:feedback_control: feedback control is applied using both actuators.
  • +
+ +
+

1. Micro Station Model

+
+

+ +

+

+In this section, a uni-axial model of the micro-station is tuned in order to match measurements made on the micro-station +

+ + +
+

micro_station_first_meas_dynamics.jpg +

+

Figure 1: Experimental Setup for the first dynamical measurements on the Micro-Station. Geophones are fixed to the micro-station, and the granite as well as the micro-hexapod’s top platform are impact with an instrumented hammer

+
+
+
+

1.1. Measured dynamics

+
+

+The measurement setup is schematically shown in Figure 2 where: +

+
    +
  • Two hammer hits are performed, one on the Granite, and one on the micro-hexapod’s top platform
  • +
  • The inertial motion of the granite and the micro-hexapod’s top platform are measured using geophones.
  • +
+ +

+From the forces applied by the instrumented hammer and the responses of the geophones, the following frequency response functions can be computed: +

+
    +
  • from \(F_h\) to \(d_h\) (i.e. the compliance of the micro-station)
  • +
  • from \(F_g\) to \(d_h\) (or from \(F_h\) to \(d_g\))
  • +
  • from \(F_g\) to \(d_g\)
  • +
+ + +
+

micro_station_meas_dynamics_schematic.png +

+

Figure 2: Measurement setup - Schematic

+
+ + +

+Due to the bad coherence at low frequency, the frequency response functions are only shown between 20 and 200Hz (Figure 3). +

+ +
+
%% Load measured FRF
+load('meas_microstation_frf.mat');
+
+
+ + +
+

measured_frf_vertical.png +

+

Figure 3: Measured Frequency Response Functions in the vertical direction

+
+
+
+ +
+

1.2. Uniaxial Model

+
+

+The uni-axial model of the micro-station is shown in Figure 5, with: +

+
    +
  • Disturbances: +
      +
    • \(x_f\): Floor motion
    • +
    • \(f_t\): Stage vibrations
    • +
  • +
  • Hammer impacts: \(F_h\) and \(F_g\).
  • +
  • Geophones: \(x_h\) and \(x_g\)
  • +
+ + +
+

uniaxial-model-micro-station.png +

+

Figure 4: Uni-axial model of the micro-station

+
+ +

+Masses are estimated from the CAD. +

+
+
%% Parameters - Mass
+mh = 15;   % Micro Hexapod [kg]
+mt = 1200; % Ty + Ry + Rz [kg]
+mg = 2500; % Granite [kg]
+
+
+ +

+And stiffnesses from the data-sheet of stage manufacturers. +

+
+
%% Parameters - Stiffnesses
+kh = 6.11e+07; % [N/m]
+kt = 5.19e+08; % [N/m]
+kg = 9.50e+08; % [N/m]
+
+
+
+
+ +
+

1.3. Comparison of the model and measurements

+
+

+The comparison between the measurements and the model is done in Figure 5. +

+ +

+Ad the model is simplistic, the goal is not to match exactly the measurement but to have a first approximation. +More accurate models will be developed and tuned later on. +

+ + +
+

comp_frf_meas_model.png +

+

Figure 5: Comparison of the measured FRF and identified ones from the uni-axial model

+
+
+
+
+ + +
+

2. Nano-Hexapod Model

+
+

+ +

+

+A model of the nano-hexapod and sample is now added on top of the uni-axial model of the micro-station (Figure 6). +

+ +

+Disturbances (shown in red) are: +

+
    +
  • \(f_s\): direct forces applied to the sample (for instance cable forces)
  • +
  • \(f_t\): disturbances coming from the imperfect stage scanning performances
  • +
  • \(x_f\): floor motion
  • +
+ +

+The control signal is the force applied by the nano-hexapod \(f\) and the measurement is the relative motion between the sample and the granite \(d\). +

+ + +
+

uniaxial-model-micro-station-nass.png +

+

Figure 6: Uni-axial model of the micro-station with added nano-hexapod and sample

+
+
+
+

2.1. Nano-Hexapod Parameters

+
+

+The parameters for the nano-hexapod and sample are: +

+
    +
  • \(m_s\) the sample mass that can vary from 1kg up to 50kg
  • +
  • \(m_n\) the nano-hexapod mass which is set to 15kg
  • +
  • \(k_n\) the nano-hexapod stiffness, which can vary depending on the chosen architecture/technology
  • +
+ +

+As a first example, let’s choose a nano-hexapod stiffness of \(10\,N/\mu m\) and a sample mass of 10kg. +

+ +
+
%% Nano-Hexapod Parameters
+mn = 15; % [kg]
+kn = 1e7; % [N/m]
+cn = 2*0.01*sqrt(mn*kn); % [N/(m/s)]
+
+%% Sample Mass
+ms = 10; % [kg]
+
+
+
+
+ +
+

2.2. Obtained Dynamics

+
+

+The sensitivity to disturbances (i.e. \(x_f\), \(f_t\) and \(f_s\)) are shown in Figure 7. +The plant (i.e. the transfer function from actuator force \(f\) to measured displacement \(d\)) is shown in Figure 8. +

+ + +
+

uniaxial_sensitivity_dist_first_params.png +

+

Figure 7: Sensitivity to disturbances

+
+ + +
+

uniaxial_plant_first_params.png +

+

Figure 8: Bode Plot of the transfer function from actuator forces to measured displacement by the metrology

+
+
+
+
+ +
+

3. Disturbance Identification

+
+

+ +

+

+In order to measure disturbances, two geophones are used, on located on the floor and on on the micro-hexapod’s top platform (see Figure 9). +

+ +

+The geophone on the floor is used to measured the floor motion \(x_f\) while the geophone on the micro-hexapod is used to measure vibrations introduced by scanning of the \(T_y\) stage and \(R_z\) stage. +

+ + +
+

micro_station_meas_disturbances.png +

+

Figure 9: Disturbance measurement setup - Schematic

+
+ +

+The voltage generated by each geophone is amplified using a voltage amplifier (gain of 60dB) before going to the ADC. +

+
+
+

3.1. Ground Motion

+
+

+The geophone fixed to the floor to measure the floor motion. +

+ +
+
%% Load floor motion data
+load('ground_motion_measurement.mat', 't', 'V');
+
+
+ +

+The sensitivity of the geophone as well as the gain of the voltage amplifier are taken into account to reconstruct the floor displacement. +

+ +
+
%% Sensitivity of the geophone
+S0 = 88; % Sensitivity [V/(m/s)]
+f0 = 2; % Cut-off frequency [Hz]
+
+S = S0*(s/2/pi/f0)/(1+s/2/pi/f0); % Geophone's transfer function [V/(m/s)]
+
+%% Gain of the voltage amplifier
+G0_db = 60; % [dB]
+G0 = 10^(G0_db/20); % [abs]
+
+%% Transfer function from measured voltage to displacement
+G_geo = 1/S/G0/s; % [m/V]
+
+
+ +

+The PSD \(S_{V_f}\) of the measured voltage \(V_f\) is computed. +

+ +
+
%% Compute measured voltage PSD
+Fs = 1/(t(2)-t(1)); % Sampling Frequency [Hz]
+win = hanning(ceil(2*Fs)); % Hanning window
+
+[psd_V, f] = pwelch(V, win, [], [], Fs); % [V^2/Hz]
+
+
+ +

+The PSD of the corresponding displacement can be computed as follows: +

+\begin{equation} +S_{x_f}(\omega) = \frac{S_{V_f}(\omega)}{|S_{\text{geo}}(j\omega)| \cdot G_{\text{amp}} \cdot \omega} +\end{equation} +

+with: +

+
    +
  • \(S_{\text{geo}}\) the sensitivity of the Geophone in \([Vs/m]\)
  • +
  • \(G_{\text{amp}}\) the gain of the voltage amplifier
  • +
  • \(\omega\) is here to integrate and have the displacement instead of the velocity
  • +
+ +
+
%% Ground Motion ASD
+psd_xf = psd_V.*abs(squeeze(freqresp(G_geo, f, 'Hz'))).^2; % [m^2/Hz]
+
+
+ +

+The amplitude spectral density \(\Gamma_{x_f}\) of the measured displacement \(x_f\) is shown in Figure 10. +

+ + +
+

asd_floor_motion_id31.png +

+

Figure 10: Measured Amplitude Spectral Density of the Floor motion on ID31

+
+
+
+ +
+

3.2. Stage Vibration

+
+

+During Spindle rotation (here at 6rpm), the granite velocity and micro-hexapod’s top platform velocity are measured with the geophones. +

+ +
+
%% Measured velocity of granite and hexapod during spindle rotation
+load('meas_spindle_on.mat', 't', 'vg', 'vh');
+
+
+ +

+The Power Spectral Density of the relative velocity between the hexapod and the granite is computed. +

+
+
%% Compute Power Spectral Density of the relative velocity between granite and hexapod during spindle rotation
+Fs = 1/(t(2)-t(1)); % Sampling Frequency [Hz]
+win = hanning(ceil(2*Fs)); % Hanning window
+
+[psd_vft, f] = pwelch(vh-vg, win, [], [], Fs); % [(m/s)^2/Hz]
+
+
+ +

+It is then integrated to obtain the Amplitude Spectral Density of the relative motion (Figure 11). +

+ + +
+

asd_vibration_spindle_rotation.png +

+

Figure 11: Measured Amplitude Spectral Density of the relative motion between the granite and the micro-hexapod’s top platform during Spindle rotating

+
+ +

+In order to compute the equivalent disturbance force \(f_t\) that induces such motion, the transfer function from \(f_t\) to the relative motion of the hexapod’s top platform and the granite is extracted from the model. +The power spectral density \(\Gamma_{f_{t}}\) of the disturbance force can be computed as follows: +

+\begin{equation} +\Gamma_{f_{t}}(\omega) = \frac{\Gamma_{v_{t}}(\omega)}{|G_{\text{model}}(j\omega)|^2} +\end{equation} +

+with: +

+
    +
  • \(\Gamma_{v_{t}}\) the measured power spectral density of the relative motion between the micro-hexapod’s top platform and the granite during the spindle’s rotation
  • +
  • \(G_{\text{model}}\) the transfer function (extracted from the uniaxial model) from \(f_t\) to the relative motion between the micro-hexapod’s top platform and the granite
  • +
+ +
+
%% Power Spectral Density of the equivalent force ft
+psd_ft = (psd_vft./(2*pi*f).^2)./abs(squeeze(freqresp(G('Dh', 'ft') - G('Dg', 'ft'), f, 'Hz'))).^2;
+
+
+ +

+The obtained amplitude spectral density of the disturbance force \(f_t\) is shown in Figure 12. +

+ +
+

asd_disturbance_force.png +

+

Figure 12: Estimated disturbance force ft from measurement and uniaxial model

+
+
+
+
+ +
+

4. Open-Loop Dynamic Noise Budgeting

+
+

+ +

+

+Now that we have a model of the NASS and an estimation of the power spectral density of the disturbances, it is possible to perform an open-loop dynamic noise budgeting. +

+
+
+

4.1. Sensitivity to disturbances

+
+

+From the Uni-axial model, the transfer function from the disturbances (\(f_s\), \(x_f\) and \(f_t\)) to the displacement \(d\) are computed. +

+ +

+This is done for two extreme sample masses \(m_s = 1\,\text{kg}\) and \(m_s = 50\,\text{kg}\) and three nano-hexapod stiffnesses: +

+
    +
  • \(k_n = 0.01\,N/\mu m\) that could represent a voice coil actuator with soft flexible guiding
  • +
  • \(k_n = 1\,N/\mu m\) that could represent a voice coil actuator with a stiff flexible guiding or a mechanically amplified piezoelectric actuator
  • +
  • \(k_n = 100\,N/\mu m\) that could represent a stiff piezoelectric stack actuator
  • +
+ +

+The obtained sensitivity to disturbances for the three nano-hexapod stiffnesses are shown in Figure 13 for the light sample (same conclusions can be drawn with the heavy one). +

+ +
+

+From Figure 13, following can be concluded for the soft nano-hexapod: +

+
    +
  • It is more sensitive to forces applied on the sample (cable forces for instance), which is expected due to the lower stiffness
  • +
  • Between the suspension mode of the nano-hexapod (here at 5Hz) and the first mode of the micro-station (here at 70Hz), the disturbances induced by the stage vibrations are filtered out.
  • +
  • Above the suspension mode of the nano-hexapod, the sample’s motion is unaffected by the floor motion, and therefore the sensitivity to floor motion is almost \(1\).
  • +
+ +
+ + +
+

sensitivity_disturbances_nano_hexpod_stiffnesses.png +

+

Figure 13: Sensitivity to disturbances for three different nano-hexpod stiffnesses

+
+
+
+ +
+

4.2. Open-Loop Dynamic Noise Budgeting

+
+

+Now, the power spectral density of the disturbances is taken into account to estimate the residual motion \(d\) in each case. +

+ +

+The Cumulative Amplitude Spectrum of the relative motion \(d\) due to both the floor motion \(x_f\) and the stage vibrations \(f_t\) are shown in Figure 14 for the three nano-hexapod stiffnesses. +

+ +

+It is shown that the effect of the floor motion is much less than the stage vibrations, except for the soft nano-hexapod below 5Hz. +

+ + +
+

cas_d_disturbances_stiffnesses.png +

+

Figure 14: Cumulative Amplitude Spectrum of the relative motion d, due to both the floor motion and the stage vibrations (light sample)

+
+ +

+The total cumulative amplitude spectrum for the three nano-hexapod stiffnesses and for the two sample’s masses are shown in Figure 15. +The conclusion is that the sample’s mass has little effect on the cumulative amplitude spectrum of the relative motion \(d\). +

+ + +
+

cas_d_disturbances_payload_masses.png +

+

Figure 15: Cumulative Amplitude Spectrum of the relative motion d due to all disturbances, for two sample masses

+
+ +
+

+The conclusion is that in order to have a closed-loop residual vibration \(d \approx 20\,nm\text{ rms}\), if a simple feedback controller is used, the required closed-loop bandwidth would be: +

+
    +
  • \(\approx 10\,\text{Hz}\) for the soft nano-hexapod (\(k_n = 0.01\,N/\mu m\))
  • +
  • \(\approx 50\,\text{Hz}\) for the relatively stiff nano-hexapod (\(k_n = 1\,N/\mu m\))
  • +
  • \(\approx 100\,\text{Hz}\) for the stiff nano-hexapod (\(k_n = 100\,N/\mu m\))
  • +
+ +
+
+
+
+ +
+

5. Active Damping

+
+

+ +

+ +
+

uniaxial_active_damping_strategies.png +

+

Figure 16: Three active damping strategies: Direct Velocity Feedback (DVF) using a geophone, Integral Force Feedback (IFF) using a force sensor, and Relative Motion Control (RMC) using a relative displacement sensor

+
+
+
+

5.1. Plant Dynamics

+
+

+The plant dynamics for all three active damping techniques are shown in Figure 17. +

+ +

+All have alternating poles and zeros. +

+ + +
+

uniaxial_plant_active_damping_techniques.png +

+

Figure 17: Plant dynamics for the three active damping techniques

+
+
+
+ +
+

5.2. Achievable Damping

+
+

+Controller used for the three active damping techniques are: +

+\begin{align} +K_{\text{IFF}}(s) &= \frac{g_{\text{IFF}}}{s} \\ +K_{\text{RMC}}(s) &= g_{\text{RMC}} s \\ +K_{\text{DVF}}(s) &= g_{\text{DVF}} +\end{align} + +

+It is shown in the Root Locus in Figure 18 that all three active damping approach can lead to critical damping. +

+ + +
+

uniaxial_root_locus_damping_techniques.png +

+

Figure 18: Root Locus for the three damping techniques

+
+
+
+ +
+

5.3. Change of sensitivity to disturbances

+
+

+The sensitivity to disturbances (\(f_s\), \(f_t\) and \(x_f\)) for all three active damping techniques are compared in Figure 19. +

+ +
+

+Conclusions from Figure 19 are: +

+
    +
  • IFF degrades the sensitivity to direct forces on the sample (i.e. the compliance) below the resonance of the nano-hexapod
  • +
  • RMC degrades the sensitivity to stage vibrations around the nano-hexapod’s resonance as compared to the other two methods
  • +
  • both IFF and DVF degrades the sensitivity to floor motion below the resonance of the nano-hexapod
  • +
+ +
+ + +
+

uniaxial_sensitivity_dist_active_damping.png +

+

Figure 19: Change of sensitivity to disturbance with all three active damping strategies

+
+
+
+ +
+

5.4. Noise Budgeting after Active Damping

+
+

+Cumulative Amplitude Spectrum of the distance \(d\) with all three active damping techniques are compared in Figure 20. +All three active damping methods are giving similar results. +

+ +

+Active Damping helps to lower the vibrations and less bandwidth is required for the position controller. +

+ + +
+

uniaxial_cas_active_damping.png +

+

Figure 20: Cumulative Amplitude Spectrum of the distance \(d\) with all three active damping techniques

+
+
+
+
+ +
+

6. Position Feedback Controller

+
+

+ +

+
    +
  • [X] Explain the HAC-LAC control strategy
  • +
  • [ ] Show the plant for the three stiffnesses
  • +
  • [ ] Estimate the required bandwidth to attain the specifications
  • +
+ +

+The High Authority Control - Low Authority Control (HAC-LAC) architecture is shown in Figure 21. +It corresponds to a two step control strategy: +

+
    +
  • First, an active damping controller \(\bm{K}_{\textsc{LAC}}\) is implemented (see Section sec:uniaxial_active_damping). +It allows to reduce the vibration level, and it also makes the damped plant (transfer function from \(u^{\prime}\) to \(y\)) easier to control than the undamped plant (transfer function from \(u\) to \(y\)).
  • +
  • Then, a position controller \(K_{\textsc{HAC}}\) is implemented.
  • +
+ + + +
+

uniaxial_hac_lac_architecture.png +

+

Figure 21: High Authority Control - Low Authority Control (HAC-LAC) architecture

+
+
+
+

6.1. Plant Dynamics

+
+
+
+
+

Author: Dehaeze Thomas

+

Created: 2023-02-14 Tue 13:19

+
+ + diff --git a/nass-uniaxial-model.matlab b/nass-uniaxial-model.matlab new file mode 100644 index 0000000..4a10d89 --- /dev/null +++ b/nass-uniaxial-model.matlab @@ -0,0 +1,21 @@ +% Initialize Path +% #+NAME: m-init-path + +%% Path for functions, data and scripts +addpath('./matlab/mat/'); % Path for data +addpath('./matlab/src/'); % Path for functions +addpath('./matlab/'); % Path for scripts + + + +% #+NAME: m-init-path-tangle + +%% Path for functions, data and scripts +addpath('./mat/'); % Path for data +addpath('./src/'); % Path for functions + +% Initialize other elements +% #+NAME: m-init-other + +%% Colors for the figures +colors = colororder; diff --git a/nass-uniaxial-model.org b/nass-uniaxial-model.org new file mode 100644 index 0000000..f51cdb3 --- /dev/null +++ b/nass-uniaxial-model.org @@ -0,0 +1,4193 @@ +#+TITLE: NASS - Uniaxial Model +:DRAWER: +#+LANGUAGE: en +#+EMAIL: dehaeze.thomas@gmail.com +#+AUTHOR: Dehaeze Thomas + +#+HTML_LINK_HOME: ../index.html +#+HTML_LINK_UP: ../index.html + +#+HTML_HEAD: +#+HTML_HEAD: + +#+BIND: org-latex-image-default-option "scale=1" +#+BIND: org-latex-image-default-width "" + +#+LaTeX_CLASS: scrreprt +#+LaTeX_CLASS_OPTIONS: [a4paper, 10pt, DIV=12, parskip=full] +#+LaTeX_HEADER_EXTRA: \input{preamble.tex} + +#+PROPERTY: header-args:matlab :session *MATLAB* +#+PROPERTY: header-args:matlab+ :comments org +#+PROPERTY: header-args:matlab+ :exports both +#+PROPERTY: header-args:matlab+ :results none +#+PROPERTY: header-args:matlab+ :eval no-export +#+PROPERTY: header-args:matlab+ :noweb yes +#+PROPERTY: header-args:matlab+ :mkdirp yes +#+PROPERTY: header-args:matlab+ :output-dir figs + +#+PROPERTY: header-args:latex :headers '("\\usepackage{tikz}" "\\usepackage{import}" "\\import{$HOME/Cloud/tikz/org/}{config.tex}") +#+PROPERTY: header-args:latex+ :imagemagick t :fit yes +#+PROPERTY: header-args:latex+ :iminoptions -scale 100% -density 150 +#+PROPERTY: header-args:latex+ :imoutoptions -quality 100 +#+PROPERTY: header-args:latex+ :results file raw replace +#+PROPERTY: header-args:latex+ :buffer no +#+PROPERTY: header-args:latex+ :tangle no +#+PROPERTY: header-args:latex+ :eval no-export +#+PROPERTY: header-args:latex+ :exports results +#+PROPERTY: header-args:latex+ :mkdirp yes +#+PROPERTY: header-args:latex+ :output-dir figs +#+PROPERTY: header-args:latex+ :post pdf2svg(file=*this*, ext="png") +:END: + +#+begin_export html +
+

This report is also available as a pdf.

