diff --git a/.latexmkrc b/.latexmkrc new file mode 100644 index 0000000..ba5b929 --- /dev/null +++ b/.latexmkrc @@ -0,0 +1,111 @@ +#!/bin/env perl + +# Shebang is only to get syntax highlighting right across GitLab, GitHub and IDEs. +# This file is not meant to be run, but read by `latexmk`. + +# ====================================================================================== +# Perl `latexmk` configuration file +# ====================================================================================== + +# ====================================================================================== +# PDF Generation/Building/Compilation +# ====================================================================================== + +@default_files=('nass-uniaxial-model.tex'); + +# PDF-generating modes are: +# 1: pdflatex, as specified by $pdflatex variable (still largely in use) +# 2: postscript conversion, as specified by the $ps2pdf variable (useless) +# 3: dvi conversion, as specified by the $dvipdf variable (useless) +# 4: lualatex, as specified by the $lualatex variable (best) +# 5: xelatex, as specified by the $xelatex variable (second best) +$pdf_mode = 1; + +# Treat undefined references and citations as well as multiply defined references as +# ERRORS instead of WARNINGS. +# This is only checked in the *last* run, since naturally, there are undefined references +# in initial runs. +# This setting is potentially annoying when debugging/editing, but highly desirable +# in the CI pipeline, where such a warning should result in a failed pipeline, since the +# final document is incomplete/corrupted. +# +# However, I could not eradicate all warnings, so that `latexmk` currently fails with +# this option enabled. +# Specifically, `microtype` fails together with `fontawesome`/`fontawesome5`, see: +# https://tex.stackexchange.com/a/547514/120853 +# The fix in that answer did not help. +# Setting `verbose=silent` to mute `microtype` warnings did not work. +# Switching between `fontawesome` and `fontawesome5` did not help. +$warnings_as_errors = 0; + +# Show used CPU time. Looks like: https://tex.stackexchange.com/a/312224/120853 +$show_time = 1; + +# Default is 5; we seem to need more owed to the complexity of the document. +# Actual documents probably don't need this many since they won't use all features, +# plus won't be compiling from cold each time. +$max_repeat=7; + +# --shell-escape option (execution of code outside of latex) is required for the +#'svg' package. +# It converts raw SVG files to the PDF+PDF_TEX combo using InkScape. +# +# SyncTeX allows to jump between source (code) and output (PDF) in IDEs with support +# (many have it). A value of `1` is enabled (gzipped), `-1` is enabled but uncompressed, +# `0` is off. +# Testing in VSCode w/ LaTeX Workshop only worked for the compressed version. +# Adjust this as needed. Of course, only relevant for local use, no effect on a remote +# CI pipeline (except for slower compilation, probably). +# +# %O and %S will forward Options and the Source file, respectively, given to latexmk. +# +# `set_tex_cmds` applies to all *latex commands (latex, xelatex, lualatex, ...), so +# no need to specify these each. This allows to simply change `$pdf_mode` to get a +# different engine. Check if this works with `latexmk --commands`. +set_tex_cmds("--shell-escape -interaction=nonstopmode --synctex=1 %O %S"); + +# Use default pdf viewer +$pdf_previewer = 'zathura'; + +# option 2 is same as 1 (run biber when necessary), but also deletes the +# regeneratable bbl-file in a clenaup (`latexmk -c`). Do not use if original +# bib file is not available! +$bibtex_use = 2; # default: 1 + +# Change default `biber` call, help catch errors faster/clearer. See +# https://web.archive.org/web/20200526101657/https://www.semipol.de/2018/06/12/latex-best-practices.html#database-entries +$biber = "biber --validate-datamodel %O %S"; + +# Glossaries +add_cus_dep('glo', 'gls', 0, 'run_makeglossaries'); +add_cus_dep('acn', 'acr', 0, 'run_makeglossaries'); + +sub run_makeglossaries { + if ( $silent ) { + system "makeglossaries -q -s '$_[0].ist' '$_[0]'"; + } + else { + system "makeglossaries -s '$_[0].ist' '$_[0]'"; + }; +} + +# ====================================================================================== +# Auxiliary Files +# ====================================================================================== + +# Let latexmk know about generated files, so they can be used to detect if a +# rerun is required, or be deleted in a cleanup. +# loe: List of Examples (KOMAScript) +# lol: List of Listings (`listings` and `minted` packages) +# run.xml: biber runs +# glg: glossaries log +# glstex: generated from glossaries-extra +push @generated_exts, 'loe', 'lol', 'run.xml', 'glstex', 'glo', 'gls', 'glg', 'acn', 'acr', 'alg'; + +# Also delete the *.glstex files from package glossaries-extra. Problem is, +# that that package generates files of the form "basename-digit.glstex" if +# multiple glossaries are present. Latexmk looks for "basename.glstex" and so +# does not find those. For that purpose, use wildcard. +# Also delete files generated by gnuplot/pgfplots contour plots +# (.dat, .script, .table). +$clean_ext = "%R-*.glstex %R_contourtmp*.*"; diff --git a/figs/micro_station_meas_dynamics_schematic.pdf b/figs/micro_station_meas_dynamics_schematic.pdf index a1188ee..de87770 100644 Binary files a/figs/micro_station_meas_dynamics_schematic.pdf and b/figs/micro_station_meas_dynamics_schematic.pdf differ diff --git a/figs/uniaxial_effect_support_compliance_dynamics.pdf b/figs/uniaxial_effect_support_compliance_dynamics.pdf new file mode 100644 index 0000000..e97e49d --- /dev/null +++ b/figs/uniaxial_effect_support_compliance_dynamics.pdf @@ -0,0 +1,2644 @@ +%PDF-1.4 +% +1 0 obj +<< +/Producer (Apache FOP Version 2.4.0-SNAPSHOT: PDFDocumentGraphics2D) +/CreationDate (D:20230629153913+02'00') +>> +endobj +2 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +3 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +4 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +5 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +6 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +7 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +8 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +9 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +10 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +11 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +12 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +13 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +14 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +15 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +16 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +17 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +18 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +19 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +20 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +21 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +22 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +23 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +24 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +25 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +26 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +27 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +28 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +29 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +30 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +31 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +32 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +33 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +34 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +35 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +36 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +37 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +38 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +39 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +40 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +41 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +42 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +43 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +44 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +45 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +46 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +47 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +48 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +49 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +50 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +51 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +52 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +53 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +54 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +55 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +56 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +57 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +58 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +59 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +60 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +61 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +62 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +63 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +64 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +65 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +66 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +67 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +68 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +69 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +70 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +71 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +72 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +73 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +74 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +75 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +76 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +77 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +78 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +79 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +80 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +81 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +82 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +83 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +84 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +85 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +86 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +87 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +88 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +89 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +90 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +91 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +92 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +93 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +94 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +95 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +96 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +97 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +98 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +99 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +100 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +101 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +102 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +103 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +104 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +105 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +106 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +107 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +108 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +109 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +110 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +111 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +112 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +113 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +114 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +115 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +116 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +117 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +118 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +119 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +120 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +121 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +122 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +123 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +124 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +125 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +126 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +127 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +128 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +129 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +130 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +131 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +132 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +133 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +134 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +135 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +136 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +137 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +138 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +139 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +140 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +141 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +142 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +143 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +144 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +145 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +146 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +147 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +148 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +149 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +150 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +151 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +152 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +153 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +154 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +155 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +156 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +157 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +158 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +159 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +160 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +161 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +162 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +163 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +164 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +165 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +166 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +167 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +168 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +169 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +170 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +171 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +172 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +173 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +174 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +175 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +176 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +177 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +178 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +179 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +180 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +181 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +182 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +183 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +184 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +185 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +186 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +187 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +188 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +189 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +190 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +191 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +192 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +193 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +194 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +195 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +196 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +197 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +198 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +199 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +200 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +201 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +202 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +203 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +204 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +205 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +206 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +207 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +208 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +209 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +210 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +211 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +212 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +213 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +214 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +215 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +216 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +217 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +218 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +219 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +220 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +221 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +222 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +223 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +224 0 obj +<< /Length 225 0 R /Filter /FlateDecode >> +stream +xĽˮ,ɲ]ׯX?pD to`E45afU֣sgg=ŷ _SW?> =^j)TG*#-V|odӇ)7__~BHAķ_#/-?\'Ͽ{Z}K_U^rVʟ_U/ע4{^_,ﱦ(kUK?U[ sԞ|UK?UXZcUח~`U}[Ǫ~`Un~`U1|~Y=m\O,=vW+?ϛ4`/IJ>oshjjYj{'y:PZO,=pXK?ϛ̧}cYח~bY﹕_e}Q6k'y ٬핟F?oKw}/qlO,ȧlO,tYK?[xy@{_A? X̵s@qDGx%O.!y?s|%|C6 |?U95ٗu} +c +e䲖uyfU=˱)K_0jD!1u]_`u]]nX)5Kk}/e48iyg9=cX޶H<)Zkc-Wyg[W{C%[חYvqߧXl}_0|k{O3'ƱK_׬}Ҵo)Y4<{㱮K_׬}Ibr9k֞a[%{|뺼u}ڧ6[q/|U_T +13h{O\vy+_lx1Y hi9K/}2x}A1K_m}bĀu}ὉM^ח(A5[{xb׺/}]_vqiAK_׬},VFP5keb`K_}E1V\fcIr&{H5{%Plį#뺼u}G Sku}^G\˺U}ڏ$!U]_f%m0W5Kb\kvNevcUWYZ`9WWOiK1XU}—^jU-g <],]_V|ZW5v%,_~YKy.3EGA̖RkxO*n-Kw1 IGbRzo9,_Ϸ_?U/O}e}8hGG:Jȿz0h{Y$W]O|_u\˻|X#W]O|_uGY\ ^wg݇O>?󺠟c|~:{]+wؙ~ngVt8s]MԊnf̙Ϭ>d溢6l+93:2؄o_auE?73+|bEm.+ 7ZmͶm݇\WsSm>mE?63+&|jE5ۊ~lgVtZs]ЏMzj 5YmPuA?63빏.f|fE4ܔO6f[яͧ̊i+4ZmͶIېmE?63+|bE6܄O>沞m܇\sSm>z~n's`sYMznk6Ymhu=?63Վ۸k|⺌bΓ~l y}Qx`_Ыk?O$Dl`_k?Odn+zu~H VϣW~<[g_k?O D`[k?O n+zu牐~HV}E/<-յG}A<*ϣHW~ zy0~HV1}E/յ'^^y"v嵟'2DජW~H+zyQ`[k?rz^^y2ϣ~ ([յG}=q~w9S̭7U>:{CL~b)j217"/[sɇV$y,DodjoyTr`֛,߰[R),G +2r<:űѱ6 }-y̙rL|-2Pch3crژk䘵_C! 3͜cV%krQܚ䷆T3-pclŖ(eX'r( a5N0yşu;QaAvoI$.}XeKkE˴L>䒵N] Ӹco0;8ģe0H1Ze }'AP,^īrTѴz_Kt,ȥK-nQ$!Oɗl-Cg/'cl8$L*%&Y^$X9ɗ"6u& Ջ,vF6bIJqL6c`#ՑΊ zU./lbAf3480\6:7*Sn;7gصҪ#5t%"RN~ rQ/.QL(_(KnkrF,qd,Lvqs!R|1rMFѱJ"\~h&1E`F5t6_1rE67AdS>6xxUyc ^]H Gb"-~9rj-UHyf3Rԩgћ/EjL*D۫xnR q F1Ca ~-\̼ IůQꘘ;ybX=\˾N|9tW,Gi2B0d8 'ޓ:9l?cgLűɝ~)bceZ+9߻]m%rň9X?[?9;>X+{s7#p4شUSB]y}O9 _Lq̅I6ŭ$f&#Rm8 7Nl-E~\'⺯26.3S$ʪ[J)OvZ69ֲ_L3Fjfjx/&)qyc 햋3Vd L -*|f'XxqcM$[ +[yWr"'OS5L.<] =+-n}j&O]S߳%}G6XwL}ŖEɽl!sym%\Yp W,p]q*a0`ܝڰ(̎Rˡ`*arJGU[ =E1[`b>ajlj'a`K$ᗳ.!Wj1Q]K%#Xŭ"dqEl0h]"7OVCMï89es@_Oy 1<9v=twv`xG_O9FԂnX󔵏'ʕLɂ*yp X6/[mb$p0 ~,"' D-ao]/;Zc'%R{<@X8B +s:ξ\&hʶuawG_.^<l7pmVz)9L+NŶڷu M#Q1Ec.hJds.5R:$mŪػ濎D"&C s1G*X̱R q:匛Pd/=XvTE*6Q#U!?=AW]Aq:f sI|>B-Fhyk)ڴ Vp_Kdʛ]L`5 IsMGR0K _׍Aj~`M*9gCd`U(I#n\x#C"'^MyuA rP͔Ӎc"(\dHs(&[@<֬Dəl^`$[U<&+., fƄzO{bG a`VHEAK2,*zqӈep[շNnL&MUe(aS^φ_j1G޵;+tWf/k(?Rb˳%װSCN=hI\YY;iCb8H)D(dr&LRc!x #(۱g5?ٖUb5 +@ǩy 3&Fb|~DrR맽Zo|Z T7HQ~>G9Af -| T+'PTn_Ux\CgNzAݵ&9 hTcD"l{Sc(fi~$*~OAȀF(ɿ Z@'!ʵѼxaS _1NgC¦Ʉ ^N?Aq:KAؠGH-(W׾*MMc+.8LF5 IT2}y lSMl9Xԕnxg0$K));'=/I]qwѺ]䔨8u*$?`w͓#>T=BCoMs9ާC 86h5JNˇ+6Le TLٰ Q!Y-=Ǔp;/` ɓ(']rB!362bWNKqvs]:JiwKYHdIXq϶Asq`do؅ӘN=U(ΕCnO`X&Y 6xV iGtFǙNs{tR N:Dz.t9IՔ,] vq %2ȍL\$T;1#*&Ja8FH;bYǔ3`DHr-sD=%XsM`!^m'!'R$MmS 9r9!,(5;夭J)'0%LJ%. GmyxIxsq"]0:NAЎ/tąn2sGJqy$}fqR% ]҅g<^N:$1qb`.tG07-d$XdN|q@)6N.}dZ5G(]K\L&e`[ ''!R:8. \Ɓs^8qeN6=mG6:QblC3s),#>D5[;8\/=e\8<1r;8Y wq2^\[e^9" ,Aΐ(NMlQ,>8lFh7 Ƿb;88=ϫQ8PV`xӗ3,JL)Iȁgt!{2}BaƑFB.9լQ:>#')ϝ|BF#h?(G4;T^2`eqMrt/ G/n !bi :8V;:8C@hfjS:e *oJdFP_89KW;8U}DձS!H>yd5NBN(:vrG4{rrȤaZ095rv])&Ğ%l۵gRӇ -0bsS70JG#qPBEhzP٢rRO8ekаC $.B%AH; 9T:vr{UdgeBVٽbIi j'AAѰ>V@"WeV's K,JI=3V|qPq +#'s+ G5̳KEH@n1,FPP:2HS,Fa؛毵 # +Ń`~tJp-KjNc" -& %C7B鼲-J֛P,K/&Av6ȢQv&E +f)WOÒm.K;!`JS1bF`xӣRrJ&O \UN$Ar!NNJ+҆h`''l΄|t%;:)9| J#EJzc^SاVYjɳ\xA~8h/ q\_W-bw^?UUer)V!{v #i'h~ޮd̫! h`"CKfE׸PrYlq>Sib&XKY1!fC(@.2doZ%]U pȓf!QWbR5)%5'?dtVg +B2QGPr4D +Iw웓Ca*36. +{PQKL;c'%gfKZh;2rAy2ߘ.R=N%òakʢ3Fӣ^ Hwa6>@8ڑ5!џ”n;}@+گw]h9嶶 -8vrL{F?i9Zp`-GG6W9ҚO^VHE{-^<)xHmr(ׇ1c(-ukAsׁh Ӣ€o2+&%̩ r懖3#Q -IXj*g8P\0#I?Iˡ&G3\e̅]5Ey9<2( cs)n6%我P Yy޼`u7b٨JJ L+c&%< +P +" bUEbhc3:M1cXI]Y[g?9Z"~2s4YE[A?E*ks(1G }pcɥ@o\7uy:W%ݙS9X7Cҍ.б#F~ȐqF<"*Dbŵի9Z<ʸZ:9IB+9fA,bQ v8tps6n솥&_,1֋2CНz"I"FeЬS~vKʀAщ$ N}OhGrҠ)-Z(V&#'zMs#h*&[hˬtҳaz%̟h z`QG6yk;_ڡZ#\A#iDvu #_ͱQ ;YCMvp Nˬ:HXyRRv*N-qu/"CXI5okuAެx2V4ҧqGH@2њo\Sa09w-@%dILJiTr2hZа67j⧓Z{:V$S +ORnƞUμP딍kMkrN:e**ĕ~ccQ\1;vx^AFA=y<J-;<`Zk `;<`塸 ;SXACgEl +q-Gd/:X:[,mW+bк_nrfnq2z +0BEw ]9_HV As:ƃ^ {΋8߽+F)-ȹUF`><&#v{ɩOf{t}"sSbq{4/NK' ˲v` |=C +Ran +Iр <\QƱz 4E?V3 4y؋\KXD+?@sȇ`||uQH,1΢,Ods.(a_Nq9)S;飉tJFq;>佩d3,g?| B3_⛥˻<1M3&S ݮl`}%#.NAnvФ|9tbCvs-3 t~:?䮯S'GT}u!?ajRe`OG8Ǔ)g. +9)'1E.FNJn. M`é[­)) &R11Tٽ)G6ERccGd.P$RyȨh"/?,Gs= @Bh)dP;(@`c}$%% &8rrlH݈cD M75e:z"a(VdiGe%a, Ў DhUL{P>P,_|)S ASԬ+1Leɽor^l wZP1d'+HSJgo['Y`/L,XjObVx@8`5IX&WS[I$`$fy;i4v+:,L1ZDdL0w.oM-` Jȋ0`5:Khtl !}4gJNfy8B`$X) ;B$8alHu`ibT6 9G"!I!؝NJݭ:zs$2Eeth]J+);F9a02IVJ|ZPɝ<<2!95IR !0Tl !̆CH ^:AIj_~# KGVJn 沏|62U"&W.zAj㰅)7N 0|I `'=Hkw.y=U=&FL6p\<M +=V ,X"KvY12J'=TLhT^vЃgCor҃(E#L 0+A\WcVOzHo;B2;h>K_[w ڼr$HȈm2Aװ,i%3{HU ƑIg5zfZE&$#N!> +*~$PvpH#ɭ̎!0cP'ELQb6!{fbuBEK];B|% !0͌b=T``ꭋ{Fv04hydi:kߐϏ.PV~`X^NXgY1"?ìup= !L˰tod^Onɯ".PΎAֱ}B\ dwB`LLVchObr%ɔā3wѲX0{,9")آU2i:z9O}Sϓ"6:{ .]NX=M'Eԇ,$U0iDUOҢB$7"{+!JBh` !/F +CI9B 0E68G$YQc ;8B8t3"D9r|R!ɶ+ElE +vi&!◹!2Q mbʆcGHQOc9Ms0F;9B`$'ם#d) MmF;9B` 6Blr*C; c*hL+av&}Hk'ILNٓ3$f]AvʎyT[_;HB@(ߚ[,!1&X,*8"X4!(KN~` iI9:t癮|O"d׉6+ QŨƴn@"+ˋ%<ɴB1%seeir_,!rn }}d inp` xkd%t%_4! 9#ibՒ`1ΙFY.}f{7]&7ݑv2@~:sYMp݄D0]0jr&Khɯm+Ɇ {d5 LN6#_ihvts2MA"BKGsHB`c" ᯔin4B[@Z$! ь;`PeuM(XBDZf+rq` ȥvKH-b?,! d{AVu` 06̞QUlMj4u3l":1hB4+VIyMiBE]KD:/M~҄4bbO e-ȆҨ(Qi B(<5 m :pE> eM3oxB8EvfǴyBW%4:`>p߻xBY|0xB4'/l96/0^*+ XM)Y01Ēzkjp8FTAwMI6.h<.ґ66. 0 H[kcߋ'F˪@MHnYv4!09ĹhBȑF;hBZ3~p`,-,&gHk&,ҧڝ(#\7i[t_6 9@ ̗iC!hzHSgNTF]Gq#l-1xB07VcK;OH}]~)iN%vln'Y;xB%ԓ`L9F9H}VM;@@ό:{k_1r'~ñ½2tZC +ER3*J\TaQd+,=FjaNJ,hC:jw(Y "VWoh0 x +c jN{0 "ƚ*lٟ(nK}0h?SKa=SSS00FU >Q#鱰cMa+SY*bwFOMXac7cQn iscw19XmD1j> +`4gcť0mRŊ:3$T&D]4>ʋ0Uө {$b {.F# }.iFt.Fm%O@b٧?Qhx.fأ;vWT;bq%.&~8rSch_M^ .-beblϼ~)`>ɾK&.4 FbEg>$L2A\LH;bx w.t GЃcL\,h*㙸)`(.&hI[=E:tlbhZߑn=y19Fm>ȋIbŸA~= Q&/F5XNm{/؃X1XD`SG19?\A`,זHk1f̣RۀcGcMHQa16AXMajR +cR:`ѡzUFyia7' +cu?VK*lW"Nncm=JZf]:b71i?h%tnc]Qclu<k$Gbcc4š7(1fc71D|HMb,Ag_d71Z\.1VI01Ę(1F8W~GbL+ I%v+k} +O$ +ӱMb 건ncñXd0Xtl#$Щٱ]b,Njcb&Gzh?jߣ=h:YcYu 'Ac18?heNn1),l+ɥ;%d'Ĵncbq+=h`΅"cAAd,31\.2m<z "cgMxAdLPDcP\EAcLέXzMc݃y6I{c=Zc&ke~Ucv1yά|\d [>k.ɃHo"cly~,-}#zQڙwzy7 gAd,Khq%1XKE%ۃ 5QblG1NL=j}]kHZ?r5Mkcخ5\5V,xYձ]kL|ݵƠ ZX11v1”޶KI4{1fuG61t3tMiBJcwA}%|]iaz4Fl|G1$CBcMS F.7T%څHUhLp\]hLҚMhL. d,Bcb2dZ61GXF4֩]iL5JcpњRcZa]dnԮ5&&iUlicI8WO14PܯobcܒhowHc]lLg5V]lC &Mר1GO]X)RUmEb)9pUn unrc<ºˍ*VܾˍbrcB+ɍ17gJʍ1Qmi]2ǘP(f[.7FM { z=ɍؤl?ys)76tukN1rr\mبMn h*VDv1%GSQɍEڞQvʍ1VePzKF!W1I/Ftcf\d7*7FԅhWFR qǵ61>PάK#lz <rr`ܓ?vc:x.9`>\*9FJ 䘞:ޡCr M'ءSv(qCJLmcJG,r!eJqW1u*96mCR7űiDiĮMsHF^5`[Yz)9 %v1Ycsٽ ZwMq NscPI0☆P6)>0^):`tc~XV˛X!>c|ӞzocMg$Ǻ1sMrk2GMrl;];s# :vJis5z)91ϞK]%t'ٴd.cGc1p.V,鰋c͏]$c0/.:71W#jK wkc36Ar ;>I&9FƤaP*;I:jyqӶ +b +;~w1:0$hKT2va>Q#C1?Q#uۡ]<~T +R("=.c4ՄuS(UMNY ԣXj]p NNb|+/UzDz1FvQ+$tXbIUE5TWLSX5ЏR[ʦ9D]sL 1v171#8*X9w]oGI"zpBP*MK8F=]qb2 9Ħ_Mq!5/njY.vc. i=q,W1< &8FZ`JZZ&8+ 5-Qw鎝c,rcTId'cyw# cu( ʥ~z''KcB.8I,_ ;9G1 ˦7Fd\fzC%vcT5=71"( 9A +i='T]~MIǐdbTxC q +$OFiOǘ7\1ݱ.&,T.-lt]o훏Mnl胗+lrcȦ76LcsN(&,-SȰN1O8o鍩85IrcT̸:.Jɍz:.W1*_晜%u#\ˍQb6nzc!};HK%wmrc `p +$N1*Bh10Mnɍ1&ܘ6$ }Mna$Gvnrc#U,2iD2zc+i 8F@@*8F%BUoLrtL(1DɍQ9Z1J̛r%ؘJ%^ʞĸ%d)1M懙iQRU14R]d|`݇* /h8\P޺Qiɱ%6F>s#Lbc\F^΍Um9pU#}ùjcdbho )bS#J6t`iޫUjcm9;9d)1Qq=Ra0ljcPj9TژML~ۯjcMm ]8:w1fd/Um,[|XV'7mjc:M<QW1?^W{eJrjc:]I+!#ZktjŏZcL)&pUkDXة5(GRl /O:A71&qQwi$l971D抶tN1"'1H&6TMkXZcLppd v*3Kd鉝ZcD!TwUԘR`S#]jt$N1$#;T#W&5F*grS\/ctW gt*Dl40CiLhNAv +.9tSm$ݦ4ᆺUj,̨Mj,[;Y.5VMj,܅71s&5Fn)-I1!v؈ Ejȋ |mRc%*vәyٱSkj gcZ2dԘ/wx׫M(\MjSTOۥƘ+,nL4]jFd͸ͮRcģx ;3TX+-d.=Cj 愜zoRc: +#UiJAW1Ui o.UīE1AR6@4ڨ6B.Jcʬ?t0wwq;[uod1"sBcsAis +b@2 ؅T|y Eh ,ZdN1­ F4_uƀ.=BS=4.BcJB^TW4R!;4Pc}9T1A3V`W1_XW4RlJcAsb(vUSo>Ǧ41,ة4:c]y6sF|r46Th6.:cA7k댩ݒOQg C\uc)4 ske^Ƙ!nRy3+:C71AtIco*cQSBYran42clN1.ʌ +yJɌQ +큩5áSfR:Uf Iմ;u 0βИNF s|܄ƸяC6)yNv?q¤fwf{F3dvUg,@ΦNMg)tƲ + 錱f&6q8EyI:cYekUh0QgL`}t+bs74lMg,8ӡCf ]11ô61zY̘ٓ D.Sw# /Ɍa@qwcP7#|}]eƴ̋Mf;֙ˌ@61q3/vѦ2FxS@viMe"8!qܛXѩtEƨ]s͓eK܀D}D]ctZIhE;%hG<%#vJ[B9cc#0FTL\PbV`SZo +cTN*mbthnUMw7/VirU^L˶Ib:U ,ʋQ#evy1UM^*.bM^Lg\ 9S^ P-qip:eD] Q*J(/c> eXSy٦lcuOc6+Cek&&.c#Ӓ&0tC`9]`ipUw1ʓږ0)0Y;;71-Aҍv*5;(4bŮ +cMNƨ&JUa.`Ci)l +cT ;ƚ&m2&0FYcpݼMbLk*7;%؝U3кc4^c(@ W1%x?áSbfNXo;5ƨ4C|C-թ؛e52 ;A`kQ:K NuKӺǟW1ccŅ2?*1&~08$ƨ%2>v1U<:\(s!(Z71U?Բ>*KvfbwQKֶJ/R;@)K0D%*QB/{F +cZRJW1O䇆kM]ƴf%1*ˎ +c}S@jriW1IND^;HAIf2cZj'}W1DecZNصhZa1"hv8ahӚI G{ vUcNX1F +֣Z)nc?>ncF'`;5Hm.u1hc]cܗjUdL0L%$v)i%αSd,lЦ1M"܎Mca%(?jIӹqf:71z USd_w-.pEdiY)2tN1y(LK,ӹ"c)Ǘ EhO 61 +rtn"cQG]qcpe:fz]cL;mcd s<ncp0ة1F_?w71bVijiE:HcedW14[1{iEXgr'aM׻ydzN1]Xc.2F]bͰ\E[=qKjVG.2f w4(RN1jc}ud!l.24 +#umc-b5H%I!9vJQ}J]%ƴaMbLs͊71Jcdq IGN1M`h.1[y 5q#Ǫ.~c4.1FnZBl'&1lASbL/~]b,kp9AĘ60461V&΅cY+ cu'eEHUH(6'15V2FƂ*c*ӵh9CijPU4+,o1Uvj62Us}Wcƫ6 NƦ2F>ɕҮ*cJpR ;UhUs2uv1"Ag\2}]T-LbS#,z0_{W#%˘0٩2FVMe֝1yW#J| m9f"rU w CdkaBb T9*tXe@61fS +z =Fn"cK>l"cE}. ï"cdBuiZBbX_N1(N uMeLh42Tƪ]dljȦ1ưRDCoow1rw1z"E_cIUNy#1ɷ~I`ӹr 5H>23}JhgP]c٢h| 5b7 *{~jE? W1&Xi_ӛCB\c鏝"c%1pGSjw1ҁdN1}T,[c:JvA: TƘivW#G}Z.*cDң򞖷iAXة2F9}Wc8IUH)2FEz*2)ޅwF KccM=71cd]̃51.W1Ri5lڮ1Ԍ+ucXf/Ռ6%61u21i¦ScĬg754.'4KiK?vӼ1nc$sX'uцjufaX笔wMvu=+KrMd>twɖf.2֕J¾*2֕/InaȘeߣn"c`MV Ad|RxW1*OC&3&`l2c`5k}Yn6x|z;ݱSf h8&3Fb(^:vЄ4ik})1?r&JzU61M m2ViW181M#lT˦26 DClфX=ǴO*c)ևv#QC 3֍dWn2cdc\YʌC!̘fjt9ɂ12b*),nbohpf3>TN1ŐXQa41:`M)eOȁ~&d@^q):$aHyg:(3-Y0LV1[!w;㧲,ƺ+N1Pm.mHsOElA })Lb#ϕ:<4,3cXVa$s,eܭIbrۉ]\bX?l龶t,ìCVX-P&<s_JQԱ!&I +?, Xьt8<ä(5Ÿfu=1↢w-{w-Y0Ynp +한)bwZz0`` F9[gĺIR:9iy1wg."?I9bl:I=N#s21(S].QTЦQxe]j2bM5NJP@ٱLہ~6Zߦg԰\x2k֨E f͓y$H|P&m*#pSd1H˩Sۅ۬J?J(uLlQS=o_9|0"2ТH*]K<Y3Ԉ?t1 n:ںMp `:F)ۄ'*GO[c=sh 3zp1t5c sQo< ϫ1P>MOX{1e}Ec8ڌTYW +7'6ů5=h 8~6*3Iï6AcAY2WAD ˜:9G;7m*|'q]3 Z`Icw d눒 :2fny3Ժc"m6*C%h3^dC=PZ!AIne,cjw3G|c*ъ1V"(rIbURJ;otbūqd #9uTbz;:^{pdz7PR"Ҕ] s2G1}cxЭ1 W3meȏ45Ei8xNF0@UX1$ڴY`rsXh-ŎlaW`LS.a(EsN{S^Yry1bD0KJVߐֈeBX4IŊ ZMf=@y$Ml| n6_Bmۨ*:VNg3 +Dd_=TZ'Ίc ]rvYu:ip" )Uqa261<+fx)G (*HU1Էu8?96 ,O_ TAxPiC[.0v+2h!'t$FHQxKE/VE&pg3G{E#* iY%!/F1> + #KZfpT :FuTGY(YHP>| +Ur jFc+ @̯ijYX!4_Y!;әAp.sgqŒl’2GP7*3ФiqZ]pS1̴R 쑓Q Twc& O:kf4w51"vqP{ЩtPrj6ix#TS[mz}6] q:16iO;0Vk +4 +e':Nǐ3;yYCڇOU{Y8vWsXO&20'0-Qa5~yl4К>X)fc| SRJ(a :C]plX9$~5ˈK ^i1׹6HT6ےPWfv^5)湇sf7"O{7tGQ 6]g(GLXyx9ٔ&F bEn]ZPמ hy4}PmMMҕ.^DV;(VOFiR*6 !evdk0cK3lzsY*<gPb`Few,a$S^ӹ"i˃CsoÚzURV5aLif2|ؙ +hd\t.k YHDEg`Ӳ)W:j yÅA QіYxеy2s%&}[U2#F3p\Sޘ2KlHelu݀3Hm1ND[]k @&tuCͧ$qi>Lg348WO\k]P6f^R4͵6CƎ(ԅ 3OdY +ĂiY=ډƣz_Y](WbZ25cZ`5!Ia{,5 +eUcV +5^&~b}JeXV뒹6dGE}7phMq\]qSf"3}""[8d]KYZu1F=IfU>-ȕHg`X|{bԵbMy@oeP摨]5_Sn7HȢ5eOS4mM'Do3A_Fm8փbؾR'vFHŨm ӽTʪD +HqVGI4婿^SL@ts_FJ[L0*)wGaK8K'%W$<Xcic&KU]HFgMiJbSKeqĵF㾾m%%ɾkvUeFű0-̡e_Sh|>a%<nꈰ#l  +f*ƾЌ8_etձ/rXJa)rjQg238vQkQt I'A\ۜ)B&XveJglgzͣƻ*WrvfN4Pg;%=R!`T#y}OMt,XVIkΰ5y}5gNMiឡm4J#Z0qІédEl}mbMZk)L x:htu!;u@BPzM#16a ۤ>&`Hk Y(.'b g/]Zc J5DiP3Rh:rH*w-KAI䶮fBJ1%@N=WNR>e;`=:iȓy3)s!^q]F+I:ZDѫZ['nR6Ye'cL&g70 Clbu] !$) v{9ZO`urGx6JW"m0"AoyTDs&¼S[BXڦ-&7M^>G~XҪl\<~I /iฬNEL9`do>ІVm"nj?JպZkմm5` j?#DvLqvaCAos2ga \39d58qĎ$r]N^m1uȬ4VI67]JƸB[G_!r] X[dmnN0R9*l sT1GEG0qfea8]'TBѲִPDtFmMDONpQ;樻5oCKY>6yfBThhor%M9$PTHUzZ`M߄ /?,:1Xḱ`ukNc6hcFOաF0n=i:s (Ƶ?{+˒Sbh4 R$4Q׬#dCX=>3pϨZ'׎TU ωee_tOXJxDEG4s7/]iʷ#'*0>uFGiM,,՘QgyQ9bg4a㜣MA lrWM=XsQLVOXTIxˁQQ%ODXXv? n,1 +hULE "9,#D\;Bp0"LT_œU4lJMR-`4α#6tVohD3ny#CQeCy*ScDjkVJ2 #( >Bi_kd7Xmd1 +s˃6[MgIfI>0|ͮ:Uاd[v B4@XlQphe0!b6}D k2"*0R1WJGS*IJQDhh- *CLM).ӦMa3ʇed#~)a>5j\Zpd^^p|C=>@qP 0цHȕ  2 5Y>4/dqj xJW2J18 gufbĿe$7 J0ΣP?\(W5Q:Fϴ&ԴM('LJJbfqn$Px;%OBL3CȮ;`SnJҭwBBݙhP;SFISA# +=w'|^8%BcWK%jfPjDcwe`wN(݇(؉cM8Y7\M)*ACjׯ15 ' klU2dc>0 +S|.Cɤ +} G:QFTNI%7 ),nvSgrWSP4y5&~@TAu %Qy+465ی]¤FY*WQ~)9|9rYd<ꑸT +SGfbRLb2d v1v'X2iQ 2hBV_iѝ ΢蘬hj,z*!Z_3E}[r1ufBKv}YDv>GKBr1o-phԵEFRFC6F)^d˾&*i-f1W5|Jn+Fhwy+*+w~+gPUi. !IϤ ;b=RM&3yqő٪2VibU*S,P";cE̱4*XekӃ:+ug*V?)Tv;1;{b^_8$fFt~֪Ӵ[p1{8bS@PlzR%K9BubӲ^S@ Wǖ2O<'7"ՔѸ76Q  Ts4FFM9KU߳o9H>@%We%Gjh Ndd>M,#75+6X/vad% +tX~m(#)hHT/j.D~ +|ѣj(~՗Jz;Uj2M1LS!P[D kDv/_=XUnzߔF)^FݞiGe.^Q8i8²~T&6Kb[(#!⭇ĄCAcT1qZwm6Qa|mPS(Nб /| "jؽ 0qfiohwq4% oYoiZo1n,wYw0I,[W=xQA!F`%%S8G?2Zh0ϖF̻<8e[TWk+tIh4g#P!">P $GCx$`tSUMTe ++Pp<IzΤخkev4 T/ཱུ@a +߂zI%SdFE)W, f_ixop\nQ}Hp(n$!dQ?CŅ3%^.To|eʠV MJ'?APH2ijtJ=~ B[ycIwcVLv`VEG:_o$u;^ }sէa }sէ7|þ#M,+)aK7UƾJӥ ު@wΗ~ްU?7SrΗn0{~֝E> ;_-jvta[LH,Za }op ;_xbK7?Dia }ozx=ӥ .!f f}oWfY{Ρ f}o͇_0ݬފ_v%6a f}ooImjٖc>_P癏ӕ+MYH3}b;BtK7վaމ%= FoGf|efQۦr/VB{e}}EūzC۞5w۳ ?n[U-G}~ }~xE7~nKxE_$ߢoWo ߞ~E_tݢ/~E_.nW[oW-n[e-7XE{-Sg?Zٰ(v{ v{v{v{V~{v{v{~kv,,,Lˁ,q̤alQ8_"U|7q|g̳!mg ٧gO^>zSQm1Fk?tqM;(?5Wn*ޑ#y +7U +iM̞ +X=ވzS=^5nvo%^nvYQ2W=\ l[xWNě˶]2_tKU:ݱ#%z~of~S%NقEkɠ^OxXOGpT<7L~,Z&n#F{iƈ3d%8GE+٢X^艅dэtl/YЯME+٢^h!\,yVEQdB6Yt+-jgn#Y{ŞTl}jX V{VAbʟv>",Z&ncP{Ţ1l}i/YPMƙReH;Yt#YOD~&~C牬l}mX-VzEd6YtA+lgcf{Ţl}l/YPME dm$lX-}VAѮ`Jv>YNG=+ɞ^geT;s+,Tjg{nT{ŞClmdjd;s6ssg3~Cv{4%-s3ϳ\lлs?:9Ao\=sXυ$ls?Z8E<;sU0;ls?Bds?UAt=s3[υ4ls?J6T*/wÿaJט.ׯDy9˾t#/cKZ?[QRꖿfAG蛼?6}w۔jT_rv?jms|=дHĮc=nVl`Ɓac q4UJc)mw`C4FVTsDXt`nK2!Ky`d=#7\r9:%OO=Xsߛc-ȋH7l[vL1P9ȷP٧ +'r "!\̹-:$[&- T?BiK*1d0[yqp1*`ȳv|NE/./JtLFM7^NYodV;?2щ;ԪcɟQL^-dXp&wݱcp|Nʶ&|`24+cׁ &c>~z9(>|ƣ߶+Q5Cctdff&ks1}`,hl#:e7à l7*~Dq„s>X߷u<A)J-frdȘwle'i<  ʒX ]9r!.rza˶4~U1Brt:&g}`'z`Ueα {Iq8>x2|I=,K5%vaoeX] +%pXE%L)$=ee90}1ec՟8kx벋\˓wRjp,duL?~4"3cRV@n2!K,,J,) 9~}xj03SV鐋ci,΀c7p6j,)9&6q22CtL+pW/3M3Z^2=026v/a)X! Z[jtWf[n>^;&o_;&[.XPOL\T$,ƺEq2]8&ei~Y N+U ҁ>+1%}@A e;$(2L/6JX;3Sܵ(cWŹ9$wY4 [dmL 6TRi*rL4 +Ʊ +:kKulXϲ%[FnW1ӓ !Du6_& \v잯`~Nwv4lb[쩬&KɊ,@t`2ؒC{ 撬ld2L0YKl+/7s9wd( (Ǟxj&107[q;҆g('+ЇqJx@2ƺ(L8Dj(nccd^;,9?.&z_6QU֟GSYnpY4@9;9dǒxβͲ?=Fa#(S &߽!$_^UvLx#cӒE\Wx12t0dq +kLa8i;rD9&HU6&Fc/C/YO ߎ,YwٱƊ]K Xe69baF0Ye`]6>Ʃ!Hv>wi{-Ʊu6ˁYtLƚg?rS~,N>Q,.Z$X4-t;[FwOerd=&/ArTN8 lū{cXeL`{y'M|X ]he:&m Am/q,9I}2" X_-eP%dB\BG$^w-LEM 2늎".͒/r;;?|Ց|EV#0`ɦ*g?{+,!(S/B']gˆD&c2oXh%:zէ݅mfդ`z+vtU1 fdy8I";ڲoXxb2U.yLT*YP AL0c?Yɘ8@9'JhLBm$+O hafކ`91[WJ_]K)Beu"Š&;-cFUlv +҈ڌyd#4qw`1C]Ji&f5"Wr[lKn]\tQLހ15ҼXWuMj}7M]毽axŬElu08~N : +-L׎]މfGfMV?խEf|;:v@|QY֔T9ȉЖ#lrjۑh!8de@”r@%똼 _ $CCdSi.b"xi2Zi.! 5c՜䘗 gGqusnG>YƽA:ZY09=)SҾs8vLR7zXλz|]/bD, TKpbӻ(/DNWNĨarĪE;sOОegH?66I 3 <08F/O^~j#"íQyJ*se zQK+u/ɛ"D;&6RpGb#RDVfXhĸ;o阬|ver#9Ĩ-2oX"O6M[KPAM&|GG{<&FwDܴ,3vmT2˅̨`oQKMcB޼x ri*[1SM4l LNN${bK'VfOJ)[aq~CGjUX0[s dJ~6+jy0;&^`c-edG4F[a +?{CSǺ "fB^IN^QEBv[wdɝI+O}5V6LCYk q +&s]Fr)'tj `tw ) H@=1|h^6LSW=1ڄZWk2Y)KxYӦ ˀYb¾R\5J~@.E9%IKdKb7{hUhlWGbr +pPCk8>'{u1PVh#,"av?N LF,yFT!dId;ӝ Ⲋ#.Y3f )8fɴf~3=̭1gKsvn>ug,:3xLh/1L|ƢKe$7;1"VJX|B;j%dW,w1U3?2(eH%a€q%nP~+r֔&]*7Yr.cףPŲtJYwl|aX]#X1'ەzev3}e옜tev3 +Rk,f,`ZnoF)nD{;T.&Ki\e4>ؚc/SAlɺ;dbWLλ91\Ձ` V}EfACYM1Bcr2+Ƅ'|䘜PdyECf1B<:)xGvU/wi9 CJg3]E +rޓa2?v/);/-`׈ P{g"('H2P.O+,/.Qca[)qu +,mao9kB[1^ZGaXl4{҂U9'~d|,5D16d զ=}gy񛻭`(&*U Ki`dN:0CR84lV [[8(6ػ\Qb(a;foxLEbLC f +ICvD虴 n+K:+(ɼ m%-3f뢒Ss> ["|n[ m-;MA,#UXM5?&@>H;uo)߈/ʻi\`6|S1cM|WL2\<V=al 5`YSQ XhzXlDᥖ?)ZTX+*P:@5L.aDjh XSl +8я^~mZhcګ;`REjǤX(*oU,g=lF,Ll-;{`D\T6ГY/.*E09e/S6,LFN( ,`ql-A{ǷD,S޷dT8UƖ'#v"cuXhˮJOb?k 'Tv+/VQA;<U-*F'NL `r}~dAplzU7)FKpOmdaљ.DѲ%*FR[AՄU( a(&A',5.+Q ƊyQgv,稕~D>(%Na čb1%Z@Rb.hAn88ؑ,Ffb@|4P*FS+hQ|ߏh1a&^*.dSɌEb;BKӰ},k`E6@q,|uVǴ%Ǣ=䃅lNND*Q-G]"r/n>K9`ti=VPV65YV^я8DW Oe(Y2Rz>Pv&cd a':k#s6ˢ͓AslK}E.١P∦z14˛#$wSM]5H䀬|A0rɈkWZof*wc'WH1A!"Oeu +:m8 LuBEXR@1μVfTd0LcĒ{h%S(եS 4wFԱD8]v Kl2Ϥ^AYfS ~T ei|tUPkTdc`{[ĿS 29_6:LlXnx[b!< Dc~Z@鍚@i8  CEJ!܏m|*^no Be2w+&lu'7+J( 1C(5S>FNƤbֹd(Osu=stl.:X92Mi5d!^6:^#i%x0։L_ {G`ڌF9pa%J4è*[Dr݋ߩ 9hdUB/ NYa|brglE'$]1NXwR#{'t7;VfFurY+ତFb$,|-Y6ywՀVe W.KЦ1h @GLxS PINh 4.cd +Qt +v4yFڂ7CNS#e vWjVCVms~8(& A'q&xձbHvh/Qk? hMV$]G9,y 7r-8&_F9[o9S&eY[3111@1Yv]'H62{d<@"CnS}`Ң,9ǃH6},PiB׈48;X%-Sb!Yl4\DrwrTE꘍nZrl[/C W{ADӭP3NA_0ěe1kA R)IyNDH& +{@[Qk3 p ~5Y +U6RBBLMEY4~Ul+@;dL RN`{MTm)O=]N9d$$pcA3 ϝVkMZoj#C*%dlb2J-Va>(@цhE+O*kZ5 n]1w}XAs0{ZgKՎcbZUlZsvfQKCҮ62 p2{nW)&o͜@'iNM[i^vs yAEvISVX#|jR$ +f]`V-a%v!e$˼mY@kIJ^՘<̶*OnT8ZQ(,&ʪ)AMj= nHW*H:JѬAX n L ކ{ωՙqL7D6l 9Zā)YD3 0,X1ŨM<[Kp,!b1NEt )VEB +`̡DSv*QkEG@u5YMYM 螨 bl3՛vB|bzynCk9+V(+ n@)*BW4 aƢ\QД5È2`Do<00]L`;Sz5{br?"hǦ3:&gҵ(6:+ܛ!aQ6/Hom<Sk35!?DFGdꒂqI4~FGeTrrn@DaGJR#,hL6NLVrNqD󑱶g|9M:PHL) 88Y-\Rp$X l0."U âVV(&;YViGъ,9ɰp& [5gI%Eϥ̣4=7"^*8Kˢ+[YËbJee~n?ϵ;&sc˦BNiIǪ&ΣDIJmsU&fZ-F+O]V awyA[>LT&r96*eadqԒZ[lqܨQך,+7Of(kz[5sz# )HIV@FƦ%Y;.c>gѰ[P gRH|;X`c'.%ZȲFؠSD1눳L}As]Iێ=lS5xܕQLhB|s  yaVZln >Yl[@zd=4KM'7G&%a0nҚ%ȍիkPL&-R=\{2NJ yW7e:n_OÇJZlBB#4U'MM4Kn6J Eۂe`1ۉX)XȖil(ʱ ;0SQvialEn]cPmb,;yV#&1B,,?d-XY4ѽxԣv&-ȅd+X}W+B`[ױ,6q6)e&iݚ¤ D\dEh>Āy(TFݨbKd&gK38{b1wFF_ rj)c[Sx2XM[ r +zUe'63 +dLi% gvf0jz\f}v?jv F6wlmgcsD]M8l-"-wʣ2L;ɛJ14L:0Ԧ`> TR*(1[:x}py5R}Ri\҉p(Kf6u=MW4R(fql9vqL)ǒ_aΰ-(R}0:B-\+^9yűL +j,0x4VDGcfmP  Vai290O_@$v\-٠!gw+iu/A:m O2.CPjFe |%sk͠FdzJ@ZQb7tR2Y|7I,AohqLnb%-zl0vC4y=q\AHL2,1uQ2̾DŽ$)6x WTE@GrP$ ekP +lgWMP+&{@^Qi2q1ɨe#` +S̮E =nm`=kSR?^oQ6ԟsv+(y} +@KXZHX`4h>䘥ص + 6昵2h trDL0Z;F Z{ Rv-\9F^ɡښB| + +S{9 1LAqtqc͇ Z2J!X~Rl]l[T :bo~ӗzƿb\]"WZ$Fd0F`FH.6:jXLNzږ `kVKwT0Y*-h7lz;.B-9X =[ c#ȆsiQ Bi - *F795}dD`T5$j(|͝*cZ'W +}Ф380X6X`~# LNŘVWG;a#uݶ.:DN- dž^U4d-oKN-49E;kΉ-)=1(&h TL@~, +4E6Ai'ͱQh9`3͖fXt-G).0dV# w[ eQP ǰ]` q+$ǪЃBCT,~;J^akаO1Ĝ0Zb;`3ā*F_ڳCwJ, 2Z2̶Pa4[;c;4vkԒ,Yk~ 2hCҏn5EwZ1DZalHӤ5}O +zM ˍc/tZ,Zj17+mVkY\J6lO,6nwٶ<{(@,ƝJg=)BZJgmsM߮tK3bٓYqYWΔ{^3 T.Μ?Y&߭؅ҙ'믔4ytaJgޚyt+]JgEDnS:kT:+.stR,΅ԙAJ]H 3)C"I,9)(߸:^DZU %!h$vbfObgr8$v6nK`K5܅֙W](!lؓUΊ=+9LuBgJHy-tmBgy-tVօЙ.JMY +:Ί+3k(:CbǾBl uJgJتt&g +ٹZvEBgX:۬RXferBg53}h:g* -'G{9.WBgъ/΢{kWBg? YÅҙ.#\P: N|t6d7هBڪt&M 3nrlU:J?Ύ,ueW:Φ;J诤zuY *J,c޽:+Upu6*M/6/:3"K3k;+N|!v(uh;Fy)v`bgΌcRL{;rbgClU;SbV3{V;|V;0jgȪv&K=5?^5絸;BςguV3f,xLg;;m,w"M 3vl;#:8dV3cܙjf +/-[jug3xb^̳0,v.[iGUZұY쬐Wj[&III!>9|)RlU;վOjg@:ܪv:ުv+׳FT~(Mrg2,(y!w&NggFmYCY[f-ͳg;=iOjg`Zڙ \kU;E7{I,mX͂g3ȓb($x1> ,c׳ޙ }{rgGY̓abgîbgjg,v&O92ުu&okZg6ݢuEqh:,{zfsuFY<>7kl"0c:Ch(-ZgH(YuV3j'Y%k8``֙<.u3Lܢuż-ZgoiMZgOCcIL&9ݱI댘js'39;oԙu IB|tFss'3ʤtV I j;e3:_](ֶؤt]8qU:xJgxɓY?"Jgh.*hyىIyY& +Jgd:T &3x7V\ e5h; nw*E vXAf3ɏElS)(?ZgIpΨnެ9kqrjOzhQ$نhC,h`ʱZY㽕x: i?"v FoC,PI5+YNMIQL΂I,$RC쌆"i3䃌w;} 3Bat@&t:#f`|YaE6=˜QR;u>ڬxf3j{_e)'3@kR9ZgL TyV9˃s9c)'#d + +w9Jx48O2gTV2g`q|N2gȰ42g*R莳 Y挵qwK̙ʾ@݃۝dBL +UTItY,*e:v: <wTM=˜-4Ty9K#9˜! N2g`"v9ξ!sFdg3+_}~eμP?˜Ync̙|i=ɜY"^I̢4!sf`]ijc̙FJQ3YL,s1ALg0IQn>q@'_j4YL=HY&38{Ȝi5;v9#䥆 VN2g*,M2gN;,sXrF0S6>vR9mٟr6x-3 ƾQO2gQ5/|.2gɣҝe4UfY猦dB'3 37jsܖ:PˬsEs?qTqwt΂,IXC錳/MY`YLe֬tx:)=SۘlNJgh{MiR:H`NJgaUC,r(I'3-\g3vXA@qR:Sv(,{(c؊SLJg0/<&E %,>3 ~,tdĤsB_M Z穜t(8sGs˦<:9C,{sƃ= +sf38hvp XZC92x?3UV:'33Q`CL 8{{Qmg&3dʙ h*gQ%dIfY>[mCrƺO0r[ u*glO>%'3͋{r5 n͟I匈;}l%{} #4> 7sV9#ӽ\sQ9K)Bz8t0"gueeM=EL+sPZhC!rt~g3uݪm6'32Ek0CLtV=%o;Eβis9dEcѱ.H$,rFzΕ"gɹ f3Ri]|L"gY:YfK'Ld\=TΊ+c32M;˜Gؠ ;ɜi/i̙[ f$s|H'+,sV PwYFc$sVI wUrّLסe9#bl!ɱC(ǣeʸsF*\t<8.,t*⏻ɤsFWl g3:u*'3 ` YUSm\th|4:gJ2{U}EY K:݌`9,lV:#>*>3bvRgGo$uLNv:C w:C;mv:Сt۱HȤtv&o?+E R7SѱC #]utN%]7IEqӻ &30ߋ:,uR:AI bY0ILU*Fr|nhH`}:ZORg&S]vHLal:SJju:C2>cY L6Y̔Zi5GueqiY,*/83P:C8Jg`xtuT΀v2x9+59cE%lOJgMbtKڱC HJg`#g3(!S?:+QlÁ\BDOe!R:eJxR:C6 +К\׳ҙP^kR:Ck P:J?g3ա4!uJy$ufJdғԙJQF\h)F\(!ydV:_Vq/JW`.!:#6֍In 1\Y]--7,t%LY>ONBgڶ"&MeB)t8Pɤs%(\dh??$sFeΔ$2gp:ɜA +IU +r2{Ȝz8'3 %O?˜P4n;˜I1ȜBO*;?˜޺HI,6OʼnC`{~,w9S2BҤsFh@{ѤIE,WhĠ#ܓ\j9^]Δqu ɩ>g3B"T+΢IxJ; E|2HjR:#-5g3ZdhCʰZg7TQ\QP;YJ\F;*Q5h𹈝O/?37e$wFa/j;SCe;SvXOrgd5/ !wF@sg3*SДI,*5RN:;#. JNrgԡRnI?v?LrgRE;ɰG|*z; +1=(gBff9U,wU{Y8`*vV;#1pvFCM|;ҧXubg3s"vm(!v)wX*t;c,N(M 8;,TrQGs1,Ŷ,vwOOLbgZB_bI=ΔWo%w`!,ve}gl(`=(ؙVfYjwύ m:-`g3Ϋ2=>kQ~'3ΤRprƂ䪍Y&vC}iv!uSf7RgZniqRg0);Zrtu=N0KJhv:#$5%.u:ZE8:Hqf7?n:h Y:r'q8 Ǐ; ɡw; mGJ^8 i@p+}HѝΨGtf,q;f3*9P:+bg3n^Q AY(`>Bg{tYQz.=8P:+*_` +Ug3 @ >TJgP=DfBg5:g&Uh*Xe8HU8G݌Aˤqf]{iuX*g4#ēP@{q GWrFIgR9hǪrƹ)yQM` +9g3'bU)xʜ'"s;zQ۬uX:gQF#r YˏUiL)Y~Y*;u02gnG tN\rFr:frF<E8Nsd~"gTkG*q(wXZV?O +gM,().>uV8d8cU8d WYӒC,p&4-y +z_MghFʢB)?30߫E HNg`zdY,iw"pViЌT S_䫷]!ptŕNgHFht=LghFdi)!Βs)F2 %~N +g`U]lpfMsR8KʸN<+)wɤp$dBXBe'r$_0Q8 ?ǿg`"_n/P+ZAK&po1R,gVΗO>*vo/bWx.=Ogݬ[[E{JfMn+n&TbjurUVaa-v-ѕ5]Ů]ڭRk.bW{.{kveE%Mna+kXMCE.b˵[,{}͗SgZ-v˹e[-F`MekX/i0.̜b?ŸO|^_iZkX Pf[,,|˾Vlt]Ҧi5b7lveMyj6_Ųo泥O1{9^j@+q>N?mCy$7|H/ck&}c~jn3v$-P1K7XY-X?Z* ;]y7Vg ++ð,ꬖhrΗnYFX Qvte\IHfSò,n?lUًeK7X \-SΫܰӕwvio4e7|˾SIqReK7XBQ4/6˦K7XbT.e7wj)[vte赈h 4,;]on }sGhK *eK7X&+*)uNWnR톝/`7w,ٔ ;]o` ;_'v; }w[aO[Mg ,eݲ,mZ/Qa }sH\3`te\JeK7X?p[V&-;@Ba }sYyte ,^a }smg%t˾ȀyuXvo Nn{@%g .`7]f `7w qQw1Wn뿜Bvj]+7՟Qz8_o 8)Wn+?nc|`7}8㢻]+7U_bitH=]q:sdQOX]Gtw +49;]tmr +ut[_kTT۹:p%?rn}}je۴v(,=Qxr6.|z:ȿ۞=ƿݞ9Ŀݚ=¿ݞ9ߚ}=ݞm=ݞ]=ߞs wx:ߢ~N#-Zh&Xg:-Zz)O[p <o)t@E $,OG`Ѿ[p<nQActg˿=|_)$L2#7Jh̅^p1"f U #$A/'0??_C(x@n&;%Q )}Ä,;2o{/=?oxg}B*G=Փ&냀Q|7ұjRdosYVEkɠ +J_ +xX^P[0|(Mz;:9)!FMU[Ğs2FW,ZXsF=+[٠hs^he9[t]K-8Ebʊs>z,Zp&nyiYpF3d(xGE+٢y^dэD✗,Zxr&n#yŢl}D9/YLFRe9Yt#1O&~C牗l}=X-VEd¿3Yt+;g#yŢol};/YLFE dmD;X-`V>A`ʣs>BYsNG=+oɞt^g9sq+,<9g{n#yŞlmD9d;^s63tg3~C6Ѳϕxl? I] &,&=t%,ЕHjӻ@WMo] #6;t!l__L- KBh+iŦ焮DfޟcXmzw^Ja홡+ զw熮ޞ]Xmzw~Bpa1+Ť.Dޝ%WXLz{JXa홢+Iզw犮ޞ-QXmzwJ@azɤQ$ޞ5qXlz{Ja홣+զw玮Dޞ=kXlz{Ja+զw琮ޞEeMz{Ba홤 )٢.DfޞM_-z{>Bxa ɅŢw.lʻJSOِPMVNȭ02/iu#=>ۆ&A-l ?{]~xY^ݲ[I?[6hKOWn+^nMY6W_5oLL/ޗZ$W*{!@ @hq{̇d|+ h_U9'3s7>3B=aՇ졥g|=O  !o7DT5ן8~Ÿ =z?jDT7_N.k -?^G/| $XW-} NO 1̐szroXOܲ}8BpQ^\Kƅ/׾Z#b+i|ڄ^onxaky-`>WUCɳa +7c&=|Z[xwXN-:B3 GX +Xe~by9=O,}q7 ;+'9_)#;ifoX||bMF{L^ h~bDsD,ylz"c2_O Ioa'߰>BoOZyg%c.jce/1+A D@s4U>Y_ X2Ṿ@09.A4O7 才9@(?0VB 66KdZ9/{kO EG'v`s$3C +7AX7l4J&.` g*97AE,rKl9jVԱYR`8YH%0jOaÖaa7 xQfP qBQl`ԇa8 *^Aðq׵76Zpi~X2ia8gsWŸ9}V[Ư_02 7dDK=Ae//l&XZ̲P0c}"a3s2Y$8j k!2* o /z*w7l{'Ɖ#[o7԰MyԱ a`]7 k -,w8L&k83,<[dNia e.lb'qᓾ2;|5v-n10ANsa6u4a? h}ðsiqݳf|Ey[&8Jd2 &kyp^̝CSλްܙdv0i[C&B9D c0c{a\au]duh6'' +"(pTiS?1:sIxolmR +HwM^,Y CPR7L]m9cL̘Wi ra[}.6s>}lڹى6N7 ˝'޻gM{y–֗Epް󧂳epbg[Kua2'm8-$֤4ЗٌCbp + CS É'$,= omȔM4l8WB 2<sq ¨t@\G! #ǥ bs-Sװ.F^Ά 1-Nŧ^,4Dh42AĈCKjx XϦl&^e5jÎ,iGapG˱)}}?/=.i +ܸVd B0l2a%"4Z)ZNTvzX}C^yMn}ar࣬wl4^݇^Kfn58b- :c%p$ kU_ ) œpFgjy?S7h kx_O7 Ϲ F>n2WÚC< `:&9BxnْyGH^c%6-,ҰkXs3q10 0Ч'M:<F5?=aY~j7Q*Bn9<MY_)uk1a:Ln_k{19z\&~("BR 5}º}cY;)sz j&s2Wf;ר~EaiHt|hC@"VX#œT Zs^[ѭ&~wmz Л A}X# +- +=6e֏CcNc\+sb.\\?prvNm2E1i=0us}Z-!lamFumЀ;a{ʹCXRX]1ފ?/&VV"xAjDĤ8gbiXEHPW ӘT1jkwU*be]@6\MںV{$AfQc;\iZw+b4$\܃L vHƉ)gcAR[{"ʩ}=06I9)HyE@ņTʺ'0٨lD0>~ݓbHsܻQ7eE*p )< LC mQl@÷"Z1.n/@p/ +{M]Q7ݵMYAb'&^H2l@$zf<5k9yl W f+r+ m1 X +OͅlXzoslk={*ip"Pmጞ!YV3bjlEPXw7i8f`g}x:ɯqȪ$-XX3Y ֗ݱuuPZ=jYiO2;27:o Jd%0>l'~PuljkR49mO{Uۡ͊LǺDYwk!!YLl&a\/nbh2w2\&2[WNY6|DьuæU"ocչX״bB`dVc[شViv8jtg"NʨɭNyؔb"-2 T݁] !]_t+i_[FD0U4+[ap»gj ~ 0^7 /Twkyl˔Uףw,t-/5ynZG!C2@7-VZ6 -^AֳM GnZ\7yA T1M 8T&ݴ d栍IRi_2AS1#>hAaGHbY9:,=hAtR{qюGzЂi$R% <&^B7+^6i +b&im+(TFհ`-vIYX}XٟYAAtݬ |K2 +b=tYAV~ + +i DE6.VPz'جV3ƃ-fKX+v.bmqΛ,lXA0ԽXE  uZ\aE.bw6jq75$ Ahdj.r0Z8t2% A,rR4qĄX<.jPvQvw XAy] {!Q/K#k֛|%j =E v +b1{XCIĠ̬P$71v GHALЯ2nb9#Nq9A𖰠C1=c缉ACE QNv A9&J75,!`7W^ rh7? vg/PȒVdK xqrw!;xq(Ng _,!n*V.\%'Ǣ`Bt>+{Ҭ#Eb%V +&oBt!8kCn@>;xp<ckZ`)C7Kw {#EU>f eX4 hCŒu:x9~=2O C =;xRhWڬzn)d/<$֕{(,WxӇP511+ޝP L7(e9xQ8D0*M"y"dd)`iD|U^<"e/O"@2XDn#9O*ia]yqHu5n2Q>(3lvӉHc EFm^"exqc{!TD s^"鐈ñU #$7A^"/\+b'tM,S#E#"E-"U(W .nQ_TBs"iտOE|;nz i`+If%֯o;xq9ur6L!b)ڲA4#jo> +֛g^P,lP00○t&ͩuM6"P^t#!wj]Z@ ]&iPڬ]E8^#C)RFYZktZE:JF]Pp޴#& !,ȟ+zy4XT30D1dsGsv$W_oI>J[/NJlb¡3_ "j`Iܳ` /MLt ΄ZGF= HH \nP ai53' ?b`ι<$עVE1 sGz[Vb4G/']hsrSѬlue;6BKr#u!+|Cꖵ]%IJZ-^$,YRΪYYR5Ĥ%=:wtb& V3/f&Ew T%ppv)8=a I7ěDf\^$2 ʩ;-,Ž4!W/~R}]y"̒qˀe(hJ. Sd|:+(T7d`IJ s,`8t70q8xєϣ%XyJaH7;";|SP8taߵL?99xQʴ4*E? Fa L৛,CoWZ;&+DA+U?HX!M_V޴Z2ð q9)e~)N'l fa ` xJo 8KB&kIKX:$k)F9% 1yj CA\"ȂEX5Q^eTӗ&˚^@['%R#յU^bb YRY+ s_ZlRXv%,%`"ð2<#]f +G`g-ytkbgƧփDof ,&ibq3N95}mXda)fRۺ 2=X"S{`ϋ}Zx0irT&2 $i*AHl&zWXxՒgut&y yy8h!ޖwTȍ1C+9{8 O`W'uu!OO(<RtD?=@w)|10 )';u'f$$x0UK7QpL‚#nT C^3g/>ADF8Q7R@İcU$ӵ-6m<ܤ(ZnVTդh/f"R76[a ]zbfF *#(b6]ve䯴(pl-r7``9Աyj=mf3I U&"Ax#%5 ,xefIXţ'E !@G7U Tnv*jcY54젒MsS d[ñ+E K1Pb59"43[KQnA&4y3|)Xм AWqIC)7e`NΔ\cM +Vno9 8ʃXZ}| +KeaQJ͙PHA:E?jkN a]|9 aFu<SPHf@g=S9,pm΂ل@`*"3SVmq+5ɝ *bx+Y o2%;YVrά8`YqbW = $!1<2=6Ɋ܄$mͱMr>LL@XϜP{Hfǐ&<4xVx! VA#/&X&M*uܪ;Μ4a0`E Vs~;V|R!E]^e$ V|9}`NUg+nUb鰠Wq= +8~ #qaG?Weq* M8w +jbfkM"{)V4 #7Ŋ&Wn(7Ŋ:mXs#[(& 59)VIp X+Ȗ1pQxX6JzuWX3˼: +NIslSx~, +bEcSbbM|. SQPXqTbšUcMlsd(S$+R^eMaɊLښ4l&YOКdE%j˒"Yq8Ap"ЦX8Ȭ"Yq[^-ns$+ΔݎEI9ˊO3^%uU|p89+J#!cQf clr8=.ٌeŸ=Ñ IA>x nS+Df% !x  tЬ '­nUr._AbX^fk6h4+B0eӬR^V&hVT}z"@0?]cq͡`6iVbcf%ߕrVGoQI >vM +ڑ* ALМWQYq'ϐ4+&|Q#8xVX[dnn+sh57J2!Teo;U8*n AVղW *JעG-D+r.kцfZ1֟lnUup3W3kqfZ1n*Z:VZKъCY|2VIR؁$7ӊg1U g3qAqpܓoRYqξG*U,ңXnR8fdfyrCE4ʖ`m}Pl̀PbtA00VoV$+N ~8 Vy7ɊA '#R=#Nq&Y1.s/(XHV2! +8S&8sEYhVL8es]iVtEĨZXV<͵#:eaV{.K%˯pbYk-fYSYX h⸙i=.7wnqGW 8?9;UQu_E /qHiKpY!#$RB*bsnU]v*:9&ıͯ]藙W.;[;QmzY`ˠEA`Ѓ=*^,vU5&s`)yUIyő^EltpӫD"TU7JLnzI[CŮNX&fWqX)+/jsؠ]E lJ*}`9w{_`Wqe**Bۏ^bWM ŃR)dJ1X gad@R]ET)&.vU R) +86ax4ga6m +0\UlDKjoWΥTn%V/_2yL/OL%K&LߦLִ%K&L/?L&ߪNޡZxt;~wh=t+ͰW:y6ɓ'|߫iuv^< ]:yu{ɳ1}['Ept{u{ʫ}e +Q$!7 *.G:aO`WۛV^mhiߴlVViJ~}*/ZyTHuIԏW|j7<}7yKJxÙ2zOVSBw׋V^/Zy>M+?4%?3%˰X(X^ڛ&=߯by T4!>ꊋ=NAX^U,T{1 EOS節w*="ާXޡw݊xO<%v~坊xOS節>VZީTCg׋Z^*8oS-Ǵ!QE-OVaojy2{T˫~Uӛ|y[ԋZTӈU-/ T +~C-OAU[./;E.OaO \^e&hqoryF{QK+=b?C-oL%by,hC,/8{M,ܤby0-]mbyx Y#ul?/by byBnK)E>݇VBk +S+N˃4k=jI/byX^lX^/by]ŰX^P{ѻ5)'߇a2G'}HIT6ǰ[, ~uby!O<eJO<"{O޺ M,OZdjytmZ^ftI=O8#ԇR_ϽP˚vwVʳ[)/s=dXbxR^jRpVKxdvJy -eJy8/<8v3y +1\OTξݧJ^wsчLI^2y4ާLJ_}Q/:xEIQK$/x۬<:,{XS$/!.*yz^l$rd^bW>Th॒2 8Ir-K$ 21Q!Gδgu%p&vqsPc[2K_Pɣ•dHL[R#9hm*y[ *y(kC%PaHppӓuzDJJ>DVɣ=Q +AA"y 䡓h%ՇNf0:xH_%Ds<RGf歔8*oJy$,/ rc:y˘c tCi>tH}qf>`'zv9P^`f)W./kǜllPί;K[v [(O͊y1+*b"0sL-<2r ?S'9" HL:ƾ /p[(sp­Ǯ8m+"/<R&vJyq7 a% n<>GPcܕ1I +K]ࡔF{C)._YÖJy?iK&Lw qasS(/J<ђĸh ByA"<.Z;},C) ސH Xnr¶)|dCOJy Q[R&S< N ٜ.w)qkRp)qq, <9NǺ"9 F="#N,JQ %HvKEmϣzHM`yHqRdS*/Xҍ抒TV答82Mwʲqߔ1Ha!'L, /,HUpbDVk _JyJ4:g9IweRO~RA)I G8/<3T%'ajzIٱ]@3|%'CUu_:y]`K'OCy ۰)[hɓ0F,`Hx)h]u2y"x~T(l RypɎƒ?qnyIImK*O$ne.v#Ơ&ucw1 +Zig쩕G ˼EI1|JQv6Q8xdqcJVS+ thI$YS+5!EK+,qVNr(oby,ͻC,gbڧZxlYRzZ ɭGX<%w/aM-AC-օ}qZp!-Ǭ.'_&̎y-V#AJ[0oR,[&y2,9C!7-ǂWvҫQ*x +aEt q*?:xq2QxQWZC/IR#ocQ\zyLizylTHezy,tk2dN.-w &o֥Vd^^D8 _uhgtVkԼE8ڵ/_Y࢘ +YQQ#;kq:͈E{L҆7t@T+NGX. +.0X&lUԓ"` 1] KN+Bz^IJɞ7J5lۿ#W<(D0]#XIdV)~jqmff0#\0iW:X*]UHWp,6,*~)T/5kq2cuq+xH0)[r'חjL8[*-+nš2.< '~0!f|.[`K K&vtVWR9JŜ=Q@( +Z{Re蛁hvlG潶cŸ,4;,ʥ/`J Is +6}P'I➢^.`Qs1,Sn䷓]BFTR,y!gDE摟R~9mt0q%-KkLYؑ"Őq.rVXGH&QJZ /b- RS@*'d$U" robG+Y +ɰ&$Es +#Xxp֧yk@Z WiF-g<2VpVܢ1})b/\Dz74񩭏< ;2ؤtV-$h%}ye @Z͓K4v3+ +̇oxY]졂Pf2Q6!]6]Jã HZ3+6dgt6X+ x@0ey tGgjikX7U7 *+|hg;;;~=W3$8]]&OPRԸXo-$fG,.օ$}Mc޷Tf;dPݱƒ) GGePX͠Ȼ%18DѸcOjv$!$˼n@(f9U0 u(!qP^JUX }Qس~19V~)4(Y9HJXַB +aSKq8m]gyA)e@T:TQ.ȴ`1ɜ$lvoQI9;8.W+I!Q1L\Xߠ v":kcr>}hْy A}p[V.-]LDaӆyg&hY^3q +2cUTd#8LHlT,$һD9Uh9ܽ(C#ee%SD2; +x@:\Cܼ㦒;K4i6" 9O'@lZѽ\@ShW]! TeJXC$u7:P RuXLV +00NE'LJIV8ZE^7N V{ :CxfG8} +y+HBgl[)4,}8Mzu4YFo C %&(^^"hzG6+a#eښG//0qS&M#%,!k]t{'Ђ7;cW4H,޳s$Q#㈰.%?do*:ve +ڶe`aDWǼ5% 3UbΑqvW:Io4XBV-+ؔ]Hc_?N( ;Re#['HgXV?8f4B8[H(ո-J]2i$I V BEe:1ʇYgYM1-5EJ΍uݚ1)dcܭ4zPUdhԆC? RRvD eYkL,PhGBGfE^GQYZ|.7{2a'Ya)Mm (ȻּJiEi +Rs6zx+K(KDFY_{v}Bə(8>BBLYld0jg<%]hG:yLUe"Mc,%%m}ԇ<=H6|V+CީǬ +꺪\4^D[F 6:͡hr`&la"g":BAAXԠcUrAȵAai]ɑd$?~*7jwv|Qd%'kDˍ:R؃UIɚ!Go$"&_XY{0߱Nll fݘUu_M_6]l֭|~:Wgs042 Jx'NtlC98l>Cm=ZqӬݡqM0 6"|ܟ;G+{1-^[vL:"4ϴ:8yeN3UXqg^|(:'EKl|n!Z-J?5`Iօsc>3;`&!]ARׯ5P:;ՌjM׳c%2##^&=I.+1PٵȃmָArLӶ +mHD& +p84 %! M9 !3/ )cȝ~.?0` $/Vɴ2p "WXY GB,%93WA>C융~|᧗fc+2lnw +#+v)̨ NZ&Y`r,])įFⱔLV׮IH4RSrAbn ʒ_ iǴ 4-4tڷ$uP +*>ԶcX .3tVA1ZCZX?>~S"[S%5,3Kˤ_dk$fڳ }7c1cyl)2 Nv{ ӈ oN)zSpEc לK-o22oM~ O -c/<_8T'ss:7K i52'5+-J( ڶ ^Ajd pa"xһ+KHqqeg5F%Eowl',–m։v)l(HM1DAA3ecT᱔PUɎ*Bcei*46_*CQεWj'\T6G -B[Wvvȯ]vv:BXl it@/ڼ%9uNUd>d9lmQ1H]ձ=u-0>̒ LkHަ?Fx*v$*2&U YMvN(ZVrlrs>~0%[^-+ #x1$)`M'I^t- W3 2LdH#~ J 4.M)֥1lS@;lJ@n ,|UV2dDs kruЫ.ȡ ;mO2,_zy0U7$N`] .;!xv'q*5VYY!F]U%ʢe»96e}^.zt菂ZԶ\߱]AG.eYdGi>ICcT'ǓddDIM>#˦ JC +hd3"=e\1ݭJ^*5 bkf^HbQg)jB^T[U,za%&uڬz l:#Nf0DՕSǦ'aښwf66'K?]S1iY֊h9Շ#c[6#I5OԗK6@ezC+RG*t!*'!tI:tYc(A'p?p=i fM9 /s5tS}>(HXl0]`d|Q }^Le{x,Qo} ی|aê3z+V(Lle\t7dx.9Ab`YuT<ÇU;uiݛrBY_V_2۸@=DqV\[gu1&s<+t˫/CjLtVbz4.5P'dV ~p5*k0MeU9"4;e8nC6)Z14rY3WM{\a/9m)7Y\34=fb|d_ QX H?==żġnj({zO|kp>/Z2E)6NxI&[5^H-J&뜚|$/g|qV,Cb~?2ϡՉ )/rGcLn/?dE??_?˴?W|Dh5 //fNE|MΝLwE;_QlIPjW*yjJH^y 2 8u10'Gr'G8&~91%xw'Jw0>>1 ~$>mo͂7㜢a}P]G) kp"g4Pw.?C?I{?sfE(@8U^쒉`<A r$vڴqL4: 1 +endstream +endobj +225 0 obj +83447 +endobj +226 0 obj +[224 0 R] +endobj +227 0 obj +<< + /Resources 228 0 R + /Type /Page + /MediaBox [0 0 445 182] + /CropBox [0 0 445 182] + /BleedBox [0 0 445 182] + /TrimBox [0 0 445 182] + /Parent 229 0 R + /Contents 226 0 R +>> +endobj +230 0 obj +<< + /Type /FontDescriptor + /FontName /EAAAAA+mwb_cmsy10 + /FontBBox [11 -215 942 727] + /Flags 33 + /CapHeight 0 + /Ascent 727 + /Descent -215 + /ItalicAngle 0 + /StemV 0 + /MissingWidth 500 + /FontFile2 231 0 R + /CIDSet 232 0 R +>> +endobj +231 0 obj +<< + /Length1 1968 + /Length 233 0 R + /Filter /FlateDecode +>> +stream +xU]hWdj~VlTdc.JI5%[ddv3l\@%VRP|"E&yhb +Eh+BK>(g&Z[sιw=  w#ʡOfH#9iodp?*M7ߚ.,L|+?Js9NFHޞ#EVɛrŹvd䪂5I\8Yێ~di([fwHpgJVyn-4c/͚%KF= =+6q*>yx'2Qa'؆HU_um8"oBYGa1>2.RO]Fq#1M ֆ낵5U~(LB'emꈪ,wȼhs"LJUNUY} vMJI9#k4Jˆ]J&GF#Ԗiu.r}аqp4bK#94*w[;lv#̙bw)*9*_Ӳh$m^7㚪 J6/kˌ.2lAvVb !y-hZݙ-Q0YۜفΰHU!+W4Jb9$%i5f KOUȤtJ7UUU:}πs.H.?ڒ-2GGTIsaL >nM# EB3z)$|TXnnt1_ ;β\;r70ŭF$$KS&;=վvn~;uIo{Q9 FG\ ѽ( ]|?+ObTSa0OzQ˾i&֐tr0Ca}aBՋY1ho8Uz`PMɣ@x1zVLT\]?i'leW2i4)FYM=.w$Pf<'+$ib$J1PVia6?R> +stream +xk +endstream +endobj +234 0 obj +9 +endobj +235 0 obj +<< + /Type /Font + /Subtype /Type0 + /BaseFont /EAAAAA+mwb_cmsy10 + /Encoding /Identity-H + /ToUnicode 236 0 R + /DescendantFonts [237 0 R] +>> +endobj +237 0 obj +<< /Type /Font +/BaseFont /EAAAAA+mwb_cmsy10 +/CIDToGIDMap /Identity +/Subtype /CIDFontType2 +/CIDSystemInfo << /Registry (Adobe) /Ordering (UCS) /Supplement 0 >> +/FontDescriptor 230 0 R +/DW 0 +/W [ 0 [750 776 ] ] +>> +endobj +236 0 obj +<< /Length 238 0 R /Filter /FlateDecode >> +stream +x]Pj0+l CԒX}q z0h[lE^X gBpjV& +:G:g} +endstream +endobj +238 0 obj +234 +endobj +239 0 obj +<< + /Type /FontDescriptor + /FontName /EAAAAB+mwb_cmmi10 + /FontBBox [16 -215 882 715] + /Flags 33 + /CapHeight 0 + /Ascent 715 + /Descent -215 + /ItalicAngle 0 + /StemV 0 + /MissingWidth 500 + /FontFile2 240 0 R + /CIDSet 241 0 R +>> +endobj +240 0 obj +<< + /Length1 2156 + /Length 242 0 R + /Filter /FlateDecode +>> +stream +xUmlSU~h٭cm݀ۺ/X@ns a, n֚v>@ !`0j$D[ h%&hH4"d]D}ys.4gU,y:k %ﶞ!i0;ᬟioS/#5% h^, ]$Gy+ d#CgXlH +G{ .'_2TD]/l_~on@464) l1 U0! <G, 03x'po^aˈ~t IZTvLJ1ϘLMӦ];xN<+f"$Ƅ.~C|7ʕq;ֳC*n4>'=ppp'ߊc>I]亠8KӳK̗V?3H?:fm@2̜0S׸%gvݺ*U}؅*01^fM ٚiIOMM6تLzI*z#WYT)ZUVkg2μ7$nRfNMayWO1%IO +j gmb%'͚ٺ3+ +%`:=&ώl'09 +oˢ"U7$Ov. .η;_O#cot63ŋEl!9sq^03Fv)ׄB   ;pyqVlK&@hHgD4 dMţ ̐ͤ`a ̓ߗXD>{;M䟆Q ]4(!Z5-օZUIXc4&Ll#O"cHWOcD"[,n #r⮈sD^C@yBCEk|(]J]t``/8$K*jPXj)ڴX00R*ՇR1,&bUj-6MjS'zB~ &`ݴ="E\*Sdc%BY|E)u%!p\ʦR[T*9P|h\.{-J*8|߰| +endstream +endobj +242 0 obj +1471 +endobj +241 0 obj +<< /Length 243 0 R /Filter /FlateDecode >> +stream +xk`` +endstream +endobj +243 0 obj +12 +endobj +244 0 obj +<< + /Type /Font + /Subtype /Type0 + /BaseFont /EAAAAB+mwb_cmmi10 + /Encoding /Identity-H + /ToUnicode 245 0 R + /DescendantFonts [246 0 R] +>> +endobj +246 0 obj +<< /Type /Font +/BaseFont /EAAAAB+mwb_cmmi10 +/CIDToGIDMap /Identity +/Subtype /CIDFontType2 +/CIDSystemInfo << /Registry (Adobe) /Ordering (UCS) /Supplement 0 >> +/FontDescriptor 239 0 R +/DW 0 +/W [ 0 [750 494 ] ] +>> +endobj +245 0 obj +<< /Length 247 0 R /Filter /FlateDecode >> +stream +x]Pj0 +t=,N@RȡҴrjhl8}m%P# D;g#w:M8€uEU*o5P$99ằv&H9 +gN'%k@W[5A*$F,nen/o^ooIۤjU ;+mB28Vd[ >d_2} +endstream +endobj +247 0 obj +236 +endobj +248 0 obj +<< + /Type /FontDescriptor + /FontName /EAAAAC+mwa_cmmi10 + /FontBBox [-34 -250 1047 750] + /Flags 33 + /CapHeight 683 + /Ascent 750 + /Descent -250 + /ItalicAngle 0 + /StemV 0 + /MissingWidth 500 + /FontFile2 249 0 R + /CIDSet 250 0 R +>> +endobj +249 0 obj +<< + /Length1 2596 + /Length 251 0 R + /Filter /FlateDecode +>> +stream +xVL{g3LshwB!B~- l'L i]vEԩhZh:ДVQU:iU7Mjiڴ-Rҩg3N45g߽{{vEy>KBӷgg lOG \V` ͡66ʭ)d/ŏPXx_,/3oGYӋٿu*fRy3 >4 %(VpVPhH|}|] +q\e/KP8{`A'` 1Vk厥_w=z>GГtur>.pSl}`WٯM2T?S#NH=V׹KGwv> +stream +xk```dh +endstream +endobj +252 0 obj +14 +endobj +253 0 obj +<< + /Type /Font + /Subtype /Type0 + /BaseFont /EAAAAC+mwa_cmmi10 + /Encoding /Identity-H + /ToUnicode 254 0 R + /DescendantFonts [255 0 R] +>> +endobj +255 0 obj +<< /Type /Font +/BaseFont /EAAAAC+mwa_cmmi10 +/CIDToGIDMap /Identity +/Subtype /CIDFontType2 +/CIDSystemInfo << /Registry (Adobe) /Ordering (UCS) /Supplement 0 >> +/FontDescriptor 248 0 R +/DW 0 +/W [ 0 [365 680 500 643 ] ] +>> +endobj +254 0 obj +<< /Length 256 0 R /Filter /FlateDecode >> +stream +x]Pj0+=Cq ur$d࿯2.tAY͌e]}x+ z0MQ ;],m 8FYh2KngxY,gRKLp;&@I=4NֽrgF>^F%_C W9zn&,nenXmr~ͪQ[j UUdTjdFM~{"!&u19 "1qg]R\ +endstream +endobj +256 0 obj +246 +endobj +257 0 obj +<< + /Type /FontDescriptor + /FontName /EAAAAD+mwb_cmr10 + /FontBBox [-43 -205 984 740] + /Flags 33 + /CapHeight 0 + /Ascent 740 + /Descent -205 + /ItalicAngle 0 + /StemV 0 + /MissingWidth 500 + /FontFile2 258 0 R + /CIDSet 259 0 R +>> +endobj +258 0 obj +<< + /Length1 2220 + /Length 260 0 R + /Filter /FlateDecode +>> +stream +xU{hSWM_>]&iv7&Tk댮K;޶iILhm1ԍmƐ!"""c\m8`Ce0c[ަ2=w^PںiQ6 }Ig̈́?Xs~|/a<,ǻx"HbC/6 :!f4%=hCbL vppp?p 7.WY5>Eb~MQoӪn +.f{xo8R6/c +9d)!eB5U* 8*JKMx7CgmOx~k&oT>󨾹 Po䨜G fŠ.\ w].µ 94n`[UgqQQK]_MA/,]ݠe.ING >lܣl681+ih2smq$etPG؄F7DE#LRhFg#ɍ +gkČS9EZ6,#nT0[Өk[$Q4_ :gM'y%W]rn \h"~KFn8!E;6!]d8݋u \R;'KPWejֱsMdkg!{ 6{]lj :`se=TSJCuM_li[;r\8j]¼˔[Z甪сS^8zjS@z$t\K;:[(^c +mg?Ut=]c;TSP]vY +t񹇕K;\9ԍ7&6d/Y8QLcZ2Ng Y+Zw/xϞ+ZHlގQ ͞@|;A}ΗY"Ou܆BPk3qQR$[<@X`~l4PB5 L.by@xE,e'FS7ƨ&Oޮ&ta :҄᧱8ir&@m {-gQ #Oi%Mnoz%hafezJ`8)KbfŊ J~XrR^^#[|Ri/\2i9fX"'FkMޝhv t:1<[DZ(@\wS?@#s`hpf"@\S>:IKOOz4@ +?!YZj@cI'GBre+ B[>(=/nS6ފ ޼wYzo +endstream +endobj +260 0 obj +1539 +endobj +259 0 obj +<< /Length 261 0 R /Filter /FlateDecode >> +stream +xk`h +endstream +endobj +261 0 obj +11 +endobj +262 0 obj +<< + /Type /Font + /Subtype /Type0 + /BaseFont /EAAAAD+mwb_cmr10 + /Encoding /Identity-H + /ToUnicode 263 0 R + /DescendantFonts [264 0 R] +>> +endobj +264 0 obj +<< /Type /Font +/BaseFont /EAAAAD+mwb_cmr10 +/CIDToGIDMap /Identity +/Subtype /CIDFontType2 +/CIDSystemInfo << /Registry (Adobe) /Ordering (UCS) /Supplement 0 >> +/FontDescriptor 257 0 R +/DW 0 +/W [ 0 [750 583 ] ] +>> +endobj +263 0 obj +<< /Length 265 0 R /Filter /FlateDecode >> +stream +x]Pj0+l ťCP' K+GPKb-ƅ.13ð:g#ycc&B +aѺA[wķd(DqpXz ;@|iӫF_h/!.B=t_~)'>N'95 Ԍ- t#2UTMv77`S6FUBeY+쒷qDT QJX9uxl5U|~}@ +endstream +endobj +265 0 obj +235 +endobj +266 0 obj +<< + /Type /FontDescriptor + /FontName /EAAAAE+mwa_cmr10 + /FontBBox [-43 -250 1008 750] + /Flags 33 + /CapHeight 683 + /Ascent 750 + /Descent -250 + /ItalicAngle 0 + /StemV 0 + /MissingWidth 500 + /FontFile2 267 0 R + /CIDSet 268 0 R +>> +endobj +267 0 obj +<< + /Length1 8652 + /Length 269 0 R + /Filter /FlateDecode +>> +stream +xZ T[畾ۤ' .h B!@ްYmY='vlMi'ɸiO4zn9Ymi;ͤ=IInӴ3{~k5f=8ڵyNK{S?T O/+[ qf)|xȕ<8L|؏cA b8[ N|tq%?ny h#3og_H!X75{mWϰ{س9 acpNp) +[`tA; +H@ j!aA`$`e_`3>20R:E_/ǩ)rS +y#q;· +x.34| Ó, wI8$44DP+Y@Tj*eNvB.eh<_ {l=_17nCUx/󲒞yҨ!׃7C{Θٲepxv24-OE':x<BqZKMm5ͳzL= +Ꝭ3V(Ԇ*yTZAD<88))6Yi{<ݍvgy+4>r7-4M󉞞y%=6>Oc\Ҵ%>*`=C!ΫXS}"f'f4X{>GxϋSF |^{筟ז }t4U}==Q.9)ƒ }Rv@@>kYĘ J>a5kpM >ZY#O30ۉ!S5%˟؟Ԝ)lS0 +%ܶk*UeSNma;?ry5%@o`;ЈYFbp*0$V7!,O4T=Tu*UwG6K$`0qD.ҐIk ~XuK U t*vQ6|AxJYPW (P8P\zOp;ff>b>O>̧^y3_$CYaj/y({)x4/Υ:j1Z]hh.lN9n7P?lp!9AhD ѵji**n?A%HF "1vJng61ԑGj`ߗGwmsqj}=°-D]tm[`; v}GzWش{ue艍DmNκWk۶J)?4-݄:]f y> Fi>j4c k ۚ|k5kxS瑥-Q+F'ځwQ75h9 C8\sH1X7ޱP8ﳓUٷfOY7QF䣤G%UEN{e:&V95ĞdγfƔM3tU×Po=!uJOlR ȪxJ%!jb$z3KLb!ZTA]uPye-A|Ë/έY'yċ%DPb baxKpB8걚䴦79 +xRB3W.cL6Kcv`15؎˵k@U9}YJX}vj[kI +Q+Gת"%$Z& ÔtB3"b*JfdTs' L3xgE6f9t68\*[jbO\:21eܺu3s{/;ӳ347=2}s5,2nmZѿ':i{.ѕ9ZrumQyehwO(ih0qD|[絘Ww E=r wL!%L./Hf-[Dd>㨒ԋ qR%JȩK[Gv8.j,6ZHql8y9Aˆ2PJ2V˒h%s`&o%ֆ\YD+. +Ƒ/Th'+9]0!2L,QL?٪SV3@GEyBTDVtֿ`XSThc  +}t_xb[ޟƦkW=Cy^2jĤ|^/򉎘I^cE)rذpfTwsWdžDq~*Tae[m $䢸Uk{O"^Y%^ _Y逰Wq/ޅ;h@,2FGX\FBS+rS +t2 +(Zb$i:E*?Uz~̊b'r/:Os'nPhnW}_l\;J~kq%k+Rڎj F=TwEഎt"6)k%*F!^V](uDR 4"zan^nw|~bM6%uRInyps?>V?sϤeUy(GJ{)d&/DRO(d% E朗1(Yg=юy=聆ml{c_QjrJA˭ec̤ڵT HD$%{(a<-.~dh_SBv?`\֚}7e`P^P'n9ʳe2*~Ȃ/4!uf)6KmX\0rS%"K~˜+x^@P12syHĢ0GF+<2Qv<_pzuꀯKD"w0ICB=vC]^ yCeg0HH^w$~N!e޻= |) ~j &@w|1]XBU<AE&#붙MEO-*а=t6YEXH L!.\iCȵ䔴*X8Nʴtƞܱ@i4>ZKiJFs),,hM[f؀ %B' "EEWklw 5ل =يV` + j}&R•J(N2e` %<6r_jk,IN~s+NU{cw7OuYlWw[ʺ8^6)e܋?m?R+L<ҔSؿ1ܲnCrݶKsue9XºKuJp 4ґe; +^ˊ-ՁX:`r xI݄a{<6xչ=M4)κ\7\uɉNA2^HyjZmO;Ѐձ)V/LB =iݻvSt+֍{wSNDJW0w-5 rud9}j쒨A8TAI H,34廬JvXSUq.@ϝ=O.|yu ^oC/;FiH$_K;ں.viN3JAXX'LFeh6 >%ei9 ?WBP3]-ͩW4 /_Lߘz$dt +W^/| ]eRf5RctVW}plerWd@NZѢ"6zI 2h]e}\b; {?IGoL&Ji1 2vξRUqqrxh4rdF%§ L؆Hn}no%lR%\T(+s5 +Ҁ#'c$RފRO*1"##D[4j!Msg`S"~ !c%1:"qZUz&;K|U^nm jvUFD M,ZG<~rk@=g1/\S6K#vRR}Ҟ%Spҏ?ԗaF=b! ՛2(ܘ(X {6Ջ ]H̺3uߨ95B'jpbIe_\vJޅ8pϵxٕ9$kfC-zng p=qvgLx Vq&' n\#N!؏ k늒`0EȞ O^g#% %Ӧ e4we wf,2mǟFH1;/P2Զ +* ,382)ey nqG;گ6+F:؍xg)]./dflm> +stream +x`ZU  +endstream +endobj +270 0 obj +20 +endobj +271 0 obj +<< + /Type /Font + /Subtype /Type0 + /BaseFont /EAAAAE+mwa_cmr10 + /Encoding /Identity-H + /ToUnicode 272 0 R + /DescendantFonts [273 0 R] +>> +endobj +273 0 obj +<< /Type /Font +/BaseFont /EAAAAE+mwa_cmr10 +/CIDToGIDMap /Identity +/Subtype /CIDFontType2 +/CIDSystemInfo << /Registry (Adobe) /Ordering (UCS) /Supplement 0 >> +/FontDescriptor 266 0 R +/DW 0 +/W [ 0 [365 500 500 500 500 500 500 916 500 500 555 276 388 555 555 443 276 833 500 750 276 500 555 500 305 333 555 526 555 391 763 526 443 394 651 526 750 443 ] ] +>> +endobj +272 0 obj +<< /Length 274 0 R /Filter /FlateDecode >> +stream +x]n0E +/E6D"U*CuTK33GĢw;Ȋ&vZYJb :ォNN[E.ZƉRKf">ܟq ?]߬"]mb?GZR׺':RnZ.b39(M-Fsƅݸ}OR5޺qqA#( +O=a 5'{tɡSU8tf!:> +endobj +276 0 obj +<< + /Length1 1992 + /Length 278 0 R + /Filter /FlateDecode +>> +stream +xT]lUmKK(ôElGWia)KLڡ;nYeC !Dnc 4ф`$ ̰%*As{x^Y {`8%v'=Mg,?ߙ{鱳W>#dDc#&Tr_BiW5+(w㣛ǮCzGyTvuTS/Ѷj[LffwD>8(1ީrJ2N̔.tɤ#*:`q8Ew*{5k!.^ԩRP+eygtaOJ8OSd *7M kꜦv;uڃ[Kw7%Cx9+tx fy]^l >XH+^jI n0Uh%.";ٰevIJӆυ:Zxj kO<; Gx1d1sw〴w8ʒ'7{]b}#΋sw6?ٱ%?<8wF/ĵp8E$~]^7?s,c[˘-cx§XD5%J&Tb:&1)cd _)ck2y#`iLAFb[HFD*a&  1Yaq=ĸ+<"iQ"}Sbwz1(IecVF0JLƳU2Yd;L]OOfSFEDUY7 <t!mrO6+e9nɢ +wD:us4~{ ZS{BwYE+ #T0Ցʦ"ãtqL 9^v4j6m]~D‘H.jO/Ww&q]`5n_-ƫb`s^:T[Nۍ +endstream +endobj +278 0 obj +1330 +endobj +277 0 obj +<< /Length 279 0 R /Filter /FlateDecode >> +stream +xk`P +endstream +endobj +279 0 obj +11 +endobj +280 0 obj +<< + /Type /Font + /Subtype /Type0 + /BaseFont /EAAAAF+mwa_cmsy10 + /Encoding /Identity-H + /ToUnicode 281 0 R + /DescendantFonts [282 0 R] +>> +endobj +282 0 obj +<< /Type /Font +/BaseFont /EAAAAF+mwa_cmsy10 +/CIDToGIDMap /Identity +/Subtype /CIDFontType2 +/CIDSystemInfo << /Registry (Adobe) /Ordering (UCS) /Supplement 0 >> +/FontDescriptor 275 0 R +/DW 0 +/W [ 0 [365 274 ] ] +>> +endobj +281 0 obj +<< /Length 283 0 R /Filter /FlateDecode >> +stream +x]Pj0 +t;()i?FqJH?FK )X V#NWut b%xؖsm2k<#D\M #n8H7EW5#&\ڮY"Bø3`pJ#)?auZ?jyFleTg$M`3^r:^*s1Ģ } +endstream +endobj +283 0 obj +234 +endobj +229 0 obj +<< /Type /Pages +/Count 1 +/Kids [227 0 R ] >> +endobj +284 0 obj +<< + /Type /Catalog + /Pages 229 0 R + /Lang (x-unknown) +>> +endobj +228 0 obj +<< + /Font << + /F270 235 0 R + /F271 244 0 R + /F272 253 0 R + /F273 262 0 R + /F268 271 0 R + /F269 280 0 R +>> + /ProcSet [/PDF /ImageB /ImageC /Text] + /ExtGState << + /GS1 2 0 R + /GS2 3 0 R + /GS3 4 0 R + /GS4 5 0 R + /GS5 6 0 R + /GS6 7 0 R + /GS7 8 0 R + /GS8 9 0 R + /GS9 10 0 R + /GS10 11 0 R + /GS11 12 0 R + /GS12 13 0 R + /GS13 14 0 R + /GS14 15 0 R + /GS15 16 0 R + /GS16 17 0 R + /GS17 18 0 R + /GS18 19 0 R + /GS19 20 0 R + /GS20 21 0 R + /GS21 22 0 R + /GS22 23 0 R + /GS23 24 0 R + /GS24 25 0 R + /GS25 26 0 R + /GS26 27 0 R + /GS27 28 0 R + /GS28 29 0 R + /GS29 30 0 R + /GS30 31 0 R + /GS31 32 0 R + /GS32 33 0 R + /GS33 34 0 R + /GS34 35 0 R + /GS35 36 0 R + /GS36 37 0 R + /GS37 38 0 R + /GS38 39 0 R + /GS39 40 0 R + /GS40 41 0 R + /GS41 42 0 R + /GS42 43 0 R + /GS43 44 0 R + /GS44 45 0 R + /GS45 46 0 R + /GS46 47 0 R + /GS47 48 0 R + /GS48 49 0 R + /GS49 50 0 R + /GS50 51 0 R + /GS51 52 0 R + /GS52 53 0 R + /GS53 54 0 R + /GS54 55 0 R + /GS55 56 0 R + /GS56 57 0 R + /GS57 58 0 R + /GS58 59 0 R + /GS59 60 0 R + /GS60 61 0 R + /GS61 62 0 R + /GS62 63 0 R + /GS63 64 0 R + /GS64 65 0 R + /GS65 66 0 R + /GS66 67 0 R + /GS67 68 0 R + /GS68 69 0 R + /GS69 70 0 R + /GS70 71 0 R + /GS71 72 0 R + /GS72 73 0 R + /GS73 74 0 R + /GS74 75 0 R + /GS75 76 0 R + /GS76 77 0 R + /GS77 78 0 R + /GS78 79 0 R + /GS79 80 0 R + /GS80 81 0 R + /GS81 82 0 R + /GS82 83 0 R + /GS83 84 0 R + /GS84 85 0 R + /GS85 86 0 R + /GS86 87 0 R + /GS87 88 0 R + /GS88 89 0 R + /GS89 90 0 R + /GS90 91 0 R + /GS91 92 0 R + /GS92 93 0 R + /GS93 94 0 R + /GS94 95 0 R + /GS95 96 0 R + /GS96 97 0 R + /GS97 98 0 R + /GS98 99 0 R + /GS99 100 0 R + /GS100 101 0 R + /GS101 102 0 R + /GS102 103 0 R + /GS103 104 0 R + /GS104 105 0 R + /GS105 106 0 R + /GS106 107 0 R + /GS107 108 0 R + /GS108 109 0 R + /GS109 110 0 R + /GS110 111 0 R + /GS111 112 0 R + /GS112 113 0 R + /GS113 114 0 R + /GS114 115 0 R + /GS115 116 0 R + /GS116 117 0 R + /GS117 118 0 R + /GS118 119 0 R + /GS119 120 0 R + /GS120 121 0 R + /GS121 122 0 R + /GS122 123 0 R + /GS123 124 0 R + /GS124 125 0 R + /GS125 126 0 R + /GS126 127 0 R + /GS127 128 0 R + /GS128 129 0 R + /GS129 130 0 R + /GS130 131 0 R + /GS131 132 0 R + /GS132 133 0 R + /GS133 134 0 R + /GS134 135 0 R + /GS135 136 0 R + /GS136 137 0 R + /GS137 138 0 R + /GS138 139 0 R + /GS139 140 0 R + /GS140 141 0 R + /GS141 142 0 R + /GS142 143 0 R + /GS143 144 0 R + /GS144 145 0 R + /GS145 146 0 R + /GS146 147 0 R + /GS147 148 0 R + /GS148 149 0 R + /GS149 150 0 R + /GS150 151 0 R + /GS151 152 0 R + /GS152 153 0 R + /GS153 154 0 R + /GS154 155 0 R + /GS155 156 0 R + /GS156 157 0 R + /GS157 158 0 R + /GS158 159 0 R + /GS159 160 0 R + /GS160 161 0 R + /GS161 162 0 R + /GS162 163 0 R + /GS163 164 0 R + /GS164 165 0 R + /GS165 166 0 R + /GS166 167 0 R + /GS167 168 0 R + /GS168 169 0 R + /GS169 170 0 R + /GS170 171 0 R + /GS171 172 0 R + /GS172 173 0 R + /GS173 174 0 R + /GS174 175 0 R + /GS175 176 0 R + /GS176 177 0 R + /GS177 178 0 R + /GS178 179 0 R + /GS179 180 0 R + /GS180 181 0 R + /GS181 182 0 R + /GS182 183 0 R + /GS183 184 0 R + /GS184 185 0 R + /GS185 186 0 R + /GS186 187 0 R + /GS187 188 0 R + /GS188 189 0 R + /GS189 190 0 R + /GS190 191 0 R + /GS191 192 0 R + /GS192 193 0 R + /GS193 194 0 R + /GS194 195 0 R + /GS195 196 0 R + /GS196 197 0 R + /GS197 198 0 R + /GS198 199 0 R + /GS199 200 0 R + /GS200 201 0 R + /GS201 202 0 R + /GS202 203 0 R + /GS203 204 0 R + /GS204 205 0 R + /GS205 206 0 R + /GS206 207 0 R + /GS207 208 0 R + /GS208 209 0 R + /GS209 210 0 R + /GS210 211 0 R + /GS211 212 0 R + /GS212 213 0 R + /GS213 214 0 R + /GS214 215 0 R + /GS215 216 0 R + /GS216 217 0 R + /GS217 218 0 R + /GS218 219 0 R + /GS219 220 0 R + /GS220 221 0 R + /GS221 222 0 R + /GS222 223 0 R +>> +>> +endobj +xref +0 285 +0000000000 65535 f +0000000015 00000 n +0000000145 00000 n +0000000197 00000 n +0000000249 00000 n +0000000301 00000 n +0000000353 00000 n +0000000405 00000 n +0000000457 00000 n +0000000509 00000 n +0000000561 00000 n +0000000614 00000 n +0000000667 00000 n +0000000720 00000 n +0000000773 00000 n +0000000826 00000 n +0000000879 00000 n +0000000932 00000 n +0000000985 00000 n +0000001038 00000 n +0000001091 00000 n +0000001144 00000 n +0000001197 00000 n +0000001250 00000 n +0000001303 00000 n +0000001356 00000 n +0000001409 00000 n +0000001462 00000 n +0000001516 00000 n +0000001570 00000 n +0000001624 00000 n +0000001677 00000 n +0000001730 00000 n +0000001783 00000 n +0000001836 00000 n +0000001889 00000 n +0000001942 00000 n +0000001995 00000 n +0000002048 00000 n +0000002101 00000 n +0000002154 00000 n +0000002207 00000 n +0000002260 00000 n +0000002313 00000 n +0000002366 00000 n +0000002419 00000 n +0000002472 00000 n +0000002525 00000 n +0000002578 00000 n +0000002631 00000 n +0000002684 00000 n +0000002737 00000 n +0000002790 00000 n +0000002843 00000 n +0000002896 00000 n +0000002949 00000 n +0000003002 00000 n +0000003055 00000 n +0000003108 00000 n +0000003161 00000 n +0000003214 00000 n +0000003267 00000 n +0000003320 00000 n +0000003373 00000 n +0000003426 00000 n +0000003479 00000 n +0000003532 00000 n +0000003585 00000 n +0000003638 00000 n +0000003691 00000 n +0000003744 00000 n +0000003797 00000 n +0000003850 00000 n +0000003903 00000 n +0000003957 00000 n +0000004011 00000 n +0000004065 00000 n +0000004118 00000 n +0000004171 00000 n +0000004224 00000 n +0000004277 00000 n +0000004330 00000 n +0000004383 00000 n +0000004436 00000 n +0000004489 00000 n +0000004542 00000 n +0000004595 00000 n +0000004648 00000 n +0000004701 00000 n +0000004754 00000 n +0000004807 00000 n +0000004860 00000 n +0000004913 00000 n +0000004966 00000 n +0000005019 00000 n +0000005072 00000 n +0000005125 00000 n +0000005178 00000 n +0000005231 00000 n +0000005284 00000 n +0000005337 00000 n +0000005391 00000 n +0000005446 00000 n +0000005501 00000 n +0000005556 00000 n +0000005610 00000 n +0000005664 00000 n +0000005718 00000 n +0000005772 00000 n +0000005826 00000 n +0000005880 00000 n +0000005934 00000 n +0000005988 00000 n +0000006042 00000 n +0000006096 00000 n +0000006150 00000 n +0000006204 00000 n +0000006258 00000 n +0000006312 00000 n +0000006366 00000 n +0000006420 00000 n +0000006474 00000 n +0000006528 00000 n +0000006582 00000 n +0000006636 00000 n +0000006690 00000 n +0000006744 00000 n +0000006798 00000 n +0000006852 00000 n +0000006906 00000 n +0000006960 00000 n +0000007014 00000 n +0000007068 00000 n +0000007122 00000 n +0000007176 00000 n +0000007230 00000 n +0000007284 00000 n +0000007338 00000 n +0000007392 00000 n +0000007446 00000 n +0000007500 00000 n +0000007554 00000 n +0000007608 00000 n +0000007662 00000 n +0000007716 00000 n +0000007770 00000 n +0000007824 00000 n +0000007878 00000 n +0000007933 00000 n +0000007988 00000 n +0000008043 00000 n +0000008097 00000 n +0000008151 00000 n +0000008205 00000 n +0000008259 00000 n +0000008313 00000 n +0000008367 00000 n +0000008421 00000 n +0000008475 00000 n +0000008529 00000 n +0000008583 00000 n +0000008637 00000 n +0000008691 00000 n +0000008745 00000 n +0000008799 00000 n +0000008853 00000 n +0000008907 00000 n +0000008961 00000 n +0000009015 00000 n +0000009069 00000 n +0000009123 00000 n +0000009177 00000 n +0000009231 00000 n +0000009285 00000 n +0000009339 00000 n +0000009393 00000 n +0000009448 00000 n +0000009503 00000 n +0000009558 00000 n +0000009612 00000 n +0000009666 00000 n +0000009720 00000 n +0000009774 00000 n +0000009828 00000 n +0000009882 00000 n +0000009936 00000 n +0000009990 00000 n +0000010044 00000 n +0000010098 00000 n +0000010152 00000 n +0000010206 00000 n +0000010260 00000 n +0000010314 00000 n +0000010368 00000 n +0000010422 00000 n +0000010476 00000 n +0000010530 00000 n +0000010584 00000 n +0000010638 00000 n +0000010692 00000 n +0000010746 00000 n +0000010800 00000 n +0000010854 00000 n +0000010908 00000 n +0000010962 00000 n +0000011016 00000 n +0000011070 00000 n +0000011124 00000 n +0000011178 00000 n +0000011232 00000 n +0000011286 00000 n +0000011340 00000 n +0000011394 00000 n +0000011448 00000 n +0000011502 00000 n +0000011556 00000 n +0000011610 00000 n +0000011664 00000 n +0000011718 00000 n +0000011772 00000 n +0000011826 00000 n +0000011880 00000 n +0000011935 00000 n +0000011990 00000 n +0000012045 00000 n +0000095570 00000 n +0000095593 00000 n +0000095620 00000 n +0000117232 00000 n +0000117093 00000 n +0000095818 00000 n +0000096070 00000 n +0000097482 00000 n +0000097460 00000 n +0000097569 00000 n +0000097588 00000 n +0000097979 00000 n +0000097748 00000 n +0000098291 00000 n +0000098312 00000 n +0000098564 00000 n +0000100155 00000 n +0000100133 00000 n +0000100245 00000 n +0000100265 00000 n +0000100656 00000 n +0000100425 00000 n +0000100970 00000 n +0000100991 00000 n +0000101247 00000 n +0000103172 00000 n +0000103150 00000 n +0000103264 00000 n +0000103284 00000 n +0000103683 00000 n +0000103444 00000 n +0000104007 00000 n +0000104028 00000 n +0000104280 00000 n +0000105939 00000 n +0000105917 00000 n +0000106028 00000 n +0000106048 00000 n +0000106437 00000 n +0000106207 00000 n +0000106750 00000 n +0000106771 00000 n +0000107026 00000 n +0000113404 00000 n +0000113382 00000 n +0000113502 00000 n +0000113522 00000 n +0000114055 00000 n +0000113681 00000 n +0000114533 00000 n +0000114554 00000 n +0000114810 00000 n +0000116260 00000 n +0000116238 00000 n +0000116349 00000 n +0000116369 00000 n +0000116760 00000 n +0000116529 00000 n +0000117072 00000 n +0000117155 00000 n +trailer +<< + /Root 284 0 R + /Info 1 0 R + /ID [<3218415B695C2025714C42AF4DC16454> <3218415B695C2025714C42AF4DC16454>] + /Size 285 +>> +startxref +120984 +%%EOF diff --git a/figs/uniaxial_effect_support_compliance_dynamics.png b/figs/uniaxial_effect_support_compliance_dynamics.png new file mode 100644 index 0000000..4797802 Binary files /dev/null and b/figs/uniaxial_effect_support_compliance_dynamics.png differ diff --git a/figs/uniaxial_effect_support_compliance_dynamics_d.pdf b/figs/uniaxial_effect_support_compliance_dynamics_d.pdf new file mode 100644 index 0000000..35c9f68 --- /dev/null +++ b/figs/uniaxial_effect_support_compliance_dynamics_d.pdf @@ -0,0 +1,2607 @@ +%PDF-1.4 +% +1 0 obj +<< +/Producer (Apache FOP Version 2.4.0-SNAPSHOT: PDFDocumentGraphics2D) +/CreationDate (D:20230629153102+02'00') +>> +endobj +2 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +3 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +4 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +5 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +6 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +7 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +8 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +9 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +10 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +11 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +12 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +13 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +14 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +15 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +16 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +17 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +18 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +19 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +20 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +21 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +22 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +23 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +24 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +25 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +26 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +27 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +28 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +29 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +30 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +31 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +32 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +33 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +34 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +35 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +36 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +37 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +38 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +39 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +40 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +41 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +42 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +43 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +44 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +45 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +46 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +47 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +48 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +49 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +50 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +51 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +52 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +53 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +54 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +55 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +56 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +57 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +58 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +59 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +60 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +61 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +62 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +63 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +64 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +65 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +66 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +67 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +68 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +69 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +70 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +71 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +72 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +73 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +74 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +75 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +76 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +77 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +78 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +79 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +80 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +81 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +82 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +83 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +84 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +85 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +86 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +87 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +88 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +89 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +90 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +91 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +92 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +93 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +94 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +95 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +96 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +97 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +98 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +99 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +100 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +101 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +102 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +103 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +104 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +105 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +106 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +107 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +108 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +109 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +110 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +111 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +112 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +113 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +114 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +115 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +116 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +117 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +118 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +119 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +120 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +121 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +122 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +123 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +124 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +125 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +126 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +127 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +128 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +129 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +130 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +131 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +132 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +133 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +134 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +135 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +136 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +137 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +138 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +139 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +140 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +141 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +142 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +143 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +144 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +145 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +146 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +147 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +148 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +149 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +150 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +151 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +152 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +153 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +154 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +155 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +156 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +157 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +158 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +159 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +160 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +161 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +162 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +163 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +164 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +165 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +166 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +167 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +168 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +169 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +170 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +171 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +172 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +173 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +174 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +175 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +176 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +177 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +178 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +179 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +180 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +181 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +182 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +183 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +184 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +185 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +186 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +187 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +188 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +189 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +190 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +191 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +192 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +193 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +194 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +195 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +196 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +197 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +198 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +199 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +200 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +201 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +202 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +203 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +204 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +205 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +206 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +207 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +208 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +209 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +210 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +211 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +212 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +213 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +214 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +215 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +216 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +217 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +218 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +219 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +220 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +221 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +222 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +223 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +224 0 obj +<< /Length 225 0 R /Filter /FlateDecode >> +stream +xĽˮ,Iҝ7/oD$@ IB33Ȯ}TvYf?_8ϘzI^f)4}mg2>K-R?%ϑ#ŏ8?R),_B {U>|TdqXg5Tpu*}}U-|koiUm/WՋ,A>Ƶ+?5Fim/W5gi1Z}yU)V'_ƪg,-걪K?U9zcUK?UtVK?6x.k{'u۞F٫핟XM{n~bY_945Okqaz(mj{'uS[X{S>T籬K?f/IJn(wslOx_%̻_e}ݾ8n6k{'u^Sn6k'u^r۬X-^_~ړ9 bdc]߳v+_T|uO\vy+_zb>ОrT_*M[g|h87m} Έ͗u]^~և*A k]חߴ!|61){>J80}u=|vWk]ח߳vqiAK_YX$_=ֺ./}]gc.Јj纮/}{>)i,gb{={/I}z]_~G ./}]g#)^~YG\˺UI<-9C^UbS +_YV?r$|Ug_Flᅰ[ZۿnzoW?o_w}ψ }"EE|++WŠl~++~WXo__߿EE'/_-&xUWW}_џ }=-yW=__V_fˏ3b߾[?=@zV[xzs~^Ͻ={=,znfg{@ܚ׳߂N߽[#-jn 0u߃goo_Vz:skѿo_ޜ ߽{S=~zv[As뿿_x߾Ex?p溢<Fl+3_Y}uE?7mK+Vcsftve 3%3|ǐ~nWVtos]͹Šm.+ 7_ZmͶm݇\WsSmmE?6++&|iE5ۊ~lWVtZs]ЏMzj 5_YmPuA?6+빏.f|eE4ܔ/6f[яͧʊi+4_ZmͶI沞dF\c3lКz~lzWq5תǏͭzum<;OVy!?-w~^H z{~^ V }Eoݵw~^3x +Ͼ~^H+z{煨~^V !}Eo0ݵ^y![p[ѻk?O}A*S`_лk?/ B`_k?/$ n+zw~^V mE` 'Jo}AoAW }Eo>ݵ^y!v2Bජw~^H+z{)j-~Bz^yJly{)^lw~z]yJUw~.eW3S֖[=$ŒfZm=1/7f̿&7NsXw3^,|+w[B5Oi7st vx5 +즷7]<K Ok.Wf_#܇&@DDz$C s30"~~utR/Z|:j{}(A8o߷ք1?o)|֑j}EC4&ϼ).KsJP-p~+[r_Y%2wW/w=@+ +RLM?Ȩ_B9/. ?('j鹼/-fM]1>Z/\)'Qxi}_V +׶Y6;(AJ5n217~"/o[sɇV$y,DodjoyTr`֛,߰[R),G +2r<:űѱ6 }-y̙rL|-2Pcw4L1hm̵TrZw?C! 3͜cV%krQܚ䷆T3-pcl俋-%Qѱ.fOPAj(yVF%Dzl>|a QB[ x9755eƒlE3qSZˬ3$yblRcY%CEn݈ѡky-ȻJ+V? _J3D_JEX>vP"!۷eZ{1U%kYذ.N1]ǒO>`M.nwLXRYbcZq7y08&{lFLyڑar2DXv|b`?wÂJH\}XeIkE˴L>䒵N] Ӹco0;8ģe0H1Ze }'AP,^īrTѴz_Kt,ȥK-nQ$!Oɗl-Cg/'cl8$L*%&Y^$X9ɗ"6u& Ջ,vF6bIJqL6c`#ՑΊ zU./lbAf3480\6:7*Sn'7gصҪ#5t%"RN~ rQ/.QL(_(KnkrF,qd,Lvqs!R|1rMFѱJ"\~h&1E`F5t6_1rE67AdS>6xxUyc ^]H Gb"-~9rj-UHyf3Rԩgτћ/EjL*D۫xnR F_#ى!0E.OLfäRN(uuL̍yM[l.٥fV]ijX{בP$Bxa.f8X:Bh^E˛9Z +$Nq19Zr;´.jH&j*gW<+(nPlv.R00XM5o~-PcYv +bk)Xy'Q4~D9 &ZnIqo/ޖ R݋Li&'r=Q2і"XBqǃ"%Oj-XN$pTO+2#ma&}qaU̬;[ OyOIrZbr_SH#{MٖRgK|Xm:+{Zk⋊ogI. K%6e8aV/.?n:6s2UvtoIV Z"m\%?&/7~-G7gi2e)/hrKkCKp +7X>#ZޝxɃ+N3IZl5wS0l5ԐSZwV֎i)G$s*$ +b9?:! SEXHv qbe|XMq@5@ŒI⣑zةA-_Q\TioV欳4M,f-ROhQN=ytá<#J@ %e-ė!~,&P^`wmIC9h29XF_'J`S2!J~wuBhIrm4o"C%^|cW9BY򐰩)T<=-oJnq@:)A7!x~K~l}<;e9sY,0Fy 7RiQڤb˕m1`R e]D'gU^Jspcn'싱#;/˪P: ;!᧕ٕ7`q*Uy!<ex8C, +NhOC2!Ⱦ񵗓COdk7DCN8@6(R7յ/Jaa&Ŋ@Q }Aҡ$1xL_^;):k>34p#AG#u簛8 R +@ΉEK@xW}]nW||:9%A/C1G ++@/F<]eϦ%-[\B*!b,9ZMnsb7SS6Drq}GHhK0N.< :8H$IqL ,Rvax-8lNDRYx)lG8mМlY~va4SEOʁseЇ'ۓ,~<,V|V{#޺Uzwq\垣c'ññ,at+ GNRF5%KׂtHsI>r# /4kN̈ɹyR掲f1 $v 88Qk \0cȃzIȉ{;IS[TBN\N`$ J͎)!'p9i?y L 9ӦAK)Q[^(^:tq2ޢm$t椈nv~< 'qܑ/td' d.t@ BtY"lW/IL\<  s:8 YrS%lDvE,B63Pʅ~f};80fJR%SI"AO|ap)`N&[\J%ȷ;;80br 5N:)KmGO:O\m|N>NV.H)|("VBar4v3d+SS)8tqk"+h2K>۴$ڍ񭘻cN>"NzjT>%̺: |-S +vrx5]9?L_rqdѱ#KN0v5k0rOFs'9Q1H,/Bž XY|xKы.=BȩeZN>.N:پڔ#&'*F+~9FYÇ-:dyN>NU_4~uT*b=;RDž@&aͱS-⭎QAM%Ğm2i BNz5;~`l z9b vm)aC8y c몘lܻ> ~AbvQ'1TNZ(4$ɦì# $wP; 9Mӽr]lUdgeBVٽbIi j'AAѰ>V@"WeV's K,JI=3V|qPq +#'s+ G5̳KEH@i1,FPP:2HS,Fa؛毵 # +Ń`~tJp-KjNc" -& %C7B鼲-J֛P,K/&Av6ȢQv&E +f)WOÒm.K;!`JS1bF`xӣRrJ&O \UN$Ar!NNJ+҆LNNN'ٜ 5m)Jv;tRr)61x9Fb('O)ʳԒgDpz(^  )տ~ZĂ \8%'r1ˠASBRoFN*B]3-aɘWۅChc׃3'XE`''2(̜?R3H]/qhDž3(r=}(#֭L,HЗt<cF$CPn/?4\;e`#޴; KL黈Z?h'ODB.09kSJkG~%&>购ξ9(9*MexPi,7'%Tfl]Aɡ(vFNJ̖vde( |e0u1?)D]zڝJeU|E9gɹ;'G($¦m|pKY#kB*?Յ)ݐ&[wV_1xr&mmZխկqLmC>0~r'Zlr53*ԑ,Q%[0y:S𨑜PZ;cPZN!ւ\/2կ}4E#(eVLq9J|Si9r} E=-gБFڣk !RZb0LWURqh9`G~ƓCM,ylZJtrˊgiM}..b}f4:^kˆ 3^kr05-7ryd0Q<h1Ngh8ȱ1 +&joc#7W~0@.YbΝE!Y\Q`D2rnSjvj'GvP}{S3f wY~@ll 0gKw/cWĈG6{NM/tv㗌8A}͊ iQ?d<0A:XF O9kSmtu߫/K=O֏#䞹V(Z'礼gO9)G+GZEH6KʶRo Z $T0?HSeZ0I!,('Cu[R_KQR|#*` +&u$i +*exCYI<Nɱ"݋w#]~4H֔롛n=zTXْ WՖ9 9/6 +$Y)YchbCB+&wPPD&I>v0hSy2:2P^ !V2zW$~j8A@tH֦ t,Y |c?(iir3?lͣf~8VLT +̤Yܚ MyE-kݲb@$H8}66,+AHLii#0BrjʯodoqT"`R T;AhfC~ֽDO.P$A,"ȋj'AH|H;Bud/t%Jh 0`Vv^v&=IL5 e\V?r(AĢb %TT H%|g>GqlV'?l_]=]Nz8*vЃU& vЃR/ M߹0WUl@w̚`2ir4)jL[Qjw ~$ `tB/!jfC+Q, R]0DzX#PzA"%>I0vЃ(jB+=Hs]I1{[=A`d"- + TjLأ,Y~q'n1'kJʑ#!#LSro,p^>;k )VaxXS'GZ'u =j}G#8 vp4+m'GHOhBY"$2;vptPA=!2E٘*vP +V;(BE3bi.uu`Ⱥw063zˋ!&@S.)ctPƣ! XC>? 9kBYa[z9B`Mf-`C 6G ;Bz243-nA:fz= B'ZKB:;UZ  qgN b1a2Y5 =ɕ$SbϨޕ"D˦bMTa#(BdLLd`"TWʠ"ݯ<)BdLZM=O쁸"DVDv#vF8)B`7#!RT" V=QJb܈TPvP* 91) kBg&ڃHbgF1i,!;(BˉI#'۾!)XVء"h_rRHD n{38"Ʒ)!VD=icG4T_w$71P  Yʚtg/@3I;:Y$' β`OH G% 77@O(Ù;xB tΓ'7ͼa 5x(Sg9mPjR}e4 'ٸ󸰪ZRHG۸4$ o57~//4!uQgvЄHZz "Gu k;hBp6 hB`i#ϲH[4jwp,/_nnQ~13 i4\tr2_ !M1ž;qhSl wũf ?pZ"/cO(qSD94k: B^vES8m( q%ꨱ#/c>*hiEK1F5kiLcrck~5ˆj4bҧX">9ncUX}J2QcĘUulQ0mtSbL`~H D2 K 11s3kGyJDP% 1O܊ ئ02Cdmw}TSb4)}1x>]/ + T&ѿ*/XeT c>:&mC^ ޏoX+cXqb*ibH84ˇ-F6=ḃXL.Vؾ}ȋmJwy1)/rIJ]^Lrwy19[ƚ}|cTxȋQLj,.//|GhM~]qe'<ƒ,';?0"mɸ 5rw>Q!0L:v1ySN]!0F:c$FtbX$7Ƙ*U7}1qܴ<:&.(cbe.RS\육Klg{qM\04M]뿋5غv>(cX>Jm<][,f-FfR[vq19 }iMQJtW ^Q7C[,1b-FWbiduvդXd'>8+<*R[r C\ Oܵ䀆޶iɹ bg--ijtBI;beӗE\L"m1_b9e cnb䧆K<j} bob޵pKm1 wm.6bwm1/lKk1=T+iخ-][,R+v#Q}][$ԏb,C[, ۴Ŕ>ŘY̌=s{ݱM[ 7]-&(܊kaW/ƝL37 ]bL紌61Gw1F-]aSG +c[+#ئ0l:m+ɓ̛LplSKbR^de:Ș+å?vC>sl"c ߱MdL'slcVw"c̭F^xU TCe,P%Me2Piw1 @vSKk P*crw$?Tj Me PslS`M;"cq0˲Jw1 +N71ja 7Ljպ*cbz.cuSCy.3_O1KQϼɌI,%71Hg0FzEgLtOr!XcDt:cR61$kt&3ȦMTƂ2P(}V6R{WRn*cinwW0m*ctȮe^TƐ2uqd*cxbL.3F?Y{~C,6ʌ''&30.3V!"Y9&3&{N/Xd$>3g#h]enMeqK$kӼuhj b,U2q +Mg@٠]gL/zuaF*Ʊ:c$@vNáp>wM܄TJi9t +EٹW 1֋ 1T&L*4FJ&4F _71BE:t +a )K2c[BcRl&4\d&t+ +|nJcvO|^®4PnѾb:p4qt*Ɋ &zU^P\Jc::`CdP5ִ\4SZ2d-k1Zy.u*]nZcɈKiI5O1rvС5F)_9Zc4hÒ}~/kRcmȳ||&5LFܥ,O2|&5Z߭@dȮZcz>i1$Xk]k }0ڵ*S%^vc(}6v#]XX)6C|&6V) Xt)6"_աSlLj͓ϛؘ6ĆTcݱiWgH8&uSDL'Uq,sN寻Ύz=(!Tб̎]$55uAq%Ǵz~&9\'#,> ɱY$$H3:-tSe.cS3ncqو]qL-¦8;c=_O̅*vQ#K8f v1J]vűLdJp8]]qGWǘBfw1n6Zjd1uj*QMq S8kmzc0'uꍡnr,U U]`Cl]q ZRs(,U|T<$Gq8iqy]kZ$ǸcV%tmLpuMq1()yZ'*)Op.c=1Wc"X) ,8=?}SÙdO]q;K)0Ԧ8f@V! alQv}Mppl#c+ZnzccdMoL;e :NEok.ڛc%!Vϔ7Zx#3fc1vsh~ƺj_ShCoc6o8WO 8ưBq,oځ3 +Eq Y?E61m>-٦8.dSzlbإ]o "i㨑eq8㏲_c0kO]qLd8F1 *fW1 +vH{UAHb]qLnocĨY/ï]pL6ӑTq#RFv%Fv+']pABq "#pN1 1mjdaǘV8$Ǻ^bIGb$ eM̈́cE>&8Jmֺ~:wƨjGXv7ѹdcr>I\o]#ނ `qnEp TrR`SW.c| A cŨKUC2rT#aZW1]Ul8F| vmc SI͛s%:p]ǴEE5;3*6]qJ)*vQvrzߩ8-5d/U lc􈙱YP~BqLۯhN]$ȀKDے#HA$Ϲ]rJDzIT.Snz^Ƙc,L(ec\\*7Fe^5rcH8±Cn#:x;+uSZ>p Ga`NX"e1yۈ]mLS)yp>K6>~Wó@υ6A2OqT%j@Mm  +gdN1f4w N1RM.հSm:U8w17HfľSm&[wU#Iy.ASlLg)6VTkdj]4 +3wN14;@"DZSk^ݛC +9].mc4aTQݵƐ” 3XQ1M.bcE}MlLGKWKܴ*hgfܨcҦ5F]6>Phi'8K3lrRk E2m]k,3d)Mk d6CҲOu&6pZ)6t2oŸLC%kMmL|!{66&^jcfPƐ>.zW<971Prܘ?KRl 61Y+nKP+x{ȍ1ye]oa˵dž$ v#f&k)8FÚoLpL6U*8P>ĭ!8BvK8lѣ_O1T8<61~T|tBDd<]pgz +=30ĉ,cmc O ?ǘ{!ǣ݆T4\:8nm+3eu_O1:ئ8V/U߮cMÁ]cT%0&CqL,=ئ8F2o6űCSq\&8fwű>`AwJVcCzB5ǠMpL%VY!8&Z1瑨vlKe=zk' +ao*;HN9w193VMoLC_7HR J|;4zcԮ]o,լk%/^Rdrw]n,&7mMp~&8V햨&8s w1%cscrwk?9R!8FuCTl#co|CpLRYn̍\H^:eޘOkCpL'eh8 %is븆]p,"\9&8( SZ.8P]-.8&F}Sә7Y%lch8jDv6]q,jخ8&; tɊcr&9V))9lj >$$J}jMr,8䘜Mr,cocQܸ%wEL[Mr,L.:%*^\!9`"إK16+)9v8$;cpx)9F*yB!9w&9FuwEbwɱlJ8+qߜ7ű;unc)Ʃ~ +]oLCY7FMcX.8&O8GiǂqYP8.c8dC5H1KlW#pM:38V}R^71YX3P\]8F_Mb8&DyoWAc U8 c̺qںCr 3]rٟc +)9&|%/Xcɱ|(%H\D)93ṳܩi'CrYч3XjdW1dHE[kceaGM5xJ-ϯcIOvlOO/]s 5FCsl~=4@~,]]sLV=DkZXcE+ٱ6euc-#9FڱMr0vK1cӗ1[cm<ǮBlwű'c/SqLN?ioSv_c 14ɻa]qL\Gsc VK1ժ#IЗ]r vlxJID&9aXXQbɑcw-Pخ8vTv1<b88c$]q,F]qL\jsc{Hٸ\K1s׻MV]rL|X{HI)9v)cW,]s / 1FIT+$xj%qİ%PkѱBk1}ĵr?Eq+D6.:&?t&:!clSsLbc1c:<5*jTcict󂞚c4&]s4t m <4xv\ئ9(k1*Oͱ6/4$Jma7ͱt\XQ D]ocGSsL~YSs,;96lx9\Ltyj(_h4ѧXk1 %+I!LSrL]|!95P;cPRL8Vzҗ&9Ac/%hXc)8?cXK1ii>H(Rq,BO1|Ǣ/6 1XħR߇<3 _?Rp#c2"~حlgBpLK gDX(X`o< acL-Q".õ7f71X^u,)ޘ~So,tO1ٱ,&8ւ3=$677Fپ+ly707 +DSvOa3_*csJSRpsO1MJT>^ +Aҍ 1F/*^ 1%M}&]cT}>lKz|nUWcq 1Aj])S7ǘUkSq ʠy\Kq[7>\]vvJ2^GV(`Nr_űÆD[1lx aT1XV:0TTSt|fL_)뢦4aWtQԇ,37"+D\J`Mj 1YLY1֥q 1|яdiZ+%4,vMNJToO++u,of4,/cfʭ&g0fAPL:YxilraFbX?(vt,5C?BFO郬6FBF ӌaѶX͌ɞaKB t.@4J=1b~-{w-uڤW5mXE T/f8b&ɰ XoK`-ϤM@B&x ytfi$=5y[PHڳesyltvـliVn1XSMHRR ['cŴh cL܈\1!6Zߖ+D%9łcR|sF)f*It> LҟkCtcL0]K1%M1 \5_]݊%8Mj> ZPYa&15ceNvSn-ڕ#U0,j_h0 jQoVՇb0p:vn&tr11Ftڐ{N +SfosW*FbzŠp0^Hڳ(F"=@(as?`L\&SFo!j>CjwY31i&^>:YsLgʊL\XUNό\TQhJfv0ZsՇYt{W3(tzhv[gRSÙa(];`hUbE;OܨP->|E ;7m"K/UcMe .+i(GF3/cMcQQMV'\ae< c s^GQ,BnVSC|ŎQfw~'-%(Sk`' @hn#&' } `:ys9=S'o0q  Fp(pt$ +5ٛ4O1 m&Sqdh>yaO8X0KT1t-m0±ڠ-0RTL,4N -+3)}Jmb;Fd+j, +uT4(mJ#X԰0uM5(\0u +/mU/G߇e&@N~C*[":dev,75utb,pDp,xOPPn)Q`]o+þ)};4<c7)+I1[t&ٵ,L  +m;)F&yw>#;FBV%.#Z 1źU#\Iݛ*{NHӞPLH1p}.mThsָ-h0 +ۏj0S3aԱO4SedӢHio`4Xt?UDju65^Sciׁ*}Jn!!j'yYl*BDS1L35$@jd>X/9D/Ez&`N`;T.>l7ݕ[%;$G\/XJ[5CKɮJik:~kv\)^*H'?Ќc&zzW1$FPMv>&I>+1BR]S:Qq&(v (%^B~ڑM/zWsXqaDZKGZ՟k $ֈMu@khc $c{БٹZnQnpMN .8W(Aae%Uf`乫JWS6PWfxMVrֆ9EfaeFr1 wCwle0D&;)%O3tX_+EtL]->ǚ֔Xҕ.^4S\Bƹ)ChOKCƣT2,2h\yNZMb2uY4TU>sS;֛ +h8J">elA@Ò+aoliÓИ5!d(2?Y=4BkvnRؼ:'<1AQXcJ0p騫5q2?GtS+1݊rT˔^7ʡL;Ɵ*>OmrYF09P~ +6!seG}:lGP5ia8&;(ǘ=ܚ-{1qۀ<A4H:qup:U1(#EkU}4$r1li7I{tKS|VjVZP=ԊSN*ck +qٵ1R#5T?:Yߌ8u:6Aʚ9mVTʂlSiQ2nZl%Ąx'϶ɍ)&{"_11V+PH,#B^eG5pXɩ:-OLْM:|D'OIPDgŚZJoP'dǢΉ5N6129OIB't&03 78n‘a` d u] =ډu`qL(Ƥ<Ǵ"*poS5u`a$:#PyK%O[Z+/U#%+#f&3bäjD`2vb5〬#Gֱv馽z5# +%cz`a`dh{>V)ngD:\ sbCQ; WÃ6@ϻuWdO|O66Pt(7mH,8oqjF:u _H vrX p*l?;稕AC'%1Yԁgpl4-hB%NX:S~:a^o;zUh˕ :}`l"Ilf OcEY Y\JfrX$8#ɇ`2~Kq롄Lư(ldxZXN6W \)baӁ7)'.62?_įf)FSVKZP?6#R Ҕ`fvhr.C)cuP5Lѳn$EdMҐV?ED8y-@'zyh #M@46pX-%kgU)LS}(:|*4ݎ95PaHquFjzO Ij4:-,3MQ>Ks\UӦXᐬaLL]Ud!T%ul"-<=f(ac͵?&^ʐ )`ez'ёsAa0|6aG[,)yXh_[aLY=d U>B +FK1fBt~\$f$Hщ!. IFH[S"Z FEGB",,N[DG(e%ŨgΕ6yPCҎ1WCqac%ym-4'mv]Iy>~ +-JLQ%44õNV$O$OUu/ cLz,ڙ_ԁF^Y[ E%?k:ҋ`lu2e8hE~|X$>ʳST 9׬XF¬]p0da}=b*vH'#A{B 6xSLl2Wakٻ *hƑH{:8~%YwPSVGUh?za]73 ѽ (WN߼ P>ûq lCQ_1hQ + eOI)g 体TjXDTΓ]ҫĮq1SwZô*BE&\%oc=};#XQ +`ajJ|T8Y7\Y-剗5wPLD_'@ KaECܜ__sQ-*RQNS[ o9G~GU;MAKʉ5W: j״MPxy@B%gxÿ/(k/vo5,1JPui8FŨD +L.*I. !f@~IIptgaCΣJ,X= +JC +X?yg_᪽+s/1vgW2iS. ʶKC+0wvV3%_^w>RрAT]B>Mk)({Ail,AGH:7ƒՎ>j{ꤻ؉δҕ7BvĽ Rmʙ$ _B{!1aڰБPȚ얱g!~4L )_l0D2>%ֱ;{FL;Ѱ+/_oJ!`'obZ}~nb+"h˃PA9&%ZH9]-HU: ge'}%irSa3e$~:.D$CxN%7ed7[09=g7[qelng +P2oɱJ)gH,[ 2G3}xYmf!෽)zʰJ1IZaVlO0*;vŨR!]{m7@9L?#Nħ21k2GT_رh![or f(a˗'we:V?$Wpa1>CZ@šMwKqY7bTIEytڣ:}׵4Fm}:TaegVQFL=20ڛ<*Z-CA7Mas!B5]!936Aƚb#[W)Rèm(924 FGR##0Utʧ3IAX'Gޢ52H[`G7>t8dl)c%> U2Փo@AS(Qf>W2@(2 +mCB9QÎq 0hXڎe{%zlLRCQ BSM0pPhpw&*z &©j bFq%uZGH-4~sBN).oa)0{y`Tfh9djӨjH0Iq6tkDFmk]2ڀ,《1ENyt^&+vj fH E*A05dϷ0B@D*:LQEЏ:(H@Gvw'+TaPUmGe_u/ji#19deEmoѯbt<42@ۨӐqAQsCBV0Ht#reB*4:$0SS=KN.!Nhۑfi)m'lAqRC,B ] d aYʅ1= .U PC05Od](lCǂ<{ L4YmDŽP+6Ox a1|<6f&EBNr Mz>;h,|AK<^VN;~O+c_I)kod<,DЯ,TH~\0~f\sYGW^7hYGW_7B rYGWnģ* 5}tY}{,&a+ +UtX̆YGW_7 UO0*lT%h<u +fRVh5}tYj?fM]a>gC>¬}|c>¨=|ðj +^0w, _|DZM]aiV*ۺ5}tY{FQM0k +^ 1ݤhܪ'Wo]Vw0uvxRYaf;/ f{*/fM]a>oa4.f?¬}=J*8p4݊ a1a|Qtk6]׌I|D.*hUv(]bjƳ5f(z3}ta{l5v4Rv>7<6f1d].0 a%%ˌ]`^[ A%v@!NUi7ѯ^0|t>s5i)/ +]O.0\BEd].0=O+Jf膝?2tEaGW&Hh>!uu]`{~_ge0u4|.0=\i/a_7,i I>>I{5ia {1dܮ'_$HԮGק= ]`؛^n|/a.0MHw77ӲG0!xV>~h:S2n_7,°Xv4}ta@m4a {7pZ|0,8z7Zkq]`{? *;v!*wN]`{?#>7fˮ*q?:rY{h_ԅncm?=?}fah 畏'5<_-YJ3}t.0a F7#umhy eU5ݗ ~ܢXyjJ|ڞ GLj|~E? +|ޢf>oOɀ`Cy[O[\-i$4y~DE>y{~? 0yq~: tE?M@|ޢ>oџ=|ޞF>oOA[ӌo[Ɇ_ε@7CSi(q{ q{q{q{Qy{q{q{ykq{f&qkq{xi{V΁pq{hy{f`q{Fo|ǿmtEh%yӇY₄#'^_ hAMJYĿ pFk"l'&ubI$oRO.nß_"=c]ާ'/=~9}IVɗm剢 wGpc?XNKvzY)?^%*W.8QExk\T' zѸ]UUGw/1׾rQľCS^OME'kﺹaхz\EmNHضyk!TK" +.W|3+vm"sR76_^Zz/&z>L ~bo,ZN]7}zd'W|:jq(d2~ =;%0ey 洓!RbBv62WY]GE+I٢^haG,&VZEd‡6Yt1K{Lv62F_%&~G,v:rW,Z]E,l'.c{ɢ~m2W,Zy]GE dekX2-r%ɢ˸^hV;t+jgcW{ŢMlejسҨ OVEdB6Yt+igN{ɢ*m2δ, Gɢ ~!32?dmgcm{ŢlutmXҳ-%^ɢ^h%d;[t3+Llgd{ɢm2.,Z&.#a{Ţtluk/X v{V=`ʯv:YN\ǰ=+ɞ^gR;s+,jg{.#S{ڱ^;*}(c'9!<}D'g6㵟'9E]y tYlSXj?E<-xdk?Ow>]y3[ŢO~}D^gӵG]٠O~}3 ٠~h}D4gӵ'j9Edk?OJg~CWR xBlk?Oyf>^yɳX1٢~}D~gӵ';E<ܙ-xQig2㵟Gɞ~u&{>^yՙxQMg㵟GٞO~sf{>]yΙ'fsi.iKK*!(m0W&mC} &7!E.==k6ԊfMYv-?;cᚲT?