+
+#+end_export + +#+latex: \clearpage + +* Introduction :ignore: + +In this report, a uniaxial model of the Nano Active Stabilization System (NASS) is developed and used to have a first idea of the challenges involved in this complex system. +Note that in this document, only the vertical direction is considered (which is the most stiff), but other directions were considered as well and yields similar conclusions. +The model is schematically shown in Figure ref:fig:uniaxial_overview_model_sections where the colors are representing the studied parts in different sections. + +In order to have a relevant model, the micro-station dynamics is first identified and its model is tuned to match the measurements (Section ref:sec:micro_station_model). +Then, a model of the nano-hexapod is added on top of the micro-station. +With added sample and sensors, this gives a uniaxial dynamical model of the NASS that will be used for further analysis (Section ref:sec:nano_station_model). + +The disturbances affecting the position accuracy are identified experimentally (Section ref:sec:uniaxial_disturbances) and included in the model for dynamical noise budgeting (Section ref:sec:uniaxial_noise_budgeting). +In all the following analysis, there nano-hexapod stiffnesses are considered to better understand the trade-offs and to find the most adequate stiffness. +Three sample masses are also considered to verify the robustness of the applied control strategies to a change of sample. + +Three active damping techniques are then applied on the nano-hexapod. +This helps to reduce the effect of disturbances as well as render the system easier to control afterwards (Section ref:sec:uniaxial_active_damping). + +Once the system is well damped, a feedback position controller is applied, and the obtained performances are compared (Section ref:sec:uniaxial_position_control). + +Conclusion remarks are given in Section ref:sec:conclusion. + +#+begin_src latex :file uniaxial_overview_model_sections.pdf +\begin{tikzpicture} + % ==================== + % Parameters + % ==================== + \def\massw{2.2} % Width of the masses + \def\massh{0.8} % Height of the masses + \def\spaceh{1.2} % Height of the springs/dampers + \def\dispw{0.4} % Width of the dashed line for the displacement + \def\disph{0.3} % Height of the arrow for the displacements + \def\bracs{0.05} % Brace spacing vertically + \def\brach{-12pt} % Brace shift horizontaly + \def\fsensh{0.2} % Height of the force sensor + \def\velsize{0.2} % Size of the velocity sensor + % ==================== + + % IFF + % ==================== + % Ground + % ==================== + \draw[draw=colorblue] (-0.5*\massw, 0) -- (0.5*\massw, 0); + \draw[dashed,draw=coloryellow] (0.5*\massw, 0) -- ++(\dispw, 0); + \draw[->, color=coloryellow] (0.5*\massw+0.5*\dispw, 0) -- ++(0, 2*\disph) node[right, color=coloryellow]{$x_{f}$}; + % ==================== + + % ==================== + % Granite + \begin{scope}[shift={(0, 0)}] + % Mass + \draw[draw=colorblue,fill=colorblue!10!white] (-0.5*\massw, \spaceh) rectangle (0.5*\massw, \spaceh+\massh) node[pos=0.5,color=colorblue]{$m_{g}$}; + + % Spring, Damper, and Actuator + \draw[spring,draw=colorblue] (-0.4*\massw, 0) -- (-0.4*\massw, \spaceh) node[midway, left=0.1, color=colorblue]{$k_{g}$}; + \draw[damper={colorblue}{}{}] (0, 0) -- ( 0, \spaceh) node[midway, left=0.2, color=colorblue]{$c_{g}$}; + + % Legend + \draw[decorate, decoration={brace, amplitude=8pt}, xshift=\brach] % + (-0.5*\massw, \bracs) -- (-0.5*\massw, \spaceh+\massh-\bracs) node[midway,rotate=90,anchor=south,yshift=10pt]{Granite}; + + % Displacements + \draw[dashed, draw=colorpurple] (0.5*\massw, \spaceh+\massh) -- ++(7.5*\dispw, 0) coordinate(xg); + \end{scope} + % ==================== + + + % ==================== + % Stages + \begin{scope}[shift={(0, \spaceh+\massh)}] + % Mass + \draw[draw=colorblue,fill=colorblue!10!white] (-0.5*\massw, \spaceh) rectangle (0.5*\massw, \spaceh+\massh) node[pos=0.5,color=colorblue]{$m_{t}$}; + + % Spring, Damper, and Actuator + \draw[spring,draw=colorblue] (-0.4*\massw, 0) -- (-0.4*\massw, \spaceh) node[midway, left=0.1,color=colorblue]{$k_{t}$}; + \draw[damper={colorblue}{}{}] (0, 0) -- ( 0, \spaceh) node[midway, left=0.2,color=colorblue]{$c_{t}$}; + + % Disturbance + \draw[actuator={0.45}{0.2}{coloryellow}] ( 0.3*\massw, 0) -- (0.3*\massw, \spaceh) node[midway, right=0.1, color=coloryellow](ft){$f_{t}$}; + + % Legend + \draw[decorate, decoration={brace, amplitude=8pt}, xshift=\brach] % + (-0.5*\massw, \bracs) -- (-0.5*\massw, \spaceh+\massh-\bracs) node[midway,rotate=90,anchor=south,yshift=10pt]{$T_y$/$R_y$/$R_z$}; + \end{scope} + % ==================== + + + % ==================== + % Hexapod + \begin{scope}[shift={(0, 2*(\spaceh+\massh))}] + % Mass + \draw[draw=colorblue,fill=colorblue!10!white] (-0.5*\massw, \spaceh) rectangle (0.5*\massw, \spaceh+\massh) node[pos=0.5,color=colorblue]{$m_h$}; + + % Spring, Damper, and Actuator + \draw[spring,draw=colorblue] (-0.4*\massw, 0) -- (-0.4*\massw, \spaceh) node[midway, left=0.1,color=colorblue]{$k_h$}; + \draw[damper={colorblue}{}{}] (0, 0) -- ( 0, \spaceh) node[midway, left=0.2,color=colorblue]{$c_h$}; + + % Legend + \draw[decorate, decoration={brace, amplitude=8pt}, xshift=\brach] % + (-0.5*\massw, \bracs) -- (-0.5*\massw, \spaceh+\massh-\bracs) node[midway,rotate=90,anchor=south,yshift=10pt]{$\mu\text{-hexa}$}; + \end{scope} + % ==================== + + + % ==================== + % NASS + \begin{scope}[shift={(0, 3*(\spaceh+\massh))}] + % Mass + \draw[draw=colorred,fill=colorred!10!white] (-0.5*\massw, \spaceh) rectangle (0.5*\massw, \spaceh+\massh) node[pos=0.5,color=colorred]{$m_{n}$}; + + % Force Sensor + \node[forcesensor={\massw}{\fsensh}{colorgreen}] (fsensn) at (0, \spaceh-\fsensh){}; + \node[right, color=colorgreen] (fn) at (fsensn.east) {$f_n$}; + + % Spring, Damper, and Actuator + \draw[spring,draw=colorred] (-0.4*\massw, 0) -- (-0.4*\massw, \spaceh-\fsensh) node[midway, left=0.1,color=colorred]{$k_{n}$}; + \draw[damper={colorred}{}{}] (0, 0) -- ( 0, \spaceh-\fsensh) node[midway, left=0.2,color=colorred]{$c_{n}$}; + \draw[actuator={0.4}{0.2}{colorred}] ( 0.3*\massw, 0) -- (0.3*\massw, \spaceh-\fsensh) node[midway, right=0.1,color=colorred](f){$f$}; + + % Legend + \draw[decorate, decoration={brace, amplitude=8pt}, xshift=\brach] % + (-0.5*\massw, \bracs) -- (-0.5*\massw, \spaceh+\massh-\bracs) node[midway,rotate=90,anchor=south,yshift=10pt]{$\nu\text{-hexa}$}; + + % Displacements + \draw[dashed,draw=colorpurple] (0.5*\massw, \spaceh+\massh) -- ++(7.5*\dispw, 0) coordinate(xnpos); + \end{scope} + % ==================== + + % ==================== + % sample + \begin{scope}[shift={(0, 4*(\spaceh+\massh))}] + % Mass + \draw[draw=colorred,fill=colorred!10!white] (-0.3*\massw, 0) rectangle (0.3*\massw, \massh) node[pos=0.5,color=colorred]{$m_{s}$}; + + % External Force + \draw[->, color=coloryellow] (0, \massh) node[]{$\bullet$} -- ++(0, 0.5*\massh) node[right, color=coloryellow]{$f_s$}; + \end{scope} + % ==================== + + % Measured displacement + \draw[<->, dashed, draw=colorpurple] ($(xg)+(-0.1, 0)$) -- node[left, color=colorpurple](d){$d$} ($(xnpos)+(-0.1, 0)$); + + % ==================== + % IFF Control + \node[block={2em}{2em}, right=1.0 of fn, color=colorgreen, fill=colorgreen!10!white] (iff) {$K_{\textsc{IFF}}$}; + \node[addb, draw=colorgreen, fill=colorgreen!10!white, right=0.5 of f.east] (ctrladd) {}; + \node[block={2em}{2em}, color=colorpurple, fill=colorpurple!10!white] (Khac) at (ctrladd|-d) {$K_{\textsc{HAC}}$}; + + \draw[->, draw=colorgreen] (fn.east) -- (iff.west); + \draw[->, draw=colorgreen] (iff.south) |- (ctrladd.east); + \draw[->, draw=colorgreen] (ctrladd.west) -- (f.east); + + \draw[->, draw=colorpurple] (d.west) -- (Khac.east); + \draw[->, draw=colorpurple] (Khac.north) -- (ctrladd.south) node[below right, color=colorpurple]{$f^{\prime}$}; + % ==================== +\end{tikzpicture} +#+end_src + +#+name: fig:uniaxial_overview_model_sections +#+caption: Uniaxial Micro-Station model in blue (Section ref:sec:micro_station_model), Nano-Hexapod and sample models in red (Section ref:sec:nano_station_model), Disturbances in yellow (Section ref:sec:uniaxial_disturbances), Active Damping in green (Section ref:sec:uniaxial_active_damping) and Position control in purple (Section ref:sec:uniaxial_position_control) +#+RESULTS: +[[file:figs/uniaxial_overview_model_sections.png]] + + +* Micro Station Model +:PROPERTIES: +:HEADER-ARGS:matlab+: :tangle matlab/uniaxial_1_micro_station_model.m +:END: +<> +** Introduction :ignore: + +In this section, a uni-axial model of the micro-station is tuned in order to match measurements made on the micro-station +The measurement setup is shown in Figure ref:fig:micro_station_first_meas_dynamics where several geophones are fixed to the micro-station and an instrumented hammer is used to inject forces on different stages of the micro-station. + +From the measured frequency response functions (FRF), the model can be tuned to approximate the uniaxial dynamics of the micro-station. + +#+name: fig:micro_station_first_meas_dynamics +#+caption: Experimental Setup for the first dynamical measurements on the Micro-Station. Geophones are fixed to the micro-station, and the granite as well as the micro-hexapod's top platform are impact with an instrumented hammer +#+attr_latex: :width \linewidth +[[file:figs/micro_station_first_meas_dynamics.jpg]] + +** Matlab Init :noexport:ignore: +#+begin_src matlab :tangle no :exports none :results silent :noweb yes :var current_dir=(file-name-directory buffer-file-name) +<> +#+end_src + +#+begin_src matlab :exports none :results silent :noweb yes +<> +#+end_src + +#+begin_src matlab :tangle no :noweb yes +<> +#+end_src + +#+begin_src matlab :eval no :noweb yes +<> +#+end_src + +#+begin_src matlab :noweb yes +<> +#+end_src + +#+begin_src matlab +%% Uniaxial Simscape model name +mdl = 'nass_uniaxial_model'; +#+end_src + +#+begin_src matlab +%% Frequency Vector [Hz] +freqs = logspace(0, 3, 1000); +#+end_src + +** Measured dynamics + +The measurement setup is schematically shown in Figure ref:fig:micro_station_meas_dynamics_schematic where: +- Two hammer hits are performed, one on the Granite (force $F_g$), and one on the micro-hexapod's top platform (force $F_h$) +- The inertial motion of the granite $x_g$ and the micro-hexapod's top platform $x_h$ are measured using geophones. + +From the forces applied by the instrumented hammer and the responses of the geophones, the following frequency response functions can be computed: +- from $F_h$ to $d_h$ (i.e. the compliance of the micro-station) +- from $F_g$ to $d_h$ (or from $F_h$ to $d_g$) +- from $F_g$ to $d_g$ + +#+begin_src latex :file micro_station_meas_dynamics_schematic.pdf +\begin{tikzpicture} + % Parameters + \def\blockw{6.0cm} + \def\blockh{1.2cm} + + \def\tiltdeg{0} + \coordinate[] (rotationpoint) at (0, 4.5*\blockh); + + \begin{scope}[rotate around={\tiltdeg:(rotationpoint)}] + % Tilt + \path[] ([shift=(-120:4*\blockh)]rotationpoint) coordinate(beginarc) arc (-120:-110:4*\blockh) % + -- ([shift=(-70:4*\blockh)]rotationpoint) arc (-70:-60:4*\blockh)% + |- ++(-0.15*\blockw, 0.6*\blockh) coordinate (spindlene)% + |- ($(beginarc) + (0.15*\blockw, 0.2*\blockh)$) coordinate (spindlesw) -- ++(0, 0.4*\blockh) coordinate(tiltte) -| cycle; + + % Spindle + \coordinate[] (spindlese) at (spindlesw-|spindlene); + \draw[fill=black!30] ($(spindlese)+(-0.1,0.1)+(-0.1*\blockw, 0)$) -| ($(spindlene)+(-0.1, 0)$) -| coordinate[pos=0.25](spindletop) ($(spindlesw)+(0.1,0.1)$) -| ++(0.1*\blockw, -\blockh) -| coordinate[pos=0.25](spindlebot) cycle; + + % \draw[dashed, color=black!60] ($(spindletop)+(0, 0.2)$) -- ($(spindlebot)+(0,-0.2)$); + + % Tilt + \draw[fill=black!60] ([shift=(-120:4*\blockh)]rotationpoint) coordinate(beginarc) arc (-120:-110:4*\blockh) % + -- ([shift=(-70:4*\blockh)]rotationpoint) arc (-70:-60:4*\blockh)% + |- coordinate (tiltne) ++(-0.15*\blockw, 0.6*\blockh) coordinate (spindlene)% + |- ($(beginarc) + (0.15*\blockw, 0.2*\blockh)$) coordinate (spindlesw) -- ++(0, 0.4*\blockh) -| cycle; + + % Micro-Hexapod + \begin{scope}[shift={(spindletop)}] + % Parameters definitions + \def\baseh{0.22*\blockh} % Height of the base + \def\naceh{0.18*\blockh} % Height of the nacelle + \def\baser{0.22*\blockw} % Radius of the base + \def\nacer{0.18*\blockw} % Radius of the nacelle + + \def\armr{0.2*\blockh} % Radius of the arms + \def\basearmborder{0.2} + \def\nacearmborder{0.2} + + \def\xnace{0} \def\ynace{\blockh-\naceh} \def\anace{0} + \def\xbase{0} \def\ybase{0} \def\abase{0} + + % Hexapod1 + \begin{scope}[shift={(\xbase, \ybase)}, rotate=\abase] + % Base + \draw[fill=white] (-\baser, 0) coordinate[](uhexabot) rectangle (\baser, \baseh); + + \coordinate[] (armbasel) at (-\baser+\basearmborder+\armr, \baseh); + \coordinate[] (armbasec) at (0, \baseh); + \coordinate[] (armbaser) at (\baser-\basearmborder-\armr, \baseh); + + \begin{scope}[shift={(\xnace, \ynace)}, rotate=\anace] + \draw[fill=white] (-\nacer, 0) rectangle (\nacer, \naceh); + \coordinate[] (uhexatop) at (0, \naceh); + \coordinate[] (armnacel) at (-\nacer+\nacearmborder+\armr, 0); + \coordinate[] (armnacec) at (0, 0); + \coordinate[] (armnacer) at (\nacer-\nacearmborder-\armr, 0); + \end{scope} + + \draw[] (armbasec) -- (armnacer); + \draw[] (armbasec) -- (armnacel); + \draw[] (armbasel) -- coordinate(mhexaw) (armnacel); + \draw[] (armbasel) -- (armnacec); + \draw[] (armbaser) -- (armnacec); + \draw[] (armbaser) -- coordinate(mhexae) (armnacer); + \end{scope} + \end{scope} + + \begin{scope}[shift={(uhexatop)}] % Geophone - Hexapod + \draw[draw=colorgreen, fill=colorgreen!10!white] (-0.3, 0) rectangle node[midway, color=colorgreen, rotate=90]{\tiny geophone} (0.3, 1.2); + \draw[rounded corners=0.1, draw=colorgreen, fill=colorgreen!10!white] (-0.1, 1.2) -- ++(0, 0.1) -- ++(0.1, 0.1) -- ++(0.1, -0.1) -- ++(0, -0.1) --cycle; + \node[fill,shape=circle,minimum size=3pt,inner sep=0pt, color=colorgreen] at (0, 1.4){}; + \draw[out=90, in=180, draw=colorgreen] (0, 1.4) to ++(0.4, 0.2) node[right, color=colorgreen]{$x_h$}; + \end{scope} + + \begin{scope}[shift={(uhexatop)}] % Instrumented Hammer - Hexapod + \begin{scope}[shift={(-1.5, 0)}] + \draw[fill=white, rounded corners=0.2, draw=colorblue, fill=colorblue!10!white] (-0.5, 0.42) rectangle (0.5, 0.58); + \draw[fill=white, rounded corners=0.2, draw=colorblue, fill=colorblue!10!white] (0.5, 0.15) rectangle (0.7, 0.8); + \draw[fill=white, rounded corners=0.2, color=colorblue] (0.55, 0.15) rectangle (0.65, 0); + \draw[out=180, in=0, draw=colorblue] (-0.5, 0.5) to ++(-0.6, -0.1) node[above, color=colorblue]{$F_h$}; + \node[fill,shape=circle,minimum size=3pt,inner sep=0pt, color=colorblue] at (-0.5, 0.5){}; + \end{scope} + \end{scope} + \end{scope} + + \begin{scope}[shift={(0, -0.3*\blockh)}] + % Translation Stage - fixed part + \draw[fill=black!40] (-0.5*\blockw, 0) coordinate[](tyb) rectangle (0.5*\blockw, 0.15*\blockh); + \coordinate[] (measposbot) at (0.5*\blockw, 0); + + % Translation Stage - mobile part + \draw[fill=black!10, fill opacity=0.5] (-0.5*\blockw, 0.2*\blockh) -- (-0.5*\blockw, 1.5*\blockh) coordinate[](tyt) -- (0.5*\blockw, 1.5*\blockh) -- (0.5*\blockw, 0.2*\blockh) -- (0.35*\blockw, 0.2*\blockh) -- (0.35*\blockw, 0.8*\blockh) -- (-0.35*\blockw, 0.8*\blockh) -- (-0.35*\blockw, 0.2*\blockh) -- cycle; + + % Translation Guidance + \draw[dashed, color=black!60] ($(-0.5*\blockw, 0)+( 0.075*\blockw,0.5*\blockh)$) circle (0.2*\blockh); + \draw[dashed, color=black!60] ($( 0.5*\blockw, 0)+(-0.075*\blockw,0.5*\blockh)$) circle (0.2*\blockh); + + % \draw[fill, color=black] ($( 0.5*\blockw, 0)+(-0.075*\blockw,0.5*\blockh)$) circle (0.04); + % \node[draw, circle, inner sep=0pt, minimum size=0.3cm, label=above:$T_y$] at ($( 0.5*\blockw, 0)+(-0.075*\blockw,0.5*\blockh)$){}; + + % Tilt Guidance + \draw[dashed, color=black!60] ([shift=(-107:4.1*\blockh)]rotationpoint) arc (-107:-120:4.1*\blockh); + \draw[dashed, color=black!60] ([shift=( -73:4.1*\blockh)]rotationpoint) arc (-73:-60:4.1*\blockh); + + \begin{scope}[shift={(4.0, 0)}] % Geophone - Granite + \draw[draw=colorgreen, fill=colorgreen!10!white] (-0.3, 0) rectangle node[midway, color=colorgreen, rotate=90]{\tiny geophone} (0.3, 1.2); + \draw[rounded corners=0.1, draw=colorgreen, fill=colorgreen!10!white] (-0.1, 1.2) -- ++(0, 0.1) -- ++(0.1, 0.1) -- ++(0.1, -0.1) -- ++(0, -0.1) --cycle; + \node[fill,shape=circle,minimum size=3pt,inner sep=0pt, color=colorgreen] at (0, 1.4){}; + \draw[out=90, in=180, draw=colorgreen] (0, 1.4) to ++(0.4, 0.2) node[right, color=colorgreen]{$x_g$}; + \end{scope} + + \begin{scope}[shift={(-4.0, 0)}] % Instrumented Hammer - Granite + \draw[fill=white, rounded corners=0.2, draw=colorblue, fill=colorblue!10!white] (-0.5, 0.42) rectangle (0.5, 0.58); + \draw[fill=white, rounded corners=0.2, draw=colorblue, fill=colorblue!10!white] (0.5, 0.15) rectangle (0.7, 0.8); + \draw[fill=white, rounded corners=0.2, color=colorblue] (0.55, 0.15) rectangle (0.65, 0); + \draw[out=180, in=0, draw=colorblue] (-0.5, 0.5) to ++(-0.6, -0.1) node[above, color=colorblue]{$F_g$}; + \node[fill,shape=circle,minimum size=3pt,inner sep=0pt, color=colorblue] at (-0.5, 0.5){}; + \end{scope} + \end{scope} + + % Granite + \draw[fill=black!40] (-0.8*\blockw, -0.3*\blockh) rectangle node[midway]{Granite} (0.8*\blockw, -1.5*\blockh); + + % Vertical line + % \draw[dashed, color=black] (spindlebot) -- ++(0, 2*\blockh); + % \node[] at ($(spindlebot)+(0, 1.1*\blockh)$) {\AxisRotator[rotate=-90]}; + % \node[right, shift={(0.3,0)}] at ($(spindlebot)+(0, 1.1*\blockh)$) {$\theta_z$}; + + % Axis + \begin{scope}[shift={(-0.6*\blockw, 2.5*\blockh)}] + \def\axissize{0.8cm} + \draw[->] (0, 0) -- ++(0, \axissize) node[right]{$z$}; + \draw[->] (0, 0) -- ++(-\axissize, 0) node[above]{$x$}; + \draw[fill, color=black] (0, 0) circle (0.05*\axissize); + \node[draw, circle, inner sep=0pt, minimum size=0.4*\axissize, label=right:$y$] (yaxis) at (0, 0){}; + \end{scope} +\end{tikzpicture} +#+end_src + +#+name: fig:micro_station_meas_dynamics_schematic +#+caption: Measurement setup - Schematic +#+RESULTS: +[[file:figs/micro_station_meas_dynamics_schematic.png]] + +Due to the bad coherence at low frequency, the frequency response functions are only shown between 20 and 200Hz (Figure ref:fig:uniaxial_measured_frf_vertical). + +#+begin_src matlab +%% Load measured FRF +load('meas_microstation_frf.mat'); +#+end_src + +#+begin_src matlab :exports none :results none +%% Measured Frequency Response Functions in the vertical direction +figure; +tiledlayout(3, 1, 'TileSpacing', 'Compact', 'Padding', 'None'); + +ax1 = nexttile([2,1]); +hold on; +plot(f(f>20), abs(frf_Fhx_to_Dhx(f>20)), ... + 'DisplayName', '$D_{h}/F_{h}$'); +plot(f(f>20), abs(frf_Fgx_to_Dhx(f>20)), ... + 'DisplayName', '$D_{h}/F_{g}$'); +plot(f(f>20), abs(frf_Fgx_to_Dgx(f>20)), ... + 'DisplayName', '$D_{g}/F_{g}$'); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +ylabel('Amplitude [m/N]'); set(gca, 'XTickLabel',[]); +ylim([1e-10, 2e-6]); +legend('location', 'northwest', 'FontSize', 8, 'NumColumns', 1); + +ax2 = nexttile; +hold on; +plot(f(f>20), 180/pi*unwrap(angle(frf_Fhx_to_Dhx(f>20)))); +plot(f(f>30), 180/pi*unwrap(angle(frf_Fgx_to_Dhx(f>30)))); +plot(f(f>20), 180/pi*unwrap(angle(frf_Fgx_to_Dgx(f>20)))); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'lin'); +xlabel('Frequency [Hz]'); ylabel('Phase [deg]'); +hold off; +yticks(-360:90:360); +ylim([-360, 10]); + +linkaxes([ax1,ax2],'x'); +xlim([1, 500]); +#+end_src + +#+begin_src matlab :tangle no :exports results :results file replace +exportFig('figs/uniaxial_measured_frf_vertical.pdf', 'width', 'wide', 'height', 'tall'); +#+end_src + +#+name: fig:uniaxial_measured_frf_vertical +#+caption: Measured Frequency Response Functions in the vertical direction +#+RESULTS: +[[file:figs/uniaxial_measured_frf_vertical.png]] + +** Uniaxial Model +The uni-axial model of the micro-station is shown in Figure ref:fig:uniaxial_comp_frf_meas_model, with: +- Disturbances: + - $x_f$: Floor motion + - $f_t$: Stage vibrations +- Hammer impacts: $F_h$ and $F_g$. +- Geophones: $x_h$ and $x_g$ + +#+begin_src latex :file uniaxial_model_micro_station.pdf +\begin{tikzpicture} + % ==================== + % Parameters + % ==================== + \def\massw{2.2} % Width of the masses + \def\massh{0.8} % Height of the masses + \def\spaceh{1.2} % Height of the springs/dampers + \def\dispw{0.4} % Width of the dashed line for the displacement + \def\disph{0.4} % Height of the arrow for the displacements + \def\bracs{0.05} % Brace spacing vertically + \def\brach{-12pt} % Brace shift horizontaly + \def\fsensh{0.2} % Height of the force sensor + \def\velsize{0.2} % Size of the velocity sensor + % ==================== + + + % ==================== + % Floor + % ==================== + \draw (-0.5*\massw, 0) -- (0.5*\massw, 0); + \draw[dashed] (0.5*\massw, 0) -- ++(\dispw, 0); + \draw[->, draw=colorred] (0.5*\massw+0.5*\dispw, 0) -- ++(0, \disph) node[right, color=colorred]{$x_{f}$}; + % ==================== + + % ==================== + % Granite + \begin{scope}[shift={(0, 0)}] + % Mass + \draw[fill=white] (-0.5*\massw, \spaceh) rectangle (0.5*\massw, \spaceh+\massh) node[pos=0.5]{$m_{g}$}; + + % Spring, Damper, and Actuator + \draw[spring] (-0.4*\massw, 0) -- (-0.4*\massw, \spaceh) node[midway, left=0.1]{$k_{g}$}; + \draw[damper] (0, 0) -- ( 0, \spaceh) node[midway, left=0.2]{$c_{g}$}; + + % Legend + \draw[decorate, decoration={brace, amplitude=8pt}, xshift=\brach] % + (-0.5*\massw, \bracs) -- (-0.5*\massw, \spaceh+\massh-\bracs) node[midway,rotate=90,anchor=south,yshift=10pt]{Granite}; + + % Displacement + \draw[dashed] (0.5*\massw, \spaceh+\massh) -- ++(\dispw, 0); + \draw[->] (0.5*\massw+0.5*\dispw, \spaceh+\massh) -- ++(0, \disph) node[right]{$x_{g}$}; + \end{scope} + % ==================== + + + % ==================== + % Stages + \begin{scope}[shift={(0, \spaceh+\massh)}] + % Mass + \draw[fill=white] (-0.5*\massw, \spaceh) rectangle (0.5*\massw, \spaceh+\massh) node[pos=0.5]{$m_{t}$}; + + % Spring, Damper, and Actuator + \draw[spring] (-0.4*\massw, 0) -- (-0.4*\massw, \spaceh) node[midway, left=0.1]{$k_{t}$}; + \draw[damper] (0, 0) -- ( 0, \spaceh) node[midway, left=0.2]{$c_{t}$}; + + % Disturbance + \draw[actuator={0.45}{0.2}{colorred}] ( 0.3*\massw, 0) -- (0.3*\massw, \spaceh) node[midway, right=0.1, color=colorred](ft){$f_t$}; + + % Legend + \draw[decorate, decoration={brace, amplitude=8pt}, xshift=\brach] % + (-0.5*\massw, \bracs) -- (-0.5*\massw, \spaceh+\massh-\bracs) node[midway,rotate=90,anchor=south,yshift=10pt]{$T_y$/$R_y$/$R_z$}; + + % External Force + \draw[->, color=colorblue] (0, 0)node[branch] -- ++(0, 1.5*\dispw) node[below right]{$F_g$}; + + % % Displacement + % \draw[dashed] (0.5*\massw, \spaceh+\massh) -- ++(\dispw, 0); + % \draw[->] (0.5*\massw+0.5*\dispw, \spaceh+\massh) -- ++(0, \disph) node[right]{$x_{t}$}; + \end{scope} + % ==================== + + + % ==================== + % Hexapod + \begin{scope}[shift={(0, 2*(\spaceh+\massh))}] + % Mass + \draw[fill=white] (-0.5*\massw, \spaceh) rectangle (0.5*\massw, \spaceh+\massh) node[pos=0.5]{$m_{h}$}; + + % Spring, Damper, and Actuator + \draw[spring] (-0.4*\massw, 0) -- (-0.4*\massw, \spaceh) node[midway, left=0.1]{$k_{h}$}; + \draw[damper] (0, 0) -- ( 0, \spaceh) node[midway, left=0.2]{$c_{h}$}; + + % Legend + \draw[decorate, decoration={brace, amplitude=8pt}, xshift=\brach] % + (-0.5*\massw, \bracs) -- (-0.5*\massw, \spaceh+\massh-\bracs) node[midway,rotate=90,anchor=south,yshift=10pt]{$\mu\text{Hexa}$}; + + % Displacement + \draw[dashed] (0.5*\massw, \spaceh+\massh) -- ++(\dispw, 0); + \draw[->] (0.5*\massw+0.5*\dispw, \spaceh+\massh) -- ++(0, \disph) node[right]{$x_{h}$}; + + % External Force + \draw[->, color=colorblue] (0, \spaceh+\massh)node[branch] -- ++(0, 1.5*\dispw) node[below right]{$F_h$}; + \end{scope} + % ==================== +\end{tikzpicture} +#+end_src + +#+name: fig:uniaxial_model_micro_station +#+caption: Uniaxial model of the micro-station +#+RESULTS: +[[file:figs/uniaxial_model_micro_station.png]] + +Masses are estimated from the CAD. +#+BEGIN_SRC matlab +%% Parameters - Mass +mh = 15; % Micro Hexapod [kg] +mt = 1200; % Ty + Ry + Rz [kg] +mg = 2500; % Granite [kg] +#+END_SRC + +And stiffnesses from the data-sheet of stage manufacturers. +#+BEGIN_SRC matlab +%% Parameters - Stiffnesses +kh = 6.11e+07; % [N/m] +kt = 5.19e+08; % [N/m] +kg = 9.50e+08; % [N/m] +#+END_SRC + +The damping coefficients are tuned to match the identified damping from the measurements. +#+BEGIN_SRC matlab +%% Parameters - damping +ch = 2*0.05*sqrt(kh*mh); % [N/(m/s)] +ct = 2*0.05*sqrt(kt*mt); % [N/(m/s)] +cg = 2*0.08*sqrt(kg*mg); % [N/(m/s)] +#+END_SRC + +#+begin_src matlab :exports none :tangle no +%% Save model parameters +save('./matlab/mat/uniaxial_micro_station_parameters.mat', 'mh', 'mt', 'mg', 'ch', 'ct', 'cg', 'kh', 'kt', 'kg') +#+end_src + +#+begin_src matlab :exports none :eval no +%% Save model parameters +save('./mat/uniaxial_micro_station_parameters.mat', 'mh', 'mt', 'mg', 'ch', 'ct', 'cg', 'kh', 'kt', 'kg') +#+end_src + +#+begin_src matlab :exports none +%% Disable the Nano-Hexpod for now +model_config = struct(); +model_config.nhexa = "none"; +model_config.controller = "open_loop"; + +%% Identify the transfer function from u to taum +clear io; io_i = 1; +io(io_i) = linio([mdl, '/micro_station/Fg'], 1, 'openinput'); io_i = io_i + 1; % Hammer on Granite +io(io_i) = linio([mdl, '/micro_station/Fh'], 1, 'openinput'); io_i = io_i + 1; % Hammer on Hexapod +io(io_i) = linio([mdl, '/micro_station/xg'], 1, 'openoutput'); io_i = io_i + 1; % Absolute motion of Granite +io(io_i) = linio([mdl, '/micro_station/xh'], 1, 'openoutput'); io_i = io_i + 1; % Absolute motion of Hexapod + +%% Perform the model extraction +G_id = linearize(mdl, io, 0.0); +G_id.InputName = {'Fg', 'Fh'}; +G_id.OutputName = {'Dg', 'Dh'}; +#+end_src + +** Comparison of the model and measurements +The comparison between the measurements and the model is done in Figure ref:fig:uniaxial_comp_frf_meas_model. + +As the model is simplistic, the goal is not to match exactly the measurement but to have a first approximation. +More accurate models will be used later on. + +#+begin_src matlab :exports none :results none +%% Comparison of the measured FRF and identified ones from the uni-axial model +figure; +tiledlayout(3, 1, 'TileSpacing', 'Compact', 'Padding', 'None'); + +ax1 = nexttile([2,1]); +hold on; +plot(f(f>20), abs(frf_Fhz_to_Dhz(f>20)), '-', 'color', colors(1,:), 'DisplayName', '$D_{h,z}/F_{h,z}$'); +plot(f(f>20), abs(frf_Fgz_to_Dhz(f>20)), '-', 'color', colors(2,:), 'DisplayName', '$D_{h,z}/F_{g,z}$'); +plot(f(f>20), abs(frf_Fgz_to_Dgz(f>20)), '-', 'color', colors(3,:), 'DisplayName', '$D_{g,z}/F_{g,z}$'); +plot(freqs, abs(squeeze(freqresp(G_id('Dh', 'Fh'), freqs, 'Hz'))), '--', 'color', colors(1,:), 'DisplayName', '$D_{h,z}/F_{h,z}$ (model)'); +plot(freqs, abs(squeeze(freqresp(G_id('Dh', 'Fg'), freqs, 'Hz'))), '--', 'color', colors(2,:), 'DisplayName', '$D_{h,z}/F_{g,z}$ (model)'); +plot(freqs, abs(squeeze(freqresp(G_id('Dg', 'Fg'), freqs, 'Hz'))), '--', 'color', colors(3,:), 'DisplayName', '$D_{g,z}/F_{g,z}$ (model)'); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +ylabel('Amplitude [m/N]'); set(gca, 'XTickLabel',[]); +ylim([1e-10, 2e-7]); +legend('location', 'northwest', 'FontSize', 8, 'NumColumns', 2); + +ax2 = nexttile; +hold on; +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_id('Dh', 'Fh'), freqs, 'Hz')))), '--', 'color', colors(1,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_id('Dh', 'Fg'), freqs, 'Hz')))), '--', 'color', colors(2,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_id('Dg', 'Fg'), freqs, 'Hz')))), '--', 'color', colors(3,:)); +plot(f(f>20), 180/pi*unwrap(angle(frf_Fhx_to_Dhx(f>20))), '-', 'color', colors(1,:)); +plot(f(f>30), 180/pi*unwrap(angle(frf_Fgx_to_Dhx(f>30))), '-', 'color', colors(2,:)); +plot(f(f>20), 180/pi*unwrap(angle(frf_Fgx_to_Dgx(f>20))), '-', 'color', colors(3,:)); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'lin'); +xlabel('Frequency [Hz]'); ylabel('Phase [deg]'); +hold off; +yticks(-360:90:360); +ylim([-360, 90]); + +linkaxes([ax1,ax2],'x'); +xlim([1, 500]); +#+end_src + +#+begin_src matlab :tangle no :exports results :results file replace +exportFig('figs/uniaxial_comp_frf_meas_model.pdf', 'width', 'wide', 'height', 'tall'); +#+end_src + +#+name: fig:uniaxial_comp_frf_meas_model +#+caption: Comparison of the measured FRF and identified ones from the uni-axial model +#+RESULTS: +[[file:figs/uniaxial_comp_frf_meas_model.png]] + +* Nano-Hexapod Model +:PROPERTIES: +:HEADER-ARGS:matlab+: :tangle matlab/uniaxial_2_nano_hexapod_model.m +:END: +<> +** Introduction :ignore: + +A model of the nano-hexapod and sample is now added on top of the uni-axial model of the micro-station (Figure ref:fig:uniaxial_model_micro_station-nass). + +Disturbances (shown in red) are: +- $f_s$: direct forces applied to the sample (for instance cable forces) +- $f_t$: disturbances coming from the imperfect stage scanning performances +- $x_f$: floor motion + +The control signal is the force applied by the nano-hexapod $f$ and the measurement is the relative motion between the sample and the granite $d$. + +The sample is here considered as a rigid body and rigidly fixed to the nano-hexapod. +The effect of having resonances between the sample's point of interest and the nano-hexapod actuator will be considered in further analysis. + +#+begin_src latex :file uniaxial_model_micro_station-nass.pdf +\begin{tikzpicture} + % ==================== + % Parameters + % ==================== + \def\massw{2.2} % Width of the masses + \def\massh{0.8} % Height of the masses + \def\spaceh{1.2} % Height of the springs/dampers + \def\dispw{0.4} % Width of the dashed line for the displacement + \def\disph{0.3} % Height of the arrow for the displacements + \def\bracs{0.05} % Brace spacing vertically + \def\brach{-12pt} % Brace shift horizontaly + \def\fsensh{0.2} % Height of the force sensor + \def\velsize{0.2} % Size of the velocity sensor + % ==================== + + % ==================== + % Ground + % ==================== + \draw (-0.5*\massw, 0) -- (0.5*\massw, 0); + \draw[dashed] (0.5*\massw, 0) -- ++(\dispw, 0); + \draw[->, color=colorred] (0.5*\massw+0.5*\dispw, 0) -- ++(0, 2*\disph) node[right, color=colorred]{$x_{f}$}; + % ==================== + + % ==================== + % Marble + \begin{scope}[shift={(0, 0)}] + % Mass + \draw[fill=white] (-0.5*\massw, \spaceh) rectangle (0.5*\massw, \spaceh+\massh) node[pos=0.5]{$m_{g}$}; + + % Spring, Damper, and Actuator + \draw[spring] (-0.4*\massw, 0) -- (-0.4*\massw, \spaceh) node[midway, left=0.1]{$k_{g}$}; + \draw[damper] (0, 0) -- ( 0, \spaceh) node[midway, left=0.2]{$c_{g}$}; + + % Legend + \draw[decorate, decoration={brace, amplitude=8pt}, xshift=\brach] % + (-0.5*\massw, \bracs) -- (-0.5*\massw, \spaceh+\massh-\bracs) node[midway,rotate=90,anchor=south,yshift=10pt]{Granite}; + + % Displacements + \draw[dashed] (0.5*\massw, \spaceh+\massh) -- ++(2*\dispw, 0) coordinate(xm) -- ++(\dispw, 0) coordinate(dbot); + \end{scope} + % ==================== + + + % ==================== + % Stages + \begin{scope}[shift={(0, \spaceh+\massh)}] + % Mass + \draw[fill=white] (-0.5*\massw, \spaceh) rectangle (0.5*\massw, \spaceh+\massh) node[pos=0.5]{$m_{t}$}; + + % % Spring, Damper, and Actuator + \draw[spring] (-0.4*\massw, 0) -- (-0.4*\massw, \spaceh) node[midway, left=0.1]{$k_{t}$}; + \draw[damper] (0, 0) -- ( 0, \spaceh) node[midway, left=0.2]{$c_{t}$}; + \draw[actuator={0.45}{0.2}{colorred}] ( 0.3*\massw, 0) -- (0.3*\massw, \spaceh) node[midway, right=0.1, color=colorred](ft){$f_{t}$}; + + Legend + \draw[decorate, decoration={brace, amplitude=8pt}, xshift=\brach] % + (-0.5*\massw, \bracs) -- (-0.5*\massw, \spaceh+\massh-\bracs) node[midway,rotate=90,anchor=south,yshift=10pt]{$T_y$/$R_y$/$R_z$}; + \end{scope} + % ==================== + + + % ==================== + % Hexapod + \begin{scope}[shift={(0, 2*(\spaceh+\massh))}] + % Mass + \draw[fill=white] (-0.5*\massw, \spaceh) rectangle (0.5*\massw, \spaceh+\massh) node[pos=0.5]{$m_{h}$}; + + % Spring, Damper, and Actuator + \draw[spring] (-0.4*\massw, 0) -- (-0.4*\massw, \spaceh) node[midway, left=0.1]{$k_{h}$}; + \draw[damper] (0, 0) -- ( 0, \spaceh) node[midway, left=0.2]{$c_{h}$}; + + % Legend + \draw[decorate, decoration={brace, amplitude=8pt}, xshift=\brach] % + (-0.5*\massw, \bracs) -- (-0.5*\massw, \spaceh+\massh-\bracs) node[midway,rotate=90,anchor=south,yshift=10pt]{$\mu\text{-hexa}$}; + \end{scope} + % ==================== + + + % ==================== + % NASS + \begin{scope}[shift={(0, 3*(\spaceh+\massh))}] + % Mass + \draw[fill=colorblue!10!white, draw=colorblue] (-0.5*\massw, \spaceh) rectangle (0.5*\massw, \spaceh+\massh) node[pos=0.5,color=colorblue]{$m_{n}$}; + + % Spring, Damper, and Actuator + \draw[spring, draw=colorblue] (-0.4*\massw, 0) -- (-0.4*\massw, \spaceh) node[midway, left=0.1, color=colorblue]{$k_{n}$}; + \draw[damper={colorblue}{}{}] (0, 0) -- ( 0, \spaceh) node[midway, left=0.2, color=colorblue]{$c_{n}$}; + \draw[actuator={0.4}{0.2}{colorblue}] ( 0.3*\massw, 0) -- (0.3*\massw, \spaceh) node[midway, right=0.1, color=colorblue](F){$f$}; + + % Displacements + \draw[dashed] (0.5*\massw, \spaceh+\massh) -- ++(2*\dispw, 0) coordinate(xn) -- ++(\dispw, 0) coordinate(drtop); + + % Legend + \draw[decorate, decoration={brace, amplitude=8pt}, xshift=\brach] % + (-0.5*\massw, \bracs) -- (-0.5*\massw, \spaceh+\massh-\bracs) node[midway,rotate=90,anchor=south,yshift=10pt]{$\nu\text{-hexa}$}; + \end{scope} + % ==================== + + % ==================== + % sample + \begin{scope}[shift={(0, 4*(\spaceh+\massh))}] + % Mass + \draw[fill=colorgreen!10!white, draw=colorgreen] (-0.3*\massw, 0) rectangle (0.3*\massw, \massh) node[pos=0.5,color=colorgreen]{$m_{s}$}; + + % External Force + \draw[->, color=colorred] (0, \massh) node[]{$\bullet$} -- ++(0, 0.5*\massh) node[right, color=colorred]{$f_s$}; + \end{scope} + % ==================== + + + % ==================== + % Measured Displacement + \draw[<->, dashed] (xm) -- node[midway, right]{$d$} (xn); + % ==================== +\end{tikzpicture} +#+end_src + +#+name: fig:uniaxial_model_micro_station-nass +#+caption: Uni-axial model of the micro-station with added nano-hexapod (represented in blue) and sample (represented in green) +#+RESULTS: +[[file:figs/uniaxial_model_micro_station-nass.png]] + +** Matlab Init :noexport:ignore: +#+begin_src matlab :tangle no :exports none :results silent :noweb yes :var current_dir=(file-name-directory buffer-file-name) +<> +#+end_src + +#+begin_src matlab :exports none :results silent :noweb yes +<> +#+end_src + +#+begin_src matlab :tangle no :noweb yes +<> +#+end_src + +#+begin_src matlab :eval no :noweb yes +<> +#+end_src + +#+begin_src matlab :noweb yes +<> +#+end_src + +#+begin_src matlab +%% Uniaxial Simscape model name +mdl = 'nass_uniaxial_model'; +#+end_src + +#+begin_src matlab +%% Frequency Vector [Hz] +freqs = logspace(0, 3, 1000); +#+end_src + +#+begin_src matlab +%% Load the micro-station parameters +load('uniaxial_micro_station_parameters.mat') +#+end_src + +** Nano-Hexapod Parameters +The parameters for the nano-hexapod and sample are: +- $m_s$ the sample mass that can vary from 1kg up to 50kg +- $m_n$ the nano-hexapod mass which is set to 15kg +- $k_n$ the nano-hexapod stiffness, which can vary depending on the chosen architecture/technology + +As a first example, let's choose a nano-hexapod stiffness of $10\,N/\mu m$ and a sample mass of 10kg. + +#+begin_src matlab +%% Nano-Hexapod Parameters +mn = 15; % [kg] +kn = 1e7; % [N/m] +cn = 2*0.01*sqrt(mn*kn); % [N/(m/s)] + +%% Sample Mass +ms = 10; % [kg] +#+end_src + +** Obtained Dynamics +The sensitivity to disturbances (i.e. $x_f$, $f_t$ and $f_s$) are shown in Figure ref:fig:uniaxial_sensitivity_dist_first_params. +The /plant/ (i.e. the transfer function from actuator force $f$ to measured displacement $d$) is shown in Figure ref:fig:uniaxial_plant_first_params. + +For further analysis, 9 configurations are considered: three nano-hexapod stiffnesses ($k_n = 0.01\,N/\mu m$, $k_n = 1\,N/\mu m$ and $k_n = 100\,N/\mu m$) combined with three sample's masses ($m_s = 1\,kg$, $m_s = 25\,kg$ and $m_s = 50\,kg$). + +#+begin_src matlab :exports none +%% Use 1DoF Nano-Hexpod model +model_config = struct(); +model_config.nhexa = "1dof"; +model_config.controller = "open_loop"; + +%% Identify the transfer function from disturbances and force actuator to d +clear io; io_i = 1; +io(io_i) = linio([mdl, '/controller'], 1, 'openinput'); io_i = io_i + 1; % Force Actuator +io(io_i) = linio([mdl, '/fs'], 1, 'openinput'); io_i = io_i + 1; % Force applied on the sample +io(io_i) = linio([mdl, '/micro_station/xf'], 1, 'openinput'); io_i = io_i + 1; % Floor Motion +io(io_i) = linio([mdl, '/micro_station/ft'], 1, 'openinput'); io_i = io_i + 1; % Stage disturbances +io(io_i) = linio([mdl, '/d'] , 1, 'openoutput'); io_i = io_i + 1; % Metrology + +%% Perform the model extraction +G_ol = linearize(mdl, io, 0.0); +G_ol.InputName = {'f', 'fs', 'xf', 'ft'}; +G_ol.OutputName = {'d'}; +#+end_src + +#+begin_src matlab :exports none :results none +%% Sensitivity to disturbances +figure; +tiledlayout(1, 3, 'TileSpacing', 'Compact', 'Padding', 'None'); + +ax1 = nexttile(); +hold on; +plot(freqs, abs(squeeze(freqresp(G_ol('d', 'fs'), freqs, 'Hz')))); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +ylabel('Amplitude $d/f_{s}$ [m/N]'); xlabel('Frequency [Hz]'); +xticks([1e0, 1e1, 1e2]); + +ax2 = nexttile(); +hold on; +plot(freqs, abs(squeeze(freqresp(G_ol('d', 'ft'), freqs, 'Hz')))); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +ylabel('Amplitude $d/f_{t}$ [m/N]'); xlabel('Frequency [Hz]'); +xticks([1e0, 1e1, 1e2]); + +ax3 = nexttile(); +hold on; +plot(freqs, abs(squeeze(freqresp(G_ol('d', 'xf'), freqs, 'Hz')))); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +ylabel('Amplitude $d/x_{f}$ [m/m]'); xlabel('Frequency [Hz]'); +xticks([1e0, 1e1, 1e2]); + +linkaxes([ax1,ax2,ax3],'x'); +xlim([1, 500]); +#+end_src + +#+begin_src matlab :tangle no :exports results :results file replace +exportFig('figs/uniaxial_sensitivity_dist_first_params.pdf', 'width', 'full', 'height', 'normal'); +#+end_src + +#+name: fig:uniaxial_sensitivity_dist_first_params +#+caption: Sensitivity to disturbances +#+RESULTS: +[[file:figs/uniaxial_sensitivity_dist_first_params.png]] + +#+begin_src matlab :exports none :results none +%% Bode Plot of the transfer function from actuator forces to measured displacement by the metrology +figure; +tiledlayout(3, 1, 'TileSpacing', 'Compact', 'Padding', 'None'); + +ax1 = nexttile([2,1]); +hold on; +plot(freqs, abs(squeeze(freqresp(G_ol('d', 'f'), freqs, 'Hz')))); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +ylabel('Amplitude $d/f$ [m/N]'); set(gca, 'XTickLabel',[]); + +ax2 = nexttile; +hold on; +plot(freqs, 180/pi*angle(squeeze(freqresp(G_ol('d', 'f'), freqs, 'Hz')))); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'lin'); +xlabel('Frequency [Hz]'); ylabel('Phase [deg]'); +hold off; +yticks(-360:90:360); +ylim([-180, 0]); + +linkaxes([ax1,ax2],'x'); +xlim([1, 500]); +#+end_src + +#+begin_src matlab :tangle no :exports results :results file replace +exportFig('figs/uniaxial_plant_first_params.pdf', 'width', 'normal', 'height', 600); +#+end_src + +#+name: fig:uniaxial_plant_first_params +#+caption: Bode Plot of the transfer function from actuator forces to measured displacement by the metrology +#+RESULTS: +[[file:figs/uniaxial_plant_first_params.png]] + +** Identification of all combination of stiffnesses / masses :noexport: +#+begin_src matlab :exports none +%% Use 1DoF Nano-Hexpod model +model_config = struct(); +model_config.nhexa = "1dof"; +model_config.controller = "open_loop"; + +%% Nano-Hexapod Mass +mn = 15; % Nano-Hexapod mass [kg] + +%% Identification of all combination of stiffnesses / masses +clear io; io_i = 1; +io(io_i) = linio([mdl, '/controller'], 1, 'openinput'); io_i = io_i + 1; % Actuator Force +io(io_i) = linio([mdl, '/micro_station/xf'], 1, 'openinput'); io_i = io_i + 1; % Floor Motion +io(io_i) = linio([mdl, '/micro_station/ft'], 1, 'openinput'); io_i = io_i + 1; % Stage vibrations +io(io_i) = linio([mdl, '/fs'], 1, 'openinput'); io_i = io_i + 1; % Direct sample forces +io(io_i) = linio([mdl, '/dL'], 1, 'openoutput'); io_i = io_i + 1; % Relative Motion Sensor +io(io_i) = linio([mdl, '/fm'], 1, 'openoutput'); io_i = io_i + 1; % Force Sensor +io(io_i) = linio([mdl, '/vn'] , 1, 'openoutput'); io_i = io_i + 1; % Geophone +io(io_i) = linio([mdl, '/d'] , 1, 'openoutput'); io_i = io_i + 1; % Metrology Output +#+end_src + +#+begin_src matlab :exports none +%% Light Sample +ms = 1; % Sample Mass [kg] + +% Voice Coil (i.e. soft) Nano-Hexapod +kn = 1e4; % Nano-Hexapod Stiffness [N/m] +cn = 2*0.01*sqrt((ms + mn)*kn); % Nano-Hexapod Damping [N/(m/s)] +G_vc_light = linearize(mdl, io, 0.0); +G_vc_light.InputName = {'f', 'xf', 'ft', 'fs'}; +G_vc_light.OutputName = {'dL', 'fm', 'vn', 'd'}; + +% APA (i.e. relatively stiff) Nano-Hexapod +kn = 1e6; % Nano-Hexapod Stiffness [N/m] +cn = 2*0.01*sqrt((ms + mn)*kn); % Nano-Hexapod Damping [N/(m/s)] +G_md_light = linearize(mdl, io, 0.0); +G_md_light.InputName = {'f', 'xf', 'ft', 'fs'}; +G_md_light.OutputName = {'dL', 'fm', 'vn', 'd'}; + +% Piezoelectric (i.e. stiff) Nano-Hexapod +kn = 1e8; % Nano-Hexapod Stiffness [N/m] +cn = 2*0.01*sqrt((ms + mn)*kn); % Nano-Hexapod Damping [N/(m/s)] +G_pz_light = linearize(mdl, io, 0.0); +G_pz_light.InputName = {'f', 'xf', 'ft', 'fs'}; +G_pz_light.OutputName = {'dL', 'fm', 'vn', 'd'}; + +%% Mid Sample +ms = 25; % Sample Mass [kg] + +% Voice Coil (i.e. soft) Nano-Hexapod +kn = 1e4; % Nano-Hexapod Stiffness [N/m] +cn = 2*0.01*sqrt((ms + mn)*kn); % Nano-Hexapod Damping [N/(m/s)] +G_vc_mid = linearize(mdl, io, 0.0); +G_vc_mid.InputName = {'f', 'xf', 'ft', 'fs'}; +G_vc_mid.OutputName = {'dL', 'fm', 'vn', 'd'}; + +% APA (i.e. relatively stiff) Nano-Hexapod +kn = 1e6; % Nano-Hexapod Stiffness [N/m] +cn = 2*0.01*sqrt((ms + mn)*kn); % Nano-Hexapod Damping [N/(m/s)] +G_md_mid = linearize(mdl, io, 0.0); +G_md_mid.InputName = {'f', 'xf', 'ft', 'fs'}; +G_md_mid.OutputName = {'dL', 'fm', 'vn', 'd'}; + +% Piezoelectric (i.e. stiff) Nano-Hexapod +kn = 1e8; % Nano-Hexapod Stiffness [N/m] +cn = 2*0.01*sqrt((ms + mn)*kn); % Nano-Hexapod Damping [N/(m/s)] +G_pz_mid = linearize(mdl, io, 0.0); +G_pz_mid.InputName = {'f', 'xf', 'ft', 'fs'}; +G_pz_mid.OutputName = {'dL', 'fm', 'vn', 'd'}; + +%% Heavy Sample +ms = 50; % Sample Mass [kg] + +% Voice Coil (i.e. soft) Nano-Hexapod +kn = 1e4; % Nano-Hexapod Stiffness [N/m] +cn = 2*0.01*sqrt((ms + mn)*kn); % Nano-Hexapod Damping [N/(m/s)] +G_vc_heavy = linearize(mdl, io, 0.0); +G_vc_heavy.InputName = {'f', 'xf', 'ft', 'fs'}; +G_vc_heavy.OutputName = {'dL', 'fm', 'vn', 'd'}; + +% APA (i.e. relatively stiff) Nano-Hexapod +kn = 1e6; % Nano-Hexapod Stiffness [N/m] +cn = 2*0.01*sqrt((ms + mn)*kn); % Nano-Hexapod Damping [N/(m/s)] +G_md_heavy = linearize(mdl, io, 0.0); +G_md_heavy.InputName = {'f', 'xf', 'ft', 'fs'}; +G_md_heavy.OutputName = {'dL', 'fm', 'vn', 'd'}; + +% Piezoelectric (i.e. stiff) Nano-Hexapod +kn = 1e8; % Nano-Hexapod Stiffness [N/m] +cn = 2*0.01*sqrt((ms + mn)*kn); % Nano-Hexapod Damping [N/(m/s)] +G_pz_heavy = linearize(mdl, io, 0.0); +G_pz_heavy.InputName = {'f', 'xf', 'ft', 'fs'}; +G_pz_heavy.OutputName = {'dL', 'fm', 'vn', 'd'}; +#+end_src + +#+begin_src matlab :exports none :tangle no +%% Save All Identified Plants +save('./matlab/mat/uniaxial_plants.mat', 'G_vc_light', 'G_md_light', 'G_pz_light', ... + 'G_vc_mid', 'G_md_mid', 'G_pz_mid', ... + 'G_vc_heavy', 'G_md_heavy', 'G_pz_heavy'); +#+end_src + +#+begin_src matlab :exports none :eval no +%% Save All Identified Plants +save('./mat/uniaxial_plants.mat', 'G_vc_light', 'G_md_light', 'G_pz_light', ... + 'G_vc_mid', 'G_md_mid', 'G_pz_mid', ... + 'G_vc_heavy', 'G_md_heavy', 'G_pz_heavy'); +#+end_src + +* Disturbance Identification +:PROPERTIES: +:HEADER-ARGS:matlab+: :tangle matlab/uniaxial_3_disturbances.m +:END: +<> +** Introduction :ignore: + +In order to measure disturbances, two geophones are used, on located on the floor and on on the micro-hexapod's top platform (see Figure ref:fig:micro_station_meas_disturbances). + +The geophone on the floor is used to measured the floor motion $x_f$ while the geophone on the micro-hexapod is used to measure vibrations introduced by scanning of the $T_y$ stage and $R_z$ stage. + +#+begin_src latex :file micro_station_meas_disturbances.pdf +\begin{tikzpicture} + % Parameters + \def\blockw{6.0cm} + \def\blockh{1.2cm} + + \def\tiltdeg{0} + \coordinate[] (rotationpoint) at (0, 4.5*\blockh); + + \begin{scope}[rotate around={\tiltdeg:(rotationpoint)}] + % Tilt + \path[] ([shift=(-120:4*\blockh)]rotationpoint) coordinate(beginarc) arc (-120:-110:4*\blockh) % + -- ([shift=(-70:4*\blockh)]rotationpoint) arc (-70:-60:4*\blockh)% + |- ++(-0.15*\blockw, 0.6*\blockh) coordinate (spindlene)% + |- ($(beginarc) + (0.15*\blockw, 0.2*\blockh)$) coordinate (spindlesw) -- ++(0, 0.4*\blockh) coordinate(tiltte) -| cycle; + + % Spindle + \coordinate[] (spindlese) at (spindlesw-|spindlene); + \draw[fill=black!30] ($(spindlese)+(-0.1,0.1)+(-0.1*\blockw, 0)$) -| ($(spindlene)+(-0.1, 0)$) -| coordinate[pos=0.25](spindletop) ($(spindlesw)+(0.1,0.1)$) -| ++(0.1*\blockw, -\blockh) -| coordinate[pos=0.25](spindlebot) cycle; + + % \draw[dashed, color=black!60] ($(spindletop)+(0, 0.2)$) -- ($(spindlebot)+(0,-0.2)$); + + % Tilt + \draw[fill=black!60] ([shift=(-120:4*\blockh)]rotationpoint) coordinate(beginarc) arc (-120:-110:4*\blockh) % + -- ([shift=(-70:4*\blockh)]rotationpoint) arc (-70:-60:4*\blockh)% + |- coordinate (tiltne) ++(-0.15*\blockw, 0.6*\blockh) coordinate (spindlene)% + |- ($(beginarc) + (0.15*\blockw, 0.2*\blockh)$) coordinate (spindlesw) -- ++(0, 0.4*\blockh) -| cycle; + + % Micro-Hexapod + \begin{scope}[shift={(spindletop)}] + % Parameters definitions + \def\baseh{0.22*\blockh} % Height of the base + \def\naceh{0.18*\blockh} % Height of the nacelle + \def\baser{0.22*\blockw} % Radius of the base + \def\nacer{0.18*\blockw} % Radius of the nacelle + + \def\armr{0.2*\blockh} % Radius of the arms + \def\basearmborder{0.2} + \def\nacearmborder{0.2} + + \def\xnace{0} \def\ynace{\blockh-\naceh} \def\anace{0} + \def\xbase{0} \def\ybase{0} \def\abase{0} + + % Hexapod + \begin{scope}[shift={(\xbase, \ybase)}, rotate=\abase] + % Base + \draw[fill=white] (-\baser, 0) coordinate[](uhexabot) rectangle (\baser, \baseh); + + \coordinate[] (armbasel) at (-\baser+\basearmborder+\armr, \baseh); + \coordinate[] (armbasec) at (0, \baseh); + \coordinate[] (armbaser) at (\baser-\basearmborder-\armr, \baseh); + + \begin{scope}[shift={(\xnace, \ynace)}, rotate=\anace] + \draw[fill=white] (-\nacer, 0) rectangle (\nacer, \naceh); + \coordinate[] (uhexatop) at (0, \naceh); + \coordinate[] (armnacel) at (-\nacer+\nacearmborder+\armr, 0); + \coordinate[] (armnacec) at (0, 0); + \coordinate[] (armnacer) at (\nacer-\nacearmborder-\armr, 0); + \end{scope} + + \draw[] (armbasec) -- (armnacer); + \draw[] (armbasec) -- (armnacel); + \draw[] (armbasel) -- coordinate(mhexaw) (armnacel); + \draw[] (armbasel) -- (armnacec); + \draw[] (armbaser) -- (armnacec); + \draw[] (armbaser) -- coordinate(mhexae) (armnacer); + \end{scope} + \end{scope} + + \begin{scope}[shift={(uhexatop)}] % Geophone - Hexapod + \draw[rounded corners=0.1, draw=colorred, fill=colorred!10!white] (-0.5, 0.2) -- ++(0, -0.1) -- ++(0.1, -0.1) -- ++(0.1, 0.1) -- ++(0, 0.1) --cycle; + \draw[rounded corners=0.1, draw=colorred, fill=colorred!10!white] ( 0.3, 0.2) -- ++(0, -0.1) -- ++(0.1, -0.1) -- ++(0.1, 0.1) -- ++(0, 0.1) --cycle; + \draw[draw=colorred, fill=colorred!10!white] (0.6, 0.4) rectangle ++(0.2, 0.2); + \node[shape=circle,minimum size=3pt,inner sep=0pt, draw=colorred, fill=colorred] at (0.8, 0.5){}; + \draw[out=0, in=180, draw=colorred] (0.8, 0.5) to ++(0.6, -0.1) node[above, color=colorred]{$x_h$}; + \draw[draw=colorred, fill=colorred!10!white] (-0.6, 0.2) rectangle node[midway, color=colorred]{\tiny geophone} (0.6, 0.8); + \end{scope} + \end{scope} + + \begin{scope}[shift={(0, -0.3*\blockh)}] + % Translation Stage - fixed part + \draw[fill=black!40] (-0.5*\blockw, 0) coordinate[](tyb) rectangle (0.5*\blockw, 0.15*\blockh); + \coordinate[] (measposbot) at (0.5*\blockw, 0); + + % Translation Stage - mobile part + \draw[fill=black!10, fill opacity=0.5] (-0.5*\blockw, 0.2*\blockh) -- (-0.5*\blockw, 1.5*\blockh) coordinate[](tyt) -- (0.5*\blockw, 1.5*\blockh) -- (0.5*\blockw, 0.2*\blockh) -- (0.35*\blockw, 0.2*\blockh) -- (0.35*\blockw, 0.8*\blockh) -- (-0.35*\blockw, 0.8*\blockh) -- (-0.35*\blockw, 0.2*\blockh) -- cycle; + + % Translation Guidance + \draw[dashed, color=black!60] ($(-0.5*\blockw, 0)+( 0.075*\blockw,0.5*\blockh)$) circle (0.2*\blockh); + \draw[dashed, color=black!60] ($( 0.5*\blockw, 0)+(-0.075*\blockw,0.5*\blockh)$) circle (0.2*\blockh); + + \draw[fill, color=black] ($( 0.5*\blockw, 0)+(-0.075*\blockw,0.5*\blockh)$) circle (0.04); + \node[draw, circle, inner sep=0pt, minimum size=0.3cm, label=above:$T_y$] at ($( 0.5*\blockw, 0)+(-0.075*\blockw,0.5*\blockh)$){}; + + % Tilt Guidance + \draw[dashed, color=black!60] ([shift=(-107:4.1*\blockh)]rotationpoint) arc (-107:-120:4.1*\blockh); + \draw[dashed, color=black!60] ([shift=( -73:4.1*\blockh)]rotationpoint) arc (-73:-60:4.1*\blockh); + + \begin{scope}[shift={(4.0, 0)}] % Geophone - Granite + \draw[rounded corners=0.1, draw=colorred, fill=colorred!10!white] (-0.5, 0.2) -- ++(0, -0.1) -- ++(0.1, -0.1) -- ++(0.1, 0.1) -- ++(0, 0.1) --cycle; + \draw[rounded corners=0.1, draw=colorred, fill=colorred!10!white] ( 0.3, 0.2) -- ++(0, -0.1) -- ++(0.1, -0.1) -- ++(0.1, 0.1) -- ++(0, 0.1) --cycle; + \draw[draw=colorred, fill=colorred!10!white] (0.6, 0.4) rectangle ++(0.2, 0.2); + \node[shape=circle,minimum size=3pt,inner sep=0pt, draw=colorred, fill=colorred] at (0.8, 0.5){}; + \draw[out=0, in=180, draw=colorred] (0.8, 0.5) to ++(0.6, -0.1) node[above, color=colorred]{$x_g$}; + \draw[draw=colorred, fill=colorred!10!white] (-0.6, 0.2) rectangle node[midway, color=colorred]{\tiny geophone} (0.6, 0.8); + \end{scope} + \end{scope} + + % Granite + \draw[fill=black!40] (-0.8*\blockw, -0.3*\blockh) rectangle node[midway]{Granite} (0.8*\blockw, -1.5*\blockh); + + \begin{scope}[shift={(4.0, -1.5*\blockh)}] % Geophone - Floor + \draw[rounded corners=0.1, draw=colorred, fill=colorred!10!white] (-0.5, 0.2) -- ++(0, -0.1) -- ++(0.1, -0.1) -- ++(0.1, 0.1) -- ++(0, 0.1) --cycle; + \draw[rounded corners=0.1, draw=colorred, fill=colorred!10!white] ( 0.3, 0.2) -- ++(0, -0.1) -- ++(0.1, -0.1) -- ++(0.1, 0.1) -- ++(0, 0.1) --cycle; + \draw[draw=colorred, fill=colorred!10!white] (0.6, 0.4) rectangle ++(0.2, 0.2); + \node[shape=circle,minimum size=3pt,inner sep=0pt, draw=colorred, fill=colorred] at (0.8, 0.5){}; + \draw[out=0, in=180, draw=colorred] (0.8, 0.5) to ++(0.6, -0.1) node[above, color=colorred]{$x_f$}; + \draw[draw=colorred, fill=colorred!10!white] (-0.6, 0.2) rectangle node[midway, color=colorred]{\tiny geophone} (0.6, 0.8); + \end{scope} + + % Vertical line + \draw[dashed, color=black] (spindlebot) -- ++(0, 2*\blockh); + \node[] at ($(spindlebot)+(0, 1.1*\blockh)$) {\AxisRotator[rotate=-90]}; + \node[right, shift={(0.3,0)}] at ($(spindlebot)+(0, 1.1*\blockh)$) {$\theta_z$}; + + % Axis + \begin{scope}[shift={(-0.6*\blockw, 2.5*\blockh)}] + \def\axissize{0.8cm} + \draw[->] (0, 0) -- ++(0, \axissize) node[right]{$z$}; + \draw[->] (0, 0) -- ++(-\axissize, 0) node[above]{$x$}; + \draw[fill, color=black] (0, 0) circle (0.05*\axissize); + \node[draw, circle, inner sep=0pt, minimum size=0.4*\axissize, label=right:$y$] (yaxis) at (0, 0){}; + \end{scope} +\end{tikzpicture} +#+end_src + +#+name: fig:micro_station_meas_disturbances +#+caption: Disturbance measurement setup - Schematic +#+RESULTS: +[[file:figs/micro_station_meas_disturbances.png]] + +#+name: fig:micro_station_dynamical_id_setup +#+caption: Two geophones are used to measure the micro-station vibrations induced by the scanning of the $T_y$ and $R_z$ stages +#+attr_latex: :width 0.6\linewidth +[[file:figs/micro_station_dynamical_id_setup.jpg]] + +** Matlab Init :noexport:ignore: +#+begin_src matlab :tangle no :exports none :results silent :noweb yes :var current_dir=(file-name-directory buffer-file-name) +<> +#+end_src + +#+begin_src matlab :exports none :results silent :noweb yes +<> +#+end_src + +#+begin_src matlab :tangle no :noweb yes +<> +#+end_src + +#+begin_src matlab :eval no :noweb yes +<> +#+end_src + +#+begin_src matlab :noweb yes +<> +#+end_src + +#+begin_src matlab +%% Uniaxial Simscape model name +mdl = 'nass_uniaxial_model'; +#+end_src + +#+begin_src matlab +%% Frequency Vector [Hz] +freqs = logspace(0, 3, 1000); +#+end_src + +#+begin_src matlab +%% Load the micro-station parameters +load('uniaxial_micro_station_parameters.mat'); +#+end_src + +** Ground Motion +The geophone fixed to the floor to measure the floor motion. + +#+begin_src matlab +%% Load floor motion data +% t: time in [s] +% V: measured voltage genrated by the geophone and amplified by a 60dB gain voltage amplifier [V] +load('ground_motion_measurement.mat', 't', 'V'); +#+end_src + +The voltage generated by each geophone is amplified using a voltage amplifier (gain of 60dB) before going to the ADC. +The sensitivity of the geophone as well as the gain of the voltage amplifier are then taken into account to reconstruct the floor displacement. +#+begin_src matlab +%% Sensitivity of the geophone +S0 = 88; % Sensitivity [V/(m/s)] +f0 = 2; % Cut-off frequency [Hz] + +S = S0*(s/2/pi/f0)/(1+s/2/pi/f0); % Geophone's transfer function [V/(m/s)] + +%% Gain of the voltage amplifier +G0_db = 60; % [dB] +G0 = 10^(G0_db/20); % [abs] + +%% Transfer function from measured voltage to displacement +G_geo = 1/S/G0/s; % [m/V] +#+end_src + +The PSD $S_{V_f}$ of the measured voltage $V_f$ is computed. +#+begin_src matlab +%% Compute measured voltage PSD +Fs = 1/(t(2)-t(1)); % Sampling Frequency [Hz] +win = hanning(ceil(2*Fs)); % Hanning window + +[psd_V, f] = pwelch(V, win, [], [], Fs); % [V^2/Hz] +#+end_src + +The PSD of the corresponding displacement can be computed as follows: +\begin{equation} +S_{x_f}(\omega) = \frac{S_{V_f}(\omega)}{|S_{\text{geo}}(j\omega)| \cdot G_{\text{amp}} \cdot \omega} +\end{equation} +with: +- $S_{\text{geo}}$ the sensitivity of the Geophone in $[Vs/m]$ +- $G_{\text{amp}}$ the gain of the voltage amplifier +- $\omega$ is here to integrate and have the displacement instead of the velocity + +#+begin_src matlab +%% Ground Motion ASD +psd_xf = psd_V.*abs(squeeze(freqresp(G_geo, f, 'Hz'))).^2; % [m^2/Hz] +#+end_src + +The amplitude spectral density $\Gamma_{x_f}$ of the measured displacement $x_f$ is shown in Figure ref:fig:asd_floor_motion_id31. + +#+begin_src matlab :exports none :results none +%% Measured Amplitude Spectral Density of the Floor motion on ID31 +figure; +hold on; +plot(f, sqrt(psd_xf), 'DisplayName', '$\Gamma_{x_{f}}$'); +hold off; +set(gca, 'xscale', 'log'); set(gca, 'yscale', 'log'); +xlabel('Frequency [Hz]'); ylabel('Ampl. Spectral Density $\left[\frac{m}{\sqrt{Hz}}\right]$') +xlim([1, 500]); +legend('location', 'northeast', 'FontSize', 8, 'NumColumns', 1); +#+end_src + +#+begin_src matlab :tangle no :exports results :results file replace +exportFig('figs/asd_floor_motion_id31.pdf', 'width', 'wide', 'height', 'normal'); +#+end_src + +#+name: fig:asd_floor_motion_id31 +#+caption: Measured Amplitude Spectral Density of the Floor motion on ID31 +#+RESULTS: +[[file:figs/asd_floor_motion_id31.png]] + +** Stage Vibration +During Spindle rotation (here at 6rpm), the granite velocity and micro-hexapod's top platform velocity are measured with the geophones. + +#+begin_src matlab +%% Measured velocity of granite and hexapod during spindle rotation +% t: time in [s] +% vg: measured granite velocity [m/s] +% vg: measured micro-hexapod's top platform velocity [m/s] +load('meas_spindle_on.mat', 't', 'vg', 'vh'); +spindle_off = load('meas_spindle_off.mat', 't', 'vg', 'vh'); % No Rotation +#+end_src + +The Power Spectral Density of the relative velocity between the hexapod and the granite is computed. +#+begin_src matlab +%% Compute Power Spectral Density of the relative velocity between granite and hexapod during spindle rotation +Fs = 1/(t(2)-t(1)); % Sampling Frequency [Hz] +win = hanning(ceil(2*Fs)); % Hanning window + +[psd_vft, f] = pwelch(vh-vg, win, [], [], Fs); % [(m/s)^2/Hz] +[psd_off, ~] = pwelch(spindle_off.vh-spindle_off.vg, win, [], [], Fs); % [(m/s)^2/Hz] +#+end_src + +It is then integrated to obtain the Amplitude Spectral Density of the relative motion which is compared with a non-rotating case (Figure ref:fig:asd_vibration_spindle_rotation). +It is shown that the spindle rotation induces vibrations in a wide frequency spectrum. + +#+begin_src matlab :exports none :results none +%% Measured Amplitude Spectral Density of the relative motion between the granite and the micro-hexapod's top platform during Spindle rotating +figure; +hold on; +plot(f, sqrt(psd_vft)./(2*pi*f), 'DisplayName', '6rpm'); +plot(f, sqrt(psd_off)./(2*pi*f), 'DisplayName', '0rpm'); +hold off; +set(gca, 'xscale', 'log'); set(gca, 'yscale', 'log'); +xlabel('Frequency [Hz]'); ylabel('Ampl. Spectral Density $\left[\frac{m}{\sqrt{Hz}}\right]$') +legend('location', 'northeast', 'FontSize', 8, 'NumColumns', 1); +xlim([1, 500]); ylim([1e-12, 1e-7]) +#+end_src + +#+begin_src matlab :tangle no :exports results :results file replace +exportFig('figs/asd_vibration_spindle_rotation.pdf', 'width', 'wide', 'height', 'normal'); +#+end_src + +#+name: fig:asd_vibration_spindle_rotation +#+caption: Measured Amplitude Spectral Density of the relative motion between the granite and the micro-hexapod's top platform during Spindle rotating +#+RESULTS: +[[file:figs/asd_vibration_spindle_rotation.png]] + +In order to compute the equivalent disturbance force $f_t$ that induces such motion, the transfer function from $f_t$ to the relative motion of the hexapod's top platform and the granite is extracted from the model. +#+begin_src matlab :exports none +%% Disable the Nano-Hexpod for now +model_config = struct(); +model_config.nhexa = "none"; +model_config.controller = "open_loop"; + +%% Identify the transfer function from u to taum +clear io; io_i = 1; +io(io_i) = linio([mdl, '/micro_station/ft'], 1, 'openinput'); io_i = io_i + 1; % Stage Disturbance Force +io(io_i) = linio([mdl, '/micro_station/xg'], 1, 'openoutput'); io_i = io_i + 1; % Absolute motion of Granite +io(io_i) = linio([mdl, '/micro_station/xh'], 1, 'openoutput'); io_i = io_i + 1; % Absolute motion of Hexapod + +%% Perform the model extraction +G = linearize(mdl, io, 0.0); +G.InputName = {'ft'}; +G.OutputName = {'Dg', 'Dh'}; +#+end_src + +The power spectral density $\Gamma_{f_{t}}$ of the disturbance force can be computed as follows: +\begin{equation} +\Gamma_{f_{t}}(\omega) = \frac{\Gamma_{v_{t}}(\omega)}{|G_{\text{model}}(j\omega)|^2} +\end{equation} +with: +- $\Gamma_{v_{t}}$ the measured power spectral density of the relative motion between the micro-hexapod's top platform and the granite during the spindle's rotation +- $G_{\text{model}}$ the transfer function (extracted from the uniaxial model) from $f_t$ to the relative motion between the micro-hexapod's top platform and the granite + +#+begin_src matlab :exports none +%% Power Spectral Density of the equivalent force ft +psd_ft = (psd_vft./(2*pi*f).^2)./abs(squeeze(freqresp(G('Dh', 'ft') - G('Dg', 'ft'), f, 'Hz'))).^2; +#+end_src + +The obtained amplitude spectral density of the disturbance force $f_t$ is shown in Figure ref:fig:asd_disturbance_force. +#+begin_src matlab :exports none :results none +%% Estimated disturbance force ft from measurement and uniaxial model +figure; +hold on; +plot(f, sqrt(psd_ft), 'DisplayName', '$\Gamma_{f_{t}}$'); +hold off; +set(gca, 'xscale', 'log'); set(gca, 'yscale', 'log'); +xlabel('Frequency [Hz]'); ylabel('Ampl. Spectral Density $\left[\frac{N}{\sqrt{Hz}}\right]$') +xlim([1, 500]); +legend('location', 'northeast', 'FontSize', 8, 'NumColumns', 1); +#+end_src + +#+begin_src matlab :tangle no :exports results :results file replace +exportFig('figs/asd_disturbance_force.pdf', 'width', 'wide', 'height', 'normal'); +#+end_src + +#+name: fig:asd_disturbance_force +#+caption: Estimated disturbance force ft from measurement and uniaxial model +#+RESULTS: +[[file:figs/asd_disturbance_force.png]] + +The vibrations induced by the $T_y$ stage are not considered here as: +- the induced vibrations have less amplitude than the vibrations induced by the $R_z$ stage +- it can be scanned at lower velocities if the induced vibrations are an issue + +#+begin_src matlab :exports none :tangle no +%% Save PSD of disturbances +save('./matlab/mat/uniaxial_disturbance_psd.mat', 'f', 'psd_ft', 'psd_xf'); +#+end_src + +#+begin_src matlab :exports none :eval no +%% Save PSD of disturbances +save('./mat/uniaxial_disturbance_psd.mat', 'f', 'psd_ft', 'psd_xf'); +#+end_src + +* Open-Loop Dynamic Noise Budgeting +:PROPERTIES: +:HEADER-ARGS:matlab+: :tangle matlab/uniaxial_4_dynamic_noise_budget.m +:END: +<> +** Introduction :ignore: +Now that we have a model of the NASS and an estimation of the power spectral density of the disturbances, it is possible to perform an /open-loop dynamic noise budgeting/. + +** Matlab Init :noexport:ignore: +#+begin_src matlab :tangle no :exports none :results silent :noweb yes :var current_dir=(file-name-directory buffer-file-name) +<> +#+end_src + +#+begin_src matlab :exports none :results silent :noweb yes +<> +#+end_src + +#+begin_src matlab :tangle no :noweb yes +<> +#+end_src + +#+begin_src matlab :eval no :noweb yes +<> +#+end_src + +#+begin_src matlab :noweb yes +<> +#+end_src + +#+begin_src matlab +%% Frequency Vector [Hz] +freqs = logspace(0, 3, 1000); +#+end_src + +#+begin_src matlab +%% Load the PSD of disturbances +load('uniaxial_disturbance_psd.mat', 'f', 'psd_ft', 'psd_xf'); + +%% Load Plants Dynamics +load('uniaxial_plants.mat', 'G_vc_light', 'G_md_light', 'G_pz_light', ... + 'G_vc_mid', 'G_md_mid', 'G_pz_mid', ... + 'G_vc_heavy', 'G_md_heavy', 'G_pz_heavy'); +#+end_src + +** Sensitivity to disturbances +From the Uni-axial model, the transfer function from the disturbances ($f_s$, $x_f$ and $f_t$) to the displacement $d$ are computed. + +This is done for *two extreme sample masses* $m_s = 1\,\text{kg}$ and $m_s = 50\,\text{kg}$ and *three nano-hexapod stiffnesses*: +- $k_n = 0.01\,N/\mu m$ that could represent a voice coil actuator with soft flexible guiding +- $k_n = 1\,N/\mu m$ that could represent a voice coil actuator with a stiff flexible guiding or a mechanically amplified piezoelectric actuator +- $k_n = 100\,N/\mu m$ that could represent a stiff piezoelectric stack actuator + +The obtained sensitivity to disturbances for the three nano-hexapod stiffnesses are shown in Figure ref:fig:uniaxial_sensitivity_disturbances_nano_hexapod_stiffnesses for the light sample (same conclusions can be drawn with the heavy one). + +#+begin_important +From Figure ref:fig:uniaxial_sensitivity_disturbances_nano_hexapod_stiffnesses, following can be concluded for the *soft nano-hexapod*: +- It is more sensitive to forces applied on the sample (cable forces for instance), which is expected due to the lower stiffness +- Between the suspension mode of the nano-hexapod (here at 5Hz) and the first mode of the micro-station (here at 70Hz), the disturbances induced by the stage vibrations are filtered out. +- Above the suspension mode of the nano-hexapod, the sample's motion is unaffected by the floor motion, and therefore the sensitivity to floor motion is almost $1$. +#+end_important + +#+begin_src matlab :exports none :results none +%% Sensitivity to disturbances for three different nano-hexpod stiffnesses +figure; +tiledlayout(1, 3, 'TileSpacing', 'Compact', 'Padding', 'None'); + +ax1 = nexttile(); +hold on; +plot(freqs, abs(squeeze(freqresp(G_vc_light('d', 'fs'), freqs, 'Hz')))); +plot(freqs, abs(squeeze(freqresp(G_md_light('d', 'fs'), freqs, 'Hz')))); +plot(freqs, abs(squeeze(freqresp(G_pz_light('d', 'fs'), freqs, 'Hz')))); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +ylabel('Amplitude $d/f_{s}$ [m/N]'); xlabel('Frequency [Hz]'); +xticks([1e0, 1e1, 1e2]); + +ax2 = nexttile(); +hold on; +plot(freqs, abs(squeeze(freqresp(G_vc_light('d', 'ft'), freqs, 'Hz')))); +plot(freqs, abs(squeeze(freqresp(G_md_light('d', 'ft'), freqs, 'Hz')))); +plot(freqs, abs(squeeze(freqresp(G_pz_light('d', 'ft'), freqs, 'Hz')))); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +ylabel('Amplitude $d/f_{t}$ [m/N]'); xlabel('Frequency [Hz]'); +xticks([1e0, 1e1, 1e2]); + +ax3 = nexttile(); +hold on; +plot(freqs, abs(squeeze(freqresp(G_vc_light('d', 'xf'), freqs, 'Hz'))), 'DisplayName', '$k_n = 0.01\,N/\mu m$'); +plot(freqs, abs(squeeze(freqresp(G_md_light('d', 'xf'), freqs, 'Hz'))), 'DisplayName', '$k_n = 1 \,N/\mu m$'); +plot(freqs, abs(squeeze(freqresp(G_pz_light('d', 'xf'), freqs, 'Hz'))), 'DisplayName', '$k_n = 100 \,N/\mu m$'); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +ylabel('Amplitude $d/x_{f}$ [m/m]'); xlabel('Frequency [Hz]'); +xticks([1e0, 1e1, 1e2]); +legend('location', 'southeast', 'FontSize', 8, 'NumColumns', 1); + +linkaxes([ax1,ax2,ax3],'x'); +xlim([1, 500]); +#+end_src + +#+begin_src matlab :tangle no :exports results :results file replace +exportFig('figs/uniaxial_sensitivity_disturbances_nano_hexapod_stiffnesses.pdf', 'width', 'full', 'height', 'normal'); +#+end_src + +#+name: fig:uniaxial_sensitivity_disturbances_nano_hexapod_stiffnesses +#+caption: Sensitivity to disturbances for three different nano-hexpod stiffnesses +#+RESULTS: +[[file:figs/uniaxial_sensitivity_disturbances_nano_hexapod_stiffnesses.png]] + +** Open-Loop Dynamic Noise Budgeting +Now, the power spectral density of the disturbances is taken into account to estimate the residual motion $d$ in each case. + +The Cumulative Amplitude Spectrum of the relative motion $d$ due to both the floor motion $x_f$ and the stage vibrations $f_t$ are shown in Figure ref:fig:uniaxial_cas_d_disturbances_stiffnesses for the three nano-hexapod stiffnesses. + +It is shown that the effect of the floor motion is much less than the stage vibrations, except for the soft nano-hexapod below 5Hz. + +#+begin_src matlab :exports none :results none +%% Cumulative Amplitude Spectrum of the relative motion d, due to both the floor motion and the stage vibrations +figure; +tiledlayout(1, 1, 'TileSpacing', 'Compact', 'Padding', 'None'); + +ax1 = nexttile(); +hold on; +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_vc_light('d', 'ft'), f, 'Hz'))).^2)))), '-', 'color', colors(1,:), 'DisplayName', '$f_t$'); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_md_light('d', 'ft'), f, 'Hz'))).^2)))), '-', 'color', colors(2,:), 'DisplayName', '$f_t$'); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_pz_light('d', 'ft'), f, 'Hz'))).^2)))), '-', 'color', colors(3,:), 'DisplayName', '$f_t$'); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_xf.*abs(squeeze(freqresp(G_vc_light('d', 'xf'), f, 'Hz'))).^2)))), '--', 'color', colors(1,:), 'DisplayName', '$x_f$ ($k_n = 0.01\,N/\mu m$)'); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_xf.*abs(squeeze(freqresp(G_md_light('d', 'xf'), f, 'Hz'))).^2)))), '--', 'color', colors(2,:), 'DisplayName', '$x_f$ ($k_n = 1 \,N/\mu m$)'); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_xf.*abs(squeeze(freqresp(G_pz_light('d', 'xf'), f, 'Hz'))).^2)))), '--', 'color', colors(3,:), 'DisplayName', '$x_f$ ($k_n = 100 \,N/\mu m$)'); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +ylabel('Cumulative Ampl. Spectrum [m]'); xlabel('Frequency [Hz]'); +legend('location', 'southwest', 'FontSize', 8, 'NumColumns', 2); + +xlim([1, 500]); +ylim([1e-12, 1e-6]) +#+end_src + +#+begin_src matlab :tangle no :exports results :results file replace +exportFig('figs/uniaxial_cas_d_disturbances_stiffnesses.pdf', 'width', 'wide', 'height', 'normal'); +#+end_src + +#+name: fig:uniaxial_cas_d_disturbances_stiffnesses +#+caption: Cumulative Amplitude Spectrum of the relative motion d, due to both the floor motion and the stage vibrations (light sample) +#+RESULTS: +[[file:figs/uniaxial_cas_d_disturbances_stiffnesses.png]] + +The total cumulative amplitude spectrum for the three nano-hexapod stiffnesses and for the two sample's masses are shown in Figure ref:fig:uniaxial_cas_d_disturbances_payload_masses. +The conclusion is that the sample's mass has little effect on the cumulative amplitude spectrum of the relative motion $d$. + +#+begin_src matlab :exports none :results none +%% Cumulative Amplitude Spectrum of the relative motion d due to all disturbances, for two sample masses +figure; +tiledlayout(1, 1, 'TileSpacing', 'Compact', 'Padding', 'None'); + +ax1 = nexttile(); +hold on; +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_vc_light('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_vc_light('d', 'xf'), f, 'Hz'))).^2)))), '-', ... + 'color', colors(1,:), 'DisplayName', '$m_s = 1\,kg$'); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_md_light('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_md_light('d', 'xf'), f, 'Hz'))).^2)))), '-', ... + 'color', colors(2,:), 'DisplayName', '$m_s = 1\,kg$'); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_pz_light('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_pz_light('d', 'xf'), f, 'Hz'))).^2)))), '-', ... + 'color', colors(3,:), 'DisplayName', '$m_s = 1\,kg$'); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_vc_heavy('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_vc_heavy('d', 'xf'), f, 'Hz'))).^2)))), '--', ... + 'color', colors(1,:), 'DisplayName', '$m_s = 50\,kg$ ($k_n = 0.01\,N/\mu m$)'); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_md_heavy('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_md_heavy('d', 'xf'), f, 'Hz'))).^2)))), '--', ... + 'color', colors(2,:), 'DisplayName', '$m_s = 50\,kg$ ($k_n = 1\,N/\mu m$)'); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_pz_heavy('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_pz_heavy('d', 'xf'), f, 'Hz'))).^2)))), '--', ... + 'color', colors(3,:), 'DisplayName', '$m_s = 50\,kg$ ($k_n = 100\,N/\mu m$)'); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +ylabel('Cumulative Ampl. Spectrum [m]'); xlabel('Frequency [Hz]'); +legend('location', 'southwest', 'FontSize', 8, 'NumColumns', 2); + +xlim([1, 500]); +ylim([1e-11, 3e-6]) +#+end_src + +#+begin_src matlab :tangle no :exports results :results file replace +exportFig('figs/uniaxial_cas_d_disturbances_payload_masses.pdf', 'width', 'wide', 'height', 'normal'); +#+end_src + +#+name: fig:uniaxial_cas_d_disturbances_payload_masses +#+caption: Cumulative Amplitude Spectrum of the relative motion d due to all disturbances, for two sample masses +#+RESULTS: +[[file:figs/uniaxial_cas_d_disturbances_payload_masses.png]] + +** Conclusion +#+begin_important +The conclusion is that in order to have a closed-loop residual vibration $d \approx 20\,nm\text{ rms}$, if a simple feedback controller is used, the required closed-loop bandwidth would be: +- $\approx 10\,\text{Hz}$ for the soft nano-hexapod ($k_n = 0.01\,N/\mu m$) +- $\approx 50\,\text{Hz}$ for the relatively stiff nano-hexapod ($k_n = 1\,N/\mu m$) +- $\approx 100\,\text{Hz}$ for the stiff nano-hexapod ($k_n = 100\,N/\mu m$) + +This can be explain by the fact that above the suspension mode of the nano-hexapod, the stage vibrations are filtered out (see Figure ref:fig:uniaxial_sensitivity_disturbances_nano_hexapod_stiffnesses). + +This gives a first advantage to having a soft nano-hexapod. +#+end_important + +* Active Damping +:PROPERTIES: +:HEADER-ARGS:matlab+: :tangle matlab/uniaxial_5_active_damping.m +:END: +<> +** Introduction :ignore: + +In this section, three active damping are applied on the nano-hexapod (see Figure ref:fig:uniaxial_active_damping_strategies): Integral Force Feedback (IFF), Relative Damping Control (RDC) and Direct Velocity Feedback (DVF). + +These active damping techniques are compared in terms of: +- Reduction of the effect of disturbances (i.e. $x_f$, $f_t$ and $f_s$) on the displacement $d$ +- Achievable damping +- Robustness to a change of sample's mass + +#+begin_src latex :file uniaxial_active_damping_strategies.pdf +\begin{tikzpicture} + % ==================== + % Parameters + % ==================== + \def\massw{2.2} % Width of the masses + \def\massh{0.8} % Height of the masses + \def\spaceh{1.2} % Height of the springs/dampers + \def\dispw{0.4} % Width of the dashed line for the displacement + \def\disph{0.3} % Height of the arrow for the displacements + \def\bracs{0.05} % Brace spacing vertically + \def\brach{-12pt} % Brace shift horizontaly + \def\fsensh{0.2} % Height of the force sensor + \def\velsize{0.2} % Size of the velocity sensor + % ==================== + + % IFF + \begin{scope} + % ==================== + % Ground + % ==================== + \draw (-0.5*\massw, 0) -- (0.5*\massw, 0); + \draw[dashed] (0.5*\massw, 0) -- ++(\dispw, 0); + \draw[->, color=colorpurple] (0.5*\massw+0.5*\dispw, 0) -- ++(0, 2*\disph) node[right, color=colorpurple]{$x_{f}$}; + % ==================== + + % ==================== + % Granite + \begin{scope}[shift={(0, 0)}] + % Mass + \draw[fill=white] (-0.5*\massw, \spaceh) rectangle (0.5*\massw, \spaceh+\massh) node[pos=0.5]{$m_{g}$}; + + % Spring, Damper, and Actuator + \draw[spring] (-0.4*\massw, 0) -- (-0.4*\massw, \spaceh) node[midway, left=0.1]{$k_{g}$}; + \draw[damper] (0, 0) -- ( 0, \spaceh) node[midway, left=0.2]{$c_{g}$}; + + % Legend + \draw[decorate, decoration={brace, amplitude=8pt}, xshift=\brach] % + (-0.5*\massw, \bracs) -- (-0.5*\massw, \spaceh+\massh-\bracs) node[midway,rotate=90,anchor=south,yshift=10pt]{Granite}; + \end{scope} + % ==================== + + + % ==================== + % Stages + \begin{scope}[shift={(0, \spaceh+\massh)}] + % Mass + \draw[fill=white] (-0.5*\massw, \spaceh) rectangle (0.5*\massw, \spaceh+\massh) node[pos=0.5]{$m_{t}$}; + + % Spring, Damper, and Actuator + \draw[spring] (-0.4*\massw, 0) -- (-0.4*\massw, \spaceh) node[midway, left=0.1]{$k_{t}$}; + \draw[damper] (0, 0) -- ( 0, \spaceh) node[midway, left=0.2]{$c_{t}$}; + \draw[actuator={0.45}{0.2}{colorpurple}] ( 0.3*\massw, 0) -- (0.3*\massw, \spaceh) node[midway, right=0.1, color=colorpurple](ft){$f_{t}$}; + + % Legend + \draw[decorate, decoration={brace, amplitude=8pt}, xshift=\brach] % + (-0.5*\massw, \bracs) -- (-0.5*\massw, \spaceh+\massh-\bracs) node[midway,rotate=90,anchor=south,yshift=10pt]{$T_y$/$R_y$/$R_z$}; + \end{scope} + % ==================== + + + % ==================== + % Hexapod + \begin{scope}[shift={(0, 2*(\spaceh+\massh))}] + % Mass + \draw[fill=white] (-0.5*\massw, \spaceh) rectangle (0.5*\massw, \spaceh+\massh) node[pos=0.5]{$m_h$}; + + % Spring, Damper, and Actuator + \draw[spring] (-0.4*\massw, 0) -- (-0.4*\massw, \spaceh) node[midway, left=0.1]{$k_h$}; + \draw[damper] (0, 0) -- ( 0, \spaceh) node[midway, left=0.2]{$c_h$}; + + % Legend + \draw[decorate, decoration={brace, amplitude=8pt}, xshift=\brach] % + (-0.5*\massw, \bracs) -- (-0.5*\massw, \spaceh+\massh-\bracs) node[midway,rotate=90,anchor=south,yshift=10pt]{$\mu\text{-hexa}$}; + \end{scope} + % ==================== + + + % ==================== + % NASS + \begin{scope}[shift={(0, 3*(\spaceh+\massh))}] + % Mass + \draw[fill=white] (-0.5*\massw, \spaceh) rectangle (0.5*\massw, \spaceh+\massh) node[pos=0.5]{$m_{n}$}; + + % Force Sensor + \node[forcesensor={\massw}{\fsensh}{colorblue}] (fsensn) at (0, \spaceh-\fsensh){}; + \node[right, color=colorblue] (fn) at (fsensn.east) {$f_n$}; + + % Spring, Damper, and Actuator + \draw[spring] (-0.4*\massw, 0) -- (-0.4*\massw, \spaceh-\fsensh) node[midway, left=0.1]{$k_{n}$}; + \draw[damper] (0, 0) -- ( 0, \spaceh-\fsensh) node[midway, left=0.2]{$c_{n}$}; + \draw[actuator={0.4}{0.2}{black}] ( 0.3*\massw, 0) -- ( 0.3*\massw, \spaceh-\fsensh) node[midway, right=0.1](f){$f$}; + + % Legend + \draw[decorate, decoration={brace, amplitude=8pt}, xshift=\brach] % + (-0.5*\massw, \bracs) -- (-0.5*\massw, \spaceh+\massh-\bracs) node[midway,rotate=90,anchor=south,yshift=10pt]{$\nu\text{-hexa}$}; + \end{scope} + % ==================== + + % ==================== + % sample + \begin{scope}[shift={(0, 4*(\spaceh+\massh))}] + % Mass + \draw[fill=white] (-0.3*\massw, 0) rectangle (0.3*\massw, \massh) node[pos=0.5]{$m_{s}$}; + + % External Force + \draw[->, color=colorpurple] (0, \massh) node[]{$\bullet$} -- ++(0, 0.5*\massh) node[right, color=colorpurple]{$f_s$}; + \end{scope} + % ==================== + + % ==================== + % IFF Control + \node[block={2em}{2em}, right=0.3 of fn, color=colorblue, fill=colorblue!10!white] (iff) {$K_{\text{IFF}}$}; + \draw[->, draw=colorblue] (fn.east) -- (iff.west); + \draw[->, draw=colorblue] (iff.south) |- (f.east); + % ==================== + \end{scope} + + + \begin{scope}[shift={(5,0)}] + % ==================== + % Ground + % ==================== + \draw (-0.5*\massw, 0) -- (0.5*\massw, 0); + \draw[dashed] (0.5*\massw, 0) -- ++(\dispw, 0); + \draw[->, color=colorpurple] (0.5*\massw+0.5*\dispw, 0) -- ++(0, 2*\disph) node[right, color=colorpurple]{$x_{f}$}; + % ==================== + + % ==================== + % Granite + \begin{scope}[shift={(0, 0)}] + % Mass + \draw[fill=white] (-0.5*\massw, \spaceh) rectangle (0.5*\massw, \spaceh+\massh) node[pos=0.5]{$m_{g}$}; + + % Spring, Damper, and Actuator + \draw[spring] (-0.4*\massw, 0) -- (-0.4*\massw, \spaceh) node[midway, left=0.1]{$k_{g}$}; + \draw[damper] (0, 0) -- ( 0, \spaceh) node[midway, left=0.2]{$c_{g}$}; + \end{scope} + % ==================== + + + % ==================== + % Stages + \begin{scope}[shift={(0, \spaceh+\massh)}] + % Mass + \draw[fill=white] (-0.5*\massw, \spaceh) rectangle (0.5*\massw, \spaceh+\massh) node[pos=0.5]{$m_{t}$}; + + % Spring, Damper, and Actuator + \draw[spring] (-0.4*\massw, 0) -- (-0.4*\massw, \spaceh) node[midway, left=0.1]{$k_{t}$}; + \draw[damper] (0, 0) -- ( 0, \spaceh) node[midway, left=0.2]{$c_{t}$}; + \draw[actuator={0.45}{0.2}{colorpurple}] ( 0.3*\massw, 0) -- (0.3*\massw, \spaceh) node[midway, right=0.1, color=colorpurple](ft){$f_{t}$}; + \end{scope} + % ==================== + + + % ==================== + % Hexapod + \begin{scope}[shift={(0, 2*(\spaceh+\massh))}] + % Mass + \draw[fill=white] (-0.5*\massw, \spaceh) rectangle (0.5*\massw, \spaceh+\massh) node[pos=0.5]{$m_h$}; + + % Spring, Damper, and Actuator + \draw[spring] (-0.4*\massw, 0) -- (-0.4*\massw, \spaceh) node[midway, left=0.1]{$k_h$}; + \draw[damper] (0, 0) -- ( 0, \spaceh) node[midway, left=0.2]{$c_h$}; + + \draw[dashed] (0.5*\massw, \spaceh+\massh) -- ++(2*\dispw, 0) coordinate(drbot); + \end{scope} + % ==================== + + + % ==================== + % NASS + \begin{scope}[shift={(0, 3*(\spaceh+\massh))}] + % Mass + \draw[fill=white] (-0.5*\massw, \spaceh) rectangle (0.5*\massw, \spaceh+\massh) node[pos=0.5]{$m_{n}$}; + + % Spring, Damper, and Actuator + \draw[spring] (-0.4*\massw, 0) -- (-0.4*\massw, \spaceh) node[midway, left=0.1]{$k_{n}$}; + \draw[damper] (0, 0) -- ( 0, \spaceh) node[midway, left=0.2]{$c_{n}$}; + \draw[actuator={0.4}{0.2}{black}] ( 0.3*\massw, 0) -- (0.3*\massw, \spaceh) node[midway, right=0.1](f){$f$}; + + \draw[dashed, draw=colorred] (0.5*\massw, \spaceh+\massh) -- ++(2*\dispw, 0) coordinate(drtop); + \end{scope} + % ==================== + + % ==================== + % sample + \begin{scope}[shift={(0, 4*(\spaceh+\massh))}] + % Mass + \draw[fill=white] (-0.3*\massw, 0) rectangle (0.3*\massw, \massh) node[pos=0.5]{$m_{s}$}; + + % External Force + \draw[->, color=colorpurple] (0, \massh) node[]{$\bullet$} -- ++(0, 0.5*\massh) node[right, color=colorpurple]{$f_s$}; + \end{scope} + % ==================== + + \draw[<->, dashed, draw=colorred] ($(drbot)+(-0.1, 0)$) -- ($(drtop)+(-0.1, 0)$) node[right, color=colorred](dr){$d\mathcal{L}$}; + + % ==================== + % RDC Control + \node[block={2em}{2em}, below right=0.2 and -0.2 of dr, color=colorred, fill=colorred!10!white] (rdc) {$K_{\text{RDC}}$}; + \draw[->, draw=colorred] (dr.east) -| (rdc.north); + \draw[->, draw=colorred] (rdc.south) |- (f.east); + % ==================== + \end{scope} + + \begin{scope}[shift={(10,0)}] + % ==================== + % Ground + % ==================== + \draw (-0.5*\massw, 0) -- (0.5*\massw, 0); + \draw[dashed] (0.5*\massw, 0) -- ++(\dispw, 0); + \draw[->, color=colorpurple] (0.5*\massw+0.5*\dispw, 0) -- ++(0, 2*\disph) node[right, color=colorpurple]{$x_{f}$}; + % ==================== + + % ==================== + % Marble + \begin{scope}[shift={(0, 0)}] + % Mass + \draw[fill=white] (-0.5*\massw, \spaceh) rectangle (0.5*\massw, \spaceh+\massh) node[pos=0.5]{$m_{g}$}; + + % Spring, Damper, and Actuator + \draw[spring] (-0.4*\massw, 0) -- (-0.4*\massw, \spaceh) node[midway, left=0.1]{$k_{g}$}; + \draw[damper] (0, 0) -- ( 0, \spaceh) node[midway, left=0.2]{$c_{g}$}; + \end{scope} + % ==================== + + + % ==================== + % Stages + \begin{scope}[shift={(0, \spaceh+\massh)}] + % Mass + \draw[fill=white] (-0.5*\massw, \spaceh) rectangle (0.5*\massw, \spaceh+\massh) node[pos=0.5]{$m_{t}$}; + + % Spring, Damper, and Actuator + \draw[spring] (-0.4*\massw, 0) -- (-0.4*\massw, \spaceh) node[midway, left=0.1]{$k_{t}$}; + \draw[damper] (0, 0) -- ( 0, \spaceh) node[midway, left=0.2]{$c_{t}$}; + \draw[actuator={0.45}{0.2}{colorpurple}] ( 0.3*\massw, 0) -- (0.3*\massw, \spaceh) node[midway, right=0.1, color=colorpurple](ft){$f_{t}$}; + \end{scope} + % ==================== + + + % ==================== + % Hexapod + \begin{scope}[shift={(0, 2*(\spaceh+\massh))}] + % Mass + \draw[fill=white] (-0.5*\massw, \spaceh) rectangle (0.5*\massw, \spaceh+\massh) node[pos=0.5]{$m_{h}$}; + + % Spring, Damper, and Actuator + \draw[spring] (-0.4*\massw, 0) -- (-0.4*\massw, \spaceh) node[midway, left=0.1]{$k_{h}$}; + \draw[damper] (0, 0) -- ( 0, \spaceh) node[midway, left=0.2]{$c_{h}$}; + \end{scope} + % ==================== + + + % ==================== + % NASS + \begin{scope}[shift={(0, 3*(\spaceh+\massh))}] + % Mass + \draw[fill=white] (-0.5*\massw, \spaceh) rectangle (0.5*\massw, \spaceh+\massh) node[pos=0.5]{$m_{n}$}; + + % Spring, Damper, and Actuator + \draw[spring] (-0.4*\massw, 0) -- (-0.4*\massw, \spaceh) node[midway, left=0.1]{$k_{n}$}; + \draw[damper] (0, 0) -- ( 0, \spaceh) node[midway, left=0.2]{$c_{n}$}; + \draw[actuator={0.4}{0.2}{black}] ( 0.3*\massw, 0) -- (0.3*\massw, \spaceh) node[midway, right=0.1](f){$f$}; + + % Velocity Sensor + \node[inertialsensor={\velsize}{coloryellow}] (veln) at (0.5*\massw, \spaceh+\massh) {}; + \node[right, color=coloryellow] (xn) at (veln.north east) {$v_n$}; + \end{scope} + % ==================== + + % ==================== + % sample + \begin{scope}[shift={(0, 4*(\spaceh+\massh))}] + % Mass + \draw[fill=white] (-0.3*\massw, 0) rectangle (0.3*\massw, \massh) node[pos=0.5]{$m_{s}$}; + + % External Force + \draw[->, color=colorpurple] (0, \massh) node[]{$\bullet$} -- ++(0, 0.5*\massh) node[right, color=colorpurple]{$f_s$}; + \end{scope} + % ==================== + + % ==================== + % DVF Control + \node[block={2em}{2em}, below right=0.4 and 0.1 of xn, color=coloryellow, fill=coloryellow!10!white] (ppf) {$K_{\text{DVF}}$}; + \draw[->, draw=coloryellow] (xn.east) -| (ppf.north); + \draw[->, draw=coloryellow] (ppf.south) |- (f.east); + % ==================== + \end{scope} +\end{tikzpicture} +#+end_src + +#+name: fig:uniaxial_active_damping_strategies +#+caption: Three active damping strategies: Integral Force Feedback (IFF) using a force sensor, Relative Damping Control (RDC) using a relative displacement sensor, and Direct Velocity Feedback (DVF) using a geophone +#+RESULTS: +[[file:figs/uniaxial_active_damping_strategies.png]] + +** Matlab Init :noexport:ignore: +#+begin_src matlab :tangle no :exports none :results silent :noweb yes :var current_dir=(file-name-directory buffer-file-name) +<> +#+end_src + +#+begin_src matlab :exports none :results silent :noweb yes +<> +#+end_src + +#+begin_src matlab :tangle no :noweb yes +<> +#+end_src + +#+begin_src matlab :eval no :noweb yes +<> +#+end_src + +#+begin_src matlab :noweb yes +<> +#+end_src + +#+begin_src matlab +%% Frequency Vector [Hz] +freqs = logspace(0, 3, 1000); +#+end_src + +#+begin_src matlab +%% Load the PSD of disturbances +load('uniaxial_disturbance_psd.mat', 'f', 'psd_ft', 'psd_xf'); +#+end_src + +#+begin_src matlab +%% Load Plants Dynamics +load('uniaxial_plants.mat', 'G_vc_light', 'G_md_light', 'G_pz_light', ... + 'G_vc_mid', 'G_md_mid', 'G_pz_mid', ... + 'G_vc_heavy', 'G_md_heavy', 'G_pz_heavy'); +#+end_src + +** Active Damping Strategies + +The Integral Force Feedback strategy consists of using a force sensor in series with the actuator (see Figure ref:fig:uniaxial_active_damping_iff_equiv, left). + +The control strategy consists of integrating the measured force and feeding it back to the actuator: +\begin{equation} +K_{\text{IFF}}(s) = \frac{g}{s} +\end{equation} + +The mechanical equivalent of this strategy is to add a dashpot in series with the actuator stiffness with a damping coefficient equal to the stiffness of the actuator divided by the controller gain $k/g$ (see Figure ref:fig:uniaxial_active_damping_iff_equiv, right). + +#+begin_src latex :file uniaxial_active_damping_iff_equiv.pdf +\begin{tikzpicture} + % ==================== + % Parameters + % ==================== + \def\massw{2.2} % Width of the masses + \def\massh{0.8} % Height of the masses + \def\spaceh{1.2} % Height of the springs/dampers + \def\dispw{0.4} % Width of the dashed line for the displacement + \def\disph{0.3} % Height of the arrow for the displacements + \def\bracs{0.05} % Brace spacing vertically + \def\brach{-12pt} % Brace shift horizontaly + \def\fsensh{0.2} % Height of the force sensor + \def\velsize{0.2} % Size of the velocity sensor + % ==================== + + \begin{scope} + % ==================== + % Stage Below + \begin{scope} + \draw[fill=white] (-0.5*\massw, \spaceh) rectangle (0.5*\massw, \spaceh+\massh); + \draw[spring] (-0.25*\massw, 0) -- (-0.25*\massw, \spaceh); + \draw[damper] ( 0.25*\massw, 0) -- ( 0.25*\massw, \spaceh); + \draw[decorate,decoration={zigzag,segment length=6pt},draw=black!50!white,very thick] (-0.5*\massw, 0) -- (0.5*\massw, 0); + \draw[draw=black!50!white,very thick, dashed] (-0.5*\massw, 0) -- ++(-0.5, 0); + \draw[draw=black!50!white,very thick, dashed] ( 0.5*\massw, 0) -- ++( 0.5, 0); + \end{scope} + % ==================== + + % ==================== + % NASS + \begin{scope}[shift={(0, \spaceh+\massh)}] + \draw[fill=white] (-0.5*\massw, \spaceh) rectangle (0.5*\massw, \spaceh+\massh) node[pos=0.5]{$m$}; + \node[forcesensor={\massw}{\fsensh}{colorblue}] (fsensn) at (0, \spaceh-\fsensh){}; + \node[right, color=colorblue] (fn) at (fsensn.east) {$f_m$}; + \draw[spring] (-0.25*\massw, 0) -- (-0.25*\massw, \spaceh-\fsensh) node[midway, left=0.1]{$k$}; + \draw[actuator={0.4}{0.2}{black}] ( 0.25*\massw, 0) -- (0.25*\massw, \spaceh-\fsensh) coordinate[midway, shift={(0.1,0)}](f); + \end{scope} + % ==================== + + % ==================== + % Stage Above + \begin{scope}[shift={(0, 2*(\spaceh+\massh))}] + \draw[spring] (-0.25*\massw, 0) -- (-0.25*\massw, \spaceh); + \draw[damper] ( 0.25*\massw, 0) -- ( 0.25*\massw, \spaceh); + \draw[decorate,decoration={zigzag,segment length=6pt},draw=black!50!white,very thick] (-0.5*\massw, \spaceh) -- (0.5*\massw, \spaceh); + \draw[draw=black!50!white,very thick, dashed] (-0.5*\massw, \spaceh) -- ++(-0.5, 0); + \draw[draw=black!50!white,very thick, dashed] ( 0.5*\massw, \spaceh) -- ++( 0.5, 0); + \end{scope} + % ==================== + + % ==================== + % IFF Control + \node[block={2em}{2em}, right=1.0 of f, color=colorblue, fill=colorblue!10!white] (iff) {$g/s$}; + \draw[->, draw=colorblue] (fn.east) -- ++(1.0, 0) |- (iff.east); + \draw[->, draw=colorblue] (iff.west) -- (f.east) node[above right, color=colorblue]{$f$}; + % ==================== + \end{scope} + + \begin{scope}[shift={(6, 0)}] + % ==================== + % Stage Below + \begin{scope} + \draw[fill=white] (-0.5*\massw, 0.8*\spaceh) rectangle (0.5*\massw, 0.8*\spaceh+\massh); + \draw[spring] (-0.25*\massw, 0) -- (-0.25*\massw, 0.8*\spaceh); + \draw[damper] ( 0.25*\massw, 0) -- ( 0.25*\massw, 0.8*\spaceh); + \draw[decorate,decoration={zigzag,segment length=6pt},draw=black!50!white,very thick] (-0.5*\massw, 0) -- (0.5*\massw, 0); + \draw[draw=black!50!white,very thick, dashed] (-0.5*\massw, 0) -- ++(-0.5, 0); + \draw[draw=black!50!white,very thick, dashed] ( 0.5*\massw, 0) -- ++( 0.5, 0); + \end{scope} + % ==================== + + % ==================== + % NASS + \begin{scope}[shift={(0, 0.8*\spaceh+\massh)}] + \draw[fill=white] (-0.5*\massw, 1.4*\spaceh) rectangle (0.5*\massw, 1.4*\spaceh+\massh) node[pos=0.5]{$m$}; + \draw[spring] (0, 0) -- node[midway, left=0.1]{$k$} (0, 0.8*\spaceh); + \draw[damper={colorblue}{}{}] (0, 0.8*\spaceh) node[branch]{} -- (0, 1.4*\spaceh) node[midway, left=0.2, color=colorblue]{$k/g$}; + \end{scope} + % ==================== + + % ==================== + % Stage Above + \begin{scope}[shift={(0, 0.8*\spaceh+\massh+1.4*\spaceh+\massh)}] + \draw[spring] (-0.25*\massw, 0) -- (-0.25*\massw, 0.8*\spaceh); + \draw[damper] ( 0.25*\massw, 0) -- ( 0.25*\massw, 0.8*\spaceh); + + \draw[decorate,decoration={zigzag,segment length=6pt},draw=black!50!white,very thick] (-0.5*\massw, 0.8*\spaceh) -- (0.5*\massw, 0.8*\spaceh); + \draw[draw=black!50!white,very thick, dashed] (-0.5*\massw, 0.8*\spaceh) -- ++(-0.5, 0); + \draw[draw=black!50!white,very thick, dashed] ( 0.5*\massw, 0.8*\spaceh) -- ++( 0.5, 0); + \end{scope} + % ==================== + \end{scope} + + % Equiv + \draw[double, <->, draw=colorblue, double distance=1.5] (3.0, 1.5*\spaceh+\massh) -- ++(1.5,0); + +\end{tikzpicture} +#+end_src + +#+name: fig:uniaxial_active_damping_iff_equiv +#+caption: Integral Force Feedback is equivalent as to add a damper in series with the stiffness (the initial damping is here neglected for simplicity) +#+RESULTS: +[[file:figs/uniaxial_active_damping_iff_equiv.png]] + + +For the Relative Damping Control strategy, a relative motion sensor that measures the motion of the actuator is used (see Figure ref:fig:uniaxial_active_damping_rdc_equiv, left). + +The derivative of this relative motion is used for the feedback signal: +\begin{equation} +K_{\text{RDC}}(s) = - g \cdot s +\end{equation} + +The mechanical equivalent is to add a dashpot in parallel with the actuator with a damping coefficient equal to the controller gain $g$ (see Figure ref:fig:uniaxial_active_damping_rdc_equiv, right). + +#+begin_src latex :file uniaxial_active_damping_rdc_equiv.pdf +\begin{tikzpicture} + % ==================== + % Parameters + % ==================== + \def\massw{2.2} % Width of the masses + \def\massh{0.8} % Height of the masses + \def\spaceh{1.2} % Height of the springs/dampers + \def\dispw{0.4} % Width of the dashed line for the displacement + \def\disph{0.3} % Height of the arrow for the displacements + \def\bracs{0.05} % Brace spacing vertically + \def\brach{-12pt} % Brace shift horizontaly + \def\fsensh{0.2} % Height of the force sensor + \def\velsize{0.2} % Size of the velocity sensor + % ==================== + + \begin{scope} + % ==================== + % Stage Below + \begin{scope} + \draw[fill=white] (-0.5*\massw, \spaceh) rectangle (0.5*\massw, \spaceh+\massh); + \draw[spring] (-0.25*\massw, 0) -- (-0.25*\massw, \spaceh); + \draw[damper] ( 0.25*\massw, 0) -- ( 0.25*\massw, \spaceh); + + \draw[dashed, draw=colorred] (0.5*\massw, \spaceh+\massh) -- ++(1*\dispw, 0) coordinate(drbot); + \draw[decorate,decoration={zigzag,segment length=6pt},draw=black!50!white,very thick] (-0.5*\massw, 0) -- (0.5*\massw, 0); + \draw[draw=black!50!white,very thick, dashed] (-0.5*\massw, 0) -- ++(-0.5, 0); + \draw[draw=black!50!white,very thick, dashed] ( 0.5*\massw, 0) -- ++( 0.5, 0); + \end{scope} + % ==================== + + % ==================== + % NASS + \begin{scope}[shift={(0, \spaceh+\massh)}] + \draw[fill=white] (-0.5*\massw, \spaceh) rectangle (0.5*\massw, \spaceh+\massh) node[pos=0.5]{$m$}; + \draw[spring] (-0.4*\massw, 0) -- (-0.4*\massw, \spaceh) node[midway, left=0.1]{$k$}; + \draw[damper] (0, 0) -- ( 0, \spaceh) node[midway, left=0.2]{$c$}; + \draw[actuator={0.4}{0.2}{black}] ( 0.3*\massw, 0) -- (0.3*\massw, \spaceh) coordinate[midway, shift={(0.1,0)}](f); + + \draw[dashed, draw=colorred] (0.5*\massw, \spaceh+\massh) -- ++(1*\dispw, 0) coordinate(drtop); + \end{scope} + % ==================== + + % ==================== + % Stage Above + \begin{scope}[shift={(0, 2*(\spaceh+\massh))}] + \draw[spring] (-0.25*\massw, 0) -- (-0.25*\massw, \spaceh); + \draw[damper] ( 0.25*\massw, 0) -- ( 0.25*\massw, \spaceh); + + \draw[decorate,decoration={zigzag,segment length=6pt},draw=black!50!white,very thick] (-0.5*\massw, \spaceh) -- (0.5*\massw, \spaceh); + \draw[draw=black!50!white,very thick, dashed] (-0.5*\massw, \spaceh) -- ++(-0.5, 0); + \draw[draw=black!50!white,very thick, dashed] ( 0.5*\massw, \spaceh) -- ++( 0.5, 0); + \end{scope} + % ==================== + + \draw[<->, dashed, draw=colorred] ($(drbot)+(-0.1, 0)$) -- ($(drtop)+(-0.1, 0)$) node[right, color=colorred](dr){$d\mathcal{L}$}; + % ==================== + % RDC Control + \node[block={2em}{2em}, below right=0.2 and -0.3 of dr, color=colorred, fill=colorred!10!white] (rdc) {$-g \cdot s$}; + \draw[->, draw=colorred] (dr.east) -| (rdc.north); + \draw[->, draw=colorred] (rdc.south) |- (f.east) node[above right, color=colorred]{$f$}; + % ==================== + \end{scope} + + \begin{scope}[shift={(6, 0)}] + % ==================== + % Stage Below + \begin{scope} + \draw[fill=white] (-0.5*\massw, \spaceh) rectangle (0.5*\massw, \spaceh+\massh); + \draw[spring] (-0.25*\massw, 0) -- (-0.25*\massw, \spaceh); + \draw[damper] ( 0.25*\massw, 0) -- ( 0.25*\massw, \spaceh); + + \draw[decorate,decoration={zigzag,segment length=6pt},draw=black!50!white,very thick] (-0.5*\massw, 0) -- (0.5*\massw, 0); + \draw[draw=black!50!white,very thick, dashed] (-0.5*\massw, 0) -- ++(-0.5, 0); + \draw[draw=black!50!white,very thick, dashed] ( 0.5*\massw, 0) -- ++( 0.5, 0); + \end{scope} + % ==================== + + % ==================== + % NASS + \begin{scope}[shift={(0, \spaceh+\massh)}] + \draw[fill=white] (-0.5*\massw, \spaceh) rectangle (0.5*\massw, \spaceh+\massh) node[pos=0.5]{$m$}; + \draw[spring] (-0.4*\massw, 0) -- (-0.4*\massw, \spaceh) node[midway, left=0.1]{$k$}; + \draw[damper] (0, 0) -- ( 0, \spaceh) node[midway, left=0.2]{$c$}; + \draw[damper={colorred}{}{}] ( 0.4*\massw, 0) -- ( 0.4*\massw, \spaceh) node[midway, left=0.15, color=colorred]{$g$}; + \end{scope} + % ==================== + + % ==================== + % Stage Above + \begin{scope}[shift={(0, 2*(\spaceh+\massh))}] + \draw[spring] (-0.25*\massw, 0) -- (-0.25*\massw, \spaceh); + \draw[damper] ( 0.25*\massw, 0) -- ( 0.25*\massw, \spaceh); + + \draw[decorate,decoration={zigzag,segment length=6pt},draw=black!50!white,very thick] (-0.5*\massw, \spaceh) -- (0.5*\massw, \spaceh); + \draw[draw=black!50!white,very thick, dashed] (-0.5*\massw, \spaceh) -- ++(-0.5, 0); + \draw[draw=black!50!white,very thick, dashed] ( 0.5*\massw, \spaceh) -- ++( 0.5, 0); + \end{scope} + % ==================== + \end{scope} + + % Equiv + \draw[double, <->, draw=colorred, double distance=1.5] (3.0, 1.5*\spaceh+\massh) -- ++(1.5,0); +\end{tikzpicture} +#+end_src + +#+name: fig:uniaxial_active_damping_rdc_equiv +#+caption: Relative Damping Control is equivalent as adding a damper in parallel with the actuator/relative motion sensor +#+RESULTS: +[[file:figs/uniaxial_active_damping_rdc_equiv.png]] + +Finally, the Direct Velocity Feedback strategy consists of using an inertial sensor (usually a geophone), that measured the "absolute" velocity of the body fixed on top of the actuator (se Figure ref:fig:uniaxial_active_damping_dvf_equiv, left). + +The measured velocity is then fed back to the actuator: +\begin{equation} +K_{\text{DVF}}(s) = - g +\end{equation} + +This is equivalent as to fix a dashpot (with a damping coefficient equal to the controller gain $g$) between the body (one which the inertial sensor is fixed) and an inertial reference frame (see Figure ref:fig:uniaxial_active_damping_dvf_equiv, right). +This is usually refers to as "/sky hook damper/". + +#+begin_src latex :file uniaxial_active_damping_dvf_equiv.pdf +\begin{tikzpicture} + % ==================== + % Parameters + % ==================== + \def\massw{2.2} % Width of the masses + \def\massh{0.8} % Height of the masses + \def\spaceh{1.2} % Height of the springs/dampers + \def\dispw{0.4} % Width of the dashed line for the displacement + \def\disph{0.3} % Height of the arrow for the displacements + \def\bracs{0.05} % Brace spacing vertically + \def\brach{-12pt} % Brace shift horizontaly + \def\fsensh{0.2} % Height of the force sensor + \def\velsize{0.2} % Size of the velocity sensor + % ==================== + + \begin{scope} + % ==================== + % Stage Below + \begin{scope} + \draw[fill=white] (-0.5*\massw, \spaceh) rectangle (0.5*\massw, \spaceh+\massh); + \draw[spring] (-0.25*\massw, 0) -- (-0.25*\massw, \spaceh); + \draw[damper] ( 0.25*\massw, 0) -- ( 0.25*\massw, \spaceh); + + \draw[decorate,decoration={zigzag,segment length=6pt},draw=black!50!white,very thick] (-0.5*\massw, 0) -- (0.5*\massw, 0); + \draw[draw=black!50!white,very thick, dashed] (-0.5*\massw, 0) -- ++(-0.5, 0); + \draw[draw=black!50!white,very thick, dashed] ( 0.5*\massw, 0) -- ++( 0.5, 0); + \end{scope} + % ==================== + + % ==================== + % NASS + \begin{scope}[shift={(0, \spaceh+\massh)}] + \draw[fill=white] (-0.5*\massw, \spaceh) rectangle (0.5*\massw, \spaceh+\massh) node[pos=0.5]{$m$}; + \draw[spring] (-0.4*\massw, 0) -- (-0.4*\massw, \spaceh) node[midway, left=0.1]{$k$}; + \draw[damper] (0, 0) -- ( 0, \spaceh) node[midway, left=0.2]{$c$}; + \draw[actuator={0.4}{0.2}{black}] ( 0.3*\massw, 0) -- (0.3*\massw, \spaceh) coordinate[midway, shift={(0.1,0)}](f); + + % Velocity Sensor + \node[inertialsensor={\velsize}{coloryellow}] (veln) at (0.5*\massw, \spaceh+\massh) {}; + \end{scope} + % ==================== + + % ==================== + % Stage Above + \begin{scope}[shift={(0, 2*(\spaceh+\massh))}] + \draw[spring] (-0.25*\massw, 0) -- (-0.25*\massw, \spaceh); + \draw[damper] ( 0.25*\massw, 0) -- ( 0.25*\massw, \spaceh); + + \draw[decorate,decoration={zigzag,segment length=6pt},draw=black!50!white,very thick] (-0.5*\massw, \spaceh) -- (0.5*\massw, \spaceh); + \draw[draw=black!50!white,very thick, dashed] (-0.5*\massw, \spaceh) -- ++(-0.5, 0); + \draw[draw=black!50!white,very thick, dashed] ( 0.5*\massw, \spaceh) -- ++( 0.5, 0); + \end{scope} + % ==================== + + % ==================== + % DVF Control + \node[block={2em}{2em}, below right=0.3 and 0.4 of veln, color=coloryellow, fill=coloryellow!10!white] (ppf) {$-g$}; + \draw[->, draw=coloryellow] (veln.east) node[above right, color=coloryellow]{$v$} -| (ppf.north); + \draw[->, draw=coloryellow] (ppf.south) |- (f.east) node[above right, color=coloryellow]{$f$}; + % ==================== + \end{scope} + + \begin{scope}[shift={(6, 0)}] + % ==================== + % Stage Below + \begin{scope} + \draw[fill=white] (-0.5*\massw, \spaceh) rectangle (0.5*\massw, \spaceh+\massh); + \draw[spring] (-0.25*\massw, 0) -- (-0.25*\massw, \spaceh); + \draw[damper] ( 0.25*\massw, 0) -- ( 0.25*\massw, \spaceh); + + \draw[decorate,decoration={zigzag,segment length=6pt},draw=black!50!white,very thick] (-0.5*\massw, 0) -- (0.5*\massw, 0); + \draw[draw=black!50!white,very thick, dashed] (-0.5*\massw, 0) -- ++(-0.5, 0); + \draw[draw=black!50!white,very thick, dashed] ( 0.5*\massw, 0) -- ++( 0.5, 0); + \end{scope} + % ==================== + + % ==================== + % NASS + \begin{scope}[shift={(0, \spaceh+\massh)}] + \draw[fill=white] (-0.5*\massw, \spaceh) rectangle (0.5*\massw, \spaceh+\massh) node[pos=0.5]{$m$}; + \draw[spring] (-0.4*\massw, 0) -- (-0.4*\massw, \spaceh) node[midway, left=0.1]{$k$}; + \draw[damper] (0, 0) -- ( 0, \spaceh) node[midway, left=0.2]{$c$}; + + + \draw[damper={coloryellow}{}{}] ( 0.8*\massw, \massh) -- ( 0.8*\massw, \massh+\spaceh)node[midway, left=0.2, color=coloryellow]{$g$}; + \draw[draw=coloryellow] (0.5*\massw, \massh+\spaceh) -- ( 0.8*\massw, \massh+\spaceh); + \node[mground={0.5}{0.3}{coloryellow}] at (0.8*\massw, \massh); + \end{scope} + % ==================== + + % ==================== + % Stage Above + \begin{scope}[shift={(0, 2*(\spaceh+\massh))}] + \draw[spring] (-0.25*\massw, 0) -- (-0.25*\massw, \spaceh); + \draw[damper] ( 0.25*\massw, 0) -- ( 0.25*\massw, \spaceh); + + \draw[decorate,decoration={zigzag,segment length=6pt},draw=black!50!white,very