=ϗ\8<%wK1g>˭!GwV哻LDywh}ɏk&\3rKj<&O/wMF,7Cmoa)u j ,8c6~o!nƱ*Qiw,=L~jv].Q,O%Xֳ0y+[ɰLc=.;T ,g6]&^i4P{AZ~۶Dqj:kw63S7E󎿋á;Mt[:nu} t4[İRK1Y<ec)8&wC$&c 7p`,0L–5~U񾪷Brt:&g}`uuNoYJZNxꛮ$f$?<ʺX/%9&Z_m`;=]N=ʎv/q@yWHԳ+y` +S|FhI hL!.Y6I7p6pL\jJɍM +N69˛.]̈́l7L%+,E[+5|"ώɢ5W%TMulV}`5ccE%r_IԃCsJȲIiO0!%fI~N%e!oÏ"n`Yj#2 -!r5 [X{B] rbfJ;{eXC m +$,ncbOLScכkcu|KulrgXM-+7LA_qI-hĐ}KEuX&% 8#_:i.6.SI&7KG{wLPe#,О ?$3UJ&^ɶ"r'y'xIq@a@!$R3 L\K`a@v@!B$x(~Q֙|MqP%~vXds`X\@M%,FV?ykU¦d ԒnV|*ۍrc`r.G" 3 ,/P7R0NV?`L%q)0pys4'Hdt,ܱ';$r7Lmezm#zVPL{KH~<옼MKv crXelZ[!KVUK+.GdncrXe{">Bx]{Z~z'W'8&Qteɿˎ5<6v-93cYl]+sÌ` +e`]6>Ʃ!Hv>i{-ƱkrHvrj&OTWC q(p{qc-#KVrd=&/ATN8r#,KT:9 L^`{y MbX ]heO:&="QXr9}2" X_)eQ%OdR\BYG6$v[˚+jhr6K6(!;;B<~[~>Hz>k gϯ%^k +&.pe^]Bxh}cLqٰ˘,.(c KXǫ0Z/vO`qnM +f'2nGad!6 .a`QGN!"֖}"50A9QgQCo bKJ֤iO>9Wgc*'<ݿ2ܳ_569W\ U lq(=_!X?A66oceb$$E$H+V&.f`V#S711rܲ,X>:2"Y"F1yr|wW־[rb{^.&WD0bMs,?$0sW6`(VW,kX5~苔  T^?F,X*t"$:eX"C-.X+ʊ\?/ w>0=OjOŒL4=&K"UQ<< M^|szԋ(;cėʺ#,rNkP5k^(rj/zShFb]Z˜mWFH~r*G(vRUlF #V- $Dv/ܣF/IZI-Xy1&qyV&wbtaS*V)X',mԋZZDilH)1Qf'ϔF8)$r62BK%1bKWLnGHqL̗]@ۍD /Fh0ܼmk`F(v= 7cߺ]OB mwd-ﻗ`abtwK$Lfݕ7*bғ}P7F&{=JV D20[d+ )rtnqRSVlMX_ƑZV%M,kryzznGv=/fdKzx,r#Vs6AcgOq. e?HvjGjһ:dGI.uK?yi.ʆ?{1yk ӴN]v *ڂ"8n}Xβ!(;F-T`w1Vm%՚,ђ}P$E.*䴩E$l rVPM;_.PKѱ{MsRglIuM*"8{t&n@05w.!AGmB&)h dg+4 +!;&w= ۙd`Uy⏜EgXӚL7 ϐKlv3;[cԵs7]߻Xc{7]N~:Q8_%>K Ԧz}49FۺBIUh`@-rÂ8F7uϪ1,JY1Ii0 z\~E]Κ?aص,pz'wS*`ʺ;f[w/"Lyv=ٮ4(h+8e+pѐ +fI`\e)l yAkܻAbJbv+ļ:֒\4Łj7HݞNR*t\LVҐT=Beсi~58^T=ʍ"yG'~Sw,ƅWL"Y9r>TК!ei1X*5yE!<\Z\G.v=9Ú-@v=J{5d8k ɦ"WM 1 $^ Hd׻$T`<.RXZ[@r"$Z%W*,e `e€ݱyZ$t J`,nW>gTP$P%lSHt@-&zsZTLo올v7 LzɮW6k4īBt:sa4cjrS񐃸h77[D,}A` &qV3'ٸWdt-wyj}&g, +־~[`W6kʜ6HdK -/V U9&aê,*n:妫bM fݮ'QSHMtPj6gG,hDCꚷ{sfM@$F{eۣbJ&}vkIh}ɰATpLby46@sH)=Y':*)?%7!$zhKDf6#GVo;.9d|{P\Xf12@ _F-$߉, 4F'8^='j}E~3/V@$@EXg1{ MbW>A1w"SsǤC[ _lȵZ`WT$nTN_,z?k)&K]rL3BfxI9&'=p݌&SY2 ȮW@;#GUS$tְV٣ qyhQZYN{2,F['r@t2EEE 욱jϼLZX$IoI1f%Ub=Y1YW*HF/v-?g-h+FK xVX`Uάv=]]O|V!g>fPb&oGnL76Xa&PB`rtF夓c:dD+Cf  %c &{ Cw,*&lWʫ=XDCkL8iȎ{`=`aqvͳ:3wѡml]trj |K}ke'QI0h7B[Qu o90Wa6iG.-Vyr2Z8_o*&4SpLi%WFgGu(F @ XzT(ϊ&p3Z[e!xrBT xNb(Pb W0bYI4.XBT K<c>]:c:Ғc1D[eB5'ۤY"i#.gmiĥXYv&Դ+h|+[Ӎ,V^я8DWMOe(\w)i?V`(;/c6d m`':k#:sm E{ORx/u$\CMc,'GIhC j/F %; +V8!|Aw0rɊgkWZ oa*wc'WH1A!"weu :Sm9 L=GEXR@1μVfTdZ0L:cĒ{j1iN6Ut;sԱ8Sv .6YdI/2,oS yT X3U-T5 Rp ƴ6ejmLZ>,c46#OJ&BDPL % j97z)X^@f(?cQCQiӱk# +F[<|s∠BHo$,\f<(7lEW"ZڕŤw`&Ms @@JDK IIh 4.kd +t +v yFڂCsDpg⸿m:"u@5ϣy1@4S$Vߐ$z`'[+O.Wlʄ}A-dEu43aKl1y:6y@zWR&Ź9C9 +D_"quMCiJ + `zl[@zd=4KM''G&-a0n2̍kPL&mRC{2NJ yV7e:n_O#JlBBk#D4U MM RKn6ZKEۂe`1X+X̖u9TRh29ZwI -YG^k=XZtIh +hzmkw  ׃?B6*D<mvIVciwB&.z +4@=m=C6T 'mw#E_حkEސ +s3L{? +L5Nf3v7™(mjn +hƒcgw~ "OĊb䐳;F%>ZbmUv2zWGLڐ dٓ+XW+4B`[ױ,6T)!@mRMg 5dgI_2Ț2}̉h9P9QH&M"-ΖfXq * c=8%@Vo +4SӎfnFhN9$`fnp@M1 ̪NֹcjDʈa֤7h4TZaS np v + 1ڀC&߯ĺ_yW0~'+&+hrf٩G }(əbV}X($e&0R)ǘvT,O +8 WL?VSvdN!2>6gD?Li% IdNf0j{\zB'!oU'cvy՛$qiԊ.^+A0ڈ3D8'On$*06(MI襒RA9ŏA>۵wlΫA]eTI r+'"(Gn,UB =jBZ4_D^Hi s☲5Ҏ%ۂas*)>hLXI7,/Nk\1 +s1+ױkJl1!eђi^y?h-4Zmص +sEBx2'j>`b(*LÎ$/GIG0 9|k s4b5ݗ`bbVlQ%3x;um𳙾T55èk`$ѧ723ɛmV`b^G\IOZL\ő"Y%?u1/Gx췋WuQ%c0 alzp.=0y;#0A(-sR;;D]ŘaW}p:' ʹXZSUeMMl~hT PFk腦F-)ǁhx X`r, Fo2ǹ T@uOL6UE1[촲BY4!|gm`9%{Zd0d-yњ4 >@&V5 D6 +c6 znƌL+E13C#PKvokمPGEO6i#yc-wnco0 OxA՚ĩN`\֚,y $J1ҌRv(WRL^- l{2+( YdNlcVD$1Y7,X#fT,~{x &ٲk`odX#p+v(HG|UYJ. u&}#>:#D,S3ْ]A,”ѿ*}=U: xT Jo(-~=U:c_=m篧Bg?|=U:3r(C6lV:;}Jg + _ϔ 33YyHwBgrތQ賵BgD.97336@edLLL"N(s YpU > coy9^M:gvG{JQҗx9/&.~ݪsVA 6~9[uΪ -Yқ336s%?Qp\m9&uΪ869tj3l>Q *c V}9ƅV3k,sV82gx~9+wQ̙,po{9.;6˜CA{~T9جrmFƻ2g8{hY?9émH2gEc˜m2g,sFCapAU d<:gCl9+Z:gnzeٽQ &Hx9ӄCl93ؤsx(r +șA"g$38Q,y~{rM*gG}P9K.7s{rE>{T1(sed6$[uΒ\ub,η%}ݬsf'*SZu{9Ź_e݉[k2g){dƱG3q4T:6˜~Ъrfm*ٱYL.czT9S>f3JsNṟY,U#K<Ȝ-K%f=92gN7q[eζ!rɼ4?mw}T93K=9Scʙ&byP9۔'--2g4oZT2 uV gUZTw,sKFU2gl{rFO\n*g0`~U9c(&3UmV3T ^:r{9p5vʜ1B]eθ{gȜqUtΘɉ\oBgjCl:ٛe-BgtL&3қ \Bgt"5+Z?E\ث>tY:6 $ЃЙ ɲIL-c"Or = +ai:g‡٤sFK޶gBg3Qh:{JhUMRgH#:%'$uFkh&LߑU ͆TLP8̔ULt;Tf3̶BgaجtTJgLe3滒M.ZA,bYb@sz-Jg86)Q:|tj+-Jg[6 %z`2;>; tƸM-2g|j~9Kb̓YR5$sN%Ȝ#AarsN43khΪsNaM:ggU ;vXu((t‘}:~[:gKk9KhݫA}|{93I f3?NY#:gPgO(:g!6ERiwl::gc(Ƌl:gTaVl9(W]x9[tsY.a]e#ܶ:2gԮ6ky9CL#[:gq@ItHQ }oCl9j-2gȜnsZfYLG38w?P-:g@?¬2gtpl9#QLˡ-2g;`4_2g{(s],ѡI.?W9cKa*gzىA ݳ%в-lE52gDx>Wʜm$*sA1l#Ye6VRf٩~9]:{9*sps9Nű:$sI9ɜѭ:g`2[&NUq\?9ʄ{9#%GGsF'=0uΪ!5UssNe6ou #mȕdd9#$*{[H(ݏC't_`ĥ$tjδ]8?"tHԡ611;ؑvt"sv9L\E,;]3&DWd΢蜱jN:gQcs2o5P,3u@.`YY猵ȜٳΙ*%?}95D^XҚt΂rFyݢs&iY,RCtY猐nW&QN:gLG)b裝t%WΘ?j:t9³UlcRi!fv9cځgsVЙ6\Dm9)f+r9SM%}@'3:quiwsF{9b&3CHgT_'3ɇ4s Ŵ:g41Z:gog3mX:g4:gƖr( L:gd˻Ιi g=E錷w^Ąt秊0)$g2ֱ68YȬt 84+ѱDj6ZLJg2QCtvR:Jw;+E-U+H[xT2iѭer)rQ _oΔǒ:) PSm;-G;}vN\L[*:F΂[0|R;czNSi(v%X/:$PxG3؁a2ㅹCvF37cF],(N5&3ڸyw;cxs bg0t;SB9%/hQcdw])YI&xl8~: 2g3]`:SAYd]ꌙVmݥΘSw=ILc;}&392&3Em:y:D%;6%E.[]lcgQJ!gvW:c#;tW:cx(1u6)!@>NJgD JʁRg4vH!<^'3*3TV=<)-gI ] JnJg*H$v(\JGiR:COA]1(Svl{.YLo=RZ$u&φ ZH)c(v:v"$u,uVGm:ꩴ;vH.,u ]$u-|YLiAYLV:ALTd?F*2)OmR:cm&[8ϜxKNJ}T:4~fvW:cXT_Ctf%{ˮ vV:cl*!eYL`xtA휔wۣ} dNJgBRܻOJgQGUMҙ+J>s26֞"m Y݅2MuβҦY猠Ԥ L sV6-U;i';*uJR&ݚgEA[t +z23:gZfwB*uv{x9S)M=׃wdTSug3 ɬ2jCY Y '3D)M2g Q?M2g,!{dΠf:dΔscl;ɜAʱC DݡCLy3ԶݟU΢*ɎY NzSΞ6)'N{<.9Syft9^>dEI,Wm9^>mV984/*gGwʙMF;T΢ +IX}V9w*g6mB<-DxhY etY䌕y'kb' [3vi"gxWfYmG23m9c*F+3Q\,rNSk"glG-ΙUΚ$9rF`Táo~jٓ'qI (<$sqāq;ɜ-P@kgg394{Jfw]dJrVdqt3v] j̭XgmQ9 +嶁U7i]u;˜iG?Y ,sV\c4E挙#F9iG.oΙ<$hH^ܥ:gq$cw3Sԛ;`38ڳ v:vR:ʝ&8;vR:SC$;'3:o.W(}"[Όe/Å;Idev[f3(#%"&Q>Q:q҈jY#NfYL;wsRg;R3Q$v:# ߝ3H< ߝ`Ȗ徹 Y S:{$uvQ;;IeehoYNKW'Rg_u"I,|H:I7a:C0g3HVe:˴"mJ!t{M޶j'3ΫCz:Jo\t3h݆`١sZz]@i>:g鑆+뜡AOGYhhw3ЮtH @17F?n$̓Y)*bg3s(<8v :g}I+{](#u }fg3d5I猉)Ej:3.*~ssƌ +GUmS:$:gUSO:gN r[tΪJ:gYLIw::v9S۞eeIew!n02g3pv9cEASt[d8RFՋ +2gMG=˜Iꪭ!CQ)Q +uI>8~[tl;v9ccЇ{\Vm9#YX(Y@cefSj,skJt8j!EL蜑a='3h׋3ҁFg3M`odl*nY#ѱ ]6}2uFs~[thcUAVIW֡:Q@.sƶ}[8e-BgJ8{&l +MBg1LO6\ ,t,mWƑ;vȜ1FIw{9 H,sVeΨm9l,skL3R;ې@;ɜee䫻_m9+Lq9+t/m9ㄽBY)2gw3j6w[` ڔYPŨI F?ZkMWv8۔bgM&3mW L;t8reE,\'f3UMp' +g+M +g랽D(QPwo\PA 7gUnM/gUCg|[8ILl'; EH?*t7{P'}hJNް蛝NUlSŐ׬ot۪oFӺV}3%%p[͢$fzuE,M&nI3&}3MuoFO*t}`'}3RvjPl7LDUߌ:y3֊*˛UJIތc:v7gY,.Gl.v7KF]^f8ۨu*PZH)ߝΘ9x3$N"gtc!v9cj&NIAd vN"g:ԮsٓNr[hm7cɢuE,~[hd~Z%۪nF{F &u3YNf\P-f0u&q3ŵftW&m3-<qh'mlJr[2F0}{6`u۪mƐXx6:Ti3Mf8ZD8I1NLIeaFq[:S͘^snYڌ&4ttl6CiAEn٦q[s[&i,z* NHabY^vR6#L͠v +EL7Hfh(5/e$^tg'f-fYwrf_Ott.@4AYMt*}=ciOdP)ֻ k&H<Țm,dʑy5кeͲU{I׌ƚtIlSrz5Ki kc6?D,:]34k)뉬LA4 kv"_d8;׃W#׃`D5Y̶;Stx YOt!=52G'f0W;>A׌"<5 `ޢk_]0l5h'fɇ׿t͈b(뉮Y2ߗEجYP("m~vYdKZz"lF~=[W lQI،1j;"lFu$>&a{YLcvmxl_뉲> 6D٤lԆFl+-_Oͪ +Siͳ_ON&mM&mʅdط/sTo M%U-zR]bICr(]lZ̮K +x}II7%V׭_gc u.+nV7:rU h' @f?Į]a%vA-0?%vǵk1$G2M]bܕ*˦Ϯ!]%76t]{A<;K,{CIvU<,;ve~Oz͜>IJ׽?-l^L?xK,{cT*o6veoAgo6veoA7>®g|fgXڰ8{K,{cdafgX0z:AD$G6m 7VJ}XUo*ƣ73v$P1. ﬖ&冝>uYa. ﬖ2&ܲGXw6hM>7vyd7òGXF|nQHlUòGXF|&#n z#:Wz,]`ٛޞt:K-;teof.U2˦.M +D~Xv-t¨ +[vuF*ʂòGX`\.8?7w&Ű0CY ;}r]oƣQ?Jea.@ N\`כzTu ;te[vԬ>e˸{iTβn ,{3E=9,;}teodDL]`ٛ?[&z_MT8v ,{s:Y:,;teo<,;}teoW[vtY9F1}teoFuW߳GnYxs&U9^?,;}teon]AESð'!".f z)d=uU2Tn zx2а9:r]oz~՗nc}?7># ݮ'ׇrs<vrȲ f]9Gvw;>UyʶW?V9O Ɵn,|K=~܂㹻jE˯F˯4n>ꇽh7%\y[-t-`Y[ohމ?}0lq7oi`s' ~M?~*6-焏[DoY`ӏS ~M?L.~Y64lqN6 +?KOyn\_͋uOO۳3/[G3/[3۳۳Gs~[p<?o pdE Á$q,`~cyn#-Z8蟷hx8ޢD`=ޞ;h,Wo8yc-::h?=\9_omZGC6I"-b !o,:IG~_ބ.Z +|Mf?3Z}'&pg!܋{E{m{~ާ^vxD?t_u r$u%&??:MحϷ+J_h#=t]CI] +LBOZ}g>NAdhe|S6> F֜Abʖs6:ڜW,ZYr]GE ;de49X-%6ɢhq^gAJD1;">Ebs:B,z9Yt!K-;Ebʷs:❗,Zxv&.#yŢ_luD;/YL]FE ٠ˈu^g9t+-9g.#yŞ7lu:X-8%ɢs^h9[tQK-8E伔mYpN]H ɠߐy9tA+|^ z&ZIŤOWɤҿ>^z&Ͱ3Q٦W16}.La㕡g M =_XlxujӧCO>]!z&ŤOW+,&}NLXa㕢g +M=SXlx虌jӧEf>_1zޏ:;QbǫFd>^7z&3զO׎6,6}zLagB M =hXmt 8bǫHOdf>^Gz"0[J)٢ג0}D~a' E(=\X,tMRMtUi):2r>*Iʿ2 7dɒz| +FP"0%ŗ(NL%Y@ExŎ'yD F3?c)=_b> ?4̉(+l#!~d#;:r_c=O!>׀?+Q./^'BxH]aՇ졥O|]O '>IHCo?ߢ+9#2 6s˭zco } 3䜾\*u/+>޲8BQ>\K ?>G~c'=(_KJ k ^p{sM =^{Ԃ MܪJ CV|a=j o ,a90sd-w%R=7~/ ;GW*9p?xRKv`%⡙%a4Ml}|'DU-7hΘ?|`KC1ۊ/RCpFj_XpG-($E{vRd< kg ~AJC1Ń~C<@s4U1Ÿ? e"r"9I ^\؛才9@T0vB;p7lp׽in,i/QF.xFc,:t\C#-8ǰJ(Ofo [y[*.tF){ XYaVSEٿ"gxK<>sybXv(fK9? )"pU\ [!*@֞yB'DU'aS> YPq 'ﺞM8\kV;64S03:Tjk-/ym 7dK=A_^LZo k1BAh>Œ W\͌`9H0&!P_X QI_,)7V6ӭP1`l~aF91*6xl݅ްB Ӎ/l\Z 3WAͅ0q3bim a2Q%"UN0iD-Pݰzŝ[aa8'Vk[ n5 +Ul8|+F䱶K C#a9dkyӰ?AYD3W*;L3 ^ +R+MSF}{cզC|,Y Uu>^`D+lԬf-_o߭Dy#lXTm^q-⧬q&0쿸,^ @0:S3YwF'pD D\)!L ||C_ kx5d%k1BC-YT|6ZaӶr24<5s3q10 aC +44rbl0!y'4,+"O!KE*][hosM@ HCo) ka:L lYCׂ %3Gpq  ױ޳cG-!k+ o1 +\K5}zGY1=DzZXr A҂. T\hB=1F+ +[;F+&0$$ 8 vXÁ~tqCSƜ!^z.m=]:倄#^U KsXMV4U[Խ.8ڬ-+~ 5[AҸ17(qs*g&[CЫHit\|KCΰ6Mփm@8/3{*b" ǚ,Vzaib,ƀ o+nb1i>314"{p$W璣 ӜT1<AUt֧.+E gOm堏 _[jR0h`[XhW$9L4mZ4v+b4$ZƒL!;'ƠaV:T d ނ' &sh o^0P!ݾޓ D4ը9 C[j~7"A4Y;z.wZn-->\2Vøuæ%U"ws]eQŚ,t09Zѫ1K^ 8):9']-q,9IWbo7&/(iX` Pi>W&bw6 mDn 3 "A`3}4tVvS![s[vf_=hA|ylnYcoZ:,tӂk"Cˆݴ %}A bTlvӂѺP~|ЂU vӂ"դEh`7-!h#߄ңɏD +] QpzW71ZӚU\b%,E @9ob'9v)';]ĠNEK'țzC@+/vBXt94ƛO<^!3-=MZGZ# $tv CEB蔱dxX,QagBO5}Bܰ<*\10⭀[P՛.` /O^!!:x12ZVo=<;xq aF4t}3, 3"Eb:d# n:}ͪJv"!Bbobo.&"^!}%3"a'5T EY^l=G/Ar&p=Zube24"֪r/oPж'w YhL"|7#9O*ia:j2d,^ljH%NDWM(2jSu)1H90,qH aU$q8v2"aa"0(WE xE5XEdIpD0E +-ʌJh]"7wM/bq +^"m;xtt%) u{M1B~#~/Qb;>$# S?\7[[{P*7͈|3j\(/6(X_ &%ͩ#t~M6&P^t#!wj_Z@M]mMxڦAznv.3 b!RMpr4ʲ\秃09xQ78T =<lldsGȕkvƤW[`KrG$='(&lWCd,>vD!< Hjv1$< E)nęPȨǽA )TMBbj y94 &)0sҐ#9כDbZVQ ~jv#|}}[vb@/'Ch rSvو9-FbZ I,XWj(HR +X%n/%a jvrVm,=[ILZփXsG/f`"nfR@jXgkf +1"xȌ*],EOb#ΰ^9ݣ2 ˰#֫?)}$(ElK-Ek7Pjy1EӂoODC4'AE$/O{d%-\{eaBkM^`0aXYw)30"vf`1G3yvp̩ gEĢ ;xLN "S"OKg^pq)v+Ie"h?@r)oWBr`31«V<3qvW+f ÌcYH6Ò$5E=;^}UrvIlXoljL?JwqH}WAl;x^az[>Mᡱ,22&•Ϣ/ĆW展Dy:Wh Nɞ<p4{תj +֓*h"MqFd!-;zn >k^؄ը % +:#,Y]k@<'3X8'+Ec6*l\L@gTc NYO(Ruz7md'@kv +ztᠥH @>34{e`' BJy"b)J&A&Y!{aK5z ;JM"ȂF(c/E o ;oUeRfmܔ2E0E_LgJRM|i1@c&+o{r&.p!CUV 7U؂Ǔ^&MۜI~ o`9S$3ܮnAYqH4p'3΃gUlGp59x*ѱVp Aۉ:sYq7o=a)lV?Z4M,7YАfU OҬuH0wl-M-N ,(-?j8̤yh,`! *Gّ} +jH;1yW7Ɋg,ZrO$l*]'KͲ.s6bWGB^Th cl8 |fYQ3.6i%ˊy7{0#A|0|pYV,!ௐu &x.PAb-&:iV!96r\4Y&'@YZ6͊ eEaEs-- *3hzNO}?;hV]ia |Y[B@/ZⴰmUЉT)5As^MQfEuO +^!%iV, Fq𬰶*B8<+W цknTBvDpt D+ +\p3"eݯUEϦ[8VL\֦ ʹb/MXf*rFUʹb^Ɉ)i {wiEa>t(h|;iH2qp3xs^Ů@9xV80#/(n{2 tX<+ʱ{SŢYi(=iUcF43ĢZU,*G]IVAd**Al?$+{cH +'YQի#1 ~A<v!$+&uA2NF_GFTmp&Y1.s/hXHVbez΃eŒ$'BzV, N Y\4+S"btX,+:*x.[%ؙW\IŲÓǛeu +xЬ%cdY%d.eEst h^YVTľb:YV$啝(Ҿb G T,fY1 +XNb!ѣˊ15YI ͲU^9$YʊmL`݊lG:LEj"ۃjtX$+Jof$+nRA&/+nCX,i\WocFW6JhNJr3{ \+>ҁm`y)Wx4O^f^ΧOKKK:'/i/Ez)&gЈmM^BΐfeGN]POZy%yoԴ__Vy)=:Қ}hd65{qZXgnyydpv`,T 6o§__fy{$mG^WiGy,/m+[r~}Eq:,vˋ᯻ꩼ b__y,쯻 "M.4̋90/ҌXėa~ _y;l|E{2 ٿ> vmu^חaI&S㧧a^ : 0iG{1X魷aIZ~I~0a2os]ݰ[ +P*u&>/f-j5A_vyR./J~!BbQw] ]vy2ٻ+;{⌬ʗY,+{i@gfyT⌳:ve.T8/f7/<6a~x%m~aI6Yޖ{Qp慝ny}L}~KswW9F$ p6 Hpíqь[0N[)Ec>X)B#]嗇/LJ_ːé?e,2Tn.//r//Ԛޢ_^ޥ̗_E5;c/p 8x\/<;ε~摀h塗aR]yFFˆy 2s|%RB4KQ+y8/ü~;!öcD;1Ebݰ1ߎyq(5ic0c^y1/o;1O_yALjJs_VOvydn,ǁ/χeSN<n+e5fm'Ba[4!0e10m'ڏv^yI xX\ ^ypYJN k^eg2 ;8e-O$莎m~Ebr9%7(?:)FERf"mṛ"Vc}7ψ Y {.< ++b/ GIOn<|B &rz8汓[GDt ܊NEGp̣v"rҸLisݎyYZx[щ0ݦy'F*M؅ +OӼ"Sde'G4b,B8=(9oҗge;'b=ädf$vzΡo<;1nvzJ +yԌ¿.R.Bḷ!/t3`LGe̓.H,(E2tˬ檔k"V}u双k\M1miG~<26zeyI8zNI,øLSͰ$9.o6DDe'qM߶yIEW)KIL$eT͋8Eo^dEcP9x9u&h۞y$vWm Ge9(A6JxͣfUװ]6/OwnR ig=}"?|(6nT327I2B}QЗo\z摐OhG}󾦎ygq,7/`$Yo^txو_y:Fn\.< ,rdS/eHzyDJBx@E1z eJbn<>Hnv )In+7j*-Wn&'L4<8nxqEh$ˇ{me{A.<@b;+/gGB] +ݝy" :\}^y<9ayyDT2˂>qW m)V4V5psdWy]]mEC(KoYu1ZIdi'\\jey;I^n=bȖzytJ< 4H}葃 4Г H41p1Hz>]t.=XQ/==)ɧ@βE 􄂍jç6cv–YsK@qiuը=Ɉ8y]^YFY&]u6"3<-w?L>ȘG>4cƘ,6УvR1pӮtVz=_T@ҁvŹDb&iץKrzzĂVz9Nu@3 "lz1c=V$ԑ/=j^i X7@2У#?i^zźbzRǨxj$/=N6]2ժ/=Up.Akϼ=,deh7Mb)'G??,E/ .jz9YkK8g$6p[Q3dBX=o.=З'N@ko2У06n&9,A ;96a!t ȋ+_zM'37o=[xz̻(p;Q&~95WIG-c +chVl#Iw|U?*YyG"* <y9ci(tYw(,ߊ$](r'Smg.<Nc4'[KϓyuW: W9:f}^)}VPp"m'#sf>OF=/oM<eGGp?HLp}<<z\HrGH+ҡsp1o^nxڔzxMT>GBs~9[rS-J9XnI퇑s0=yub:3 +FzM'MNz,9$qkn)V#cEVz,#l]^z]ڣN^^z,v5pOq >c6MO+=Y#,Om%4Brpq4 68]{$te.&P>U <Q1 7O7=ҔybGSk:iŸZջye:⫻NH檷#q1|Yy&,%:0m}<uن܄+K5mD:2B v ԆSn+SZfWa6&VgZnP4'c`|HVGyi1 ؏QD @2wjַSzNPg1 TMaHIIe] 8 $-x\15V0"3H,w!yc} hu2xB RIsT~E>-YMH6Avofi=vv#&i +Z@t.&I&ɎL:$PzRe+"Od]՚s["ޛ,e<>gJ۞/J#_wUR b (`}ÆkC`JNbBFadqzcEF5(bWq9{]t Pv@o+D^q,JM"iQs092)7ܾDYnH#kĉLl}_d:3hLxepUC{k`|:fIֈqgܚPqlr`ȚA~r,'Ù}!mbk5l9TKlm >[%GߔY<5*L$ƫj`X׮>{IFP(A;-hC cRh_eВ2;Q<dy-&J]*[4֡Tw험oXYATXQ`h1Re[b!@"[5N\B#J1+k y„"ۑQB['p$i+@N8*vkՐ $j +V/bPFG66*X[9/*yoX0+s- +LF@<(cq 9asLZjvu,6#a+(&JpHWL$0]x(ZM(~ϥhbr۳,r~U?YeQj)od3%MfƢ_]Xb Fk+F*< x<‚Fʪx PCqb+"jЁtPiIAkn$ں-/2(jLO8H31HbRGX]wϋ@K9Y ߵBS"T& ]ZN0ʭ k km:Vٱ ñ8h" +c(XLR߶cddM )`Aܓ@lX _BFS]Me|#{hueqr:Xu!K J33[esdY%fⓌm}2Cim9;eC/ngGT+ۦ6MOʪ<"<V,A$}}nF%$l2+ w?=~+ ".MOszqA7)sdbC 66HZA(zy"oHYROh7iF22I@ݯߋ:8ײ{9akF$s#j^:RB%:<=f,)VIf7L^suhli;qt[X"Q\'g6ѻ9B[F6)g} !DZCk+*3Xa2C +]%3Z?F[J-Y9>ӦIJ=O[q[pD+2J,22:T:XT&&6}Txf'[Ϝoƾc ?LGe]ww:DYn,.&2X89,:x.#9m,YHHإ`)N|ю]}`V5j0Yq c]#/- $fuZÄvaP@T–p4U"؏͖zDdM`ũ~wJ^@wY\R;hj٩gjAX %C@RVe9$DRŝg`<cNQ *mHć;$PN\><v5+^!!qq*UdK',M6_I}.}eC-a!"':N4/±4qvXnH ~f,/B@ "]:SͻZҹJb,x }&ihĘV,_3`#*cn-/-j*f m"ҿv3ȹ^l#;!= +;z R`ge>?ݴW.UIZD/O ^IX9.X"r6m 5RF0mo ?sDV'k*D: 3dViY\ unD >K.lզab]7M_"eR4A8G7EJ+]ESaZVp 賿kd;L+bV(0G*?( B!\q&(eqȲSb,XOVɧ16ib"* IM"d:]3s6Ѣ%X=~sA5D 7b#sWQgr| 4CPN;0_i"=h6OyW֍qy<:X6m׼xO ([[C1e#ܬlվҝD*8a11ki#ԘF%3bΜX'T"d k`W.^H3}6Ū&AGO|icE<)>Q!OJ1s2:>d,Z`iٺRSI$&)A!*f!p`/AQCZeKLVX𬰭U5Xfj(4H^;〻PBٸ\\6H!u`' iVAW +5 ">vЯ.@ A OjuF8MHE*jE!S'>;0r8ňd#AF qƭg856'HXM$ $"ă2xdr1 0u3}HMsZ&HzƸA܇\dDvگִjX)[lRmL~nإ&JwW1JC chc"0ac3¥V x/?<ê_%`6JNSG[laK1uqܬ&Uiڣ6ͪ]@*J/J ,.pӆt5S{9fq<$XVl:8U.6H􍋠Ll:\wΣ<.*$d_/L1i-Ȍǁ^R71"t'78 vY,vjj^كfK'p&؎ +rZElSg$LdzpJs:Yj`xȅ+Cnl +2^Y ͽQW[tlٍPO06m87ŏG0)+Y"&h9E$A*Bi+ҸKD[?*LpM_8Im2Q|:ֆ8 aN1 i~f}e[g$j 1)dR i3(ڦJWIśs >jY!d-eJB^{j≥UqpsİHSqع&:$ U\25g<&jN4qIVP +aSє vA- 񌖺@@hS6m?U VN5Aպ+eVY=mk2'JwԦ)2)4rHw-,:NtmKV[ƻt/<[ʭ0LAMbSl`WZa=}XLE,6f5u6|toRhWVdQk{(J"2ˎd[$]UM %Eh-B-[j7Nב gT")up6V Hבjt2G8[z|L53p$ؔͦS4;QX!\dβ̓&oՐ2'$/%6sA][f#-,i8i.-gгSlU2 "iM͈Ct\eF/ CEVT8YF<ؚnY,vpo\)4j N{HnrfK$q9}8G7PipֹGF|u3#ʏ٨?H# 5~̊F Ir,PXæ@f}~Ul +/&)g<υDmR#8#~SLQt;֛"l_ vrutS7_%5uε@[L`a]Sd؇ݴ;ԷYk-V[YyuTWԣ)NŸLQs>"^(Mr,; r{-x((9[B)|ˆLs *3C6 a#ή"pR6h aE(}%9R`kV[ pFel*O!>!w<4aHRh#k0N!SBx6vELE%*O{@-qIe?تr$Ҷ3Q;-1KW:4j&x v[+*RʦkVɉ"juW %-ۃKCprj,&-o(_ɴZ[t\NK-Ͽ_(_hῢ ~#6??~>2%^>>2#hyQW?14WHgc@Jd}}O64?VΟ_IXOL<<Yg*wS?Od.!^*)F>/K*g|#OF r~R4{"&%(J_/zR0:)UF#/N)}<rUeu/3߅S"K!gʱRC}?#a"h}?1"'?e#Y6JAKb n3YM>Bf0W2 JI})cѿ)ԇ}DzQwU oL|1Lڄx ' Y/dNs{[(u? +endstream +endobj +225 0 obj +85773 +endobj +226 0 obj +[224 0 R] +endobj +227 0 obj +<< + /Resources 228 0 R + /Type /Page + /MediaBox [0 0 445 182] + /CropBox [0 0 445 182] + /BleedBox [0 0 445 182] + /TrimBox [0 0 445 182] + /Parent 229 0 R + /Contents 226 0 R +>> +endobj +230 0 obj +<< + /Type /FontDescriptor + /FontName /EAAAAA+mwb_cmsy10 + /FontBBox [11 -215 942 727] + /Flags 33 + /CapHeight 0 + /Ascent 727 + /Descent -215 + /ItalicAngle 0 + /StemV 0 + /MissingWidth 500 + /FontFile2 231 0 R + /CIDSet 232 0 R +>> +endobj +231 0 obj +<< + /Length1 1968 + /Length 233 0 R + /Filter /FlateDecode +>> +stream +xU]hWdj~VlTdc.JI5%[ddv3l\@%VRP|"E&yhb +Eh+BK>(g&Z[sιw=  w#ʡOfH#9iodp?*M7ߚ.,L|+?Js9NFHޞ#EVɛrŹvd䪂5I\8Yێ~di([fwHpgJVyn-4c/͚%KF= =+6q*>yx'2Qa'؆HU_um8"oBYGa1>2.RO]Fq#1M ֆ낵5U~(LB'emꈪ,wȼhs"LJUNUY} vMJI9#k4Jˆ]J&GF#Ԗiu.r}аqp4bK#94*w[;lv#̙bw)*9*_Ӳh$m^7㚪 J6/kˌ.2lAvVb !y-hZݙ-Q0YۜفΰHU!+W4Jb9$%i5f KOUȤtJ7UUU:}πs.H.?ڒ-2GGTIsaL >nM# EB3z)$|TXnnt1_ ;β\;r70ŭF$$KS&;=վvn~;uIo{Q9 FG\ ѽ( ]|?+ObTSa0OzQ˾i&֐tr0Ca}aBՋY1ho8Uz`PMɣ@x1zVLT\]?i'leW2i4)FYM=.w$Pf<'+$ib$J1PVia6?R> +stream +xk +endstream +endobj +234 0 obj +9 +endobj +235 0 obj +<< + /Type /Font + /Subtype /Type0 + /BaseFont /EAAAAA+mwb_cmsy10 + /Encoding /Identity-H + /ToUnicode 236 0 R + /DescendantFonts [237 0 R] +>> +endobj +237 0 obj +<< /Type /Font +/BaseFont /EAAAAA+mwb_cmsy10 +/CIDToGIDMap /Identity +/Subtype /CIDFontType2 +/CIDSystemInfo << /Registry (Adobe) /Ordering (UCS) /Supplement 0 >> +/FontDescriptor 230 0 R +/DW 0 +/W [ 0 [750 776 ] ] +>> +endobj +236 0 obj +<< /Length 238 0 R /Filter /FlateDecode >> +stream +x]Pj0+l CԒX}q z0h[lE^X gBpjV& +:G:g} +endstream +endobj +238 0 obj +234 +endobj +239 0 obj +<< + /Type /FontDescriptor + /FontName /EAAAAB+mwb_cmmi10 + /FontBBox [16 -215 882 715] + /Flags 33 + /CapHeight 0 + /Ascent 715 + /Descent -215 + /ItalicAngle 0 + /StemV 0 + /MissingWidth 500 + /FontFile2 240 0 R + /CIDSet 241 0 R +>> +endobj +240 0 obj +<< + /Length1 2156 + /Length 242 0 R + /Filter /FlateDecode +>> +stream +xUmlSU~h٭cm݀ۺ/X@ns a, n֚v>@ !`0j$D[ h%&hH4"d]D}ys.4gU,y:k %ﶞ!i0;ᬟioS/#5% h^, ]$Gy+ d#CgXlH +G{ .'_2TD]/l_~on@464) l1 U0! <G, 03x'po^aˈ~t IZTvLJ1ϘLMӦ];xN<+f"$Ƅ.~C|7ʕq;ֳC*n4>'=ppp'ߊc>I]亠8KӳK̗V?3H?:fm@2̜0S׸%gvݺ*U}؅*01^fM ٚiIOMM6تLzI*z#WYT)ZUVkg2μ7$nRfNMayWO1%IO +j gmb%'͚ٺ3+ +%`:=&ώl'09 +oˢ"U7$Ov. .η;_O#cot63ŋEl!9sq^03Fv)ׄB   ;pyqVlK&@hHgD4 dMţ ̐ͤ`a ̓ߗXD>{;M䟆Q ]4(!Z5-օZUIXc4&Ll#O"cHWOcD"[,n #r⮈sD^C@yBCEk|(]J]t``/8$K*jPXj)ڴX00R*ՇR1,&bUj-6MjS'zB~ &`ݴ="E\*Sdc%BY|E)u%!p\ʦR[T*9P|h\.{-J*8|߰| +endstream +endobj +242 0 obj +1471 +endobj +241 0 obj +<< /Length 243 0 R /Filter /FlateDecode >> +stream +xk`` +endstream +endobj +243 0 obj +12 +endobj +244 0 obj +<< + /Type /Font + /Subtype /Type0 + /BaseFont /EAAAAB+mwb_cmmi10 + /Encoding /Identity-H + /ToUnicode 245 0 R + /DescendantFonts [246 0 R] +>> +endobj +246 0 obj +<< /Type /Font +/BaseFont /EAAAAB+mwb_cmmi10 +/CIDToGIDMap /Identity +/Subtype /CIDFontType2 +/CIDSystemInfo << /Registry (Adobe) /Ordering (UCS) /Supplement 0 >> +/FontDescriptor 239 0 R +/DW 0 +/W [ 0 [750 494 ] ] +>> +endobj +245 0 obj +<< /Length 247 0 R /Filter /FlateDecode >> +stream +x]Pj0 +t=,N@RȡҴrjhl8}m%P# D;g#w:M8€uEU*o5P$99ằv&H9 +gN'%k@W[5A*$F,nen/o^ooIۤjU ;+mB28Vd[ >d_2} +endstream +endobj +247 0 obj +236 +endobj +248 0 obj +<< + /Type /FontDescriptor + /FontName /EAAAAC+mwa_cmmi10 + /FontBBox [-34 -250 1047 750] + /Flags 33 + /CapHeight 683 + /Ascent 750 + /Descent -250 + /ItalicAngle 0 + /StemV 0 + /MissingWidth 500 + /FontFile2 249 0 R + /CIDSet 250 0 R +>> +endobj +249 0 obj +<< + /Length1 2848 + /Length 251 0 R + /Filter /FlateDecode +>> +stream +xV}L[?w?`Xy@bg1  E>f4lL0Y5EԮlZhvz*uҪuiR)k픮yƉfz{Ϲ{6iAg9>=eL"+^MdNV4f`יt*96o`Lkh9WLnsi1{ mg6y|n[C[JfSd= ӹ ?RۧgRrR;h7Z0&P`!!f>.yzXa .yE6da N~V!nؤk>T7 MK? znj;ˍS&.,,<\4pA!dy -wvb6 ezVSeVť#KRl[m;7Q>\:oVH%_aeƍQ@>&c-*\\Jc+Ҿ +w'TՋ}iESߛT`ORhmؕޛ]M-ɱ[w}^tYm8m JrWaɑVR|IbNL+fsN*ѤXtPs) +bHIb)t +VoǐĪZ +.$$c}(Xt_B >l[H7/nȾ.Eha$p/V=rWu5_!Թ> ,VXMU_W'qֻF,ԑ ipHWPD}~cuZWa` \\ įUFV3mՆ1`5BZ-$ItT5w$F—iO\RU6d T>jr_&aL|w:Cq051 0oy7s>yx4 V'76fjX&9o|TJƅé)w-탓\[GݖjΓ0XҡH0v.x-. +endstream +endobj +251 0 obj +2026 +endobj +250 0 obj +<< /Length 252 0 R /Filter /FlateDecode >> +stream +xk```dhb`` +endstream +endobj +252 0 obj +17 +endobj +253 0 obj +<< + /Type /Font + /Subtype /Type0 + /BaseFont /EAAAAC+mwa_cmmi10 + /Encoding /Identity-H + /ToUnicode 254 0 R + /DescendantFonts [255 0 R] +>> +endobj +255 0 obj +<< /Type /Font +/BaseFont /EAAAAC+mwa_cmmi10 +/CIDToGIDMap /Identity +/Subtype /CIDFontType2 +/CIDSystemInfo << /Registry (Adobe) /Ordering (UCS) /Supplement 0 >> +/FontDescriptor 248 0 R +/DW 0 +/W [ 0 [365 680 500 643 520 ] ] +>> +endobj +254 0 obj +<< /Length 256 0 R /Filter /FlateDecode >> +stream +x]j0 y +:!0 Ѕ}VR6sזC +x_%v/V؇3GbV'Ί~'mBr-Nݕ3\68ݤ $$:'8}Wk8ܾQs'H_E(a$. t\O]` \X_9e P"P"QITDU]D^܎f\F į+1/s +endstream +endobj +256 0 obj +252 +endobj +257 0 obj +<< + /Type /FontDescriptor + /FontName /EAAAAD+mwb_cmr10 + /FontBBox [-43 -205 984 740] + /Flags 33 + /CapHeight 0 + /Ascent 740 + /Descent -205 + /ItalicAngle 0 + /StemV 0 + /MissingWidth 500 + /FontFile2 258 0 R + /CIDSet 259 0 R +>> +endobj +258 0 obj +<< + /Length1 2220 + /Length 260 0 R + /Filter /FlateDecode +>> +stream +xU{hSWM_>]&iv7&Tk댮K;޶iILhm1ԍmƐ!"""c\m8`Ce0c[ަ2=w^PںiQ6 }Ig̈́?Xs~|/a<,ǻx"HbC/6 :!f4%=hCbL vppp?p 7.WY5>Eb~MQoӪn +.f{xo8R6/c +9d)!eB5U* 8*JKMx7CgmOx~k&oT>󨾹 Po䨜G fŠ.\ w].µ 94n`[UgqQQK]_MA/,]ݠe.ING >lܣl681+ih2smq$etPG؄F7DE#LRhFg#ɍ +gkČS9EZ6,#nT0[Өk[$Q4_ :gM'y%W]rn \h"~KFn8!E;6!]d8݋u \R;'KPWejֱsMdkg!{ 6{]lj :`se=TSJCuM_li[;r\8j]¼˔[Z甪сS^8zjS@z$t\K;:[(^c +mg?Ut=]c;TSP]vY +t񹇕K;\9ԍ7&6d/Y8QLcZ2Ng Y+Zw/xϞ+ZHlގQ ͞@|;A}ΗY"Ou܆BPk3qQR$[<@X`~l4PB5 L.by@xE,e'FS7ƨ&Oޮ&ta :҄᧱8ir&@m {-gQ #Oi%Mnoz%hafezJ`8)KbfŊ J~XrR^^#[|Ri/\2i9fX"'FkMޝhv t:1<[DZ(@\wS?@#s`hpf"@\S>:IKOOz4@ +?!YZj@cI'GBre+ B[>(=/nS6ފ ޼wYzo +endstream +endobj +260 0 obj +1539 +endobj +259 0 obj +<< /Length 261 0 R /Filter /FlateDecode >> +stream +xk`h +endstream +endobj +261 0 obj +11 +endobj +262 0 obj +<< + /Type /Font + /Subtype /Type0 + /BaseFont /EAAAAD+mwb_cmr10 + /Encoding /Identity-H + /ToUnicode 263 0 R + /DescendantFonts [264 0 R] +>> +endobj +264 0 obj +<< /Type /Font +/BaseFont /EAAAAD+mwb_cmr10 +/CIDToGIDMap /Identity +/Subtype /CIDFontType2 +/CIDSystemInfo << /Registry (Adobe) /Ordering (UCS) /Supplement 0 >> +/FontDescriptor 257 0 R +/DW 0 +/W [ 0 [750 583 ] ] +>> +endobj +263 0 obj +<< /Length 265 0 R /Filter /FlateDecode >> +stream +x]Pj0+l ťCP' K+GPKb-ƅ.13ð:g#ycc&B +aѺA[wķd(DqpXz ;@|iӫF_h/!.B=t_~)'>N'95 Ԍ- t#2UTMv77`S6FUBeY+쒷qDT QJX9uxl5U|~}@ +endstream +endobj +265 0 obj +235 +endobj +266 0 obj +<< + /Type /FontDescriptor + /FontName /EAAAAE+mwa_cmr10 + /FontBBox [-43 -250 1008 750] + /Flags 33 + /CapHeight 683 + /Ascent 750 + /Descent -250 + /ItalicAngle 0 + /StemV 0 + /MissingWidth 500 + /FontFile2 267 0 R + /CIDSet 268 0 R +>> +endobj +267 0 obj +<< + /Length1 8652 + /Length 269 0 R + /Filter /FlateDecode +>> +stream +xZ t[啾ۤ'ɶvYekmmeYEe[I'vlk;^؎8H P(mJ9LJ)59]h@Ir()Ж)S$')K;wwph^(׬Uh;-ūOa'xzl4y_O%&~WX69WnƁ \9@΃cι/~8OOlv+}Nm#*ľeMWb#m3;-Ux޲m趿v;/ f@,՗+g=Yހ0Q8 > 4lͰ`$ 0 JRٷgy `̛NWh#.[1jT!B!!2M6~M՗< <߄(#p$Gi@faeFyY"( + i5j2';K!R 24E{rb=6/h윛OWՈyYI36 䉦yqhbc|cmyB'81crAW\-ib>:do0a[h7=K{lb%>ist 8bA[,OR} Ś`Ξ^{>/N5Q2y>%~^[0/EvH1gxr|G~'a~ +/9+\0P@pM/0<@PJ]?I Ps^LIey& eQ +uei)]^UP.~Eo5< c[^ѶC}O<FŹtW+,EHM<>H2j9nH4\rC܇0X3ڪ uyARq7rB% ~Ks$HdSԣ+*Hn{sThStKut%>{_̴FS-G{RƸڲ~Չ؎˵k@U }YJXjo$Oݕ#IKH0&x"I@0%LmXu+GmG^  8nMn "#Xc 1QTmY^];T2[]2湌[Z6hn< }?;=榇g.y.X12"iC{:<-z2r;'CN-*lM 5 |Mv'Ooms+}P#' +bqR2_mֲEDF(9w:*IJ0'UuTKa@msˆSw5<}}{ה{@L?߳;SZ>c#\H'z6ag4?/G0HQJz@jYRd.LT܄}}}֐:+ hEAV;E2W|J7v:Ǽ&^T%Z0G"#[tj*p#((_*]ي(zF5fՊH` BMO,ux[@T{트gv( +\f^eY>3+u(Ql*nؐ(ί4zzu{}_\jqrM]d*+ě6*EػpP H"THˈRbjE.pJNf4]^EKPLZ$7|BP@XҹJOM>?違YQI8tow]M]V G~>e1Q>Q[j/4n#+Rځj F=TwEഎt"6)k%*F!^V](uDR 4"~vn>nw|~ru6%uSIiyp䍽s8VtIػF$SUOwR@8L^` )PJ@IS,QPQ z;$G?JaUَ &pп1) +[+ƈ "2I!ϵkY?)=/q H K>i(aONJo?~P) !L0y{K;2~0(y6I[h,n !J"` DHݮYzf &Un$Vd5Ws  +1F]&y.XthE>G&4 +N NoNs"upԁB4i_h.c 䏯*Y d":);WC@|/8/,сo (sĘ@b 1 ђ \srrt`f61 ?jR"T$ga!!o&H0󳧆ݔQPk)i['U,qpi/==ch|,+0~啌:ȯSYXMњJFͰnK> - +4NDfXרl k $z)(GTL7+9wQrePK-6yVmd2X>:-/%;9i6'WjuM_iVHIY8KU`H.`(O(7f + *dSwLqhNQB}k֐;?Nr3í-+dړũٖe #dꁒsw:Hrܛx@iȡf!La&Wخ8_.D2)SRct"4TW}`lerWd١:e +x5@ nRL/ lvd&w8˜Y|n]W_]|paɜ褉T6yG(崏 +gd!kXdQ#WG^Rp,_U@#[C wܮ +A!I^cਚm_n',fً{JfinPJ9Z\O:d +NѡT2ffjj%Q#1;H"P,3k5鰬3eS> +stream +x`ZU  +endstream +endobj +270 0 obj +20 +endobj +271 0 obj +<< + /Type /Font + /Subtype /Type0 + /BaseFont /EAAAAE+mwa_cmr10 + /Encoding /Identity-H + /ToUnicode 272 0 R + /DescendantFonts [273 0 R] +>> +endobj +273 0 obj +<< /Type /Font +/BaseFont /EAAAAE+mwa_cmr10 +/CIDToGIDMap /Identity +/Subtype /CIDFontType2 +/CIDSystemInfo << /Registry (Adobe) /Ordering (UCS) /Supplement 0 >> +/FontDescriptor 266 0 R +/DW 0 +/W [ 0 [365 500 500 500 500 500 500 916 500 500 555 276 388 555 555 443 276 833 500 750 276 500 555 500 305 333 555 526 555 443 651 391 526 526 750 443 763 394 ] ] +>> +endobj +272 0 obj +<< /Length 274 0 R /Filter /FlateDecode >> +stream +x]n0E +/E6D"U*CuTK33GĢw;Ȋ&vZYJb :ォNN[E.ZƉRKf">ܟq ?]߬"]mb?GZR׺':RnZ.b39(M-Fsƅݸ}OR5޺qqA#( +O=a 5'{tɡSU8tf!:> +endobj +276 0 obj +<< + /Length1 1992 + /Length 278 0 R + /Filter /FlateDecode +>> +stream +xT]lUmKK(ôElGWia)KLڡ;nYeC !Dnc 4ф`$ ̰%*As{x^Y {`8%v'=Mg,?ߙ{鱳W>#dDc#&Tr_BiW5+(w㣛ǮCzGyTvuTS/Ѷj[LffwD>8(1ީrJ2N̔.tɤ#*:`q8Ew*{5k!.^ԩRP+eygtaOJ8OSd *7M kꜦv;uڃ[Kw7%Cx9+tx fy]^l >XH+^jI n0Uh%.";ٰevIJӆυ:Zxj kO<; Gx1d1sw〴w8ʒ'7{]b}#΋sw6?ٱ%?<8wF/ĵp8E$~]^7?s,c[˘-cx§XD5%J&Tb:&1)cd _)ck2y#`iLAFb[HFD*a&  1Yaq=ĸ+<"iQ"}Sbwz1(IecVF0JLƳU2Yd;L]OOfSFEDUY7 <t!mrO6+e9nɢ +wD:us4~{ ZS{BwYE+ #T0Ցʦ"ãtqL 9^v4j6m]~D‘H.jO/Ww&q]`5n_-ƫb`s^:T[Nۍ +endstream +endobj +278 0 obj +1330 +endobj +277 0 obj +<< /Length 279 0 R /Filter /FlateDecode >> +stream +xk`P +endstream +endobj +279 0 obj +11 +endobj +280 0 obj +<< + /Type /Font + /Subtype /Type0 + /BaseFont /EAAAAF+mwa_cmsy10 + /Encoding /Identity-H + /ToUnicode 281 0 R + /DescendantFonts [282 0 R] +>> +endobj +282 0 obj +<< /Type /Font +/BaseFont /EAAAAF+mwa_cmsy10 +/CIDToGIDMap /Identity +/Subtype /CIDFontType2 +/CIDSystemInfo << /Registry (Adobe) /Ordering (UCS) /Supplement 0 >> +/FontDescriptor 275 0 R +/DW 0 +/W [ 0 [365 274 ] ] +>> +endobj +281 0 obj +<< /Length 283 0 R /Filter /FlateDecode >> +stream +x]Pj0 +t;()i?FqJH?FK )X V#NWut b%xؖsm2k<#D\M #n8H7EW5#&\ڮY"Bø3`pJ#)?auZ?jyFleTg$M`3^r:^*s1Ģ } +endstream +endobj +283 0 obj +234 +endobj +229 0 obj +<< /Type /Pages +/Count 1 +/Kids [227 0 R ] >> +endobj +284 0 obj +<< + /Type /Catalog + /Pages 229 0 R + /Lang (x-unknown) +>> +endobj +228 0 obj +<< + /Font << + /F270 235 0 R + /F271 244 0 R + /F272 253 0 R + /F273 262 0 R + /F268 271 0 R + /F269 280 0 R +>> + /ProcSet [/PDF /ImageB /ImageC /Text] + /ExtGState << + /GS1 2 0 R + /GS2 3 0 R + /GS3 4 0 R + /GS4 5 0 R + /GS5 6 0 R + /GS6 7 0 R + /GS7 8 0 R + /GS8 9 0 R + /GS9 10 0 R + /GS10 11 0 R + /GS11 12 0 R + /GS12 13 0 R + /GS13 14 0 R + /GS14 15 0 R + /GS15 16 0 R + /GS16 17 0 R + /GS17 18 0 R + /GS18 19 0 R + /GS19 20 0 R + /GS20 21 0 R + /GS21 22 0 R + /GS22 23 0 R + /GS23 24 0 R + /GS24 25 0 R + /GS25 26 0 R + /GS26 27 0 R + /GS27 28 0 R + /GS28 29 0 R + /GS29 30 0 R + /GS30 31 0 R + /GS31 32 0 R + /GS32 33 0 R + /GS33 34 0 R + /GS34 35 0 R + /GS35 36 0 R + /GS36 37 0 R + /GS37 38 0 R + /GS38 39 0 R + /GS39 40 0 R + /GS40 41 0 R + /GS41 42 0 R + /GS42 43 0 R + /GS43 44 0 R + /GS44 45 0 R + /GS45 46 0 R + /GS46 47 0 R + /GS47 48 0 R + /GS48 49 0 R + /GS49 50 0 R + /GS50 51 0 R + /GS51 52 0 R + /GS52 53 0 R + /GS53 54 0 R + /GS54 55 0 R + /GS55 56 0 R + /GS56 57 0 R + /GS57 58 0 R + /GS58 59 0 R + /GS59 60 0 R + /GS60 61 0 R + /GS61 62 0 R + /GS62 63 0 R + /GS63 64 0 R + /GS64 65 0 R + /GS65 66 0 R + /GS66 67 0 R + /GS67 68 0 R + /GS68 69 0 R + /GS69 70 0 R + /GS70 71 0 R + /GS71 72 0 R + /GS72 73 0 R + /GS73 74 0 R + /GS74 75 0 R + /GS75 76 0 R + /GS76 77 0 R + /GS77 78 0 R + /GS78 79 0 R + /GS79 80 0 R + /GS80 81 0 R + /GS81 82 0 R + /GS82 83 0 R + /GS83 84 0 R + /GS84 85 0 R + /GS85 86 0 R + /GS86 87 0 R + /GS87 88 0 R + /GS88 89 0 R + /GS89 90 0 R + /GS90 91 0 R + /GS91 92 0 R + /GS92 93 0 R + /GS93 94 0 R + /GS94 95 0 R + /GS95 96 0 R + /GS96 97 0 R + /GS97 98 0 R + /GS98 99 0 R + /GS99 100 0 R + /GS100 101 0 R + /GS101 102 0 R + /GS102 103 0 R + /GS103 104 0 R + /GS104 105 0 R + /GS105 106 0 R + /GS106 107 0 R + /GS107 108 0 R + /GS108 109 0 R + /GS109 110 0 R + /GS110 111 0 R + /GS111 112 0 R + /GS112 113 0 R + /GS113 114 0 R + /GS114 115 0 R + /GS115 116 0 R + /GS116 117 0 R + /GS117 118 0 R + /GS118 119 0 R + /GS119 120 0 R + /GS120 121 0 R + /GS121 122 0 R + /GS122 123 0 R + /GS123 124 0 R + /GS124 125 0 R + /GS125 126 0 R + /GS126 127 0 R + /GS127 128 0 R + /GS128 129 0 R + /GS129 130 0 R + /GS130 131 0 R + /GS131 132 0 R + /GS132 133 0 R + /GS133 134 0 R + /GS134 135 0 R + /GS135 136 0 R + /GS136 137 0 R + /GS137 138 0 R + /GS138 139 0 R + /GS139 140 0 R + /GS140 141 0 R + /GS141 142 0 R + /GS142 143 0 R + /GS143 144 0 R + /GS144 145 0 R + /GS145 146 0 R + /GS146 147 0 R + /GS147 148 0 R + /GS148 149 0 R + /GS149 150 0 R + /GS150 151 0 R + /GS151 152 0 R + /GS152 153 0 R + /GS153 154 0 R + /GS154 155 0 R + /GS155 156 0 R + /GS156 157 0 R + /GS157 158 0 R + /GS158 159 0 R + /GS159 160 0 R + /GS160 161 0 R + /GS161 162 0 R + /GS162 163 0 R + /GS163 164 0 R + /GS164 165 0 R + /GS165 166 0 R + /GS166 167 0 R + /GS167 168 0 R + /GS168 169 0 R + /GS169 170 0 R + /GS170 171 0 R + /GS171 172 0 R + /GS172 173 0 R + /GS173 174 0 R + /GS174 175 0 R + /GS175 176 0 R + /GS176 177 0 R + /GS177 178 0 R + /GS178 179 0 R + /GS179 180 0 R + /GS180 181 0 R + /GS181 182 0 R + /GS182 183 0 R + /GS183 184 0 R + /GS184 185 0 R + /GS185 186 0 R + /GS186 187 0 R + /GS187 188 0 R + /GS188 189 0 R + /GS189 190 0 R + /GS190 191 0 R + /GS191 192 0 R + /GS192 193 0 R + /GS193 194 0 R + /GS194 195 0 R + /GS195 196 0 R + /GS196 197 0 R + /GS197 198 0 R + /GS198 199 0 R + /GS199 200 0 R + /GS200 201 0 R + /GS201 202 0 R + /GS202 203 0 R + /GS203 204 0 R + /GS204 205 0 R + /GS205 206 0 R + /GS206 207 0 R + /GS207 208 0 R + /GS208 209 0 R + /GS209 210 0 R + /GS210 211 0 R + /GS211 212 0 R + /GS212 213 0 R + /GS213 214 0 R + /GS214 215 0 R + /GS215 216 0 R + /GS216 217 0 R + /GS217 218 0 R + /GS218 219 0 R + /GS219 220 0 R + /GS220 221 0 R + /GS221 222 0 R + /GS222 223 0 R +>> +>> +endobj +xref +0 285 +0000000000 65535 f +0000000015 00000 n +0000000145 00000 n +0000000197 00000 n +0000000249 00000 n +0000000301 00000 n +0000000353 00000 n +0000000405 00000 n +0000000457 00000 n +0000000509 00000 n +0000000561 00000 n +0000000614 00000 n +0000000667 00000 n +0000000720 00000 n +0000000773 00000 n +0000000826 00000 n +0000000879 00000 n +0000000932 00000 n +0000000985 00000 n +0000001038 00000 n +0000001091 00000 n +0000001144 00000 n +0000001197 00000 n +0000001250 00000 n +0000001303 00000 n +0000001356 00000 n +0000001409 00000 n +0000001462 00000 n +0000001516 00000 n +0000001570 00000 n +0000001624 00000 n +0000001677 00000 n +0000001730 00000 n +0000001783 00000 n +0000001836 00000 n +0000001889 00000 n +0000001942 00000 n +0000001995 00000 n +0000002048 00000 n +0000002101 00000 n +0000002154 00000 n +0000002207 00000 n +0000002260 00000 n +0000002313 00000 n +0000002366 00000 n +0000002419 00000 n +0000002472 00000 n +0000002525 00000 n +0000002578 00000 n +0000002631 00000 n +0000002684 00000 n +0000002737 00000 n +0000002790 00000 n +0000002843 00000 n +0000002896 00000 n +0000002949 00000 n +0000003002 00000 n +0000003055 00000 n +0000003108 00000 n +0000003161 00000 n +0000003214 00000 n +0000003267 00000 n +0000003320 00000 n +0000003373 00000 n +0000003426 00000 n +0000003479 00000 n +0000003532 00000 n +0000003585 00000 n +0000003638 00000 n +0000003691 00000 n +0000003744 00000 n +0000003797 00000 n +0000003850 00000 n +0000003903 00000 n +0000003957 00000 n +0000004011 00000 n +0000004065 00000 n +0000004118 00000 n +0000004171 00000 n +0000004224 00000 n +0000004277 00000 n +0000004330 00000 n +0000004383 00000 n +0000004436 00000 n +0000004489 00000 n +0000004542 00000 n +0000004595 00000 n +0000004648 00000 n +0000004701 00000 n +0000004754 00000 n +0000004807 00000 n +0000004860 00000 n +0000004913 00000 n +0000004966 00000 n +0000005019 00000 n +0000005072 00000 n +0000005125 00000 n +0000005178 00000 n +0000005231 00000 n +0000005284 00000 n +0000005337 00000 n +0000005391 00000 n +0000005446 00000 n +0000005501 00000 n +0000005556 00000 n +0000005610 00000 n +0000005664 00000 n +0000005718 00000 n +0000005772 00000 n +0000005826 00000 n +0000005880 00000 n +0000005934 00000 n +0000005988 00000 n +0000006042 00000 n +0000006096 00000 n +0000006150 00000 n +0000006204 00000 n +0000006258 00000 n +0000006312 00000 n +0000006366 00000 n +0000006420 00000 n +0000006474 00000 n +0000006528 00000 n +0000006582 00000 n +0000006636 00000 n +0000006690 00000 n +0000006744 00000 n +0000006798 00000 n +0000006852 00000 n +0000006906 00000 n +0000006960 00000 n +0000007014 00000 n +0000007068 00000 n +0000007122 00000 n +0000007176 00000 n +0000007230 00000 n +0000007284 00000 n +0000007338 00000 n +0000007392 00000 n +0000007446 00000 n +0000007500 00000 n +0000007554 00000 n +0000007608 00000 n +0000007662 00000 n +0000007716 00000 n +0000007770 00000 n +0000007824 00000 n +0000007878 00000 n +0000007933 00000 n +0000007988 00000 n +0000008043 00000 n +0000008097 00000 n +0000008151 00000 n +0000008205 00000 n +0000008259 00000 n +0000008313 00000 n +0000008367 00000 n +0000008421 00000 n +0000008475 00000 n +0000008529 00000 n +0000008583 00000 n +0000008637 00000 n +0000008691 00000 n +0000008745 00000 n +0000008799 00000 n +0000008853 00000 n +0000008907 00000 n +0000008961 00000 n +0000009015 00000 n +0000009069 00000 n +0000009123 00000 n +0000009177 00000 n +0000009231 00000 n +0000009285 00000 n +0000009339 00000 n +0000009393 00000 n +0000009448 00000 n +0000009503 00000 n +0000009558 00000 n +0000009612 00000 n +0000009666 00000 n +0000009720 00000 n +0000009774 00000 n +0000009828 00000 n +0000009882 00000 n +0000009936 00000 n +0000009990 00000 n +0000010044 00000 n +0000010098 00000 n +0000010152 00000 n +0000010206 00000 n +0000010260 00000 n +0000010314 00000 n +0000010368 00000 n +0000010422 00000 n +0000010476 00000 n +0000010530 00000 n +0000010584 00000 n +0000010638 00000 n +0000010692 00000 n +0000010746 00000 n +0000010800 00000 n +0000010854 00000 n +0000010908 00000 n +0000010962 00000 n +0000011016 00000 n +0000011070 00000 n +0000011124 00000 n +0000011178 00000 n +0000011232 00000 n +0000011286 00000 n +0000011340 00000 n +0000011394 00000 n +0000011448 00000 n +0000011502 00000 n +0000011556 00000 n +0000011610 00000 n +0000011664 00000 n +0000011718 00000 n +0000011772 00000 n +0000011826 00000 n +0000011880 00000 n +0000011935 00000 n +0000011990 00000 n +0000012045 00000 n +0000097896 00000 n +0000097919 00000 n +0000097946 00000 n +0000119800 00000 n +0000119661 00000 n +0000098144 00000 n +0000098396 00000 n +0000099808 00000 n +0000099786 00000 n +0000099895 00000 n +0000099914 00000 n +0000100305 00000 n +0000100074 00000 n +0000100617 00000 n +0000100638 00000 n +0000100890 00000 n +0000102481 00000 n +0000102459 00000 n +0000102571 00000 n +0000102591 00000 n +0000102982 00000 n +0000102751 00000 n +0000103296 00000 n +0000103317 00000 n +0000103573 00000 n +0000105719 00000 n +0000105697 00000 n +0000105814 00000 n +0000105834 00000 n +0000106237 00000 n +0000105994 00000 n +0000106567 00000 n +0000106588 00000 n +0000106840 00000 n +0000108499 00000 n +0000108477 00000 n +0000108588 00000 n +0000108608 00000 n +0000108997 00000 n +0000108767 00000 n +0000109310 00000 n +0000109331 00000 n +0000109586 00000 n +0000115971 00000 n +0000115949 00000 n +0000116069 00000 n +0000116089 00000 n +0000116622 00000 n +0000116248 00000 n +0000117101 00000 n +0000117122 00000 n +0000117378 00000 n +0000118828 00000 n +0000118806 00000 n +0000118917 00000 n +0000118937 00000 n +0000119328 00000 n +0000119097 00000 n +0000119640 00000 n +0000119723 00000 n +trailer +<< + /Root 284 0 R + /Info 1 0 R + /ID [ ] + /Size 285 +>> +startxref +123552 +%%EOF diff --git a/figs/uniaxial_effect_support_compliance_dynamics_d.png b/figs/uniaxial_effect_support_compliance_dynamics_d.png new file mode 100644 index 0000000..2984dc4 Binary files /dev/null and b/figs/uniaxial_effect_support_compliance_dynamics_d.png differ diff --git a/figs/uniaxial_effect_support_compliance_neglected.pdf b/figs/uniaxial_effect_support_compliance_neglected.pdf new file mode 100644 index 0000000..8a9f324 --- /dev/null +++ b/figs/uniaxial_effect_support_compliance_neglected.pdf @@ -0,0 +1,2529 @@ +%PDF-1.4 +% +1 0 obj +<< +/Producer (Apache FOP Version 2.4.0-SNAPSHOT: PDFDocumentGraphics2D) +/CreationDate (D:20230629162209+02'00') +>> +endobj +2 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +3 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +4 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +5 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +6 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +7 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +8 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +9 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +10 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +11 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +12 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +13 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +14 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +15 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +16 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +17 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +18 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +19 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +20 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +21 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +22 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +23 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +24 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +25 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +26 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +27 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +28 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +29 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +30 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +31 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +32 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +33 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +34 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +35 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +36 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +37 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +38 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +39 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +40 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +41 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +42 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +43 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +44 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +45 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +46 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +47 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +48 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +49 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +50 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +51 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +52 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +53 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +54 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +55 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +56 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +57 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +58 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +59 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +60 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +61 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +62 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +63 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +64 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +65 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +66 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +67 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +68 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +69 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +70 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +71 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +72 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +73 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +74 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +75 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +76 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +77 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +78 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +79 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +80 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +81 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +82 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +83 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +84 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +85 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +86 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +87 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +88 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +89 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +90 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +91 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +92 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +93 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +94 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +95 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +96 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +97 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +98 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +99 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +100 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +101 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +102 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +103 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +104 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +105 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +106 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +107 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +108 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +109 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +110 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +111 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +112 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +113 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +114 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +115 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +116 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +117 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +118 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +119 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +120 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +121 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +122 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +123 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +124 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +125 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +126 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +127 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +128 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +129 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +130 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +131 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +132 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +133 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +134 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +135 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +136 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +137 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +138 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +139 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +140 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +141 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +142 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +143 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +144 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +145 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +146 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +147 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +148 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +149 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +150 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +151 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +152 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +153 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +154 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +155 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +156 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +157 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +158 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +159 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +160 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +161 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +162 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +163 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +164 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +165 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +166 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +167 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +168 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +169 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +170 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +171 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +172 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +173 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +174 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +175 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +176 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +177 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +178 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +179 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +180 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +181 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +182 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +183 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +184 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +185 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +186 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +187 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +188 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +189 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +190 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +191 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +192 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +193 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +194 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +195 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +196 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +197 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +198 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +199 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +200 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +201 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +202 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +203 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +204 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +205 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +206 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +207 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +208 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +209 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +210 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +211 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +212 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +213 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +214 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +215 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +216 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +217 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +218 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +219 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +220 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +221 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +222 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +223 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +224 0 obj +<< /Length 225 0 R /Filter /FlateDecode >> +stream +xĽˎ,Ks9?OQ/d"ș ?4,"/u*w޹vfXŮc/vI٧?Gn楶ZGr\6\lGGMoZOǿ|Yo^azgQ~.pTHZHxrϤʯKշK-.Go.ըA?.'o.l|QR5X޴^հOσo(aIQV`5%Ĺr}C #,:KźR}C #(M)wn?\ՉBF-sr~sM Jr}O.ήɻ\\םm+]quz6I9h]O~.ζI%IQixfk}YT#*'5~mlY=]Wd!G?{>[ڷlyusޛ=n>\y藤JG?{ڞ&]5n>\K_?擟K=]k#BWmG?{>+P^7\zy1":Jջ~^*O~t;fM]63RF~.7u֤@r~sҥ@sG?{>)H(uOc Wi]ۏ~.t}jCwtOu،r~sLLuOʡWn?y{>ͧ5ݙr}Ok!)g]=}(vYr|s}sW4[COc}<C?xp.Nx?|zC#˪ED Aj.9"ҿ?^xE:{KE7۶~? .\Oo/':%._ Gt"i5/֪$IVV+r<}O,Қf텃^ pk䇧TՑ!o>TM.kY҃4Ι_>L/EķM|ڒޖO_=iϙ_IIO&]BYW nl_*z_%'kJSSԤG~L0vl|^ KyU<9r];V.ekb[zp+uj`eYR`}A|,e[ y=d0V+;Wo4h}]\K*Vw[[.%;V^%xRȒdRˁu[+^AMa ޳cVF߫Y)ȁN 7ˁ-1Cm͚9:6Fa\mm> rVucƒw?Uw1ڲhT"mV֯X/1R@Q.fշ#.,QgR{<^H +Q[`<;vP;v1Sk#VUM,*vl)XV47rjŭպwQ&h9j5ѵ140i俩MjgN:zᤉV|FN0Cs)E8iRZDֱaU6v_Lؘ)YfЍ; =V޼cZ;VG38$@hibʂXI 0m}TyU՞2Y{cM2/)MCC-(sjvLgi,SJk6,¤ZS!lLB1id-D$:(ҩ+Hgn(3Z` +t!vBc콵dYmאkX.RrYE)e혛hikfȢ<lBM +<Ú꾎8z6HE֔&{/KTk]Z^?-lHuQdufdCLPW{*UTB3E,R[e]*mKY$CqcXbIJ轵q]dtװ"S݅[8I9uG4';Yv kKї9K"G{h|Xi+eݛ B9ӶjN[ B]SCM9̶ T{1Z8֎ɒ-.JHwW9UGR6oxv 7N:E幹}7B&d3SK$ZB8L"Yif`ϘG &)qmXG r9cUR6mi;RBb'm4\Xלk%$ +Vٿjbl}WyjO9A1ٞ9ɕϓ-%S´rLOK'&+6Y. +,6}Վs.8˜ks$ $A`m;NU0<ާ"Qdk.&XF5G*+FK#GOS4CmcLM<؎M< wW$7UmUAezVDQMK2Vj&,?,vZ8cLjZІaUY1Y8jHixʱ-S,L@*S/ +Lu+)1It#cD-Ubx޻F2gZ\,e 8q%&uՃ0\AJe a,cm'[A ñCBRX-E>P ̜} cRZ+1,ҘĹk˶Q尡f䈢SVڰHp0-E=#Nm5'!ikKťUj8daMۑP(2kg0R{M`m,锍[4TZMǶ|7|cU"拨ЫV:vܠ*0],i0[̲8["Yiy׋G4(ϥϗ^WC`zkMI ʷwQAjx´~PN1YOix/2E&t}*ߴXo-a)IM9.2c. +sGc aPmYdAQb9X '6\R[+m-#؎&\"ZRY.Hg` +fe 0 NPv>ŅCNsfEahR`GNF4r;wcػo'jO1Y&9GKXc[e޸!LdX|N: >SnF]@}y8҉ߎ r~3\4ravd¤"[ob gjW` +4"-8V.@7Ҏ5Y;]#H.P2L󚻋G{E5&@^[as9 +zosli-/*ΓpCPI@Pl2.<\^nʦlWo gUA wBt4L΋۴cM?9dI2Pn~1m;q dJN& A'֚1m e5;F:"U~&-lD=S_PgEXѭ+w0iRYkwʅaN VԮ"OA6P5R"(Ics`h3[%_[ֲD*cAnʔ(VCQem.{+ato2eSXg\҉%yuW Pm 5REkx¶fϦd`jj@|X\=Q#Mn'Y,(YdMAplfb3b5\v_liô4H" #7\vI\}/ sbBewlP.J*nt9V_#.Fm៭sY)dc)gZS 6vP=adߒV+&VXLL(Oz}dXV3iUTjO蕌H߼vMe #)o0vyȲ1j^:vմj@Ґ_+|"%3- + |0vf!kY#(Xt]źDv,%My%Pms Z.lq YJE+5;1k\ފjd j{Rcl$;t,C>Iჸ~HQ +3gz7ډ@ȸ㗭DR)]<rL[i/!Mp>ٴ +r݀(PUy +@:%zVJVCTZ@QT=;JKC!,Z)BR[N'f?cwW΄&@/No-Hjm2ne$% VmK+ p.HZI{Q ]hUyzab΋zT,mTU=21Z`86gҊCNy׶e\_HWd+6C҆BjylV;+?x$|T  +j"r2L!n S;})Es:w`aj9\#Qj[RXXݴq@u@aƢbZ$=5k"5~rsv[ D + ֲ9 03wJ@i^"OPTb7 1WqIr@='^泶IPC#a:K$m41NJ0qS%?[d IccyهF)ʉa6 Lӟ{z7).U6h@C4)Y3Z:=uRwusDV44d#r#: !JTl9|_&u]1!rrvHZ {=VpqưP/ ޗ!R~öy +UMP1ɓOې~:;[ V+ ::$6^:D>!Bq:OAؠGH'jtAh:,"ˤzqaѪ@^u H:$P +3Mms?:79:2,q㑇sXM7-{J9$wۇwч9%A1Bqe3ȃZWZ|5ێ)lޚ +(r! FBLSr6 nm#Le Tlz}.zIW:4;tqer@7d<99j/#e{e-|xpNYkf%DS, +l#X [60ݰq:ݩR +epn8ӿGkx&y 6un(&4㬠,=t?Pt̲V7tYRZ5eOׂ]8沖>J'/, f$dW 1wŶ3a$HvdtdZ5AW>96^.׮Dw4u1rFc8!,fX)'0#,J%h톏cR JE_H98I' y槦:Nf$sw:׼/D3qQ~@|CǁDi`W:$R07tG07-tedXd]Ored+@7l]}veB[6t+U2e͗Jm7dk Nnr ]8PsDE =(ؕF?m2hPN'tm24>" q`Ĕ-]8~s"o7=uq1m||b\r޿wF Dn9ZMerF&+Ǹ&R\%ꃏ2>mR,1`W>T>^KǁT/L)ؕŃhcCs{‘)hr1:>I W>}y!d4LEj|9Zvh<ǁ7A1Vo86zBNC5 +:t@67\tC@Z7:TN2m=0T>0naظ@V>|fh&ؕӨJFv>m&ؕ<⫁] 9͊Bbr(PNF&OׂAiFs`(ec`lJ5N4anG +.5}AغXf*nkr1ld)*{2B4 V +rt-maN_J)+!N-+![W+Pr:V^n9VecWBN)%T< BۡUjO +(Yu{xq(d7o0r +FݠA8KYQ@{ I'(hn2HS<FlmcqCz0Rr\DRr h%yCm%pW7#Nɱzv$u$/:Ar޼ȣQV&E);6/̱!GӲ] B *(V6 bJ`h>X'dP´z2`K5GǮA!{ RS+'!s)ؕ3H6BMprdG@WJ$&YAɑ5+Cj:sdxA^h/ q5Wq p}`$F JNb~J5?`5F k#4 # ~MșdܫCs ׃3'"+'2(Cܝ3I]KּX #gP4q7ib&zKY~(pYڄ^^hne`kwNH)c|O͂(\"m`䐂7 G;O)?%.tRg +BCetCɡX3)$[ Z7WJBAɡ(MqU<),1"AR´Fnuiw*5 Cj3f<3 + Nc6@xl)v"kA*mnjn]Ѡʱگ^njZ΂ |3ukkrCY0qXOxZln2iݕW^UH%@Tv^vg"j$r(6fNTn+ȍzs]~q.y€oԶ,)) 1r4B5H9LNdoHdl;߫*[*';-nWr-A˱zYReYEAw͛&߼K\Nncm%tes 2NO‴U (\+RZ+n/ҺD!5V1N-yz ՚E`><&;v{8j|/]=$mҕ5! 04˾2IkvOb4ػyuui@E=<hѺ- 4yث9m楂i16;[ D,|\3. &4噐l;x>`oJ!#.]V;+vP}{S3( 2,P<9̗򡿹^i')#oNKDnoO1KF\NAnh4n1lZ=l'پ恁3@}*ەcym*؛?!?`ݏKQaO-\ҕc)gAt=SJ6f?FFzy{. m$f%h[­^(IZ|ivϵ0mS$m&T`,@\G8Ѫ"OQҮ K!Ce 2t({ 0(j^`Z(JS,Ny@{n+RdM]YNSg߿(5dU8bN#>< YOVb5,eʭ =ˣsd9E.ilq4ϲі%^",uktqnDVS'lm&!M7ӕDPvN6A YΕ|%YvҒ˲<`;; CczbX]lxuXaĵԈɘqcq޹~x6UK[ ȋX0`uNQ1B,gJN{H=\B`Ze +V !2" i !Kjs4_B1Q$96;`;srRwoY9Yf +FeKI#uc<(w`0m8Ch_&JgMcq0i D&I1w`q؊+C#)>!dJ^:AIZ_X~-:Al=irWw~جG- K9.9^LT+#Bk&]lAk+Ƭd,6<+DR)@)pcB0F`4rțk50S hc8;V[W~y5-_ oa߮ Ka*vЃhU& vЃQ7^҃,V~׎ѯa|xg~}!As?hQEi#0A0Ȃe ()D-9VbX҃HudL^;A`@U`=||++=_rAz=AfkJ#Ǣ9BƯ;X>K~r뎆=d902`a{SE;(} ÓV:k `xN0Lڀ']b7=jbE+G 7!;qY VPiXWe lui$M>e Yv)[Xf!"<̝!dY$"G"!FYoygIhZ ̼u|jcCA(W`xr0 tgNEjr69;Bg9ǶcC:u7hWug:BŚ7hWn󛇈;AɎI6}B. 陫 dga2{5 =Ε$SR6j qdӰ.0W pDv$i$7!:(Bh>b4ו"DXJ5vjnܮ!PsRH}HT"d E("{5rNiyRg8F >pjcGREkv!;(BIzJ#Ճ"D"oY&siK sRH$75"Ӥf`GȲ,M +qb9/w0frHHGSMmfrh(׼tqMw@2I;H}Ú+OaV&}HW,ٕԙ$dcI'J[t} Y4!*v ܞ!B&d9cI{<+MX?ͫ`J<J +` ]u!V<&eK:2z R$D Ӈvk,#Y^(g9侳 %d;3%DmA9WXlN\3"`& < #\hnTƠo{6ޜtKG:} [-0w. 5sC XtM7è* LVh '5*ڲ(҄b qL/y2'DKY,+MȢdŬӛ-4!BZcvGtiB`#U4!ue4!bZymᮜM~6c(Pp+L7 O%fܟ-Y%L58 --NuBX?)v!J`G˩4;Si,n1{v@=^S`IlrOVZR{Ʊ$Tq`G A1|42ɑZaqUk&sӈ*-L'QìW,HBĄ)#V557J۷$dd&%$T^IPfqZ漒<\")$&w[z`I.CAGJ3$Dv!cK @Z5mW!Ⳛ ѾL`F6n3vZӻTnfhWAd,![o|tвu3\a`$!0C8W$IB1^䫐vhN*h02AP}lYBDZ+J ` (vZj_]YBhiyAV ` 0iy*&5uUWWX?}`Є8hlX#?фe/_aJf>ł$'TY'dQ&S J(@ W_L@3B=gwf2xC02֊a?2Z'0>pZq^:xB*VXN:xB9kZ0: Wת[;xB`q2|)3s@rm#F` _*)>yBiPV{ +=p + U#Fֱ(T[:rNrr}Z؉B`p +74yn(Hb64#$7=B~⟿KP-fP~uoF'W $Hϣ)V!\b dzI=[@;ϡw\ԗ$PТ'S2/?x?IWjPǎQIhlNo"TBDXWd B!x],kmMQ!Gk.M|w^?B ź bbq}/w^k9/XwCXUؐn?yPe:jp?zXuu|źb㻱jb}^fF +O$}^}mlTC5|_ +ʂ]!C4lǂ b5 F4(.Gu ?`tuw{{Cu@R~^~u M}^cXwC5duCDs;z]O2:wXwCunL.Gu+)4^]+W_&V&?kGo*(հK_nn?zTk bêfҊ4\ =r|kXs.Go:8YN|~M0k$YXaAmV@~s޹ K `Mn>yX&),F\AxN,i,㹄`Ai}΅5.Go{Zy?߷ v޷y3̄`A}kH_~K|&T~9El`7\=Ogm!vn>yX]n>z`vm:'o{Z`r\Aoj}_ݎ }SC$Fn>z`Eʷ }So~b4~| }OӤ|>炕iG0 n?z`\& }Osm1.Go{?YoB)~7=9!Go{*J]G7=MJ.Go{p? 4?'q 9r~]̉]O~.VַK,=8 b}Os0Xhź b}O%n?yXtw4k7=my\lX7AzږqO ֮lyS\ӸH~7b5Ef?j~C\7l^g=PB'etޞ.ѱ0By g|y,?Ntָ>Kmk_yh1vJOoR3Wi ]{gZYi7=.}-\OO&4L.Nc+O3.ʥm{ȗZ.HnMNx'ԙsRY{͓(on»~:y\ #/HxF>xw#ƙa~fWPȝ@5 8,}=߸q Onyc W$zhv+z"c[4Jni/INI{EǶh?K=Cm^nz[Gwħl9+=6c}]^S؎%گI>lHwV5`{Ikw+=vZ}-^ڝDoDnz[Wylv+"C7[Vyۨ +~jH?V5R{Iiw+=vL}^UڝDoRGڍDolϝ@AS[׵JvmH؞Vi{IlwA+=6d}^ۭDkD-$z[/$zv'ۚ"cӵ[}k/fF[{Aj7 <6V}^籣ڍ߫s/ٵ' tzM:]yrν@~ܝs/鵟' Z+sL'h4EGS&]?{̺5,_lǬ9n[ +Tz !6v`8F6HmcuP2)퓧1bҗCL߱m67zԵ8K Lz̹ D&o5' +q>iߪ퐾km9 nm4Ph}Rz`k!O#uc`nXՎi[Xzj90'iW Kκ6khN><cִi[P%u=Q&ՃJ l<鏝 jۆMC|Ǥm5!il10&gE4bP}nڱԸ?40 L +P6Sޛt^^} +Mw`4GlzemmɶC#Z`M |*3V߇:;N dP$њlɰ,6i$b̒\І]xЂ=l1V]5_$UmTiS,l׎-n|TkEN`r=T=G ^kh6/ɾZ آmxs)Y/&O4qkVkZ;$qK5PR-;KRt8vG3>%X3XB!یq=H:FBN +|~Ov< ,ɖGGZ+,"RzR;&Ia&+Ꮣ%ncҥ+u?Ryۿ'$vE.T.=Yd_ +LLgO_1r֤W>f]Vwk'Osz +ҹI x~dfMV3rdn-$*Ta);ƞ2?R>ҩ4l.!pCN4g8"0RB.ҚN90c +]Qԯf.nfRVnJ"l90-ZWY;]*0VXcؚf|`t$LreҎɁ'L>|CoVȗz5)NaUKu3&[ O잡/ Mj%o؝KsoL{F))0SSNob,+5}t׷VN L>e)]|{e9l{K"UrH L ^pǤg)4~޳55yT1{Rrj`ҡW5-'fdn1{[&wM;ks1bRvV|*elV/]ӵu]Zi7x5Zwjs5W򃊇*!H2r`XqJrduԎ +56vL/3DL/5w4, Ŕn*]G@ZÁHif_d射K:Me´w(MtKl%^ ,/jzVn11^դzwz-H]uu_4z ,N WXĩӪ- ndSэS`4\30)!1-Ъ)fH9du4I+c2+#f.' +LZR +(P+֞<5cd78}<@]PYvuiQn|";V5-J/z.[Kk5mQ+fb~@ s7]r&ﺚ񀼵CGfNJ6ߑ9D&Ê< O`ͣHc"'geOd%MrO%,طBd,0U9*mefӓEّҿ 4[-aXa*!V3¤cS~ j;$V) Y򫞭 +gִ##娨ľ,'q(14Y[#KSD0z9(*@Vx! (-cfmy&_?0,K9V#~16IAbU +ǶK# "_+}aKr*o[|M-J& X:@rM{9 :cϚ:뚭&MY PBʻ?z[O2,)Y=QUϒ7¤B%&μ,ՍpMk g2X1 ڌ?0XzpJ`>ӎۿɺV$IV9=tVe 8@%(ᱎ OLkkhn +ұȉ +rβơ;\Ȍ@L+IZc{NJlL"3'5阾5f9[\ފ\).ezIGP(,1wڧ +2lҁ\:wa*> Q +WI UeʤbvlZIeS)LBCVbE@:s/ E <-"1tM +6@zpBƹyxigvIn`y$y)ђBZe?a/vAR;$+<Ȭk]{rX#Wr1. |d:nh"#&A7uaJ^j]ckM2†G%:LӚc4w݊AflaA#Y>cˍb=0CS%iIc l䕂 &yL>-1L3 %W|[ijR2-{ѹ^;&k%FZҌR&LnJ䮴o77VH+-rWu^W} ΡCf 2q'=]HjǶ+Pj`3Q<9aFݗaqd<.co C5w̢09h\<cs/L6Z`RՃ0/y4ɝ-RWloI)P+ eT2gH>Nnj(C`uz1% ;bHS#}X5\$e#‘L{F& fckKFM#,h(mZMJr4o6媌iU4^1бl@fT7X>բ4YH\0'J `Ú1r+O)0 Zf.*㻮]3*P3-T] k2ʊqZrJYuR + .TJ70̓i l1D弌RaҴƌm.5+k ,(-w|~It9Ƴrx:{Yű&&uZǁIjXH؎-RA)R+0(7qRpGr#S,`[⊜ SX÷+ B&,ė0"mn޲cy7k`Fj<MM\6~PV cz$rӪvl57>*u|Xp<}[cP3|: (r,Lsَ)rR|ĄLR>b]țJ)v A`YX41zT<_o-6u\XӂyX% ! +L!U86-;XAUg`s۟ǩSצ:Lg,>|HMLkOQOiR);V]M>=ٵYЇSVrTNdFL)<,|gC=>b<ٽl0mS+GcBJJՆ6tIdLEɳƢ2LѦmZ8/LOU3fT%u%v)?S$9v5DUO5} +AԚahi]ŧ.'hRI+V4K4*FOO93KqY寤Krqʞc [R`^L>,-o4|0m#0uN} l%6^t)bN1f/_7v~1Te65'lgiv}A = crF%0Y%%l8.5l?ZZ9ät`*Wի^kJ64FKDoR9_n8eheTo^y`(0ϟ'seE?LWgwvlvLqA{^ 1%߹iY?뮓JrE3 @mPNWC)ly%gb񒆜 U^}vpFf1#jp7:I->"Å7LB0 ǫHs +0)[bpL&"#ZĆEa<:4 g+ظx7xIhܱJA(/G<s~yssQbP*#00-.t0ti`!3,TFH0(-[M]'E=UU $H,V],bV f8 (llX%2kr4`|KV(6űbNT +L>ve +oՑჩ}gPN:^ ?OL/Hms dzA:r|~=UvVY5E5ACZOq~[ 7R g&:$vJZhI, +Tb0?gqU@Q$Vl^6g_ez`#<cF1b>&u Lkw+* rG,+}σlua906< >OI4OX#]Tsk[+Q7T&@CvZdFKk XF.)ǜ7-cCysޠ?S4I9!9./qVbx5^zXTôl;:Hg`FZA0 +^Fcj(%>ºbV}ӟn<)QU8C"eU pLj0u^yoyapc(I!0NҚeǨL;`ٽFа9@"Qb6! ۅB0G#a]u#_h,!+0mCKf +#ҐE г ifi0+f]+Tfi5XL?+$B"QI@+ꁡM>!з=#igL|K"޺Ml\*2VuD集iVj-iT. #mP@ Xz6(Ϛ%P3VZH/(ZB6lC |e'q(xib9FARQ2Q;NGoɏ~mFu59kwgH0z c1Cr-jf3qiYTK|Յd\Ta z#`EDLAㄑOՊ'lȧւ3cCo`T. +vJ|n$,\RBn; 5N5!c˂7ӓюaդ +A'9ly&2|<=y ӕq XàI|x&epo.4vlx@>jQ_2,&2>\2=i"Ȕ|@;EA0},ae,Q$sp<2 +H͒:ر:e˞"ۆVEL$.I<#Z9mֈ$S[)ywPIY7I_0ě0̖AdE<{<%s2J`řAn8Y3KB8Y +,W_) ^!!._^a5#eqCG_ZsJٝflVQ2lco֧SNcN0 ֯ +1hh!IfL$'4zX`YnI@uryq_,ɒ)$kGEcP||!JpQ͜{3 9c0_25AK _cs ›]0mPZ +䵪P9W'ۜ7<ֱ'n\%)ԕI&leXI&bI]o먭SbtŴe 8QU\!'d טbhbjxpCN*rl$,BYbA1U{, rϋP% @dVI$G \a=^G 6kI;&V"&"oî[Au̝ &$B56 @ճ4KAL02B=<)ts1j0~:щ*MURc R3P ؎=ٔ]ƹ*A8Y$&u&,MqXMb;=Ql.b00U:X9D':x2݆YVXֲ$C6>$e!)|mAL*39dr&W$4%eD`[o21r16:o]LIJup)zUY`@{4.D2O}la sRYa b@'țg[ љh6M(l] p3ture2p )e(s\Ev j^1؈.CjAaf5{&pFST-#ڢPOI9 0eJ5%mA\bxmkX7z0rH`A!HZvad! +²A8I>bi: +%EQA(YRX#5}voW"#^Xtad +'^wya^JT \< +>W7w=Pg/ +و e +J/Q #nna$%[F2I[f$DYbl%_,b.(2#d}bJ1 'r2Ap +V-7rԅՓd"RVgkU''^ÊzbIZ8 +`e8duT]89\X ]/KrFq +L2 +?"qf$UtQĘ``ׁy`⥦j2m6Q-kr2_ $gԞ 4ILf"X>Vǰ< H`IՎ$ ̼MGa#'n50-fn^0&g VܣΤ$w%9~=W!ՑThq`L'}4LM9NMct]fr' GۼeV3 K):6J"$58.XxJP/VpQ,1G]D !26]Q!(3/%'6Bc)"qsGI F%޵XKO\k:N& +^ +p0/yX*T5>2Kg4LuZi0m!e!zڡ?1&P1jtΕa,Ѕ,1r(S`mb#*w;f͙ittcɹ@l%D-#ErR&6ulBˤAΖLktׄ=}'Wc5lȅA; $723ag+b䉤[4SLq'q6jE%U1BLh^1e, +X\rbm4(y?l,=bx-01P t-"=v)Dsƚ]192Y>1#ǹ(X fgUkz4@g}PH9Vv_ F.4Klh8OO#)T,b- =R!:9P%zas+V,)XcbVޏuOT"cN[ N*U\h:,*!ՁΑ&)A: UET39φ8^'dAby4'Go1gNUuXUϵ f,@E`qȣ%Hv +PђMB$4rdXNJf;l{ӹ +' E0Bt%I\uB @5rR6Xg^I0l-+Vيcd8͢Gxk!,el'mxAM*2$0.(X3=&&,4f׈x#$*7"i7]ZA 7 +'rĠGĴD}+UiVoJӈ%""gDN!δ@4HMi 7ґ"a}pC3U!Ì. &'-moNdi]^)&96Y aEr8Wgc# x0[aEβލdtׅfHÊ2jS0J1Ig,==yWR!iXڪId&D*<ĆRS#'* n.D&K6й,3I #hM=XK9&i*lH>e. NM:AYȀjTҶ_= ONLcץILq-h2H&<,cËi hqbyc&X"uJMIN쩄@} tDqHuNeDL8а. It7EIbRSCPB?ec $ɍK^!V$B55P%ɏvUzɊq.+6 jVLKk(G&&:{᪂{2]# L#2Tb,IX鳆ޮɀƦmyMB)T *_ÔZy?.2*u?LUlIǀ8&* 6GCM;HMHi?s!K/&NMΫc K ŋadrEHXrr?:w<AP'\w[2"ᭃM+I/o:(k/Fxz{@9yJ.GXɿ4x?&??/yO$q:/:0\d-G˕ru/suu~\} kR1 (rIU&#RoHEײkr&mLG*%9ru|dyƆSG${_sx9Օ=!Yy_sU]>{Duwcjq.="zR`$?{Du? ؙgH'E="S^#}̾hG$<qj'mv~d/jG$S="7,us uYK1Y u7jrnlɾE24FkId*2d$v&*0$?z@o*BQS$.X&r};{4.^R= 7?;x[= 7?x6]&`H}oZ;]O&}5|H}dߴ +nP]1dߴlv'O>%>z@oZotl9ƢS?z@oZll9&k45"/?z@xiߝmd$BTeM$'Y>rH}d^|qb;ɾ={dGHMgaK4ϒ_= 7-g5$>z@o![T^eIdߴ3ϓ} *CdG. `ML UdGHM9|Kkp6g9ɔ`'M qtypʵ\B8ɆL/rer< 7u5?y@oj~TG]?y@o}2nrm< 7>x'.W:+G rH{n= \^;f: z}T;R*;~XƟo|?iFS~zR~wOWww?}2մzDQ%a%=Gy~y~ y~$:-@v~sda}@v ~[daW'|\w4~da @t.~س'dQ} +ڡXȣapOռ"Zk{5Kyikqy.m\sˌ]fퟗ2%dDY/%:\s DgKy./(}/A%x ?/eKy.^Kt矗2;%46^;*ӧ@w!\dx% Lpՠ_8D#KA"+BwG1\dxMSW_ >^;r*ӧkCw-\dxuLp."}FtsEOWS:A +>^);B*ӧkEw'\dx؄Lp=OQ/EHpu.2}rtwTUO׎i >^?;*ӧ+HwG2\et 0L"p: D$pJZ͡ D&pJzA >]Q9b"ѧkJ7+\)*=E #m XMp+eW;<<j>}xA T^Hj{v xYݲ[RA$zK-+ mn1Jϗ6-+_}`J>fl./>;DR*{ +_ݵnB7vw;nh~D%w!;nU'E/Q]]8wιktL/9nq_5uqzOk]K,`XʼbxSUJx"\rŜ"xsgVjl_.T[ Q <V: ƂZk5kЂ xU٥-1(êՇWIr99[b9"_1S_o}bsZ Vc _\ jxakIG x/mX4=;f?^1X5pN(߫)1bD@p%,yly`^+s*wXxkx88kVh"vJAZbVA D@:}2@ДsrU$fkǢA}bWaũ4wyY\հu\X 5;,B`-&V_1DQT؞؆!Α%E+ﰖCKi85˸ftC2z<%}z/cXRB"ٰ+V@/yebk/mM:;r&Tac{`\au8]duR;; +"Tn_1:} NBt; R!8} æ/AO!(IAҜ>C_ +&cfTq;4Aגk 9O>6m_l6N5 ˝&޻vgM{¦REpްS/Q9\5Rni:a+9(? թ6}-4d`+䪯p_^0 9ܶ6=S6ްƒc L Ԛ;yTf:W#195,~aMw̼f/@q>FuãB#h~| sΆ異 1N263ajED8Wn}O%(v\dLO= rEprԂ+́5q1`=(p_7C2~ S5ND!xf"*>`pJ-aԌ79^5^`;O,kÛ'(d=P>1ե:{!}>K}zaaPoLJ/8z{^1jSNL-?X,| PpĂ@1H]1{z;:kajk?E3Aⱌd릙5ai`0&5nc3T&lX3,X!xi4jK`^!0  &LDxiͯc1pǶ00r' +0Oӧ'M:F:A1~5 k?h5aY10jTi^ L/..' #xyԭ\T# u`,@0tuMѠ/9 6G0l6YQaJIi79tq.!i;A|7(k0XV)u%Laja@3ۤ`'ap*uկH,I#_xUC,X cv{<0'W9V.kߝ^`zTW%9RĠaICj;x49^^R7P&վ4"{9#a6O 7 'kP ;o\MTEjЁ!<i5a0SDN5qNRApu{|T& !TUQׇk +!Z +OL`XAoS zf <5Fl ߗ ˦+ "b # ٰ^TU40 j|MOiBGh 6(gjM 07/`f;Z:ɯUQA ,ʙPGXSm:uyĠ=(kYnO#ev".t2T_*+ Ay`}TXЕ@=׬CKe)?:~y@F23'ap +_1nxCi2w.WZWcpsX u RFV7|bUӢ Y +aXBOQ F6RzMnU2_LT[d–9ٮԤ>e@ ne`FʼGQ53[`gj ~ 0~ n^:3;S!\2b[:T -/6UyNZls#z҂U榶 I D ;iA%邬B Wն;iApxta'-_Ђem v҂/hΈS\6b%,(7 Ob; Q)3bPdȢɏ'5(!`7ث b4;]A(j{h dIOpRKI<8Bxqx8=xZvЄ:E, "^$@\VtH6U #$[VU + "/b+b'tI,S#Sx0{D +mTa\1;E~Qre`HCv,0"&,!,/ҲHOW0 +_{'!#71 +s{׍I2u`)StҌx6`>yFX ei$toV:PI6" +;[ %ӳXQM M8tB$ 5$3e&AƯ t ?@؄Əj :HH ȘNP aԍ53; ?b`1<$E18@ ^$ы"NN #i:ܣX*n[ͅF`>\ $1cbo[v $)i:zP'xВTf{@K9eifk IAmֹf`iĦdj9TΒN@N%Z +jЛ?&3OBm=4fdn%,xX%Q^e×&ˊ]^@򄝼DPjrKel! Z2*+ܗ}10;.3#`e-Uj`g'DS6oepw ,_/"5gcbv2 +ɩ}b^|a Ť~1v{m2n LEo\fw-yNgb(gU 3Z]ųbHq;-f )< w5X}zUvY1r߉Mn&N-h}3|)ݡZ ]̳8>X^nb Ƣ2Q/`@}&"~ǒv~;&BIp +mPY;ÉY$oF8\<١sqobWHQdr"Kc=;s $MV2ȳtrt侬HST EVO57Ŀ6l'ǪGonI/p* 79 O`n'NHUdO g8yfj6*m w3'A fj)PVb?%(PmU_0w/} *ZHeؤ4Ѡ8jn㕰u)B"NPD/׺ho޴~m;ɅD,672#s|w6@NǙO4jZvCAŀE)j96BE1lkbDp:zƦ)`ނD3p5jK4Q=S{+D+Q%lJ5Qf0Qd[icGnm b{<4E$1.ے}1l4l'KL₁h%1y lъeeh ,g.jg(Xfv7xVluT03}xVE23g!kd(ڎמ.Y nѬ4`IӠWe.4 + 9pҬnQI :򎭢EH%׺_ѩaey5YVflLQ0V'U,9b̼UnZNJ?vP I ]^ =IaPT/tP8a*/IЪ68V2 7v)X6)2&0dE&mD6pHueLКdE%l˒$Yq8ApWG"@a]cXazSvw8hVzGq`f%+g֋fEyNqآY9HuYq&h(JpѬ8FadH .>¨m<+-N.+;o5J2!ű" mlPŮ!ؔRJp8Z}]Epx"}?婿wPrC+},>Rla׿ߞ8CL3M//;2'1LO4p?G xD=uɌVo_$wgw`3A;Z쿫~og!An{}wd_/wLT> ;ǨFV%sqL0,>z:qw}7bQ, +endstream +endobj +225 0 obj +44552 +endobj +226 0 obj +[224 0 R] +endobj +227 0 obj +<< + /Resources 228 0 R + /Type /Page + /MediaBox [0 0 445 182] + /CropBox [0 0 445 182] + /BleedBox [0 0 445 182] + /TrimBox [0 0 445 182] + /Parent 229 0 R + /Contents 226 0 R +>> +endobj +230 0 obj +<< + /Type /FontDescriptor + /FontName /EAAAAA+mwb_cmsy10 + /FontBBox [11 -215 942 727] + /Flags 33 + /CapHeight 0 + /Ascent 727 + /Descent -215 + /ItalicAngle 0 + /StemV 0 + /MissingWidth 500 + /FontFile2 231 0 R + /CIDSet 232 0 R +>> +endobj +231 0 obj +<< + /Length1 1968 + /Length 233 0 R + /Filter /FlateDecode +>> +stream +xU]hWdj~VlTdc.JI5%[ddv3l\@%VRP|"E&yhb +Eh+BK>(g&Z[sιw=  w#ʡOfH#9iodp?*M7ߚ.,L|+?Js9NFHޞ#EVɛrŹvd䪂5I\8Yێ~di([fwHpgJVyn-4c/͚%KF= =+6q*>yx'2Qa'؆HU_um8"oBYGa1>2.RO]Fq#1M ֆ낵5U~(LB'emꈪ,wȼhs"LJUNUY} vMJI9#k4Jˆ]J&GF#Ԗiu.r}аqp4bK#94*w[;lv#̙bw)*9*_Ӳh$m^7㚪 J6/kˌ.2lAvVb !y-hZݙ-Q0YۜفΰHU!+W4Jb9$%i5f KOUȤtJ7UUU:}πs.H.?ڒ-2GGTIsaL >nM# EB3z)$|TXnnt1_ ;β\;r70ŭF$$KS&;=վvn~;uIo{Q9 FG\ ѽ( ]|?+ObTSa0OzQ˾i&֐tr0Ca}aBՋY1ho8Uz`PMɣ@x1zVLT\]?i'leW2i4)FYM=.w$Pf<'+$ib$J1PVia6?R> +stream +xk +endstream +endobj +234 0 obj +9 +endobj +235 0 obj +<< + /Type /Font + /Subtype /Type0 + /BaseFont /EAAAAA+mwb_cmsy10 + /Encoding /Identity-H + /ToUnicode 236 0 R + /DescendantFonts [237 0 R] +>> +endobj +237 0 obj +<< /Type /Font +/BaseFont /EAAAAA+mwb_cmsy10 +/CIDToGIDMap /Identity +/Subtype /CIDFontType2 +/CIDSystemInfo << /Registry (Adobe) /Ordering (UCS) /Supplement 0 >> +/FontDescriptor 230 0 R +/DW 0 +/W [ 0 [750 776 ] ] +>> +endobj +236 0 obj +<< /Length 238 0 R /Filter /FlateDecode >> +stream +x]Pj0+l CԒX}q z0h[lE^X gBpjV& +:G:g} +endstream +endobj +238 0 obj +234 +endobj +239 0 obj +<< + /Type /FontDescriptor + /FontName /EAAAAB+mwb_cmmi10 + /FontBBox [16 -215 882 715] + /Flags 33 + /CapHeight 0 + /Ascent 715 + /Descent -215 + /ItalicAngle 0 + /StemV 0 + /MissingWidth 500 + /FontFile2 240 0 R + /CIDSet 241 0 R +>> +endobj +240 0 obj +<< + /Length1 2156 + /Length 242 0 R + /Filter /FlateDecode +>> +stream +xUmlSU~h٭cm݀ۺ/X@ns a, n֚v>@ !`0j$D[ h%&hH4"d]D}ys.4gU,y:k %ﶞ!i0;ᬟioS/#5% h^, ]$Gy+ d#CgXlH +G{ .'_2TD]/l_~on@464) l1 U0! <G, 03x'po^aˈ~t IZTvLJ1ϘLMӦ];xN<+f"$Ƅ.~C|7ʕq;ֳC*n4>'=ppp'ߊc>I]亠8KӳK̗V?3H?:fm@2̜0S׸%gvݺ*U}؅*01^fM ٚiIOMM6تLzI*z#WYT)ZUVkg2μ7$nRfNMayWO1%IO +j gmb%'͚ٺ3+ +%`:=&ώl'09 +oˢ"U7$Ov. .η;_O#cot63ŋEl!9sq^03Fv)ׄB   ;pyqVlK&@hHgD4 dMţ ̐ͤ`a ̓ߗXD>{;M䟆Q ]4(!Z5-օZUIXc4&Ll#O"cHWOcD"[,n #r⮈sD^C@yBCEk|(]J]t``/8$K*jPXj)ڴX00R*ՇR1,&bUj-6MjS'zB~ &`ݴ="E\*Sdc%BY|E)u%!p\ʦR[T*9P|h\.{-J*8|߰| +endstream +endobj +242 0 obj +1471 +endobj +241 0 obj +<< /Length 243 0 R /Filter /FlateDecode >> +stream +xk`` +endstream +endobj +243 0 obj +12 +endobj +244 0 obj +<< + /Type /Font + /Subtype /Type0 + /BaseFont /EAAAAB+mwb_cmmi10 + /Encoding /Identity-H + /ToUnicode 245 0 R + /DescendantFonts [246 0 R] +>> +endobj +246 0 obj +<< /Type /Font +/BaseFont /EAAAAB+mwb_cmmi10 +/CIDToGIDMap /Identity +/Subtype /CIDFontType2 +/CIDSystemInfo << /Registry (Adobe) /Ordering (UCS) /Supplement 0 >> +/FontDescriptor 239 0 R +/DW 0 +/W [ 0 [750 494 ] ] +>> +endobj +245 0 obj +<< /Length 247 0 R /Filter /FlateDecode >> +stream +x]Pj0 +t=,N@RȡҴrjhl8}m%P# D;g#w:M8€uEU*o5P$99ằv&H9 +gN'%k@W[5A*$F,nen/o^ooIۤjU ;+mB28Vd[ >d_2} +endstream +endobj +247 0 obj +236 +endobj +248 0 obj +<< + /Type /FontDescriptor + /FontName /EAAAAC+mwa_cmmi10 + /FontBBox [-34 -250 1047 750] + /Flags 33 + /CapHeight 683 + /Ascent 750 + /Descent -250 + /ItalicAngle 0 + /StemV 0 + /MissingWidth 500 + /FontFile2 249 0 R + /CIDSet 250 0 R +>> +endobj +249 0 obj +<< + /Length1 2832 + /Length 251 0 R + /Filter /FlateDecode +>> +stream +xV{Lfwg=a{^w{p/c2hai,ZEI$҂*'r]mdŕEQ*URU}H%篦G=Vmnv~7}Y `g͡!=0/U=1;98"OfN|9g`H:Oȣ%iM\?R~d(D_h{ ezd>_b8Ne#fg̷ٹެCG6 2GgH/.\4|aa v +1Bh6|fo]z~@ߣ+=Nӝ#wcg;uv6[,2L=N^"n#?!pB>* W` ~?Av?KZ +3u NI8G0PG;aC/~KrPVtmVKd4c5\|`YR&&Ğ##h$_Q~5Io< $e/qVԸ*x7LꀫӚO`WhmģNJf6{wu#i}! *giE \؄:5;>Qc%e04vh=VXxPh##tA$eJc$E4eؗW t$֜VWvY4*ؕp&nd@ߔݚ$FIYRa/q$jV 4wOC4آ}bjkGwbu5c' }]}C ʷ۟]c#h#] DqMYSaau<@ oT٭f9`%a 1>_KxK b1I(7҃0»!0^—O=RUM ct)ktY~k^:A|{][fknqd |',-tVy}=:L):7rvdz^lH4_TTF \:{2qXSBj< )`v*gg#dR秲3~q( +N0 nyLo +yrQ=8==D76bjpFw6R%WC @9gpqMFzƤj?)I\2)[ܛljw-, +endstream +endobj +251 0 obj +2014 +endobj +250 0 obj +<< /Length 252 0 R /Filter /FlateDecode >> +stream +x +endstream +endobj +252 0 obj +14 +endobj +253 0 obj +<< + /Type /Font + /Subtype /Type0 + /BaseFont /EAAAAC+mwa_cmmi10 + /Encoding /Identity-H + /ToUnicode 254 0 R + /DescendantFonts [255 0 R] +>> +endobj +255 0 obj +<< /Type /Font +/BaseFont /EAAAAC+mwa_cmmi10 +/CIDToGIDMap /Identity +/Subtype /CIDFontType2 +/CIDSystemInfo << /Registry (Adobe) /Ordering (UCS) /Supplement 0 >> +/FontDescriptor 248 0 R +/DW 0 +/W [ 0 [365 622 680 500 643 ] ] +>> +endobj +254 0 obj +<< /Length 256 0 R /Filter /FlateDecode >> +stream +x]Kj0 9<] Rbirjhl8ܾRO%[b]{+ z0MQ ;.f +m 8FYhJnWxY, Q%赙 wXM|h$qw3:^F9)>7PWJ\蹙ZFkSǜ5*VZ*RYU"25Dtɱ'zeKs;5 w֥,Z菅l +endstream +endobj +256 0 obj +252 +endobj +257 0 obj +<< + /Type /FontDescriptor + /FontName /EAAAAD+mwb_cmr10 + /FontBBox [-43 -205 984 740] + /Flags 33 + /CapHeight 0 + /Ascent 740 + /Descent -205 + /ItalicAngle 0 + /StemV 0 + /MissingWidth 500 + /FontFile2 258 0 R + /CIDSet 259 0 R +>> +endobj +258 0 obj +<< + /Length1 2220 + /Length 260 0 R + /Filter /FlateDecode +>> +stream +xU{hSWM_>]&iv7&Tk댮K;޶iILhm1ԍmƐ!"""c\m8`Ce0c[ަ2=w^PںiQ6 }Ig̈́?Xs~|/a<,ǻx"HbC/6 :!f4%=hCbL vppp?p 7.WY5>Eb~MQoӪn +.f{xo8R6/c +9d)!eB5U* 8*JKMx7CgmOx~k&oT>󨾹 Po䨜G fŠ.\ w].µ 94n`[UgqQQK]_MA/,]ݠe.ING >lܣl681+ih2smq$etPG؄F7DE#LRhFg#ɍ +gkČS9EZ6,#nT0[Өk[$Q4_ :gM'y%W]rn \h"~KFn8!E;6!]d8݋u \R;'KPWejֱsMdkg!{ 6{]lj :`se=TSJCuM_li[;r\8j]¼˔[Z甪сS^8zjS@z$t\K;:[(^c +mg?Ut=]c;TSP]vY +t񹇕K;\9ԍ7&6d/Y8QLcZ2Ng Y+Zw/xϞ+ZHlގQ ͞@|;A}ΗY"Ou܆BPk3qQR$[<@X`~l4PB5 L.by@xE,e'FS7ƨ&Oޮ&ta :҄᧱8ir&@m {-gQ #Oi%Mnoz%hafezJ`8)KbfŊ J~XrR^^#[|Ri/\2i9fX"'FkMޝhv t:1<[DZ(@\wS?@#s`hpf"@\S>:IKOOz4@ +?!YZj@cI'GBre+ B[>(=/nS6ފ ޼wYzo +endstream +endobj +260 0 obj +1539 +endobj +259 0 obj +<< /Length 261 0 R /Filter /FlateDecode >> +stream +xk`h +endstream +endobj +261 0 obj +11 +endobj +262 0 obj +<< + /Type /Font + /Subtype /Type0 + /BaseFont /EAAAAD+mwb_cmr10 + /Encoding /Identity-H + /ToUnicode 263 0 R + /DescendantFonts [264 0 R] +>> +endobj +264 0 obj +<< /Type /Font +/BaseFont /EAAAAD+mwb_cmr10 +/CIDToGIDMap /Identity +/Subtype /CIDFontType2 +/CIDSystemInfo << /Registry (Adobe) /Ordering (UCS) /Supplement 0 >> +/FontDescriptor 257 0 R +/DW 0 +/W [ 0 [750 583 ] ] +>> +endobj +263 0 obj +<< /Length 265 0 R /Filter /FlateDecode >> +stream +x]Pj0+l ťCP' K+GPKb-ƅ.13ð:g#ycc&B +aѺA[wķd(DqpXz ;@|iӫF_h/!.B=t_~)'>N'95 Ԍ- t#2UTMv77`S6FUBeY+쒷qDT QJX9uxl5U|~}@ +endstream +endobj +265 0 obj +235 +endobj +266 0 obj +<< + /Type /FontDescriptor + /FontName /EAAAAE+mwa_cmr10 + /FontBBox [-43 -250 1008 750] + /Flags 33 + /CapHeight 683 + /Ascent 750 + /Descent -250 + /ItalicAngle 0 + /StemV 0 + /MissingWidth 500 + /FontFile2 267 0 R + /CIDSet 268 0 R +>> +endobj +267 0 obj +<< + /Length1 8504 + /Length 269 0 R + /Filter /FlateDecode +>> +stream +xZ T絾w6i$HhAv!dv!6y6ll0`yOlǩ8iҴn~y~i.4v۴B$/msz=間qߝ4{: b+V*Vh=l]+NSGt|ˎ;8lHnyVp6 o}"`Gi kPIS5:kv?31yGchrpfj2@Q탓#\^JQSӻn=MY߱sdǟzRPB6XTj<͞9Waãpp7Iz :a $  PQ@B`Wg~WrsJ6^c̻[/ǘI2x x' 7N|<\gi߀'p.R<gS N $aH!GC+ <67';KVJs,Hb;9t_,h鞙ZSM|/YlPLY>,8O móY9h~";ٽN'^طrܶYmpV[fE}k!-!5zW;ywڇn<ՙjIm@$ɶYeplSxfe-{Z-'419jIWZ-ml66hmP[jζ[f}}3NK3>68㳚6x*NB\ ]m'd9v2X{llSZ-$nJ4/ @')B\sNCǽ"PR)).UgbLCy kwPlAq!њyet +@im+&z&?F @+3B( BC,CMxyiBn=ٛa]k-3Q/rϑH1YUȡC!h@*Չ؟!y9+GlTFÕFVo7\B#VEB GՊx+o̱h3VUh@ ףSȂ8+JW,b zFVV"U_0p+O_8xҗv(( 8Q.zk_;⟎Φ{9;,< rs?N?//뻅=CTBk.XfD].i8eK3\)+˃ +(,eلYAJb# +"O!%Рfr0\Y-6&׆;mUf͵[{:]*+xF7Fy7un;yϬa+B-'mJG _ϧ'%' -X!n51:q>9-u\a\kV^UuDR3J”:A$$l&Ԉi d-^־vsU^veT}+~8H!6x۽ۗh<ԅn~{%'7`_y|W{??e˛w0g+OM76o-'%EЎJ 8%Wc9,D3+zlZ,i/DҞ [X]VA#ldn)k +2[:ɶupXbOMԌgMqhdx8G'jjKKjuSl_r|̫G{kw; +,,Ǯһ| +m3b|dPTf^+Ќk4F+9|AVm4a=RY݀5LR]dzٙ?Z1⯱+ΪLO<[fJ$Le& B7Dc>E&1GԀhU sU!Ysp^I _+Щh{I zzkG}=4"Q+tS$W:l:ھW783`1>֢`sc}0*bb' +PwVsy3T4[!pC}6a46[VQP3!zEyʓA-_.BiYP3-R;_\[Pf jm~ѵ{'ע*ӿ[OT +Fgş窄guqwov۾1q *SnNpǾsWo?2SXqBBX .xDFҵlwղvW=7kYY:J*<^ T8i_G=?}ݦeiP4| [~Cɭ'Ԧ(N2I- +yo66t PT 8lքmΥT .p49#8 VJ)Nim\t}m*F7~=)!#Ƨ{+Z7fTKb~?p?wbfP$вLL?|x{Qf L8U +T9(uȲ%κdS2E Wd{eGwўŤ4e+̟!lzD(-WXKc=ރZQ 9Fc;jcnA6?_S{o~sBm,*|yR}hE.[#*c6pmV,7L\7nj1^hn]37"©l|S c7U*kزI4BThrՃ g54/h@J gr^!3MmavI`\sb{ fq\[*뜦\* +KX=6JBf/fUZP B0J:DQmUl%/-dҠ emr0J_-jXM]vǾ.-ؐ=4 Kn!XB I/B{M/1 ƒ) +%Wcu4(-bpfd'g$Fn5 "^OWzD;Z퉚f.J6_+jdqtI( =J9LAaADA +{J( + PlreJh8]UDzǥձyTbWe/Q\1k6&B"QX]Ebw~7hӦμbDʦ]jK~]K;3x*Vd_}^0]JCn <5R+la2j/v8ğKSY7}}s +=|Q*tᩛ:Xi3՝6K2m"xWC.# t'r".OIm2m1fi7樽+˴$1 +Kt,VUvI1Ry9L#5ӈtGզ]G{hkN-S#wMmۖHrL$9Lܸyrg5%Ͷngfkd>Ke*!B$UV**S{5Uj6GHebe]ئYW9"plq +endstream +endobj +269 0 obj +6125 +endobj +268 0 obj +<< /Length 270 0 R /Filter /FlateDecode >> +stream +x`zȰUo J +endstream +endobj +270 0 obj +20 +endobj +271 0 obj +<< + /Type /Font + /Subtype /Type0 + /BaseFont /EAAAAE+mwa_cmr10 + /Encoding /Identity-H + /ToUnicode 272 0 R + /DescendantFonts [273 0 R] +>> +endobj +273 0 obj +<< /Type /Font +/BaseFont /EAAAAE+mwa_cmr10 +/CIDToGIDMap /Identity +/Subtype /CIDFontType2 +/CIDSystemInfo << /Registry (Adobe) /Ordering (UCS) /Supplement 0 >> +/FontDescriptor 266 0 R +/DW 0 +/W [ 0 [365 500 500 500 500 500 500 916 500 500 555 276 388 555 555 443 276 833 500 750 276 500 555 500 305 333 555 526 555 776 750 443 651 391 526 443 526 500 ] ] +>> +endobj +272 0 obj +<< /Length 274 0 R /Filter /FlateDecode >> +stream +x]n0E +/E6D"U*CuTKy33GĢw;Ȋ&vZYJb :ォNNk\rn J&D2}?dTCCLQYE7Vn5C=~6uO,urAݴ\=s1Ąg rP4Zvح ;?uY{HkZ]-u;㄃(% JAGPA9(R:zNTԀNx)k@Й&N:STЙH3K@Й*A'qJ :@3 +'BdړW@g&/jNI>'!+OC $^mNlQ#lSiڮ̚?~ +endstream +endobj +274 0 obj +401 +endobj +275 0 obj +<< + /Type /FontDescriptor + /FontName /EAAAAF+mwa_cmsy10 + /FontBBox [-28 -959 1123 778] + /Flags 33 + /CapHeight 683 + /Ascent 778 + /Descent -959 + /ItalicAngle 0 + /StemV 0 + /MissingWidth 500 + /FontFile2 276 0 R + /CIDSet 277 0 R +>> +endobj +276 0 obj +<< + /Length1 1992 + /Length 278 0 R + /Filter /FlateDecode +>> +stream +xT]lUmKK(ôElGWia)KLڡ;nYeC !Dnc 4ф`$ ̰%*As{x^Y {`8%v'=Mg,?ߙ{鱳W>#dDc#&Tr_BiW5+(w㣛ǮCzGyTvuTS/Ѷj[LffwD>8(1ީrJ2N̔.tɤ#*:`q8Ew*{5k!.^ԩRP+eygtaOJ8OSd *7M kꜦv;uڃ[Kw7%Cx9+tx fy]^l >XH+^jI n0Uh%.";ٰevIJӆυ:Zxj kO<; Gx1d1sw〴w8ʒ'7{]b}#΋sw6?ٱ%?<8wF/ĵp8E$~]^7?s,c[˘-cx§XD5%J&Tb:&1)cd _)ck2y#`iLAFb[HFD*a&  1Yaq=ĸ+<"iQ"}Sbwz1(IecVF0JLƳU2Yd;L]OOfSFEDUY7 <t!mrO6+e9nɢ +wD:us4~{ ZS{BwYE+ #T0Ցʦ"ãtqL 9^v4j6m]~D‘H.jO/Ww&q]`5n_-ƫb`s^:T[Nۍ +endstream +endobj +278 0 obj +1330 +endobj +277 0 obj +<< /Length 279 0 R /Filter /FlateDecode >> +stream +xk`P +endstream +endobj +279 0 obj +11 +endobj +280 0 obj +<< + /Type /Font + /Subtype /Type0 + /BaseFont /EAAAAF+mwa_cmsy10 + /Encoding /Identity-H + /ToUnicode 281 0 R + /DescendantFonts [282 0 R] +>> +endobj +282 0 obj +<< /Type /Font +/BaseFont /EAAAAF+mwa_cmsy10 +/CIDToGIDMap /Identity +/Subtype /CIDFontType2 +/CIDSystemInfo << /Registry (Adobe) /Ordering (UCS) /Supplement 0 >> +/FontDescriptor 275 0 R +/DW 0 +/W [ 0 [365 274 ] ] +>> +endobj +281 0 obj +<< /Length 283 0 R /Filter /FlateDecode >> +stream +x]Pj0 +t;()i?FqJH?FK )X V#NWut b%xؖsm2k<#D\M #n8H7EW5#&\ڮY"Bø3`pJ#)?auZ?jyFleTg$M`3^r:^*s1Ģ } +endstream +endobj +283 0 obj +234 +endobj +229 0 obj +<< /Type /Pages +/Count 1 +/Kids [227 0 R ] >> +endobj +284 0 obj +<< + /Type /Catalog + /Pages 229 0 R + /Lang (x-unknown) +>> +endobj +228 0 obj +<< + /Font << + /F270 235 0 R + /F271 244 0 R + /F272 253 0 R + /F273 262 0 R + /F268 271 0 R + /F269 280 0 R +>> + /ProcSet [/PDF /ImageB /ImageC /Text] + /ExtGState << + /GS1 2 0 R + /GS2 3 0 R + /GS3 4 0 R + /GS4 5 0 R + /GS5 6 0 R + /GS6 7 0 R + /GS7 8 0 R + /GS8 9 0 R + /GS9 10 0 R + /GS10 11 0 R + /GS11 12 0 R + /GS12 13 0 R + /GS13 14 0 R + /GS14 15 0 R + /GS15 16 0 R + /GS16 17 0 R + /GS17 18 0 R + /GS18 19 0 R + /GS19 20 0 R + /GS20 21 0 R + /GS21 22 0 R + /GS22 23 0 R + /GS23 24 0 R + /GS24 25 0 R + /GS25 26 0 R + /GS26 27 0 R + /GS27 28 0 R + /GS28 29 0 R + /GS29 30 0 R + /GS30 31 0 R + /GS31 32 0 R + /GS32 33 0 R + /GS33 34 0 R + /GS34 35 0 R + /GS35 36 0 R + /GS36 37 0 R + /GS37 38 0 R + /GS38 39 0 R + /GS39 40 0 R + /GS40 41 0 R + /GS41 42 0 R + /GS42 43 0 R + /GS43 44 0 R + /GS44 45 0 R + /GS45 46 0 R + /GS46 47 0 R + /GS47 48 0 R + /GS48 49 0 R + /GS49 50 0 R + /GS50 51 0 R + /GS51 52 0 R + /GS52 53 0 R + /GS53 54 0 R + /GS54 55 0 R + /GS55 56 0 R + /GS56 57 0 R + /GS57 58 0 R + /GS58 59 0 R + /GS59 60 0 R + /GS60 61 0 R + /GS61 62 0 R + /GS62 63 0 R + /GS63 64 0 R + /GS64 65 0 R + /GS65 66 0 R + /GS66 67 0 R + /GS67 68 0 R + /GS68 69 0 R + /GS69 70 0 R + /GS70 71 0 R + /GS71 72 0 R + /GS72 73 0 R + /GS73 74 0 R + /GS74 75 0 R + /GS75 76 0 R + /GS76 77 0 R + /GS77 78 0 R + /GS78 79 0 R + /GS79 80 0 R + /GS80 81 0 R + /GS81 82 0 R + /GS82 83 0 R + /GS83 84 0 R + /GS84 85 0 R + /GS85 86 0 R + /GS86 87 0 R + /GS87 88 0 R + /GS88 89 0 R + /GS89 90 0 R + /GS90 91 0 R + /GS91 92 0 R + /GS92 93 0 R + /GS93 94 0 R + /GS94 95 0 R + /GS95 96 0 R + /GS96 97 0 R + /GS97 98 0 R + /GS98 99 0 R + /GS99 100 0 R + /GS100 101 0 R + /GS101 102 0 R + /GS102 103 0 R + /GS103 104 0 R + /GS104 105 0 R + /GS105 106 0 R + /GS106 107 0 R + /GS107 108 0 R + /GS108 109 0 R + /GS109 110 0 R + /GS110 111 0 R + /GS111 112 0 R + /GS112 113 0 R + /GS113 114 0 R + /GS114 115 0 R + /GS115 116 0 R + /GS116 117 0 R + /GS117 118 0 R + /GS118 119 0 R + /GS119 120 0 R + /GS120 121 0 R + /GS121 122 0 R + /GS122 123 0 R + /GS123 124 0 R + /GS124 125 0 R + /GS125 126 0 R + /GS126 127 0 R + /GS127 128 0 R + /GS128 129 0 R + /GS129 130 0 R + /GS130 131 0 R + /GS131 132 0 R + /GS132 133 0 R + /GS133 134 0 R + /GS134 135 0 R + /GS135 136 0 R + /GS136 137 0 R + /GS137 138 0 R + /GS138 139 0 R + /GS139 140 0 R + /GS140 141 0 R + /GS141 142 0 R + /GS142 143 0 R + /GS143 144 0 R + /GS144 145 0 R + /GS145 146 0 R + /GS146 147 0 R + /GS147 148 0 R + /GS148 149 0 R + /GS149 150 0 R + /GS150 151 0 R + /GS151 152 0 R + /GS152 153 0 R + /GS153 154 0 R + /GS154 155 0 R + /GS155 156 0 R + /GS156 157 0 R + /GS157 158 0 R + /GS158 159 0 R + /GS159 160 0 R + /GS160 161 0 R + /GS161 162 0 R + /GS162 163 0 R + /GS163 164 0 R + /GS164 165 0 R + /GS165 166 0 R + /GS166 167 0 R + /GS167 168 0 R + /GS168 169 0 R + /GS169 170 0 R + /GS170 171 0 R + /GS171 172 0 R + /GS172 173 0 R + /GS173 174 0 R + /GS174 175 0 R + /GS175 176 0 R + /GS176 177 0 R + /GS177 178 0 R + /GS178 179 0 R + /GS179 180 0 R + /GS180 181 0 R + /GS181 182 0 R + /GS182 183 0 R + /GS183 184 0 R + /GS184 185 0 R + /GS185 186 0 R + /GS186 187 0 R + /GS187 188 0 R + /GS188 189 0 R + /GS189 190 0 R + /GS190 191 0 R + /GS191 192 0 R + /GS192 193 0 R + /GS193 194 0 R + /GS194 195 0 R + /GS195 196 0 R + /GS196 197 0 R + /GS197 198 0 R + /GS198 199 0 R + /GS199 200 0 R + /GS200 201 0 R + /GS201 202 0 R + /GS202 203 0 R + /GS203 204 0 R + /GS204 205 0 R + /GS205 206 0 R + /GS206 207 0 R + /GS207 208 0 R + /GS208 209 0 R + /GS209 210 0 R + /GS210 211 0 R + /GS211 212 0 R + /GS212 213 0 R + /GS213 214 0 R + /GS214 215 0 R + /GS215 216 0 R + /GS216 217 0 R + /GS217 218 0 R + /GS218 219 0 R + /GS219 220 0 R + /GS220 221 0 R + /GS221 222 0 R + /GS222 223 0 R +>> +>> +endobj +xref +0 285 +0000000000 65535 f +0000000015 00000 n +0000000145 00000 n +0000000197 00000 n +0000000249 00000 n +0000000301 00000 n +0000000353 00000 n +0000000405 00000 n +0000000457 00000 n +0000000509 00000 n +0000000561 00000 n +0000000614 00000 n +0000000667 00000 n +0000000720 00000 n +0000000773 00000 n +0000000826 00000 n +0000000879 00000 n +0000000932 00000 n +0000000985 00000 n +0000001038 00000 n +0000001091 00000 n +0000001144 00000 n +0000001197 00000 n +0000001250 00000 n +0000001303 00000 n +0000001356 00000 n +0000001409 00000 n +0000001462 00000 n +0000001516 00000 n +0000001570 00000 n +0000001624 00000 n +0000001677 00000 n +0000001730 00000 n +0000001783 00000 n +0000001836 00000 n +0000001889 00000 n +0000001942 00000 n +0000001995 00000 n +0000002048 00000 n +0000002101 00000 n +0000002154 00000 n +0000002207 00000 n +0000002260 00000 n +0000002313 00000 n +0000002366 00000 n +0000002419 00000 n +0000002472 00000 n +0000002525 00000 n +0000002578 00000 n +0000002631 00000 n +0000002684 00000 n +0000002737 00000 n +0000002790 00000 n +0000002843 00000 n +0000002896 00000 n +0000002949 00000 n +0000003002 00000 n +0000003055 00000 n +0000003108 00000 n +0000003161 00000 n +0000003214 00000 n +0000003267 00000 n +0000003320 00000 n +0000003373 00000 n +0000003426 00000 n +0000003479 00000 n +0000003532 00000 n +0000003585 00000 n +0000003638 00000 n +0000003691 00000 n +0000003744 00000 n +0000003797 00000 n +0000003850 00000 n +0000003903 00000 n +0000003957 00000 n +0000004011 00000 n +0000004065 00000 n +0000004118 00000 n +0000004171 00000 n +0000004224 00000 n +0000004277 00000 n +0000004330 00000 n +0000004383 00000 n +0000004436 00000 n +0000004489 00000 n +0000004542 00000 n +0000004595 00000 n +0000004648 00000 n +0000004701 00000 n +0000004754 00000 n +0000004807 00000 n +0000004860 00000 n +0000004913 00000 n +0000004966 00000 n +0000005019 00000 n +0000005072 00000 n +0000005125 00000 n +0000005178 00000 n +0000005231 00000 n +0000005284 00000 n +0000005337 00000 n +0000005391 00000 n +0000005446 00000 n +0000005501 00000 n +0000005556 00000 n +0000005610 00000 n +0000005664 00000 n +0000005718 00000 n +0000005772 00000 n +0000005826 00000 n +0000005880 00000 n +0000005934 00000 n +0000005988 00000 n +0000006042 00000 n +0000006096 00000 n +0000006150 00000 n +0000006204 00000 n +0000006258 00000 n +0000006312 00000 n +0000006366 00000 n +0000006420 00000 n +0000006474 00000 n +0000006528 00000 n +0000006582 00000 n +0000006636 00000 n +0000006690 00000 n +0000006744 00000 n +0000006798 00000 n +0000006852 00000 n +0000006906 00000 n +0000006960 00000 n +0000007014 00000 n +0000007068 00000 n +0000007122 00000 n +0000007176 00000 n +0000007230 00000 n +0000007284 00000 n +0000007338 00000 n +0000007392 00000 n +0000007446 00000 n +0000007500 00000 n +0000007554 00000 n +0000007608 00000 n +0000007662 00000 n +0000007716 00000 n +0000007770 00000 n +0000007824 00000 n +0000007878 00000 n +0000007933 00000 n +0000007988 00000 n +0000008043 00000 n +0000008097 00000 n +0000008151 00000 n +0000008205 00000 n +0000008259 00000 n +0000008313 00000 n +0000008367 00000 n +0000008421 00000 n +0000008475 00000 n +0000008529 00000 n +0000008583 00000 n +0000008637 00000 n +0000008691 00000 n +0000008745 00000 n +0000008799 00000 n +0000008853 00000 n +0000008907 00000 n +0000008961 00000 n +0000009015 00000 n +0000009069 00000 n +0000009123 00000 n +0000009177 00000 n +0000009231 00000 n +0000009285 00000 n +0000009339 00000 n +0000009393 00000 n +0000009448 00000 n +0000009503 00000 n +0000009558 00000 n +0000009612 00000 n +0000009666 00000 n +0000009720 00000 n +0000009774 00000 n +0000009828 00000 n +0000009882 00000 n +0000009936 00000 n +0000009990 00000 n +0000010044 00000 n +0000010098 00000 n +0000010152 00000 n +0000010206 00000 n +0000010260 00000 n +0000010314 00000 n +0000010368 00000 n +0000010422 00000 n +0000010476 00000 n +0000010530 00000 n +0000010584 00000 n +0000010638 00000 n +0000010692 00000 n +0000010746 00000 n +0000010800 00000 n +0000010854 00000 n +0000010908 00000 n +0000010962 00000 n +0000011016 00000 n +0000011070 00000 n +0000011124 00000 n +0000011178 00000 n +0000011232 00000 n +0000011286 00000 n +0000011340 00000 n +0000011394 00000 n +0000011448 00000 n +0000011502 00000 n +0000011556 00000 n +0000011610 00000 n +0000011664 00000 n +0000011718 00000 n +0000011772 00000 n +0000011826 00000 n +0000011880 00000 n +0000011935 00000 n +0000011990 00000 n +0000012045 00000 n +0000056675 00000 n +0000056698 00000 n +0000056725 00000 n +0000078424 00000 n +0000078285 00000 n +0000056923 00000 n +0000057175 00000 n +0000058587 00000 n +0000058565 00000 n +0000058674 00000 n +0000058693 00000 n +0000059084 00000 n +0000058853 00000 n +0000059396 00000 n +0000059417 00000 n +0000059669 00000 n +0000061260 00000 n +0000061238 00000 n +0000061350 00000 n +0000061370 00000 n +0000061761 00000 n +0000061530 00000 n +0000062075 00000 n +0000062096 00000 n +0000062352 00000 n +0000064486 00000 n +0000064464 00000 n +0000064578 00000 n +0000064598 00000 n +0000065001 00000 n +0000064758 00000 n +0000065331 00000 n +0000065352 00000 n +0000065604 00000 n +0000067263 00000 n +0000067241 00000 n +0000067352 00000 n +0000067372 00000 n +0000067761 00000 n +0000067531 00000 n +0000068074 00000 n +0000068095 00000 n +0000068350 00000 n +0000074595 00000 n +0000074573 00000 n +0000074693 00000 n +0000074713 00000 n +0000075246 00000 n +0000074872 00000 n +0000075725 00000 n +0000075746 00000 n +0000076002 00000 n +0000077452 00000 n +0000077430 00000 n +0000077541 00000 n +0000077561 00000 n +0000077952 00000 n +0000077721 00000 n +0000078264 00000 n +0000078347 00000 n +trailer +<< + /Root 284 0 R + /Info 1 0 R + /ID [<64C7799C847BD77591C562C99BCE2745> <64C7799C847BD77591C562C99BCE2745>] + /Size 285 +>> +startxref +82176 +%%EOF diff --git a/figs/uniaxial_effect_support_compliance_neglected.png b/figs/uniaxial_effect_support_compliance_neglected.png new file mode 100644 index 0000000..119b386 Binary files /dev/null and b/figs/uniaxial_effect_support_compliance_neglected.png differ diff --git a/figs/uniaxial_hac_iff_damped_plants_masses.pdf b/figs/uniaxial_hac_iff_damped_plants_masses.pdf index 3ca70bd..3b1db01 100644 --- a/figs/uniaxial_hac_iff_damped_plants_masses.pdf +++ b/figs/uniaxial_hac_iff_damped_plants_masses.pdf @@ -3,7 +3,7 @@ 1 0 obj << /Producer (Apache FOP Version 2.4.0-SNAPSHOT: PDFDocumentGraphics2D) -/CreationDate (D:20230216174152+01'00') +/CreationDate (D:20230630095827+02'00') >> endobj 2 0 obj @@ -543,13 +543,13 @@ endobj 91 0 obj << /Type /ExtGState -/CA 0.2509804 +/CA 0.5019608 >> endobj 92 0 obj << /Type /ExtGState -/CA 0.2509804 +/CA 0.5019608 >> endobj 93 0 obj @@ -699,25 +699,25 @@ endobj 117 0 obj << /Type /ExtGState -/CA 0.14901961 +/CA 0.2509804 >> endobj 118 0 obj << /Type /ExtGState -/CA 0.14901961 +/CA 0.2509804 >> endobj 119 0 obj << /Type /ExtGState -/CA 0.2509804 +/CA 0.14901961 >> endobj 120 0 obj << /Type /ExtGState -/CA 0.2509804 +/CA 0.14901961 >> endobj 121 0 obj @@ -1059,13 +1059,13 @@ endobj 177 0 obj << /Type /ExtGState -/CA 0.14901961 +/CA 0.2509804 >> endobj 178 0 obj << /Type /ExtGState -/CA 0.14901961 +/CA 0.2509804 >> endobj 179 0 obj @@ -1077,19 +1077,19 @@ endobj 180 0 obj << /Type /ExtGState -/CA 0.2509804 +/CA 0.14901961 >> endobj 181 0 obj << /Type /ExtGState -/CA 0.2509804 +/CA 0.14901961 >> endobj 182 0 obj << /Type /ExtGState -/CA 0.2509804 +/CA 0.5019608 >> endobj 183 0 obj @@ -1233,13 +1233,13 @@ endobj 206 0 obj << /Type /ExtGState -/CA 0.14901961 +/CA 0.2509804 >> endobj 207 0 obj << /Type /ExtGState -/CA 0.14901961 +/CA 0.2509804 >> endobj 208 0 obj @@ -1251,13 +1251,13 @@ endobj 209 0 obj << /Type /ExtGState -/CA 0.2509804 +/CA 0.14901961 >> endobj 210 0 obj << /Type /ExtGState -/CA 0.2509804 +/CA 0.14901961 >> endobj 211 0 obj @@ -1593,49 +1593,49 @@ endobj 266 0 obj << /Type /ExtGState -/CA 0.14901961 +/CA 0.2509804 >> endobj 267 0 obj << /Type /ExtGState -/CA 0.14901961 +/CA 0.2509804 >> endobj 268 0 obj << /Type /ExtGState -/CA 0.14901961 +/CA 0.2509804 >> endobj 269 0 obj << /Type /ExtGState -/CA 0.2509804 +/CA 0.14901961 >> endobj 270 0 obj << /Type /ExtGState -/CA 0.2509804 +/CA 0.14901961 >> endobj 271 0 obj << /Type /ExtGState -/CA 0.2509804 +/CA 0.14901961 >> endobj 272 0 obj << /Type /ExtGState -/CA 0.2509804 +/CA 0.5019608 >> endobj 273 0 obj << /Type /ExtGState -/CA 0.2509804 +/CA 0.5019608 >> endobj 274 0 obj @@ -1761,31 +1761,31 @@ endobj 294 0 obj << /Type /ExtGState -/CA 0.14901961 +/CA 0.2509804 >> endobj 295 0 obj << /Type /ExtGState -/CA 0.14901961 +/CA 0.2509804 >> endobj 296 0 obj << /Type /ExtGState -/CA 0.14901961 +/CA 0.2509804 >> endobj 297 0 obj << /Type /ExtGState -/CA 0.14901961 +/CA 0.2509804 >> endobj 298 0 obj << /Type /ExtGState -/CA 0.14901961 +/CA 0.2509804 >> endobj 299 0 obj @@ -1797,37 +1797,37 @@ endobj 300 0 obj << /Type /ExtGState -/CA 0.2509804 +/CA 0.14901961 >> endobj 301 0 obj << /Type /ExtGState -/CA 0.2509804 +/CA 0.14901961 >> endobj 302 0 obj << /Type /ExtGState -/CA 0.2509804 +/CA 0.14901961 >> endobj 303 0 obj << /Type /ExtGState -/CA 0.2509804 +/CA 0.14901961 >> endobj 304 0 obj << /Type /ExtGState -/CA 0.2509804 +/CA 0.14901961 >> endobj 305 0 obj << /Type /ExtGState -/CA 0.2509804 +/CA 0.5019608 >> endobj 306 0 obj @@ -1947,79 +1947,79 @@ endobj 325 0 obj << /Type /ExtGState -/CA 0.14901961 +/CA 0.2509804 >> endobj 326 0 obj << /Type /ExtGState -/CA 0.14901961 +/CA 0.2509804 >> endobj 327 0 obj << /Type /ExtGState -/CA 0.14901961 +/CA 0.2509804 >> endobj 328 0 obj << /Type /ExtGState -/CA 0.14901961 +/CA 0.2509804 >> endobj 329 0 obj << /Type /ExtGState -/CA 0.14901961 +/CA 0.2509804 >> endobj 330 0 obj << /Type /ExtGState -/CA 0.14901961 +/CA 0.2509804 >> endobj 331 0 obj << /Type /ExtGState -/CA 0.2509804 +/CA 0.14901961 >> endobj 332 0 obj << /Type /ExtGState -/CA 0.2509804 +/CA 0.14901961 >> endobj 333 0 obj << /Type /ExtGState -/CA 0.2509804 +/CA 0.14901961 >> endobj 334 0 obj << /Type /ExtGState -/CA 0.2509804 +/CA 0.14901961 >> endobj 335 0 obj << /Type /ExtGState -/CA 0.2509804 +/CA 0.14901961 >> endobj 336 0 obj << /Type /ExtGState -/CA 0.2509804 +/CA 0.14901961 >> endobj 337 0 obj << /Type /ExtGState -/CA 0.2509804 +/CA 0.5019608 >> endobj 338 0 obj @@ -2133,767 +2133,945 @@ endobj 356 0 obj << /Type /ExtGState -/CA 0.14901961 +/CA 0.2509804 >> endobj 357 0 obj << /Type /ExtGState -/CA 0.14901961 +/CA 0.2509804 >> endobj 358 0 obj << /Type /ExtGState -/CA 0.14901961 +/CA 0.2509804 >> endobj 359 0 obj << /Type /ExtGState -/CA 0.14901961 +/CA 0.2509804 >> endobj 360 0 obj << /Type /ExtGState -/CA 0.14901961 +/CA 0.2509804 >> endobj 361 0 obj << /Type /ExtGState -/CA 0.14901961 +/CA 0.2509804 >> endobj 362 0 obj -<< /Length 363 0 R /Filter /FlateDecode >> -stream -xĽͮ,;7b@/%I0`ْꙠ 0}$s->Y_tUd2`o_!/-#K+_Qk腿_o޿o9~_ ?2#ʯ2 _?Oӿ[4׿CM*d3gP'Zj4g}p j)2r3>z8|}P%l=Ay>^8r+l=A}>ӫ&3|3o@<<`gSxCwuƗOM '!hϭ~l -oJ8^z/b:(8ܱDg^7e!?}v^C'Ϧl'ϦlLEqޓIq?KENMaޓߡXs{aޓ)oFhمɳ)'SYя0|̃trɳ)'h#8ɳ))E!b:v\?y6#r/"l -'Ϧt]dmil<{1ʍ ZIpѴ}l -I( -!&Ѻ+'Ϧt!BmNaޓWzo8gp}lXDI+\0m<'.L'Ϧla_RogSxO6 bHlcOMMxzDcgSxO6ѾG"OM=Hp7(vL'Ϧl ]$a}&dE^8Ҝɳ)'Car s -'Ϧl "(}<ɳ{1.f|b}l -ƐDcލgSxO6o>y6dXLr+˝]u>y67ec$)tgxS2rRS2<›1Vb?T\OMMa6˜ '.|&\l;4/g2ޓUDsצκ~l6 'Kn'M=yXdχs+~l_D X>x67/R1)X?x67c/{4lmDJuMOMi UY^ѻZ;goL_HO+#'<}]Uᑿ/t>3W@ĎgXcRzhO_yO9OOOyO9OyO)OOO9OIzGGSgGSgGSyGGcegGSQgGS=GC)gGSGMOڠQ %Qe?}+fVv}7>:n}t[(ط"IɱwcwscJGǾRM}+bV=}7>:ln}v^n}r[ȷ -ٱѱطzѱowc*F'Ǿ^M}\Vl}7>;^e}7>:nj}v5ɑޮ~fLTG8A>- f@?%"$Q҇Wm.ԉm6IAS*|,bp>샿![Gox0 `Oߺ}:<|} UcUd6[O<[>{OjoUDcڪ߬;Եmkfx0F`샿J{}<|kp샿8[o x0"`fOߚM5x` l `>{M 7}<|+ V '%)|ي+;f` Cj؆~oxY 84xIY )x4~6aɂH6A?C>G#4gP/}?%mOcƾh/?>G?ۯ2 Kt}!_FdLV εt[Xva_ڻ4.Kg}fi꾏/o24K+}f~_4:K Ҷ}_:o6@K}FhӾ/-?;mOi6f (/=?5U|ө@>GGh?>Gc4~Fl?}_:d&?>G#vGh6'rGhg }q_Fd"m{nc4vS6G?oc4z?>'÷?[oc4~+>'?߂? |0Tow_0m|ocirebQXEB&QC<F~sǯoDl.~~\_rOybbGehpSlx ~~WXKqL_?/>{[P`}O?;?;?/oK~VC By`_2( e~NB6,+:RcN|2Ê."O˨S -#h?5\95u|jԿۑܪ?}l[oO$Q珽*U4__>4SSA͇ů!VI͇-a&r1AŞGmm/Ȑ!W}7kq̛"29QNWcjWYjū]g|_U~^Ǔ#69MuU/<כL^(C*wy??{& -Gy~قȕD -?X9=yDM<59UZW2;doNIךcWFq\ -]8^@ ŶVMX?X1jhI3[j=:ԎPGObst ~xRa XTvŰHH5Bb0~tÂ,T:j.6Ð}AͲȂxDZNM xbRTlDh1UdlpLn&ۦ8bb#5J_9 `g,ڲ&P5YMEnB1XhȎeyw[T%au$0lޞ$`69LƖ)441TPD^bV]a$Q+#m;FrڂuF PDXD%(F>bPn1Je! ->lq-Fb)kS늉J!|>HL61TձZB- YZ9'$&`%?S$XrlrR,˺e`2ZM@l9AOiSlDtGMуc/<6bA~?o*& -\G.ǮDAm~MB*R٦T̔)Jnh{Lp@$,_t!ړd%m,o XGE(&3k*daSo\2|>u'hSF-F="!&'w0 D~ra10{dUM9FME䤉ҙ._Gd2l0n'Sw I$W(E݈ne[jЂXK&Z -^"|(3M~WZU8aT Q/zWm C=slz! -eDt7.s%dhaXMdyN`EXl"&hD\Ɠ5b&0Ĭ-ے!y'@6W*,Y٥De{D${[vZ$H]-9Jj'+"w}7 "V䖨 LH*0F5/Yb[; ;,jϤʩ+>IbX /[-k٦`GE[T}CM(/$6d:duE 5yLbkȖT&&\LN(>v3n R1Tegt9 -\@NhنH"Xa,&Buؑ#eyHzGz2?9T o0 /Pz!hDL09,JcmUأ1΍:DĜRH^d)t[Pv -yن#؂1H 1;C) 2h|Q_R&W\ñ,vQ5wH~k M!yr~E$7TÆAZuKkIzF78RwLaǿO&rUn;+u@DLXk@Db)&GN=tk0ޏ\뙚bd.rD]TMk,HD1cd]UK7E'kAt0kO wg>KQD#قebk"FY{=rȽ`W@ŦG ' *ˈ\D<6U40"+F&TXMlDXL( -{'&&w`51[ٴ[rȳW?r7'9K`*H̚\`D3A+XvR$®peY ^!ߢYDY{jBS=W'1`NԵm1p"kn*(֑Mu+oxkS<5s(T8TV%qSmj#kϲ`ۤ&gTZSD(oKKq]#KX` 24PQ9UE Pɇa\T\rV7E[&CA!29X2Ǥiy9X7 jw9abs+6ڡ)עu$\p':NtˮQN!G}Al+Yl)Paӊ%{AXLՋ8e[ŐCbtLfHUYbvXE@T$pBeWD1Ϡ^tłoS OYtLn ࣶ~ @p[7&sIHb.^QYĶ h˘W:assCG5|_&j`"|8FM`a@ي5ﱡH\Ӣ`=bME\CbdE]tFc9H}DD'v -(5 cHbO)IDu9\<*^%4tn٩(Xd&ԉ-.c UyD?.Y+UT(]&U.#W{Uп0uvNⴻhd?t[\H"-P &*4oˀ% -F)zl]P!0dUͨˆuBF XE\P,.S!—{!כj`I&1ytq1'v,4jQ;)&X*؂,q=ܛ(z+Ty~̐&U^j׌-XE ->KT- -.EL90aYw $?@#_HUOjO3nBUȹgk"J}1ā]iTīrdSK6YEAT (rEBd_s#KOm}~DXc8b"GTv Hk"8Ur`S X CSK5 }FPX23cʗc@ cFrA9J1x/ -&-I Bgr_0T b_wh=_j`g,ˉ"۵o@|"xcMOa1E]`[xEN9D4LO3Þ|Q@+:#){LP 2ZɀI2#Ԋ=( ˖gT)\}Kd(Cx('# -%Qm^c@vG@f y5*X';!6YѤ5#J}cp1&g(7IF[DYv-rU&ւaړLpr -1 S 'l#I 47%İtwDXSl\% $cCHa\ -Cɞ (d)FD9]iᅋlmX=4_U=n*}L*dh}1MdBxU;D%4QB|&MT͋8E*6.0%N]Q48d򨎑p3'v<+Jo |Eqggc$ba?C5եju=liUF4P.fV̯Iv2x2ݙTn"[Xh &t2 sFJYAJd+ds!IR6|<<&$3vG 0WQdU*Fѹ?\L >RDvBk ձFԣbx40^(SnݥpEZvnDTkof,kDfߣ![Gȯ bt*VQ#?Fsb<|"D?.H+VyVm8iF`q h$~E~bDyu~YP"Ҫ‚YL,0 |ѥQ!>_2-RՕ&Z 0:H1SM+\g]MjD,nj'$z.'L<ٿ"i#xbѮ#$&#SA;LǷsM19&8If(lN fd"2k0u; }V,2X6;y ҭ+%ٱd UMp<&]V,"򵛢@VGG109 ᅓ@(A10Y ,$i;&Wl1C1.hXBuR 025-LoT$bUv\J}vnPC@(0CEhDG%ʸQlUQҤ*; U"^@uD$f\vޖvfO A{@?W QDYa )#/uf]UXK*с[L &JQ`JÈU}?3g=\4KB'<}L7܀"4YJ^=q=Dm-4(Ȏ2!@IFu䵻q','ٷ2Qa?*l1m7R|ȄŎkHӃ*CE8ǵ]UAQ]|8rbp*FjҞbF"cg籩:N+RCɏ\]PP,e hɅ &/*mD b=i jNFfG e:k- 1͇]:= TVpuibi`"ܝQ1fȗ2+KAR&FQ[&rLN]e2X_9w(d Sب&_Ng -ȣBhYѮ RU/+7-Z392lk&,oO;mg;0$l)F`UۨJ@W @ֹU75jJb"[:fqʆlVF#6 &AA>(hT0(xzȜ8(rz<5cqrG!WȚjQ':\e68uD^fI{]zřaP'U++.hz~&qlBhMCN=z*+EHT0YqN0"T!Jň"]TI\Ңaj!~9V󅐕NufXdbPmk E1^ɱxB,`&RGW -Vw%AZ(iuw(&F"py*+g ,PM*fBjH!_Ua TH .FְIݮ5i0"+Fz15فIk zm^51`,?3"TC\0CnG)8ľVc -WkX0 S }%/f\8Qi%)Ceb&ywx^􋎦/(6 -h!(F3&s?(!h`&+h%9 -q̗Jmis"p$Svwԛ 3Kc1cPOJ1Fh5q X+{رNJFvs%L P"o&jPõ)0g+e("!al g~[FDtPJp $wEyj1 Q\bɕ">*EQ _D -ŖbHT2++i p̪p} QY0l36LjP= a@dZz;XPJFuy_z+*ŋ_U*G&0CeWLV4Mf, - Uuo ޚ"84< I.ORV[g@405QC8JҢ v@W$x0! E}ԣk@ޝC~V/\}L$v t"itﳨ>m2b䘨*[25ώBSe77aFO2-VuKe8*ZIM7G VȺnQ(jVjGnSYNI(u}0\19% zDd!}{y\ 'IT(4]M#v\݉17͂MZ\Hs3, E1"19&Vb`eG,:&?