thick] (-0.5*\massw, \spaceh) -- (0.5*\massw, \spaceh); + \draw[draw=black!50!white,very thick, dashed] (-0.5*\massw, \spaceh) -- ++(-0.5, 0); + \draw[draw=black!50!white,very thick, dashed] ( 0.5*\massw, \spaceh) -- ++( 0.5, 0); + \end{scope} + % ==================== + \end{scope} + + % Equiv + \draw[double, <->, draw=coloryellow, double distance=1.5] (2.5, 1.5*\spaceh+\massh) -- ++(1.5,0); +\end{tikzpicture} +#+end_src + +#+name: fig:uniaxial_active_damping_dvf_equiv +#+caption: Direct velocity Feedback using an inertial sensor is equivalent to a "sky hook damper" +#+RESULTS: +[[file:figs/uniaxial_active_damping_dvf_equiv.png]] + +** Plant Dynamics for Active Damping +The plant dynamics for all three active damping techniques are shown in Figure ref:fig:uniaxial_plant_active_damping_techniques. +All have *alternating poles and zeros* meaning that the phase is bounded to $\pm 90\,\text{deg}$ which makes the controller very robust. + +When the nano-hexapod's suspension modes are at lower frequencies than the resonances of the micro-station (blue and red curves in Figure ref:fig:uniaxial_plant_active_damping_techniques), the resonances of the micro-stations have little impact on the transfer functions from IFF and DVF. + +For the stiff nano-hexapod, the micro-station dynamics can be seen on the transfer functions in Figure ref:fig:uniaxial_plant_active_damping_techniques. +Therefore, it is expected that the micro-station dynamics might impact the achievable damping if a stiff nano-hexapod is used. + +#+begin_src matlab :exports none :results none +%% Damped plants for three considered payload masses - Comparison of active damping techniques +figure; +tiledlayout(3, 3, 'TileSpacing', 'Compact', 'Padding', 'None'); + +ax1 = nexttile([2,1]); +hold on; +plot(freqs, abs(squeeze(freqresp(G_vc_light('fm', 'f'), freqs, 'Hz'))), '-', 'color', colors(1,:), 'DisplayName', '$m_s = 1\,kg$'); +plot(freqs, abs(squeeze(freqresp(G_vc_mid( 'fm', 'f'), freqs, 'Hz'))), '-.', 'color', colors(1,:), 'DisplayName', '$m_s = 25\,kg$'); +plot(freqs, abs(squeeze(freqresp(G_vc_heavy('fm', 'f'), freqs, 'Hz'))), '--', 'color', colors(1,:), 'DisplayName', '$m_s = 50\,kg$'); +plot(freqs, abs(squeeze(freqresp(G_md_light('fm', 'f'), freqs, 'Hz'))), '-', 'color', colors(2,:), 'HandleVisibility', 'off'); +plot(freqs, abs(squeeze(freqresp(G_md_mid( 'fm', 'f'), freqs, 'Hz'))), '-.', 'color', colors(2,:), 'HandleVisibility', 'off'); +plot(freqs, abs(squeeze(freqresp(G_md_heavy('fm', 'f'), freqs, 'Hz'))), '--', 'color', colors(2,:), 'HandleVisibility', 'off'); +plot(freqs, abs(squeeze(freqresp(G_pz_light('fm', 'f'), freqs, 'Hz'))), '-', 'color', colors(3,:), 'HandleVisibility', 'off'); +plot(freqs, abs(squeeze(freqresp(G_pz_mid( 'fm', 'f'), freqs, 'Hz'))), '-.', 'color', colors(3,:), 'HandleVisibility', 'off'); +plot(freqs, abs(squeeze(freqresp(G_pz_heavy('fm', 'f'), freqs, 'Hz'))), '--', 'color', colors(3,:), 'HandleVisibility', 'off'); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +ylabel('Amplitude [N/N]'); set(gca, 'XTickLabel',[]); +title('IFF: $f_m/f$'); +ldg = legend('location', 'southeast', 'FontSize', 8, 'NumColumns', 1); +ldg.ItemTokenSize = [20, 1]; + +ax2 = nexttile([2,1]); +hold on; +plot(freqs, abs(squeeze(freqresp(G_vc_light('dL', 'f'), freqs, 'Hz'))), '-', 'color', colors(1,:)); +plot(freqs, abs(squeeze(freqresp(G_vc_mid( 'dL', 'f'), freqs, 'Hz'))), '-.', 'color', colors(1,:)); +plot(freqs, abs(squeeze(freqresp(G_vc_heavy('dL', 'f'), freqs, 'Hz'))), '--', 'color', colors(1,:)); +plot(freqs, abs(squeeze(freqresp(G_md_light('dL', 'f'), freqs, 'Hz'))), '-', 'color', colors(2,:)); +plot(freqs, abs(squeeze(freqresp(G_md_mid( 'dL', 'f'), freqs, 'Hz'))), '-.', 'color', colors(2,:)); +plot(freqs, abs(squeeze(freqresp(G_md_heavy('dL', 'f'), freqs, 'Hz'))), '--', 'color', colors(2,:)); +plot(freqs, abs(squeeze(freqresp(G_pz_light('dL', 'f'), freqs, 'Hz'))), '-', 'color', colors(3,:)); +plot(freqs, abs(squeeze(freqresp(G_pz_mid( 'dL', 'f'), freqs, 'Hz'))), '-.', 'color', colors(3,:)); +plot(freqs, abs(squeeze(freqresp(G_pz_heavy('dL', 'f'), freqs, 'Hz'))), '--', 'color', colors(3,:)); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +ylabel('Amplitude [m/N]'); set(gca, 'XTickLabel',[]); +title('RDC: $d\mathcal{L}/f$'); + +ax3 = nexttile([2,1]); +hold on; +plot(freqs, abs(squeeze(freqresp(G_vc_light('vn', 'f'), freqs, 'Hz'))), '-', 'color', colors(1,:), 'DisplayName', '$k_n = 0.01\,N/\mu m$'); +plot(freqs, abs(squeeze(freqresp(G_vc_mid( 'vn', 'f'), freqs, 'Hz'))), '-.', 'color', colors(1,:), 'HandleVisibility', 'off'); +plot(freqs, abs(squeeze(freqresp(G_vc_heavy('vn', 'f'), freqs, 'Hz'))), '--', 'color', colors(1,:), 'HandleVisibility', 'off'); +plot(freqs, abs(squeeze(freqresp(G_md_light('vn', 'f'), freqs, 'Hz'))), '-', 'color', colors(2,:), 'DisplayName', '$k_n = 1\,N/\mu m$'); +plot(freqs, abs(squeeze(freqresp(G_md_mid( 'vn', 'f'), freqs, 'Hz'))), '-.', 'color', colors(2,:), 'HandleVisibility', 'off'); +plot(freqs, abs(squeeze(freqresp(G_md_heavy('vn', 'f'), freqs, 'Hz'))), '--', 'color', colors(2,:), 'HandleVisibility', 'off'); +plot(freqs, abs(squeeze(freqresp(G_pz_light('vn', 'f'), freqs, 'Hz'))), '-', 'color', colors(3,:), 'DisplayName', '$k_n = 100\,N/\mu m$'); +plot(freqs, abs(squeeze(freqresp(G_pz_mid( 'vn', 'f'), freqs, 'Hz'))), '-.', 'color', colors(3,:), 'HandleVisibility', 'off'); +plot(freqs, abs(squeeze(freqresp(G_pz_heavy('vn', 'f'), freqs, 'Hz'))), '--', 'color', colors(3,:), 'HandleVisibility', 'off'); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +ylabel('Amplitude [m/s/N]'); set(gca, 'XTickLabel',[]); +title('DVF: $v_n/f$'); +ldg = legend('location', 'southeast', 'FontSize', 8, 'NumColumns', 1); +ldg.ItemTokenSize = [20, 1]; + +ax1b = nexttile(); +hold on; +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_vc_light('fm', 'f'), freqs, 'Hz')))), '-', 'color', colors(1,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_vc_mid( 'fm', 'f'), freqs, 'Hz')))), '-.', 'color', colors(1,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_vc_heavy('fm', 'f'), freqs, 'Hz')))), '--', 'color', colors(1,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_md_light('fm', 'f'), freqs, 'Hz')))), '-', 'color', colors(2,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_md_mid( 'fm', 'f'), freqs, 'Hz')))), '-.', 'color', colors(2,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_md_heavy('fm', 'f'), freqs, 'Hz')))), '--', 'color', colors(2,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_pz_light('fm', 'f'), freqs, 'Hz')))), '-', 'color', colors(3,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_pz_mid( 'fm', 'f'), freqs, 'Hz')))), '-.', 'color', colors(3,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_pz_heavy('fm', 'f'), freqs, 'Hz')))), '--', 'color', colors(3,:)); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'lin'); +xlabel('Frequency [Hz]'); ylabel('Phase [deg]'); +xticks([1e0, 1e1, 1e2]); +yticks(-360:90:360); +ylim([-200, 20]); + +ax2b = nexttile(); +hold on; +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_vc_light('dL', 'f'), freqs, 'Hz')))), '-', 'color', colors(1,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_vc_mid( 'dL', 'f'), freqs, 'Hz')))), '-.', 'color', colors(1,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_vc_heavy('dL', 'f'), freqs, 'Hz')))), '--', 'color', colors(1,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_md_light('dL', 'f'), freqs, 'Hz')))), '-', 'color', colors(2,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_md_mid( 'dL', 'f'), freqs, 'Hz')))), '-.', 'color', colors(2,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_md_heavy('dL', 'f'), freqs, 'Hz')))), '--', 'color', colors(2,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_pz_light('dL', 'f'), freqs, 'Hz')))), '-', 'color', colors(3,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_pz_mid( 'dL', 'f'), freqs, 'Hz')))), '-.', 'color', colors(3,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_pz_heavy('dL', 'f'), freqs, 'Hz')))), '--', 'color', colors(3,:)); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'lin'); +xlabel('Frequency [Hz]'); ylabel('Phase [deg]'); +xticks([1e0, 1e1, 1e2]); +yticks(-360:90:360); +ylim([-200, 20]); + +ax3b = nexttile(); +hold on; +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_vc_light('vn', 'f'), freqs, 'Hz')))), '-', 'color', colors(1,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_vc_mid( 'vn', 'f'), freqs, 'Hz')))), '-.', 'color', colors(1,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_vc_heavy('vn', 'f'), freqs, 'Hz')))), '--', 'color', colors(1,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_md_light('vn', 'f'), freqs, 'Hz')))), '-', 'color', colors(2,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_md_mid( 'vn', 'f'), freqs, 'Hz')))), '-.', 'color', colors(2,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_md_heavy('vn', 'f'), freqs, 'Hz')))), '--', 'color', colors(2,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_pz_light('vn', 'f'), freqs, 'Hz')))), '-', 'color', colors(3,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_pz_mid( 'vn', 'f'), freqs, 'Hz')))), '-.', 'color', colors(3,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_pz_heavy('vn', 'f'), freqs, 'Hz')))), '--', 'color', colors(3,:)); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'lin'); +xlabel('Frequency [Hz]'); ylabel('Phase [deg]'); +xticks([1e0, 1e1, 1e2]); +yticks(-360:90:360); +ylim([-110, 110]); + +linkaxes([ax1,ax2,ax3,ax1b,ax2b,ax3b],'x'); +xlim([1, 1000]); +#+end_src + +#+begin_src matlab :tangle no :exports results :results file replace +exportFig('figs/uniaxial_plant_active_damping_techniques.pdf', 'width', 'full', 'height', 'tall'); +#+end_src + +#+name: fig:uniaxial_plant_active_damping_techniques +#+caption: Plant dynamics for the three active damping techniques (IFF: right, RDC: middle, DVF: left), for three nano-hexapod stiffnesses ($k_n = 0.01\,N/\mu m$ in blue, $k_n = 1\,N/\mu m$ in red and $k_n = 100\,N/\mu m$ in yellow) and three sample's masses ($m_s = 1\,kg$: solid curves, $m_s = 25\,kg$: dot-dashed curves, and $m_s = 50\,kg$: dashed curves). +#+RESULTS: +[[file:figs/uniaxial_plant_active_damping_techniques.png]] + +** Achievable Damping - Root Locus +The Root Locus are computed for the three nano-hexapod stiffnesses and for the three active damping techniques. +They are shown in Figure ref:fig:uniaxial_root_locus_damping_techniques. + +All three active damping approach can lead to *critical damping* of the nano-hexapod suspension mode. + +There is even a little bit of authority on micro-station modes with IFF and DVF applied on the stiff nano-hexapod (Figure ref:fig:uniaxial_root_locus_damping_techniques, right) and with RDC for a soft nano-hexapod (Figure ref:fig:uniaxial_root_locus_damping_techniques_micro_station_mode). +This can be explained by the fact that above the suspension mode of the soft nano-hexapod, the relative motion sensor acts as an inertial sensor for the micro-station top platform. Therefore, it is like DVF was applied (the nano-hexapod acts as a geophone!). + +#+begin_src matlab :exports none +%% Active Damping Robustness to change of sample's mass - Root Locus for all three damping techniques with 3 different sample's masses +figure; +tiledlayout(1, 3, 'TileSpacing', 'Compact', 'Padding', 'None'); + +%% Soft Nano-Hexapod +ax1 = nexttile(); +hold on; +% IFF +plot(real(pole(G_vc_light('fm', 'f'))), imag(pole(G_vc_light('fm', 'f'))), 'x', 'color', colors(1,:), ... + 'HandleVisibility', 'off'); +plot(real(zero(G_vc_light('fm', 'f'))), imag(zero(G_vc_light('fm', 'f'))), 'o', 'color', colors(1,:), ... + 'DisplayName', 'IFF'); +for g = logspace(0, 2, 400) + clpoles = pole(feedback(G_vc_light('fm', 'f'), g/s, +1)); + plot(real(clpoles), imag(clpoles), '.', 'color', colors(1,:), ... + 'HandleVisibility', 'off'); +end + +% RDC +plot(real(pole(G_vc_light('dL', 'f'))), imag(pole(G_vc_light('dL', 'f'))), 'x', 'color', colors(2,:), ... + 'HandleVisibility', 'off'); +plot(real(zero(G_vc_light('dL', 'f'))), imag(zero(G_vc_light('dL', 'f'))), 'o', 'color', colors(2,:), ... + 'DisplayName', 'RDC'); +for g = logspace(1,3,400) + clpoles = pole(feedback(G_vc_light('dL', 'f'), -g*s, +1)); + plot(real(clpoles), imag(clpoles), '.', 'color', colors(2,:), ... + 'HandleVisibility', 'off'); +end + +% DVF +plot(real(pole(G_vc_light('vn', 'f'))), imag(pole(G_vc_light('vn', 'f'))), 'x', 'color', colors(3,:), ... + 'HandleVisibility', 'off'); +plot(real(zero(G_vc_light('vn', 'f'))), imag(zero(G_vc_light('vn', 'f'))), 'o', 'color', colors(3,:), ... + 'DisplayName', 'DVF'); +for g = logspace(1,3,400) + clpoles = pole(feedback(G_vc_light('vn', 'f'), -g, +1)); + plot(real(clpoles), imag(clpoles), '.', 'color', colors(3,:), ... + 'HandleVisibility', 'off'); +end +hold off; +axis square; +xlabel('Real Part'); ylabel('Imaginary Part'); +title('$k_n = 0.01\,N/\mu m$') +ldg = legend('location', 'northwest', 'FontSize', 8, 'NumColumns', 1); +ldg.ItemTokenSize = [10, 1]; +xlim([-30, 0]); ylim([0, 30]); + +%% Medium-Stiff Nano-Hexapod +ax2 = nexttile(); +hold on; +% IFF +plot(real(pole(G_md_light('fm', 'f'))), imag(pole(G_md_light('fm', 'f'))), 'x', 'color', colors(1,:), ... + 'HandleVisibility', 'off'); +plot(real(zero(G_md_light('fm', 'f'))), imag(zero(G_md_light('fm', 'f'))), 'o', 'color', colors(1,:), ... + 'HandleVisibility', 'off'); +for g = logspace(0,3,400) + clpoles = pole(feedback(G_md_light('fm', 'f'), g/s, +1)); + plot(real(clpoles), imag(clpoles), '.', 'color', colors(1,:), ... + 'HandleVisibility', 'off'); +end + +% RDC +plot(real(pole(G_md_light('dL', 'f'))), imag(pole(G_md_light('dL', 'f'))), 'x', 'color', colors(2,:), ... + 'HandleVisibility', 'off'); +plot(real(zero(G_md_light('dL', 'f'))), imag(zero(G_md_light('dL', 'f'))), 'o', 'color', colors(2,:), ... + 'HandleVisibility', 'off'); +for g = logspace(2,4,400) + clpoles = pole(feedback(G_md_light('dL', 'f'), -g*s, +1)); + plot(real(clpoles), imag(clpoles), '.', 'color', colors(2,:), ... + 'HandleVisibility', 'off'); +end + +% DVF +plot(real(pole(G_md_light('vn', 'f'))), imag(pole(G_md_light('vn', 'f'))), 'x', 'color', colors(3,:), ... + 'HandleVisibility', 'off'); +plot(real(zero(G_md_light('vn', 'f'))), imag(zero(G_md_light('vn', 'f'))), 'o', 'color', colors(3,:), ... + 'HandleVisibility', 'off'); +for g = logspace(2,4,400) + clpoles = pole(feedback(G_md_light('vn', 'f'), -g, +1)); + plot(real(clpoles), imag(clpoles), '.', 'color', colors(3,:), ... + 'HandleVisibility', 'off'); +end +hold off; +axis square; +xlabel('Real Part'); ylabel('Imaginary Part'); +title('$k_n = 1\,N/\mu m$') +xlim([-300, 0]); ylim([0, 300]); + +%% Stiff Nano-Hexapod +ax3 = nexttile(); +hold on; +% IFF +plot(real(pole(G_pz_light('fm', 'f'))), imag(pole(G_pz_light('fm', 'f'))), 'x', 'color', colors(1,:), ... + 'HandleVisibility', 'off'); +plot(real(zero(G_pz_light('fm', 'f'))), imag(zero(G_pz_light('fm', 'f'))), 'o', 'color', colors(1,:), ... + 'HandleVisibility', 'off'); +for g = logspace(2,5,400) + clpoles = pole(feedback(G_pz_light('fm', 'f'), g/s, +1)); + plot(real(clpoles), imag(clpoles), '.', 'color', colors(1,:), ... + 'HandleVisibility', 'off'); +end + +% RDC +plot(real(pole(G_pz_light('dL', 'f'))), imag(pole(G_pz_light('dL', 'f'))), 'x', 'color', colors(2,:), ... + 'HandleVisibility', 'off'); +plot(real(zero(G_pz_light('dL', 'f'))), imag(zero(G_pz_light('dL', 'f'))), 'o', 'color', colors(2,:), ... + 'HandleVisibility', 'off'); +for g = logspace(3,6,400) + clpoles = pole(feedback(G_pz_light('dL', 'f'), -g*s, +1)); + plot(real(clpoles), imag(clpoles), '.', 'color', colors(2,:), ... + 'HandleVisibility', 'off'); +end + +% DVF +plot(real(pole(G_pz_light('vn', 'f'))), imag(pole(G_pz_light('vn', 'f'))), 'x', 'color', colors(3,:), ... + 'HandleVisibility', 'off'); +plot(real(zero(G_pz_light('vn', 'f'))), imag(zero(G_pz_light('vn', 'f'))), 'o', 'color', colors(3,:), ... + 'HandleVisibility', 'off'); +for g = logspace(3,6,400) + clpoles = pole(feedback(G_pz_light('vn', 'f'), -g, +1)); + plot(real(clpoles), imag(clpoles), '.', 'color', colors(3,:), ... + 'HandleVisibility', 'off'); +end +hold off; +axis square; +xlabel('Real Part'); ylabel('Imaginary Part'); +title('$k_n = 100\,N/\mu m$') +xlim([-4000, 0]); ylim([0, 4000]); +#+end_src + +#+begin_src matlab :tangle no :exports results :results file replace +exportFig('figs/uniaxial_root_locus_damping_techniques.pdf', 'width', 'full', 'height', 'normal'); +#+end_src + +#+name: fig:uniaxial_root_locus_damping_techniques +#+caption: Root Loci for the three active damping techniques (IFF in blue, RDC in red and DVF in yellow). This is shown for three nano-hexapod stiffnesses. +#+RESULTS: +[[file:figs/uniaxial_root_locus_damping_techniques.png]] + +#+begin_src matlab :exports none :results none +%% Root Locus for the three damping techniques +figure; + +hold on; +% IFF +plot(real(pole(G_md_mid('fm', 'f'))), imag(pole(G_md_mid('fm', 'f'))), 'x', 'color', colors(1,:), ... + 'DisplayName', 'IFF'); +plot(real(zero(G_md_mid('fm', 'f'))), imag(zero(G_md_mid('fm', 'f'))), 'o', 'color', colors(1,:), ... + 'HandleVisibility', 'off'); +for g = logspace(1,4,500) + clpoles = pole(feedback(G_md_mid('fm', 'f'), g/s, +1)); + plot(real(clpoles), imag(clpoles), '.', 'color', colors(1,:), ... + 'HandleVisibility', 'off'); +end + +% RDC +plot(real(pole(G_md_mid('dL', 'f'))), imag(pole(G_md_mid('dL', 'f'))), 'x', 'color', colors(2,:), ... + 'DisplayName', 'RDC'); +plot(real(zero(G_md_mid('dL', 'f'))), imag(zero(G_md_mid('dL', 'f'))), 'o', 'color', colors(2,:), ... + 'HandleVisibility', 'off'); +for g = logspace(2,5,500) + clpoles = pole(feedback(G_md_mid('dL', 'f'), -g*s, +1)); + plot(real(clpoles), imag(clpoles), '.', 'color', colors(2,:), ... + 'HandleVisibility', 'off'); +end + +% DVF +plot(real(pole(G_md_mid('vn', 'f'))), imag(pole(G_md_mid('vn', 'f'))), 'x', 'color', colors(3,:), ... + 'DisplayName', 'DVF'); +plot(real(zero(G_md_mid('vn', 'f'))), imag(zero(G_md_mid('vn', 'f'))), 'o', 'color', colors(3,:), ... + 'HandleVisibility', 'off'); +for g = logspace(2,5,500) + clpoles = pole(feedback(G_md_mid('vn', 'f'), -tf(g), +1)); + plot(real(clpoles), imag(clpoles), '.', 'color', colors(3,:), ... + 'HandleVisibility', 'off'); +end +hold off; +xlim([-2100, 0]); ylim([0, 2100]); +axis square; +xlabel('Real Part'); ylabel('Imaginary Part'); +ldg = legend('location', 'northwest', 'FontSize', 8, 'NumColumns', 1); +ldg.ItemTokenSize = [10, 1]; +#+end_src + +#+begin_src matlab :tangle no :exports results :results file replace +exportFig('figs/uniaxial_root_locus_damping_techniques_micro_station_mode.pdf', 'width', 'wide', 'height', 'normal'); +#+end_src + +#+name: fig:uniaxial_root_locus_damping_techniques_micro_station_mode +#+caption: Root Locus for the three damping techniques. It is shown that the RDC active damping technique has some authority on one mode of the micro-station. This mode corresponds to the suspension mode of the micro-hexapod. +#+RESULTS: +[[file:figs/uniaxial_root_locus_damping_techniques_micro_station_mode.png]] + +** Active Damping Controller Optimization and Damped plants :noexport: +#+begin_src matlab :exports none +%% Design of Active Damping controllers to have reasonable damping +% IFF +K_iff_vc = 20/(s + 2*pi*0.01); +K_iff_vc.InputName = {'fm'}; +K_iff_vc.OutputName = {'f'}; +K_iff_md = 200/(s + 2*pi*0.01); +K_iff_md.InputName = {'fm'}; +K_iff_md.OutputName = {'f'}; +K_iff_pz = 4000/(s + 2*pi*0.01); +K_iff_pz.InputName = {'fm'}; +K_iff_pz.OutputName = {'f'}; + +% RDC +K_rdc_vc = -1e3*s; +K_rdc_vc.InputName = {'dL'}; +K_rdc_vc.OutputName = {'f'}; +K_rdc_md = -1e4*s; +K_rdc_md.InputName = {'dL'}; +K_rdc_md.OutputName = {'f'}; +K_rdc_pz = -1e5*s; +K_rdc_pz.InputName = {'dL'}; +K_rdc_pz.OutputName = {'f'}; + +% DVF +K_dvf_vc = -tf(1e3); +K_dvf_vc.InputName = {'vn'}; +K_dvf_vc.OutputName = {'f'}; +K_dvf_md = -tf(8e3); +K_dvf_md.InputName = {'vn'}; +K_dvf_md.OutputName = {'f'}; +K_dvf_pz = -tf(2e5); +K_dvf_pz.InputName = {'vn'}; +K_dvf_pz.OutputName = {'f'}; +#+end_src + +#+begin_src matlab :exports none :tangle no +%% Save Active Damping Controllers +save('./matlab/mat/uniaxial_active_damping_controllers.mat', 'K_iff_vc', 'K_iff_md', 'K_iff_pz', ... + 'K_rdc_vc', 'K_rdc_md', 'K_rdc_pz', ... + 'K_dvf_vc', 'K_dvf_md', 'K_dvf_pz'); +#+end_src + +#+begin_src matlab :exports none :eval no +%% Save Active Damping Controller +save('./mat/uniaxial_active_damping_controllers.mat', 'K_iff_vc', 'K_iff_md', 'K_iff_pz', ... + 'K_rdc_vc', 'K_rdc_md', 'K_rdc_pz', ... + 'K_dvf_vc', 'K_dvf_md', 'K_dvf_pz'); +#+end_src + +#+begin_src matlab :exports none +%% Compute Damped Plants +% IFF +G_iff_vc_light = feedback(G_vc_light, K_iff_vc, 'name', +1); +G_iff_vc_mid = feedback(G_vc_mid , K_iff_vc, 'name', +1); +G_iff_vc_heavy = feedback(G_vc_heavy, K_iff_vc, 'name', +1); +G_iff_md_light = feedback(G_md_light, K_iff_md, 'name', +1); +G_iff_md_mid = feedback(G_md_mid , K_iff_md, 'name', +1); +G_iff_md_heavy = feedback(G_md_heavy, K_iff_md, 'name', +1); +G_iff_pz_light = feedback(G_pz_light, K_iff_pz, 'name', +1); +G_iff_pz_mid = feedback(G_pz_mid , K_iff_pz, 'name', +1); +G_iff_pz_heavy = feedback(G_pz_heavy, K_iff_pz, 'name', +1); + +% RDC +G_rdc_vc_light = feedback(G_vc_light, K_rdc_vc, 'name', +1); +G_rdc_vc_mid = feedback(G_vc_mid , K_rdc_vc, 'name', +1); +G_rdc_vc_heavy = feedback(G_vc_heavy, K_rdc_vc, 'name', +1); +G_rdc_md_light = feedback(G_md_light, K_rdc_md, 'name', +1); +G_rdc_md_mid = feedback(G_md_mid , K_rdc_md, 'name', +1); +G_rdc_md_heavy = feedback(G_md_heavy, K_rdc_md, 'name', +1); +G_rdc_pz_light = feedback(G_pz_light, K_rdc_pz, 'name', +1); +G_rdc_pz_mid = feedback(G_pz_mid , K_rdc_pz, 'name', +1); +G_rdc_pz_heavy = feedback(G_pz_heavy, K_rdc_pz, 'name', +1); + +% DVF +G_dvf_vc_light = feedback(G_vc_light, K_dvf_vc, 'name', +1); +G_dvf_vc_mid = feedback(G_vc_mid , K_dvf_vc, 'name', +1); +G_dvf_vc_heavy = feedback(G_vc_heavy, K_dvf_vc, 'name', +1); +G_dvf_md_light = feedback(G_md_light, K_dvf_md, 'name', +1); +G_dvf_md_mid = feedback(G_md_mid , K_dvf_md, 'name', +1); +G_dvf_md_heavy = feedback(G_md_heavy, K_dvf_md, 'name', +1); +G_dvf_pz_light = feedback(G_pz_light, K_dvf_pz, 'name', +1); +G_dvf_pz_mid = feedback(G_pz_mid , K_dvf_pz, 'name', +1); +G_dvf_pz_heavy = feedback(G_pz_heavy, K_dvf_pz, 'name', +1); +#+end_src + +#+begin_src matlab +%% Verify Stability +% IFF +isstable(G_iff_vc_light) && isstable(G_iff_vc_mid) && isstable(G_iff_vc_heavy) && ... +isstable(G_iff_md_light) && isstable(G_iff_md_mid) && isstable(G_iff_md_heavy) && ... +isstable(G_iff_pz_light) && isstable(G_iff_pz_mid) && isstable(G_iff_pz_heavy) + +% RDC +isstable(G_rdc_vc_light) && isstable(G_rdc_vc_mid) && isstable(G_rdc_vc_heavy) && ... +isstable(G_rdc_md_light) && isstable(G_rdc_md_mid) && isstable(G_rdc_md_heavy) && ... +isstable(G_rdc_pz_light) && isstable(G_rdc_pz_mid) && isstable(G_rdc_pz_heavy) + +% DVF +isstable(G_dvf_vc_light) && isstable(G_dvf_vc_mid) && isstable(G_dvf_vc_heavy) && ... +isstable(G_dvf_md_light) && isstable(G_dvf_md_mid) && isstable(G_dvf_md_heavy) && ... +isstable(G_dvf_pz_light) && isstable(G_dvf_pz_mid) && isstable(G_dvf_pz_heavy) +#+end_src + +#+begin_src matlab :exports none :tangle no +%% Save Active Damping Controllers +save('./matlab/mat/uniaxial_damped_plants.mat', 'G_iff_vc_light', 'G_iff_md_light', 'G_iff_pz_light', ... + 'G_rdc_vc_light', 'G_rdc_md_light', 'G_rdc_pz_light', ... + 'G_dvf_vc_light', 'G_dvf_md_light', 'G_dvf_pz_light', ... + 'G_iff_vc_mid', 'G_iff_md_mid', 'G_iff_pz_mid', ... + 'G_rdc_vc_mid', 'G_rdc_md_mid', 'G_rdc_pz_mid', ... + 'G_dvf_vc_mid', 'G_dvf_md_mid', 'G_dvf_pz_mid', ... + 'G_iff_vc_heavy', 'G_iff_md_heavy', 'G_iff_pz_heavy', ... + 'G_rdc_vc_heavy', 'G_rdc_md_heavy', 'G_rdc_pz_heavy', ... + 'G_dvf_vc_heavy', 'G_dvf_md_heavy', 'G_dvf_pz_heavy'); +#+end_src + +#+begin_src matlab :exports none :eval no +%% Save Active Damping Controller +save('./mat/uniaxial_damped_plants.mat', 'G_iff_vc_light', 'G_iff_md_light', 'G_iff_pz_light', ... + 'G_rdc_vc_light', 'G_rdc_md_light', 'G_rdc_pz_light', ... + 'G_dvf_vc_light', 'G_dvf_md_light', 'G_dvf_pz_light', ... + 'G_iff_vc_mid', 'G_iff_md_mid', 'G_iff_pz_mid', ... + 'G_rdc_vc_mid', 'G_rdc_md_mid', 'G_rdc_pz_mid', ... + 'G_dvf_vc_mid', 'G_dvf_md_mid', 'G_dvf_pz_mid', ... + 'G_iff_vc_heavy', 'G_iff_md_heavy', 'G_iff_pz_heavy', ... + 'G_rdc_vc_heavy', 'G_rdc_md_heavy', 'G_rdc_pz_heavy', ... + 'G_dvf_vc_heavy', 'G_dvf_md_heavy', 'G_dvf_pz_heavy'); +#+end_src + +** Change of sensitivity to disturbances +The sensitivity to disturbances (direct forces $f_s$, stage vibrations $f_t$ and floor motion $x_f$) for all three active damping techniques are compared in Figure ref:fig:uniaxial_sensitivity_dist_active_damping. +The comparison is done with the nano-hexapod having a stiffness $k_n = 1\,N/\mu m$. + +#+begin_important +Conclusions from Figure ref:fig:uniaxial_sensitivity_dist_active_damping are: +- IFF degrades the sensitivity to direct forces on the sample (i.e. the compliance) below the resonance of the nano-hexapod +- RDC degrades the sensitivity to stage vibrations around the nano-hexapod's resonance as compared to the other two methods +- both IFF and DVF degrades the sensitivity to floor motion below the resonance of the nano-hexapod +#+end_important + +#+begin_src matlab :exports none :results none +%% Change of sensitivity to disturbance with all three active damping strategies +figure; +tiledlayout(1, 3, 'TileSpacing', 'Compact', 'Padding', 'None'); + +ax1 = nexttile(); +hold on; +plot(freqs, abs(squeeze(freqresp(G_md_mid('d', 'fs'), freqs, 'Hz'))), 'k-'); +plot(freqs, abs(squeeze(freqresp(G_iff_md_mid('d', 'fs'), freqs, 'Hz'))), 'color', colors(1,:)); +plot(freqs, abs(squeeze(freqresp(G_rdc_md_mid('d', 'fs'), freqs, 'Hz'))), 'color', colors(2,:)); +plot(freqs, abs(squeeze(freqresp(G_dvf_md_mid('d', 'fs'), freqs, 'Hz'))), 'color', colors(3,:)); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +ylabel('Amplitude $d/f_{s}$ [m/N]'); xlabel('Frequency [Hz]'); +xticks([1e0, 1e1, 1e2]); + +ax2 = nexttile(); +hold on; +plot(freqs, abs(squeeze(freqresp(G_md_mid('d', 'ft'), freqs, 'Hz'))), 'k-'); +plot(freqs, abs(squeeze(freqresp(G_iff_md_mid('d', 'ft'), freqs, 'Hz'))), 'color', colors(1,:)); +plot(freqs, abs(squeeze(freqresp(G_rdc_md_mid('d', 'ft'), freqs, 'Hz'))), 'color', colors(2,:)); +plot(freqs, abs(squeeze(freqresp(G_dvf_md_mid('d', 'ft'), freqs, 'Hz'))), 'color', colors(3,:)); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +ylabel('Amplitude $d/f_{t}$ [m/N]'); xlabel('Frequency [Hz]'); +xticks([1e0, 1e1, 1e2]); + +ax3 = nexttile(); +hold on; +plot(freqs, abs(squeeze(freqresp(G_md_mid('d', 'xf'), freqs, 'Hz'))), 'k-', 'DisplayName', 'OL'); +plot(freqs, abs(squeeze(freqresp(G_iff_md_mid('d', 'xf'), freqs, 'Hz'))), 'color', colors(1,:), 'DisplayName', 'IFF'); +plot(freqs, abs(squeeze(freqresp(G_rdc_md_mid('d', 'xf'), freqs, 'Hz'))), 'color', colors(2,:), 'DisplayName', 'RDC'); +plot(freqs, abs(squeeze(freqresp(G_dvf_md_mid('d', 'xf'), freqs, 'Hz'))), 'color', colors(3,:), 'DisplayName', 'DVF'); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +ylabel('Amplitude $d/x_{f}$ [m/m]'); xlabel('Frequency [Hz]'); +xticks([1e0, 1e1, 1e2]); +legend('location', 'southeast', 'FontSize', 8, 'NumColumns', 1); + +linkaxes([ax1,ax2,ax3],'x'); +xlim([1, 500]); +#+end_src + +#+begin_src matlab :tangle no :exports results :results file replace +exportFig('figs/uniaxial_sensitivity_dist_active_damping.pdf', 'width', 'full', 'height', 'normal'); +#+end_src + +#+name: fig:uniaxial_sensitivity_dist_active_damping +#+caption: Change of sensitivity to disturbance with all three active damping strategies +#+RESULTS: +[[file:figs/uniaxial_sensitivity_dist_active_damping.png]] + +** Noise Budgeting after Active Damping +Cumulative Amplitude Spectrum of the distance $d$ with all three active damping techniques are compared in Figure ref:fig:uniaxial_cas_active_damping. +All three active damping methods are giving similar results (except the RDC which is a little bit worse for the stiff nano-hexapod). + +Compare to the open-loop case, the active damping helps to lower the vibrations induced by the nano-hexapod resonance. + +#+begin_src matlab :exports none :results none +%% Cumulative Amplitude Spectrum of the distance d with all three active damping techniques +figure; +tiledlayout(1, 3, 'TileSpacing', 'Compact', 'Padding', 'None'); + +ax1 = nexttile(); +hold on; +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_vc_mid('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_vc_mid('d', 'xf'), f, 'Hz'))).^2)))), '-', ... + 'color', 'black', 'DisplayName', 'OL'); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_iff_vc_mid('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_iff_vc_mid('d', 'xf'), f, 'Hz'))).^2)))), '-', ... + 'color', colors(1,:), 'DisplayName', 'IFF'); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_rdc_vc_mid('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_rdc_vc_mid('d', 'xf'), f, 'Hz'))).^2)))), '-', ... + 'color', colors(2,:), 'DisplayName', 'RDC'); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_dvf_vc_mid('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_dvf_vc_mid('d', 'xf'), f, 'Hz'))).^2)))), '-', ... + 'color', colors(3,:), 'DisplayName', 'DVF'); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +ylabel('CAS of $d$ [m]'); xlabel('Frequency [Hz]'); +xticks([1e0, 1e1, 1e2]); +title('$k_n = 0.01\,N/\mu m$') + +ax2 = nexttile(); +hold on; +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_md_mid('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_md_mid('d', 'xf'), f, 'Hz'))).^2)))), '-', ... + 'color', 'black', 'DisplayName', 'OL'); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_iff_md_mid('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_iff_md_mid('d', 'xf'), f, 'Hz'))).^2)))), '-', ... + 'color', colors(1,:), 'DisplayName', 'IFF'); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_rdc_md_mid('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_rdc_md_mid('d', 'xf'), f, 'Hz'))).^2)))), '-', ... + 'color', colors(2,:), 'DisplayName', 'RDC'); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_dvf_md_mid('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_dvf_md_mid('d', 'xf'), f, 'Hz'))).^2)))), '-', ... + 'color', colors(3,:), 'DisplayName', 'DVF'); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +xlabel('Frequency [Hz]'); set(gca, 'YTickLabel',[]); +xticks([1e0, 1e1, 1e2]); +title('$k_n = 1\,N/\mu m$') + +ax3 = nexttile(); +hold on; +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_pz_mid('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_pz_mid('d', 'xf'), f, 'Hz'))).^2)))), '-', ... + 'color', 'black', 'DisplayName', 'OL'); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_iff_pz_mid('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_iff_pz_mid('d', 'xf'), f, 'Hz'))).^2)))), '-', ... + 'color', colors(1,:), 'DisplayName', 'IFF'); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_rdc_pz_mid('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_rdc_pz_mid('d', 'xf'), f, 'Hz'))).^2)))), '-', ... + 'color', colors(2,:), 'DisplayName', 'RDC'); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_dvf_pz_mid('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_dvf_pz_mid('d', 'xf'), f, 'Hz'))).^2)))), '-', ... + 'color', colors(3,:), 'DisplayName', 'DVF'); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +xlabel('Frequency [Hz]'); set(gca, 'YTickLabel',[]); +xticks([1e0, 1e1, 1e2]); +title('$k_n = 100\,N/\mu m$') +legend('location', 'southwest', 'FontSize', 8, 'NumColumns', 1); + +linkaxes([ax1,ax2,ax3], 'xy') +xlim([1, 500]); +ylim([2e-10, 3e-6]) +#+end_src + +#+begin_src matlab :tangle no :exports results :results file replace +exportFig('figs/uniaxial_cas_active_damping.pdf', 'width', 'full', 'height', 'normal'); +#+end_src + +#+name: fig:uniaxial_cas_active_damping +#+caption: Comparison of the cumulative amplitude spectrum (CAS) of the distance $d$ for all three active damping techniques (OL in black, IFF in blue, RDC in red and DVF in yellow). +#+RESULTS: +[[file:figs/uniaxial_cas_active_damping.png]] + +** Obtained Damped Plant +The transfer functions from the plant input $f$ to the relative displacement $d$ while the active damping is implemented are shown in Figure ref:fig:uniaxial_damped_plant_three_active_damping_techniques. +All three active damping techniques yield similar damped plants. + +#+begin_src matlab :exports none :results none +%% Obtained damped transfer function from f to d for the three damping techniques +figure; +tiledlayout(3, 1, 'TileSpacing', 'Compact', 'Padding', 'None'); + +ax1 = nexttile([2,1]); +hold on; +plot(freqs, abs(squeeze(freqresp(G_md_mid('d', 'f'), freqs, 'Hz'))), 'k-', 'DisplayName', 'OL'); +plot(freqs, abs(squeeze(freqresp(G_iff_md_mid('d', 'f'), freqs, 'Hz'))), 'color', colors(1,:), 'DisplayName', 'IFF'); +plot(freqs, abs(squeeze(freqresp(G_rdc_md_mid('d', 'f'), freqs, 'Hz'))), 'color', colors(2,:), 'DisplayName', 'RDC'); +plot(freqs, abs(squeeze(freqresp(G_dvf_md_mid('d', 'f'), freqs, 'Hz'))), 'color', colors(3,:), 'DisplayName', 'DVF'); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +ylabel('Amplitude $d/f$ [m/N]'); set(gca, 'XTickLabel',[]); +legend('location', 'northwest', 'FontSize', 8, 'NumColumns', 1); + +ax2 = nexttile(); +hold on; +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_md_mid('d', 'f'), freqs, 'Hz')))), 'k-'); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_iff_md_mid('d', 'f'), freqs, 'Hz')))), 'color', colors(1,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_rdc_md_mid('d', 'f'), freqs, 'Hz')))), 'color', colors(2,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_dvf_md_mid('d', 'f'), freqs, 'Hz')))), 'color', colors(3,:)); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'lin'); +ylabel('Phase [deg]'); xlabel('Frequency [Hz]'); +yticks(-360:90:360); +ylim([-270, 90]); + +linkaxes([ax1,ax2],'x'); +xlim([1, 500]); +#+end_src + +#+begin_src matlab :tangle no :exports results :results file replace +exportFig('figs/uniaxial_damped_plant_three_active_damping_techniques.pdf', 'width', 'wide', 'height', 'tall'); +#+end_src + +#+name: fig:uniaxial_damped_plant_three_active_damping_techniques +#+caption: Obtained damped transfer function from f to d for the three damping techniques +#+RESULTS: +[[file:figs/uniaxial_damped_plant_three_active_damping_techniques.png]] + +The damped plants are shown in Figure ref:fig:uniaxial_damped_plant_change_sample_mass for all three techniques, with the three considered nano-hexapod stiffnesses and sample's masses. +#+begin_src matlab :exports none :results none +%% Damped plant - Robustness to change of sample's mass +figure; +tiledlayout(3, 3, 'TileSpacing', 'Compact', 'Padding', 'None'); + +ax1 = nexttile([2,1]); +hold on; +plot(freqs, abs(squeeze(freqresp(G_vc_mid('d', 'f'), freqs, 'Hz'))), '-', 'color', [0, 0, 0, 0.5], 'HandleVisibility', 'off'); +plot(freqs, abs(squeeze(freqresp(G_md_mid('d', 'f'), freqs, 'Hz'))), '-', 'color', [0, 0, 0, 0.5], 'HandleVisibility', 'off'); +plot(freqs, abs(squeeze(freqresp(G_pz_mid('d', 'f'), freqs, 'Hz'))), '-', 'color', [0, 0, 0, 0.5], 'HandleVisibility', 'off'); +plot(freqs, abs(squeeze(freqresp(G_iff_vc_light('d', 'f'), freqs, 'Hz'))), '-', 'color', colors(1,:), 'DisplayName', '$k_n = 0.01\,N/\mu m$'); +plot(freqs, abs(squeeze(freqresp(G_iff_vc_mid( 'd', 'f'), freqs, 'Hz'))), '-.', 'color', colors(1,:), 'HandleVisibility', 'off'); +plot(freqs, abs(squeeze(freqresp(G_iff_vc_heavy('d', 'f'), freqs, 'Hz'))), '--', 'color', colors(1,:), 'HandleVisibility', 'off'); +plot(freqs, abs(squeeze(freqresp(G_iff_md_light('d', 'f'), freqs, 'Hz'))), '-', 'color', colors(2,:), 'DisplayName', '$k_n = 1\,N/\mu m$'); +plot(freqs, abs(squeeze(freqresp(G_iff_md_mid( 'd', 'f'), freqs, 'Hz'))), '-.', 'color', colors(2,:), 'HandleVisibility', 'off'); +plot(freqs, abs(squeeze(freqresp(G_iff_md_heavy('d', 'f'), freqs, 'Hz'))), '--', 'color', colors(2,:), 'HandleVisibility', 'off'); +plot(freqs, abs(squeeze(freqresp(G_iff_pz_light('d', 'f'), freqs, 'Hz'))), '-', 'color', colors(3,:), 'DisplayName', '$k_n = 100\,N/\mu m$'); +plot(freqs, abs(squeeze(freqresp(G_iff_pz_mid( 'd', 'f'), freqs, 'Hz'))), '-.', 'color', colors(3,:), 'HandleVisibility', 'off'); +plot(freqs, abs(squeeze(freqresp(G_iff_pz_heavy('d', 'f'), freqs, 'Hz'))), '--', 'color', colors(3,:), 'HandleVisibility', 'off'); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +ylabel('Amplitude [m/N]'); set(gca, 'XTickLabel',[]); +title('IFF'); +ylim([5e-10, 1e-3]); +ldg = legend('location', 'northeast', 'FontSize', 8, 'NumColumns', 1); +ldg.ItemTokenSize = [20, 1]; + +ax2 = nexttile([2,1]); +hold on; +plot(freqs, abs(squeeze(freqresp(G_vc_mid('d', 'f'), freqs, 'Hz'))), '-', 'color', [0, 0, 0, 0.5]); +plot(freqs, abs(squeeze(freqresp(G_md_mid('d', 'f'), freqs, 'Hz'))), '-', 'color', [0, 0, 0, 0.5]); +plot(freqs, abs(squeeze(freqresp(G_pz_mid('d', 'f'), freqs, 'Hz'))), '-', 'color', [0, 0, 0, 0.5]); +plot(freqs, abs(squeeze(freqresp(G_rdc_vc_light('d', 'f'), freqs, 'Hz'))), '-', 'color', colors(1,:)); +plot(freqs, abs(squeeze(freqresp(G_rdc_vc_mid( 'd', 'f'), freqs, 'Hz'))), '-.', 'color', colors(1,:)); +plot(freqs, abs(squeeze(freqresp(G_rdc_vc_heavy('d', 'f'), freqs, 'Hz'))), '--', 'color', colors(1,:)); +plot(freqs, abs(squeeze(freqresp(G_rdc_md_light('d', 'f'), freqs, 'Hz'))), '-', 'color', colors(2,:)); +plot(freqs, abs(squeeze(freqresp(G_rdc_md_mid( 'd', 'f'), freqs, 'Hz'))), '-.', 'color', colors(2,:)); +plot(freqs, abs(squeeze(freqresp(G_rdc_md_heavy('d', 'f'), freqs, 'Hz'))), '--', 'color', colors(2,:)); +plot(freqs, abs(squeeze(freqresp(G_rdc_pz_light('d', 'f'), freqs, 'Hz'))), '-', 'color', colors(3,:)); +plot(freqs, abs(squeeze(freqresp(G_rdc_pz_mid( 'd', 'f'), freqs, 'Hz'))), '-.', 'color', colors(3,:)); +plot(freqs, abs(squeeze(freqresp(G_rdc_pz_heavy('d', 'f'), freqs, 'Hz'))), '--', 'color', colors(3,:)); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +set(gca, 'XTickLabel',[]); set(gca, 'YTickLabel',[]); +title('RDC'); +ylim([5e-10, 1e-3]); + +ax3 = nexttile([2,1]); +hold on; +plot(freqs, abs(squeeze(freqresp(G_vc_mid('d', 'f'), freqs, 'Hz'))), '-', 'color', [0, 0, 0, 0.5], 'HandleVisibility', 'off'); +plot(freqs, abs(squeeze(freqresp(G_md_mid('d', 'f'), freqs, 'Hz'))), '-', 'color', [0, 0, 0, 0.5], 'HandleVisibility', 'off'); +plot(freqs, abs(squeeze(freqresp(G_pz_mid('d', 'f'), freqs, 'Hz'))), '-', 'color', [0, 0, 0, 0.5], 'HandleVisibility', 'off'); +plot(freqs, abs(squeeze(freqresp(G_dvf_vc_light('d', 'f'), freqs, 'Hz'))), '-', 'color', colors(1,:), 'DisplayName', '$m_s = 1\,kg$'); +plot(freqs, abs(squeeze(freqresp(G_dvf_vc_mid( 'd', 'f'), freqs, 'Hz'))), '-.', 'color', colors(1,:), 'DisplayName', '$m_s = 25\,kg$'); +plot(freqs, abs(squeeze(freqresp(G_dvf_vc_heavy('d', 'f'), freqs, 'Hz'))), '--', 'color', colors(1,:), 'DisplayName', '$m_s = 50\,kg$'); +plot(freqs, abs(squeeze(freqresp(G_dvf_md_light('d', 'f'), freqs, 'Hz'))), '-', 'color', colors(2,:), 'HandleVisibility', 'off'); +plot(freqs, abs(squeeze(freqresp(G_dvf_md_mid( 'd', 'f'), freqs, 'Hz'))), '-.', 'color', colors(2,:), 'HandleVisibility', 'off'); +plot(freqs, abs(squeeze(freqresp(G_dvf_md_heavy('d', 'f'), freqs, 'Hz'))), '--', 'color', colors(2,:), 'HandleVisibility', 'off'); +plot(freqs, abs(squeeze(freqresp(G_dvf_pz_light('d', 'f'), freqs, 'Hz'))), '-', 'color', colors(3,:), 'HandleVisibility', 'off'); +plot(freqs, abs(squeeze(freqresp(G_dvf_pz_mid( 'd', 'f'), freqs, 'Hz'))), '-.', 'color', colors(3,:), 'HandleVisibility', 'off'); +plot(freqs, abs(squeeze(freqresp(G_dvf_pz_heavy('d', 'f'), freqs, 'Hz'))), '--', 'color', colors(3,:), 'HandleVisibility', 'off'); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +set(gca, 'XTickLabel',[]); set(gca, 'YTickLabel',[]); +title('DVF'); +ylim([5e-10, 1e-3]); +ldg = legend('location', 'northeast', 'FontSize', 8, 'NumColumns', 1); +ldg.ItemTokenSize = [20, 1]; + +ax1b = nexttile(); +hold on; +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_vc_mid('d', 'f'), freqs, 'Hz')))), '-', 'color', [0, 0, 0, 0.5]); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_md_mid('d', 'f'), freqs, 'Hz')))), '-', 'color', [0, 0, 0, 0.5]); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_pz_mid('d', 'f'), freqs, 'Hz')))), '-', 'color', [0, 0, 0, 0.5]); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_iff_vc_light('d', 'f'), freqs, 'Hz')))), '-', 'color', colors(1,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_iff_vc_mid( 'd', 'f'), freqs, 'Hz')))), '-.', 'color', colors(1,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_iff_vc_heavy('d', 'f'), freqs, 'Hz')))), '--', 'color', colors(1,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_iff_md_light('d', 'f'), freqs, 'Hz')))), '-', 'color', colors(2,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_iff_md_mid( 'd', 'f'), freqs, 'Hz')))), '-.', 'color', colors(2,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_iff_md_heavy('d', 'f'), freqs, 'Hz')))), '--', 'color', colors(2,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_iff_pz_light('d', 'f'), freqs, 'Hz')))), '-', 'color', colors(3,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_iff_pz_mid( 'd', 'f'), freqs, 'Hz')))), '-.', 'color', colors(3,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_iff_pz_heavy('d', 'f'), freqs, 'Hz')))), '--', 'color', colors(3,:)); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'lin'); +ylabel('Phase [deg]'); xlabel('Frequency [Hz]'); +xticks([1e0, 1e1, 1e2]); +yticks(-360:90:360); +ylim([-200, 20]); + +ax2b = nexttile(); +hold on; +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_vc_mid('d', 'f'), freqs, 'Hz')))), '-', 'color', [0, 0, 0, 0.5]); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_md_mid('d', 'f'), freqs, 'Hz')))), '-', 'color', [0, 0, 0, 0.5]); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_pz_mid('d', 'f'), freqs, 'Hz')))), '-', 'color', [0, 0, 0, 0.5]); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_rdc_vc_light('d', 'f'), freqs, 'Hz')))), '-', 'color', colors(1,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_rdc_vc_mid( 'd', 'f'), freqs, 'Hz')))), '-.', 'color', colors(1,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_rdc_vc_heavy('d', 'f'), freqs, 'Hz')))), '--', 'color', colors(1,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_rdc_md_light('d', 'f'), freqs, 'Hz')))), '-', 'color', colors(2,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_rdc_md_mid( 'd', 'f'), freqs, 'Hz')))), '-.', 'color', colors(2,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_rdc_md_heavy('d', 'f'), freqs, 'Hz')))), '--', 'color', colors(2,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_rdc_pz_light('d', 'f'), freqs, 'Hz')))), '-', 'color', colors(3,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_rdc_pz_mid( 'd', 'f'), freqs, 'Hz')))), '-.', 'color', colors(3,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_rdc_pz_heavy('d', 'f'), freqs, 'Hz')))), '--', 'color', colors(3,:)); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'lin'); +xlabel('Frequency [Hz]'); set(gca, 'YTickLabel',[]); +xticks([1e0, 1e1, 1e2]); +yticks(-360:90:360); +ylim([-200, 20]); + +ax3b = nexttile(); +hold on; +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_vc_mid('d', 'f'), freqs, 'Hz')))), '-', 'color', [0, 0, 0, 0.5]); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_md_mid('d', 'f'), freqs, 'Hz')))), '-', 'color', [0, 0, 0, 0.5]); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_pz_mid('d', 'f'), freqs, 'Hz')))), '-', 'color', [0, 0, 0, 0.5]); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_dvf_vc_light('d', 'f'), freqs, 'Hz')))), '-', 'color', colors(1,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_dvf_vc_mid( 'd', 'f'), freqs, 'Hz')))), '-.', 'color', colors(1,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_dvf_vc_heavy('d', 'f'), freqs, 'Hz')))), '--', 'color', colors(1,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_dvf_md_light('d', 'f'), freqs, 'Hz')))), '-', 'color', colors(2,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_dvf_md_mid( 'd', 'f'), freqs, 'Hz')))), '-.', 'color', colors(2,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_dvf_md_heavy('d', 'f'), freqs, 'Hz')))), '--', 'color', colors(2,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_dvf_pz_light('d', 'f'), freqs, 'Hz')))), '-', 'color', colors(3,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_dvf_pz_mid( 'd', 'f'), freqs, 'Hz')))), '-.', 'color', colors(3,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_dvf_pz_heavy('d', 'f'), freqs, 'Hz')))), '--', 'color', colors(3,:)); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'lin'); +xlabel('Frequency [Hz]'); set(gca, 'YTickLabel',[]); +xticks([1e0, 1e1, 1e2]); +yticks(-360:90:360); +ylim([-200, 20]); + +linkaxes([ax1,ax2,ax3,ax1b,ax2b,ax3b],'x'); +xlim([1, 1e3]); +#+end_src + +#+begin_src matlab :tangle no :exports results :results file replace +exportFig('figs/uniaxial_damped_plant_change_sample_mass.pdf', 'width', 'full', 'height', 'tall'); +#+end_src + +#+name: fig:uniaxial_damped_plant_change_sample_mass +#+caption: Damped plant $d/f$ - Robustness to change of sample's mass for all three active damping techniques. Grey curves are the open-loop (i.e. undamped) plants. +#+RESULTS: +[[file:figs/uniaxial_damped_plant_change_sample_mass.png]] + +** Robustness to change of payload's mass +The Root Locus for the three damping techniques are shown in Figure ref:fig:uniaxial_active_damping_robustness_mass_root_locus for three sample's mass (1kg, 25kg and 50kg). +The closed-loop poles are shown by the squares for a specific gain. + +We can see that having heavier samples yields larger damping for IFF and smaller damping for RDC and DVF. + +#+begin_src matlab :exports none +%% Active Damping Robustness to change of sample's mass - Root Locus for all three damping techniques with 3 different sample's masses +figure; +tiledlayout(1, 3, 'TileSpacing', 'Compact', 'Padding', 'None'); + +%% Integral Force Feedback +ax1 = nexttile(); +hold on; +% Light Sample +plot(real(pole(G_md_light('fm', 'f'))), imag(pole(G_md_light('fm', 'f'))), 'x', 'color', colors(1,:), ... + 'HandleVisibility', 'off'); +plot(real(zero(G_md_light('fm', 'f'))), imag(zero(G_md_light('fm', 'f'))), 'o', 'color', colors(1,:), ... + 'HandleVisibility', 'off'); +for g = logspace(1,4,100) + clpoles = pole(feedback(G_md_light('fm', 'f'), g/s, +1)); + plot(real(clpoles), imag(clpoles), '.', 'color', colors(1,:), ... + 'HandleVisibility', 'off'); +end +clpoles = pole(feedback(G_md_light('fm', 'f'), K_iff_md, +1)); +plot(real(clpoles), imag(clpoles), 'square', 'color', colors(1,:), ... + 'DisplayName', '$m_s = 1\,kg$'); + +% Mid Sample +plot(real(pole(G_md_mid('fm', 'f'))), imag(pole(G_md_mid('fm', 'f'))), 'x', 'color', colors(2,:), ... + 'HandleVisibility', 'off'); +plot(real(zero(G_md_mid('fm', 'f'))), imag(zero(G_md_mid('fm', 'f'))), 'o', 'color', colors(2,:), ... + 'HandleVisibility', 'off'); +for g = logspace(1,4,100) + clpoles = pole(feedback(G_md_mid('fm', 'f'), g/s, +1)); + plot(real(clpoles), imag(clpoles), '.', 'color', colors(2,:), ... + 'HandleVisibility', 'off'); +end +clpoles = pole(feedback(G_md_mid('fm', 'f'), K_iff_md, +1)); +plot(real(clpoles), imag(clpoles), 'square', 'color', colors(2,:), ... + 'DisplayName', '$m_s = 25\,kg$'); + +% Heavy Sample +plot(real(pole(G_md_heavy('fm', 'f'))), imag(pole(G_md_heavy('fm', 'f'))), 'x', 'color', colors(3,:), ... + 'HandleVisibility', 'off'); +plot(real(zero(G_md_heavy('fm', 'f'))), imag(zero(G_md_heavy('fm', 'f'))), 'o', 'color', colors(3,:), ... + 'HandleVisibility', 'off'); +for g = logspace(1,4,100) + clpoles = pole(feedback(G_md_heavy('fm', 'f'), g/s, +1)); + plot(real(clpoles), imag(clpoles), '.', 'color', colors(3,:), ... + 'HandleVisibility', 'off'); +end +clpoles = pole(feedback(G_md_heavy('fm', 'f'), K_iff_md, +1)); +plot(real(clpoles), imag(clpoles), 'square', 'color', colors(3,:), ... + 'DisplayName', '$m_s = 50\,kg$'); +hold off; +axis square; +xlabel('Real Part'); ylabel('Imaginary Part'); +title('IFF') +ldg = legend('location', 'northwest', 'FontSize', 8, 'NumColumns', 1); +ldg.ItemTokenSize = [10, 1]; + +%% Relative Damping Control +ax2 = nexttile(); +hold on; +% Light Sample +plot(real(pole(G_md_light('dL', 'f'))), imag(pole(G_md_light('dL', 'f'))), 'x', 'color', colors(1,:), ... + 'DisplayName', '$m_s = 1\,kg$'); +plot(real(zero(G_md_light('dL', 'f'))), imag(zero(G_md_light('dL', 'f'))), 'o', 'color', colors(1,:), ... + 'HandleVisibility', 'off'); +for g = logspace(2,5,100) + clpoles = pole(feedback(G_md_light('dL', 'f'), -g*s, +1)); + plot(real(clpoles), imag(clpoles), '.', 'color', colors(1,:), ... + 'HandleVisibility', 'off'); +end +clpoles = pole(feedback(G_md_light('dL', 'f'), K_rdc_md, +1)); +plot(real(clpoles), imag(clpoles), 'square', 'color', colors(1,:), ... + 'HandleVisibility', 'off'); + +% Mid Sample +plot(real(pole(G_md_mid('dL', 'f'))), imag(pole(G_md_mid('dL', 'f'))), 'x', 'color', colors(2,:), ... + 'DisplayName', '$m_s = 25\,kg$'); +plot(real(zero(G_md_mid('dL', 'f'))), imag(zero(G_md_mid('dL', 'f'))), 'o', 'color', colors(2,:), ... + 'HandleVisibility', 'off'); +for g = logspace(2,5,100) + clpoles = pole(feedback(G_md_mid('dL', 'f'), -g*s, +1)); + plot(real(clpoles), imag(clpoles), '.', 'color', colors(2,:), ... + 'HandleVisibility', 'off'); +end +clpoles = pole(feedback(G_md_mid('dL', 'f'), K_rdc_md, +1)); +plot(real(clpoles), imag(clpoles), 'square', 'color', colors(2,:), ... + 'HandleVisibility', 'off'); + +% Heavy Sample +plot(real(pole(G_md_heavy('dL', 'f'))), imag(pole(G_md_heavy('dL', 'f'))), 'x', 'color', colors(3,:), ... + 'DisplayName', '$m_s = 50\,kg$'); +plot(real(zero(G_md_heavy('dL', 'f'))), imag(zero(G_md_heavy('dL', 'f'))), 'o', 'color', colors(3,:), ... + 'HandleVisibility', 'off'); +for g = logspace(2,5,100) + clpoles = pole(feedback(G_md_heavy('dL', 'f'), -g*s, +1)); + plot(real(clpoles), imag(clpoles), '.', 'color', colors(3,:), ... + 'HandleVisibility', 'off'); +end +clpoles = pole(feedback(G_md_heavy('dL', 'f'), K_rdc_md, +1)); +plot(real(clpoles), imag(clpoles), 'square', 'color', colors(3,:), ... + 'HandleVisibility', 'off'); +hold off; +axis square; +xlabel('Real Part'); ylabel('Imaginary Part'); +title('RDC'); + +%% Direct Velocity Feedback +ax3 = nexttile(); +hold on; +% Light Sample +plot(real(pole(G_md_light('vn', 'f'))), imag(pole(G_md_light('vn', 'f'))), 'x', 'color', colors(1,:), ... + 'DisplayName', '$m_s = 1\,kg$'); +plot(real(zero(G_md_light('vn', 'f'))), imag(zero(G_md_light('vn', 'f'))), 'o', 'color', colors(1,:), ... + 'HandleVisibility', 'off'); +for g = logspace(2,5,100) + clpoles = pole(feedback(G_md_light('vn', 'f'), -g, +1)); + plot(real(clpoles), imag(clpoles), '.', 'color', colors(1,:), ... + 'HandleVisibility', 'off'); +end +clpoles = pole(feedback(G_md_light('vn', 'f'), K_dvf_md, +1)); +plot(real(clpoles), imag(clpoles), 'square', 'color', colors(1,:), ... + 'HandleVisibility', 'off'); + +% Mid Sample +plot(real(pole(G_md_mid('vn', 'f'))), imag(pole(G_md_mid('vn', 'f'))), 'x', 'color', colors(2,:), ... + 'DisplayName', '$m_s = 25\,kg$'); +plot(real(zero(G_md_mid('vn', 'f'))), imag(zero(G_md_mid('vn', 'f'))), 'o', 'color', colors(2,:), ... + 'HandleVisibility', 'off'); +for g = logspace(2,5,100) + clpoles = pole(feedback(G_md_mid('vn', 'f'), -g, +1)); + plot(real(clpoles), imag(clpoles), '.', 'color', colors(2,:), ... + 'HandleVisibility', 'off'); +end +clpoles = pole(feedback(G_md_mid('vn', 'f'), K_dvf_md, +1)); +plot(real(clpoles), imag(clpoles), 'square', 'color', colors(2,:), ... + 'HandleVisibility', 'off'); + +% Heavy Sample +plot(real(pole(G_md_heavy('vn', 'f'))), imag(pole(G_md_heavy('vn', 'f'))), 'x', 'color', colors(3,:), ... + 'DisplayName', '$m_s = 50\,kg$'); +plot(real(zero(G_md_heavy('vn', 'f'))), imag(zero(G_md_heavy('vn', 'f'))), 'o', 'color', colors(3,:), ... + 'HandleVisibility', 'off'); +for g = logspace(2,5,100) + clpoles = pole(feedback(G_md_heavy('vn', 'f'), -g, +1)); + plot(real(clpoles), imag(clpoles), '.', 'color', colors(3,:), ... + 'HandleVisibility', 'off'); +end +clpoles = pole(feedback(G_md_heavy('vn', 'f'), K_dvf_md, +1)); +plot(real(clpoles), imag(clpoles), 'square', 'color', colors(3,:), ... + 'HandleVisibility', 'off'); +hold off; +axis square; +xlabel('Real Part'); ylabel('Imaginary Part'); +title('DVF'); + +linkaxes([ax1,ax2,ax3],'xy'); +xlim([-300, 0]); ylim([0, 300]); +#+end_src + +#+begin_src matlab :tangle no :exports results :results file replace +exportFig('figs/uniaxial_active_damping_robustness_mass_root_locus.pdf', 'width', 'full', 'height', 'normal'); +#+end_src + +#+name: fig:uniaxial_active_damping_robustness_mass_root_locus +#+caption: Active Damping Robustness to change of sample's mass - Root Locus for all three damping techniques with 3 different sample's masses +#+RESULTS: +[[file:figs/uniaxial_active_damping_robustness_mass_root_locus.png]] + +** Conclusion + +#+begin_important +Conclusions for Active Damping: +- All three active damping techniques yields good damping (Figure ref:fig:uniaxial_root_locus_damping_techniques) and similar remaining vibrations (Figure ref:fig:uniaxial_cas_active_damping) +- The obtained damped plants (Figure ref:fig:uniaxial_damped_plant_change_sample_mass) are equivalent for the three active damping techniques +- Which one to be used will be determined with the use of more accurate models and will depend on which is the easiest to implement in practice +#+end_important + +#+name: tab:comp_active_damping +#+caption: Comparison of active damping strategies +#+attr_latex: :environment tabularx :width \linewidth :align Xccc +#+attr_latex: :center t :booktabs t :font \scriptsize +| | *IFF* | *RDC* | *DVF* | +|---------------------+-----------------------------+---------------------------+---------------------------------| +| *Sensor* | Force sensor | Relative motion sensor | Inertial sensor | +|---------------------+-----------------------------+---------------------------+---------------------------------| +| *Damping* | Up to critical | Up to critical | Up to Critical | +|---------------------+-----------------------------+---------------------------+---------------------------------| +| *Robustness* | Requires collocation | Requires collocation | Impacted by geophone resonances | +|---------------------+-----------------------------+---------------------------+---------------------------------| +| $f_s$ *Disturbance* | $\nearrow$ at low frequency | $\searrow$ near resonance | $\searrow$ near resonance | +| $f_t$ *Disturbance* | $\searrow$ near resonance | $\nearrow$ near resonance | $\searrow$ near resonance | +| $x_f$ *Disturbance* | $\nearrow$ at low frequency | $\searrow$ near resonance | $\nearrow$ at low frequency | + +* Position Feedback Controller +:PROPERTIES: +:HEADER-ARGS:matlab+: :tangle matlab/uniaxial_6_hac_lac.m +:END: +<> +** Introduction :ignore: +The High Authority Control - Low Authority Control (HAC-LAC) architecture is shown in Figure ref:fig:uniaxial_hac_lac_architecture. +It corresponds to a /two step/ control strategy: +- First, an active damping controller $\bm{K}_{\textsc{LAC}}$ is implemented (see Section ref:sec:uniaxial_active_damping). + It allows to reduce the vibration level, and it also makes the damped plant (transfer function from $u^{\prime}$ to $y$) easier to control than the undamped plant (transfer function from $u$ to $y$). +- Then, a position controller $\bm{K}_{\textsc{HAC}}$ is implemented. + +#+begin_src latex :file uniaxial_hac_lac_architecture.pdf :results none +\begin{tikzpicture} + % Blocs + \node[block={3.0cm}{3.0cm}] (P) {Plant}; + \coordinate[] (input) at ($(P.south west)!0.5!(P.north west)$); + \coordinate[] (outputH) at ($(P.south east)!0.2!(P.north east)$); + \coordinate[] (outputL) at ($(P.south east)!0.8!(P.north east)$); + + \node[block, above=0.4 of P] (Klac) {$\bm{K}_{\textsc{LAC}}$}; + \node[addb, left=0.6 of input] (addF) {}; + \node[block, left=1.0 of addF] (Khac) {$\bm{K}_{\textsc{HAC}}$}; + \node[addb={+}{}{}{}{-}, left=0.6 of Khac] (subr) {}; + + % Connections and labels + \draw[->] (outputL) -- ++(0.6, 0) coordinate(eastlac) |- (Klac.east); + \node[above right] at (outputL){$y^{\prime}$}; + \draw[->] (Klac.west) -| (addF.north); + \draw[->] (addF.east) -- (input) node[above left]{$u$}; + + \draw[<-] (subr.west) --node[midway, above]{$r$} ++(-0.8, 0); + \draw[->] (outputH) -- ++(1.6, 0); + \draw[->] ($(outputH) + (1.2, 0)$)node[branch]{} node[above]{$y$} -- ++(0, -1.2) -| (subr.south); + \draw[->] (subr.east) -- (Khac.west) node[above left]{$\epsilon$}; + \draw[->] (Khac.east) -- (addF.west) node[above left=0 and 0.2]{$u^{\prime}$}; + + \begin{scope}[on background layer] + \node[fit={(Klac.north-|eastlac) (addF.west|-P.south)}, fill=black!20!white, draw, dashed, inner sep=6pt] (Pi) {}; + \node[anchor={north west}] at (Pi.north west){\small Damped Plant}; + \end{scope} +\end{tikzpicture} +#+end_src + +Combined with the uniaxial model, it is shown in Figure ref:fig:uniaxial_hac_lac_model. + +#+begin_src latex :file uniaxial_hac_lac_model.pdf :results silent +\begin{tikzpicture} + % ==================== + % Parameters + % ==================== + \def\massw{2.2} % Width of the masses + \def\massh{0.8} % Height of the masses + \def\spaceh{1.2} % Height of the springs/dampers + \def\dispw{0.4} % Width of the dashed line for the displacement + \def\disph{0.3} % Height of the arrow for the displacements + \def\bracs{0.05} % Brace spacing vertically + \def\brach{-12pt} % Brace shift horizontaly + \def\fsensh{0.2} % Height of the force sensor + \def\velsize{0.2} % Size of the velocity sensor + % ==================== + + % IFF + % ==================== + % Ground + % ==================== + \draw (-0.5*\massw, 0) -- (0.5*\massw, 0); + \draw[dashed] (0.5*\massw, 0) -- ++(\dispw, 0); + \draw[->, color=colorpurple] (0.5*\massw+0.5*\dispw, 0) -- ++(0, 2*\disph) node[right, color=colorpurple]{$x_{f}$}; + % ==================== + + % ==================== + % Granite + \begin{scope}[shift={(0, 0)}] + % Mass + \draw[fill=white] (-0.5*\massw, \spaceh) rectangle (0.5*\massw, \spaceh+\massh) node[pos=0.5]{$m_{g}$}; + + % Spring, Damper, and Actuator + \draw[spring] (-0.4*\massw, 0) -- (-0.4*\massw, \spaceh) node[midway, left=0.1]{$k_{g}$}; + \draw[damper] (0, 0) -- ( 0, \spaceh) node[midway, left=0.2]{$c_{g}$}; + + % Legend + \draw[decorate, decoration={brace, amplitude=8pt}, xshift=\brach] % + (-0.5*\massw, \bracs) -- (-0.5*\massw, \spaceh+\massh-\bracs) node[midway,rotate=90,anchor=south,yshift=10pt]{Granite}; + + % Displacements + \draw[dashed] (0.5*\massw, \spaceh+\massh) -- ++(7.5*\dispw, 0) coordinate(xg); + \end{scope} + % ==================== + + + % ==================== + % Stages + \begin{scope}[shift={(0, \spaceh+\massh)}] + % Mass + \draw[fill=white] (-0.5*\massw, \spaceh) rectangle (0.5*\massw, \spaceh+\massh) node[pos=0.5]{$m_{t}$}; + + % Spring, Damper, and Actuator + \draw[spring] (-0.4*\massw, 0) -- (-0.4*\massw, \spaceh) node[midway, left=0.1]{$k_{t}$}; + \draw[damper] (0, 0) -- ( 0, \spaceh) node[midway, left=0.2]{$c_{t}$}; + \draw[actuator={0.45}{0.2}{colorpurple}] ( 0.3*\massw, 0) -- (0.3*\massw, \spaceh) node[midway, right=0.1, color=colorpurple](ft){$f_{t}$}; + + % Legend + \draw[decorate, decoration={brace, amplitude=8pt}, xshift=\brach] % + (-0.5*\massw, \bracs) -- (-0.5*\massw, \spaceh+\massh-\bracs) node[midway,rotate=90,anchor=south,yshift=10pt]{$T_y$/$R_y$/$R_z$}; + \end{scope} + % ==================== + + + % ==================== + % Hexapod + \begin{scope}[shift={(0, 2*(\spaceh+\massh))}] + % Mass + \draw[fill=white] (-0.5*\massw, \spaceh) rectangle (0.5*\massw, \spaceh+\massh) node[pos=0.5]{$m_h$}; + + % Spring, Damper, and Actuator + \draw[spring] (-0.4*\massw, 0) -- (-0.4*\massw, \spaceh) node[midway, left=0.1]{$k_h$}; + \draw[damper] (0, 0) -- ( 0, \spaceh) node[midway, left=0.2]{$c_h$}; + + % Legend + \draw[decorate, decoration={brace, amplitude=8pt}, xshift=\brach] % + (-0.5*\massw, \bracs) -- (-0.5*\massw, \spaceh+\massh-\bracs) node[midway,rotate=90,anchor=south,yshift=10pt]{$\mu\text{-hexa}$}; + \end{scope} + % ==================== + + + % ==================== + % NASS + \begin{scope}[shift={(0, 3*(\spaceh+\massh))}] + % Mass + \draw[fill=white] (-0.5*\massw, \spaceh) rectangle (0.5*\massw, \spaceh+\massh) node[pos=0.5]{$m_{n}$}; + + % Force Sensor + \node[forcesensor={\massw}{\fsensh}{colorblue}] (fsensn) at (0, \spaceh-\fsensh){}; + \node[right, color=colorblue] (fn) at (fsensn.east) {$f_n$}; + + % Spring, Damper, and Actuator + \draw[spring] (-0.4*\massw, 0) -- (-0.4*\massw, \spaceh-\fsensh) node[midway, left=0.1]{$k_{n}$}; + \draw[damper] (0, 0) -- ( 0, \spaceh-\fsensh) node[midway, left=0.2]{$c_{n}$}; + \draw[actuator={0.4}{0.2}{black}] ( 0.3*\massw, 0) -- ( 0.3*\massw, \spaceh-\fsensh) node[midway, right=0.1](f){$f$}; + + % Legend + \draw[decorate, decoration={brace, amplitude=8pt}, xshift=\brach] % + (-0.5*\massw, \bracs) -- (-0.5*\massw, \spaceh+\massh-\bracs) node[midway,rotate=90,anchor=south,yshift=10pt]{$\nu\text{-hexa}$}; + + % Displacements + \draw[dashed] (0.5*\massw, \spaceh+\massh) -- ++(7.5*\dispw, 0) coordinate(xnpos); + \end{scope} + % ==================== + + % ==================== + % sample + \begin{scope}[shift={(0, 4*(\spaceh+\massh))}] + % Mass + \draw[fill=white] (-0.3*\massw, 0) rectangle (0.3*\massw, \massh) node[pos=0.5]{$m_{s}$}; + + % External Force + \draw[->, color=colorpurple] (0, \massh) node[]{$\bullet$} -- ++(0, 0.5*\massh) node[right, color=colorpurple]{$f_s$}; + \end{scope} + % ==================== + + % Measured displacement + \draw[<->, dashed, draw=colorred] ($(xg)+(-0.1, 0)$) -- node[left, color=colorred](d){$d$} ($(xnpos)+(-0.1, 0)$); + + % ==================== + % IFF Control + \node[block={2em}{2em}, right=1.0 of fn, color=colorblue, fill=colorblue!10!white] (iff) {$K_{\textsc{IFF}}$}; + \node[addb, right=0.5 of f.east] (ctrladd) {}; + \node[block={2em}{2em}, color=colorred, fill=colorred!10!white] (Khac) at (ctrladd|-d) {$K_{\textsc{HAC}}$}; + + \draw[->, draw=colorblue] (fn.east) -- (iff.west); + \draw[->, draw=colorblue] (iff.south) |- (ctrladd.east); + \draw[->] (ctrladd.west) -- (f.east); + + \draw[->, draw=colorred] (d.west) -- (Khac.east); + \draw[->, draw=colorred] (Khac.north) -- (ctrladd.south) node[below right, color=colorred]{$f^{\prime}$}; + % ==================== +\end{tikzpicture} +#+end_src + +#+name: fig:uniaxial_hac_lac +#+caption: High Authority Control - Low Authority Control (HAC-LAC) +#+begin_figure +#+attr_latex: :caption \subcaption{\label{fig:uniaxial_hac_lac_architecture}Typical HAC-LAC Architecture} +#+attr_latex: :options {0.54\textwidth} +#+begin_subfigure +#+attr_latex: :width 1.0\linewidth +[[file:figs/uniaxial_hac_lac_architecture.png]] +#+end_subfigure +#+attr_latex: :options {0.45\textwidth} +#+attr_latex: :caption \subcaption{\label{fig:uniaxial_hac_lac_model}Uniaxial model with HAC-LAC strategy} +#+begin_subfigure +#+attr_latex: :scale 1 +[[file:figs/uniaxial_hac_lac_model.png]] +#+end_subfigure +#+end_figure + + +** Matlab Init :noexport:ignore: +#+begin_src matlab :tangle no :exports none :results silent :noweb yes :var current_dir=(file-name-directory buffer-file-name) +<> +#+end_src + +#+begin_src matlab :exports none :results silent :noweb yes +<> +#+end_src + +#+begin_src matlab :tangle no :noweb yes +<> +#+end_src + +#+begin_src matlab :eval no :noweb yes +<> +#+end_src + +#+begin_src matlab :noweb yes +<> +#+end_src + +#+begin_src matlab +%% Frequency Vector [Hz] +freqs = logspace(0, 3, 1000); +#+end_src + +#+begin_src matlab +%% Load the PSD of disturbances +load('uniaxial_disturbance_psd.mat', 'f', 'psd_ft', 'psd_xf'); +#+end_src + +#+begin_src matlab +%% Load Plants Dynamics +load('uniaxial_plants.mat', 'G_vc_light', 'G_md_light', 'G_pz_light', ... + 'G_vc_mid', 'G_md_mid', 'G_pz_mid', ... + 'G_vc_heavy', 'G_md_heavy', 'G_pz_heavy'); +#+end_src + +#+begin_src matlab +%% Load Damped Plants +load('uniaxial_damped_plants.mat', 'G_iff_vc_light', 'G_iff_md_light', 'G_iff_pz_light', ... + 'G_rdc_vc_light', 'G_rdc_md_light', 'G_rdc_pz_light', ... + 'G_dvf_vc_light', 'G_dvf_md_light', 'G_dvf_pz_light', ... + 'G_iff_vc_mid', 'G_iff_md_mid', 'G_iff_pz_mid', ... + 'G_rdc_vc_mid', 'G_rdc_md_mid', 'G_rdc_pz_mid', ... + 'G_dvf_vc_mid', 'G_dvf_md_mid', 'G_dvf_pz_mid', ... + 'G_iff_vc_heavy', 'G_iff_md_heavy', 'G_iff_pz_heavy', ... + 'G_rdc_vc_heavy', 'G_rdc_md_heavy', 'G_rdc_pz_heavy', ... + 'G_dvf_vc_heavy', 'G_dvf_md_heavy', 'G_dvf_pz_heavy'); +#+end_src + +** Damped Plant Dynamics +As was shown in Section ref:sec:uniaxial_active_damping, all three proposed active damping techniques yield similar damping plants. +Therefore, /Integral Force Feedback/ will be used in this section to study the HAC-LAC performances. + +The obtained damped plants for the three nano-hexapod stiffnesses are shown in Figure ref:fig:uniaxial_hac_iff_damped_plants_masses. + +#+begin_src matlab :exports none :results none +%% Damped plant - Robustness to change of sample's mass +figure; +tiledlayout(3, 3, 'TileSpacing', 'Compact', 'Padding', 'None'); + +ax1 = nexttile([2,1]); +hold on; +plot(freqs, abs(squeeze(freqresp(G_iff_vc_light('d', 'f'), freqs, 'Hz'))), '-', 'DisplayName', '$m_s = 1\,kg$'); +plot(freqs, abs(squeeze(freqresp(G_iff_vc_mid( 'd', 'f'), freqs, 'Hz'))), '-', 'DisplayName', '$m_s = 25\,kg$'); +plot(freqs, abs(squeeze(freqresp(G_iff_vc_heavy('d', 'f'), freqs, 'Hz'))), '-', 'DisplayName', '$m_s = 50\,kg$'); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +ylabel('Amplitude [m/N]'); set(gca, 'XTickLabel',[]); +title('$k_n = 0.01\,N/\mu m$'); +ylim([5e-10, 1e-3]); +ldg = legend('location', 'northeast', 'FontSize', 8, 'NumColumns', 1); +ldg.ItemTokenSize = [20, 1]; + +ax2 = nexttile([2,1]); +hold on; +plot(freqs, abs(squeeze(freqresp(G_iff_md_light('d', 'f'), freqs, 'Hz')))); +plot(freqs, abs(squeeze(freqresp(G_iff_md_mid( 'd', 'f'), freqs, 'Hz')))); +plot(freqs, abs(squeeze(freqresp(G_iff_md_heavy('d', 'f'), freqs, 'Hz')))); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +set(gca, 'XTickLabel',[]); set(gca, 'YTickLabel',[]); +title('$k_n = 1\,N/\mu m$'); +ylim([5e-10, 1e-3]); + +ax3 = nexttile([2,1]); +hold on; +plot(freqs, abs(squeeze(freqresp(G_iff_pz_light('d', 'f'), freqs, 'Hz')))); +plot(freqs, abs(squeeze(freqresp(G_iff_pz_mid( 'd', 'f'), freqs, 'Hz')))); +plot(freqs, abs(squeeze(freqresp(G_iff_pz_heavy('d', 'f'), freqs, 'Hz')))); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +set(gca, 'XTickLabel',[]); set(gca, 'YTickLabel',[]); +title('$k_n = 100\,N/\mu m$'); +ylim([5e-10, 1e-3]); + +ax1b = nexttile(); +hold on; +plot(freqs, unwrap(180/pi*angle(squeeze(freqresp(G_iff_vc_light('d', 'f'), freqs, 'Hz'))))); +plot(freqs, unwrap(180/pi*angle(squeeze(freqresp(G_iff_vc_mid( 'd', 'f'), freqs, 'Hz'))))); +plot(freqs, unwrap(180/pi*angle(squeeze(freqresp(G_iff_vc_heavy('d', 'f'), freqs, 'Hz'))))); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'lin'); +ylabel('Phase [deg]'); xlabel('Frequency [Hz]'); +xticks([1e0, 1e1, 1e2]); +yticks(-360:90:360); +ylim([-200, 20]); + +ax2b = nexttile(); +hold on; +plot(freqs, unwrap(180/pi*angle(squeeze(freqresp(G_iff_md_light('d', 'f'), freqs, 'Hz'))))); +plot(freqs, unwrap(180/pi*angle(squeeze(freqresp(G_iff_md_mid( 'd', 