(7Kdͤ'9IC.`R f}$UؘN7DvT/ ͮɺI{KxʠApEI`e Rų4qacw;br-JNF9do] !*jɷ4&?(*bi;$RZM 0)HW #e"U4&:& !#<j' -]J"*)Hҡ|:Y`HjԲ\NC0cZqbdI1o.DtK!Ց*c̒Y2Fk"~0uv *!-2G`s!HaɷqL^X@]">61 *Vk!#\…>]PKe+Ȋr41NH=q~P'qwAR-zQ2n(Y5)+*xbayO4cSa:bŊ* @t n2Z|YsG5Z1TŨl.16ۑF`fNys7_Hn͎YtEϬx̒c].qLzPWH8hLS7x{>,އܙS(CMb\!nLܣs֢J4Yٍ8w%Ŋ>EDG'Y0B\%q!ls -5%Qwd ul-DTs>1>h&'hT ,.}@mVTSQq5qH-ҟD0JFhFypȚ- 7$Y&Vz4~ eͻ"u*u]0#+YE!m&JzU4"mR6,ՒQU -(ՅDNn]KhYQQe4FZAg.EH_H ɂBZcb]1 A[܀6lΏ9~";Y}UJ b *V݂{Z9 o!q}ԃCFp/[|9iSo:Mxf2kC8Ru@ɼv- -yF ?#oyY!KȰǑkgJR1j+)o?c2[vm+փ(:6/XSRSG#{K - vN r%+| D:P=P}кWVx5Sܴ>^ጇ"ʊ+0$ͮ6G +-5Ic,B;HuLbQ6zY Ŵw]1qJ|4$14z*\ 4]C/_~$m쮘-̡?"Nc9 &/#wJi --#oAYHt=SDǐp6Lynk,IռPIJm(i:Y|$gecY1[ہD\/pTQ@o=ź=:)`"O޽nn4 -EĹb?X-jhH9z1'Ksb[k7)rz1߄Fre䀒+;@0.G{VЁ-1DT,tTZܛ(d}ѭ_*Yc!:hʾWG#L㢡wcbdɁB u"/a>a<B3uҤNÆ%(3u9mJᙴG4 -j !>4Ԡi ]F*KLkQ/1i FȜ -N墲1S1"S#E\@2~~`IVBiXt`MctY24K09fu8UL7ZRxhyG8)f?fpQ0fζ>Hĸ{/d.ڽ17Uvjl9ckɈ[0N͊m>LDCKէ \g6OM7 ѣ"xm4/$:^bk3+Xrrֈ - |xV0L+Zp&G;\__O#B u3 jm+&B~kR0tDF5D%"Pw?LxXĆV-MN# F1X> (֎Nq5-tSd\ک- GUbULL֎lи'\X\DW+(k#JYj$NCY0+eX&Bwᨱ0L,djcp"(6fZxʡmecYðJl>56va)R2w[ Fu6nA;P!]шp$STZM~~^L wo3ktV.3 -Cho.3..3J#\fʠq'\f8o2Km $(rdo2C;iY“R]۸T;9"\fh'V36.3qؓ\fچ.s`m\fgQ3ck2@އF\f8kIvq܎N^ᬝ1׍LKT+Kn;Jk'3CP9ABf -RNfydfTXfFЄh9w63j&4.63-jg3 Xuک׍ Eꕷ9 Hu6͌:+Z_̨k +YVҫfgsb+Y,hJH2LgFTOfFD%|̴,̴E̲v;6F׍L DWJv6L`alfjS|.63Ԃ= -=Gpb3Ӓ@.63jd,̲JҎ_̔sIV:3-|jw.:LFÅ֖B9y.:3nu3#BFErό` =um|fE~?̸#{6QnL+zB׍ϬZ|fE"4'-f gЌ*%McYMUL>ɪό:$r3+dw-&v DR[̸pi7>3m)J퇍xLFJNnB%SgV\ѱL;SLβό"uvU ym|fa#s]|fgFͪt5DЬjILrʹ(ύCq4:(Aa4nGDYՆҴD;)("krwJ3 -*4JN)C;YJF7%hFO<f^3.F3@Lֲь mwofjhV\Ѭa,{c4jt̨}6̨6.:3#n8fu$?NgF9NOΌr8ɱό;G3Xd-̸sOьS;&v1"fV-N0qǑof\+b;shF }e4k$_tb4kڇMee4kIeFrb4kǜ;)hWnf]ftM浕Liv.F3nzɱьgWBAQ?>Ќ—~4 (|ʹmfXOB3 -$-W)k۝g%4Eq ]f` 'm#4)%&K*fT,}7B3[p#4C(&;JhF.'Br;-$i+-8=#fZB=dF3m'nfZۂOyVF3m5 :]rb4n͔V%i VFKvJ3kY;;ٰLls4*͆kQcU"ꏽ1Q%B oظQQb]~P! q&XgύҌ:J#~4iij*Q} PmEjY[IFU%9v!mfH5}lhI4MfcIQ)2'vM ؍L[4"~ +乏 DCff*I͐2pYai] R8Os4S4R6gFi4DLLWDx4SNfF5'QL)Wr<4S)J gӕLFhFi+ ;vR!=ng4k3XFiҩc'YƈggҌsMN8FiF1ɻJ3 Z(8ײtV)fyҖf^8X$l[(cҌK6e6F34sݡ BGF3=-jrǦ5|]+Ǔ;:[h5D{PhGNtqB,jIь#S6F30bdc4㜑.Oea4[zsmf&btVsd4˛ `+qD-k'4sF{bfȍ nSJhƑ ݒ+2+86F30+C)VB3=/]JhمJhfv"WB3a!i*@WB3=ӏ LBdg'ҰЗ, 㩬|y%4ӍoCٱLw6d'Ep 8(fg3Fef`ěJl2) ~nc4=L՚mfEv "iǿnfJB6ofĢѱҌ4L,FnfIѱҌFaWNiF:)aIư%Wbk4Mv~4#>C;-Ĭ~s4cW-oa4 ]fLOgc(RP5<]fe4K^k] - rFiF&aɊfI|(dNֹҌFx`SY)°GiAy_9Wi\wvq:8xd{8i{|.+YVTs4#q#5{ o'FiƛƅEi1>!QFiۢ[52)͈Q5je4#MD qc4֯oFh5&oo'4I[:vb|,| of6ӭfYLKЌ< -NM.>}Y ʼR,h3cĖqLyAFgF 1Mn|fBLvC[̬Ab+-Ĕ'3bb>w8,j3u8Q HpݝΌbhgd3I#ԭ|fEtO*h!&_FgF$E_H] xFgTR+7:3ZcbD1LZf3cέ:ΌHʡ:WtfUdO:%3ә11ͤ2h3#Bk|fDRϬa֬tfeu5i3#Bk2͌0u]7le3#G.'qQ'[̪T)OC]̈\v63(Ѓͬeu$HyҒ]lfQh!R̆4{a-6:3@dotfMUɤЙAL4=YllfME=͌PznlfM}663B))'̔fuad3kL*=fF 1'fF,ֶK-^7:3b)\1=љJ!{a3# Zr3S1#ẍ,f֬k̬?Y723iE_723)t$a+Nf-ĬQeZF;(no\f])'~2#b:Jeֵ*ة̈f:!rsoTf]ېtԶ3i[0jRۘ̈yd+̈Po6&3(PdLfR:Ɍ@ -sG~g2#ն+qTF$gݽtɌ8'Z̈'yݨigNeu`\V*3):9vi0yV둳i -lf$l0ʎ]lfGEL(4FpjL(ggFE;,dV>3(ͤFgF93ZNgF%S`'o3#ί]tfC3-љGszlfQz9vy66}p"u3#Hۤ:̴1"j3hV~ҙŽLWUX̝lh:'vA;shN#_ ͒~Žf$j-f`fYpf`;7d+)bʯ+Z(͔ -{(`O2~g])͒^7ͼQ)TpQ)`O;p4Sf3fOffpd4ʳhF -Z͈-;YZ#"u2]f'cQQ(ΒPYEiFat+{4]Y8&WFiF1 7$FiF^2NγQ%3nfh)(#:MBiF(@d(tj9 y=6J3y]f89wJiz_7J~|)Q2dBoe4ß?NFhfAy{%4ڔgF>wB3uٛ EhF@: dz2dfC]/Nb4#hF -u]fԪ͈֞; GFhWHRl\ qY1˂6B3|-fp~eNi͇~J3 -SAðDNiF,ׯfzP5gݭfzɱL9?hhⴆ+r~we4S^;rza4C{qQ!X7L;Dֈk4SmovJi\+LVD29Bi{XvJ3hٌNiFX+Z+,kNQZ|g'B -s4S"fL):f+2P_^m4jԐVJ3FiD-g!h [hMEȖҡh<-h<-hrֽcc4s 1&;:mҴt38:͔BTd1E-#L]f8j!4Sq QAFQhOdn+0_٫NiC6[{L.N3'=rABru%fx])fJ 5iF 6Tv⫕LK#4ñZI 5ӌfdڗ'Oӌ2)z8:yivرq<[iFDZcffTu4Kڍp΍ ('RdY¦{||)ʹҫկ;N)ZbSeZ@4_,k|MSQ$WR;]Ŏd_wN3<6wNmFuӌeS+YNF<夅tчT袽ԌҤqwR-YMnfVqj;YVPSL i2W+Y36qg5߲g5J.fYIZvZ,k׾f8<{e'57,dH͊rT 3I͊rMԬhEAOYQZ,ƾi9I͊i;YyVRByQfxi#u4+ʡFM 4+ʡFON3}&&R7N5vNOqvO޲ 9p3JǍҬ8fwJ3)ַ9vJ3-ɉvN+Xfr[5!;YS%EsLfxT=2Mg4k$ v+s5;8p7EkCu44;Y/[uR39l: ):m7_a5:;RܝՌLZ*;Fug5ZjFmȭjFq)V36P)BjF17V3bd.[X(tS6V3%71V[sla5{Anf\ cLzՌ4J0 -]f\' -fͳVu;Y кHq7 R3D8xSԌLHguR3\ڈ1X͊v%}rc5bgXRj1߇XH'F̺f8Qwb -_ŵ_w^3gA6w5H5'7Z3t[TNkFCya~ma5ÙO3Hh9|-fP\&ao};hf;QDTjFg tz[ }Am-fP'&iHЎ;- {^YӚ>jF"$<֛ug5ZMwR3mKBj֕>'v2\NԬ+CbرLm-fᛰF;/R֌ncF;c鲓l5#248Кi*Bk6@T[Gfp4̲њQ2#Ek^/}5kҚOHI]vњ% -qi%.Z3v8A+OfYEYqye-99j6V3ꄒvu"5˰NjF:vci6VLifVEve5#z^7V3OǤXXͲz-⵳jFʧGkyg5#lh+TC;jM㺥nfd˛(=ӹZeqՌ,ɎՌZJjI,nfYo'sEj'_7V3k׍Ռnsd:.V3s4cy~d5SRme5+-H -q/flocAjF:"H6R37-"5+1ǟf.mOubˊfT}#5+UyfPfg}g5#W\͕ԬhaAs¢ӬhE+i8͊RR>wqKVN3m`giF? FѰsY-^7N3}\|4#giF/#4ѾqnfE4ޡӌvgҬhy<}"'vQNȑf˖NSi~ʼS CU(*a09mJiVªьh?؊O^fr -3d6F3J=mLDofkon}Yc!BZ(oJd1-GQ#Hi(4߾OfҬ*l1.J 6JiB>Ҍ]5Y_;Ѭ*.ֲь!]}mf:.F368&v1Yxsg4#u~,+Vϝ%ZҬd Fc;)ֽǘVJ3҆ɱҌg{Ҭi ؝nf wHV~Rp[Ҍ^w fIа;YzwJ3^ I[vQ.cRilnfc:6F-5zhFh9^ho+6 N2^Zuc4^M/uc4^ hZ6h,5hF:2NSumEc͕`Җ]fc/N?RNB nfx+U`EiֵnL:!&v2tNh,:JjF M²9 6R3o~ofl*<ᵓV_-ۚlf}){HheQHhcb\9͔ zf:׍ӌF{`IlhmHl37N3]]f4{Xӌp-q 'sWJ3VsV(F'EiFcS ,7mz(FζLjLjҌfY{5mF<VugQb6kmF),CbgjU6YZqcQFԆ,mFf~fKӨp͠Bf?aeQ+:7Yֺ\L]l327Y,Zµ6#E&fZ;5w=+~dw"r]l3 ~p3Œ|54Iu+یf۬#mV&S^67Yx7R;ެ8Bڲc>2` eT[f8*#ͨyތ0^PoF#+\x3U+=͈M ώ7X&?lfUju7Eq.-쀳U pFtum掚UGgb;଩]i.MYY˹f\6Tmx3j V!Oǩ-xE:Hi5jI͈᤿NEt3 -Q*I7k7=ꈯn(6:6fMJ -lt3JIԀF7k$V ; R˽N7#NC)ot34V&4`t&݌?QF 7#N#7ی0\&kmF4KmFy}`fiV-ZfU[fZGޜMȳhN[fZ/nGi0 mfqcQ:͔ kmFIv-ͨlۍmvn&LKzf]jwmͨԗB/p#je9dkqӝmF F*jcYG+LiH[K#fmN'6fH Vzh35;LY7vf(? d `f lF)>`5n䙧6ZʧbW!k͍k_l#5C^X+L436qKC:7fhVu@"m0L3h6f -<;)߱ 6sF< l^뱃͢,vV6BvB63 [&͠\ Rl2+ (+ ɞel%M,`3%(%=MM1r،8ru{۴Aハlץfr+ lF'6،xF+ lMv<$64ƠF &،|DE7гlFdBv䚑wqqדYu嚑wqFWS vUŽ5#M>nX3꧴c %dǍkfERdG:lrNw:\x皝3V;׌Zfou5Lt\0+g\3㥥U[fv>]`3 od=vYė5s7YT}fk dٕN/d3*ofhufJ6oʌ od3[lFF»،Cj}qʹ\-]\32Fu5vvqeXJ5wQj|5<ڇk=yhkF;kEm*׌XwirͨBUSg8l\3uy6fˊ>n\/]5dP.q;\\3v&-Vz#E{+Qn0;LV-c$45];ٌA4x&%%Dnh35f{.K#md3R5/dd R72^{C)$ehTlwv<ӯsE{1 tDtN*XfIn`3L6SBʮ =ߚ\3^[v(r5hq\3@ -6-\Ue~]\"!7a嚑,TX3 貉5@6YiJVzeÚ5t2?\ZfPrV@:T3NӨS8!LjǍjvi氪 jvi6nP3Mi~BhBMT젝j"ZfdF5pP%I5#F5ʠV٥I^&uǚA5 J>X32ZdH)nX3dO7٥ڕ`3(+klfģ4fQ&ZfQ6# G6dKm8'xf=(u`!U!Y6Kg3Ql`3 plj_`3`D~b6C"Iإ6S2ؑ_\f')+ '5SVpZ;!ްf -EkVS$[fTZѥA5SR>v5eN5Sq:B5SRHdQ_~yPN5p?E<.6ZƠwYfhL VB'8HvZr͔$}CkWV?`kkfsk#.~q(93W LO5 u @ەkF*$G-\3O֌d'jT3MduwV)kjFC -ؕT3Fj_{6$?,hrN5RU62t6ifluD;ͬ_V#t,٤QO6qfȥqfEV3#Iꨳ3#Gugx(nƶ_όfE:̨mWn<3L6Yabls?ʔw3^^(z晱><̈\DhW[egFBnYi{;Ьh#{64OΜfZn3@36ͪ:µ̈kڧgV_eQ;όp3#p 7@3V&Ќ. áQ+ =ͰkV{Z΋X@ 9;L˔Sh9=bE6^F4Ӎk-DvYS .܉f #i'@L -4ӽ)%܀flNUaI|)8;Ьh4ri۟; #9Qѭ<6yf ȡi ?7+c5v)L[yfl%IfgF!2yv%.MQ܀fX«Rd;ЌRd~@3J_0~̍gFয'LF1jL^˟~??e?#ۿy%o~օoI6ZɈ+NCs"?cWC~?/(4t‘꽵eDž6'$s\ӽ O*[܇G!MϷ  ~p#јH׏q3ZaI76mǣCY61?'kPc_EaE! J6Z71Ko}`9)aw5׿5g9/?k/x{ٟkߟ1*V(zgK ޽%h%t%l{ K`#} >}  }8?zV!ƣ1>>}  -ѾR?z'+F}|?zdtU޾jtakxlLJqLJqILJqo17QoGEܖ޷s6joWln}}[ݼ5.|tӋWL7/.E,yo ~E|0E!8.b͋d kL~Go^ćC\RTq7/^ĩZ_X?z"_ EhuO޼GGM 9װ|E|8^(E^l|EKҬE,yRG7/Ra.Ey\7/RphM;ћxIN68Ey|7/ -V~E|6bj*r|E|6bjl~G]Dl8fћሩDI:F\?z">1/i9"޼FLjf|ex޼FLj7/Si/s޼FLPu\ћو֯a~%|6^* {_ћxyjJ&."6^*@ }>z">/([N-/b͋p$^, ^~Go^g㥢Uyj7/R<1Tmy;¯aKlTNt>h>37/`Tv|E|6^li<7/2H(Z~G]Dl &:z7/2Xm^ |E|6^&K>i_ћxI%p^q'o^‡eZ5kX?z">- -%ћxIb/Gѯa~%|6ZR/*O޼J-B$O޼FbHKX?yg$eHP 'o^gdvbKl.y xqfB=3?y>P^/R߅7/iD#sû*/y m by K惛u`:` -Z| _lf}j[YxRQו ?-ݟUj|T,܁/dﶾ |ߦ|%|ߥ|%|ߥ|$|o_n}_}ߥ|%|ߥ|%|ߥ|&|ߤ|% |-]m{J{Jx|}[}նoW۾ei߷]_m}t}[^}նo w3ۭmؾfKVmr}˵o-j۷mHնo7۾P7Wm{=}jK,m߲۪}ʾo-j۷,m߳۩n#W۾e[߷RmZBlO\+R)J8 -~}x7Zڗƿsavhq$o>g!I:6g^=`k2~/YZ Zp; V1o?*Nkx{MϊgUiV`mro}K['ʷ --kVPLSmk뷧kUx{eJ gi^K`mo~+"Q5wZWX[[lT??+VB[U x{JWXZF;kV? -N*k럕x[Guj}[32φ Vp?4V[x{Ij s&x%aQZZ;ߪTF୶oe?Vz[x{*Bgi^`mo~ QqwZX[*[U?)V6YZoTODƿgh^^`i:o}+YwھXm+ ,mVRo%ֶ?%Vg>)"Ve/_>|;{+LWb/*f Ep_|b{_ᾨ~k1ֿ}Q}o1ֿ}7ƿ}Q}o1Eo3Zwc/`[b{_ᾨ{_ᾨBֿ}Q~o1o3Wc/Zf Ep_wZn E]p_t[j E%p_ps[_(ھ7K}Wc/5:op_[j E=p_sop_~5ֿ}Q}o1Uֿ}Q}o1uo3Wcϕo1Wc/jZf U3op}.smpm3\ ~k12{ߌ>}.~ |1ogҿWY@W+.-7{벰~Zu0TߥArT?^JPP_Q> }(;|K<0/W'0yo0?1R"!-~ڂ<#ÿxoeyƜ__t_EJ-;?g%?usaMR~_[ӲOU?Wғ+ -2\LW J;dZW 16y*v-^t-Rdu5dPCUkO~|+wLG%&õR=θkҝTJZlF'u9Te6?oKEv0_G=v~[JڈY墫k#!6"dKIPd'SkkNʯpC^γ&'Ѵ$ p&O]ḝ2E|:l(B/IzRKeZꗒ8\*.I/jzdZ,Z%+6݌5/y]Hծv4f0v -Q1.E.U!_f%#M9ٺvqB{k)&g3ܪk-Ku!G*N#i~S]];)ck<<]9t 55RwS ɘG#ɫ@PM3&ٺY.ɋ=m] vIG9~7^M2d syJХ,~3u-u*c ^U& ӥrxI9Awzߔ\sL rw&k%e=5IQ%y.R]bD/#'j.~ɸWJ%ʣ*:R]/Y\1n⃽{d]'"wp̓-R>dFcBcp)pvMa C>Wr]O1dɼ3J\Ӣ4GU] Ǖ]l7%! c{ؓi2ϰ,4{5yw}Ӆ(sMt͵CѪkKWY "/d:]Jx -Lk2itO&ȋ(kHHgؚ6?Z@M}͵aEz!"ڭyƖx5uw-\F^1T?P,_inh&6>rʻݿ'# 2KyF8׮j6&Pތ>:'פҪ't g],Tiwװ{2"\6V?+dmcNӽ[!kOM-&Vz}&,6\P'Ad*>H79ϣd7]lrM5gdܐŨ#&Kgd5ָXՂX`p=poj1H11!ۣ[g[y3+ߔ/ vIkQf-wM<:[֘8e1u#kr52d.Y\59l-˷-dE^%6W?],?)b"X$õܳRfv e )>1h/^Ȳ秃"ο)+q~)ldedV׭Jc.e MI*eiM=*3ue rӇ>o27َ^IOVڵQ9 dvd}Lkå{KslY#SA> 8ai]k2Hhykzה=oD˄yX)֨k.&F.}2\18&ZֽMy k6W+Q$\YCr%ђؑi²ҵK^R٬,HrɿHn:2y3k磇zkgl' j2h#xe蒝WW=>V -WoʌͶk{2]l]@Jc>Uih=tr -{ -YfݤX +CewvMY=tiYFd%B&w6'Z\5\je&L:+XB7H//Sm6VK"KhI2Ȝ CUjt!?Ȓi%hO4Z"FddQ w̔-&󹌔1南>ֈӺVudjf=sٷxQLD -JI%y{2ȒGV=Nb-q "h)ؔ',8yܿ'#7eRMydɿƩq}+*_iFW2:smXZOsiy?0%ҚQVjyJaɃui-mIcNOtS\[AVO>lui<%UôiM,Rlmڃ=e6AHnJmqkDЇ8絸dy- ј8smDH.cq%- XIfrmڃM@f =H4kEi;h$l@{yM&\Q\ "htchfVS1.aynh_Mw<;cs>yP;]栤YS2qNj:AHyNHh "(C\J J8, sɲx;6AH"Moh բYA[k{^ Jڶ4Ϡ. >ࡵԀ-D ߛ ~D2XѦ9(` 9O42UcIU#WpMm4'RnmmS"Жh<&1r\uMsAo_+n9(HR84ţwt.栔XSR QÓ(DdU#D шH>NsN MoG_6AhG- mi ol1y MoAz(m=ڴIE˵i B;5|fڴ%M(~6Ah;.ma z&aBcViBJUuk1Qzuizx:6g۽A*%1LWvkZufa8A',@lfk=AhlqpO VYKt/# //i/QiD_]v z6}AևG-:zN+Iw;C < -MSŶآMSPI*MA1[<, ^M2Wצ)&vm. O2NAK xmv6 涘 } m11o6MAY\ߪ|- L9Uצ))Y,M/צ)(>U)E -b #?Bڴbaro/a|xkraEi b*˔X衜-u,e]` -~Y_ž6D8mAo\ 6wQk5 iu9mMUI-H%7%CFY^6YlKDayq(V:k/C`mV "hg- eUzKc1ϋc2V Ĥ_٢Tp4oD f)b1VNk/y7T񛾠̰)멫k/Hn`"(؂ -ֳ:؂ -Sɥ^/t,k2TXeft,)j b쑘1zYj61 -/Ԡ\[A; hUKcccl%McP!O ߲8xe"K3Ѧ3KO!&g/\fyqaE˵ WY˴ *:E_ԲxKm։eZʮ c/W55vr552Ja ] Ͷi!(ٰhm1>Zõi w&Q204ɺͲ_~-Ơ!Nצ1?l_wZA\ouv,Π=m:*đ<{m:|56.T+! 'PtX*^ߋgvmZԡ=SAXۯ\hDo<6wsUvv:Z\AUNצ5CI'Ѧ5n%=)i H]D !E l,yL3 cu $Fbyյ )'YYR IG{MgVl o;DYA5gת:d0Kh.McPS\p;̠1.m:x A|gdh 53J85vd R ¨C] bC^eHRnixױXZR+LoO20iz˛TX6Ak\A<+l,6,d&Mgv ;2-. .wµ r!ClkUc&AVc`5ZZA*r -CΠkFM =8yEDpakD#]vptt7:k޴i A :Uc;rDAd׵cjaӦ1Q~z[A8ػYTm8.2d⌶UW07ɺL^vrCyceOE $c/*k0Q k׆9(H#oht%9IʹngԕAhM& 5o]桨:a4AH?ɴaG sP$<-cUh-(edm=ڂfU3ZH0 _t&CXtmbOݐg?AhqI,S 4yLlHn3%Q1M[e1}AHSk `/E _Z`"+զ/~ω)DuOPd[cߋlq6&p,P-ͪP+(ar5;pqu -. -u¡/׆-:m؂"Ǣ 4+AGCӆ-(׆-(}yz k BEsM6|A K;Ȯ _yrzR/Z9/(J 0LAUG׆)(rKbN֨uRSa -6;?Z7!M/cZ7EQ.26\AhGeEhUVgEVE hц-Hۓey_O[PL;7 [\jPˆOJ 4lScawE-^Zӆ3H')Dh%utEWH .!+߁6Ah<-&ZbS(K5(j6Ah͢2s1=]dZҝn6$ڿ疋HtApl6AQ U6mx">D Bk#2vkP$Cǰh͚\4E6ChaZШx[-wmXzAh2Ȗz/(QXF%ˁF $酲-k&cHO-L[P qц-|sڂ -% [Z%>[n@!ɤ850p r\ł|(izMth:666% 4і ֽTP"c0p!L !xڴ(qw%- -4p%K -LTQקRտ;2:̻#(ϸwVIׇV_VjJVWVKZLdqfڮBK*,6AhQuGP"OMկQֿ -Bc~9aiw%~w4Ahs0A4=0Q7:!(Q[m9fw?̥ZwJ"(F߾&@X出5~ɡ;,t)ߴaJꈗ ; -JY^)(qE0Lv 4>˘-:,[hOQo#+ ,#ln=˨mEefz%+`2!Me;,h2B܉e'blme`,SǪ>H>H](娬'`Hgx,cd[ ,k0 GsXVğek;L:;1 2 ZI'`fg`,܋˒9X\ځe_ X& vI5,2YCyg`YR{N,KO2lX孌VX6 <f3,P$,R\&~'bx>?p,2IJA&ɣ1 x8Ct)Pv`m2(ڵT}ʰANFH˵ *SF {b TFytHl))CqL :9eJ;Ly;g. YF YNЏ; PN,򱸶콩 - ţW6߁e -^|)vہe iv^בdzg';";^+cGdw^o2& -֒s^ܽß+yPvxeL1++uCIheN XMB+Sy7\.{n VJxRvZٶbʴҐ ieq" :vF+ӽlϏN2[helqXuV9A&m2Hz7Z)}2̮^+ceE^Ayv\*2+²7^d*7+bZn˰fSk5E<#^xyEE+X|̽yÕެD` WF ; ^2OVsÕՑ2zTlyŕH2ÚW&28CZ`umI]wik ?5`ÕQ"Q|ƕewBT[qeh2z+xa_2-.IO2$dlʨG!Oum8`jqe](+bQiX;lqi)cV^2T\2gwP֐]IW3RHsՊ+T>lWgzWƑ}Jf9{xeB06^Y*+;Hye_ZHoDcU[yeKE;-{QdyeM2XX&~eByeTe:|SyeDq+n 2OqedǮ2@)e[:wl1Q7Uu\peujhN  -FWVW -Y֑dXJ+n+HV\ Ď\[qeE9tۊ+"sOqeD9d8 \[4 ^ WVTl;LKUe6WVFqB+.Qqe]=ٱʎ+#8حpeE]^Gl2Jg4WF+XyA8elxeDN_NZye&02̃XF1B<ˊVOJ;;L10煯ߵ'>n2*>n2*Q>m2*VXVuѺŵiPL~tٴi{@Nّ,TW+J1za%)ڭk# -=_cC!gd`pY"fݑebdVddj͵3˨u⤍Բ`7k dlS˨UÀ.ZFݼ+̸rcmWj֊ [UF寝[Fy&{JF7eU)1[eU^~)ƘUMPU'r˨4&2#RsR([V1z-#lCߏ,Np2@/VnYAt mQlnܲU^m!qˀ&9gn\#A7lYwaHdp`"q^9baV+ \KP:lz|Kխk#t];Si`R;:\:vS@{)Zt*d#DCǑlzuW[e`WɦEi.} -#Y+ٝ^e)$fY; SAHI׻ --4Y8RtmZ4UVh*Z8.t]Zvi*qZF-èS|_؍ZFn!N9m2r Q\&! W еi"NJwhmԻݡeN@ZR-w"R:lz4Iտ6=B$0j+ |e4׿ؙeDf`ic T͐+ 3WdK56,C59; J 2E\ۉ,sH72ˠP<& IXԾZ7 n2"״d~7bTdho tJߌҴ.blXeGk!8v,jxeH`k \$z[WtEj+ %ؤjsc畁9'b㕡ѻ;j)zwMʔ,jYt WP%iŕv4; M7|Zqez-=ˆ+3@(zЈʻhij2 "7i+ J<ʐaB_24ض2#r[W& +"}1U#l24ly4mᕡU+L+9] EP܏V^2W.=:] HbIqmx'X`W:Ev_kFc\Y<ؓ6\Yȕ:hg%%qI -sRUZae a V&L,fy`edD(+0TfV5iPV2Qhe^ẽi;,=2N<u]I6ye|ye8N3|7\3.Ԫdaϊ22,t,>L\g<,",8ݙe@;CMf(m,Vb"j}=#. F?ߑeDd\ S!-IJ(\ L!'m6bL߀epLq2ڰ5YZZ+UBhi; ,)s]+\peI--;L!&' P >-I6LAh+yŕA*˞kŕ96\A -+'얆 W^ kWwDG|•) _qeEƼ؉ehMӪRpf%y"MnAl[V!Oz9myk s8v)z[|{Hg S-0B,:/>!2B\,X24SxAkZKl!,TJ,k` -,ӟg1+ 6`r/p*WbYzZ˾ 2s)6ehC& P tHJ,CKZ\uS -,SKc')%ytY?RzUX&cFU[eZdTe׆)(i -?=vb4B*+ M/ˠZqWbta-2h,^[cg妧ɵa -BjEm24Z?_ej!LP-Phe)E:fyac3Q/2˔Ւ -iPѱdT;\ +IcC!5cGY^ W8Fv/F#˨$ڷq "̲Ss,BAչdYK_z~5,#~">ߘeUK&,N6K#yiO?edI(C6e8)_ƮϪ&39g|!/ǐ26w26wy˲_F6Kvɲ篝_Nv}V|H:fe-VT~2h2X;أLV'`-20Ӵ~km26b4h2<ցW|m+VY;V7seov^e3[sǗjU2ꥅC;+aeZ_V6/hsa@D[f7d; f=cs3i 7ן; ׳Lp=F0Å~3je[fN{7qN]~ 3a?1̨_V=^u7Wʼnc+Ōe6{/75Q7{%v&VCg~3͙ef9fd0U`瘱%k߾rؓH+ѯs1և}o9~cig$}3"8vig8!v:5`hڥ2: -k,3WIfG^_@2VIf58D2 -O$ϩc7b|"mO$x<{7YwoN2c⋝u#'ّPw{,˲-O N|F 3м  H-u7Up2кZ;LVk'=DNw,z dicazWq"ad+2c=/F@f2J?/@fQ "gt d=d)Er9@f),;Hz1/CAf/l8|☱#9m30B~;;Lԡ cل1)V^d1zx'{/18an3(^ cFj'Nj1ٕ_G;$~I@Iw Om;_kɠt̺ia\'7Eq08`dL@f* -2Kq@f32K\0QV1?Xx2JѺ^w\IfܱHN$ $3q.%$DkfHH2㶷o$7vHft Y(VD"xB4U\Afy%u2Kp7%Zaoa@Q1tZxŘ1" b̦7^[0fMKIcrj̭8f1K(z8f9E#Hw;U8fcJ|sk6n3a j+,Q7~'Kc_v2S>dFCKZxɉ`^ ,>;,̘`< dd.AfK + 3)C My#& % DgV!0Z8f cd-lrNwc嘥S_"njsaJV̊ZX~e!c9ô2+beq Dh ˌnfuW6fVr3Pэe&gQYe4gfV3fV%o׸̘qa=3W33|sˌE"= }ca8ueCVXfܪ~7q -.ˌl4CW.z) aԘd ʬYMˬH΍eH=foWъ7Y:J4דIf6o434ˌ/Xfxo+ ,^&Okf̫3b ˴ fe#cdF8xeFWZXfRU66dČ0 ʌrgF3a F+2];+i`*8.M,33;lbÎ{,3y,3TMy@Ո$̲=,L5ʌ[ſ&km?@2cstM$31m"B%,$3t"D2cYp)ܐLHf<_GX)5N'M$3VeLHfd!6X%R8l̘l(̸Bn7M$3F5B2c_7%&ѢSI$ieɌu%@2c Ɍ[.M,$3&ę@2 iN$HfF%Gto$<;\eI\F 3z5mer͇&Y|ئM 3<-̲TɌgWc ww -'P[ $<X@f<\&g~@fb<ұxzP1mɉ+2c1Ĵl2mIB6J G!?)=h:iȌ'ޓZ@f~q6̸FlxVD21}"cY.]nM$"=fLHfwb{dLUO<6)Ȍ@u 3VwF@Fsil1+r0:[N0rxlK1=O9fSjxE+Ct|33W䘑u-#njEE](v6b̘1ѬiLN&`kM0f,6c%&:ƌG%[c+/MfZ0f'۷Ōnw'}`1#EA0&Vra.+0na]dѣ]X^+ÌɵTmQf<_`ƭm3R &[/D 3&{aFO3d-Z0f\'=llpyu"ƌzkrفb& _ ŌӞ(f4kf $kiZ(fRSg*z*3ìsm 3&.*' 9m93i`ItH1r3;yU&:b#t.tCeZ:P̪8Ht,|-39P~qlxek1@kg?eR~L@/ItLY|=t">4~ 2tU2t?.M29cf~7^ 19 (6\ 29B/ s3/cxEBG~OQ\|EYj['3Knj)$kNV3D0qmF @Œ'0fWF0c3aBsV3"Dxx%6fv̒;m%Z{M0c]{T*fc- #e̒ ѳJ&$WsGS,rk%cn6fL?^$䳕3)RDo̘HCL0KZCW Y}o9Qf I(5v+A +,ˢÌyrMz- 3*afiiâ 3`3,Kh]/K7\,P^3@̲TcȨČ/[1 L9^3@̘70_3Č3̫Z,@=@̸K¿`pqMv ƌq,I96add7H3ƌ2#ƌ,k<+*`.i1Xf1c-v9l`x,@1c@1cٮak3~񟙯-R̨UWbfp7GcNvm`xԴf< m 3|+RX' 1  ,mv8l@϶b2m@̒<vL3l?"X _A@ң0c GyfU|0KZΗbaƢ][h3Ì$ 9ea&0ca. ,f$A #u2 3|g#,5^4 Ì5fkln 3!"iaƐ{ÌZ63=y",o73X+%adaƸylF֥a@`e.--23̸y҈602dF -.0̲(Q\`DVG6d0vuu`e)|̯aYVzgqwѺ&YxVY:L 3FӊfI &gN7JLvOvwOX밻23̸Z/2]'e[Yi0zB'ia&O|'1"̊ rf i9*0ȿvÌ&Qe=a0Ua#{V3@Ű? hF^˜f<»qK>"",OZ$cuM3F{J䳁0Q$8aF;U;. d6fd%@qԬiaư:2 ̪ppkarL'+̝rf#3 i`L\2m̪,`.3Ep$*:Xfr*(Cx_Vţ$j 2Z(%˪dtׂ/~ -_B|p2qJys3LpGϝG~`i_&#BHf~oF~D{l_&]ɕ_֤Ra/OAd_&gN2ُ]f9w&!_E`ytt-go^h?{*>9wy]FWȹm};]V7 Z.go_#/uZnզy Sz*GN;^"|U|8r4̆pLMUy9嘦ԑ޽w޼GN=7;MoW1U|8rdyz?z*>9tĚe:Go^Ňc'JymW1}U|8v>1|UytTRS޻R|sͫpdUܲ*Go^ŇcV^k_ -޼NźxVͫpZ^Ǯbͫpb;{W1}U|8vJSEO޼GN!).bͫp {"#vGo^Ň#AZWS?z*#b XJ]7ӑe=C~Go^Ň#~IX*Go^Ň#..B>z*>9%3k!7qsX%c7qr9~Go^Ň#NNdͫpIJnr#ћWȹ@.}z%|UGΝʰGo^Ň#'_4mc<< yt"'o^çX59U|:nRj{Go^ŧ#2RP_kpdq)5̟y ,Tr71+I57-mO޻x)5̟y ɛ,;7'o^ç{B̟y mFww-!ћqivo#05Ojnbml)Otٿq[7W[N7Y?mϋrm;?֟N/|?[n:tVửw[ _ngz<նs_n'|?:rZm7^_f_m{92.̾rT|]}(juIݶuAն{nvnR컭/'o ﶾ-þrr2,}DmQuCmoKﶾ-r:n˩ۢ뻭/oKﶾ-,ﶾ-zs\|~ӕv`o[EOAFwh}ݶw/ -:w7L'Κt {.Ah﴾0[[/ B0xdg j})UZf;% -?UNkijZ`n﴾"&[m/%B"x+[[/%Bx+ZJ LXsBߎn?tNka*Z`n﴾2[[/ BU2xpg j})XZr; -?XVKG -i}-L0YwVkA+Z`n﴾ [;?@VKGj=RqR``nJL( ѭg i}-g0Y]Z_?gNk\LX֗rR`nzo'T֗Z`n﴾![;?CVKفGi}-70Y݁ZeBxke)/07YZ_ -?/O=ƿg h{-]0Y 7^KLmVRs,xDg -i{)M0QvbIImv_b)IM!]w.SEo>բ_NSo>՟_nSo>՜_S>ՙ_Co>Ֆ_SU>Փ_S%ww-[l]S>խ_>S>ժ_^S>է_~Se>դ_S5>աwWw~j/uWwͯswj/u/{՗m?յ_NSEo?ղ_nSwׯsGr7j֯sWZ7/ugBWj/uw*7/uj/u7Ʌ}Joq8J?Ըu7ֿkP~im/?T_7yw<_r-o/m -:BNW6 D5mEGe+bqΆXE?@ ?- i<ϟ)g9\z`9Y2O-,407o~w,[cǂ_ +? ~Rv<=??$˾=7nE:?o?2m97ߖ XeQJx7 @v֌&2%=|@R!i{M]K!4BZs;zv-_vE/O~y`hi -YDkh2 7uΡ\40Ǔr2b~X"=2f' a@ݘrPs5qjz0,Ne?Ltj$L5מKCWd|.⺄Pbä0m*QB]x譎94L4LkT0"l܏MÅI (@%kZcf^t wBC\I!o˓ sMorqNZC#kD?IK.7e3_eDxoh\[m\]OZŸ_}wIiԚ5& 56jRS!cv5ֻ;f`hM&hs0-# ٥\NSp)GIBYBKîrnS{l[3 VLfw F2 ;^&i'Vǀ|CD=& Q\a.a;>kP0Yݲi@β3 5g_uVkix" qtUp^spŹkO2L;HS0:'2bI]Cʦ˼bҞ__;a}yu€7OM|},ݪkaun2O#հ>O]9aui2&[E% D8<=]-3{VwVw ß }Oܶ!*4,Lk9584I>ප2Rd[ 3 kxO06i$gYw"3_O^<8'w :3_M$4d8sz^P^m .lyR04 )&sX4;}zw!覒J. ŭxnן.Yw Tz8g% 3 B"L{{yqWwApcOXJ]Si b]ݳg֬>5L5S/ci;ڻ&B1%4[}iuD\=V"< b1LBgԈ_ᎫMwTc!j̳5a$Oj{DUgOT( Y$K 5p~j{b*I7hTri<[v]Aah=4&xgYAD5)"k(+uqaH? -Ϻ$笋;7$Aζpʮ YV!E{z[B}<)dGh!eY[d ^xxʦqݵ-!)WZt!d-6C!ݻrClZtLiBx$ѪCACV=5:S]iq%+=-:ԪL!\8v{ZtaZleBW_E Kck13w$t؊Z4 XqȁMBW-&!hMB$p˿;Plhb!}IhZLB{K_ТIh -_cSh$#>dA]6,}Ḅ/F![k(bt -mt1ZN+D#zdk|f!=}Tʥ[sSp nVB`'g _ Cu99cƥM ,C0n$%zA[]i8-BɯDFP:mG2S] ơuY=1&u1X0baVٯ!&{(aQ%&~fZD(ɥkBU]=D 7MD&1؈7{%.{ #q]C#0Y.'_=.+Q}3E/Qõ%HJ,>S1G/Q`&pZ3D^ unA,Nly/O]D6xCifC~溔\ ".P6/8[8y2 Zġ5fOQ´WQB9gab0}EQ^Yo3'ZmW-B\i8.B%E8J"=6\ۛت6y`t01h$Zp7HG#:0Vs:7Q6M Tzh2: eĘbLv4B߾x hu6!>>𫓋mtc?D,&ѡۓёbcaM 20HyUՠbil)+ͮ˔b0kqF''ӰnNj@ Sŋ"o30"$[_:88?^>UюiѮnْ+|tJd1nI15\;&Ҁ+=i~1E A9ۜO@̿bUla3J-y{xЧQym皶XTJ4"gN$d11Xrj"S,EXywб2GBb,[&Ґ QuX`-doAQ:!i99oZ$m5{J%$Ɂȑ݀"⪼_.bydvv&D>C%"._uǩy$oњgݲn0"=bqԫՃngwr$ 엊x!OHs`ѠY73% bO1wl8Y2eW c񠋓Z}s'Wan2̉xI닸grEFa ϪXf 1&zۚo'o-֘YN{b'sS杤ĀQ/Vm6pZDӾJ"7%f);$Xd7 fa ģqɉ?hfqr9XY -MFSY!J1gw-^B<$YW&%5[ٺ8yg!\N-y6q;12y/]!>Gdk-"Dڪo=@ܣ=ek>=ZWc'!󄾂c26@ײ餷%ZV 1 IJt7#+9]O I&l}mž)'D{;ggƐl:>=3 +43d).ڎuoǭ4qr@^w,-lhXEކ&f&D](ؽEFdd*h6"Њ* &}Pt@NaaP?kvB19D "C]ma .b2JNg^崑g7֣ȓ̇*/8x̆$eM~NEbљJI{(3GE,|)"6.N(yE%fH.N$yvFqElu2O˿)0g9MgQ)YٙYi:N xF%=AiQ~6xĶ/LR\ߞVƮD[@dЭ=5\4D̽ sQ5ekvJ]&rqJ] +uiDKfLja᤿PFWAu$ᛒ Nqj8L2&nκisܺF8%5x}wM{!b|zUSFbRmE\"N*llAJdE a!N%xlzΆ/;iZgHquQMdbH5#0qrR1y-{'+@"6{6)<0Mn]LF3UM2>L^ߥܷWfi;b !( bnК"";,8jSaz_PJ4(N*>KhR5 ;l)wﲆaLm,n`?*7z!('o'sRyBsrWq٬;xɯ=S-KN-dcVmw -(Oz^\V oT+)>8y0%۳4qĴ&EdU褮kw| xOp>a"ѐtKh%ge׃9CmLϹ8YvnIglvnܓ7i[5:|hr>q财^"{!㣆jzVhTϮlX<ᴂk<,EDZ4ZQ;bKe'{#RESVoDq{V9P"NN+etqrZn{N+I,ds޹!P]엠(Ʒޠ>{rbAZTئ8vIe e6Zdъ'0lъ750LFqep}V5G6VR0MUQ<kXG1dJ\xYq>KH͊Q+liyfْtwO 6v+>MFR=HMP셜2s4!$n c(iYA+3 QJ4ܹJη']wѭVŲ9֭VDZeSaU ۬X#Fb4Ƒc6ɢW~ pZC~*%(vxCj;iiF)!؝VWZa3NMwZ!l";%c6ekbwZa j )6Nm8Hnjѽ\Nk к*:ZmЍVpsHJE#8؝V;c8쭱E*s/Pq5sg?:ϖ ![o` ʻ|ZJb7\e"[@qEf߻WYmIJfjWd-UʬF(ei|wTLqe`L+=Mmbw\I6g'W{$:b -1.vz}^+jǮyZzl" W,lEK.vEg0\e1ɏxEJG)|maHD0\QDȲ~E"j*1D0\g}J(n\f,.gt(<ȽJbRn.3l'VYϡ"ݺJ(&pEt:zlCJrK *p[zچJW -`[ۊb s[=c@rۭ$˸ne dgw=NQNxSjŒZsۭFmf+J͇Bk`t۸p4`VԦ0[QԭISՊKEZ^DnH/e~XEP*gՊZ먗m0,DcY]hjiElbwZe=QYPN+Gӊ+t1RiwZ~+DtU|V[0iEKJ"_i%لk-u5'}Y srgVQxF`x$u:Ý7I72^2^2ޤxA[x>@ƛ/h /h ond-d-dI:xが7i72^2^"ondE2^2ޤxG@ Bڝ7i72^ǭ<񂶐&F B Bƛ/h /h fxA[xA[xxtu/h ont-tyMڍ7i7:^:xA[xA[xv ҝ7i+/H /h7Pw@^@^@ޤyUumM 7p[w@^@^@ yA[yA[yvu>ٝ7K oH7:,E8 x]mi `7;oV8ހxCfm 7CށP7;oV8xC&7i+oxAxI& 7w<^<LxA[xA[x ڂ<ޤx ڂ@<^<^Ǜ9tYp}-:7i7<^>:OU>ǛxΒ~mGx~-:x-x 7@^P@^Zmˤ|YZx}W睏WuǛ`|3m__KlǓU6mMڍ%g-|E>eZǫ,zA; JN¤g}L[y)*7@^pxn(xM4x`aLRẀ@ǓAǫ<#6/b|U ZNmhzty]8^ӽevnt~:^-t"$/\ F:~V2O>$uq&PyĸP[7QuGv2:ԣ=,Eʬhbg>^u>dZL <|f&Jȓ*VFB䙻.~F~6wR %0 kNҕhFjؤhS9Z;T\ 76y.\yRGDDW1{8 'K&&vF+y`UUhVB ,GjC(.,<>LY3bHcBo3PX_uD䱰%k#N&B}Wyadj"hB{  M'L|<ϼ]Q |<:$a4㖜ʼn$*E>ϼZ}vdlqXM\ .v)Xn unz19% {ѨKĺ{d^&x¿jfXxR%u{?WŗbIzGvh5lw㑸k(mtj\ Dx|>E<'IoǣD<] ?xV2X })e &/GMuLO%G&ck8(8U t<)= -O-:$GQ-g:^m;3f:xYxY;W:Xm7,,D;ce%#!8SNsYx<ȷuq2@sp<ܳowY/b1#X: >ywJ(Dիoۭp<&?eF"\]M":(7 "6>E<)?CkpT:Վ $IM}xHt]#L#EvvV灷Xdx'ʼnZߴ gEUR[x 4k \xNMQ,ی8xr ndK|Hcު6@#tBǓ:r?XBf@8X'`bSrx2HNekOs&Mt<#Oe9qQЙ'8Ax24Vt9mQČ_Up<*KwG8>x0c 'Acg8ŝx2W\o8y<[g8ECVNp^;nQ,z1xC'>^bwۭ]LB +J8(2C;fτ(jf>/&xLM[;<6x<{OJ#IǓ(;7WvNt<ҍpP/&v:^6^Lǣ%:⥓Mf+5wGDvoLǓ7'Ob.2Qf:^B otG:I^蒃&<#"$ӱzmW KD: AmfYBMNk6fGtp7FioRaYXory^ed7>8X7ח]*Y7|M"΄7#3U'Gm-o9iJ HG=X1ofϚ7B hVĮP;+s"rVM n^g!>2~odgLxCk΄"#፵+2tF;IFxq3E9Xc0 xc_nF_T8o|ێMGg[c}# -/ݾ9Xe%g|7.A48in*<4M#~gE_XR&tj=$ 7YH!ws~f)} -VĆTڡ\7Nv̀*o4[[F>ުPw+b*m̐̈́*>| 7ɽBxRO|'޴Ϡ+pN7Ɩ|=7Z -fwo&U - 7z0p[ŎxUZo3(3gtx5ƚ>stq X"Έ7iX 7dRxB7)ny2;@ go,ࣵ 5ޤOG2"%|kyM,o[#ፖ7~,ޚ]AMxP)oRgJτ7V9YN臌"⍮Q>"8]R:5y۷k51:nl5ŋ "u8ܠq6W8;nqݛ4O⠼ O0k'#q1g[n80o$>\7NY6c9'0oMОGrzLy㬄iD)͊D[ euu7S0;mV2q`8 ̴By;ȴ~'CJ49o'7?yӵ3-pyXyҝ>!Gۦt)o&孳S:+)TNzuJc(o9@y [g)o@ysJq7w@!os 6-w!or (6&w[<@:l 7<0:yx`9<x@uց#:yΐx@uo{x un᭳o@xI[<ތw봄['"<ݜzwd+w[<ݬfޭSn4w먁[ <:3|ֹxx5UG[wï9tdzRt^?N!<ſݰR+տx[/'7ڛ?N&>zEĈ^ 7&#W<z[XxmJMUo6U_ol]n,/_06X^vn|76BnSޭ۵n NqûMUW3aZ,̴iRB]&VNw*p -wc>+#܍m+w+j8L p -wIeZ4>]n)6t_n{XѽiލUۋ\nE|B!jw5ûlnx7ə\n,nln7nfVsͥWk[I{ъb7gZ!6`_osVVPS Vt[iYfÔۻڲ#yI&/ ,[OpWvc_\$sTZK{Z:y'[ozްX/nWfzqotZH O^7,Ex 3ފGY-nK5w]wr#k q`m-/ܻ VDh9nvY"N+ya>e/FVfM\grm~!/[6w]oVy\9c+M^XMްC?ln ][o-xmwx+oSU F4/o[57˵&5 ||7C|SwV!9fդ#p[n U2yv c7|ݬџ -x_7ay*7\ze [Yŵ6[oC[oS k/m'|7Һ_y*3u@7ɧaK&)(Mӹk e5P/ěR]-7b^sMc~ުLLT*o$CPw› GUw[3;MVxd:ϛvq o2:Z_7?Exkdq}D oMEpM۷o -4_|7my>wЃU(+Mwk^m|vr߭yksuPc]mfw &a@x7NR^9kKqPS?{v[#ul|7JwkM>o e5x#{-nO][Rhs8rqwN@nVu/-A=|7^ȼ^Fqi\nWНB4vM /[Ŧpˬ^p7c˾dQp|ݘw<_pd we[kp7s{Q(w}bnw|l;:~?/|5FYl7JܪvM=.mp7 Rt w[NtvmO1w/J| ܍u˷kSqZGwIp|v懆ap-:whqFa.^ްޜ;ĩDqs-x7 aAݨ FwIxQd%ݭ Ǝzͻ7~r9~vORć8 -Q_ܚmC*ZRvkEWw솻;KطZ *?&+ڍnmذ8FE1ĩ`.:෩b;l7:Ʈvt@^wڭnT w.o -f{wvv7V1ũtH3(pvGGl7uqzVի* l-l|#Rtd7qQ Zv RTDD#;6&W*.NeDR98(_f !+ K -Ʒp;3!>l7uUi ۍXm|;ۭ.+ۍn͊+M ShS9Qe᫵&.h7$ʻME1hiq('̢m*)RHwcVq:Wiq*>*q"㸊 0n7]nUg:0k ٭\_ xۓL\Jp 5um׍Ϥ+ ™D$GuS-.'?s -v.L\njh9pW{p?4^ Ȥ_miZnB()njpq*5 I -vc FoBuÇD7Qz9M>CnBsB| -麷+b Q \JȵQ Q#i>O+MM!/݅Rq)fa.epTyD -mV[[i+խ͹%< /ZjwCn[MN ϠRٱn,1O;8 ŝeúr)#p]nV/w@_nH2 F^ -u}@֑`(>_)MH[0duVסy+צz$& xbݺW6uӆS']-X76!M[[$803g؝FrẄ́(ֵ⾄ucKz_nnL /{{*(lo>6&a6|u ҭst#*:8n? #*v** ^m>V]mB|pEA2CF2cP&fd˩JviU\nP dN0ݨQ¹3nF z [vD\24ߧf!NL7jFUJjf)y"Xn;2ݔS)|agtSgkQaNnJ1je>#)&K Unʊ$LL7Aȍz13ݔ^&qRlجL7Eȷ?馰 OL7EWfjctG,`7%IeièZeDk=FMB{P|nF1j˦d1j"F3Af$d9Gd7D6"nʙhbl!RsBr)g&P`7Sෂݔ%qrS?N%nʒo<.s"KBDcP3&^nDvCsK85A8(EvS\Unha݀> S8ݔqg)=:f8mب|;0q.i~!^DN+My2xg۩:5/&v? M[z\ޚn$=* "vʮ`7d(=݌"~;MY(fQpQmhح)̾]nddv']q!Ƈ 7An DDgy2Lv4OM/d7%>?{즢D53Rb㣙bL.>6M-1i:,O&Nd7 \C@ & 2Uq"S?ۛ(ɉh!鳖ϽsBvCTCO"3،v LvSxO3 z")a =afe]||zݵǦO|!x{:sW+.]x&N`7DSuS|\!>.M j (b \|\QOyMCBib .irǘ/feM2:z8t["3Z&boquM\BQ18N$pOlX7?Q&NXՆpN@y׍?{d(rev;T\n .$_Y,`7ma`{,2``3/8ƮRew4ϡ=`7v$d-_n u;D.QJo?|nR~{UE! vUB_9v#>V5_۩UU 4( ٍ]Lze݀ƣ3ٍ0Yޱݴ_6o O GzocWh FSm=gM-誕Hy mZڍZ![R/-#V}tFt[/`7vh;h 2$.Df+-1h3؍nW9@h+MB~ ((>a vuzo-iMҕ1QM=0+׍Un\nt}3-_H+ՍM%A M7&xLuM|oՍ>TtkiNT7 $gTiK{@]{nW[V =X76I]nHAceuSmC|n0v %\3 Ι5uˊirدIę릭0mX7Zaeuւ-X̍VMB{ny3Uqƺi6chk.X\Vςuӆ؉`ج2p֍*Y ֍ͪ]|nY]6y9gkucC/\7v4PqѹuxHl[nl:1kN.ˡ=`7ESEu]k>c.`7ZVaPe8w`ѕz1/X7q q`h=ͯpϥT!>\7:L&yutiRlF#i3E - nȸFSRfb,`76\wwh4!>`7|+؍VMr(V]&'y 05G`761`֜DN ==ݔ;%v+ > M/]_n.=f%E5OT[QJx٭* _6-r_d hn{Fnd9s&"Yhvc*W[Uz;yEB"d,yA&N W %4Bo:!ufۇ-B{nꓭ3M Fo6pe" ڍ=^FyndYww_n}A$e0w ߦ-AFzD·Fhlę-Nj&"wz/iAԓHR: Į!>HA¯H=r ~=H0f>Az`Mъ!0i+ vas ִqf"Xn b3C6K!D `Fgfboxh+2|!W"ʪR4VsVwVw؀`t;k jX/ rO z  1FJv))ZI9L3Ng :?{.S~f X]LV 򶢯=@08^ {fW'@0r!/+9Sh 'O5q&UF#Qa>pc{΍V5k)szФjts=h#U;%n3uL: w`U\`2z>x؈IǍ6 _ @0/]zL xGy`|6!2(nќo8^y{1pN!>U&sYp`l:ԁ -{Lp0J  >/<0}ɚ7\|L( pgX3TZ  O VT@!"@Ż-80#x#ݽ~mH 8Lb ! 6Mv3 )r40EHpOd5F#FG2b"*<zT` v440VpE --B|L4ܲj3 [ofY`"^ޛDY<5x z9Y`E-Оpg| -)YZH`] H`jpҋu@nvXFɷ7rg!c5qB:*WVO 2T&"z$0,Ƶ„mڠ9i&u5:`!uKƃFХP$0 l_ uę1318*LtZc-xn={SVdrno3?7&?r7G>ϒ8ɒWY is;4Ջӓ$8~$'QF$8$%YI'~$ȗ#V7N"If^Lr?Nb8O"Q.+Oq7NB/l8IL'Q$oD`wSOq>b&ey,1?ID'1ӯD3QcsOq>bf-e;:_~~}'8;~?IxO $q?Ix7Oq>^f֮r~?Ix)k=v^N57NK'p%MS$R+ -$}>8aqOq>^^{M@3<}Z!c|Guo>c ~pY#f~/BMr4oBSЧ|T8^VɎhԐڛxzW(;^*_Ь|~s@?|?_khɣrS_]?z"G/y?}٣/v?}eG</?| *%G\/?}E紐&1~X*d%x+WīvGWH&~{iīZGD$~{1ī>GWA -#~WE}{xB2G-^?zUzG ,^5?zUlGJ*^U?yb/cE=V=*ѣeGm8~{ƫGi*7~WƏ}/xjW}+xUgWY}~?wB_'* gc̙69c?\M h*|$;K{?0Z?9?5.<[_m1M_8s [x^_n!=\}vڦ Wf w@vz O?X-#4ug}48nm_p$dh_-G4k@o9*lڏ%@/8j:a%?e -o>0ؿ=8}/H~GGdFSPb~(\_ͧCCfbn&E~&> (Dф qzMTϋܹ|h'3̿?ׯ%ǿv?PS+]_Oگ0?1mƜdWo1ۭ_MK>W8Bюت #~Gj͘i}a ~\B4T@~yaeĞ}/tXu}o!sT{_>ɿۆo=Gyf&tQ+|qm+'+cE 6\%/TYhWppqUn?wR 5;jڥZW?S0Y6 &@^Q6jgy̭w%tfӎMCntNquNM;W;lkؗb -f0D Lnᪧv Gєٻ%@iάNNcg -2.}. -nW )3tQ/wYRϦ%b|m!`>=LEDwn|M,X SjAD7g[ + CMUp.`w:vpEr+dTNVM[/<.mKH0z;hG4WΥ|r2}gL*IƱ$on -wVuzf? aÃJZOPpKNF /=(u[ u_(Xc.5 0G`=)PI@aCnj\K&z%Z@LK5ykQSSlVIAUժ !aYZdHɰkUh LX;[Ɛm7?3%e&REH.u1K/'ժOΤt\B*D2}vs*s#%N*ϦK&ErF.mAN'LeFiG3NXe SMGbc`]L8 .Cco̞bXI84'aVqi U# -fEݏE#W[Ifwv_IHp* ދdZxǫ;ʊD L6!#IJ&7f̛ %O6s)g>Mwwފ+גSe мM3mU-3wd=pi Ӳ ]2T3̌J.w]?j$K8+oc[` N4Wrzjh|AHOEidLhYU O -,&c|6f0U#CU͌-b~EÕO5NaT}oB՘4Nڔ}^WY-uĬ5'Vk2V[e>YGS$.EB4yo05D+E%ҺYhoN(< gطH,lgomeΕI-eI6=e~M#$ɷ"jd.ȎvI,vЮm"8%XU34pOnպ_G ^vD9,`G6:xloJ@RppEKcUWpA.DzKxE*Țy7U]E@Q)䖁%ZeHKNՠ>DsAOiiRuOk. Q\E& aN;"D[9;5kx`rf(loI$n4<ɬ5+ZS؇,Ŋ]kXg*#aw5kZ5@(uX}]w[mUcۢAJhUVW\,V`ʮ1;s6,Mw=)]Tnbj$ƃ -ru2:%+]'c( - codz +_x]O_ ɧȦ-ZhI.GaD /R|/X2X݆iњGH]`BE9zIsK[WJisU3.RpZ5`$XZ ١|B\9;P=B2N'WvKUUB64Hd*r`thQו.)d)+a^nH fpM^¬.ڍs b :\LCj~qb:FţM^.WxcF[A3z@r+B;|$D2q b+k)]5Cs C7 Ys(#Ɉ$ƂX+/5bNEk ܒMn܍q%Ki&n+qe#Q0YMoO~o!Ռah(|"x̸!7d̀,j8-eZ0lMFV A2,B !Le]P"/0&v,ZvhU v\v $xwlЙ:4!eKɀAV7۫34l%wq'g@LR?4ޓJLIa 2'Q'Ec3B>XBJ%Ruz0Í,+@KiŒ%CaLII@!NC WeR-?74(FMh-$eUծ̊g\cХhr3cs)T5pB9'؈ud9kEޓӮ$H2n)(aod('o -|vRQgޱ&4iΩhjF+=TKvMs]F@ 3Z0]horE5eGؙ&#b(#UU7^i {N;[ {>UƷVx)յht?e-GhOPV]-n.~H4yrhpqB@#܌܎&â ` &(Ѱt81~*hvRifE܉ɖ X֫]g- -%*̠R%2]F! ;M X ZI&ei#t4`x=dX|;MnB&ߘ0:ްSEM(ӀnqWM(y~e +DvI?uBh.Mܭ[`UM -O&r;pXtvAkHH&)h]Ӯ@R* d۬r5V!\|/!"Ѱj] 4_V#Qa-ȯQ6Ze؅|NihZznujVXƤĉ׬t^*{/گv.9֮݊Mv=EA'h4yq+{ڐ5SS-˩(д>1f",,0Y/d!Z+VX5_QO;Kn۟UNLwwB\2EJ|iY@ƺm|ڽ@^ Y^I$vRk7eb*I v& ۡ1KDgPvKfDK,AWEоH5-rz Aـ*'K٢<'yp,Dx-QDByJ3!]DdgI i8Fu4%caֽDPC5V֜2DGދT`I8o,q mW aou'<%.֧.lS~ў{S]滬$QM]Ktz=$eh!ЂhFPg"6,^~&]·4p|"S >ڙҝ -ʠDByL%֞2f(VN/?W6)êEa4 .3Gh7[I.eDN+EAXFGH<^*I՚e]#&d~ lш`͉v2RWMc.fdy& 5*djS"#]'."FuAUjrO>7ժm&FIvZu)&Z[@x[p/k[U5BK_YdTߤ*z[2e̞9A\f&$LV[n/#՗kY.HtSw.gh\Ϛo $yJ]FbnߑPM~>BMCȰl[&bڭdZ#Ũtw=y4 -.PtDp3|X |/]Ь>M{8K|+KS1"v#ړqA.$^&GHXTK˦~0L䋒‘Th{t3v}\lm׻B;FTrZ"e(5GH.x)ɑ=hiTEeÈ#ո/idL]\-Iawmqdd -'zrZP9l24W|iД14X?DtI ζj}֣Qy~U 9 G_fd^Gv8dL%{hԳdgIv^A5z+~XV9"݋9 %GS 4vD7 Yoߑ͞9Yw dʴiL4-׏ {Tje)S)ɈXmi]L*5r<2wn-6S4\LNAw9<%*#1\bqGnSM] Z.,%86tm׼>n|!OBz$^rAjEf{Œɵ*F~97VtȠQv&g:29yf9ך|F~BS.}dU#ws(794Vm)#N}1) v-{ lx5TNGGZC꒼oD>~*wvX:Xyug]b4 =X .0da% -cm%YI^]~ij5ze3Q-PO;ih39ZZPֹ_ hז\>mRy$yd5PW6QNøh|"F^ڼ{%L3&j)G~MEӃf~Ym>sQXmC;VaQ]t~c"o>WZ;O@ ڕ!1ne6뼘nda./jXyR5H0&cdDZ{&^oZIO^J"VVEDûC^h7]R ۙP/ͫhmm:o[< Co_ٜ>J't~h,ZnhNwͧ59Q߿lM16,Qu-4GGiݥ5Qiv/v.ƒ#B"AJXLȊF --Ւ @eZ-Zz:ШH: 4<e?h.hIF5ߪh:ܧ%0Z}Wqc.ݭͥ'ZvYjǪIC5rMhZ56lmgKGH]Sgڳ׃6s$SyE+2ycg?p ANη2U{g1OFW5ez4kSd|R^4Xŀ|<$TmP-ɦ'm -.%>of+)측;Vd2I~O1D% ~uC{9 [5:t1~8퍌d:>i.Y MZug"QnqY4AʯRB[rGg\U"ZNi 4M5Y4[v $lmk2~w׬5Bݱ|ьuc:a)1n*KH^]kDZj]>D|<ʮB;m5wk)X>1.[ӸW)vGǟV\쭕 {+7$ XiR,a^̙+UO.#C(}d$.D2ܭGd)u5tZ`2Չiw- -.#"ɧ);HnU%hV s'Uu,D/C /T55XT|vN~.eEj}&ӰG%ffڴ\kj:یiʗ~vMuM!fi2[iU:xQH&%M@ή2Цe"PnN[nf憓ZM}\³яF@h|Z$ Y y|SEc:)_eQ ]l_kz;v}(iwLseњ!klsXɮ&By28^no`)lkhEm'~x0S;s]iSs@DVhYrc6LArK]]-aͭbh$ GzmYeetQ3&Ѹn]H%>vxDK6zhTf8`o˰eΦ&ja57w^ -܁5X6{8,28uo&j$6) g|[2 vkk#ѧi_vr@mGEʷ˺ȮѾ;:H 2XxFhV_RUQ.|cg89кLC៍xw#)F#f((kI}mVo:PS%ߥmK}Zl ѷse~&g]'$"l>SÓfۆERkLoH͞z7w*Iz璍p+m>_^k|tLۋT.a8JyEv o-L&BǾGBː͘ M,!;WaqMb3YklW~rmbQ.D3+yu4pY)LMW@d11S:2I,u[)SZ5*դ˔b+ޞk3*6Q$Z;eƂa_r̞K2e?%}8Q -jLz9Hvl>QTiho-)=]6VX45G @V1~pKX6Kk&acI lo{k7VwZhMj3i=6KVq<2}480M{MK{R-kV0*3~l5 -46Y\m^mQ%Yi52;89oCkn8XL&*G<Q>ox|bhU5vhWN=}ux,BTEVWsJ4F8E}?&|>ÙK#c+}6u1 ,kMK,,_TK1 [Bcܴ8{f6ZW( ]M0Ɠflk@wt<;HO&C{!G]k~R;Ck\jQ'=XB;.U6x)i/tmPb-z+Sv,$OuЈv'|! vq`On4I&cuG]5n.bQIA: F}l -2fiwvwc,u}Id6DjJӠ?QC8:14vH1>˳T![l(we{h_kVѾ_maw0- J=Zcc-mJG.>eh;Ɵ  +T?KL!4V:-cgN]lbUjhifpf@ATx -^LI4-8ZzV2zn)Ɛ/Q؂`_"WO,pMb@=vݓȴ6vuݽX5<2[={.pKl S-[1H]hvY SGI u7zqW,^$[oE()LGl9U(jY:=u3QG}3X mΞѻeE mvV_h\kٵ;ڰT;(DD5s k\C-&]&P/_{2X64l&u]sg :y4\d9},53ogXX 178tD;(~-4V*w,q&Eee.=*bY\:_ss.AW-~fնT\7QMMm_MMyY{xv BBUeBIc)N-R@d}y1jK3%L I8iWDCjsnzj'O|PGo/؞gTjn;)kӀRU Q¡ޣ=Ǣٴb+N4*)[[Нa[}/lE-BcD8~.4.lvꇙٵ1VN0&h>`}~tѷx)AW#Fc?>ŀnY :<<=kiSgLWb?3{L\nZA4j.34-v/W]b#0e(VLр)qb5cPyQte+߲2 -p43~6_FTqs)J -Y-#{k)ZJ IΤR!-Ma0JњW K1H嵐r֧fӹf`[M\CBdi\}l1'@Hh|!i@v tz AӍ#]JO. B8_gB%'g-}ƞ&!]yo-ܖ!E@qh=oسOVHDu_rbu1OHɹٌN蹯1&A2_4K_iKPJ69Я~QyyڏrW W1fݫ,ֻ6hF% [#\|SfD#KmMkYi f -2m8n\l$}O9n]KsuϾ!]'DWɵ+<ЪWXS'9_F{,VF>6ZPB+lweU]yFB+씅3 B\k2e"$5sGlWam5*ONfQ[xeui_xe4MLWFZyeUh+/QmiS^>nxe+L) #}Eyc0Ȝ|+S{vy [1bGO+c޼2^Ԫ9\YSUD L-G+"?w<]pe7w(`Pf\r@2vظ>̵u,{V\}Vtʴ5h -j+]c?\9ͼ2E2 p^0f7L%0KwXִ*,V`}c˰_,ВPX<=2 O,MXdh4|g`3&llXɽCLϰ˺NdÅXè\eʇJ,&kD7_eV|khMy 7+…Xqg˺rqFe/%b; N[e8ɰL,3[+@* mWp:5Y~6^YW~Oju]su/O2'rp_xeom)=[LwX |XB:޴X>/[T6ʰ+/j> *sCVm+S&9Q^nHmb+#׮gH(]ye#)fa*sNWqdo+ J6WE iMK/\qeU3*=g$,2!YGOieU|@"VDԜl0ʪW9:ZHdUV q؋2$Ź!3  uG؉VҨsL+R/heh Zkaΰ2dJ85)\ae LVxݛ`eM]g02'm>Q VRMûcaEI=ʐ\*Sb6&` V̬2h*U_XeJSwUV4ʪ&{ai3 ҊE_/V9ZgVna)__XeZ波ʐd>&@)kd?+ vGfRڔ`_Hep]XF{zz!IKrm`;:{e~R2Zr Uͥi 5 - ͯL*SVLuJ*UN,2X1Qehh*#cV()pdUfEJJV`aXυWFB ësuя VB+]Te_he~*k{ Ov(/ZY<Tieyt3?Da+LckhVFcAf\+δ0IYieJ~ o(.}-GA܂+SzOδ2%=^iett/l2]fZYU?1]6[%Jrᕁ$rh+Zqx:fXYٙ${`e|,aA]BX+h+ӏ  -+ӯ\UaeZaeeJ^`eUWs L+ʄI!=ZL+s?VtL+ל}+xfVVD3eVZ J+S[he|I{ʪ.kF|K걐Y`eP@\-w?pʀ.rj5h*VFWf^\${peJdWNuvWmƕSGlݥ+L;zWFǁUV2>fER ^g+kU}+nZ/g>e#+ L1^i@8+N|_C{xeXI7-\eJxu -+p [#+kd0 /C~ߜep`%.2Xƈp\_Ce gbXj!1\xh [#K h԰ވeڕXMdB2}Xֵ>`+F+qm"ȥmIJ[ -O߈eԽs%+vuF,j!b[(2Zư6 Uc9[>@ű<0Sˠ~'^e]wfR%lW/F-)X+-͒'`˺G-i`t7ޥZӟde2ƞڂ-S^]e T{fjYǔv˜ZywkYe cV7[۾EG:xlbh_e&]e{U6b٥@0]eTǤ(N܈e}vb6\XeBr%aQ#L{ebZv0XFS7 -vbPm!ivX@o2RٷI7`Yw7`+,7:,2V,c,#`AҚ37`uÏnq9j˔#فeI|v`Fgsz,Vϱ`XFzlaۇ -,Z^SKm2u{AW۹,2&4|WbYӚzXF`,.6`NBM25ּ]e&gg݊qYyYgg12u6h}wR4ƖJ-^-Ye75VjA5 -Vjx!g)kVhBU٠ett+ t=VhAcB(&-5Y2- Z&d\e$x-x ZFb --Sfxݵ ZFc(PؠeaWL6A`aA˘G-cq^eZ,ͮ+,iX>5ZeiS_exVbzw?"d|U1H6b0(#Yga(yI+He7h#ZH-c2u/zذeO onQsb䨍[&Own!C}2YE-[6pWl294+ {cWWn~Hy Vny++L5-z-a06nTĕ[&ӑwo2R -r6at27l9:Yej.|FXeEE-nO|2B=_teXzy!Ջ[֌by˚x̞>\v'86˪+ˋh5kL=[V^n*+EPAk/2dJ+#&F+!peXHXӡq𹻩N+vӵV6Uhejlŕ++pr+x@\ X֙vYB%&b)>L}ǭ^eGJxe)H?ob|~˼tm&eX3i#]][e'|ʥA[e,4k LC۲F&3R[rdYk L0dcOgg3vEjsIJB,*D^IJ\ϛX6teY.؉eЋX&jibBty,X~GՂ ;%|vlY38Erm5*&6nlpܹe3:{i_ \-}qmp$/)d-Si|q˸ܹek㖱{쵵/nNo2,nm2 - --Eo{qm9c.a][_Բ Z*F-N->ڂ-^2]–i%7c {l=-O+b~ [Fi$/l}>0[FN,^زڄ-Hl"l2i54ي-A&\+ Ve.X;'sbe9h@I Z%七pA˲ BHz:zhMqmв!B[en~(uߎ,+iXe#BuvdL(VelE,t'IevLXvb㞨ىel\Zerc܁e XfXfd ^2\o\L|Wp_2i+3\A;L7\6jcxǕU% q0Iye8 X62›,3^7`l2[b|N,ËKJ~/b񥿈eZ,Xf5GbCw?obYz _Ȳ+x6#$ YFMMώ,tkȲuwېe+Vڄ, Ygc OXeǟ1 cb+?+֯>}Vf$H,ɡ~;kYf`0,3gkd23y&O2p*ڥ@iQ*M2CYɀS7!t[zC*"o2)ϵ Y Sdŕ]{epf+҄,c2(a,6fsl=o1b M,4w+r͇S2ҜߘeԨ^2 ٪*-2P'^+bq7b-صY&3i,OY&Q/f2__eRٵYe)/hYU-kDG --H6e1-㋹,C:rA˺QHC˴ǾZHo2VrEBQ9[Z&辠e} вLeĻ@dcڥZVQܵU۩eOțZ*g̶6jY~z/hDxAZT2߰Y>VdbIHof\ڙe̋Yow6fYl{!|| Hz Y&axeGK.dŀ[2 orG9o"Yv[K ?Pd/饵.M2[Svd,~XeD>YƞʨGސe -j Y65}vfK"V"iwX|!!wB,H=Xv=:XF͚2CU[eڕڈe)lIJ3vX0y̲v^e@6f\Y-FYͥYvy*dz3z56fC*L_e wuתY2,.ɍYOg614.Ǧ2-1$_\eӹPL7_#dL¾#t%_Ȳn@-Ȳf!6ddrBA1[e{1*f U+th@2- Z@wh>ohY1-2l+C4вnyAJ~;L^65wrm-åț{_в{gh lЬ>ojYP3;L;좃Zaarvj>/j|KةeeVuݩe9sN-cwh ]77j٥ۨe?c/jՇ [&?/lhn_زܱc˖K߰e͝ZvZ&!./hK-#ur̼+ L@dq[)YVd>-̲2q{vf|dNM۠ei,+ξk3= Դ1 n`g,<$_̲pbwogj f,2&6f /xA --9Ia)͖^вiE-c[^2D-ԲB잝ZVVQZVȜS]evm2,c-b2 0{eZ WohY?̒Ze/Բ|<֋ZvK=2kO:]ZeSZ!Pwjv៝Z9 lQ`Z%D-Sl/pY -.K%%fvp)7e&+WnYӵ[&ӣu|vpi 2e7[e-2˰F.##u#)#kt%A9} m"QC?\Fٽe2k /egeSM ^`z[yF#6xAe\gRwxY}wxYžfxOnL'gwxgBaae0}Ұ^|n`;,hz,|ˮ2L{^첋Qٌ1wx ^&Cx/aI/XI^v+`// ZL\vzYz_ M _xp>eTŨT+\SƗ'yj25[e V+zylYUGvzyxˬYclr>xdIe?7|~^vh.!^v[nuzƗEƗ3/#a&;o|<@Ve/;K/Ij;lte|=e;E/1f+昝M/M/k=Ɨ=Io|u,mͰ`G&a<~9ml'Ip7S L^( -|0.u ;ދ`u "[fGaV|C;#̎07,`v`P|KĿ?޶5f 0 (~9eI|Hx28`4t `6:h3-f2 ?FJ , f i>$}鎴_f).m/J F/#ĉA ~Y=ը<˞7l{e,{˒\|ŗ08bM/W__>V_eG,^vF|D={˞-Գ^ - L/kZmo^&~l[⏯X|]=ozec:dXna/zke7 l=K -EL_uZ/rSF/#Y%Zvg9?iaP:g~*|HTi\{e$+RU-e0$/Ku/#SUEKyzV~*`:]{eJ2Tz ~Y7kV7[f$~f$,!0%jC{f$+ G+YZ{ -0ÙaK̺2"̺֟9|:lC0ûYf5+d:W&HF=`vkP3|̰q5KoZ mė`vkdWԱa3 rJ05h]`vtvɅ`F' L0#4)+:){fPǤqC2  n01c$|#L1;_PxP}rƗ1Zc)GQ~YeX1}m˪we(֨j>e j7MB/:F^`˔ .w0ːzNse`8L/)m)2ڠ3$4C/IOYeĺ3z̶|Ɨ)N NJ_g›efF/Cv~ il/~ߤZefH/C#3p\ vo2=H L9Dv!J#]eH2Yep` M2e74Nneh3_0XhkPqA|@W Ϻb!h Œ:vOrE]e6\f[`I߱aPiRԂ6#.af V٥ -ل04»_Ezص R!=3} G^e(G?˴3C_F9zyA-ZiV~Yբaj͗ݵ/+fQ<_VWb_XJ{K{ł/?+><~Ena-7jV|YYG 6ˊnrQq0O#q,2dtQqn:CA2*qs0? -'w]3%f6#*\ flYk S<`v]W4KoZfؒXfv}saeC,V,88-a Ìj 0(G` + 9v:|XfjW=򂴍bDdkŌAF1SA:}R)fZ+5ŌU50+Ō:U+Ōx%(f4mb^9_(f_!fgb֠w](fZ697Ō2X)f5GoR`r]ӅٕG}|$3eK xbLT߾c!݆w[2 b=4Y?H1=icp\I# fm1a c^Wk3;0O&De;-2 cy O3C^p6P4UYbv!0 a_v7uN:z'Y ZudF#0i&Z& 3lb7J"a„b,D0Msޙ`'I3 ͓3T 3?0p6;D0Ûޟ fQxZ fذEX })[H`*%7' 3to{'V=0hpوN3пpdd -pa` -ahHDaZ2 㛁oci>;p-clghf(KؙM,3mH2kLeGg{g~O I&Ln^@p`vT{0c.7x`涉`u0C}1' m>QhD11#Ň c}rڎ̂1׶3 {OCߙbVrkx(3 ;Ci fXmd6ڈ'Y `X^* fHhc1C9=i b8Sj#׻R}3Ō9L8f8˙cR)4tY5q4< -II&Y,|]9frsL({r<>sпm֨w!!2E&k4^N3oo\8f0C# gYUnZ☩QOg$\3 .z f 2sp*U TPfYɂ2 CEǎ2@ GeƝӸ l[PfR^PflЃe߉klIfb}!5IfrW:LIf=1g=LHf8>IfǼ!%y3 [k"8kat` LXeV ,O4)tamw^Yb=b2&v[ -xf%gлl㠅eߧǜXf+f f&&g/(Pc fDSebf,.bfmhh6.D3]i%Iqn] Gvηz,L450)͆n4x -4hZ-@}-i hAhhaq |n]oh&v6g% }̊3 yig&O3Lri3+}- όC.<37IO43%9b fFB3Á? g|CPy"jK L.ަągvgG -+Ϭޞ`13Ӝ g%yfW}_xW -Ag*,<3Zr3ό2f`]eFwyf7&NЌd2ļf,v{2zn^GfL@n%< -4f/f2F՞fr -4(i4 G] iV{|4vO[f\7T4R7 L2tiPMYfǽX!-@3@eP444;mkZf&pH3 ԋ23ͤ/6,LH_fiDЊ4;4 =#ͼ54]+lڌ4 Ҍ=vMT'Wf4P͆jB5vCP^,X3@lyl\Hs54\34hikجdq~亀Fx -6+6r<5I|ik&e}~ g{fRvfiɴ_.M`3 zf0I55@LK5]f͆TlvieZ]1yfRVܻ,`yͤ jv;͊+ ;\ޙLfޙk5+뚿.qͰ{fpԂ5*]fp9c͐l2 ǯF9MPf8,Tj e|ElO(3tGr2kP8!Xu0܈2ca;l3)Sʹcܸ8K8fM.q -zֶ0qpY1hHa@@9f'j3 QtY":mD2SϺ>L$kHfWbfK#3$ l')3Ȍt~ di#:ƌbq UY3 1vQ f f\lv=%~=j-%N2C%6b&7[~ &3g b:.3,fhq&0;e470έ w L?2l󤜕`|f_ fxv%]@gZ&jL0?l!j #Kgմ2-im"Edfi`&3g2g*#r -eY3 VمTX- ĬTWYĆaV^[fRfeCcFŅajaV44|}ɤszYdb&d&16 3ڏ03z0ƿapa&= 82̎o+ eY>!̔ `fce豅a&ѕa&\%2LKeYdE,6#̪є_fխg+YZfmu&u J0kMUf-&W3n0fwd-3xY>B0,Vo03f}}&qɐb3LS? ZVm^+ ;0eaFf":mA -0%4S&?1a;)av}eo`0s0D ¬#W٥'_faU0C7UuYF]" -'Lz n3?B"oLi53}p}?1sdJ1R"e 7=Z)fMտ>Rb(@1bvG;J1cq|}y^-ŌhMK>Q"$c5z7)f\)f(~%ل1Ê9l˜ c+lc9}x3? mGFW K/lC_ſoBḺ/_gG_o}$W9ӻ'J_z!mi!C0Cl!q|CVKB?8!*\Xv?!JM{b?f2C`8[?hdze"|cb?1A>韾!AAr1|1ƉO!?b"Po'?GL)q"| \OL:C|l8D?18y-C|ļljO!?buD?1}?eϷGYD@t_qշް| tj pa"_ч?Yo .i۾!x+>𦰾ٍs~ Yw~-pKokg?q}3hnsP\C}/_?^>"5߇h쯾>w;o6~S-~fSOO~M~f[f#gw;h?6o~1~lnof}nװe$/[wM -oG}v',}ٖ8~g?bQw7G}v ,}z~ݧ=|߰X~gcuw G}2,}ð~ylG}v-,F|Ů8~Xl?bG.>Gď{X?a@2ӏlqX\?x׿HGE)ɈB" /!M_/Fv|!ݓo_ӷ@sLEO}-tA!H'obkO_o_tw'Wqׯ"*~-wWq>\>ŇЋ`]A"(wE6TCe'7B95[ߢ5o*4~x5oQnZ׼~y uk?wF^/yKmI>ÿKB;> /yHXr^j\1Rt}/y ޚ?d/=;ܓgC}FݾۏX Uoݚ#q4wؽݾ{7Ezѻd1[ہ|3U9n:&Ϯ]mZ 1JV"ZE0{`%Jm4g,b7A0bձG#x"s6 HְBHAx;m& Wj*=MpjFiN1~?WЮR^Dx]z5BE:,zIU!մg@橄(N%?b4IfArnuj"/͈YRj -u)t7 )ԈTZަj7ۭWŒ&gYVq*ݲQ(=n(htoȃVj{<{OlMȟ'S hG)S6\(dj >"ZNÜ_ٓ`B h(1jf rŔ|tAPUj |)IZp - &R;ۨ9А+B qUңa2 -5Vnjt&a?5/d㱨=d8Ms $ )r蟼!| )Νu"ڥ`XHOTw -,}4d;.5 ;Dk">4Fv1el 5-8WgV!.fKn9NP -JIJۣ؋ND^6Y&4Uǧ~!Z@#DOhlZRG]5hGAmv47b["#cSS37H#ϮحAgQHSa98fi5ʪ"$!Ze$`牚 nAw9 !2MINMsD7)q$!J"jQTNlBj'nmBLH'NDns<4D:ϭh%oAZ.~GjOsEl4yԑʟjZ dm)ȣu.p}B[>aCs|8 [yκYфx5 ,̫ʉY[? K"M)[jĢ$7 t6P,Z?Gwꗓ2NaVqRw[D&nso~l= Wl76\bb۸O~QJ5d0v.$9vSaa vj}"FsU#NYPnf L5>KVL0J@jBkF\rE8hVqdg5%QPΞVNMfEJ.%CWp`=r+w;#u5n$\h} -݉ˤMZ^`'G=JK ԑt{5Sk jX҄MaŴ-{H6.7qBC(UnB4g;/{]PWhw_p_|g~@Ctj͡IJ:R{ !ۺw}? 'il ??82v 0[jfkФ_Z$h2*nVnZdRJ0Jn5A?BGvmAkEjbabpjgǓQHFxhvCM_hY_sH$5ۦ5 d}ݡf "OVjgMPS8eqЪ EӚCقu9xY4N c0ή8HZ~QScE9 jڹUKmiQ6S+-a_H0jrm*RLf&VvdpkP_@<u2TL6VԊefL={dI" `Zh4u 3((j20o=_aC,SEMw$N^zEbbj#v\WӤLO~ud45|֗jSw%AQsNA{,*M_'>4.Mx@Q bj~J$;*:Zˣvjr[1[b:n/#9Fs7}Lҭ2Ԡ0J7$Nӊºu:7 C4CSˍ}4`usӊhWt:Չ8x'Ŏh28m3 -(V,\1uVRRxhJ=Ml@rq -k " ^=0!NZ'BuJ(|J=X_qJMGhF+AW!.4lAmX'RS %Ɉӏf' 5A{0h)Qug;'7P /^2@7\kZu7/qf3XtAV9شqQ"LQETZz+wtM.My8 u0a~ɓtqC;D6۸/4]K7{0]Z7&?Q5=h=1ty ڗ3.X -'HM}GRSj_v/1m݆ Nn -}#T [0DRE>4XwP;yZ7]q Tĝ UU*+kh]C-]:C뮠/1 ;G)8YIiZmAR_.n 6 -?lA KJۂ -֨1FA ll -ߥVi biyHĸoӊQ_mA`0ֺ/HKy*W9Cz4/4p [ɽ; -8(ӛZ7aWru'/Xw{h -p4 ->6C릠/PGO ƣM> :M~YӺ)x!u=䠶6i -j`-ØïΗk;s?WP!}[iJŖhr;ʭ.c}MAJc~*b@ hVyD%7 -RNTl -~acw> c܆E-4X6jr],d5X -N>eT9=4٬N-Fh}q)-Z|߮tR 4Z862!/Ã>hKP㩝VJ-x4:Yt4 r>D+wMA{`qԆ`?;μ5oŧY0e:\A$R__9z9 e240 -]A.a;pUӺ+{xB -*6`,+\tqӔKh^l_\Aaml{p8(0ZɡuW"iHYsnZգ%y<4ۂ*vxLn jZAmqRjߡ -SU 6,)+ 8# vwP{Pnwa LM XmRwdJ? VG&D(Pw7q#it Uװi |Hy^.S7;gl$=i F֌&%ukM3)AhcmM0\?4N֍A7uw֍Ah99mBU,nZyD.έGn=n< ۏ֍A}NyY7=Y]&ucSpc4xa =۠ucY\1Ԏ~t]:֍A`$8,mT,L}f;18GmiZ\Z 2^Š/, -|*(UҍAXr0om ĕ(ōAX_6PESƺ Je=lkZ8y -Z ]y"B TPz$7G&^轑;Sn˴pas5A kV`Dn JZX\⾄>ޠJ3ZV[a"|fh Z -ؤqѽuq kj 2\Oh &6ԎnB~cUO;vT*DM 8'bm,5B -w*Yvn6ojUyt6B7P Ԏrq| ֎iwmVk y8~[?OAmaoB w˫gy6ՠn Zw:u{P)N=ҙsvw{k| -A$ evz{)=<~^NV [mƃ|#̩}^MTno ̛2R07N lg#-Awy Z؃0G hXs$)AP>ꡅ 9jWwA{F90 ;\8]vmU wG=;Fb -;ܳ-A,.-V͆ڰ&wyA]+ݺ=ZKR UewwAтwTz6-A1a-4H-QIJEn6d( h냇M23A:0D*]Y$rla4,cebGK  h;Z؃eB?A(hxC:A;hhZ؃Iiun/ hFM 4)7V --AXJ$heqo5[J .07#tt7ڡǴQ\ ]x*fuo5딀NAEl[4l69-AxW'0Qr7Bk3hn$ ő{o9 I}A h\jK[l;>i&Ljgͤ0Qo997]ǃ=A-9e(nx/qE%@ o"ո7&AM2nE*7:1{a[^ARVaRx(ucXA k7!AZX3 55_['ˉ \@ k?~[F0nݴ0鍩^YjO sUѠ"h*̶V]rA:5T otܚ?H'mZyASä`FS(2VyKwzy .6ް,0κA+s+f!D{ki+7q\*zk)RҢA1 B\S>%j!|b]ӺA] #kVA(>1/BしۃX5bkUpdž?%L޺MRB1# S&A(!lG eϩ$Fh:12XqYZ <$vHRwiG@ >i[twCۣ؉†"7ZE&mu}pa3zcA];/ kNMBŵpqA w4|SLuwPcݾAsc`_4q ˆua"OnbvtK@57Qҩ4)W/ ? 7?0B;Zi8r;PC8Ha&5r564neY3QʔG]Оn j*dJD G-r"?M & m ǿ^ jRl;iB@1-AФ*9Kp j%䠅3 A -Az#U7g%"ߝA)A8t< 2g54-AԞB[K j QWm8E[xfmkQY}ڽA".rM: ߽AԆ#Dc@ o4U5r7<~dQ+RI)Xf#ջD½AQj &<DN =$ -ͽA<<$+53n &ł3A k5M_ hMѭAd~6Q37Q.Jwk4,ZXh3P;vc%?,V-AU%A3f Ia w ق(u$yQ;5Qa,=zDL j(uS Zzha a9.r-A}A*h VoT ֘ Mn H `>y.D8|gۂ7׼Ƣ .HDZ -[tQ{lYj 1xDvaQUQXX-߈w_ØiDMf4; e^A0DlM _#El '|zUj5Qja j: 譨Z؂'Ӈn f +mcr-lAo J8/mDHa ƦCo1R 6/4# _<8X-2US!^*F'nY{0 _SL2D'nlZe8 [ z:la f3QfB@Q[eÏ0<1L:m(L2սYvӬXvkXȻ!D,CG \cf4_ n"%&b.yeh&ׂ,&w Yb댉X -JbM[ ~{W~=W+)mQ\e7zZ;k):l.,Cˡ Xƌj?e8B2TӔD+FW;˴2fWAʴ2fӟQR# Ũ:#L}c4>L+lz>߉Vl=z,B2ʠV[VMNz.4Diehń V &C -linV N O2إPkied 8heѠ>#z.~+?3 ,kqe myX2 .)l"ʠES]ƕ!>Қ2 ;K2rա WvɗXvv@g3m߲>?Zz#GbfD,C2}I2H2EK=:28^eHhSX7?gb0A+=)>ːLN;1˘Z_)>mԗeL 46Bh r1 -C4oCh`Z iS e#LDבoZp\"(ԾLD6 -D-G D-1R~z2gfZm`'%jAJAM2H Ҿ-c9BZ0fhW2 [}3 Z@ -ߥ;A.Fu0Ap-CrqGh$9“e WVi=WHm1^I=&Zwz84eNL{6#ejҮxD9Ѭ]0݆w]/8$:Sː[/UY>M2dk,vV# ZRO2 g_ $f{h -c3 9_RT9 AZEnK\2{lYf!7,cؽTV%fV22.B/M2䕠WfndR2dݷO2 g뗢6BxmZ-R3b@)J2ئKu;Q= 1SːǢ͑ZQiZ+6c o: A'1q9B[g>-IjI2Hr͋67gnTYIkL{1bj Wг?:"8<4׊gr< h"[nM2ps#:s"y"!._TL.C%WF7Ъ͢\8we߸. \eK2xn61xqQ6c&pٝ!\;[2eH<[-#h\p'pf| .{Fs=tag&nwIe%<4-C-SH2M3a:qrbWaZpxyP斱==fnN-DTܲBd -酉[VW>-C7"[Am-+\}Ia3 c63udeL[.k #LkR ,>.cYF{'tRavSBaag貒33K%x:fOXn1?,]0ͲqIf"fQ.tչ9 ]G5+0a ]kۍ2Lr2M2w\{"naA\6&(&haf<èe[{3 @-4ːڭ\Vkҙ[кw-CzR5rː"j+{: -FlZFeM1}Դ-+a}Z zHe2.21cɪ˴-Lw1SP6R:l{ZG3n:rJ=e1Üe(9I'w_U$jϡ-CF*mĖ!PH24~r;/sz]~Xe,PNk-q#rriU!֦ .CF6ugZƴW?.C6@Fpke2e剡\v;«2 d劺<ːxpd .CIV\ -'8 r=b>qlSÛe5KA=[ƌDX0MֱeZ-"cP]CM5rjiEm Ma{iZ6!6QB; !egĹi>dj -9y6oO2rj2q9uo8?[|'jN2!JcZ̃hj# $ZV-k+Em5l611cФ{k uf%;aФGxi[gl*9:"[hq8nƖd,CsW e\2ϖmiY>ô,Oodf٭ SFh2 Z82fKd&df-e%b[etc]fN̲f:νYbw(gfdf,}e\4̲-'{bW)?Y;ޡIYvʳ":3P:{@ S%Ӻ1xӫ2 ɛ6YJYFF3,C - sFwer2Xc!i(M#y޷2 HflN2=[+CrH_O1j5Ps&ʐm*N2\UN2 |k䕡uӀ+Ck.B2 &{W)_gHWaa# <2Cdy?+oVj=9,- <02G\gseĕU $Wϕ쎸2N24ch2̉rƜ5ʠ<%_q-2Lbbaڻ.8ݰ\>09# <"0H=Wper'\b 9 L2|:uaSôHgX粏2HRVVV5FZG aehK2VܖfX4y2/;L2ȏieA1yu=ʠmie&ߝO@# axexbxe|H8j{3O< ^ 2>rl#Hlz .E: =2_EXG`D(x4{Դ|pz ϛe7&,fiZ#D~ 7 vE|K2VO#j@+>W&^f2dIF^!0jGÆxe3Z]3 Ʋp+9ӑ{uS+Ï,5w$^~ggbRPڽ#pH_֋W~ye8Tk贑WJ)ѷiWFv6iWt=j+áW?ʼ2"iX䈔 ,C9XS#Y@\Ge0[-h# ^ `CxeǸe^Yg1&΢މWVnfL,+{eSG{FL2-d=ڈ+8H~ ˸x+CLٖqeQ#nʴ+ %\L;ܱ+~,+υB@ WFdsqEƕG~ƕ5&rƕqe?L2`'\YC- D+y3': uChe\) V#ژie틠D+!dC0Zv2ppqڼL2UW\ R iW EW*9pn[h+kLD*che<%q13}O2XNu&ZYeN %Z]|ʹ2f7lO2}δ2'Z'L2FXaeh؜2ʎtaeñ;u VY!ôV&_FD+Z?nK2lZF3l{'ZS\/K2ݗ5iƕ[& 2#Ƣ.SVɮbZaDL+<~'Z,0`*0/VuX Bod'X[U V|<(2 #20~!8q*quab1 -1;*870ctʮ_pk3.kba;_ӅLXeܩm`!p*+cbY*-ugfZ:hMjD+Cp9mN$hehO -̒,3 =(;wޙVƕwfO2<%he8L+ m:i $nUFc3 [ G\U&#ULXew_sbuRYeر|gbQy,203ʞ_@u6-6PBǪibYyabaMމUT3 kN 2z1p*2 ƴ -^_b=l>/c%Vskˬ2l 0*Mm# aď$Pكյܺ.ʤ R['R\d>6xgR>vL2إ8 iv60x**C+ɇi vuLcc VḮ pN2)`%VVq4kb!K%TnxPeV2 cRFɨ2>G?*)kZb#lH 7e7M! aɋt2`e858˕aeU:6:W3VpsUKgsVFa4UهL2NygT -̓3 @i TqLT@33R ^TVh![He-;ʆ<T& ˴*kT֛N[N)4ݴS )CV-'die;qp)CQ3,%M2D)ZSxAݻ8e荶-w_ʠ@e<͠2gPBPZ4j,2kUYyӞAemNFw/K2 C_Ϝ2yfNǷD,`$ty~!53PHerϱHe:rL*6QHen6̤ˏ>ߙTHeEwrX&=Qt+f"VM3LgkN2͍H JU@ezWy!| ֲ[]+<˜20pʤv)+zH,);a\8e8s V$Ԣș9eG )cG29eЛa'P۶wHerK7'tgR␃;q,ʸnL*z 3[/231gMPe~L*d9U3LWQeQ+ SSͨ2Τ2);7z$q CL gRLlO L'XfR6fR.aB*7>3ʪOJ*ޕU&7'ͬ{XKgVن U64.2 F SUK2өsB=\0ٳ?[V:A*ǥG@ogT٥wȨ2n?Qe(*r7QeLPekFAYC3 >'GVRͬ2h,xheh<aae3ʴ1 +#ʠ V#OE"FZ驙VsoN2DRkA~]FieB͙VdZf{LwA$ +S! ஽fkA T+C2h鿟Vvq?YVZHN+v8θ2QZu=LqYF\;4 Y+CvnA4kA ,9hgeg`bO߉WI~s2Dh?܄qe +- Wcc+#~\H24F! WvqR-ʸ2PQF׈+~w•!J`UƕAj5`E=j# Εi="u^)Sxe ?z6aAAz,\ƨqe$-@Gl&+#3°r]Hw3ʮaz'`ٕ,XFfJj1@,T7&<4qz2M2 B1ˈL9e8#ҩdeX -he40?)O2&iz0*IJ3 k웉e\I{&asD,zD,*Xw&,xg`gwaV,aXp_9Hzv X2tJ¡3 6N2MG+Cxۃ2u6ʘ$+ -|A敁MV 2%6Z]G ,Cl2L,CUݤXZ47x:B٪lO2ӝĦPK2M'ZTe:tFH2 .ʉVV5uZY:2 =xgZCߙheie8g D+C|L+7u]L2 Ȱ4L+KݴV'k9`e0  ؞~ietb?l!L+m1`ޙVyVG9`eVae0t3 Y3 :Ȩ237*Cc+F#Pe tow8n& vb}-åTUvΤUMǺwfSq ۭ,' gV33=O; 2 .) XeO%Vx~KmĔ mj0cV@dLL263Y?aʞq[r”aFڀ){c StYǔU?bZ`xi4a*VDR1e?Ș2X{eƔ'cS0eHAC1eV5N!ye_U7I͔25ۮz'J~z(e0ˀ^N -R&JމR<殒L)ݡ9{ʐ1e0>)ÝÃ$} xYj]!tvᦲ2ӂR<~H2pZ9`)ep{;Q*&Joƾ(eL)CPR! 7<[%F䩫!2DmJ53*Z=/3`˗O(}G{V )\b eW;w: q1GJakN2OfЭ)SGB”/c26a*m\ \5bH IS-x sȜ24 )C@GdNeVPoQSYt8e Lh׍21$ZǕD*sx-D*Ӹ,7gRYc} X/N2 -nZ qY\ g 2Xg``V2X!j:0&Pbz[5p8ehIx",sZ)CO5Ù9e"g@eҕTޓiH *ã]'P0fP5'ʊ)CBmȜ2+(MA_7rа S|1~fS7sʘSSvcEW9e+44p}4dNM*΁f5rnRI9>q4(sʈiZ? 9exePN2mU;anvz)GwCiSftkSȗ*c(M2<2za@ex7Ӻ-}Ϡ2$!8ؔQb7D(-sʐ<ɻQ8eHDX'N҅m76rʈiP TcNgPQ0ʐ&(+~~5%Ae +ykɠ2sxI=ß! ͙ eh6&C8s)&P"Q;jၑA#E@P&=hw#aq#oUdvG;'Td UF#Yk7PtN*3QiXe1zw "H.@S(@k`8hDUɭnUV痌2Rv{3 qtM2܉;MIeДQ# 7CQeЮ'R3:#`e=:F09eێ 8e00!=qH8e:E qNHiKXEN1rW飕@eK *œui! -MN25E%:p*-i=@*;x0Uo$P.e$#`oOFm`w!mf=l$jS\8e'y #D)H*CĚTw@eX;̪Z2|* "0'O_nl0`Y2 Qid);a@3 /g3 yh "yDCksr8 wuN٪ugN]̗e唱?ۻi=28eoN<\D_"%3҄[#ޠU$NRU*n;."xHtqW63L(Ae4;.]δϠ288?Ȥ2Ѹ%|"(_fWR\0Yn&]ǖT7u#ǽL*H*3Zt$RcvXN28jvL*3Fe$D*EV&n 14H*é}Wz"Oe!4z"NyW3˸zHePl@N1DI4̠2tCǵH;Ֆ T4yDc+ G`38l# qb;U5bʐ&VILqDp,2NQ!OL#GVP=jM2_*+ -ϻM@e(Aew!,AeX8;ʰ++`ePwMe% *C0rѴHc\\I2PPab"xbXCH p6&p;e {$fPY3@e8WJaZLV+T1 6)@e8uݟR2 ](PV)NKng{ )d7N@e(Y"!R?i eNGdR/~"aBf"|0ʰgn@*!&6'RvdfRN`vN2Xr[UkѾ3 %TRM8l$PKy-ʞɬ2l\YeF`e$p L++ g[`2ƛ#kd?Vǝ@L2}~߉V-"2i2 o:4F;&UGZ>W5:Z1 +C -JD3ʐ^тae8}<o! -@~,=ϰ2E&`ehj?`y +-)4ʰ/rzl*/8Uzs2fVk]|S~ +Z] %L JŲ21)dT KWT%UVyFd UU kǾ'Qe헶%TN.%PS/?%@eȊt *  졣b󗍤{Ӄ J pAer=x19#TpcEL2l!f Pf k@*Y JhHeXjnڀ*Fń*a˙T=-ySa3{wM2CKZ&(Tv&^\& )FRw]%RLvi" L*CęT&:v N)x6ʤ"UܜL2kaLK2zά2Jcc*+bLK2=׽*;i*aPgXY$hf vUvwf_Xe8T&iT )UE -72C/2t⡊1ÕU<+~VVNyZHemO%Q{R#z -z%R3ͻ}?TuIe-soZ"aŸ~*Ú :TTRDŽeTVHx^xA"U;LT`"Qsu%pT0NK2|cZ"*bà PYg*a+ .j6ަ%P'f\p%avTi,o!!$K;s,P^%mEAgEA=z*C?} YIU&lU&[LPe0v#nenj VoVYnEzʼdy/R82 @&~yXQe2X@\&tg-2JЂʨɕmTO*2j=XLܚIeپ0QӝjTFܻ#]VR# HeOzhWRF2,e: -*IӶT3ޠԝDFsTa+LnT޾BAU LqRʰ15@*kIE\;j{Eɦ`IYEar* "mOʬbCA!~ݴ*v[ʶ-b T>DT -QZyʶ6RUnZAϤVTj>@Pj L f:j2.tTTYϧ+L -/TٹG UvˆU+34mDB-+Lf4J_UfiUsJVV1;Xͬ2K0Sy+8uGVXemL+26թ^2#8sƢiZa{qk* /V,tʐ˕U?VV٘ iKXPe\{N*C9+L<=Ye4'Xe{ǭ2++L2$V٩xݴ* {*˯+7+u2TݭsE+OiWO+GiWG++O; WlwuzpeQXpeO?+3_2tf WM޸4⬸2 |tYCɛW/`Z}cz_~Wvz+;cƕ2mZŕͰW,[{^2n^aZ•F Wvg<Պ+ɴ+W+ XYye`b+lgi_ -,,p܁b7IR^2:}啍g½xeVye+kZ>+ &AadѕW6MHo`= LQ[eb #xe=V~IXւ"5ڗd7Mw2T+e)M,ۮzIJ㴰7LOkxzN=q(YݟeS2ݫ(vedToed67l>e ,d2} - 6_dbodyobLM,eVfu,A -od,aY&J^Ȳ>2yO͉zA_Apz@fe - <1F>DA>Ds$c"|HhkW?| D-ԡGMإmL#|7qQ>oQ>CLF??5ʿ1tg^#ccVe(1Tv#Q|?Cwn.F?0l F?0;>-y[[S^oC=}o^𙫹?Z7/( {I~[ڷ߾'Wd]Sڶ?*,sŭ^45XkWU߱z7Uz-VL1HgeJJgWGl?|8[š_/N~qW󳟾}pW_枟_XWq?}: ܏_/~u~Ggz?}:)O_~un_imZ?Cɫ/ď^}:?z=WsW_] /Ï^}3?{6՗s+OW8_o^E?{HuYg: ޮ}x!~˩^x.~m믞g)x;+~}m?fjx(~^2j?Bxؿg:~f4u`hgohE.nC吒/m_`/)ZW8G?1]BW wgo\ow<ѻ;{o\_]"'|C6|d1]2X|cK.% -##K 'z^s |;30{.qrv7\DO(l+r.2d/?- 8r }~5ǿ -0d|,ϳL#}o@׍z2 ';y1i=So\k0~׎;eu1MS4ȝ,zZw]^_l߿u^7Tn}fjnh9$;+혉yj}UZ$pǁ3q)Kn6thLWMF(xR#q_'"q_~"q_Gc)3qS=U#.U|7OWl"q_~[HWZסO@9"q_qA}yPH#UkEjr4jm<Z)["v|'FIc-bU 0WMn y}Jvp}Uf8"t_%Ox}CC8с~kԤ)hOM`# Dyj2[ZhZ5B =OMƴò[!ƾ{W$KW-;"uZ?P>L}ծPXh}cݴHݧ&&uM/o}0ꄏ`þ|yjyJm+ 7 !o qQLU)RUy"u_.lv }1-BU %WMVș}Ր72d1A$95=NrA}R@ƛcEƛSҙEj']3t_5>&EJ j>M}jW[w-RUԣ25<5Zv<3t_XL?}j7yڅhӴHWM# 3t,lt-RU$HW-("3ByJ.âv}հoʹW-c"vS6=x}y˴W uԚc$yJ --bqI5vwWiF*OY7-rUA!CMĻyjNN#"v_{<"v,R,E>5&_]3v_Ԑjl>ЫƌcOMV;H+ehZ噙IݴWm +r7s)=A=}Cü>bsT -ݧ&ݴWsόݧv}r T"jNGVx>ѢE>5,:t{-BU#<OXEjF&P-Bskwf:ݧ\yy2 ldZ!t9jd*4_0=Cɵb`?<3z-B`!Y2}Ն5èqJBDS}-mZ$&@je.C!hwdjC}b-LܧFviܴHܧ6nYpGj -2-b㙉kPg}"F$ܧ_T)vRשOܧnJSW+y n63bw8LhOM:U}j©3p_Fi8iW:4E>5ۭfjL>L}jZ$ǗQwslAj]'v"q%Z2^}Jz7OMS"@}jn&L}պ d}J:e&E>5\ET}JE%hOM -N3rngYEj2̟^ܧvg>5x -28n"s_5yt踎O#HO)-cc&SZ,v}j -"UwM5;/6]3s&lyV0ؕR?oS4ܧtt}j'v.Brn"t_5λ+ ݧ&kv;Ԛ1d4ܫOm\88.3tґ3t<ԎpA ҝj2(q^OMVIfO3SyTHݧgg6S`xԺ՚T}jLݧ&cEC}hOʽ}j;w/eJ2/7%B}j~ܓQ椈Q:g>50E>5y2:VF*5y/]ԼBZS"v Mn=1թg>5yUOM,vr-bɻlDzhM62}jMCM}j.ӵݧUm/ S|?v܇.rqOS -8KQ<$ªy>%=׶Og{"v'-ZS;kL,5f>4GM}j;IhiOcSd;3v}ގOYthSV=TsfSci0)"!Hw횑dBZ7ܧv1l$ZDS +v}j(L}jr}힑rbf>5١6@RDS}JgzPܧػiO~AD -Ԉ(/o}je -2o,!T|1Ӹ@mW iO5iO풅dphOMkiO }>3ʩOh 'OE>c<ƴ73] -0-2 8"s LQC;#sh;+"t!Y_R&4Su5mldiЁvgP|uh -{:%P>J7!Z{6?-:V1++Z_j(ѹ(AOFulcQ64Ax(l"В=H4Yp+RruPp@ǻ?tp>[c ,H1sѦ;c]|o;꿈MhY6)`2jGvvDxii3D s7-sZra!/ƕA|8EK 3m8V-w6uvUw6mhǬiA[v|*ϔ0b9x7A9ȺUdsSy+Z2XݴdK7]%?G 8.7A5Hcj=l r7d Yבi e\tUh3hCKK%kd */wgsVPm\A϶]i4~>b7-/v7zvG#aZr P.? ׫A=n5A!6AȂNǁMi$)D2>aF\7d=hQ^`pQL E1Ps=$B8-0.&ЀGjxdxx^@q@Ó{Qjx!᫂Bf3r_FBHzEZr -ap^ w,[HĎf?ygJ 0"zaw0"JPZew:zzgvK-t\lC|e{%G 2T8{'+3#;l+Yɗ%<&N/wYgRL!OM{ԒisPPܳ$i.yd s:軘(6HБ*uS9b7&&Nww0%V"ÔZ{t_Q$eVkX aKexw$t2/[Ҽʹ9y{ Ag68ެ&]h8D3yDēbNlӦ= ["*^'BQnyu*M^.~i $O8N{;y.3)Nm _N.%ÞP-ٔpyڳ~NiK .y{5DYy-^DcCiWbpUMSE+aJo&o2QXh-n{Eknq -W^%{+eQŻq,D1M”%σvP-)*N%޼zKqZn,.kqa:zM&'2]tq.rF+蒥KExjnjKܸS,]1'e8N3g:a~8pM< 6YY 5/ygH΋3h;bbĎa:> Kɺhď#?HWr{kvqzD_R-` dۯ$B-o-ֲ;K 6v~&_Z>OXch7~q:`5tm7I(!F@,LP7ZHVRV/qQ|{ -M. okBqP+*Zqhoؓꆥ118PX?n6P7j,tdbK[Sdx 8 9Lina5A҂91ess &Mb }CaUW2D;;鈺L AqZ謌6/X D@.ʜYl4E\(agisZ(Zeo䋺?Wal~-9DL&5KmAo).2?5S󉕺譠${H`8Qs6{?M)$;bl!\b! -nDxX84>;MRl߹a/q'Y I5  [ydꦋrq:‘a"Nf ">`!4{q/Ц)_bJ~)8Ce7l -R0޶A3mXy'M(c̓PO_>b󲿿2E#g:)(ZWc-OKA\Si -4Q@*!.3C*YjaoM],`4:{tgZdʼne'X56wLS UMpB9h##o34z,^X_: -"+~iX!V܅Аx^L>5nUAd XqK`]sRj+tX5d ȯ`bxͰ鱒'ӜOnph'259hAp΍'9{3sXvvq[ vg;,#vUp~VC y#:b Xx0X5l/P`Ug,\ D6b(nT,3UQr1>a{&?ᯂ #y*=v=BI߉|с{U2#>Ux~ԉ{*<d5~iߡtWBL w~R^}]Kd -/B:%1sZ݃wU -|mdk0\J7Wb ʚya¯]}bQ^w{?8\ajL-O;^Xn뛻w^RfK_gKV.} ^qbvݢebas*-;0 ͂?`GՊ 1 Vek荶>,|['`'tP >c.ӵt^+N3JDxL+i Sbgv- VО<4XDNER 5Ӹ+f+|!;1V/jaa1m+<G?1U uU| npwUCX1Cqj+wT\ɚv]:cx ȲC;:ݴd1V}gJP U<8q1V0ꈦ/F:Lů}f쇉ñΆ0 01,V=_Zl [:N-1_;,Vd(U -,VYIAubz L4!t#?qThEu]gT297D[&aTM -]7@{^V7|ãg1ţ{l~^<Q[ G2\V|_8LJ4zᨚLZpTm783&}j66-8}RpQi GTV ndpJ36 -+ -롅`HRU ߧA?+XT]ST ;H@ȶZv/@*԰ -BC,Ji!RpQfq(1]JIF,H*dZsARa>~ARO ;ЦyIp<*4/PQ!W[< 1<*do -*Y>+Y]_hT8ۗoJBt< - -U2 - BhT* -GT~CBӌvjZCݷ -w /4*xRuTQ!{BD*JBv .Ш;F2n* -ݫ -w - - swFREvyQ!8|I^ - -A0*߿Q:~ - -; -kxT8#7<*jBX%k7aQ"qQ;FơZѼhT=u}SiT -xѭҨElIFl4*p Q!56Gps*z./<*9*`ՕG/`}Vb?WxTLr£B\UYUGҝ:jG1$36VQu,1spTΟ޼`_ y'iMMc7h?D$ǛDLBx~3݂s($*7;,(*h-!2 -2 S5}L 4'튢&[{Fpyt((*(=EqjM_ESN Hi,$*tP/ - -$, *45Z|QAz撶W͕Q]* *h=* -L y-cQi(xز -Bt -b$8r-J~pƂR ;3iDMD.΅DC@k/ *hc\ H¡Bk.*O -/*d -L8BU0T;LJ*4^ZJPjyU Ġ=*ADuCaHݻ̡yfߝ.N/ٜ{]P](3]̡iBCrS+t3 -A\8B,̡NѕCy^8T#>i0Cu;8TlN)CqRd,2y2N!d|w¡bG*kKCZeC0 q62+ -ʡbDTVA#F墖/0͓+ -U$Q BFQ1 qtRATohD<.IѸE;@ FWObQ=QaT8N  -Bb~85RbbQa~LUt1I̵ʢ8=bdQ02傢BOcm.. *?2,X"CpnSIr{`!Ba 9>T1T7:5BjL c+*$ZU.L0qRPh׺a+ - dP~fVPF!K3 fpo -M|}CBMRVfA)Do#U?ŒQi5ACtSa+p-?us2B9*~}IBOPZ9)eP&BR' - *^<6T(q@rVT&P!VBBhb!sCkO2; -G& -)ҽ X -@oeP!CTvצ LMͮ} -iRT(uPʠBf\.N -acaP1\3(rEdAP(5?g, - -E4DG B"IC' -%6yCD\Tw8!T:?gSP:'73 -1( B.MAgEYr*`]d>IT(+#n ӗt3pu$ -joq2 -–тB(|kAO,*bNP1#w *䨳ጟ$ĩOAP5v|Cj4 - --֧e38]K,N'ڌBU޽ kv`8@RA $йbyf!:5tw1K̛Cht05xVT c2 -( -B?e+*pSFq%P_t1 eUgi&1!ƹ&N#h" ĉFn*trwMAՏ, *r 0Ӟ0i7&TJ[OҬ*n kJBgvܽ*|MN/N*aimBu˭3BHq;G& E8v#UޛS2 -?x9p.y:LaP6A../L*޺$Pu6'2MŌBA}7Ҧ* -Alv l+*8 >2q2qۡAg1_.?ԵiuI@O *o2 -M(6qJbPqAB:e޻8)ThҗGS -Z(T('rOP$eLBB^fE# -Ug÷ DR< *+WBER T`[YZ BՐO5,))B@'{D+&I5Cߔe -nɇ& -"3 -Dڦ0T j`'qC2 -Hl䂡oC6G -#82* BQyB 8A -bB<bKPa,bB*2 SL*Alb \d:%DxZ"f3C@֓3ȑ=AM&3BAQ`PAD$CX - ;{̠x&FmaPKCɠfwhEp1Te갰j~i6 AMn,(kaseJL*3 -<48kf T@qs2S"PAD;T@P@i!Ps @̮`7 -L;$,*a$v13Q3 -"HɟjHclO52mb  -Й,}cU`h?K ́?\C?u2zcw -mO"Ot͍OfrGu qqh4@u@uq q*dO|Ÿxj_T$-@O~ -̆Yޭ*JoB =BZTpExZPdn ὌfrA\Ta@?noPflB3 -Tc,@&<,*krqxmM&NεtPi_]wQO Ʊ=EʟBE0w?cIvv[ j,V)S8 2mGa퉕Ah4s 3eB"\fP5Ztm2H6xUT'~e: - -[5/h:P)'~ -\)U8S8оv4^S0Bn#YSl=q#+~\ػgH * -!5Ÿ% McYSm 2/F,G @E -,&@&#+>V@CP1igjk>6 ThB$JbA -:Oi]!P!: &O8+-ı0䫤TOpt B%*fŨ *%veP p%\aP^mW -|zW T΍ndP=$9QJ * :n_dF2?9| -Ԣ:[T!./Ahn -b -o *aAD *@mR^fL*hr03oX3f>GPY$_CA -sEy]S<  -i)FvӤSh‰R ]SveOg$/I - -8V0?\Mڥ ̟i$?C32@ȜMS<954k ?~^Sh 1$hk?JVd/' -=>w@?u^"?ɟz}}{jjO⌰ѳwZqFhpd7<#LV-AgYƂ3"6AáW 8# gTfΈЄ_vW -{U*4#2.YpFd&h gT ΈO>^pFd&a+8#vo[pFU4D PqF.8*Έ.8#b:RqF&xÂ3b̡ fDja9of䪉\*0#2<ŒE9 ˈ?׋eDdWQ3-,#fAQ k=Hd9|dD^p%p<+J #~7+, #8xxHa.Kpc<>Ƨ}8FLiL1b׋c-8F--#.뾮#a1Bc$ ?$xQl5 *GT(FV7F>+50_p0Qe u1WUf/l1+Ũ7b$8ɻZƷ #C_`dNR1Y1/Ӟbd{ c$>N ƈi$cu^#0_`k91Bwsւ1}wͽ0F5cdko1Ffo_0FE%(Ӧ``:}S`|As#M:R-#Bp YW1F&ld |VPf:h5dTdg|Vi'?+Ȉp -Ppdn8F8Zؼ;lcF^>YEcj91K=0c|;rhSEp`PhvoV[0F9icq`^Jcěx1Bz=ǂ1T0F{x0F /ڊ1B!z1'` rܱ`М-%]VXZoU0Fh׈'ԄdC%3dJ҇jenn ;us4YFXa9RKsAa2J^ϊ2oDgE!ټ_eD c2jk2BKXb)U[v:z:KR[XFXZT,#GxkEx`%NYz*'^2B~3܂32j֑YYFmZ,#v;%]XFޗ*k8YXFYZah-{XFp,# (ca×~7-ŭiea*3y 3I}јB3Bsahf fhBܓ2=^YF7#oۇT,,#L62}V:Wn+J,An\2b ô2Bphs:EyAIgɨ,$#8[Cpo,(#O-(#jʚPFXԠL8eV/(#?YPFM2xe!oXF8JI2BKtV|> -`WO%v)p.=dZ+o}UNޟd #Եzd(,$#LG,*.t_IF<2zJwE!r2x*v֝{k&۫ ʈ!Hy,)ZfA2f 33bh6aFmA0#h><Y`F"of;> f[f X@f&i3m36Ç*bAv2l8#[ Έ}ZaAqBR!SlƘVf;ς3v3FjaA0c926hQYFcfceAê+}:2k]d ,(#h3㪢v;gAAI4QF#CegAa7QF`&3VuA!m" -daOC"An$}SIFמ*㼗> ZڨR>$#h󔱒ٌ̖:IFtmoG$I$$#hǴI2\%+sN+ ^$#(iQ+eqxh.X&bwUѕ{ -*aL2B߱5d$#h=\dL-$#H>d :>o,$Q1 ڛyщ1Yق23,9ζ)$38/ P4*U -2’y2ZMK #F%n^8F8+Fxsιw#ޮ.ᴓ1:i9y(so]l -1 -r87jcy/< B1 q8J#n^@FWAVUVd^{jd{<=\dxt8)t7{+YZ+Ȉ}/ #Xy. #dQgë[JVJd.wz|&BNXGp[2#m>U YAF4V@FsTKbɳ`!L?Kҟۿ2B5 -2IBg -2b* l2ݴ2TʮX/ #n[1FmVvI%TAe]{ZK'`Xw`PfY(F8@1J@3-AP a0-APxkbSH_ F8쏌bct0<ĸb(Vcf&<%A&#+Y9Fog1b8bQ8F8ȉc+/;3.#l}/f,#D+sд1BsSg!8܍Hp,rPc"wעKqc1xs1B>\D\mm1"%,#r ©-$#LG2BDUCPAc+,(#+2~̂2YueSi-"am繰+;H,#FXF h]hFʋafDyDVl -&Q=3|D3z8)7b,9ԛNu.N RpFD4h O!]Ʀ]1 Έ:#SZ8S5FLo(8#$YR Ψ1 -GW&Nox@wK>O Ѕj]; T#vB5oQc{LjXF8t M&8~5¡lI --coFH\RF8Rw /L#$edٿi~3 \L#ԛ 5B7)fCe{Ӄ3%5ծHF8'l, uq~4Qr.Ө-Ea!Tasw>H#4u`FL\nVf|r[ON"g~ansa1p2#E2cj4v04k4B^\J-#4j2g|-T0ؠ撼@d%d'N8}m`jFvyA *{!=dO7P#t)zwqB޷GbO_v 5^rjbeKES Հj6xt?.NHOTδ B5 x"ǸP l[M4qb6Hڂ5:g)& `X#T/TeN,X#u"PPf8HwT#!\RF=dVF`]Aiy> lQY/`#@W&Ea"Eo}8&@d9gMAlB1lMgA*Jl`/(FB`sǯP#5FXo5}2>#?XXF8oM\#Zw6VэTP#a!)P#ZP=P#Rw\h5°( -5*% ' ZyvV򓆷pP#DXF(3rqB%e -5b8FhjsONQw1O? 'tU.T#ڗlUPF +0hXa +^J5Bs.X#),5BjݡGkl^0\# H[^Fp[3FlS} [FHHд5¹#k^')F+`#4KMM`#.l 6BobM`#.36BTgE ؈&By%Д-ݡB6}dA`0Ą8b܊8b?> endobj 363 0 obj -181337 +<< +/Type /ExtGState +/CA 0.14901961 +>> endobj 364 0 obj -[362 0 R] +<< +/Type /ExtGState +/CA 0.14901961 +>> endobj 365 0 obj << - /Resources 366 0 R - /Type /Page - /MediaBox [0 0 450 297] - /CropBox [0 0 450 297] - /BleedBox [0 0 450 297] - /TrimBox [0 0 450 297] - /Parent 367 0 R - /Contents 364 0 R +/Type /ExtGState +/CA 0.14901961 +>> +endobj +366 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +367 0 obj +<< +/Type /ExtGState +/CA 0.14901961 >> endobj 368 0 obj << - /Type /FontDescriptor - /FontName /EAAAAA+mwa_cmr10 - /FontBBox [-43 -250 1008 750] - /Flags 33 - /CapHeight 683 - /Ascent 750 - /Descent -250 - /ItalicAngle 0 - /StemV 0 - /MissingWidth 500 - /FontFile2 369 0 R - /CIDSet 370 0 R +/Type /ExtGState +/CA 0.14901961 >> endobj 369 0 obj << - /Length1 8292 - /Length 371 0 R - /Filter /FlateDecode +/Type /ExtGState +/CA 0.5019608 >> +endobj +370 0 obj +<< /Length 371 0 R /Filter /FlateDecode >> stream -xY T[י}V@Z!Ђ$@"& 6l0`!yĎ;q[OꓺN*.6b7Mۜ&nNӜ[NfNy$4;\w߽pYWXNcth]5!o:I/ 'tDd7y\fFG>QHcN?rQKMLmr9柙&* -`žyWWa!zlzjf~LΑ?uB -.zc3p<7] ;\(\$IZa%!? `$^ynIٷY)cn0#>%D'i/ulr839{Ƨ^8*W#qx<ڨ6Wa zn96ǹ^mۯ$RK ۫r3(ԸF~ WP7`ccZC-ƹ9=GN(x@a ;xgUW$<Ü0|Eo -uWmQ-jK5rș( +(%Afׁ - %V 20Mb GRSU}j+{K:֢{n4IX7|X!\4Ia2f3Ӝ%* 2PS3ZqbpqV.ՔyKNKygIWJ6+,J7ꞿ|^Kݳ_9h:CQ4!_$+#p4"vDZų;ƃ]E' - -ꃕETd~yٌ"o| Ȇ Rɖ/3dK@⇳ldUZZw_i ANL$f- ~mJ ӞLS 5Dmd؁O }enGsW']3sz ~ktm_f;G; D`TO^KM0p s5V:m ]_=\׶=1 E~uRoDO/6zPfx&X*%(H=YC/SUdrtj0P2B/30!K'd]{( -#R_Sڵ =|ɕ@k݉LsZ>VyfX?9Ok+6<jÝ+n(H2wT`ޒ{+8-G4 >a -ڸnD^Qy~\ĸ^ՙ`ffbz _.$Im97%ֺؙ, Aٚ~pW!nh}yȾ F U"+#MIӲDN4SI x9j""0$7nk +j=><;^Q}}kLŭl JYL#!lL/3H^D.Xڗb@`cI{WDvS0DaUC:n5DZ>*fq|m;DW\7WWo'ت 3Ǫ^5$) HGv)&(0fsi \E-؅1'KovQsT}. ۅtW;;OVy 2rrIGꆗ{gduig -!AWV&M q)gYtYOo%EرYXRC5DޘN-$}M8Donk|v|M2UH4:sYp 0~kO瞧>g_z|BȘ}V{3ŀy,LϦX@6')z'CrDYIEO!~GҾ?.1AE_.G DǚODBi$a\iTx*2I*`ez,7Sti2RLq)rF) cJe - ^OAlAQ]g\̻IZL cr^_ }]ťُ., )қיp8rWJn #?e񢎈#Эht{=/Dc.o@G3kϐAXE | ]D9bZZE,B,K1OΪz5ǧ)~1MT)4uJ9% -=A[f85C 4yiLKQ$YJ1񸴂f)Gd:Y1))*`d&# OK DO&e8S544E2’pofS&irA]]AQ]=f/iU~=Zomǣ㝴޳XoDz~r,:_XXD?\K& ~kz$ -yZMd(Z+͏eYkiw ,]|j\$ *)HH{\K?>yd0m {| t -΂ b[o@Ȟnΐ i@TVbRb%0:%ƒMxk{w7k Sx*]37tDS۷`*RÓV*Fwh@mL;-r ->~ju+T+'֮6FEy9X/nҶdi6iGKgHaz\Q² -mKԜEM{rZ 2@3=eOHD]mdd,To )YRYض"U?4_{0]Hpok{6}q􀩹wYsM禮{pM1^^9<2ICߦsvW֝p;RV}O-)ks|s@x'7'/n!Y Sp X`?w!֋QumSzx)ŗ{r)z)fyťN߅ -غW -񗠚>Z1Fpb_k`NBsgpa[ -c>v -sw/A؋t;y&`!V -#u|'eY6sHiX&hǷ%hr,AsDqUIXhbNIMfp+AH&h23PS0  cFaVRyx/Fi+H`fpҫWȄQ]X3ڗW{#x=v0,µK5WJf84Su_.t& +x̽O,?O_ඒI0`ْ^غ;C+a]^;`f23s53S*V&3$__>6?q_}XO[ul-nU_Q?Z?[u>Ͽmoc|>o9uӗ)oo$_-m[HY>ǿŏo3caBJ[7ּ%Z^iS~|vmK6-/ܦ6Z}iy6﷩S |iy6﷩ϑ6B +MK/~M#Q|ח^nSv>~#_FzO7Q~-^O?[QR/-W^mb0jڪ ֦ 6X?K :j~S*ۈeli+6g=%$[҇fN󳈞dj ๼j~S̟!$MOWÈ153,ڨEtSʫYD2+AnY-ڨEtObR-ڨEXDZxd:j~La+҆:uzF,K&)\ˣ٨+6g=)V+,?7ɞB(%,ڨEƧܪ"٧ίڨE(&ө^SW^m#{ʫYD2wme|jyF,>K9gNڨEǧ|}eR:j~ѥ?-*lWz,5˘lWd)1\>ʫEgK/ڤ s6jʫY?V«M.hiJ.>^xI?̻8/ڤ}ן:Pl(mKsʫM+-Zc,ڤ&gچ'qh-~_n?;ԛ}^k|2(/a~z3;⣏-}'ݞ?6{w{t)wO'ݞ?.{s{xéwg=QoawOݞ?!{w{tz7gݞ?{{{pRdo?Q{w{t:7gݞ?G{w{t!wOޞٛ֐>2*ǵu\\'onͥu\ +\'onͥtu\\'m͵\u֬Z7j}r`5,[sr\52,ש[3.n}彭^NܚKŕݭX,8oK}tͭvNܚKETrNܚK 4ͭoNݚvu+onͥ\u5U[~Z51(HPo_͹=ojZZfkЃ+tW}\K{}9cFTZk]Z~7T9Z[KӘѥ5TY+GiRҜ_nՌV]o4gc*}1\hmLZFkXj*FiRҜ__V4gTti/,N(ZkՊ^H=%KZ[eќLڜ*Vo4g-6緊$}9kQ9U;Y!]KӜҥ9TYK bHiRҜ_*eVo,TZo4g-u6緊}9k9UYBGiRҜ_*q,%.FY\F/H.y䥪ڜߪVe4gti/TFsJks~7VIKs~wM4*(}9kŤ9U;;Yj%]KUӜJҥ9T/Y#JIhRim/HFc֚Hkk~:wTC4"}9k9U;Y* ]K>Z[UӜѥ9TKk޽TcֲKKc~?ޘҘ*7f-4淊.}1K1TnoZ^iioZFcJkc~w%.;ԿS\;[bJ)#MݼwgkFIrt<.xNZ^OҜ:xUk{x@U]^[jmϛ}w@ڜ;l5uv<`@ގڞ7;8TZn{ǣvimڞ7<@Xk{x``yڞ7<W6ڞ7<(WZfjiϻX=oz<ZfҞ=V@Zf㱦=?t|yち͞|֥=5}<Zn/Ҟ>PYk{lxd]^ ҞZ?Xk{c@Zf Ҟ?8Xk{x@`]^jmϛ K{ky:d4%jYZfȝ6;rki͛} wښA5ov[kkk.oZm۷ANՁ?ce*YF"m3=46(SzoY;)|S}1wy>CN1!?Ls4WWʯnGh#_,WS6&ǟmW_ 2roCwbfs7&;ΧMMR;w-w=w6pO&BsjѴ?4UfljVd\d/)5"I61ްzZ sKEvCFʌ}Dev#IR܎"C;ϔ +P?ulrOok|T|jƿ{[3G[3aUFTrx +a{[3Z!I{jCԌ1 #޿[D/j[ǨJ j !<>C$C ڂ?LjTOLV*{H=~kՏu_dB|s#+]1y~BL!x~+V,XW,W]IJ9}A_S{y7$D"t碷L:{e񓥴ؔ},pl9ďuYbHt v>d1OϺ4cHyhPuo9{P׻Ld~7i{R}!JKu٤cojEV>Y Ӟ 0"W]KM.},U9JqYB5K-GrI/MhӐZ2{-z`Rf +qg2Iʗ{r(v-Z0}'$uNnt'R5(4w2bls$4_r-Gt_ $)ޘ]ߒ0jrjRw>i;#f}tJvSQ4oXmHtH p/ߚ~\ɨf+>$w&̷&s ѰK)H~{ +p2(RG +SE5]8Foٸ[`B.&,їUk t qsUIfL&RQ'd4m'S>O\P HoHLM~Y8!# tHBf2& HQ$H"i<]¤?wed$7ga $gcJ_7t%"(i,|J?ۤd&QKDyIF,qoJ$iH*"1NKv)'2iv\$+Bƒ-f$n.rEN8%2rBThYE$N d,BT\fBaϒlR%-ZdL#I=$(.ᐑ m~dT!kCx%o<)˰KHby(oiW)v7e"rQj$.;$JE;>Fd,9h2s֢H-ye8TcH n¾u:(יdy: u06!%!pYd<‘XH\F$ML^:ÍDATN|̯iGG.Lݝ9F_^"y^$MqtKG;rfXqy~eDW$~/Y <2eQх &͐#InfG)E-,TYnT$IFÌ9f)`#NTXd]E'hgO@L.CX;l +\X/I%lҟr1+5un1I=ERM"t&[#Cbq)1ߖ(Dbɤ{sŗt'FC,MƠR}4Erj0rG} sLkj6EFIHh/Iؑ1Or="e(*vC2`JC$9KE%&yST{*78:s-4Hȱs9$ђA.LEnd-2xi$i2qCz$u+lDz{$5"Dr$ +.D <ҚFv*)Otpbm)QALmx, Y72%9w4یZ*=AՍEIQ,Q$L!KCBsv22iaeA ]IHfDB_S˒j('CH&7B  ѥd+1a@9m +($q3ekm"4O͈E!0Uvyc&Y`L>p +Qz6< ͤ Knk" +y p<$QVQW\]æeÒe4ǓhFfQSMIԛ2bP'ghZ+Y-;%ASE uGuA]ܑʥz3IT`a"rIkl:s]#"ebвO7dL|>4Y014SnMW81=6_!S:ғI <-+˶G[f*h]_+2A+'b9Hҫ#>FpFm4 +,A/gŀ KZ+8V,ʍNX]bAMFlbkԐ,DByFl "6RS~ZW;J7Y)5O5;ыleQ4\|tꖊi` I4.APM׭05f[7B"?\"Y=k\̣+qK`DSf/V;Y]RM.Q-j;;N ghsLm|MשNBL>* R?X=b6KoFۂȟKU/-=]Ζnk哳V$yƉv8[nhIݵB!5TTY:[-z"vEw+Z%`Z1tow5cJT&k%t,#ؤ]$ۨܫךcX"#e:lqƖc,'݌-w.yVƖΊDc'gu6nvFlaXp:[retg;Nhltѥi=Ȩ]FZO˕D]_y [z5|H.3$3ͱƖ ÉSRLbv[ ehj,]LdliI*-MѸl Mr4QbH*O7?/0eTvc >QBBQjE}K 4h/IH0.pd#Mc y`Stlյ؂>LMc F,h7h־Uˊ;[4k/r|8[HfEĮuάQƪerjɮMo2lGFRBMdVmhx(S}-=L7-pmIZY۸6}-k*)4P|EumDuvִkR;BBjҐeK45 ИN_K +CZ-N&OZD hڬ.kܘWG}-$E` ,OalA-{Dڝ-AnmA(&s$-2ݽ-h_vsr;l% e7hxmIn!UnoAI dcr\4?nB)EK2\Ofx\\Vm0U Vrmw5`Q%Ф4rmWsAA.EQ颙L- tQ̉&|IڴA4.'#i+nK/Y.t:|T`oq]uFnHdH&ZQv nxMU?xU˙$F ">g+ DFAiyAia{T9.ق:VHXHGX"PӦ׋$dװ<6&?SFۜYXnv!_?mjE=)؆ 2s<.i(V lk_nh2'm_N77{kLO:`O6|I*KF"NUT2]M0|3JkꂉTB!2`Y&ɗ<+h u+mwDEkZaL/A%{a4ʬ]bWDl }ujCb ov;%QLIl`&j%@6Gm7Ġ5vcҁ"G>Hx$IVK)F%̈\0ɐ&8ivˇ/w:}$8=db2g YUZcT^ܖ{c4 lE[NCIwjOjȷ$6{ U12 -@1l16B{34\oHAzKuh'$Eb䩡?Ԉg(T†ו25Gm m"AHNXYHl6GB rjX=Î )П@2Q: @"R ]$h+ɒEF\,Q)>ATI19 +Bkr4z5vЪh칄0Wl͎l ˌU"a } kl5LA`D:b[;LAz9 J5yQM&u9'+u[q2HwL4G5k;([q FF鋇B3" lٻ-IR8Nh~e~ݏVpIT[Hܘba`3h+ؖRr=E,>IV[0fbQuX:Gc^MJyHcn,'7!Ou ץS#۳$r]Rzڴ!q)iil'uu@H1eh3‚.~js%4%Qa߇8CnL[ФmXcrU.#h:[4T[tZZ$ ) "_6ZZ$!4u>}w$<߆o^vwv8VN&jf@bcQvo&RX?EɟyU_2}rŢK$2T̳Mݕi{UA t0݆maQX48$5Ս Hpb{6{+ZNj'M +}i~W Ү!W3B5okp@,h5H賎i{=D ߇,OoLq6hs6(8gg` N&X/얩&Yvpmz.'l6gjkhA vkw +zd UÂŚj 5A$+UcK5:b֠TjyVp`Z8ZlTĥe]h,4 +)~aH3MW/`;u٫m1 4mEA: $Xa BculgI=\mvs٦栁3M>~$ɕ>\S4a'S9(iEopD:6{(&#`uq2l 4>]۽A\a3v͎k3_`6e7b:ЊZ8Ahl96f?5:K 5 'a JZ@F9+1AHϓ[h2'Dy,UK5Y$ɵ})i|\ݥDZ$ +k9vEΜfZ>Ahl;80{_-(Qv{8㷧 42\$W6Gv{6\A,y̬G+,W!fk >Cz(>[nMA2"58]~3vC3C9sy +Nsq؃ )+h=(K֜q{P ַF7\Aecr_dNݽVbCe(P,f/p1^RqVڨBcto8bT)X.Vl16!. _>A]t=jy('a=(Qmn$5q$Qنj0_e>I~6&1E79Ub!}X7nJCWLZOFF2ismec])C-BZ"TnYu t<G[ ҆51 Pv &v{P֭D5j)Q BhͷKY;''Ӗ-す sf]x(;ƈۃШ"Nqv{Pfk/vFnB?W !K+aBkVh=(=5hFikfQ||r!Es,0:eru=?p*Ud[\h2Fp4Q'+k.X.$-SX.X2B&ϊB4˅ƴ1 K1؎2ur @xrv&\.=Mor1VBCw.DjN/\UrZbzn˅ac-\A+ +_2+KLZurQB}lr1ᓈiy˥uY.\.]bvۙŲX|bod~5.fe_.H~_\ԫebhW.ЂF =FZ\ +K[bGfصri^\ʆ!۟ ć-X.ʎ`j+%-e'}-T.~kLũ\\"Q({,T.vزj+޾}r@`YΊkT.۳V1/X.6ЭX.Ύ35wrQ Tk>`(VW`DS;a#-X.+LKޅQuo=Jv,-]>c13s?T#*g2"F-\ 7l<Nl.6Wp. RqT'8Y쬮%MJ x.$k-9=X؆ݦ/R`gS-Jp K(w9gD6R(!qtyZ'@ + g TgBy@9R-pHʆ]hMWHR/ҥd5v"yvN49T)A>$#2m*ivXc֥KX{puTQ7..Uy N.-=X]ۑ]:eף͙٥tЮM v{j Dpv)]ϋ."DKb.;JδZK5pZ^}g ʂ͙ݥZe`ˈݵݝzڑpׂR-+ҵT +M9]ʠӔvo)3Zy"x&7#wo Z +YOR}*xx&//Ӓd:1^U]Ppm&I J;kyY3Xj'j`TurbyHe7>o,uyiwH ̵;1) 2&)61Y_{"SD/bYt0iҡmgVK }zi(b=̡/gF0[9}/Iph'kG{iƬ +DULұ6jU=oAV4*1ɗz*jLRV»1tNf'Ujᢑy>S3I3xXjUge>߅vX< 8ݚd88aMjIfl#aM|Wꗥ5L5voNoy"\EYrH LTJ,e:+L}V\e6-Xk[Sz;t12]Ɓ1gp.mq2]LB;tqÙ]PsI^u"eՑl$\ehkd` ,hJk:,0C:ҙ`̉Ĩ3LW.7<`ƚ.F`'w;;0ӥ: ' n<=̐g;B XSqUm 3];53V6y134V.34LN,3]qlԩ 3b ɌU5B2 ZЍ ډgه"3[xf ,vU8̭1޷̚rF۰3͏O^xfX|JVIWdxflf܅gQQ%߉gF)*z#Ԍc6WVGE3 P3Ίa)c @d層v@̀M5YAO+ |F Ԍae̯+LW7ݨf}Px?L5SkT cWY>e' {D'zQproVfJ0͸2q +B c]:1͘1('tڭjFNmI-Ϣ$gYb GJ5e43ՌJ2؉ՌHůT3Oʍt ʕj&!FgT3a} ՌghZfcsj'2pHjaъ]fAWY|U607;ugǢxr4kW۲L3UܲiM4cȦ-LS L #ԬdvZ5@ͤj҉iftvYo2Ͳ6~dI1Kn^fTtHؘkgY㰳Vw+Bw78dfp*;4;1oL305WYAvLO۽[fl!*/rV'>}@# +=GQ]f2>7*% رڂ4c1[/Zf>Yv!VYޗ2 ivجH3 a5vڅh&c,p#%ջ͈HIqm!UVv:ͰlJ$PB4ߋej O@3a^fhs`%arkg{P+ zJaM{Li#vsiBi92Gp\gZ լ ,)#[-\3`#X[fQ_ rͤCI5@_wc,+rͨނ+׌龺uy5H挸 ,kF?/EsŚ֦5XaŚQim.X3WáW٩. k5Vcj ׌jW +֌ +xWp +f, [eٵkYڕkۦYn5E&\fhZpk ZwWn\3ZYgW=G_]f _'_fA^T5NWXk_eiok9x$kئ}245ЬK ،*I +\f.ZZϵl9/o Q Y¬5S_f-c& 6 lz}\;tecP6_ߜ?t%gd3~[p+,0\:76[ܬmV mUnh3j[f8!lnh3+LRdR7Rh3,X~CTSfg2pEI.Wt9WY8gm&Vڌf'%UͲD#pEo`k8Q,ݸfepTkVp8Lw嚑+ Xӄ^f]f'Gߝk&sjo\3ۿ'}aڙ w_W5퉽R h(7<fr͢o k÷'oX3V50i\[f#Xʹ0kYuŚ{2CrÚQoXQ'5cw[Nh oo3^f=mm6Jl1XV6;jx]fzVSͲUXwڅk֡dجllN}JW-Ʃ`3ʕl&O l ҋ0^ffجlNo`36Z~Y%+y5:6 Ċbo`3N`3jquVY- W8$Wz/# nd3V$ڎX͚{xdS8&lEd58(y|ߊ6c([fY&v6+Ӓ\[ffljYlv:g+ڬ)褮 ڌv&6k +Nlf弡` Orۍm&7k+یYuembčmֵ䗭l۬q J^f yl3TNgͬgYd޵m&F|6 5!ol3IFa6ãdl950[뺳͎یl3CMq) yФm]f23\D{o\3ܭ^5~SVQ*5+'čk&#)+Vk&!|b#n\rW U~KYzp2k+,.;L${]f2TO lvF,:mIoh3/6ohƟ٩ mƚmwm60[Snl3n?uqJX{{_p3ׯ@:5!o|39߷ͨ-F\f)Sn|/f6Kzb;L"&_x9z› o%oFJT(zÛaI0So9} oƚ\ڊ7W#'xsn|3 a]WYHʼ2gnf8d]f|[_|}d|3qjWYCA}+LGUflsyIwK.]fEgܭ+ތ;97[3\~=ΜD8ъ?저k™ [н|8"'Wt9B7ag1`pւ=ͺ\[fdѪ]f8;Ls<ڴV>7Ḳ߬Io\~U8ѵoV8|g2.|3|t3 xw1,:^J7S=w;p|>Z\-+Q@7 t fW<~*k+Lz6i]q7;Pw^oVv o& o־7,7"vA7{lͨYSv㛍=2g~=V83NڽΎ;T[(Ƭ8ce(Mp̩[7j6!Hӄ]g}Vn3W +(\JU*lk]gu8cS;XE + pB%wYv囕l9f7w\wSZ7YgTJA8\4;}Ml3b ,p&{g iV6gkgNTمp-y ξę0;̇'\'8[|wO;6X0X pS%g7#hو~Lbo6Wo~՝o&[|*8ďGLҝoV+>f0YY+~o*FxI c8kN͆GfPZ|ỏG\fGh 7;7ޥfc>9e%ywfs>f|x3MwYw<ѝn6(]4g+l pN0͘oď'YڦnVܬ +nFMƿ'Y npN7c +m;L]qnfg|d+lI ,Lnɤ EZ~np;ze&=ͦm6McOl6N6J]G?f<(84+lf\u]f,cxfɃveRԮḽ8l8+?fz"~<=ͦ m&}gǞ]f,[KhYamKh3$_ZOd3}?f3~"Q"}<ͪW|BhofZYOhOh3C|wfF]fHr; +7C|^ L%4Nl3Հ`M&ډmTZf-O7Sn L]j$/LyQ7CqO i'^f@нgnuufλКvRm ojkt7CZ8 +7COl3NJfᵳ" L5?͕Aسm2Ğh346C CC+L5yGfjf@]fh`;ߙlL2g{ #$ :К];jM95H-h3mZbˎFhTʹ8].`3d?`34NИrtw"-VsZ3ٌ"2ѭ\;fV`JK،#hsf]`3]rd3bF3?dXQѵlz'a!qC~{{Vq21h>X㌅U^fh@=Zf(ir_'6&^tXfa6caܘxl3N$,Zfs ~6(t{vX”hh3umF LXfᨑmzD-U;[X:(9œ-l`hf,z6N5kی ++hYfBS;f7pow6 j2}Ȯl3vY0,l3@iwgYRnˁsaյnFmPI ,7c-\p3UI^6ӚCwmgzU-mHn0v1c ij܌G*)S72M L`nFƪ_fAIWrnj gAkK涃O#*~J8,8mGZ gE r* gQOsj`jw ٣:r8:bE32Tl,9r!q +,3QQձ rւ8#Ȱv2ځ8#5oę"SKkL߻"4 ik⌅ׂ9`ǟ3e:ng'.8\b)+rXlI?;gd(upFAXXgR +3vu-/3jpu΄3ggk! ;pp!Q)VęUh Էt@QbK.e; Ψ*qAEFoyF P%ogAi"ÜPę/yVpZg/<նO"H_ ;#Δ!!-{;#Βk ,}gę/^gZ+A +MUB8#{_}IN,qFҚ<:3ΒNƙVhe۸'Z+YyrǰBB3=E{ۙq&hѵqF~B'g,~B|]gI֜/3FuH9+m)/3tc9K +\; gzk@83r-xjgƙqAuaiUاv0(2.3NY8UAyF1jgyrU*O68c{$3Ǽ#tw L36Gt0$8n9 LOHq[F.rep5- ?;g$ LΰH`Ψ943tv-%+,Yzgf|]f + 98 ʧҷzwDؙpƉ' Ί:760Zg Ψ&}3-+,rd9+Z03*Q%v~WYQMܜP@8wg3.IZqFSB0ΨB8+ZS$+Y :ΊR~v&qն\g@6u]gYM[t֙pfDyp%q(jg{ߙp@kJmjጂsu!U[7qdgi¬&l'UH2ڙnQ4ǵnF`>!VvT +7 +Jjf6YŽ=;fHcҽ8bl3H^58&5.¡u'V6Њ-z6#!36#R1fqggVRYf d;Vٰ:8+/llzua kufV#dZXfD@sǬl3vlGmm[fDyWQNƵĶ3ڌW]fx(kV טmF@3 IǬ+:2КfLw< +x3ی7o:͔"{L)v/p33r)|gWAk/H+zʋfJ_ݼfTȼgYTtvW|t3|ɿ  L3ތH ]긶Z{U'l^)$OQQ7(AI3Kπ3ijG3.34J$OnB#i5Hvsp֘flce L{F]gܧo$C[]f(r L&t3}=Ag>Ǧ7M۞3 9h®g>pʪNx3}|3 gZ7oD栨8\ox3}FӖ74}3ʦhse(L7ibN 63L´ ZfJ\aډn$^rm/]uL⦏='>hY wNt3}Z{Ft3 +ɛؖ+Iۺ(\f0ħ3܌"zn,\$yp37 =OmwB;͢fnFg7{o?8ޗ 7ǂ `'Y,7vg}8D;n R6UEπ378 3Ģu̒~U|h4kv͒SbLL ,nS:ffaO7 Sf?+ [>v2p囱œQXXfSR);fSصoԎ>;fBѩbgQ>g cQ ܠp.N4kFQ-3}8cFv\;g{+^*\@w%_?߷0HyXgI*ZҵpFQ3jmr{?ΨmTir ` + wG3*QF +vT;#β1z8x@jg{/2Vmz,3^`kE ㌽忬-gEI9C(m3re#.X!gV^@ΨBeT8eP8#rҼF5I<Σ l %=lW`ׄMfؚ+]B]({&/*a9%m7껣 dcB7%lW}Kbws an͡73݌cx3zlZf +)o +!a<WYټ#F9ͪ)5l7ތq Ox cͪ-6+ߌ!س͔;F7j7ܨ 7#sK.|39=۲af&X7#5w7#Ȫ|39wc囑~KSXfUҏ[f4Y^@xz3df͵ +$߳YUӵYx32l4=ͤ@FD$ 2G|հx3:h'ooFPt3zt3Ĵ]fz1~B7#CCMqj +M7#C t3R=ԉ\iMcJV)/^TWa M7#ca}AZfM )H6mvGDpؙn[odKP ݌JoFG(G0f ;-nE ތ VZfpm-mnC[oV}s7SfCv)C ތ49}~x3+:.f˞Xx{ȢY/ L s]t3+*#v3݌6L{{-@r3݌TNѢ+/t3R1{V83 [fpfEft[* M7. M7Ht3d]ͺFxyOafTO@x^%_NH3L0x32,be LE2^f$N@к7Seޅn7#Oƛu~)fJϋ7P3߬K'؃uͺ|: ߌHppv7SOag9R; s3>Gs/+XgJt~vHtRn݌J Tvf?f1wlh4x{F{'J8™>nB8#cbypv淋V S9nB8;JDY2p ڊh53Μb3@BAFgA6͈3x*[=gTv#b|iEcv#H.G,3)(Apg ~qF +n+҂8SAU>[flw1{dqj+gƙ 8Sײf)~^T2x8# 8#SV2l7v^qFL3L$&3l7n0g.Ńۼ0HlD8r(Yg4k}[gB8;ę$Έ3IƱFaANbv U/hB8sv3LQ yM3!Og"a{VMҠ 35ΰ/lLkvΰdg뺫J*pZov P<7Ȉ`aDr 08܇͂8FrmEYgU7o&#3L-. B8f_gQip&jNrg¶<΄mOo+́D5rf-.9kt9^g-6O /3'~ 8\@&-39& #8eO3[5iFB18ևۊ8ޜq&tM:\3Lk3 [fgę-Og"dVH D~?!Πa#&&ӄ8ś8sTdgІWm nUgalݞq&F:gW6eL7zBy[H8n8 l ,eq3q 8Pu3^iWg^@v#ΐB#W63ΐBcyaՉq8˶63ΊmϠ3(+LM[D0ΈR*)q$+:dfjo-B+Ƭ*ZgDe7%3dWi '̌3dW)PΎqFQs WWS'+ iU;gauHqe0VB$Nf@1y<8i =y}Ê;)<ƝQ\]33I mŝY>]bŝqAU+Adq&Z]z?dxO;jACm3pWδ3΄YhgYW*]wY^DM;t{RlL[pg95DMEVu۶Q.;Bzn%6}Xh7, S$If3L- `3Ղo*ymLqnen-ag>C{[gԐ۩2VxƽŕwpѱZ3#۸杩=^ygYjڪ ;Rr<[0/3$QI-;M;xVr LsY.ץԻΔh@!m6|Xxgpi){w赙w!J6(?xI=YxgsTʰ]3&˦pV#}e}XpgL*&;N :kŝQGI]\pgJ45l7[Ulݸ3jɵ',3jzwFt&oqgijgYpgEM[qݍ;c6]=ΤmF;ўT ;+Z 5P=#p8wF,aqg:G>;# 󢹤;+wVȧ/3_x{l̰3N*vF9]3팒K}~-3+Xf/{UWh[3fh$!v +Xa3Ę0ݰ3>3IcoD_VYU%vșMvsU)̰3)Wz{D!*wzU LhvȨQ vF1fs\{IvN )@a&̐S_Yg4t\Xg44[_{ L]JA1oMQnaYg} uܿBGu߉װݬ3p^ΘM/&AEoԟvΚagicn): B/3L3헅:crͨ3&7IqSfVYS2Yg&4j~uF)Du3R~I{Z>ٙ"*oV)-l7 i8un_|vR >$<|x{tf٩mmGnzAd{>_NEF=}z=ʳ TXg'Bm6pi7L?{lU;Q6aD?Br ZGUR%ۍ=ӈ`ϰ5[( ۅ=B6aD?j>➉~E' \U8rτ?JVI#;3fGyrn4 3 -3L#h=-j9s>?,aJ|︫##чTlrl>V !W<ϰX |?|% |?{z೬ڀ"E'ٲ>2gv,34 \۷|?@<عyخ!;Pg)(l,K :E7gG=K&xfg8:/&}FuʁJ6f7,)$}Zg"Cr zIb3jJt |]gI*egFzJq%6` >S޼*32R +>*-o3L8P_g*2n =#m͂XӸC" E1sJ t;#ir& 4kM>CvپqM>#I8 lf3`w3 "'oknE\gHzs L>Sp M>#7HW]:l7~ayjTD\-3\ >CK3yUWvϊ2B)WO}mKA^gdn}F¹GW}Fa3 -gt!CmfSE32k$.3ly ȟ]gd1}FvY2[.agzE Lm`˒3lo L]`^}nQ1f7Lm`}.0wznYUE?MLg$y _;YU Jm!U F> >:JHr. +>S#zO> ls6l3Lyv֢43z>B>SbH=,Ju-`v rhH5Q=#Erh=#s{gj]m垡1A8fUа{F X-o &O3ҧZgtq4=e|,agE3RT6f7rk/3H/ܳ&pq֕{&ۃ{F lƞ*Jۤ:+inN^abWx=ƞ):B=#GzFBzob 5CϤg[3mdegdz&< iו{FVCg=P{F⪁tH\Q>(j3ҐXgdEgdl|Ov M>CURߓϔ;ޅ|xV]gH+h9Eyg!D)^k"ac +3-GB>AV|&lxha A^g(9x33 ]36 γc1YT M3pHq݄>+aMf3G т>iCO@%3l} +N35.8 }ͦNgdZsgm:93q&cA\ˁ0gQNH%=Aejɧ7OÒBѱaFa;2 LZP4tj?Y =|\JSٜdτ`zG>ö8zB>cӪ$Y)iF%9SG)h.ĺԷٹ"VI|T}F`! J>#{R!yh3-GraGڛ͹Pv&ˈl| ۃ|F=h Xg.I }Fb/u.3R*)w}Frg||F!\_:C~ទ4IiWWY'{F/3)`M3Tag"a# dO,ܳ:ϰ3uh>xi7~':gDms{46sr]gExE<'rJg >+ۃ| +!h#OP?z3L-琣Zg4dAEg\Gc;+[M;WMm9ѽHv#NXgcȻ>Sck3$S.Â>todGq,}VԌB3>#t>#,M3BfH-(r3 O}FfZx-E Z\ ۍ>#Q|Fߪ f+{ +) j]X|Yt M> Zg(kL)|V!age3LvI.3Bv1y BW Ӎ=##di/}/7{V7hvcϠJ~]gj커ꙂT~f' *9V{ +iag+톞Ur.3:v zVx͡gOBen-H>vShA"B=VZgI{QJ=js}vGqaW{Ft]74w3>#ڶ5cϚRP5^z&:Xb,Գ&b 3 0z&R> +=C߹@$;w"],TzF[g‚ ,~HHedg{г]@ n@?yeyAmY$ء@y+KPvPψvs4uz+ 3q2hiLp[h:e7 n®3l񏶘zζ3:]gۋvci勤#g n=# z; ^2[BCo/TV =St /Ы^g]Q@ϠU(seIOfVqPYgS7w_)aG(k@Ϡ@CzFSz-3h}6CψnC;/OY_g0hw_g$JzYi7DV(ّ]o虂ڸ( =`e@ag4#]}>p3␹g$`۸솞A^Hh8`+혰ag+$FnEAr V =#x V =#x9@Ϡ+Hn zvĊ<>%f=Eڊ<;%yv +{3 +Ī~mf8]3iqat>v3Ϡ$%ܶyvme +I/3G=LQ+ȯءrxF~]+B<#o镮pl <+R3+I_pCvhަSf=sHΈ7eIswq෕w`;w;vzlL[ͼ3lx{m vzoaiJ&ޙI<uvEzخ * <ö#WxE g[IaꃰQT\ n4ϷwV60iL$Jу9DHBꥰ 0y?qgP- q'4✙<[{ܙ|aʃwx%n+ΰN.[nYU3 Jp&6R3laʃ7a +UmG w;XPgM3+ a6ZOS71b ͨJyuF,ڸ(h7 :RjW10мke5m6Ӹf5Fe:dgrm=agR2l7쌘솝)`eYg$E8(`ݬ&=L:#n`ͩ!3LauM:d@s͠3b3BS O͟9Uj64Wm18%T3o o ?-8nlDrVٮS#_9g$펒Z8ghE9-5@> S<'u:3N$3xe7 qhש9NssQ]m9#ѳpl)j)Qq7Oדs^Ddcq:hqF@"nq7rI]ώG +3k]q.3v8`qVuJݜ3 Q 9v@Vs]+s3kI$>Xf7 +yskqDn9V[8g>Z+Kk`:g8cYc뱌-3Qn9㬛 9 k!thB0cha{ĜwCQSU`z`:sv(n7O3իbR{BGnz9;dGNF^@LIaM]Um7m ̀W{QV؂xPT%F}t\1! +לFh*)YC%/ +~Q)y*07'8/^.St5hkD}1KU 5*EEu %w}aUqbGF^IϫԎ7DB184sNs;_amLgٮ% ~t ؑ#U `S1[=t2h<TRfoU62J)rp'Q˵v("Wy$I-T롽ak5w pO~QruI]nUnvySVBVB[bC1y=Y uD`8 +)*^Ĥf#]ʴq#iurVopX&ʮdx~Xb[`0UNa3_Ys8i$L{U+z eM_֥O) kHil4Tټ=|wVij&Hfh/R;́ +O%X`j_UA&!2y&>dJT@bf +LEPNW*`rhTI%EQ%s'x7yJ4 ݛ`DbU3PlaK5 +ya<>nO/Rp8nRN->Bhn8MEm^6mJĿIT +mcB7z_ H$58p:Itq[fu$nu2,*~eiiÖvUsZy*mwpᆵvlog(j;xoÖ]8ɖjg?J=wG?J(ǻ69JX˪C2\U? Sa%Dy*Ļ(B$\U9e1 +q5=_gd\q6Mx)^k:ld+LA8Ͷ45HL__|XJmE!dwhm+>6mFyˮj: /EJMwrJfˆ:-6+!fԦԛJ5|Գ{ t\Eiz4MݖmjFǚ+lU!XG6~ڎ]G֓?lqeW pp̰qT[v?zF.HT xPc0yeBFmUXsa0~ۉSݢd4Rzqi^𼷝ëmhj}*9ݚNhS)fp;,E$yQRl.Ga~.^/I%`{‰X +~qK}lZ#6<ԿBGCm#2uC Xyaj,L-1} ͱiMbwJlFS^BVRTt'ۥqD-joܖO ٶ,ZŞ*a+ػldjwbR!'D`N6Xc ۊ!ˎ UQخ +9zMUdmI%z[2Fo„nH>*O2(%qJ 1lmp¯.F)b¼.WURm a&r# WJR6HWfb3DK tW܄ EGW7#}dT"$;.ݨwOI0#xh(IV06[*`K6YE +'!Aj)ړ6:MIKT->ޞ tuÖњ.3d^P;7dm.=UɌcR158rRfQ^xߙvER(!4nėH JNta&/߽qN$ [Y[GIW]o .'@K)64Rڔ]Q +$sLTqtBP"?"goF^HE?7u,m'zSYln`xTmO נ|qPmuSn6$z[wIպ'+QzÆu 'pWG +Ѫ 2k1bHvkY< a-dW4L<|\{_)]<.jhr^eR^Yme3)ZWpT_U IU +Ou +HGR汼G+-2V :k@SOvkĕ`Rw5_dUwVٕg=:Cԏ_麢Hf2BCo[yrASqk"e]qVb7R;oOEP'l߆#KxePbg$/f)mv1\c i +!p4=sbNK_p 9UCu.?mDХSj4zZdKOjmwv)M|BlS46"GdJ6@J%Wd+!4 ,/K@[W4S9_eL8`s!ɤ`qq ERv.+ݻk85/~Jj[;$Ϫ=N#yɳRl?qNJ %co9QU$gFY? 6} g/XrARܒ6|l6o4:lgWGcQt< upV<"^%ˣ%9wիb/K{ŏ98snCU\OM͠܆-uN4sR/Vr1MA~٦2ܓolHȨ[H0XEVD\(g:Z?ouCa'=dj縎䱈x+6"WE\בĦOYZG`Sn8k[kqN`XïíSk{UWC(qRm!J`4S% q {#A X]\s]eI6B3vVZEj*vj-$ITpX"$P9VP4IasFfA%qfUnәͩE?qtyI֑;Lucx +@kxnx8Іy )^2_Jdg-]yq-HUu+>Ysδ_{دxfGaN.1KAL`WԻ aRފx{+Ըq>z_8vs01(TNx*8]3+W7N(0@3fC7aXqm*crs53:)E[,a#b շBD sG&"ΦW^(ʲ +$߽]ꏨrg4%.8qJ +3$AО.*.[F4J_ɥڛzQ4nEZIZ6Z%A\Y(oH2HW,FRm՘DI  JsvC&xvV/=✛DkxZ *SUжo2TPpD.ջe$qf]چKؐu%,t {"ZG۲DaReD""Gzc&QZ UTxƹ!J!{IBXT)eQ9μ&0KGG39F^͚/ 8Fh}TD˖H| ۠J+ƥbGU 2D)#XCL#ސC/3!sR-z2nwU`#g~=$\>M<"#$epjڒڔ8o`,l}sm̲;"W%8KYRgl{Rydΰ53\֑vizLRj /vqXqLmn%Z|gĦHS Ju|$51nf?\#mU)F]K%̶ +KR3;F 3ޕC<6Bj`Ui D:XPǐjPo*QmH )1=>q|_-F)oA"O2C7:Df5R JZ#/D>.®cګרb#GM#clvpp P=%Aү~psmC.PJ=JA*lJwlGjrڰQۢ+ .(̔B=6 bYėj yDC~@<<*!P}U2gT/随*|˼HC!a'߈ˏTxsTs֧cl( \6WP` "+#c9kTѿS?\-^6 +jP (vU *"]HLULl7Zҏ Gԅϣk 'JW%Y$Ȇ iAM~Srv,S+:pU!`ޅJ?tELn0 嶾ڣ^j/n;#|5Ze@ B,ў6sշ*QK +bCM+Z[4:t|K\[PK=Roo'D +/,ѤkلЇKA/\׹)5C+z݄ThUBN(&TW(yadEPA2 mnVp#ecoѪ[ CYD+Z@)M՜ƞU%DZ/=Rhw~sU+ Iwe0IV#dSI]@"j;Lx}srQikKTVI@v8|͛r(%y=?)}#; >X!A|F$Zp[YlZ+ݼ÷_f +-qm:nzI[uHyEհD<-;G0&4$yw)DҝƇma!$2f Š6jd<$R߼((dCOD^s)ؔN҄V0q4D oãI&irHjbW%3vN_AZm"dz6;t Rn:#uaqD+c%:rKNR_Nwil;J@0vGznخL|%a*0Cmt8T0AgdI?KE#TIWjn|qE\LDϿ?tӯs"ۦi+ hz?`w_?F?&R_G$5R?<)-$ +R^7NtR]7q/OܻMMt&>ߤ}7z?~pooJ]^O&_}eZO?k$E;TER8|E+0%հ_G@dF_mɗد,5ح~4|~PoH4HnU??(􃆊@ jjd^Ǡ?B1 jTkbPGA;A-}PECQ?Q!ҧǰ4Nh>4L"LscTG?0ϯ;r~"s&f@wjFU|~]0׏~`T_wrsFu|?s\?Q}~!\3׏~`T_{ݞG>w(sw~)Y׫N~֏~`T_;LuZ?Q}~m?PX׫uZ?Q}~m?Y׫q4}4J^1{1Fpӯ37Gp~r}ۯ ')~ød-.B|fau'QM|{P_}PKxѷa-I01o Krr +2D^Ú>&eʿ)a}{X_\?pɷy[rMooZRtƒKo +|a}mWÆzwk +b@J9Q,a}{X_[UkKE25a}m<+65a}msRoa}{X_[W=cXGV*O?j;Ú>Kun k*/=`zDhÚ>d]k k*/&,}{X_[%0ok!.}{X_[3Ú?gae5}a}mϻ}HkXGV* ǛxX1ok|mۆ|a}mIv Ú?gPvBѷU~N#ѷU>vk*P װ= HA.;'1ok|hCW8װ=It kڿ'v6"6GVގ95E~ۃ/7fj +]okk|Mm1ok<,PSgN_Ú?ƣM5ok|TkT'Vx)C- Ο|wPk; +{cP'VwzͧRjۃ.(ul9'vq:Hϟ|{P_[Q{]oꋙV'W󬂳|O=/fYk|Sֹ#4}A}ؾ0nA?*Dgʳ>;I!lG1֋u?=ϳ};/Oㇿo?y%~BWy_cGܫfWO}pϟZ^=?uz<j|{xY^S[۫󧆶WOl/^=?x<l\{xVO sϟZ^=?5ɽz<j{x%C3ܫ6gi{__ IO/u1g4W +}Pu,|p?ji/Z[]F|v멹 #g[CKCei-}f>Pw|e< 5)Ŧό4秤>3452axKx~JSy.-!ό穴4$>xJ,M1ό穭4D>3#|'),>fNiOI9}fe-yu5ȇ5x^_Yjx]x^\ kϋA> tyq5huq=j(\x^\ ~1V|Zj[x^] ikϋA>@lyq5lui=j0Zx^\ aO2D=A:W|@z f2WW|z Pryq5{:V|Zj[:W|@z `c<C}Z ^h^\ 赌 Q^h^[ ᵌ ]h^[ Hl=둶}i5Ȥ/o=oؽw ?O:9ֿZso _aC'x8藍6ۿ}?:6;_oQᲛ8F#0Gﯸ p-mB*~ojι ~7) %?:quOoNoˑ?z/ û7+Kse~JcYȻw=dyw)gkRO¶c?Δے&=҇mYnǁ[om\9l[Fp1ʵ 9 ed.ڰ٣bխY;l(=anN+Zzi] +=_iܑ۸-66 cέiii>Yfնc\gKui;n~k̯_xmpuGaY۸v`GK\!ݟ® +m}Munbޏ앳k|c3U~ FbGvomMT6d.U0h惞D8#mׄ.qO}ٿj?+}M [\x:v*1iqbcl{3Ŧ?loN[wrf3ݶ^gȯMfq6:Cqm;XX)4U0ګٗmθvTROWf 喎}}L{|fe.+C]poSIͷ8f+yH-6pێ?tٓͶ}dOm}?!TGlU<pz$l)M4Vbf]l63X+c[?a3om Qfٴ&_'cTL'd۩a3'Nkx}=2w@\gī?ODZy[< qfq:ۏZۇͶX Ol6y 7{Ŗ|Jq-a+~S6@eQ6{]jf#j=R_7[aw<͈ +nݣ +U=g5l3 21.;lXۖ͵9Vm!cgNiFW^AO388l ` 'u)\f1GNԱسvCYUmK궔VnF<בH 6{:;VsL)2 ߞO޹q }aXVhVgfNs jmPxnmwOcNW{/:}DBb踎xIY6[,ZWVc?O;Eආ͟yLNIbk-5_=Y-C/vܱH;ך?HHNc5h쪢l a6P:~V.[H6٢'ŧul 7|a&̅Zt%s4FcoaXbPoEqr=q֘8wl|a[svpK2i9e=UHþQi^wUClSs,{p` 4Ƿf+(ة:x%N=͜R +{x,Lv\etD|;n#=d6xn vlYӯ;plc>l!U-?%lV⛻ܕѹlvȮ4:È3ss fjwD}{m!bf ә]9:G9n#[ٚi:93'$N(3W& зȣq`k\gǤ$@Ρւ6)|zlv3.'Bs#d7uԻf bc' Y+<|sr8ٺq̫́Oě{'d/^Wn+IolѝT!d ?l ˽HMFHlu" E;MB~>Mne//Q z* "`B0 uL7T!( RzG]Bf%6L\]4T"d6{$dsFӼk_JFP:qmxg"l/:DlԍD4lSF^6DC;"wsrM%Bդf˜p'ŎP#qv` Hf&4mcfO[B{yk)<oj@hQ-B 6{klY*-i];}\w>_\%,a* +T 2-kֳ/F}l\wĐva ÷lwTd("^F5T!T)yLwP;R .T<,&"v_l)&.2uݳ, +J*)%Lٖϫa>Hx2%e]Bf?Uw!\!-N[զ[sQDK Fiꃰ:iG=lwP吁 +!Jcd?mC/u-~{tq]!TUiA[6*lxM6P}a[eԲհ%B׶əvUf;OjjU ́`l&eS{!hjm*D)D f3:|Plw:18sf}0U%d&6+Y(JIn_ԉcVsqv05B4*!ɶ6j:%ظ]~!deHj$O@5Bf2KUyFjl)o`XlvWӏ[*NBMsV +!;kF=Blv?+cާ +!La+hW\a+֧ +!mgJQG."E v dF ] D"&Clfꃪj8cTT--ps]TD`OA̩.~1LBx~w ] DNhɖM %MB$m}.*-Bޗē;H\BжZvWŰB@s޷Ӱ}U)J*BVX!2)R!~.2<~6 +{UDva +5붼U_vWaTDJ[i)lW}t X>r?OA`٢]Tx'vJ!:c-T Tq0*`y.b +浔 + +^[hHtn6, +!{k['slwliC1+ +yE~ֳBl]BY-G@ijB*bz۩0f +! +jڵB׸`Ba+( IcT!T8vʧ[ +!'G{Y +!:şA*X()~\BHURjBfݡRl*fcU=%Blv˳4%BiiguwD(pբD긪E.bWc*I;$Yr{o%J\D{HAIvdC=4U~zlJ2gT-cKPǾl)!zʎcS"$1lrNO."5Z)buMX/gS 1]"t}^ֳD~DH!w ,!忑W{lJnT*!6]h(ž2_Z4B:(O[oMХ*4EB\=65B{iuYF)%e.!&1frsL'75B '|."64B7@9!9pOKGuYrBr. _NS|#뼫>)GD6[Y:%B77ٯW!I9M1\D}e{cHJh#44B7٬ľk7A+Hln6Dyc5Y J"_2UP \@*/=EB7l܄ۈ"Z q9 +l"!*}wR{½#VኼC#tS$HŸF(_j&Fh(nwDbS#Deq?3/!yq{Ѕ~w1!ĦFHk&K"OՔQ`Kؔ1Q.K=q)$H3+ĦD͠B\K(_]BViMZf-!r;Hl +8(n-Yl*?*vTiv+m9Wݴ)4cXYE q@E,! A8\]@h2 +Om!| E^I#)q1^<:l05XA34{lAأ,7Gxʭ (J%ED?uў# ڭ %^L,rg$o} eI]B"\M +>Da]@l1!bmq*O@b@1(kM2lYעҽ#3xlꃾ[Z}*Բz/&߽X)(ʳ 8E69!O^-8 yKi׎YA,쵷=G5- B^Q>GS6@}j[ApNcS$e\ؔV1AM˶C>Гv- d8v=AIfoI}J&&D%4Aj!k Rȃx, \f, 41 zEư$4A\s*# ʋ6Ha_Mq*]?SMqR6Fڻpu +BS%ˁlqb/ G!i6o豩j<^땤t4}dc_T؃׃>Da njsu5 Ć<;ٝ%,TB3 F,I1<Y4 ДqGTckk<ՇVE +EvǦJ6Ć>HcC$?@Mehj BVZįr} >-MyP⧾ldž<g״gLyPcņAĆ<(]:d&[gI׾C n y1l 0bCKLy1lO֌ؐ%wU"^&"[T[i3QR]DDg uP5Gggі)^Ĕ)X;V_KʝRuwm=V ""OB:C粡4z b ĺ8![H]'h6Ps mLVb4Lm2bC$>˰4(iSX9FdL e1enm*Qu JFL4Il( Zc+T=gfkʂOPH5vOY1o+Hv#6dAxuP MCJ-ؐ%TQn~ϔCҔl6m9(Bx>]6VJhJ6>3+T *Zb]SM>S5Bߠ/;4AD$E! Jh(qOgKɆ}`اA$u8! "4X! J&o[Cڠ&! +JLbCDl Si_2߫J b"CԦ((pE˫ c%C GČa^(TIlI +J4i]BCD,c ˂Z搟) J4=hL23! O!UAk ֽ`Gh:y0_Nu]˿A4m꺠 +Skr7.Q%6tAreQ ]PҞۍۨž J0i{tA_#6tAʖdWj]n*Qdž0HJ~t"zCcu*C.!6A YIv $ "ԮaQPweP%/hCD2hP%`iMAޕAĊ'ʠĨkSdž2(YK J8H11Dѩl2vꘛ ^*Kc:H^=vuAjQS䱡 J2}! "$?㨱i28[&Fap/zhȂZyhe~,XAlNUևw bz*(QJLp<#ClB<6 +JEG%m[ +"J,P%@k U1=b@}JbCDL@ [l$5,7}6;ʴ$6TAr^{Ć*(igvl~c8yClpWBr~ bEA ?eXCDAFe@ 6A,GAD3Gm7+ņ)DjL( 쾖g +5=6Aلsr"_ (}N$L8 E1͓|*@S^kSDQ[%l݃Icds_wRS2D̏뾡JxT顡"Ǡ6!"621pY#"j@,ډթ"Vykſ*E4Y3\!6@0qgB7 S,6Aɳb3{Kw.8/Zlȁ-2Ć(_j;*>ڐ]DLN' =PfxQ/݄LA1&G=6AXrGX] (I!6H (kAnD,)Uό Pc7ҿņ(ӆ@|a1IaXp#eZ Li~SD y]k آ(]$K0z+u[l(=pWUBCDH) y +ܿ eU%Q|mqP|Ajs$A^RftaPVX[oz "șxh聈ɒґsk4 ʢ^e{?_zL٢Ş"9j =PeboKt{laxe)"n5UWo}X"8Ȫ3T.y +f9cCD5z s[züt bZ) b -4 HNBLFPMAbGcC5%z=6AYbK?AYdO A1OOBٮ\DH&DS)#4 + #&?AkCqlM ڔeT`LؐeJð}FbCDC"ebC3$Sh 6bCDcw%Vz=AĆGņ"YF:|f&  E1fU+sy(xND6L)!9q4"DR_ʶ@D}rg ̴9r E1]̚"('R=y~SՒP tɊWeL bɏ=6A1yB*r5VvAl(%=dž$[) Lɻ̫ؐe3dž$([׿+3 ]3\Im䈍ˑLfҪle b$%ĺ"(@_䞆A8_=CDѻ}ZPejR" E1ٶNSņ"[r~(bCuM+e<4<6 i*=L7{ d=$6AYp"6 }V~er."IE 0][lC[}e!To+˾{ Bd6 -4AeMZf^u R񿤚3X}xI5oF;fӵ=Q>[?fP3w75{)OYdԌl j&[r5K& 5gj+ Rj˥lc1~eٙfEds8ffqB$IjPTL^dBƓiG4Emi&)wSEb=iFf; -2&d' զ]jVҌH'l@I8@ɮ8c@!Tc4n`iơ* yuN4N-D3dB|n{);ь鷷4L^_<34VG:yf+VnO \:,3X3Uu3SL̈6 g>o3k̒1s'hWGn@3r~ͬ^;-͒ͭۀf(Rg~mH3@uP )A6t0@s D3=fkF4c-%*6t@ع3K$Ưȍg&1UOz,.r̲3C$cgjہf^} Jw4bd$4kS{#͚7~ ͚y,"Mi" W}:,"ZB"lH&4c4uKi/4⪓g&.v6~㴻s"ϬWkKyf\es=xf,z$ g&uT؎3{άdsێ3pp,8fU]HD +Ls=fK\=f$vDwf9H2cY=Y@QHHw ۶ˎ4F3D}6&걈4#q6Si&G4C$}rYpЕwN4:xh&lHt4YDɷ{ ^|HW7$`;Ln~'Lnm̓i`?ft/"ӌvٜ8fUGH34p{G=xA䔝i&g{fZu 4_{;htG"pG#N vr?fԭ/H3\t:uGa!;̱FڐfrY\=Uzb3d 4cZ뿓i/On3hNٙfB?3"$O6; ]<7H~}Gz׻ H_{,"Z i&)Wm7 sw;̤D[f|YUᬁvuƕ;f/]oYUZvY| ͨ} ǧ& H ySH3oD"6$Lt6OG߱͐y Z[P 4]~,ہf3F/[;ΌF)ٍxv4XJu6L6M wjmD3:^v'L%` ,kUG<V=elq+D3\c ь؍MQьdHIk{oD3bxf?cM ĊdL}e*;1C9^,@4#&h#ȿ:l!aF/4hF$pL| fZ(ohf-4Sc LE%9=#1hWl)O\-<3U1j;gfl?<3eI`pN3S-g]Ov1yP>6Yؤ33cKc;Ϭ17a5/<39R{πb6Y=f4 4ߦ @3 4lp^gO7YV`.ЬqN4kr:Mf'qxh,9mf @3Xs4x 4娙4Z 48:cgw.;ЬzOchVp8?f׷bh&YchƫYaQfzhC=?ށfc4cChVdK 7قہfQM߁fdQtZԄ6Ya=;kz7gV:g/<3)TYޫ jV7 <3j9: @3 rв4#%oށf@IS@IJM4XK2=@3n^L֍6Sbw\os;qfp*ęѾұdgh$VkcgڡQe~uX1gpm2( +41Cփ4hA-[vh.-^3& @3 N4#ѣ$-͈i 4S \-!CՙegFMc<3b4Uyf&;s+ ı?7fB{ 4#F5r +4D;bDH<^Q<3#в 4jK<6B.2v1Wߏagh-$0l&hFjGЛ7GFXf<D`Y. 5ݔ4e%ǡIek=8g]/:Ma;,nj%tl2%'nXfq씰la@uEZ W2{hle[gVn37zlʃعrtLFdc=:Mu#/4H8:iAiu[J T L38%Pن4a|Ǿ4e +J23wΠ$3LPfz$t.CS nYW^2ӓyn/Afhf2{MSQ0̬uBQ*R 2cej-_Ifj:If2 $*钕H23EiNN+Qڼge35>eꓕD2+2L+FcSu̔'ܕffqę!{EuBkΌ'\fYQ IȾ, bR43D*[5۵̬'Z~afCyR3fm3yՍ# /=W̬~1W:Ӝ33Wr;6nsyrxQKB3J7wٔ𐷬yy+Pq<`['MmQk+fJ $/{2ͬ0?uAUUOk>' )i +M]P)Ŧ" )ID R#a1If),go%Wzw"mԲ!0I2jX/9LKGFe׶\=GIGYQAcBefb6Y\2S'n-,~wXfh3{l +',3Nxٷ[Yf&> s6AꏀR3kfl,3L$eXf!e[ꞏ D&laaweT p,3rm?#e 䨾mE{la=P(q)̨e#|,NgXf Tg?sa)?BiM-,31bm+LaU)2S|m:+ a0 -L'NRwэ(3[PfeCC(u}F2|wu2F286b!QfV{c+ٸd6ﻈ2+mCPzs(3<9[PfZ.DS PfieE%=6QftyL-Qf1ع|+ʌzY])> +6x{lA99qc1+I[GY |g{la)ƠyrtʊY;̌#a&fFCg(8rQ̜:̔<:-03H]ư`fd[N35[#ͬAȆ wہfq& O-@3l<Ac㼬4ch5HchFRݼ@3¦A @3&Z\W'`4;[fT+-[fZ|݀f:IAh Ќr>3v FHm<U13L3[;  o@3ΒBUfswہf̦N:Q$)ݻK# 6ociƱPG Uېfhyut6ʸyD!Ͱ_4Q06\:f̿ߐf9%HΝ{hAnۙf 61Jp[ޘfeZfȿ f]54?Pt4 +4 Of͎U=6f8kbuk&{*fc{Ռl!-T D +cr_i6+|줸6{$mwy{Cb6%sfx\}dge +l6Gҙ9f\x䕐 ͍mܓl3ZKk9Gdom/b;,7䙒x%f Ffcn8:MmiOfgf7ƹYeN7Z>f䎷Pl3Y`^YX`+F>fV6{mVQ8lc)/po8f8gl*K@J{fyf9 huGm!Lt~kh3Rq@=:w6GY_wg dǬkzoق:fY)lKt3uԁ7 x3hěaZ7# f7ר[;LN-fr']pn܆t̞E7)t3YWd?H7SnktYě_gov^h>fc; [ok1|udz_o}8QNf+뀛}y;t;`}6nc-nQy:fST͆LP~LT:l%O|n&k@~ 1'݌^\'mpnnF^;l7 zc +tA&tq$6ofU(`3"&*OY>Lpo]`38տF6]" νvd y,8fEeoA6Ãl8lȩLҏnS|عq>zl9f-s$?fN6㹴k}66!L <).(>fȍn{E7'،Otق6ӫ)WtD" bI h3{4NtuІ6grh3u@J-"LeC=sxG7>?fr2r ӈ6wR؂6S +.6{X3^TV6c +L׽ߎ6c-U}6_Nxl nC=L)Ư3(UK:m6c lLNrwJ6cRFUz{h!μ d͈}b̑=^DWP5)@Oc+ی<6f8+E"FfxAuIy7}}>zͰ[6SyX>fLL* Qȕ딊6,imY\fH>>!1S)SKVv9EniGE~u5gQA`,nFGTnvhJ7׆sTN2 'nn0fdd}/.+ t3d,)R Pě)LF6-YrT׊7:kśF3͊e6# m}}x̲^woK&Y6)2 <6%BʒԭoK㨵oyoV)>͊Rh=GFoLϭx3dcS"DSeŷMYB Эx3m|ǦFCd*M [ ` n3/|3ƾ1$pPoV/L8F7M~**ӕz'H$)jؔ aR&BH8c8򝠞@8c82SgFl0J81gS&ENmLmrRlN'"Θ4j-8cR^# +rV[{h+걩QgdrƐ7L#.G1ǦN;ŋAVQ(0Ƅ[g42,A 3\=2%8Ve)⾸;Fd5c6eBX{=r3cA36xhhH4}ǦJ!ę8S/3YS +8c4o{z1[p;岂ǦHC73&%N~| 3אEHdc{pִ*k{V`hHn8̴pk|֬Έ-pF zp$SۼR/~5BpHA|3C7SB_ÁVyRߊ7#%i~NZfPW˛lɂ7C}x3b䖯~+ CK>ތ,# \tՂ7K +ɗY9d7# _7F5foFHFv#~CxW0ڡsś)Dborwuʊ7SN.x3x#\,ox3Bz`([7#Ս ִx3bqHk+ތDmśklO87V,yڻ"Έ+w8SɕF@(U6$BXn'ę-󁵣цDx*o7 3eX"m&+=6$B>F3C 8#&Y6c]"WHכYRבmV N=4BI"ڗ2ق8K:dG˴>,ZZkZ1? +, 3HJC5Ac L,6%}{lȃ P-07S8K uy bkn`y4-3bt3:zΈhxMlgI L屮"$?8bX;%,3BapFN3cWY,7S8K57h \f437K(7 ߌZ-Uv +8"Kb6g +n `+,Y5"rig2I15nΘkp[B/b~l ",G™ɉa&?u+ g>~&(H8+U5;H8hQe5$3Fn,40(fS4(~Ͳ鿍pB@8c|\Ӝ"m8z[Pm`aVZܦ3J+Zke0 +8>!U+ߌ9,kQ即z`Q"؄Eo`B6Ho`bJ"ߌq+$ ` YVCI(̚?`H 629EoDl|3&pvdUeHoJxlE|?fMYqQ2mXPL놡ěeX7{x3ʢVpnFUfv٤+W>f0t3z -͔ _2@7st1qQZ݌"[Mt3p I7u{l͌ݯn?9ES>ry٧CYvQ+ "ތyͯz@p|9Lm]bDanF9NnODAX@7~>t3 +nPD٧iqt3@|~_Ww65*g,hȹ*YQݦyl̀0{;1m 瑻&L;:oM3fE53;l͠ +oF 礛i}i# @BJbn@VptFYQUN~1S'~`K^& l3uoJrdѓ6c%{ocQǰDd5s2l3Ykwیi=4fP@Ida?mUXjy` +!Gl3U7>+ ;~TOYUϰCmS)ֿmFUie?ͪ2jvg`0f62cml3%~_?ftW䤙Lf]KdO`wc6fHy۬wGO2Dl3q4;WΉob6L$d%6ffAr3W #'pEyi+L-(O90mFV@6D5}r_ĚkFAM5y,Ě)65ɴ~X3f݀5c>οS֬'v`]6fx|~X3°Jc+֌٧X3uY@1hcѻrͰ)1aah5"-lޭdž4(2+,kD6s ׌ 젽r@< ^es,CFkF[X+ Nu5S 3 \3%8su5#6l +,z lg`3br0Ss yٯf)D͈qn'9`3#tessJ6S4"u( #$5=6AY ,VYfF#fYͿN[fY5 \3bt?3,V}ntL] ufzl͔°cJ6/'9mA)Lߊ6X5GjGXm^P6$ l3b[|6 f\ڕmFLRs"xl5pVff^duuِc\%%Ӱkd`2[;fYޓ~# uPήp3e$Wbv^^fJz*hmF=6"0",k#h6rQ˶l3b4Zv7#&WseAlԔM+f! w -r*͎c+܌mp m\dx|o^fs)][fs"#=|ֵAse/6˂̩#[\l{Pjv eĖbq.D ȼ\" (󶁨^f$$ʟmm5tpfm~ߊ6\& fV h3dy"ڌ#8NlE%u-ZfI好6WcmF{EV^hQh"J;m͒6" Ie|,igâAC+ی#y6Cx?{mFw%C[3^`{] w=6Q;9`ne%UhUcm{mF%5\fYyl8?oclAiFmFe:`F}'>8$Cl`IcnF؀eP 7 ja6fX}͐S0;H7;M"ތ7`ov-|3$b&ߌ, oy l2͔"v.7SjYUjoYV'!MO4gm +3:Inq>toF/׮63KhȫFL)YNܖ1?bpF/zp3*~V W`9l" ρpAbp )ozcpR\VdH8";v6;gLVr60pƑ#YCE#_jmq>fzos7ŨoFF{W}:{q%koNv pᅪoyg;ߌ&5|a|3o458AH;L Y~ gȳ g0U7H8&kL 7cȊ('S@|3NaI'zl8}X; 5ĶjF;%8grą7cOoZ|3t74ľ>Sg Y 7C--{LOLfέvA|3Hz f4cYQA7Cn7Q$pD7+hJ~vYqM=f o=Hv6 V޾7#7Ho)tJěKi x3:7dv鮚7xG|of<hTg(g8/fߧ_|3Yh$Q7HXkǛSXkě塾8frV$7ſ_xx3yx~Ps"ތl: o2(uƛ0 8t^~~5w@n}ޤ`~^f o&K8nÛ1ifKşo/RvRYě]ԓpF9]?g/M\÷+uY }rRǘEL2\Os;Ĺ~! hq]>uYdqL=~8(/L6<\NoЎ8g~8rGE׺dM 9Ck r,òC +3wY9=㬰|0Θ߸~3tVr&rE.hɣ"LV9+;ijKXQM +0Ł^;Ln<0Ϊ_?3ʿ"qA9UklU,9ɉ9kzzm3:·_sFnJs)[B9YcVXI_pr“csFrp8g̔uwΙM 9mx39:WΙ L^HYpI.E:[9˗U5q$C1ȿs&\139g걍s j69kDlt&0IggJكt&[A:,6q2fLZ YyIgMw{p9<Hg䁗jft&k tnK,@gZO9䌗' d眑~6<~p2Ι Yyѥ X Qy-;LeΙ|>N9g|.s ?r眽νXO%Lkl=J:C(p gI39䜽=_S69%;SVytޝs&gDTc앗ŧЙ|b. m36ije 3JY?茊Y:C_{ÜqK"ckLv^90g4|6;L-f. aMNw0gߣncsL׏E3y6nwC>0gr 30nx`\&w`xp" Sr&9q9r{cd',9 +afk5 +8mɚ+G7S6Ιdy38wu(9+3Lxh˙جuXAd:+PYtzӏ-yWYV\XIQo@茎R3VΠ@gw3NltV0j: :#|SAgFSnstVhx tV=Ag7}ir<7N jp:n3%V:[:My8V娱 t&ITJͯ:5T tZG93t v[YЙl:7t;OvfnypLN?q`l69:[Uz"L5?qWLNw9SMVyaeϝ8g3$)rp{X2rδ<_9jsicȷ_1|wdp5#W6bĜ1fC3 5Us`"  ,set%p$nBѣ}yּ;β{+0!p8V뱅s*Ss`s g6YֲU9SG9%r%4Zep(og-31:xE-g3&柏 & seLI7_woHgqfβ>E/y;&,8.HgD$?t=Π hB:C#',cЎ u-[Pg Eh,xYSǙ-34J:CIg*}:(:mlqVl7}-3͇c:C7BsA-3Rv9;lᜡ~0--9>;# ml3rZfSVUTGĵL-љ]r035yl&H_-O;>AϑL  g.;P1Bpg_H9+*دÌ3Fn.B=P:QtoPJ܂9cu";6Rh/93n1N9C3<"|3y }'6 YU/!gU!63J}3Uh ?/3WWo3MԶYU#lo5 gU!m!g(98-@(-r^ݽ$Mnr¸߷&ikɑ?GFʙ +ۙC1-c&r -ZmФQfa oQ֘X1p bQsI- hS)I9-H9T؇Q#ųriE39c4R4ln[sQ&in}z98DJ+aMyu"䌺cu9{l2pt`X{ۛ<6AT{ +6LƙZ +^*V6gskoǟMu yJ$Mƙ[ƸUdQ$z5o`1(e|r\O5Rΰ"t@9َܥylʃ.=6sGzz7.b0oMyC!0\e6AE٧=6Ax]L]Ag:L2ң:ӊU{Ag `alȃ#C$}j$) 錁~*.XIgLcS<2AT$9w1_/p]屩2 +5f" #N@ |.y& g$[hN 3cs3F9"`FYQMeρr3 + (gn8W345F嬨>PPhI9J/dž2_ҧ+ |de hCMUH9) g7rF>m)g +I)Ǧ4(fQc+Lm~1#W#嬨g̕rVtKߟrF)NϛRyrF-N֐rVT,q ;GYQvg>S'a3(i* eH^ߓqVu@({꠵㬪%<2AZvqFNǓ8UgTn팾 tVYeSļloc1dgqS/m`6ƙx1t`hUc+Lv<6A:#qq;r)8Ӂ^⍈3& t\Inc:>ϕyRY@Q2]ZgT lʃ(Z~!y`ؔQ?ýi;Ț)Ltgk|3t򍮚NY9kF Ǧ<Ǧ<dqylʃcSbgJ# ?b#'o̮3rz3gng LT[gڰg 3"'孀3vQYgM8kZ{lʃXg rP7&cSDٍ=urʦ:ˊ#߬r|3@Yd ߌ؇+}6Ap.ha[fIJjs ߌ / Aigzh͈_Xf%gb97K:@êఅo5Hl,i ?7AJʰ|3 =eRVYRlnaptLfV1r?A=6AId:uAr5R y19,+LQD[ʆhCD w7pF}^v#yAp_Y90"T$Mf=CCc6qFf NceT=6A0h9jA)È5A+X^U X+ -]gJ88b3{1D[RT"Π6{EYFęB8-鴨8cEf C&lh:2n#360&Tᵸ9{<-?&J }&2Yqƨȇիq'8{tuh`QJ\>g_wCE7l3>gAz؄Qڹ&.PԿ~4"鍥(g(rFe'@9Ê^"9nǕ nXڮ gɐ*ƸBXOw\3 +*6<4!gɼ6Zr-]?Bu&,7&,h +3*#& =6!gÛ]}r\ylB3=6!ghO3F;0ç|ݝ~6 g꣯&=k 3Y3!ǀ-.r.ΨjGpk*pt_C+;,!G{fA 1g>o!m3O)"Βf<ļ3-3h߲2勌3JI)wx]v6"cCbQ/D2 9OP2rFQ!gO9cC`W[!gZa4d ?+LG;+ EșVw=[!gˋ{­R;3*8!gZ`irƬE 9õV g6!gT(W܄1Ra~Qvs"3TUMt:lBh\v 9O6K9:1B(RzBM{3@ԊkQ1[r?crfF%礜јSVRδ,=brf6)gE~,0gح7sm3k m1k 43f ʫMՆ: Ou3 4T{l`hbe\sX猉*IH ?݌;p|ʭRi9ϤU;mrΊHzsVmrh:9+ +9+vFb9C7r=9+*Sm&LO̕si&s`Q3叹tδ%Ӧ#Lݷ|Ag*;tS U1E!._Զ8[R +wXFYUo[M)Y9Ag(%т:CA}4 .jQe%:Sl98gtV\9C%N顉9㔘R1*9 +;J;yhrؿ9D_i]ky+8 +N@:(oM& ˷n,{;ctt}t AAF=<+&C#o j4PiP&L۴i`OJ:C6n5Օx@g۰:k* *3 4ΚJtgklBt l#洲rF o#ʁrFS -3H/ʙb\!gJMZF +!&wnl2rF̷rnY!gj_)SӜؐFA9{lHִ}ִ^klUi%/J|uo9S,XZM#Q<4Btk-rŜZ:wx3btYe6Rւ9zxz>`Δ*$'93Ѻ RΔ$_+QrՀ9w*dYh.3@$" B9j4&'·PԺS匳ƛ5P+[+o+L$*~Wax٭KVʙʂ#rFOQT;F"Ŀ:)gd N(g8xɒmVrRWi<-XhlŜ!퍊 smsPr 3M{7WĜ=*khEuN +9{2ylB!x|n@H~dDap%yO`qT=~_8{t_gf`k'0#:gdW[5+GqgX!78c-c6gq&˨pzl"z/Dq0- ΰp:c}Lc+LOgqmWubbywgh%qs& ðً3 +1WGM\YH8@p_<(9ad^I6IV^y_dMęP$}f %%vݷ_@8uFޱJR$%S ;p'X# nP@88]pd1ӇpF>M#,i=8 pے30HQ?0͕qFkE)Ӟ3Z+Zh32[gVd%rTd\a$4qtf +kÌDXhW8#5_=0Hm&Ld_m[,@ \yoCeE|3:,_a#8ojm݌6sěµc&L%wugě3F2߆7#\oо7CYJBu ěYoތ Fo|+|x34*njx3G9>ffj3goB@(͐VwěC3BoML%n f$J\O1_0fN'݌AI6. g{V٤}:ܩJ;t3-tOWF 5hnF>qm=6f4Jt h1f֞^t3~I7SO&f~_f2EVI7ɸA]fJD2tVߓ&Lra_KLHubJ7S"FcnRI7S$"7u7S$,wp3%"UmfJD\Rt +9 +7͔Tt ͊v`#݌T- t3ʥ̕nR}{͊څI7S$,FG/fE)./REWignVޱ"n +a[fH?&݌ӊ+݌Fgoko;Le0+ߌܥ|Vg =YMe8ƣoUUW}.8~3^ 8C~(&v!'EC-ln~l Pv? pF8GHR˹pVu"ub)$3WD`=lV}usOW-ۗ< {:Wa퉊ԴI[ Vx4g=Vq[W+-jczEcrAQ-.6:%5,X4?Cvi,%_N.PzjU-^OKDe+oɠ.siHQu5>r[l TИn +gL?4.ʸ~%̽ˮ$K$nos`0!0KvYr Ea/By蹛anj&*.4"yu!o 79rif  +Gn ɍn]MΊ˷$^TI KhcKt*5/XHsg5XVQ6a(ă#j'nQ:.R닜Rȸ0وI$OA oȲ%iGiT7)b{H*gEꤸ +x4]aALU?%ؘ%^i銉y]zΈ|Dfb--j7H$1!%L +)2Yk&WmkdU0W`ROLPU\mGA̧FzMjBݟCHD"ofF&w9F]d=PlDh?wkI)ף;p"/`K1 ͼH\<9*6v̕@6)=U[C$G [v1>q 01TR%jb爤_pzՙ\ R'5`ڔĹYbNi<J"[eKȑX̭uZ[:ȩMu]1qI>6<%pY%Bw$_툈v%gzy#w0nZ%#'RCfa伲qDjfKoQŴ!uFBԓL6fc/zB-:$pE"L[LNZ̀[6Qα;Sr"-`˶tf ][}$Vkqj,7lRr?𝴥ozP6Q)oMið&a IMY$ ȲKm}&'H֑~{'[*`0v!=B R.ȳ},Yl+EiGRq}!Ro[ĝVadRgoa䉏|*6sp./!(4WH(ݚ4(hcqb^D9j +}؊/ 9֨qۚKPzeSTQx Q)ڊevI +1h*Ǝ.A({_WQ6ra)֥ʦYq#ɜcWWAdMLNo]]j B> +eu(aE,X"k V6!ofX* l>dpjy,oc_4-5 b'v"Qn/rJ'"I.ms3-` %5z֑ûHd_C}ג,BzL1d,kAtaG֣䊉-7x"FV%AB?(AVG0ױsM*(21VcmSL'jdZ.VO乳% D ܼ  _pv8dc=kYdߥX@FU[0:^+$gҔ}&HJߧIg- l:z#7՚}%DR|<*,ZqN@hkF*'ݎj~6>*#Ebt!ʎ.y"̾$Ø]-&F78D``jFb>D[$# ç}wdP!z[+F(۩amSvR2 R%b;uGԍ)K,=~$xa-+N\ ͙X7O5oM?)a]`HL1dThrVnrėJ&Bm-olE5tLiI[1mҁ!k$zŘ 1ADeD+`B +&YH<-E]X~\/Mbj(ajSt%Ê\GY%f\UTF *?E^a>LHIƨj3u QSXfKY)^rwK6MELO R k=~6HK;gI +{KUL&Ie?1b@E&:F"H, ]C0R '$O<Ú"ZjN3=չ=L`U^N4Ez$W [2M +3: /iw"`vJ\}!UFi[bɷ '1KM.EߧgꓞB'¥<v*jwɦJYKdhRmjgOWgjhD1sPf峜֯*֋ҥw^lT +q:ckU+ILhT{uKbnEP$$2V:wK,M㩰A1GCUKង3nWDIXE^F섌Quv\K+!Cn*8J(͏nP6R :0>4]ƨg*E.T "hX#aNs(/ &ũDnP) Ayv0+ +Gm/؃ Zuγ80 mI vd7KLڔ㲐AtWC{ 71 aX]:BB +ƇPQTXh!PAb['0%#ڙͪcC]cy~_5Do>׿Knr=Rb"}qy_T8΋Snn2>z^K}`Bw?Fb`D,+i66M8CWȸݐY'o2.~1/_ߑBQOf$*Q/G=E5Qm/GœHuTK?0Q.3k^QϏJhi^QϏ;װQm// w6DGu_!|z -Leg<^q}>㓤ϺΈk{x4I1#:"?nWqm>1 k?0Gp!:|/Eʇ|\j#z}{\Lm??.jkh 1~`\_ZnG_q}!赿B< +9 >Pj^k?0/D PƸ~`\_^BRBsC.Vͣ7GprTڙkʏ܋=_o ZGA6,/}{\_2.vP kyۣB|QQ/?Pq\o YUe@m\KⳎ Qyt>o Yƕt9ҷ(N>o ن7ɵQ}!k;p}_`8X|\KW#=-ZJKW#=|9q-/}{\_WB^A=/E'q/}{\_&UҷX/-`k}bbCNE|\K=e9)}-6o>tk1+}1S'Vy=/{5kZ_vCq}jggZ_-Jqm/}{\_e~hҷxG("mZ_cսJҷx*䳎q-/}{\_H?6uq-/}w\>6>o>R=x>q}1GQjkZ_cq@1oMŇ|\K}4'm/}{\_ⱜҷxϳL2m"m\K=fG]Z^yTF(wUXx|poMW$a-|{T_|kS k}bt9.K}vy]W~}jՕg5q}5ڋXyظ֗=F ULZ^Cņs|ۣb{٢Z_#= B%Ʀ6oq^\7ʷG8OW=/Fya.p}ۣbL W=6Br=_|2K}?v޽D{m}vﮍ=D%Nn g?9放97搼9K7携9 7搸97搶97搴9Kwf9 7f PyϡX(=CQ{cһs<7gprL5UO|uWm{ Q{yP9Fp:zcZGlѻ ~>0>GXr{+cچ~F 39ԧFs>m!όzZSO!燔>3SiO)<}f<:Rvh.䴎&ӧN)u8?Mx~H39rӧs5m!ŦOe@2SjNC(jO)F}f<@:RxNau5Ci)>}f<:RzN)촌>3SiO);}f<:RtxNu3SjO)D}fZcP!>3SjO)A}j<6Rxm5Ci)9}nZS +N!ش燔q gk攋ZFSQ)>1SjOD}f4,:҇hN9e4? 2Ph~HS'ۻv3:P:ec۟|vnWGkE[wA^9y/#1rB^z/+17B^9#z/317sC^}z/;1C^9|z3C䕷9rD^z#z3K䕟9D^9y#z7S䟰tt17E^#z3_䕓173F^y#z3g{17F^#z/oc92G^y#z3wK9G^#z33>w3H^y#z317H^#z392I^y#z/17II_6Pr͌WcLj)y:v转W~cLj+y4̒Wc-y.vWb/y(v W^bLj1y"v ,Waǀ3yvLWaLj5yvlW>aLj7yv轌}ۀޯ]xv>7N^y33>7sO^xy/>7O^y/yV ,E8co[V_ ?(]emH!z!]  _ V+>TBNo1Txt= +<${, #@&W\ + ?yBZsߙ.ĨW羓1w;5?BW7es?F!BK~4+:V_Y__]Eu?`ChԈ4}1_DW T_H2[u@\jm%\ҝJq`*\&k'SqoӋ!) QϯzjCi%u +ޅWX]a,gEZÝs _+]+%LvxܸNqmH!6DZt]O$cA)UGݳcvXWnnF0onnkqBxXb}/?r-(Ɲ<>C)݌+Xz C CCkx0CڵeJa +9+'>0C+x%1Kp!n: +5> w=9YBUb&+Xg}^ +/9+W3%aɱ܅Ƥ0cGAcMn'+ι9Mx !qxǤ'%FMu m&m wȯ0㞧^ #"W>\0=ax.}:ҟp]G0ٰ 97Wo/iMr]V⢤2f 5 ןWnze%4*2  ⹩);0,0:ǹjXw+=1W?¿OSsrXC~ Y*kLi +KSf;?֙ȄXb,2\D8js:?Tsްlw}`PaXJ_DZowOcrnXF Nwn~BDdErkx_u:Na.b&,ʸ-ᎆ!pu!ð$w$q >'a%,oKWj2q m COxWy1MY`0TDt Xf0\C0qpŴ0\ڨ F5ז +;V lF:s˂eHBcR]u><1,ɚ, g$ c>d|6\;5E^$W` +HA,ĬH7~"֘|!eXNٰQGm˨ +*k wJ̖Xj|],$Đc:'P?&~WjuY7C CvcA^aSLcǒl(wPX]"20⭿~E@R3yL*PMV|wcuV6rO-TUб$1j$*+4"@)XdP1TW4 /^e}w%sTb~p)eXTvl a/ꄠt% |ϟ.aY5A(Z C`ǺH(g^}7jr֙݀!_Iierc*$]N閂bPi,c}ȐcX >IR EݭLa0~~tTMJq'W.0pn 9~p7&Oj*8P0Lpͳn#愿70٫g /u`75Dה8gv9+}ZRJjGUuyXf%!v[MI&ez".XhR!{tPfW3ea]Ym!^J3qwna!:)AݬHsK5ig +[mAkd1) du0S KR#Xca>E] CLӊ`A)bY5`z}nr'CY*)}(bhM +~׭(Rrw=iG )S T Q+; 4+OZuXh2f}!Ā|p~:VS *vVov%-58 39:C\U]0qݸ2,rx\':H`Xp aZO<0W2Re7haɸ\}z :a"}3k&hX>3OuQlKDbv"SJ1d\V +BaeĐT iJ\ sc31oӹYS|]ŊxU} +,!]閂dUWFlԬ6, +(ެ;5*v[,0.IbyXc_u&i"`2 # I35hjEJ 2W48 zP!{YD,[i"u[Z%vӹ%4C6@ު/ ++ݰ`M4t7C(uEoVv!n4Z Fڮ:F;M6X!zZ1d!_dV +.S +Iš}j"'hWV.Sp0KuQUluM֝4Q m G\ےa33}[ۙA[Mvlc #!1aǓ7i+3b7'$)]m´-<1lc7m uXv1F_;C5;I )]};xhϧϠ ԭWL#=Lm!<+wPzCO;A`D)m!~/m $"ZzUOl0sQHjjbeg3V!ԙ%˱!ħݖug!~ U69yvl#A?!/reFA+ F%hBUEJZݾ{'uYU Bp_;ATQ+6ܰ( XA ŗ`?ib?ؿYB]:F~(Aiۨm nxDp, ElL6~2qfxDBAHxcugm{wAzAjdFBddM vP< RYG*1oYy BpD{3m!\EA[nm 1r13la PQkDwpct)QC(BEns ;Gu]tT$b)Aspc dXYB&FD4!9U_h +FID7L, `މB9JܨBv$)5 re' `lȂץZ.OP+WwPn[ <.vp ՛v}oCn!Ej *ƵpwPCbL6T7ij|@Fh"lN>{a(k!BВ{FNG?T8_p#!`P_ UE8D}YDTy&EkN*;$K=Hy~$Be7S%N&ר$yeqt"|TD +\EOfMN)*ZWNOϱHE ܁Q"$ 7Z_T: +k1މE G5F-BJ}spKLx}gvrQa9UrwpcqCӴ9H {8{w~2FgF0:a4;Ũ +Ynhld!w'1$L|eʰ6OZFDd4 +'"`*#:X$FѽFL䗧t#$UD7P=_#:m@$w&.9 49}8E@#mm'$86Q( pc'KJ`iG^b)@X+8(igdauwH'IBI49rXwmFGv#q +CяE鑝UuBKJd3V2=vk"c !E_ (HQcSNAVI:qe]ArL|?++"p; p F)-e-;wp#"ŐUGnLx% ֝`@r$ )g x0c0d $$9*6BJQ<3Z7Խul$7VRZe Qc-UՔY-k%]<$6 3 )o)z)FMPsd 1@WVŷ$][*'?'GғpU| I$ό+? E}sZ JBD)PE'L-$|<4x~*Ot5R2j66ٖ2AzJčC˯ \hJRMH@-Y;{I?yIp a˚~*El*1tzJ"tR\L {r_JWM@#҇n[-/ؤ 'džqؿ}1Ů ]D@ IgHۢH96y!l9cbHl4=B:elRTʖitF7[ pi.%n 3%y +qT {$INS'ښ\HMr"`^~jaܺITMԽTϕ @1`ZMT@Ȓ;pxcBKrkZMDye7Iw{V E曀nSnƪEMQs{3߈ϐ\,p ˝g,Zu8^ls֕$RTw\`#IϣK~![X +˰ o>E#W2 {e[{%:cƏ[N@Q,0slѾ<mVEvԊz\`XNΘ>VJx6ڸ0Ic*`CXlnJM#T z[SdR4'lc Ily%>֗Tļp>c`B|XLaI~4 BHVFX9-։4+'="^ 3/:2QĞZ!js)fp@L\w0%C.49w&v,( +MI +$gˬ-<("2'wb <p܉kuU Yʄf;Rd[T(~AZ+J,\(]VYPҷK(A?M $ +uHTPȝoT.]M Hq%XBb|Z@ #옚Y 89Q<Ŝ7 ̯^|;B 4x(G >Z,,ҢbDx(j:Өή5|e-(rI"SBŽ"jd`/<x~lu;YJ@^RdcbP0őcXe{38RjaH(Ţ "Y'9de6Y;Ç&@]eg؆'9E$v L)O$`\R"M!JufTII"兵5z +uIj0FHa +,wB?&Hт^-''LQ">wKdSw&eVeaLIIV+G@zN;QkUHSRdS0{~E.gtKk(R$ +NMNm.Kʣn˭*SU _X[CV_)M^S]n~8 TOu6$!ng,**yvIpP% WPՆA% P WDG. +s,* PZY2(`Qq}cv b?̐NuG98<{Op!lߢ& +wEʐLP{k<$H2U ml*5%ycupҩ9OEl +XB rNFS.ێ"? ,5x0[Ilba+H ay'*ptU.'rV$j=SALS,%pP25 +0뜸%dNbqX,Xk}ܓb)@g[U l0rrRBhuFXmRs ܺu=U_:ψH%Lv>qtvt~UfCؠYoxV+'*'9QX b-h%b%NzU!0O^yӣ5MvU`W1AJ!,Jv(Lqp2+Lv3&$LVj*րg[' yZAWeV1svWj!l2Lg@`1Wb|ʼSdYC":*ɮQnn*HvUf՘f|'=UBs+ηn:*D՛NήO p2%;O*/QD#Abr>̮ +)lCI h*lȪz"LbB^/j^6IbUD`]/6VS!55ȃ]nQ lЫ'yK^p5[Oj?t6|Mgç?d7]x7]xeǛOWM ;o4.5Qz LǓQ :񰢶 ; ŇA0[y R믇Ata|h}aǭf{MƧAth|MƧA^qy4n^iǛO<;+TX^M[ǧ?޴u|`//o:>> ˊҾ0NG}a7 y鐗3p3WyeUoC|:MȧC^7xᐗoᐇ?!oH>'yFᐇ0 agA^6y`7 &yG(ٰ!Xn߶ޓCKūO<:Szt:}ҴyVmp[)Oՙt#FE6,!oq|:m!ytl&ȣ'p;-ڀ6ŧE?0jXD(C"im9?yrsSpW=r6t$}ͧCnۉ{:5kFVpc2RB~HjT<,XyMze%Sq!K)0iy(>;=4v$z:5pc!)S|bk' עfn"55oHOgNV<16]C +SrS%Op幻ҭ.y-gI1tzo5$Oc5$ 2 ;/LxKfn;mxæGx۪x#svq=DpRp><}n1p!T+LIscf~whaTK9yo\B&x!O8,/FD'l_Bb$-ww< (?2ybY܎M<ר:w<'=DZa'wѦY17YOC :n +:I4RB qͮ x2io*l`7#Cza*Ŵ7cuǣJ\fff=6fvy ;#]4w{.}xQ\b >V{<2]["D{^(?^Z<ϦO 87=^t/h߽/ +4.7{<>dYXf7tq%oxQϻ{?^.L (nM<گy>EH.,dhI'2$w.x58MW{<1u VļMr0]Om\dl=SFm7#(x<z;' gd O9[6<o +3G OF˂[]  VգCvlO<@'Vh3*XݠU !ۭTW{<[]bk?=^GVJd'l=<&WW{<<˺Oju2J̾Sf?^4S7o:QT׶9e;J iWN͎.6<VmyOui';/ǭy[\E~jzPZs#rOX,tmEVzt";+79+V<]a7U dWEcsps o}wȣtZZwE^.J>EHy"Y97yp铷aOކ>y ɛh :|;'o=lVpɛ$oN!ț#oyGu)[7y vx->4[K+p۰%oNᒷaK=\#ƇKކ.y钷aM|ma7}-6y{aaMopɛ$o؀0۰$o؎0۰$oأ0[Iްc}aaI}ᒷaK׾0ɛ#o۰#o/<60/L60>/L ;L/ $ovaN$o0۰$oȿp–pې%ӗꟸI0WôK!TiaM)E&>=%OaKނ=\rvG%.y9pɳ߯\nL{1%ov1y6?_`̨zb<}bBذ'&OF^xwbaQ?哒G?(y<N;)y!bICSN;)yu/(y!l5N?)yZnL;)y RxRBJNxPd7I NPc~>0yV?0yZpm&:<^ +AR/ #<ѤO {'URSq욚*䡶&wLV;+v`D#hɴ%< rAɃ$ +a?%o-;1Tԩiڥ7JHwJ|P*`zP y0<ya:v0/'ڍ@':`\ᔩ;#oD%v0De|2DcΏi#O4vw7e;#O4P%r村'B#v>y3 O=yKv0pfeFh +<դdN#K6}a6z_25gӗ)y5G#1yh[@wL6F;-B xDsD=q瓓' L7NPj7Ndp;&O$LiC(Ƀ˵پ7V gcg!y/[1y];Bz~(!ܩ]YQU'pD7!]c¡ &Ŗcm<['˥;'OF2<4ʓM!o< N 8n a5)KRXwR,(C<%*'(ƃqd .B2ɓ ''OE.|rU;'UУwN\{Gh=wL0- 60I޻cn<4l;'lO&cY-~>1y2Lqmm fcK |`Pf\OL0~!Y&/zp}L4 :<։OPt8UL.!kzp3,[ ɃM Ƀ]}8!9c;$~6$Io<S<(yO +V'%xt3rR*!V\ᙸQrP%]s7p0h^Q%z[v%" 0y}u&n^'Th&>1yL&-;&/smjJwq!0žG<_tT0 +6\;Q<0yܮt󓓇Dɥ;8yH1ăxQqNPx!6. oG@@yO7|tbǤ<``0 ~y2s:Aym2 @y7Sk n<ԊpGV\hy}X3'i C b;iyL^~aj .n(xs;-] L\nVVDK:&*k&N0Xyڔ>Py$,zC偨sO6kx bW+,!ͬםqjԜXyഠ 97gmL2X0 P*\*^[dALayĿDrq T-z#fSYyФWuN5u( S| y򀛑/b(.NTD]~p 6ARqCA F'*܍wT75LŎʃ*"6|gʃ(o"R܈y\;#kCA6&n<woSу7~r0 bZ@\A2qB ʿpS ̓m< Kݙy5Gm D3"UWM,4[ANfK kܘy2m;2T&$Daȁ̃my8y@桚YV>qe~˅tq桼_8y8qj>0%5؃u +p  +u#BKm]<`nQZxP)d./y8HA+M\hpu=L2qbxnw\JN>hpHU͡ .cK~zv4dB]48tyy bZc'' nN' ,ε{c # +J o48^"ux1EU/9 Jҗ86K"1G(08s7 ON&m؏um0=| K/uI>qp_ qpptݎh8?pp0]Cja(UjҘuMgۉ+imRqp2,WP'W=qpa?펃z膧WmAC2N=hpkn4ª ' C2< Cr)o+48ȧyaiUrN9hpIZ ƒE%/aVC~f8ap!%9m!BHf X-D0.('m9*]+{g..Ly5FKShʓIm08I\\"WqaX.(8 uiPp%tmWР Sw\ŴVfPeLR܂tg2Xp +T'm๓H\\08xZ.08,?z! HVZ8!#fo[S\08d kk'axmD 2q.丷G溙(,ƨkbPwsu#,8uf `p?3̟6w"Pk080iXpL(, u펂Ck;Qp[Ѵ'CUX>Qp|n' N=Ipr$hu/Hp;5 ez)8 mrdF>Hpj^ћw'UzO:lK . uN=>{S5A54$8UW$8=-sɂON +SqdEQpqBvdu˵gT(88r,tR(8y!wLOe;z$-A[%O<2NMO(UDIK=t܉eG v{(T. bzयŰtw\nglN@A8BDNhQyGd҉4ZC$$SE| +@ .#:$e"9i' .gٓ'r' ΑB/Hp+hIz cI[' .Oӓ$xXoIй̃IpF' .ۖ ^ɏ;@prdQJЅ ,0'(?_/8cw\Y r !ȸNn&Nj洷mAc$8A+I2%9%$ɌXZa,N!qΔ' NFj; NyI' /uO.N +}d:wY +o_ne4Et;ApMd;%M}H1ܝg VdApJ%qApp57֞Ik'UC8|rzɹI'۶ua8Ap] Y7' 8ݘq J3I?*7R'׾ w 87I;Iˆ;Z>8Ap 1ƴ -{ +B:'%n#1|Z$8h<$8Q'm#!ôEczy Z + ~T~#A3rT!! (8hrCn,8{MsFM`p-Mr8ui[baMf8ipL- 哬|Y>ɯ' yX)M c\` PpUn.zXXpXQLXpe_`A]rR3uӶ#FǐrYH\{XpdAC(dҁýnږxMJJɸyo[y?,8f0΂&cdAR6ADyJ' Z6𛍙wՉɂCbږrNO +;`1|ɂcHP!Čr,fiEH#ʍlzPCd1<;d1\h_,8h2twN6>8!m!hM.>O\Y2LBxiflxy MЍE9?Xp,lm>' +nԂ; +qaVIcVy1 cR@p *'Z'ʹ ڷ-'mc]%8p$i8>nA*8`vB!i?쑏74~9pY-O4KBs^>g~yGtAo8ty  4.m 'Ϫt@uQm hmBO +Nt޴j<)p2oAm7 +d&褷:(|RఔnAX>ifBEl셸'J <6m4'C\qPNz{"KjUɁC1u>9pV_{r<] sPsy>I'.!7^Z^pn?cQ:]>qp8'}\Ob5$2j exؽzI46b<8DoԓX$1!5wAM\iN܃y|1V"3,Q)GvS6ekv)yɃ#B&J=9n)Bbƃ# 62'PG'm9] ׵@GɫE@8YO em@8)ŕͽP55q9n 3`Q 0 ʔ%m<8'ɃXyɃdDLji)BfO61:{kAĸ[ypA\GƄ,pLsO3@iGPWŭR(&,n9Yn@8ny)  sq9  2juWvY>(n@8!ܘ8vp;n88t=u`88,f%7@ZG0OVɃSkHm6hn<8hokxKbs*7 +ZDnyš6$\&;V?pp!p^irq9]pMkf+ b9H8K C.dmH8MƆ7hCQq{GQD~ufކӗH_̓"ŕtLrq9]sCQﺸp˰)y +tzↄ (@'rR@[ +tu<⎄|$p:<:p2 fvyv"Dl zNAXX\\N  $*nD8XOrN-۾UDk "G.D'#N 9ph±Cd6ڀpS3:WVIi׋rnƃSOvT{鹈΃S4e6yp9 (!)!tKA|Os6Bce<82|?xp(3-ӥpPy@8JO2 \n<8-Ńz!j;xp8;. ڴ-áŹLqP*}Hґ2|##Nx>fp8O#"I +L\H8ԺR4#p,U@#p, e p 4A;g.-$`@miM\@BKtI#D8Vit',۬j#¡2se4pP$,Ba 1^\7p@̴-@i%{2A:Q&`¡P&Vsc!08ń 5&}g ޫW@q2& +ɻAᰗ c(v1u FY8p6!ł(gx XLm1hN&ZeE &\#!b±**z  CLQP8T!r}SC..*kTp+1'<0A/g+.lg߉i;K3\^>9c%"_@UXu'K W[(N7>XbJC"kvXh!z6CgmqO pp{Đ;Ö9ӫv^/7$-X=O +->ib^n'MUja⤉!Sҩ\[41oONc5ē6ib8V&mE41ft$ErGCv' uJ@7XzU G (VI*5ic˂ͨP<y![vXe\3䉑d `vX\'`bp`x>w;L Q 8vҲdГCAn(1 ڬK؀crI +9q<!(qz&. |2e%u+K׭sr`%'ۮ߶e XtUlb*!d1rvi-8(6 YMup?Bd SP-K@(*LB(G{w`BĪB)^8 bgz#$Tߒ!y{ҽl8f'ʲ3qusb5@ҫYI:ZǙe +EbT8c\'lԎU&>AVYMj +,~LGE- +(},!(̴ Ok3B^)A5p-&А Mۣ FAb9dz*O|'bpܩʻҜVp,F] {dEDw25@M +P B0[ZDk"˚ e(&_I$VN\u +6+o34bm`AmZPsgORviUɠ7BF"pTz Qc|IZQ{ El:elˋ=! +2}(ƛ!yͭPlnLkz3v" $mtKXM6qѻ$<҇ȂxGd8f2 e~0!_sR\Iآ`^QVk%Vsi?dX{yP;"ߌ@&EJFÓB*qJf/^Ywb4D>"{_е,I,N?G*#,6F͢C_V {$CmqL(i@z "RQ!"C:AsZ-F(am[wЩ<, A92;ߓhh83lYa]"2` }s:<*`PɅN9Y:/&H%D W۩7QN9gr tS=5$8"+$nD H@ꖑ bo3; d +3iA. q-;&l5b(AXdC7KX)8ۿk6 +c14LޱumòA৕%-LuPJͲWr29,YEBg˨?А,M3vNMRG +DpLW#|9VN`(fA&W} {B%.lJVGSӺC9SS^VDjyXZŸuGk&ZW S6WO3gUxrXOᙬB c^T|Cڵf 1#{F2ݦ-0a][ͨvjt/'DuS+~ bhKq4f-&e7?kkSihiKbo <*= fEޑ6}k 0:D<'c .|gK^tE90%iXDJ|[ '8Wѧ2npV8k|[d${S$w}Xu+4y=t,Yκ&vG("vP$kD@I,/"vJҎy5PBڹPUkCʌιK%YO Dc5MvfOz<e9){ͺ'vVïmb9e#5y* ›RWuCԅM9,v: ELB=A@zl:( TJC̑t>sePNaa2ZVa"Rp6Ռ4%/,Fj_S!y E=vfd\f,QYN6Y̲w]IQ u@Y_Wju+984][E6}Q,A֪[Xc=$ƩRR6mIrCᥓLW\ yZa33hUB3NC.- z*Ўk? XCyN-elAO},5lBLf &vPsaS睑Vit Y*( 8=Ԯ;.ue/M-B%j487ǚz< anY sCNKC2uj212iatztLUtsѓIȃZhj7FZA+RQ[2r*e*=άCrb۲Qm8<L%l4/A2ڀ>0B=t3ܣжUC\u(8OݴfÙqm?G ۄ50(͘Qg~Gzh[<7=PW( ˯4O{,SwqX0#!b4jJ[պȃ^=y}] L6Ѹ!-" ̕{9e˖5KES;; Q,Oz\Z[#="$7wObϱS#*xZ1A;GM;.u"γY@yؤB47<6˚Ax,f &5&Or`-D߼o;0Ӥ|(CKj;\QH$d2x^t 4Hbx +:8XG9}&ـXoeQa #Wʃ7]C` lO`4f.{/Iχ+_0tR; +56)cb;3 L26I !Zn.fcV:)b Mx5/,b3Z{FNFy9 '̻;po{3J +51S{X(´wʭ*@v8" GZ?i"zAi GT^ޔ'$MSK.|㢊ؒ%0qV2F 2ŕbz;U:MOܲ:K@X7)6mUmv$_05}Oi6 ^*^~ nin@x:cIK`cbXnc v:!3ޓ+s"WquV麶Y'8ݲ-S^XʺU@{&tU 7fnyە3N/5F9+-j}K4èU`oq{"BSZ1r;&tv U@v- _zъ1lV1zU- +||ܠlN5{Z[{P-݀ү9E>d:N)rlMu.jVTc`k,L*nO$leM>ygb8<4N~WA I*0?awԪn mA-kGuREy{hѻyiFjZ'(t^m߃A9˯ID$h0&G2ɾ \Yr0Sk^û\cGJ6Ġ"]"ϚvThaiV[3l%VP +{߄S)KO +0fs|PC99nL +:ǰF\J/ݽ캲H5VO'(GuN,y} >i)*8g> +bܲWqmr'Gf;6-B\eQV'έYg?HȒ~??PqEۅ %gK% YX埁tFF d/ކo@|1_Ї`b-?8Ex5yW3Q˂gfaj3=BHSQSmu 3](ϼXr!g>rl˰T>?MRqq||~5I48_b LT2b*W42QQyҿ\7PK#(r(MBbڏy^ tz8dlL MdٶZ^~5T!}˟!gL?t`;} 3ڹLz|b}W)|gFŠܟ_#ċo#`B+Fg_8LT,z 10]zEʻ?7|܀q~|S N7Oo31pD$HO?_]+ϭ5$=CEZ'w'{] ~'qFOD?ףܜ[}`,lS?٧!^84^*_ӭ#QZO(ı8N=$(_r@<].~Gcn rp۵ӵ?ӵӵǟ?گo׀hLۏ3]o?9j :.~Kj% ~WÂmM G=777E +?WD;W;Wȸ)ҙ!_d&P!Ǐa{nf?f}gro?f}Gέ:~_hr[ǏY_呿q뷎}K#o?f}G4ĭ:~-z/[u[^>]x[ǏY_Ib=GҬnm7}L_n$<>[3G 74!]b~P[> Wfق/mۭHB+#m*+xξ? Bt[O?_wpv/%?ӽ;~>cDEg'[ooϟ=.'ۻnϟ뾿=}{{n?Oޞ?@~{{d-{nϟm=;~[6'nϟm<=V=混O6ߞ}Wݟ~v0Z&~Vڊۏܞazs{7nzxܞazo{֩y67O[7zضܞ9zs{QzXܞzw{ƽ;7nz۞azs{w{ۏܞazw{t+Cx+ V~EBíJ"Y]HlVi{gEZ_8T=3 _Fw]/|O]ބ\W٭*vۮ_ȟ|㫫N_i@ ӯ Pk Ldv']d- * `z?2|) Yv1<>R>Rn{Ұ=/엒!ϏZ>2s]Q2GK^2|U; |tb?ĎJ6|H_ʯu!_J7럨{ON[&J/|OJ(ÿF Gt&tmdKWkW9*_WҤ``Ӈ +0 @%0 SZڗ/|$hS'~qa?Q\z~fR_@7RC -?Ksy?rIK (O|q?!ɵ>lӒA+/>" ( yo^kHxcHX_5B$Z|uE^1~! p_ժ!uy^Ųځ0xSHdb?di}XT3{$sh7,oXkF<kI +,>7+e'BSz T-nUm\JK{hPM+$Ͱ^0/nZ즥VRKO >Z+efM ^c'&hi40χ\E*AZ"/ySbD`RjҊRR!pM&yFKkd&MWJfW/vq* +mBov;GV‘U,MSL.hYG '1U'_d 2]I{`琣"p C!%֕6I2ёslz"K5@U'M9_bbKOfP/Ãr<(@fbt%hZ 0n, HOMwؕ=yPq)OsQ]roCYL/WRKpijaShWlZ.4e Gk e'.U<@#q&yhWd$&ۅZ})*.4jvAO2v̈́ë{MJ?@Lnf+C!c&7_1 =\y{2WHFڕ\/M.tݮN #4[kWb'M[9-o*ZɢqOusa{q_}6#Tk{[њhAT]L%0-K4WzM!5|wi} ?ޒ)޼gNeFEqInE\Ttܨs5V#5ӺjWv{Fݰ,,LI*rO(chMvd%4i%_P5I + +"@2 kHX]oʌI޻a:o&p1D ݴqFm|D0QGӘZ(v{diVIzzU)Io1% +ԭܰ BheD8Oʷ):I juy3T\֤v_ YSP/YL80ȗja">mEY?EӿLt2&d,91s)!W],c 3!& ӊ骑ԮB&6e4[k"/t V˵D^&YF؇Hwojx˨ ;Xd m PMz0&ttOdM9(:^Yꢫ۪ek r]a  +![+LdЉZ !2*PO;[ Ctdk2EF4x2 +c _[ zd&K2yiCbJ-a$SZQ*62*`Dʝ1[ 1a&K-l `ܗ gTKҹ\)__hIǯjm%N2+&IhS5Bq2`6E^6y|?-a6Eұ6&iSHބ$# flqNqDK:ԤI3*Ƀedu;Vba1-AI&:蓲i AC`;2I5H }aɀc6֧H仦uSq$x@#3,L^]~MK+ #^$S1GXo` 4\2_;s&}qe"Gιb#?rwK_}+x}ЗmϥH%뙨 P,&*\ +YdV?դy +-7DL0T,dZv.xdbY;MVU%>)M&2]mD72dQÄ[|l\I'hlPj 2 GLd}H Ԣnv6d])O&rd #>` @G};P4gj؅ IG{˽KE5ܐ,M*eHA=ʖtnWkԚlNN!a>MCDTVt9%,:΋u<]1 k&o5ұi'g!jEZ"9DjX66j5ݟ\i3eU=ftOXIR^n㵦.-\&7D˘u`,],B/de`c.C FtA`GW<#eFJWtC"7cA +U5S+VMӁ͚YUg-FxwX֮^2Z+k)Pԗcr=tke?q mj~1ey2<հ>Uo< 4MtoЛ'wyteU5l-v{\OWh +m`\ؽVM>n>HCsZ,2; +@# Y8h;#I9|u顴5b[%lam^s`)n#|!cj6ѰsH lG_\t|^ac.J|ijaTWTM>:Rؓ, PBMB'h)5t់Tk"D͔=d`{qd0p`)1B ؎hD 6Ǔą\Aj35 v{k^o(GNp(^F׭69ozVF=Gkm**ZdV^?}0WN@ تa0t+NXzf[(G爹MRU4\/z[kNRq 5N`BߒrEFuTgMVj23 E[R'Ue􆜄C+^)2[3e%zׯ  FߡL tX]Mk1 =̴W#J.oJ6`fajTM&S6vF.y + +6p1uOƾ_'#GW,C',҃Kg#e\Ud LLS44f܎ CO_ʻ0L.:MXL)$ئ9\7Ryk2Ȁ>ګ&i,p`[6E\ɫ KA%uaH]lv=zL#Uk;K0ŗ;5M>=uV=1ޕH,D @ JU--G$6Aհuah:l/Z@\ѩLi0LK䙝׷Tѩp]ۿM.7Sn&T:nRMBCi_mzT#؍iDMȒi R2izӹ Q +ћ|acSk7$sh߼)뇙$0꾷ԇM+I4][_%mA#e)vd]mAeL _ɴi RZze ݢ|Aɰk3mTÚr;/HgЦ/ZGUvV),_j)ۡ4, AbkënsyWO &4؂dzhe4=4v]"0䭑F_Pf665 ޘ`ZmA2 +lA5ݿTmڂTݬ?~Q_lAa96mAKM|A}A`6}A"Z )N?`. AO]#8nNw2(Hwf͔ٵ<4Z.o9.ty3/)6f6_[u"1\La۳9ty3tb `wFkPHv26AZX ֪Ii V + Mkj)m5H2jߔ`A3X3 ɴA*ˢiA ֔, Rpo֚!MoJ^kޠmayG [DnEskJ27/ R.6Aa3H5X &mC |s_ hΦMkj<%Mkj2&;e zɉ6Aɳ!TsOkjI. Ѧ5H5lrvjUMŨl 4*B LӦ5쁗NK\ f^2/;ɂ6ALy5KZ 0iW,Tߢ4A p%/c5龓@ Ѵi R_D)ZWM 4 ]Ri q)/ $]]\u۰mT.(TA83-Mcja"Sx.r-]2&͟D1HE1 fE, PKۓ41H5Uk4y@ײ$E#C]Tt8^ [jt06Au?_/dcnn zݠ`U\򠦢k"vE- +AF7D5otMGۍLk mTsS6Wo|D VAڂ04AI?;CrЦ?Ha}Zw5ֶAU SzSAA2MCk?Hn7t'6Aγmhk@ѮUNFiAn2iT!K-!rGè"k?eӊբ?Ȥ%^y-e3iR.O-~z͞Mht4dN@4%F쨚yGKDMނdKʬKir&MkV0u2MY4ܵڃp`Z ^dѦ=4yucX4؃ZKiuTeU0Ѱ#%Cp͋8Mj=#bʸHմ2 `MZGtAEc{5/f>AU^ު)ҝjaڰ[' aC>KpduU <&eq6dΝ>lavyؽ"2߻ޠvkԂDAK?%\@=gHh0lXY8|EȺqζHeC{X>Vra@;Bvcꇚl*Ť!"*aJfZv1i}Zc~OtT UʨINf) B(ܭٌ6j%䲪&A,njf4"f= B𯎺!'^ax9P G<2]5"Ba銎㢭{JqwX]CCdmt&p BXb-;:׏ iL |!Oȗvۢm!Vϖ6_/$,il"1$d: +7=X'RD52 Fy,f(e]ԋ5.,r]bL@PCI@: ꒄ0rs7uwթ%Pmg3gf<A@k.يk mqܹ*̦Q*wE*h;G*nllj՜y7gokڃ1Nmti="- XdUٚʢ 0A[ApYM'V_a;ywVu$7}h#:H÷V4:kΕ]<{Ns".jO~zF|A;S38Et Qݽ{lqV?3:ȴI- ,EAeas:0GH?N3iئiϵjcA4+23ڴjkt ؃^ZH4r C dZAи2 Y~VnIW{;hiɖ?؃1qڃQ4n_mUATam !VăR"5=ݴVh95;]:lYjt/=HǗٺT؃I"YwKnj¢~&rH8J#44YVۻzvmOXAFkxz[i9xT~ hXtJpykoutiڴtU-I Ҕ惃h3:!Z tjR^2,+j3^VckTz (Gb ^q8Tצѻ{T \cf M*,(lDhǁ8PkF؎i24tqa_/;uC{Y=H߽v.d*9 -Xu G?^m ˅ ]yeЂA-B߮ןZZ09A*'EHdX^VmM?O j҇zhz Z0ɾ_ 5pgh$׮9Hx? AFL w - 7@ + 54ej&;ӴR Ʊg Ajyh%"cИ0V]Yt^A8Pl?1Ao /ZlW*i_(G YtQ y:)}._AhWA"j$̂x^Lȼhd]K yVx/e?kho4֫!?C + Ѽ_ᅳ^j5ZpfHdZėD4Z0Vx-D3G i1а|q7jBp /EǸA$5 wӏ Wo\/LAV{+d>A :۝o;o f YA\oZzu֣7}셢oåOhd(0ja m1AlUH ]! + b RHECZN6AE)'a h;&4%8E[fB(o AH;t7+A-D* I->2f/HۇAj-fh?p1B!ZDA5Kt@U"MB )D4W^z_ @ +z ƽ|ZB^:U+>#n4bQ)8Y465A1Z; z*VAHspAE-:iZt=57BAqp={Ztʹ½~@eQ2άhO׀3$s͠?83K[O™!3 9{# e~]yz5"ͬV!7I3C +} hfUhf8 +fw +ڤiZifq>@3+Gg{w + V Gb$ON>43d7y8)g̈3Y 2K" 'Ф_ETS3Cr&%C#̊ҭI@3ːrY:͐FY-͐ +ϼ"hˀRt%DYQ׍'# vkZum +6MfJl=A$!@ƃJAhhx|RVn."Lk!@=*LV@3n<3"V3A(Z# A *| -48}yfJV~pyf_hn)c+ "?T3(u+_fUc 1hFhk'@sx,<3=M@8ftn!bD(:l̐! JgVu#<yhws!B>O"Ьf0˜S& N +@3czJV1fP$U\~f͘MOhpn N4FhL D3P5fj9;͐FJ4q+Vq4Ahi,~z1"1B# V;[& 9Zµ"aaMY +JMy74M[fMwZo`5d.XiJ"50fi4F>U[fMnFYC iP3fJlgDY%OP8i+@͚&8z@!v5C- 5k +9f@#"  #& 'ÀyG6b"7$@̀Ȑ5kjmr6f9$@"+EP3f0'ڄ5΢ q8لqcfJ%jY5ϷҬ~OD5tOoJ4hYa Ѭ2A'' YKJJ4]2lZSƩO$AGP6|I zA'"͠H&H3Y"K0. ͚B4k(JhMf)o DƣcV8ݩe×M˖+Ь5%:dK4+Zyf IU +<3h>3kMܽ ̠k3լ~8lQxf3Ϭa4U4khMfh B[fԪ +4kZhfM@@auWYChBm̠-3&?K]qfwngvԀ3S +Ԇ3 NYb̍I Ri u=S[pfMkPG43dA 3Ϭa1euACKhޣ )͠c4X,H4khѪ4SP Ac4i 9@4uD$:1v%5"fd 5]58 D3hL-.D5iE +/ǒ 5 ~ř5 e#W <+ R3hVC$m&3hh,f 3hNM[0f@O1fZ8fdM|IrTG=ލc+ɕcPDl1Se1k.yz|A +L50QH]9f>r1&#[cZWa$Ï)j23hMTFJQɨjX 1/pfi Y6/' 'P{-W~@1SmY 9'VJ &obGDj L(fX/9 'P˾@1SAJ1kFڠ臓FR4h|oRTYgi 3A`Av^0Sm,4YQ j(ح B<5-0T{geA?aڃpA(f=Z(fnݚ|tc59j# oB̠X}b9x+ .z9L%nLf:7/SFeQ-/Sm!02h+]+Lv(YTc8V~j1 _?N 2d:!e#)b2jL3kH`ִ7Lխ3=d-3heB L:Lfdj'T3ʅ` ^]3fa &?L`LtAC60S^x c-L5nZW4=1SG^bZxѓڀaF4&W 3#1PYxfD61P_S0̎5)31{_)%|O)tk`Ϊ(f4Pb; r{!f]3h#6_G +0+a\f'^ѣ%s# {`fhN fNM`5g`=>` V3QǍ3+ f;P|E P->a:z +%ޙ q0;O00CGJ-)ExG~eb(u[ SmlJ 3$ߊv`0qG 37bR 38D(`OKd Lˮ fgG A!Q@xP(% `1ѩ,' fYե÷ >][f'˳"Êf炌M3H8avׄ0/ֆm>[bpR|T 3=A͖s%~?̎3|[L^ I3yG kP9~"}\_@0 `M S3# ka"\SʖcYD13?`e}`5juc"aC1Zн눉`#*_eGgq*O$L<ИIWat2[xt@a9&R@_v'%{w0aHP%jk`=YW`ML3->0C-ot'.7;lI*`D%م]nǔ-QE(}|2L=,!̀ohKTb4R]ko!;Qt%R]qOL9@Tk-&a# !w: fWH]3o Ybvib#>y2G<*2<8)f8^Gnb,{,;B`@f1E%S[6O3mrU4 -N3=l90`=h'fd 00{,Dbh1rlu#"LYR[(f0?bֈ>kb?, +^݁)f8K]I1C)5?bv|3tHe3,m3Cma씯H1́bfk!&$O!M g }Aâ_!c^CD" +JeݫA$AE~ Fmi '41P?uE$\v\ 3c耼 H3P:!;1RcGa0GSVt 3h}fdij# >>HaMis o}60&oUfP&)"JjDA06/ 9aV KCBA{m -¾S3h#>Aa5j ڄGS#Lo`F4T-`0)fژ!W(f:?(fM8gA{:laQ?zxߘD`!0fd%-%b̠S3̇>cIB^# ڋ3cX %?[0fT>hcC c/][8fFl Kcy#LZA}wcv; ǬtubpZi# 7zm3y]P7K3(cp"ʓ c၇ &{6RӶcv]qN=8 3kG8f!fvJrXpO!) r*bߩ]զNi< f:%b!fz +1W B^ 3Y<1̮1tdԍa&a4oXl3(}av!Z@V*J`&!2MU2KG3fK$0 3 AԴm36_f$`&|3jq o0+~|fep2L>{8e-pK 0ӑܳ0s `|שL1ŰnjU //d~zNeUϊ3rA-$mKJ/ٲɍ_&+xCe͵p—ɍ=߱f|QBǻc 0WSlql3YE*r Lfx}__fh,0E— |YCOG_9n2l9NN-u$zY; B LfAm:!9N6zO@Ɨl@/!%vUT7zY+< /[r7|YCC}=گ/2a˯/fÃsձ(eS(_}Wf;d~Yp2ٸ7~YtFY{/k3y^ngYZl.fz3L^6 Xݯ_@2 U$x%vԖj=L7 ˚6 2ٮ_; d^Gz.S">]%c-dtYO[.#~eBp-˺zbK2lCi@1OFɋv±.5:7xY ͦ ōd֝lD/dezY e#U+˦]wJ/ð#{—4l!d|kLۡ6| +DCo^mcA—vxӆ/[tS,o_n2Mr"ZueȽ#x>zl2;@ev1g^h e] YK2'?6zYǴqiG7|Z/[I7Y x `qog$/VLx_f +/{ [5˞YeA/o7|w'&7˞˞Y.e$oeBL6bȖ]U'e Q LcYJ7e4=fMn3/×`4k 3%$Em2̚:ڏz2A :ƐZfh?āì>0k-pFL%ƈ0CgZDY.O 3&c 3XiP 3X ,0S(lFYH_EYxxVdib/\@F3dUfMEާfMYpv0Due]z;"̺FzCxD @]f][#G7 XsVYO%1 D3m#FYPDijao,VYqjaֵK{dVAQ 34ʟ?2̺:C"LC_GBd!03:@pR_O "ՌU'A̐l,OŬ]X&Zp6)f[ˠ=R`s+B03jEz9_fEa0+Xfpˁ)Ex x 3-t#d?G# %]& m}tGׇ$B0Lm`ub| 3#^S<#ìj&CZW +pS& 6Y=4~+ nxfUy:Q3/n%!PfFr n]wFƍ@0H0 ו`6S"Lfhf0zMp\@Ƈ ){w$᝶ + /uUOMm̪ƌi~I0kVc6xd!0Cu+!P.lЬ0 ` +OeUPڠM`^rP3*\Ϯ +0C,r8fU)N:̚[` +&lZ @0kz] +Q|V +1Y.VD5Lf8/0Mm^τH0S͋3pʵV Cf`06& H6d є{u̚NuZ fxATH0áZu"r({!0mE1Ԉ0ppxga@*ݼaSn&*V `W/0p,  CEf*$2̐( xaʳ# CɃd`tل)i# ÌL6U4o ] fd:gRICq.B!qW6P0:MCtat:$Z3nG3\l6)f86Üԑb-A(fʑYđb@1CJ# 3H1wٜ](f8p4W b)'SP1J;lQtE|(-3wj)6)fnk'-P+2Clܹy 3 u~@2C[\ef, Њ"@-D2C9" G7jͱ64R[:Wك>})M",- he^V<\(3Z $kDi([IfH_& YбdLL&Df2 2H;x&} Nj. sy8F7B)&YLOpFH(f8ܿ(fɤJh(f -3/)fTY(fXiϩ\q8(f⥴P4 fDWN>b1ipabf 1Xj:A8APOoja(s5o<#.AէI1S82+b4SS!5׎3,nMDbzG2却Z@csR1C|CmaFF2{A L3}W fUT,1^ט/9f`M(q9la.3غS'Pyn&zG0̐23^ݰ1&ACdpg%̛rӯ ;H 3L{p" 552CqXfmn$7cXfsyc22+WD (3=|Ƅ2ÒҒH?dfn9Z# G[qJ$;Hfeg'UYqds2ƶˌ03"̬Y qd!t>iaTfpaSa{-6Yn afӶq'2̨ 6XfY~ af7 3;3g}'̐'3`D0ñL?o"" qYav~w`&^wa&Z;L0+ 7`VD02ƼgYC|lqm3k,!Lfhw<Ȑgg0 f!*:RPT(f+;nuaCR=t]^3>QR[)f2=lbxu%/fnZP fN# 3 foK)fy1R(f1c˺ݗ1eJ01{VH!evh%ٳ2j# '(f8_P-ސb&+X%sJuF-qDL>H3* 3Y0fMV3y.g.gNxєQfx+ ,` p8-Vviq`f^N,sje"].M ;sc;3N [=j7xLpPtjevL2]YuNf2+7{7Y#Ag#KL2gi&q⸲2[b6ַ_(f)"ŬjJb~ f"L>y3=e36b1!f򑜟Q,@nJrQN1{俳Gl-F178u!fsC f$!fm3 p,g?gGtYfZ_׎08g)l1n a&]q0ӆ6{7A\ 3m3L&L9,fY8_{2¬Wt-0̐*rqf8b1[U3LO- fk5tq fX:$CdzW6W)fgF1oF1N@1+5i|b&}/@1y1]"LvnlL3M?c4ر_0fs 3P[д$!mmjW/j#IJ-^GOt6 4VVI]jXdq8fVSә1rq6@9lǷp̴eiP3\u}ċx݊1Ӎo1m<aX0f_RW9_cLnj 8KU-`Є3* cu¨Z$fY8fxgqr 3p=F/q0?NIki?q`~|qdY1&c1 (17-Zݳpɾe1C2.և S0ǬZie+ 7YS*!/%DF d LvS2L浳ܤb%3n*@fI̴ޅ2Sl ^V- 6p܄NLRɲ BdvR dvZS7e|Hfbb YƣS"MN2l)m#ٱM-@f `yd6 7*qД{"sd-);l0e,qJ[ƬiR7YB&L11 G>B1p$H1O*cE$YEwV1hghSt?z >mWťaִM&b89"uk3 R+"p$8<3 axa="OFa髹ڂ09y-3]G," ф1{&(b`D/`̀C%`H1CcM3|H1?U69" -ڇyQ[(fطA +^+ŬMʼnb9RP +@1Ò^&J~Pr " .y<,($QƬD1Jk%Qj H&09(fu5t%ΧGH3$+*aԅP1{Eh1{0fɓώ1?]|0fK1|1ko5ZJ2kr 3PAfꕲ2Sd]mH j7dr33Ȭ.oɺr3L 3P5ԉZK 2C8[z7Ycӵ@2fN2:N;̴dVr +If,Y\L?HfBk&i)ܙdS"3ɌZ ˦Hfh' =e,;*6hlydY eL2+zw0b2+Afyjd&ϑf?@fEQLdN3Ǭ.01Cj\%(̐huǬmMcR7Q;3:!a+qEȍcVĞ1Cw9f08f d&kMrL1X xf#MwF2[(<곓d11x>dVZ oL2S $30 t,d-ZLRmӟAf0|ɷͫ"V;lYn$3O2WLHo$3bw&liHf8r@b&f[ 2Ifo𦶐-/:#G 6\!L ffl0)ev^6f:PדJ 9終YdHMfffI&(Q =vi8'}smiTsfu!chzI-d{ gvNv-C4t]22ҖͮCl'+Ͱv](bfk̢ hvǵ4`04@lɵ?fdoDsDk-D]vpfEi(d1NfI=Ϭ=n>r36aE@3yf.Z7 K-ŝ4;0ڋІ@4RL4iq&-hL~=8cG!!/#U?2Ҭّff;Ϭ;Ϭ_2oD3F. 7mJfsa#Y14[6YEfކ4|_i&#ZM0-<ĹD41kiv:4N?jܑf3tGy 9tXmH3;鿾!de47يWH͊ƝuYг $mD3)߉fi'MN4C*Di=ډfϥw Eڐf]Of+?-S͞^ީfO/L5̙+;Lݐjf#x a +ܰfaQ +dkv܎D߱f2c7:c͎5sN5;~ݴChjvtÿ@ͮ8tP3B|۠fOAN5s(9L3\1@K:" Sj6:@.oj&﴿$j&#J3/PNBF5 ~٠fAʹrL3H4Co ꭌLG/si=´4Cwש>ih?zw6fOpnE"*M64C L3t|RL35ӂ3ih~ji昮>GMcb`9*EM٣e%jQP3tǼQDb릉,BP;oϪP3-5Fb8ظ/& QPmMM2z?J.F:]*h$T3Է8jjaQnR^ct̜ T3v>~'ա1jfP3k P3{d4CL3DXX4{U5ƃBmZJ<B͠i-jj1Oہ3T3t;fOEP9Fi@5v>KjK1pZfZ@5C4 iCfVN"P.MusS!bV.6EZliX3th࿽}kMm6 "`_5CO[f&65ӸHfhx,1҂{Dٍv c\3\f( > \3ѣ51t2\[1 r'qׇ͐=rnuɳc5 ;53>uk'?6fX[fxˠj f/9`nd1ƒ:#Lm,kO=<2kv+5Ӈe*{׬d>5CGYA:J{MrqsIX3KzIX3xBZfW6cHŨkj# y*pYfHӐB"VYAkkxKĚṹ8~ ύVYif7jfԩx\P38G92`GNpd8a&me2DIL3}4xJL3<wV4C fcN;a7c+ &xur2͔U%DUm[4SpF< 30IL38,"jY-fU,fip4^fPW}ye𱿶2WwjLP3|~IP9aj<<[f3 jjc=H5Ki^s +X3>~df0!q^6K\3]nk]'5ӱpq Od'Dp\3e'r`dFJ9ȑ5C6sVkt<(2f ^,ܮX3<:r/GTof sfj7j+׬i⨯]5@m)^`baoAq#b"I&S#Lt1Dm!aԙfJArzB6=eX qfu6ԑl-+ccfXl'Z^\ZfJfj/d3w%!`ӿ=?0Pk4ͰM:J5"٬+wL6VYװWY)&%jlUjE!oP?^GMYUEbmYr_fHB?MYqfHlxR[fjwD6JsS"0L`$aq_ lg" [>l`' A&|2 OFJX3^oOX3 82B*az| kVWkwĚ!У beĚa4fh^vk lA T3 TfxeIx T$PͰ+nGDqf(f{8l!ZD58[@5M4di#Oj蒫fآK6B0Tf8%q\f|D2P 7f(ML3TqrL$]`XBm~fztX_# +_-P3cO٥.f8؁KeoT3ly\fh̄5S:L.fX46g'P޷fD6 cXlA}2٬hcD6ӖMO< f]ɈK`3d[v'Y]lT Ef8:H6C 6_83Lv13^ fZQm~f:ZnLK@27^-lV%d4EUb!#L)?*mөmΌїi o!frq46C--1GFkd^`JV'`mJzsbi*Z`f=)s#dFemUE-ͬiS# Z`z,MofdiC[6Zb~ܞfu6,Ͱ^ɫp3f=FLD!MgR٫ΏgglfvaMh[fn}uW=Pp3Y \P%9O!88͐2 (Y nLnvsfoSSfr L7CO{ ZKx38^s1d̘#=`ԬK -O{fZ fKeoÛhʹ6|%ٚ f p}uuْ#d p-P* 7^Km2DVqp]#Lbާf0 zDtf6Yۖr'~ou= !gĀ'_$Q_k^D9!6(SdrfIGkr<ΐ)gw$I-PΪ.mRΖ#֍r&[{d)g8gF9Q6OvL(gOܿQΖ^9CA;lz6șew +h=b3A9{a rbşb 3G;,0xhcɼ:cc{pg2P3YܛgX Vl3V1#gF1sF8[~Ǎp7ę65;wƙ|bR7ƙK28g0K85%31pN8Eq&/ nRgpvŽYg26Zbq?qtP 3sqf!8)c rzw9 1ViR +A,L6!ϐ3c9;i%틥ș<`YuT ̘3a9&}Ün9;ldu{l6șA3Ȩzq glEYD9C42LvYԖL&d㜍fs&;-C;ҭC-bf9=RĜ-\ sۥӉetV;L66 meHg=IgK1d#-ˋ uI u63F:k9_Xg7 +cufIKm>; vwYu;I:P- Ć9huvԩE 6ؙ|tZ`rW2첅jvVwձ#ȴ3o;l9ɴ3\)EڙW&ٵL˰3+Q{0evAhv{4X8[uvʮܪuva;lR6:veYbagxNf6ٌBagxѬd-ɀ3XFh]58I-ΐ]As{jΐ p6xl|mx3dݧP w2Jƛ- AL{f`af0z_x3eLnf2,Za(Rf0nv^pA&@Xl\jͦdfǰt3>c/p~d7!N7q#3LVkȁKt5x|5=ɵ'ͪZ0r›[׹f1e2R ۑ&L7Ӆcp72Rjogچ7Cvg٣~6ae٫lX<>p-49)n`>m[fhcCd\-2L[؆7BW›/lެaf|4Njo0ox3Y68)oT}O޹J|3ozfdf8 z@4[g l&:$犯ZO&c;4j }H8NB"a;,"plnM3hqP@8{g1 gXgghs'3"ąw3ΐ%3]8êQ~ʹ2p @`-S&NMkC"up#L{_{6>pOg_V$ 8C؏3dɀ(٢gza. U>o2aqoioQt7ùÄD7!t3B_Pt3 1ZЏfe|@9n7&;lz l~K7١d< 2xu9+|ɰ嵣ͰiywJ/hKf.x6d_fzf󃿰n?frp6DŽn#N'l37h7hb'͆M is$ZBvf4/dDf7 lD |m^n殑ot6Lr_f2G͜nV]sn&?x|u Qn&9,Gn6IFN7{wt3 __f޷nv6|'(_f_f#"#ͺ7 t'fܜ0Kx@EKx3׺clmxRkovfov8xd)!_oǯ7yY!MO?Ս8UT?6_iT/_]߿ۏ@~!Jv7z[~H_䗵_rY/ '7żz~pgM/k߿,4gj?J0vY?uY j!:Pd.DOK.. hZ// pC:^V_4NY,Z/57=[Q2H5]K.GyCV~D8nK.Gy +VⲮ孉6[QǭOe(aOe({V~hOe(чǭOe(hg?%s?׳kdɎד^뇯'{6^f^?}=O?d;y֎=8ooE_ѩ]zFu ^2#)Yxejg_ϯMo_G{|7%aڭ~UK{ADU{?~ ν?{`  O{ޣaOEuъD<6 F',q o=7 9WMCo_7rK{{&yWMOhȐ{Q#E)$i_|EigEџOݾ/JSџDOџDY偽u]QOi˿g_9?ʟMf-ѫCwlږa=g2 <~@PP j2dtPUZUfqL5KN,ϩ Qykqi~Lzk̟_M&Z%Piq5A?XxǴCI.҆*j,y jN6@?^Ҭ ҏjJ:=:釚6H?Ԫ Ljah< D Pww['BV+5Pz4@? "gA~wSj m~9߰ RA?1+̴6@?Y2eCӉ ׳)KЏI C臚Ė>LY•0O͓{MЏiWrr@PC34`rmG|;5dB:sb~L÷KThCMolH1EsEIT7 ^[NBڒ(9"PvLJg JkHcx.j.Uʠ#BMGOT$:{j 8? +5vjga'燒$m .=*U(w\ +z{r=`M`8s5HDŽr & ;+XB?[Yx6?+gкsR.z_?j{ w-_垀jƮ1 }_t1yŻMBP{ ぶ֠deC[)y4+VEd?pC(T[QuUk 6W|eҚICVc4 x.sj(-L5B}3>ԴA |H6ѩ4yw)i1+2+Z\} &oLhcZZ\=#oLnFqƵ+߃# 62l6&GIņ&g5àj m}Lc-.X)߇ejC?WOve[2?p߇ +75֕PYi*G&9 :>NFMj1 /:ESkQ't;ơܴomn1iڤ1@тI3)?M-] j2?v6>njUV dڀAC8,wum}L+j1bu |nbڧeр-\/h&Okhcwt% ~&{ioHcQ^o?QJ>J6꺅}L7yǴ29-J4ۖQt+6>&lM>rEJ+'4Nj\ߴQry;ۓu6?Gn-OC@7jj~ +a6?aNi~(GCSVezM@%9>*DE!cdXbh}Hۯ1h`fLÄchoW_xӞJd Q X~7tܶ?%G#hcZ{'cZE]