'f'), freqs, 'Hz'))))); +plot(freqs, unwrap(180/pi*angle(squeeze(freqresp(G_iff_md_heavy('d', 'f'), freqs, 'Hz'))))); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'lin'); +xlabel('Frequency [Hz]'); set(gca, 'YTickLabel',[]); +xticks([1e0, 1e1, 1e2]); +yticks(-360:90:360); +ylim([-200, 20]); + +ax3b = nexttile(); +hold on; +plot(freqs, unwrap(180/pi*angle(squeeze(freqresp(G_iff_pz_light('d', 'f'), freqs, 'Hz'))))); +plot(freqs, unwrap(180/pi*angle(squeeze(freqresp(G_iff_pz_mid( 'd', 'f'), freqs, 'Hz'))))); +plot(freqs, unwrap(180/pi*angle(squeeze(freqresp(G_iff_pz_heavy('d', 'f'), freqs, 'Hz'))))); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'lin'); +xlabel('Frequency [Hz]'); set(gca, 'YTickLabel',[]); +xticks([1e0, 1e1, 1e2]); +yticks(-360:90:360); +ylim([-200, 20]); + +linkaxes([ax1,ax2,ax3,ax1b,ax2b,ax3b],'x'); +xlim([1, 1e3]); +#+end_src + +#+begin_src matlab :tangle no :exports results :results file replace +exportFig('figs/uniaxial_hac_iff_damped_plants_masses.pdf', 'width', 'full', 'height', 'tall'); +#+end_src + +#+name: fig:uniaxial_hac_iff_damped_plants_masses +#+caption: Obtained damped plant using Integral Force Feedback for three sample's masses +#+RESULTS: +[[file:figs/uniaxial_hac_iff_damped_plants_masses.png]] + +** Position Feedback Controller +The objective now is to design a position feedback controller for each of the three nano-hexapods that are robust to the change of sample's mass. + +The required feedback bandwidth was approximately determined un Section ref:sec:uniaxial_noise_budgeting: +- $\approx 10\,\text{Hz}$ for the soft nano-hexapod ($k_n = 0.01\,N/\mu m$). + Near this frequency, the plants are equivalent to a mass line. + The gain of the mass line can vary up to a fact $\approx 5$ (suspended mass from $16\,kg$ up to $65\,kg$). + This mean that the designed controller will need to have large gain margins to be robust to the change of sample's mass. +- $\approx 50\,\text{Hz}$ for the relatively stiff nano-hexapod ($k_n = 1\,N/\mu m$). + Similarly to the soft nano-hexapod, the plants near the crossover frequency are equivalent to a mass line. + It will be probably easier to have a little bit more bandwidth in this configuration to be further away from the nano-hexapod suspension mode. +- $\approx 100\,\text{Hz}$ for the stiff nano-hexapod ($k_n = 100\,N/\mu m$). + Contrary to the two first nano-hexapod stiffnesses, here the plants have more complex dynamics near the wanted crossover frequency. + The micro-station is not stiff enough to have a clear stiffness line at this frequency. + Therefore, there are both a change of phase and gain depending on the sample's mass. + This makes the robust design of the controller a little bit more complicated. + + +Position feedback controllers are designed for each nano-hexapod such that it is stable for all considered sample masses with similar stability margins (see Nyquist plots in Figure ref:fig:uniaxial_nyquist_hac). +These high authority controllers are generally composed of a two integrators at low frequency for disturbance rejection, a lead to increase the phase margin near the crossover frequency and a low pass filter to increase the robustness to high frequency dynamics. +The loop gains for the three nano-hexapod are shown in Figure ref:fig:uniaxial_loop_gain_hac. +We can see that: +- for the soft and moderately stiff nano-hexapod, the crossover frequency varies a lot with the sample mass. + This is due to the fact that the crossover frequency corresponds to the mass line of the plant. +- for the stiff nano-hexapod, the obtained crossover frequency is not at high as what was estimated necessary. + The crossover frequency in that case is close to the stiffness line of the plant, which makes the robust design of the controller easier. + +Note that these controller were quickly tuned by hand and not designed using any optimization methods. +The goal is just to have a first estimation of the attainable performances. + +#+begin_src matlab :exports none +%% High Authority Controller - Soft Nano-Hexapod +% Lead to increase phase margin +a = 5; % Amount of phase lead / width of the phase lead / high frequency gain +wc = 2*pi*20; % Frequency with the maximum phase lead [rad/s] +H_lead = (1 + s/(wc/sqrt(a)))/(1 + s/(wc*sqrt(a))); + +% Low Pass filter to increase robustness +H_lpf = 1/(1 + s/2/pi/200); + +% Added integrator at low frequency +H_int = (s + 2*pi*5)/(s + 2*pi*0.01); + +% High Authority Controller +K_hac_vc = 4e5 * ... % Gain + H_lead * ... % Lead + H_int * ... % Integrator + H_lpf; % LPF +K_hac_vc.InputName = {'d'}; +K_hac_vc.OutputName = {'f'}; +#+end_src + +#+begin_src matlab :exports none +%% High Authority Controller - Mid Stiffness Nano-Hexapod +% Integrator as low frequency +H_int = (s + 2*pi*10)/(s + 2*pi*0.01) * (s + 2*pi*20)/(s + 2*pi*0.01); + +% Lead to increase phase margin +a = 4; % Amount of phase lead / width of the phase lead / high frequency gain +wc = 2*pi*70; % Frequency with the maximum phase lead [rad/s] + +H_lead = (1 + s/(wc/sqrt(a)))/(1 + s/(wc*sqrt(a))); + +% Low Pass filter to increase robustness +H_lpf = 1/(1 + s/2/pi/300); + +% High Authority Controller +K_hac_md = 3e6 * ... % Gain + H_lead * ... % Lead + H_lpf * ... % Low Pass Filter + H_int; % Integrator +K_hac_md.InputName = {'d'}; +K_hac_md.OutputName = {'f'}; +#+end_src + +#+begin_src matlab :exports none +%% High Authority Controller - Stiff Nano-Hexapod +% Integrator as low frequency +H_int = 1/(s + 2*pi*0.01) * 1/(s + 2*pi*0.01); + +% Lead to increase phase margin +a = 5; % Amount of phase lead / width of the phase lead / high frequency gain +wc = 2*pi*100; % Frequency with the maximum phase lead [rad/s] +H_lead = (1 + s/(wc/sqrt(a)))/(1 + s/(wc*sqrt(a))); + +% Low Pass filter to increase robustness +H_lpf = 1/(1 + s/2/pi/500); + +% High Authority Controller +K_hac_pz = 6e12 * ... % Gain + H_lead^2 * ... % Lead + H_lpf * ... % Low Pass Filter + H_int; % Integrator +K_hac_pz.InputName = {'d'}; +K_hac_pz.OutputName = {'f'}; +#+end_src + +#+begin_src matlab :exports none +%% Compute Loop gain for Nyquist Plot +L_vc_light = squeeze(freqresp(K_hac_vc*G_iff_vc_light('d', 'f'), freqs, 'Hz')); +L_vc_mid = squeeze(freqresp(K_hac_vc*G_iff_vc_mid( 'd', 'f'), freqs, 'Hz')); +L_vc_heavy = squeeze(freqresp(K_hac_vc*G_iff_vc_heavy('d', 'f'), freqs, 'Hz')); + +L_md_light = squeeze(freqresp(K_hac_md*G_iff_md_light('d', 'f'), freqs, 'Hz')); +L_md_mid = squeeze(freqresp(K_hac_md*G_iff_md_mid( 'd', 'f'), freqs, 'Hz')); +L_md_heavy = squeeze(freqresp(K_hac_md*G_iff_md_heavy('d', 'f'), freqs, 'Hz')); + +L_pz_light = squeeze(freqresp(K_hac_pz*G_iff_pz_light('d', 'f'), freqs, 'Hz')); +L_pz_mid = squeeze(freqresp(K_hac_pz*G_iff_pz_mid( 'd', 'f'), freqs, 'Hz')); +L_pz_heavy = squeeze(freqresp(K_hac_pz*G_iff_pz_heavy('d', 'f'), freqs, 'Hz')); +#+end_src + +#+begin_src matlab :exports none :results none +%% Nyquist Plot - Hight Authority Controller for all three nano-hexapod stiffnesses and all sample masses +figure; +hold on; +plot(real(L_vc_light), +imag(L_vc_light), '-', 'color', [colors(1,:), 0.5], 'DisplayName', '$k_n = 0.01\,N/\mu m$') +plot(real(L_vc_light), -imag(L_vc_light), '-', 'color', [colors(1,:), 0.5], 'HandleVisibility', 'off') +plot(real(L_vc_mid ), +imag(L_vc_mid ), '-', 'color', [colors(1,:), 0.5], 'HandleVisibility', 'off') +plot(real(L_vc_mid ), -imag(L_vc_mid ), '-', 'color', [colors(1,:), 0.5], 'HandleVisibility', 'off') +plot(real(L_vc_heavy), +imag(L_vc_heavy), '-', 'color', [colors(1,:), 0.5], 'HandleVisibility', 'off') +plot(real(L_vc_heavy), -imag(L_vc_heavy), '-', 'color', [colors(1,:), 0.5], 'HandleVisibility', 'off') + +plot(real(L_md_light), +imag(L_md_light), '-', 'color', [colors(2,:), 0.5], 'DisplayName', '$k_n = 1\,N/\mu m$') +plot(real(L_md_light), -imag(L_md_light), '-', 'color', [colors(2,:), 0.5], 'HandleVisibility', 'off') +plot(real(L_md_mid ), +imag(L_md_mid ), '-', 'color', [colors(2,:), 0.5], 'HandleVisibility', 'off') +plot(real(L_md_mid ), -imag(L_md_mid ), '-', 'color', [colors(2,:), 0.5], 'HandleVisibility', 'off') +plot(real(L_md_heavy), +imag(L_md_heavy), '-', 'color', [colors(2,:), 0.5], 'HandleVisibility', 'off') +plot(real(L_md_heavy), -imag(L_md_heavy), '-', 'color', [colors(2,:), 0.5], 'HandleVisibility', 'off') + +plot(real(L_pz_light), +imag(L_pz_light), '-', 'color', [colors(3,:), 0.5], 'DisplayName', '$k_n = 100\,N/\mu m$') +plot(real(L_pz_light), -imag(L_pz_light), '-', 'color', [colors(3,:), 0.5], 'HandleVisibility', 'off') +plot(real(L_pz_mid ), +imag(L_pz_mid ), '-', 'color', [colors(3,:), 0.5], 'HandleVisibility', 'off') +plot(real(L_pz_mid ), -imag(L_pz_mid ), '-', 'color', [colors(3,:), 0.5], 'HandleVisibility', 'off') +plot(real(L_pz_heavy), +imag(L_pz_heavy), '-', 'color', [colors(3,:), 0.5], 'HandleVisibility', 'off') +plot(real(L_pz_heavy), -imag(L_pz_heavy), '-', 'color', [colors(3,:), 0.5], 'HandleVisibility', 'off') +plot(-1, 0, 'kx', 'HandleVisibility', 'off'); +hold off; +set(gca, 'XScale', 'lin'); set(gca, 'YScale', 'lin'); +xlabel('Real'); ylabel('Imag'); +legend('location', 'northeast', 'FontSize', 8, 'NumColumns', 1); +xlim([-3.8, 0.2]); ylim([-2, 2]); +axis square; +#+end_src + +#+begin_src matlab :tangle no :exports results :results file replace +exportFig('figs/uniaxial_nyquist_hac.pdf', 'width', 'wide', 'height', 'tall'); +#+end_src + +#+name: fig:uniaxial_nyquist_hac +#+caption: Nyquist Plot - Hight Authority Controller for all three nano-hexapod stiffnesses (soft one in blue, moderately stiff in red and very stiff in yellow) and all sample masses (corresponding to the three curves of each color) +#+RESULTS: +[[file:figs/uniaxial_nyquist_hac.png]] + +#+begin_src matlab :exports none :results none +%% Loop Gain - High Authority Controller for all three nano-hexapod stiffnesses and all sample masses +figure; +tiledlayout(3, 1, 'TileSpacing', 'Compact', 'Padding', 'None'); + +ax1 = nexttile([2,1]); +hold on; +plot(freqs, abs(L_vc_light), 'color', [colors(1,:), 0.5], 'DisplayName', '$k_n = 0.01\,N/\mu m$'); +plot(freqs, abs(L_vc_mid), 'color', [colors(1,:), 0.5], 'HandleVisibility', 'off'); +plot(freqs, abs(L_vc_heavy), 'color', [colors(1,:), 0.5], 'HandleVisibility', 'off'); +plot(freqs, abs(L_md_light), 'color', [colors(2,:), 0.5], 'DisplayName', '$k_n = 1\,N/\mu m$'); +plot(freqs, abs(L_md_mid), 'color', [colors(2,:), 0.5], 'HandleVisibility', 'off'); +plot(freqs, abs(L_md_heavy), 'color', [colors(2,:), 0.5], 'HandleVisibility', 'off'); +plot(freqs, abs(L_pz_light), 'color', [colors(3,:), 0.5], 'DisplayName', '$k_n = 100\,N/\mu m$'); +plot(freqs, abs(L_pz_mid), 'color', [colors(3,:), 0.5], 'HandleVisibility', 'off'); +plot(freqs, abs(L_pz_heavy), 'color', [colors(3,:), 0.5], 'HandleVisibility', 'off'); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +ylabel('Loop Gain'); set(gca, 'XTickLabel',[]); +ylim([1e-3, 1e3]); +legend('location', 'northeast', 'FontSize', 8, 'NumColumns', 1); + +ax2 = nexttile; +hold on; +plot(freqs, 180/pi*unwrap(angle(L_vc_light)), 'color', [colors(1,:), 0.5]); +plot(freqs, 180/pi*unwrap(angle(L_vc_mid )), 'color', [colors(1,:), 0.5]); +plot(freqs, 180/pi*unwrap(angle(L_vc_heavy)), 'color', [colors(1,:), 0.5]); +plot(freqs, 180/pi*unwrap(angle(L_md_light)), 'color', [colors(2,:), 0.5]); +plot(freqs, 180/pi*unwrap(angle(L_md_mid )), 'color', [colors(2,:), 0.5]); +plot(freqs, 180/pi*unwrap(angle(L_md_heavy)), 'color', [colors(2,:), 0.5]); +plot(freqs, 180/pi*unwrap(angle(L_pz_light)), 'color', [colors(3,:), 0.5]); +plot(freqs, 180/pi*unwrap(angle(L_pz_mid )), 'color', [colors(3,:), 0.5]); +plot(freqs, 180/pi*unwrap(angle(L_pz_heavy)), 'color', [colors(3,:), 0.5]); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'lin'); +xlabel('Frequency [Hz]'); ylabel('Phase [deg]'); +hold off; +yticks(-360:90:360); +ylim([-270, 0]); + +linkaxes([ax1,ax2],'x'); +xlim([1, 500]); +#+end_src + +#+begin_src matlab :tangle no :exports results :results file replace +exportFig('figs/uniaxial_loop_gain_hac.pdf', 'width', 'wide', 'height', 'tall'); +#+end_src + +#+name: fig:uniaxial_loop_gain_hac +#+caption: Loop Gain - High Authority Controller for all three nano-hexapod stiffnesses (soft one in blue, moderately stiff in red and very stiff in yellow) and all sample masses (corresponding to the three curves of each color) +#+RESULTS: +[[file:figs/uniaxial_loop_gain_hac.png]] + +** Closed-Loop Noise Budgeting +The high authority position feedback controllers are then implemented and the closed-loop sensitivity to disturbances are computed. +These are compared with the open-loop and damped plants cases in Figure ref:fig:uniaxial_sensitivity_dist_hac_lac for just one configuration (moderately stiff nano-hexapod with 25kg sample's mass). +As expected, the sensitivity to disturbances is decreased in the controller bandwidth and slightly increase outside this bandwidth. + +#+begin_src matlab :exports none +%% Compute Closed Loop Systems +G_hac_iff_vc_light = feedback(G_iff_vc_light, K_hac_vc, 'name', -1); +G_hac_iff_vc_mid = feedback(G_iff_vc_mid , K_hac_vc, 'name', -1); +G_hac_iff_vc_heavy = feedback(G_iff_vc_heavy, K_hac_vc, 'name', -1); + +G_hac_iff_md_light = feedback(G_iff_md_light, K_hac_md, 'name', -1); +G_hac_iff_md_mid = feedback(G_iff_md_mid , K_hac_md, 'name', -1); +G_hac_iff_md_heavy = feedback(G_iff_md_heavy, K_hac_md, 'name', -1); + +G_hac_iff_pz_light = feedback(G_iff_pz_light, K_hac_pz, 'name', -1); +G_hac_iff_pz_mid = feedback(G_iff_pz_mid , K_hac_pz, 'name', -1); +G_hac_iff_pz_heavy = feedback(G_iff_pz_heavy, K_hac_pz, 'name', -1); +#+end_src + +#+begin_src matlab :exports none +%% Verify Stability +isstable(G_hac_iff_vc_light) && isstable(G_hac_iff_vc_mid) && isstable(G_hac_iff_vc_heavy) + +isstable(G_hac_iff_md_light) && isstable(G_hac_iff_md_mid) && isstable(G_hac_iff_md_heavy) + +isstable(G_hac_iff_pz_light) && isstable(G_hac_iff_pz_mid) && isstable(G_hac_iff_pz_heavy) +#+end_src + +#+begin_src matlab :exports none :results none +%% Change of sensitivity to disturbances with LAC and with HAC-LAC +figure; +tiledlayout(1, 3, 'TileSpacing', 'Compact', 'Padding', 'None'); + +ax1 = nexttile(); +hold on; +plot(freqs, abs(squeeze(freqresp(G_md_mid( 'd', 'fs'), freqs, 'Hz'))), 'k-'); +plot(freqs, abs(squeeze(freqresp(G_iff_md_mid('d', 'fs'), freqs, 'Hz'))), 'color', colors(1,:)); +plot(freqs, abs(squeeze(freqresp(G_hac_iff_md_mid('d', 'fs'), freqs, 'Hz'))), 'color', colors(2,:)); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +xticks([1e0, 1e1, 1e2]); +ylabel('Amplitude $d/f_{s}$ [m/N]'); xlabel('Frequency [Hz]'); + +ax2 = nexttile(); +hold on; +plot(freqs, abs(squeeze(freqresp(G_md_mid( 'd', 'ft'), freqs, 'Hz'))), 'k-'); +plot(freqs, abs(squeeze(freqresp(G_iff_md_mid('d', 'ft'), freqs, 'Hz'))), 'color', colors(1,:)); +plot(freqs, abs(squeeze(freqresp(G_hac_iff_md_mid('d', 'ft'), freqs, 'Hz'))), 'color', colors(2,:)); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +xticks([1e0, 1e1, 1e2]); +ylabel('Amplitude $d/f_{t}$ [m/N]'); xlabel('Frequency [Hz]'); + +ax3 = nexttile(); +hold on; +plot(freqs, abs(squeeze(freqresp(G_md_mid( 'd', 'xf'), freqs, 'Hz'))), 'k-', 'DisplayName', 'OL'); +plot(freqs, abs(squeeze(freqresp(G_iff_md_mid('d', 'xf'), freqs, 'Hz'))), 'color', colors(1,:), 'DisplayName', 'IFF'); +plot(freqs, abs(squeeze(freqresp(G_hac_iff_md_mid('d', 'xf'), freqs, 'Hz'))), 'color', colors(2,:), 'DisplayName', 'HAC-IFF'); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +xticks([1e0, 1e1, 1e2]); +ylabel('Amplitude $d/x_{f}$ [m/m]'); xlabel('Frequency [Hz]'); +legend('location', 'southeast', 'FontSize', 8, 'NumColumns', 1); + +linkaxes([ax1,ax2,ax3],'x'); +xlim([1, 500]); +#+end_src + +#+begin_src matlab :tangle no :exports results :results file replace +exportFig('figs/uniaxial_sensitivity_dist_hac_lac.pdf', 'width', 'full', 'height', 'normal'); +#+end_src + +#+name: fig:uniaxial_sensitivity_dist_hac_lac +#+caption: Change of sensitivity to disturbances with LAC and with HAC-LAC +#+RESULTS: +[[file:figs/uniaxial_sensitivity_dist_hac_lac.png]] + +The cumulative amplitude spectrum of the motion $d$ is computed for all nano-hexapod configurations, all sample masses and in the open-loop (OL), damped (IFF) and position controlled (HAC-IFF) cases. +The results are shown in Figure ref:fig:uniaxial_cas_hac_lac. +Obtained root mean square values of the distance $d$ are better for the soft nano-hexapod ($\approx 25\,nm$ to $\approx 35\,nm$ depending on the sample's mass) than for the stiffer nano-hexapod (from $\approx 30\,nm$ to $\approx 70\,nm$). + +#+begin_src matlab :exports none :results none +%% Cumulative Amplitude Spectrum for all three nano-hexapod stiffnesses - Comparison of OL, IFF and HAC-LAC cases +figure; +tiledlayout(1, 3, 'TileSpacing', 'Compact', 'Padding', 'None'); + +ax1 = nexttile(); +hold on; +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_vc_mid('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_vc_mid('d', 'xf'), f, 'Hz'))).^2)))), '-', ... + 'color', [0,0,0,0.5], 'DisplayName', 'OL'); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_vc_light('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_vc_light('d', 'xf'), f, 'Hz'))).^2)))), '-', ... + 'color', [0,0,0,0.5], 'HandleVisibility', 'off'); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_vc_heavy('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_vc_heavy('d', 'xf'), f, 'Hz'))).^2)))), '-', ... + 'color', [0,0,0,0.5], 'HandleVisibility', 'off'); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_iff_vc_mid('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_iff_vc_mid('d', 'xf'), f, 'Hz'))).^2)))), '-', ... + 'color', [colors(1,:), 0.5], 'DisplayName', 'IFF'); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_iff_vc_light('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_iff_vc_light('d', 'xf'), f, 'Hz'))).^2)))), '-', ... + 'color', [colors(1,:), 0.5], 'HandleVisibility', 'off'); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_iff_vc_heavy('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_iff_vc_heavy('d', 'xf'), f, 'Hz'))).^2)))), '-', ... + 'color', [colors(1,:), 0.5], 'HandleVisibility', 'off'); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_hac_iff_vc_mid('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_hac_iff_vc_mid('d', 'xf'), f, 'Hz'))).^2)))), '-', ... + 'color', [colors(2,:), 0.5], 'DisplayName', 'HAC-IFF'); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_hac_iff_vc_light('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_hac_iff_vc_light('d', 'xf'), f, 'Hz'))).^2)))), '-', ... + 'color', [colors(2,:), 0.5], 'HandleVisibility', 'off'); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_hac_iff_vc_heavy('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_hac_iff_vc_heavy('d', 'xf'), f, 'Hz'))).^2)))), '-', ... + 'color', [colors(2,:), 0.5], 'HandleVisibility', 'off'); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +xticks([1e0, 1e1, 1e2]); +ylabel('CAS of $d$ [m]'); xlabel('Frequency [Hz]'); +legend('location', 'southwest', 'FontSize', 8, 'NumColumns', 1); +title('$k_n = 0.01\,N/\mu m$'); + +ax2 = nexttile(); +hold on; +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_md_mid('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_md_mid('d', 'xf'), f, 'Hz'))).^2)))), '-', ... + 'color', [0,0,0,0.5]); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_md_light('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_md_light('d', 'xf'), f, 'Hz'))).^2)))), '-', ... + 'color', [0,0,0,0.5]); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_md_heavy('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_md_heavy('d', 'xf'), f, 'Hz'))).^2)))), '-', ... + 'color', [0,0,0,0.5]); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_iff_md_mid('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_iff_md_mid('d', 'xf'), f, 'Hz'))).^2)))), '-', ... + 'color', [colors(1,:), 0.5]); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_iff_md_light('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_iff_md_light('d', 'xf'), f, 'Hz'))).^2)))), '-', ... + 'color', [colors(1,:), 0.5]); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_iff_md_heavy('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_iff_md_heavy('d', 'xf'), f, 'Hz'))).^2)))), '-', ... + 'color', [colors(1,:), 0.5]); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_hac_iff_md_mid('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_hac_iff_md_mid('d', 'xf'), f, 'Hz'))).^2)))), '-', ... + 'color', [colors(2,:), 0.5]); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_hac_iff_md_light('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_hac_iff_md_light('d', 'xf'), f, 'Hz'))).^2)))), '-', ... + 'color', [colors(2,:), 0.5]); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_hac_iff_md_heavy('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_hac_iff_md_heavy('d', 'xf'), f, 'Hz'))).^2)))), '-', ... + 'color', [colors(2,:), 0.5]); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +xticks([1e0, 1e1, 1e2]); +xlabel('Frequency [Hz]'); set(gca, 'YTickLabel',[]); +title('$k_n = 1\,N/\mu m$'); + +ax3 = nexttile(); +hold on; +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_pz_mid('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_pz_mid('d', 'xf'), f, 'Hz'))).^2)))), '-', ... + 'color', [0,0,0,0.5]); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_pz_light('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_pz_light('d', 'xf'), f, 'Hz'))).^2)))), '-', ... + 'color', [0,0,0,0.5]); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_pz_heavy('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_pz_heavy('d', 'xf'), f, 'Hz'))).^2)))), '-', ... + 'color', [0,0,0,0.5]); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_iff_pz_mid('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_iff_pz_mid('d', 'xf'), f, 'Hz'))).^2)))), '-', ... + 'color', [colors(1,:), 0.5]); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_iff_pz_light('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_iff_pz_light('d', 'xf'), f, 'Hz'))).^2)))), '-', ... + 'color', [colors(1,:), 0.5]); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_iff_pz_heavy('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_iff_pz_heavy('d', 'xf'), f, 'Hz'))).^2)))), '-', ... + 'color', [colors(1,:), 0.5]); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_hac_iff_pz_mid('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_hac_iff_pz_mid('d', 'xf'), f, 'Hz'))).^2)))), '-', ... + 'color', [colors(2,:), 0.5]); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_hac_iff_pz_light('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_hac_iff_pz_light('d', 'xf'), f, 'Hz'))).^2)))), '-', ... + 'color', [colors(2,:), 0.5]); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_hac_iff_pz_heavy('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_hac_iff_pz_heavy('d', 'xf'), f, 'Hz'))).^2)))), '-', ... + 'color', [colors(2,:), 0.5]); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +xticks([1e0, 1e1, 1e2]); +xlabel('Frequency [Hz]'); set(gca, 'YTickLabel',[]); +title('$k_n = 100\,N/\mu m$'); + +linkaxes([ax1,ax2,ax3],'xy'); +xlim([1, 500]); +ylim([2e-10, 3e-6]) +#+end_src + +#+begin_src matlab :tangle no :exports results :results file replace +exportFig('figs/uniaxial_cas_hac_lac.pdf', 'width', 'full', 'height', 'normal'); +#+end_src + +#+name: fig:uniaxial_cas_hac_lac +#+caption: Cumulative Amplitude Spectrum for all three nano-hexapod stiffnesses - Comparison of OL, IFF and HAC-LAC cases +#+RESULTS: +[[file:figs/uniaxial_cas_hac_lac.png]] + +* Conclusion +<> + +In this study, a uniaxial model of the nano-active-stabilization-system has been tuned both from dynamical measurements (Section ref:sec:micro_station_model) and from disturbances measurements (Section ref:sec:uniaxial_disturbances). + +It has been shown that three active damping techniques can be used to critically damp the nano-hexapod resonances (Section ref:sec:uniaxial_active_damping). +However, this model does not allows to determine which one is most suited to this application. + +Finally, position feedback controllers have been developed for three considered nano-hexapod stiffnesses. +These controllers were shown to be robust to the change of sample's masses, and to provide good rejection of disturbances. +It has been found that having a soft nano-hexapod makes the plant dynamics easier to control (because decoupled from the micro-station dynamics) and requires less position feedback bandwidth to fulfill the requirements. +The moderately stiff nano-hexapod ($k_n = 1\,N/\mu m$) is requiring a bit more position feedback bandwidth, but it still seems to give acceptable results. +However, the stiff nano-hexapod is the most complex to control and gives the worst positioning performances. + +* Helping Functions :noexport: +** Initialize Path +#+NAME: m-init-path +#+BEGIN_SRC matlab +%% Path for functions, data and scripts +addpath('./matlab/mat/'); % Path for data +addpath('./matlab/src/'); % Path for functions +addpath('./matlab/'); % Path for scripts +#+END_SRC + +#+NAME: m-init-path-tangle +#+BEGIN_SRC matlab +%% Path for functions, data and scripts +addpath('./mat/'); % Path for data +addpath('./src/'); % Path for functions +#+END_SRC + +** Initialize other elements +#+NAME: m-init-other +#+BEGIN_SRC matlab +%% Colors for the figures +colors = colororder; +#+END_SRC diff --git a/nass-uniaxial-model.pdf b/nass-uniaxial-model.pdf new file mode 100644 index 0000000..2ab93dd Binary files /dev/null and b/nass-uniaxial-model.pdf differ diff --git a/nass-uniaxial-model.tex b/nass-uniaxial-model.tex new file mode 100644 index 0000000..10237eb --- /dev/null +++ b/nass-uniaxial-model.tex @@ -0,0 +1,719 @@ +% Created 2023-02-17 Fri 11:26 +% Intended LaTeX compiler: pdflatex +\documentclass[a4paper, 10pt, DIV=12, parskip=full]{scrreprt} + +\input{preamble.tex} +\author{Dehaeze Thomas} +\date{\today} +\title{NASS - Uniaxial Model} +\hypersetup{ + pdfauthor={Dehaeze Thomas}, + pdftitle={NASS - Uniaxial Model}, + pdfkeywords={}, + pdfsubject={}, + pdfcreator={Emacs 28.2 (Org mode 9.5.2)}, + pdflang={English}} +\usepackage{biblatex} + +\begin{document} + +\maketitle +\tableofcontents + +\clearpage + +In this report, a uniaxial model of the Nano Active Stabilization System (NASS) is developed and used to have a first idea of the challenges involved in this complex system. +Note that in this document, only the vertical direction is considered (which is the most stiff), but other directions were considered as well and yields similar conclusions. +The model is schematically shown in Figure \ref{fig:uniaxial_overview_model_sections} where the colors are representing the studied parts in different sections. + +In order to have a relevant model, the micro-station dynamics is first identified and its model is tuned to match the measurements (Section \ref{sec:micro_station_model}). +Then, a model of the nano-hexapod is added on top of the micro-station. +With added sample and sensors, this gives a uniaxial dynamical model of the NASS that will be used for further analysis (Section \ref{sec:nano_station_model}). + +The disturbances affecting the position accuracy are identified experimentally (Section \ref{sec:uniaxial_disturbances}) and included in the model for dynamical noise budgeting (Section \ref{sec:uniaxial_noise_budgeting}). +In all the following analysis, there nano-hexapod stiffnesses are considered to better understand the trade-offs and to find the most adequate stiffness. +Three sample masses are also considered to verify the robustness of the applied control strategies to a change of sample. + +Three active damping techniques are then applied on the nano-hexapod. +This helps to reduce the effect of disturbances as well as render the system easier to control afterwards (Section \ref{sec:uniaxial_active_damping}). + +Once the system is well damped, a feedback position controller is applied, and the obtained performances are compared (Section \ref{sec:uniaxial_position_control}). + +Conclusion remarks are given in Section \ref{sec:conclusion}. + +\begin{figure}[htbp] +\centering +\includegraphics[scale=1]{figs/uniaxial_overview_model_sections.png} +\caption{\label{fig:uniaxial_overview_model_sections}Uniaxial Micro-Station model in blue (Section \ref{sec:micro_station_model}), Nano-Hexapod and sample models in red (Section \ref{sec:nano_station_model}), Disturbances in yellow (Section \ref{sec:uniaxial_disturbances}), Active Damping in green (Section \ref{sec:uniaxial_active_damping}) and Position control in purple (Section \ref{sec:uniaxial_position_control})} +\end{figure} + + +\chapter{Micro Station Model} +\label{sec:micro_station_model} +In this section, a uni-axial model of the micro-station is tuned in order to match measurements made on the micro-station +The measurement setup is shown in Figure \ref{fig:micro_station_first_meas_dynamics} where several geophones are fixed to the micro-station and an instrumented hammer is used to inject forces on different stages of the micro-station. + +From the measured frequency response functions (FRF), the model can be tuned to approximate the uniaxial dynamics of the micro-station. + +\begin{figure}[htbp] +\centering +\includegraphics[scale=1,width=\linewidth]{figs/micro_station_first_meas_dynamics.jpg} +\caption{\label{fig:micro_station_first_meas_dynamics}Experimental Setup for the first dynamical measurements on the Micro-Station. Geophones are fixed to the micro-station, and the granite as well as the micro-hexapod's top platform are impact with an instrumented hammer} +\end{figure} +\section{Measured dynamics} + +The measurement setup is schematically shown in Figure \ref{fig:micro_station_meas_dynamics_schematic} where: +\begin{itemize} +\item Two hammer hits are performed, one on the Granite (force \(F_g\)), and one on the micro-hexapod's top platform (force \(F_h\)) +\item The inertial motion of the granite \(x_g\) and the micro-hexapod's top platform \(x_h\) are measured using geophones. +\end{itemize} + +From the forces applied by the instrumented hammer and the responses of the geophones, the following frequency response functions can be computed: +\begin{itemize} +\item from \(F_h\) to \(d_h\) (i.e. the compliance of the micro-station) +\item from \(F_g\) to \(d_h\) (or from \(F_h\) to \(d_g\)) +\item from \(F_g\) to \(d_g\) +\end{itemize} + +\begin{figure}[htbp] +\centering +\includegraphics[scale=1]{figs/micro_station_meas_dynamics_schematic.png} +\caption{\label{fig:micro_station_meas_dynamics_schematic}Measurement setup - Schematic} +\end{figure} + +Due to the bad coherence at low frequency, the frequency response functions are only shown between 20 and 200Hz (Figure \ref{fig:uniaxial_measured_frf_vertical}). + +\begin{minted}[]{matlab} +%% Load measured FRF +load('meas_microstation_frf.mat'); +\end{minted} + +\begin{figure}[htbp] +\centering +\includegraphics[scale=1]{figs/uniaxial_measured_frf_vertical.png} +\caption{\label{fig:uniaxial_measured_frf_vertical}Measured Frequency Response Functions in the vertical direction} +\end{figure} + +\section{Uniaxial Model} +The uni-axial model of the micro-station is shown in Figure \ref{fig:uniaxial_comp_frf_meas_model}, with: +\begin{itemize} +\item Disturbances: +\begin{itemize} +\item \(x_f\): Floor motion +\item \(f_t\): Stage vibrations +\end{itemize} +\item Hammer impacts: \(F_h\) and \(F_g\). +\item Geophones: \(x_h\) and \(x_g\) +\end{itemize} + +\begin{figure}[htbp] +\centering +\includegraphics[scale=1]{figs/uniaxial_model_micro_station.png} +\caption{\label{fig:uniaxial_model_micro_station}Uniaxial model of the micro-station} +\end{figure} + +Masses are estimated from the CAD. +\begin{minted}[]{matlab} +%% Parameters - Mass +mh = 15; % Micro Hexapod [kg] +mt = 1200; % Ty + Ry + Rz [kg] +mg = 2500; % Granite [kg] +\end{minted} + +And stiffnesses from the data-sheet of stage manufacturers. +\begin{minted}[]{matlab} +%% Parameters - Stiffnesses +kh = 6.11e+07; % [N/m] +kt = 5.19e+08; % [N/m] +kg = 9.50e+08; % [N/m] +\end{minted} + +The damping coefficients are tuned to match the identified damping from the measurements. +\begin{minted}[]{matlab} +%% Parameters - damping +ch = 2*0.05*sqrt(kh*mh); % [N/(m/s)] +ct = 2*0.05*sqrt(kt*mt); % [N/(m/s)] +cg = 2*0.08*sqrt(kg*mg); % [N/(m/s)] +\end{minted} + +\section{Comparison of the model and measurements} +The comparison between the measurements and the model is done in Figure \ref{fig:uniaxial_comp_frf_meas_model}. + +As the model is simplistic, the goal is not to match exactly the measurement but to have a first approximation. +More accurate models will be used later on. + +\begin{figure}[htbp] +\centering +\includegraphics[scale=1]{figs/uniaxial_comp_frf_meas_model.png} +\caption{\label{fig:uniaxial_comp_frf_meas_model}Comparison of the measured FRF and identified ones from the uni-axial model} +\end{figure} + +\chapter{Nano-Hexapod Model} +\label{sec:nano_station_model} +A model of the nano-hexapod and sample is now added on top of the uni-axial model of the micro-station (Figure \ref{fig:uniaxial_model_micro_station-nass}). + +Disturbances (shown in red) are: +\begin{itemize} +\item \(f_s\): direct forces applied to the sample (for instance cable forces) +\item \(f_t\): disturbances coming from the imperfect stage scanning performances +\item \(x_f\): floor motion +\end{itemize} + +The control signal is the force applied by the nano-hexapod \(f\) and the measurement is the relative motion between the sample and the granite \(d\). + +The sample is here considered as a rigid body and rigidly fixed to the nano-hexapod. +The effect of having resonances between the sample's point of interest and the nano-hexapod actuator will be considered in further analysis. + +\begin{figure}[htbp] +\centering +\includegraphics[scale=1]{figs/uniaxial_model_micro_station-nass.png} +\caption{\label{fig:uniaxial_model_micro_station-nass}Uni-axial model of the micro-station with added nano-hexapod (represented in blue) and sample (represented in green)} +\end{figure} +\section{Nano-Hexapod Parameters} +The parameters for the nano-hexapod and sample are: +\begin{itemize} +\item \(m_s\) the sample mass that can vary from 1kg up to 50kg +\item \(m_n\) the nano-hexapod mass which is set to 15kg +\item \(k_n\) the nano-hexapod stiffness, which can vary depending on the chosen architecture/technology +\end{itemize} + +As a first example, let's choose a nano-hexapod stiffness of \(10\,N/\mu m\) and a sample mass of 10kg. + +\begin{minted}[]{matlab} +%% Nano-Hexapod Parameters +mn = 15; % [kg] +kn = 1e7; % [N/m] +cn = 2*0.01*sqrt(mn*kn); % [N/(m/s)] + +%% Sample Mass +ms = 10; % [kg] +\end{minted} + +\section{Obtained Dynamics} +The sensitivity to disturbances (i.e. \(x_f\), \(f_t\) and \(f_s\)) are shown in Figure \ref{fig:uniaxial_sensitivity_dist_first_params}. +The \emph{plant} (i.e. the transfer function from actuator force \(f\) to measured displacement \(d\)) is shown in Figure \ref{fig:uniaxial_plant_first_params}. + +For further analysis, 9 configurations are considered: three nano-hexapod stiffnesses (\(k_n = 0.01\,N/\mu m\), \(k_n = 1\,N/\mu m\) and \(k_n = 100\,N/\mu m\)) combined with three sample's masses (\(m_s = 1\,kg\), \(m_s = 25\,kg\) and \(m_s = 50\,kg\)). + +\begin{figure}[htbp] +\centering +\includegraphics[scale=1]{figs/uniaxial_sensitivity_dist_first_params.png} +\caption{\label{fig:uniaxial_sensitivity_dist_first_params}Sensitivity to disturbances} +\end{figure} + +\begin{figure}[htbp] +\centering +\includegraphics[scale=1]{figs/uniaxial_plant_first_params.png} +\caption{\label{fig:uniaxial_plant_first_params}Bode Plot of the transfer function from actuator forces to measured displacement by the metrology} +\end{figure} +\chapter{Disturbance Identification} +\label{sec:uniaxial_disturbances} +In order to measure disturbances, two geophones are used, on located on the floor and on on the micro-hexapod's top platform (see Figure \ref{fig:micro_station_meas_disturbances}). + +The geophone on the floor is used to measured the floor motion \(x_f\) while the geophone on the micro-hexapod is used to measure vibrations introduced by scanning of the \(T_y\) stage and \(R_z\) stage. + +\begin{figure}[htbp] +\centering +\includegraphics[scale=1]{figs/micro_station_meas_disturbances.png} +\caption{\label{fig:micro_station_meas_disturbances}Disturbance measurement setup - Schematic} +\end{figure} + +\begin{figure}[htbp] +\centering +\includegraphics[scale=1,width=0.6\linewidth]{figs/micro_station_dynamical_id_setup.jpg} +\caption{\label{fig:micro_station_dynamical_id_setup}Two geophones are used to measure the micro-station vibrations induced by the scanning of the \(T_y\) and \(R_z\) stages} +\end{figure} +\section{Ground Motion} +The geophone fixed to the floor to measure the floor motion. + +\begin{minted}[]{matlab} +%% Load floor motion data +% t: time in [s] +% V: measured voltage genrated by the geophone and amplified by a 60dB gain voltage amplifier [V] +load('ground_motion_measurement.mat', 't', 'V'); +\end{minted} + +The voltage generated by each geophone is amplified using a voltage amplifier (gain of 60dB) before going to the ADC. +The sensitivity of the geophone as well as the gain of the voltage amplifier are then taken into account to reconstruct the floor displacement. +\begin{minted}[]{matlab} +%% Sensitivity of the geophone +S0 = 88; % Sensitivity [V/(m/s)] +f0 = 2; % Cut-off frequency [Hz] + +S = S0*(s/2/pi/f0)/(1+s/2/pi/f0); % Geophone's transfer function [V/(m/s)] + +%% Gain of the voltage amplifier +G0_db = 60; % [dB] +G0 = 10^(G0_db/20); % [abs] + +%% Transfer function from measured voltage to displacement +G_geo = 1/S/G0/s; % [m/V] +\end{minted} + +The PSD \(S_{V_f}\) of the measured voltage \(V_f\) is computed. +\begin{minted}[]{matlab} +%% Compute measured voltage PSD +Fs = 1/(t(2)-t(1)); % Sampling Frequency [Hz] +win = hanning(ceil(2*Fs)); % Hanning window + +[psd_V, f] = pwelch(V, win, [], [], Fs); % [V^2/Hz] +\end{minted} + +The PSD of the corresponding displacement can be computed as follows: +\begin{equation} +S_{x_f}(\omega) = \frac{S_{V_f}(\omega)}{|S_{\text{geo}}(j\omega)| \cdot G_{\text{amp}} \cdot \omega} +\end{equation} +with: +\begin{itemize} +\item \(S_{\text{geo}}\) the sensitivity of the Geophone in \([Vs/m]\) +\item \(G_{\text{amp}}\) the gain of the voltage amplifier +\item \(\omega\) is here to integrate and have the displacement instead of the velocity +\end{itemize} + +\begin{minted}[]{matlab} +%% Ground Motion ASD +psd_xf = psd_V.