rYF;3;aUM|dxxyZ(7\ lnm|^ǺA*5>.{Ǥ Yt&WeHhhY״#mN?c,8=vC G+)/^s*]jr&7眀 <gG4B+4?wOi{7?EUujcڠ:,0 ?g/z4%؛"?w\:V'4/EDJT$[puEl?l)R]kQhhc~̶OWڥ/i@H9}m ~Tk6uffgt*| Əi͡y'ǴgDl# +5@~tipD{ 1 x`pSzO6s Ə1m0~L69?&ɗoS='?zN.6O 7[9nzEvz[)HԂ+}0/)wR[1tfOGb9 +%\AP7fߦKLi|%ԚM | +A>^WWPM ΢Nv^Ռ'HVԂ+mK%\AM 70bh$1Èd#v&&{?x?&+f@ + :e+Und#{H5C+&Պ#mW7:xcGuMu\A+&_?>DC598yMZ1)vwMET4AR5j$ _A+ Xx4^-!FOP~k><0;L˦ ]5Tz5~`74LPŸ.._9vj +T4d,e<%gf+H3jMxcZr/Aݠ 8m%h4`;PO2-YHR"%;[N;zA7e۷~'kuўl )A2@Bߒ5EX2)y`a- 7wagoC -s1AW6LʧA2=s%Z])ɽAp#l B<1:@A 0 AA=zpew%dCtz Ħ=1BAOUd;dbylC=TG5t PrhP>KNӦ?݀\J&?:?HF'*Vյ;~m2F0m:Ѣؓ Bx?#e?le{I!tL@uس BIY!YHj60{nj4-C$ ezo!Ѷ' +K e5פּ f҂ hȖKcv(YA||1ڴ 4=2h}ڃagѧ;I}]Z0)jcMW>01o44Q`Y5Aҩ pAq-Ip;vmf=APZ,3x;iX X2t hh]m*;ڬrCJ ;/D2g n=O;ACy>4DgR h2`4?|y jD[iQzN@MЅ5]|tZx\}ڃ %WQᜆ jӨ0 h!j47QB5J]LO'ZߠAküAZ{͵0QSaZQS{CڃD j̖_!hm{!d@ jr]p{CۧCH5xx D:jaҏ%L>h%ԏδ0QPr}L~'\}{Qha 8MG"DM6fr/,B|x&ݦE'/]-,BjFOGY]Zx8"G 2q!#qZ[+-M fYDA}닚,^}4A%qv)Zi~4 $g!^ #E IׅAo^v KG\L +k8#tb~il(acaRtv,P;;< {-AetM{YfciƬFPtpdx=)ڧOo4g>A04}+OQ•j ǭgLk%w,J9yLyqjש;dt[6^6kXxhݬA.Γ.8wcie`DIwLkY/pQ7`ոDi hrn/-AL>Apio86h-3=vnJ;zipݤA!lS圾 *k7fDM~66Ar9G:uы cR {1]|7)A ۫-H>~oDwo jzά59 j,Qia &Ʀ *i 7D0'ja &3:A-A:w&5,͓+ǴQꦅ5 Lha J w`.,ha 6W5sf7, +ɭAT.yS:5 ͽAFnYx^HMoT o=㦅7,<.r=# +ka֢Pni6c Z32eQr} Ok| YS5D sg a'Fo7hQE '4tA-AnuQ{0퀧谿Lk$DI~swla $;Au h(Z r\]_Ok4y.; vo-A`A8g QgarC4.7 <K%xyu< j2vزZxj) ,4g?uHܲ9HGz--A7H߻WcLk +5gįGv5߬$ۅ j 8ěev]=AǮSN{z)1wL +gox,@5, ZX$ u-A:Kwpn2-A8'v2O޹OotY>7[L jj8L o5Y}1A:vMQC2@ oVUDM6=M +giGl:y=^5wQzI it/]`yڬA6D|b3BHQX``{U2i BM o5yv[7H];7ZM oj֥DMV7H5MT4-A:Z3At j;"tQ+ZxTovfD-E oj]+7HK oNՎZkBsoJ_8'soFaffZgzi RÇsz]r݆iaRkiR-9H@љ -AS4ƖnZɪOOoJ˴2npiZxTp YOoj37H5紭ZQ=u_89H5~3L s.EA0890A761L) Bսq +irJzs!->|[nrto˄!-9jamAHTWM 4sv8 - B= B,Eiy9mZX?:Xg&SA ~k?g;7t z?d\yty(ZXk {F5.ºiabN=inrgېiBQq Bkhb _oD ꩲ0x,ZP7?]x.jA'BΎAZO= ne@xؑ50Ao ?eaxSp-A4zZh)n@>x :Ft$R؃x;pQ;qM{돈 =#ࡻjRkliكZ9 ӵ0:g8pXKڦ9HڬGڼpm3<L*z.=A:< @āv[?"8յut ڭ!ȧi@u)#pQxuNw?(=? -iM@9q!0Y^2Ok2mS'{(a+HI[} -_h!AZ0潙 -be39աlH 7b3Hܲ< rb U{%m-9ؘN 3F 㶵hM!ZX0)9PfhmZrq-u!:PfvaZrZ g3kMK ٴg2AXOEdpqC3U$[nո}vl d*`Lc\ hw1В1 = h ІTl%cc&%cò;Sʾ tsoBK6ONTK ݨs!a%14Xq̨o S%c(h0qk!4} H d&OZi jR2AQB4aZ3) Rr)ق i#ۂ H#%WPms@&W]N\Am怨vcڨ +]X%[c +RrA4 ZxU%WP#Ia,'B'Z? ZA.3z@K 쾷(aa HG< h mzoGmLM}$*%KK7sٳީ=M.Mu K4+,A;po[̡ Ӓ%&N2&KS6-,AEX)f Ў +RL Wjܗ+H5]ܴXȺ +5ح<A,RrA=Zr +'fcE q-APiI bыEdj*ipg!%S +0PvW6AgrtӒ)E ?lAZ(1NXwhWYiIJodOWʙf4hR{6%[{kGl f"1H~[8b Ғ!ȮӲ-FM!Eb[*Ԏb u:M* 4I[~# Ͱ%8S KV|AV|A87؍P c1-T=Z֢BW_=mJ;"0H%&AG61c3zґXl )3ӊ1Hޝ7gl*7< 3 + g)d ~>RI +Rx|ȅeMχ>(3hVSp\g?Yϱ ͬ3Q ->03h3É8pqxVj@KE=juZGWSa{z1p4G3A`fx$a;f֜K7zxfdTU3C;ZV|*XpfjMw ZpfmZpfRgs3ɘO~pf0(PTu!fؕf~dhf44?lѳЕg ! ̌Ì# L\3bZ3fV!eF70.,3Cvo=[Xf,3^25{!lavz,,z0za f~ya! + kd Λ-,3XˎHX,3"4-/+ }g.03dE.f%zO|RSB3t?[?MKED`]ZuiFZ!+3vo3fjg,LYpXd h,.̐K%Y3znRlͻ"C3+ -0UYfVXXfaIae6]/Pf#,(d̐w!DV#@g)ųw_afBh sf6pFNv,3${03&۰f'f[/03l҉ "t nӫ43tYZLNeqZ%ZYfHNM,3h3̠=[if-ŹfiTt9,hfd.dabo.AAlM2Ngc5]pf r~qfкM83,2 X3ݴ3CλǤI3cB3c4Ziڤk!V4GifbIfAI3C,ޅgrA rw5@el{+ D3Òm|2 A-@3" ]͞B3CS&ͬ1me֎m&J3 CBt;+ie}2c퐓2J@ssm̠ɽ`Ge֎[Yf M26ezSQ#NcPYfXQe`Y +|4lm r)l/,3hOVYc&^62C\֕e(cs" ̦VYf< +<[J},3h2㼲2nB,-,3F'Am.,3hwd{V.'DWYf] ͩeMIN +ˌaW + g2 ]]M4PXf <+,3C7k3q4+ˬ/Oˬ E˂2kЊע9;.(3f{E57M[UY/Y^E5PPfn;:Jޅddnp& {tRPf* !WUvz}E5w0ô2CxFXf ē\Xf^eak,f-<fQ? 3CLQ'm4iFe!X\ncWڎ+2c cΦ'wy|ZXf*4va5V˷n82_#~a5=x@r6Yf(R [eltyT6횩,3tNY%)2 E1fuy ffl*PHf'*ͬ߻* % 43xQ> ͬhř1zstlř!T& =dgTř5/+ZWYcmL-̐B/kT +7G45TY+[ۊ3c ,83V|i3CMki By{Oᙡ'^yB3C Ifg΂ffmƯ:8zWY' g&{;lX3\qf~:Tif͉f}6ͦ43oM-B3cO$$UYgf J3Cl,03Ȏ(03yg0[YXfH Hc@a <e~)(3ܶ1i e q(3;:C}S[Qf;+ˬ3!, 8MYosyY*f,V& (O+ 12;{@9iOfu2֥ie}҂`4! 32#ÄeJ cY0+ 섹y(,g-d &fy~ +3C)22Rya+PT[hf(SAШJ3C|=ԠB3C 3: + 5LփSЦ+Y Y r6RPhfoaf97]Ur843p]hf8Wif}C]hfר03<Ȥi.3܍ +3LF0aZxuN)xw=34giw!y؎}nX5pL.T]WsgY;<3TԴi?AЫҫ833Cށ|I Zbej|7m`t6Ahٹudt; sqC.#e*nARhWf&K ,3M$3G*on*̰vđ׀󄫠̆R?,[Xfb(,3P ]Zbq}u2t8)Ba :Svo.,3w1taaqrN2*C_fG#%gz) + k y1I+i̸\%Ia@n| 3<2 g,0DfAe6h AAqIp\Y؃8RTs LxQfа>tKIfluzS&q_B-mlJ6-AOo%aA7(oEA:48#m]ce)B.1RIAA ;[QfIfgVeS2 C=|PfX5ȒQfEK(3 y98k2лI(3E^Pf CٓQf:,20*i{гq֘20 +։4L-,3 h3DaA{2p(> + |@׸2ʌh(3EʘQfEe>^Ό2`({L +Q;cXQJ(AUI*UeE3.3 +V(3+̨UHf:dg|dFM*KD($3^Z7& S^HfHsV`fx1g3CRf wqjQn3C _24ԱT27a3l + 7eT**̠J"2̌u hO(3̌#f ]03X[MA% lsƙAd,3&W™a|CksHA;^!̠ =tY؃ +hwdpa=G'̠јgǛg f4+<3'K<3zLs{s̠R18uguvsyf<3h)̸H9gMYov*<3=U +4ihuIʲ@3h}S/[f +D4v쮅;ڣ-yi¢EB + ZFJ4BHn%46fHXPh)m ь'78,AТ:V4y_L8,AX$;B4 =u{+ , %`l4s#? 6b^ft {HD3,pchFM.Xfy8'#ͨԓ4斐f\tnq fvC,D3J'v!DODF&Q՛Ed$ <ͨ(5w2 ڙ6g%5=psjY0QV? M2ЌRgeZό3&,&t<3j\W.<3nd0fƙ #swLs` :mV5y43LbCЂfaeI3II QOifif +\sAۄ%`Mϧk{GQq>%ف[ifx%DQ0 fFxi mȮn3>mQaQҖ畅3Ѣä`ᤲxˌsFg854"hud4EneFMVRgxb,3j7h$ʥ,3n~esae-}2&k{k+-,3n,3j4-Ala{GfFjt j o4yC0oQ ZJ[,03h,03jroX^An3n̠Ɏ{3 3$K{/03.L s;?fF>|ԖX`f!ih2$7eF2ce +ˌh L+3QPfdqZ2MAQ׃2fڦE1]oE <|Qf0,VX2WugW2+d$3hZtx!$^[Pfo@8,F]DL%aQ8G0 ڈ$`* ԆuRIflݙdLƭ!2۰N5SQf[N_Pf1.(3(UU2ԷkZb2Ț Ɍ bYtՈҪn2L\0y+ ,fdcje%IeP+I$3'f Xf|H(3>w evZ龠8vP2c E@cALnF>\#%4 :e"8 v~WPfv=kqmPsmseF"x-(3dg~ev3ˌv2faDiz$2龉eFIӤ2Q-K2Y׻̶|JHmn`8e*Oo,,3 ^e [eQ׻*dp"Kq_Pf؟p/X񓿠2Wf.N+ NdabpI{aA T#Inatx2C<2l^Xf;,3ܻ2<.iVnOOY`f;b0lI* Fs03jxWeݕ ̌&t`Y!ɤḚXXJ3DcP[{Xَ:f"ޕfήw wGP&fnMf 2Yaf0aL3sqZ?B3 C@øU g@(fSZxf;WNq/<3F Z7ϧ[xfwr Z™A!*Օfw+S * m+]if{)"T]yfGc]xfD,c(83Xr .ęKzz΂3;f-g aZpf8[xfX\ݗgvwi}GEΪ z>/4#oّ #|hf8[fڲ,cs:,pF$B̓XfBs4CE1 +4;Cd!3UNw}.@3`~]? sͰ9=a|sh]k*v|ƳͰ`hQ% 4L/cda_!bO?x±|a}tp Orm̎Zxfh;3C$g^U?< :+<350ast)7/pf00=DjF+۟ΌgCZxfl@5F3c_fg"?83O|pf o̐ Ds-@3C2cNW? '˰/0>@3dӳb4mYfG^7vG|f,,̰c kHfMIf6123eViX`f-~>,.v/(+owөeΰ͓ cɳ b4|?3~Pf8򌖔2c Ņs2 + +neQ?(F2A.H ȌY. 34[OdaEd}_vem _Bw'-$3$?\Hf$dL ܛB2#l˽ ~vkhEuE!,ƣ2$XQf8Sh-aem+(3<`m!N|^\Hf8C!BrP#ɉd dF!h+ V~>3nb_]x;e`cF)3ͱr5E  +11-q`@E9MK3dh$cvφwa+1AJ1ȻrO1CZ Ub [MK3N6-M/yJ"Ocv͓l F[D. 3NY. 3v+,3ٴ1æ5/ + (0,3&d*Ƭ-34u^_0f܇4=glwŘi89F)Lr^+ HZ0fhxCMG+ ҭY݂1C҂1w8cP00Ne1uǴD1cf}cz]}+ > 3s=lPc Өy,3xa@Yc'5ɲR̘,.J1CV׌3?n t"D1Cַu`p g0m!^F4g"h=ޕcmVR`&rP T芮(3ka ,g|A!gλg߇S +͌qn԰YifL:ifr1J3Cf[ޅf<{$Of43@M0[AC e;Of^Q͒qfH?x`2,f ,BRZ8Y1v &LqfIvVqfT̐ ](-dҞPͱB36+ fJ3CJ36")stR}4LXhf4[5fH{1s3ͬU>A"dL-bҕ%6i5V[6Sɸ(Tǒ"}iRř!XgfjQcVg[3kQAOa A^'*̠]2YZ!{3CvoXiff^`!TLU8(43_8̠mU +3c +UBhl03pf[0 +po& A&C/ Z(3 #J3C5RQ43qգ̐EjřA֍nUpfo{ЌI83謩3̠=B4mfCJ4cB ekk +hF'>4$y׮ +4kZY#: h{47y衠ii:;fiC2*ҌARE5{=]i;gfjVrfsE1G_nSEACQÖ\i=DƎk,ZfOd%!Oa +D3f=ZfWL4CPгM*["᱘J4C l7fY +:[=y&},WpGP~!|>c]fx@힉f/ ٺ\af7(nI038>̰idӦ/i{X"+L+ K5wb03d=M,fرm/{iiDVfMfqKfF(G+ YVd3S&a$Q ȌQ2)?^Ϋ 3,D2cs.+^WAX2{;QqWd ^P@fV?2aQ8\dү]@f%[? 2ú䂵^|(e:. 2 + KywO 3BEd{_QqaVj d6h8^@f~V@f8fًoc_\kS3-#l09fer AfHs 3h286xX 6qp6Ê:"8t2}} &#0wW@foXu. 3Lp5FrA`1Ynj14`Z%,dtL*li3Sg` #%A+%IE;s%)f+3"XܖV4y2KGhedD3hX^3.3\z|Ƙaxř}F/aui)W0fg*al 2nƘqcN& \Ƙq$ݔTnDyad(S̠1#lI1pߏJ1#FFhڬZ fD)R f`9C0PǣB̠]RČJ3HqVwׯxw c^23 U@fxLAE=$3ܩ:̠}6`]B2 7l̘sbPQAf8\D׋d֏|]Af8TkL 2۴UD6i3geXY¢p5*Ȭ3!A%J2C\ݙ~g&H6M*+Ɍ-idR.*d\nd֯B 3dyfֻ:cLTQf89Mes_$3X4dxuu,L s,I_5T+Ʊ*$3Ω+2m0ɾL2C@L$30%dF$WC& Zuq `2 1#B9cFr +ƌsnPcƒG sCK>8f_m3TeL`xa0fOFEUTɇw)w+f~<N#aQ.3;=JUbFPR2 CrL3Llp(3W bv3#1;1; QB06!f}kY fz1  fXYܻB̰>ü@Z6`,5X fe]cceR[&#W$V;,aVE\VY= uwVޙ`pc"a* '74 .ob6`7qb#Wab:z%\ fpU}W*͋8 a6 +è2|0.=ya G3-1.VV6b:wEѤyaG;}W:, h Sflws.0ÿ>̮Ln ya3ma͉aE-QmaYox0ӓ^:3ъ0)NnZB/ JE9~aݴ05wwbԦTf΅aPD7K 3W0a3ͧ0!}n!ļ lB?B1+ b6gbFP7,g_P'B1ChZa9J -6Z fL + U:2٠ǩ0'aF*Ìɟa 5@̮#lHo +uZ(f) C1d4Ppjp8R̞ VtVRsbo +1(*1#ȋweaAyxE!a?m 9ux&݂0C aB0-Z>>[>] f)C0kCVfsq%Lbw [DZfhVކ,3Pl.3e0a`qt .Uf%0Co362XfL $ty0LBmAǍ|ݴ0CAW+l GmAUNsXf͏>aADq-3آ'R"Xt_D^]53yo0_nDƭEj`ƮO[C3513ƛ/0V`֟U"7ovd힡!C +츣0Ù[ + 'W,rVqt. p-ﰹv!qҗ+Œ0cRaCnvC,3` lAɨu9%"H,oZbz͊0k2av+= * U3s +LWXf | 3L^Zf#y]f8RvtEݙ hLnL'XV + +I"jXzA>"̆Oa6/Ln`O.Z!fwKg(p802?3aC12/l'Vp`dmYj`Pp*+ +Suc~^fhqDLV\(/ex +_Eܗ_vW`ef sm|dr_618rTeg`2<̚gi_z  + cI|e +/;gkxYW2Ve25Л + AϽ /t/@>kzY/L02ƣٯerۘn +oK˶G/ۯeL݈u̬_a=`!]aaWe4`vZeљ/CH8|^ o|+0C]7Jn<> 3'0a@P0`鐕Ω Nbvu|(fh$%RkaxkXf0AE.0&_1Xd+V*a<30F:w=@v۰`pblbV3CXF%Bٓ?;W+ 6oF#Vu戳1C@~>3DNmOk*3ͬ ƌ?Y0fO^0fOY(fHW QeUxmB?+ŌI L1Cd4J1&_u/ 'juVĘAwG"WY#Jl*jpK! K  3vӟ^- 3HM#/~VIխ$ƞ Y J2v̐=. 3Hp+B1tb|Yc¹qTI=.3tL1&* 9f-% = Ycm+ش1.Ŋ+2Ǭsm+aQ&Ȍ,h) 3(2f ͼ"80; ^9fDĮ̀bK6t2֫ VԾ/&Ȍ0:WY+^J2#Lo- &MY*CϜޅeFO^e!tx2ShDEB$fdY*a+Ɍ(= Ɍ(ȅ$3h;((ƈM_$Ti_Y;ڻReq~۽`aD"__3̠[eY%\ͥI2A!CFS=dFsQd;@dFN|Ж^Hfy+ Z^+ ^ D| *W Ǵ2CDU: * }eZCnZpdS:ϼ+ ?v V+ٵhZn|̐ +y/ 3lOTF/3$3b\}m_l!%Ȋ1ڬ]b643+ c*-3D1joF 34zh 3z/@3a[fGse͉ +* 3m^T\ f#k@p å-*ʖb MǺw]8gbbV#+ČꇹUbR,ҌT fwbyaa0q, 3uV|WٝK Œ[=|W^%.45kXfhCcmZ".=>%Y=W 35/ 3wxZfHc]fH0Cgʞ3Wȴ0#~emB"* BQfp vWfT= r!>g+}<0yݻ& W:<:sd6 + Yu$_fK \i``"L0Ccw!%ߡT2`L8/WH߅_'f,lN) ,EY@k_FؗLM2"Y&ˀdى_e@Ȩa_ٷ/e+ 1cӊUe"?" kf /K/e* e<\/%a +f{ 3~6hi_ȳ/ AYd*2!P6eJ{RC~7[z2Rl^*2&ov2\xJS5* k$)hЎ/CaƙwrV_։bЅi_ +"@u6L-O/CxSeߙe0o6 3+ FY2~#:\ ]eN8|(^L ~;2M tᗡ _6}Yf嗁rlx~ѐx>M~n_|b+e_U/Ý3Z _Fvl]eZeHc {|v/| +28gIÃ$} {jG^!rOw>83_[>)z?|naf62X']e l4_`25Yehn8lZh5m;]= W= /C}[^'F;_zf]e {]2tAVf.XB0ة.J0p!eh3* Ye#|<Ƌ|6fhlV#d/3f"vWf"A?J3 Rf78RU!QE:MJӄ* KO0r{Rprݶ.3 (uq၁k`(M  ~n6f@s 0rF3haᢹ;ln DX;M3sXf:ln mv/2d!2`l_,V/YX 0cgݴ 0E9Z f = fL~Rwi`ABQ?,;y߅`FʋǴi B#+ F9W@%vӦ/aHO%* Gi`HMڮٕ`XCYu!v>$j`F^L((3x}&2\C"!Pv<"{ળL0cXO%1[R*!1܌ETfCp51Ѕ o*~+B0C$VΉ3t5^f0倪HD0)7'f?" f^|+ 0ͬ">'#h%@p*R˹i +16bl@T`<`EX4}BZ bƇIvd p0Of d&aE\ƽaF8:`@'XZBt1mf!2 Z jzA? fOufR-v mfKWf9}XfA,3^fF0$9 3ޤQE‚3 mOfdDkmҌ*Dd6Y5K 3hZNٌ*>8gRQ( 3vVT/35TRf f74=̠ue91-oz[f֒ mn.J0;hǮfavz* ߣϧiT\0 )eޅ`9Uf`$l!l[3T&!X +.cdKt%Cͬ sn*3)dw̐gɦͬ"8&ʨey,GOr* +(?#]eLQ.3|D y'2D:lF" + qn~VNwUu fxP`Ҍ*A>۾L0! +Y*l# + 캞Wxng+ kh͠"dgsrdǟg` W]̗ 0cwfRSN+3q4G.gpi&}_5Y f;ɕ f XYUh49V-|Y#mͤ".3&zH%8ޅ` (R fp=q~PfYy >.}faފ0*-+¬i',2 Y;3:f4(3i%0f[f5{(Ĵ0加0k, 1MZFޫI32yrmFu2PfA* ,tٌ*OJ0A :ͤ" d3lPfH.+ Teޑ_fJ:Жf V((+\6k͜"˗g`2Ma? f.,/ GNՎo.: +w6]Wf8̰:%eUo'.3p}`ƪ$uR fѴD0C +s}R f3\K3xc3"Ʊpgm*l@ؙB0I-`6 N_}6p&+Ǖ0C&RAE8uݟ*l- +D0?;k]fMng{ + 쬛EGMY|f<4m"&VME :z&Y(,3 Vt MK3}FxA"{"Ps& `e 3Xk]f8zwZ\a! +IeY ߠ! +.\ +1Cabvg7B1+ ] |c,1,1΀#ٞwѫY@cpv;XŘ\fZ0fx?n;xم1{ æe` n4+S9by2 Ō G31wea Vg0PmNo+3쟛.3ĆEl{%a졣beٽaF8V|žx`OJ0CA$NlxtD0C۳Yvł0È5-!pV%w 鯨 3#ai6d; +uiB3,d6zE$Wfݐ}gܭ00CsTOzAɪ]Zfɱ[f(oAF\fB\f( a&+b!0̞3^0fZa5BP5+Ĭo2@x\kbvkuTRFb& I +1{=}@pa&ia B S |f u20CCfHZ%\k +3;`ˇfx&skQ٣i `@`}qx٘n 0|3;*׿f/o~VP0C_0:K`֌RMM襞n>̞;ry0CF`8'/-zï8 + -͑lcv;3~!d'7f9x3*Tق0#:#S-Rإiai2 + a7r R0%ʜ4=C&L>13Ek!'|B1C䛅b7{V Ǩ3x N a+LfnLf#B1)MڷK bxi1Ç%0(^!fX A ُ.pbq;4}WNY;LK3*w;Z fcOMP = ޅa&aƊ^fIa.pt3 UN6 0伳H ̞of=̚ f}B-!4<;oEQ{#zSmaF>+ɶa?ߛfXO%30ңD'0T0S!2^د 3&;ǔWfE0i'0Cpa"K3t: =%Qq+3.6~jyŴ1b&w% f 倳1KVr][> 3?2xG'a7+L4n- 3 V 8WfHig]f܆"̐"i춂0C7{'-3vU{ ̞?4O֊0c,Vl7K3{* rˊ0{dabٓnav_D3,!elJ0IXഭf%ahK0KݩI+LX f1ЛnZax.e0daiVO*L>2dSp{0ЖOaMcߓ 3;PfPOVf.Q/ mXÅag2 + u8Z0̶6R0wDi70gbB+ iQPj L f:j 3.t{+l0'ܣI0aq`e<iT4 3a3P~zL+G)+Ln5N.u^ZY9f״#~8fvWLJckcv{5]9f,ʷw;,q?k^dr +2vh嘥ga_ed&CS/,r?$3Z_1 +2; X}9fLV9f3,q!ƌ6`H}pd#}ڙc3jZo2rE1c#-VV,<֌:v\If-?$3?;x 3; 3C8 2k2Ij dU' UlJid^=> ]AfHYp {$ iB/$3>J26d&wcY~Pf#\]}y+L)ۤ +e&ӹjE,%|Qf[۬2;N /l<4dvj!ied'v~~E2WtB2;K2d&ktRd&K&oSfd6$3YoJK2p-ntdL+J2e4~Yf(3|NYdҜ'җeGZ,3Y"b+LV*̮dɍjNԇfo ôf6O43s +gv]P͞/ y/C3M_/͌6lDg&;gY+83,(ᨳ3;QԤ/ϬxJ3L*!u?<3/t@vZMו~\_te+?G.쯏}FƸ#LqagȅqG2#7u+?G.o;KQ1hXFwt2 ?G.o/yc/^2s Ϟ;οx \#CK%ȴf"x?lݾ -050yϮB_\0v_w_=j_{>vhIw_ϟI_ϟIu_ϟI=_ۯgw_¬?+<+¬?+5++¬?*+o\ϲ Oؿ*׿djտH?:ҿzo/UB(*2~|[3oղqqYZoդmYYoՖqjYXo*{u+Z__Kᄁ+Z __ᄁu+zցpᄁ{+Z\]o70WȾֲ}E)WǾf}Ec"WZž~Eg4\~h5} cvg?z{tt rرh8lv\r!x2ki{9@۶ML7*rLZL8 .UWM*|$_/_}ɄYOGf,(# ~"~ꠓ ?v?ε/B+?u?׵g_H%1s^]hpKWW4D:]W?+=6  [C ]+?+!gg~#nW,BxWڽoAsod,)g˿ȔR޷3V`}ܪOfZ}u]]۷?4~*hgշtHEo SO~4 +V- K~i +}h2M$Z0ࡔz)Rq6hziuTS5 +}h2MSh(QH%@(9Q4MD66RHYsH͑B/%\emȯ5ЇL!Ӻ~ӃB3DFx^}>4g +}h2m +o{3>4g +&$ќ)g +ܚr[c +}h2I\3ЇoՊ + 9SF +N ͙BB|˩V)'М)Cr)2I?)9RH^2_kH͑Bi44G +B-3TX@e +tPh)ڪN'"l)!9SHvi4,4g +4#׀vqphRМ)Ҟ2MS(w /͙B ZL͙BNTsi`VV7SCsj`Esiڦ +}hNR5 9DAN;SHL!ӆ@&s)f +H*0sղ9>esx|0q-EΡ:A]޻%s&xNE%sP(7ak ;AL9oA,QޠR'Z6qK!Ҳ;H Uf=AlwiDNЦ1XU_^L zbAliv~8J@*[R-{K|qx.2O<Ktf=Be,TK!Tc@CѲEp/un,ܤe-5uX>ڃXab7 }X +lc^Cl!WՒR/:h*R%)Z6ϩ6iWlHAJZdDfPU HRUe#-hw#=p=:hZq@KҲ?:RO_0ʪC7Al ~p>C*f Q&fNa"xbbv61ۈZx.E粘}DMF"k 'p+>K%*kq{)&f3Q] Q,&7]6;])u E(bWk7KѐjR$OTDkAX\hHZ,f[.U˶"t_myWD6X"q>&]c$Gb [b6g](YL՜ f-ٿo}HrDT#:қb4punۍ / Qvib/[iш.A hK },fmygl$ac# eq7N:FsԁOv#+dFS,*fÑYhTEXؾ#TnY\0=dw-ʲzb"Dd;^`/\ϥ5񈞧QuRIUVĖMH.&&-wɆto=cD*>n5kH&w$Ž|u%; 2! ݢqXYw%K,.$qEtF&”ӈ}tJQ*mI7|5|Ithu醣^٘D1wv&ϼ|C"I(tޅ58.G>8|]x2)b1#ɞtjf5? . JܙŅdQ%wq^g.XǙ%O+.%qQab) +b/O :^{6*gvRӭ"8XpNW  +47_J&&MӔLg+ ɯDZmDo4,ѡ +VٱNnS] k׶vH޴hR*k}ow-CK%W4n'O,}Fޖ1A_,5bڲ@CH,پDWw%=Ml,&ң}k60ё'5-ʿ쎾M-2˂BYw]JI| o4UL.^IƄN&Co\dd'XziLlXn ΤYzegv3Ѧ,D,F;="րf-0c #W64qNĦf8`σi= %C`TlOsuOF7PDK7pj*:=Eluҝd1b9l)h2LP\՞ lےѺOodoYL榶,&wSegͩa Is; $kkId?-Ǡ Ok郈N]kܮב*nͺXHŋ'ZOtᬓb?iyW PrD9""A0 48S#'tޚ;#e

:]$n)C Zx4T,5BAZUxOjWF=tfRj.A)z!zmS(8tYT,yoK9&ʼ:;.ۃyj@H߉Mᴳ;$QSj<շ#JŐ~k-zN]v>iaepߙkEӻNZpP!{ϊ*f1/<:Gʹ'EvKID Nl< ]bX.8Bԓfa^CYF*)t}d':?B?^*ZSYf*4`?Yঢ 0yi9eԩeNŮVT==TYˈk1qIoRQEbĊ>OD:eҶTUVnnHTo_U17b#@ЮXA4&nk&ɴv y*{ ?7#r lƋ UlPNE*2*ӂ +Vѐ{羢BFomC +<*KYL2DL[`"gNIw^ [ Eن-&mVObћb`vw_VT ,Vl>/̶9*NMID+@Ee}t3$L+xZ^{p1H&0%^:k"(R0lF=f^'P +f4&q 4?s&nUպo-An+ҥFV\w\_נ$q:"LV5UfdEؗ& +ZэMs!{ľMVԁ -+;@J7euXZcv %?Lt ռgkѕcrJ/i+<Ͱ>4-V¶['H\bkLCS> k P +-V!ǕCXaɂz<"-VX캘v `SEbljꏽZ+DЮAGIbT*DڷzҢYu5sXtZҍ3;`cW4‚bgê+8HRhwr+qaΆa +8 ƕslxna.U;{#9VC7-߀7ÊEwX?+aKpXADCtgq; 6$n:Z!V5qYR=V=mp(:-Bߎ?@@8o.ڃ|r3qpCӆ + +B!G0XX{8+' +.@z{.aŁDêrª6T+,?8sp.m;Jj6X5[a*mțXo6qZj +n+]T[M+<!  +XAtU;m l0`ِ֍%x︺xp{q 5p ·W!BVg[0X(0/냈Kc/ +C%lz0Uh%em77N:X\WfWOEɪc`v)`.-*>eՑb?CsYu4ftͧYuYA 0@0UGHuN,~ZYAנκmV}>jq0.ϪcP|o +t@ + N g +mܠ:}Vᠢg#W泂_ᵁű}V}qn:OmmH6F*VoUtDzgb`\rm2>+yc>+8 |V k:F>+aTэV +f>+heэV [t4:WCk4N : a6+1X +┤KPÉ{ +2/n@N?#Ox ^ڪc +/w!c1! +bEX8 ϾqwV8΢{XC+heVDŊq[ οA0TZEϾZXc@ѧsXAL5OYZDV=R߿{{ć+XCO&/>=^z(^|<"^|Gː|<̈2o >xdq? xE i՗ዏD.{c8_|<?xt߲هGo'tpCܟ<ڹ?E/NtVۋ9{fN^<+z?8y0<~q0Œ'`'G'''-t*'~?SɋGP'&ο8ye''EQ9yt܄'ޜ6._R@+a|s}8(yM{S Wmk)c Eɣkɣk ÿq+GўCnJ^2PA+]f2>0y~r'vhv0qd~'H{S򚶏oH^ӓ[NH?Fd8!ya, /H?/X!B`/FfUv2ЃNGg(daűg236PUIց%Oh9j=xLRt[4+e|%[bKy5snȜO%l!|X4"U"Zx<814`5EN4<ƹ9Sh 73[x&i;?e |<8|<ҷb9y݆||pf=ypsMqG[% u=y>Yz߯Z a"SBþ˜ y8cˣ <)ǞeK;9y4̴RMD!?ׁCסυ(py <3psjF!e8-!Ɉ<\uP) yx|. i=y,9+J%j)*~2 +qphr049e>&Z!{=cs{2<0N:9xnC4(Ωگ?x({h +AEà h 'puưyrHF_[cǁНb~' sEu) +39;yH+Cy@ݦ@6)2Ԁif 6-H_y`h-nA CUtn)G܌ Ce!wPP !|$!# NB$z'0u/@0Aȃg[2!#}My<#aăK<E@'FvӰ3 KO E@&{1t0Q}NbLȃSD^Ǿ*=@qs3"ifnI3.ȁ㛊vۏaRkuylnFa$©ǣ~T˄1ya$ն&CdJBt'SfJڸ/pCoK'%/T "d^N438vpk '[6'dDVr9\/x`T[c2#͟gF~^ܴT10wxc̢EN-uc#@imFauOi&D:UE0EDi^XS͂Sq;*#2+ڠC9Nōȃ8h!Q0E*FDġ})-[^&n} c"bӹ27#Lo)]5m8[p0`A##d+y bd!A?M<3c"#-Bg1nʃ"e<Ǖ3!Q`R)~ t.*$@1}m|YRp%6^Ezf!sG"rYeCh=wtK7q<q=xKTxX1ǩ<MhvxhZcW %0^1uNY5uxuE,p)IlYa"X3;64;ek;'=`5Oxxl6-d~6}4Zl6Lu6vog)~S_&6^8lGd66lx%,[l)[p<8K#^vwC`o3M'c4^CMHh<xB+]s3qP45э dlIZl<\{`!iFf f3JfwD;5EY],F66$㾬xUwsC[IO-3z^p_S}a7VzQd<•Sf,F<$kvLxZ:̈́Nr\џ|& |< ETx8H!~Yj{uSa;u,܃%=wEx,aIxjtɨy/*>xj7K!{yH&@6R- A'm,F>m '<nzmMaB&E<Hgyxhͦx;# BdAC&LS{㡴A/1?G:j"I0B7RDN㡩vq+1xZB#]3%jxhUn|,NJ{cCdڃ7f >x 0z|odnXmB:vxHuxUW#aמyhJ:ϭ!H©9Ht|bql<.lKfatޓO ݏ9Nl3.4*! 4ILCd%2 +!Zl1!\W1B&aRpJtj]uB^SeUTU̥]7U=S$IV}#; T^~"I5!SF$ö|*zN|@S5 xHلyxz,4xxM##jyx;elS*:+895O@skuK8<^AVZm#0̥yVSjWބqP8<)@uꝱ s-}WF;{xm; +^P65J_P( by1h}GKĭa z1Wx\om~0hSy)ģ]ќ&^˴CKþQO('.,z1cOL.OQ%&^عxj|>x]vTGo8+xy`A?'N.v0h&W%}F;xI`ы/&8:>x` ,nʓu^Lx![€P<-GPGO(RoM[Z-{Q`b3ߋQOQ>x;xдJ|@Wq3f/(~{Ә|10v *P<7͍KT<~.Pȶ8_H,t Ф|!}$"0xl4@~]^NH2)V@fh-C-*jl k;xpxuxf2/AN(OrXXAäDe*,E鿓7nH< lwFܺ.e$f:x478= pc7&6$FLH:x^% >YJ Zѓ vw7رbL''g a+զ9g&wҕ ixt%M#"I%'$+4F U;hx#82 o$v N9іA1,ؿ996xW-8 $p.N |v{ 3ef$UN\u?d$wʣp܌ZH<,>dr 0~m`B1"hf؁CG $Oqx%0w|A31`x"oȻm b"AO/*<;px{zC uͮtA /QҢ1=p" S"8y^>mgwP;3(zdH-px<lShxhE`ACAv,ڹ-[DC? 0VA)ն-"6ն-ȘhxB&ix`^Q6 xʥuhxHjVqqRA@3!(ՐC94Pxhm(<]O3CB5NЁ\ +pKm&"= Ix8n3HF`!&dz0ϓm5tVxơe˙QpQ'$shϥ^냁\2lx& Cۈmi9(x m:°(i|o~=0#NvݎiBϚ)xh9diD!uQq{0J吼C`$I?CvJmDUAx&HI6m[{x䰻Aj=@\Z>Tq4mGRT! +q |C\(;_.G,Fdz!ڑv`x$*JkE'oFU. +q/rtkGK&cI&&Mlj< {x&[skU.0xf90xe1b y( =-ŘôsٹO3 +#3~mNi8Yf[& + )x xF>r1:tZa <x(KI<\U= x-M baAXAx``U's!x& LAmja1@)2| n2AТ%!H㞼Ѣ"3\]Fa٘'3!xHj!|#1(xL_Ι7y=u9o{@ݠ k3"՜`PL<ʣj"ࡊCoa_f"a}] hb&q~2 $<\}8p čC=^`H(xxt7 G_s}Pў֣'xxt|4 +ģâu/_@խNWƖ`᭵`'opkwccNq`1qs)8hx8{̰vѰŁc3ubpx mvpxݹqxLq`R1u<cmН9={K4<ޣT;pxܱ́K ;v&;pxܹMy{m14D"qx!o}81sM%G:*Ko@վLcΣ9K00x({90x ]FS<0xU~a4JXcO:8x9%s1lӹcsQeu.rXqrB&s>wkˆsflLQ)`d*r63e ߭awbz"E - 3.g^ǐGC}Yzf r-/azXx}`U獓Yx8y3x\ +y5b" +D!zDtF!OYÿDiI +qcJK@un/0<$8+a DÃ$΃+%N7-;Pxyv@7G/h!&XMၙ yמYxh-^6͏$N6=:ᕚǘ͹(G:uH=`?Yxx)`@Z`0eU ,%Fhe0[EfaMfv3 sK_6 ك;PxvFbFa +~ +DmH]U:W~ +ƒ~Qx0smDh"Uѻ! IVi0S/$zDLûn- cI2$5n5nWLZ&AxIx.{u$}&!(ow-6z$@xt)UNfД CN2,%Hw*7RAAx56wAxij=@x\-B\^:@xX='Mn7̸%\ZXAx0R>K&sIBlǩV ]q\JG3b~'/bq;݈<7}e ^yT_H4D^౳U!;X> xhASC 5<4,kS^gaS$bg< !xLV1<,<eCj3U"d #N3*F˟9x+yd:2o Br1s¬U-pw1iNB˭Dʖ&XD`rkL xt|۷XXpBJ" A<LM< T4&nC}K4~sI`/J`qx03d &ng|a@qxҗgdhg/Lpxݠ0}<<]^c:6gcR'(>ÖxϠlȘxpo ~6q7adx ̠p#wF(4cgf( +U*n w݁ 78H`h%!ތtmTD&dd*fUEv`0t8IzVqg71'oC.I=x9ZN$J\` +7 "QvH.&N\<mn/*gi(]YXh$D#s9\U<~qDX<>^9r6~]Co7b{>}cah+'+go٬>w'ky`U<बPTϾj{ 2IYq{=);#{wm T)[x\y' ]&[ %,1.gr0lM_\<˝4ţ3vox"kEqsD+o$SﳕJ4/,ɮ>lEVX<#{ZX>ռSxhţpy[u%U<̖EQ<\iĺ QdJT=Ks+De +g}7{\v6fa HL_=V$]5i!NPSVϪDžJQ~]G~(1(1N\L1f/BAܵ vݨ`xx祘x^ "(i3E6f!nG⸒ẉǹ6H_7N;Ei?L<%v G]('Sq:=Qz#(IŻf{ISy(E\<`x$_|]{\<+y>UU<9דxɜ[GA )nQ'* GOڸr̷x2dA8ur)x,H=tEF NJ1Pf + +gw/KQ<&`wv9OwϚ²t~Q6S|eLJ#ҾQ:Lk `x$ͧ*/,&6QQ2jOycqGP]p0-X`x1[3˧Ίƣ k>Og(GS~B"qrQBxvFxy*(ǵ\QBxV֑x4A\+GuxCުߏxk%t<)*Ǧ?+<k[_VxMMS Xx<c{~ǣvl._GW~xbPpcQ;}FK͓|e +g鱹͞A8Yx7ԁ<++j {x,u%gHȳAn3A!F +a!ݺD^6{P^D!mVLFYg"K0q СGy"XY)Fޜ +売W#ﳩoLcHȣqm-)LJ!+qXB5$s y6u]ɻlgc1o<(J% U'̤\ĚG rfGkJ^~ qM"P<9!ϊ +WW!m +g7j'@Sǝy?e+?TҊKrSzW Z_ l*T3؄ƷQx ,5[B݅K#[%MȣaZJ<_+Bꋺ[yP<;*S<V<wN?NY!TE۬&B]]< +_ +ygK<Tc6z#؄<֟4pD yܵG.B Ea(B%<j(Bn1Uqi^}DƒQ]cW+:%p;c6_~1gS`lX< +GSg=t<;Sqު:q'gVZ[xx> -stream -xk`(`x~ "d -endstream +250002 endobj 372 0 obj -20 +[370 0 R] endobj 373 0 obj << - /Type /Font - /Subtype /Type0 - /BaseFont /EAAAAA+mwa_cmr10 - /Encoding /Identity-H - /ToUnicode 374 0 R - /DescendantFonts [375 0 R] + /Resources 374 0 R + /Type /Page + /MediaBox [0 0 445 294] + /CropBox [0 0 445 294] + /BleedBox [0 0 445 294] + /TrimBox [0 0 445 294] + /Parent 375 0 R + /Contents 372 0 R >> endobj -375 0 obj -<< /Type /Font -/BaseFont /EAAAAA+mwa_cmr10 -/CIDToGIDMap /Identity -/Subtype /CIDFontType2 -/CIDSystemInfo << /Registry (Adobe) /Ordering (UCS) /Supplement 0 >> -/FontDescriptor 368 0 R -/DW 0 -/W [ 0 [365 500 500 500 500 500 750 833 555 276 276 388 555 555 443 276 500 750 276 776 500 500 651 391 526 555 443 526 750 443 333 500 680 555 500 394 500 ] ] ->> -endobj -374 0 obj -<< /Length 376 0 R /Filter /FlateDecode >> -stream -x]j0E --E%RȢlijY_Yw@vrѽ(9ND}I55.]I%L'}VIH>Dɶe#H>ŸqX?a]߼!ًXϷչN"sdMM/{{I9M&#>gGBEРC5^hO8s,CZ0d4$HRPڂrP *@9s*Ri@HaMjF*H2SBgN ,dLSXgb H u~35jQ_I V. -JTQWB -++x|])U|NPBVs $-ͳ\[g)ݸagv( -endstream -endobj 376 0 obj -397 -endobj -377 0 obj << /Type /FontDescriptor - /FontName /EAAAAB+mwb_cmsy10 + /FontName /EAAAAA+mwb_cmsy10 /FontBBox [11 -215 942 727] /Flags 33 /CapHeight 0 @@ -2902,14 +3080,14 @@ endobj /ItalicAngle 0 /StemV 0 /MissingWidth 500 - /FontFile2 378 0 R - /CIDSet 379 0 R + /FontFile2 377 0 R + /CIDSet 378 0 R >> endobj -378 0 obj +377 0 obj << /Length1 1968 - /Length 380 0 R + /Length 379 0 R /Filter /FlateDecode >> stream @@ -2919,54 +3097,54 @@ E mbkoԊ$?< N]w~p endstream endobj -380 0 obj +379 0 obj 1292 endobj -379 0 obj -<< /Length 381 0 R /Filter /FlateDecode >> +378 0 obj +<< /Length 380 0 R /Filter /FlateDecode >> stream xk endstream endobj -381 0 obj +380 0 obj 9 endobj -382 0 obj +381 0 obj << /Type /Font /Subtype /Type0 - /BaseFont /EAAAAB+mwb_cmsy10 + /BaseFont /EAAAAA+mwb_cmsy10 /Encoding /Identity-H - /ToUnicode 383 0 R - /DescendantFonts [384 0 R] + /ToUnicode 382 0 R + /DescendantFonts [383 0 R] >> endobj -384 0 obj +383 0 obj << /Type /Font -/BaseFont /EAAAAB+mwb_cmsy10 +/BaseFont /EAAAAA+mwb_cmsy10 /CIDToGIDMap /Identity /Subtype /CIDFontType2 /CIDSystemInfo << /Registry (Adobe) /Ordering (UCS) /Supplement 0 >> -/FontDescriptor 377 0 R +/FontDescriptor 376 0 R /DW 0 /W [ 0 [750 776 ] ] >> endobj -383 0 obj -<< /Length 385 0 R /Filter /FlateDecode >> +382 0 obj +<< /Length 384 0 R /Filter /FlateDecode >> stream x]Pj0+l CԒX}q z0h[lE^X gBpjV& :G:g} endstream endobj -385 0 obj +384 0 obj 234 endobj -386 0 obj +385 0 obj << /Type /FontDescriptor - /FontName /EAAAAC+mwb_cmmi10 + /FontName /EAAAAB+mwb_cmmi10 /FontBBox [16 -215 882 715] /Flags 33 /CapHeight 0 @@ -2975,14 +3153,14 @@ endobj /ItalicAngle 0 /StemV 0 /MissingWidth 500 - /FontFile2 387 0 R - /CIDSet 388 0 R + /FontFile2 386 0 R + /CIDSet 387 0 R >> endobj -387 0 obj +386 0 obj << /Length1 2244 - /Length 389 0 R + /Length 388 0 R /Filter /FlateDecode >> stream @@ -2996,53 +3174,53 @@ a VVkT#ޥIm!ţPh$>:C㡨B H#6ѷ? OD1Bfhp,> +387 0 obj +<< /Length 389 0 R /Filter /FlateDecode >> stream xk`` endstream endobj -390 0 obj +389 0 obj 12 endobj -391 0 obj +390 0 obj << /Type /Font /Subtype /Type0 - /BaseFont /EAAAAC+mwb_cmmi10 + /BaseFont /EAAAAB+mwb_cmmi10 /Encoding /Identity-H - /ToUnicode 392 0 R - /DescendantFonts [393 0 R] + /ToUnicode 391 0 R + /DescendantFonts [392 0 R] >> endobj -393 0 obj +392 0 obj << /Type /Font -/BaseFont /EAAAAC+mwb_cmmi10 +/BaseFont /EAAAAB+mwb_cmmi10 /CIDToGIDMap /Identity /Subtype /CIDFontType2 /CIDSystemInfo << /Registry (Adobe) /Ordering (UCS) /Supplement 0 >> -/FontDescriptor 386 0 R +/FontDescriptor 385 0 R /DW 0 /W [ 0 [750 602 ] ] >> endobj -392 0 obj -<< /Length 394 0 R /Filter /FlateDecode >> +391 0 obj +<< /Length 393 0 R /Filter /FlateDecode >> stream x]Pj0 +t=,N^@RȡҴrjhl8}m%P# D;g#w:M8€uEU*o5P$99ằv&H9 gN'%k@W[5A*$F,nen/o^ooIۤjU ;+mB28Vd[ >d_} endstream endobj -394 0 obj +393 0 obj 236 endobj -395 0 obj +394 0 obj << /Type /FontDescriptor - /FontName /EAAAAD+mwa_cmmi10 + /FontName /EAAAAC+mwa_cmmi10 /FontBBox [-34 -250 1047 750] /Flags 33 /CapHeight 683 @@ -3051,14 +3229,14 @@ endobj /ItalicAngle 0 /StemV 0 /MissingWidth 500 - /FontFile2 396 0 R - /CIDSet 397 0 R + /FontFile2 395 0 R + /CIDSet 396 0 R >> endobj -396 0 obj +395 0 obj << /Length1 3872 - /Length 398 0 R + /Length 397 0 R /Filter /FlateDecode >> stream @@ -3080,67 +3258,158 @@ U ,JqJ9/*۰MccRQ+x鸫W endstream endobj -398 0 obj +397 0 obj 2744 endobj -397 0 obj -<< /Length 399 0 R /Filter /FlateDecode >> +396 0 obj +<< /Length 398 0 R /Filter /FlateDecode >> stream xk``d`h``pm a endstream endobj -399 0 obj +398 0 obj 19 endobj -400 0 obj +399 0 obj << /Type /Font /Subtype /Type0 - /BaseFont /EAAAAD+mwa_cmmi10 + /BaseFont /EAAAAC+mwa_cmmi10 /Encoding /Identity-H - /ToUnicode 401 0 R - /DescendantFonts [402 0 R] + /ToUnicode 400 0 R + /DescendantFonts [401 0 R] >> endobj -402 0 obj +401 0 obj << /Type /Font -/BaseFont /EAAAAD+mwa_cmmi10 +/BaseFont /EAAAAC+mwa_cmmi10 /CIDToGIDMap /Identity /Subtype /CIDFontType2 /CIDSystemInfo << /Registry (Adobe) /Ordering (UCS) /Supplement 0 >> -/FontDescriptor 395 0 R +/FontDescriptor 394 0 R /DW 0 /W [ 0 [365 520 600 276 803 500 877 467 477 ] ] >> endobj -401 0 obj -<< /Length 403 0 R /Filter /FlateDecode >> +400 0 obj +<< /Length 402 0 R /Filter /FlateDecode >> stream x]j0)r{v"Kd/|&5Sàt8 GyR sVʤݔ#|ޭp|;8t{[ r%yO92_O\-BA8[.q=ᖅ_7wzQ偲'*aDvj2%62CUG3{_X Ӻi8Ҹ7klt  endstream endobj -403 0 obj +402 0 obj 271 endobj -367 0 obj -<< /Type /Pages -/Count 1 -/Kids [365 0 R ] >> +403 0 obj +<< + /Type /FontDescriptor + /FontName /EAAAAD+mwa_cmr10 + /FontBBox [-43 -250 1008 750] + /Flags 33 + /CapHeight 683 + /Ascent 750 + /Descent -250 + /ItalicAngle 0 + /StemV 0 + /MissingWidth 500 + /FontFile2 404 0 R + /CIDSet 405 0 R +>> endobj 404 0 obj +<< + /Length1 9464 + /Length 406 0 R + /Filter /FlateDecode +>> +stream +xZ tՕߴZd-ElKl˲lˋ,oĎxO{Ile$JRJ ͡iȤ"m 4I)p )PpڙNfNC{`eKvL)~o߻G =E)ՙ6k%wI,>2=DI_lm7w]UEq wn]QM?WWa Z.~jN >M.a|F|ҏdI8. PwJW +6R{)Мw:|V| HCc[KfۨAvz?KSqELgѳ+4ExYY*fR(cJF >SǼ {VT5)% 18GDVKHgCXL;Sq_[Ӫ4&ƞs0SD \xC2ѝƚ0e +ݝ/`K0#!2 lkݐAGqBpfJU.eQZ 9JԾbn1sXϢ(󽚗/iy;ۧMM +oHRu({-߿sOf籅'( m(' jg^ +-MY,A6g Hv`SȖd/dK@,*^!( '*RFADb'~MæRU/[ +ԁ u}{f[pgɱ{:NQxՉ۶X0+mkZ廴imo~`ǚjT3MA~B/ IUnALnjn ,4'r۔\r6gR>募nvh=PEUԽ5A=/)/ϑoVfw}mlG{nvtC )B[G ioxE^YynNR=urooC>X8o}} )aJID_|~1X,TrOT!&G%JAIIWE"]yZH %#]V5-S['ZT!ʆNSU M9쪏9:;w=/>Y9)P}==1 Q#}p =gbgHR8:OE"5:LԼPRҕfr'['{"8s:)}5} w՟\8?iLͣ)T5"'RV<jCVUF PBzP~Kϣ[jXN@Pgz9ID_`Fzr +OBwK}q~R'bT;S, ^'ZkX*s]U骫lq6u kIS WZlMܲHJƴjʱ#]"H8V8* /F<7~" {e+ОGD| /ѦȾu{Y6b`N@=S&CDK2INe)-bcQq߿e}8Q_ղ~se a5v`\fa|]N2Kwk6Ϫ g` z$(Xʈ = ťTZ9R .m=Fg^: ב"?o&ۃb?ֲ~IK.*_\uM?܍ -ݽM_Cޠ3+JHv9d4x\J"Yf1k"*FQybŰc1񞱨ѝ$}7g'.|硯WUP2ZR,B权;{Gtt?*,w`.0&1b|k9'1;Jnc+A)Cݚ'{SɦIcl闇wn#pN7'3y%Fy1 K:AG,0kܯBb"nXG3 =?V\5t$sqxMHK՞Tt*K?^(ӓUtrׄAc +V8R 둢2bu$L栀5IBAX/ё1j!"u 3EK>-tHӳY"tØQqO~8W[&~0Z+8*5Refîv" lrmu' +8\I~rrjgѱ'$M.޻:ظ}r֣sYUG9Z"> +YBHĮGx~4+*{0jLdf6@\Ҝxl2`𞺸FQ'H{n"WIP?-/HqF<'VS¡`ϵ~50Xp䖗N6nysj/ XmUy?o>eS2Itf93_}}.AC5p͝YXSHFA9 g:S$()U»eF#_J|MZF{-ļ]Frʐ3=UM-q{% ,&.ʹ{cf^␯uLp/sWcѸ! +99VeItV>6dYYdWLb7ŰpϾ tÚL";f~wFYnnY`\A@߃iJ\U}oE">;X}"/}dv\&"'MoZRMoB>_ߧAVF +TjllOjyľ:G'-,!T"#MLjNŚTTp.1H9jTqϋLyC7?Rwv'H/Zl/˛ricm~'GwvنSY[@ WX}nŤ>׷yelp.viqk*sJ]#>lg}S?^n&x !}HhEEHԸÐWQiܯ?|w/bzoNS%eWI8.>ƞg/9sc Q?Z\,8ˢwh(>-*9@ٽhN|nws"0#%Y,Rb֙2 ΎXF:ZHsTNBe"Xi*q!VCѲ?:o l..\yc\fc8`y ۊܠ.MJ2匸4gK$ZI!)*ȧZ%@4@/1,Cؒ]pgjƎbE~MM~AMCkvtWƣ׸Դr?iƎ= TUֽh"=˦3v?~O P UHIԙ*ΕB%9{;/]4[f88Ra|tHXa W# 2BZ ݥC!' qV& j1{7B6)(Bo[: N>ffdW]+J:nt=bnغZ>'܉=?Ӿ-ݙKm$"d++~%AQ3AbUKeRCFβj n{ +K +EÓ&@4z.l*'"|[bs_KC쵔ry8@Z7fVlOջbk?صpYx|LIiϾjXa/L7 =l;O=Rxb1$B.": q!9?GM˙1syjhꞧ|s %\ʹp+qՇz$JhC+Az#6E$XIYtC\I‰[RL pՍVz$Yvc6ϑ)XJ1Gu㽤%I*ğ}sE'{(Y>LY&٥ҤSYdρs ^ 2JRd/L2 GY2LIS@lل[OXB..oW⡅wMGmTˡ 08{noF.喕qxA桂$][hl֏7?־~l>Wߚol!~]q>~'1#6nêW)3`ZbPKV1H!Kz}`/iq֡=Ϗn5Q#nDѝ/uĤ5aꅚu +,@ '71B]2 !*p> (q߹0%)P<ߠGPǚQX177`TLӥO$tjXO82J+: 1X^w L +c`V-fp]wGEœp}~)ؚieTX-4=n:vj:}txd16XXVV2fF'k&"3#C5~،ehfh¢Pߪ5}ƆQ;5114ctj˸zhЄ; L,J D Qr40Άa'Ӈ24so_-}"5&.|"w.wY_NrسD,'3EhL#6[V==$JWt:{g +endstream +endobj +406 0 obj +6805 +endobj +405 0 obj +<< /Length 407 0 R /Filter /FlateDecode >> +stream +xk`( x  +endstream +endobj +407 0 obj +20 +endobj +408 0 obj +<< + /Type /Font + /Subtype /Type0 + /BaseFont /EAAAAD+mwa_cmr10 + /Encoding /Identity-H + /ToUnicode 409 0 R + /DescendantFonts [410 0 R] +>> +endobj +410 0 obj +<< /Type /Font +/BaseFont /EAAAAD+mwa_cmr10 +/CIDToGIDMap /Identity +/Subtype /CIDFontType2 +/CIDSystemInfo << /Registry (Adobe) /Ordering (UCS) /Supplement 0 >> +/FontDescriptor 403 0 R +/DW 0 +/W [ 0 [365 500 500 500 500 500 750 833 555 276 276 388 555 555 443 276 500 750 276 776 555 500 360 555 391 443 500 722 500 276 776 625 651 500 500 526 526 750 443 333 500 680 555 394 ] ] +>> +endobj +409 0 obj +<< /Length 411 0 R /Filter /FlateDecode >> +stream +x]Mn 9vQ0)TEԴaZ1""/MSHvqYoqE?x4%q+̔vlêHɇiqIrBiq঎n~sw!|H~2ϑw=IޥaܥK 3+hSh-iil)RߺHzkx6J$e@$A%d@5Pp&S@ƚ5TṳSA!tVAN&JtPX'SkN b\uUxb9?E<3Xg=5v|x?3״ .J΃ +W ŝ&N HZsf޷S[}),Y3v +endstream +endobj +411 0 obj +425 +endobj +375 0 obj +<< /Type /Pages +/Count 1 +/Kids [373 0 R ] >> +endobj +412 0 obj << /Type /Catalog - /Pages 367 0 R + /Pages 375 0 R /Lang (x-unknown) >> endobj -366 0 obj +374 0 obj << /Font << - /F194 373 0 R - /F196 382 0 R - /F197 391 0 R - /F198 400 0 R + /F270 381 0 R + /F271 390 0 R + /F272 399 0 R + /F268 408 0 R >> /ProcSet [/PDF /ImageB /ImageC /Text] /ExtGState << @@ -3504,11 +3773,19 @@ endobj /GS358 359 0 R /GS359 360 0 R /GS360 361 0 R + /GS361 362 0 R + /GS362 363 0 R + /GS363 364 0 R + /GS364 365 0 R + /GS365 366 0 R + /GS366 367 0 R + /GS367 368 0 R + /GS368 369 0 R >> >> endobj xref -0 405 +0 413 0000000000 65535 f 0000000015 00000 n 0000000145 00000 n @@ -3627,9 +3904,9 @@ xref 0000006146 00000 n 0000006200 00000 n 0000006254 00000 n -0000006309 00000 n -0000006364 00000 n -0000006418 00000 n +0000006308 00000 n +0000006362 00000 n +0000006417 00000 n 0000006472 00000 n 0000006526 00000 n 0000006580 00000 n @@ -3687,10 +3964,10 @@ xref 0000009388 00000 n 0000009442 00000 n 0000009496 00000 n -0000009551 00000 n -0000009606 00000 n -0000009661 00000 n -0000009715 00000 n +0000009550 00000 n +0000009604 00000 n +0000009659 00000 n +0000009714 00000 n 0000009769 00000 n 0000009823 00000 n 0000009877 00000 n @@ -3716,10 +3993,10 @@ xref 0000010957 00000 n 0000011011 00000 n 0000011065 00000 n -0000011120 00000 n -0000011175 00000 n -0000011229 00000 n -0000011283 00000 n +0000011119 00000 n +0000011173 00000 n +0000011227 00000 n +0000011282 00000 n 0000011337 00000 n 0000011391 00000 n 0000011445 00000 n @@ -3776,11 +4053,11 @@ xref 0000014199 00000 n 0000014253 00000 n 0000014307 00000 n -0000014362 00000 n -0000014417 00000 n -0000014472 00000 n -0000014526 00000 n -0000014580 00000 n +0000014361 00000 n +0000014415 00000 n +0000014469 00000 n +0000014524 00000 n +0000014579 00000 n 0000014634 00000 n 0000014688 00000 n 0000014742 00000 n @@ -3804,16 +4081,16 @@ xref 0000015714 00000 n 0000015768 00000 n 0000015822 00000 n -0000015877 00000 n -0000015932 00000 n -0000015987 00000 n -0000016042 00000 n -0000016097 00000 n -0000016152 00000 n -0000016206 00000 n -0000016260 00000 n -0000016314 00000 n -0000016368 00000 n +0000015876 00000 n +0000015930 00000 n +0000015984 00000 n +0000016038 00000 n +0000016092 00000 n +0000016147 00000 n +0000016202 00000 n +0000016257 00000 n +0000016312 00000 n +0000016367 00000 n 0000016422 00000 n 0000016476 00000 n 0000016530 00000 n @@ -3835,17 +4112,17 @@ xref 0000017394 00000 n 0000017448 00000 n 0000017502 00000 n -0000017557 00000 n -0000017612 00000 n -0000017667 00000 n -0000017722 00000 n -0000017777 00000 n -0000017832 00000 n -0000017886 00000 n -0000017940 00000 n -0000017994 00000 n -0000018048 00000 n -0000018102 00000 n +0000017556 00000 n +0000017610 00000 n +0000017664 00000 n +0000017718 00000 n +0000017772 00000 n +0000017826 00000 n +0000017881 00000 n +0000017936 00000 n +0000017991 00000 n +0000018046 00000 n +0000018101 00000 n 0000018156 00000 n 0000018210 00000 n 0000018264 00000 n @@ -3866,61 +4143,69 @@ xref 0000019074 00000 n 0000019128 00000 n 0000019182 00000 n -0000019237 00000 n -0000019292 00000 n -0000019347 00000 n -0000019402 00000 n -0000019457 00000 n -0000019512 00000 n -0000200927 00000 n -0000200951 00000 n -0000200978 00000 n -0000218041 00000 n -0000217902 00000 n -0000201176 00000 n -0000201431 00000 n -0000207495 00000 n -0000207473 00000 n -0000207593 00000 n -0000207613 00000 n -0000208142 00000 n -0000207772 00000 n -0000208617 00000 n -0000208638 00000 n -0000208890 00000 n -0000210302 00000 n -0000210280 00000 n -0000210389 00000 n -0000210408 00000 n -0000210799 00000 n -0000210568 00000 n -0000211111 00000 n -0000211132 00000 n -0000211384 00000 n -0000213040 00000 n -0000213018 00000 n -0000213130 00000 n -0000213150 00000 n -0000213541 00000 n -0000213310 00000 n -0000213855 00000 n -0000213876 00000 n -0000214132 00000 n -0000216996 00000 n -0000216974 00000 n -0000217093 00000 n -0000217113 00000 n -0000217532 00000 n -0000217273 00000 n -0000217881 00000 n -0000217964 00000 n +0000019236 00000 n +0000019290 00000 n +0000019344 00000 n +0000019398 00000 n +0000019452 00000 n +0000019506 00000 n +0000019560 00000 n +0000019615 00000 n +0000019670 00000 n +0000019725 00000 n +0000019780 00000 n +0000019835 00000 n +0000019890 00000 n +0000019944 00000 n +0000270024 00000 n +0000270048 00000 n +0000270075 00000 n +0000288055 00000 n +0000287916 00000 n +0000270273 00000 n +0000270525 00000 n +0000271937 00000 n +0000271915 00000 n +0000272024 00000 n +0000272043 00000 n +0000272434 00000 n +0000272203 00000 n +0000272746 00000 n +0000272767 00000 n +0000273019 00000 n +0000274675 00000 n +0000274653 00000 n +0000274765 00000 n +0000274785 00000 n +0000275176 00000 n +0000274945 00000 n +0000275490 00000 n +0000275511 00000 n +0000275767 00000 n +0000278631 00000 n +0000278609 00000 n +0000278728 00000 n +0000278748 00000 n +0000279167 00000 n +0000278908 00000 n +0000279516 00000 n +0000279537 00000 n +0000279792 00000 n +0000286717 00000 n +0000286695 00000 n +0000286815 00000 n +0000286835 00000 n +0000287392 00000 n +0000286994 00000 n +0000287895 00000 n +0000287978 00000 n trailer << - /Root 404 0 R + /Root 412 0 R /Info 1 0 R - /ID [<1CEE51C6CF9BE228579919F87D2D7028> <1CEE51C6CF9BE228579919F87D2D7028>] - /Size 405 + /ID [<8BB1B6422851B1811EA497F4754ADCC5> <8BB1B6422851B1811EA497F4754ADCC5>] + /Size 413 >> startxref -224107 +294257 %%EOF diff --git a/figs/uniaxial_hac_iff_damped_plants_masses.png b/figs/uniaxial_hac_iff_damped_plants_masses.png index 39be611..d1a2a0b 100644 Binary files a/figs/uniaxial_hac_iff_damped_plants_masses.png and b/figs/uniaxial_hac_iff_damped_plants_masses.png differ diff --git a/figs/uniaxial_overview_model_sections.pdf b/figs/uniaxial_overview_model_sections.pdf index 7555a17..12c4c99 100644 Binary files a/figs/uniaxial_overview_model_sections.pdf and b/figs/uniaxial_overview_model_sections.pdf differ diff --git a/figs/uniaxial_overview_model_sections.png b/figs/uniaxial_overview_model_sections.png index 67dd288..b68a6f0 100644 Binary files a/figs/uniaxial_overview_model_sections.png and b/figs/uniaxial_overview_model_sections.png differ diff --git a/figs/uniaxial_overview_model_sections.svg b/figs/uniaxial_overview_model_sections.svg index 5dd66cc..7fcedd6 100644 --- a/figs/uniaxial_overview_model_sections.svg +++ b/figs/uniaxial_overview_model_sections.svg @@ -1,5 +1,5 @@ - + @@ -80,6 +80,18 @@ + + + + + + + + + + + + @@ -136,301 +148,346 @@ - + - + - + - + - + - + - + - + + + + + + + + + + + + + - - - - - - - - - - - - - - - - - - + - - - - - - - - - - - - - - - - + - - - - - - - - - - + + - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - + - + - - - + + - - - - - - - - - - - - - - - - - - - - - - + - + - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - + - + - - - + + - - + + - - + + - + - - + + - - + + - - - - - - + - - - - - - - - - - - - - - - - - - + + + + + + + - - - + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + - - + + + + + + + + + + + + + + + + + + - - - - - - - - - - - - - - + + - + + + + + + + + + + + + + + + + + diff --git a/figs/uniaxial_paylaod_dynamics_rigid_schematic.pdf b/figs/uniaxial_paylaod_dynamics_rigid_schematic.pdf new file mode 100644 index 0000000..bec016f Binary files /dev/null and b/figs/uniaxial_paylaod_dynamics_rigid_schematic.pdf differ diff --git a/figs/uniaxial_paylaod_dynamics_rigid_schematic.png b/figs/uniaxial_paylaod_dynamics_rigid_schematic.png new file mode 100644 index 0000000..9b1121d Binary files /dev/null and b/figs/uniaxial_paylaod_dynamics_rigid_schematic.png differ diff --git a/figs/uniaxial_paylaod_dynamics_rigid_schematic.svg b/figs/uniaxial_paylaod_dynamics_rigid_schematic.svg new file mode 100644 index 0000000..c3a31b0 --- /dev/null +++ b/figs/uniaxial_paylaod_dynamics_rigid_schematic.svg @@ -0,0 +1,171 @@ + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + diff --git a/figs/uniaxial_paylaod_dynamics_schematic.pdf b/figs/uniaxial_paylaod_dynamics_schematic.pdf new file mode 100644 index 0000000..b167334 Binary files /dev/null and b/figs/uniaxial_paylaod_dynamics_schematic.pdf differ diff --git a/figs/uniaxial_paylaod_dynamics_schematic.png b/figs/uniaxial_paylaod_dynamics_schematic.png new file mode 100644 index 0000000..9584b94 Binary files /dev/null and b/figs/uniaxial_paylaod_dynamics_schematic.png differ diff --git a/figs/uniaxial_paylaod_dynamics_schematic.svg b/figs/uniaxial_paylaod_dynamics_schematic.svg new file mode 100644 index 0000000..60f766d --- /dev/null +++ b/figs/uniaxial_paylaod_dynamics_schematic.svg @@ -0,0 +1,206 @@ + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + diff --git a/figs/uniaxial_paylaod_dynamics_schematic_beam.pdf b/figs/uniaxial_paylaod_dynamics_schematic_beam.pdf new file mode 100644 index 0000000..5b7222b Binary files /dev/null and b/figs/uniaxial_paylaod_dynamics_schematic_beam.pdf differ diff --git a/figs/uniaxial_paylaod_dynamics_schematic_beam.png b/figs/uniaxial_paylaod_dynamics_schematic_beam.png new file mode 100644 index 0000000..61b88d7 Binary files /dev/null and b/figs/uniaxial_paylaod_dynamics_schematic_beam.png differ diff --git a/figs/uniaxial_paylaod_dynamics_schematic_beam.svg b/figs/uniaxial_paylaod_dynamics_schematic_beam.svg new file mode 100644 index 0000000..21549e1 --- /dev/null +++ b/figs/uniaxial_paylaod_dynamics_schematic_beam.svg @@ -0,0 +1,232 @@ + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + diff --git a/figs/uniaxial_payload_dynamics_soft_nano_hexapod.pdf b/figs/uniaxial_payload_dynamics_soft_nano_hexapod.pdf new file mode 100644 index 0000000..1772cec --- /dev/null +++ b/figs/uniaxial_payload_dynamics_soft_nano_hexapod.pdf @@ -0,0 +1,3061 @@ +%PDF-1.4 +% +1 0 obj +<< +/Producer (Apache FOP Version 2.4.0-SNAPSHOT: PDFDocumentGraphics2D) +/CreationDate (D:20230630151935+02'00') +>> +endobj +2 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +3 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +4 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +5 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +6 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +7 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +8 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +9 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +10 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +11 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +12 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +13 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +14 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +15 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +16 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +17 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +18 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +19 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +20 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +21 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +22 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +23 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +24 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +25 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +26 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +27 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +28 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +29 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +30 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +31 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +32 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +33 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +34 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +35 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +36 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +37 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +38 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +39 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +40 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +41 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +42 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +43 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +44 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +45 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +46 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +47 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +48 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +49 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +50 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +51 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +52 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +53 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +54 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +55 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +56 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +57 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +58 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +59 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +60 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +61 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +62 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +63 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +64 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +65 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +66 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +67 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +68 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +69 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +70 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +71 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +72 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +73 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +74 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +75 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +76 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +77 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +78 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +79 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +80 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +81 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +82 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +83 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +84 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +85 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +86 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +87 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +88 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +89 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +90 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +91 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +92 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +93 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +94 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +95 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +96 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +97 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +98 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +99 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +100 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +101 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +102 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +103 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +104 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +105 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +106 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +107 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +108 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +109 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +110 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +111 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +112 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +113 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +114 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +115 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +116 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +117 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +118 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +119 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +120 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +121 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +122 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +123 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +124 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +125 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +126 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +127 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +128 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +129 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +130 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +131 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +132 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +133 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +134 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +135 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +136 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +137 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +138 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +139 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +140 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +141 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +142 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +143 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +144 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +145 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +146 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +147 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +148 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +149 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +150 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +151 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +152 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +153 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +154 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +155 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +156 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +157 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +158 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +159 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +160 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +161 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +162 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +163 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +164 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +165 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +166 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +167 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +168 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +169 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +170 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +171 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +172 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +173 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +174 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +175 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +176 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +177 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +178 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +179 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +180 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +181 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +182 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +183 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +184 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +185 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +186 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +187 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +188 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +189 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +190 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +191 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +192 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +193 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +194 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +195 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +196 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +197 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +198 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +199 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +200 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +201 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +202 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +203 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +204 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +205 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +206 0 obj +<< +/Type /ExtGState +/CA 0.5019608 +>> +endobj +207 0 obj +<< +/Type /ExtGState +/CA 0.5019608 +>> +endobj +208 0 obj +<< +/Type /ExtGState +/CA 0.5019608 +>> +endobj +209 0 obj +<< +/Type /ExtGState +/CA 0.5019608 +>> +endobj +210 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +211 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +212 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +213 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +214 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +215 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +216 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +217 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +218 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +219 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +220 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +221 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +222 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +223 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +224 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +225 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +226 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +227 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +228 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +229 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +230 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +231 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +232 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +233 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +234 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +235 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +236 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +237 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +238 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +239 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +240 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +241 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +242 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +243 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +244 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +245 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +246 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +247 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +248 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +249 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +250 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +251 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +252 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +253 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +254 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +255 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +256 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +257 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +258 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +259 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +260 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +261 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +262 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +263 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +264 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +265 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +266 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +267 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +268 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +269 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +270 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +271 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +272 0 obj +<< /Length 273 0 R /Filter /FlateDecode >> +stream +xˮ4ɒ7?OIRH% Z"U;O!&\3="<BO!˧[ꥻ\_}/޾z1T=įV[owWj׿ [D?/_S?~tooo7? !0o>\KO?Tx}P}\"~^Z>˃ +T[۠֏~>BJ\5֏~>bx+U^T_T]נ~>r{_|AUW5壟<rA|P޽>\vC~QncbZ-T_?zè^7GKէkZaT[u֏0zu7VGov=[7uÞbFeO=j zݴv{~Qnsbr~uISr׏0m{iWGo=,)!hF|QnsϻZ?zè^ť^aTmO߆ppzI78t%=Hh/3n嗫 +bяc׍ /|6uk,pbcڰ~<ͱ +/rG?XoaMxX0V_ZC5amWX0aMxX:,|4`aMxX:,wPCyV㝾RYMяMGՄx{=UbB~gc_,&te d\Lя=n1G?,{X}G?,{ b~~G?7|_~u~gCW5a}ϲX]{V>D'[|%{xXߴpRV>}oEZ>яM+l񅌏aM8OV޻}owmٿx(߳{Lя=w~gLя=g}_-ǴـxXߴpv7k яM_{1{xXߴLևٜOװ~>jU뀏||@2|_v+QW= +>>jOeg诚||@ՏV| §>>j}U׃||@6_v8=OǠL�ںgֻo?=kz8[= pN}{l=Y6?{k=p{l�ٺ�Ogݟo?=pz8˩ӧ|/Xp?=hz8[+=p{lٺ Og9t<΅Oɾ_.&&.is�ސ?,cnS^;Yn^IZg=^ ׏M9os&H\ 8gk.~+{)鳩[keoʀˀmP/+.z[Gԗ@]^ hk~ m]P_tл4>X]NסKtۺ229}az_ӗ4]ަ hkf m]M_tл4:wu2}) +\[.z[oH>}S+:.z[ԗJ] h뒺 mR_uл232H}i@kOu@jҀn}P!+:.Cy[+W6 ާm]OKZzWWu:]/ hq]N_ _.z[ӗ5]8+X񹳂2uV}e@[+e@oҀ&MmSKrW hk mS_,uл4 {ʀP)ӭ5C:OP>}8 9 .~r(@P>C_82P>`}89(m@Ρ|op}Чs(ʪe$r(ב|::9m@Ρ| ͯtc~Їs(>C6P.,u(ˡ|ȯCt?~s(>CZ:OP>p}89lm@Ρݗq|}ˡ\:OP>}8A9m@Ρ|ίtp~Їs(Pۀ>C@ס|./ 9`u@Ρ|@ʯtL~Чs(0ۀ>C�t:OP>@}8rA=5 a͡\GJ:OP>}:L 9Lu@Ρ|op~Їs(O2OPu ˡ<@>Cy|8$/tɘ_ʓ.9'W~}pI>Cy䷬PN}(Ci^`<@$T)8ݥoc_;ϰ e?˯9?ro '~ѽ#LULR?_<17Ws9Ws1R{ӟKC +5kck 3O#OGGC'S`QJ`ȓ_ȓ|=^Z=>?l�y6?{Y8=/'W3ts/"KPDUCBq>=zΆ@ZrcOhG _z8ƁqD8攟?~n}˴$8ΏC폷}la #z O/wFr_8ڰ"5=܍4ھ0bỌ/C~5[.ކz/Q^_5Ebw?0&7!O 3]}m+VnO8/_%{4yçp<څ01US{xa#;;˧1&C}C<3.~g}‹B7 ? !7!U]W?׀x3dGCg +S�^og& _/M,%53&jïu9Ksv\Ե'Br Uٸ]h �[ȳF ֆj5Հᘖz|j7wىኢJ"^BiB6{c%40eDޔ{0-nj!trrK*łglWCkf˜Jb*+#7j�Gס_Kv wpL 1iYgST)ᆸ>˘=4 +gGMM<޴\ _+O wCVSE8V^z +s]yYZbO=HJ%^&KџN,y%瓱EX$6s-IM+>|^|7$)Ni%0 EpbIT-vɦEڽ× ~~djJ츃ME\կDHXo%G, b& +^Zdҿc&f|`pzZK;˗k L+_k.5zf}i*xU 9&@ϕq屚VZ*=Dpܺ+-$ _ΌJ$}G`DR) /~ŮփV] e&Pazx#1y1[QoviY86LZi UTab>7&P<3^fZxyaECK.1'+淾$NâIRޓf"0b5+&y=O]{F~}'j!w4F\&Cl_%Jèi#~P f A,^[Ã-c6G3/X8S-8, L3^^yLq1qkJHj^?Bs5͛+vuČDH\VDsE'hi è63/M`:϶Nx奋ķae)*X*%�x+Sj1HuE[*_xŸɱ+G`ڋ]xLM.K&[jg<¼՛EXi6Las1E+ëN#Z;A.F ɂĻ0/iĒiE &6E U_N& V5 w/5Ta sn L-xFs^t23\+aE&ShPKj(`y!nCvuXiƨMHI:'gɄ&]mi|>8{]jE.+\:k1uU`ҁMDVٴN7,js'2rS՞9sY6` +96+3i O.b7^ 6.VgqE F�?U�tũV;hB/ 5˓\D/h�0;0'1u]J=Ij0&1@D ^0i�lh4cINA�4,BBSH.+J2hM�6Ԃ1v;*VNx)V U!zRI P4ΠѲNPjB]j�.(xi#F] T%ZQ_ '8L5~kEsXi#H4sjb�=M471hpjYc�'8;9 +Pf ַ)Ua&Dhj xB3?X555^M1�>lo?@C[/CS @oi@Zs0z/)kz_ uHRuZ=hVrZC�,R+Dx<ڪCS  +%>_w (ޔ!NK*Wر5-OA�4wʶ<`\f^�zpaj5e�r:b(,ztPc 8L]֦@ +0[t +m/,H7)s;X{pF!Zin +mJ+ +m*ojȺ�FW9\�ZvvndvT҈b+) +@X[P6�xXEI؟a,f6^LQ@ ISh2]hڈs/3e֒VA� :|S`qO-�ػ\�=[ڈ|#le,P̈vF؇|ҒIeoJjU|P4{S}f}50:&Ҵw=M +t/x|7L?^=f}G 3U\75x3 +&d3mx2\ :ݞ?+413`D_ʗM$/ ~K{\&soyuiJ* Ln~X Yoϭ[ opaCs#XUO~?L/4N4jot#5TcKspoN' ƚ|j [JFX~?S>3&#`Zߋ5 !N~?p[rzYi~?'nb 4o 6cKO~ENJ1_ʋx:tNGRgp}e~(rCϥP/Rij֮v$Ϝ[&ǟv~?uw,݄(I/s])M):Ftha;^~nz:_-{p_pH/I}ifcӦZц)~&Լ. ssX:GkM~%Cj<^ѼhaxjATԟ%ݬ<]݆gs1vHWFNs)a*NX N':Ȝ채5gʮ# N44STo_l/:#}D A"4@8ay[to) ;d8�@ t+j :"C_n4x#-NWy +HSyҵ,q�FV^GNVF @r'BZhxwp5ϨNf�5e݁3я 5ǽI;7SK GE!SKyX+[P5BPx̸l_f3Lv?�jW)C[S7a`;&UaԊE6^YRBhJ˴;+DY(|!j5%0ofG@ix<Ѵ; f#tE�*a(P�$ ypݴ; 0ߪ'nRb Pp "ŪI{:;sdW OW/{1PK#PIaOBtwesIa"(LbPpJnyV@vP|UMC�j)p jܨF`LC�]mX!|�On�`aIZ)DwU@4�0I ;uxI7!�^yu tm�-AcPe.j$B I$ʹ;-[Xr}̙B�jtv�ܲeg)~Q~,F{JQ! ̥;1/̔C�޹ziYw߆] FmD�ٓp43JJ$J(W$ +eF� V-y,'Qqf!�e}wOm�[0B;z�?nl`N!�/vj~ M\7AFApM:;ċcfvS�<9{^c�Z&ǝnc4 P'4.m�L2L87zS€aR0�z90 .eȍ Λ i�ܬ<W!)`73޵^؎5|R0[]3חdD}K!�#$tj.!�j0.rBb2WWHC̮n~uS:1PB&z `̊hXO0�d΀i# >ಮ0zkb� HBM47=);6b�ecchyxh]ڈW2�E|)Nfڈx�veN1�ی`tPM1["|RFӀ ܕi#8'0e݆i�hy# (4[ʹ4@yW6?|kd&yo^�fQD`vxq�5U<HGN/f<xL5I#`y㹿ס$ RדHG\m)`ҶU  ,0=^VLGp8qux� /a9�Cҧ`9 +6E;^ME`"+ӣi#[rẐ0UXL@e0x `5F(DȊĕIn|u4o$Xa_9S +x9F$Ce8^+Va:t{@uMFZNi#)SoP5'"iwg�Tϲg#XmWvn% HFҜYT<�H;�d S�brKm�̮5E�G,Տڈ�XA/a* + ܚL6dN$8jWEӆ/&gΊI.lc*%Y&U&' `jlia), ྥd?US,sJUL%665kE # m! X2@raM?Iݞ4z,0 aZ+ @7ΩY@f +Z8W؃p͘(Z0vϴ"8!'Ly-JʾJ�&]F��-ӻ&~q�DQX Q"8y~,BTQ@*�+SlD SM0N­6"7KRHO&=(SRDY0�g:06b�&`̘{q\u;nV.T`/S2X\C�F^GLAWSS_=h1KU4Uc>+{ Ax<4SÚ �LS�)]'tҊaj%M4USC ޛi#�`[jpW�On�0)މ{9iE0:5]c +p'SA&`媦i [3֧vۦv�I-5Fp){F0<vWHl\23*20֣Rj#hti6#HRA xmIMp�F;dF$*` #ڝ�D.Ew:n7L hMJF'{]G3hoѪWTSӜjRY`T LI\FqLS .MA@tm -gn֩XrݬSj6o-L1@bMgr S eo:Sb8۳6B�VwNrFj{N'KS_v֭Vj#`:^/yN"1m2Nm�R :K u +:KL\tKFХ% DEvbj#`'.57E�]L6Flg4hS905vZ ڠ3n{AI=We`_M�Jur[�q3Ǥ+�'KF-0Z*7Q&9)9Z�5sE6�U5 T ̌9BHvG�xH˝e�a=PߴI103\11s6:ޤ8Jjx'khMIzTb1ML +40ᅦC(k5dRA4ݎqZ6S##W@T[;,F[$K5k$;eb(9Ѵ; HOT=F@-t]{A�SܵXvPK\+z%}V[ҧj`E $lM�lJo# 9NwiwWN~rʁ%\0_l%K/΍0< .L$0DʁKtˮ00Z +l^;r`Ah;0yyX$ jox(޴;BE*Ӿř85ՉH"XIwEXݕq0@5RTE9Ejw@TyYH#^P=JtLku%6SKXH:$*!cnDLynA]Q�%~ZUL"X%4 +X_̂Ubp2nw/q{/L0Ɋ7'd5N>2|2'$Hɒ6>Y5E>[E^ >Y3b,gt擑}aK|2Ld ӿ{k,|!dU7d4v6@YֶOdPtPO2Uď2ˌ~"pSB{7BYQ5Bz$s(dv e\dF>ɴ9#̚<Ɋwt2u~& AvR+xx2m'0=9=ɘx%+@i+GZq~rɢL۸drz%V1j;d|vђΐK4d=^x�5/&cl]O0~]-&Xen0;dx0Udy>F8d z�&WLrɘgdL[N:duM9d �R 㯺�&c*Oe,\d2־:dx~8]7d9@z} NK{dܷ)q$XN4pMh2]Lv:;gV4rMIHΦmh2~lCUzeɴMhmV&[gMS&CTu.l28Ɔ:dbţl20ܲMMփ"Vԗ8d uɚt3%*3majOs<@.e�(㉰NB0M&k(#ǐnrSnm�e$;dL6.|2Bӑ2䉙X$n!;dGU_O_~?ɒg@OFlH|27;I~mjx2":4 ē/Ƣxޢ]x>xǓr'Eu Ovi+ 7IvEN.#-t2V$\{yƓjI'DLV8Yd}w8;ee<ɸȳ;dʖ=di 'U +mp2M<ɘf|NƬ]8-dlVjwlaɊnN'#۰ڥt2qxi 1/t2d[q2?DhOxO<ói+9-%(kǓ͇봡'-sd &gO9|Oht\gph~1v>|`POVNC:,3ү6<|))x\x2.M_OCOXStɘzv<{v>dm;, lœ/ي'VeshԶOa4Qv<܉'Kpnڊ'jtxGbO֓t2+fI0t28I4gu/(cyP i׏PfL[ eW]'5z8e+(R ,j~i+�1kM�e1(k +֋jǓ9di'f'Ρ8XNi9 'cpȭ{o&jEdgƋ[ +ύ綱xZ]&c`X3TCP&!M8+@.M[d켟ddmyc&cYMKwlh;HS`Bl@9wFhgM6:h]d2d2 2>i'esJ 1,LƲ33v.YֶQ&-\l(v.—3 O%(m\2ʸ^;G`L{wQ0|MVFwvmVr"&˼}6YO64MVbOhAAr6mAe%jEU#;h26idl~Xv4wc; Hh$;d,=/fvXqn4R]dI&K,JTp&cg|a4cxh2X>\9dM=f>׎&kzF5jӉ&ɰ\I4YӈO\;7M6u;d׻ɰJfkp2"Őf;mh2h{-h2%FO@:ɴM[}u3;dZјL[dXk賣I'V4q{{dyh2\Mƞ>ɠ;Zo؊&ϕedgAMO4YtS>ֆ&}hLrnvƩɺT]ڂ&Zɰzl~od2f#  k+>@uV4k;<>V&#Zh*9:4Spv4Yҁ{DU6Ow&4&C,dL@X+LT붣ɈU2's'! v$l&́g"#+dIuedܯH7{0_;`%aB'p{&A}5ne; T2Vjw(>Jɍq{`L\IӧLn3 kIL;ߘdl^_ng(ۯL(^]$+Eh |03´+?lcaɄML@|ԋ!ɘd +<ؐd4w%:P2̚J%csCKv(Y'J,o +%cn%KdM#W*&jw*7cpT2&=MnިdM[dln[e؉aٴK&ӽc'UbYM2 +&k%&`2Ve͚U0vLƣЮx`V0aҼLSw!LFEXd,lW֍L9e=dMXi᩺h2 +ItpO<󮩭h2FbrkLJn5>dƛ%Gnl2 jE[d΄l&c}A76UѹMl2fz`$0l2fVvMl2-2+tkb܅dpa&.Xa67NiT+IeҖ1\dXVwoW8} UM +'c+5蚰RASV8=H_d<fjp2?VḓLelӧxl<N-[\LB$ɢv'cœ׳;J$<ɒ%['cMXN7< OƆE:6ɸ5Aw.x2n>ےɘUa[6< &<`(W:'INL-ɸ&нɺN%Nr̼jl.t(ʅ]dB^L'6&uf8YOSnR%NOQV6YS2x&җnveѶXI+ ɒJFy^V 'e+ } 8sEC̢NVhNƜNi*PGئMt2Am]Nƽ# 5YdR("\Nil3L:N'c ? LW69x\U`xx}8tuEX01b MF:57;Yd+U&;/- 5k64XgMƆxo1&]\&c럒ndY,-ϱc6YU [dUX}i#(IP|'׍[mZdL*cp2ַ=4&Jf\: nr MƖxf߭l2J48dAy7qa15 +/QM<$ 'o07}eEadcxFDxaI8n_(caGաl2Rvc>qlb1>nMml2t{IxRlڄ'K'|I+,@:O&Y.]6B$${6ʤSVC!dw(-CPƚBz̀2ivm1|2i&i#$DeaV<.b aw v'c*8O2Dm.lx2Vެ O~E{-x2K} O&ǒ𞴗'{&ZjQ&6|ie9nU! ]\daJDV7Lxexre{ZŕMbJeeXAX~&6ÕlɒkXdXB[Tnx2n'c6duLd׽6<d>kɘ~378`p8[Ml2)t<dNV\~ t2>H;tݔNVԕ_39(k_YNh{ey1Hxcy)}MDˑdAZ&Æ&c*,KdCŪhMj{L!&lh2:ZV2\m1Y>RW{$Y[b0)xMF/$4dy>d4tWF&Nep>ߞJ&98<+7blL͔&F״q#{f2t 2M9H Lb~II]Gц&c]$$LxpE9aΰɘg]M΂&cPoߊ&7#>1h0aV4gɘĻb:u&Ѷ$LvP>6ɒTYu=Ddܞ. +e^dLG+kL?pGo&+,AuE)谽+i|C60YeQ>6.^u*jKn\Adt3j3LrKָ\$ˊ%k6&[d1F&.FnF%sLia!6myf]V,6gmɹpf-&,)4+_d,毝= Md<4.6+dkᒱ:4ى†%Ϗd ket2LIMh2CI4&B#4ąd޻e;QLL'I&c j2m%^tpC s@&G$U &c 0ʄ9d\r�&l1@h',-r|�V!ꕟ` s"70Y#v0`֋!dڟ\h)'^[yb O\2�DKi;,ZC,'WK i څ,;dn Wݯdyz3, -9d`S݉%ufX%l$X2k5.+ +l-1e I5єXPu KL6X2<NX&;dx=كL$T%wd2XfܫL$[LL ^LN +dllLBmA&sVdosVMdd2p2KMdv; Κ ؂i+ SRc?ʤyPj +ZrʢbM[ e eCƲ==; eܕ exwDF ؑNOFc8d+ Sv;LeAh(ck+ex claBw#Oj(-a(+R~?-(j#X?wF X3~I ,6iP QmQY5s@]20s2/i(coL(K!d҂(d@6Di9:#ʪ9|2x�7>9}m2\O;Td<´{'jf�8O-7Edz\'3)A-'c`"xBժ4◸jQvǓÂ56'mGv/draWO&w<ɲl0Kx2%'o�<_nOLD:<3 ܊'㱆lƓ&hŊ'3=PIG#6<s8,<mƓI9kIֆ'cR6ɘ@Ȧ:Afaɘ%O,Yr 6*vvP"[h2A%ck76Q$)oL2ժM4mbFRr0?ktc1X>JژdUS WW&skīI&-i A ܋rq&&Y#H2v tUnS]ڄ$lR|DL2VtBfP$ ̍t"XÎMH2b$^1mZd)MH2L4I&4㥍v6"YN jV$mseD+E[dMoL2cY7|E1-Pɸ٨EH*lH5WJ$kf�x΍{^9X~M 9=^ +$KoS$Kr|Č6 $c!wq,o^!g3%~8 L*W#E<6`w<;9^>wk6`zF_HH&>U־m<(M30 $lG7W> AE +GH@{!qc/ Xzq ݯ Ә +\";i +w%/tf˵ɸ)N쌀6D#rHUo$HF'f6ɘ!%D2:5Z܍HxǷ$S*6M_d^B"PEeH2I === w"$7+bf"YPn8k%1K%B$cjqHƌ\HƝ~q㛷D #| đ_ٯ]l_1fA7 OOtu XܭMD2&ŞB$fHH F$Oi_ yA&C$ޘdLd %JJƣe.\dY*7ئKJ%끛g}96,z^d1jhF%ݚb-7*`e"V*#0&(kՆvuX0P2=I͍rZ(t l-]d<1V&HLMecoL2,v6$l+r-L2N(n gw Iƻ�WD6$<v2X3iLL2# $dg\d@9}P2m2,L2&{Aɸ3Tgʊ%c3z%Œq픿rɘB gػKƚNH0mq'(f-`29f +&c⊞o`J#S.%^}U s7ipɘRK| %uƨZd,sHHnL"1w-,+}aɢdRGM[X2v#ؐKƲ/X2:xmfE#K\fy,]fX7dLBğd"!}d?&cRiÓLαd,|O&]#ZK-v6YPM[q�Ckp]۟l2a~wd@cMLЅp*,Mかmi׭_ݡG]{/ӹLYdƣ]ز&5\E84Yf9h2^s#&cA}n$M^Lɡ"ۼ^vb|"+ Edཌྷ9dcbN4YhL&嵣&5Z/%<_VctiAI%F1lvP"yLփT(=vhQO*Me9* a.%cu:d,+D v`^r*}bcq\"ljV>dL;įKgsC۸dɬm}%cfaY$`22 ^BO,%ҽcɘ)^5eLFO\QNK0 +. `2k}{GP',ɽ2Y% G2*ehMŽh2P-i;dh`Ğ?~ &c=w0YeG`̃b1&}LҼy z`2Z5Lvktx8/y'6&^Wz',Js`2v�p]L{Xpɰ:\rh  !%B1[Y 5~?d[!@a'hC1ah +MFȥh-&˒Cډ&>Ma0E6͡جmE;dl^D; Uh2, M4[UZ'6@ׁ&kcWh>.d2Q Z֮4[&˶W *,PH?dl}Gzh2lh2v Z`~E&3 6v~6s&m~Mx1MSj~ɤcPCڵ&> 4Y;~#44Yg?B\ /R/^| {߂?x0 +?򾠒))/?{2aс.:,;>,AzkǰKVKVx, _IcXw }}XQzCf6Cr/cXb},#Nr/aXaeHb{ú<Ν-;>,{_zǰn;S˼/cX_ݧ/cX_[w V>_x/xu}㟦xc`_gۯەkoXgӀc`_410;u+Eq=ˉkm>WU7^{no(}1;u݇c`߰cw lXzGE~kg!/锖7=! K W1m;X a峙3?17~>oXi&}Jx3]c/|`߰20)"X|ց_n|ρm/|`߰201cH \Ƭ,k;}?ׁ1wڸm/|`u`0ף&}'WF;ި/|`ߵ,ި/|`ߴ|.UMkϼrFս}3ㅌͨ~>oZ{!^3^Zx]Ψ~>oZ{Iml`K?7oΡ{gIΡ{ߴ9t/|`ߴQ;컖9t/|`ߵlC]X]/m_ku<MkgTK?7=9t/x`֞wK?7}Кݨ~>oZ{,9t/|`ߴBsΡ{9t/|`ߴd4~>oZ{?NK?7- Ǝm/|`ߵ:CL][ eЙ컶U8QAs/|`ߵ,Ăya1컶rb컶^ C^7m=kVnW~>oZz|ӶQ hgUwPW~>oZyχMO[stQ)7;a}7eK+k{n6N͆|XőBHYtXo[,؟ ؃hC| ; eP~¬e $Y1~h/ᏹ[>~W񗿫_;+?G?ot=]ӛ?٣`iֆO?<{]}IM ПZ#|z@lFПZ ||@j~LJ?]>>?[iSO>=G_>??RHc >??nشCc鏍>??h؜Cz|x�&?㡳z8G3Pp~g} + 9!s%<OGxч ?=w4?s4=a?> 3?Z'>Ol?>U#�:Z#>h?>#:?ݳOT#{wn�oH4 w_m2)y S]PcSe!|nn~.sq~*|>7ɖ곶uۚ~e@g}@ok=^Wtv&_ ]]2>5uҀn@jE߁ (×4{y|W>5mʀ֬+ٛu~i@GOV7w5gʀ^֔K:zt^uzW/ŃG}@ok�'G}$om^twuzWׯ lm]4л~e@g}@o[݀K:ڶWڵCyC֯ lӺmZr|xg>_ٖu~i@G;V7weʀ6֏K:گďK:ڭo q|uڽ~e@gw}@ok]]݀+:z[[/ ۳sʀK:}tYڶ~e@K>7kٝuڴ~e@gW}@okX-Wtvav_P۳aҀn@jD>]Ҁ.n@jTc$Lagc}$o ]Wt6r_ ]\2q>upҀn@Z݀ձ :ny[֯ 8|C/ lȺ mY2o)֑ 9ny['/ l mX2>wu^Jhu}xW/%./MV07uXzѸK[ʡT?{Q#tsǐ>ICǐ>KiWi).̧3+uH>ҧs+_>] +y`ǐ>a +s9�>e +m ygGTc,ε4tKCiǐ>i{y ә6$yùƐwɛǐ>iCr>iCr >0{GNPyu,Nػ4N?Oqꀮ?t& ȧr}:Sq.ٜ: y r:gtyf}6s6^Igg:]oL3?C {\^_K ?%W'ʱ0&+'>?oM?;Px"JsBixg1$fe\N Zzo^c{-<9g~k0-??}fMމވ{l ^_4"P|~_گO_zj/CȴpÓly� %֟L+#?C^^ E@=^>k>3_1knxvw +9wkù(د?N\eqǻKtR]Qgʿb庣ؗ_U +WGD'M!"!aFadP1M +-a0W_`ףj-j)r)ZK9$/xID ݣi9u--qCD| ? +5]?Ҵ.rvhExO#1+_k5-'xfWuh4]ުՂZ͸ZDyF~M Kګ~D8 -{U—OvcC ZDDza0@ARC,}D+֘jibTT(& r_ݘ)7pd^B_K)jj +W5ܘVh<7(I7AL+.)^U�ۇ_^ޓQ2vqڶMT25쬷\}hx)ܲP vUb,υ4U&~XɺR T1[b_Ƌ&OXj\m3~x"Fa017TRX/L5Xگ\'R6jD4jx/s.ܫv v[E +"ipJQۻbZW0M+F3qAhn$QJƗ 4'SV2yw4yC-a*MWW +6\]qs"h$v+:c!0Щv�DjI,l|~Lj$9V#~EQasO뙿,~mG)`W:t|D~7zCʥ);1 lXQm,B wz㍪_O,w3Sվ1W]R4,Mvո.^]ZÇpNwll1gEtcI6AMT +@dk*᧪ad0\IcJ@BV< {&E5lV1Mk!j0%bU _9 50s5Mvף$; wxZie\qH+6mAVz$꘶~^uQy0˰2)~׆ȩ>~I \4±a᳓iQjc)abs4m4jX>̌-~? |n(i0b̉bei|}n,oܦm~? \wpYhWu3miT`RwY֥iOq#\ҭh-}4W): +,S6m`g<N cdӖߏsq{awQ_e7Av6?3Qw4mW&ָV0~.oNCǕ*&-+??(cɛϜ4:5on?0f]i, +=CCԾB~Sl'C#v`5іa[vw\X6NHUyjH&5V>wqs!-0d6l{nj -kF6o0Ƈ`/,lkr8|wXr c7zV5li<\aGŸե`U#h|k$za x-sxv 4GЖ_yJԯ뇆Q¨ׯ"S׬ߛ/^ >lko#x:`EVm9BdӹCˈ9 L[N?%m^e�gqB[^?"7"W)jSu_v1~.ސyb3C^?WK[n?1kņ6~j'Y-cc#86o +ky +6=c#|%}ϰ�j|vf@ AK  �+K. Mb1Z=nKZa*K(df@ _^~@� R3mExW PK"&'`ڌk-0Ͼ/ZM[�LVV+hBq(z֤m4Y<'j +0y4r=@mdº?\Yi3[F"J ]ٕH b.qiEԊ>I<;%<Bvyh Gi�*ONPV me>m5m�2Ϟ+54C�p�ix[;B�jQ6m�wQrVIoK5m�j͍>HD3cÏ筇f @ kR^!�wҌ�o�`U96#�j]byxF4cҷ|@kCPޕj3*$"�f\`jZ +]�yU o{vFxB�jjZ^]ž]^!@ɂ%6C�jjrY!�5|886C�ӊU .xz.aZ[!@ #w:;s[!�5,=�(aKѴf0@E:šccݦ�c_dvfx]2 [ew-IZnV �ArE[ ;}|@yu X޼p�fVë|'n &Hxړj}swƶw":wHe˧6/0=o@=7 }H�6/cA"".ͤ8/NE]@|Ҋ u1TY*>�% ]舭W �7=2my:cU�jrQ[@&Zy"R[� gz7 huѲ+:&7W(tےt6_Ҋx?E, ++( Qj +ħ~ߺaBޜVL(.6 +0jq  +M[�oUKB,΋@m ﴳ ی*3nM[@V'"q1{Q[@e]a]"ʍ6Ui;g?k[ P3zj +xQ[z0W7m{�(az%n f݌sb�}b|Xb�}K l1�9}i3lf=�a-`IU׶G){aڊj#-o�r/n;j+ླྀ<+fQY�CDzսE�0Rڊ�:=<ِT [юM[ܘ߲,(-�`nDʹ�t&'F8M�y/؛j4V�Ыsum�A'sMm�yɏLl�۝Wm]H@(u �:sPCH[� <#x2J[@`iR4ۊ�aSۨU�58Ęd6B(,DֹYPw ܶWrB;룆=BԒeX@dq'Jմ9j346tF@ aQ5i�r蛍�ZOZUУYylK<3Z&*R|3EV]UtcRfvio"aFÎRj`jelڪ 4ӯUSL4mF�0U#>P~q�>S*O8<R@ҠBOz_QMj(!tѶbȄ)|f@M=Kn+Vipi3L/Vn W򚳘6C�j~J\80i֞VL-PLʁqp7"]۪:gĄmh}�Y3m԰ת +Vinʡ6cx>V LWV%QQ�52V ׅE5=(| +ڌ"zb`JC4fV?V %L +f@ٖV Lוl MWCߊaP4l[1Hwm+F7mQMwߊU<͈8JX_r1a1h3ƬUG?c +8�XSv0qGEdv�5Se6b(pճĢ@?aXF PKVL1ǵ8p}VLnG+g@@]T +#5TTq}VL){3&L3Z[m0Ť/ qFnq'\<8J4Pi\˭@"[_0z38̬˲_n%B̰ĭH8F-9*a{/[0FC"!F +MfNļb +<+CAEYsȘ^U^ק0(P̗:jazgyTkYg@ǧV1y|.POZmf@6*00DQE,[0Eo|蝇8C(Kn3xx q ?l҆x8Jv/lÑ[,SQˇߧYZZ7 O9 y rxIj f1ʰSE"(m [51Ŝp8(6L֨V"Qd"3A-jiV`=R(J0m`QSP4CcL6$<Ѹͤ`(bjlK5ؚ$ CYW|mL2L#U[%�͑EdQ$^}-b~9ō`ue{kg H"f,遌YGU4p/<ƣ8K@Md]Qq0~N% pl?_ܪ)¯6i;sl[W9lE]7jS[Ype 88$V63([Is{ pj)[Q3ʤ,vߪ\k`b"NZ`vvKeE0gZ|Sڌ8#ejq4w"kETq+l"r5]6Su퉸"^a[ѥ)񥧄VJ^uNlMaGk|ɼD7[oD,[vR ^[3E֙څ+`{x[sr8!xI{e[3E-Eq]E-rخXh "5lr-&Ead'{[!DUBIJV*hfvJ'i1C[8#$M6֤8-3#H7tZl`BZ҉i\%-GW 5nl8r[@Zv +BjB6Bji&E*+H1`˃1gA1ʵuY �r[`]ijבCE&_[m+gđդ,v6j5 yDyY + 8<+ghs"!΀tÊ8[^gAq3⠈%}{3HA"C"nU1GXgAX +xD-,qD +k͑\fđT62!q`crP6>r$Gz[-ujg̑hzpKSsPdl筜:ivu9(bVuPDZCmWԑ=|Y"ï/fjojR2uۚ.aa]Ȳ :(bgf7sPyn31ZKC\1@NբbSkbd'1?A%+b{1-${V1.Y+`ȭp'0.31޴71_/qN`\0Ѵ'Kbb;bAcV4^} bisEc{ 1/v*IUs^f'1n&h ]hF~;qOuO/xqŘvfʿkwh)xq ^¥l5@D{ eQ(/W8gO\dҦ|a\i'.Nm~hu \Fu*|'.ih.nVq1QǴKM o{i ^a5݃7.7[a/1.I l78*bAR1_űs8n<{05(?iqUx^=`qwdʩx.U$aq2i!:iF2|xy)L0ɚAűӱv~..:`q|6#%s8f4iOc*"f:iq|nxNZ74-K};+̑Pʁ>VtKtM88`JҾs} &FFG�5N=qn#&|H3`\gJP'0nJq-N`8ih˪98 n:8v\Nd\ȸUW8;ׄ*ڃU]yb4}IK=ʯq;/F;qIw +<1w8qXb'a^|ĸ{tx:`86/ I.L;qPH`\eh-<~x 4wV `~$CZ>q ؄N`\a:J56?yqg}iFH%U{~ 51WҕqPb0٣h0.12 Ƶnu`h'0+8T {tCН8v5AKqҸ86?q}<1h'1]5SIJz!$u|q-xXOb\݀}eX'10B2.pGnȸ\@Ƒͦ>qm?qؠ ȸ@dmdqF+mֺB8-} De[d\bx Sj52xr"08lk6ٓwK`ɌUnM̸0hkDPcJ,'q<|ʆi;q~dP2.iT8OK[ _UyXX]Ҡ9buСĸ -i6pG'Iͫɋc =xqʩt��Ʊ?ߥm8`cȦ9`՚&8v ƛaLeZKw[;Q0.^/qX蚎 w cwj0^`,t}'0'0zHv^q$K/.`X'/b5'/\%qqSxdか#̳ia$ɋcK On|'4"ij_Sx<5.GQ'5O4P.l\qf ظ'၍Cd <8Z}pF4;q/y< 7C8,`<qhǂmธJSe'8{ESDg'8y\?q<\Ie<8y4v o틞8~+ ́'>qaFX\'9p.8bd'9tA +8oq$Ǖ8u>q$ZϢ'9No0͓$h'9ytR݁ca8"=];5>q0-&EhC8eANr+q9FOp\ViWňz$G#"8qLsIxhNp[soq E}p?;qyVI+ xb:{ā8ɅRwb%řqւ1EMܸURM3~pKqL9ύ?c?މcW$eop(f؏ΓSgύ@.kP}vz]>q)/}Ǵ;Nh\c#5'4͜r`8h\fpb8<9G?+aò +q4<0nu}�%j27t>q̃iz^@aݑ4nj#-X=f\a}mu87'3NX/ yf\'V2dU79f])>kp3.ٸ6}0㰉ۥ]RLs8^0OX4Mڑq7VI@ƑXD14:$ˤ8ptkR>q0Hd\f2hd llG7K_ˁ#]ĸ¦#T8G'%1 5p=OJLs8E8v +z ։[ze]d2G1.&) Կ;qe8bɮ>q0~5/Ua]'yqrώC9xqƽh_Wy:N}]#8jq]Gmx}@o/sb_hqXZ\a zV\?hqx_ʗ:qqc':q۽KP0mƱ~OU;qFL9q $0Rx)z?q@؞H%d TTAcx04hr1&12LSvG u>G}1*x>sűW 1 ^0uv8Vc1s87mE9*YqX-LN3gr8,Qw{fZ8P/YyHlFfq8#GWB&qU5Gˆsxs,=[k'L+4wq2*>uh pOΎe=>8qefqxD)yp'_m14&NR"J' nQxPJ;u^Ĩ(q*a0l-&'o10UzUVrPx{8fbONjִp{H)Vsű'œm9Pσ xNz*r4qq$Nj#wNiQLv:c7:5#3w;:Hɸs8*8Z"k0H۪)CnjZ{q/q<# +t }xsh ; (bjb Aq"ǚ!JOh+Hwn+X)bvKjQ}s(4}q8f3f(5c7ssN5qIb(L/H(L̘~_aq8" m;P™dm7td!LLs89|Zߞyvα#IN8ct8vP{vRϐ!!0b^8M0|8f3ȑXZ^ܑ.'&Ձ.dl(?as0(d0L`8FW,wK@'ҁx~_8rBS0D>mı0,#_n c$><\ϝ'B \luhjujq÷D^M^Iq00>Iql9KREۓ &Ime^؅=I#cMA8v&TtΦ!&&wJ$űh*ڎA#o9Ro q*&]= q<Ϲ$Iihآsgm8v-OzIO{Pd„ Q.iA`h&S'"0q?l5Ac瑣t`☯;T}9L\ ɭ5$dnt8?>x=D^ 0qJ.m":,&N:;g8z`SZ8ohM9 CZ86W!D1qVlMA{åfayr2ia^Z0qc cKJ= qQ!{mı,8;`Q'!89^OA<$ on;$ +r48 L7^'=$o73Ax�Gdz+#B֮"YK)ǪL%="fb |܆#Kj`qI"̦6Dj kT;qk-;qfǣV 6{".I/:Lckb\M\ Om9D3?zҞ m]&BS+! vd) +ځS?a0yBd- eh֙Ak!K TB6�B0 ISNm8q3܁AD{֚Wwx"Aq\?3Dhh*)m8fk;#X#$Ye`6DF0l,`LKc :/@=3s7rA$b0L q"!qX9Hfi$9H[0͟F+7-3mcӈԷt8M`[6FlA_0NH1iCIDOlMY{D\R~ xێӫ'JFdچMM杻ÌdQA4e#ISKq`!赐FiQ{m8ט;Q6B5fLOwfU6B:tHV8!.Jči!.-BL.7]=Es8a qd 2)]'q_&6@Lb c).x3_h`Jcp;pdm|8qptJPp·Ruv>-=ޭñ7;-=ptŘQXA&Yp  cχ?EGER̭Cp#RUst8^k9Ac$<Áx:h:Asf/'�n1 TMp`fe:p`9 Zp> >W&Fl8s2 3ml8zjytMl8fVcXk1h7dގ%!Ll ~pi`K#ñd5d8^`CK792mre;5 +@cSX0Klxpl+v_ӳo@l8E1]�Ɔ>+peB=p<F~ᘸ)iWY+kt&9<\cp x|=p&gs|8%dlӶa8>OЖMzpAkv|(1)LJ._Mmq]0v·qOI|8vE*nBǮHH; .JUl81$@_b!:@Ԏ>9qg/J䏛_ xdm.kti"m}20g Ap@%u<&AqNM{%yH7hdJ'kKc:GcLal"D0!'`AgR˦-B*[+9AxxX&cUOi'/RQM[$$8bspX:$N.8C$f_z&[ +{]Cx a~w ֹB8^WN]s8ql:v aIsпg=8 ;c5')+]cd<,xbxiG>c'0q &,u호,ѐc⤧=c0q9Du~83'&y8wLZRd +lq-Dk8ql_h8qŎƬ9qR8d'͉ +\=9qE2tL+4nz9q&D='aM8bzN‚:Lc 6N}�nFt)qHj +% cT;L;8 ]e2Ic mm0qzٕqX;m9q<$3ҀI6 ~ 8J9^_U֍q-8vfۂ\Gµ _ÃG�fJ?;>Xp0^ıt:!q2=֤2d.v'A4ަ-LvsX8VҊq'aֶN[gLHƏ2Gȑ⤸NǑ⢴ͽ[}y;~l wP4/J~mR7P\hRwN۠i#1q0qt`z# +SG(8:,%0qr'? dwV/ 9/4Sc$]vu9qd^Du8qҙGY*q$gC8qҚa*B m8t)X**@q<%(16{h(p AqJcjE$SwT(N6 ́䨑MO䮃(wkBSɦ Q0c@qE~XǐOI۪zP;NYő nG=(ZϦ`iVσ☫=߈{]q%Mo~"_ $H0rwЀ'5zvad _Ds}v]P'%Qdd!H)>`pWS+2 2(dt:k94S]ک*q9$4,wQt1-qqdH|#4ʋOűgZ[S$ud@qmDP%z hT%2:0 V%۰3 6-P!ÁoU3(g>?@q=:#( ^9`p d! WhBJAC&PRLVZނ'R *fPST$Vqy=l'SF98qڝyV M q"'<-a'-C+hX C,oEP �p d�sUU8!r@`*'RVFr=RK7�2M'K8ib#"*|ge}β29:58h9Hǖ$f]8$u|+ F978uxTXq|)7 ~ 8(:@r|26p'XgT;GM8FLVDX#I휡uplt,%VƠ lj;a Cd@6mo̒8J +&8v)fYq +'8f"+J&FVNl(*m"Ѻ;,H)mĊӝfy9n FT`GT +Ue&/?ҍ_d%t={sYpB|y7YhfD/wylgMc't%gy#W}t#`7Ӗ;-k#|biب͎*tȢ:;a6&TłVv.s#*N3ŽeV~v]'ToHtylUJ +v'tKu; ysB30Y9LȈ;]_#*йX#*O8Zy.K8o=eɄS;}7 Ȋ;ԫ Gzb 3{?GQq\X&L8 +5Y;/F-?LatU^A*NM2�#K=& n5w.G+ =#)Nir#˭) 5k%ROY ޖYdQIYq8v9Y&4a"8sDPq*-xGt4XY,2.AqHc+E^Hq*ؠ)U5_ͽ@Dű#3*`@HfT%SS2KXd;[U45A&+)S|pBJIǯ@wLBF"ܺ<$Cw?ĊcNVykYq6n>%3nfb A +M*eGT M/!ռ Ś&- ,IqZ\$$R PqNT0$f0�#XqBx|0Yʌ,nSDϐ`q[SRظT^ eέ+"*Ntά8 + :(s4 +ά]P}8oeVFu8]8Ȱ8s(H$"um&AO$ Y$űL8EvN\O#μ&RnM\'F.oLH١`@P#ӳC+}d.6`'Tܮ\J3mA3(1<2+΀ٌsC|Z#'Xjұ`z>]8vG coHaq,ި7n8IZl`qξu`);X³oJZ0^,z>`qu"+N=JqwG+[3Ϟ8zG6p J8;Yq Q89tB塊df78N1ԻȊ#@ +~+vĊpxe +iT7Ȋco܌&HnYrv|-̊# I^[Ȼ)y,G�Fpz )R:zBHqғPq c`�S۳Db!�GշԈmj>h:!nbšBً;z0p ڵ8R2 8oz_^K}fV5'ٶ8�uF,P `B21R'M ^ 8t,#~=H#)c-l@D-PqJeNֈ#Ӷ9*>sET$RU*}Zʇx:Qqon/k-xF*oQq:=zH3") m  &٫A3/@")%T|'S|`ők#8`|#GxHqh8eUt#oFtޤ8t =[lj +!Y� ljMXh0RHszLjbCz_!qgL3 R`et Z0BN={Wqj?HɻL'"%*…DC a>X݋8 ZY3'M=nBđY q#'̶ _!\3 MQeLbl8&N-Ɋ"&N T$7bzH8ZLXFp_}%S}�= { Gg!$J|WHK@,I +s%N򴽖e>(q P`Qı3~l`ıI#S*n(8zhdnu%-.K5)qqsKLQxٌHS#'Y̢A̙eH+63%kfJ:FpU@G4;5S (9'JǞ2*(qdm\mq(*)q(T"%Q0Bt1qIE$IUo `\ +ǔZZN8[Ng!8qXP'O0qp{88q6ka|pn}i Q,0qHcL + + { +zr!G0bnsP*8nuq"'f̉}MPG#6WUpA7/(n99qtDbW]8q*Un@d:cPqsuK!G֌lkz2ĉ38*>+zf [Kpġ j™EN5.?#r0;6EN\v?ď\bO!GGA?ĉk;[1q +FXrܠAy0q.kNN8 +j: &N + ݮ\p:NJPOe= RLc6(/Gpd>-~ss$s0-8N2ʪ'Su\s8 +̉Czl&Nmr݄#5 +mF8N1%=a⨈7}~"&:_L*eĩMALRl#L"QKefL&x`8v&BEȉÃPʑ͕ GK&K`&NUxQ.lq-mVt& +]y\5Gp]JW#&Z}VA~ʫ֝!q-#=K8^Ga?^޷##m eyp7F\W՝z0088ֳ8Ys(K* 8d_$6" kt0B^Sāu{<!q:c�#HA (sLb V3r\&(K FGI̴"$*!80n#%�ZHL^΃$NfsmZ0An6q>C8YRYG8E6r`ġa9 &H\ups'$NI:+Czl2~BxBKl!q{qU#Bn >CTBÉ RX0B)#/#$2砌'Fܮ&+L rK]w;c8-e01Tw\āB07!qd*Bw([!;-H<2Xx I3o$HՒ< qVUS $ gL4NHQ[m 0q7 y[84Jn^ 'L +k[)k{Oܟ?gr?7/ iWf1/S^TVY&2mt^`M`8N QF©FB~)O$*\S ` +/ b m Mr UpGŇf}Ӵr"̴s")݌z'=4;@8jRgs"  ^qID>nE9HG +k%ޏs3DԐd�`\~zh~&/#g"abE- %] |Ye"ơ>vV?"NB"MUp5-Bi"s{ofC¿!PÉlɏ#-YЦq= ̢RGh( FinV&W//[Wxp~Cp^`jo̺ׅMU?l2+7Rm& 5/BPFt r¾73pPٳ8^7N[2Yƾqsyl 6ݳ/ݚ2,Ӧ@o7lJiEI+od21"2"@휹}ӳF)D*sH{#y7X価b5sG$ۆ 4wWzpLoofľzdD}c^&8"D\UI K78ݭ[b49JqY hϰM~CULӊ!B, fTf '2>{h5yzcS&G1 E/v?X vrI[2oyXYY@4o6P 7;ojikY׏F=�8֢cíڇBh>ccmBy9,0pBg| L%Z$(v2m'Xܛo2KqXamF]K7=;HX�޹8˙�G,#z;Flq3h,Xg=ts8!pO7r^8LCHa*f{!p @ ܶ'Yp}VV6KM!pi f+fFuYrr ݙrKqzq~ad3A/餘!pHe=O8!`|n~7O^#1a608 ۂ?R$%#NeoJE^4*4uVӐ/>3B7mйmR8b8a(pl8e6#zw$K8b6A)V#X8-Fk'҅t5cx)`Z/- !fF - rɛ0iu�]658p*ґ5qāSn/GwY!蠪?9p*CrU@g&;q.gN!`I ȁ#vnj,@HrkH8>;`J8n�l`F6l`FܮCxlM{-mmdAp(=^2CSac"N,{{g3N۰H"/ I!NH' n1pc;NEJCͱ'Dn#D +14L{ɭȁLTUcĉ̴D >\|m! "w*wV +I,5rQAb)q@a@dc^.gDžNL;.8;媪$҈6 ۔)X Ϻ"` +rSglU�r*)"bt7BRɴ׀l +sdS%7TTR$b1`4u,3в,O¿;'TDh>F\RDS.S ֱ>F\jD#M3e7IKoTKoL"o:@-WJ%7–'ߐ6ou؀L7o~帹Úr 27js듴ό7l+'hJ^⟌n/ h$So+/OƿQcF'5ĖyI2zi2 1fCp#n- 8Њ2S̩�MʵW^c�Gl{e�(pI1 oUS p*r yt�8|�B)�8pHgF�ndt&� (0&OCX@A;RphĖ"((-EPa)s�$m+Cpz.AP-qfl#3\z Cx@�&eeF22|pҖ(M8b*2m-ɕ$Ko/EPv͸H7Z(t7l2 {LؙF혍~clɁ2ߟˁ2] +I76Җ(0]r ?�JM%^Cox2UlF(I76(߰0[r zP8@ܒe%7/rýlɁ2 %7TKopƖ(p/[rCb@lɁ2 /%Se|%7rC@lɁ2Mp(T9@lɁ2 o%7tKoU(߰]r3eKo.9PM|ȁ2%zߨaʁ2 eSo44N9P濡Lr�vƩz�tk�8u�z�NC�5@�.1S� 3@�>e�ZM=Pe�{Kp-=P@��8LMdDa2&Kic3|Mw~ంXLCPXD8AKReٝ64gE~TeKpLFKp8KtNVS,8|* ӌ2nهr&qYK poAۨN|j*2RP%#)Q pC �GH~NX�8%%m%jF\CA6eM> 3 Nj%7vωM7嶞x0XzTY>̆8yl'c +�mIpAh?js#�Nm3$�8vտzKpi,EP `FN�8Re�FgpAxFK pXpwvV16$A�9)wu3<ûggyT[�dKp7'xSpUtxwh2NU/E098ΒeхvCM'BcXdAta6NXD^c 2i6-\3i2;2=ϫv�;8h砺'*8 Mr2/zԋḻ$:3"άȆ&(ԊLs{ UP&ٔ=pli:``2AO 2z9Gpѱ�ĀS}LĀ`p8S`:/}Ѓ,I* в/Όz7pNdkCDBś3\'2YZ'!nUNc|']O?(i p:i!pXMГi 8h$ܹĀKBOR%N p)L �ixJ8r�טISP =pH2k e\Q_z-4D4L#xc9 # S6C�G6ʼn�G^LF-Q&Rk@#x/ Q&)Ȭ[l$diS*3RetMï @=pTD-NЂ�G,'LcI'ڄc:Gl!hSz*wevkĀoЃ,Q0pMp#X55} g ˕BmDSw?y"np +B{D-T\ `{zP8L@ȁ}ɋ8Z&Nr@ā3}|g\Q[v9^!s ޚ9p%Z =9pUͅ\eUvF T!y1[,z;cHn^eHVJwϐ+,+: =Ypz K V!=ap I 8to Xp-Z=YpMM&7M"efhQp`%{ܮFF[z.=Qpw{c4PpG43zp3g+jg DC G#YZg66{WыB,SM=Ypgt5z5jwv̚Yp'w@ѓwј   Fj|C$#:G0zt7z7,`%hz,EQsNqn۠%~8bj# +.x=PpzA{$8,VA GO\Q#6Z-r`'ϑ{}.qp艃;'2(A39R#ߑd# 8xayTO8=88)c<8"G0z=zQ{xpH/̓c9<8,K88+$+ K<`~̓� l<`dq +zxқW_TƧ>pp 鍃Cڴ R?ԮAf{d2x4;7 ?$X*|!ғע#қWM\>f\WS$Aip" O ~z5қ48:0Mi .#=ip604`]K!랂nY$ppRD=qpJցP.$qpE=qpgIzQw/]wE7;㉃�8;%qpe8`'.X&=qp=z&qpe8!Y2, |8]\'5qp8'I-w҃wy+^4`' -ԛ48 d%WA'.X(qpRL=qp(dꍃ 6JoܽDSOܥFJzMqpM=qpw4Szw/ԓעWx zQS>K?!Z7N<<`)zzWꍃ Jo\pVzRqp[鍃ۧMKM nɩ4}0` n)4}I4 NBY&TU/\0YzZPUp{PUpg hIw.8-}� a >�i ׂ K�ႴQۥxpAY-7.8/} ʪ._4eD 4` .(^43(^4 .(^43(^4Uo\PVppˆM >LENL͂ ʪ .1} ʪ7 .(,`fa՛U/Uo\V`pGV`p\V`p\VapAXo`pAXa >aU/rhUo\V`pGV`pAXawaՄ-a՟] }ڵpǃ@8EW\lAD8BrvDvP`G(zp9"_T8ݔ,N15[N98XXQlyFrA{X G=r6N9 G(b!Պ |r܀7bё�8Xή4#6*^~8iІfbǙ!5bfDZ3xKmĎ}><ZcC33AwQ:kY:* Vdvq+db0p8unG"DZÈ|w39x!凹Aer\Q!c,Gr%8{Aqk+}f$DZ-iEXFj0p,`h +YdmI?2㰎-P%p +N8d,+VflR]|mqU7636 QqJB2ό8vB?0Sʑ^cqņL8$Veh6U V~wdj S[fqUg]8U3XƩ7qht}yїqlʣ<*sVy7LǰTzx, #4E,rWHȍëah՘2 &m4jba+# ;dZf6rA'I Ȉ >3>S5ƮeL_!ezB qi:"=oY}7KUrԉ :@˛q'>߈ď;cdc q]v/@GÐQ'O]匿 B~` rX?-ц@T]aij;./'z.@Xt +E\w3@Δ,v3"@YG,`#(澻 f$!6$@ntaqxDK.rK/a37h:%s3oLUp8=a㰖fwFoau"%v"6 y^l%jD,q7+16 ^6GنeBPmX&nG'[X�F0(|$n)vgdnN֝{[7gvgl 48LEO ѫ#t5Ce-_X FHRdM;- H8Lnq]k8rdn:=!nKᛍLq+BÀbp)OրcS[E�J~)P% Oj$ov 8)7Z29aܨ{qxq*HC/dr\WY\w{Sth8Z.UgFrÿ;&r62 Ic:~Ɣ쿖VB&hx{q\CA3 K8Le@�}1{Ď~&_¿̎\L"8m;@(>r3ָq;MNqڐ ?v@błn6$<#F2BՔ+ vHqt:fqqM8X2_/c0Sg,#_jLH@GRelGS q**ZoGoRejS q+$p km258'= m25|4q+.,}J8IzH)c25Ӵ%8IMShejvjwbq}p"6nŒen6k X`FI8K +q̍#̍\@5qdK +q-)PA@ԝ)qdcq]pxGў'{$r%r>o]QbI9lyI9Mⓙ؛;29DzI29&oTHoI29${I2;vsD-er +29[&mT@j` 7ljGfn"9perKqdI 4zSq4^4M\EK&�W,P&!69N} b28EZBTc 2 ,6]EpeepwKqH6$v X: b5rQ^,%PawꎏݳC챤@G@cI?rNepep^z#368H2(Z(pٻd1*2@G=#,i)88Z)(c(uXM㑱qw8,(c㨃drS܌ñoi6Y%l +ˉr_ SƩ\fX"umH23N,&On�*(3RC¹fd +y7#h\RCS898@@U7@uedI愌S@8i,"P@&N.@!h?t\Da8Yfd%8K qx,62ed|^F8\ +& 4Z(#Swlÿ`-v\DơYjM!o#1Ix +* 8x"Gced5edsv\Dt@GEzcdÖk8�a3NhH8Q,-PB)bi3NaN2NQK +qJ8eJmLGf(RMdb((!B@ +ynnqʠXJČSR%f(̌S�ŒEf'd(ۨ`w8eN,)Pd)rBF;Ff@ĉJ8%O y>2͖ .F 8%Oh͖J8OTI-$Q:Y9O.+vb)3NJz:!3[&fB'(19ቿfȉ%J8%N,)Pb)prAq ~#3Nisyh +!J8%Mņ ܬ41@ -b_BSʄF:qJBSL8=2h_3NKq<�t@Kw\V%f%xҰ5xrP<38&QKesľT%f%(1,!8�z`K,%P)Wv\VD%R%(A5hPn� +wW^GmYeh\Qc[A#Ɓa0@X *6rG8$1kXSR%hB%d S%h"%~.(wFMzjDh"%p2l(wEO![Hqq#ef%:됭ȌSReh%<(3(!/ܝ{ge@ 8lsrBglEhA0M8J,P)PBVQ. PĒ eh% S#4NS)qʓ9j3NyK+qʓb̌SDr#:>R's&j$b(S'15ڇ'4C@%J8IlrD q+7|j35N9YS6ѝmC"5=q0%rA{Ap-*.Ѓ-)B-jvwKZx \ơ7ο\L:}34N{~CDhL wO8:×Cx(:l%8y0 J, у-M8t(œ[�kSEq$duyE59rpb^\v Cb 8ЗcY,uI8ZweFfxu=q.1Gn#� kڌ#v8w'ql.E,N8Y/œ �&Cç6#p]2x3tF[DF=qXb4 \D<_ؚ6T1# ڌc4"!`JqHI)ف`Sw¡Fߡ3Df2p" ui8ܧ63+x=qT职(!^OnA0-lK8D3Sqlʋ3|j35NwA;uhç6S{]5s%Aʗ@Aña)8DSFAaظ[)'l?YĄGl~Kq菗N1Jn}Dۢ7y*=qܫ[w#CQ"5V:qʕ8$^遍U,2Klm N祛x8rpE6Μ( O8l遍)tKlULǞ21z`pv݃)qX,R=elKd8-z)c8X򥌍Y/RƵ-Z=q,89߉3R0=q, Ӄ5ߌ%bzP8\X*6l8 24z`8{XJ6Ll\聍hb8R3=q %.Y�0aB|Ejr8K5Cєqإh8Kєqz1Ml4%iz`MMǡ5=q]/U4}ɚ8L遍 { 8KqMlNK!m_6#nz`^6聍Df 8<遍C$Nl6KaDNlV%SqdNjKd2Nj=KaܽNl\a;=qj=Nlwz`8+Z6N=?6b@J,T>=q)S(OD)~ԸjC`)Pb9!el%)c(PD8 )c(4PH%8RAel"% M26NKqʔXJSĒBel2%*c)PL 3g'l2%\}8eJ,=T)Sb 26NKq +XSDej2%(*Q*,6NKqʔXSEellc 26NKqJXҨ:NmT)Ub26NSq +XLSGelB%@*S)RL%8eJLT)Rb25NK%qX2LSIej"%P*Q(R@%J8J,RRJ8H,T I%8J,TK0qd)26$SG0'el\eY#x.T JWY8,)qR JW[_ʩL#\25`QԸ!Oej`qqR?6tQW,ۧ~*A'zX:TW1t + #24APej\U!8bN)C2xU*S^KHqRRej\U)8RejA%q'媔q8X)C*8Tej୔qW%8+Mx JWY—*S^AVqRU|샬*QL#؃*Q*6AVqR VKWʪLW(H25!h258Z*SnMmUUGVejGVej&A[qڇ4UG:UVel]JA[qwmUUGSVelgA[q&*cq߄\gWAyVelSK[q&*S8DڪÐji258ˊî*h27ܸzF7778N烶*qH*q㰺n[%Wː# Ҫ̍ ++H27 8ϖ*s +Ҫ̍+H27N%8|wGrfzp어*c +Ҫ+H26oI25N]*S Ҫ#%X/~44, yl~9_0}srÿg[_[?&JkQ�oi *rg-̯&f?/9\ysQ:htS$|9߈IysWƖ]EHy ^w'jvR7+O^W+Y>>z? V/~O?\U +Se~ߴ7we_8Wo颹eݐ<:;+9=aCeA{_`u^K?O߯>'%ɖu}-p:)M] :ׇ/O__1F@'83 Zz*cI1c>ws芒]\*3叾-?�0dyi}oD|\7~ )h]<|а~cl +^D 8_;_;㯛{;W5jor{/1K~/˹C{{3e[OJuQ)�B7ig,)NNr_?CGR4q[;<ԕJ.^V]򺋾#lAo>zK9#Կ('*z[utsXׯ{%PHW+yoN1xu 'Bt|>: 4ʜz]6 >]Prsz{{m ?Z7 16 Z)JZ((lhg^ E +z-a\\v?F]E Tׯ+\Wuu_kuadG_s] G]u\Wׅ/)iӮ+\WubG_s],ajtfu?:>?߫�o}u}~G + !G_s]'2_鏾>?W+\{mW<?|u}u}~?O?|Bɪn}鏾>?ߟ+ї\W|*26_W'<?|3WP٫{G?U_Z^k81}O_s 'ԩ~UTO^gqo_q ︆  +?1.Ks:~6ݦVFOz\ۦۿ~=rc\Ev}ͷSOZ`/~A?( _~'¢GA?v ~_6~¢)`3/(W? _~_¢P`k/G{Ai3kм!AM[OKl4\|A/KhT[}AOmKetZ}AO5KaY}Ayc%z)¾/)ziJ/%zڮ/)z鼾j/(}?Ud/a7_K>R}=uc/)w_S0Ґ}=b/w_S"R}=a/7_K҉}c,?+NcKoKُ_8=Z~e# ~%˾zgGz_{l/D:6o[ WY7o?OOlR0߿mK֭5vBsم=T֠z(+r3:>O +~;oHFPwNw$Χ}'S0<\`s?;` ﻷ 1dnW)KO|*{}eI_YCTy?kȞmW~ʰ_]޶^%{V_oj:l~yy'~ +|3g{]Vqa@;d�bGE{�"]z�ͪRPrr8R/ +]8*sܧ\ ? ,hwS'PzO%pr~-%>?ƿvO|OA^T;q+A+ "[oHfAx|`F`۱ˏB>(yRZk]G?J8[ӟw%2J:.r]Eϻ#;&OR|'SuK|MP�<-`HՐ岪* eNn]۸Ʈ C@c7%A W>N{ܷ@4}-[:P8f;=&X gz(코u-G {=.S޿{ew:;(]V5eUc?$$i 48 6.y6 d8Kwm~_奄ƫŪEO=OѰ/\G.ƪL0ZmNN +}VZsRo~>.UbƏv֏5 0.YWa3 qN_xa7ZG1bsbA1nbP<}.)m,aFQ%i3c/OR&~ty8T.ǭ4ee\@0[W_vd@Cn\ V:!&_nˡ\·kL.~%e-v:'~)/vp{Yx!W<&/?ıSH4t6[ .!#b@ԧZne+=dĢ"̥ޥsS $C.�Es[蒧ފ˿CbkqD\b,?6~\;$ðgv{-4:qC+N'{Gd=IN] X0u2e4ZD Gl-W҆%vc@?~IءPvӇnj1V>^XIdo:鵲[L2&]C 90@01nyYꞧu \ip^b/LT{kNz cdgwa~G1RSɌ,]dS I1I37-6)sۚvvdQx:gSVO duXCmdyע3%2R(1V4:RC_o<*/mdXQdM4yL!f?t'99�l}˩6fyi/>-/sŮ[hKˁu$=fn2̦;*L2DYvy)]=ҘeKi"7y-&?{�=*�8y9qŊ[KoPK$Lwb/' HuX�yXpW�Z_fkU0Vldag.н{L\*L%�q#7 +@b]d&I&+tUjpXHLF'a +|mcp.)n@jPYo6y(�' ~Xl:24hLӍ_7Z=&v,1 +{KEy5__Z %ϲ5 @b.dTmϫZܷS,+jg,hN*P/6+�߲V+$j�jw?]9ZЪn;k�kX$v=ikK_t:vL +%�m R&@ZPHX))PH#SضXPlV 5uUe +-[`KղBfPH %--A*@b2l,VBt*l "K N;{h+UHݲL[RH82-bD.fri IPSޫ+2d/""@R@ *Xe>7^ E@gc븏C[E(/#z_g pIzl2UxDJMH7kW51l*ϮNhɝy2lbDWzwHh�ĮrMC� v5X_Q�Ȕ/٬磮̔: �B'y`z�XձD 0 +�bdoԎK �yQ�(w{�ĚLhf@L^sM F1yd1rA~Oe}�,gJ�b* ;VUhHf@H. +!vIϛNfp{>e_dʼ|)oEJ5?XYƺ<6bIe%k,!dɬgw\�R1 +RR,FA6 +�rp +T7: ݫ�P;I"4 ](mؒBO?Ou֣$=d)[kz_Ce;df1]3n+אG&f]OlkL5&iGc%5=$6{)d_C ~6Bm'kaUWꯁ6=6SJ~9!YL5&ⱙkjle5@hfr9GW "gd(xf!ekLsw+טeCHbkjvⱙD*yRQݾ$6SIޡ?Ed"G{m!){gY$Y{lc<^{+ט^<ll_c2?u^y~!IsiF!2pt8s.L5VٲV毡\A̟_`1ҡrkL +Yvo_cr2$xlyfiO!6sTױrZ.gXo_cR=F/o=!钫{ՕkLݳ-OYzeͯd7I4vձyCl&$.¼鱹KlWD({<PY !yc\궲buWЫi[KW_ٿYg�G ]b3ט�zkŤJlhگر +�u{-F cLݮ"iM#ckNUK�T2^@b,RH)|ظWUs~yd ݱ� vneiB@sl~ٲYL>y,�d=Ivzh/HgBOLfKd6]o1S[5Lc)+݌#gc6K �b֡c@c\ ᱻ  +�`ebX�;e d<%;:nͻB7>~w!ykNv�_~X�o5ɁŘ,rKH5RbO_xPEc ty_Qdv7o1ד⍢c2ʊt!ҙ1SLl�hllB+#bzj�GS&b]׮�]hnXe?C s z!Kb @WVbS:HhQȘ#VO� E�[\l1)3G="P+B%U<&wGlʶBǿi@IcГw\Zl,IOnZ'-9TR% evPc% : H }фnW+Qc4U mT\PbkZ2 *ַc `u9j ?+ K_neUkbbr[M&bvcR6M˾:@T]/bRnYl_g�SLj:�vrh!{J!CYPLhh/uݦ![JY\lۆ)T*A~Y.uA0b\ fnIbWBfۮ΅j^N(<̖�#!�c[H&\ӕXX,Zc#:QpIuՓSbe|>S�1q2@& .259ѭeDM׈5_}xi"4)! P{ǥ5�ۺK5Kԯv+oT0mXj^hI i1j�v^X"@&SڸE|uZ@i4Xf\� +@Rq@)V�(R I, /5@ET4Yl$3_wq^ܹiŚ�1;WK%vǺ�2Tnzv,|9Ϛ+�SSg�y#~Ǯ\H"/RV#wMn5bMrx@ڎP*�ҞI=q(�H$tm� +Bv3T.+מ+�iF,U� D,U�[ᯒ vyoTHVV1dA,R e ǴUX*$&_hr +@ c+~0Fno~)o#̘C蚓T1eVşgߤM{TH.Gt#2[Ox~U":;E�}.$FtRЏ\tvJ,H^E@_ R$clZhۃ؄=^s =k{1-<dE@_͑HbkU@'˫ +w|=r R 1d} 68 +̴Y_Xݬ(IzzXݐqklG^M5TA4v2@bo3=bn%]%[X:S̙$&oyb;s q`F,U#y=×b}CwoX%ۗ\tlcn=�.{}5ĺJ%�ip{. J�EG.zR #{t{%@_MR \+zAzp5f9CS @BNT-I(�x.%�fV5K�T9I,�; s :nf|v;T bI8=�@!-�;} f#ָR\tzw j�YR `^6g5b@ɎsЗƁX*ȏ̘@֌\HX0w.6Rt\Ȋ36"d2Uĺ+[*� +[Jʖ�~t{,Jm+{.$gxKePg gQB,_o/X) XDJ5JȚ�f\Hg]v4Iy|% +j yf$!D�%;;NeEUSbunfl*5tF�&0�4X.9X0�a iʪc͜F/i2�U\1�hZ\lUk)zSP3@M[Tќx+DQ5ٗWY3䗹 n>3jMZJYdeZ�X3 1�n�m7f-��0@ nA͜&Eǜhdh}t X�.�`He0RQ�pL*B:�<Ás�Xv$V1�PH.Yеh-JnfFͮ;k�4jͮ1=*kn5(U4;#�l5H jvI#j-;\]wkH_P^[W,E-?̀߸*]c +Sc �v 0[$a` @t5�0;0;y9+w G�)u�k0B;8Y�ߛTH�(RK N'r)Y�UڋaU,�m5լZu�`8E``\zHu�:Nò9�*wy<P%,: 0Y�fhu�`#w +fۛ 79hP�>=x\9�Tf�~>u3�tP't .|x %:o>%]3V^}+颚]wJ=nϡ+M4qsJխGbMpH{Zs0X ]!V*v gIW!|íwQèi\}h,L7ɽN`x[_Su" @5^`ͪa=6U@ =c8P:t�pRP#] Im=n?`9ޟ[4Sbg4)Ե[ßS[h0[͝ ,gE�]5�n +‹ f -ҦZ\D`?r`Ȝ7XB&O�+^i+@F-Ԭ-XW2Ԭ`K]H{O5kjyQc�#yԬ?ag?M4k6?p`XλD�+dW,>/ 05]9Yf +@Ǐ}9 �+Oi@Z�j]og],?@Z�L 4XB hZ��0|z�LwTM&`]~~ Je;\> �ojp&n+>l3�R j&!L%zCEgD[4kfdl׺ڹU5pp'jxIhp}}2 X u٪ƣswN�T:Qw[Re�BdQ7\C0j㢍WHh8 �0pc+i!.)uY�D[�cf=�clXzc1\:qԬ�mAT#xIht`>ԬꢋmQ<6/gf=�Fq>'vpJmR?0D3MLJE�Xu( pJ9R As!l8 zѬ 85 ڔR-Ԭ X%E6  ϣ>SC0 ۺQZP.\C0j{Qr{/jH|[L)v_hy]!5NYBɚC*6$ME͚Uyelլ @n8os,ާf]5@X`Q~0h6k8`5`TJf}ۖk^\DFu9#fKN5&9r okv5\H{\1լ� 4kIR5Ӥ.X:`H 9k +J F51EW/o%j@2�Roabo7<7_|d_|dXO/>_|2'3ɤ-2) ve ڿU@Te'�ݕ> (+)lp$e-n*XNC'Cl�'[BJdz#:X9iCdhOd]j42:YK'R4& d0;Njx>Ud;6㓍'BRxJ#?IO[hO;3<kwlϽ Q9;*w$x2%E +x2xdOOFrfdoTԴ.θxA |O?_#doQ䓽}6O + r2X/ZBtЬ` $!GPeN iUB(# 5:ެH(4Q0x&-0w([U1ʚ'*]cQetGZD Peoʤq4Ea Lq*FIe~͓(H*Ή24@*T&mzL+3R̈́Sy)k8eDN Lf#&2<#돘2:Uc(Si L2LIiL3LfGe)')Ll2L%AeU_T֊"Lw,NN7#L&2PVe7L@e03Nz3P$bepZ +*$762TYSza*[#TdW"cMD=Pe?*YO@*#!i#aWxe]� $2==^ܲ+#iW‘WF; l<^YxWvs_+6S\&Ǖɍpe q�iWuLk ^>Lxe@0*i=A,+FJpeUb3^wI 20=2o^\LPe{# *> H@eKXEs~PeDs:dʸe0Xݸiep^ZYeL%iVwVv A^VvjVf5NthVf5 +85O+;>C=ʎ;heǷheunZU{^Y%W\D^<22x:<"peЈ+;+#(pepeT1&-+{h]H29(ÏgȀ+{|Ѐ+#ef-ӱ燡]Wv̺WvLW+1XF;Bx2xI +cey`ٱ #̜ L)XV'"J! iXV$E#!팜,)P#F4Re={T.S%Y�O/Db[VeL AX&ۏh(`)c<�p3oΑN`jyeO[Y`W6a=p[^$9F"Xu^ܾep?u!�&,u8,p}�X6__yex`+ӪǕpe04hhF_Õύ2@I9\MW6yeoN`|$[{`  "te0)|(�[e(,ü&0+oOb]QRW?WDZrpe- +2x~+8X\5Eʞpx: nf~xZ]8q2<9l \YNkZ\ٍo6;\GW-K(u"nzݖ +Ɔ8vmX7VdCĕu/|@LcI;peRu쾙'#wu0Vb}ho<ɮcbpe- +Ne+Uam0Σ1wZĕaѽlpeԝ}WO\v`f*oWPN +IJz < Ἇb"`M@, +SIJNw= 0U\3Is2XV@Gk2 +pdYg�=,LqO, %36`fBd,7m#ˤ�d8^񍬲]Qep5w4O8`*氷*ae +FIheXY]&$[e`e3EG�`eL*k-`rr*IJMQ`a�a FK L`P`C?UOD" `2 +gRU40ڼtV <TYy;UvaD~ pI݌2xL ™'rR2'w%yRY$TFdJTk.<@*}!&RYaёTmJ1@24|$2&Tŕ"cC\shY=U)1³:YA{VY_=*Ty:0*cIxkd ?U\QYe+2XKJdqXe}uoVRYe4X*;5-ʨ*JD@֮H+NY7H2%iL,74,>G "9yZx,Xn VϾtGZokie}rZ<" l&^E4FH+-#)kVF df}K|hee2~ģFZ٠-#FZ٠-bJU"lm@H+K-SoZA lE-}eZ''/sS%%_E-mZ$(ɶgeU z&2$2=Oe +2Je:fزބez6`p�.CƵh\vK^Y +.|@.."[er^J.Ҍ\&flHH. \ eenPeU3rTO$=JQIexZDvF4.8˺e2pk 첊O$. vYތ]˪.YElHU.?,=G .ۇLwp2pِ \E Lv"-*\dmJͥz�=S6,/92,֛ely-feo\.U<Ņ$2IeD.e-e͓O`=HHeo~d=r>HrdKRv 칻Gv$貂|uh]k{vAMv@BGlp..j])Ev[ceO /e0LSv. kˋBz|uc `a=^6O/aCe8>BexS~ lk9ex2|ɦu*ĤGD^ֿKC 8eXYrQ"i^FoeXy7aU#O/C~O/;U Kz�`ҭ`Q8^`֩4@0.`s&3 3vjsB0+/#ak# fkNZdm_0Eaqaa`�17 rޘ@ڦbvݒ@ē[չ f#BvrN1e FKͿCb'b&I@1OX%(fL>= fp(fg-=bU(A? 3X=1f xhdVQB'|@2>UqedK眳2{6"GA;LGeִz+ڻ $6w(Y[$uJ`'}e #[d6^dw .k9<Β8f 4ײʼ$ Ɵ\dơ+ 3j~ԃ`ʼQ2Ѫ)ك &@f g0.t D]$Ӳ w> )Hfx?d˓xƯ'#Cs- he78mؓ̚dcfK7*̴, Zɬ`WXiW>�2i 3xʰ+y�Afm|˂̸id4Y4ײ@Ѽ@f`ݻ < nAɆ@%O1k@1kiUܗ4@1cUE3X@1;" Ŭ=b߮x,$1V׫@Һ\@͸ µLs b](f N@1^>je1{L̻+U fH=3*T q3/ܳhU@ 1pq~ͤar-yy, 斆` 3U{6o?Hz4`H@E0S Cron0"uffZ$GqhGhS,aYvQRZ0.+a�[%0,m9 ){3 M~O,>' OV| +MqPzhfYf0UMs{ 81$h8�ldQy^4sQfH{3B`%W0{B W/6"p;Yك mafyCc0 y&=0{G "V>U3x^ef @*CaVʸ0;h nك +wa a3lė*؀0Vryn_]CN9 ^ f>Qj!ia# Qhf# X�0k!ag0lJY@C{aۊLva "ai#G)dOf +: :W>Y +j!`5ɢ3X*C' l}20�05�fX7dfC�pr=zA�jf#�0BlȾi`6 (}y$�ff?e0fΚ ie|eteEmǗG_.=ށ_w(q`O4?_6dUNaـim+ *!5 `vM�3Y4fx�f06$�3,((d*޳0{"\{\ �;i_#X)uUr�ᡜX�0+k%- `y,a#_-_I= 3e�/;!_6‡/_oF(P0VlD]}VA9 oگ+o.�0C;f.I +3XүfS#"`qa62R͒#fl"Inaƭxoy< F9= 3K7#< fG_@Xav5=l'B@X/+<Œ?]MfKK2b�y�fv{ Ʉ`vp X{~fA2900V/aƤx31NA9 3.ly0=l.d-3#`^$ 8=\W� +lJigh6Q�*w}DE;h`v0Gf6Z<쒃`]B6�v �[�fB]}ȩI]CZ#m@`vQgᖣSFMG 3 +srfBD[_"-.3e="�avürt3$$x쾋fC`X%(�0+Ϩ JH�fp% T`V4U4Zt$&XpY.Ь<@r �35KN0B:W#Œ0SS1e.T+#B>`FQ*YYy `wK=̰^ +7sѥTND�d@0{r4O0;G`wVy4Y8EFF~relK!D$=_v �fl1�,E0{U `v ZM�f'(f.>lF0;f`b#F fܾ/O0"ƗVf% fx~ye`@0 w#rh6vv�Yzfu +Dfr-`V'QffQay~Ɋfe`2= <>F~0څ#T0jys؈�3, ^Qg3tPt 3411SfM%8f,M<fha)>Ohg�Y3�3֖hUI~'L4-5�34�HA79Nhe4ugn6�36`UTѬx L4-Ah!ID fYIE:4:z�Z 2̪H� )`Mnu0#M,&H`VM~Ufz+8̰b-<×?#e |egǗ_y(qO/ $Hr2IfRa䲔MxeGr(OgY1?)]i̲eGs`í]v1v1#@븓,5�TbC]v5tْlѬxj`thxʑ0YJF 4M +2\7]lq#9@GYa].CвpdlM[]OqI^U=l\۾^Fxz"e׵"? +(y?e'M^a +R2`@/GGazh08~KQ�aqF�0[$dQ0[RQADtɶ|͇;I�IE$.3Yvhܢ�t!G+̞p5<hsi"lV/ GDٛ~ f\8.O0 Yۛ fhe"b Iia6jGلii�aKML3cmf̅zD`6q3xAfxKt$}8`a6fG*00gs{Udv`#t#AMПavb=ŒAD#�d5C�:W#FEbDDW!f!f䌳9b 4 9"82BH0Xs@0X/\-O0Fn_3v $>P3\-È0f + ~0æ.40WaF,0;72@0{S#lX0{# Gjn 3y!3&>va6�00|D � m x0Ѭ!3,1<4!fXH;" a"ŒahԀ0[*D�rf n[3A- f1H@o < � 30m3<8z[7a.@jF$af0W^f{Cl0M`n-�u7b�77̰f +0̰Ćۮ# @g �3.QI i`^x�I i`FGY͚�,m/[ReF 2*=�n �3L{0 KbD6�Fi)C�3Y^|`ɷ|fHl^``a/`f5[ +|�fIZu-xK'%<2٩y 4AlQ%-㗝痭Ƿ_h" |ee/$˸>?Ǘ-"o< BÊS"jpDe~v}O:14 Ü?߰|NyQi7lRY *$٩/7ׅk}z]~u_(Dѯ51JH*_ѯM"[r]~u_Qº iz]~u_WR.] Iu?55?}] Av2?5׵>]o/_r]B3;~xю_G>?ޯUe~k}O0?5Wy~?5W1bg>?cW/Wv\} ٯϏD6Ο+؏B/|S/?V?5Wxf~k3H(?+�\?0c)ؿ'a\lߓ٫g2:l^G.^oq#UpVoW،?Oݯ>i鿐vJ޾_k~_ W&~__PW_{1:-v~/m"d/'_A?/ F_l/';_A?ْ ^_O6~\϶K~pI|l/[%lomj?~\K_۱ p%@"|[p? ^�/ȗyʯ/PJ|aW ]/ȗrꮯ _ʺWP;ɾ|X# b/ȗʱ _Jƾb]XKaH/W/$wkb]W_R(>i_~I,V}%rXbٗ_/0Eg_~I,V}%Xf՗U$$\XTƷ7 ?˗xn( " +^;\o`k/QݎMoyo﷿Me1 Ӫ,Wk?6/0 J_Ox(>K;?5 -\ Ttgu?q ½ɽ=5 +|g 0O[`LQz ?}Ͷ`zL2711Yr^4_7 F`[PM ?_,_ɻ&w">>"3wR,JwHƼliӟĔ"4!X]GAo<"mj @J`.t|Z|UOј˜_ { _% ~p}v}'ID޽P?8% v(!IjIt},Q"]iTJZ}Qn2ܬ#9pR:B I[%WVJJ1"PB +UY;R I{P۩vEKH%$h;+Vʙ|:(u!YxP۱Qce0Lg\G,!i\Dک$qA4v*!iwƴS I KҎTB YTWmVAI;b Iwv,!im)DlG,!iM{KHH;b QϩqXBK 0#4 UCv,!i:kG,!isP۱=z;b IN1XB*H;b IX۹ j#RP۹=~qո`B:F v0!is /L .&$ ~Xڹ(5X\rƸ&\B!/\BP6j;Mb0{87+?%D ^GW$&(i0!Is*ns7%~ ? %&'iXr6n`#j;4OG9 1>{Lv0!i@3uTX Q\eZ&o/rVZh;7t<כNZ[_8NZ:#5x 0 )r^3I LC9 1rgrxOZ\%sXSU jG0!j'K,9.ϑKHA\BL8'H x\BۣEKZapx\BԆE۹LK]I "ڎ%@D=#a n[N%DuOWTBLMoߑuI=R )5i'H%d"gTBL8P;R 1F;JmbrC~G*!Ey|Cv*!n;ct)XޢXB̒%%@%x_.aU%콽XBоT!̤SaX>k;x/2+#c(,�uG,aP&%cP۱H0ڑJ M⪼7ͥDTB\xVG;bp|~>q)6�% )Ҷo6]%-=Vf#HiμG&]h&$`L^* |_|- 'WHE'UT7iw-ڑN~rVL'++o:9,G!FN?3FH'7c^aprx�IQ+g89. vă#]K! 'Gd7r+z+"ڑN^$LsiL' GH'pd +h H{.<ԎtrXn>tr`V`QԎtrdW 7trd;D;aĸ?#NVB䠁ѦUh(oP#r0}M''P;տ9}7!b4^`ONf L_Aۤ|r?nN% +1o>9Ua ٦"Rm�i^'򈁧U= '7ٜT7$XìE;{S /DVʶ+H?i@Bm~D?Iq3}X0|}#R*e<Jc ŵ�2 7؂0S7mԎ|r?G:J&&*'9'*3 _4xri({niZF&wQ<ɯ'x[AO˿V ׭a)m BJ.j&~a|r +cP2LqIg<9,i ''oNXtƓUtD3]g:9esg:9oR40}L'tWlOM'/g:y!6똾~ܮliwSn9#IĤ#Z`^tr@Nc [M4N˞'.tXL'h6˼iCɤ#̉g:997'tr%RTl:9< '3apX2d:& PG89S&fzԢfNQBg~W0[`p#)I&%Ɩ?@\u@KRH-,fpU2'.OHF R 5C)j0e"ynjf(E-r0uyRߥ[4C)s],,úhR=Zn)E Ƴ)LJLSv붔"$'_ ;@P+Rh 57˰" +5)l {Sd``#h6XjXLBT|.)5)2fDkP\g h?)O wp-Ɖ)SuTK*{ O6GhSQtrz'yN]�c=�͸�xk/߰0`TpڀQ`|aixnkp8[�� 6�U� +ޜWšqHQMk~MьF:e}xMj ښBh۝52f|�"~ =h8/jY�kO=CFac|�Lh?RݢF3>�Pa+>.O@c\S4 ? kxh 4Ǣ6H P3F�=S`밾F�v'1ݰF�| 4j`ilKhPh^ic!977@>f|�1g V\5chMP3>�fG=9u +>`e%�> |-�R`xy͎L*.OkJ^f|�-P+}Y^?e}�x0ќX?y؀Fn,Ze<k`"�!jVk1X36`cd'& ,H[M4g>pNȼPN�3Í7�,ܱi�`UR%tNc�Wk�`y3!όZ�ĩ1�0z25�K5c�`o-� |^5�0m{n�oԌx+C&r.? ,JpF�l9U$5vY�|doP3.`ѮY05 G+=xX�RǢNь n2[ǚ�ÀzfLF$+=i1j'֬ `8mf\�hcD9 62cCT<k]�f\�h@Cqㇽ-(DР&/@Q3.[Ȍj]�jr@2&�+bM�I j`l +.@\he0U�RJ HaTqdlr%͚�l;[ޭ XoKj�4 rdž5Q%hqKX4c@Rr =j9WE͘z˚E �{9nkJi]4|0U55c.cM�h񜎹a A +^S/Z�E˘[wь !=C?1 }ݺ�e<-a]@fP0RS53p)�P&iy#Q"Ap?ي~.�0s-}Z �^rԬ x[daXv. zOnq:«L�UѬ n3GkRs0` s93pcmͺ�{9 rR:C g�o0jJYYe/l.:[)4#˙Od}50^ř^.*`&w8Щͺ�O\@r{f]@GfW�XT~Vs6� x0xZ�y[5S ZI .[4k`= UO�۠l5hjIF_vNs +ZA-@, P3Ta& +H{] ͸>Hhځ>iɬ}?j ]An(/|1h 9%:)aq8K50?*ZO0CS+tNEk 'ָ|t +!rƀOuXx9xT`bq`ܼ<Ѻxx%ɺ,[T$Z[r{3x:lM,e=$Z�z8I6M;V|؍_$Z0*uSB*hIVJ"~ehO5 bW9s XrU$Z�odbqa(cr% >!zŦHL "OmE|domPB7wP3\ʴE)K2uu1$V8m ј KIAn/~ +shvUy9z*pYaUF2ڭ|ntX{3`u0p!8Hu-TêxE Q`&utRC+Aʕ6Eidq jTZM-p R%%WE!?\2ZCGS}Kve:V/c+U.&/+Ɯ^U\O }ho($Z ڐ!he<]2MsGV`<5X -!191حҤq?1w +hw~ nͦ`MJ@(G,\p,l亜�q5 '\3뢶m�K]#Zh Y.ʌbe\1!kfqJ-p G9ñ9H~COHo,B\kh#PUD aѵ4zQ#o]S3wZs\pF7Y4c8`:ng8h ::568$TD8�ï9)OQ:<7p':xHc֝XQUÈ%#r8._qbBTDѵ9/)bRZgRs,e [HWG,L~0鐙E켸ihM3%ֵ;{њDmH+3kGhM3IDcɟ q8ӁM|&HuFtlUT΍z g)CEk:N\tDk:Igƻt8њx% \h]ڭ8a;Dk;TUzuN$ZalRG$GՂH|Hvp5?Be8ہN7(hm]O4]kނ']S�Qֱuڹ.zR͚S<F+sֹΜ49`֖D%ZD9@I]s4|4$z#6g:#HHÈݙV5Ft- jDtp?k5kڤhM\:\3N1e5Sog:hMVIqtq]ҩYj[zqM$5s"ڜ7Iu͙jTtXљyXtXљJrbmya4g9B`b尢;q�[+:AQ=i]{鰢3Xhx8?Ut70Y4Lǩug:Xzy+û}$:qӻ+:]뀙/:\Jx{aEXC,vРl)>vpvbÊvt){㔜�trXYSrt.YSr/bqho6|ʽ߰x{9*:q +Uto8 G_ bÊqbc\S!9SqX~;IDLtwp+9D8NqyaE80;E\μ㰢sx{çh(:q;+:qw\>sX㰢>-8-ǨB8鰢56ꩮ3鰢36$˛+:q7VtcP*tXљS|鰢3;htXљSltphsZhqˣTt3VԖ3o~ ;=qqG>t~Kx~ ȏlsLyqi~f8r-iIƏ@2~d| % @<�Cg�H�r v2|QI ,R؝�MqJW):=XIqث0DzeGHq4^#iFFJ<dHǵJTx]6,/dqYOq/U鞌ci_ƎӤ7)aǕ=>Ev܄/3aǍȎA#eMqUO+G4b?(ŠG0 <: "CiK77-㰾eDUɋqCU3tFd8d͡x0TEM0I . :N#:niuh#:+v%8$] We8gͳ:vN\|[;6ʕ8}vE측Lф';n*7auŽŌ} <8="9v\kȎ/;/!Fxq2'8)q{'!#'5KKq&Gr\/2!qyxhBr' GyrܔmF Pe8-Mq YA~^bܯ+q2rfqSp\8Np#u/8OVq]&Bp/E?Rp\)'vGpf4?%Zdm:*!Aiy:n(*AU%8N2t\|[*&不2Lq]X 96d8lyyt\ /Cun$qJqXԵHۤH[E3rzFCd_K$aM_͑ye^X:!ݜj`ۚ#ǽ 9> s pRh=9ZDs丩9N>9nrdf8Mxq03O"(iӓ`*pxF[H$8qytuq]i:襀w&Et~?"yt&|%Ft!q q{8kIqSZ2t\W%q%+!ǩqV$!4ǍGw+<uNj8cLqG=SP :nc :;)tK8x:z!CmO6i3^Žۍ. ;n'8JK%;`jv0DqZ4^@ў-ʀ/ɶqKq]M :Jj*VΣt"C>t33#X*6:NHqj2p\LS7nI\hG0ypqㆤ5%8`"8A|C4# yphNqCr,͕4>!-`:N#:;e:H 8I):w-wFt$8,fvWBk3rEԑq#[BSNy] 8Np Cr\mJqTs''MqB{tJqT#'¶*!ipBQ9nirfMMqp2:.JqM#J3z# >N|%8 zL�r}֦Ig''n;NS2vƁe8/yvR~gŽ>=h=-'8ݢy|q4)W>nMq0 +l3'w8X`qw.CrHeB5@n%�ś�&GG ?`~ $0Ur`[E @~?G%�1$.hj +MeXǕuIjY|8Ǐ+sN]EҦ~L"�[wހO�r&�9KHi WH0!m] =h'�9Z)T@`\G3m_� w�vaĚ=[Y.?9T1^T_ b"A֒ 7AFL_[[1\m W͊%'%9xٖ0AE + !^`Uܚ`$lUx4q0nȏP0aUHsJwq%*E2Hb|xA$Uf}@CZd#?4يqV><@2P4kNfNkSq?AAAA%;2Um"B#ynN\)@c!$�A(�0PW�b�i�q}(<@FɅ wL W%_z�S�%5V w0k@[@c�c�wzܱ�9>z NqϮIq*Zz4$㰣@…=eI?Dx 8x52?#bz~\9tWv!Owef|k||ϩ$<㼀pw6" +Ւ<*Zc~ !nqCCQS VU�᰾�rQ9NEtKp  "R w=K1Ø/%8xn@ KE{d(\L6.AG輽IW~ 3骰z+]y ɲ 9vt`QH2xc9,u/S?u!r7p3r܀+;@H!)DǐkqG3Jd5` ڼr#2*u*1*n>J3xڠ8ZCԦd1{Fnaz_kCH!rE"xv`_h[E +_nF OtNG68JH!F�#TG6#V0xc@&cp9[O)xU\EO=lҠa f) @נV D;{o@a3S0rEbMynƯ=[o-Ej E8aڑ"Wӳ%% i"R!r0=U0ɇft+aĽ#Dw+l!rx7]2X./5~Dl Wì޲. ˔0Loѱ3(~{0݆`O|k޶[;qFts8Pa|9815Uܡd,NQK[,>cKOz\ϱuڢ֥>q =pkte58'<Cp[]aDiQ6Yn D}q DN�s>3*I 2YQ(!sDZXx L⁏cqGZ|_AeO&Y@|߃w[q ܑ Q C=ä8| ;B,e3Ń"";tP`\ v͚oe|KO2';&-;Eזd[v0[4/}9qVP!5шŃGԢKC Yn.zJXTro2*5qd<K)Ɛ-&O.p8wD8ܸ(]%FikqDf!60na >q=Xr\m=%nHrڐj`Hΐڤc3ڐu# 9a/I딲w:�Y'9cU& h)r-)ױ +v c>hY77$aBr-9s1˵d'9cZ{"Op\%=3=O0ฎm"Yp\ +RӪp9aNiaY C{#vpx7PY+y͂:8Γ[ 8-Uβ 9]qG8':B_n8F1<DǡFJӟ-:mza@UpchFKqɎlY*Gdц-DÎj^pwaޑs8'o5ws!xaj;s8< qhw�'Zlm|KC7K)S;Uϓ_Z,qT#ҴQc KK'BKU, H47Wܒ0M2b[r|T~g8<_הǂCnQQ�Be1`qXK*%dύp87 ܸ]u {@\Kj\SӍIA zԲ +hsga'EϖW0Iga L#1Xx\q{x6=p8*}gg#(A]Yz܃m=*Q2z _{qgq rזTyE+|Mr85" ĺ7% )** K>kq_ ͝kqXX4㰁-g8(jp {zZz%אXz +$v7ܫx+E}ƏpQvطPyb>YgKQm`=g5gJ0q8ҏ/qp8n ud߶vjN֧4Eۙю뜷xM\_t:3v񪁒8kOX*q\Nf<T.~;q--z=ܸΤ*Rcy6(8/i_q(Bs r 8iW>n^'ټ<_F%>|k);?ǭ1I72GVS +qM3n~qG%<Λ e8OxԜI5 +GVq,\,zܒ_zC:7,92qXQs2}zBǍG-+w${%kvV8\T#GOҸ#u#./'7Ƣ#G.Ցh=ϖ9=8r@pZ8r'Ց7`uqn.VGƍ&3 +m2Br4- +=5I'X 9Z +ߌ U*k #~8rIUGn?#,ye_9W-;raqIkeFA(UFnڠ#GÐ4 .ܼ?9ȽcGcÑ-#7)sר2r}jܤ c/ #kOcbѬw +nRbq!yb!=^ǻBnpq|ΆB`= r5+!7iVB&-r4hgd&1H, rlɧ\ 9t3r/ΰ*-!GKsjȽOI0Ƚ rS*y X2N*"7w{A<ݛB`j%Db4WiM=X2pZ=/֮iŐ\Y!GE1FŐ%!7w-Ԓ!+IKm!O.%C +!G1K.\'6{W9Kg6u"G[˷ +"7/\"Glȩji +C.EK.ltr*� 9dJW9nsZ!G!75orlO+rszbэ'Knw5�M,y2+0`.󚞛9zVX9$NAЩGk` "gȒMdTψ=h1/SgL͈fDK&gD)29ܢT 9zyِCc (٬lѣ5 9kÛbȍΆ]}8S9͓][ 9$fCnޒr|5Wq]V^9fVy9z>Z@AhꪢDX3!쾾{2!4IdXX<+Ds&ZzP9˂=34V�\#. GkQ9ZYxhj4{ICE?W9t2 e{ @ [O2 w6\ L)쉐i4Xjq/43lRIÿ#r1> ^ 튻GD)ʔg9dt]&�$PfJWjgls,2 Ѯت{&DB"j,iەcCԡqBn띜9$F ȡhَ�9L鏾 .s=7gBIg\C%@e C +-*$&r sYxmvsrR)9 qg&~4trq-nؗig@KW;42S+A2M~rjvrܔ˞ -1 CG&ebC&rq܏O3Z.vcïnL"9q܋iAVLyq'>CC#&wJ>z8iԭЩY&86L: (]9@bWlDcz`ZC8nf;! tqIMuv_ڝݗ^VcKҠ\{7ݱ +x$Ҝ@v!zEE<&S@qa:yYR}I{[ +=k<8r;M?=_*Cb%8}Jݖ&7X ͖&ϙpג9N0:qWL?05vTq N'-m}DZݯ?q HgQ+pqSUуfjDFeރm rĴ/q:n%x8iv~8c1{9q[,`vJGe W b' +lR8c +qqC36Q喏/qOo'? W =o8N϶DZc>8?i)tG9*K rq,?MCvM�zC_lDBWO9GAVIHhZk0O7c<8n4V~=8NM]pHz ntHǃ|nkI`Z͆ 8iGӍ)D3ON'Ef�0%hCp0iE|}8C0_~yeYp00y!6?GN6%f!7$"ql{!- llm8]5R>k~qAJcO4n[)clt#ɉ?}GЧF<$A>ѸͦK 7x䚀M۝7V πGc{g{U4nrMlӉ؉M| 8np&Cơs#ƜC2uqD;̈v=B[y6"`P@׺/O6+-ZqL=V ljY_8 +бaCj|tbE)&69MnVظ)yo 6nN[6N)}88DChV4l@ZY ;!/f(62q[Dž˕;8DQn1.+%1:ۮ%1JplGGSPA~rG1w>zqMc]R`d.ĵDw2"*Ye&U4?Ab-:%5mKN6Vr x?zJX8TIڢƎv6KNycs#Flr0K grhǼ^Jщg?w#YщC/]8԰Y{a`NIQsu3|-)qjڨ=Bq(v,?CqY8I (F- 8lrN(fp[([\4&;?f)šWeY.똛8-w#Գ-5KTZ0s�!mTn[Ip3Yfp�u<(Jq8 (TIMG k Frl{0 Rw8njKġȈaov 8yq"aNa݈'AqRKW,qiPt;R\B6"G#0Bz Q LYg]oӾDS׏o-:@o(aSIC"}KՂ(u4[*Iq(zzW&Bq8b[P@*ipىâ۟ىhI"ӂ:ġ7 +uD.t4ZшXOوN갘{(8qM@{D&ӷ8|^.8NN%U\e0'%5&bo;8,_"58+(q4wGw57P`P⮝_8?`Pem/P8~~,2.f%3V%uU%x;JݵJvvd%Χf%4*qK+; &%=ĵ!~$8Z|>ĵt%-*qmW%i׎Ez6E(8MUVfP?T6wc 邶Y~q ~-q7-hT,{U%nwHܽxT$ug-H\^:[ub%8X?-HMό +H'=߅8d ڔq<408Z`ك!p3 & ӛ *l:y؂"qڞJ;�Âٽ**G3yh0ectJrscz|z8Aa"Cp# ͛E#㙩Vx$"Io-qM "˫e8 ¥L!WQClwOnHx+uiE8rr.k!>98,״yݛʑ%l.df AOHFĸr-\cx{0MIQfvyZz̬K( DI(E#Nb.s"cwD~53.5͂aA7!w<`.aA$ǵdR 3/*лREϕ.N"M0D==q u?8 e`INZ*fƩK4-U3R93MUfvaKB8 2(\8v8 M$"q|,s!"q[88 ro\oLuX-83ҢSK4ż =-(8`XnĘt*qE%NBM CuDz`Xn{8�dCbs,#N4#qOR38!6jM2>KSJetF'Ng�np$8iTgщ|}LeϯKÂkO(Nt#Plq?|@88[PǾ^Y}ި #'޷!}#'Ma⵭Iӱ!TJo7'B +,-KU+/@aKuЫɴ؂a{JJhMLi p|<0qwmC.,81I z\A8 Зˡ-ߩ/s98fKSb# +w3.8v`Xp´ T$ ʩq3W8 rN(n*#ٓJ7Rm47]#'-'&. ىCeErp�}(щCT!үwyi"Us"i|7+Aq|"!jKˮiPO%:Bq$E j|8Utf(Ao 8A3RB CS!lMǖS'LQCM#q0M$)k? +f*^rbӌ(!(Lkz!N\2E2@9JqM@8vE)-l8L5MCP(v uvsz|rBj4T?6E*^Ų;;t٭8^Þ\QCl$)1|36_-G)?MR<1Kq'5n;QCDv�CP@k"F(ANb8:;q\c8Yr@N܏QU*@49q}';̽ú([N^8kؾptDb\Xw@e'C8YaA188Bq;&KN^p0:q3ݶbq*2Ev8f5 ىCHaQtFZPR0;qO鞸OJt8hUىCK'aP5:;q}LPn(gPw +g(bI}Nܡ�? o_ +endstream +endobj +273 0 obj +130736 +endobj +274 0 obj +[272 0 R] +endobj +275 0 obj +<< + /Resources 276 0 R + /Type /Page + /MediaBox [0 0 445 294] + /CropBox [0 0 445 294] + /BleedBox [0 0 445 294] + /TrimBox [0 0 445 294] + /Parent 277 0 R + /Contents 274 0 R +>> +endobj +278 0 obj +<< + /Type /FontDescriptor + /FontName /EAAAAA+mwb_cmsy10 + /FontBBox [11 -215 942 727] + /Flags 33 + /CapHeight 0 + /Ascent 727 + /Descent -215 + /ItalicAngle 0 + /StemV 0 + /MissingWidth 500 + /FontFile2 279 0 R + /CIDSet 280 0 R +>> +endobj +279 0 obj +<< + /Length1 1968 + /Length 281 0 R + /Filter /FlateDecode +>> +stream +xU]hWdj~VlTdc.JI5%[ddv3l\@%VRP|"E&yhb +Eh+BK>(g&Z[sιw=  w#ʡOfH#9iodp?*M7ߚ.,L|+?Js9NFHޞ#EVɛrŹvd䪂5I\8Yێ~di([fwHpgJVyn-4�c/͚%KF= =+6q*>yx'2Qa'؆HU_um8"oBYGa1>2.RO]Fq#1M ֆ낵5U~(LB'emꈪ,wȼhs"LJUNUY} vMJI9#k4Jˆ]J&GF#Ԗiu.r}аqp4bK#94*w[;lv#̙bw)*9*_Ӳh$m^7㚪 J6/kˌ.2lAvVb !y-hZݙ-Q0YۜفΰHU!+W4Jb9$%i5f KOUȤtJ7UUU:}πs.H.?ڒ-2GGTIsaL >nM# EB3z)$|TXnnt1_ ;β\;r70ŭF$$KS&;=վvn~;u�Io{Q9 FG\ ѽ( ]|?+ObTSa0OzQ˾i&֐tr0Ca}aBՋY1ho8Uz`PMɣ@x1zVLT\]?i'leW2i4)FYM=.w$Pf<'+$ib$J1PVia6?R> +stream +xk��� +endstream +endobj +282 0 obj +9 +endobj +283 0 obj +<< + /Type /Font + /Subtype /Type0 + /BaseFont /EAAAAA+mwb_cmsy10 + /Encoding /Identity-H + /ToUnicode 284 0 R + /DescendantFonts [285 0 R] +>> +endobj +285 0 obj +<< /Type /Font +/BaseFont /EAAAAA+mwb_cmsy10 +/CIDToGIDMap /Identity +/Subtype /CIDFontType2 +/CIDSystemInfo << /Registry (Adobe) /Ordering (UCS) /Supplement 0 >> +/FontDescriptor 278 0 R +/DW 0 +/W [ 0 [750 776 ] ] +>> +endobj +284 0 obj +<< /Length 286 0 R /Filter /FlateDecode >> +stream +x]Pj0+l CԒX}q z0h[lE^X gBpjV& +:G:g} +endstream +endobj +286 0 obj +234 +endobj +287 0 obj +<< + /Type /FontDescriptor + /FontName /EAAAAB+mwb_cmmi10 + /FontBBox [16 -215 882 715] + /Flags 33 + /CapHeight 0 + /Ascent 715 + /Descent -215 + /ItalicAngle 0 + /StemV 0 + /MissingWidth 500 + /FontFile2 288 0 R + /CIDSet 289 0 R +>> +endobj +288 0 obj +<< + /Length1 2244 + /Length 290 0 R + /Filter /FlateDecode +>> +stream +xUmLSW~h(T[/^`'r Gڄ(Zh"C6u1`.8cAe_E1m1ے-cKܲ,3LonսRM6i9>9^0�6S[j�6nFƮ` c zNm?'%҂$)>L9+'. Fwg\e/\/QECEL=Ґ .?xb(g _ Ґ(ؑI&]#)8!ΰ\&\) cxq�{�A76bڡIEVeXoY[Y.[N_W+YCqG7w”'[OW_MpU\9cZ7I Ze|Jz.,f#uobS_7U!0Es؃I!]^ IBw�ޅ +9Y̌4Ex5Keu`⚭�|[wpyfh6zFE@g:W+֧CV0Lڤ2j%]ɚߒ!Kҹ4Ld&mS:c5YeAښulu~ijk2|EQ&pLIZVTdAWv1vZ;m. +2KDrk:[-.K GKKK,V!ضG\* >Q?5l˲yԘ죱{a[쨱${[5 py2EGBiq&JDwwi*iٙ哇6kxȋ_;MZs0/tt~W1{8htr ]0_)܏߉K`)60Ox + ,v.-N#N֜e`&0l֜<),~&E7RB!aq#`aޮ$*jݴZ"Ҋ4&JTw'J +a5-aZ!jC48AYM5&go0IOJE 1{ L!Q(h|xr$2VVIn%Z":*.-:+hT6%P"42 +VVkT#ޥIm!ţPh$>:C㡨B H#6ѷ? OD1Bfhp,> +stream +xk``��� +endstream +endobj +291 0 obj +12 +endobj +292 0 obj +<< + /Type /Font + /Subtype /Type0 + /BaseFont /EAAAAB+mwb_cmmi10 + /Encoding /Identity-H + /ToUnicode 293 0 R + /DescendantFonts [294 0 R] +>> +endobj +294 0 obj +<< /Type /Font +/BaseFont /EAAAAB+mwb_cmmi10 +/CIDToGIDMap /Identity +/Subtype /CIDFontType2 +/CIDSystemInfo << /Registry (Adobe) /Ordering (UCS) /Supplement 0 >> +/FontDescriptor 287 0 R +/DW 0 +/W [ 0 [750 602 ] ] +>> +endobj +293 0 obj +<< /Length 295 0 R /Filter /FlateDecode >> +stream +x]Pj0 +t=,N^@RȡҴrjhl8}m%P# D;g#w:M8€uEU*o5P$99ằv&H9 +gN'%k@W[5A*$F,nen/o^ooIۤjU ;+mB28Vd[ >d_} +endstream +endobj +295 0 obj +236 +endobj +296 0 obj +<< + /Type /FontDescriptor + /FontName /EAAAAC+mwa_cmex10 + /FontBBox [-23 -2959 1454 771] + /Flags 33 + /CapHeight 0 + /Ascent 771 + /Descent -2959 + /ItalicAngle 0 + /StemV 0 + /MissingWidth 500 + /FontFile2 297 0 R + /CIDSet 298 0 R +>> +endobj +297 0 obj +<< + /Length1 1988 + /Length 299 0 R + /Filter /FlateDecode +>> +stream +xUmhSW~Ljfܛ4eޤ]Z? m4L?~"dž 2epC6DuNڽZƜ'9U;5DEWy\L&�q'4=2ږplm+՚H#D& +_PKp ! Ð]uTr5CX/9n;u9F.ʚʋ`^ttW%x3MKwKxe(5ѣRkH2!nf!f-cD?(U dTeAMy4Kszd8RK:3~lߘ9�9S &L[M>RUf|5,ùOV׳OZ׽ǒ۔%*ᲁ.XElB%4U&+k5jBN09Ykɛquݭ-h}JY˛6О\RU> QxFJvFMkai3>St%U -U2TXmiW$,$B±ȽKǼ Bg-(0C)_'[G\Nrߢ2Kxց/.xO!eA R#@[{1;;7"lv9< r%ߟg-KB6~ox'~Ȼ#8Oۄ3(W?ZiAԖ+vݎj1/4ϻK^Y\t>Gyweeυ5Ga!jmj g4#o8 pe-n&̀H:E`Qp_V1䚃Hաeawu0 ,sr0ϑ,  x+a& cI8F xQ@ +C0YTm+"V-G3ak^DNUd2ycUמ@!JXnnO접htB5/ ӕQ B +McjdCM/ 贷4DP0F&q5FAp"";u#yR)S.`؉>F lo +p8Z?DBpCWѝO!:g//0͞ f]ϽiLצ=mol̦`/j +endstream +endobj +299 0 obj +1323 +endobj +298 0 obj +<< /Length 300 0 R /Filter /FlateDecode >> +stream +xk`�� +endstream +endobj +300 0 obj +12 +endobj +301 0 obj +<< + /Type /Font + /Subtype /Type0 + /BaseFont /EAAAAC+mwa_cmex10 + /Encoding /Identity-H + /ToUnicode 302 0 R + /DescendantFonts [303 0 R] +>> +endobj +303 0 obj +<< /Type /Font +/BaseFont /EAAAAC+mwa_cmex10 +/CIDToGIDMap /Identity +/Subtype /CIDFontType2 +/CIDSystemInfo << /Registry (Adobe) /Ordering (UCS) /Supplement 0 >> +/FontDescriptor 296 0 R +/DW 0 +/W [ 0 [365 1000 ] ] +>> +endobj +302 0 obj +<< /Length 304 0 R /Filter /FlateDecode >> +stream +x]Pj0 +t'顗%PRrM-m琿_[ )TH3 voycc&B +aѺA[wķd(Dqv&iӫ>FG_B.B=t_Ѿ!'>N'9k@W[5A*$F,.e.TMv77`ԯmR5b.yGDt YVYU} +endstream +endobj +304 0 obj +236 +endobj +305 0 obj +<< + /Type /FontDescriptor + /FontName /EAAAAD+mwa_cmmi10 + /FontBBox [-34 -250 1047 750] + /Flags 33 + /CapHeight 683 + /Ascent 750 + /Descent -250 + /ItalicAngle 0 + /StemV 0 + /MissingWidth 500 + /FontFile2 306 0 R + /CIDSet 307 0 R +>> +endobj +306 0 obj +<< + /Length1 4728 + /Length 308 0 R + /Filter /FlateDecode +>> +stream +xX p[u/A @�$B�?Q%6M$A2AR"EYeWU=hDW5n>M (U3M\qҴIәR'iƉ-=@ݻw]�50,,�^F-GEyic9CDꩥƟ`~|1J..xC8 +7XIg o20 hqkXelOo1֒ �@_j88h +<0m}-gv5RDX 7Exx.g"< O@`aFa! +h&CB)Bo{ܻ;[ܛ e,w;qZ쿳9&m&e,$zr\"n~k*7`ѻ|e˧8O,p +N&=| ^F;o1PR/i5jRT<2{{va#tk�HL<\EV0%Py܍ wA6n뵥YK[M8XĤ]OMJ[kMgڞdLڭY.2eM.Ntqo={{rۿ5WJ_\(HN^2\\eG|P.p$.8!:J{VM;eEYlTsqWϪ'q +z~#N9Jm2,I{d667%qcSB@wq{=[wg5kOq}<75�X�i�E @>ʫ@@C 칟wy"2{ArޮԖ!siЯ6zA s6.GlF*8âeQb +թ"0]ȗr<3DBXa菄"$ 9;hSmTj22(Z⨮kZ*TA`8n%R:9 7y@>i$JI Xe \έzO);G,ƬPё/gH+ej`reZŪKњ:=˔kWJes +?0zW̜|/p뵔D+1\FVO!4 S#VnȰRQ  (y:HSPBMX +E:(! XG3 JHv遣C-My0wKEeF_3;BRPt!8[JMS?hi>/cB_]CկvE♡;o;m p1+3EJDQ@2\=)Wƽcxe-oPĝE~#E 2j bN%n%| *Ĵ5{FFT)IH$.!uyك$s3"kH/Hדf8LM'9Um=-d^ǒ7~>orМWAkѲw~ɲNwYtg9Tj޿ֲY\}G_tf\/ŽfǏ$T~P)!z%$2*ۤ[AS\zEm՛s. +7SAKM< �2S!4v+4n'mtF?dgZM#dOA{?U"s dmΛd&/vѳaQaoxZK9l猟HRG}!$V׸|::vAu2h {y�1w9+K碝v#u񵢁T-皁Z ДAɨ(C/1LUe^?>4Y_.5Vx!JwNFg#:2gnt=33n$=gVv6Զچ?\\h9zuM"7H<@tZjI+2Tb"!WSץQ�a:>#Ǒ? ,-^e0LHc'`4#'f[<yym]VCȏo]x<}cډX)g]_,^۪vgxvb;ٕxdfbGre}sYw}Q)9g͏=Y6 oD#*FN[h,K\pLj_kIXp^BU"˷q|7aI "#l`Ya)!7ZJL l;K F͒ c,C G5T/0 +g܉35τ晅oEIn@AfP^Y)h 2cOŠX)db+ 3*,ʏdsG-H:l82a lD �D7qHuVQ/>GP#7qT +e]jmʵ)cӏ!_d3:FH^IRڒZ$/R^aCb}u5 S8N, +GB&@Y +n8VS'V?O;A}2TE^_ ]DCSX#W.^Tκ&S5Uih+Lۓ�;' +endstream +endobj +308 0 obj +3374 +endobj +307 0 obj +<< /Length 309 0 R /Filter /FlateDecode >> +stream +xɠ�  +endstream +endobj +309 0 obj +20 +endobj +310 0 obj +<< + /Type /Font + /Subtype /Type0 + /BaseFont /EAAAAD+mwa_cmmi10 + /Encoding /Identity-H + /ToUnicode 311 0 R + /DescendantFonts [312 0 R] +>> +endobj +312 0 obj +<< /Type /Font +/BaseFont /EAAAAD+mwa_cmmi10 +/CIDToGIDMap /Identity +/Subtype /CIDFontType2 +/CIDSystemInfo << /Registry (Adobe) /Ordering (UCS) /Supplement 0 >> +/FontDescriptor 305 0 R +/DW 0 +/W [ 0 [365 520 600 276 803 500 877 467 477 622 831 464 ] ] +>> +endobj +311 0 obj +<< /Length 313 0 R /Filter /FlateDecode >> +stream +x]Kj0 9Őtf +C胦=c+q,rRH;$’ҺyjIF9Im�߈n9 +AܮDZ1%gn�G[@aoNfWvG42QMa_ňRcB12>WP9)0e*=b)ɺ^~ *> +endobj +315 0 obj +<< + /Length1 9072 + /Length 317 0 R + /Filter /FlateDecode +>> +stream +xz T[יy zH<� �!/Øm00`w$vIuN'xGdr3Ic7M;YmʸiVjgRɴӬ̬4?Gfz7g}'@�@ ǀ.yF> /g{c,Zgg;�*OǷ�O&ƆGKL8 8Οٳ91Ǘg  yWg#�3`9<3u5ؽ@O{ �Bq Dž!<9k`+v[DBV2^55UYGz~~mW'h/{iJ7W㶁D!O$ɭ[>o-8 59N9FuF3*qZfd"2lN4Z/vD/9qF'M3}^[D2耻Z@lSTԙ VTX7'~[M& |ې0 2Va{cq� ۰ +@2|Nތ NJr+K>Pa,Ak^t|G1z|7cb�`܀S�c2Ćs\kߥFD XA]N\J4~~{{bAxJ|HuRCxBx!"?KOQzP(O.@-4EjJ 9tZ%<4V]e�3d{XG%zQ!(42.!zR!ɫQBB\ VwA:0t#=];_4ضpcf̓}6,|'/52UӞ$#O>ef-/|{㑵 ҢgZ#["["E"UfbWX +1T)adCQ92% x植D#`J p+*Dk@͚ A蕡#~5R]\XSSl OvWtwSFƺ(!}'( iIp|UquMQaMrpS_ޱBwϥsϭ3,!w5&Y2 5\Dt +3zʈdMjSGewUnN0ڃuceڿ~HgI(͟*6bbH1e2Cs$\Rɤyz-MsԬ0cÍEDaTf}BYIabFbgeb$POS.H5Ӆ*Cf;KcKKJkf]Ogfք8lmq HMu'&Mgqo QQW!,R5oզ1BPfdy9ٙ=t bGl�Dҭ`tz#%-c'oXyzԆWf r?_L$"|*KŨMaQhHFEuj".A.'_P*AC@R#F( U0gFIIVuƒS[v +ԗLԵIQџoCG#-S7[b&T1z^Q{pH05y?y5.L/FH$ +>TI]$*R\T3eRh* +%6rP +Bd ?[ЖOuVΖÚ[7l vǿ3WZ.[6t.2co-ѸTqf^e3u|*[n$;ZL{zbVǠ3pDL! Ԑm<6 )ϗk l&!5T ̠R\?wyp-O*9X]?q7 +9HH%Ϗ�5Vx%_t߽M/B! +CDb,)ȔdQO85ɀ x4GH%,nHZΕG]y0zgnh䂒8[4DyMu$C !fijCd:9*ċm=,ڪ 17EfRhSH[dBq)Ы31f F/ cJ%d HJh2/'tx#evۏ rmx֙j 0`|':PEHI?PVӆv/6W^f:!)@ēM5%WСސ̵id0![jyZ|_]JvI Ԟ @"~gaOo6LO*ޘ'ю=G?7]|R5Z-SY|:==^7>*y$`dQd@qh9HQ D'ďIw+`NqyӸ2"4J9R< hBP{!Mo^R[uBOe/LOWgeBW0UЪ1(uB&3Ԅ@/00ctx5:yq΀89dEᏵ\"uL~; j971'�i]/H:Gcާ#W$KN`ͣ&o4Dqc:y2LXJFɑU$b'`.B&tc@,:G:\Q^L\k XbW d,[Lk ˡ*u]G 3jA3}+4܌u`( +9d+I\`R#<$8_cUnshdÁzo+ڱϺr*/0?tkӳ7rٿX]sՃ NOre4 +N+,>_[|_SOO5lb1�sXF|M:ʊ䨣,9+X]RV(å,|FU-tB̘kMMt"']OZR!q^KV?||{-b[.N^/L n<o j>6F]鬚@US'S6wUZkZ=stp3?}C=V*` +S9l{hˏa; + X9O'b Ts$`$iʕ"~V^)׉IWO5E57u]r;쵥M=# qh϶ՅE55Eӓm +¦f%]eCu%Fn=(M1YTav${%:TdSjq3hzpzvV+ч; 2ȉFĪd +vK/3iɜv VQtPRC22d[@%rɂ1$bzzXϒ³r,g(+XCOӤST'~Bg F )+>*@ZB!2s#b"-L܏& t:)ȑ E#Xd'?woOL#O>u灯nt -~'"ߖ{Iĥ"F55rƒgd;d)dc=(dU`?nkt&oWJWȼzeuge*"^Bq$%JNY !60aa0 َObDMxLCd%t)H07=]U߲ts1֝kK&9i_s=2y4 y|#?<#jBF<*,$l)UfJ" s \aH %O?~"`ӥǾ?{e}RQ |C:kU:"7?yZ:oWtFȂ_,!Mȕy%9p{phꢢG۱ۆOfixeKލp0?(=m#UԹ[dKij-];7sZv!pfuuYە/I^ [dF%wS{Ik+@A*R}ޞ38#GG''S}:<$GJo}zbK)TTT 98 +4,Av$NݚeP^Gai쯁g?cOkΕ^(>YkKk+٠{;SoR+6R4w|v @\|[aSkON֔ O'mcαFKJʣkf Zgw⍦m{&gwzmkMX@鶠3(J3 [.îq؋ ];=O_-}!5v>v2Y}vOä ϕ*OaCi!FùKL9 +endstream +endobj +317 0 obj +6527 +endobj +316 0 obj +<< /Length 318 0 R /Filter /FlateDecode >> +stream +xk0(`x~ � +endstream +endobj +318 0 obj +20 +endobj +319 0 obj +<< + /Type /Font + /Subtype /Type0 + /BaseFont /EAAAAE+mwa_cmr10 + /Encoding /Identity-H + /ToUnicode 320 0 R + /DescendantFonts [321 0 R] +>> +endobj +321 0 obj +<< /Type /Font +/BaseFont /EAAAAE+mwa_cmr10 +/CIDToGIDMap /Identity +/Subtype /CIDFontType2 +/CIDSystemInfo << /Registry (Adobe) /Ordering (UCS) /Supplement 0 >> +/FontDescriptor 314 0 R +/DW 0 +/W [ 0 [365 500 500 500 500 500 500 750 833 555 276 276 388 555 555 443 276 500 750 276 776 276 500 776 735 500 394 500 388 388 651 391 526 555 443 526 750 443 333 500 680 555 ] ] +>> +endobj +320 0 obj +<< /Length 322 0 R /Filter /FlateDecode >> +stream +x]j0E +-E<%%El95ԲP@{p|>nɇԉGvF; WX4|JН#ovt?vH!O2I<_ٌ" {ltM}{I>jԍڧ#&˂KhP拭ڜyKڋ݋_YU?[[4$@)(m@9TTcMRء3j@@2 T4 $Й3: tQg$$tQgN e*E'Zp.E$> +endobj +323 0 obj +<< + /Type /Catalog + /Pages 277 0 R + /Lang (x-unknown) +>> +endobj +276 0 obj +<< + /Font << + /F270 283 0 R + /F271 292 0 R + /F272 301 0 R + /F273 310 0 R + /F268 319 0 R +>> + /ProcSet [/PDF /ImageB /ImageC /Text] + /ExtGState << + /GS1 2 0 R + /GS2 3 0 R + /GS3 4 0 R + /GS4 5 0 R + /GS5 6 0 R + /GS6 7 0 R + /GS7 8 0 R + /GS8 9 0 R + /GS9 10 0 R + /GS10 11 0 R + /GS11 12 0 R + /GS12 13 0 R + /GS13 14 0 R + /GS14 15 0 R + /GS15 16 0 R + /GS16 17 0 R + /GS17 18 0 R + /GS18 19 0 R + /GS19 20 0 R + /GS20 21 0 R + /GS21 22 0 R + /GS22 23 0 R + /GS23 24 0 R + /GS24 25 0 R + /GS25 26 0 R + /GS26 27 0 R + /GS27 28 0 R + /GS28 29 0 R + /GS29 30 0 R + /GS30 31 0 R + /GS31 32 0 R + /GS32 33 0 R + /GS33 34 0 R + /GS34 35 0 R + /GS35 36 0 R + /GS36 37 0 R + /GS37 38 0 R + /GS38 39 0 R + /GS39 40 0 R + /GS40 41 0 R + /GS41 42 0 R + /GS42 43 0 R + /GS43 44 0 R + /GS44 45 0 R + /GS45 46 0 R + /GS46 47 0 R + /GS47 48 0 R + /GS48 49 0 R + /GS49 50 0 R + /GS50 51 0 R + /GS51 52 0 R + /GS52 53 0 R + /GS53 54 0 R + /GS54 55 0 R + /GS55 56 0 R + /GS56 57 0 R + /GS57 58 0 R + /GS58 59 0 R + /GS59 60 0 R + /GS60 61 0 R + /GS61 62 0 R + /GS62 63 0 R + /GS63 64 0 R + /GS64 65 0 R + /GS65 66 0 R + /GS66 67 0 R + /GS67 68 0 R + /GS68 69 0 R + /GS69 70 0 R + /GS70 71 0 R + /GS71 72 0 R + /GS72 73 0 R + /GS73 74 0 R + /GS74 75 0 R + /GS75 76 0 R + /GS76 77 0 R + /GS77 78 0 R + /GS78 79 0 R + /GS79 80 0 R + /GS80 81 0 R + /GS81 82 0 R + /GS82 83 0 R + /GS83 84 0 R + /GS84 85 0 R + /GS85 86 0 R + /GS86 87 0 R + /GS87 88 0 R + /GS88 89 0 R + /GS89 90 0 R + /GS90 91 0 R + /GS91 92 0 R + /GS92 93 0 R + /GS93 94 0 R + /GS94 95 0 R + /GS95 96 0 R + /GS96 97 0 R + /GS97 98 0 R + /GS98 99 0 R + /GS99 100 0 R + /GS100 101 0 R + /GS101 102 0 R + /GS102 103 0 R + /GS103 104 0 R + /GS104 105 0 R + /GS105 106 0 R + /GS106 107 0 R + /GS107 108 0 R + /GS108 109 0 R + /GS109 110 0 R + /GS110 111 0 R + /GS111 112 0 R + /GS112 113 0 R + /GS113 114 0 R + /GS114 115 0 R + /GS115 116 0 R + /GS116 117 0 R + /GS117 118 0 R + /GS118 119 0 R + /GS119 120 0 R + /GS120 121 0 R + /GS121 122 0 R + /GS122 123 0 R + /GS123 124 0 R + /GS124 125 0 R + /GS125 126 0 R + /GS126 127 0 R + /GS127 128 0 R + /GS128 129 0 R + /GS129 130 0 R + /GS130 131 0 R + /GS131 132 0 R + /GS132 133 0 R + /GS133 134 0 R + /GS134 135 0 R + /GS135 136 0 R + /GS136 137 0 R + /GS137 138 0 R + /GS138 139 0 R + /GS139 140 0 R + /GS140 141 0 R + /GS141 142 0 R + /GS142 143 0 R + /GS143 144 0 R + /GS144 145 0 R + /GS145 146 0 R + /GS146 147 0 R + /GS147 148 0 R + /GS148 149 0 R + /GS149 150 0 R + /GS150 151 0 R + /GS151 152 0 R + /GS152 153 0 R + /GS153 154 0 R + /GS154 155 0 R + /GS155 156 0 R + /GS156 157 0 R + /GS157 158 0 R + /GS158 159 0 R + /GS159 160 0 R + /GS160 161 0 R + /GS161 162 0 R + /GS162 163 0 R + /GS163 164 0 R + /GS164 165 0 R + /GS165 166 0 R + /GS166 167 0 R + /GS167 168 0 R + /GS168 169 0 R + /GS169 170 0 R + /GS170 171 0 R + /GS171 172 0 R + /GS172 173 0 R + /GS173 174 0 R + /GS174 175 0 R + /GS175 176 0 R + /GS176 177 0 R + /GS177 178 0 R + /GS178 179 0 R + /GS179 180 0 R + /GS180 181 0 R + /GS181 182 0 R + /GS182 183 0 R + /GS183 184 0 R + /GS184 185 0 R + /GS185 186 0 R + /GS186 187 0 R + /GS187 188 0 R + /GS188 189 0 R + /GS189 190 0 R + /GS190 191 0 R + /GS191 192 0 R + /GS192 193 0 R + /GS193 194 0 R + /GS194 195 0 R + /GS195 196 0 R + /GS196 197 0 R + /GS197 198 0 R + /GS198 199 0 R + /GS199 200 0 R + /GS200 201 0 R + /GS201 202 0 R + /GS202 203 0 R + /GS203 204 0 R + /GS204 205 0 R + /GS205 206 0 R + /GS206 207 0 R + /GS207 208 0 R + /GS208 209 0 R + /GS209 210 0 R + /GS210 211 0 R + /GS211 212 0 R + /GS212 213 0 R + /GS213 214 0 R + /GS214 215 0 R + /GS215 216 0 R + /GS216 217 0 R + /GS217 218 0 R + /GS218 219 0 R + /GS219 220 0 R + /GS220 221 0 R + /GS221 222 0 R + /GS222 223 0 R + /GS223 224 0 R + /GS224 225 0 R + /GS225 226 0 R + /GS226 227 0 R + /GS227 228 0 R + /GS228 229 0 R + /GS229 230 0 R + /GS230 231 0 R + /GS231 232 0 R + /GS232 233 0 R + /GS233 234 0 R + /GS234 235 0 R + /GS235 236 0 R + /GS236 237 0 R + /GS237 238 0 R + /GS238 239 0 R + /GS239 240 0 R + /GS240 241 0 R + /GS241 242 0 R + /GS242 243 0 R + /GS243 244 0 R + /GS244 245 0 R + /GS245 246 0 R + /GS246 247 0 R + /GS247 248 0 R + /GS248 249 0 R + /GS249 250 0 R + /GS250 251 0 R + /GS251 252 0 R + /GS252 253 0 R + /GS253 254 0 R + /GS254 255 0 R + /GS255 256 0 R + /GS256 257 0 R + /GS257 258 0 R + /GS258 259 0 R + /GS259 260 0 R + /GS260 261 0 R + /GS261 262 0 R + /GS262 263 0 R + /GS263 264 0 R + /GS264 265 0 R + /GS265 266 0 R + /GS266 267 0 R + /GS267 268 0 R + /GS268 269 0 R + /GS269 270 0 R + /GS270 271 0 R +>> +>> +endobj +xref +0 324 +0000000000 65535 f +0000000015 00000 n +0000000145 00000 n +0000000197 00000 n +0000000249 00000 n +0000000301 00000 n +0000000353 00000 n +0000000405 00000 n +0000000457 00000 n +0000000509 00000 n +0000000561 00000 n +0000000614 00000 n +0000000667 00000 n +0000000720 00000 n +0000000773 00000 n +0000000826 00000 n +0000000879 00000 n +0000000932 00000 n +0000000985 00000 n +0000001038 00000 n +0000001091 00000 n +0000001144 00000 n +0000001197 00000 n +0000001250 00000 n +0000001303 00000 n +0000001356 00000 n +0000001409 00000 n +0000001463 00000 n +0000001517 00000 n +0000001571 00000 n +0000001625 00000 n +0000001678 00000 n +0000001731 00000 n +0000001784 00000 n +0000001837 00000 n +0000001890 00000 n +0000001943 00000 n +0000001996 00000 n +0000002049 00000 n +0000002102 00000 n +0000002155 00000 n +0000002208 00000 n +0000002261 00000 n +0000002314 00000 n +0000002367 00000 n +0000002420 00000 n +0000002473 00000 n +0000002526 00000 n +0000002579 00000 n +0000002632 00000 n +0000002685 00000 n +0000002738 00000 n +0000002791 00000 n +0000002844 00000 n +0000002897 00000 n +0000002950 00000 n +0000003003 00000 n +0000003056 00000 n +0000003109 00000 n +0000003162 00000 n +0000003215 00000 n +0000003268 00000 n +0000003321 00000 n +0000003374 00000 n +0000003427 00000 n +0000003480 00000 n +0000003533 00000 n +0000003586 00000 n +0000003639 00000 n +0000003692 00000 n +0000003745 00000 n +0000003798 00000 n +0000003851 00000 n +0000003904 00000 n +0000003957 00000 n +0000004010 00000 n +0000004063 00000 n +0000004116 00000 n +0000004169 00000 n +0000004222 00000 n +0000004275 00000 n +0000004328 00000 n +0000004381 00000 n +0000004434 00000 n +0000004487 00000 n +0000004540 00000 n +0000004593 00000 n +0000004646 00000 n +0000004699 00000 n +0000004752 00000 n +0000004805 00000 n +0000004858 00000 n +0000004911 00000 n +0000004964 00000 n +0000005017 00000 n +0000005070 00000 n +0000005123 00000 n +0000005176 00000 n +0000005229 00000 n +0000005282 00000 n +0000005336 00000 n +0000005391 00000 n +0000005446 00000 n +0000005501 00000 n +0000005556 00000 n +0000005610 00000 n +0000005664 00000 n +0000005718 00000 n +0000005772 00000 n +0000005826 00000 n +0000005880 00000 n +0000005934 00000 n +0000005988 00000 n +0000006042 00000 n +0000006096 00000 n +0000006150 00000 n +0000006204 00000 n +0000006258 00000 n +0000006312 00000 n +0000006366 00000 n +0000006420 00000 n +0000006474 00000 n +0000006528 00000 n +0000006582 00000 n +0000006636 00000 n +0000006690 00000 n +0000006744 00000 n +0000006798 00000 n +0000006852 00000 n +0000006907 00000 n +0000006962 00000 n +0000007017 00000 n +0000007072 00000 n +0000007126 00000 n +0000007180 00000 n +0000007234 00000 n +0000007288 00000 n +0000007342 00000 n +0000007396 00000 n +0000007450 00000 n +0000007504 00000 n +0000007558 00000 n +0000007612 00000 n +0000007666 00000 n +0000007720 00000 n +0000007774 00000 n +0000007828 00000 n +0000007882 00000 n +0000007936 00000 n +0000007990 00000 n +0000008044 00000 n +0000008098 00000 n +0000008152 00000 n +0000008206 00000 n +0000008260 00000 n +0000008314 00000 n +0000008368 00000 n +0000008422 00000 n +0000008476 00000 n +0000008530 00000 n +0000008584 00000 n +0000008638 00000 n +0000008692 00000 n +0000008746 00000 n +0000008800 00000 n +0000008854 00000 n +0000008908 00000 n +0000008962 00000 n +0000009016 00000 n +0000009070 00000 n +0000009124 00000 n +0000009178 00000 n +0000009232 00000 n +0000009286 00000 n +0000009340 00000 n +0000009394 00000 n +0000009448 00000 n +0000009502 00000 n +0000009556 00000 n +0000009610 00000 n +0000009664 00000 n +0000009718 00000 n +0000009772 00000 n +0000009826 00000 n +0000009880 00000 n +0000009934 00000 n +0000009988 00000 n +0000010042 00000 n +0000010096 00000 n +0000010150 00000 n +0000010204 00000 n +0000010258 00000 n +0000010312 00000 n +0000010366 00000 n +0000010420 00000 n +0000010474 00000 n +0000010528 00000 n +0000010582 00000 n +0000010636 00000 n +0000010690 00000 n +0000010744 00000 n +0000010798 00000 n +0000010853 00000 n +0000010908 00000 n +0000010963 00000 n +0000011018 00000 n +0000011073 00000 n +0000011127 00000 n +0000011181 00000 n +0000011235 00000 n +0000011289 00000 n +0000011343 00000 n +0000011397 00000 n +0000011451 00000 n +0000011505 00000 n +0000011559 00000 n +0000011613 00000 n +0000011667 00000 n +0000011721 00000 n +0000011775 00000 n +0000011829 00000 n +0000011883 00000 n +0000011937 00000 n +0000011991 00000 n +0000012045 00000 n +0000012099 00000 n +0000012153 00000 n +0000012207 00000 n +0000012261 00000 n +0000012315 00000 n +0000012369 00000 n +0000012423 00000 n +0000012477 00000 n +0000012531 00000 n +0000012585 00000 n +0000012639 00000 n +0000012694 00000 n +0000012749 00000 n +0000012804 00000 n +0000012859 00000 n +0000012914 00000 n +0000012969 00000 n +0000013023 00000 n +0000013077 00000 n +0000013131 00000 n +0000013185 00000 n +0000013239 00000 n +0000013293 00000 n +0000013347 00000 n +0000013401 00000 n +0000013455 00000 n +0000013509 00000 n +0000013563 00000 n +0000013617 00000 n +0000013671 00000 n +0000013725 00000 n +0000013779 00000 n +0000013833 00000 n +0000013887 00000 n +0000013941 00000 n +0000013995 00000 n +0000014049 00000 n +0000014103 00000 n +0000014157 00000 n +0000014211 00000 n +0000014265 00000 n +0000014319 00000 n +0000014374 00000 n +0000014429 00000 n +0000014484 00000 n +0000014539 00000 n +0000014594 00000 n +0000014649 00000 n +0000145463 00000 n +0000145487 00000 n +0000145514 00000 n +0000166391 00000 n +0000166252 00000 n +0000145712 00000 n +0000145964 00000 n +0000147376 00000 n +0000147354 00000 n +0000147463 00000 n +0000147482 00000 n +0000147873 00000 n +0000147642 00000 n +0000148185 00000 n +0000148206 00000 n +0000148458 00000 n +0000150114 00000 n +0000150092 00000 n +0000150204 00000 n +0000150224 00000 n +0000150615 00000 n +0000150384 00000 n +0000150929 00000 n +0000150950 00000 n +0000151206 00000 n +0000152649 00000 n +0000152627 00000 n +0000152739 00000 n +0000152759 00000 n +0000153151 00000 n +0000152919 00000 n +0000153465 00000 n +0000153486 00000 n +0000153742 00000 n +0000157236 00000 n +0000157214 00000 n +0000157334 00000 n +0000157354 00000 n +0000157785 00000 n +0000157514 00000 n +0000158147 00000 n +0000158168 00000 n +0000158423 00000 n +0000165070 00000 n +0000165048 00000 n +0000165168 00000 n +0000165188 00000 n +0000165737 00000 n +0000165347 00000 n +0000166231 00000 n +0000166314 00000 n +trailer +<< + /Root 323 0 R + /Info 1 0 R + /ID [ ] + /Size 324 +>> +startxref +170943 +%%EOF diff --git a/figs/uniaxial_payload_dynamics_soft_nano_hexapod.png b/figs/uniaxial_payload_dynamics_soft_nano_hexapod.png new file mode 100644 index 0000000..f98295d Binary files /dev/null and b/figs/uniaxial_payload_dynamics_soft_nano_hexapod.png differ diff --git a/figs/uniaxial_payload_dynamics_stiff_nano_hexapod.pdf b/figs/uniaxial_payload_dynamics_stiff_nano_hexapod.pdf new file mode 100644 index 0000000..9cff9ed --- /dev/null +++ b/figs/uniaxial_payload_dynamics_stiff_nano_hexapod.pdf @@ -0,0 +1,2992 @@ +%PDF-1.4 +% +1 0 obj +<< +/Producer (Apache FOP Version 2.4.0-SNAPSHOT: PDFDocumentGraphics2D) +/CreationDate (D:20230630153725+02'00') +>> +endobj +2 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +3 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +4 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +5 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +6 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +7 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +8 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +9 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +10 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +11 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +12 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +13 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +14 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +15 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +16 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +17 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +18 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +19 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +20 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +21 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +22 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +23 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +24 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +25 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +26 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +27 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +28 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +29 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +30 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +31 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +32 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +33 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +34 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +35 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +36 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +37 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +38 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +39 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +40 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +41 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +42 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +43 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +44 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +45 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +46 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +47 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +48 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +49 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +50 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +51 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +52 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +53 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +54 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +55 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +56 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +57 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +58 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +59 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +60 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +61 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +62 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +63 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +64 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +65 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +66 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +67 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +68 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +69 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +70 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +71 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +72 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +73 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +74 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +75 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +76 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +77 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +78 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +79 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +80 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +81 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +82 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +83 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +84 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +85 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +86 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +87 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +88 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +89 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +90 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +91 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +92 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +93 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +94 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +95 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +96 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +97 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +98 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +99 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +100 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +101 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +102 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +103 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +104 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +105 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +106 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +107 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +108 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +109 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +110 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +111 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +112 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +113 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +114 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +115 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +116 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +117 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +118 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +119 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +120 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +121 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +122 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +123 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +124 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +125 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +126 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +127 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +128 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +129 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +130 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +131 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +132 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +133 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +134 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +135 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +136 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +137 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +138 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +139 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +140 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +141 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +142 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +143 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +144 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +145 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +146 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +147 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +148 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +149 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +150 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +151 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +152 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +153 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +154 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +155 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +156 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +157 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +158 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +159 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +160 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +161 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +162 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +163 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +164 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +165 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +166 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +167 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +168 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +169 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +170 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +171 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +172 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +173 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +174 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +175 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +176 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +177 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +178 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +179 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +180 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +181 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +182 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +183 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +184 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +185 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +186 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +187 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +188 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +189 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +190 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +191 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +192 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +193 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +194 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +195 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +196 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +197 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +198 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +199 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +200 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +201 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +202 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +203 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +204 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +205 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +206 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +207 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +208 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +209 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +210 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +211 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +212 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +213 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +214 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +215 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +216 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +217 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +218 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +219 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +220 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +221 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +222 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +223 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +224 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +225 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +226 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +227 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +228 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +229 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +230 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +231 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +232 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +233 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +234 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +235 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +236 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +237 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +238 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +239 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +240 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +241 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +242 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +243 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +244 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +245 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +246 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +247 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +248 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +249 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +250 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +251 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +252 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +253 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +254 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +255 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +256 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +257 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +258 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +259 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +260 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +261 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +262 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +263 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +264 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +265 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +266 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +267 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +268 0 obj +<< /Length 269 0 R /Filter /FlateDecode >> +stream +xͮ%n9?OQ/p0 mW\W*W%U󦔺RR{_ߔR>W]WWӦRR1aBEҗ>WʻZb tVmzuV6nc.Ua/ݠu\)z+}5V Z])TknS,\K7huݲҗni!Y{/ݠu۞S)W >uN0N3֗nm5Y{/ݠu۞[)Qаi.ݠu۞{J_A붽d핾tVmO}P=:C5(5u3O7hP/jv$㍄vQmg/\ս!1_8nZŽ(L-'j͗>V5jerbcّKuR{h*/}u{jWntc0P+WkPwKufʫdZhjM>V뺻j/r4H]j]Y- +|u'wzM|c޴hM| ,{U2jgcД U>V=[}LZY(ʄKeͽS&T]X,{gvKeQ|얺ZYHK׮ZYkO]X|$!kO]DM+kO]X7|h]?uc޴!vԥzʇNۭji}}_>VMpmBKe=Q&T]X,{h.}{=P.}{=S>>Vϲ^E~jgC鯤]?uc޳Z]?uc޳!ձW՚/}{=jwԥzʇ_izʓ-KKelڷ},uc޴>-t<7wvO]X7kǮcU޳7Puc޳y.}{4&.}{ݓ-ɄKe%]?uc޳7Puc޳>ױ7Puc޳>7Pud,w}yϖӰ{/}֛v\(.}֛vݷ8jiW^c yzӮ#Y|Ԛ/}֛v8ji]{12̗>V=jlqRY^G6ci󕏕zϦWg++E/ql1NsRsrP8Jgsۋ՜|ԛy1}l.t\MW>Vͬ2'9_Xwsbbi~|)[*7T5/!l +\;o =C=×9GECw7^~R{E导I~&ۛo7Y\z$w?{oᗏwk&^s=Rsj'B_xZ/?}5 Vf6~ZcٰiuL?t?igC1l:雛6~XXІOc: +@iuL+Af?!h1m:k VǶ [;ɾ/K{ܬ sTYS.~O!kNzr{q.^sަRxl*sRxz5}tliGLSTmQ(dڡ*nzE!U)t[GK +Zz^Q4?U +BVV(B[S=O/y"ɩRnW2MB90ƦBu8niL3Sm]M/)ۘjgzI!T+tW'KQn][aɰMU@BcR֩ҽRBw5M钪]%tT]R(d:*nkzI!U+tWsK +nZڢ^QhT!%LTmPlާB5Az%tS]O(d:*nkyzI!T+tWK;ẻR6}MBw58}@YmL+Um=U/)jzE!>U)t[K +_ABeRީRBwuM^}R(7HU)i:r_+ +Jۺ^QȴCU +BR趎J+%tS]]P/'趧J^RH7< +ɓ  *>J^QtXU +jBR&]UBwW駪%t'U]-U/){jjzA!=u6W)'{74P:+r[+_S4:KmR/c(:3RWtOTpWsKiK-ꥄUgzJyOPyc9+u^)tʛWg>{_>S@QJвȗ;>Wg{_>{}z=|S{W/'_ɽGzf?^ȋ,}3C~VEG +*X bu "\ؙ9=Jx}gz?xNH>#TEhNL9={#aIV=ǫPA~zL^-&wܫTNxІQ�P8Y 5j{ɈS{їS-lUòzӿZE{9J&bZ"EĽ:Q +L^͟297ѻ krϧ+_Syfw:'/y=[~ +׈=8d ]?1J̧{ iR!{[>ӯTޯA(|?V?%cy -r:EwGU#lh1C?Cqc籤Xcͣ*J^+'㿨+''W/5/o> KWRngd|v𨩝<9'O^[mѢ[qY-[y5~,wJ+FK-&C(nPp&+>sJ-J%0\eE\N +4"\/c]~$ +އUH!3z~_ۙtvKRiۑ3LvsH8lgR!:\=x&+=F+4\hg22Ә_e`WcDʳ WdOwK\<@Od܄h8%!`,*/$g*WU|zZex^3XIN>P,'Xi8d1ab^8k ,^R<oUFC]aD+T5,ndV*g28WeK[kg2H=0Rh8kXmfYó((B;oeNdLşNu`7S;ΐDu(vY{aU~zI`9iHN?7>O IdE 0=$@jK>RlOj 9DO3v<,'"Z};}~W&2xCFDeQzhc6׏sDZPu.6,i:<*N)0qrd6Ж ˚;ouRNdsU^dXU^ M7si􋆈 +.J% #dyn%l=2Т熷Q2r%y_ȷ9% 0xR>oU7€۩ V/':JXYf� +)Xjq@32[ȆIUKk&a!KK00oZ?8R07 +>Q=r#A^24 aj0Gs# fZH@F !4^XsIV24^ 6P2Y9O-k=!@.sbZ417&٤#2Z;dن�JfBF&a: G,L0ɪ ECIl +1/24r B.UdX%?nugC�l"2L2oC�rh�B\v'yl q*HLp�D�zBK# r*3@91{@PG?\1ܭ�Gi d&�fSEfF1O'#�pxYf�lt �I!2�4 Re�z2>,d.ǫ4Z` 2�M|hYH !qYyX?d ,3�-F76(3 2lbȚ�hR(f@YY  +YQ/Ŏ~$& /!=ocB?g#PcHb"�C6(dR�r5yd#�2uY qi|l#�ZrXl @ntYd& Xm h"2$:l,c1�E%ZlI\\Uy*F$&H0 1�ʹ +d#x8"3!@"[6'JZEb�פM�@DbA"{ՙ�}t�@k9],#�ѿ=8,ӧ�gY01�}; 5D]�ZH�%2b拌DbD,CLMM!Q7-toB�$ɽ)"�Ehe`YxLd)"!�hhqM&nf]D:�\6=C�2Dd'瞵]bxTwЋqjVE[%o7 !�+'??mF\h>$#X_6 T^XQ'wIC !qa2oB�Zw8Hpe!@Yh LHt @NPc袉FԕDJ9^Xt@n/liD�u(dbG6�ƻj�F(#uȊIQs y:RǎSv +5ta p#˺ {iAN^9iL � +]^ "9l"?RN%'g3Hf&zMdSilj"?2h# TMd:5eȊ�(E#�zy=[& s�2ʿ+˚ �J"� +ءn4(2�P3;T�+(d'"y{`t�@屫 +N�!6xId:�??hR䮚)ϟ֑O|,"SΩCh?z<!S? =dU{KI":JeWѾ?}L1J־tr}rȑE4؎Ldmh9MxU亓NYdU%U\/&ftB'"ֲ矬&C2S,MÐG6 S]\vh/D)y'֠ľɔOr^j@TLy'bY.xZȔ6/ϗh†@&h&r�E*j&pLrqn�'M3tȔOg;)?RGo"U'Ц*aLX6yسBGx?fڶ@2z"S!@*=_!@JpxI$�lв�|'_#Y% +|+SliPd*99^O3{yn,fY +�K>D\ + +ZT�s†޿?!S?9HCO'nO:ŋ.v=oD[=㹻)b_ѹ Vq"I^Dr=L}:eE"#:`׏;.d1YV^:�@BTtQ\al2ߠ_(s$'CkE顋lrQCptyvIFC@$"*�&Y8VX$I K g-9@aG,MVWV�9އu�PZLñŭ,) ;UflH[ �wȇl +_Qɴ{)~&-FȦ(`d"sYT0 +Ȧ( lj\!e5h}TT0cȦ8�N݉&yp"�ӑk_ +l$sn }98Ė9|`V|?U;ɆdFdarFbaK4 +$nHGvpU 454&_)\ #8չ +S)@5f(IFo)dS ci}B()]Rs @@_`OYCx +^m*8@*82ȦP�1C8~NU# ч[Ml.\U%0*;{^A@x":o#;Hx +)@aFj\vl]ڵlHFfύixΡ�vrls(ކ -͡�t.  +D쬠ؕH�>m# ;NHʵm4^H� hfLȎH�xR6oϕXu$@dG(PV@R+ .pH[zwާ@�_ܫPsPt 9}M@LȎHda:&8$S$0Q*"#*-RM]"xZ)_dG$fCLHM2?E8%WsdG$@J`6"oDve$`;, \ crK*wK)&̱u +@HOAdG �IS} + +@3^ qʷ+IFƒz}BY69~.8\";ʤϪ?\�jB#‡)XcpT ;0Y(|,N�ʹCv$ BύR`J|x"9 +B3r71 -HSPxPSPpš̐)u<� 9vy:U q'# +cKdߦ #H@H!9=!2| qdGq#qґ\tw@PhHS1֐ #G&C20� 9nS%XlB�t+lC*2}/Da�-EzyS";€);ӆl.ILYEdGqI2*ָ[�dZVݛQ�RjuU-= +@bW`2`O9 / ?\<!;v;ؚ i "9~g*Q�=1}8DU>f*uXJn<cm+<c3|>!; S:`6 +Dv`X:`ll#Ȧ�; 0e Yd�Fpɏ \:`lA "�$Nfo]Ҕ �2~.΁5-p8Ȧ�G\�ho= +@hɁmq ܤuQ@-L}N6cQ�;XD +hFgܛ׎ �ٝ4C0 T +]!CQ'B�H$9dvwG 0BH5d[ OVPQ yEz^t2$$:n߀o@&}V7P ( (o@ِ}ʾe߀o@}ʾe߀o@7 ( ( 7P (7P (}^߀OP{$KTx}ʾe2YeRz+" '�e P7 +(�eGPI?(.wp4}@YѿE@2t"[eDPF>iNeQ^N e9MvPF-ce\Js(+RvJ(fVBY斢+v2ltYBYR2ʒN�e.9(/ed20"2$Jl%V-2<#Ⱥ$P5i?!QȔ6 +B(KtP_CIE),F?:cm2P-2(1ʼdN2Q&ag,g2cu +)3HtI:ef lC81ZB(Con2Z/2:E>8RERF*1 el"[ e⬟B6r HY& w'(Hm9+T�ca'2zAdSu8㔑~*Cv*s|w*hT3d+̲ʆU6YVY&τ9_+'>ʶz3T4<#ƝHerTFoIn)̒@"d*k_ ̏ߟg'Q :D+_SRٖjyF*CĴ 5 J*sI`C'2 _e ,SD+Rxl42K*vHe[)lXe%kU, O,ʔ'@WJ*Df(eR{VVJ=7:b0t !'#Ph\L9Go3)+|^9e Tv >PYh4Rz \k!E'=NHeI L:ŕ \.܍=xŕ!ӂ+ÝyqŕђgieI0Xf2^dW\yeUcWp/zE{ k9X.WGnز +IH Qfe4vq@V4,& ˦Yְ 7,N1L#!"FS* F2+!WH&J,4J,#PRMVbٞyy! ˤ``FV`YEbe +, ,C*r˦ke+kYfeHgX/2re$bMؕWVU^ ^шl &cт%) @aeL+L0[Z0ej@ , iː6&pA l42_rʼ^B)XxeBnᕑWvX,,cगWܐY\zrӂ+Kn\Y|(2+ZepedhvY\}�2 +&S27D6Al�FoMd i'ceRt4Yט2S $M)@ C{{ƔЍa̛Hg+35W2s4@7S(eҔ2D,4g5 u|d6#aF0;V|*D6QFE6Q)HZ27א2r"ƀ )C"hq/RFT`"hHya㦧ORBi +RFsaw2&m;E*!:@3@BF?!Iec zӐʰPsR&aku܌Yդ2ȍ f3 7?DtpЛѻf4 p 9†0;|l3pumSe$ĭa);l@(Nn?z`'�l#kB+N% və +8evO{)*N +Kێ5,!j$S2<jNvVfޚS68ul'N)J[Dqʐ2u>qМ2K!9e9}{Ӡ8]Fʐ͠2 }غs!=`ߔO$ :?�*T@eqhnP+*T[)90Z)lUfP8Nj *Cܙ9T:FUUj>4|Pea(h1c[F3)XڧPe8A +U47B< yEဏFjTçzC6P:@?,UU)쮹&=O$y, +Ua4X"QehA뭗IPe5Fv's +U>xFoO*Cc귌k*@֨27xϥ#)T8h-) UX`qfBȎ�g, +7PFU2 +Tʰ*Ѩ28Kːr|̟U=ʹwѨ:6siEnaDYehJD4ll\{ULQ!ӰʆQP*'"O15Vʐd.~O +CSVE6h6ѫeVlC+ÑqJQ8EVV--%wMO{\W6r\Xh\! l񹷺RA2%WeieX(bTBOjZ?[CZC(sD+ E'2$1ycmCM2se#42r.M QAҴulU%ʐ)t 5 i(`ieVB8VC=rװ2X0ae8@' +V6>럚Uܴ4\! 6vDvD&vf n}qӲp=~*CXdc*GN6Vȣ*:ž}P*NeXY + : Nnɢ1ʐۗ]^pem0 Kʐ.peXMhRr0+QF3EVD++ ~,y.\6C>}aqey5 ɤX\v8^XqehŕۈZ v dJʆ)+Roxe`ޖWPc$aeM, H�vWx .#ռ2W >~�@-vye;W+Ӳo^7l}d߼7Wm&(7X ,|J ,}~-�v(ٍJ ,d;J l}&yelLye.\t[+vqeW!VZ2lb\>,7~pe4{W7:ÕH\М +,Jjg2nI6 ,c6kˊԷ"wL:#$L:!yNJ,(B,C[!F,# +g2irJ,X\SbIJxHe˶&sIJNe{ː\ϰ9L +NeHe_,J)Oe! VfYC%Z6ܲ2y9FZ RRJgB-h!&2- Ҁ [楰[渙 ,v[8u[F ldي-C ifeQX2llH3- HM[u;Öaaa lސf[$&`09ŖZ~-Kk9E~- I`''ز-[&.3lYvrgܲMrˊs<+Oe} "2d^FW8y ,-o2莹- KleheD6˲vŗq6D—h?2zn)ˆ1a>/# Ve[sN/kܬ^Fq˕^PM8xRTur2PfeL 4|\@^F։o3.蕕EyL 32llem/"Mef leG#^FKqId^FD{Yz {2 PlzY;2ޑJ2 +bTiŗAg_OehiQ5ǙaKd*ƗFg "#wŗ{/FVWa^FkX۶^vl2Z `FJ/Y|YGCŗc?luҽa;|Ye""u,"Lە_Fwne4ۆ1�3rki4M4̸)0U)Fa~ː* 5/'V| 8l؅_Vq{@ mEL#Z<, ѯVd_V >1Ih@" ~YV~&}- _V-f~, /px/p`݆ +BYedZ7嗑ș.2*h/Hs_fm:ǗQS-,{$3aN"S2L`0/ùQyc)~Ybf/;Y/t@~Y¨ *2~_eڷ_F|+6G_پP cT>~\32 +9Md_4̽z~Y8z.�3 ucfN,�3?v`fZi3�3 +d<l +?c�f�" l�f�/`vAdtVg'|"lH1 0クg B2-L̐dTjf4Ky=/2$5#Sd_$X2/ w\e8DՍjeY\0]d\F@QZrY9ZZrrYܓrY>Z-K@|4,L<34qz-,q0 ,b4Π(q!zt-lA7A�XtYTpuݳ40.l +�8l_1貈ˑE D'2$lFM`z#{`Яj\F/uCr[pY@)pDYen czN nGҟ+ q鍸pyʂЅKtce*系\[Hae,2 Kiie8߇a;b]#Lː Bipv{�h`@lJ6ܲ/C lhbCeKe)p�{&)pVODCfe4[D\k' F:D6AiUZrxn4)2|pC.#Yy#kjrItE#w)pzQv.vBQV\6-n\9.C s5 2l7紂ːFj<�\ԭe (p=\f2tD +\͓2 gW2rЪeH/u3A.'"m0L-Ύ"K6Cie5 -H24@V~O .#DNe O?"!qMXh A6:D.CT .Dt$8E.C3r82;ўfr PT+p?E.+SNOC.%Gq%kt]*]EPb3 E1*rN"cDvxcX͹4oz2f5 gaE@} kބ٘ew~FB»]#MU,]Fgݨf ŲbZrUv^ge(`U`[IY6r.Ee6`YVlRneRze)W4 42rJ= -#Z|.2ZԺ6= e*Z6vmeϹ5 f ld[jo/24ZFLQHB-ݼE`e 9aв-4}UĘ|PE<ZF8&Yf^)h +2-wm"S2rkT(h2:iީZ(fڂh -#-Æ}[e0$ytAkYd8(2zx Qd [r9}fYc:,Cʥ ?Ne4ӓc,C1`f=n5̲zx>'2ԂYB8eIq,g72t-,2^JWhZt-,ZFvrвZ- >6285b ,qZ,Lu - ̟]e }Zv?7C9l p'w !oChQ7U +=__q21_\7P K縈V/}Vz(p$͗>W +=c!}SlboXiV e]mM>W +=CO˵[/}9+le犽៳b 3M犽៳bXO}Q+:_\w=udmTK+|MUus޴8 MUus޴8=oEUus޴0@ɨK+-2犽i)}c{ڏ9T>WMk?s.}X~#kP]\7-h(Cus޵iP]\w-?hP]\w-]/}ػ4vlbZ~tY#se޵UΡboZ{f(.}؛�CucʛCus޴cEK+u2犽iM;犽i9T>WMk?8șFQlboZ{ gΡboZ~0MXP)6]\w-@S@QlbZ~TjP]XчWMk;犽ihFboZ{?(.}؛ޣYvե{2f.}X{S7 '.}؛ޣcaVFU]\7G*ow>cr6{փTus޵٤Η>W][رD]犽kQC楡J/}ػUOU>W][Q )6]XG5tmRW>WMK?&7-MN|s޴|s޴ݥjiG)eI+ϣlG+n>N[liӕz7 ɆW>W\=YЦ+;oe~G ϡƟ?W$H( +yZKJ$zس>N4|=?t[Wg?{s|O+:Y]~{+/>w(@9]|4i˼S +ܐwAιS +||w[RLz*mF3N<*M9N4*=)wiTz:OSTJs|bPAo6' +T'"_cEZWY{9h.SY!vYhY#q&)3C⼫i6QN ˡ'="hr깸|" /GV*#-Ga,\.mX]YF4>" F/L+Tf[r͓HL.8dskgiBt"EΜO1|ʙMy鵜ʊv|: J:KnIt e<'*>8͠ŢCF8U^>,B&KX*CW-lDVc;x:&+!@i4Q~$[ۉǦ?DƠr!?F/Cyxl}V#ʅti| [%Nɫp{hy*H2'F"hVGoADȿ"rj A'2T B?d"YQ|a['"O\j?2]1g"l}-_H&-EhLYr/~P^_'CVHUUVhhZp h +2\*E>})J7ei,@2>: {ܨ]i@pCܰ<.-jd!e5 V]]!H߿,,"rU^4*c§D@㉌8|J~`Ҥ8d,2ZZLǤ%~@:dҟL&s /w*y/iI(Ω<@?,6Tc.Ǵ#Xl{0X4G,/}w0kBkEOBKm +]d]Vb%Wª!#,{Ȱq8d +Dcche�R!7hOi�jGT0ztytX�YGDM@ȒaQj>-@� 9)n!vXWLZiB+)xlj�B島 +g;L;,�mŮ`D$ סua�F PR4jY�qq7�%`ٗki4wvrz )Px�sK :Π.�sgy`J:_B;\�^pXv�y ,:A;l�+okދOfz>N&8�X3ۀpGמ~6 ax%Pu<]:@:L@_ VƞN\7�)\IgO.fm "Ya4& ɍ5 ~41:i jz?M�}\h\%ɨp|0LaIe\ @tX vi1`&׻B)h X[?#&�i3ia-&¿j0vF&ٜ:�&�M%}}vK?J0gd7WS htE!hq_[q�w8\�eOUgӼ jpNͻ1jb8\@3Nռ B#?\@Ǩ$o0^Yl�ۥT5t y!Z=�-9Շ~Z@^WC�,J;�XIt$,f5cy=rC8�n,WIӼ7%_*~dԼ/鵤tp!-�99 oiaVR W4KJ[�W 7 jtݍ�"T*t⍏1&M�=|J"9L`whG($ʥOm]9/A#h9F|ԃbtÛ| +Y;Na5i>G\4ck9"LxCa|umI[`u˾AaN:S�h39�yMR� 0;�:5,j P9B4͟Tf Z$5Լ#ؾB=<@$syYvxz+ch�oZ3{02ʖauM@Ŋ!d8L@B5o +'%�Cf4o +QW@@1;&ȮIgJgrq5[Ra03i4G{p1 ,C\XruM/�c�m-M<�"25YM`RK?<�^uB�#_AD_]#2O,w̸$ch5or(ө`!myWry5>]Wnh&%owć1}5{#/}jF 1N La0[dӼ ea*0@ +xUu +0x`CCpF ʴTLF Yk#e y#7}-F f55IoYQӼ>:Sм +̇N=&ӼXF@"^5Wox6o `ޓ[5E٭ +M[)Wո `r:�<^mVHA-&w:+LX.=�^ +0Xԍ.5|His!@³6pfrw KCrj 1kًwi=QΜK|b `7zƎ)9h +yጵ7l�S.tڀE#g0kDـP%m�0i&}�Rs> \V38xv�SOo>H3Riw#9`�Ar>@r@/ F>�A`ieVHx'�:MMs> 0)[Cu|�0>�A^e�.UO:Mw|L� 0A{# }GL㰞7kgG#)wYԜHaL%}Ysz4ibF7 s'Rr>�C_x`y6 fc߮z.ĩ\�F9�.X޻i!˶ޓΙ/~.f Lby;7kSQ ;or�91Yp-zԜ L( L*9wuqW͹�Nc!]�yJ͹�vz[? +I9Ӝ mx@i`D{�o�qwHL@ 7]F,#vDQL@*VX  &9ΦJ<(e)<�ߥ{3|PY�y:}b@ GԜ`̘r+ Y�7YU1,KxQs Ȧ^Q89 Xu=�t�s] .QdӜYq=�<)EJ<@lGG#C"<�>O['ZQӜÄV=YS9bb/\*erL�~,u)ϛ HJ5[ͦS|j` +<7͙ՖԽ rUӜ 'xL4XJ�L+σf u &尛�b̒Cm3wknUxpM6 Ʈpw�M|�5<欿w$4m6�V&.wp QD&m. s^6d 0Omsp_kg6D!&�^0׽XJ q�f#jlB\�4H]԰."QHh vŮ=XW. 3tN QyﲴD`$Y%Bwm.�(~^]� BN�hX!ԃbݫXSq]nxo4+e7Q#Nm3ݩz +% 0NPӶ iK|fKJm3 +EW/]Ch#NJ4v COm�ZLRHVh̺Nm�ܕxM{�hϊfQ<�䩈w� DPL� +r3k]�4 >ɘ�A҉pFTL@ޓF- Ȍ)s=ML�3VkW21KK m; +`6?߭ =qo˴d-x EŴ0 +.I@Nj&8q݌Y7)IJje<"`v,aj[hIWmw,[֣KIp=Q fK5L?UW̽qmcm@tu<}Adq�# DW^eL. f#Hv{mp+D}�hcD}Iom*58W047+~Mv\0}Oq3x0^D}(D`ƺbg=Q1HJS ZXѕ 6&f 8gJJ+Y*芅1i/1MW.@09"MqskXDW0$eq7=S h am^f1`(gb SX,7xF}\piE.&lW9, +KLq#Tve6+x'RpЦek +^u,.离9-9Ljqs 7]5+!zư7 MqDWE̜YT630xZ-$:23v$w%|fNnx*5L ڋ> 2:@k^N,jFTe6uaLC40 @4s4LE= rU3 cv\vc^e\yl2*9t +Ad5Krn25:&|G@:_;h7ÈI,T^?i)ނ[ClHyh7\paʶ ֘=1Td5%VK2EhijcxZn E$a߲h%76s7q/8 el)IomGRcM x b⹚dzf3**c8%Qʎb1 B)3g. 7yMc]wo#질{P圝"DAe/=*>\67:fAlIG8vٟˏ9<ҮL>r`x{k[�Y +waF*e-[aI!b&7uբj%r犘XBzـacfV1x[&@߽ Xў۵r\5W$EC<4;5sl+r:q % +E;yݭl33#l=R,"F*rMf`lSb dI3ȶW&h~jSGi-<"ɬ Xm׾%$A2zpm~E%(,tŔֹD#A I<4c^ڑ8Fm7X<2lqu=a*<kO}ݐjύ}ϲ `&nc6n &"aO+nt!7SF슞Cl`dzΛ>\+Hv={3E|H6ء'"_݋E\N6أȱ޽xmnMzjC6إl6İ km6ئ1&f6ا~S;t^ېV=}^^^=Y[onzY⠈`Mӧ6خ'`q6jVBXABvu(ЬWY)v5$8j7mvcpRΩn7+Ľzp+gUx H $qSĽi|b[Atf/uzA,XP\~#K[nYgg6݃Rg921VHMGeKZnӑYՃ;jbMEGUNzE2; +D0{{K0msP,VNM#dyіlwmǺSSRֵNqY̚ 9`n9|7VRM2e>Zoۑ٢ OqlkwPD$'Y9qRXEIcfo|J)V[r0]96e;6xJWMжjĘa]ʫ)ZfnA څ c# %i;(6Kxێ, +o-ݶ#Ay,qَ,Km%YZg_!X"c! ڊ)6~hm֙]ZwP棧(I?FдZN3Zf8e<(2h>ƃbe֧GfR +VtMs& cVuMq" }+<�`%a5зku{Y6P6Im<(2+{P\#*G_Sd9c `9LKmCZd)cۂJfoqv\ Vd]*d(dDZ)%Ned1s{I>NNxa~‰nډ+w>YY{ \9U-ɏÄv0N~\u4Ǐ8y[N~v?a*O~lqɏI?nO~źM%=q=.2kE[=qAO,ʃ,v4GCp3c(~XО8&kڦhOz\8#*Il_~bMNz\$,E`:q:w1eR <>d4)n~/Bf)n�w +_x-<>N>4"TUQQ!|.M{J2?g>.L1_'>N=/Bq'f9qLжpMDW6#z{|M,DtԬDZ]X] F7U<*kO~%p=qagʜ8ؔc`**}iv={ 11Q$㪴$Y4;> + }Ic ꘭=>m;/dv>q̗?. 1OUqĆqLmwy6z++ Ic}Y761CtbL-)n8z1v/r&n&Ұ䄕w15Jcs)|\e* 8[-.ңMz-F܍+u({$ +9xW/'{i<@5 e_~ ܕphm['ȥ}$%i>dge,q# ɣY_ * v^Y`Ap{C,^ruH;rϮS r\L:r.M ,FxzOc6RhL6DmcbsMs(?ۓt9٥A!qR B),9r$1'/Nlߎ+1B96@ڮk7ρ7K1/lzp 9~Fݖ%ǐc/cXSϐc1srKC]@fǐcGrM,ce4 9ljrl'WSrlX ^r쬂C.1'2vA{2۰p1ڇ$uȌ8rf8K<r -pΐL + RqcE~!n|a]'i3s/}#vWUqgȱriGϐJ0F7o)Bz;XɼC *: Z{y=C@l3h +/{ 9sKmvŽCk| 4v c$!'cxի-ܖĪ+68;CQ6aqn\&҂;D;s1SM7@g lp[m:8d>qWf;P̧ ٫Úk˟ȱԘ3rv!!n]VvG40lP6ll6fPAX�;CW[ϐcS~Ļ*6[%ϐcx2jZ6Bv{+(Zuf#$@؈QL ΐּȭU1U3&k"r]"V ="Y!/5NEDnͭdoΐ6«3䴹 Tq 96g)ލUqcb27CY}g1Uն6wP]i(#�`fqس׮vA )J '' ȍ'عqz+ɏ#լ87|$oau8 ']>pH68D 8]1 +mCZc�EF;jޚ?cLO+,]%<l*k88Lc^) +ָčXkqvp7Fv8b΍ +H:`R)&fΎMB,3 p7%D_ A'Ct܆M[?9n~!-:?89ng%xKrM&t#mxqߜpOv·{7;q<4C ɎpOv·{&Nv͇{am|w8^Ep':n&߼v<pOt܎;qyqWr"i'9nÝ8nMIAhIVBEzaa9PWx+ھh c'<.Z׀7x <A. Cqx00Պfϴ7zt713zo3WzwcVF/{'>|d*0pOz܍{6 a d'==q19=nQNx}i7?U lI2vў8<]^q=Q'>[z#Nz\Z`F˗<^qw1`JdxhJ Oz\ӄYF6_qujځ[/ ط?ƾ#°Lɏü] Ǖzo8i7kځ8٤ 8RD8մw1 E>.u]^qN*ÓHۘd7S^q2UgzLmb8]d98uu|\c F{٢/ډE0rU? >N6bZ8։;q#z|܆l{6dW5o>p7P АW0~Ѵ9ce;q+L쁏[-_qqX|J{?Oq)Ѣ=qVk8@ޕO|\?qK>IU0e3w5WI =Yxach3p;J2fqܴɏ˫'Լ MOɏcڕ!y0tɏ'?.ceW;q?ᒭ“wSO3ƍh': @x8o�R}ܞ踕Z$%iwr\j'91kiҚ0qLtay8SټDZdNx5ژg=TE;qW͗6Q|.0-]ŭ�;q$iǑ$9@�D_4VG:64:qkx\"p;n<.X'v>6v\boɎKm!>q.`픭xdn=qh;.qouvd K ++?qlvXO'%Mr[8M398۪v$( #Si';}FEvL9wP_F |c`DZǔ?qx.)qIs߈v" h;;SOvJ94ͅ,pXg2:fL9KjSJ 9qYښ3|b?tX&U΅|8k[v�/k ~nj\(~'8.$Ψ8ܬyJ�DZIT]@!XOp%%FV;q4!88Dh9NZ'DZL_9q\GP =8 ybxp\~>qętۙ;q4;qn*8"DbI=7NŒ@nyDPlNbz=17Т'3/B-9b =9no{8m�lpR<7ydMAF2Z5.2>4.˕8"jc�Ғ85* d6k:M�7eiɍCP>upڷIO'J )w;�Έ[HiƱb)͝XWZ \Q q9ͤ�to8Ʊ&sԸ'9qh5>q'WQ*LJC56@WY\.Oզmq8vq']hWPqA煓% ̦hmC@~#4;z5NI0ynظMrɨۃA#i'4 ,f�X!gsWْ4gEqZCqAqܤ^4Zz|c73:9P9Y%`3޸a�Z$8 +*:<4uZ3_~@dGӂG- ts@X:>7g�0`5(r8vkQ +Ʊ7j1xYy@b G-y0y +c TN׆8ydC1@]{$ZΩ t{f$r4`N+|Wd/<2om4{<2ؘ1RtdSEMLrd&]DU � (Zq2[=1ZVx  :EG--m8JL0B]'� 4zO&N�Dю' Mr ׊m<5UW]E~/xb%v?Q.g6E 1όFkIn4HB!mh3:RqsqC~{qr̔1p *'Gs89[(*ό{tfK�ץ3/όӏnuF''ò5' 'g�/$ F@coy\Qip8 Xr"Ī1A@'Lqy#}'ƦQSt i1GFxe'..ZxǴ'-]7q=Og LtmDqp@kXڤU>tM*St'V=vXz8"cM('Gt~`i'�" =B;*S$]lHqf3+N*F.L_ߡk̄8TŢjy*NܘoM"6U6y'E9RZJ.ʇޖAa3Fkg8o|;+N y68Xq>n8m>xQ6ºj_\xxϊ6MVm@qHVr0$HSÖmt8hw8i Ԯfg I;Όs2LT3ͿF;Xqr†efGBHbSCʼn՛e)Z4a+#5iL{R{ į3PL'ǁwBOi)N(0>'mZ\G1G.^zJ('igQ8jR0/maZamvX0R`q ('ܢ (::X@<=`q<+⅒'/og 6MLcJDlNJp6y(KRdGɠn֘l8jXqFX^PqFXf2 B=LGkφz{7;)NxZT|j'm韰Ļ0GuSs0hGi6YHqf V#8RHґℤ],sۑVJ%;ƽV Q$j Rؚ>G{TIqlNOGtYHq^R#9y\LOQ-7 -Ż�Q9PWIAqq()D"@q'UǤUJu-q8IT=ij쁉c'{JvMG%^ӁB̷:F6HwFE\%n~#|s +v8)W-CS3G1pczık1ù(qBcqx&wܜ~ (q&Рpz,,wRѕ'_YzK6B&aD4Mtwr�p/MnxAcG'xn6<&IeJAvNp pGZ4˾s⒞WYω@+^̮י;Iv;'Nx$C*3cS.NMqSva[޾Gq;OV^,Ąkҝ'sy{6N$LZ87lSlj70ѼWljt3ƉӮC_Mnpw剶s(fA;'NHxBφW ;@oӽ8!}gYGKr7\Gm+ 'nNs/r!MqS3o%.3ȝ-̰/qcS:^5M҆'mbr60čM-{MUy$ No8Y;l| +87Kar6\Ahq (plhqtإ]n{f$9]K톴—!NJI|KT5 *Ù9PW?aAq(Fs8o,1Iq~Վ@'c)n~#PwOc|Q XyBo'OA+rXx km8Rl)Z'q_03}' Pqܳ8nnUsM'={T;W>Rk'yPTH;T8J掊cV8Qcdg]5cBʒ|FCűhSO/8v謫j őMUmh u8I\K]&n'ű:n9P{q9Z:P6GF(f>p5^QMd2yZ\CI`#C8f)bYqLSlJEmG  x/Pq]&ezTqGű\L^^r}t8փzVPqLgQq T8r`U8LD{*u)ި8Vj�ӡ6\K]qGűG!xžDzVж'Hqd$'`2k;).Kd*=*bdr8"XPqהl$1D*n8=Y6Te Ύ4BQqE}<E%/OVMh8L]ͶY<,N ^d{5čǼHvqhq<<-n:'-l8LF1iI 9hq wl›HLőĭd/ű(mvZ+ڣ4Ƴpq̨T-\\tusBpV-\4ų(R..ʌWA#>fY7fop"t}?& +cBǟ5e7._/>/?YĬQi!p~~r|bҞ;hMDHvy~0~'V2XDzcw!'I5 ϏE_G}(?. )ɎkR[t$p]Wi(GNK X_/{/%<]̈X`f ++_�3O/V~|2;tX$ŧΖ4Rknys'!&?'?m^8n%><+^ L$(+`~،O2t-/*d:05yz{Ί n??1Odǟˆv$Xx$~|yz˖/S@ ƊQiQ0k=e5k/9u6ο8'yӯDK;'KOd`sό*2yTgFU?D9u~5BXOdr-ԏ>qH7fh!h/V?HHY ~x J +K^ꗆW?7|f|OYmj ?7pG/sg;?\|#HﯚH"7 b>'qd:PϮC0Wv H_Wv:x" >al$Tfqx`mNNF0??h~Wn\Wu1ԋy]>ڇ+x1W.Ϲb 0\uCDu?+"]Qu? +.0k\Wup.HK׵s+}[4)z]Gs]4H?}u}|nJ{s=s8Y5f:u?|䗕~9>=܏>>>S+~|ϩ\V?}u}|/$s}ɂ`׵s}!L/Jݏ>>>&s}d3lƼGs] t~9>/ϹhU94 ')~ +gEL)}d<\ŞE>q 5o*u:q)6ܻM_q4|?=UK?޿_#lw|׏ꏟSM_gs6FW|O~_⯿dk/'{_A? .__m篿7d/g;_A?Z ɞ_O6&_v~m꯿lTd/'[_~A?ۓ r_A]hKzr} [/G#y/Lzdm}Yt3)둧tfc=4GfW_ߘ=2¾μG*W_Й :3__|AGW_ЙH :y^_}Ag6#/}ǟYdIJ/G#/{} c3S<t=ƾܰG_#)'Xz|=o7%#_-# GQ\!5H0x[|g88??A+ܯM`-p4 7qU7oKgjvì(_t?~pJ {2# l#1Q:mi3e%1zY#c+uUY˷IW3?G#EZW?dž>3aPm350gH _woW?n}#`z}~bE:j$ps:U&9ǝ,#zCm> rg4<{20*->]5?xEп_'dlOs yLWT pS GH-|l6jK9=:3 J\pģ9}c@2(w.=?CK>$WX;Cd4@Ԟ-{3?iX~-$zm? jBZ'!֧Ea,o$g4buWR#B^ Itmr%o~ݕ_K-]ɗ>6\țeBUWy#/f]b?K_v![VBL&r%2`8 +\縞 `a7.nH5:¥ lKIJԺؑ.eV 0@F&j7N $?(Lʔ4")s\IL |H*qħG&iQUC*dQߴ\qD +>4(QTMKDM0Gmԓi&=4a_ 6y1.yAUE>5aޓ6#xOVH»fEy|ҕ1|_4aOKLMqdvqFޡԔu_H>(Z%+JD>&e+ `$G%ܷ;*چkrj5*: +>қ[ij- b^bRYR=qOMcܿ&+J r@#S(Y/)>ƴ`Ҵ!4jJO7|IViOr0$c'Ŭ%G^tjJ8֍of_cJOmcٛʥ0;"˦51)?,${u)B7{=4ؓ6Jn4K)>KBU"H2P\O0ܒZSaVp}EnVSWluVn}n%=5~9ćJJ/nm֛ͼ1"1uw$cjݴ躿|^`=fS^WW2i$GU+gESZ=t|Ӹ-VV-H|F>4Eo0M/s}MSR}Z_ PwQN}:֩)ө%ĮKkA!E!_oqeFSIeC?4%ԗ+ҢxzR8=B)ZɝƩ5VAgi6qQ\_qe\zr*"#q/ڛ\zBF: 5aX]J{7M=܀\zULvtv+OAUjkm2,- +Z5WxuEfU[ZS} +@fޠ)WnD[8 P4,豮PD㵖!wS }/+wLZ>Jo/}_NڜV4/k3fZ~\=L]FFnƦi)ohVw1[? �n{Ծm�#S%YuedE2i�6-�axȮ x~)rەovúb[Xq2桡VO hu\NtڀM˧ @4ꊜoz=ط+ hXNK6pM`ezV &y"v{?]ohַ6,d3>[ %g0Vܱ"y@#6�3c�`]· !7}.iK.3tJ:G9M�f,M¨ _t49U&Kh 3t6``tz86GǑd#T�pi໤/zNnɪ6Y/`mU�21F�p9l�}<5/󄫛=�>h훅F#5=�qx�pj䋗�X77iH `EZIj`dbh0 +Z ˡAI%iD/%�1n%y89^ELyt�4A@ME)fw&� 5szx�]ݨq"ؘ*Hc�=tӋ�Y:eQ`\du|r8�X?ԼLuk4'=�&;*b}Լvө^*yݶd7& wdӼ `hU.pyvi c ȲGӼ Ќ;P.=boEg.sռ(7ޖƽb�z3=/ACJ�a;@%�jO2RӉ. Jp�XӼ(*N=qXM b�'ZaHH?�\1y<�z@�0VӼ(|uKANL<{aksyN* �5tJ0�eh�UxY<�󹦆R6�XMȉOhO0{5]gYlN`ʹv,%.Lxfj�HP:w1�\Kv^J�,+v^ � ԆQ�;28|j4�XVAy$Tk&qh"cTL*>ccTqZ2GX1G/grAѿ)rDmӚ?qa?i$Uw,ܥ?e '4wco p=�x|I5ח87Hxbt GGI| pD1Gyt!t#o0Zg>i>,mG?E#9cF5lv  $c\쏛5>135F0C +e4AMr`"#—ߒ|i SlSC`)?p9%C[%.d惡KL=!\/AwV}te\ʻښ! Rtnoc& 뜣6$gihhnڈ:!`aǭT%=?Df0h%RSy~yV&Oѿ5<0bJ%kJ?Vj~cr'>f%K# �'kluЉ4|$͆iPt>ޥArXQ+4/wF󍠹=凗̛DޛHG*"Pb mV6X>W/o"ANs@&pH2Pn)>nBBs?�S +kK'j.hƁ 1�S3IvTs?=aCq�xsu ?m+eUIIȫ 8d \4#Wl) ̫؟F [bIՉs##4ONsK͗:%؟‹GrF.#4S|҆dgz[lvمG<\w +Mm|h.]Z`zW| %'0j.'o"4"0r7EX t$S&LioZtA�3p@ S@bVMva+5}i.4Ǩ#ɗZE52֕h.9ڌ">Gs$G$lxMġ1]-JX>GM lX"+*?ʖ/E> #("iR`r%�Z'y�&v�eB+[)0 +fZ -�IZ1lhOI$ +5!5oPN$);�(?BEqМƖrhxZ4gh5ӽoǾPY�*"_UKTs|$  Q5gR+Yby@is9@]|M�s$[!0]fě�@ǨFoȮoR!9muזUs&愎M䨚3yq[U +N4zy[0^4TJS�a'МȲ,UV1|ָ+$d^&�K9E�4$<�Y&9es/�zf(L�6435mm[0M4a3 5M�^]L�EC (f1bm+lT[&9PފxXs3..-M\2]�$@�^q!,,oTgBZM@!iA鷒Us&̆ hAzK=z PUѪ}p),@yr  1Tb �h>noE]g`( 4l#=1V\)bn>l:Y @[Cȼ5&ڰj?h�|ܥ)א�Mi4OU>%0\RV -?Vi[0(Gg-#蟷yF?diTad\߸(BfQ|OC,7�h3蟞B:�ip4K $V,2Ϗ1ֆ$U;ʟ-n_\OrYKh.^'hɇCk0Us?Y!$i \O#;k[gc)>Zyb-NuDζeqm "UI++.'bHo_~<pjBЖ +*q%{IzS@[ @](CX �*fFC[ �%�!Z"�F}L[@AF#~kN bJ -)@$`{4&r9CY �i0�!%"A%~Q֭+ |K �f/�F�nV ڒD{I/2;�ުVk-¥|ѕsaɣu P0}31QaFh�<"Pi(Wb\-�\]Wj PL@y%&y"bZk�HsӨ78H+\!J,xD +婎uع&sS*% c)T,+&{"b[<�v-oĵ M}�)RB +gXJVmq�xӋ)]�gPQĻIPy[�K2`F;d&)fsR8A9WаUf 4z0\0&eBg=FCm4[¼Z{�g$Vj4KVG`8,]em�t+ +v2@?v-P1tAt& Hh@ KSzywZuw5EeFa: e4HfDde҅4Uڻ PxK^ˀ+F�h,R~- 淊vqFs%}>Ha'ij])u�^n4-4 @E:a5MRۡ}U$BN<ʃ"Wʲ0*ٓ0*,, ޱ>E϶CY+hЦ Fa!E9�s c%{�{7 ZȢ6Ӏr4X.K 0. IЦ6X[.^{jɪ!Ӑ!HeCiB ß"[i� I<HUX�ܷx~m;y[)K pb8=wfdZ`ޗ=u[�}͙?kk#r+R cl,5)@46~L[�CWV{hz*֛i3aY`n]�Cc:^ +% ֥RDJ1+ ukǛ .\j%� 5-5 zbʪZNԞ7gmyR=bZ CWڌYc)ƝZ| �BZJYYmfRN֖ +`zm[H3޼F dfZ1vBiK0K4R R bq0>j3g ˤqHiYK E92>`M?4k_,hfZVTRʳЗ_cgsoU6:nėdq?K_v)V/0k4ioZIQfZȌ7ڌpPF +( +Z()xTKS_Y+6(}e F-d -d^J@(>46S5Xs+^7i3gg}F|[ +ɠȟ5v-_.#hcc)e-cN>TTfkah3gnd쾁?kVмTuPSXY} E)e7Fd. +qz3X:ӊ6цTFORh3gF>Q Y+U$L#g}_hś,a#R+\O|%Iok\{-Io/Z.M7ѸCPh3U ZoZ~ڌY &Xo/e +M PtfK h?>EI[B[ޥmڤ>c�pULS0>L$0>L$S$0>L$$0>L?L$S$0>L2>L$0>L2>L$0ɾ>L$0ɾ>LLL$0ɠ}d&هIa}d&هIaL2-0ɲVd1ɴM?9K܍Ify>L&dQRJ@ɲ6LMJ(ŮP2-zAɴ.B,QP2Mgijͷd](ߠdE~u}S/PlJ-ظ`ɬ;K&X2VT!oP2<T.-oT2qal%O,;dع`0אe̺_d2Ucr pF'̖(/\sݕKV%%E.K&%F@ɰ)'JFT4`%ltߠd eF%þv*|T2k$y%tWmK/0K6haɲ _d]KnX5=7,Y,jzÒURp +%+ĒYW xmP2puBɚa.T2[;dhyT۩dfnX2uŒYOKD6,YuÒM̉%A7oX2௢j;LJ@i0mYs +eF,۩dA%__W*7*Y3JVJFRR4I%+@F%=nT2J;R JfWnP2AɬX"̪.P22k2%ˀz C ^dx7\(ŨY'l]d3[%!(۪mP pB*-6(ӄ6q@f${^M =[)pz T/H2>mL2ܓIֱ#jgU```|I&!k ի@ۙd4k݅Itv2ɪU\d xl\Jd>L2n-IFH2ۡd4hJ'1ߡdt wBAv@ɸJV)JH~(]}(ۿ턒5F.wP 8dL^崜Hn5('LA5$/d MEP +֙T2lHlT2�sAeT$O%+@UبdعspXڰd( H3PX= T2$T0VC6,GɜÒ!*J<< }.w$k+ |0< )WQPf>qlS@>6*]< jŐ0SZQ(pNCSlc!;9Sm`vXf2H|X2Dq4iHQ%(S"m=/7CT[�J[z08ǒᅮ KƫS�V )ġB%Cj,1ۨd`W6 +p ڡb�Q!CA%uIpP"N%Ch;;h>%Azv,Y(qUXֆ%[,磤,sXHpޱd 0dÒa*Rw|`ɴ!d+|gǒ4).4tYQؠy'c\$Ts`QRvN0~jLV`O>`2EdmyMxLqBB8do &' K>`2~]20Y`2d4*m`Wd4d`2jLhAd 4S_qɐ:vظd\C[>ܹdK%CNsɤ1d߸d͵a&(0<;,=3k�˿ur2BsqٵpraXE&PiqXǎqɰn9X%_V,Vs% sɐ= yܪR4%k땍-\2d?Ys7.J#gV< +t! dJV*`y+ Ld܆ ŵx,6Ò/u ("aH/kÒ! VzV#Zž<*K7a(SH[RR$Z ^tM^d@V5ÊlYdb4!jd2uaWk1QEnr9ʕKV8)I-/*Ec۸ߨddHVd�2q)W9 *pɘF.-\-*쥒A/0tc]Hm*d|weZlB%Z&6$T2 -#TJD <=,`)Q}rT2˅{l@%کd(jd*T2vz~; iJ١d{+ :JFni<,u ;.xCPKF%KL،X`8ywf<,ꌽܞK14UțB9]ǒa˫698dK=A%CVbT2�`t@ ; LXfIFEqrg6(PsQɤZJ|TdmѫbmX26ώ%+oKVޚLVduA_`Ġm\.#\2$YjN%!}.Y *lC5v;٥@QHe sz-MMewԳɰjM\h>DMd/hd1jB&Kkd`e+dH9`2LyN%LFQ;lwQ I;lp'>pL'ɾ>pL'~ɾ>pL'X>p'D>p/iN#dMK' ڙdVtiJוN6_B:F :p4-ɪ:ld 'QCR8و +;dhTL np2 uɬCʕM6$[&ceIvwdӦdU&.dHL6L6d3F&I6d2-ɬLlA&$is Qi~ILf~70uP#yhBLVvtF% ̲/d2ɺ\d&o&{cv0ل\>^&sLV4W$F&N&&[agXK Ed]RY:d*-/d2\'la\2%mU۸d ' m[|vS'``"T*:d 렒h/Tԇ^dnyO.:d/qh;ҏiKVu.>d4u[KFMs`R}`V%ݨ*t͗;,7.4RNjLIfA%wHJFӥI%*mIkԓJfËJFa=*rwv*Y=H,sPɐ$d'P}vP^$Sj4 +B:d/e뤒Q-;d'$I72r61ɖrɚuL4ɚ5 +z,LٓL42jd2zzJk'QФ'IWov2B;dIL L:LFl^djW/dLF'zY=QFI"(#3zM FMjNF A`'=UeCVQF eHYtꄔ٣)/HH0Rf ro2k}~qOJ=B)/lX)KՓ`HYdRzo21,Y( n2KA({Y RF )ӼDY*Q8"l(̶8onaqʼn(}8/21&))˶UseYR&וR'Sʺ.aOJw<0e4jDS/NL-0eh=T0ev`ʲNL7J, ^eo2) ldml~bʐ#/2~U1eݚpMnSփlh^0e=%vaʊ}GѠ,׉(ڳ(Zj{"#eo7Bl}!ʌ}#5+ʢ.2NR�|C5{\eQG+(ej.2 JL ,i˩riϜP6iNam瓍#'CIt2JO*x2^U'[OVyZ`d–Ydx�KX|l|6dHw˱8Ð!Xyo77>2\dh-ZdMw=6^x2Pm:�@�}#m}r݂M (A 3N#PhPGz;B=K8Bz5y19B +^ʰbhCx[Q&CA(CJAۉ(k RFAۛBAZApt6HyZRYRP8.g ,F!6a;ۋSʰ:< +TŲpP{2tAh;/N)˒nl2D; ;C:2zv>0eec8(e%=(eg؝RF*(eȯ)QVS7H̓RzE#zJY%Ca7JQKyÔ!槛dS+Rrʢ6s!i|b,4ESrF*K%A*r%e'Sֹh-NYyk2N] MdON~&T2:FkMrrJȓSFϴV2,NiT* eLf22vUNurvPY' ;'U2$tV"s(IvPMVT2,ywhZTA@aU7TY}'cCe.=UT=lAl6=Ied 爐 `jTF3YII%*[bOPYWV2NR2.2,UvyCLYs?0eF +iz`d\{Ô-yN&Z89eN] 'pCSV{wNY}NNYm^NN YT;y5v3,ioN|.2)6`=9e\@)ۍS&LRq휲"`qEsʐZ"I'\'fGu"vbpĔѿ=!ʩo2NKa0eo'RXPRhOJY,=(e4iA)'<&KS~O{~C9 +g,G?Z 7塅ҋD X*t8 WIO\>B�! fL9O =[,^Zkk|:ZGMr%Ǖh)bǵWq"cq5\hUIq.Oz\~qZ--t9Ok7/_s\Ǖ>~?x?i/_s\*k�_O渾?ޓ*oG| +i>#Oi1_sdQOc`OG}42_sdqW瑭5G?yhvd~͑}jֿ#uc=H�Ӽ̯>#H\>=HS쮟>=H?GؑN'yd?}@{ؑ@c?}@{~ؑ2t慝b?~H{Bؙ$ㇴga?~Hv!ggBڏҞuvf!fg +ڏҞgv! fgُҞYvf!)egOē�ݿGX~//*R;z3>>ж"8_8.m( |%wrhS//|~o=:�]~2?)-GkOċB]f@D G V~~GK_ k̵'Wth.YO]_uq k_/׾_u;5] +_2rr?. !=.hc[7~mOD7W&z4h- ?{C7~P|?U#pƿ'Т/E b'_hgq>>z58$ϓ$Zm{>a{|ꭠ_X$m. i!VT|gKTMR`Q?u \Q? KA?_pp+hq۵@$�ٶ)ghڒTQ+xH%-- Mӎb܏qmJNvvkOr/9*)WlHxfCBz]_%9isF$wZTRh]%q@kH(DzI=mHIQ5גiك)㒒Y#E[zT&"?͡<3͎=}mJRR͡6kSrѴ?HkE@[SJI2fKÉ( +y<4'&&za_VIi'*1D+^l"rFڐ6-'O(}П9, UPOM/A6;60Pt$4Wj@sx޼G/ut"HUBBsRn-Y-/ MzvKCB2 DjND2NJI`f U20x+oGB_szs7`W{@~X",%"}@.`�r| +Ī'H rE;DN&(xy8y'@O-AN�9fw=y'Ѕ$mAN 'nN Ҩ[8P�~L.nVݐi D +Bf@|B: +y[_1 .H< +�]e~ҹ�,vP. 4(4hYl. uͻ�=,;ـLߒ%$"�zDz,ߡ"�rPZdɌd +ۀsINooI>m�}%2|ʳـlwH`l2\ry'�� +,@. S-Kdž,J@. #Úzɛ ]ȣѨ;FUkU:(L9$Q=@f P{b襎+CP[»Y##-I}]�J*OѼ(lc@֧6cTҼWw9�qpм(27@.SaМ(r!XJH <\�$R.&=A%�h$Qw9R)JK�JYNmL74o +=WY&7 @l04o +A,�=eU:6 P2g�OjPAz7 Sހ6 @Wf&P Z,@%$BhT2Դy +fU[� }Y+�!zdA&b! X {Zʡ44ty�Uq?ml8eic�q| +<�0Is~$9!xМ ξm@`4՜ ;&CY,kklМ ૮HnKߐV(a`l@hFـ�nwMWnK9МFM}&D՜TAm@KtdIl> $^l@g;%9m�Mɹ� tZ��z*d]�=%f9iFҁ. >{M1Iy@YIhD, ݻb#߁\@p^>7 @/{\@yQ3dsQ$> -3Z"A \tU͙HCmhɛ�$�%͙�zAٙ�ZY> qX+;;)P�IC#ײz @A=b&ּ ׀̏a9 $ֽ kRΣ9`0(0|՜ C[o4&L�_U =Z&FBzh'v{(G_ +!9l\ Za<@G1~-{@tӅ(hJSb 4|̗?9@ptL@7sHtQ"̶Òm)m%mȈiYOwEG)wKu0h4˒*4g(nh[u0wT(o42" МA6/@A+\L kߪf\@̝={@q}+@s {yXїb3:88Qp#dHa.^SDd 5L#248!Vh!tEUs.�+tHs `] 9@򬌭4ܝKz̦`Mh Аgۥhzoeqzn1KzfiKs@,R"eArX"I,3o.%,ٴ9 Rmn9X&K,N"9~- +!"=XCϾޓЙ{Rgn6Dsn{R qziK$$T;Hs9ls@k9𼞃A�6;sb!{&NBu@E4i:X\9Xgj)at;^b!AE}{59X\P_"}18=DzSJ?^bDݱ \jg^"Z,>X\JYiSi9y4 )J4Z)R<,R}4k9X|kXY2%nMV8-hs`qi9 bvh)) `12oJ,`1ȼM["aq}]cy=xl0ɮ[xH3 ob:q0J-4i +82Vq;u@,ܩu@TOCY\\`m}Vׁ o/k: }eD +mWSl@譠cf}1dvq|r7CW: 눡u`\Y&Oyu.q*.Xⅎѫ逖-1t@خtJպ~V@\LRbb_Md Y\Leڪcueqqjj:-hj:|�t _@\L<3U(lXMZWqΰi5ϖVfW[kӁYBbYMelŻzѕ_zQGiDVznu +6 +R|]WDnMtDsjݻ:jxLGyj9sFiÛ:uS xA1s,:!b,Z;h\4a1):›4_!CssU-G=GWy.=G@{McRSJQLCtPkWo:^jԛ7Ho4g:hku +tгMs=߄>hteJr1o9H-VSѸso9t\=[9h:=GI.Hs%7hpٛyztdd:(7T +ŻQחJèuseYtJ;qw6KfѹLs5et:({V-\cH=<Ο!K|\y7D"} r"ȩ>D@>D@>D@D@T@>D"} r"} r":E@>} rjD(" +'@t "WBfoBu#'*7{"'-#4BC.A7\M#CY1wrY;'r^Ɛҍ-_w|!ή9M8B4d Dnrn9 r1 rMN rZyeiCvo 921l+ʐ.7¢j!W!dd~ٍ!gT751lƐ 7Dr6Y_rt2 :Y7Ѭ ~ɐ+UƐkFݸ0FQ!gk7,rU�rk�䢭�r2~]ry,GC~AUiȕ(Y�Y{Ii gK.\ Zx@]rhTT rsCO{C-1䆖rYSo 7ܤj] rV|Q)7 "pv/9k|șA rEs..4=k68:"7 yMrR`j;En^"WeO\'E?PڐՓ EnbG.9.WgqzC9;1rRuqvP"6t['EZ E 2n^(rC^(r3BC'"7 J/<)rJ E }OLPf"}N\\=a*SAJm;D†()qqY!rBI{3_r7>rsWY�%.d�qbKRm9JFj M@9 r(ƕ$1V.As;r@DGO6\A%;r5k!74$eL =;rX;rA+RNGG/mO\K*:@G=Q;BY}"c96rwK;rMrEs92e6dbzޯԯz +!c hf !nHwyDȍ6#;rXUڡiCȕsGR!֌;rY\2q  ׺"㲮90S Dt媨=v%rw)7fΐּ+"-k+oč!9:=x[RAj,H+}0.i+CIe8r |wrm̤ғ!khз3rDtUx 6CbcN 9"r4i$cр:ΐs1!t7ҙp3Zh3 ϐcK 9…"Et( 1:s83*agȡDs݅+CaぃK#39qୋ\w9E &cAPoJu9\,+sU(qƬ9F& t9�r^!rء0D"=JxDE(:@9" Jڴ;-ϑ#WchVq!\m3o 9xD\rLPjVw{yxfd{ĎA+CKў!6ϐ(7+Cu[!rMܸlA\!r" o>*j˓!'2+q8vcţl+C/{g0yc-9ӄ8{B\ +/[> mvMZm"\$[0O<$=P5tXrd!Ǔ[z|5�lq,U\9KQ|>NcRDtcMD܂F46"ɘEh8l>Ϗt83뵍D鍮 3W M#C_,x~hdL=u3VʏcS9aʏcnxb\a6h'Vk'=:j\q,ruv_q8$z+8x ʏc.H,8k# }򵒫dh Dʣ?3=> M<>5'oɜS4eVs' +{ޞDZ峂\4R0Ǐ3"o_:2ǫۣuT,c�lkoU^7> >J>+>}ɧˊ?FDcD8Pn#?e+>_O y"=A.pJpn9ǻƿ"zr͕ +L\r$ QΆA W)tAC>ANAC>A.r܅ ܇ !ȱ!}r rs"kxVa|�rL�h ;-Wuu�9 ,]qCuuIg嬰{8y.@ +} G1�rE7,%@`J�r r]-^�r3K$�rmʏ5frʕ V Wؕ 'r.�9�9{iN/ ف�i-�4;벹u!%Ma -4oh뎐Ӫ+Bɒ !Yd亽"7=(7\0q;BN^ϯ+BΒ/oEo9Կ!$느h=\.M/牐Cˏ6!,醐 BN'+B.i !=/9ւj;B.EiawCUmsCYBzRru$y"!, (wd +1䒶AhYWmu9)rOzZ:k'ET1r+*nȽ FnEmwbVT܎T0r #7#74=W4zU6ގh@*_t`�K*m92 #<0rVu"%�'�A$i߹cAr9 ([YU5gk|_Ts6�!R4Us>4seV�҆,9z 6\mBIr4ڮ$9JsblN]aT5ϑr]v=_294Ζ#u$99rB߹shbL9{-.6ȽU'F.}bRxb(ČMu;Fn;FN$I%+#N\Ƣ Isȕ,n 8"O'�;O kYD9m8C8Bq889z +G{J^`DOD?;O D'WXHč'X;ONOmxr?Ǻ'MC@9t (GeUzBUR89$Nhpr@2;Mgv.hr09�bca%ڷn47IsMh r㪻s&:?:%ő}r %oC!S.a[:ŅPY$'0Y=Ir,& e#uF%'љQr,"ye; =hV�)ߤ-lZ$ڡ${1+J@!+V.#jU]2v>(9c(v(9I+iUı +-MV,Rtg@կӧ." 9"<|6W(9GOES!KB1&h- [kh}C +QEW5u!8F1u^; sNs7_,лN,ѮoDL.XL$\ +番a?fT+Yc {rb#@ɅRkCv}ip@~@iaN.||R99kC)eT]Ƶ+eZsR|Y!:n:99Z4H2WW!Ebyo)xr+cOuk_fٓ ƷO4@s ̠>((֪[YCTj|AF(wcQ;(v(wKM擞'bc:0A9,|1\rx\`Km(1BD0ߣBZx`_fO&T,)B*O +V!<:,UM9aµ蟨v,)u{YhS;'*ޡϭߍ9ᩐB)+f崃i{HEY9\ՕIw)ߛ+g!"^=X}&iʭށr8U.OnLqg[] upr@WlW PT9T9\L*lS:npr#*oz?6jTwUu:/ +i5JW*ӿ]C7U)m~UV̟U4, U9èSk_RC-^wSO<,DM93S{A_fʡڦyHz3:\e3P|y}1ŔsQo�JM9fFh3b)V@}2OԄ?^=WJ�l޳rНC p- r2yȒM=VrѮBkՁvLrCL~u))[4ٸ�6Sr&)ٍ¹�XdS\ܸr'q4t@9 +*>e/VT #jE:W}SaSjÉ ؔ븏? G\NZ G˰T$SEbRu +-RtGL8I9GTrиqΚrI6Y>XUsܨmq$7e$6�Ћ�J ͢|h+C3rPjHC`Cb;MDID9jGxCRnpMDyh3I2)LyhOI9g[V%<|"42"+#ù~I9Co.( +)=%<|g#%v¹>@I95.*X<)ݸ^sSRZsҎTrpgRë/ڗI93ɛ rt%Y㡒rm I):6\w\fD5<Ȇ'(PibT!rSMk|,}PcZ(:vr88f}>$H9N )>m3QyTH\)両r9bS \á7LSSȱ,V5u{j\cX!reWpbи]'TS}lr䧤T+DCWwR1݌PH;U-rMÝ |jr'PGJrku֑QZ-RaV*[z|#'jcR\Ø~s]r2 + +endstream +endobj +269 0 obj +92324 +endobj +270 0 obj +[268 0 R] +endobj +271 0 obj +<< + /Resources 272 0 R + /Type /Page + /MediaBox [0 0 445 294] + /CropBox [0 0 445 294] + /BleedBox [0 0 445 294] + /TrimBox [0 0 445 294] + /Parent 273 0 R + /Contents 270 0 R +>> +endobj +274 0 obj +<< + /Type /FontDescriptor + /FontName /EAAAAA+mwb_cmsy10 + /FontBBox [11 -215 942 727] + /Flags 33 + /CapHeight 0 + /Ascent 727 + /Descent -215 + /ItalicAngle 0 + /StemV 0 + /MissingWidth 500 + /FontFile2 275 0 R + /CIDSet 276 0 R +>> +endobj +275 0 obj +<< + /Length1 1968 + /Length 277 0 R + /Filter /FlateDecode +>> +stream +xU]hWdj~VlTdc.JI5%[ddv3l\@%VRP|"E&yhb +Eh+BK>(g&Z[sιw=  w#ʡOfH#9iodp?*M7ߚ.,L|+?Js9NFHޞ#EVɛrŹvd䪂5I\8Yێ~di([fwHpgJVyn-4�c/͚%KF= =+6q*>yx'2Qa'؆HU_um8"oBYGa1>2.RO]Fq#1M ֆ낵5U~(LB'emꈪ,wȼhs"LJUNUY} vMJI9#k4Jˆ]J&GF#Ԗiu.r}аqp4bK#94*w[;lv#̙bw)*9*_Ӳh$m^7㚪 J6/kˌ.2lAvVb !y-hZݙ-Q0YۜفΰHU!+W4Jb9$%i5f KOUȤtJ7UUU:}πs.H.?ڒ-2GGTIsaL >nM# EB3z)$|TXnnt1_ ;β\;r70ŭF$$KS&;=վvn~;u�Io{Q9 FG\ ѽ( ]|?+ObTSa0OzQ˾i&֐tr0Ca}aBՋY1ho8Uz`PMɣ@x1zVLT\]?i'leW2i4)FYM=.w$Pf<'+$ib$J1PVia6?R> +stream +xk��� +endstream +endobj +278 0 obj +9 +endobj +279 0 obj +<< + /Type /Font + /Subtype /Type0 + /BaseFont /EAAAAA+mwb_cmsy10 + /Encoding /Identity-H + /ToUnicode 280 0 R + /DescendantFonts [281 0 R] +>> +endobj +281 0 obj +<< /Type /Font +/BaseFont /EAAAAA+mwb_cmsy10 +/CIDToGIDMap /Identity +/Subtype /CIDFontType2 +/CIDSystemInfo << /Registry (Adobe) /Ordering (UCS) /Supplement 0 >> +/FontDescriptor 274 0 R +/DW 0 +/W [ 0 [750 776 ] ] +>> +endobj +280 0 obj +<< /Length 282 0 R /Filter /FlateDecode >> +stream +x]Pj0+l CԒX}q z0h[lE^X gBpjV& +:G:g} +endstream +endobj +282 0 obj +234 +endobj +283 0 obj +<< + /Type /FontDescriptor + /FontName /EAAAAB+mwb_cmmi10 + /FontBBox [16 -215 882 715] + /Flags 33 + /CapHeight 0 + /Ascent 715 + /Descent -215 + /ItalicAngle 0 + /StemV 0 + /MissingWidth 500 + /FontFile2 284 0 R + /CIDSet 285 0 R +>> +endobj +284 0 obj +<< + /Length1 2244 + /Length 286 0 R + /Filter /FlateDecode +>> +stream +xUmLSW~h(T[/^`'r Gڄ(Zh"C6u1`.8cAe_E1m1ے-cKܲ,3LonսRM6i9>9^0�6S[j�6nFƮ` c zNm?'%҂$)>L9+'. Fwg\e/\/QECEL=Ґ .?xb(g _ Ґ(ؑI&]#)8!ΰ\&\) cxq�{�A76bڡIEVeXoY[Y.[N_W+YCqG7w”'[OW_MpU\9cZ7I Ze|Jz.,f#uobS_7U!0Es؃I!]^ IBw�ޅ +9Y̌4Ex5Keu`⚭�|[wpyfh6zFE@g:W+֧CV0Lڤ2j%]ɚߒ!Kҹ4Ld&mS:c5YeAښulu~ijk2|EQ&pLIZVTdAWv1vZ;m. +2KDrk:[-.K GKKK,V!ضG\* >Q?5l˲yԘ죱{a[쨱${[5 py2EGBiq&JDwwi*iٙ哇6kxȋ_;MZs0/tt~W1{8htr ]0_)܏߉K`)60Ox + ,v.-N#N֜e`&0l֜<),~&E7RB!aq#`aޮ$*jݴZ"Ҋ4&JTw'J +a5-aZ!jC48AYM5&go0IOJE 1{ L!Q(h|xr$2VVIn%Z":*.-:+hT6%P"42 +VVkT#ޥIm!ţPh$>:C㡨B H#6ѷ? OD1Bfhp,> +stream +xk``��� +endstream +endobj +287 0 obj +12 +endobj +288 0 obj +<< + /Type /Font + /Subtype /Type0 + /BaseFont /EAAAAB+mwb_cmmi10 + /Encoding /Identity-H + /ToUnicode 289 0 R + /DescendantFonts [290 0 R] +>> +endobj +290 0 obj +<< /Type /Font +/BaseFont /EAAAAB+mwb_cmmi10 +/CIDToGIDMap /Identity +/Subtype /CIDFontType2 +/CIDSystemInfo << /Registry (Adobe) /Ordering (UCS) /Supplement 0 >> +/FontDescriptor 283 0 R +/DW 0 +/W [ 0 [750 602 ] ] +>> +endobj +289 0 obj +<< /Length 291 0 R /Filter /FlateDecode >> +stream +x]Pj0 +t=,N^@RȡҴrjhl8}m%P# D;g#w:M8€uEU*o5P$99ằv&H9 +gN'%k@W[5A*$F,nen/o^ooIۤjU ;+mB28Vd[ >d_} +endstream +endobj +291 0 obj +236 +endobj +292 0 obj +<< + /Type /FontDescriptor + /FontName /EAAAAC+mwa_cmmi10 + /FontBBox [-34 -250 1047 750] + /Flags 33 + /CapHeight 683 + /Ascent 750 + /Descent -250 + /ItalicAngle 0 + /StemV 0 + /MissingWidth 500 + /FontFile2 293 0 R + /CIDSet 294 0 R +>> +endobj +293 0 obj +<< + /Length1 4648 + /Length 295 0 R + /Filter /FlateDecode +>> +stream +xX l[yϹ/^))A"EJ|E֋"~Ye[rIDrDId9㤞dj$.u 뒂72[cA0];l]ޒa"mbz%i'+Խ?9�%|<l�Q{ta{zwQ{�bZXP&Qwzv[ˣ� ϥS964*TaoaGXMg15�gu}}E_G{1|xރv֭kL_:Cu1Uj88n(90m}=_dv35%,ނ"<U2\/ex ,"L8 Cڡ" M`j\`oqsr+wOf/sL9S{ f9uBZI%(;xnw05x>|^^kb| +܅$ƺ9`#n~6N3%:FR*L9<8 KQg 1p&ˢS-_dSYi,z +2{|0ךN.f,'{إI^{`aMgGO2 &m,h$O_Z=;{rx0e^+)z=(HA^2\\f{|P.'.ٱ!㦬B+z3dcIk>leIZSSYG_R{<7y=֞t耻8@*=\۳$Ebܔ>�z:z/I\id;8\?@" p}N�En�]jG߶/;xGm EII} 1@Ig9l:[7j34wW~# {Usazb]mN +r 'aWBe5JLIW9Va'\cHHOj,xzT44t644FB5Ѥ7 Ak͡p^B1ޠo +#V"GCpsY 2e rՄ5cUZ'wYݗtYI#z`Q?<-U;J]opj#KvHXzw2%u7U\FwMbnΞ+x=\\s ԔHn\-'NW(r)H-]nsdXB�R)^ z (:HSPBuXE:(+XG3 rXvC-0*vKDe豙]!Pe+ymi^S.%Ʀމhii> }k_3CwީpY!uA˝EÍFV$r'F%#|- +Ģ5lU zP“i�є'K0B؂eO3"b H HHՑ:g3M'9=7=ɼ%o}^/z9OڬfesC) r3kγsrT}p5G-ys%ji6KNf]^*~Pk4H|Rd4JBxMJU%ewZ)p]24|B>@,>=> dBh*R͍W#VHv12@֪p<] =#ya{dwλοXs 6w+>?8uoPѢ4)lgpq#4# mkqOdNAJRMBr9'['jA�a5Ǒ<xSbr~51jIRi8h'`"g3?>b\ݺ;2yjXY/apms*u_ǿ<1ٕxdgb'\^+[}rP%[.ZbVb'-Do�\ E*4K'zȣA˩igab;}ƲHaT4iMX`IHIW-,:5yku/jTZM4~dz冀κXw]~1˾~гWi +1w3O}LĚhW{:z\mY5O>QYqzCZ<.\jsF%RM3l'^%0~CuO&WO[oLedk|L_H%1fgSo)3^.y\jL4䕺;?0lAy]\.|V>6Y>1j/WJ~J9h@`ѨhDmf%D>F}NHŀ De.}u)qU,J݄%!Qd{߬)U2BfۉNDRe6RH'mrlٛovȼԌʬ|f-7*y]jmk),Sm|.bFKxf])8o/Eb8xڇ'V[VWm D!5\Y#ճԶڵjmZSS۩E_c O$kؐX_]M-lyéԪ7/nonDB&@Y2W)O&O}O퀻@y0 lc)M| ]FCS\EW!ZΦ`ݓjIݚ"4NNzUpUʆ4 +endstream +endobj +295 0 obj +3319 +endobj +294 0 obj +<< /Length 296 0 R /Filter /FlateDecode >> +stream +xȠ�  +endstream +endobj +296 0 obj +20 +endobj +297 0 obj +<< + /Type /Font + /Subtype /Type0 + /BaseFont /EAAAAC+mwa_cmmi10 + /Encoding /Identity-H + /ToUnicode 298 0 R + /DescendantFonts [299 0 R] +>> +endobj +299 0 obj +<< /Type /Font +/BaseFont /EAAAAC+mwa_cmmi10 +/CIDToGIDMap /Identity +/Subtype /CIDFontType2 +/CIDSystemInfo << /Registry (Adobe) /Ordering (UCS) /Supplement 0 >> +/FontDescriptor 292 0 R +/DW 0 +/W [ 0 [365 520 600 803 500 877 467 477 622 831 464 ] ] +>> +endobj +298 0 obj +<< /Length 300 0 R /Filter /FlateDecode >> +stream +x]j0}^,[Xb)x}6Pc·o2#:0Τu!}wlCr8O$yJK(lsRݔ�G[@aoNfWvG42ʡQtbDHαQAz ?j +{ +N[s*Vwo>DEʲsT0!SItDT*{Vnt&L0]k^".c\ á]T<}vE/tז +endstream +endobj +300 0 obj +279 +endobj +301 0 obj +<< + /Type /FontDescriptor + /FontName /EAAAAD+mwb_cmr10 + /FontBBox [-43 -205 984 740] + /Flags 33 + /CapHeight 0 + /Ascent 740 + /Descent -205 + /ItalicAngle 0 + /StemV 0 + /MissingWidth 500 + /FontFile2 302 0 R + /CIDSet 303 0 R +>> +endobj +302 0 obj +<< + /Length1 2220 + /Length 304 0 R + /Filter /FlateDecode +>> +stream +xU{hSWM_>]&iv7&Tk댮K;޶iILhm1ԍmƐ!"""c\m8`Ce0c[ަ2=w^PںiQ6 }Ig̈́?Xs~|/a<,ǻx"HbC/6 :!f4%=hCbL vppp?p 7.WY5>Eb~MQoӪn +.f{xo8R6/c +9d)!eB5U* 8*JKMx7CgmOx~k&oT>󨾹 Po䨜G fŠ.\ w].µ 94n`[UgqQQK]_MA/,]ݠe.ING >lܣl681+ih2smq$etPG؄F7DE#LRhFg#ɍ +gkČS9EZ6,#nT0[Өk[$Q4_ :gM'y%W]rn \h"~KFn8!E;6!]d8݋u \R;'KPWejֱsMdkg!{ 6{]lj :`se=TSJCuM_li[;r\8j]¼˔[Z甪сS^8zjS@z$t\K;:[(^c +mg?Ut=]c;TSP]vY +t񹇕K;\9ԍ7&6d/Y8QLcZ2Ng Y+Zw/xϞ+ZHlގQ ͞@|;A}ΗY"Ou܆BPk3qQR$[<@X`~l4PB5 L.by@xE,e'FS7ƨ&Oޮ&ta :҄᧱8ir&@m {-gQ #Oi%Mnoz%hafezJ`8)KbfŊ J~XrR^^#[|Ri/\2i9fX"'FkMޝhv t:1<[DZ(@\wS?@#s`hpf"@\S>:IKOOz4@ +?!YZj@cI'GBre+ B[>(=/nS6ފ ޼wYzo +endstream +endobj +304 0 obj +1539 +endobj +303 0 obj +<< /Length 305 0 R /Filter /FlateDecode >> +stream +xk`h�� +endstream +endobj +305 0 obj +11 +endobj +306 0 obj +<< + /Type /Font + /Subtype /Type0 + /BaseFont /EAAAAD+mwb_cmr10 + /Encoding /Identity-H + /ToUnicode 307 0 R + /DescendantFonts [308 0 R] +>> +endobj +308 0 obj +<< /Type /Font +/BaseFont /EAAAAD+mwb_cmr10 +/CIDToGIDMap /Identity +/Subtype /CIDFontType2 +/CIDSystemInfo << /Registry (Adobe) /Ordering (UCS) /Supplement 0 >> +/FontDescriptor 301 0 R +/DW 0 +/W [ 0 [750 583 ] ] +>> +endobj +307 0 obj +<< /Length 309 0 R /Filter /FlateDecode >> +stream +x]Pj0+l ťCP' K+GPKb-ƅ.13ð:g#ycc&B +aѺA[wķd(DqpXz ;@|iӫF_h/!.B=t_~)'>N'95 Ԍ- t#2UTMv77`S6FUBeY+쒷qDT QJX9uxl5U|~}@ +endstream +endobj +309 0 obj +235 +endobj +310 0 obj +<< + /Type /FontDescriptor + /FontName /EAAAAE+mwa_cmr10 + /FontBBox [-43 -250 1008 750] + /Flags 33 + /CapHeight 683 + /Ascent 750 + /Descent -250 + /ItalicAngle 0 + /StemV 0 + /MissingWidth 500 + /FontFile2 311 0 R + /CIDSet 312 0 R +>> +endobj +311 0 obj +<< + /Length1 9404 + /Length 313 0 R + /Filter /FlateDecode +>> +stream +xZ T[畾۴"$-HB 616{b;NIu6I|RzOd2ۦ6a4'frN34'I }Of:O_��phmgu�iٷ+x϶ύPo+xd|:_\3� j&~ wY|� WgGc?138GtߚL;fƾhPs4~~nv/Ġ�#8!KY• {;pp p3pf`vZB `%Efg_e�c̻NҷCejTE^!'2Clk]mp^W%xo5*P\/0H!<"MHOK0CUtZMZTdeRXı Mp]C5N w]J�:W +Zᑐ&H ]NKP%nW '~жŴch4AiJ0M!sЩ3^ρ9wS`l y(=fCm5 vX7Y[֧>n0RݮW@ <tĶȶlJ5BMM8`섌?+< lD!M0.Ae '%nyGzTy9D\S?M(Tؚ CdX'vT -vp7GPs~m�p�Gƾ$ ݆E?-ɾFkq.oL!% _,|_sZSS�ڑorp|?W7p<P{Slz x#୽&bf9i5&je62>_Lt1sMw諸~&v V:@"kʣ,A8KY PW)jeZ8SWgn|/w梋˕NWyy,|- OfO[!=4t#=|@-4jJΒ, X% iZ mf>HɍZ0c\H|On<oN:[j=גj-|9sR@,^ݓ:'/œ+=l7ԇ*Ĥ,))rq61u%JE"Q9/!FO;g]e(4V̚[6m"ުwƿ=/]:ww.NηfTEuG\8#%٭T皭돞 X[D%%J^2Vu?@PC?Y IlƟeX߾IG\|p(NiY'aI(k9*b |Jv&)OǜhA4T7b&t]n^=>ʲ67ԗrz63Cĝ3Hδ,uG:vնP]Wob;:]RUOsa)%ܡO +xcw$F<5A|n)57.pB(wN(NRwK&M*ZHstCJJ+J(&_P5H)h9bj=zul~wR5u QQͳ[Zzĕy[q.frcюOkLBHfjy7[Ucz롋O?:GG_ Tz䪨nϔj%ľHy7'W@0%xX-l#\KL3RG_=[`i+@UV +')3GH?pzrMnK`xaP|ʞkϙ\osojܠ'/'[Kލpuڼ XŜWݞc\co>u<޷/5݃S v򓏦Nll ƎK +G9!炘B4̕K9%1Rc2ڈ#\RxH#nuJ%,lat:GT3tl{Cͻ[LT^89x%?9ڿN&WsML3T2#}*+feM^U߳fL΢0f~.zD2"a$C&LPù +J,K&m`E ,)hf`J2XՒU~/rhjx L2[:.MY +-vofxgǞC}m:uAGqMMD񞤯)8vQ6nYw3O&ًC,5zj%RKHt2/K*DBVAXёIL]9j]P:C갂${S4ҳ8D|Wpu|K0_NNzβ<ݲeH{\fgbY7'gJ)?NV4Z>9DwoyXߨy2:{c1$'G}9%dTL$DE2/!sj ]*|?i W#%cTa45T<^BNeKx+Lթ:34vya_S \]ɷџ'E +iƼPpmcXt$qɼ\v-7(Uq7eY=t*h=F443"%f:}bztb چ'%\*n%}˂i786"I<%@]FrDJ sմښ X-Klmp֟JEmJc{hړ & +&8"RtH], 2BLZ ݯc\WQ;-a@v ?#+,B>YSɘ)l‡~Q*Hy:Uݟ.}3%~nO\JCEE˗ +\,?mE6JvVtv7v^3F +HL$~.ި..XZ/ =D_Z2U E_27mrkWDE,VDH)VJeRCFβjrH۞Œv +Jt +Fo BYg#jpgb-׳]/^ Nlؚ|2othݮ +{nޕLz/6-3?")rlhg[G+Es=jB^KFp\OrjA%arI>i)(D&n>_3㈐-QcK5_YZM0hcRA>R)~kgP"DKDK ZGCY 9JՂ%,)+f|C$SrIQo޵SW%{JFqЪW"ꦶXTΉ?q|('(?>̡Y&8YɁ#GA zZ%)E-1{LQ%:T% RW)r*QZVnVG YUO'HVA_h=_HޞGlWn{j3ػJoR΋}휐;P)Ny;Fv|ToW|bS.]