*abs(squeeze(freqresp(G_geo, f, 'Hz'))).^2; % [m^2/Hz] +\end{minted} + +The amplitude spectral density \(\Gamma_{x_f}\) of the measured displacement \(x_f\) is shown in Figure \ref{fig:asd_floor_motion_id31}. + +\begin{figure}[htbp] +\centering +\includegraphics[scale=1]{figs/asd_floor_motion_id31.png} +\caption{\label{fig:asd_floor_motion_id31}Measured Amplitude Spectral Density of the Floor motion on ID31} +\end{figure} + +\section{Stage Vibration} +During Spindle rotation (here at 6rpm), the granite velocity and micro-hexapod's top platform velocity are measured with the geophones. + +\begin{minted}[]{matlab} +%% Measured velocity of granite and hexapod during spindle rotation +% t: time in [s] +% vg: measured granite velocity [m/s] +% vg: measured micro-hexapod's top platform velocity [m/s] +load('meas_spindle_on.mat', 't', 'vg', 'vh'); +spindle_off = load('meas_spindle_off.mat', 't', 'vg', 'vh'); % No Rotation +\end{minted} + +The Power Spectral Density of the relative velocity between the hexapod and the granite is computed. +\begin{minted}[]{matlab} +%% Compute Power Spectral Density of the relative velocity between granite and hexapod during spindle rotation +Fs = 1/(t(2)-t(1)); % Sampling Frequency [Hz] +win = hanning(ceil(2*Fs)); % Hanning window + +[psd_vft, f] = pwelch(vh-vg, win, [], [], Fs); % [(m/s)^2/Hz] +[psd_off, ~] = pwelch(spindle_off.vh-spindle_off.vg, win, [], [], Fs); % [(m/s)^2/Hz] +\end{minted} + +It is then integrated to obtain the Amplitude Spectral Density of the relative motion which is compared with a non-rotating case (Figure \ref{fig:asd_vibration_spindle_rotation}). +It is shown that the spindle rotation induces vibrations in a wide frequency spectrum. + +\begin{figure}[htbp] +\centering +\includegraphics[scale=1]{figs/asd_vibration_spindle_rotation.png} +\caption{\label{fig:asd_vibration_spindle_rotation}Measured Amplitude Spectral Density of the relative motion between the granite and the micro-hexapod's top platform during Spindle rotating} +\end{figure} + +In order to compute the equivalent disturbance force \(f_t\) that induces such motion, the transfer function from \(f_t\) to the relative motion of the hexapod's top platform and the granite is extracted from the model. +The power spectral density \(\Gamma_{f_{t}}\) of the disturbance force can be computed as follows: +\begin{equation} +\Gamma_{f_{t}}(\omega) = \frac{\Gamma_{v_{t}}(\omega)}{|G_{\text{model}}(j\omega)|^2} +\end{equation} +with: +\begin{itemize} +\item \(\Gamma_{v_{t}}\) the measured power spectral density of the relative motion between the micro-hexapod's top platform and the granite during the spindle's rotation +\item \(G_{\text{model}}\) the transfer function (extracted from the uniaxial model) from \(f_t\) to the relative motion between the micro-hexapod's top platform and the granite +\end{itemize} + +The obtained amplitude spectral density of the disturbance force \(f_t\) is shown in Figure \ref{fig:asd_disturbance_force}. +\begin{figure}[htbp] +\centering +\includegraphics[scale=1]{figs/asd_disturbance_force.png} +\caption{\label{fig:asd_disturbance_force}Estimated disturbance force ft from measurement and uniaxial model} +\end{figure} + +The vibrations induced by the \(T_y\) stage are not considered here as: +\begin{itemize} +\item the induced vibrations have less amplitude than the vibrations induced by the \(R_z\) stage +\item it can be scanned at lower velocities if the induced vibrations are an issue +\end{itemize} + +\chapter{Open-Loop Dynamic Noise Budgeting} +\label{sec:uniaxial_noise_budgeting} +Now that we have a model of the NASS and an estimation of the power spectral density of the disturbances, it is possible to perform an \emph{open-loop dynamic noise budgeting}. +\section{Sensitivity to disturbances} +From the Uni-axial model, the transfer function from the disturbances (\(f_s\), \(x_f\) and \(f_t\)) to the displacement \(d\) are computed. + +This is done for \textbf{two extreme sample masses} \(m_s = 1\,\text{kg}\) and \(m_s = 50\,\text{kg}\) and \textbf{three nano-hexapod stiffnesses}: +\begin{itemize} +\item \(k_n = 0.01\,N/\mu m\) that could represent a voice coil actuator with soft flexible guiding +\item \(k_n = 1\,N/\mu m\) that could represent a voice coil actuator with a stiff flexible guiding or a mechanically amplified piezoelectric actuator +\item \(k_n = 100\,N/\mu m\) that could represent a stiff piezoelectric stack actuator +\end{itemize} + +The obtained sensitivity to disturbances for the three nano-hexapod stiffnesses are shown in Figure \ref{fig:uniaxial_sensitivity_disturbances_nano_hexapod_stiffnesses} for the light sample (same conclusions can be drawn with the heavy one). + +\begin{important} +From Figure \ref{fig:uniaxial_sensitivity_disturbances_nano_hexapod_stiffnesses}, following can be concluded for the \textbf{soft nano-hexapod}: +\begin{itemize} +\item It is more sensitive to forces applied on the sample (cable forces for instance), which is expected due to the lower stiffness +\item Between the suspension mode of the nano-hexapod (here at 5Hz) and the first mode of the micro-station (here at 70Hz), the disturbances induced by the stage vibrations are filtered out. +\item Above the suspension mode of the nano-hexapod, the sample's motion is unaffected by the floor motion, and therefore the sensitivity to floor motion is almost \(1\). +\end{itemize} +\end{important} + +\begin{figure}[htbp] +\centering +\includegraphics[scale=1]{figs/uniaxial_sensitivity_disturbances_nano_hexapod_stiffnesses.png} +\caption{\label{fig:uniaxial_sensitivity_disturbances_nano_hexapod_stiffnesses}Sensitivity to disturbances for three different nano-hexpod stiffnesses} +\end{figure} + +\section{Open-Loop Dynamic Noise Budgeting} +Now, the power spectral density of the disturbances is taken into account to estimate the residual motion \(d\) in each case. + +The Cumulative Amplitude Spectrum of the relative motion \(d\) due to both the floor motion \(x_f\) and the stage vibrations \(f_t\) are shown in Figure \ref{fig:uniaxial_cas_d_disturbances_stiffnesses} for the three nano-hexapod stiffnesses. + +It is shown that the effect of the floor motion is much less than the stage vibrations, except for the soft nano-hexapod below 5Hz. + +\begin{figure}[htbp] +\centering +\includegraphics[scale=1]{figs/uniaxial_cas_d_disturbances_stiffnesses.png} +\caption{\label{fig:uniaxial_cas_d_disturbances_stiffnesses}Cumulative Amplitude Spectrum of the relative motion d, due to both the floor motion and the stage vibrations (light sample)} +\end{figure} + +The total cumulative amplitude spectrum for the three nano-hexapod stiffnesses and for the two sample's masses are shown in Figure \ref{fig:uniaxial_cas_d_disturbances_payload_masses}. +The conclusion is that the sample's mass has little effect on the cumulative amplitude spectrum of the relative motion \(d\). + +\begin{figure}[htbp] +\centering +\includegraphics[scale=1]{figs/uniaxial_cas_d_disturbances_payload_masses.png} +\caption{\label{fig:uniaxial_cas_d_disturbances_payload_masses}Cumulative Amplitude Spectrum of the relative motion d due to all disturbances, for two sample masses} +\end{figure} + +\section{Conclusion} +\begin{important} +The conclusion is that in order to have a closed-loop residual vibration \(d \approx 20\,nm\text{ rms}\), if a simple feedback controller is used, the required closed-loop bandwidth would be: +\begin{itemize} +\item \(\approx 10\,\text{Hz}\) for the soft nano-hexapod (\(k_n = 0.01\,N/\mu m\)) +\item \(\approx 50\,\text{Hz}\) for the relatively stiff nano-hexapod (\(k_n = 1\,N/\mu m\)) +\item \(\approx 100\,\text{Hz}\) for the stiff nano-hexapod (\(k_n = 100\,N/\mu m\)) +\end{itemize} + +This can be explain by the fact that above the suspension mode of the nano-hexapod, the stage vibrations are filtered out (see Figure \ref{fig:uniaxial_sensitivity_disturbances_nano_hexapod_stiffnesses}). + +This gives a first advantage to having a soft nano-hexapod. +\end{important} + +\chapter{Active Damping} +\label{sec:uniaxial_active_damping} +In this section, three active damping are applied on the nano-hexapod (see Figure \ref{fig:uniaxial_active_damping_strategies}): Integral Force Feedback (IFF), Relative Damping Control (RDC) and Direct Velocity Feedback (DVF). + +These active damping techniques are compared in terms of: +\begin{itemize} +\item Reduction of the effect of disturbances (i.e. \(x_f\), \(f_t\) and \(f_s\)) on the displacement \(d\) +\item Achievable damping +\item Robustness to a change of sample's mass +\end{itemize} + +\begin{figure}[htbp] +\centering +\includegraphics[scale=1]{figs/uniaxial_active_damping_strategies.png} +\caption{\label{fig:uniaxial_active_damping_strategies}Three active damping strategies: Integral Force Feedback (IFF) using a force sensor, Relative Damping Control (RDC) using a relative displacement sensor, and Direct Velocity Feedback (DVF) using a geophone} +\end{figure} +\section{Active Damping Strategies} + +The Integral Force Feedback strategy consists of using a force sensor in series with the actuator (see Figure \ref{fig:uniaxial_active_damping_iff_equiv}, left). + +The control strategy consists of integrating the measured force and feeding it back to the actuator: +\begin{equation} +K_{\text{IFF}}(s) = \frac{g}{s} +\end{equation} + +The mechanical equivalent of this strategy is to add a dashpot in series with the actuator stiffness with a damping coefficient equal to the stiffness of the actuator divided by the controller gain \(k/g\) (see Figure \ref{fig:uniaxial_active_damping_iff_equiv}, right). + +\begin{figure}[htbp] +\centering +\includegraphics[scale=1]{figs/uniaxial_active_damping_iff_equiv.png} +\caption{\label{fig:uniaxial_active_damping_iff_equiv}Integral Force Feedback is equivalent as to add a damper in series with the stiffness (the initial damping is here neglected for simplicity)} +\end{figure} + + +For the Relative Damping Control strategy, a relative motion sensor that measures the motion of the actuator is used (see Figure \ref{fig:uniaxial_active_damping_rdc_equiv}, left). + +The derivative of this relative motion is used for the feedback signal: +\begin{equation} +K_{\text{RDC}}(s) = - g \cdot s +\end{equation} + +The mechanical equivalent is to add a dashpot in parallel with the actuator with a damping coefficient equal to the controller gain \(g\) (see Figure \ref{fig:uniaxial_active_damping_rdc_equiv}, right). + +\begin{figure}[htbp] +\centering +\includegraphics[scale=1]{figs/uniaxial_active_damping_rdc_equiv.png} +\caption{\label{fig:uniaxial_active_damping_rdc_equiv}Relative Damping Control is equivalent as adding a damper in parallel with the actuator/relative motion sensor} +\end{figure} + +Finally, the Direct Velocity Feedback strategy consists of using an inertial sensor (usually a geophone), that measured the ``absolute'' velocity of the body fixed on top of the actuator (se Figure \ref{fig:uniaxial_active_damping_dvf_equiv}, left). + +The measured velocity is then fed back to the actuator: +\begin{equation} +K_{\text{DVF}}(s) = - g +\end{equation} + +This is equivalent as to fix a dashpot (with a damping coefficient equal to the controller gain \(g\)) between the body (one which the inertial sensor is fixed) and an inertial reference frame (see Figure \ref{fig:uniaxial_active_damping_dvf_equiv}, right). +This is usually refers to as ``\emph{sky hook damper}''. + +\begin{figure}[htbp] +\centering +\includegraphics[scale=1]{figs/uniaxial_active_damping_dvf_equiv.png} +\caption{\label{fig:uniaxial_active_damping_dvf_equiv}Direct velocity Feedback using an inertial sensor is equivalent to a ``sky hook damper''} +\end{figure} + +\section{Plant Dynamics for Active Damping} +The plant dynamics for all three active damping techniques are shown in Figure \ref{fig:uniaxial_plant_active_damping_techniques}. +All have \textbf{alternating poles and zeros} meaning that the phase is bounded to \(\pm 90\,\text{deg}\) which makes the controller very robust. + +When the nano-hexapod's suspension modes are at lower frequencies than the resonances of the micro-station (blue and red curves in Figure \ref{fig:uniaxial_plant_active_damping_techniques}), the resonances of the micro-stations have little impact on the transfer functions from IFF and DVF. + +For the stiff nano-hexapod, the micro-station dynamics can be seen on the transfer functions in Figure \ref{fig:uniaxial_plant_active_damping_techniques}. +Therefore, it is expected that the micro-station dynamics might impact the achievable damping if a stiff nano-hexapod is used. + +\begin{figure}[htbp] +\centering +\includegraphics[scale=1]{figs/uniaxial_plant_active_damping_techniques.png} +\caption{\label{fig:uniaxial_plant_active_damping_techniques}Plant dynamics for the three active damping techniques (IFF: right, RDC: middle, DVF: left), for three nano-hexapod stiffnesses (\(k_n = 0.01\,N/\mu m\) in blue, \(k_n = 1\,N/\mu m\) in red and \(k_n = 100\,N/\mu m\) in yellow) and three sample's masses (\(m_s = 1\,kg\): solid curves, \(m_s = 25\,kg\): dot-dashed curves, and \(m_s = 50\,kg\): dashed curves).} +\end{figure} + +\section{Achievable Damping - Root Locus} +The Root Locus are computed for the three nano-hexapod stiffnesses and for the three active damping techniques. +They are shown in Figure \ref{fig:uniaxial_root_locus_damping_techniques}. + +All three active damping approach can lead to \textbf{critical damping} of the nano-hexapod suspension mode. + +There is even a little bit of authority on micro-station modes with IFF and DVF applied on the stiff nano-hexapod (Figure \ref{fig:uniaxial_root_locus_damping_techniques}, right) and with RDC for a soft nano-hexapod (Figure \ref{fig:uniaxial_root_locus_damping_techniques_micro_station_mode}). +This can be explained by the fact that above the suspension mode of the soft nano-hexapod, the relative motion sensor acts as an inertial sensor for the micro-station top platform. Therefore, it is like DVF was applied (the nano-hexapod acts as a geophone!). + +\begin{figure}[htbp] +\centering +\includegraphics[scale=1]{figs/uniaxial_root_locus_damping_techniques.png} +\caption{\label{fig:uniaxial_root_locus_damping_techniques}Root Loci for the three active damping techniques (IFF in blue, RDC in red and DVF in yellow). This is shown for three nano-hexapod stiffnesses.} +\end{figure} + +\begin{figure}[htbp] +\centering +\includegraphics[scale=1]{figs/uniaxial_root_locus_damping_techniques_micro_station_mode.png} +\caption{\label{fig:uniaxial_root_locus_damping_techniques_micro_station_mode}Root Locus for the three damping techniques. It is shown that the RDC active damping technique has some authority on one mode of the micro-station. This mode corresponds to the suspension mode of the micro-hexapod.} +\end{figure} + +\section{Change of sensitivity to disturbances} +The sensitivity to disturbances (direct forces \(f_s\), stage vibrations \(f_t\) and floor motion \(x_f\)) for all three active damping techniques are compared in Figure \ref{fig:uniaxial_sensitivity_dist_active_damping}. +The comparison is done with the nano-hexapod having a stiffness \(k_n = 1\,N/\mu m\). + +\begin{important} +Conclusions from Figure \ref{fig:uniaxial_sensitivity_dist_active_damping} are: +\begin{itemize} +\item IFF degrades the sensitivity to direct forces on the sample (i.e. the compliance) below the resonance of the nano-hexapod +\item RDC degrades the sensitivity to stage vibrations around the nano-hexapod's resonance as compared to the other two methods +\item both IFF and DVF degrades the sensitivity to floor motion below the resonance of the nano-hexapod +\end{itemize} +\end{important} + +\begin{figure}[htbp] +\centering +\includegraphics[scale=1]{figs/uniaxial_sensitivity_dist_active_damping.png} +\caption{\label{fig:uniaxial_sensitivity_dist_active_damping}Change of sensitivity to disturbance with all three active damping strategies} +\end{figure} + +\section{Noise Budgeting after Active Damping} +Cumulative Amplitude Spectrum of the distance \(d\) with all three active damping techniques are compared in Figure \ref{fig:uniaxial_cas_active_damping}. +All three active damping methods are giving similar results (except the RDC which is a little bit worse for the stiff nano-hexapod). + +Compare to the open-loop case, the active damping helps to lower the vibrations induced by the nano-hexapod resonance. + +\begin{figure}[htbp] +\centering +\includegraphics[scale=1]{figs/uniaxial_cas_active_damping.png} +\caption{\label{fig:uniaxial_cas_active_damping}Comparison of the cumulative amplitude spectrum (CAS) of the distance \(d\) for all three active damping techniques (OL in black, IFF in blue, RDC in red and DVF in yellow).} +\end{figure} + +\section{Obtained Damped Plant} +The transfer functions from the plant input \(f\) to the relative displacement \(d\) while the active damping is implemented are shown in Figure \ref{fig:uniaxial_damped_plant_three_active_damping_techniques}. +All three active damping techniques yield similar damped plants. + +\begin{figure}[htbp] +\centering +\includegraphics[scale=1]{figs/uniaxial_damped_plant_three_active_damping_techniques.png} +\caption{\label{fig:uniaxial_damped_plant_three_active_damping_techniques}Obtained damped transfer function from f to d for the three damping techniques} +\end{figure} + +The damped plants are shown in Figure \ref{fig:uniaxial_damped_plant_change_sample_mass} for all three techniques, with the three considered nano-hexapod stiffnesses and sample's masses. +\begin{figure}[htbp] +\centering +\includegraphics[scale=1]{figs/uniaxial_damped_plant_change_sample_mass.png} +\caption{\label{fig:uniaxial_damped_plant_change_sample_mass}Damped plant \(d/f\) - Robustness to change of sample's mass for all three active damping techniques. Grey curves are the open-loop (i.e. undamped) plants.} +\end{figure} + +\section{Robustness to change of payload's mass} +The Root Locus for the three damping techniques are shown in Figure \ref{fig:uniaxial_active_damping_robustness_mass_root_locus} for three sample's mass (1kg, 25kg and 50kg). +The closed-loop poles are shown by the squares for a specific gain. + +We can see that having heavier samples yields larger damping for IFF and smaller damping for RDC and DVF. + +\begin{figure}[htbp] +\centering +\includegraphics[scale=1]{figs/uniaxial_active_damping_robustness_mass_root_locus.png} +\caption{\label{fig:uniaxial_active_damping_robustness_mass_root_locus}Active Damping Robustness to change of sample's mass - Root Locus for all three damping techniques with 3 different sample's masses} +\end{figure} + +\section{Conclusion} + +\begin{important} +Conclusions for Active Damping: +\begin{itemize} +\item All three active damping techniques yields good damping (Figure \ref{fig:uniaxial_root_locus_damping_techniques}) and similar remaining vibrations (Figure \ref{fig:uniaxial_cas_active_damping}) +\item The obtained damped plants (Figure \ref{fig:uniaxial_damped_plant_change_sample_mass}) are equivalent for the three active damping techniques +\item Which one to be used will be determined with the use of more accurate models and will depend on which is the easiest to implement in practice +\end{itemize} +\end{important} + +\begin{table}[htbp] +\caption{\label{tab:comp_active_damping}Comparison of active damping strategies} +\centering +\scriptsize +\begin{tabularx}{\linewidth}{Xccc} +\toprule + & \textbf{IFF} & \textbf{RDC} & \textbf{DVF}\\ +\midrule +\textbf{Sensor} & Force sensor & Relative motion sensor & Inertial sensor\\ +\midrule +\textbf{Damping} & Up to critical & Up to critical & Up to Critical\\ +\midrule +\textbf{Robustness} & Requires collocation & Requires collocation & Impacted by geophone resonances\\ +\midrule +\(f_s\) \textbf{Disturbance} & \(\nearrow\) at low frequency & \(\searrow\) near resonance & \(\searrow\) near resonance\\ +\(f_t\) \textbf{Disturbance} & \(\searrow\) near resonance & \(\nearrow\) near resonance & \(\searrow\) near resonance\\ +\(x_f\) \textbf{Disturbance} & \(\nearrow\) at low frequency & \(\searrow\) near resonance & \(\nearrow\) at low frequency\\ +\bottomrule +\end{tabularx} +\end{table} + +\chapter{Position Feedback Controller} +\label{sec:uniaxial_position_control} +The High Authority Control - Low Authority Control (HAC-LAC) architecture is shown in Figure \ref{fig:uniaxial_hac_lac_architecture}. +It corresponds to a \emph{two step} control strategy: +\begin{itemize} +\item First, an active damping controller \(\bm{K}_{\textsc{LAC}}\) is implemented (see Section \ref{sec:uniaxial_active_damping}). +It allows to reduce the vibration level, and it also makes the damped plant (transfer function from \(u^{\prime}\) to \(y\)) easier to control than the undamped plant (transfer function from \(u\) to \(y\)). +\item Then, a position controller \(\bm{K}_{\textsc{HAC}}\) is implemented. +\end{itemize} + +Combined with the uniaxial model, it is shown in Figure \ref{fig:uniaxial_hac_lac_model}. + +\begin{figure} +\begin{subfigure}{0.54\textwidth} +\begin{center} +\includegraphics[scale=1,width=1.0\linewidth]{figs/uniaxial_hac_lac_architecture.png} +\end{center} +\subcaption{\label{fig:uniaxial_hac_lac_architecture}Typical HAC-LAC Architecture} +\end{subfigure} +\begin{subfigure}{0.45\textwidth} +\begin{center} +\includegraphics[scale=1,scale=1]{figs/uniaxial_hac_lac_model.png} +\end{center} +\subcaption{\label{fig:uniaxial_hac_lac_model}Uniaxial model with HAC-LAC strategy} +\end{subfigure} +\caption{\label{fig:uniaxial_hac_lac}High Authority Control - Low Authority Control (HAC-LAC)} +\end{figure} +\section{Damped Plant Dynamics} +As was shown in Section \ref{sec:uniaxial_active_damping}, all three proposed active damping techniques yield similar damping plants. +Therefore, \emph{Integral Force Feedback} will be used in this section to study the HAC-LAC performances. + +The obtained damped plants for the three nano-hexapod stiffnesses are shown in Figure \ref{fig:uniaxial_hac_iff_damped_plants_masses}. + +\begin{figure}[htbp] +\centering +\includegraphics[scale=1]{figs/uniaxial_hac_iff_damped_plants_masses.png} +\caption{\label{fig:uniaxial_hac_iff_damped_plants_masses}Obtained damped plant using Integral Force Feedback for three sample's masses} +\end{figure} + +\section{Position Feedback Controller} +The objective now is to design a position feedback controller for each of the three nano-hexapods that are robust to the change of sample's mass. + +The required feedback bandwidth was approximately determined un Section \ref{sec:uniaxial_noise_budgeting}: +\begin{itemize} +\item \(\approx 10\,\text{Hz}\) for the soft nano-hexapod (\(k_n = 0.01\,N/\mu m\)). +Near this frequency, the plants are equivalent to a mass line. +The gain of the mass line can vary up to a fact \(\approx 5\) (suspended mass from \(16\,kg\) up to \(65\,kg\)). +This mean that the designed controller will need to have large gain margins to be robust to the change of sample's mass. +\item \(\approx 50\,\text{Hz}\) for the relatively stiff nano-hexapod (\(k_n = 1\,N/\mu m\)). +Similarly to the soft nano-hexapod, the plants near the crossover frequency are equivalent to a mass line. +It will be probably easier to have a little bit more bandwidth in this configuration to be further away from the nano-hexapod suspension mode. +\item \(\approx 100\,\text{Hz}\) for the stiff nano-hexapod (\(k_n = 100\,N/\mu m\)). +Contrary to the two first nano-hexapod stiffnesses, here the plants have more complex dynamics near the wanted crossover frequency. +The micro-station is not stiff enough to have a clear stiffness line at this frequency. +Therefore, there are both a change of phase and gain depending on the sample's mass. +This makes the robust design of the controller a little bit more complicated. +\end{itemize} + + +Position feedback controllers are designed for each nano-hexapod such that it is stable for all considered sample masses with similar stability margins (see Nyquist plots in Figure \ref{fig:uniaxial_nyquist_hac}). +These high authority controllers are generally composed of a two integrators at low frequency for disturbance rejection, a lead to increase the phase margin near the crossover frequency and a low pass filter to increase the robustness to high frequency dynamics. +The loop gains for the three nano-hexapod are shown in Figure \ref{fig:uniaxial_loop_gain_hac}. +We can see that: +\begin{itemize} +\item for the soft and moderately stiff nano-hexapod, the crossover frequency varies a lot with the sample mass. +This is due to the fact that the crossover frequency corresponds to the mass line of the plant. +\item for the stiff nano-hexapod, the obtained crossover frequency is not at high as what was estimated necessary. +The crossover frequency in that case is close to the stiffness line of the plant, which makes the robust design of the controller easier. +\end{itemize} + +Note that these controller were quickly tuned by hand and not designed using any optimization methods. +The goal is just to have a first estimation of the attainable performances. + +\begin{figure}[htbp] +\centering +\includegraphics[scale=1]{figs/uniaxial_nyquist_hac.png} +\caption{\label{fig:uniaxial_nyquist_hac}Nyquist Plot - Hight Authority Controller for all three nano-hexapod stiffnesses (soft one in blue, moderately stiff in red and very stiff in yellow) and all sample masses (corresponding to the three curves of each color)} +\end{figure} + +\begin{figure}[htbp] +\centering +\includegraphics[scale=1]{figs/uniaxial_loop_gain_hac.png} +\caption{\label{fig:uniaxial_loop_gain_hac}Loop Gain - High Authority Controller for all three nano-hexapod stiffnesses (soft one in blue, moderately stiff in red and very stiff in yellow) and all sample masses (corresponding to the three curves of each color)} +\end{figure} + +\section{Closed-Loop Noise Budgeting} +The high authority position feedback controllers are then implemented and the closed-loop sensitivity to disturbances are computed. +These are compared with the open-loop and damped plants cases in Figure \ref{fig:uniaxial_sensitivity_dist_hac_lac} for just one configuration (moderately stiff nano-hexapod with 25kg sample's mass). +As expected, the sensitivity to disturbances is decreased in the controller bandwidth and slightly increase outside this bandwidth. + +\begin{figure}[htbp] +\centering +\includegraphics[scale=1]{figs/uniaxial_sensitivity_dist_hac_lac.png} +\caption{\label{fig:uniaxial_sensitivity_dist_hac_lac}Change of sensitivity to disturbances with LAC and with HAC-LAC} +\end{figure} + +The cumulative amplitude spectrum of the motion \(d\) is computed for all nano-hexapod configurations, all sample masses and in the open-loop (OL), damped (IFF) and position controlled (HAC-IFF) cases. +The results are shown in Figure \ref{fig:uniaxial_cas_hac_lac}. +Obtained root mean square values of the distance \(d\) are better for the soft nano-hexapod (\(\approx 25\,nm\) to \(\approx 35\,nm\) depending on the sample's mass) than for the stiffer nano-hexapod (from \(\approx 30\,nm\) to \(\approx 70\,nm\)). + +\begin{figure}[htbp] +\centering +\includegraphics[scale=1]{figs/uniaxial_cas_hac_lac.png} +\caption{\label{fig:uniaxial_cas_hac_lac}Cumulative Amplitude Spectrum for all three nano-hexapod stiffnesses - Comparison of OL, IFF and HAC-LAC cases} +\end{figure} + +\chapter{Conclusion} +\label{sec:conclusion} + +In this study, a uniaxial model of the nano-active-stabilization-system has been tuned both from dynamical measurements (Section \ref{sec:micro_station_model}) and from disturbances measurements (Section \ref{sec:uniaxial_disturbances}). + +It has been shown that three active damping techniques can be used to critically damp the nano-hexapod resonances (Section \ref{sec:uniaxial_active_damping}). +However, this model does not allows to determine which one is most suited to this application. + +Finally, position feedback controllers have been developed for three considered nano-hexapod stiffnesses. +These controllers were shown to be robust to the change of sample's masses, and to provide good rejection of disturbances. +It has been found that having a soft nano-hexapod makes the plant dynamics easier to control (because decoupled from the micro-station dynamics) and requires less position feedback bandwidth to fulfill the requirements. +The moderately stiff nano-hexapod (\(k_n = 1\,N/\mu m\)) is requiring a bit more position feedback bandwidth, but it still seems to give acceptable results. +However, the stiff nano-hexapod is the most complex to control and gives the worst positioning performances. +\end{document} diff --git a/preamble.tex b/preamble.tex new file mode 100644 index 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