\u0#b ٗz2Ov +uJr ً>Jrȷf +ğ3IyPb|a#yYzuŕIޛNxoecv +@p`g>w]~`Wٟ kWoV檩]fg8kzl;/ݕw6` "(@< +zƭ*$"ݦ÷4Oۨt ?7 #KW|m +>ݦq;f'f!K9` aaMP2P.lailni?)vq#ڼGR\\XsϯdlLSů4#82!Tv7~h߱TTl*pCӦuӆ}S)ƿ6o͏76)-+0dj݉Mc#{&fwLMø , u[ )#3˰ɟl"=C8 CWl !7ᓗyʼe}?C9h@8Ime~8<]{t7'W +endstream +endobj +313 0 obj +6772 +endobj +312 0 obj +<< /Length 314 0 R /Filter /FlateDecode >> +stream +xk`)` : +endstream +endobj +314 0 obj +20 +endobj +315 0 obj +<< + /Type /Font + /Subtype /Type0 + /BaseFont /EAAAAE+mwa_cmr10 + /Encoding /Identity-H + /ToUnicode 316 0 R + /DescendantFonts [317 0 R] +>> +endobj +317 0 obj +<< /Type /Font +/BaseFont /EAAAAE+mwa_cmr10 +/CIDToGIDMap /Identity +/Subtype /CIDFontType2 +/CIDSystemInfo << /Registry (Adobe) /Ordering (UCS) /Supplement 0 >> +/FontDescriptor 310 0 R +/DW 0 +/W [ 0 [365 500 500 500 500 500 500 750 833 555 276 276 388 555 555 443 276 500 750 276 776 276 500 735 500 394 500 555 276 500 305 651 391 526 555 443 526 750 443 333 500 680 555 ] ] +>> +endobj +316 0 obj +<< /Length 318 0 R /Filter /FlateDecode >> +stream +x]j0E +-E5~%P%E4854PE4 +8Ҍ^imwO;7L*{ [hRv0P6/&>\?Q%R#9MᢖvNY`9 _uv&9v6fֿۗGVY~gc0]c-YQb f|к/869ͼb7mqlHy^hrPZJP @%ITʞD5RŚuu"':tTk,*h) +ZtV 謠Z$: # ق,"E'pfj_ *GW_S"+qG Nௐ> +endobj +319 0 obj +<< + /Type /Catalog + /Pages 273 0 R + /Lang (x-unknown) +>> +endobj +272 0 obj +<< + /Font << + /F270 279 0 R + /F271 288 0 R + /F272 297 0 R + /F273 306 0 R + /F268 315 0 R +>> + /ProcSet [/PDF /ImageB /ImageC /Text] + /ExtGState << + /GS1 2 0 R + /GS2 3 0 R + /GS3 4 0 R + /GS4 5 0 R + /GS5 6 0 R + /GS6 7 0 R + /GS7 8 0 R + /GS8 9 0 R + /GS9 10 0 R + /GS10 11 0 R + /GS11 12 0 R + /GS12 13 0 R + /GS13 14 0 R + /GS14 15 0 R + /GS15 16 0 R + /GS16 17 0 R + /GS17 18 0 R + /GS18 19 0 R + /GS19 20 0 R + /GS20 21 0 R + /GS21 22 0 R + /GS22 23 0 R + /GS23 24 0 R + /GS24 25 0 R + /GS25 26 0 R + /GS26 27 0 R + /GS27 28 0 R + /GS28 29 0 R + /GS29 30 0 R + /GS30 31 0 R + /GS31 32 0 R + /GS32 33 0 R + /GS33 34 0 R + /GS34 35 0 R + /GS35 36 0 R + /GS36 37 0 R + /GS37 38 0 R + /GS38 39 0 R + /GS39 40 0 R + /GS40 41 0 R + /GS41 42 0 R + /GS42 43 0 R + /GS43 44 0 R + /GS44 45 0 R + /GS45 46 0 R + /GS46 47 0 R + /GS47 48 0 R + /GS48 49 0 R + /GS49 50 0 R + /GS50 51 0 R + /GS51 52 0 R + /GS52 53 0 R + /GS53 54 0 R + /GS54 55 0 R + /GS55 56 0 R + /GS56 57 0 R + /GS57 58 0 R + /GS58 59 0 R + /GS59 60 0 R + /GS60 61 0 R + /GS61 62 0 R + /GS62 63 0 R + /GS63 64 0 R + /GS64 65 0 R + /GS65 66 0 R + /GS66 67 0 R + /GS67 68 0 R + /GS68 69 0 R + /GS69 70 0 R + /GS70 71 0 R + /GS71 72 0 R + /GS72 73 0 R + /GS73 74 0 R + /GS74 75 0 R + /GS75 76 0 R + /GS76 77 0 R + /GS77 78 0 R + /GS78 79 0 R + /GS79 80 0 R + /GS80 81 0 R + /GS81 82 0 R + /GS82 83 0 R + /GS83 84 0 R + /GS84 85 0 R + /GS85 86 0 R + /GS86 87 0 R + /GS87 88 0 R + /GS88 89 0 R + /GS89 90 0 R + /GS90 91 0 R + /GS91 92 0 R + /GS92 93 0 R + /GS93 94 0 R + /GS94 95 0 R + /GS95 96 0 R + /GS96 97 0 R + /GS97 98 0 R + /GS98 99 0 R + /GS99 100 0 R + /GS100 101 0 R + /GS101 102 0 R + /GS102 103 0 R + /GS103 104 0 R + /GS104 105 0 R + /GS105 106 0 R + /GS106 107 0 R + /GS107 108 0 R + /GS108 109 0 R + /GS109 110 0 R + /GS110 111 0 R + /GS111 112 0 R + /GS112 113 0 R + /GS113 114 0 R + /GS114 115 0 R + /GS115 116 0 R + /GS116 117 0 R + /GS117 118 0 R + /GS118 119 0 R + /GS119 120 0 R + /GS120 121 0 R + /GS121 122 0 R + /GS122 123 0 R + /GS123 124 0 R + /GS124 125 0 R + /GS125 126 0 R + /GS126 127 0 R + /GS127 128 0 R + /GS128 129 0 R + /GS129 130 0 R + /GS130 131 0 R + /GS131 132 0 R + /GS132 133 0 R + /GS133 134 0 R + /GS134 135 0 R + /GS135 136 0 R + /GS136 137 0 R + /GS137 138 0 R + /GS138 139 0 R + /GS139 140 0 R + /GS140 141 0 R + /GS141 142 0 R + /GS142 143 0 R + /GS143 144 0 R + /GS144 145 0 R + /GS145 146 0 R + /GS146 147 0 R + /GS147 148 0 R + /GS148 149 0 R + /GS149 150 0 R + /GS150 151 0 R + /GS151 152 0 R + /GS152 153 0 R + /GS153 154 0 R + /GS154 155 0 R + /GS155 156 0 R + /GS156 157 0 R + /GS157 158 0 R + /GS158 159 0 R + /GS159 160 0 R + /GS160 161 0 R + /GS161 162 0 R + /GS162 163 0 R + /GS163 164 0 R + /GS164 165 0 R + /GS165 166 0 R + /GS166 167 0 R + /GS167 168 0 R + /GS168 169 0 R + /GS169 170 0 R + /GS170 171 0 R + /GS171 172 0 R + /GS172 173 0 R + /GS173 174 0 R + /GS174 175 0 R + /GS175 176 0 R + /GS176 177 0 R + /GS177 178 0 R + /GS178 179 0 R + /GS179 180 0 R + /GS180 181 0 R + /GS181 182 0 R + /GS182 183 0 R + /GS183 184 0 R + /GS184 185 0 R + /GS185 186 0 R + /GS186 187 0 R + /GS187 188 0 R + /GS188 189 0 R + /GS189 190 0 R + /GS190 191 0 R + /GS191 192 0 R + /GS192 193 0 R + /GS193 194 0 R + /GS194 195 0 R + /GS195 196 0 R + /GS196 197 0 R + /GS197 198 0 R + /GS198 199 0 R + /GS199 200 0 R + /GS200 201 0 R + /GS201 202 0 R + /GS202 203 0 R + /GS203 204 0 R + /GS204 205 0 R + /GS205 206 0 R + /GS206 207 0 R + /GS207 208 0 R + /GS208 209 0 R + /GS209 210 0 R + /GS210 211 0 R + /GS211 212 0 R + /GS212 213 0 R + /GS213 214 0 R + /GS214 215 0 R + /GS215 216 0 R + /GS216 217 0 R + /GS217 218 0 R + /GS218 219 0 R + /GS219 220 0 R + /GS220 221 0 R + /GS221 222 0 R + /GS222 223 0 R + /GS223 224 0 R + /GS224 225 0 R + /GS225 226 0 R + /GS226 227 0 R + /GS227 228 0 R + /GS228 229 0 R + /GS229 230 0 R + /GS230 231 0 R + /GS231 232 0 R + /GS232 233 0 R + /GS233 234 0 R + /GS234 235 0 R + /GS235 236 0 R + /GS236 237 0 R + /GS237 238 0 R + /GS238 239 0 R + /GS239 240 0 R + /GS240 241 0 R + /GS241 242 0 R + /GS242 243 0 R + /GS243 244 0 R + /GS244 245 0 R + /GS245 246 0 R + /GS246 247 0 R + /GS247 248 0 R + /GS248 249 0 R + /GS249 250 0 R + /GS250 251 0 R + /GS251 252 0 R + /GS252 253 0 R + /GS253 254 0 R + /GS254 255 0 R + /GS255 256 0 R + /GS256 257 0 R + /GS257 258 0 R + /GS258 259 0 R + /GS259 260 0 R + /GS260 261 0 R + /GS261 262 0 R + /GS262 263 0 R + /GS263 264 0 R + /GS264 265 0 R + /GS265 266 0 R + /GS266 267 0 R +>> +>> +endobj +xref +0 320 +0000000000 65535 f +0000000015 00000 n +0000000145 00000 n +0000000197 00000 n +0000000249 00000 n +0000000301 00000 n +0000000353 00000 n +0000000405 00000 n +0000000457 00000 n +0000000509 00000 n +0000000561 00000 n +0000000614 00000 n +0000000667 00000 n +0000000720 00000 n +0000000773 00000 n +0000000826 00000 n +0000000879 00000 n +0000000932 00000 n +0000000985 00000 n +0000001038 00000 n +0000001091 00000 n +0000001144 00000 n +0000001197 00000 n +0000001250 00000 n +0000001303 00000 n +0000001356 00000 n +0000001409 00000 n +0000001463 00000 n +0000001517 00000 n +0000001571 00000 n +0000001625 00000 n +0000001678 00000 n +0000001731 00000 n +0000001784 00000 n +0000001837 00000 n +0000001890 00000 n +0000001943 00000 n +0000001996 00000 n +0000002049 00000 n +0000002102 00000 n +0000002155 00000 n +0000002208 00000 n +0000002261 00000 n +0000002314 00000 n +0000002367 00000 n +0000002420 00000 n +0000002473 00000 n +0000002526 00000 n +0000002579 00000 n +0000002632 00000 n +0000002685 00000 n +0000002738 00000 n +0000002791 00000 n +0000002844 00000 n +0000002897 00000 n +0000002950 00000 n +0000003003 00000 n +0000003056 00000 n +0000003109 00000 n +0000003162 00000 n +0000003215 00000 n +0000003268 00000 n +0000003321 00000 n +0000003374 00000 n +0000003427 00000 n +0000003480 00000 n +0000003533 00000 n +0000003586 00000 n +0000003639 00000 n +0000003692 00000 n +0000003745 00000 n +0000003798 00000 n +0000003851 00000 n +0000003904 00000 n +0000003957 00000 n +0000004010 00000 n +0000004063 00000 n +0000004116 00000 n +0000004169 00000 n +0000004222 00000 n +0000004275 00000 n +0000004328 00000 n +0000004381 00000 n +0000004434 00000 n +0000004487 00000 n +0000004540 00000 n +0000004593 00000 n +0000004646 00000 n +0000004699 00000 n +0000004752 00000 n +0000004805 00000 n +0000004858 00000 n +0000004911 00000 n +0000004964 00000 n +0000005017 00000 n +0000005070 00000 n +0000005123 00000 n +0000005176 00000 n +0000005229 00000 n +0000005282 00000 n +0000005336 00000 n +0000005391 00000 n +0000005446 00000 n +0000005501 00000 n +0000005556 00000 n +0000005610 00000 n +0000005664 00000 n +0000005718 00000 n +0000005772 00000 n +0000005826 00000 n +0000005880 00000 n +0000005934 00000 n +0000005988 00000 n +0000006042 00000 n +0000006096 00000 n +0000006150 00000 n +0000006204 00000 n +0000006258 00000 n +0000006312 00000 n +0000006366 00000 n +0000006420 00000 n +0000006474 00000 n +0000006528 00000 n +0000006582 00000 n +0000006636 00000 n +0000006690 00000 n +0000006744 00000 n +0000006798 00000 n +0000006852 00000 n +0000006907 00000 n +0000006962 00000 n +0000007017 00000 n +0000007072 00000 n +0000007126 00000 n +0000007180 00000 n +0000007234 00000 n +0000007288 00000 n +0000007342 00000 n +0000007396 00000 n +0000007450 00000 n +0000007504 00000 n +0000007558 00000 n +0000007612 00000 n +0000007666 00000 n +0000007720 00000 n +0000007774 00000 n +0000007828 00000 n +0000007882 00000 n +0000007936 00000 n +0000007990 00000 n +0000008044 00000 n +0000008098 00000 n +0000008152 00000 n +0000008206 00000 n +0000008260 00000 n +0000008314 00000 n +0000008368 00000 n +0000008422 00000 n +0000008476 00000 n +0000008530 00000 n +0000008584 00000 n +0000008638 00000 n +0000008692 00000 n +0000008746 00000 n +0000008800 00000 n +0000008854 00000 n +0000008908 00000 n +0000008962 00000 n +0000009016 00000 n +0000009070 00000 n +0000009124 00000 n +0000009178 00000 n +0000009232 00000 n +0000009286 00000 n +0000009340 00000 n +0000009394 00000 n +0000009448 00000 n +0000009502 00000 n +0000009556 00000 n +0000009610 00000 n +0000009664 00000 n +0000009718 00000 n +0000009772 00000 n +0000009826 00000 n +0000009880 00000 n +0000009934 00000 n +0000009988 00000 n +0000010042 00000 n +0000010096 00000 n +0000010150 00000 n +0000010204 00000 n +0000010258 00000 n +0000010312 00000 n +0000010366 00000 n +0000010420 00000 n +0000010474 00000 n +0000010528 00000 n +0000010582 00000 n +0000010636 00000 n +0000010690 00000 n +0000010744 00000 n +0000010798 00000 n +0000010853 00000 n +0000010908 00000 n +0000010963 00000 n +0000011018 00000 n +0000011073 00000 n +0000011127 00000 n +0000011181 00000 n +0000011235 00000 n +0000011289 00000 n +0000011343 00000 n +0000011397 00000 n +0000011451 00000 n +0000011505 00000 n +0000011559 00000 n +0000011613 00000 n +0000011667 00000 n +0000011721 00000 n +0000011775 00000 n +0000011829 00000 n +0000011883 00000 n +0000011937 00000 n +0000011991 00000 n +0000012045 00000 n +0000012099 00000 n +0000012153 00000 n +0000012207 00000 n +0000012261 00000 n +0000012315 00000 n +0000012369 00000 n +0000012423 00000 n +0000012478 00000 n +0000012533 00000 n +0000012588 00000 n +0000012643 00000 n +0000012698 00000 n +0000012753 00000 n +0000012807 00000 n +0000012861 00000 n +0000012915 00000 n +0000012969 00000 n +0000013023 00000 n +0000013077 00000 n +0000013131 00000 n +0000013185 00000 n +0000013239 00000 n +0000013293 00000 n +0000013347 00000 n +0000013401 00000 n +0000013455 00000 n +0000013509 00000 n +0000013563 00000 n +0000013617 00000 n +0000013671 00000 n +0000013725 00000 n +0000013779 00000 n +0000013833 00000 n +0000013887 00000 n +0000013941 00000 n +0000013995 00000 n +0000014049 00000 n +0000014103 00000 n +0000014158 00000 n +0000014213 00000 n +0000014268 00000 n +0000014323 00000 n +0000014378 00000 n +0000014433 00000 n +0000106835 00000 n +0000106858 00000 n +0000106885 00000 n +0000128160 00000 n +0000128021 00000 n +0000107083 00000 n +0000107335 00000 n +0000108747 00000 n +0000108725 00000 n +0000108834 00000 n +0000108853 00000 n +0000109244 00000 n +0000109013 00000 n +0000109556 00000 n +0000109577 00000 n +0000109829 00000 n +0000111485 00000 n +0000111463 00000 n +0000111575 00000 n +0000111595 00000 n +0000111986 00000 n +0000111755 00000 n +0000112300 00000 n +0000112321 00000 n +0000112577 00000 n +0000116016 00000 n +0000115994 00000 n +0000116114 00000 n +0000116134 00000 n +0000116561 00000 n +0000116294 00000 n +0000116918 00000 n +0000116939 00000 n +0000117191 00000 n +0000118850 00000 n +0000118828 00000 n +0000118939 00000 n +0000118959 00000 n +0000119348 00000 n +0000119118 00000 n +0000119661 00000 n +0000119682 00000 n +0000119937 00000 n +0000126829 00000 n +0000126807 00000 n +0000126927 00000 n +0000126947 00000 n +0000127500 00000 n +0000127106 00000 n +0000128000 00000 n +0000128083 00000 n +trailer +<< + /Root 319 0 R + /Info 1 0 R + /ID [<9D0756AD7964CA4E2FAFC488846E33C7> <9D0756AD7964CA4E2FAFC488846E33C7>] + /Size 320 +>> +startxref +132644 +%%EOF diff --git a/figs/uniaxial_payload_dynamics_stiff_nano_hexapod.png b/figs/uniaxial_payload_dynamics_stiff_nano_hexapod.png new file mode 100644 index 0000000..0f65319 Binary files /dev/null and b/figs/uniaxial_payload_dynamics_stiff_nano_hexapod.png differ diff --git a/figs/uniaxial_sample_flexibility_control.pdf b/figs/uniaxial_sample_flexibility_control.pdf new file mode 100644 index 0000000..f9cc8ce Binary files /dev/null and b/figs/uniaxial_sample_flexibility_control.pdf differ diff --git a/figs/uniaxial_sample_flexibility_control.png b/figs/uniaxial_sample_flexibility_control.png new file mode 100644 index 0000000..f8eeddc Binary files /dev/null and b/figs/uniaxial_sample_flexibility_control.png differ diff --git a/figs/uniaxial_sample_flexibility_control.svg b/figs/uniaxial_sample_flexibility_control.svg new file mode 100644 index 0000000..bc1e664 --- /dev/null +++ b/figs/uniaxial_sample_flexibility_control.svg @@ -0,0 +1,495 @@ + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + diff --git a/figs/uniaxial_sample_flexibility_noise_budget_d.pdf b/figs/uniaxial_sample_flexibility_noise_budget_d.pdf new file mode 100644 index 0000000..732f01b --- /dev/null +++ b/figs/uniaxial_sample_flexibility_noise_budget_d.pdf @@ -0,0 +1,1522 @@ +%PDF-1.4 +% +1 0 obj +<< +/Producer (Apache FOP Version 2.4.0-SNAPSHOT: PDFDocumentGraphics2D) +/CreationDate (D:20230630182530+02'00') +>> +endobj +2 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +3 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +4 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +5 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +6 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +7 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +8 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +9 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +10 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +11 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +12 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +13 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +14 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +15 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +16 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +17 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +18 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +19 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +20 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +21 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +22 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +23 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +24 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +25 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +26 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +27 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +28 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +29 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +30 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +31 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +32 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +33 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +34 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +35 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +36 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +37 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +38 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +39 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +40 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +41 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +42 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +43 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +44 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +45 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +46 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +47 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +48 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +49 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +50 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +51 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +52 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +53 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +54 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +55 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +56 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +57 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +58 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +59 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +60 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +61 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +62 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +63 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +64 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +65 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +66 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +67 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +68 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +69 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +70 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +71 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +72 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +73 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +74 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +75 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +76 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +77 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +78 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +79 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +80 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +81 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +82 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +83 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +84 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +85 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +86 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +87 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +88 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +89 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +90 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +91 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +92 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +93 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +94 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +95 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +96 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +97 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +98 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +99 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +100 0 obj +<< +/Type /ExtGState +/CA 0.2509804 +>> +endobj +101 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +102 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +103 0 obj +<< +/Type /ExtGState +/CA 0.14901961 +>> +endobj +104 0 obj +<< /Length 105 0 R /Filter /FlateDecode >> +stream +xĽˮȲׯ/L0`:alȆdsfmA8UA&ɼDdF?BOǿqB,?u-U?+[1z)w}0>ө"?O|#_GOďJjzŐZ8Ͽ֦6:F⍚JnU c!lʟoUjs<|j|U%R8RJѿ/hU|j~z5x?}A[ʫrި_MmFBOJަ_MmJyF eQ󟾠U|z|KJux?}E>?磾B- O_ѬO9Wyz3+=:2#f}~r%J-y?}E>?犩#tO_ѬO﹅H!Dr֬O_Ѭ%W혦r.?+)*-ܯ9~W4|Yӟ",V_myx#-K Zŗ q ڄ&đ^ <26?}E'_r+mr-)ӟQ=?ܯS5[;8ƁyК3Z+c_o'ki+e8vޮ~]]eZu:0v)'J;uoOޮϛ.!ͧOޮl]ӟ~]7̥]0ʨ_omOޮ#:90`Zv|Sz*?z~nZסOޮᴼ΋_o1t&}Z?.WbMv|r}ŚWUӟ~]?7cy#Zs}lWv>UR~OޮAo)+n{o%X|y[s}\~M?7^}t&_G ӯ!?*uԘcjMV}vFzjqd7c6s3uU`~Ve]p[oo1H/П@i>ܜuq8ܜu`]s_|{~\-a`GA%ߢ|~L-@o_|{~w~-Q4˷臁,ߢŰ|~-QGA+ߢū|~X|w~<-QG!3ޢ%Zm-0\ۜ9~qx5K|w{֘,YWG۳Dȯnηg_oo8ޚ}w{ս,sY#W۳⯎ͷg_ݚoo|:5ޞ%~ui=K|{{~YWg۳̷g_nu6/K#׀ 5Eju0>B,ZCͥEӑ U(#Wp/Ǐ:7n~cSjիW-_|Vn{7/^|i0[7W6ŻO~jQ+c uJ&K^g`??q8syi]7XFxi]7-fb{i]7\apn} |ݑ7ݴ2= 724O{ {Ͽ%R{n`۵4't_Đ=e*ҟ; H5iՏhzoF~EKA\[@ K?ѢM-o%O \?|1Ga[!_}]gZ&:[uϟiњ|o:EKrԢ/rLִ{.Sk|oe6*?oY[03-ZӪ-ϴhM2?Ӣ5ޢ˩L${.3-Zӧ-<ϴhM2?բ%ezjїN1o:[03-Z- ϴhMپr?Ӣ5YޢL4{._S-Z}Y'Zfu9ڟqo[0rrWjf=!?.[CɲE?+[CE?([CiE?N-[~gO~j{}'Pmnѷ{E}'Pmnѷ{}'Pmnѷ{ϖ}'xuorxSߓ(6=ksݓ(6=ksݓ(=ԠojSsۓ:7d[<φ4c +A чVrk~Hsܢ+& ef7f0+/7!75#ώI=f3_XCۊ8W  ms_T,L)^~|T_Xr +8sj݇(vp:(4iyߌ&To+uqڭS5˧v/ZmMh_-t~1QbZcMȡƾ༤1b #dYBI"RaRi2-Sw*'RRKhz FBmd1ae2m$܁{ꮘcg9ZM4ˑ*jQU3*ްTPm'r?XlGO֔a#êWVDW$b!ͬ{υ{#5':R %C^ɈqDXѪ^Vy t |9=ѣ}h=Ԫh^PdRD;\r߁ 5Tl(ZG}1 x.*2it'8 w Т>8ک +nwD7Y5~:|wzCijt4j >dv͜{E]K׌?yyT-EEb!CUOaxUzLT셡C vno ,.58G(<{$IF-1}40RKjA NSKj&1[ 6 =P3fő[[Д E=#+% +l"@dxU9k|jW7V0Tt8\% o s9П|/2%ؐ؛N,T%:*+KU|hxq/R4LYxoMBE \id}%QWC`{Řr;7KJKu)[SB%qw1a$햘m wΪqoa脬qHiN9*B͆A[ `J8&Ep@J*GAI/cÚMIsiszIY^P  q6 c#C~]23R% "`A+)X~֔f= ` dpY 6ϟn BctzQ$&=Q4+]&km|cMuGY3i/,LtLNaj쉘0thpibkvΦzḫa(51G. RQsj *LCϬD sH6Uv>"F6 J?m2tavf}SqQttF,\azɎT]Ɂensi$( P0yčdă:C^/쑬+2c>*RjYZQH &h>V9H `AhX5;4 mmx+Uhv0~pt"Ww`e~`b;iA~ĮL&_:I_jcT1u03H;k]f~ږ{_7+Xx$QMk ^T:uF2aScANFe{$lcun0VϞ:w` X0| b2jQہsSŎ"~5bXDG WӁ.)i Yi"2ķ ,OEpq[2xӑh\$$teL;hbHK E,G.1A:=H%bNnQ.Y $g>zBTTzEiq0pz, 0Xt튅+֔c*'̊7~^85=%eZ!d;6&R’U50%3~ ӨֹtZp}wc_EՓΊp09xu{02 ?L]5*Y4ɸ]r ^#aEzI{X%RSt +'80G Iïd aOv#d$F4!wGpknXdTzg0ś0 +#q}'p0a0 89GM;8賴?X@0 D&+Z4:pzsLB.גγ(%rh/,bsbW%ЭC4`Cm`%4ntmT*Fe0ubc|{ָ[BOòHkj3 w雹rO_xb>8K!E7Npm HO+H:-35VoheuN%+i9$=x9X/\9*f7Z/ç,W&*}ή&6!`'] B1խr`WyGCqZ'}h7GYLH*71wK2H xV A[H $WDZd$! .4C]w Ѣ + n,NXjV+<$Pz-ږ4:tt4=5L 2|[g\TKuMXx6ځ7k%K],Ѹ+Cha+H%Z1#@xI4n!I:_#u)N%TaBۡG;G9)61Kf7fDЬBhD,ۆ)%<.^#kX=;fy$X!r =lЦƺR4t{MJh0UɖՓ+?+ELYۓ%6Oȹ;5.(%nL9bFtE: i CA%} auGP5XG"9GbaӒu*5|mL!j\`.<`*lO;Rs3Yk>ĜxI.suy $)ta]J< <=&cf )jτ6ƶy +5f8 c%18L<9 M6^tR<,? +,.AMSU1MC/g`j. +>zZьMho! {ڄֹǔNxA٘x鋘'9jODm51oq>4,{t˖H,|vrF.tSCոf zC]Tm~jc`>Yg[D+az-nLh̽*<횷J0?@ 6!.2f;GeaahKhv^]!{\ǜ1wlZ^D2ᦘLcal)G!ONFl uN0L;xش4XiTУzSk+@a]8d2㠧w丂8iU\XU3s4Oҡotl(b؇iZB #WaG' *AEi7[Ȯ&x[u* +<`ani"bL5 %1sU]eZzv-f`̶UoP$,d-Q8bX80a2H4 N~H`n]Ofh%d/U5 2O>LPĉIO0>eוW7x/.k H.aeS?B1-u-H-'1Z5as#^v)%_E xl7kM +=e?5g2>736D:˨Za~8(c Ca71C /ve9F1 +V|2K&w{:`Z[x ֕骟y=wN?tsKstAV#?y5hx2 C/8+s]Y $'8F3Fv40kcg + ǢiU".za_`^18ղWC>ra <``MaF +)/Uˣ$)CFp{,WRt[t5MG"{b'{W[@novr+5{mj躵^7m[(.|\v}tW/3KJhX(S(XLL*{ 9#˦e|*GM(HWj01:C|!, ަĜnP  eb /B1KhVL+;X1\j9?,O/BR㉖O`hٱitv`Fka׳]J!ݖg_uFNXZ7 U&~ ЖŌ q4'S5)np-ŧ+Mr0j4뵑M'PIW{?5F` -`d"mnz@M^ifdp&$#v Ұn]oi3od(Vn23jH5~h5L}hILiZ)36*69_WMے}&E+,ό5# sfeGk:J>-kw63HMxpn,aJQYAR7I;,"h5LAf;2 ˭([1 +?KW8&,B0 97"o'g`T,!*&b:1~(iނL1o0 +trç%sWP{U|/lj If R)+ps[W-5‚s1=n pfu`IpaCI,gX4z?I95%3m 3bHNAk`ZT +6}ICu͗_@kTq0I75F.5QmGZz,O.1&f}?k5:rE'fejMc o;, "]ꥪ'ȸ"AUTƧVE.$a5̜uF.,,$5~U_p]QAe3]hͤ4|Z٨f3F iFwg}hy#)`c_ |zHM6F*5rvu,O5G ugH`>l"u8l6b.Cn>SBZ;S C_s!}eͿ+*x,6_pR8H^XD3|T, %!xҰųI]a{({ݮYxG{[VRZ计WZE.+F%FL~F0hgq@?>dӈ^jr,6~F-p=k1@JP+2~T?8;6Зbꨵ_V.XBᖳJ +60AU!|h3 +𠖱`>o PR4pkU$ 9h_gtˈVFPx21kx5a$pО_5 ҷ +w]À*i+A]+;V'. ͗?UT0BlMWtFƾ.3`}wVbrM'v}-\Sbϻc)ڈC6اo6=&$@cSʕjΔh~6]@ FX)LcPRglQw#15F ! }rփ5{=UX4p\ΐAmdmɢ>`vRDw}F;CaO2:Uzs#`gHNa3$5)iXH"f7rhx%s t^Rb3ren&KtKU,~3TMxͩ@LYxv7N̗XV 9KwrV"1GIT 0d۶5͜&{?qm +Z!a`5 ?I7&١}?`Y35/,t%}ŪZtQ ~hN +8.Myv[SP`O)3;sbD +Jys"ҙ65,1ORBq]D:ۘ! )\Ò?(DˌHH0*nދ$TE{jQi $xF`ةa\Dkppnd\qja&WXe“ݴ 1Yj/~pܸأ$!ɴ._/V|&Aj<1$;$*ͪڰ +3Kc.ِ:hEZ#x +)邫%8$Gj'xa e@(9 0!PV۩7m3N$=ʜ|+ 7sT`T I.9]'jIg7^ux[n5ݤg'&e#o%CS +n"GŤ2(1O; OĜsIP-ԠYj9m?C"(&5go(1`pu3zNg0aZ\X6 b~I~T;</s@i˺(&gif≆I%nҊ`!1KLCqdr`zk7,{zjj mk6ŊmZٶBԚŢvweqéD$5ߚĪ%zjػ^25nPcjYJF)פۤL( l5 +{Ъ[ G,aciOm` +GqGDk/5Ѵ h4([;Exsس K@p}[ ;,h2nbax]ۙ` vanE+ M%F{Dݎh%(enX9њ {La)tlZ4hEWJ) QsGp U8@#cxFRbڨa@cɝ]5A$-:$ s0 3UTu$M"lYc [N[5he }6xzm!E6:4s`eX&+o2 FP+,#[{lcP{2i\p'JX$4@IΰqMJęi% vu.4'#a LӭruA D+fV[;lM,Z0C=k`Kh_ED rI.+vT4T,&q]pb}-iѶL{o:wxMTx7 ;#0Djp,<%JdAo!r %*[g ]?й|B 3d,RuÐL6 +u{kH@Mݎc([Ocdv.V/H n.f '0p>-襚H YgOZbDkJƳ IBUTnL&"!EcqZ"a +j*;.S_¨z)w;٩2B!!O#3N"]oK5;gW&8s0hxi+$yx6;j̋c<ܧ1_SΨj}6ll X{gyedEþ{ +=&>JŨjܡ)L+7|RxlhjipL$=V5Lkwj64۷4p8+V4fs  :0\!xoұ>$$*'bi511ʄz[xϼ)B|JuB~Fj0'`<2-Jeᱭ|T@s_4I̦1Y5%׸5g Li/%s0+SV)ehzj*촪ٙjR?簦`&+$IFSAuc;W̓AUbn+4TyQa=S{^r-?L%)nLcLvUt5T^+6e~$R,48 P1n98VȚ vQuniSwHï&\q Ifl%᭦/epfJ-e325[U+=QC"$/^$)8ݔT8ȕ]% }M<;1]j5~,k[{LYfŴ$[>`[3%e%2JPJ5jŦkmjUkbf"aM CC؉N$G$˫j04)Z +bE*Sz-kA4M49,wG5XN+x0ǪTl@dS87-Zo1o8qcJYY!r>iV@v('!J3Zp)ƺ' #idR+5Bk$N%qTwfU@Aa6D +/qHêςX[ w|nE q`=4o8.d.Wlb^?8qpKC ~OTK0q[bX9*YaUVYRZ͆44SyıKH q4 U q$Qg6H\yfġWK1 qxWY> +\ɺB⸤[W< qUYBZ!q"Y6F ZU#Ӣn8FT܂\~bCaQM MG"}dDߊ9] x@5)(OX݋tBdFXLJ?INc4z6Bmlx 1uB4}@c)݆<ħ@C x1_-4ܿcJ+|V~ñ$JDLj2OѲ3n]&Enl80j?ᘦ,\p&1V:v p\ 'u[Mwr.†chЅ W6~it.%wcPpIJ>W<#0Bi7<\7<.ބ\i㑡V<cIX$Iu@|8׆4Ahf;l|N`(|8hhCn|&yE ǒ,cđٕs8 b {g\8V|!vۭ ! ŰW6☄]%PWl67mBq+d8fD7FH "GԮ"'x5#X}jܛ61ЄB! Ѵ ǂ ݨ>3".Jc8=n";2CJ5LLq4 B+7Se%čV:WBVc4zJZ1pwB3^a`4XrBknE7DU+"f/]QKbڄj"MU+".ran8 +¤GxRШMzN+!(] q+! + >wDjW&ΌcwI!mʻFkӚ q̴dnRVB\NZ:)p7B F q+kPrEhͺc\nj-(b ( W@r7V>fWX Z+sw'Lq3yg>@ߊV[pR =Qc)cqm~ N!2ôwxpk!oEBd R# L{ᤠg8\~0;+L W W4BW6Kp76\*(Va Gvñ.۪ N*iEsñ+aev5k7K`pxܫv,Mn cXb(sΣ:+U~t8ﰪ3n$5x .!bpn{+KV23N<ԕ ĸXЙ/+:9Mt8e75eÕtslt3 Xp#5i7:\z8W:CОzt8IAX8MfI]Vm>=|qGd$&6"6\Sp!#Ά(ΆcYZ_pV jb1-K76c ++siIg=w8[8^ѫ^muW\pi\fԛ6X YcTvOb+N"XpWbJ>Q.m"How2\C2-\pCbL  ^4h&q/Dd/Br^ʆG"Ml8Eg-l8f!AYp f 󇘆.8`/vD<Ӽ;NlVߴ '5[1;Nkd p.Ӽ8^ygVI^h B+NpL==ᘶ :ύo…wxXpA*UӞpUaÅ7pE7t89w8\C:>&:e=6XU6:C-taڍ TiAvW:q:0Np r*a33ݵ.3:\fn-&:n~?\p rJ`yNkBj4OXpJ+t8,ÜiɅ9Zp&·## W`lqn8-z+7*O:qM %&@<`7m1k%Lq,Uk ]K&@\a5]5Ƈ#̭i7>,y=RsqKBsD&@E΀8'8?wıtrW@'qMqkV?H,qUe8F9/ T9"率kߚ6PqIWn<&sqMpLE+R 9`ڌ(pvZLpGop62̌K(Ǵ+ nWDXp9{t8t>e=bUn ~ g(eT-p8(p+&+˛py #%kt_pLhՈy 0jt -c#a-9qp :f+iM6\3?I`+NEYIvc ș Gʆ4Jhwc(|r{$UơITO&6$pFֈ:h8VJy+.9.h811 bWbʆKW丹 weÞ;.yus])NZ2#62],y6 ++Qriw8B ȵ Ǣ2Gqo:cX8Nt8wW).IFԜ N@u}Lt8j,iuW:tB{q_Kj;EeڄëV'pWi13n1ctIMx8Dyz&VkÅwpWGp8H"6 #DCI66҄clnhd N*,xgaᘈ7vN8xXޭJiE)n72:mFca jrj܍ }} wЎV2xXp_pASMp9G{`809mݫ`{A piCW0\8FPY u֋[\Zw5WMpĢ-\8&TZ:㑫Xpi36*n`8VuՒ\깃XYyrlKUΙ4Xܫ`4oc[ ;.ʉCf0\bFw0 纁ԍ +,'`8z`8,3pxq&0'ʅ2q6. % \8zcsذp0ӂdYf,qÜXnX[u n3'nXq*#MQhMq8ӴIE[px)fcXbMp6e1]Jl\8.yj[pܹpVBg8(Yp~`8t6႔+`D[pXGK[cłdaA:3sN ~}d`Md8qFis3.Hf2f6E:\pX)V.\s>pn$،pc4iýCw2NcG4v슆ӈڌ RԤ G. W;NgkNpm&na Kv,~>tM`Үl "Cʵ2xYV(\Q +X +g&(\P82C2tߠp_}l5uZϕ \uxH@ FtHیCG@f+_, Ćܰ8\p,0H8MUʄcbm4ʄ"ݦL8Mvmfa?!V&\R7*\e$ +G0ςSK9펅;$c r‘DhD + Zp̒Q<|IҗAV*T8IJ +,-T8z6~֊,~6c6m%=p Kٸp:!7f.0ʅ{ܹp%Kf.\^NrIsv.\g4uuąWXqX\lr8ÿqz3f.\r[Wݰp7놅CO;X87j,=pٰp5>cXW,\+ع\ l}aXSA7,>zf,ܭ0 Laᜟr>`FӒٴ g]pGVz pܱ>p:pC o3|Xp>湃X:i^u%ñ܏0:TqJ +Ú Lph6Ɲ g$f.\t>p}ar^>CpY6`8pFf0\ԺgM`h:p 6 +3ϴ auᲖP3meZ6$|U 6s0rhٸp*|I̅pąc-zf.ѵ WBXp Gw…c}ms>6.\{70C\8 Gtۍ '® :+pPj;YᎡ2Bi)㢱dW.`p `8f]wp膞ȲqnD+xm\8+V\8nU"\7b±ip \8{ Y0d +n/|ą+ KݸpYEo\86s`s wyM0٩ptbuř +Ǥq=D pVПnq0`…QT8Ջ7S:LpLi +@#B&P"o3N=l۠pH/ +w Zppsٵ +]0ie n3In %;sߠpF[p^|1N֌ +D +YPZc‘mG.bp&鑴ol6(͹C$+yKf(\6(\2|1V^ +[RJRX 7*^ݨpA 6QX)x +:ZlT8zp݄GoX ފF8p.bLXf*ܻN#lĂ6*CREwp#' +wT8t߸p*ֿpeko3o\8V3oyaf.qsᚸYpp|6qX_ '+s\b5ps'U3. h3O3zpą^b GwΓp eO!n3Ng%9kN\8>^n3?ԮM\8Lg\8 ;jO\wf΅8\;GZeldtk&K_Nw.ǐ?q`ٻq,›2s3Gxg O\Hjp;N?p rʅc]åL\8-p6¡99n1WUk`8 1n;. ˾}E&` J珮`Bc#5g4.ۄ JjtmbevE $/9d 7+?pWY\'FK393PxaQ؊'8;sY Kqیإ'4ѕ 'xtLce~f2\g2`#Yd8:mnFƣ?nh8n w4VtmF*y\pvV48mBa]'4?A%4bNV]pY+~<4>ڛ9 elKʆchz3NIqz" ǘƣf2?CcoJ;2fq7/2B +ZaxVpȴ WI%nIp7J7p6i%)\)qc(gMt[\)qVtL\j8|g¤6q☭5%6q☲s}aܷl9VNw8|a;'{!sčF&N{%'nxs npoSačwRٹrU犉1t:0q?x1`fL7 Xr6L\d!Һb9+'v1OM8qzMk^9qY>r䮜8rmy`ĉ6qX"b7N\%:ZX8qם{un8ADn8 (,R@qA"t[Aq.⹓W> 5+'6d5'TPʊE;+VŹXqѵ;+qLPqDSnʊ=a *{2+*ngP\c)(i5g ǴI˦8@qBtLƏ8zׇcnNQqU ݛ6G4i"9U֭*i).q6R+)+i3)nT'M+BIqŲELQqẕ]QqkQv}?7:]K3)dPw1{7LKZpAAa 9n&%gNܭ|ʉcn4wr*Lt8q>ȉ*;pl)9m6sfNM9qU23'K.8]r`A9M"V̜Lx%~U*+'>`}+'O;N>#a͠8e55gP# "7˦4fP\-3(̉#L9qZT֡n3'w͠8|Ov .,@qۏx&RC}|(8prJ{@q|Vt +eo(WAqR)fP:AqV۴w8R̎8q!7cx;& bڌ쿛0q}Baqڄcdr&.jڌRfL>IW j3fN\ʉKoʉ5sn7N܈Z9q§u(̣לAqCC w+~u)3'.N8F=7szh,|%n]ל9qYcsvN3?68q7ƉôuE7N&>8 n%ٱkN8FƉUw8q訌2ƉcQ +szs'orUg8qAͤ,0qDx>`Fi3&b%X!|`:KaBӳ]П9qvnĉuS6s0"AM6Nܸ +Ul5aLZ8qn̉K#F8qљn3'Ղ͜8'SJ1Qޱ;%.d-0x>azbC܃Lhɴu-.UM[8q`‰kx>q:+:_n񱃈WXWhL =`5wL(bnxW.ΉĹm 'N:L9q7Dʉb|>q$tدprNTu '/ZHq).[Dyns )}/^X9H׍k4wwPܸΖ6P\׍VfP\H~P( xU5l,wWPS.(f_q&Y4ZV! *TcsfT& +U4mAY4ʲ_sFY<̪3cOQO`Ge)!چ gelTW;PqXu$t *N"Vw *KY= +S1 )*]|"ŽÍ">m8G%3*NG-7aGv3>;(.!r3(nHt-w@d-5P8 >@q# 7kW\8q$E͜8\[8q‰+z>p⚗Z9qv ʉ9q8qC4NS[qčX}?`e >8q^b‰Ҙ`d"ɦ͘8V.͘8Y a9c1$G͘'.w8u6sqfN6sJ7.rĵ+llh.6NRm+wġ8puUjWJK\_@cj]ujLca:wU`)qd| +cJ5{sWvH&cl8LRَwH\Q|C!_HpL!qUfH\~6HƏ6SUXk %'JLBfA%ki %N}|J\]JΙi%wJfp;]1qWLܸoVL3Ktiii &+'Nm?ĩ*Ɖ'<z>p"/͵my0;'NS-']hız%XT7mY0dGdߧ(/Yh" +wGp݋sd~ˌt.4ntoXVt (sA_@qŊxŹ8HqXDSpIulڍp8NRh=OׂW~ %v`⭼↖@ךTg7RGK7-g;([}ʼnowZb+(ŗ;8qƗʉM%Gb?@q0-S@qoڍYl"v#I8 J[hWRܘQwR\cptۍNRk:i7T׃i7TMDn8ïyCi}dT}f:E@ř Wŭpg,NRxőv7Tu7톊RC?HqJ7Pƣ yE_ Eqx+(sivBǞY=`1'(0JwP99W8@q5oweLj@q++^AqcQ7;XM+'o(='iP|qÏN\jnQ(+&..WNʉC8:zk8<9_9q‰㳎Ǻwv4ʉ[Gde0qKOI3톉KyO΀;&Nun8Ú 4մ"WWD\mˆj{xbʈj[Fv2ՇƈOʈKsOF]05^q+#n:ƈKc^q̓Ǩugn8S;q!JuNFx|aIhڍQ6qJ49p'#M1ž0Z?qv7.F֘vcaij;#.Zi'$.˺?BzLWHSƍza9ǂsN;q-nqMFq `_򆈓o8ߏ8tb{A4&F"UpɊx? 5 "bq7Dܴ^qe80`M^n#z #K@k#cF\q\#&F=0,gԤ'Fľ=2,XPڝYQ/^qY bvci#"NovCE[q]W quѡ^qmQ8-AKzZo8"neqX;bq Śq݋=0W1AqȈ?Ȉ[&{ƈ3#+Wx`Y"".H'sfۉӝNzEĥ888\6 x雾#Fɽ="0.v{GEtTw'"Μo8&M$ g##.Q#$N\; q@t|{ĵ;GH\GH\ӊ8<|l&n8qvȉ]N?p0Fk8qR|7N|{ՊߟƉKZ"'GNN\d"CNN8vġ_/\,,v+U4$b7W4=X4H7W4=KNkSW43~P2cS ; k93v+Y c~lw4k1ڄ&.%sW4*Q٢I}E>1^כ񉙛`$If k_o'fniXgѷKAְOްO0){n9x?z>1sK$K@YZްOܰ[F 2ə[K{?z>nkȉI09Y #[Q7ӯ764^Ey>J6qOްO־bY=k_o'g~hhuə?!Ǫa Cgqm #Os? X}I: |3a~a`Y1olӯ73 1c6lӯ73`6뱄?z>9ާ:a۟~al!m_o'}bPjï7s~N_Z𞬞4S?}AgsTegNHd:Kz/_z,d~Z'"xžE)m}C7J/|@ݢ(bkǒ| Yw7')ޜE|{~ Y$ʷ7g1(ޠE|{~s~ Y̷7g/ݠMi7駡.ߤ|~74{ncmI?&4ۛtҢΣOy˖sx=ۆ[sw=`vsv=fsu=?q}w{η|{{n!}w%e-rEM_8C~3^68ߢ[[tx|{kgR7Y5e$^;%tW@ϥz򦅅{k;D" x5\YIfކ?yPz)Jy~ۻM׻@ݧw?(KKxR[*XSBR~PC7%-pUMLכ~GnJd K~GnM"zUpM#T@o|殜7Pٜܴgb,̇~a ;~ 'F=?T;$+z-I';YYbH%>=M_6"y`w}]|Zt =Z􅑱h +{4cbbC =M*нojOqg=0M+)oQpA5 S?Ң{ޢˡH9{.y#-'K-%}ҥ?Ң{zޢ˓zˋ[u ҟ_o-[{֢/H{.I#-'e-쏴融Ҳ?Ң{ޢH{.#-'^- q}R?8[=^}aGZt[ui={o}EZe)h={kvproO{A-{^wI-FʡMS%[}?T֦o??Om]Sճ[}_T֦oGh>7gwTz֦o?U]wOnm=S[}Tf֦o?UXwOmXm{NnM߿*vkӷ*{n6}ۭM߾*vowMk!A߽>KDA3=hxhB $x2Wh񿰃6f +0Y6/d{L 쯌 -=k{x {bGnW9k={,uĿ-ЄD#9E:,˧KE~޿~ۋoLW}lBH@+CҀ_5R*IWĿ~;~Ljej=Фn uKJ,Z b0sД"gy<00XJ{9~V=&ҮR] I^d`^f- Pap(,V+BECīg~k#_!5_G}e\]rGLIoаV: +1%s|HVZ?DfZپy@#LZ{*Om\u6>:%sU y Ia`Ҹ^\ڸp G[E^jksںh<9H[ē_J c/8A]J!'Y9л{26!A5<v V A𵲸Yzf8 t6<~ K1Uo ERsdƤ$hvYvG[{\Q)$w˷#]/\xӠ~H{C?V 1a#_x$*n_~X1 ^*h3g!PnlvXIjR{5ǧT Kf#L!$}ڻJ묉!O L0.y U{y#/Uqo, +2*rT@Ǭ󆂹-0aʮ5L^U\'XXU+UiE+dDn>bЀ-4C #V){CƷW<:^o <19 Ѱ دhKW1UJЧk=A 6^]U}a_m&x#Rz!m&W,{?5ɤdy"U\v&i2j]^C/ٙR޴%LeTD?BH #/Gt,䝋:P;t=y`lqoHa9*7n0ӋM+Z}奍x%ň@LX^;EX)/ޱ$H.ާwǨGzSI`Cr5ҫm7c;o.0ENBqWD]svB06%ԅ,Y2o 0ų +cVXU1dx灜 KM4x^U;wضe`@e ;cK ŋx(|fR +$Y1jvG!BD₺KDDUwEL0Rs7lE{%b+ +Wq잘"LtM F&^% D7Z@d Fmi:0Cr|Y*UTO |$vm5og_;T∘D,e΢x]q<)Ko/엍m%5 f,iS˘ЕkvXA["ƈ^fg-[)¢ l順9D0IKL#+Aa҄ႁ8>f\_q2H=,rava&I?tc W'&F0d\Ę^ +}kőC4#`+`!ȬAb+\l>q +'͔h gxwWqYDO00/":v%3CE􂁙6ŢY yI_Ĉc¢6YD0)xD">^Ob R3[4$>ƌ0Eݐ] j"E1wVh}7K/>Mr?_Mb.6( =%}y n!~0ҶU$<3le|mMŌV],(bۋYЫft6LcI 7B݋i>ޥZ $?hYeNؘCāzŁikc0nxX#{p)a?dYL]A=X9y[,#X0'Wr095QwƎEBD̸CENg؝chҤ"6@l%`nt'SE|hrE( *bmy]^L߁] {ycДŁ%{Xm TBw'}?TN*5&F;&y`" ˪_Djlm}٣|j+,t)J,h̉"z͘"9_H!E}Mݡ`91XU0ZcU{fo/Mpud1UQĆA"<`[d HXYDE,X/^.b'}Ez%8Ɔ^`>9ٺ#K:HKZ0/-&b'o56S9+7cj]AQXa+RFor5H1HynBKr F:KKb +[{LL2#;† +L@SDeƈ>< NGcQZIE x|"~ lo}=e/;fֳA6=;X]2CO{zԴj0s"|}8:W!bYE+dYg})ω]]}w\o1AS"gC~$"HZzyh8\t!Wk۪ +sL׍.VhTujZ)|.d0pԭ_Ҵ.'qpRGe}ie w1x+zU'1Uqw3V`^S0 ̭6 7Y1c5}Li"=r|i:]2=:vV-Ѝh؉E]X9Ad85 75#c@'n 0vz<֭)b\EīH %>{-k$vr6CDjbЕFo0& CdqsRd}-73Q_"b$c)DtZ-;0{W?=DnR-"^ By0 +a)]^02ۓpv4,Br1y00lrHBM4djx~0j,(#'Y +k~FT.|~8m࢜9&[d[c#̼Nʜp`"R -!זmdb>\=1rҳ9E\FbgYD:h/]&+Vx."yڸ@oO&b[ 1Q^i3)I +pe=( +C!Q@֐5q%ټU-=Y9;֝!b#]@œ4={ޞhƈ]'GYXD"ܣf*TqͭDWy;-<`"Iv[Dyeh6}1a*-"!btK}d{MDĸ<6v`6 ?]cwF/aBzgCLyr$"$yڋ("? `w7'1X1Rx쯗}ckn-s"jSZUEpX0%:ة=H\S0`"l$_pEÓ4@G +2 t>{$"EO(f?],:l/Ӗ.'#԰Ê^dvw;ax3@(^Yv+*SY۪( >{dx ¶&"ywjRl=KѦ"%=8hg;cuyAM ψ6"u)6ID%0ı'VA/N%ˢ]lJ-1S`#چCN/'7~3䝋oMZivsCrvF\fPT!gG +o2twc4 @o`6LDև=rīb[1<%$".b>(6eB,ұo'.U_0:/uSC}FWE:¸Wvv%!u&"tZhIPSTm"n{fČNۧumEq KSS l՜V;^Rqq+9xN8p,"G{l(22ikr|GQ-GGܥ" `2+X+X,QyQQ[9 + bǴ]S +s-zME,WG9Ql U'ubVY4"*g40%&Ptb(+@S=Đ>wszhJ"U{w-nhǢض%Nz.dϐ4*KDL.Q!}f>ugE:ȯ{q<5G/G]K ^d=&6=7X'Lܹ8xYlx( +[_>fjsQ6 |:ub--mc[FzCb|TD$Q"5W\LT+"ɺQ1ia/ UbXl 4e{쇉UgEèDrdvP75lf,O$u^ H蟋9ؐXYeU DBe7%>7Ÿ,a>2h+CYYE.bEDcwQ050[xf8/۰tGFP*f:ű/b$~"j ^k@I[{/[/h6`jS,3O;잜n21/=)1 $8 9+RvJh 1X20JXܯO5[".X`H¢.FI>2 _@v(Elo0 ywx[Nj f$Nwn͒D\]"2~oc/ydȨ[&mI Y&Ha`vp;ƐpD]vCQ;W"b8;.=aⲥ)bI?{t%q aw~LĈg:ȨH9H@0ja GX }i/:V'cܫ")n{sqʱ TlN[j,lWD1;S5El]ezfIPPܦ:Ћu""&\^,_DbcT.aZ?GbVjeFLP*t\]TjQD/xqbQCl*[tHr x-ٶ.b8춋fWxؾ`)W04:U1yIb}1z)jR +覘=3"V +GɠeuMRrX$ +"D0_8eQv\&,XPhF*8]w&/uO l>[/2q+RħX 5t=F{#Bg@~,u4B>a']6 +}]bTyӥ2(8765p(taHfP/y .ߞ3J=Z\DxIb)V` 50 eal$ "\8Hz]q϶PNi4x$0/ZJSCǢ(>)2 (Jg;"&}IḍFȰ%X[.D6:3]DW f Pǣy%"#|. l`>l_ bqo 4D}.q>]aORO 'Y)!'2Q&~%Hwb݇Q\%4C21q\8-K"ǞcCsnz帄l*[P1sTdP 6E(\ĚH]LLdFQ{EQrJxsQEZXM +wNgSDn$ $"s颋fD?x8sHLX5>DzK]>j(6-)_@$Ж*"pR="-u1r\diĹwYg\/+t'+Q΋9.mAib%ĘS[MUrK7bPw@Y)x&bV35S5bp)@Wljӳƭ5q~GN`D~%=NȮ+"k2M*wuq]R +m/J޳K\G,"#mphO*kb jg{Kʐ +qHb]jL(HjAцڥߒ+3ZМ Za^[=@0i2GDmdmFE}sځVb,ޒ'mZ:!'î"Y'EN=ⅤIA.bT$Ha&lXa)V Z+*bqdg;{!b9E*W+~͵u%L͸95Ş$EuGJuf91v7q&rw'[ѲF_8$,Uٝ8d }$ sQŘ+OMzbRh5/Z+)q#zC1\\>vr~dbٴr@!?X`o]TO) {;ING&NN#I[[R꼤XpagL,vd8uѰ/f.DlESe#fs%eǔFĄ]ӘU7K0l#2( e Ik bFͿ#S}oNM+jFrbl{Fv +PBg%,5gVebaKF`i#Z$c6h,<ߢ큁ZDO$-!2dե줚%ZF>oc޶54nXY~ɼ@wжQ#TTQE1* /ZeAVҶh(q.gjcl|28o9N"2)J/.tCd*WS[ +\EcERMpqĩ0|e!OObhE` dx2 Ab-tE{ȃj08Y[Lbi_Q*+Y|7F.Sh>|h4a f0ۏDRڳG1okc&GJ[-$rvpK^wY1gdxi"wB1ك&Pgƒ210p4T)_Sà4I^5Z=4 ybnpq%S^DZW.?딣 LDfl'˂AAODe>wQ+1mx(uL-蓥f<*bi7ȹD>/&2Z,&D鴜7jFE[ogݯ}b[.X+ED?eSQZZE~Rܘ^hq6= ]٥.ɕ%r6Ǚ5 ؞1y2qR l.a>\.:7HDz0tW5/M$w-lw/b>2"D4j"`Ⱇr13{fF/`YmE M?]ij6uCTBf=vH҈BiF˘I0hbsc)Ό(Տ\ʠ1o*VY."[r|4nSw*6QUdY>qȊ=ꬿ7 3FZD 8YQ|SĩXPb^> )'qxk#Co\_=3ز0SXJa2DY"Nf0ئ"#q!#":/)/kOt>qpt'![J<2KA 6ڼ( {t=.ss6I6(mpP.]j. W5/-uRx +Ѳ|dװӚ*ʑcjuLgfHQnmb*LQqH#&?z02Ѫf0df)0::9t6_)sײ>SDJEc#]cjVSkhԏ2X^$ϛZ$5#&kٻRܺ1/1h Ū9.ά'NLYX2Z欿LAnіc&L FvGyC;:]D48U'k$"96;چ:QLs+ywKNئOWv,e餖mVcy]s%CDdXlEkLǖv>,E[zG/rt1h,bcOlQ(hRng2YwK.RE35XҼe&PI^@N.Tb86IEE˯uqȬKW|5 ɼ T۪l<;[5> +c&7]O]^ 0K +DuYh!hqa LtNK(EoZkEB3GnCUiY>ycfLzg{*Yos?2`BO?YG'i K\ 7/TqC vwW7 6 [UDŽp˄m?sIAªxĔb.0q'0m#%f#7C3 UpI$6 }Oj,Icu2çn?^<g彫v|0cv2N1a$u9hn&ٰ'Ȃ]Fc.S\,$1jt[IcN;>Ld[&[Wޠ\.2~ qBD\5[&5 fkR/Dd?f(@T<M5$ӚVgb/O$>迪(EtK2L!>QkVRqQ+dQK$W5}Kz(f AKŅkZO%N*a?YP|;OM$$'"NbT"vul=p՝?,C?F U4{8z:Z`\Fn?)&n:0?FT4~I/#uI=,, Aк}fF"-$ ]|sxu?ZɲOOD< NדѦ`j4=\5_8?&P&Nt Ba7$07tE' 50#?x.ZvX6&Ϲ +bO`#HNJyC׈1N_е ]c;/HmnfܿȴllN{pj'$8$\vFtK¼;+z`"xH%aK3X!v3ki]w6XP&!/*d+9|5kGĂڸS\?yʬG O - EU up rE=.DL+arr"ʵ4-Qm\?,d6=pY`D?|!..;0i\\?ƨ1B* (R)/#A ~X?I9⠣ ouZX^O(qJ#ᢍ紼$`RLjr`xt4Ņ:[Apw=Qip7OkG%Կ$UVhA#aUި)QW^4`ѭΣ*?I`9@lc%JWۑd7{rݎK5Jd/ h '&Tܑ㱊?G? G1$GӘvYeBtLqx\$B{ہRf.1:y#zT˺/s!^N+KzXr?D곫n?(Nc5,}K?jL5h!&.8ROƪ~8h_\?Vi0C!]pQF$3\p#NG;aUX,$< IS'p/8ALecyT6zVXAQjkN,JjPM_'i?=菒饉"bM +^bxyJ'OD&.xGM +aVnvx1V'L?I]?GD +ɦyΫhZkxnD,9yM'Z% yODn׻ 'r"'oDf op(k A"-8I"F }qDˬ&pD7ԟ/G@1ka'OĦOTPҟDxBMԟRƩ|[k|Hd'bvEb8 Pe&N:'/u6L6_. GsK5v_l (2|l +*?rZ/8iysUbm0R\fv $IC&4ڙ}WXJNLQzTpq"EJwMq.hLx wIHK9E;;fBlN֟$+ u^t.Z͘Ń}&3<`]ܐU`G۲*`Uw쏻K'/mK@*th/0;  )NU'o1>?i>Nʟ5Q"c'OhS"81L3 +,\`p6mEل]81Z' 9c y 'efɅUGenw̟$jiaXF)_.n?0< V!'珓Eqdq-# ?0سG%}N;XgU;OᎏG2+|6I[?j=صGmk5︱՞wO4 w\¤ n?BtDc@GǼ?f$rqmNź"Nԟid(! '₁(3$%?Nŕz#Q=Ig p(VGts8֒w(ȁ(ɷ(k"%Gׁص̥yՍGm+|(Ϊ7ҟ![G'"irCQl@vqCQID1A*tM߆K+KF9'bbXO>>KbOl=ō'R&n?.,~σG[Qrb,g&?oQZB.)e5?ZZōB0?nikFH_KEƊE:hIwWG*G1Dž$ 6˴EKVi ~4H 67+ 'e <>iƬOm+%\'iS7C$[r1-\'/Ѱc©LhK3Xn H_5q%Vv~ww)d%Iќ;ON3n&pc5S_fuD6(C0O P\? ے +Gm?F1 ul?K< +c I9yVčjH#2ō')o2Ij*x_.n?h8jqWz ++x WXZpL܀Ep\=]܀,c2/in=y,.nĿJ#ºAȮ1MRv]܈o+r$kFoiq?1]܈F?敆R@d#7cO.v77_ZLܐy/uG ~#!u܉R7pnj>fE'ZO +ʃ!M<m?tI,:\ܐ5K4UI%;sm{"8\3DWxj'ĻK .:Ov'74I@Wv@ :anc `u'1l){pBc_m3?dC=f1MS`7x@4YP_Q}eh%Q{ UV0߽l$=Bc̒JCx!ԇUT}H}R(G0)-RlG { 16Y&WR_cF<+󘌉RO&J, 3nc^R Q}hX ,h}WXːO/>:sW 0F[`>=H:*z Ӳp}Cֽ'\*"r\_NcZb$x ǝ^V+E> +}\<;:c `_X ELKx}X@%KʣbfΠw;}\ވ}hO$M9}̲rb[,wD%u݈}A6Opq}[u@cKg/>-G87b_"Oc^}b_!C])7bm4Ƨ rXٴ P O^6՞>E6:wbDE +0fOD 쓘#lX? w]Uľ(J7`}W7 ǺhٶR/@e;/Lw`D0I&ۮysp%+uIgb> ;Rx9o$hG #{VmP MS.>TOYe/>y,z)c:}<>VaE>-j0IBhZAăt0 b0yf~~hـ}%gEۉ}$sӭI-$NŃAv 1E}7bub6jOSqF8}e*'/Jqޭ P7`_:xt>auO`Da-I 6Z˫: :'쓓yn>ћAO`_n)7b]nx58dz$4 KC>Д +`dq\’qqA>fq1|$UA]uQ~ 8p}L׹).\E]q}$XVW֔lBUq}\6\]1d_Q\Er&toQT,r1U%`6>>.X cb_VO\ H_bdF=ܙFotq1~8y}PGzށփ/p}"240v;J=,2,q}"ru1yIv\ % G1-\EFZ_X'OpQ?k[*!* cwsvX {d'{&n>X]`}әY~qC>)š)Eq;Oj4&oe> Wa}伋m>͝[a|䚗5=i}.UTm1,1l9 +GDҭnjDgahdvYR0<#=dbX/KڧX+I{u^01`}a\e1 S +Ո=jJ>>wXc`PQq1ҨЮx!ƴڤe}/]\>T$؞1"(7!uq m-X䌚(rw>(Vrq(2ǶK3wV iHmxY}A !ΘyDZ էF!yX7V%:0$_Ńw '^~σSRF{dnv\9I~`)n y'3 H>sIհSqIClY}z9o$5I8T/1qH9;OOZ-H'DI>bY 3Ve*{$Hw1vtK ǀ.s=뻤&FwX%U\\> $ۨ_; |9d]4 h^cq(cXDh#`}cYĿMߢ]Nx6j뻤 - _>.{] :Q͵E#5ͣ;;\ wͿ GXw>&96XV `}ºOk1ʍwp.bpuiq"%/r.j">j`}=.r#S +zeBQcŒtM\> @L;O8^<`/Ou$yr.i]o"𓹸P}ă9x;"w!Y}.vF8h}z >i}א̊YQ+N>s$ZE|S(z&.Z2Wf̍m4* h}y px"!Wq}Ġ5Uh>ᠵ0WcYU'/1cJp +2n +>q}ADO\_ ɷp};>R>x} \G3X^45 Rq誱_.^_0bL5irETy}ϷGmO:p}A +񄽹p}j.x(2.?Yc\|69q}<\ܩ`8p}1ւ]8x}Q6)s5>} vy\^6[ ٛ,][ľi`>}f(q..b9{,iL(A} A&Ht'/dV8iaMG]>d_`2 1xXbQu+z0{0ȯqgj}(hD*%Ks:}5ﴮ SS}oqx6f8}I2.*k}<$Ǔ,ۗJ ޓ}TFϼcx`[Ow;}t)ڢ#ߍ0NjI%4Icy3P\[>Cfjk2Cb,9Ծ&մ%EcyX7n_\.7pPH4Ot_]&n>nCqe׮-th Ǥ=z@1\RŅe..tߐE~}rj]<^$GϙQ~ }C=wG xM<ɎK/,DEX,ѷ(wt;dDQdmuمcG- ݧ*9> +x'llm`d)0wvţHAqKwK.bQKj<}G r %>jKEUZR,u7`jqH7pd6yk KqGVB.Np_'6 6nขT6qrDžAiv/<>q j% i·m&ȭ=`mܾ$!M>8}޺<7ta&QYlPYti ~jۗx`8[!%ܾO >jpJuL\Ȝ1 b>NY>'}oqh%<|q,V/2G&6>FX`ljLܾH*$c8rׁd1EҢ>YO½0c$\k$"ѾU'`هK͕ ,Ank@J!"hto~&%f_NJЁ"ؙ%{qFeᾎvnNn/ +Ȭp?kG>?t}n_M&CUP5}1PoΎvKm:/r_Bp]/*~e֍,u5?>筀v[]\!oNN>gf>Li&]G>_030}xg&6EgpgއF1QUux|pI{0c0zc%0}hinW7Tj$><6vQO /}vV>S>\1*xΤ%JЂ7M|L9aɞCTkMd>_kt\RNo?؟̒gw5Ζއj ag>>@^P;.x,%%vsx'?/d10}(TE]׿}w<!CId)9mp}`pε!Dq~%_h~7PdK)~Ѵ[T2܀knnș?l9g抶߇U{p}s#}s0 u~JF_~}WJnF%wC{oB?'r #؊}?`8窺0~(S@d?x71~k`l\q.0}h3D~ hCU"mߺU %v *y7zLn-f?X2OW>N}D_`CAp}Ŏ;V_+f>l8[ahwu{v~~ٲ +v͋C$}PpoU˙%&8a?GEVk3`K5E)z0 ~Oc*|I{PEo*ه-%a0z1P?`Mƪ) cW6~vu>Гy[ǷY0O&%#.m{[S w%?ܝ,Yu +Ō +C?}i*_-pa_Ih﻾k+s_7۫Uƻ?~=1p7a(|Cj--PbgvqLo20}_6~.\GWw &a0}Cm[ Lz7"s!sw3{5ewz$LP>ܾeIULu K珴/%6>M߇О75}(Wq߇H}X ƁK-}l@yhl}֩ɡR}*w }'nk(~2V U~5~RW{^ kng~&QLs2΁hTγ]xR +ú A߇_4;wTvs>L> } +}muqe>-}mRPA އ~~Eko{ O~+]AXP>|1Q>(T^7C: W(z_gY8â٨ OjއZZ}0[>tgQ;*އF|f"27mDY0Cdއv~HJZ0Engo|d0;RƒfXa8 C}E&vhL>LRTo̦7R}mO>feƚ[g(r>!7|ud@m:,5L> D ݇ik,a(v}pbkc0oTo2f-e.>3L>L>ȭxCQ׹0Q>_ o`*v b }OZr.x߀_(k݈}QB05/ t~އҾȫg{>o`87pTYhÆ;M~pG +7X/B7Vϻ|N'{c~s!s@>pCxڡD&a k)chCٓa CN+L,c CCHM}|IM Z I?ogk$k>xBDC@H?/5-yy7c3&TC&oQ?^vym+$!\[:V_bTcm~^g:BPes[cH C8[3LBgC8am+3 +yMЮ7{3M`v~od Cئ_ ce ChoO x]7s9k\[ٓ pGg f BLBsm68o]P%l Z9oV0 ~]JUk" +͝wQ_jʶM5%$%Pv[A[zLsj<KXP c>'ᓣˆ~]gO=~7*bE?_C E18cR ?las?EnpL~6ܞ~_)#„ij 3Lܤ(~hhqK?4kUFk9ܱQ?:M CV3^)䴇OmUCe w,ª`CQ3 +E񳧩yX?w{ ECf$UڀatgUU7|ICaCCɰw& >S*~Sl _()~*m»BQlĉ[Ce%(~8[E%P?T^\??;Op#~xMx ?Ъ ~hUE|@ ء ~؝s#ᇪs;v +&& } DV(~1v+!6#D[jkB5< +(7R!tK~r_k?E?@*awwm5P?}q( ~2K'j;sWݣT'~ud]W_}x?q)hb}e +endstream +endobj +105 0 obj +63219 +endobj +106 0 obj +[104 0 R] +endobj +107 0 obj +<< + /Resources 108 0 R + /Type /Page + /MediaBox [0 0 445 183] + /CropBox [0 0 445 183] + /BleedBox [0 0 445 183] + /TrimBox [0 0 445 183] + /Parent 109 0 R + /Contents 106 0 R +>> +endobj +110 0 obj +<< + /Type /FontDescriptor + /FontName /EAAAAA+mwb_cmsy10 + /FontBBox [11 -215 942 727] + /Flags 33 + /CapHeight 0 + /Ascent 727 + /Descent -215 + /ItalicAngle 0 + /StemV 0 + /MissingWidth 500 + /FontFile2 111 0 R + /CIDSet 112 0 R +>> +endobj +111 0 obj +<< + /Length1 1968 + /Length 113 0 R + /Filter /FlateDecode +>> +stream +xU]hWdj~VlTdc.JI5%[ddv3l\@%VRP|"E&yhb +Eh+BK>(g&Z[sιw=  w#ʡOfH#9iodp?*M7ߚ.,L|+?Js9NFHޞ#EVɛrŹvd䪂5I\8Yێ~di([fwHpgJVyn-4c/͚%KF= =+6q*>yx'2Qa'؆HU_um8"oBYGa1>2.RO]Fq#1M ֆ낵5U~(LB'emꈪ,wȼhs"LJUNUY} vMJI9#k4Jˆ]J&GF#Ԗiu.r}аqp4bK#94*w[;lv#̙bw)*9*_Ӳh$m^7㚪 J6/kˌ.2lAvVb !y-hZݙ-Q0YۜفΰHU!+W4Jb9$%i5f KOUȤtJ7UUU:}πs.H.?ڒ-2GGTIsaL >nM# EB3z)$|TXnnt1_ ;β\;r70ŭF$$KS&;=վvn~;uIo{Q9 FG\ ѽ( ]|?+ObTSa0OzQ˾i&֐tr0Ca}aBՋY1ho8Uz`PMɣ@x1zVLT\]?i'leW2i4)FYM=.w$Pf<'+$ib$J1PVia6?R> +stream +xk +endstream +endobj +114 0 obj +9 +endobj +115 0 obj +<< + /Type /Font + /Subtype /Type0 + /BaseFont /EAAAAA+mwb_cmsy10 + /Encoding /Identity-H + /ToUnicode 116 0 R + /DescendantFonts [117 0 R] +>> +endobj +117 0 obj +<< /Type /Font +/BaseFont /EAAAAA+mwb_cmsy10 +/CIDToGIDMap /Identity +/Subtype /CIDFontType2 +/CIDSystemInfo << /Registry (Adobe) /Ordering (UCS) /Supplement 0 >> +/FontDescriptor 110 0 R +/DW 0 +/W [ 0 [750 776 ] ] +>> +endobj +116 0 obj +<< /Length 118 0 R /Filter /FlateDecode >> +stream +x]Pj0+l CԒX}q z0h[lE^X gBpjV& +:G:g} +endstream +endobj +118 0 obj +234 +endobj +119 0 obj +<< + /Type /FontDescriptor + /FontName /EAAAAB+mwb_cmmi10 + /FontBBox [16 -215 882 715] + /Flags 33 + /CapHeight 0 + /Ascent 715 + /Descent -215 + /ItalicAngle 0 + /StemV 0 + /MissingWidth 500 + /FontFile2 120 0 R + /CIDSet 121 0 R +>> +endobj +120 0 obj +<< + /Length1 2244 + /Length 122 0 R + /Filter /FlateDecode +>> +stream +xUmLSW~h(T[/^`'r Gڄ(Zh"C6u1`.8cAe_E1m1ے-cKܲ,3LonսRM6i9>9^06S[j6nFƮ` c zNm?'%҂$)>L9+'. Fwg\e/\/QECEL=Ґ .?xb(g _ Ґ(ؑI&]#)8!ΰ\&\) cxq{A76bڡIEVeXoY[Y.[N_W+YCqG7w”'[OW_MpU\9cZ7I Ze|Jz.,f#uobS_7U!0Es؃I!]^ IBwޅ +9Y̌4Ex5Keu`⚭|[wpyfh6zFE@g:W+֧CV0Lڤ2j%]ɚߒ!Kҹ4Ld&mS:c5YeAښulu~ijk2|EQ&pLIZVTdAWv1vZ;m. +2KDrk:[-.K GKKK,V!ضG\* >Q?5l˲yԘ죱{a[쨱${[5 py2EGBiq&JDwwi*iٙ哇6kxȋ_;MZs0/tt~W1{8htr ]0_)܏߉K`)60Ox + ,v.-N#N֜e`&0l֜<),~&E7RB!aq#`aޮ$*jݴZ"Ҋ4&JTw'J +a5-aZ!jC48AYM5&go0IOJE 1{ L!Q(h|xr$2VVIn%Z":*.-:+hT6%P"42 +VVkT#ޥIm!ţPh$>:C㡨B H#6ѷ? OD1Bfhp,> +stream +xk`` +endstream +endobj +123 0 obj +12 +endobj +124 0 obj +<< + /Type /Font + /Subtype /Type0 + /BaseFont /EAAAAB+mwb_cmmi10 + /Encoding /Identity-H + /ToUnicode 125 0 R + /DescendantFonts [126 0 R] +>> +endobj +126 0 obj +<< /Type /Font +/BaseFont /EAAAAB+mwb_cmmi10 +/CIDToGIDMap /Identity +/Subtype /CIDFontType2 +/CIDSystemInfo << /Registry (Adobe) /Ordering (UCS) /Supplement 0 >> +/FontDescriptor 119 0 R +/DW 0 +/W [ 0 [750 602 ] ] +>> +endobj +125 0 obj +<< /Length 127 0 R /Filter /FlateDecode >> +stream +x]Pj0 +t=,N^@RȡҴrjhl8}m%P# D;g#w:M8€uEU*o5P$99ằv&H9 +gN'%k@W[5A*$F,nen/o^ooIۤjU ;+mB28Vd[ >d_} +endstream +endobj +127 0 obj +236 +endobj +128 0 obj +<< + /Type /FontDescriptor + /FontName /EAAAAC+mwa_cmmi10 + /FontBBox [-34 -250 1047 750] + /Flags 33 + /CapHeight 683 + /Ascent 750 + /Descent -250 + /ItalicAngle 0 + /StemV 0 + /MissingWidth 500 + /FontFile2 129 0 R + /CIDSet 130 0 R +>> +endobj +129 0 obj +<< + /Length1 4108 + /Length 131 0 R + /Filter /FlateDecode +>> +stream +xW L[>?m 6@? !ҀH 4iF]BvMiu]Tu]64UEݒ(*-~4E&릶ig;ink;{;{߹^ o-ނ9TPstqA[|5@ s e?ۉ.?@E&tQQ]O,H0C`E_ێD9?Pa[&bs 7-@O9k6AjXN؝L|=aV%4#, oyxN3p p CqA FB `L!|$ogk[Yg!#0b>b>`d3+SDV8'p\Kpypp{NóO| \#ƺ 8aÞtð#nZ18MHkr*eB.xe(xt9Y(+]*wÚ.ջshXc(HjNR g ?5Ҥ1R1UAN܎OʾOU;U bRl9HeJhШx#ief+5^}a?36њJ:m^&rK_%)j \z2v;pC8/uDQmQu}(R*dmS;WtNڶdnj,px#o&#W_/^'[#Og(O.t۲qL 91j`uTV[d}o)&Ɂoi0J̄.{1kBA֦k,r5ʈN+,Z]և,UL As,x5atp_ary=ӮkΞ"VeОlʊ++<-`@g/:9Xh<crD=:{\M+2ʦ^߳d6SUx[7jZ=En$"MP:K5Iάkr[B)Rf(u-o'J&RP%\".2؜O6JAPmZzOn+uޫπQ+u]Z`3-Zl"3e;8} ޺4W?KڌoXƦ!{|mk6sX0rPIu_IѻbS>$VW8N~8=GsCdu1*}J֯0+ 9뉙N kT\Ϊ;ATVO%,CJ0T( Qbz^vP:!xv +gYAlVfQ~<+s"/eeǑc|J h)IKVfP?Y2KYý^ `E $L.f-*i] j}ͧ[1xÑۛمϗɉNU-{i8\j%{ +endstream +endobj +131 0 obj +2931 +endobj +130 0 obj +<< /Length 132 0 R /Filter /FlateDecode >> +stream +x  +endstream +endobj +132 0 obj +19 +endobj +133 0 obj +<< + /Type /Font + /Subtype /Type0 + /BaseFont /EAAAAC+mwa_cmmi10 + /Encoding /Identity-H + /ToUnicode 134 0 R + /DescendantFonts [135 0 R] +>> +endobj +135 0 obj +<< /Type /Font +/BaseFont /EAAAAC+mwa_cmmi10 +/CIDToGIDMap /Identity +/Subtype /CIDFontType2 +/CIDSystemInfo << /Registry (Adobe) /Ordering (UCS) /Supplement 0 >> +/FontDescriptor 128 0 R +/DW 0 +/W [ 0 [365 520 520 600 276 803 500 877 622 467 ] ] +>> +endobj +134 0 obj +<< /Length 136 0 R /Filter /FlateDecode >> +stream +x]j0)r{.,B}6Pc·o2#:9' Ǥn=$n-zQiqACoDo9 +{H]gcc +VnJ#|ޭp|TSw7i3nnX#)(:EW1"$tϩQAz +?jrw +N4TPU> +endobj +138 0 obj +<< + /Length1 2220 + /Length 140 0 R + /Filter /FlateDecode +>> +stream +xU{hSWM_>]&iv7&Tk댮K;޶iILhm1ԍmƐ!"""c\m8`Ce0c[ަ2=w^PںiQ6 }Ig̈́?Xs~|/a<,ǻx"HbC/6 :!f4%=hCbL vppp?p 7.WY5>Eb~MQoӪn +.f{xo8R6/c +9d)!eB5U* 8*JKMx7CgmOx~k&oT>󨾹 Po䨜G fŠ.\ w].µ 94n`[UgqQQK]_MA/,]ݠe.ING >lܣl681+ih2smq$etPG؄F7DE#LRhFg#ɍ +gkČS9EZ6,#nT0[Өk[$Q4_ :gM'y%W]rn \h"~KFn8!E;6!]d8݋u \R;'KPWejֱsMdkg!{ 6{]lj :`se=TSJCuM_li[;r\8j]¼˔[Z甪сS^8zjS@z$t\K;:[(^c +mg?Ut=]c;TSP]vY +t񹇕K;\9ԍ7&6d/Y8QLcZ2Ng Y+Zw/xϞ+ZHlގQ ͞@|;A}ΗY"Ou܆BPk3qQR$[<@X`~l4PB5 L.by@xE,e'FS7ƨ&Oޮ&ta :҄᧱8ir&@m {-gQ #Oi%Mnoz%hafezJ`8)KbfŊ J~XrR^^#[|Ri/\2i9fX"'FkMޝhv t:1<[DZ(@\wS?@#s`hpf"@\S>:IKOOz4@ +?!YZj@cI'GBre+ B[>(=/nS6ފ ޼wYzo +endstream +endobj +140 0 obj +1539 +endobj +139 0 obj +<< /Length 141 0 R /Filter /FlateDecode >> +stream +xk`h +endstream +endobj +141 0 obj +11 +endobj +142 0 obj +<< + /Type /Font + /Subtype /Type0 + /BaseFont /EAAAAD+mwb_cmr10 + /Encoding /Identity-H + /ToUnicode 143 0 R + /DescendantFonts [144 0 R] +>> +endobj +144 0 obj +<< /Type /Font +/BaseFont /EAAAAD+mwb_cmr10 +/CIDToGIDMap /Identity +/Subtype /CIDFontType2 +/CIDSystemInfo << /Registry (Adobe) /Ordering (UCS) /Supplement 0 >> +/FontDescriptor 137 0 R +/DW 0 +/W [ 0 [750 583 ] ] +>> +endobj +143 0 obj +<< /Length 145 0 R /Filter /FlateDecode >> +stream +x]Pj0+l ťCP' K+GPKb-ƅ.13ð:g#ycc&B +aѺA[wķd(DqpXz ;@|iӫF_h/!.B=t_~)'>N'95 Ԍ- t#2UTMv77`S6FUBeY+쒷qDT QJX9uxl5U|~}@ +endstream +endobj +145 0 obj +235 +endobj +146 0 obj +<< + /Type /FontDescriptor + /FontName /EAAAAE+mwa_cmr10 + /FontBBox [-43 -250 1008 750] + /Flags 33 + /CapHeight 683 + /Ascent 750 + /Descent -250 + /ItalicAngle 0 + /StemV 0 + /MissingWidth 500 + /FontFile2 147 0 R + /CIDSet 148 0 R +>> +endobj +147 0 obj +<< + /Length1 8244 + /Length 149 0 R + /Filter /FlateDecode +>> +stream +xY pS>ݴZd-E%y,۲,lyM`0xdl=$Є hJm$/he4ͣm&)m4{%r|;2^UЬNHapm)kQ? LSXxGzFooߍ D΅{q14>5{Y?;&67ޏ{f'.VظgzP&'BS7v+]~}rk?ڎ(q&p B"Ѝy|r>ΰgK\0g18'8 {`F`C4A  |&QD.{cO;&V̼Ɉ}N>>ަQT'eu<9@qbo; W<.yAG4]p6 !@zQ^ajVi5 j2^'I%b24EqWe<{hs:.dTANC8 +9ivR~esT"s` -fxc4̋s`Gk #%0̑@->*UNGq騘d;!i1SϏ#X)vJ;H@D1r )4p_9yRiVCq"Y( +>q>i|['&eyN0I@J"/+I9}0,Dž~O>Pf%q938$GobD+'y 5l%MB-oB/)=UVpSXN&V≻[u )vw8*VVVU߾jۋ ۟K˕{.qI%^#FߵVw¡+[k5si 7@7NdD+ x\L$ɉjZm!RB:#eUM" mjzjZOmXMזmmEvyㅠ.ryeA/:&>^h:QP|:Dߏљ nNZ +lb)3i2P8ҝf&ҢbРp5I4`-&F|@  G:s ?;L֦^|N_kg{bDAwe}"Y}eթ7T 1>kjߡ"bЈ,I%J\!FұZ53˩F[ +)*{*T[K0JU +>5PۙwlMmX^Yp.vw%P]b6oXy۷Gn2{w }_v:R}?3ܖ*Q"IE)]"`8*7{j +Pz~{H_ߴVsY%0P|H. 062IUwY9 ȉ1>8$tS5lf4@2в(lj(iVw76SY9`g"}M.s}<׳:ِ(]DkZFU31&d*̠ۚ_ե)ڄ[1K%/N~sJqVVqnoloߦCI$N?X?efxD[/FLąy#݌!ggPvYdLjHYV@kiqXܜ̡ +BxcfFo ECNDTT(rw]4F^Jh$P|3HKņȩ1B[rK8M 拙Wʄ$&,)DݦB}TJaQ?)#A(Y"IkQğ<3Me9e ]t,Qr$%-J(4ҨSP4yPm (,!/J!<82?OuS}™(+# +;7p5X=t(^%"[ !I:mR[L6,|RXL|hDB!5z*}j&:/c.]ɶ}Rb]z's?eDB8#@j v'YB "|eT^ Ihu7},`drX3+Xxزd.& .in.]ܥWݑ0_y[?!~x8Yv5'Ѳu晾ɟv;ggdqh^8]o[`d+ǚGnquM<Жvo[=u^_B)TK\9 4HVnb1HM}> 2f8 DJ/i+SDc K;I g~b +ڭ +*A6mYY>ָiȕ,k?Z~mW+D;"?S+o^o> )Ls82' )-]]Rec"xG~z—iD2BhwhXC#'Yrn"M, +uO@# b~9K juI%$,F~5 ُbRԬB$ Ku5G/9B_E#}1!l$v!5O^*X|{cOn +NJLglzvvH?\}t6թJ)7+֦qp#88bU wn^~Rټ`plZyAyJ,M@c-qgx6`[계-(Χ͞K-F?]~yvlYu!Mzm:J{j6zr'#mQ& A$]%Έ8̚ER):H2ItJO07)IwX*X*| nH*Puʚ K[lO +jo{RJ-e5,IER؄&̖.*#'EiNG3.sYV8IEZ7TJLdNiĶ2SD-C0٤TjSa5µ84#M莛(<ouhS2N*7R&,)[흭ޓ*w,%%ےFVZn\ZWtv';~}"4y;κV}}+RV^>O_ٸ{?ٔS̯p$lIQ#2 Ý3Lg:s]h#GF7Foc}\D5d%2iKq22F[PsI4Kg[<-Kk 5ڐx<ÿ|.s,G˶֣][ U}yuw2rN@ϜB{KY/69lgzI-~X2# nVV*>RAĶbaGR_+ 9$dPp߁ԓ +DcbrrF.IrZϾk7hnIy:>Sy6\Y^&WsAX2ėVwܬ|0zkusrerAs[#>lZeDH$6=_0_vƧT%Q"eIFf`}A ,)2Hhb"eb%/(*CF!Ⱦ(㣽" <<|vԜa65Jײ{[l$󯻴hMԕY%%Ycu#̪j}r7V\-[O$8bmHd[Db6Z0"vJ%%]Il*GnnMpTы6sZv_KgWw7Us:cʺ_H}mYJPrՙNZoX@k])js$JvxTRWw`]Qϧ" /=ߵ8|Cr7($["3 Pj_3N,zaF3n/v" Vx3Y(xQz鉋 .T3X +N(f8S^R{bG}BC8.@;eކjj. e?O.hg@!t(] +8 pqiR)LHLFFBds8$G w251d +<&8b2 XLpY 0la!~,2] <?(mk?6̰kRxS?8\)cfU1a njU=cPtrl_26Nz'Vk'6BX1g_03cGa|gæ(;mOBSනKpxgĴ?=oߐi";m:EhDN6ZVyΧ99e +endstream +endobj +149 0 obj +6047 +endobj +148 0 obj +<< /Length 150 0 R /Filter /FlateDecode >> +stream +xk`(Y*~ +endstream +endobj +150 0 obj +20 +endobj +151 0 obj +<< + /Type /Font + /Subtype /Type0 + /BaseFont /EAAAAE+mwa_cmr10 + /Encoding /Identity-H + /ToUnicode 152 0 R + /DescendantFonts [153 0 R] +>> +endobj +153 0 obj +<< /Type /Font +/BaseFont /EAAAAE+mwa_cmr10 +/CIDToGIDMap /Identity +/Subtype /CIDFontType2 +/CIDSystemInfo << /Registry (Adobe) /Ordering (UCS) /Supplement 0 >> +/FontDescriptor 146 0 R +/DW 0 +/W [ 0 [365 500 500 500 651 391 443 526 555 555 443 526 276 750 443 276 500 500 500 722 750 555 500 305 833 776 735 276 500 555 394 500 555 276 388 ] ] +>> +endobj +152 0 obj +<< /Length 154 0 R /Filter /FlateDecode >> +stream +x]j0E +-E凜@B}д KBʺ q4w8;NEsQtn .[BތLnگ|F\7*;yV +}ėbhn B.buDX3Xym(hw> qimguX]D2RTrP *@UJD T"Ux-c;( A%r2dDPjPM$sTU$Cd *.Ws$)?Ż_5NIŸOq-*O|_SVo>7KǙ)lS;Z~?9+]98 +endstream +endobj +154 0 obj +383 +endobj +109 0 obj +<< /Type /Pages +/Count 1 +/Kids [107 0 R ] >> +endobj +155 0 obj +<< + /Type /Catalog + /Pages 109 0 R + /Lang (x-unknown) +>> +endobj +108 0 obj +<< + /Font << + /F270 115 0 R + /F271 124 0 R + /F272 133 0 R + /F273 142 0 R + /F268 151 0 R +>> + /ProcSet [/PDF /ImageB /ImageC /Text] + /ExtGState << + /GS1 2 0 R + /GS2 3 0 R + /GS3 4 0 R + /GS4 5 0 R + /GS5 6 0 R + /GS6 7 0 R + /GS7 8 0 R + /GS8 9 0 R + /GS9 10 0 R + /GS10 11 0 R + /GS11 12 0 R + /GS12 13 0 R + /GS13 14 0 R + /GS14 15 0 R + /GS15 16 0 R + /GS16 17 0 R + /GS17 18 0 R + /GS18 19 0 R + /GS19 20 0 R + /GS20 21 0 R + /GS21 22 0 R + /GS22 23 0 R + /GS23 24 0 R + /GS24 25 0 R + /GS25 26 0 R + /GS26 27 0 R + /GS27 28 0 R + /GS28 29 0 R + /GS29 30 0 R + /GS30 31 0 R + /GS31 32 0 R + /GS32 33 0 R + /GS33 34 0 R + /GS34 35 0 R + /GS35 36 0 R + /GS36 37 0 R + /GS37 38 0 R + /GS38 39 0 R + /GS39 40 0 R + /GS40 41 0 R + /GS41 42 0 R + /GS42 43 0 R + /GS43 44 0 R + /GS44 45 0 R + /GS45 46 0 R + /GS46 47 0 R + /GS47 48 0 R + /GS48 49 0 R + /GS49 50 0 R + /GS50 51 0 R + /GS51 52 0 R + /GS52 53 0 R + /GS53 54 0 R + /GS54 55 0 R + /GS55 56 0 R + /GS56 57 0 R + /GS57 58 0 R + /GS58 59 0 R + /GS59 60 0 R + /GS60 61 0 R + /GS61 62 0 R + /GS62 63 0 R + /GS63 64 0 R + /GS64 65 0 R + /GS65 66 0 R + /GS66 67 0 R + /GS67 68 0 R + /GS68 69 0 R + /GS69 70 0 R + /GS70 71 0 R + /GS71 72 0 R + /GS72 73 0 R + /GS73 74 0 R + /GS74 75 0 R + /GS75 76 0 R + /GS76 77 0 R + /GS77 78 0 R + /GS78 79 0 R + /GS79 80 0 R + /GS80 81 0 R + /GS81 82 0 R + /GS82 83 0 R + /GS83 84 0 R + /GS84 85 0 R + /GS85 86 0 R + /GS86 87 0 R + /GS87 88 0 R + /GS88 89 0 R + /GS89 90 0 R + /GS90 91 0 R + /GS91 92 0 R + /GS92 93 0 R + /GS93 94 0 R + /GS94 95 0 R + /GS95 96 0 R + /GS96 97 0 R + /GS97 98 0 R + /GS98 99 0 R + /GS99 100 0 R + /GS100 101 0 R + /GS101 102 0 R + /GS102 103 0 R +>> +>> +endobj +xref +0 156 +0000000000 65535 f +0000000015 00000 n +0000000145 00000 n +0000000197 00000 n +0000000249 00000 n +0000000301 00000 n +0000000353 00000 n +0000000405 00000 n +0000000457 00000 n +0000000509 00000 n +0000000561 00000 n +0000000614 00000 n +0000000667 00000 n +0000000720 00000 n +0000000773 00000 n +0000000826 00000 n +0000000879 00000 n +0000000932 00000 n +0000000985 00000 n +0000001038 00000 n +0000001091 00000 n +0000001144 00000 n +0000001197 00000 n +0000001251 00000 n +0000001305 00000 n +0000001359 00000 n +0000001412 00000 n +0000001465 00000 n +0000001518 00000 n +0000001571 00000 n +0000001624 00000 n +0000001677 00000 n +0000001730 00000 n +0000001783 00000 n +0000001836 00000 n +0000001889 00000 n +0000001942 00000 n +0000001995 00000 n +0000002048 00000 n +0000002101 00000 n +0000002154 00000 n +0000002207 00000 n +0000002260 00000 n +0000002313 00000 n +0000002366 00000 n +0000002419 00000 n +0000002472 00000 n +0000002525 00000 n +0000002578 00000 n +0000002631 00000 n +0000002684 00000 n +0000002738 00000 n +0000002792 00000 n +0000002846 00000 n +0000002899 00000 n +0000002952 00000 n +0000003005 00000 n +0000003058 00000 n +0000003111 00000 n +0000003164 00000 n +0000003217 00000 n +0000003270 00000 n +0000003323 00000 n +0000003376 00000 n +0000003429 00000 n +0000003482 00000 n +0000003535 00000 n +0000003588 00000 n +0000003641 00000 n +0000003694 00000 n +0000003747 00000 n +0000003800 00000 n +0000003853 00000 n +0000003906 00000 n +0000003960 00000 n +0000004014 00000 n +0000004068 00000 n +0000004121 00000 n +0000004174 00000 n +0000004227 00000 n +0000004280 00000 n +0000004333 00000 n +0000004386 00000 n +0000004439 00000 n +0000004492 00000 n +0000004545 00000 n +0000004598 00000 n +0000004651 00000 n +0000004704 00000 n +0000004757 00000 n +0000004810 00000 n +0000004863 00000 n +0000004916 00000 n +0000004969 00000 n +0000005022 00000 n +0000005075 00000 n +0000005128 00000 n +0000005181 00000 n +0000005234 00000 n +0000005287 00000 n +0000005340 00000 n +0000005394 00000 n +0000005449 00000 n +0000005504 00000 n +0000005559 00000 n +0000068856 00000 n +0000068879 00000 n +0000068906 00000 n +0000088987 00000 n +0000088848 00000 n +0000069104 00000 n +0000069356 00000 n +0000070768 00000 n +0000070746 00000 n +0000070855 00000 n +0000070874 00000 n +0000071265 00000 n +0000071034 00000 n +0000071577 00000 n +0000071598 00000 n +0000071850 00000 n +0000073506 00000 n +0000073484 00000 n +0000073596 00000 n +0000073616 00000 n +0000074007 00000 n +0000073776 00000 n +0000074321 00000 n +0000074342 00000 n +0000074598 00000 n +0000077649 00000 n +0000077627 00000 n +0000077746 00000 n +0000077766 00000 n +0000078189 00000 n +0000077926 00000 n +0000078541 00000 n +0000078562 00000 n +0000078814 00000 n +0000080473 00000 n +0000080451 00000 n +0000080562 00000 n +0000080582 00000 n +0000080971 00000 n +0000080741 00000 n +0000081284 00000 n +0000081305 00000 n +0000081560 00000 n +0000087727 00000 n +0000087705 00000 n +0000087825 00000 n +0000087845 00000 n +0000088366 00000 n +0000088004 00000 n +0000088827 00000 n +0000088910 00000 n +trailer +<< + /Root 155 0 R + /Info 1 0 R + /ID [ ] + /Size 156 +>> +startxref +90683 +%%EOF diff --git a/figs/uniaxial_sample_flexibility_noise_budget_d.png b/figs/uniaxial_sample_flexibility_noise_budget_d.png new file mode 100644 index 0000000..47a39e9 Binary files /dev/null and b/figs/uniaxial_sample_flexibility_noise_budget_d.png differ diff --git a/figs/uniaxial_sample_flexibility_noise_budget_y.pdf b/figs/uniaxial_sample_flexibility_noise_budget_y.pdf new file mode 100644 index 0000000..5f15cba Binary files /dev/null and b/figs/uniaxial_sample_flexibility_noise_budget_y.pdf differ diff --git a/figs/uniaxial_sample_flexibility_noise_budget_y.png b/figs/uniaxial_sample_flexibility_noise_budget_y.png new file mode 100644 index 0000000..8667a3e Binary files /dev/null and b/figs/uniaxial_sample_flexibility_noise_budget_y.png differ diff --git a/figs/uniaxial_support_compliance_nano_hexapod_only.pdf b/figs/uniaxial_support_compliance_nano_hexapod_only.pdf new file mode 100644 index 0000000..6d9a62f Binary files /dev/null and b/figs/uniaxial_support_compliance_nano_hexapod_only.pdf differ diff --git a/figs/uniaxial_support_compliance_nano_hexapod_only.png b/figs/uniaxial_support_compliance_nano_hexapod_only.png new file mode 100644 index 0000000..e098f45 Binary files /dev/null and b/figs/uniaxial_support_compliance_nano_hexapod_only.png differ diff --git a/figs/uniaxial_support_compliance_nano_hexapod_only.svg b/figs/uniaxial_support_compliance_nano_hexapod_only.svg new file mode 100644 index 0000000..2b90381 --- /dev/null +++ b/figs/uniaxial_support_compliance_nano_hexapod_only.svg @@ -0,0 +1,163 @@ + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + diff --git a/figs/uniaxial_support_compliance_test_system.pdf b/figs/uniaxial_support_compliance_test_system.pdf new file mode 100644 index 0000000..442aceb Binary files /dev/null and b/figs/uniaxial_support_compliance_test_system.pdf differ diff --git a/figs/uniaxial_support_compliance_test_system.png b/figs/uniaxial_support_compliance_test_system.png new file mode 100644 index 0000000..c11bc1b Binary files /dev/null and b/figs/uniaxial_support_compliance_test_system.png differ diff --git a/figs/uniaxial_support_compliance_test_system.svg b/figs/uniaxial_support_compliance_test_system.svg new file mode 100644 index 0000000..0cb2174 --- /dev/null +++ b/figs/uniaxial_support_compliance_test_system.svg @@ -0,0 +1,226 @@ + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + diff --git a/matlab/nass_uniaxial_model.slx b/matlab/nass_uniaxial_model.slx index c8f929e..3bfe664 100644 Binary files a/matlab/nass_uniaxial_model.slx and b/matlab/nass_uniaxial_model.slx differ diff --git a/matlab/uniaxial_1_micro_station_model.m b/matlab/uniaxial_1_micro_station_model.m index 2aa2c5f..4e7c6e1 100644 --- a/matlab/uniaxial_1_micro_station_model.m +++ b/matlab/uniaxial_1_micro_station_model.m @@ -18,56 +18,30 @@ freqs = logspace(0, 3, 1000); -% #+name: fig:micro_station_meas_dynamics_schematic -% #+caption: Measurement setup - Schematic -% #+RESULTS: +% #+name: fig:micro_station_uniaxial_model +% #+caption: Schematic of the Micro-Station measurement setup and uniaxial model. +% #+begin_figure +% #+attr_latex: :caption \subcaption{\label{fig:micro_station_meas_dynamics_schematic}Measurement setup - Schematic} +% #+attr_latex: :options {0.69\textwidth} +% #+begin_subfigure +% #+attr_latex: :scale 1 % [[file:figs/micro_station_meas_dynamics_schematic.png]] +% #+end_subfigure +% #+attr_latex: :caption \subcaption{\label{fig:uniaxial_model_micro_station}Uniaxial model of the micro-station} +% #+attr_latex: :options {0.29\textwidth} +% #+begin_subfigure +% #+attr_latex: :scale 1 +% [[file:figs/uniaxial_model_micro_station.png]] +% #+end_subfigure +% #+end_figure -% Due to the bad coherence at low frequency, the frequency response functions are only shown between 20 and 200Hz (Figure ref:fig:uniaxial_measured_frf_vertical). +% Due to the bad coherence at low frequency, the frequency response functions will only be shown between 20 and 200Hz (solid lines in Figure ref:fig:uniaxial_comp_frf_meas_model). %% Load measured FRF load('meas_microstation_frf.mat'); -%% Measured Frequency Response Functions in the vertical direction -figure; -tiledlayout(3, 1, 'TileSpacing', 'Compact', 'Padding', 'None'); -ax1 = nexttile([2,1]); -hold on; -plot(f(f>20), abs(frf_Fhx_to_Dhx(f>20)), ... - 'DisplayName', '$D_{h}/F_{h}$'); -plot(f(f>20), abs(frf_Fgx_to_Dhx(f>20)), ... - 'DisplayName', '$D_{h}/F_{g}$'); -plot(f(f>20), abs(frf_Fgx_to_Dgx(f>20)), ... - 'DisplayName', '$D_{g}/F_{g}$'); -hold off; -set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); -ylabel('Amplitude [m/N]'); set(gca, 'XTickLabel',[]); -ylim([1e-10, 2e-6]); -legend('location', 'northwest', 'FontSize', 8, 'NumColumns', 1); - -ax2 = nexttile; -hold on; -plot(f(f>20), 180/pi*unwrap(angle(frf_Fhx_to_Dhx(f>20)))); -plot(f(f>30), 180/pi*unwrap(angle(frf_Fgx_to_Dhx(f>30)))); -plot(f(f>20), 180/pi*unwrap(angle(frf_Fgx_to_Dgx(f>20)))); -hold off; -set(gca, 'XScale', 'log'); set(gca, 'YScale', 'lin'); -xlabel('Frequency [Hz]'); ylabel('Phase [deg]'); -hold off; -yticks(-360:90:360); -ylim([-360, 10]); - -linkaxes([ax1,ax2],'x'); -xlim([1, 500]); - - - -% #+name: fig:uniaxial_model_micro_station -% #+caption: Uniaxial model of the micro-station -% #+RESULTS: -% [[file:figs/uniaxial_model_micro_station.png]] % Masses are estimated from the CAD. @@ -115,7 +89,9 @@ G_id.InputName = {'Fg', 'Fh'}; G_id.OutputName = {'Dg', 'Dh'}; % Comparison of the model and measurements -% The comparison between the measurements and the model is done in Figure ref:fig:uniaxial_comp_frf_meas_model. +% The comparison between the measurements and the model is shown in Figure ref:fig:uniaxial_comp_frf_meas_model. + +% Only three modes are modelled with frequencies at 70Hz, 140Hz and 320Hz. % As the model is simplistic, the goal is not to match exactly the measurement but to have a first approximation. % More accurate models will be used later on. diff --git a/matlab/uniaxial_2_nano_hexapod_model.m b/matlab/uniaxial_2_nano_hexapod_model.m index a4faf61..36ab6c4 100644 --- a/matlab/uniaxial_2_nano_hexapod_model.m +++ b/matlab/uniaxial_2_nano_hexapod_model.m @@ -36,11 +36,13 @@ cn = 2*0.01*sqrt(mn*kn); % [N/(m/s)] %% Sample Mass ms = 10; % [kg] -% Obtained Dynamics +% Obtained Dynamic Response % The sensitivity to disturbances (i.e. $x_f$, $f_t$ and $f_s$) are shown in Figure ref:fig:uniaxial_sensitivity_dist_first_params. % The /plant/ (i.e. the transfer function from actuator force $f$ to measured displacement $d$) is shown in Figure ref:fig:uniaxial_plant_first_params. +% #+begin_important % For further analysis, 9 configurations are considered: three nano-hexapod stiffnesses ($k_n = 0.01\,N/\mu m$, $k_n = 1\,N/\mu m$ and $k_n = 100\,N/\mu m$) combined with three sample's masses ($m_s = 1\,kg$, $m_s = 25\,kg$ and $m_s = 50\,kg$). +% #+end_important %% Use 1DoF Nano-Hexpod model @@ -95,7 +97,7 @@ xlim([1, 500]); % #+name: fig:uniaxial_sensitivity_dist_first_params -% #+caption: Sensitivity to disturbances +% #+caption: Sensitivity of the relative motion $d$ to disturbances: $f_s$ the direct forces applied on the sample, $f_t$ disturbances from the micro-station stages and $x_f$ the floor motion (from left to right) % #+RESULTS: % [[file:figs/uniaxial_sensitivity_dist_first_params.png]] diff --git a/matlab/uniaxial_3_disturbances.m b/matlab/uniaxial_3_disturbances.m index 511a601..ea16b9c 100644 --- a/matlab/uniaxial_3_disturbances.m +++ b/matlab/uniaxial_3_disturbances.m @@ -76,7 +76,7 @@ psd_xf = psd_V.*abs(squeeze(freqresp(G_geo, f, 'Hz'))).^2; % [m^2/Hz] % The amplitude spectral density $\Gamma_{x_f}$ of the measured displacement $x_f$ is shown in Figure ref:fig:asd_floor_motion_id31. -%% Measured Amplitude Spectral Density of the Floor motion on ID31 +%% Amplitude Spectral Density of the measured Floor motion on ID31 figure; hold on; plot(f, sqrt(psd_xf), 'DisplayName', '$\Gamma_{x_{f}}$'); @@ -114,7 +114,7 @@ win = hanning(ceil(2*Fs)); % Hanning window % It is shown that the spindle rotation induces vibrations in a wide frequency spectrum. -%% Measured Amplitude Spectral Density of the relative motion between the granite and the micro-hexapod's top platform during Spindle rotating +%% Amplitude Spectral Density of the relative motion measured between the granite and the micro-hexapod's top platform during Spindle rotating figure; hold on; plot(f, sqrt(psd_vft)./(2*pi*f), 'DisplayName', '6rpm'); @@ -128,7 +128,7 @@ xlim([1, 500]); ylim([1e-12, 1e-7]) % #+name: fig:asd_vibration_spindle_rotation -% #+caption: Measured Amplitude Spectral Density of the relative motion between the granite and the micro-hexapod's top platform during Spindle rotating +% #+caption: Amplitude Spectral Density of the relative motion measured between the granite and the micro-hexapod's top platform during Spindle rotating % #+RESULTS: % [[file:figs/asd_vibration_spindle_rotation.png]] diff --git a/matlab/uniaxial_4_dynamic_noise_budget.m b/matlab/uniaxial_4_dynamic_noise_budget.m index e94fa60..65922f7 100644 --- a/matlab/uniaxial_4_dynamic_noise_budget.m +++ b/matlab/uniaxial_4_dynamic_noise_budget.m @@ -32,10 +32,10 @@ load('uniaxial_plants.mat', 'G_vc_light', 'G_md_light', 'G_pz_light', ... % The obtained sensitivity to disturbances for the three nano-hexapod stiffnesses are shown in Figure ref:fig:uniaxial_sensitivity_disturbances_nano_hexapod_stiffnesses for the light sample (same conclusions can be drawn with the heavy one). % #+begin_important -% From Figure ref:fig:uniaxial_sensitivity_disturbances_nano_hexapod_stiffnesses, following can be concluded for the *soft nano-hexapod*: +% From Figure ref:fig:uniaxial_sensitivity_disturbances_nano_hexapod_stiffnesses, the following can be concluded for the *soft nano-hexapod*: % - It is more sensitive to forces applied on the sample (cable forces for instance), which is expected due to the lower stiffness % - Between the suspension mode of the nano-hexapod (here at 5Hz) and the first mode of the micro-station (here at 70Hz), the disturbances induced by the stage vibrations are filtered out. -% - Above the suspension mode of the nano-hexapod, the sample's motion is unaffected by the floor motion, and therefore the sensitivity to floor motion is almost $1$. +% - Above the suspension mode of the nano-hexapod, the sample's motion is unaffected by the floor motion, and therefore the sensitivity to floor motion is close to $1$. % #+end_important diff --git a/matlab/uniaxial_5_active_damping.m b/matlab/uniaxial_5_active_damping.m index dffff45..c99388a 100644 --- a/matlab/uniaxial_5_active_damping.m +++ b/matlab/uniaxial_5_active_damping.m @@ -23,11 +23,12 @@ load('uniaxial_plants.mat', 'G_vc_light', 'G_md_light', 'G_pz_light', ... % Plant Dynamics for Active Damping % The plant dynamics for all three active damping techniques are shown in Figure ref:fig:uniaxial_plant_active_damping_techniques. -% All have *alternating poles and zeros* meaning that the phase is bounded to $\pm 90\,\text{deg}$ which makes the controller very robust. +% All have *alternating poles and zeros* meaning that the phase do not vary by more than $\pm 90\,\text{deg}$ which makes the design of a robust controller very easy. +% The reason all three plants in Figure ref:fig:uniaxial_plant_active_damping_techniques have alternating poles and zeros is because the three sensors are all collocated with the actuator [[cite:&preumont18_vibrat_contr_activ_struc_fourt_edition Chapter 7]]. -% When the nano-hexapod's suspension modes are at lower frequencies than the resonances of the micro-station (blue and red curves in Figure ref:fig:uniaxial_plant_active_damping_techniques), the resonances of the micro-stations have little impact on the transfer functions from IFF and DVF. +% When the nano-hexapod's suspension modes are at lower frequencies than the resonances of the micro-station (blue and red curves in Figure ref:fig:uniaxial_plant_active_damping_techniques), the resonances of the micro-stations have little impact on the IFF and DVF transfer functions. -% For the stiff nano-hexapod, the micro-station dynamics can be seen on the transfer functions in Figure ref:fig:uniaxial_plant_active_damping_techniques. +% For the stiff nano-hexapod (yellow curves), the micro-station dynamics can be seen on the transfer functions in Figure ref:fig:uniaxial_plant_active_damping_techniques. % Therefore, it is expected that the micro-station dynamics might impact the achievable damping if a stiff nano-hexapod is used. @@ -145,13 +146,21 @@ linkaxes([ax1,ax2,ax3,ax1b,ax2b,ax3b],'x'); xlim([1, 1000]); % Achievable Damping - Root Locus +% <> % The Root Locus are computed for the three nano-hexapod stiffnesses and for the three active damping techniques. % They are shown in Figure ref:fig:uniaxial_root_locus_damping_techniques. % All three active damping approach can lead to *critical damping* of the nano-hexapod suspension mode. -% There is even a little bit of authority on micro-station modes with IFF and DVF applied on the stiff nano-hexapod (Figure ref:fig:uniaxial_root_locus_damping_techniques, right) and with RDC for a soft nano-hexapod (Figure ref:fig:uniaxial_root_locus_damping_techniques_micro_station_mode). -% This can be explained by the fact that above the suspension mode of the soft nano-hexapod, the relative motion sensor acts as an inertial sensor for the micro-station top platform. Therefore, it is like DVF was applied (the nano-hexapod acts as a geophone!). +% There is even some damping authority on micro-station modes in the following cases: +% - IFF with a stiff nano-hexapod (Figure ref:fig:uniaxial_root_locus_damping_techniques, right) :: +% This can be understood from the mechanical equivalent of IFF shown in Figure ref:fig:uniaxial_active_damping_iff_equiv (right) considering an high stiffness $k$. +% The micro-station top platform is connected to an inertial mass (the nano-hexapod) through a damper, which damps the micro-station suspension suspension mode. +% - DVF with a stiff nano-hexapod (Figure ref:fig:uniaxial_root_locus_damping_techniques, right) :: +% In that case, the "sky hook damper" (see mechanical equivalent of IFF in Figure ref:fig:uniaxial_active_damping_dvf_equiv, right) is connected to the micro-station top platform through the stiff nano-hexapod. +% - RDC with a soft nano-hexapod (Figure ref:fig:uniaxial_root_locus_damping_techniques_micro_station_mode) :: +% At the frequency of the micro-station mode, the nano-hexapod top mass is behaving as an inertial reference as the suspension mode of the soft nano-hexapod is at much lower frequency. +% The micro-station and the nano-hexapod masses are connected through a large damper induced by RDC (see mechanical equivalent in Figure ref:fig:uniaxial_active_damping_rdc_equiv, right) which allows some damping of the micro-station. %% Active Damping Robustness to change of sample's mass - Root Locus for all three damping techniques with 3 different sample's masses @@ -286,7 +295,7 @@ xlim([-4000, 0]); ylim([0, 4000]); % #+name: fig:uniaxial_root_locus_damping_techniques -% #+caption: Root Loci for the three active damping techniques (IFF in blue, RDC in red and DVF in yellow). This is shown for three nano-hexapod stiffnesses. +% #+caption: Root Loci for the three active damping techniques (IFF in blue, RDC in red and DVF in yellow). This is shown for three nano-hexapod stiffnesses. The Root Loci are zoomed on the suspension mode of the nano-hexapod. % #+RESULTS: % [[file:figs/uniaxial_root_locus_damping_techniques.png]] @@ -425,7 +434,7 @@ isstable(G_dvf_vc_light) && isstable(G_dvf_vc_mid) && isstable(G_dvf_vc_heavy) & isstable(G_dvf_md_light) && isstable(G_dvf_md_mid) && isstable(G_dvf_md_heavy) && ... isstable(G_dvf_pz_light) && isstable(G_dvf_pz_mid) && isstable(G_dvf_pz_heavy) -%% Save Active Damping Controller +%% Save Damped Plants save('./mat/uniaxial_damped_plants.mat', 'G_iff_vc_light', 'G_iff_md_light', 'G_iff_pz_light', ... 'G_rdc_vc_light', 'G_rdc_md_light', 'G_rdc_pz_light', ... 'G_dvf_vc_light', 'G_dvf_md_light', 'G_dvf_pz_light', ... @@ -437,6 +446,8 @@ save('./mat/uniaxial_damped_plants.mat', 'G_iff_vc_light', 'G_iff_md_light', 'G_ 'G_dvf_vc_heavy', 'G_dvf_md_heavy', 'G_dvf_pz_heavy'); % Change of sensitivity to disturbances +% <> + % The sensitivity to disturbances (direct forces $f_s$, stage vibrations $f_t$ and floor motion $x_f$) for all three active damping techniques are compared in Figure ref:fig:uniaxial_sensitivity_dist_active_damping. % The comparison is done with the nano-hexapod having a stiffness $k_n = 1\,N/\mu m$. @@ -490,10 +501,11 @@ linkaxes([ax1,ax2,ax3],'x'); xlim([1, 500]); % Noise Budgeting after Active Damping +% <> % Cumulative Amplitude Spectrum of the distance $d$ with all three active damping techniques are compared in Figure ref:fig:uniaxial_cas_active_damping. % All three active damping methods are giving similar results (except the RDC which is a little bit worse for the stiff nano-hexapod). -% Compare to the open-loop case, the active damping helps to lower the vibrations induced by the nano-hexapod resonance. +% Compared to the open-loop case, the active damping helps to lower the vibrations induced by the nano-hexapod resonance. %% Cumulative Amplitude Spectrum of the distance d with all three active damping techniques @@ -565,7 +577,7 @@ linkaxes([ax1,ax2,ax3], 'xy') xlim([1, 500]); ylim([2e-10, 3e-6]) -% Obtained Damped Plant +% Obtained Closed Loop Response % The transfer functions from the plant input $f$ to the relative displacement $d$ while the active damping is implemented are shown in Figure ref:fig:uniaxial_damped_plant_three_active_damping_techniques. % All three active damping techniques yield similar damped plants. @@ -744,6 +756,8 @@ linkaxes([ax1,ax2,ax3,ax1b,ax2b,ax3b],'x'); xlim([1, 1e3]); % Robustness to change of payload's mass +% <> + % The Root Locus for the three damping techniques are shown in Figure ref:fig:uniaxial_active_damping_robustness_mass_root_locus for three sample's mass (1kg, 25kg and 50kg). % The closed-loop poles are shown by the squares for a specific gain. diff --git a/matlab/uniaxial_6_hac_lac.m b/matlab/uniaxial_6_hac_lac.m index 2c92676..c0abe53 100644 --- a/matlab/uniaxial_6_hac_lac.m +++ b/matlab/uniaxial_6_hac_lac.m @@ -33,10 +33,17 @@ load('uniaxial_damped_plants.mat', 'G_iff_vc_light', 'G_iff_md_light', 'G_iff_pz 'G_dvf_vc_heavy', 'G_dvf_md_heavy', 'G_dvf_pz_heavy'); % Damped Plant Dynamics +% <> + % As was shown in Section ref:sec:uniaxial_active_damping, all three proposed active damping techniques yield similar damping plants. -% Therefore, /Integral Force Feedback/ will be used in this section to study the HAC-LAC performances. +% Therefore, /Integral Force Feedback/ will be used in this section to study the HAC-LAC performance. % The obtained damped plants for the three nano-hexapod stiffnesses are shown in Figure ref:fig:uniaxial_hac_iff_damped_plants_masses. +% For $k_n = 0.01\,N/\mu m$ and $k_n = 1\,N/\mu m$, except from the nano-hexapod mode, the dynamics is quite simple and can be well approximated by a second order plant. +% However, this is not the case for the stiff nano-hexapod ($k_n = 100\,N/\mu m$) where two modes can be seen (Figure ref:fig:uniaxial_hac_iff_damped_plants_masses, right). + +% This is due to the interaction between the micro-station (modelled modes at 70Hz, 140Hz and 320Hz) and the nano-hexapod. +% Such effect will be explained in Section ref:sec:uniaxial_support_compliance. %% Damped plant - Robustness to change of sample's mass @@ -45,22 +52,28 @@ tiledlayout(3, 3, 'TileSpacing', 'Compact', 'Padding', 'None'); ax1 = nexttile([2,1]); hold on; -plot(freqs, abs(squeeze(freqresp(G_iff_vc_light('d', 'f'), freqs, 'Hz'))), '-', 'DisplayName', '$m_s = 1\,kg$'); -plot(freqs, abs(squeeze(freqresp(G_iff_vc_mid( 'd', 'f'), freqs, 'Hz'))), '-', 'DisplayName', '$m_s = 25\,kg$'); -plot(freqs, abs(squeeze(freqresp(G_iff_vc_heavy('d', 'f'), freqs, 'Hz'))), '-', 'DisplayName', '$m_s = 50\,kg$'); +plot(freqs, abs(squeeze(freqresp(G_vc_light('d', 'f'), freqs, 'Hz'))), 'color', [colors(1,:), 0.5]); +plot(freqs, abs(squeeze(freqresp(G_iff_vc_light('d', 'f'), freqs, 'Hz'))), 'color', colors(1,:)); +plot(freqs, abs(squeeze(freqresp(G_iff_vc_mid( 'd', 'f'), freqs, 'Hz'))), 'color', colors(2,:)); +plot(freqs, abs(squeeze(freqresp(G_iff_vc_heavy('d', 'f'), freqs, 'Hz'))), 'color', colors(3,:)); +loglog(10.^(0.4*cos([0:0.01:2*pi])+log10(100)), ... + 10.^(0.8*sin([0:0.01:2*pi]-pi/4)+log10(8e-8)), 'k--'); +text(20, 4e-8, sprintf('Small\nInteraction'), 'horizontalalignment', 'center'); hold off; set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); ylabel('Amplitude [m/N]'); set(gca, 'XTickLabel',[]); title('$k_n = 0.01\,N/\mu m$'); ylim([5e-10, 1e-3]); -ldg = legend('location', 'northeast', 'FontSize', 8, 'NumColumns', 1); -ldg.ItemTokenSize = [20, 1]; ax2 = nexttile([2,1]); hold on; -plot(freqs, abs(squeeze(freqresp(G_iff_md_light('d', 'f'), freqs, 'Hz')))); -plot(freqs, abs(squeeze(freqresp(G_iff_md_mid( 'd', 'f'), freqs, 'Hz')))); -plot(freqs, abs(squeeze(freqresp(G_iff_md_heavy('d', 'f'), freqs, 'Hz')))); +plot(freqs, abs(squeeze(freqresp(G_md_light('d', 'f'), freqs, 'Hz'))), 'color', [colors(1,:), 0.5]); +plot(freqs, abs(squeeze(freqresp(G_iff_md_light('d', 'f'), freqs, 'Hz'))), 'color', colors(1,:)); +plot(freqs, abs(squeeze(freqresp(G_iff_md_mid( 'd', 'f'), freqs, 'Hz'))), 'color', colors(2,:)); +plot(freqs, abs(squeeze(freqresp(G_iff_md_heavy('d', 'f'), freqs, 'Hz'))), 'color', colors(3,:)); +loglog(10.^(0.4*cos([0:0.01:2*pi])+log10(200)), ... + 10.^(0.8*sin([0:0.01:2*pi]-pi/4)+log10(2e-8)), 'k--'); +text(40, 1e-8, sprintf('Small\nInteraction'), 'horizontalalignment', 'center'); hold off; set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); set(gca, 'XTickLabel',[]); set(gca, 'YTickLabel',[]); @@ -69,20 +82,27 @@ ylim([5e-10, 1e-3]); ax3 = nexttile([2,1]); hold on; -plot(freqs, abs(squeeze(freqresp(G_iff_pz_light('d', 'f'), freqs, 'Hz')))); -plot(freqs, abs(squeeze(freqresp(G_iff_pz_mid( 'd', 'f'), freqs, 'Hz')))); -plot(freqs, abs(squeeze(freqresp(G_iff_pz_heavy('d', 'f'), freqs, 'Hz')))); +plot(freqs, abs(squeeze(freqresp(G_pz_light('d', 'f'), freqs, 'Hz'))), 'color', [colors(1,:), 0.5], 'DisplayName', '$m_s = 1\,kg$, OL'); +plot(freqs, abs(squeeze(freqresp(G_iff_pz_light('d', 'f'), freqs, 'Hz'))), 'color', colors(1,:), 'DisplayName', '$m_s = 1\,kg$, IFF'); +plot(freqs, abs(squeeze(freqresp(G_iff_pz_mid( 'd', 'f'), freqs, 'Hz'))), 'color', colors(2,:), 'DisplayName', '$m_s = 25\,kg$, IFF'); +plot(freqs, abs(squeeze(freqresp(G_iff_pz_heavy('d', 'f'), freqs, 'Hz'))), 'color', colors(3,:), 'DisplayName', '$m_s = 50\,kg$, IFF'); +loglog(10.^(0.8*cos([0:0.01:2*pi])+log10(350)), ... + 10.^(1.2*sin([0:0.01:2*pi])+log10(8e-9)), 'k--', 'HandleVisibility', 'off'); +text(200, 5e-7, sprintf('$\\mu$ Station\nCoupling'), 'horizontalalignment', 'center'); hold off; set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); set(gca, 'XTickLabel',[]); set(gca, 'YTickLabel',[]); title('$k_n = 100\,N/\mu m$'); ylim([5e-10, 1e-3]); +ldg = legend('location', 'northeast', 'FontSize', 8, 'NumColumns', 1); +ldg.ItemTokenSize = [20, 1]; ax1b = nexttile(); hold on; -plot(freqs, unwrap(180/pi*angle(squeeze(freqresp(G_iff_vc_light('d', 'f'), freqs, 'Hz'))))); -plot(freqs, unwrap(180/pi*angle(squeeze(freqresp(G_iff_vc_mid( 'd', 'f'), freqs, 'Hz'))))); -plot(freqs, unwrap(180/pi*angle(squeeze(freqresp(G_iff_vc_heavy('d', 'f'), freqs, 'Hz'))))); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_vc_light('d', 'f'), freqs, 'Hz')))), 'color', [colors(1,:), 0.5]); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_iff_vc_light('d', 'f'), freqs, 'Hz')))), 'color', colors(1,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_iff_vc_mid( 'd', 'f'), freqs, 'Hz')))), 'color', colors(2,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_iff_vc_heavy('d', 'f'), freqs, 'Hz')))), 'color', colors(3,:)); hold off; set(gca, 'XScale', 'log'); set(gca, 'YScale', 'lin'); ylabel('Phase [deg]'); xlabel('Frequency [Hz]'); @@ -92,9 +112,10 @@ ylim([-200, 20]); ax2b = nexttile(); hold on; -plot(freqs, unwrap(180/pi*angle(squeeze(freqresp(G_iff_md_light('d', 'f'), freqs, 'Hz'))))); -plot(freqs, unwrap(180/pi*angle(squeeze(freqresp(G_iff_md_mid( 'd', 'f'), freqs, 'Hz'))))); -plot(freqs, unwrap(180/pi*angle(squeeze(freqresp(G_iff_md_heavy('d', 'f'), freqs, 'Hz'))))); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_md_light('d', 'f'), freqs, 'Hz')))), 'color', [colors(1,:), 0.5]); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_iff_md_light('d', 'f'), freqs, 'Hz')))), 'color', colors(1,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_iff_md_mid( 'd', 'f'), freqs, 'Hz')))), 'color', colors(2,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_iff_md_heavy('d', 'f'), freqs, 'Hz')))), 'color', colors(3,:)); hold off; set(gca, 'XScale', 'log'); set(gca, 'YScale', 'lin'); xlabel('Frequency [Hz]'); set(gca, 'YTickLabel',[]); @@ -104,9 +125,10 @@ ylim([-200, 20]); ax3b = nexttile(); hold on; -plot(freqs, unwrap(180/pi*angle(squeeze(freqresp(G_iff_pz_light('d', 'f'), freqs, 'Hz'))))); -plot(freqs, unwrap(180/pi*angle(squeeze(freqresp(G_iff_pz_mid( 'd', 'f'), freqs, 'Hz'))))); -plot(freqs, unwrap(180/pi*angle(squeeze(freqresp(G_iff_pz_heavy('d', 'f'), freqs, 'Hz'))))); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_pz_light('d', 'f'), freqs, 'Hz')))), 'color', [colors(1,:), 0.5]); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_iff_pz_light('d', 'f'), freqs, 'Hz')))), 'color', colors(1,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_iff_pz_mid( 'd', 'f'), freqs, 'Hz')))), 'color', colors(2,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_iff_pz_heavy('d', 'f'), freqs, 'Hz')))), 'color', colors(3,:)); hold off; set(gca, 'XScale', 'log'); set(gca, 'YScale', 'lin'); xlabel('Frequency [Hz]'); set(gca, 'YTickLabel',[]); @@ -118,13 +140,15 @@ linkaxes([ax1,ax2,ax3,ax1b,ax2b,ax3b],'x'); xlim([1, 1e3]); % Position Feedback Controller +% <> + % The objective now is to design a position feedback controller for each of the three nano-hexapods that are robust to the change of sample's mass. -% The required feedback bandwidth was approximately determined un Section ref:sec:uniaxial_noise_budgeting: +% The required feedback bandwidth was approximately determined in Section ref:sec:uniaxial_noise_budgeting: % - $\approx 10\,\text{Hz}$ for the soft nano-hexapod ($k_n = 0.01\,N/\mu m$). % Near this frequency, the plants are equivalent to a mass line. % The gain of the mass line can vary up to a fact $\approx 5$ (suspended mass from $16\,kg$ up to $65\,kg$). -% This mean that the designed controller will need to have large gain margins to be robust to the change of sample's mass. +% This means that the designed controller will need to have large gain margins to be robust to the change of sample's mass. % - $\approx 50\,\text{Hz}$ for the relatively stiff nano-hexapod ($k_n = 1\,N/\mu m$). % Similarly to the soft nano-hexapod, the plants near the crossover frequency are equivalent to a mass line. % It will be probably easier to have a little bit more bandwidth in this configuration to be further away from the nano-hexapod suspension mode. @@ -136,7 +160,37 @@ xlim([1, 1e3]); % Position feedback controllers are designed for each nano-hexapod such that it is stable for all considered sample masses with similar stability margins (see Nyquist plots in Figure ref:fig:uniaxial_nyquist_hac). -% These high authority controllers are generally composed of a two integrators at low frequency for disturbance rejection, a lead to increase the phase margin near the crossover frequency and a low pass filter to increase the robustness to high frequency dynamics. +% These high authority controllers are generally composed of a lag at low frequency for disturbance rejection, a lead to increase the phase margin near the crossover frequency and a low pass filter to increase the robustness to high frequency dynamics. +% The controllers used for the three nano-hexapod are shown in Equation eqref:eq:uniaxial_hac_formulas, and the parameters are summarized in Table ref:tab:uniaxial_feedback_controller_parameters. + +% \begin{subequations} \label{eq:uniaxial_hac_formulas} +% \begin{align} +% K_{\text{soft}}(s) &= g \cdot +% \underbrace{\frac{s + \omega_0}{s + \omega_i}}_{\text{lag}} \cdot +% \underbrace{\frac{1 + \frac{s}{\omega_c/\sqrt{a}}}{1 + \frac{s}{\omega_c \sqrt{a}}}}_{\text{lead}} \cdot +% \underbrace{\frac{1}{1 + \frac{s}{\omega_l}}}_{\text{LPF}} \\ +% K_{\text{mid}}(s) &= g \cdot +% \underbrace{\left(\frac{s + \omega_0}{s + \omega_i}\right)^2}_{\text{2 lags}} \cdot +% \underbrace{\frac{1 + \frac{s}{\omega_c/\sqrt{a}}}{1 + \frac{s}{\omega_c \sqrt{a}}}}_{\text{lead}} \cdot +% \underbrace{\frac{1}{1 + \frac{s}{\omega_l}}}_{\text{LPF}} \\ +% K_{\text{stiff}}(s) &= g \cdot +% \underbrace{\left(\frac{1}{s + \omega_i}\right)^2}_{\text{2 lags}} \cdot +% \underbrace{\left(\frac{1 + \frac{s}{\omega_c/\sqrt{a}}}{1 + \frac{s}{\omega_c \sqrt{a}}}\right)^2}_{\text{2 leads}} \cdot +% \underbrace{\frac{1}{1 + \frac{s}{\omega_l}}}_{\text{LPF}} +% \end{align} +% \end{subequations} + +% #+name: tab:uniaxial_feedback_controller_parameters +% #+caption: Parameters used for the position feedback controllers +% #+attr_latex: :environment tabularx :width \linewidth :align lXXX +% #+attr_latex: :center t :booktabs t +% | | *Soft* | *Moderately stiff* | *Stiff* | +% |--------+-------------------------------------------+--------------------------------------------+------------------------------------------| +% | *Gain* | $g = 4 \cdot 10^5$ | $g = 3 \cdot 10^6$ | $g = 6 \cdot 10^12$ | +% | *Lead* | $a = 5$, $\omega_c = 20\,Hz$ | $a = 4$, $\omega_c = 70\,Hz$ | $a = 5$, $\omega_c = 100\,Hz$ | +% | *Lag* | $\omega_0 = 5\,Hz$, $\omega_i = 0.01\,Hz$ | $\omega_0 = 20\,Hz$, $\omega_i = 0.01\,Hz$ | $\omega_i = 0.01\,Hz$ | +% | *LPF* | $\omega_l = 200\,Hz$ | $\omega_l = 300\,Hz$ | $\omega_l = 500\,Hz$ | + % The loop gains for the three nano-hexapod are shown in Figure ref:fig:uniaxial_loop_gain_hac. % We can see that: % - for the soft and moderately stiff nano-hexapod, the crossover frequency varies a lot with the sample mass. @@ -144,8 +198,8 @@ xlim([1, 1e3]); % - for the stiff nano-hexapod, the obtained crossover frequency is not at high as what was estimated necessary. % The crossover frequency in that case is close to the stiffness line of the plant, which makes the robust design of the controller easier. -% Note that these controller were quickly tuned by hand and not designed using any optimization methods. -% The goal is just to have a first estimation of the attainable performances. +% Note that these controllers were quickly tuned by hand and not designed using any optimization methods. +% The goal is just to have a first estimation of the attainable performance. %% High Authority Controller - Soft Nano-Hexapod @@ -154,61 +208,65 @@ a = 5; % Amount of phase lead / width of the phase lead / high frequency gain wc = 2*pi*20; % Frequency with the maximum phase lead [rad/s] H_lead = (1 + s/(wc/sqrt(a)))/(1 + s/(wc*sqrt(a))); +% Lag at low frequency +H_lag = (s + 2*pi*5)/(s + 2*pi*0.01); + % Low Pass filter to increase robustness H_lpf = 1/(1 + s/2/pi/200); -% Added integrator at low frequency -H_int = (s + 2*pi*5)/(s + 2*pi*0.01); - % High Authority Controller K_hac_vc = 4e5 * ... % Gain H_lead * ... % Lead - H_int * ... % Integrator + H_lag * ... % Lag H_lpf; % LPF K_hac_vc.InputName = {'d'}; K_hac_vc.OutputName = {'f'}; %% High Authority Controller - Mid Stiffness Nano-Hexapod -% Integrator as low frequency -H_int = (s + 2*pi*10)/(s + 2*pi*0.01) * (s + 2*pi*20)/(s + 2*pi*0.01); - % Lead to increase phase margin a = 4; % Amount of phase lead / width of the phase lead / high frequency gain wc = 2*pi*70; % Frequency with the maximum phase lead [rad/s] H_lead = (1 + s/(wc/sqrt(a)))/(1 + s/(wc*sqrt(a))); +% Lag at low frequency +H_lag = ((s + 2*pi*15)/(s + 2*pi*0.01))^2; + % Low Pass filter to increase robustness H_lpf = 1/(1 + s/2/pi/300); % High Authority Controller K_hac_md = 3e6 * ... % Gain H_lead * ... % Lead - H_lpf * ... % Low Pass Filter - H_int; % Integrator + H_lag * ... % Lag + H_lpf; % LPF K_hac_md.InputName = {'d'}; K_hac_md.OutputName = {'f'}; %% High Authority Controller - Stiff Nano-Hexapod -% Integrator as low frequency -H_int = 1/(s + 2*pi*0.01) * 1/(s + 2*pi*0.01); - % Lead to increase phase margin a = 5; % Amount of phase lead / width of the phase lead / high frequency gain wc = 2*pi*100; % Frequency with the maximum phase lead [rad/s] -H_lead = (1 + s/(wc/sqrt(a)))/(1 + s/(wc*sqrt(a))); +H_lead = ((1 + s/(wc/sqrt(a)))/(1 + s/(wc*sqrt(a))))^2; + +% Integrator +H_int = 1/(s + 2*pi*0.01)^2; % Low Pass filter to increase robustness H_lpf = 1/(1 + s/2/pi/500); % High Authority Controller -K_hac_pz = 6e12 * ... % Gain - H_lead^2 * ... % Lead - H_lpf * ... % Low Pass Filter - H_int; % Integrator +K_hac_pz = 6e12 * ... % Gain + H_lead * ... % Lead + H_int * ... % Lag + H_lpf; % LPF K_hac_pz.InputName = {'d'}; K_hac_pz.OutputName = {'f'}; +%% Save High Authority Controllers +save('/mat/uniaxial_high_authority_controllers.mat', ... + 'K_hac_vc', 'K_hac_md', 'K_hac_pz'); + %% Compute Loop gain for Nyquist Plot L_vc_light = squeeze(freqresp(K_hac_vc*G_iff_vc_light('d', 'f'), freqs, 'Hz')); L_vc_mid = squeeze(freqresp(K_hac_vc*G_iff_vc_mid( 'd', 'f'), freqs, 'Hz')); @@ -304,6 +362,8 @@ linkaxes([ax1,ax2],'x'); xlim([1, 500]); % Closed-Loop Noise Budgeting +% <> + % The high authority position feedback controllers are then implemented and the closed-loop sensitivity to disturbances are computed. % These are compared with the open-loop and damped plants cases in Figure ref:fig:uniaxial_sensitivity_dist_hac_lac for just one configuration (moderately stiff nano-hexapod with 25kg sample's mass). % As expected, the sensitivity to disturbances is decreased in the controller bandwidth and slightly increase outside this bandwidth. @@ -370,7 +430,7 @@ xlim([1, 500]); % #+name: fig:uniaxial_sensitivity_dist_hac_lac -% #+caption: Change of sensitivity to disturbances with LAC and with HAC-LAC +% #+caption: Change of sensitivity to disturbances with LAC and with HAC-LAC. Nano-Hexapod with $k_n = 1\,N/\mu m$ and sample mass of $25\,kg$ are used. % #+RESULTS: % [[file:figs/uniaxial_sensitivity_dist_hac_lac.png]] diff --git a/matlab/uniaxial_7_support_compliance.m b/matlab/uniaxial_7_support_compliance.m new file mode 100644 index 0000000..2c550b7 --- /dev/null +++ b/matlab/uniaxial_7_support_compliance.m @@ -0,0 +1,245 @@ +%% Clear Workspace and Close figures +clear; close all; clc; + +%% Intialize Laplace variable +s = zpk('s'); + +%% Path for functions, data and scripts +addpath('./mat/'); % Path for data + +%% Colors for the figures +colors = colororder; + +%% Load the micro-station parameters +load('uniaxial_micro_station_parameters.mat') + +%% Frequency Vector [Hz] +freqs = logspace(0, 3, 1000); + +% Neglected support compliance + +% Let's first neglect the limited compliance of the micro-station and use the uniaxial model show in Figure ref:fig:uniaxial_support_compliance_nano_hexapod_only. +% Let's choose a nano-hexapod mass (including the payload) of $20\,\text{kg}$ and three hexapod stiffnesses such that their resonance frequencies are at $\omega_{\nu} = 10\,\text{Hz}$, $\omega_{\nu} = 70\,\text{Hz}$ and $\omega_{\nu} = 400\,\text{Hz}$. + +% The obtained transfer functions from $F$ to $L^\prime$ are shown in Figure ref:fig:uniaxial_effect_support_compliance_neglected. +% When neglecting the support compliance, large feedback bandwidth can be achieve for all three Nano-Hexapod. + + +%% Nano-Hexapod Parameters +m = 20; % Mass [kg] + +% "Soft" Nano-Hexapod +k_soft = m*(2*pi*10)^2; % Stiffness [N/m] +c_soft = 0.1*2*sqrt(m*k_soft); % Damping [N/(m/s)] + +% "Mid" Nano-Hexapod +k_mid = m*(2*pi*70)^2; % Stiffness [N/m] +c_mid = 0.1*2*sqrt(m*k_mid); % Damping [N/(m/s)] + +% "Stiff" Nano-Hexapod +k_stiff = m*(2*pi*400)^2; % Stiffness [N/m] +c_stiff = 0.1*2*sqrt(m*k_stiff); % Damping [N/(m/s)] + +%% Compute the transfer functions for considered nano-hexapods - From F to L' +% "Soft" Nano-Hexapod +G_soft_a = 1/(m*s^2 + c_soft*s + k_soft); % Transfer function from F to L' + +% "Mid" Nano-Hexapod +G_mid_a = 1/(m*s^2 + c_mid*s + k_mid); % Transfer function from F to L' + +% "Stiff" Nano-Hexapod +G_stiff_a = 1/(m*s^2 + c_stiff*s + k_stiff); % Transfer function from F to L' + +%% Obtained transfer functions from F to L when neglecing support compliance +freqs = logspace(0, 3, 1000); + +figure; +tiledlayout(1, 3, 'TileSpacing', 'Compact', 'Padding', 'None'); + +ax1 = nexttile(); +hold on; +plot(freqs, abs(squeeze(freqresp(G_soft_a, freqs, 'Hz'))), '-', 'color', colors(1,:)); +text(50, 5e-5, '$\omega_\nu =$ 10Hz', 'horizontalalignment', 'center'); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +ylabel('Magnitude [m/N]'); +xticks([1e0, 1e1, 1e2]); +title('"Soft" $\nu$-hexapod'); + +ax2 = nexttile(); +hold on; +plot(freqs, abs(squeeze(freqresp(G_mid_a, freqs, 'Hz'))), '-', 'color', colors(1,:)); +text(70, 3e-6, '$\omega_\nu =$ 70Hz', 'horizontalalignment', 'center'); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +xlabel('Frequency [Hz]'); +set(gca, 'YTickLabel',[]); +xticks([1e0, 1e1, 1e2]); +title('"Mid" $\nu$-hexapod'); + +ax3 = nexttile(); +hold on; +plot(freqs, abs(squeeze(freqresp(G_stiff_a, freqs, 'Hz'))), '-', 'color', colors(1,:), ... + 'DisplayName', '$L^\prime/F$'); +text(200, 8e-8, '$\omega_\nu =$ 400Hz', 'horizontalalignment', 'center'); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +set(gca, 'YTickLabel',[]); +legend('location', 'northeast'); +xticks([1e0, 1e1, 1e2]); +title('"Stiff" $\nu$-hexapod'); + +linkaxes([ax1,ax2,ax3],'xy'); +xlim([freqs(1), freqs(end)]); +ylim([1e-9, 1e-4]); + +% Effect of support compliance on $L/F$ + +% Let's now add some support compliance and use the model shown in Figure ref:fig:uniaxial_support_compliance_test_system. +% The parameters of the support (i.e. $m^{\prime}$, $c^{\prime}$ and $k^{\prime}$) are chosen in such a way that the main vertical mode at $\omega_\mu = 70\,\text{Hz}$ seen on the micro-station is matched (Figure ref:fig:uniaxial_comp_frf_meas_model, yellow curve). + + +%% Parameters of the support compliance +w0h = 2*pi*70; % [rad/s] +xih = 0.1; % [-] + +mh = 20; % [kg] +kh = mh*w0h^2; +ch = xih*2*sqrt(kh*mh); + +%% Compute the transfer functions from F to L and from F to d for considered Nano-Hexapods +% "Soft" Nano-Hexapod +G_soft = (mh*s^2 + ch*s + kh)/(m*s^2*(c_soft*s + k_soft) + (m*s^2 + c_soft*s + k_soft)*(mh*s^2 + ch*s + kh)); % d/F +G_soft_r = (1 - m*s^2*G_soft)/(c_soft*s + k_soft); % L/F + +% "Mid" Nano-Hexapod +G_mid = (mh*s^2 + ch*s + kh)/(m*s^2*(c_mid*s + k_mid) + (m*s^2 + c_mid*s + k_mid)*(mh*s^2 + ch*s + kh)); % d/F +G_mid_r = (1 - m*s^2*G_mid)/(c_mid*s + k_mid); % L/F + +% "Stiff" Nano-Hexapod +G_stiff = (mh*s^2 + ch*s + kh)/(m*s^2*(c_stiff*s + k_stiff) + (m*s^2 + c_stiff*s + k_stiff)*(mh*s^2 + ch*s + kh)); % d/F +G_stiff_r = (1 - m*s^2*G_stiff)/(c_stiff*s + k_stiff); % L/F + + + +% The transfer functions from $F$ to $L$ (i.e. control of the relative motion of the nano-hexapod) and from $L$ to $d$ (i.e. control of the position between the nano-hexapod and the fixed granite) can then be computed. + +% When the relative displacement of the nano-hexapod $L$ is to be controlled (dynamics shown in Figure ref:fig:uniaxial_effect_support_compliance_dynamics), having a stiff nano-hexapod (i.e. with a suspension mode at higher frequency than the mode of the support) makes the dynamics less affected by the limited support compliance (Figure ref:fig:uniaxial_effect_support_compliance_dynamics, right). + +% This is why it is very common to have stiff piezoelectric stages fixed at the very top of positioning stages. +% In such case, the control of the piezoelectric stage using its integrated metrology (typically capacitive sensors) is quite simple as the plant is not much affected by the dynamics of the support on which is it fixed. +% # Add references of such stations with piezo stages on top + +% If a soft nano-hexapod is used, the support dynamics appears in the dynamics between $F$ and $L$ (see Figure ref:fig:uniaxial_effect_support_compliance_dynamics, left) which will impact the control robustness and performance. + + +%% Effect of the support compliance on the transfer functions from F to L and from F to d +figure; +freqs = logspace(0, 3, 1000); + +figure; +tiledlayout(1, 3, 'TileSpacing', 'Compact', 'Padding', 'None'); + +ax1 = nexttile(); +hold on; +plot(freqs, abs(squeeze(freqresp(G_soft_a, freqs, 'Hz'))), '-', 'color', colors(1,:)); +plot(freqs, abs(squeeze(freqresp(G_soft_r, freqs, 'Hz'))), '-', 'color', colors(2,:)); +loglog(10.^(0.3*cos(0:0.01:2*pi)+log10(60)), ... + 10.^(0.6*sin(0:0.01:2*pi)+log10(4e-7)), 'k--'); +text(8, 3e-7, sprintf('Support\nDynamics'), 'horizontalalignment', 'center'); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +xticks([1e0, 1e1, 1e2]); +title('"Soft" $\nu$-hexapod'); +ylabel('Magnitude [m/N]'); + + +ax2 = nexttile(); +hold on; +plot(freqs, abs(squeeze(freqresp(G_mid_a, freqs, 'Hz'))), '-', 'color', colors(1,:)); +plot(freqs, abs(squeeze(freqresp(G_mid_r, freqs, 'Hz'))), '-', 'color', colors(2,:)); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +xlabel('Frequency [Hz]'); +xticks([1e0, 1e1, 1e2]); +title('"Mid" $\nu$-hexapod'); +set(gca, 'YTickLabel',[]); + +ax3 = nexttile(); +hold on; +plot(freqs, abs(squeeze(freqresp(G_stiff_a, freqs, 'Hz'))), '-', 'color', colors(1,:), ... + 'DisplayName', '$L^\prime/F$'); +plot(freqs, abs(squeeze(freqresp(G_stiff_r, freqs, 'Hz'))), '-', 'color', colors(2,:), ... + 'DisplayName', '$L/F$'); +loglog(10.^(0.3*cos(0:0.01:2*pi)+log10(50)), ... + 10.^(0.3*sin(0:0.01:2*pi)+log10(8e-9)), 'k--', 'HandleVisibility', 'off'); +text(50, 3e-8, 'No effect', 'horizontalalignment', 'center'); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +set(gca, 'YTickLabel',[]); +xticks([1e0, 1e1, 1e2]); +title('"Stiff" $\nu$-hexapod'); +legend('location', 'northeast', 'FontSize', 8, 'NumColumns', 1); + +linkaxes([ax1,ax2,ax3],'xy'); +xlim([freqs(1), freqs(end)]); +ylim([1e-9, 1e-4]); + +% Effect of support compliance on $d/F$ + +% When the motion to be controlled is the relative displacement $d$ between the granite and the nano-hexapod's top platform, the effect of the support compliance on the plant dynamics is opposite than what was previously observed. +% Indeed, using a "soft" nano-hexapod (i.e. with a suspension mode at lower frequency than the mode of the support) makes the dynamics less affected by the support dynamics (Figure ref:fig:uniaxial_effect_support_compliance_dynamics_d, left). +% On the contrary, if a "stiff" nano-hexapod is used, the support dynamics appears in the plant dynamics (Figure ref:fig:uniaxial_effect_support_compliance_dynamics_d, right). + + +%% Effect of the support compliance on the transfer functions from F to L and from F to d +figure; +freqs = logspace(0, 3, 1000); + +figure; +tiledlayout(1, 3, 'TileSpacing', 'Compact', 'Padding', 'None'); + +ax1 = nexttile(); +hold on; +plot(freqs, abs(squeeze(freqresp(G_soft_a, freqs, 'Hz'))), '-', 'color', colors(1,:)); +plot(freqs, abs(squeeze(freqresp(G_soft, freqs, 'Hz'))), '-', 'color', colors(3,:)); +loglog(10.^(0.3*cos(0:0.01:2*pi)+log10(60)), ... + 10.^(0.6*sin(0:0.01:2*pi)+log10(4e-7)), 'k--'); +text(8, 3e-7, 'No effect', 'horizontalalignment', 'center'); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +xticks([1e0, 1e1, 1e2]); +title('"Soft" $\nu$-hexapod'); +ylabel('Magnitude [m/N]'); + + +ax2 = nexttile(); +hold on; +plot(freqs, abs(squeeze(freqresp(G_mid_a, freqs, 'Hz'))), '-', 'color', colors(1,:)); +plot(freqs, abs(squeeze(freqresp(G_mid, freqs, 'Hz'))), '-', 'color', colors(3,:)); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +xlabel('Frequency [Hz]'); +xticks([1e0, 1e1, 1e2]); +title('"Mid" $\nu$-hexapod'); +set(gca, 'YTickLabel',[]); + +ax3 = nexttile(); +hold on; +plot(freqs, abs(squeeze(freqresp(G_stiff_a, freqs, 'Hz'))), '-', 'color', colors(1,:), ... + 'DisplayName', '$L^\prime/F$'); +plot(freqs, abs(squeeze(freqresp(G_stiff, freqs, 'Hz'))), '-', 'color', colors(3,:), ... + 'DisplayName', '$d/F$'); +loglog(10.^(0.4*cos(0:0.01:2*pi)+log10(50)), ... + 10.^(0.8*sin(0:0.01:2*pi)+log10(8e-9)), 'k--', 'HandleVisibility', 'off'); +text(50, 2e-7, sprintf('Support\nDynamics'), 'horizontalalignment', 'center'); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +set(gca, 'YTickLabel',[]); +xticks([1e0, 1e1, 1e2]); +title('"Stiff" $\nu$-hexapod'); +legend('location', 'northeast', 'FontSize', 8, 'NumColumns', 1); + +linkaxes([ax1,ax2,ax3],'xy'); +xlim([freqs(1), freqs(end)]); +ylim([1e-9, 1e-4]); diff --git a/matlab/uniaxial_8_payload_dynamics.m b/matlab/uniaxial_8_payload_dynamics.m new file mode 100644 index 0000000..acbffc0 --- /dev/null +++ b/matlab/uniaxial_8_payload_dynamics.m @@ -0,0 +1,479 @@ +%% Clear Workspace and Close figures +clear; close all; clc; + +%% Intialize Laplace variable +s = zpk('s'); + +%% Path for functions, data and scripts +addpath('./mat/'); % Path for data + +%% Colors for the figures +colors = colororder; + +%% Uniaxial Simscape model name +mdl = 'nass_uniaxial_model'; + +%% Load the micro-station parameters +load('uniaxial_micro_station_parameters.mat') + +%% Load the PSD of disturbances +load('uniaxial_disturbance_psd.mat', 'f', 'psd_ft', 'psd_xf'); + +%% Load Active Damping Controller +load('uniaxial_active_damping_controllers.mat', 'K_iff_vc', 'K_iff_md', 'K_iff_pz', ... + 'K_rdc_vc', 'K_rdc_md', 'K_rdc_pz', ... + 'K_dvf_vc', 'K_dvf_md', 'K_dvf_pz'); + +%% Load High Authority Controllers +load('uniaxial_high_authority_controllers.mat', 'K_hac_vc', 'K_hac_md', 'K_hac_pz'); + +%% Frequency Vector [Hz] +freqs = logspace(0, 3, 1000); + +% Impact on the plant dynamics +% <> + +% To study the impact of sample dynamics, the following sample configurations are considered: +% - rigid sample, corresponding to Figure ref:fig:uniaxial_paylaod_dynamics_rigid_schematic +% - two flexible samples with a resonance at $\omega_s = 200\,\text{Hz}$ and at $\omega_s = 20\,\text{Hz}$ respectively, corresponding to Figure ref:fig:uniaxial_paylaod_dynamics_schematic +% - for all cases, two sample masses are considered: $m_s = 1\,\text{kg}$ and $m_s = 50\,\text{kg}$ + +% The transfer functions from the nano-hexapod force to the motion of the nano-hexapod top platform are computed for all the above configurations and are compared for a soft Nano-Hexapod $k_n = 0.01\,N/\mu m$ in Figure ref:fig:uniaxial_payload_dynamics_soft_nano_hexapod. + +% It can be seen that the mode of the sample adds an anti-resonance followed by a resonance (zero/pole pattern). +% The frequency of the anti-resonance corresponds to the "free" resonance of the sample $\omega_s = \sqrt{k_s/m_s}$. +% The flexibility of the sample also changes the high frequency gain (the mass line is shifted from $\frac{1}{(m_n + m_s)s^2}$ to $\frac{1}{m_ns^2}$). + + +%% Soft Nano-Hexapod +% Light payload mass +mn = 15; % Nano-Hexapod mass [kg] +ms = 1; % Sample Mass [kg] +kn = 1e4; % Nano-Hexapod (soft) Stiffness [N/m] +cn = 2*0.01*sqrt((ms + mn)*kn); % Nano-Hexapod Damping [N/(m/s)] + +% Rigid sample +G_vc_rigid_light = 1/((mn + ms)*s^2 + cn*s + kn); + +% Soft Sample +ws = 2*pi*20; +ks = ms * ws^2; +cs = 2*0.01*sqrt(ms*ks); +G_vc_soft_light = (ms*s^2 + cs*s + ks)/((mn*s^2 + cn*s + kn)*(ms*s^2 + cs*s + ks) + ms*s^2*(cs*s + ks)); + +% Stiff Sample +ws = 2*pi*200; +ks = ms * ws^2; +cs = 2*0.01*sqrt(ms*ks); +G_vc_stiff_light = (ms*s^2 + cs*s + ks)/((mn*s^2 + cn*s + kn)*(ms*s^2 + cs*s + ks) + ms*s^2*(cs*s + ks)); + +% Heavy payload mass +mn = 15; % Nano-Hexapod mass [kg] +ms = 50; % Sample Mass [kg] +kn = 1e4; % Nano-Hexapod (soft) Stiffness [N/m] +cn = 2*0.01*sqrt((ms + mn)*kn); % Nano-Hexapod Damping [N/(m/s)] + +% Rigid sample +G_vc_rigid_heavy = 1/((mn + ms)*s^2 + cn*s + kn); + +% Soft Sample +ws = 2*pi*20; +ks = ms * ws^2; +cs = 2*0.01*sqrt(ms*ks); +G_vc_soft_heavy = (ms*s^2 + cs*s + ks)/((mn*s^2 + cn*s + kn)*(ms*s^2 + cs*s + ks) + ms*s^2*(cs*s + ks)); + +% Stiff Sample +ws = 2*pi*200; +ks = ms * ws^2; +cs = 2*0.01*sqrt(ms*ks); +G_vc_stiff_heavy = (ms*s^2 + cs*s + ks)/((mn*s^2 + cn*s + kn)*(ms*s^2 + cs*s + ks) + ms*s^2*(cs*s + ks)); + +%% Effect of the payload dynamics on the soft Nano-Hexapod. Light sample on the right, and heavy sample on the left +figure; +tiledlayout(3, 2, 'TileSpacing', 'Compact', 'Padding', 'None'); + +ax1 = nexttile([2,1]); +hold on; +plot(freqs, abs(squeeze(freqresp(G_vc_rigid_light, freqs, 'Hz'))), '-', 'color', colors(1,:), 'DisplayName', 'Rigid sample'); +plot(freqs, abs(squeeze(freqresp(G_vc_stiff_light, freqs, 'Hz'))), '-', 'color', colors(2,:), 'DisplayName', '$\omega_s = 200\,Hz$'); +plot(freqs, abs(squeeze(freqresp(G_vc_soft_light, freqs, 'Hz'))), '-', 'color', colors(3,:), 'DisplayName', '$\omega_s = 20\,Hz$'); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +ylabel('Amplitude [m/N]'); set(gca, 'XTickLabel',[]); +ylim([1e-10, 1e-2]) +title('$k_n = 0.01\,N/\mu m$, $m_s = 1\,kg$'); + +ax2 = nexttile([2,1]); +hold on; +plot(freqs, abs(squeeze(freqresp(G_vc_rigid_heavy, freqs, 'Hz'))), '-', 'color', colors(1,:), 'DisplayName', 'Rigid sample'); +plot(freqs, abs(squeeze(freqresp(G_vc_stiff_heavy, freqs, 'Hz'))), '-', 'color', colors(2,:), 'DisplayName', '$\omega_s = 200\,Hz$'); +plot(freqs, abs(squeeze(freqresp(G_vc_soft_heavy, freqs, 'Hz'))), '-', 'color', colors(3,:), 'DisplayName', '$\omega_s = 20\,Hz$'); +plot(freqs, abs(squeeze(freqresp(1/(mn*s^2), freqs, 'Hz'))), '-', 'color', [0,0,0,0.5], 'DisplayName', '$\frac{1}{m_n s^2}$'); +plot(freqs, abs(squeeze(freqresp(1/((mn + ms)*s^2), freqs, 'Hz'))), '--', 'color', [0,0,0,0.5], 'DisplayName', '$\frac{1}{(m_n + m_s) s^2}$'); +text(2.2, 3e-3, '$\omega_n = \sqrt{\frac{k_n}{m_n + m_s}}$', 'horizontalalignment', 'left'); +text(20, 1e-8, '$\omega_s = \sqrt{\frac{k_s}{m_s}}$', 'horizontalalignment', 'center'); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +set(gca, 'XTickLabel',[]); set(gca, 'YTickLabel',[]); +title('$k_n = 0.01\,N/\mu m$, $m_s = 50\,kg$'); +ldg = legend('location', 'northeast', 'FontSize', 8, 'NumColumns', 1); +ldg.ItemTokenSize = [20, 1]; +ylim([1e-10, 1e-2]) + +ax1b = nexttile(); +hold on; +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_vc_rigid_light, freqs, 'Hz')))), '-', 'color', colors(1,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_vc_stiff_light, freqs, 'Hz')))), '-', 'color', colors(2,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_vc_soft_light, freqs, 'Hz')))), '-', 'color', colors(3,:)); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'lin'); +xlabel('Frequency [Hz]'); ylabel('Phase [deg]'); +xticks([1e0, 1e1, 1e2]); +yticks(-360:90:360); +ylim([-200, 20]); + +ax2b = nexttile(); +hold on; +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_vc_rigid_heavy, freqs, 'Hz')))), '-', 'color', colors(1,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_vc_stiff_heavy, freqs, 'Hz')))), '-', 'color', colors(2,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_vc_soft_heavy, freqs, 'Hz')))), '-', 'color', colors(3,:)); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'lin'); +xlabel('Frequency [Hz]'); set(gca, 'YTickLabel',[]); +xticks([1e0, 1e1, 1e2]); +yticks(-360:90:360); +ylim([-200, 20]); + +linkaxes([ax1,ax1b],'x'); +xlim([1, 1000]); + + + +% #+name: fig:uniaxial_payload_dynamics_soft_nano_hexapod +% #+caption: Effect of the payload dynamics on the soft Nano-Hexapod. Light sample on the right, and heavy sample on the left +% #+RESULTS: +% [[file:figs/uniaxial_payload_dynamics_soft_nano_hexapod.png]] + +% The same transfer functions are now compared when using a stiff nano-hexapod ($k_n = 100\,N/\mu m$) in Figure ref:fig:uniaxial_payload_dynamics_stiff_nano_hexapod. +% In that case, the sample's resonance $\omega_n$ is smaller than the nano-hexapod resonance $\omega_n$. +% This changes the zero/pole pattern to a pole/zero pattern (the frequency of the zero still being equal to $\omega_s$). +% Even tough the added sample's flexibility still changes the high frequency mass line from $\frac{1}{(m_n + m_s)s^2}$ to $\frac{1}{m_ns^2}$, the overall dynamics is much less impacted, even if the sample mass is high (see yellow curve in Figure ref:fig:uniaxial_payload_dynamics_stiff_nano_hexapod, right). + + +%% Stiff Nano-Hexapod +% Light payload mass +mn = 15; % Nano-Hexapod mass [kg] +ms = 1; % Sample Mass [kg] +kn = 1e8; % Nano-Hexapod (soft) Stiffness [N/m] +cn = 2*0.01*sqrt((ms + mn)*kn); % Nano-Hexapod Damping [N/(m/s)] + +% Rigid sample +G_pz_rigid_light = 1/((mn + ms)*s^2 + cn*s + kn); + +% Soft Sample +ws = 2*pi*20; +ks = ms * ws^2; +cs = 2*0.01*sqrt(ms*ks); +G_pz_soft_light = (ms*s^2 + cs*s + ks)/((mn*s^2 + cn*s + kn)*(ms*s^2 + cs*s + ks) + ms*s^2*(cs*s + ks)); + +% Stiff Sample +ws = 2*pi*200; +ks = ms * ws^2; +cs = 2*0.01*sqrt(ms*ks); +G_pz_stiff_light = (ms*s^2 + cs*s + ks)/((mn*s^2 + cn*s + kn)*(ms*s^2 + cs*s + ks) + ms*s^2*(cs*s + ks)); + +% Heavy payload mass +mn = 15; % Nano-Hexapod mass [kg] +ms = 50; % Sample Mass [kg] +kn = 1e8; % Nano-Hexapod (soft) Stiffness [N/m] +cn = 2*0.01*sqrt((ms + mn)*kn); % Nano-Hexapod Damping [N/(m/s)] + +% Rigid sample +G_pz_rigid_heavy = 1/((mn + ms)*s^2 + cn*s + kn); + +% Soft Sample +ws = 2*pi*20; +ks = ms * ws^2; +cs = 2*0.01*sqrt(ms*ks); +G_pz_soft_heavy = (ms*s^2 + cs*s + ks)/((mn*s^2 + cn*s + kn)*(ms*s^2 + cs*s + ks) + ms*s^2*(cs*s + ks)); + +% Stiff Sample +ws = 2*pi*200; +ks = ms * ws^2; +cs = 2*0.01*sqrt(ms*ks); +G_pz_stiff_heavy = (ms*s^2 + cs*s + ks)/((mn*s^2 + cn*s + kn)*(ms*s^2 + cs*s + ks) + ms*s^2*(cs*s + ks)); + +%% Effect of the payload dynamics on the stiff Nano-Hexapod. Light sample on the right, and heavy sample on the left +figure; +tiledlayout(3, 2, 'TileSpacing', 'Compact', 'Padding', 'None'); + +ax1 = nexttile([2,1]); +hold on; +plot(freqs, abs(squeeze(freqresp(G_pz_rigid_light, freqs, 'Hz'))), '-', 'color', colors(1,:)); +plot(freqs, abs(squeeze(freqresp(G_pz_stiff_light, freqs, 'Hz'))), '-', 'color', colors(2,:)); +plot(freqs, abs(squeeze(freqresp(G_pz_soft_light, freqs, 'Hz'))), '-', 'color', colors(3,:)); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +ylabel('Amplitude [m/N]'); set(gca, 'XTickLabel',[]); +ylim([1e-10, 1e-2]) +title('$k_n = 100\,N/\mu m$, $m_s = 1\,kg$'); + +ax2 = nexttile([2,1]); +hold on; +plot(freqs, abs(squeeze(freqresp(G_pz_rigid_heavy, freqs, 'Hz'))), '-', 'color', colors(1,:), 'DisplayName', 'Rigid sample'); +plot(freqs, abs(squeeze(freqresp(G_pz_stiff_heavy, freqs, 'Hz'))), '-', 'color', colors(2,:), 'DisplayName', 'Stiff sample: $\omega_s = 200\,Hz$'); +plot(freqs, abs(squeeze(freqresp(G_pz_soft_heavy, freqs, 'Hz'))), '-', 'color', colors(3,:), 'DisplayName', 'Soft sample: $\omega_s = 20\,Hz$'); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +set(gca, 'XTickLabel',[]); set(gca, 'YTickLabel',[]); +title('$k_n = 100\,N/\mu m$, $m_s = 50\,kg$'); +ylim([1e-10, 1e-2]) +ldg = legend('location', 'northeast', 'FontSize', 8, 'NumColumns', 1); +ldg.ItemTokenSize = [20, 1]; + +ax1b = nexttile(); +hold on; +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_pz_rigid_light, freqs, 'Hz')))), '-', 'color', colors(1,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_pz_stiff_light, freqs, 'Hz')))), '-', 'color', colors(2,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_pz_soft_light, freqs, 'Hz')))), '-', 'color', colors(3,:)); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'lin'); +xlabel('Frequency [Hz]'); ylabel('Phase [deg]'); +xticks([1e0, 1e1, 1e2]); +yticks(-360:90:360); +ylim([-200, 20]); + +ax2b = nexttile(); +hold on; +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_pz_rigid_heavy, freqs, 'Hz')))), '-', 'color', colors(1,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_pz_stiff_heavy, freqs, 'Hz')))), '-', 'color', colors(2,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_pz_soft_heavy, freqs, 'Hz')))), '-', 'color', colors(3,:)); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'lin'); +xlabel('Frequency [Hz]'); set(gca, 'YTickLabel',[]); +xticks([1e0, 1e1, 1e2]); +yticks(-360:90:360); +ylim([-200, 20]); + +linkaxes([ax1,ax1b],'x'); +xlim([1, 1000]); + + + +% #+name: fig:uniaxial_sample_flexibility_control +% #+caption: Uniaxial model considering a flexibility between the nano-hexapod top platform and the sample. In that case the measured and controlled distance $d$ is different from the distance $y$ that is wish to be controlled +% #+RESULTS: +% [[file:figs/uniaxial_sample_flexibility_control.png]] + +% After the system dynamics extracted from the model, IFF is applied using the same gains as the ones used in Section ref:sec:uniaxial_active_damping. +% Thanks to the collocation between the nano-hexapod and the force sensor used for IFF, the damped plants are still stable and similar damping values are obtained than when considering a rigid sample. + +% The High Authority Controllers used in Section ref:sec:uniaxial_position_control are then implemented on the damped plants. +% The obtained closed-loop systems are stable, indicating good robustness. + +% Finally, closed-loop noise budgeting is computed for the obtained the closed-loop system and the cumulative amplitude spectrum of $d$ and $y$ are shown in Figure ref:fig:uniaxial_sample_flexibility_noise_budget_y. +% The cumulative amplitude spectrum of the measured distance $d$ (Figure ref:fig:uniaxial_sample_flexibility_noise_budget_d) shows that the added flexibility at the sample location have very little effect on the control performance. +% However, the cumulative amplitude spectrum of the distance $y$ (Figure ref:fig:uniaxial_sample_flexibility_noise_budget_y) shows that the stability of $y$ is degraded when the sample flexibility is considered and is degraded as $\omega_s$ is lowered. + +% What happens is that above $\omega_s$, even though the motion $d$ can be controlled perfectly, the sample's mass is "isolated" from the motion of the nano-hexapod and the control on $y$ is not effective. + + +%% Nano-Hexpod model +model_config = struct(); +model_config.controller = "open_loop"; +mn = 15; % Nano-Hexapod mass [kg] +ms = 1; % Sample Mass [kg] + +%% Identification +clear io; io_i = 1; +io(io_i) = linio([mdl, '/controller'], 1, 'openinput'); io_i = io_i + 1; % Actuator Force +io(io_i) = linio([mdl, '/micro_station/xf'], 1, 'openinput'); io_i = io_i + 1; % Floor Motion +io(io_i) = linio([mdl, '/micro_station/ft'], 1, 'openinput'); io_i = io_i + 1; % Stage vibrations +io(io_i) = linio([mdl, '/fs'], 1, 'openinput'); io_i = io_i + 1; % Direct sample forces +io(io_i) = linio([mdl, '/dL'], 1, 'openoutput'); io_i = io_i + 1; % Relative Motion Sensor +io(io_i) = linio([mdl, '/fm'], 1, 'openoutput'); io_i = io_i + 1; % Force Sensor +io(io_i) = linio([mdl, '/vn'] , 1, 'openoutput'); io_i = io_i + 1; % Geophone +io(io_i) = linio([mdl, '/d'] , 1, 'openoutput'); io_i = io_i + 1; % Metrology Output +io(io_i) = linio([mdl, '/y'] , 1, 'openoutput'); io_i = io_i + 1; % Sample's position + +%% Soft Nano-Hexapod +% Light payload mass +kn = 1e4; % Nano-Hexapod (soft) Stiffness [N/m] +cn = 2*0.01*sqrt((ms + mn)*kn); % Nano-Hexapod Damping [N/(m/s)] + +% Rigid Sample +model_config.nhexa = "1dof"; +G_vc_light_rigid = linearize(mdl, io, 0.0); +G_vc_light_rigid.InputName = {'f', 'xf', 'ft', 'fs'}; +G_vc_light_rigid.OutputName = {'dL', 'fm', 'vn', 'd', 'y'}; + +% Soft Sample +model_config.nhexa = "2dof"; +ws = 2*pi*20; +ks = ms * ws^2; +cs = 2*0.01*sqrt(ms*ks); + +G_vc_light_soft = linearize(mdl, io, 0.0); +G_vc_light_soft.InputName = {'f', 'xf', 'ft', 'fs'}; +G_vc_light_soft.OutputName = {'dL', 'fm', 'vn', 'd', 'y'}; + +% Rigid Sample +model_config.nhexa = "2dof"; +ws = 2*pi*200; +ks = ms * ws^2; +cs = 2*0.01*sqrt(ms*ks); + +G_vc_light_stiff = linearize(mdl, io, 0.0); +G_vc_light_stiff.InputName = {'f', 'xf', 'ft', 'fs'}; +G_vc_light_stiff.OutputName = {'dL', 'fm', 'vn', 'd', 'y'}; + +%% Stiff Nano-Hexapod +% Light payload mass +kn = 1e8; % Nano-Hexapod (soft) Stiffness [N/m] +cn = 2*0.01*sqrt((ms + mn)*kn); % Nano-Hexapod Damping [N/(m/s)] + +% Rigid Sample +model_config.nhexa = "1dof"; +G_pz_light_rigid = linearize(mdl, io, 0.0); +G_pz_light_rigid.InputName = {'f', 'xf', 'ft', 'fs'}; +G_pz_light_rigid.OutputName = {'dL', 'fm', 'vn', 'd', 'y'}; + +% Soft Sample +model_config.nhexa = "2dof"; +ws = 2*pi*20; +ks = ms * ws^2; +cs = 2*0.01*sqrt(ms*ks); + +G_pz_light_soft = linearize(mdl, io, 0.0); +G_pz_light_soft.InputName = {'f', 'xf', 'ft', 'fs'}; +G_pz_light_soft.OutputName = {'dL', 'fm', 'vn', 'd', 'y'}; + +% Rigid Sample +model_config.nhexa = "2dof"; +ws = 2*pi*200; +ks = ms * ws^2; +cs = 2*0.01*sqrt(ms*ks); + +G_pz_light_stiff = linearize(mdl, io, 0.0); +G_pz_light_stiff.InputName = {'f', 'xf', 'ft', 'fs'}; +G_pz_light_stiff.OutputName = {'dL', 'fm', 'vn', 'd', 'y'}; + +%% Apply IFF and verify stability +% Soft Nano-Hexapod +G_iff_vc_light_rigid = feedback(G_vc_light_rigid, K_iff_vc, 'name', +1); +G_iff_vc_light_soft = feedback(G_vc_light_soft , K_iff_vc, 'name', +1); +G_iff_vc_light_stiff = feedback(G_vc_light_stiff, K_iff_vc, 'name', +1); + +isstable(G_iff_vc_light_rigid) +isstable(G_iff_vc_light_soft) +isstable(G_iff_vc_light_stiff) + +% Stiff Nano-Hexapod +G_iff_pz_light_rigid = feedback(G_pz_light_rigid, K_iff_pz, 'name', +1); +G_iff_pz_light_soft = feedback(G_pz_light_soft , K_iff_pz, 'name', +1); +G_iff_pz_light_stiff = feedback(G_pz_light_stiff, K_iff_pz, 'name', +1); + +isstable(G_iff_pz_light_rigid) +isstable(G_iff_pz_light_soft) +isstable(G_iff_pz_light_stiff) + +%% Compute closed-loop plants and verify stability +% Soft Nano-Hexapod +G_hac_iff_vc_light_rigid = feedback(G_iff_vc_light_rigid, K_hac_vc, 'name', -1); +G_hac_iff_vc_light_soft = feedback(G_iff_vc_light_soft , K_hac_vc, 'name', -1); +G_hac_iff_vc_light_stiff = feedback(G_iff_vc_light_stiff, K_hac_vc, 'name', -1); + +isstable(G_hac_iff_vc_light_rigid) +isstable(G_hac_iff_vc_light_soft) +isstable(G_hac_iff_vc_light_stiff) + +% Stiff Nano-Hexapod +G_hac_iff_pz_light_rigid = feedback(G_iff_pz_light_rigid, K_hac_pz, 'name', -1); +G_hac_iff_pz_light_soft = feedback(G_iff_pz_light_soft , K_hac_pz, 'name', -1); +G_hac_iff_pz_light_stiff = feedback(G_iff_pz_light_stiff, K_hac_pz, 'name', -1); + +isstable(G_hac_iff_pz_light_rigid) +isstable(G_hac_iff_pz_light_soft) +isstable(G_hac_iff_pz_light_stiff) + +%% Cumulative Amplitude Spectrum of d - Effect of Sample's flexibility +figure; +tiledlayout(1, 2, 'TileSpacing', 'Compact', 'Padding', 'None'); + +ax1 = nexttile(); +hold on; +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_hac_iff_vc_light_rigid('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_hac_iff_vc_light_rigid('d', 'xf'), f, 'Hz'))).^2)))), '-', ... + 'DisplayName', 'Rigid sample'); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_hac_iff_vc_light_stiff('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_hac_iff_vc_light_stiff('d', 'xf'), f, 'Hz'))).^2)))), '-', ... + 'DisplayName', 'Stiff $\omega_s = 200\,$Hz'); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_hac_iff_vc_light_soft('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_hac_iff_vc_light_soft('d', 'xf'), f, 'Hz'))).^2)))), '-', ... + 'DisplayName', 'Soft $\omega_s = 20\,$Hz'); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +xticks([1e0, 1e1, 1e2]); +ylabel('CAS of $d$ [m]'); xlabel('Frequency [Hz]'); +legend('location', 'southwest', 'FontSize', 8, 'NumColumns', 1); +title('$k_n = 0.01\,N/\mu m$'); + +ax2 = nexttile(); +hold on; +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_hac_iff_pz_light_rigid('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_hac_iff_pz_light_rigid('d', 'xf'), f, 'Hz'))).^2)))), '-'); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_hac_iff_pz_light_stiff('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_hac_iff_pz_light_stiff('d', 'xf'), f, 'Hz'))).^2)))), '-'); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_hac_iff_pz_light_soft('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_hac_iff_pz_light_soft('d', 'xf'), f, 'Hz'))).^2)))), '-'); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +xticks([1e0, 1e1, 1e2]); +xlabel('Frequency [Hz]'); set(gca, 'YTickLabel',[]); +title('$k_n = 100\,N/\mu m$'); +xlim([1, 500]); + +linkaxes([ax1,ax2],'xy'); +xlim([1, 500]); +ylim([2e-10, 2e-7]) + +%% Cumulative Amplitude Spectrum - Effect of Sample's flexibility +figure; +tiledlayout(1, 2, 'TileSpacing', 'Compact', 'Padding', 'None'); + +ax1 = nexttile(); +hold on; +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_hac_iff_vc_light_rigid('y', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_hac_iff_vc_light_rigid('y', 'xf'), f, 'Hz'))).^2)))), '-', ... + 'DisplayName', 'Rigid sample'); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_hac_iff_vc_light_stiff('y', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_hac_iff_vc_light_stiff('y', 'xf'), f, 'Hz'))).^2)))), '-', ... + 'DisplayName', 'Stiff $\omega_s = 200\,$Hz'); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_hac_iff_vc_light_soft('y', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_hac_iff_vc_light_soft('y', 'xf'), f, 'Hz'))).^2)))), '-', ... + 'DisplayName', 'Soft $\omega_s = 20\,$Hz'); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +xticks([1e0, 1e1, 1e2]); +ylabel('CAS of $y$ [m]'); xlabel('Frequency [Hz]'); +legend('location', 'southwest', 'FontSize', 8, 'NumColumns', 1); +title('$k_n = 0.01\,N/\mu m$'); + +ax2 = nexttile(); +hold on; +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_hac_iff_pz_light_rigid('y', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_hac_iff_pz_light_rigid('y', 'xf'), f, 'Hz'))).^2)))), '-'); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_hac_iff_pz_light_stiff('y', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_hac_iff_pz_light_stiff('y', 'xf'), f, 'Hz'))).^2)))), '-'); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_hac_iff_pz_light_soft('y', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_hac_iff_pz_light_soft('y', 'xf'), f, 'Hz'))).^2)))), '-'); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +xticks([1e0, 1e1, 1e2]); +xlabel('Frequency [Hz]'); set(gca, 'YTickLabel',[]); +title('$k_n = 100\,N/\mu m$'); +xlim([1, 500]); + +linkaxes([ax1,ax2],'xy'); +xlim([1, 500]); +ylim([2e-10, 2e-7]) diff --git a/nass-uniaxial-model.bib b/nass-uniaxial-model.bib new file mode 100644 index 0000000..14db4af --- /dev/null +++ b/nass-uniaxial-model.bib @@ -0,0 +1,81 @@ +@inproceedings{preumont91_activ, + author = {Andre Preumont and Jean-Paul Dufour and Christian Malekian}, + title = {Active damping by a local force feedback with piezoelectric + actuators}, + booktitle = {32nd Structures, Structural Dynamics, and Materials + Conference}, + year = 1991, + doi = {10.2514/6.1991-989}, + url = {https://doi.org/10.2514/6.1991-989}, + month = {apr}, + publisher = {American Institute of Aeronautics and Astronautics}, + keywords = {active damping}, +} + + + +@book{preumont18_vibrat_contr_activ_struc_fourt_edition, + author = {Andre Preumont}, + title = {Vibration Control of Active Structures - Fourth Edition}, + year = 2018, + publisher = {Springer International Publishing}, + url = {https://doi.org/10.1007/978-3-319-72296-2}, + doi = {10.1007/978-3-319-72296-2}, + keywords = {favorite, parallel robot}, + series = {Solid Mechanics and Its Applications}, +} + + + +@article{karnopp74_vibrat_contr_using_semi_activ_force_gener, + author = {Karnopp, Dean and Crosby, Michael J and Harwood, RA}, + title = {Vibration Control Using Semi-Active Force Generators}, + journal = {Journal of Engineering for Industry}, + volume = 96, + pages = {619-626}, + year = 1974, + doi = {10.1115/1.3438373}, + url = {https://doi.org/10.1115/1.3438373}, +} + + + +@article{serrand00_multic_feedb_contr_isolat_base_excit_vibrat, + author = {Serrand, M and Elliott, SJ}, + title = {Multichannel Feedback Control for the Isolation of + Base-Excited Vibration}, + journal = {Journal of Sound and Vibration}, + volume = 234, + number = 4, + pages = {681--704}, + year = 2000, + publisher = {Elsevier}, +} + + + +@article{preumont02_force_feedb_versus_accel_feedb, + author = {A. Preumont and A. Fran{\c{c}}ois and F. Bossens and A. + Abu-Hanieh}, + title = {Force Feedback Versus Acceleration Feedback in Active + Vibration Isolation}, + journal = {Journal of Sound and Vibration}, + volume = 257, + number = 4, + pages = {605-613}, + year = 2002, + doi = {10.1006/jsvi.2002.5047}, + url = {https://doi.org/10.1006/jsvi.2002.5047}, +} + + + +@phdthesis{rankers98_machin, + author = {Rankers, Adrian Mathias}, + keywords = {favorite}, + school = {University of Twente}, + title = {Machine dynamics in mechatronic systems: An engineering + approach.}, + year = 1998, +} + diff --git a/nass-uniaxial-model.org b/nass-uniaxial-model.org index 79029d1..6a193b9 100644 --- a/nass-uniaxial-model.org +++ b/nass-uniaxial-model.org @@ -1,4 +1,4 @@ -#+TITLE: NASS - Uniaxial Model +#+TITLE: Nano Active Stabilization System - Uniaxial Model :DRAWER: #+LANGUAGE: en #+EMAIL: dehaeze.thomas@gmail.com @@ -14,12 +14,15 @@ #+BIND: org-latex-image-default-width "" #+LaTeX_CLASS: scrreprt -#+LaTeX_CLASS_OPTIONS: [a4paper, 10pt, DIV=12, parskip=full] +#+LaTeX_CLASS_OPTIONS: [a4paper, 10pt, DIV=12, parskip=full, bibliography=totoc] #+LaTeX_HEADER_EXTRA: \input{preamble.tex} +#+LATEX_HEADER_EXTRA: \bibliography{nass-uniaxial-model.bib} + +#+BIND: org-latex-bib-compiler "biber" #+PROPERTY: header-args:matlab :session *MATLAB* #+PROPERTY: header-args:matlab+ :comments org -#+PROPERTY: header-args:matlab+ :exports both +#+PROPERTY: header-args:matlab+ :exports none #+PROPERTY: header-args:matlab+ :results none #+PROPERTY: header-args:matlab+ :eval no-export #+PROPERTY: header-args:matlab+ :noweb yes @@ -49,6 +52,50 @@ #+latex: \clearpage +* Build :noexport: +#+NAME: startblock +#+BEGIN_SRC emacs-lisp :results none :tangle no +(add-to-list 'org-latex-classes + '("scrreprt" + "\\documentclass{scrreprt}" + ("\\chapter{%s}" . "\\chapter*{%s}") + ("\\section{%s}" . "\\section*{%s}") + ("\\subsection{%s}" . "\\subsection*{%s}") + ("\\paragraph{%s}" . "\\paragraph*{%s}") + )) + + +;; Remove automatic org heading labels +(defun my-latex-filter-removeOrgAutoLabels (text backend info) + "Org-mode automatically generates labels for headings despite explicit use of `#+LABEL`. This filter forcibly removes all automatically generated org-labels in headings." + (when (org-export-derived-backend-p backend 'latex) + (replace-regexp-in-string "\\\\label{sec:org[a-f0-9]+}\n" "" text))) +(add-to-list 'org-export-filter-headline-functions + 'my-latex-filter-removeOrgAutoLabels) + +;; Remove all org comments in the output LaTeX file +(defun delete-org-comments (backend) + (loop for comment in (reverse (org-element-map (org-element-parse-buffer) + 'comment 'identity)) + do + (setf (buffer-substring (org-element-property :begin comment) + (org-element-property :end comment)) + ""))) +(add-hook 'org-export-before-processing-hook 'delete-org-comments) + +;; Use no package by default +(setq org-latex-packages-alist nil) +(setq org-latex-default-packages-alist nil) + +;; Do not include the subtitle inside the title +(setq org-latex-subtitle-separate t) +(setq org-latex-subtitle-format "\\subtitle{%s}") + +(setq org-export-before-parsing-hook '(org-ref-glossary-before-parsing + org-ref-acronyms-before-parsing + tdh-org-ref-extract-bibtex-to-file)) +#+END_SRC + * Introduction :ignore: In this report, a uniaxial model of the Nano Active Stabilization System (NASS) is developed and used to have a first idea of the challenges involved in this complex system. @@ -59,14 +106,16 @@ In order to have a relevant model, the micro-station dynamics is first identifie Then, a model of the nano-hexapod is added on top of the micro-station. With added sample and sensors, this gives a uniaxial dynamical model of the NASS that will be used for further analysis (Section ref:sec:nano_station_model). -The disturbances affecting the position accuracy are identified experimentally (Section ref:sec:uniaxial_disturbances) and included in the model for dynamical noise budgeting (Section ref:sec:uniaxial_noise_budgeting). -In all the following analysis, there nano-hexapod stiffnesses are considered to better understand the trade-offs and to find the most adequate stiffness. +The disturbances affecting the position stability are identified experimentally (Section ref:sec:uniaxial_disturbances) and included in the model for dynamical noise budgeting (Section ref:sec:uniaxial_noise_budgeting). +In all the following analysis, there nano-hexapod stiffnesses are considered to better understand the trade-offs and to find the most adequate nano-hexapod design. Three sample masses are also considered to verify the robustness of the applied control strategies to a change of sample. Three active damping techniques are then applied on the nano-hexapod. This helps to reduce the effect of disturbances as well as render the system easier to control afterwards (Section ref:sec:uniaxial_active_damping). -Once the system is well damped, a feedback position controller is applied, and the obtained performances are compared (Section ref:sec:uniaxial_position_control). +Once the system is well damped, a feedback position controller is applied, and the obtained performance are compared (Section ref:sec:uniaxial_position_control). + +Two key effects that may limit that positioning performances are then considered: the limited micro-station compliance (Section ref:sec:uniaxial_support_compliance) and the presence of dynamics between the nano-hexapod and the sample's point of interest (Section ref:sec:uniaxial_payload_dynamics). Conclusion remarks are given in Section ref:sec:conclusion. @@ -74,14 +123,16 @@ Conclusion remarks are given in Section ref:sec:conclusion. #+caption: Report sections and corresponding Matlab files #+attr_latex: :environment tabularx :width 0.6\linewidth :align lX #+attr_latex: :center t :booktabs t -| *Sections* | *Matlab File* | -|-------------------------------------------+-------------------------------------| -| Section ref:sec:micro_station_model | =uniaxial_1_micro_station_model.m= | -| Section ref:sec:nano_station_model | =uniaxial_2_nano_hexapod_model.m= | -| Section ref:sec:uniaxial_disturbances | =uniaxial_3_disturbances.m= | -| Section ref:sec:uniaxial_noise_budgeting | =uniaxial_4_dynamic_noise_budget.m= | -| Section ref:sec:uniaxial_active_damping | =uniaxial_5_active_damping.m= | -| Section ref:sec:uniaxial_position_control | =uniaxial_6_hac_lac.m= | +| *Sections* | *Matlab File* | +|---------------------------------------------+-------------------------------------| +| Section ref:sec:micro_station_model | =uniaxial_1_micro_station_model.m= | +| Section ref:sec:nano_station_model | =uniaxial_2_nano_hexapod_model.m= | +| Section ref:sec:uniaxial_disturbances | =uniaxial_3_disturbances.m= | +| Section ref:sec:uniaxial_noise_budgeting | =uniaxial_4_dynamic_noise_budget.m= | +| Section ref:sec:uniaxial_active_damping | =uniaxial_5_active_damping.m= | +| Section ref:sec:uniaxial_position_control | =uniaxial_6_hac_lac.m= | +| Section ref:sec:uniaxial_support_compliance | =uniaxial_7_support_compliance= | +| Section ref:sec:uniaxial_payload_dynamics | =uniaxial_8_payload_dynamics= | #+begin_src latex :file uniaxial_overview_model_sections.pdf \begin{tikzpicture} @@ -193,10 +244,19 @@ Conclusion remarks are given in Section ref:sec:conclusion. % sample \begin{scope}[shift={(0, 4*(\spaceh+\massh))}] % Mass - \draw[draw=colorred,fill=colorred!10!white] (-0.3*\massw, 0) rectangle (0.3*\massw, \massh) node[pos=0.5,color=colorred]{$m_{s}$}; + \draw[draw=colorcyan,fill=colorcyan!10!white] (-0.3*\massw, \spaceh) rectangle (0.3*\massw, \spaceh+\massh) node[pos=0.5, color=colorcyan]{$m_{s}$}; + + % Spring, Damper, and Actuator + \draw[spring,draw=colorcyan] (-0.2*\massw, 0) -- (-0.2*\massw, \spaceh) node[midway, left=0.1, color=colorcyan]{$k_{s}$}; + \draw[damper={colorcyan}{}{}] ( 0.2*\massw, 0) -- ( 0.2*\massw, \spaceh) node[midway, left=0.2, color=colorcyan]{$c_{s}$}; + + % Legend + \draw[decorate, decoration={brace, amplitude=8pt}, xshift=\brach] % + (-0.5*\massw, \bracs) -- (-0.5*\massw, \spaceh+\massh-\bracs) % + node[midway,rotate=90,anchor=south,yshift=10pt,align=center]{Sample}; % External Force - \draw[->, color=coloryellow] (0, \massh) node[]{$\bullet$} -- ++(0, 0.5*\massh) node[right, color=coloryellow]{$f_s$}; + \draw[->, color=coloryellow] (0, \spaceh+\massh) node[]{$\bullet$} -- ++(0, 0.5*\massh) node[right, color=coloryellow]{$f_s$}; \end{scope} % ==================== @@ -220,7 +280,7 @@ Conclusion remarks are given in Section ref:sec:conclusion. #+end_src #+name: fig:uniaxial_overview_model_sections -#+caption: Uniaxial Micro-Station model in blue (Section ref:sec:micro_station_model), Nano-Hexapod and sample models in red (Section ref:sec:nano_station_model), Disturbances in yellow (Section ref:sec:uniaxial_disturbances), Active Damping in green (Section ref:sec:uniaxial_active_damping) and Position control in purple (Section ref:sec:uniaxial_position_control) +#+caption: Uniaxial Micro-Station model in blue (Section ref:sec:micro_station_model), Nano-Hexapod models in red (Section ref:sec:nano_station_model), Disturbances in yellow (Section ref:sec:uniaxial_disturbances), Active Damping in green (Section ref:sec:uniaxial_active_damping), Position control in purple (Section ref:sec:uniaxial_position_control) and Sample dynamics in cyan (Section ref:sec:uniaxial_payload_dynamics) #+RESULTS: [[file:figs/uniaxial_overview_model_sections.png]] @@ -283,7 +343,7 @@ From the forces applied by the instrumented hammer and the responses of the geop - from $F_g$ to $d_h$ (or from $F_h$ to $d_g$) - from $F_g$ to $d_g$ -#+begin_src latex :file micro_station_meas_dynamics_schematic.pdf +#+begin_src latex :file micro_station_meas_dynamics_schematic.pdf :results file raw silent \begin{tikzpicture} % Parameters \def\blockw{6.0cm} @@ -424,71 +484,39 @@ From the forces applied by the instrumented hammer and the responses of the geop \end{tikzpicture} #+end_src -#+name: fig:micro_station_meas_dynamics_schematic -#+caption: Measurement setup - Schematic -#+RESULTS: +#+name: fig:micro_station_uniaxial_model +#+caption: Schematic of the Micro-Station measurement setup and uniaxial model. +#+begin_figure +#+attr_latex: :caption \subcaption{\label{fig:micro_station_meas_dynamics_schematic}Measurement setup - Schematic} +#+attr_latex: :options {0.69\textwidth} +#+begin_subfigure +#+attr_latex: :scale 1 [[file:figs/micro_station_meas_dynamics_schematic.png]] +#+end_subfigure +#+attr_latex: :caption \subcaption{\label{fig:uniaxial_model_micro_station}Uniaxial model of the micro-station} +#+attr_latex: :options {0.29\textwidth} +#+begin_subfigure +#+attr_latex: :scale 1 +[[file:figs/uniaxial_model_micro_station.png]] +#+end_subfigure +#+end_figure -Due to the bad coherence at low frequency, the frequency response functions are only shown between 20 and 200Hz (Figure ref:fig:uniaxial_measured_frf_vertical). +Due to the bad coherence at low frequency, the frequency response functions will only be shown between 20 and 200Hz (solid lines in Figure ref:fig:uniaxial_comp_frf_meas_model). #+begin_src matlab %% Load measured FRF load('meas_microstation_frf.mat'); #+end_src -#+begin_src matlab :exports none :results none -%% Measured Frequency Response Functions in the vertical direction -figure; -tiledlayout(3, 1, 'TileSpacing', 'Compact', 'Padding', 'None'); - -ax1 = nexttile([2,1]); -hold on; -plot(f(f>20), abs(frf_Fhx_to_Dhx(f>20)), ... - 'DisplayName', '$D_{h}/F_{h}$'); -plot(f(f>20), abs(frf_Fgx_to_Dhx(f>20)), ... - 'DisplayName', '$D_{h}/F_{g}$'); -plot(f(f>20), abs(frf_Fgx_to_Dgx(f>20)), ... - 'DisplayName', '$D_{g}/F_{g}$'); -hold off; -set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); -ylabel('Amplitude [m/N]'); set(gca, 'XTickLabel',[]); -ylim([1e-10, 2e-6]); -legend('location', 'northwest', 'FontSize', 8, 'NumColumns', 1); - -ax2 = nexttile; -hold on; -plot(f(f>20), 180/pi*unwrap(angle(frf_Fhx_to_Dhx(f>20)))); -plot(f(f>30), 180/pi*unwrap(angle(frf_Fgx_to_Dhx(f>30)))); -plot(f(f>20), 180/pi*unwrap(angle(frf_Fgx_to_Dgx(f>20)))); -hold off; -set(gca, 'XScale', 'log'); set(gca, 'YScale', 'lin'); -xlabel('Frequency [Hz]'); ylabel('Phase [deg]'); -hold off; -yticks(-360:90:360); -ylim([-360, 10]); - -linkaxes([ax1,ax2],'x'); -xlim([1, 500]); -#+end_src - -#+begin_src matlab :tangle no :exports results :results file replace -exportFig('figs/uniaxial_measured_frf_vertical.pdf', 'width', 'wide', 'height', 'tall'); -#+end_src - -#+name: fig:uniaxial_measured_frf_vertical -#+caption: Measured Frequency Response Functions in the vertical direction -#+RESULTS: -[[file:figs/uniaxial_measured_frf_vertical.png]] - ** Uniaxial Model -The uni-axial model of the micro-station is shown in Figure ref:fig:uniaxial_comp_frf_meas_model, with: +The uni-axial model of the micro-station is shown in Figure ref:fig:uniaxial_model_micro_station, with: - Disturbances: - $x_f$: Floor motion - $f_t$: Stage vibrations - Hammer impacts: $F_h$ and $F_g$. - Geophones: $x_h$ and $x_g$ -#+begin_src latex :file uniaxial_model_micro_station.pdf +#+begin_src latex :file uniaxial_model_micro_station.pdf :results file raw silent \begin{tikzpicture} % ==================== % Parameters @@ -586,11 +614,6 @@ The uni-axial model of the micro-station is shown in Figure ref:fig:uniaxial_com \end{tikzpicture} #+end_src -#+name: fig:uniaxial_model_micro_station -#+caption: Uniaxial model of the micro-station -#+RESULTS: -[[file:figs/uniaxial_model_micro_station.png]] - Masses are estimated from the CAD. #+BEGIN_SRC matlab %% Parameters - Mass @@ -645,7 +668,9 @@ G_id.OutputName = {'Dg', 'Dh'}; #+end_src ** Comparison of the model and measurements -The comparison between the measurements and the model is done in Figure ref:fig:uniaxial_comp_frf_meas_model. +The comparison between the measurements and the model is shown in Figure ref:fig:uniaxial_comp_frf_meas_model. + +Only three modes are modelled with frequencies at 70Hz, 140Hz and 320Hz. As the model is simplistic, the goal is not to match exactly the measurement but to have a first approximation. More accurate models will be used later on. @@ -708,7 +733,7 @@ A model of the nano-hexapod and sample is now added on top of the uni-axial mode Disturbances (shown in red) are: - $f_s$: direct forces applied to the sample (for instance cable forces) -- $f_t$: disturbances coming from the imperfect stage scanning performances +- $f_t$: disturbances coming from the imperfect stage scanning performance - $x_f$: floor motion The control signal is the force applied by the nano-hexapod $f$ and the measurement is the relative motion between the sample and the granite $d$. @@ -893,11 +918,13 @@ cn = 2*0.01*sqrt(mn*kn); % [N/(m/s)] ms = 10; % [kg] #+end_src -** Obtained Dynamics +** Obtained Dynamic Response The sensitivity to disturbances (i.e. $x_f$, $f_t$ and $f_s$) are shown in Figure ref:fig:uniaxial_sensitivity_dist_first_params. The /plant/ (i.e. the transfer function from actuator force $f$ to measured displacement $d$) is shown in Figure ref:fig:uniaxial_plant_first_params. +#+begin_important For further analysis, 9 configurations are considered: three nano-hexapod stiffnesses ($k_n = 0.01\,N/\mu m$, $k_n = 1\,N/\mu m$ and $k_n = 100\,N/\mu m$) combined with three sample's masses ($m_s = 1\,kg$, $m_s = 25\,kg$ and $m_s = 50\,kg$). +#+end_important #+begin_src matlab :exports none %% Use 1DoF Nano-Hexpod model @@ -957,7 +984,7 @@ exportFig('figs/uniaxial_sensitivity_dist_first_params.pdf', 'width', 'full', 'h #+end_src #+name: fig:uniaxial_sensitivity_dist_first_params -#+caption: Sensitivity to disturbances +#+caption: Sensitivity of the relative motion $d$ to disturbances: $f_s$ the direct forces applied on the sample, $f_t$ disturbances from the micro-station stages and $x_f$ the floor motion (from left to right) #+RESULTS: [[file:figs/uniaxial_sensitivity_dist_first_params.png]] @@ -1352,7 +1379,7 @@ psd_xf = psd_V.*abs(squeeze(freqresp(G_geo, f, 'Hz'))).^2; % [m^2/Hz] The amplitude spectral density $\Gamma_{x_f}$ of the measured displacement $x_f$ is shown in Figure ref:fig:asd_floor_motion_id31. #+begin_src matlab :exports none :results none -%% Measured Amplitude Spectral Density of the Floor motion on ID31 +%% Amplitude Spectral Density of the measured Floor motion on ID31 figure; hold on; plot(f, sqrt(psd_xf), 'DisplayName', '$\Gamma_{x_{f}}$'); @@ -1368,7 +1395,7 @@ exportFig('figs/asd_floor_motion_id31.pdf', 'width', 'wide', 'height', 'normal') #+end_src #+name: fig:asd_floor_motion_id31 -#+caption: Measured Amplitude Spectral Density of the Floor motion on ID31 +#+caption: Amplitude Spectral Density of the measured Floor motion on ID31 #+RESULTS: [[file:figs/asd_floor_motion_id31.png]] @@ -1398,7 +1425,7 @@ It is then integrated to obtain the Amplitude Spectral Density of the relative m It is shown that the spindle rotation induces vibrations in a wide frequency spectrum. #+begin_src matlab :exports none :results none -%% Measured Amplitude Spectral Density of the relative motion between the granite and the micro-hexapod's top platform during Spindle rotating +%% Amplitude Spectral Density of the relative motion measured between the granite and the micro-hexapod's top platform during Spindle rotating figure; hold on; plot(f, sqrt(psd_vft)./(2*pi*f), 'DisplayName', '6rpm'); @@ -1415,7 +1442,7 @@ exportFig('figs/asd_vibration_spindle_rotation.pdf', 'width', 'wide', 'height', #+end_src #+name: fig:asd_vibration_spindle_rotation -#+caption: Measured Amplitude Spectral Density of the relative motion between the granite and the micro-hexapod's top platform during Spindle rotating +#+caption: Amplitude Spectral Density of the relative motion measured between the granite and the micro-hexapod's top platform during Spindle rotating #+RESULTS: [[file:figs/asd_vibration_spindle_rotation.png]] @@ -1473,7 +1500,7 @@ exportFig('figs/asd_disturbance_force.pdf', 'width', 'wide', 'height', 'normal') #+RESULTS: [[file:figs/asd_disturbance_force.png]] -The vibrations induced by the $T_y$ stage are not considered here as: +The vibrations induced by the $T_y$ stage are not considered here because: - the induced vibrations have less amplitude than the vibrations induced by the $R_z$ stage - it can be scanned at lower velocities if the induced vibrations are an issue @@ -1542,10 +1569,10 @@ This is done for *two extreme sample masses* $m_s = 1\,\text{kg}$ and $m_s = 50\ The obtained sensitivity to disturbances for the three nano-hexapod stiffnesses are shown in Figure ref:fig:uniaxial_sensitivity_disturbances_nano_hexapod_stiffnesses for the light sample (same conclusions can be drawn with the heavy one). #+begin_important -From Figure ref:fig:uniaxial_sensitivity_disturbances_nano_hexapod_stiffnesses, following can be concluded for the *soft nano-hexapod*: +From Figure ref:fig:uniaxial_sensitivity_disturbances_nano_hexapod_stiffnesses, the following can be concluded for the *soft nano-hexapod*: - It is more sensitive to forces applied on the sample (cable forces for instance), which is expected due to the lower stiffness - Between the suspension mode of the nano-hexapod (here at 5Hz) and the first mode of the micro-station (here at 70Hz), the disturbances induced by the stage vibrations are filtered out. -- Above the suspension mode of the nano-hexapod, the sample's motion is unaffected by the floor motion, and therefore the sensitivity to floor motion is almost $1$. +- Above the suspension mode of the nano-hexapod, the sample's motion is unaffected by the floor motion, and therefore the sensitivity to floor motion is close to $1$. #+end_important #+begin_src matlab :exports none :results none @@ -1682,13 +1709,14 @@ exportFig('figs/uniaxial_cas_d_disturbances_payload_masses.pdf', 'width', 'wide' [[file:figs/uniaxial_cas_d_disturbances_payload_masses.png]] ** Conclusion + #+begin_important -The conclusion is that in order to have a closed-loop residual vibration $d \approx 20\,nm\text{ rms}$, if a simple feedback controller is used, the required closed-loop bandwidth would be: +In order to have a closed-loop residual vibration $d \approx 20\,nm\text{ rms}$, if a simple feedback controller is used, the required closed-loop bandwidth would be: - $\approx 10\,\text{Hz}$ for the soft nano-hexapod ($k_n = 0.01\,N/\mu m$) - $\approx 50\,\text{Hz}$ for the relatively stiff nano-hexapod ($k_n = 1\,N/\mu m$) - $\approx 100\,\text{Hz}$ for the stiff nano-hexapod ($k_n = 100\,N/\mu m$) -This can be explain by the fact that above the suspension mode of the nano-hexapod, the stage vibrations are filtered out (see Figure ref:fig:uniaxial_sensitivity_disturbances_nano_hexapod_stiffnesses). +This can be explained by the fact that for frequencies larger than the suspension mode of the nano-hexapod, the stage vibrations are filtered out (see Figure ref:fig:uniaxial_sensitivity_disturbances_nano_hexapod_stiffnesses). This gives a first advantage to having a soft nano-hexapod. #+end_important @@ -1699,13 +1727,14 @@ This gives a first advantage to having a soft nano-hexapod. :END: <> ** Introduction :ignore: +In this section, three active damping are applied on the nano-hexapod (see Figure ref:fig:uniaxial_active_damping_strategies): Integral Force Feedback (IFF) cite:preumont91_activ, Relative Damping Control (RDC) [[cite:&preumont18_vibrat_contr_activ_struc_fourt_edition Chapter 7.2]] and Direct Velocity Feedback (DVF) cite:karnopp74_vibrat_contr_using_semi_activ_force_gener,serrand00_multic_feedb_contr_isolat_base_excit_vibrat,preumont02_force_feedb_versus_accel_feedb. -In this section, three active damping are applied on the nano-hexapod (see Figure ref:fig:uniaxial_active_damping_strategies): Integral Force Feedback (IFF), Relative Damping Control (RDC) and Direct Velocity Feedback (DVF). +These damping strategies will be described in Section ref:ssec:uniaxial_active_damping_strategies. These active damping techniques are compared in terms of: -- Reduction of the effect of disturbances (i.e. $x_f$, $f_t$ and $f_s$) on the displacement $d$ -- Achievable damping -- Robustness to a change of sample's mass +- Achievable damping of the nano-hexapod mode (Section ref:ssec:uniaxial_active_damping_achievable_damping) +- Reduction of the effect of disturbances (i.e. $x_f$, $f_t$ and $f_s$) on the displacement $d$ (Sections ref:ssec:uniaxial_active_damping_sensitivity_disturbances and ref:ssec:uniaxial_active_damping_noise_budget) +- Robustness to a change of sample's mass (Section ref:ssec:uniaxial_active_damping_robustness) #+begin_src latex :file uniaxial_active_damping_strategies.pdf \begin{tikzpicture} @@ -2044,12 +2073,13 @@ load('uniaxial_plants.mat', 'G_vc_light', 'G_md_light', 'G_pz_light', ... #+end_src ** Active Damping Strategies - +<> +**** Integral Force Feedback (IFF) The Integral Force Feedback strategy consists of using a force sensor in series with the actuator (see Figure ref:fig:uniaxial_active_damping_iff_equiv, left). The control strategy consists of integrating the measured force and feeding it back to the actuator: \begin{equation} -K_{\text{IFF}}(s) = \frac{g}{s} +\boxed{K_{\text{IFF}}(s) = \frac{g}{s}} \end{equation} The mechanical equivalent of this strategy is to add a dashpot in series with the actuator stiffness with a damping coefficient equal to the stiffness of the actuator divided by the controller gain $k/g$ (see Figure ref:fig:uniaxial_active_damping_iff_equiv, right). @@ -2160,11 +2190,12 @@ The mechanical equivalent of this strategy is to add a dashpot in series with th [[file:figs/uniaxial_active_damping_iff_equiv.png]] +**** Relative Damping Control (RDC) For the Relative Damping Control strategy, a relative motion sensor that measures the motion of the actuator is used (see Figure ref:fig:uniaxial_active_damping_rdc_equiv, left). The derivative of this relative motion is used for the feedback signal: \begin{equation} -K_{\text{RDC}}(s) = - g \cdot s +\boxed{K_{\text{RDC}}(s) = - g \cdot s} \end{equation} The mechanical equivalent is to add a dashpot in parallel with the actuator with a damping coefficient equal to the controller gain $g$ (see Figure ref:fig:uniaxial_active_damping_rdc_equiv, right). @@ -2280,11 +2311,12 @@ The mechanical equivalent is to add a dashpot in parallel with the actuator with #+RESULTS: [[file:figs/uniaxial_active_damping_rdc_equiv.png]] +**** Direct Velocity Feedback (DVF) Finally, the Direct Velocity Feedback strategy consists of using an inertial sensor (usually a geophone), that measured the "absolute" velocity of the body fixed on top of the actuator (se Figure ref:fig:uniaxial_active_damping_dvf_equiv, left). The measured velocity is then fed back to the actuator: \begin{equation} -K_{\text{DVF}}(s) = - g +\boxed{K_{\text{DVF}}(s) = - g} \end{equation} This is equivalent as to fix a dashpot (with a damping coefficient equal to the controller gain $g$) between the body (one which the inertial sensor is fixed) and an inertial reference frame (see Figure ref:fig:uniaxial_active_damping_dvf_equiv, right). @@ -2406,11 +2438,12 @@ This is usually refers to as "/sky hook damper/". ** Plant Dynamics for Active Damping The plant dynamics for all three active damping techniques are shown in Figure ref:fig:uniaxial_plant_active_damping_techniques. -All have *alternating poles and zeros* meaning that the phase is bounded to $\pm 90\,\text{deg}$ which makes the controller very robust. +All have *alternating poles and zeros* meaning that the phase do not vary by more than $\pm 90\,\text{deg}$ which makes the design of a robust controller very easy. +The reason all three plants in Figure ref:fig:uniaxial_plant_active_damping_techniques have alternating poles and zeros is because the three sensors are all collocated with the actuator [[cite:&preumont18_vibrat_contr_activ_struc_fourt_edition Chapter 7]]. -When the nano-hexapod's suspension modes are at lower frequencies than the resonances of the micro-station (blue and red curves in Figure ref:fig:uniaxial_plant_active_damping_techniques), the resonances of the micro-stations have little impact on the transfer functions from IFF and DVF. +When the nano-hexapod's suspension modes are at lower frequencies than the resonances of the micro-station (blue and red curves in Figure ref:fig:uniaxial_plant_active_damping_techniques), the resonances of the micro-stations have little impact on the IFF and DVF transfer functions. -For the stiff nano-hexapod, the micro-station dynamics can be seen on the transfer functions in Figure ref:fig:uniaxial_plant_active_damping_techniques. +For the stiff nano-hexapod (yellow curves), the micro-station dynamics can be seen on the transfer functions in Figure ref:fig:uniaxial_plant_active_damping_techniques. Therefore, it is expected that the micro-station dynamics might impact the achievable damping if a stiff nano-hexapod is used. #+begin_src matlab :exports none :results none @@ -2538,13 +2571,21 @@ exportFig('figs/uniaxial_plant_active_damping_techniques.pdf', 'width', 'full', [[file:figs/uniaxial_plant_active_damping_techniques.png]] ** Achievable Damping - Root Locus +<> The Root Locus are computed for the three nano-hexapod stiffnesses and for the three active damping techniques. They are shown in Figure ref:fig:uniaxial_root_locus_damping_techniques. All three active damping approach can lead to *critical damping* of the nano-hexapod suspension mode. -There is even a little bit of authority on micro-station modes with IFF and DVF applied on the stiff nano-hexapod (Figure ref:fig:uniaxial_root_locus_damping_techniques, right) and with RDC for a soft nano-hexapod (Figure ref:fig:uniaxial_root_locus_damping_techniques_micro_station_mode). -This can be explained by the fact that above the suspension mode of the soft nano-hexapod, the relative motion sensor acts as an inertial sensor for the micro-station top platform. Therefore, it is like DVF was applied (the nano-hexapod acts as a geophone!). +There is even some damping authority on micro-station modes in the following cases: +- IFF with a stiff nano-hexapod (Figure ref:fig:uniaxial_root_locus_damping_techniques, right) :: + This can be understood from the mechanical equivalent of IFF shown in Figure ref:fig:uniaxial_active_damping_iff_equiv (right) considering an high stiffness $k$. + The micro-station top platform is connected to an inertial mass (the nano-hexapod) through a damper, which damps the micro-station suspension suspension mode. +- DVF with a stiff nano-hexapod (Figure ref:fig:uniaxial_root_locus_damping_techniques, right) :: + In that case, the "sky hook damper" (see mechanical equivalent of IFF in Figure ref:fig:uniaxial_active_damping_dvf_equiv, right) is connected to the micro-station top platform through the stiff nano-hexapod. +- RDC with a soft nano-hexapod (Figure ref:fig:uniaxial_root_locus_damping_techniques_micro_station_mode) :: + At the frequency of the micro-station mode, the nano-hexapod top mass is behaving as an inertial reference as the suspension mode of the soft nano-hexapod is at much lower frequency. + The micro-station and the nano-hexapod masses are connected through a large damper induced by RDC (see mechanical equivalent in Figure ref:fig:uniaxial_active_damping_rdc_equiv, right) which allows some damping of the micro-station. #+begin_src matlab :exports none %% Active Damping Robustness to change of sample's mass - Root Locus for all three damping techniques with 3 different sample's masses @@ -2682,7 +2723,7 @@ exportFig('figs/uniaxial_root_locus_damping_techniques.pdf', 'width', 'full', 'h #+end_src #+name: fig:uniaxial_root_locus_damping_techniques -#+caption: Root Loci for the three active damping techniques (IFF in blue, RDC in red and DVF in yellow). This is shown for three nano-hexapod stiffnesses. +#+caption: Root Loci for the three active damping techniques (IFF in blue, RDC in red and DVF in yellow). This is shown for three nano-hexapod stiffnesses. The Root Loci are zoomed on the suspension mode of the nano-hexapod. #+RESULTS: [[file:figs/uniaxial_root_locus_damping_techniques.png]] @@ -2736,7 +2777,7 @@ exportFig('figs/uniaxial_root_locus_damping_techniques_micro_station_mode.pdf', #+end_src #+name: fig:uniaxial_root_locus_damping_techniques_micro_station_mode -#+caption: Root Locus for the three damping techniques. It is shown that the RDC active damping technique has some authority on one mode of the micro-station. This mode corresponds to the suspension mode of the micro-hexapod. +#+caption: Root Locus for the three damping techniques applied with the soft nano-hexapod. It is shown that the RDC active damping technique has some authority on one mode of the micro-station. This mode corresponds to the suspension mode of the micro-hexapod. #+RESULTS: [[file:figs/uniaxial_root_locus_damping_techniques_micro_station_mode.png]] @@ -2846,7 +2887,7 @@ isstable(G_dvf_pz_light) && isstable(G_dvf_pz_mid) && isstable(G_dvf_pz_heavy) #+end_src #+begin_src matlab :exports none :tangle no -%% Save Active Damping Controllers +%% Save Damped Plants save('./matlab/mat/uniaxial_damped_plants.mat', 'G_iff_vc_light', 'G_iff_md_light', 'G_iff_pz_light', ... 'G_rdc_vc_light', 'G_rdc_md_light', 'G_rdc_pz_light', ... 'G_dvf_vc_light', 'G_dvf_md_light', 'G_dvf_pz_light', ... @@ -2859,7 +2900,7 @@ save('./matlab/mat/uniaxial_damped_plants.mat', 'G_iff_vc_light', 'G_iff_md_ligh #+end_src #+begin_src matlab :exports none :eval no -%% Save Active Damping Controller +%% Save Damped Plants save('./mat/uniaxial_damped_plants.mat', 'G_iff_vc_light', 'G_iff_md_light', 'G_iff_pz_light', ... 'G_rdc_vc_light', 'G_rdc_md_light', 'G_rdc_pz_light', ... 'G_dvf_vc_light', 'G_dvf_md_light', 'G_dvf_pz_light', ... @@ -2872,6 +2913,8 @@ save('./mat/uniaxial_damped_plants.mat', 'G_iff_vc_light', 'G_iff_md_light', 'G_ #+end_src ** Change of sensitivity to disturbances +<> + The sensitivity to disturbances (direct forces $f_s$, stage vibrations $f_t$ and floor motion $x_f$) for all three active damping techniques are compared in Figure ref:fig:uniaxial_sensitivity_dist_active_damping. The comparison is done with the nano-hexapod having a stiffness $k_n = 1\,N/\mu m$. @@ -2935,10 +2978,11 @@ exportFig('figs/uniaxial_sensitivity_dist_active_damping.pdf', 'width', 'full', [[file:figs/uniaxial_sensitivity_dist_active_damping.png]] ** Noise Budgeting after Active Damping +<> Cumulative Amplitude Spectrum of the distance $d$ with all three active damping techniques are compared in Figure ref:fig:uniaxial_cas_active_damping. All three active damping methods are giving similar results (except the RDC which is a little bit worse for the stiff nano-hexapod). -Compare to the open-loop case, the active damping helps to lower the vibrations induced by the nano-hexapod resonance. +Compared to the open-loop case, the active damping helps to lower the vibrations induced by the nano-hexapod resonance. #+begin_src matlab :exports none :results none %% Cumulative Amplitude Spectrum of the distance d with all three active damping techniques @@ -3020,7 +3064,7 @@ exportFig('figs/uniaxial_cas_active_damping.pdf', 'width', 'full', 'height', 'no #+RESULTS: [[file:figs/uniaxial_cas_active_damping.png]] -** Obtained Damped Plant +** Obtained Closed Loop Response The transfer functions from the plant input $f$ to the relative displacement $d$ while the active damping is implemented are shown in Figure ref:fig:uniaxial_damped_plant_three_active_damping_techniques. All three active damping techniques yield similar damped plants. @@ -3212,6 +3256,8 @@ exportFig('figs/uniaxial_damped_plant_change_sample_mass.pdf', 'width', 'full', [[file:figs/uniaxial_damped_plant_change_sample_mass.png]] ** Robustness to change of payload's mass +<> + The Root Locus for the three damping techniques are shown in Figure ref:fig:uniaxial_active_damping_robustness_mass_root_locus for three sample's mass (1kg, 25kg and 50kg). The closed-loop poles are shown by the squares for a specific gain. @@ -3395,7 +3441,7 @@ Conclusions for Active Damping: #+name: tab:comp_active_damping #+caption: Comparison of active damping strategies -#+attr_latex: :environment tabularx :width \linewidth :align Xccc +#+attr_latex: :environment tabularx :width 0.9\linewidth :align Xccc #+attr_latex: :center t :booktabs t :font \scriptsize | | *IFF* | *RDC* | *DVF* | |---------------------+-----------------------------+---------------------------+---------------------------------| @@ -3419,7 +3465,7 @@ The High Authority Control - Low Authority Control (HAC-LAC) architecture is sho It corresponds to a /two step/ control strategy: - First, an active damping controller $\bm{K}_{\textsc{LAC}}$ is implemented (see Section ref:sec:uniaxial_active_damping). It allows to reduce the vibration level, and it also makes the damped plant (transfer function from $u^{\prime}$ to $y$) easier to control than the undamped plant (transfer function from $u$ to $y$). -- Then, a position controller $\bm{K}_{\textsc{HAC}}$ is implemented. +- Then, a position controller $\bm{K}_{\textsc{HAC}}$ is implemented which is used to control the position $d$. #+begin_src latex :file uniaxial_hac_lac_architecture.pdf :results none \begin{tikzpicture} @@ -3453,7 +3499,7 @@ It corresponds to a /two step/ control strategy: \end{tikzpicture} #+end_src -Combined with the uniaxial model, it is shown in Figure ref:fig:uniaxial_hac_lac_model. +When applied on the uniaxial model with IFF used as the Low Authority Control, the schematic shown in Figure ref:fig:uniaxial_hac_lac_model is obtained. #+begin_src latex :file uniaxial_hac_lac_model.pdf :results silent \begin{tikzpicture} @@ -3598,8 +3644,8 @@ Combined with the uniaxial model, it is shown in Figure ref:fig:uniaxial_hac_lac #+attr_latex: :width 1.0\linewidth [[file:figs/uniaxial_hac_lac_architecture.png]] #+end_subfigure +#+attr_latex: :caption \subcaption{\label{fig:uniaxial_hac_lac_model}Uniaxial model with HAC-IFF strategy} #+attr_latex: :options {0.45\textwidth} -#+attr_latex: :caption \subcaption{\label{fig:uniaxial_hac_lac_model}Uniaxial model with HAC-LAC strategy} #+begin_subfigure #+attr_latex: :scale 1 [[file:figs/uniaxial_hac_lac_model.png]] @@ -3659,10 +3705,17 @@ load('uniaxial_damped_plants.mat', 'G_iff_vc_light', 'G_iff_md_light', 'G_iff_pz #+end_src ** Damped Plant Dynamics +<> + As was shown in Section ref:sec:uniaxial_active_damping, all three proposed active damping techniques yield similar damping plants. -Therefore, /Integral Force Feedback/ will be used in this section to study the HAC-LAC performances. +Therefore, /Integral Force Feedback/ will be used in this section to study the HAC-LAC performance. The obtained damped plants for the three nano-hexapod stiffnesses are shown in Figure ref:fig:uniaxial_hac_iff_damped_plants_masses. +For $k_n = 0.01\,N/\mu m$ and $k_n = 1\,N/\mu m$, except from the nano-hexapod mode, the dynamics is quite simple and can be well approximated by a second order plant. +However, this is not the case for the stiff nano-hexapod ($k_n = 100\,N/\mu m$) where two modes can be seen (Figure ref:fig:uniaxial_hac_iff_damped_plants_masses, right). + +This is due to the interaction between the micro-station (modelled modes at 70Hz, 140Hz and 320Hz) and the nano-hexapod. +Such effect will be explained in Section ref:sec:uniaxial_support_compliance. #+begin_src matlab :exports none :results none %% Damped plant - Robustness to change of sample's mass @@ -3671,22 +3724,28 @@ tiledlayout(3, 3, 'TileSpacing', 'Compact', 'Padding', 'None'); ax1 = nexttile([2,1]); hold on; -plot(freqs, abs(squeeze(freqresp(G_iff_vc_light('d', 'f'), freqs, 'Hz'))), '-', 'DisplayName', '$m_s = 1\,kg$'); -plot(freqs, abs(squeeze(freqresp(G_iff_vc_mid( 'd', 'f'), freqs, 'Hz'))), '-', 'DisplayName', '$m_s = 25\,kg$'); -plot(freqs, abs(squeeze(freqresp(G_iff_vc_heavy('d', 'f'), freqs, 'Hz'))), '-', 'DisplayName', '$m_s = 50\,kg$'); +plot(freqs, abs(squeeze(freqresp(G_vc_light('d', 'f'), freqs, 'Hz'))), 'color', [colors(1,:), 0.5]); +plot(freqs, abs(squeeze(freqresp(G_iff_vc_light('d', 'f'), freqs, 'Hz'))), 'color', colors(1,:)); +plot(freqs, abs(squeeze(freqresp(G_iff_vc_mid( 'd', 'f'), freqs, 'Hz'))), 'color', colors(2,:)); +plot(freqs, abs(squeeze(freqresp(G_iff_vc_heavy('d', 'f'), freqs, 'Hz'))), 'color', colors(3,:)); +loglog(10.^(0.4*cos([0:0.01:2*pi])+log10(100)), ... + 10.^(0.8*sin([0:0.01:2*pi]-pi/4)+log10(8e-8)), 'k--'); +text(20, 4e-8, sprintf('Small\nInteraction'), 'horizontalalignment', 'center'); hold off; set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); ylabel('Amplitude [m/N]'); set(gca, 'XTickLabel',[]); title('$k_n = 0.01\,N/\mu m$'); ylim([5e-10, 1e-3]); -ldg = legend('location', 'northeast', 'FontSize', 8, 'NumColumns', 1); -ldg.ItemTokenSize = [20, 1]; ax2 = nexttile([2,1]); hold on; -plot(freqs, abs(squeeze(freqresp(G_iff_md_light('d', 'f'), freqs, 'Hz')))); -plot(freqs, abs(squeeze(freqresp(G_iff_md_mid( 'd', 'f'), freqs, 'Hz')))); -plot(freqs, abs(squeeze(freqresp(G_iff_md_heavy('d', 'f'), freqs, 'Hz')))); +plot(freqs, abs(squeeze(freqresp(G_md_light('d', 'f'), freqs, 'Hz'))), 'color', [colors(1,:), 0.5]); +plot(freqs, abs(squeeze(freqresp(G_iff_md_light('d', 'f'), freqs, 'Hz'))), 'color', colors(1,:)); +plot(freqs, abs(squeeze(freqresp(G_iff_md_mid( 'd', 'f'), freqs, 'Hz'))), 'color', colors(2,:)); +plot(freqs, abs(squeeze(freqresp(G_iff_md_heavy('d', 'f'), freqs, 'Hz'))), 'color', colors(3,:)); +loglog(10.^(0.4*cos([0:0.01:2*pi])+log10(200)), ... + 10.^(0.8*sin([0:0.01:2*pi]-pi/4)+log10(2e-8)), 'k--'); +text(40, 1e-8, sprintf('Small\nInteraction'), 'horizontalalignment', 'center'); hold off; set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); set(gca, 'XTickLabel',[]); set(gca, 'YTickLabel',[]); @@ -3695,20 +3754,27 @@ ylim([5e-10, 1e-3]); ax3 = nexttile([2,1]); hold on; -plot(freqs, abs(squeeze(freqresp(G_iff_pz_light('d', 'f'), freqs, 'Hz')))); -plot(freqs, abs(squeeze(freqresp(G_iff_pz_mid( 'd', 'f'), freqs, 'Hz')))); -plot(freqs, abs(squeeze(freqresp(G_iff_pz_heavy('d', 'f'), freqs, 'Hz')))); +plot(freqs, abs(squeeze(freqresp(G_pz_light('d', 'f'), freqs, 'Hz'))), 'color', [colors(1,:), 0.5], 'DisplayName', '$m_s = 1\,kg$, OL'); +plot(freqs, abs(squeeze(freqresp(G_iff_pz_light('d', 'f'), freqs, 'Hz'))), 'color', colors(1,:), 'DisplayName', '$m_s = 1\,kg$, IFF'); +plot(freqs, abs(squeeze(freqresp(G_iff_pz_mid( 'd', 'f'), freqs, 'Hz'))), 'color', colors(2,:), 'DisplayName', '$m_s = 25\,kg$, IFF'); +plot(freqs, abs(squeeze(freqresp(G_iff_pz_heavy('d', 'f'), freqs, 'Hz'))), 'color', colors(3,:), 'DisplayName', '$m_s = 50\,kg$, IFF'); +loglog(10.^(0.8*cos([0:0.01:2*pi])+log10(350)), ... + 10.^(1.2*sin([0:0.01:2*pi])+log10(8e-9)), 'k--', 'HandleVisibility', 'off'); +text(200, 5e-7, sprintf('$\\mu$ Station\nCoupling'), 'horizontalalignment', 'center'); hold off; set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); set(gca, 'XTickLabel',[]); set(gca, 'YTickLabel',[]); title('$k_n = 100\,N/\mu m$'); ylim([5e-10, 1e-3]); +ldg = legend('location', 'northeast', 'FontSize', 8, 'NumColumns', 1); +ldg.ItemTokenSize = [20, 1]; ax1b = nexttile(); hold on; -plot(freqs, unwrap(180/pi*angle(squeeze(freqresp(G_iff_vc_light('d', 'f'), freqs, 'Hz'))))); -plot(freqs, unwrap(180/pi*angle(squeeze(freqresp(G_iff_vc_mid( 'd', 'f'), freqs, 'Hz'))))); -plot(freqs, unwrap(180/pi*angle(squeeze(freqresp(G_iff_vc_heavy('d', 'f'), freqs, 'Hz'))))); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_vc_light('d', 'f'), freqs, 'Hz')))), 'color', [colors(1,:), 0.5]); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_iff_vc_light('d', 'f'), freqs, 'Hz')))), 'color', colors(1,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_iff_vc_mid( 'd', 'f'), freqs, 'Hz')))), 'color', colors(2,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_iff_vc_heavy('d', 'f'), freqs, 'Hz')))), 'color', colors(3,:)); hold off; set(gca, 'XScale', 'log'); set(gca, 'YScale', 'lin'); ylabel('Phase [deg]'); xlabel('Frequency [Hz]'); @@ -3718,9 +3784,10 @@ ylim([-200, 20]); ax2b = nexttile(); hold on; -plot(freqs, unwrap(180/pi*angle(squeeze(freqresp(G_iff_md_light('d', 'f'), freqs, 'Hz'))))); -plot(freqs, unwrap(180/pi*angle(squeeze(freqresp(G_iff_md_mid( 'd', 'f'), freqs, 'Hz'))))); -plot(freqs, unwrap(180/pi*angle(squeeze(freqresp(G_iff_md_heavy('d', 'f'), freqs, 'Hz'))))); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_md_light('d', 'f'), freqs, 'Hz')))), 'color', [colors(1,:), 0.5]); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_iff_md_light('d', 'f'), freqs, 'Hz')))), 'color', colors(1,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_iff_md_mid( 'd', 'f'), freqs, 'Hz')))), 'color', colors(2,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_iff_md_heavy('d', 'f'), freqs, 'Hz')))), 'color', colors(3,:)); hold off; set(gca, 'XScale', 'log'); set(gca, 'YScale', 'lin'); xlabel('Frequency [Hz]'); set(gca, 'YTickLabel',[]); @@ -3730,9 +3797,10 @@ ylim([-200, 20]); ax3b = nexttile(); hold on; -plot(freqs, unwrap(180/pi*angle(squeeze(freqresp(G_iff_pz_light('d', 'f'), freqs, 'Hz'))))); -plot(freqs, unwrap(180/pi*angle(squeeze(freqresp(G_iff_pz_mid( 'd', 'f'), freqs, 'Hz'))))); -plot(freqs, unwrap(180/pi*angle(squeeze(freqresp(G_iff_pz_heavy('d', 'f'), freqs, 'Hz'))))); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_pz_light('d', 'f'), freqs, 'Hz')))), 'color', [colors(1,:), 0.5]); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_iff_pz_light('d', 'f'), freqs, 'Hz')))), 'color', colors(1,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_iff_pz_mid( 'd', 'f'), freqs, 'Hz')))), 'color', colors(2,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_iff_pz_heavy('d', 'f'), freqs, 'Hz')))), 'color', colors(3,:)); hold off; set(gca, 'XScale', 'log'); set(gca, 'YScale', 'lin'); xlabel('Frequency [Hz]'); set(gca, 'YTickLabel',[]); @@ -3754,13 +3822,15 @@ exportFig('figs/uniaxial_hac_iff_damped_plants_masses.pdf', 'width', 'full', 'he [[file:figs/uniaxial_hac_iff_damped_plants_masses.png]] ** Position Feedback Controller +<> + The objective now is to design a position feedback controller for each of the three nano-hexapods that are robust to the change of sample's mass. -The required feedback bandwidth was approximately determined un Section ref:sec:uniaxial_noise_budgeting: +The required feedback bandwidth was approximately determined in Section ref:sec:uniaxial_noise_budgeting: - $\approx 10\,\text{Hz}$ for the soft nano-hexapod ($k_n = 0.01\,N/\mu m$). Near this frequency, the plants are equivalent to a mass line. The gain of the mass line can vary up to a fact $\approx 5$ (suspended mass from $16\,kg$ up to $65\,kg$). - This mean that the designed controller will need to have large gain margins to be robust to the change of sample's mass. + This means that the designed controller will need to have large gain margins to be robust to the change of sample's mass. - $\approx 50\,\text{Hz}$ for the relatively stiff nano-hexapod ($k_n = 1\,N/\mu m$). Similarly to the soft nano-hexapod, the plants near the crossover frequency are equivalent to a mass line. It will be probably easier to have a little bit more bandwidth in this configuration to be further away from the nano-hexapod suspension mode. @@ -3772,7 +3842,37 @@ The required feedback bandwidth was approximately determined un Section ref:sec: Position feedback controllers are designed for each nano-hexapod such that it is stable for all considered sample masses with similar stability margins (see Nyquist plots in Figure ref:fig:uniaxial_nyquist_hac). -These high authority controllers are generally composed of a two integrators at low frequency for disturbance rejection, a lead to increase the phase margin near the crossover frequency and a low pass filter to increase the robustness to high frequency dynamics. +These high authority controllers are generally composed of a lag at low frequency for disturbance rejection, a lead to increase the phase margin near the crossover frequency and a low pass filter to increase the robustness to high frequency dynamics. +The controllers used for the three nano-hexapod are shown in Equation eqref:eq:uniaxial_hac_formulas, and the parameters are summarized in Table ref:tab:uniaxial_feedback_controller_parameters. + +\begin{subequations} \label{eq:uniaxial_hac_formulas} +\begin{align} +K_{\text{soft}}(s) &= g \cdot + \underbrace{\frac{s + \omega_0}{s + \omega_i}}_{\text{lag}} \cdot + \underbrace{\frac{1 + \frac{s}{\omega_c/\sqrt{a}}}{1 + \frac{s}{\omega_c \sqrt{a}}}}_{\text{lead}} \cdot + \underbrace{\frac{1}{1 + \frac{s}{\omega_l}}}_{\text{LPF}} \\ +K_{\text{mid}}(s) &= g \cdot + \underbrace{\left(\frac{s + \omega_0}{s + \omega_i}\right)^2}_{\text{2 lags}} \cdot + \underbrace{\frac{1 + \frac{s}{\omega_c/\sqrt{a}}}{1 + \frac{s}{\omega_c \sqrt{a}}}}_{\text{lead}} \cdot + \underbrace{\frac{1}{1 + \frac{s}{\omega_l}}}_{\text{LPF}} \\ +K_{\text{stiff}}(s) &= g \cdot + \underbrace{\left(\frac{1}{s + \omega_i}\right)^2}_{\text{2 lags}} \cdot + \underbrace{\left(\frac{1 + \frac{s}{\omega_c/\sqrt{a}}}{1 + \frac{s}{\omega_c \sqrt{a}}}\right)^2}_{\text{2 leads}} \cdot + \underbrace{\frac{1}{1 + \frac{s}{\omega_l}}}_{\text{LPF}} +\end{align} +\end{subequations} + +#+name: tab:uniaxial_feedback_controller_parameters +#+caption: Parameters used for the position feedback controllers +#+attr_latex: :environment tabularx :width \linewidth :align lXXX +#+attr_latex: :center t :booktabs t +| | *Soft* | *Moderately stiff* | *Stiff* | +|--------+-------------------------------------------+--------------------------------------------+------------------------------------------| +| *Gain* | $g = 4 \cdot 10^5$ | $g = 3 \cdot 10^6$ | $g = 6 \cdot 10^12$ | +| *Lead* | $a = 5$, $\omega_c = 20\,Hz$ | $a = 4$, $\omega_c = 70\,Hz$ | $a = 5$, $\omega_c = 100\,Hz$ | +| *Lag* | $\omega_0 = 5\,Hz$, $\omega_i = 0.01\,Hz$ | $\omega_0 = 20\,Hz$, $\omega_i = 0.01\,Hz$ | $\omega_i = 0.01\,Hz$ | +| *LPF* | $\omega_l = 200\,Hz$ | $\omega_l = 300\,Hz$ | $\omega_l = 500\,Hz$ | + The loop gains for the three nano-hexapod are shown in Figure ref:fig:uniaxial_loop_gain_hac. We can see that: - for the soft and moderately stiff nano-hexapod, the crossover frequency varies a lot with the sample mass. @@ -3780,8 +3880,8 @@ We can see that: - for the stiff nano-hexapod, the obtained crossover frequency is not at high as what was estimated necessary. The crossover frequency in that case is close to the stiffness line of the plant, which makes the robust design of the controller easier. -Note that these controller were quickly tuned by hand and not designed using any optimization methods. -The goal is just to have a first estimation of the attainable performances. +Note that these controllers were quickly tuned by hand and not designed using any optimization methods. +The goal is just to have a first estimation of the attainable performance. #+begin_src matlab :exports none %% High Authority Controller - Soft Nano-Hexapod @@ -3790,16 +3890,16 @@ a = 5; % Amount of phase lead / width of the phase lead / high frequency gain wc = 2*pi*20; % Frequency with the maximum phase lead [rad/s] H_lead = (1 + s/(wc/sqrt(a)))/(1 + s/(wc*sqrt(a))); +% Lag at low frequency +H_lag = (s + 2*pi*5)/(s + 2*pi*0.01); + % Low Pass filter to increase robustness H_lpf = 1/(1 + s/2/pi/200); -% Added integrator at low frequency -H_int = (s + 2*pi*5)/(s + 2*pi*0.01); - % High Authority Controller K_hac_vc = 4e5 * ... % Gain H_lead * ... % Lead - H_int * ... % Integrator + H_lag * ... % Lag H_lpf; % LPF K_hac_vc.InputName = {'d'}; K_hac_vc.OutputName = {'f'}; @@ -3807,49 +3907,61 @@ K_hac_vc.OutputName = {'f'}; #+begin_src matlab :exports none %% High Authority Controller - Mid Stiffness Nano-Hexapod -% Integrator as low frequency -H_int = (s + 2*pi*10)/(s + 2*pi*0.01) * (s + 2*pi*20)/(s + 2*pi*0.01); - % Lead to increase phase margin a = 4; % Amount of phase lead / width of the phase lead / high frequency gain wc = 2*pi*70; % Frequency with the maximum phase lead [rad/s] H_lead = (1 + s/(wc/sqrt(a)))/(1 + s/(wc*sqrt(a))); +% Lag at low frequency +H_lag = ((s + 2*pi*15)/(s + 2*pi*0.01))^2; + % Low Pass filter to increase robustness H_lpf = 1/(1 + s/2/pi/300); % High Authority Controller K_hac_md = 3e6 * ... % Gain H_lead * ... % Lead - H_lpf * ... % Low Pass Filter - H_int; % Integrator + H_lag * ... % Lag + H_lpf; % LPF K_hac_md.InputName = {'d'}; K_hac_md.OutputName = {'f'}; #+end_src #+begin_src matlab :exports none %% High Authority Controller - Stiff Nano-Hexapod -% Integrator as low frequency -H_int = 1/(s + 2*pi*0.01) * 1/(s + 2*pi*0.01); - % Lead to increase phase margin a = 5; % Amount of phase lead / width of the phase lead / high frequency gain wc = 2*pi*100; % Frequency with the maximum phase lead [rad/s] -H_lead = (1 + s/(wc/sqrt(a)))/(1 + s/(wc*sqrt(a))); +H_lead = ((1 + s/(wc/sqrt(a)))/(1 + s/(wc*sqrt(a))))^2; + +% Integrator +H_int = 1/(s + 2*pi*0.01)^2; % Low Pass filter to increase robustness H_lpf = 1/(1 + s/2/pi/500); % High Authority Controller -K_hac_pz = 6e12 * ... % Gain - H_lead^2 * ... % Lead - H_lpf * ... % Low Pass Filter - H_int; % Integrator +K_hac_pz = 6e12 * ... % Gain + H_lead * ... % Lead + H_int * ... % Lag + H_lpf; % LPF K_hac_pz.InputName = {'d'}; K_hac_pz.OutputName = {'f'}; #+end_src +#+begin_src matlab :exports none :tangle no +%% Save High Authority Controllers +save('./matlab/mat/uniaxial_high_authority_controllers.mat', ... + 'K_hac_vc', 'K_hac_md', 'K_hac_pz'); +#+end_src + +#+begin_src matlab :exports none :eval no +%% Save High Authority Controllers +save('/mat/uniaxial_high_authority_controllers.mat', ... + 'K_hac_vc', 'K_hac_md', 'K_hac_pz'); +#+end_src + #+begin_src matlab :exports none %% Compute Loop gain for Nyquist Plot L_vc_light = squeeze(freqresp(K_hac_vc*G_iff_vc_light('d', 'f'), freqs, 'Hz')); @@ -3961,6 +4073,8 @@ exportFig('figs/uniaxial_loop_gain_hac.pdf', 'width', 'wide', 'height', 'tall'); [[file:figs/uniaxial_loop_gain_hac.png]] ** Closed-Loop Noise Budgeting +<> + The high authority position feedback controllers are then implemented and the closed-loop sensitivity to disturbances are computed. These are compared with the open-loop and damped plants cases in Figure ref:fig:uniaxial_sensitivity_dist_hac_lac for just one configuration (moderately stiff nano-hexapod with 25kg sample's mass). As expected, the sensitivity to disturbances is decreased in the controller bandwidth and slightly increase outside this bandwidth. @@ -4034,7 +4148,7 @@ exportFig('figs/uniaxial_sensitivity_dist_hac_lac.pdf', 'width', 'full', 'height #+end_src #+name: fig:uniaxial_sensitivity_dist_hac_lac -#+caption: Change of sensitivity to disturbances with LAC and with HAC-LAC +#+caption: Change of sensitivity to disturbances with LAC and with HAC-LAC. Nano-Hexapod with $k_n = 1\,N/\mu m$ and sample mass of $25\,kg$ are used. #+RESULTS: [[file:figs/uniaxial_sensitivity_dist_hac_lac.png]] @@ -4167,6 +4281,1318 @@ exportFig('figs/uniaxial_cas_hac_lac.pdf', 'width', 'full', 'height', 'normal'); #+RESULTS: [[file:figs/uniaxial_cas_hac_lac.png]] +** Conclusion +#+begin_important +Based on the open-loop noise budgeting made in Section ref:sec:uniaxial_noise_budgeting, the closed-loop bandwidth required to obtain acceptable vibration levels was estimated. +In order to obtain such bandwidth, the HAC-LAC strategy was followed which consists of applying an active damping controller and then a high authority position feedback controller. + +In this section, feedback controllers were design in such a way that the required closed-loop bandwidth was reached while being robust to a change of payload mass. +The attainable vibration control performances were estimated for the three nano-hexapod stiffnesses and were found to be close to the required values. +A slight advantage can be given to the soft nano-hexapod as it requires less feedback bandwidth while giving better stability results. +#+end_important + +* Effect of limited micro-station compliance +:PROPERTIES: +:HEADER-ARGS:matlab+: :tangle matlab/uniaxial_7_support_compliance.m +:END: +<> +** Introduction :ignore: + +In this section, the impact of the compliance of the support (i.e. the micro-station) on the dynamics of the plant to control will be studied. + +This is a critical point as the dynamics of the micro-station is complex, depends on the considered direction (see measurements in Figure ref:fig:uniaxial_comp_frf_meas_model) and may vary with position and time. +It would be much better to have a plant dynamics which is not impacted by the micro-station. + +Therefore, the objective in this section is to obtain some guidance for the design of a nano-hexapod that will not by impacted by the complex micro-station dynamics. + +In order to study this, two models are used (Figure ref:fig:uniaxial_support_compliance_models) with: +- the nano-hexapod directly fixed on top of the granite, therefore neglecting any support compliance (Figure ref:fig:uniaxial_support_compliance_nano_hexapod_only) +- the nano-hexapod fixed on top of the micro-station having some limited compliance (Figure ref:fig:uniaxial_support_compliance_test_system) + +#+begin_src latex :file uniaxial_support_compliance_nano_hexapod_only.pdf :results file raw silent +\begin{tikzpicture} + % Parameters + \def\massw{2.2} % Width of the masses + \def\massh{0.8} % Height of the masses + \def\spaceh{1.2} % Height of the springs/dampers + \def\dispw{0.3} % Width of the dashed line for the displacement + \def\disph{0.5} % Height of the arrow for the displacements + \def\bracs{0.05} % Brace spacing vertically + \def\brach{-10pt} % Brace shift horizontaly + + % Granite + \draw[fill=white!70!black] (-1*\massw, -\massh) rectangle (\massw, 0) node[pos=0.5]{Granite}; + \coordinate(origin) at (0,0); + + % Nano Hexapod + \begin{scope}[shift={(0, 0)}] + % Mass + \draw[draw=colorred,fill=colorred!10!white] (-0.5*\massw, \spaceh) rectangle (0.5*\massw, \spaceh+\massh) node[pos=0.5, color=colorred]{$m_{n}$}; + + % Spring, Damper, and Actuator + \draw[spring,draw=colorred] (-0.4*\massw, 0) -- (-0.4*\massw, \spaceh) node[midway, left=0.1, color=colorred]{$k_{n}$}; + \draw[damper={colorred}{}{}] (0, 0) -- ( 0, \spaceh) node[midway, left=0.2, color=colorred]{$c_{n}$}; + \draw[actuator={0.4}{0.2}{colorred}] ( 0.4*\massw, 0) -- (0.4*\massw, \spaceh) node[midway, left=0.1, color=colorred](F){$f$}; + + % Displacements + \draw[dashed] (0.5*\massw, \spaceh) -- coordinate[near end](dhigh) ++(1.2, 0); + + % Legend + \draw[decorate, decoration={brace, amplitude=8pt}, xshift=\brach] % + (-0.5*\massw, \bracs) -- (-0.5*\massw, \spaceh+\massh-\bracs) % + node[midway,rotate=90,anchor=south,yshift=10pt,align=center]{$\nu$-hexapod}; + \end{scope} + + \draw[<->, dashed, colorblue] (dhigh) --node[midway, right]{$L^\prime$} (origin-|dhigh); +\end{tikzpicture} +#+end_src + +#+begin_src latex :file uniaxial_support_compliance_test_system.pdf :results file raw silent +\begin{tikzpicture} + % Parameters + \def\massw{2.2} % Width of the masses + \def\massh{0.8} % Height of the masses + \def\spaceh{1.2} % Height of the springs/dampers + \def\dispw{0.3} % Width of the dashed line for the displacement + \def\disph{0.5} % Height of the arrow for the displacements + \def\bracs{0.05} % Brace spacing vertically + \def\brach{-10pt} % Brace shift horizontaly + + % Granite + \draw[fill=white!70!black] (-1*\massw, -\massh) rectangle (\massw, 0) node[pos=0.5]{Granite}; + \coordinate(origin) at (0,0); + + % Micro Station + \begin{scope}[shift={(0, 0)}] + % Mass + \draw[draw=colorblue,fill=colorblue!10!white] (-0.5*\massw, \spaceh) rectangle (0.5*\massw, \spaceh+\massh) node[pos=0.5, color=colorblue]{$m_{\mu}$}; + + % Spring, Damper, and Actuator + \draw[spring,draw=colorblue] (-0.3*\massw, 0) -- (-0.3*\massw, \spaceh) node[midway, left=0.1, color=colorblue]{$k_{\mu}$}; + \draw[damper={colorblue}{}{}] ( 0.3*\massw, 0) -- ( 0.3*\massw, \spaceh) node[midway, left=0.2, color=colorblue]{$c_{\mu}$}; + + % Displacements + \draw[dashed] (0.5*\massw, \spaceh+\massh) -- coordinate[near end](dmid) ++(0.3, 0); + + % Legend + \draw[decorate, decoration={brace, amplitude=8pt}, xshift=\brach] % + (-0.5*\massw, \bracs) -- (-0.5*\massw, \spaceh+\massh-\bracs) % + node[midway,rotate=90,anchor=south,yshift=10pt]{$\mu$-station}; + \end{scope} + + % Nano Station + \begin{scope}[shift={(0, \spaceh+\massh)}] + % Mass + \draw[draw=colorred,fill=colorred!10!white] (-0.5*\massw, \spaceh) rectangle (0.5*\massw, \spaceh+\massh) node[pos=0.5, color=colorred]{$m_{n}$}; + + % Spring, Damper, and Actuator + \draw[spring,draw=colorred] (-0.4*\massw, 0) -- (-0.4*\massw, \spaceh) node[midway, left=0.1, color=colorred]{$k_{n}$}; + \draw[damper={colorred}{}{}] (0, 0) -- ( 0, \spaceh) node[midway, left=0.2, color=colorred]{$c_{n}$}; + \draw[actuator={0.4}{0.2}{colorred}] ( 0.4*\massw, 0) -- (0.4*\massw, \spaceh) node[midway, left=0.1, color=colorred](F){$f$}; + + % Displacements + \draw[dashed] (0.5*\massw, \spaceh) -- coordinate[near end](dhigh) ++(1.2, 0); + + % Legend + \draw[decorate, decoration={brace, amplitude=8pt}, xshift=\brach] % + (-0.5*\massw, \bracs) -- (-0.5*\massw, \spaceh+\massh-\bracs) % + node[midway,rotate=90,anchor=south,yshift=10pt,align=center]{$\nu$-hexapod}; + \end{scope} + + \draw[<->, dashed, coloryellow] (dhigh) --node[midway, right]{$d$} (origin-|dhigh); + \draw[<->, dashed, colorred] (dmid) --node[midway, right]{$L$} (dhigh-|dmid); +\end{tikzpicture} +#+end_src + +#+name: fig:uniaxial_support_compliance_models +#+caption: Models used to study the effect of limited support compliance +#+begin_figure +#+attr_latex: :caption \subcaption{\label{fig:uniaxial_support_compliance_nano_hexapod_only}Nano-Hexapod fixed directly on the Granite} +#+attr_latex: :options {0.49\textwidth} +#+begin_subfigure +#+attr_latex: :scale 1 +[[file:figs/uniaxial_support_compliance_nano_hexapod_only.png]] +#+end_subfigure +#+attr_latex: :caption \subcaption{\label{fig:uniaxial_support_compliance_test_system}Nano-Hexapod fixed on top of the Micro-Station} +#+attr_latex: :options {0.49\textwidth} +#+begin_subfigure +#+attr_latex: :scale 1 +[[file:figs/uniaxial_support_compliance_test_system.png]] +#+end_subfigure +#+end_figure + +** Matlab Init :noexport:ignore: +#+begin_src matlab :tangle no :exports none :results silent :noweb yes :var current_dir=(file-name-directory buffer-file-name) +<> +#+end_src + +#+begin_src matlab :exports none :results silent :noweb yes +<> +#+end_src + +#+begin_src matlab :tangle no :noweb yes +<> +#+end_src + +#+begin_src matlab :eval no :noweb yes +<> +#+end_src + +#+begin_src matlab :noweb yes +<> +#+end_src + +#+begin_src matlab +%% Load the micro-station parameters +load('uniaxial_micro_station_parameters.mat') +#+end_src + +#+begin_src matlab +%% Frequency Vector [Hz] +freqs = logspace(0, 3, 1000); +#+end_src + +** Neglected support compliance + +Let's first neglect the limited compliance of the micro-station and use the uniaxial model show in Figure ref:fig:uniaxial_support_compliance_nano_hexapod_only. +Let's choose a nano-hexapod mass (including the payload) of $20\,\text{kg}$ and three hexapod stiffnesses such that their resonance frequencies are at $\omega_{\nu} = 10\,\text{Hz}$, $\omega_{\nu} = 70\,\text{Hz}$ and $\omega_{\nu} = 400\,\text{Hz}$. + +The obtained transfer functions from $F$ to $L^\prime$ are shown in Figure ref:fig:uniaxial_effect_support_compliance_neglected. +When neglecting the support compliance, large feedback bandwidth can be achieve for all three Nano-Hexapod. + +#+begin_src matlab :exports none +%% Nano-Hexapod Parameters +m = 20; % Mass [kg] + +% "Soft" Nano-Hexapod +k_soft = m*(2*pi*10)^2; % Stiffness [N/m] +c_soft = 0.1*2*sqrt(m*k_soft); % Damping [N/(m/s)] + +% "Mid" Nano-Hexapod +k_mid = m*(2*pi*70)^2; % Stiffness [N/m] +c_mid = 0.1*2*sqrt(m*k_mid); % Damping [N/(m/s)] + +% "Stiff" Nano-Hexapod +k_stiff = m*(2*pi*400)^2; % Stiffness [N/m] +c_stiff = 0.1*2*sqrt(m*k_stiff); % Damping [N/(m/s)] +#+end_src + +#+begin_src matlab :exports none +%% Compute the transfer functions for considered nano-hexapods - From F to L' +% "Soft" Nano-Hexapod +G_soft_a = 1/(m*s^2 + c_soft*s + k_soft); % Transfer function from F to L' + +% "Mid" Nano-Hexapod +G_mid_a = 1/(m*s^2 + c_mid*s + k_mid); % Transfer function from F to L' + +% "Stiff" Nano-Hexapod +G_stiff_a = 1/(m*s^2 + c_stiff*s + k_stiff); % Transfer function from F to L' +#+end_src + +#+begin_src matlab :exports none :results none +%% Obtained transfer functions from F to L when neglecing support compliance +freqs = logspace(0, 3, 1000); + +figure; +tiledlayout(1, 3, 'TileSpacing', 'Compact', 'Padding', 'None'); + +ax1 = nexttile(); +hold on; +plot(freqs, abs(squeeze(freqresp(G_soft_a, freqs, 'Hz'))), '-', 'color', colors(1,:)); +text(50, 5e-5, '$\omega_\nu =$ 10Hz', 'horizontalalignment', 'center'); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +ylabel('Magnitude [m/N]'); +xticks([1e0, 1e1, 1e2]); +title('"Soft" $\nu$-hexapod'); + +ax2 = nexttile(); +hold on; +plot(freqs, abs(squeeze(freqresp(G_mid_a, freqs, 'Hz'))), '-', 'color', colors(1,:)); +text(70, 3e-6, '$\omega_\nu =$ 70Hz', 'horizontalalignment', 'center'); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +xlabel('Frequency [Hz]'); +set(gca, 'YTickLabel',[]); +xticks([1e0, 1e1, 1e2]); +title('"Mid" $\nu$-hexapod'); + +ax3 = nexttile(); +hold on; +plot(freqs, abs(squeeze(freqresp(G_stiff_a, freqs, 'Hz'))), '-', 'color', colors(1,:), ... + 'DisplayName', '$L^\prime/F$'); +text(200, 8e-8, '$\omega_\nu =$ 400Hz', 'horizontalalignment', 'center'); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +set(gca, 'YTickLabel',[]); +legend('location', 'northeast'); +xticks([1e0, 1e1, 1e2]); +title('"Stiff" $\nu$-hexapod'); + +linkaxes([ax1,ax2,ax3],'xy'); +xlim([freqs(1), freqs(end)]); +ylim([1e-9, 1e-4]); +#+end_src + +#+begin_src matlab :tangle no :exports results :results file replace +exportFig('figs/uniaxial_effect_support_compliance_neglected.pdf', 'width', 'full', 'height', 'normal'); +#+end_src + +#+name: fig:uniaxial_effect_support_compliance_neglected +#+caption: Obtained transfer functions from $F$ to $L^{\prime}$ when neglecing support compliance +#+RESULTS: +[[file:figs/uniaxial_effect_support_compliance_neglected.png]] + +** Effect of support compliance on $L/F$ + +Let's now add some support compliance and use the model shown in Figure ref:fig:uniaxial_support_compliance_test_system. +The parameters of the support (i.e. $m^{\prime}$, $c^{\prime}$ and $k^{\prime}$) are chosen in such a way that the main vertical mode at $\omega_\mu = 70\,\text{Hz}$ seen on the micro-station is matched (Figure ref:fig:uniaxial_comp_frf_meas_model, yellow curve). + +#+begin_src matlab +%% Parameters of the support compliance +w0h = 2*pi*70; % [rad/s] +xih = 0.1; % [-] + +mh = 20; % [kg] +kh = mh*w0h^2; +ch = xih*2*sqrt(kh*mh); +#+end_src + +#+begin_src matlab :exports none +%% Compute the transfer functions from F to L and from F to d for considered Nano-Hexapods +% "Soft" Nano-Hexapod +G_soft = (mh*s^2 + ch*s + kh)/(m*s^2*(c_soft*s + k_soft) + (m*s^2 + c_soft*s + k_soft)*(mh*s^2 + ch*s + kh)); % d/F +G_soft_r = (1 - m*s^2*G_soft)/(c_soft*s + k_soft); % L/F + +% "Mid" Nano-Hexapod +G_mid = (mh*s^2 + ch*s + kh)/(m*s^2*(c_mid*s + k_mid) + (m*s^2 + c_mid*s + k_mid)*(mh*s^2 + ch*s + kh)); % d/F +G_mid_r = (1 - m*s^2*G_mid)/(c_mid*s + k_mid); % L/F + +% "Stiff" Nano-Hexapod +G_stiff = (mh*s^2 + ch*s + kh)/(m*s^2*(c_stiff*s + k_stiff) + (m*s^2 + c_stiff*s + k_stiff)*(mh*s^2 + ch*s + kh)); % d/F +G_stiff_r = (1 - m*s^2*G_stiff)/(c_stiff*s + k_stiff); % L/F +#+end_src + +The transfer functions from $F$ to $L$ (i.e. control of the relative motion of the nano-hexapod) and from $L$ to $d$ (i.e. control of the position between the nano-hexapod and the fixed granite) can then be computed. + +When the relative displacement of the nano-hexapod $L$ is to be controlled (dynamics shown in Figure ref:fig:uniaxial_effect_support_compliance_dynamics), having a stiff nano-hexapod (i.e. with a suspension mode at higher frequency than the mode of the support) makes the dynamics less affected by the limited support compliance (Figure ref:fig:uniaxial_effect_support_compliance_dynamics, right). + +This is why it is very common to have stiff piezoelectric stages fixed at the very top of positioning stages. +In such case, the control of the piezoelectric stage using its integrated metrology (typically capacitive sensors) is quite simple as the plant is not much affected by the dynamics of the support on which is it fixed. +# Add references of such stations with piezo stages on top + +If a soft nano-hexapod is used, the support dynamics appears in the dynamics between $F$ and $L$ (see Figure ref:fig:uniaxial_effect_support_compliance_dynamics, left) which will impact the control robustness and performance. + +#+begin_src matlab :exports none :results none +%% Effect of the support compliance on the transfer functions from F to L and from F to d +figure; +freqs = logspace(0, 3, 1000); + +figure; +tiledlayout(1, 3, 'TileSpacing', 'Compact', 'Padding', 'None'); + +ax1 = nexttile(); +hold on; +plot(freqs, abs(squeeze(freqresp(G_soft_a, freqs, 'Hz'))), '-', 'color', colors(1,:)); +plot(freqs, abs(squeeze(freqresp(G_soft_r, freqs, 'Hz'))), '-', 'color', colors(2,:)); +loglog(10.^(0.3*cos(0:0.01:2*pi)+log10(60)), ... + 10.^(0.6*sin(0:0.01:2*pi)+log10(4e-7)), 'k--'); +text(8, 3e-7, sprintf('Support\nDynamics'), 'horizontalalignment', 'center'); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +xticks([1e0, 1e1, 1e2]); +title('"Soft" $\nu$-hexapod'); +ylabel('Magnitude [m/N]'); + + +ax2 = nexttile(); +hold on; +plot(freqs, abs(squeeze(freqresp(G_mid_a, freqs, 'Hz'))), '-', 'color', colors(1,:)); +plot(freqs, abs(squeeze(freqresp(G_mid_r, freqs, 'Hz'))), '-', 'color', colors(2,:)); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +xlabel('Frequency [Hz]'); +xticks([1e0, 1e1, 1e2]); +title('"Mid" $\nu$-hexapod'); +set(gca, 'YTickLabel',[]); + +ax3 = nexttile(); +hold on; +plot(freqs, abs(squeeze(freqresp(G_stiff_a, freqs, 'Hz'))), '-', 'color', colors(1,:), ... + 'DisplayName', '$L^\prime/F$'); +plot(freqs, abs(squeeze(freqresp(G_stiff_r, freqs, 'Hz'))), '-', 'color', colors(2,:), ... + 'DisplayName', '$L/F$'); +loglog(10.^(0.3*cos(0:0.01:2*pi)+log10(50)), ... + 10.^(0.3*sin(0:0.01:2*pi)+log10(8e-9)), 'k--', 'HandleVisibility', 'off'); +text(50, 3e-8, 'No effect', 'horizontalalignment', 'center'); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +set(gca, 'YTickLabel',[]); +xticks([1e0, 1e1, 1e2]); +title('"Stiff" $\nu$-hexapod'); +legend('location', 'northeast', 'FontSize', 8, 'NumColumns', 1); + +linkaxes([ax1,ax2,ax3],'xy'); +xlim([freqs(1), freqs(end)]); +ylim([1e-9, 1e-4]); +#+end_src + +#+begin_src matlab :tangle no :exports results :results file replace +exportFig('figs/uniaxial_effect_support_compliance_dynamics.pdf', 'width', 'full', 'height', 'normal'); +#+end_src + +#+name: fig:uniaxial_effect_support_compliance_dynamics +#+caption: Effect of the support compliance on the transfer functions from $F$ to $L$ +#+RESULTS: +[[file:figs/uniaxial_effect_support_compliance_dynamics.png]] + +** Effect of support compliance on $d/F$ + +When the motion to be controlled is the relative displacement $d$ between the granite and the nano-hexapod's top platform, the effect of the support compliance on the plant dynamics is opposite than what was previously observed. +Indeed, using a "soft" nano-hexapod (i.e. with a suspension mode at lower frequency than the mode of the support) makes the dynamics less affected by the support dynamics (Figure ref:fig:uniaxial_effect_support_compliance_dynamics_d, left). +On the contrary, if a "stiff" nano-hexapod is used, the support dynamics appears in the plant dynamics (Figure ref:fig:uniaxial_effect_support_compliance_dynamics_d, right). + +#+begin_src matlab :exports none :results none +%% Effect of the support compliance on the transfer functions from F to L and from F to d +figure; +freqs = logspace(0, 3, 1000); + +figure; +tiledlayout(1, 3, 'TileSpacing', 'Compact', 'Padding', 'None'); + +ax1 = nexttile(); +hold on; +plot(freqs, abs(squeeze(freqresp(G_soft_a, freqs, 'Hz'))), '-', 'color', colors(1,:)); +plot(freqs, abs(squeeze(freqresp(G_soft, freqs, 'Hz'))), '-', 'color', colors(3,:)); +loglog(10.^(0.3*cos(0:0.01:2*pi)+log10(60)), ... + 10.^(0.6*sin(0:0.01:2*pi)+log10(4e-7)), 'k--'); +text(8, 3e-7, 'No effect', 'horizontalalignment', 'center'); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +xticks([1e0, 1e1, 1e2]); +title('"Soft" $\nu$-hexapod'); +ylabel('Magnitude [m/N]'); + + +ax2 = nexttile(); +hold on; +plot(freqs, abs(squeeze(freqresp(G_mid_a, freqs, 'Hz'))), '-', 'color', colors(1,:)); +plot(freqs, abs(squeeze(freqresp(G_mid, freqs, 'Hz'))), '-', 'color', colors(3,:)); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +xlabel('Frequency [Hz]'); +xticks([1e0, 1e1, 1e2]); +title('"Mid" $\nu$-hexapod'); +set(gca, 'YTickLabel',[]); + +ax3 = nexttile(); +hold on; +plot(freqs, abs(squeeze(freqresp(G_stiff_a, freqs, 'Hz'))), '-', 'color', colors(1,:), ... + 'DisplayName', '$L^\prime/F$'); +plot(freqs, abs(squeeze(freqresp(G_stiff, freqs, 'Hz'))), '-', 'color', colors(3,:), ... + 'DisplayName', '$d/F$'); +loglog(10.^(0.4*cos(0:0.01:2*pi)+log10(50)), ... + 10.^(0.8*sin(0:0.01:2*pi)+log10(8e-9)), 'k--', 'HandleVisibility', 'off'); +text(50, 2e-7, sprintf('Support\nDynamics'), 'horizontalalignment', 'center'); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +set(gca, 'YTickLabel',[]); +xticks([1e0, 1e1, 1e2]); +title('"Stiff" $\nu$-hexapod'); +legend('location', 'northeast', 'FontSize', 8, 'NumColumns', 1); + +linkaxes([ax1,ax2,ax3],'xy'); +xlim([freqs(1), freqs(end)]); +ylim([1e-9, 1e-4]); +#+end_src + +#+begin_src matlab :tangle no :exports results :results file replace +exportFig('figs/uniaxial_effect_support_compliance_dynamics_d.pdf', 'width', 'full', 'height', 'normal'); +#+end_src + +#+name: fig:uniaxial_effect_support_compliance_dynamics_d +#+caption: Effect of the support compliance on the transfer functions from $F$ to $d$ +#+RESULTS: +[[file:figs/uniaxial_effect_support_compliance_dynamics_d.png]] + +** Conclusion +#+begin_important +In order to study the impact of the support compliance on the plant dynamics, simple models shown in Figure ref:fig:uniaxial_support_compliance_models were used. + +Depending on the quantity to be controlled ($L$ or $d$ in Figure ref:fig:uniaxial_support_compliance_test_system) and on the relative location of $\omega_\nu$ (suspension mode of the nano-hexapod) and $\omega_\mu$ (modes of the support), the interaction between the support and the nano-hexapod dynamics can change drastically (observations made are summarized in Table ref:tab:uniaxial_effect_compliance). + +For the NASS, having the suspension mode of the nano-hexapod at lower frequencies than the suspension modes of the micro-station would make the plant less dependent on the micro-station dynamics, and therefore easier to control. + +Note that observations made in this section are also affected by the ratio between the support mass $m^{\prime}$ and the nano-hexapod mass $m$ (the effect is more pronounced when the ratio $m/m^{\prime}$ increases). +#+end_important + +#+name: tab:uniaxial_effect_compliance +#+caption: Impact of the support dynamics on the plant dynamics +#+attr_latex: :environment tabularx :width 0.4\linewidth :align Xccc +#+attr_latex: :center t :booktabs t +| | $\omega_{\nu} \ll \omega_{\mu}$ | $\omega_{\nu} \approx \omega_{\mu}$ | $\omega_{\nu} \gg \omega_{\mu}$ | +|--------+---------------------------------+-------------------------------------+---------------------------------| +| $d/F$: | small | large | large | +| $L/F$: | large | large | small | + +* Effect of Payload Dynamics +:PROPERTIES: +:HEADER-ARGS:matlab+: :tangle matlab/uniaxial_8_payload_dynamics.m +:END: +<> + +** Introduction :ignore: + +Up to this section, the sample was modelled as a mass rigidly fixed to the nano-hexapod (as shown in Figure ref:fig:uniaxial_paylaod_dynamics_rigid_schematic). +However, such sample may present internal dynamics and its fixation to the nano-hexapod may have limited stiffness. + +To study the effect of the sample dynamics, models shown in Figure ref:fig:uniaxial_paylaod_dynamics_schematic are used is this Section. + +#+begin_src latex :file uniaxial_paylaod_dynamics_rigid_schematic.pdf :results file raw silent +\begin{tikzpicture} + % Parameters + \def\massw{2.2} % Width of the masses + \def\massh{0.8} % Height of the masses + \def\spaceh{1.2} % Height of the springs/dampers + \def\dispw{0.3} % Width of the dashed line for the displacement + \def\disph{0.5} % Height of the arrow for the displacements + \def\bracs{0.05} % Brace spacing vertically + \def\brach{-10pt} % Brace shift horizontaly + + % Granite + \draw[fill=white!70!black] (-1*\massw, -\massh) rectangle (\massw, 0) node[pos=0.5]{Granite}; + \coordinate(origin) at (0,0); + + % Nano Station + \begin{scope}[shift={(0, 0)}] + % Mass + \draw[draw=colorred,fill=colorred!10!white] (-0.5*\massw, \spaceh) rectangle (0.5*\massw, \spaceh+\massh) node[pos=0.5, color=colorred]{$m_{n}$}; + + % Spring, Damper, and Actuator + \draw[spring,draw=colorred] (-0.4*\massw, 0) -- (-0.4*\massw, \spaceh) node[midway, left=0.1, color=colorred]{$k_{n}$}; + \draw[damper={colorred}{}{}] (0, 0) -- ( 0, \spaceh) node[midway, left=0.2, color=colorred]{$c_{n}$}; + \draw[actuator={0.4}{0.2}{colorred}] ( 0.4*\massw, 0) -- (0.4*\massw, \spaceh) node[midway, left=0.1, color=colorred](F){$f$}; + + % Displacements + \draw[dashed] (0.5*\massw, \spaceh) -- coordinate[near end](dhigh) ++(1.2, 0); + + % Legend + \draw[decorate, decoration={brace, amplitude=8pt}, xshift=\brach] % + (-0.5*\massw, \bracs) -- (-0.5*\massw, \spaceh+\massh-\bracs) % + node[midway,rotate=90,anchor=south,yshift=10pt,align=center]{$\nu$-hexapod}; + \end{scope} + + % Sample + \begin{scope}[shift={(0, \spaceh+\massh)}] + % Mass + \draw[draw=colorblue,fill=colorblue!10!white] (-0.3*\massw, 0) rectangle (0.3*\massw, \massh) node[pos=0.5, color=colorblue]{$m_{s}$}; + \end{scope} + + + \draw[<->, dashed] (dhigh) --node[midway, right]{$L$} (origin-|dhigh); +\end{tikzpicture} +#+end_src + +#+begin_src latex :file uniaxial_paylaod_dynamics_schematic.pdf :results file raw silent +\begin{tikzpicture} + % Parameters + \def\massw{2.2} % Width of the masses + \def\massh{0.8} % Height of the masses + \def\spaceh{1.2} % Height of the springs/dampers + \def\dispw{0.3} % Width of the dashed line for the displacement + \def\disph{0.5} % Height of the arrow for the displacements + \def\bracs{0.05} % Brace spacing vertically + \def\brach{-10pt} % Brace shift horizontaly + + % Granite + \draw[fill=white!70!black] (-1*\massw, -\massh) rectangle (\massw, 0) node[pos=0.5]{Granite}; + \coordinate(origin) at (0,0); + + % Nano Station + \begin{scope}[shift={(0, 0)}] + % Mass + \draw[draw=colorred,fill=colorred!10!white] (-0.5*\massw, \spaceh) rectangle (0.5*\massw, \spaceh+\massh) node[pos=0.5, color=colorred]{$m_{n}$}; + + % Spring, Damper, and Actuator + \draw[spring,draw=colorred] (-0.4*\massw, 0) -- (-0.4*\massw, \spaceh) node[midway, left=0.1, color=colorred]{$k_{n}$}; + \draw[damper={colorred}{}{}] (0, 0) -- ( 0, \spaceh) node[midway, left=0.2, color=colorred]{$c_{n}$}; + \draw[actuator={0.4}{0.2}{colorred}] ( 0.4*\massw, 0) -- (0.4*\massw, \spaceh) node[midway, left=0.1, color=colorred](F){$f$}; + + % Displacements + \draw[dashed] (0.5*\massw, \spaceh) -- coordinate[near end](dhigh) ++(1.2, 0); + + % Legend + \draw[decorate, decoration={brace, amplitude=8pt}, xshift=\brach] % + (-0.5*\massw, \bracs) -- (-0.5*\massw, \spaceh+\massh-\bracs) % + node[midway,rotate=90,anchor=south,yshift=10pt,align=center]{$\nu$-hexapod}; + \end{scope} + + % Sample + \begin{scope}[shift={(0, \spaceh+\massh)}] + % Mass + \draw[draw=colorblue,fill=colorblue!10!white] (-0.3*\massw, \spaceh) rectangle (0.3*\massw, \spaceh+\massh) node[pos=0.5, color=colorblue]{$m_{s}$}; + + % Spring, Damper, and Actuator + \draw[spring,draw=colorblue] (-0.2*\massw, 0) -- (-0.2*\massw, \spaceh) node[midway, left=0.1, color=colorblue]{$k_{s}$}; + \draw[damper={colorblue}{}{}] ( 0.2*\massw, 0) -- ( 0.2*\massw, \spaceh) node[midway, left=0.2, color=colorblue]{$c_{s}$}; + + % Legend + \draw[decorate, decoration={brace, amplitude=8pt}, xshift=\brach] % + (-0.5*\massw, \bracs) -- (-0.5*\massw, \spaceh+\massh-\bracs) % + node[midway,rotate=90,anchor=south,yshift=10pt,align=center]{Payload}; + \end{scope} + + + \draw[<->, dashed] (dhigh) --node[midway, right]{$L^\prime$} (origin-|dhigh); +\end{tikzpicture} +#+end_src + +#+name: fig:uniaxial_payload_dynamics_models +#+caption: Models used to study the effect of payload dynamics +#+begin_figure +#+attr_latex: :caption \subcaption{\label{fig:uniaxial_paylaod_dynamics_rigid_schematic}Rigid payload} +#+attr_latex: :options {0.49\textwidth} +#+begin_subfigure +#+attr_latex: :scale 1 +[[file:figs/uniaxial_paylaod_dynamics_rigid_schematic.png]] +#+end_subfigure +#+attr_latex: :caption \subcaption{\label{fig:uniaxial_paylaod_dynamics_schematic}Payload with some flexibility} +#+attr_latex: :options {0.49\textwidth} +#+begin_subfigure +#+attr_latex: :scale 1 +[[file:figs/uniaxial_paylaod_dynamics_schematic.png]] +#+end_subfigure +#+end_figure + +** Matlab Init :noexport:ignore: +#+begin_src matlab :tangle no :exports none :results silent :noweb yes :var current_dir=(file-name-directory buffer-file-name) +<> +#+end_src + +#+begin_src matlab :exports none :results silent :noweb yes +<> +#+end_src + +#+begin_src matlab :tangle no :noweb yes +<> +#+end_src + +#+begin_src matlab :eval no :noweb yes +<> +#+end_src + +#+begin_src matlab :noweb yes +<> +#+end_src + +#+begin_src matlab +%% Uniaxial Simscape model name +mdl = 'nass_uniaxial_model'; +#+end_src + +#+begin_src matlab +%% Load the micro-station parameters +load('uniaxial_micro_station_parameters.mat') +#+end_src + +#+begin_src matlab +%% Load the PSD of disturbances +load('uniaxial_disturbance_psd.mat', 'f', 'psd_ft', 'psd_xf'); +#+end_src + +#+begin_src matlab :exports none +%% Load Active Damping Controller +load('uniaxial_active_damping_controllers.mat', 'K_iff_vc', 'K_iff_md', 'K_iff_pz', ... + 'K_rdc_vc', 'K_rdc_md', 'K_rdc_pz', ... + 'K_dvf_vc', 'K_dvf_md', 'K_dvf_pz'); +#+end_src + +#+begin_src matlab +%% Load High Authority Controllers +load('uniaxial_high_authority_controllers.mat', 'K_hac_vc', 'K_hac_md', 'K_hac_pz'); +#+end_src + +#+begin_src matlab +%% Frequency Vector [Hz] +freqs = logspace(0, 3, 1000); +#+end_src + +** Impact on the plant dynamics +<> + +To study the impact of sample dynamics, the following sample configurations are considered: +- rigid sample, corresponding to Figure ref:fig:uniaxial_paylaod_dynamics_rigid_schematic +- two flexible samples with a resonance at $\omega_s = 200\,\text{Hz}$ and at $\omega_s = 20\,\text{Hz}$ respectively, corresponding to Figure ref:fig:uniaxial_paylaod_dynamics_schematic +- for all cases, two sample masses are considered: $m_s = 1\,\text{kg}$ and $m_s = 50\,\text{kg}$ + +The transfer functions from the nano-hexapod force to the motion of the nano-hexapod top platform are computed for all the above configurations and are compared for a soft Nano-Hexapod $k_n = 0.01\,N/\mu m$ in Figure ref:fig:uniaxial_payload_dynamics_soft_nano_hexapod. + +It can be seen that the mode of the sample adds an anti-resonance followed by a resonance (zero/pole pattern). +The frequency of the anti-resonance corresponds to the "free" resonance of the sample $\omega_s = \sqrt{k_s/m_s}$. +The flexibility of the sample also changes the high frequency gain (the mass line is shifted from $\frac{1}{(m_n + m_s)s^2}$ to $\frac{1}{m_ns^2}$). + +#+begin_src matlab :exports none +%% Soft Nano-Hexapod +% Light payload mass +mn = 15; % Nano-Hexapod mass [kg] +ms = 1; % Sample Mass [kg] +kn = 1e4; % Nano-Hexapod (soft) Stiffness [N/m] +cn = 2*0.01*sqrt((ms + mn)*kn); % Nano-Hexapod Damping [N/(m/s)] + +% Rigid sample +G_vc_rigid_light = 1/((mn + ms)*s^2 + cn*s + kn); + +% Soft Sample +ws = 2*pi*20; +ks = ms * ws^2; +cs = 2*0.01*sqrt(ms*ks); +G_vc_soft_light = (ms*s^2 + cs*s + ks)/((mn*s^2 + cn*s + kn)*(ms*s^2 + cs*s + ks) + ms*s^2*(cs*s + ks)); + +% Stiff Sample +ws = 2*pi*200; +ks = ms * ws^2; +cs = 2*0.01*sqrt(ms*ks); +G_vc_stiff_light = (ms*s^2 + cs*s + ks)/((mn*s^2 + cn*s + kn)*(ms*s^2 + cs*s + ks) + ms*s^2*(cs*s + ks)); + +% Heavy payload mass +mn = 15; % Nano-Hexapod mass [kg] +ms = 50; % Sample Mass [kg] +kn = 1e4; % Nano-Hexapod (soft) Stiffness [N/m] +cn = 2*0.01*sqrt((ms + mn)*kn); % Nano-Hexapod Damping [N/(m/s)] + +% Rigid sample +G_vc_rigid_heavy = 1/((mn + ms)*s^2 + cn*s + kn); + +% Soft Sample +ws = 2*pi*20; +ks = ms * ws^2; +cs = 2*0.01*sqrt(ms*ks); +G_vc_soft_heavy = (ms*s^2 + cs*s + ks)/((mn*s^2 + cn*s + kn)*(ms*s^2 + cs*s + ks) + ms*s^2*(cs*s + ks)); + +% Stiff Sample +ws = 2*pi*200; +ks = ms * ws^2; +cs = 2*0.01*sqrt(ms*ks); +G_vc_stiff_heavy = (ms*s^2 + cs*s + ks)/((mn*s^2 + cn*s + kn)*(ms*s^2 + cs*s + ks) + ms*s^2*(cs*s + ks)); +#+end_src + +#+begin_src matlab :exports none :results none +%% Effect of the payload dynamics on the soft Nano-Hexapod. Light sample on the right, and heavy sample on the left +figure; +tiledlayout(3, 2, 'TileSpacing', 'Compact', 'Padding', 'None'); + +ax1 = nexttile([2,1]); +hold on; +plot(freqs, abs(squeeze(freqresp(G_vc_rigid_light, freqs, 'Hz'))), '-', 'color', colors(1,:), 'DisplayName', 'Rigid sample'); +plot(freqs, abs(squeeze(freqresp(G_vc_stiff_light, freqs, 'Hz'))), '-', 'color', colors(2,:), 'DisplayName', '$\omega_s = 200\,Hz$'); +plot(freqs, abs(squeeze(freqresp(G_vc_soft_light, freqs, 'Hz'))), '-', 'color', colors(3,:), 'DisplayName', '$\omega_s = 20\,Hz$'); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +ylabel('Amplitude [m/N]'); set(gca, 'XTickLabel',[]); +ylim([1e-10, 1e-2]) +title('$k_n = 0.01\,N/\mu m$, $m_s = 1\,kg$'); + +ax2 = nexttile([2,1]); +hold on; +plot(freqs, abs(squeeze(freqresp(G_vc_rigid_heavy, freqs, 'Hz'))), '-', 'color', colors(1,:), 'DisplayName', 'Rigid sample'); +plot(freqs, abs(squeeze(freqresp(G_vc_stiff_heavy, freqs, 'Hz'))), '-', 'color', colors(2,:), 'DisplayName', '$\omega_s = 200\,Hz$'); +plot(freqs, abs(squeeze(freqresp(G_vc_soft_heavy, freqs, 'Hz'))), '-', 'color', colors(3,:), 'DisplayName', '$\omega_s = 20\,Hz$'); +plot(freqs, abs(squeeze(freqresp(1/(mn*s^2), freqs, 'Hz'))), '-', 'color', [0,0,0,0.5], 'DisplayName', '$\frac{1}{m_n s^2}$'); +plot(freqs, abs(squeeze(freqresp(1/((mn + ms)*s^2), freqs, 'Hz'))), '--', 'color', [0,0,0,0.5], 'DisplayName', '$\frac{1}{(m_n + m_s) s^2}$'); +text(2.2, 3e-3, '$\omega_n = \sqrt{\frac{k_n}{m_n + m_s}}$', 'horizontalalignment', 'left'); +text(20, 1e-8, '$\omega_s = \sqrt{\frac{k_s}{m_s}}$', 'horizontalalignment', 'center'); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +set(gca, 'XTickLabel',[]); set(gca, 'YTickLabel',[]); +title('$k_n = 0.01\,N/\mu m$, $m_s = 50\,kg$'); +ldg = legend('location', 'northeast', 'FontSize', 8, 'NumColumns', 1); +ldg.ItemTokenSize = [20, 1]; +ylim([1e-10, 1e-2]) + +ax1b = nexttile(); +hold on; +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_vc_rigid_light, freqs, 'Hz')))), '-', 'color', colors(1,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_vc_stiff_light, freqs, 'Hz')))), '-', 'color', colors(2,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_vc_soft_light, freqs, 'Hz')))), '-', 'color', colors(3,:)); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'lin'); +xlabel('Frequency [Hz]'); ylabel('Phase [deg]'); +xticks([1e0, 1e1, 1e2]); +yticks(-360:90:360); +ylim([-200, 20]); + +ax2b = nexttile(); +hold on; +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_vc_rigid_heavy, freqs, 'Hz')))), '-', 'color', colors(1,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_vc_stiff_heavy, freqs, 'Hz')))), '-', 'color', colors(2,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_vc_soft_heavy, freqs, 'Hz')))), '-', 'color', colors(3,:)); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'lin'); +xlabel('Frequency [Hz]'); set(gca, 'YTickLabel',[]); +xticks([1e0, 1e1, 1e2]); +yticks(-360:90:360); +ylim([-200, 20]); + +linkaxes([ax1,ax1b],'x'); +xlim([1, 1000]); +#+end_src + +#+begin_src matlab :tangle no :exports results :results file replace +exportFig('figs/uniaxial_payload_dynamics_soft_nano_hexapod.pdf', 'width', 'full', 'height', 'tall'); +#+end_src + +#+name: fig:uniaxial_payload_dynamics_soft_nano_hexapod +#+caption: Effect of the payload dynamics on the soft Nano-Hexapod. Light sample on the right, and heavy sample on the left +#+RESULTS: +[[file:figs/uniaxial_payload_dynamics_soft_nano_hexapod.png]] + +The same transfer functions are now compared when using a stiff nano-hexapod ($k_n = 100\,N/\mu m$) in Figure ref:fig:uniaxial_payload_dynamics_stiff_nano_hexapod. +In that case, the sample's resonance $\omega_n$ is smaller than the nano-hexapod resonance $\omega_n$. +This changes the zero/pole pattern to a pole/zero pattern (the frequency of the zero still being equal to $\omega_s$). +Even tough the added sample's flexibility still changes the high frequency mass line from $\frac{1}{(m_n + m_s)s^2}$ to $\frac{1}{m_ns^2}$, the overall dynamics is much less impacted, even if the sample mass is high (see yellow curve in Figure ref:fig:uniaxial_payload_dynamics_stiff_nano_hexapod, right). + +#+begin_src matlab :exports none +%% Stiff Nano-Hexapod +% Light payload mass +mn = 15; % Nano-Hexapod mass [kg] +ms = 1; % Sample Mass [kg] +kn = 1e8; % Nano-Hexapod (soft) Stiffness [N/m] +cn = 2*0.01*sqrt((ms + mn)*kn); % Nano-Hexapod Damping [N/(m/s)] + +% Rigid sample +G_pz_rigid_light = 1/((mn + ms)*s^2 + cn*s + kn); + +% Soft Sample +ws = 2*pi*20; +ks = ms * ws^2; +cs = 2*0.01*sqrt(ms*ks); +G_pz_soft_light = (ms*s^2 + cs*s + ks)/((mn*s^2 + cn*s + kn)*(ms*s^2 + cs*s + ks) + ms*s^2*(cs*s + ks)); + +% Stiff Sample +ws = 2*pi*200; +ks = ms * ws^2; +cs = 2*0.01*sqrt(ms*ks); +G_pz_stiff_light = (ms*s^2 + cs*s + ks)/((mn*s^2 + cn*s + kn)*(ms*s^2 + cs*s + ks) + ms*s^2*(cs*s + ks)); + +% Heavy payload mass +mn = 15; % Nano-Hexapod mass [kg] +ms = 50; % Sample Mass [kg] +kn = 1e8; % Nano-Hexapod (soft) Stiffness [N/m] +cn = 2*0.01*sqrt((ms + mn)*kn); % Nano-Hexapod Damping [N/(m/s)] + +% Rigid sample +G_pz_rigid_heavy = 1/((mn + ms)*s^2 + cn*s + kn); + +% Soft Sample +ws = 2*pi*20; +ks = ms * ws^2; +cs = 2*0.01*sqrt(ms*ks); +G_pz_soft_heavy = (ms*s^2 + cs*s + ks)/((mn*s^2 + cn*s + kn)*(ms*s^2 + cs*s + ks) + ms*s^2*(cs*s + ks)); + +% Stiff Sample +ws = 2*pi*200; +ks = ms * ws^2; +cs = 2*0.01*sqrt(ms*ks); +G_pz_stiff_heavy = (ms*s^2 + cs*s + ks)/((mn*s^2 + cn*s + kn)*(ms*s^2 + cs*s + ks) + ms*s^2*(cs*s + ks)); +#+end_src + +#+begin_src matlab :exports none :results none +%% Effect of the payload dynamics on the stiff Nano-Hexapod. Light sample on the right, and heavy sample on the left +figure; +tiledlayout(3, 2, 'TileSpacing', 'Compact', 'Padding', 'None'); + +ax1 = nexttile([2,1]); +hold on; +plot(freqs, abs(squeeze(freqresp(G_pz_rigid_light, freqs, 'Hz'))), '-', 'color', colors(1,:)); +plot(freqs, abs(squeeze(freqresp(G_pz_stiff_light, freqs, 'Hz'))), '-', 'color', colors(2,:)); +plot(freqs, abs(squeeze(freqresp(G_pz_soft_light, freqs, 'Hz'))), '-', 'color', colors(3,:)); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +ylabel('Amplitude [m/N]'); set(gca, 'XTickLabel',[]); +ylim([1e-10, 1e-2]) +title('$k_n = 100\,N/\mu m$, $m_s = 1\,kg$'); + +ax2 = nexttile([2,1]); +hold on; +plot(freqs, abs(squeeze(freqresp(G_pz_rigid_heavy, freqs, 'Hz'))), '-', 'color', colors(1,:), 'DisplayName', 'Rigid sample'); +plot(freqs, abs(squeeze(freqresp(G_pz_stiff_heavy, freqs, 'Hz'))), '-', 'color', colors(2,:), 'DisplayName', 'Stiff sample: $\omega_s = 200\,Hz$'); +plot(freqs, abs(squeeze(freqresp(G_pz_soft_heavy, freqs, 'Hz'))), '-', 'color', colors(3,:), 'DisplayName', 'Soft sample: $\omega_s = 20\,Hz$'); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +set(gca, 'XTickLabel',[]); set(gca, 'YTickLabel',[]); +title('$k_n = 100\,N/\mu m$, $m_s = 50\,kg$'); +ylim([1e-10, 1e-2]) +ldg = legend('location', 'northeast', 'FontSize', 8, 'NumColumns', 1); +ldg.ItemTokenSize = [20, 1]; + +ax1b = nexttile(); +hold on; +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_pz_rigid_light, freqs, 'Hz')))), '-', 'color', colors(1,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_pz_stiff_light, freqs, 'Hz')))), '-', 'color', colors(2,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_pz_soft_light, freqs, 'Hz')))), '-', 'color', colors(3,:)); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'lin'); +xlabel('Frequency [Hz]'); ylabel('Phase [deg]'); +xticks([1e0, 1e1, 1e2]); +yticks(-360:90:360); +ylim([-200, 20]); + +ax2b = nexttile(); +hold on; +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_pz_rigid_heavy, freqs, 'Hz')))), '-', 'color', colors(1,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_pz_stiff_heavy, freqs, 'Hz')))), '-', 'color', colors(2,:)); +plot(freqs, 180/pi*unwrap(angle(squeeze(freqresp(G_pz_soft_heavy, freqs, 'Hz')))), '-', 'color', colors(3,:)); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'lin'); +xlabel('Frequency [Hz]'); set(gca, 'YTickLabel',[]); +xticks([1e0, 1e1, 1e2]); +yticks(-360:90:360); +ylim([-200, 20]); + +linkaxes([ax1,ax1b],'x'); +xlim([1, 1000]); +#+end_src + +#+begin_src matlab :tangle no :exports results :results file replace +exportFig('figs/uniaxial_payload_dynamics_stiff_nano_hexapod.pdf', 'width', 'full', 'height', 'tall'); +#+end_src + +#+name: fig:uniaxial_payload_dynamics_stiff_nano_hexapod +#+caption: Effect of the payload dynamics on the stiff Nano-Hexapod. Light sample on the right, and heavy sample on the left +#+RESULTS: +[[file:figs/uniaxial_payload_dynamics_stiff_nano_hexapod.png]] + + +#+begin_important +The impact of the sample dynamics on the plant varies with the sample mass and the relative resonance frequency of the sample $\omega_s$ and of the nano-hexapod $\omega_n$. +The larger the sample mass, the larger the effect (i.e. change of high frequency gain, appearance of additional resonances and anti-resonances). +A zero/pole pattern is observed if $\omega_s > \omega_n$ and a pole/zero pattern if $\omega_s > \omega_n$. +Such additional dynamics can induce stability issues depending on their position relative to the wanted feedback bandwidth as explained in [[cite:&rankers98_machin Section 4.2]]. + +The general conclusion is that the stiffer the nano-hexapod, the less it is impacted by the payload's dynamics, which would make the feedback controller more robust to a change of payload. + +This is why high-bandwidth soft positioning stages are usually restricted to constant and calibrated payloads (CD-player, lithography machines, isolation system for gravitational wave detectors, ...), while stiff positioning systems can more easily accept various payloads. +#+end_important + +** Impact on the positioning stability +<> + +Having a flexibility between the measured position (i.e. the top platform of the nano-hexapod) and the point-of-interest to be positioned relative to the x-ray can also impact the positioning stability. +This is due to the fact that the measured (and therefore controlled) distance is no longer equal to the important distance for the experiment. + +In order to estimate if the sample flexibility is critical for the position stability of the point of interest, the model shown in Figure ref:fig:uniaxial_sample_flexibility_control is used. +This is the same model that was used in Section ref:sec:uniaxial_position_control but with an added flexibility between the nano-hexapod and the sample (considered sample modes are at $\omega_s = 20\,\text{Hz}$ and $\omega_n = 200\,\text{Hz}$). + +#+begin_src latex :file uniaxial_sample_flexibility_control.pdf +\begin{tikzpicture} + % Parameters + \def\massw{2.2} % Width of the masses + \def\massh{0.8} % Height of the masses + \def\spaceh{1.2} % Height of the springs/dampers + \def\dispw{0.4} % Width of the dashed line for the displacement + \def\disph{0.3} % Height of the arrow for the displacements + \def\bracs{0.05} % Brace spacing vertically + \def\brach{-12pt} % Brace shift horizontaly + \def\fsensh{0.2} % Height of the force sensor + \def\velsize{0.2} % Size of the velocity sensor + + % Ground + \draw (-0.5*\massw, 0) -- (0.5*\massw, 0); + \draw[dashed] (0.5*\massw, 0) -- ++(\dispw, 0); + \draw[->, color=colorpurple] (0.5*\massw+0.5*\dispw, 0) -- ++(0, 2*\disph) node[right, color=colorpurple]{$x_{f}$}; + + % ==================== + % Granite + \begin{scope}[shift={(0, 0)}] + % Mass + \draw[fill=white] (-0.5*\massw, \spaceh) rectangle (0.5*\massw, \spaceh+\massh) node[pos=0.5]{$m_{g}$}; + + % Spring, Damper, and Actuator + \draw[spring] (-0.4*\massw, 0) -- (-0.4*\massw, \spaceh) node[midway, left=0.1]{$k_{g}$}; + \draw[damper] (0, 0) -- ( 0, \spaceh) node[midway, left=0.2]{$c_{g}$}; + + % Legend + \draw[decorate, decoration={brace, amplitude=8pt}, xshift=\brach] % + (-0.5*\massw, \bracs) -- (-0.5*\massw, \spaceh+\massh-\bracs) node[midway,rotate=90,anchor=south,yshift=10pt]{Granite}; + + % Displacements + \draw[dashed] (0.5*\massw, \spaceh+\massh) -- ++(9.0*\dispw, 0) coordinate(xg); + \end{scope} + % ==================== + + + % ==================== + % Stages + \begin{scope}[shift={(0, \spaceh+\massh)}] + % Mass + \draw[fill=white] (-0.5*\massw, \spaceh) rectangle (0.5*\massw, \spaceh+\massh) node[pos=0.5]{$m_{t}$}; + + % Spring, Damper, and Actuator + \draw[spring] (-0.4*\massw, 0) -- (-0.4*\massw, \spaceh) node[midway, left=0.1]{$k_{t}$}; + \draw[damper] (0, 0) -- ( 0, \spaceh) node[midway, left=0.2]{$c_{t}$}; + \draw[actuator={0.45}{0.2}{colorpurple}] ( 0.3*\massw, 0) -- (0.3*\massw, \spaceh) node[midway, right=0.1, color=colorpurple](ft){$f_{t}$}; + + % Legend + \draw[decorate, decoration={brace, amplitude=8pt}, xshift=\brach] % + (-0.5*\massw, \bracs) -- (-0.5*\massw, \spaceh+\massh-\bracs) node[midway,rotate=90,anchor=south,yshift=10pt]{$T_y$/$R_y$/$R_z$}; + \end{scope} + % ==================== + + + % ==================== + % Hexapod + \begin{scope}[shift={(0, 2*(\spaceh+\massh))}] + % Mass + \draw[fill=white] (-0.5*\massw, \spaceh) rectangle (0.5*\massw, \spaceh+\massh) node[pos=0.5]{$m_h$}; + + % Spring, Damper, and Actuator + \draw[spring] (-0.4*\massw, 0) -- (-0.4*\massw, \spaceh) node[midway, left=0.1]{$k_h$}; + \draw[damper] (0, 0) -- ( 0, \spaceh) node[midway, left=0.2]{$c_h$}; + + % Legend + \draw[decorate, decoration={brace, amplitude=8pt}, xshift=\brach] % + (-0.5*\massw, \bracs) -- (-0.5*\massw, \spaceh+\massh-\bracs) node[midway,rotate=90,anchor=south,yshift=10pt]{$\mu\text{-hexa}$}; + \end{scope} + % ==================== + + + % ==================== + % NASS + \begin{scope}[shift={(0, 3*(\spaceh+\massh))}] + % Mass + \draw[fill=white] (-0.5*\massw, \spaceh) rectangle (0.5*\massw, \spaceh+\massh) node[pos=0.5]{$m_{n}$}; + + % Force Sensor + \node[forcesensor={\massw}{\fsensh}{colorblue}] (fsensn) at (0, \spaceh-\fsensh){}; + \node[right, color=colorblue] (fn) at (fsensn.east) {$f_n$}; + + % Spring, Damper, and Actuator + \draw[spring] (-0.4*\massw, 0) -- (-0.4*\massw, \spaceh-\fsensh) node[midway, left=0.1]{$k_{n}$}; + \draw[damper] (0, 0) -- ( 0, \spaceh-\fsensh) node[midway, left=0.2]{$c_{n}$}; + \draw[actuator={0.4}{0.2}{black}] ( 0.3*\massw, 0) -- (0.3*\massw, \spaceh-\fsensh) node[midway, right=0.1](f){$f$}; + + % Legend + \draw[decorate, decoration={brace, amplitude=8pt}, xshift=\brach] % + (-0.5*\massw, \bracs) -- (-0.5*\massw, \spaceh+\massh-\bracs) node[midway,rotate=90,anchor=south,yshift=10pt]{$\nu\text{-hexa}$}; + + % Displacements + \draw[dashed] (0.5*\massw, \spaceh+\massh) -- ++(7.5*\dispw, 0) coordinate(xnpos); + \end{scope} + % ==================== + + % ==================== + % sample + \begin{scope}[shift={(0, 4*(\spaceh+\massh))}] + % Mass + \draw[fill=white] (-0.3*\massw, \spaceh) rectangle (0.3*\massw, \spaceh+\massh) coordinate[pos=0.5](poi); + + % Spring, Damper, and Actuator + \draw[spring] (-0.2*\massw, 0) -- (-0.2*\massw, \spaceh) node[midway, left=0.1]{$k_{s}$}; + \draw[damper] ( 0.2*\massw, 0) -- ( 0.2*\massw, \spaceh) node[midway, left=0.2]{$c_{s}$}; + + % Legend + \draw[decorate, decoration={brace, amplitude=8pt}, xshift=\brach] % + (-0.5*\massw, \bracs) -- (-0.5*\massw, \spaceh+\massh-\bracs) % + node[midway,rotate=90,anchor=south,yshift=10pt,align=center]{Sample}; + + % X-ray + \draw[dashed, draw=red, -<-=.5] (poi)node[branch, color=red]{} -- node[near end, above]{x-ray} ++(2.5, 0); + + % Displacements + \draw[dashed] (0.2*\massw, \spaceh)coordinate(a) -- (xg|-a) coordinate(xspos); + \end{scope} + % ==================== + + % Measured displacement + \draw[<->, dashed, draw=colorred] ($(xnpos)+(-0.1, 0)$)coordinate(a) -- node[left, color=colorred](d){$d$} (xg-|a); + \draw[<->, dashed] ($(xg)+(-0.1, 0)$) -- node[left]{$y$} ($(xspos)+(-0.1, 0)$); + + % ==================== + % IFF Control + \node[block={2em}{2em}, right=1.0 of fn, color=colorblue, fill=colorblue!10!white] (iff) {$K_{\textsc{IFF}}$}; + \node[addb, right=0.5 of f.east] (ctrladd) {}; + \node[block={2em}{2em}, color=colorred, fill=colorred!10!white] (Khac) at (ctrladd|-d) {$K_{\textsc{HAC}}$}; + + \draw[->, draw=colorblue] (fn.east) -- (iff.west); + \draw[->, draw=colorblue] (iff.south) |- (ctrladd.east); + \draw[->] (ctrladd.west) -- (f.east); + + \draw[->, draw=colorred] (d.west) -- (Khac.east); + \draw[->, draw=colorred] (Khac.north) -- (ctrladd.south) node[below right, color=colorred]{$f^{\prime}$}; + % ==================== +\end{tikzpicture} +#+end_src + +#+name: fig:uniaxial_sample_flexibility_control +#+caption: Uniaxial model considering a flexibility between the nano-hexapod top platform and the sample. In that case the measured and controlled distance $d$ is different from the distance $y$ that is wish to be controlled +#+RESULTS: +[[file:figs/uniaxial_sample_flexibility_control.png]] + +After the system dynamics extracted from the model, IFF is applied using the same gains as the ones used in Section ref:sec:uniaxial_active_damping. +Thanks to the collocation between the nano-hexapod and the force sensor used for IFF, the damped plants are still stable and similar damping values are obtained than when considering a rigid sample. + +The High Authority Controllers used in Section ref:sec:uniaxial_position_control are then implemented on the damped plants. +The obtained closed-loop systems are stable, indicating good robustness. + +Finally, closed-loop noise budgeting is computed for the obtained the closed-loop system and the cumulative amplitude spectrum of $d$ and $y$ are shown in Figure ref:fig:uniaxial_sample_flexibility_noise_budget_y. +The cumulative amplitude spectrum of the measured distance $d$ (Figure ref:fig:uniaxial_sample_flexibility_noise_budget_d) shows that the added flexibility at the sample location have very little effect on the control performance. +However, the cumulative amplitude spectrum of the distance $y$ (Figure ref:fig:uniaxial_sample_flexibility_noise_budget_y) shows that the stability of $y$ is degraded when the sample flexibility is considered and is degraded as $\omega_s$ is lowered. + +What happens is that above $\omega_s$, even though the motion $d$ can be controlled perfectly, the sample's mass is "isolated" from the motion of the nano-hexapod and the control on $y$ is not effective. + +#+begin_src matlab :exports none +%% Nano-Hexpod model +model_config = struct(); +model_config.controller = "open_loop"; +mn = 15; % Nano-Hexapod mass [kg] +ms = 1; % Sample Mass [kg] + +%% Identification +clear io; io_i = 1; +io(io_i) = linio([mdl, '/controller'], 1, 'openinput'); io_i = io_i + 1; % Actuator Force +io(io_i) = linio([mdl, '/micro_station/xf'], 1, 'openinput'); io_i = io_i + 1; % Floor Motion +io(io_i) = linio([mdl, '/micro_station/ft'], 1, 'openinput'); io_i = io_i + 1; % Stage vibrations +io(io_i) = linio([mdl, '/fs'], 1, 'openinput'); io_i = io_i + 1; % Direct sample forces +io(io_i) = linio([mdl, '/dL'], 1, 'openoutput'); io_i = io_i + 1; % Relative Motion Sensor +io(io_i) = linio([mdl, '/fm'], 1, 'openoutput'); io_i = io_i + 1; % Force Sensor +io(io_i) = linio([mdl, '/vn'] , 1, 'openoutput'); io_i = io_i + 1; % Geophone +io(io_i) = linio([mdl, '/d'] , 1, 'openoutput'); io_i = io_i + 1; % Metrology Output +io(io_i) = linio([mdl, '/y'] , 1, 'openoutput'); io_i = io_i + 1; % Sample's position +#+end_src + +#+begin_src matlab :exports none +%% Soft Nano-Hexapod +% Light payload mass +kn = 1e4; % Nano-Hexapod (soft) Stiffness [N/m] +cn = 2*0.01*sqrt((ms + mn)*kn); % Nano-Hexapod Damping [N/(m/s)] + +% Rigid Sample +model_config.nhexa = "1dof"; +G_vc_light_rigid = linearize(mdl, io, 0.0); +G_vc_light_rigid.InputName = {'f', 'xf', 'ft', 'fs'}; +G_vc_light_rigid.OutputName = {'dL', 'fm', 'vn', 'd', 'y'}; + +% Soft Sample +model_config.nhexa = "2dof"; +ws = 2*pi*20; +ks = ms * ws^2; +cs = 2*0.01*sqrt(ms*ks); + +G_vc_light_soft = linearize(mdl, io, 0.0); +G_vc_light_soft.InputName = {'f', 'xf', 'ft', 'fs'}; +G_vc_light_soft.OutputName = {'dL', 'fm', 'vn', 'd', 'y'}; + +% Rigid Sample +model_config.nhexa = "2dof"; +ws = 2*pi*200; +ks = ms * ws^2; +cs = 2*0.01*sqrt(ms*ks); + +G_vc_light_stiff = linearize(mdl, io, 0.0); +G_vc_light_stiff.InputName = {'f', 'xf', 'ft', 'fs'}; +G_vc_light_stiff.OutputName = {'dL', 'fm', 'vn', 'd', 'y'}; +#+end_src + +#+begin_src matlab :exports none +%% Stiff Nano-Hexapod +% Light payload mass +kn = 1e8; % Nano-Hexapod (soft) Stiffness [N/m] +cn = 2*0.01*sqrt((ms + mn)*kn); % Nano-Hexapod Damping [N/(m/s)] + +% Rigid Sample +model_config.nhexa = "1dof"; +G_pz_light_rigid = linearize(mdl, io, 0.0); +G_pz_light_rigid.InputName = {'f', 'xf', 'ft', 'fs'}; +G_pz_light_rigid.OutputName = {'dL', 'fm', 'vn', 'd', 'y'}; + +% Soft Sample +model_config.nhexa = "2dof"; +ws = 2*pi*20; +ks = ms * ws^2; +cs = 2*0.01*sqrt(ms*ks); + +G_pz_light_soft = linearize(mdl, io, 0.0); +G_pz_light_soft.InputName = {'f', 'xf', 'ft', 'fs'}; +G_pz_light_soft.OutputName = {'dL', 'fm', 'vn', 'd', 'y'}; + +% Rigid Sample +model_config.nhexa = "2dof"; +ws = 2*pi*200; +ks = ms * ws^2; +cs = 2*0.01*sqrt(ms*ks); + +G_pz_light_stiff = linearize(mdl, io, 0.0); +G_pz_light_stiff.InputName = {'f', 'xf', 'ft', 'fs'}; +G_pz_light_stiff.OutputName = {'dL', 'fm', 'vn', 'd', 'y'}; +#+end_src + +#+begin_src matlab +%% Apply IFF and verify stability +% Soft Nano-Hexapod +G_iff_vc_light_rigid = feedback(G_vc_light_rigid, K_iff_vc, 'name', +1); +G_iff_vc_light_soft = feedback(G_vc_light_soft , K_iff_vc, 'name', +1); +G_iff_vc_light_stiff = feedback(G_vc_light_stiff, K_iff_vc, 'name', +1); + +isstable(G_iff_vc_light_rigid) +isstable(G_iff_vc_light_soft) +isstable(G_iff_vc_light_stiff) + +% Stiff Nano-Hexapod +G_iff_pz_light_rigid = feedback(G_pz_light_rigid, K_iff_pz, 'name', +1); +G_iff_pz_light_soft = feedback(G_pz_light_soft , K_iff_pz, 'name', +1); +G_iff_pz_light_stiff = feedback(G_pz_light_stiff, K_iff_pz, 'name', +1); + +isstable(G_iff_pz_light_rigid) +isstable(G_iff_pz_light_soft) +isstable(G_iff_pz_light_stiff) +#+end_src + +#+begin_src matlab +%% Compute closed-loop plants and verify stability +% Soft Nano-Hexapod +G_hac_iff_vc_light_rigid = feedback(G_iff_vc_light_rigid, K_hac_vc, 'name', -1); +G_hac_iff_vc_light_soft = feedback(G_iff_vc_light_soft , K_hac_vc, 'name', -1); +G_hac_iff_vc_light_stiff = feedback(G_iff_vc_light_stiff, K_hac_vc, 'name', -1); + +isstable(G_hac_iff_vc_light_rigid) +isstable(G_hac_iff_vc_light_soft) +isstable(G_hac_iff_vc_light_stiff) + +% Stiff Nano-Hexapod +G_hac_iff_pz_light_rigid = feedback(G_iff_pz_light_rigid, K_hac_pz, 'name', -1); +G_hac_iff_pz_light_soft = feedback(G_iff_pz_light_soft , K_hac_pz, 'name', -1); +G_hac_iff_pz_light_stiff = feedback(G_iff_pz_light_stiff, K_hac_pz, 'name', -1); + +isstable(G_hac_iff_pz_light_rigid) +isstable(G_hac_iff_pz_light_soft) +isstable(G_hac_iff_pz_light_stiff) +#+end_src + +#+begin_src matlab :exports none :results none +%% Cumulative Amplitude Spectrum of d - Effect of Sample's flexibility +figure; +tiledlayout(1, 2, 'TileSpacing', 'Compact', 'Padding', 'None'); + +ax1 = nexttile(); +hold on; +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_hac_iff_vc_light_rigid('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_hac_iff_vc_light_rigid('d', 'xf'), f, 'Hz'))).^2)))), '-', ... + 'DisplayName', 'Rigid sample'); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_hac_iff_vc_light_stiff('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_hac_iff_vc_light_stiff('d', 'xf'), f, 'Hz'))).^2)))), '-', ... + 'DisplayName', 'Stiff $\omega_s = 200\,$Hz'); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_hac_iff_vc_light_soft('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_hac_iff_vc_light_soft('d', 'xf'), f, 'Hz'))).^2)))), '-', ... + 'DisplayName', 'Soft $\omega_s = 20\,$Hz'); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +xticks([1e0, 1e1, 1e2]); +ylabel('CAS of $d$ [m]'); xlabel('Frequency [Hz]'); +legend('location', 'southwest', 'FontSize', 8, 'NumColumns', 1); +title('$k_n = 0.01\,N/\mu m$'); + +ax2 = nexttile(); +hold on; +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_hac_iff_pz_light_rigid('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_hac_iff_pz_light_rigid('d', 'xf'), f, 'Hz'))).^2)))), '-'); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_hac_iff_pz_light_stiff('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_hac_iff_pz_light_stiff('d', 'xf'), f, 'Hz'))).^2)))), '-'); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_hac_iff_pz_light_soft('d', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_hac_iff_pz_light_soft('d', 'xf'), f, 'Hz'))).^2)))), '-'); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +xticks([1e0, 1e1, 1e2]); +xlabel('Frequency [Hz]'); set(gca, 'YTickLabel',[]); +title('$k_n = 100\,N/\mu m$'); +xlim([1, 500]); + +linkaxes([ax1,ax2],'xy'); +xlim([1, 500]); +ylim([2e-10, 2e-7]) +#+end_src + +#+begin_src matlab :tangle no :exports results :results file raw silent +exportFig('figs/uniaxial_sample_flexibility_noise_budget_d.pdf', 'width', 'full', 'height', 'normal'); +#+end_src + +#+begin_src matlab :exports none :results none +%% Cumulative Amplitude Spectrum - Effect of Sample's flexibility +figure; +tiledlayout(1, 2, 'TileSpacing', 'Compact', 'Padding', 'None'); + +ax1 = nexttile(); +hold on; +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_hac_iff_vc_light_rigid('y', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_hac_iff_vc_light_rigid('y', 'xf'), f, 'Hz'))).^2)))), '-', ... + 'DisplayName', 'Rigid sample'); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_hac_iff_vc_light_stiff('y', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_hac_iff_vc_light_stiff('y', 'xf'), f, 'Hz'))).^2)))), '-', ... + 'DisplayName', 'Stiff $\omega_s = 200\,$Hz'); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_hac_iff_vc_light_soft('y', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_hac_iff_vc_light_soft('y', 'xf'), f, 'Hz'))).^2)))), '-', ... + 'DisplayName', 'Soft $\omega_s = 20\,$Hz'); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +xticks([1e0, 1e1, 1e2]); +ylabel('CAS of $y$ [m]'); xlabel('Frequency [Hz]'); +legend('location', 'southwest', 'FontSize', 8, 'NumColumns', 1); +title('$k_n = 0.01\,N/\mu m$'); + +ax2 = nexttile(); +hold on; +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_hac_iff_pz_light_rigid('y', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_hac_iff_pz_light_rigid('y', 'xf'), f, 'Hz'))).^2)))), '-'); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_hac_iff_pz_light_stiff('y', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_hac_iff_pz_light_stiff('y', 'xf'), f, 'Hz'))).^2)))), '-'); +plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_hac_iff_pz_light_soft('y', 'ft'), f, 'Hz'))).^2 + ... + psd_xf.*abs(squeeze(freqresp(G_hac_iff_pz_light_soft('y', 'xf'), f, 'Hz'))).^2)))), '-'); +hold off; +set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); +xticks([1e0, 1e1, 1e2]); +xlabel('Frequency [Hz]'); set(gca, 'YTickLabel',[]); +title('$k_n = 100\,N/\mu m$'); +xlim([1, 500]); + +linkaxes([ax1,ax2],'xy'); +xlim([1, 500]); +ylim([2e-10, 2e-7]) +#+end_src + +#+begin_src matlab :tangle no :exports results :results file raw silent +exportFig('figs/uniaxial_sample_flexibility_noise_budget_y.pdf', 'width', 'full', 'height', 'normal'); +#+end_src + +#+name: fig:uniaxial_sample_flexibility_noise_budget +#+caption: Cumulative Amplitude Spectrum of the distances $d$ and $y$. The effect of the sample's flexibility does not affects much $d$ but is detrimental to the stability of $y$. A sample mass $m_s = 1\,\text{kg}$ is used for the simulations. +#+begin_figure +#+attr_latex: :caption \subcaption{\label{fig:uniaxial_sample_flexibility_noise_budget_d}Cumulative Amplitude Spectrum of $d$} +#+attr_latex: :options {0.95\textwidth} +#+begin_subfigure +#+attr_latex: :scale 1 +[[file:figs/uniaxial_sample_flexibility_noise_budget_d.png]] +#+end_subfigure +#+attr_latex: :caption \subcaption{\label{fig:uniaxial_sample_flexibility_noise_budget_y}Cumulative Amplitude Spectrum of $y$} +#+attr_latex: :options {0.95\textwidth} +#+begin_subfigure +#+attr_latex: :scale 1 +[[file:figs/uniaxial_sample_flexibility_noise_budget_y.png]] +#+end_subfigure +#+end_figure + +** Conclusion +#+begin_important +Payload dynamics is usually a major concern when designing a positioning system. +For the NASS, the sample may present internal dynamics and limited fixation stiffness to the nano-hexapod platform. +On top of that, its mass can vary from 1kg up to 50kg which is a first challenge. + +This sample dynamics can add pole/zero or zero/pole pattern in the plant as shown in Section ref:ssec:uniaxial_payload_dynamics_effect_dynamics which may impact the stability and makes the design of the controller more complex. +However, it was shown that this issue is less critical if a stiff nano-hexapod is used. + +Having some flexibility between the measurement point and the point of interest (i.e. the sample point to be position on the x-ray) also degrades the position stability as shown in Section ref:ssec:uniaxial_payload_dynamics_effect_stability. + +It will be therefore important to take special care when designing sampling environments, especially is a soft nano-hexapod is used. +#+end_important + * Conclusion <> @@ -4179,7 +5605,12 @@ Finally, position feedback controllers have been developed for three considered These controllers were shown to be robust to the change of sample's masses, and to provide good rejection of disturbances. It has been found that having a soft nano-hexapod makes the plant dynamics easier to control (because decoupled from the micro-station dynamics) and requires less position feedback bandwidth to fulfill the requirements. The moderately stiff nano-hexapod ($k_n = 1\,N/\mu m$) is requiring a bit more position feedback bandwidth, but it still seems to give acceptable results. -However, the stiff nano-hexapod is the most complex to control and gives the worst positioning performances. +However, the stiff nano-hexapod is the most complex to control and gives the worst positioning performance. + +# TODO - Add summary table of advantages and disadvantages of nano-hexapod stiffnesses + +* Bibliography :ignore: +#+latex: \printbibliography[heading=bibintoc,title={Bibliography}] * Helping Functions :noexport: ** Initialize Path diff --git a/nass-uniaxial-model.pdf b/nass-uniaxial-model.pdf index 4226c81..86b6b4b 100644 Binary files a/nass-uniaxial-model.pdf and b/nass-uniaxial-model.pdf differ diff --git a/nass-uniaxial-model.tex b/nass-uniaxial-model.tex index 3e5af7f..9d789e9 100644 --- a/nass-uniaxial-model.tex +++ b/nass-uniaxial-model.tex @@ -1,32 +1,15 @@ -% Created 2023-02-20 Mon 10:57 +% Created 2023-06-30 Fri 20:00 % Intended LaTeX compiler: pdflatex -\documentclass[a4paper, 10pt, DIV=12, parskip=full]{scrreprt} -\usepackage[utf8]{inputenc} -\usepackage[T1]{fontenc} -\usepackage{graphicx} -\usepackage{grffile} -\usepackage{longtable} -\usepackage{wrapfig} -\usepackage{rotating} -\usepackage[normalem]{ulem} -\usepackage{amsmath} -\usepackage{textcomp} -\usepackage{amssymb} -\usepackage{capt-of} -\usepackage{hyperref} -\usepackage[most]{tcolorbox} -\usepackage{bm} -\usepackage{booktabs} -\usepackage{tabularx} -\usepackage{array} -\usepackage{siunitx} +\documentclass[a4paper, 10pt, DIV=12, parskip=full, bibliography=totoc]{scrreprt} + \input{preamble.tex} +\bibliography{nass-uniaxial-model.bib} \author{Dehaeze Thomas} \date{\today} -\title{NASS - Uniaxial Model} +\title{Nano Active Stabilization System - Uniaxial Model} \hypersetup{ pdfauthor={Dehaeze Thomas}, - pdftitle={NASS - Uniaxial Model}, + pdftitle={Nano Active Stabilization System - Uniaxial Model}, pdfkeywords={}, pdfsubject={}, pdfcreator={Emacs 28.2 (Org mode 9.5.2)}, @@ -48,21 +31,23 @@ In order to have a relevant model, the micro-station dynamics is first identifie Then, a model of the nano-hexapod is added on top of the micro-station. With added sample and sensors, this gives a uniaxial dynamical model of the NASS that will be used for further analysis (Section \ref{sec:nano_station_model}). -The disturbances affecting the position accuracy are identified experimentally (Section \ref{sec:uniaxial_disturbances}) and included in the model for dynamical noise budgeting (Section \ref{sec:uniaxial_noise_budgeting}). -In all the following analysis, there nano-hexapod stiffnesses are considered to better understand the trade-offs and to find the most adequate stiffness. +The disturbances affecting the position stability are identified experimentally (Section \ref{sec:uniaxial_disturbances}) and included in the model for dynamical noise budgeting (Section \ref{sec:uniaxial_noise_budgeting}). +In all the following analysis, there nano-hexapod stiffnesses are considered to better understand the trade-offs and to find the most adequate nano-hexapod design. Three sample masses are also considered to verify the robustness of the applied control strategies to a change of sample. Three active damping techniques are then applied on the nano-hexapod. This helps to reduce the effect of disturbances as well as render the system easier to control afterwards (Section \ref{sec:uniaxial_active_damping}). -Once the system is well damped, a feedback position controller is applied, and the obtained performances are compared (Section \ref{sec:uniaxial_position_control}). +Once the system is well damped, a feedback position controller is applied, and the obtained performance are compared (Section \ref{sec:uniaxial_position_control}). + +Two key effects that may limit that positioning performances are then considered: the limited micro-station compliance (Section \ref{sec:uniaxial_support_compliance}) and the presence of dynamics between the nano-hexapod and the sample's point of interest (Section \ref{sec:uniaxial_payload_dynamics}). Conclusion remarks are given in Section \ref{sec:conclusion}. \begin{table}[htbp] \caption{\label{tab:section_matlab_code}Report sections and corresponding Matlab files} \centering -\begin{tabularx}{0.5\linewidth}{lX} +\begin{tabularx}{0.6\linewidth}{lX} \toprule \textbf{Sections} & \textbf{Matlab File}\\ \midrule @@ -72,6 +57,8 @@ Section \ref{sec:uniaxial_disturbances} & \texttt{uniaxial\_3\_disturbances.m}\\ Section \ref{sec:uniaxial_noise_budgeting} & \texttt{uniaxial\_4\_dynamic\_noise\_budget.m}\\ Section \ref{sec:uniaxial_active_damping} & \texttt{uniaxial\_5\_active\_damping.m}\\ Section \ref{sec:uniaxial_position_control} & \texttt{uniaxial\_6\_hac\_lac.m}\\ +Section \ref{sec:uniaxial_support_compliance} & \texttt{uniaxial\_7\_support\_compliance}\\ +Section \ref{sec:uniaxial_payload_dynamics} & \texttt{uniaxial\_8\_payload\_dynamics}\\ \bottomrule \end{tabularx} \end{table} @@ -79,11 +66,10 @@ Section \ref{sec:uniaxial_position_control} & \texttt{uniaxial\_6\_hac\_lac.m}\\ \begin{figure}[htbp] \centering \includegraphics[scale=1]{figs/uniaxial_overview_model_sections.png} -\caption{\label{fig:uniaxial_overview_model_sections}Uniaxial Micro-Station model in blue (Section \ref{sec:micro_station_model}), Nano-Hexapod and sample models in red (Section \ref{sec:nano_station_model}), Disturbances in yellow (Section \ref{sec:uniaxial_disturbances}), Active Damping in green (Section \ref{sec:uniaxial_active_damping}) and Position control in purple (Section \ref{sec:uniaxial_position_control})} +\caption{\label{fig:uniaxial_overview_model_sections}Uniaxial Micro-Station model in blue (Section \ref{sec:micro_station_model}), Nano-Hexapod models in red (Section \ref{sec:nano_station_model}), Disturbances in yellow (Section \ref{sec:uniaxial_disturbances}), Active Damping in green (Section \ref{sec:uniaxial_active_damping}), Position control in purple (Section \ref{sec:uniaxial_position_control}) and Sample dynamics in cyan (Section \ref{sec:uniaxial_payload_dynamics})} \end{figure} \chapter{Micro Station Model} -\label{sec:org4e07986} \label{sec:micro_station_model} In this section, a uni-axial model of the micro-station is tuned in order to match measurements made on the micro-station The measurement setup is shown in Figure \ref{fig:micro_station_first_meas_dynamics} where several geophones are fixed to the micro-station and an instrumented hammer is used to inject forces on different stages of the micro-station. @@ -96,7 +82,6 @@ From the measured frequency response functions (FRF), the model can be tuned to \caption{\label{fig:micro_station_first_meas_dynamics}Experimental Setup for the first dynamical measurements on the Micro-Station. Geophones are fixed to the micro-station, and the granite as well as the micro-hexapod's top platform are impact with an instrumented hammer} \end{figure} \section{Measured dynamics} -\label{sec:org525a6c0} The measurement setup is schematically shown in Figure \ref{fig:micro_station_meas_dynamics_schematic} where: \begin{itemize} @@ -111,28 +96,26 @@ From the forces applied by the instrumented hammer and the responses of the geop \item from \(F_g\) to \(d_g\) \end{itemize} -\begin{figure}[htbp] -\centering -\includegraphics[scale=1]{figs/micro_station_meas_dynamics_schematic.png} -\caption{\label{fig:micro_station_meas_dynamics_schematic}Measurement setup - Schematic} +\begin{figure} +\begin{subfigure}{0.69\textwidth} +\begin{center} +\includegraphics[scale=1,scale=1]{figs/micro_station_meas_dynamics_schematic.png} +\end{center} +\subcaption{\label{fig:micro_station_meas_dynamics_schematic}Measurement setup - Schematic} +\end{subfigure} +\begin{subfigure}{0.29\textwidth} +\begin{center} +\includegraphics[scale=1,scale=1]{figs/uniaxial_model_micro_station.png} +\end{center} +\subcaption{\label{fig:uniaxial_model_micro_station}Uniaxial model of the micro-station} +\end{subfigure} +\caption{\label{fig:micro_station_uniaxial_model}Schematic of the Micro-Station measurement setup and uniaxial model.} \end{figure} -Due to the bad coherence at low frequency, the frequency response functions are only shown between 20 and 200Hz (Figure \ref{fig:uniaxial_measured_frf_vertical}). - -\begin{minted}[]{matlab} -%% Load measured FRF -load('meas_microstation_frf.mat'); -\end{minted} - -\begin{figure}[htbp] -\centering -\includegraphics[scale=1]{figs/uniaxial_measured_frf_vertical.png} -\caption{\label{fig:uniaxial_measured_frf_vertical}Measured Frequency Response Functions in the vertical direction} -\end{figure} +Due to the bad coherence at low frequency, the frequency response functions will only be shown between 20 and 200Hz (solid lines in Figure \ref{fig:uniaxial_comp_frf_meas_model}). \section{Uniaxial Model} -\label{sec:orge223677} -The uni-axial model of the micro-station is shown in Figure \ref{fig:uniaxial_comp_frf_meas_model}, with: +The uni-axial model of the micro-station is shown in Figure \ref{fig:uniaxial_model_micro_station}, with: \begin{itemize} \item Disturbances: \begin{itemize} @@ -143,39 +126,13 @@ The uni-axial model of the micro-station is shown in Figure \ref{fig:uniaxial_co \item Geophones: \(x_h\) and \(x_g\) \end{itemize} -\begin{figure}[htbp] -\centering -\includegraphics[scale=1]{figs/uniaxial_model_micro_station.png} -\caption{\label{fig:uniaxial_model_micro_station}Uniaxial model of the micro-station} -\end{figure} - Masses are estimated from the CAD. -\begin{minted}[]{matlab} -%% Parameters - Mass -mh = 15; % Micro Hexapod [kg] -mt = 1200; % Ty + Ry + Rz [kg] -mg = 2500; % Granite [kg] -\end{minted} - And stiffnesses from the data-sheet of stage manufacturers. -\begin{minted}[]{matlab} -%% Parameters - Stiffnesses -kh = 6.11e+07; % [N/m] -kt = 5.19e+08; % [N/m] -kg = 9.50e+08; % [N/m] -\end{minted} - The damping coefficients are tuned to match the identified damping from the measurements. -\begin{minted}[]{matlab} -%% Parameters - damping -ch = 2*0.05*sqrt(kh*mh); % [N/(m/s)] -ct = 2*0.05*sqrt(kt*mt); % [N/(m/s)] -cg = 2*0.08*sqrt(kg*mg); % [N/(m/s)] -\end{minted} - \section{Comparison of the model and measurements} -\label{sec:orgfa10aaa} -The comparison between the measurements and the model is done in Figure \ref{fig:uniaxial_comp_frf_meas_model}. +The comparison between the measurements and the model is shown in Figure \ref{fig:uniaxial_comp_frf_meas_model}. + +Only three modes are modelled with frequencies at 70Hz, 140Hz and 320Hz. As the model is simplistic, the goal is not to match exactly the measurement but to have a first approximation. More accurate models will be used later on. @@ -187,14 +144,13 @@ More accurate models will be used later on. \end{figure} \chapter{Nano-Hexapod Model} -\label{sec:org5ef4103} \label{sec:nano_station_model} A model of the nano-hexapod and sample is now added on top of the uni-axial model of the micro-station (Figure \ref{fig:uniaxial_model_micro_station-nass}). Disturbances (shown in red) are: \begin{itemize} \item \(f_s\): direct forces applied to the sample (for instance cable forces) -\item \(f_t\): disturbances coming from the imperfect stage scanning performances +\item \(f_t\): disturbances coming from the imperfect stage scanning performance \item \(x_f\): floor motion \end{itemize} @@ -209,7 +165,6 @@ The effect of having resonances between the sample's point of interest and the n \caption{\label{fig:uniaxial_model_micro_station-nass}Uni-axial model of the micro-station with added nano-hexapod (represented in blue) and sample (represented in green)} \end{figure} \section{Nano-Hexapod Parameters} -\label{sec:orge14d0af} The parameters for the nano-hexapod and sample are: \begin{itemize} \item \(m_s\) the sample mass that can vary from 1kg up to 50kg @@ -219,27 +174,18 @@ The parameters for the nano-hexapod and sample are: As a first example, let's choose a nano-hexapod stiffness of \(10\,N/\mu m\) and a sample mass of 10kg. -\begin{minted}[]{matlab} -%% Nano-Hexapod Parameters -mn = 15; % [kg] -kn = 1e7; % [N/m] -cn = 2*0.01*sqrt(mn*kn); % [N/(m/s)] - -%% Sample Mass -ms = 10; % [kg] -\end{minted} - -\section{Obtained Dynamics} -\label{sec:orgddb8cf5} +\section{Obtained Dynamic Response} The sensitivity to disturbances (i.e. \(x_f\), \(f_t\) and \(f_s\)) are shown in Figure \ref{fig:uniaxial_sensitivity_dist_first_params}. The \emph{plant} (i.e. the transfer function from actuator force \(f\) to measured displacement \(d\)) is shown in Figure \ref{fig:uniaxial_plant_first_params}. +\begin{important} For further analysis, 9 configurations are considered: three nano-hexapod stiffnesses (\(k_n = 0.01\,N/\mu m\), \(k_n = 1\,N/\mu m\) and \(k_n = 100\,N/\mu m\)) combined with three sample's masses (\(m_s = 1\,kg\), \(m_s = 25\,kg\) and \(m_s = 50\,kg\)). +\end{important} \begin{figure}[htbp] \centering \includegraphics[scale=1]{figs/uniaxial_sensitivity_dist_first_params.png} -\caption{\label{fig:uniaxial_sensitivity_dist_first_params}Sensitivity to disturbances} +\caption{\label{fig:uniaxial_sensitivity_dist_first_params}Sensitivity of the relative motion \(d\) to disturbances: \(f_s\) the direct forces applied on the sample, \(f_t\) disturbances from the micro-station stages and \(x_f\) the floor motion (from left to right)} \end{figure} \begin{figure}[htbp] @@ -248,7 +194,6 @@ For further analysis, 9 configurations are considered: three nano-hexapod stiffn \caption{\label{fig:uniaxial_plant_first_params}Bode Plot of the transfer function from actuator forces to measured displacement by the metrology} \end{figure} \chapter{Disturbance Identification} -\label{sec:org2036233} \label{sec:uniaxial_disturbances} In order to measure disturbances, two geophones are used, on located on the floor and on on the micro-hexapod's top platform (see Figure \ref{fig:micro_station_meas_disturbances}). @@ -266,42 +211,11 @@ The geophone on the floor is used to measured the floor motion \(x_f\) while the \caption{\label{fig:micro_station_dynamical_id_setup}Two geophones are used to measure the micro-station vibrations induced by the scanning of the \(T_y\) and \(R_z\) stages} \end{figure} \section{Ground Motion} -\label{sec:org931b2ea} The geophone fixed to the floor to measure the floor motion. -\begin{minted}[]{matlab} -%% Load floor motion data -% t: time in [s] -% V: measured voltage genrated by the geophone and amplified by a 60dB gain voltage amplifier [V] -load('ground_motion_measurement.mat', 't', 'V'); -\end{minted} - The voltage generated by each geophone is amplified using a voltage amplifier (gain of 60dB) before going to the ADC. The sensitivity of the geophone as well as the gain of the voltage amplifier are then taken into account to reconstruct the floor displacement. -\begin{minted}[]{matlab} -%% Sensitivity of the geophone -S0 = 88; % Sensitivity [V/(m/s)] -f0 = 2; % Cut-off frequency [Hz] - -S = S0*(s/2/pi/f0)/(1+s/2/pi/f0); % Geophone's transfer function [V/(m/s)] - -%% Gain of the voltage amplifier -G0_db = 60; % [dB] -G0 = 10^(G0_db/20); % [abs] - -%% Transfer function from measured voltage to displacement -G_geo = 1/S/G0/s; % [m/V] -\end{minted} - The PSD \(S_{V_f}\) of the measured voltage \(V_f\) is computed. -\begin{minted}[]{matlab} -%% Compute measured voltage PSD -Fs = 1/(t(2)-t(1)); % Sampling Frequency [Hz] -win = hanning(ceil(2*Fs)); % Hanning window - -[psd_V, f] = pwelch(V, win, [], [], Fs); % [V^2/Hz] -\end{minted} - The PSD of the corresponding displacement can be computed as follows: \begin{equation} S_{x_f}(\omega) = \frac{S_{V_f}(\omega)}{|S_{\text{geo}}(j\omega)| \cdot G_{\text{amp}} \cdot \omega} @@ -313,49 +227,25 @@ with: \item \(\omega\) is here to integrate and have the displacement instead of the velocity \end{itemize} -\begin{minted}[]{matlab} -%% Ground Motion ASD -psd_xf = psd_V.*abs(squeeze(freqresp(G_geo, f, 'Hz'))).^2; % [m^2/Hz] -\end{minted} - The amplitude spectral density \(\Gamma_{x_f}\) of the measured displacement \(x_f\) is shown in Figure \ref{fig:asd_floor_motion_id31}. \begin{figure}[htbp] \centering \includegraphics[scale=1]{figs/asd_floor_motion_id31.png} -\caption{\label{fig:asd_floor_motion_id31}Measured Amplitude Spectral Density of the Floor motion on ID31} +\caption{\label{fig:asd_floor_motion_id31}Amplitude Spectral Density of the measured Floor motion on ID31} \end{figure} \section{Stage Vibration} -\label{sec:orga7b3779} During Spindle rotation (here at 6rpm), the granite velocity and micro-hexapod's top platform velocity are measured with the geophones. -\begin{minted}[]{matlab} -%% Measured velocity of granite and hexapod during spindle rotation -% t: time in [s] -% vg: measured granite velocity [m/s] -% vg: measured micro-hexapod's top platform velocity [m/s] -load('meas_spindle_on.mat', 't', 'vg', 'vh'); -spindle_off = load('meas_spindle_off.mat', 't', 'vg', 'vh'); % No Rotation -\end{minted} - The Power Spectral Density of the relative velocity between the hexapod and the granite is computed. -\begin{minted}[]{matlab} -%% Compute Power Spectral Density of the relative velocity between granite and hexapod during spindle rotation -Fs = 1/(t(2)-t(1)); % Sampling Frequency [Hz] -win = hanning(ceil(2*Fs)); % Hanning window - -[psd_vft, f] = pwelch(vh-vg, win, [], [], Fs); % [(m/s)^2/Hz] -[psd_off, ~] = pwelch(spindle_off.vh-spindle_off.vg, win, [], [], Fs); % [(m/s)^2/Hz] -\end{minted} - It is then integrated to obtain the Amplitude Spectral Density of the relative motion which is compared with a non-rotating case (Figure \ref{fig:asd_vibration_spindle_rotation}). It is shown that the spindle rotation induces vibrations in a wide frequency spectrum. \begin{figure}[htbp] \centering \includegraphics[scale=1]{figs/asd_vibration_spindle_rotation.png} -\caption{\label{fig:asd_vibration_spindle_rotation}Measured Amplitude Spectral Density of the relative motion between the granite and the micro-hexapod's top platform during Spindle rotating} +\caption{\label{fig:asd_vibration_spindle_rotation}Amplitude Spectral Density of the relative motion measured between the granite and the micro-hexapod's top platform during Spindle rotating} \end{figure} In order to compute the equivalent disturbance force \(f_t\) that induces such motion, the transfer function from \(f_t\) to the relative motion of the hexapod's top platform and the granite is extracted from the model. @@ -376,18 +266,16 @@ The obtained amplitude spectral density of the disturbance force \(f_t\) is show \caption{\label{fig:asd_disturbance_force}Estimated disturbance force ft from measurement and uniaxial model} \end{figure} -The vibrations induced by the \(T_y\) stage are not considered here as: +The vibrations induced by the \(T_y\) stage are not considered here because: \begin{itemize} \item the induced vibrations have less amplitude than the vibrations induced by the \(R_z\) stage \item it can be scanned at lower velocities if the induced vibrations are an issue \end{itemize} \chapter{Open-Loop Dynamic Noise Budgeting} -\label{sec:org11bfa6e} \label{sec:uniaxial_noise_budgeting} Now that we have a model of the NASS and an estimation of the power spectral density of the disturbances, it is possible to perform an \emph{open-loop dynamic noise budgeting}. \section{Sensitivity to disturbances} -\label{sec:org469c500} From the Uni-axial model, the transfer function from the disturbances (\(f_s\), \(x_f\) and \(f_t\)) to the displacement \(d\) are computed. This is done for \textbf{two extreme sample masses} \(m_s = 1\,\text{kg}\) and \(m_s = 50\,\text{kg}\) and \textbf{three nano-hexapod stiffnesses}: @@ -400,11 +288,11 @@ This is done for \textbf{two extreme sample masses} \(m_s = 1\,\text{kg}\) and \ The obtained sensitivity to disturbances for the three nano-hexapod stiffnesses are shown in Figure \ref{fig:uniaxial_sensitivity_disturbances_nano_hexapod_stiffnesses} for the light sample (same conclusions can be drawn with the heavy one). \begin{important} -From Figure \ref{fig:uniaxial_sensitivity_disturbances_nano_hexapod_stiffnesses}, following can be concluded for the \textbf{soft nano-hexapod}: +From Figure \ref{fig:uniaxial_sensitivity_disturbances_nano_hexapod_stiffnesses}, the following can be concluded for the \textbf{soft nano-hexapod}: \begin{itemize} \item It is more sensitive to forces applied on the sample (cable forces for instance), which is expected due to the lower stiffness \item Between the suspension mode of the nano-hexapod (here at 5Hz) and the first mode of the micro-station (here at 70Hz), the disturbances induced by the stage vibrations are filtered out. -\item Above the suspension mode of the nano-hexapod, the sample's motion is unaffected by the floor motion, and therefore the sensitivity to floor motion is almost \(1\). +\item Above the suspension mode of the nano-hexapod, the sample's motion is unaffected by the floor motion, and therefore the sensitivity to floor motion is close to \(1\). \end{itemize} \end{important} @@ -415,7 +303,6 @@ From Figure \ref{fig:uniaxial_sensitivity_disturbances_nano_hexapod_stiffnesses} \end{figure} \section{Open-Loop Dynamic Noise Budgeting} -\label{sec:org99b18ec} Now, the power spectral density of the disturbances is taken into account to estimate the residual motion \(d\) in each case. The Cumulative Amplitude Spectrum of the relative motion \(d\) due to both the floor motion \(x_f\) and the stage vibrations \(f_t\) are shown in Figure \ref{fig:uniaxial_cas_d_disturbances_stiffnesses} for the three nano-hexapod stiffnesses. @@ -438,30 +325,31 @@ The conclusion is that the sample's mass has little effect on the cumulative amp \end{figure} \section{Conclusion} -\label{sec:org6160aae} + \begin{important} -The conclusion is that in order to have a closed-loop residual vibration \(d \approx 20\,nm\text{ rms}\), if a simple feedback controller is used, the required closed-loop bandwidth would be: +In order to have a closed-loop residual vibration \(d \approx 20\,nm\text{ rms}\), if a simple feedback controller is used, the required closed-loop bandwidth would be: \begin{itemize} \item \(\approx 10\,\text{Hz}\) for the soft nano-hexapod (\(k_n = 0.01\,N/\mu m\)) \item \(\approx 50\,\text{Hz}\) for the relatively stiff nano-hexapod (\(k_n = 1\,N/\mu m\)) \item \(\approx 100\,\text{Hz}\) for the stiff nano-hexapod (\(k_n = 100\,N/\mu m\)) \end{itemize} -This can be explain by the fact that above the suspension mode of the nano-hexapod, the stage vibrations are filtered out (see Figure \ref{fig:uniaxial_sensitivity_disturbances_nano_hexapod_stiffnesses}). +This can be explained by the fact that for frequencies larger than the suspension mode of the nano-hexapod, the stage vibrations are filtered out (see Figure \ref{fig:uniaxial_sensitivity_disturbances_nano_hexapod_stiffnesses}). This gives a first advantage to having a soft nano-hexapod. \end{important} \chapter{Active Damping} -\label{sec:orgc25f9e5} \label{sec:uniaxial_active_damping} -In this section, three active damping are applied on the nano-hexapod (see Figure \ref{fig:uniaxial_active_damping_strategies}): Integral Force Feedback (IFF), Relative Damping Control (RDC) and Direct Velocity Feedback (DVF). +In this section, three active damping are applied on the nano-hexapod (see Figure \ref{fig:uniaxial_active_damping_strategies}): Integral Force Feedback (IFF) \cite{preumont91_activ}, Relative Damping Control (RDC) \cite[Chapter 7.2]{preumont18_vibrat_contr_activ_struc_fourt_edition} and Direct Velocity Feedback (DVF) \cite{karnopp74_vibrat_contr_using_semi_activ_force_gener,serrand00_multic_feedb_contr_isolat_base_excit_vibrat,preumont02_force_feedb_versus_accel_feedb}. + +These damping strategies will be described in Section \ref{ssec:uniaxial_active_damping_strategies}. These active damping techniques are compared in terms of: \begin{itemize} -\item Reduction of the effect of disturbances (i.e. \(x_f\), \(f_t\) and \(f_s\)) on the displacement \(d\) -\item Achievable damping -\item Robustness to a change of sample's mass +\item Achievable damping of the nano-hexapod mode (Section \ref{ssec:uniaxial_active_damping_achievable_damping}) +\item Reduction of the effect of disturbances (i.e. \(x_f\), \(f_t\) and \(f_s\)) on the displacement \(d\) (Sections \ref{ssec:uniaxial_active_damping_sensitivity_disturbances} and \ref{ssec:uniaxial_active_damping_noise_budget}) +\item Robustness to a change of sample's mass (Section \ref{ssec:uniaxial_active_damping_robustness}) \end{itemize} \begin{figure}[htbp] @@ -470,13 +358,13 @@ These active damping techniques are compared in terms of: \caption{\label{fig:uniaxial_active_damping_strategies}Three active damping strategies: Integral Force Feedback (IFF) using a force sensor, Relative Damping Control (RDC) using a relative displacement sensor, and Direct Velocity Feedback (DVF) using a geophone} \end{figure} \section{Active Damping Strategies} -\label{sec:org224d0f3} - +\label{ssec:uniaxial_active_damping_strategies} +\paragraph{Integral Force Feedback (IFF)} The Integral Force Feedback strategy consists of using a force sensor in series with the actuator (see Figure \ref{fig:uniaxial_active_damping_iff_equiv}, left). The control strategy consists of integrating the measured force and feeding it back to the actuator: \begin{equation} -K_{\text{IFF}}(s) = \frac{g}{s} +\boxed{K_{\text{IFF}}(s) = \frac{g}{s}} \end{equation} The mechanical equivalent of this strategy is to add a dashpot in series with the actuator stiffness with a damping coefficient equal to the stiffness of the actuator divided by the controller gain \(k/g\) (see Figure \ref{fig:uniaxial_active_damping_iff_equiv}, right). @@ -488,11 +376,12 @@ The mechanical equivalent of this strategy is to add a dashpot in series with th \end{figure} +\paragraph{Relative Damping Control (RDC)} For the Relative Damping Control strategy, a relative motion sensor that measures the motion of the actuator is used (see Figure \ref{fig:uniaxial_active_damping_rdc_equiv}, left). The derivative of this relative motion is used for the feedback signal: \begin{equation} -K_{\text{RDC}}(s) = - g \cdot s +\boxed{K_{\text{RDC}}(s) = - g \cdot s} \end{equation} The mechanical equivalent is to add a dashpot in parallel with the actuator with a damping coefficient equal to the controller gain \(g\) (see Figure \ref{fig:uniaxial_active_damping_rdc_equiv}, right). @@ -503,11 +392,12 @@ The mechanical equivalent is to add a dashpot in parallel with the actuator with \caption{\label{fig:uniaxial_active_damping_rdc_equiv}Relative Damping Control is equivalent as adding a damper in parallel with the actuator/relative motion sensor} \end{figure} +\paragraph{Direct Velocity Feedback (DVF)} Finally, the Direct Velocity Feedback strategy consists of using an inertial sensor (usually a geophone), that measured the ``absolute'' velocity of the body fixed on top of the actuator (se Figure \ref{fig:uniaxial_active_damping_dvf_equiv}, left). The measured velocity is then fed back to the actuator: \begin{equation} -K_{\text{DVF}}(s) = - g +\boxed{K_{\text{DVF}}(s) = - g} \end{equation} This is equivalent as to fix a dashpot (with a damping coefficient equal to the controller gain \(g\)) between the body (one which the inertial sensor is fixed) and an inertial reference frame (see Figure \ref{fig:uniaxial_active_damping_dvf_equiv}, right). @@ -520,13 +410,13 @@ This is usually refers to as ``\emph{sky hook damper}''. \end{figure} \section{Plant Dynamics for Active Damping} -\label{sec:orga11bdaf} The plant dynamics for all three active damping techniques are shown in Figure \ref{fig:uniaxial_plant_active_damping_techniques}. -All have \textbf{alternating poles and zeros} meaning that the phase is bounded to \(\pm 90\,\text{deg}\) which makes the controller very robust. +All have \textbf{alternating poles and zeros} meaning that the phase do not vary by more than \(\pm 90\,\text{deg}\) which makes the design of a robust controller very easy. +The reason all three plants in Figure \ref{fig:uniaxial_plant_active_damping_techniques} have alternating poles and zeros is because the three sensors are all collocated with the actuator \cite[Chapter 7]{preumont18_vibrat_contr_activ_struc_fourt_edition}. -When the nano-hexapod's suspension modes are at lower frequencies than the resonances of the micro-station (blue and red curves in Figure \ref{fig:uniaxial_plant_active_damping_techniques}), the resonances of the micro-stations have little impact on the transfer functions from IFF and DVF. +When the nano-hexapod's suspension modes are at lower frequencies than the resonances of the micro-station (blue and red curves in Figure \ref{fig:uniaxial_plant_active_damping_techniques}), the resonances of the micro-stations have little impact on the IFF and DVF transfer functions. -For the stiff nano-hexapod, the micro-station dynamics can be seen on the transfer functions in Figure \ref{fig:uniaxial_plant_active_damping_techniques}. +For the stiff nano-hexapod (yellow curves), the micro-station dynamics can be seen on the transfer functions in Figure \ref{fig:uniaxial_plant_active_damping_techniques}. Therefore, it is expected that the micro-station dynamics might impact the achievable damping if a stiff nano-hexapod is used. \begin{figure}[htbp] @@ -536,29 +426,36 @@ Therefore, it is expected that the micro-station dynamics might impact the achie \end{figure} \section{Achievable Damping - Root Locus} -\label{sec:org682230b} +\label{ssec:uniaxial_active_damping_achievable_damping} The Root Locus are computed for the three nano-hexapod stiffnesses and for the three active damping techniques. They are shown in Figure \ref{fig:uniaxial_root_locus_damping_techniques}. All three active damping approach can lead to \textbf{critical damping} of the nano-hexapod suspension mode. -There is even a little bit of authority on micro-station modes with IFF and DVF applied on the stiff nano-hexapod (Figure \ref{fig:uniaxial_root_locus_damping_techniques}, right) and with RDC for a soft nano-hexapod (Figure \ref{fig:uniaxial_root_locus_damping_techniques_micro_station_mode}). -This can be explained by the fact that above the suspension mode of the soft nano-hexapod, the relative motion sensor acts as an inertial sensor for the micro-station top platform. Therefore, it is like DVF was applied (the nano-hexapod acts as a geophone!). +There is even some damping authority on micro-station modes in the following cases: +\begin{description} +\item[{IFF with a stiff nano-hexapod (Figure \ref{fig:uniaxial_root_locus_damping_techniques}, right)}] This can be understood from the mechanical equivalent of IFF shown in Figure \ref{fig:uniaxial_active_damping_iff_equiv} (right) considering an high stiffness \(k\). +The micro-station top platform is connected to an inertial mass (the nano-hexapod) through a damper, which damps the micro-station suspension suspension mode. +\item[{DVF with a stiff nano-hexapod (Figure \ref{fig:uniaxial_root_locus_damping_techniques}, right)}] In that case, the ``sky hook damper'' (see mechanical equivalent of IFF in Figure \ref{fig:uniaxial_active_damping_dvf_equiv}, right) is connected to the micro-station top platform through the stiff nano-hexapod. +\item[{RDC with a soft nano-hexapod (Figure \ref{fig:uniaxial_root_locus_damping_techniques_micro_station_mode})}] At the frequency of the micro-station mode, the nano-hexapod top mass is behaving as an inertial reference as the suspension mode of the soft nano-hexapod is at much lower frequency. +The micro-station and the nano-hexapod masses are connected through a large damper induced by RDC (see mechanical equivalent in Figure \ref{fig:uniaxial_active_damping_rdc_equiv}, right) which allows some damping of the micro-station. +\end{description} \begin{figure}[htbp] \centering \includegraphics[scale=1]{figs/uniaxial_root_locus_damping_techniques.png} -\caption{\label{fig:uniaxial_root_locus_damping_techniques}Root Loci for the three active damping techniques (IFF in blue, RDC in red and DVF in yellow). This is shown for three nano-hexapod stiffnesses.} +\caption{\label{fig:uniaxial_root_locus_damping_techniques}Root Loci for the three active damping techniques (IFF in blue, RDC in red and DVF in yellow). This is shown for three nano-hexapod stiffnesses. The Root Loci are zoomed on the suspension mode of the nano-hexapod.} \end{figure} \begin{figure}[htbp] \centering \includegraphics[scale=1]{figs/uniaxial_root_locus_damping_techniques_micro_station_mode.png} -\caption{\label{fig:uniaxial_root_locus_damping_techniques_micro_station_mode}Root Locus for the three damping techniques. It is shown that the RDC active damping technique has some authority on one mode of the micro-station. This mode corresponds to the suspension mode of the micro-hexapod.} +\caption{\label{fig:uniaxial_root_locus_damping_techniques_micro_station_mode}Root Locus for the three damping techniques applied with the soft nano-hexapod. It is shown that the RDC active damping technique has some authority on one mode of the micro-station. This mode corresponds to the suspension mode of the micro-hexapod.} \end{figure} \section{Change of sensitivity to disturbances} -\label{sec:org240dd20} +\label{ssec:uniaxial_active_damping_sensitivity_disturbances} + The sensitivity to disturbances (direct forces \(f_s\), stage vibrations \(f_t\) and floor motion \(x_f\)) for all three active damping techniques are compared in Figure \ref{fig:uniaxial_sensitivity_dist_active_damping}. The comparison is done with the nano-hexapod having a stiffness \(k_n = 1\,N/\mu m\). @@ -578,11 +475,11 @@ Conclusions from Figure \ref{fig:uniaxial_sensitivity_dist_active_damping} are: \end{figure} \section{Noise Budgeting after Active Damping} -\label{sec:org59aa5fa} +\label{ssec:uniaxial_active_damping_noise_budget} Cumulative Amplitude Spectrum of the distance \(d\) with all three active damping techniques are compared in Figure \ref{fig:uniaxial_cas_active_damping}. All three active damping methods are giving similar results (except the RDC which is a little bit worse for the stiff nano-hexapod). -Compare to the open-loop case, the active damping helps to lower the vibrations induced by the nano-hexapod resonance. +Compared to the open-loop case, the active damping helps to lower the vibrations induced by the nano-hexapod resonance. \begin{figure}[htbp] \centering @@ -590,8 +487,7 @@ Compare to the open-loop case, the active damping helps to lower the vibrations \caption{\label{fig:uniaxial_cas_active_damping}Comparison of the cumulative amplitude spectrum (CAS) of the distance \(d\) for all three active damping techniques (OL in black, IFF in blue, RDC in red and DVF in yellow).} \end{figure} -\section{Obtained Damped Plant} -\label{sec:org534205b} +\section{Obtained Closed Loop Response} The transfer functions from the plant input \(f\) to the relative displacement \(d\) while the active damping is implemented are shown in Figure \ref{fig:uniaxial_damped_plant_three_active_damping_techniques}. All three active damping techniques yield similar damped plants. @@ -609,7 +505,8 @@ The damped plants are shown in Figure \ref{fig:uniaxial_damped_plant_change_samp \end{figure} \section{Robustness to change of payload's mass} -\label{sec:org1194b7f} +\label{ssec:uniaxial_active_damping_robustness} + The Root Locus for the three damping techniques are shown in Figure \ref{fig:uniaxial_active_damping_robustness_mass_root_locus} for three sample's mass (1kg, 25kg and 50kg). The closed-loop poles are shown by the squares for a specific gain. @@ -622,7 +519,6 @@ We can see that having heavier samples yields larger damping for IFF and smaller \end{figure} \section{Conclusion} -\label{sec:orgd9c89ae} \begin{important} Conclusions for Active Damping: @@ -637,7 +533,7 @@ Conclusions for Active Damping: \caption{\label{tab:comp_active_damping}Comparison of active damping strategies} \centering \scriptsize -\begin{tabularx}{\linewidth}{Xccc} +\begin{tabularx}{0.9\linewidth}{Xccc} \toprule & \textbf{IFF} & \textbf{RDC} & \textbf{DVF}\\ \midrule @@ -655,17 +551,16 @@ Conclusions for Active Damping: \end{table} \chapter{Position Feedback Controller} -\label{sec:orgb8f8fbb} \label{sec:uniaxial_position_control} The High Authority Control - Low Authority Control (HAC-LAC) architecture is shown in Figure \ref{fig:uniaxial_hac_lac_architecture}. It corresponds to a \emph{two step} control strategy: \begin{itemize} \item First, an active damping controller \(\bm{K}_{\textsc{LAC}}\) is implemented (see Section \ref{sec:uniaxial_active_damping}). It allows to reduce the vibration level, and it also makes the damped plant (transfer function from \(u^{\prime}\) to \(y\)) easier to control than the undamped plant (transfer function from \(u\) to \(y\)). -\item Then, a position controller \(\bm{K}_{\textsc{HAC}}\) is implemented. +\item Then, a position controller \(\bm{K}_{\textsc{HAC}}\) is implemented which is used to control the position \(d\). \end{itemize} -Combined with the uniaxial model, it is shown in Figure \ref{fig:uniaxial_hac_lac_model}. +When applied on the uniaxial model with IFF used as the Low Authority Control, the schematic shown in Figure \ref{fig:uniaxial_hac_lac_model} is obtained. \begin{figure} \begin{subfigure}{0.54\textwidth} @@ -678,16 +573,22 @@ Combined with the uniaxial model, it is shown in Figure \ref{fig:uniaxial_hac_la \begin{center} \includegraphics[scale=1,scale=1]{figs/uniaxial_hac_lac_model.png} \end{center} -\subcaption{\label{fig:uniaxial_hac_lac_model}Uniaxial model with HAC-LAC strategy} +\subcaption{\label{fig:uniaxial_hac_lac_model}Uniaxial model with HAC-IFF strategy} \end{subfigure} \caption{\label{fig:uniaxial_hac_lac}High Authority Control - Low Authority Control (HAC-LAC)} \end{figure} \section{Damped Plant Dynamics} -\label{sec:orge78415e} +\label{ssec:uniaxial_position_control_damped_dynamics} + As was shown in Section \ref{sec:uniaxial_active_damping}, all three proposed active damping techniques yield similar damping plants. -Therefore, \emph{Integral Force Feedback} will be used in this section to study the HAC-LAC performances. +Therefore, \emph{Integral Force Feedback} will be used in this section to study the HAC-LAC performance. The obtained damped plants for the three nano-hexapod stiffnesses are shown in Figure \ref{fig:uniaxial_hac_iff_damped_plants_masses}. +For \(k_n = 0.01\,N/\mu m\) and \(k_n = 1\,N/\mu m\), except from the nano-hexapod mode, the dynamics is quite simple and can be well approximated by a second order plant. +However, this is not the case for the stiff nano-hexapod (\(k_n = 100\,N/\mu m\)) where two modes can be seen (Figure \ref{fig:uniaxial_hac_iff_damped_plants_masses}, right). + +This is due to the interaction between the micro-station (modelled modes at 70Hz, 140Hz and 320Hz) and the nano-hexapod. +Such effect will be explained in Section \ref{sec:uniaxial_support_compliance}. \begin{figure}[htbp] \centering @@ -696,15 +597,16 @@ The obtained damped plants for the three nano-hexapod stiffnesses are shown in F \end{figure} \section{Position Feedback Controller} -\label{sec:orgbfebc9e} +\label{ssec:uniaxial_position_control_design} + The objective now is to design a position feedback controller for each of the three nano-hexapods that are robust to the change of sample's mass. -The required feedback bandwidth was approximately determined un Section \ref{sec:uniaxial_noise_budgeting}: +The required feedback bandwidth was approximately determined in Section \ref{sec:uniaxial_noise_budgeting}: \begin{itemize} \item \(\approx 10\,\text{Hz}\) for the soft nano-hexapod (\(k_n = 0.01\,N/\mu m\)). Near this frequency, the plants are equivalent to a mass line. The gain of the mass line can vary up to a fact \(\approx 5\) (suspended mass from \(16\,kg\) up to \(65\,kg\)). -This mean that the designed controller will need to have large gain margins to be robust to the change of sample's mass. +This means that the designed controller will need to have large gain margins to be robust to the change of sample's mass. \item \(\approx 50\,\text{Hz}\) for the relatively stiff nano-hexapod (\(k_n = 1\,N/\mu m\)). Similarly to the soft nano-hexapod, the plants near the crossover frequency are equivalent to a mass line. It will be probably easier to have a little bit more bandwidth in this configuration to be further away from the nano-hexapod suspension mode. @@ -717,7 +619,41 @@ This makes the robust design of the controller a little bit more complicated. Position feedback controllers are designed for each nano-hexapod such that it is stable for all considered sample masses with similar stability margins (see Nyquist plots in Figure \ref{fig:uniaxial_nyquist_hac}). -These high authority controllers are generally composed of a two integrators at low frequency for disturbance rejection, a lead to increase the phase margin near the crossover frequency and a low pass filter to increase the robustness to high frequency dynamics. +These high authority controllers are generally composed of a lag at low frequency for disturbance rejection, a lead to increase the phase margin near the crossover frequency and a low pass filter to increase the robustness to high frequency dynamics. +The controllers used for the three nano-hexapod are shown in Equation \eqref{eq:uniaxial_hac_formulas}, and the parameters are summarized in Table \ref{tab:uniaxial_feedback_controller_parameters}. + +\begin{subequations} \label{eq:uniaxial_hac_formulas} +\begin{align} +K_{\text{soft}}(s) &= g \cdot + \underbrace{\frac{s + \omega_0}{s + \omega_i}}_{\text{lag}} \cdot + \underbrace{\frac{1 + \frac{s}{\omega_c/\sqrt{a}}}{1 + \frac{s}{\omega_c \sqrt{a}}}}_{\text{lead}} \cdot + \underbrace{\frac{1}{1 + \frac{s}{\omega_l}}}_{\text{LPF}} \\ +K_{\text{mid}}(s) &= g \cdot + \underbrace{\left(\frac{s + \omega_0}{s + \omega_i}\right)^2}_{\text{2 lags}} \cdot + \underbrace{\frac{1 + \frac{s}{\omega_c/\sqrt{a}}}{1 + \frac{s}{\omega_c \sqrt{a}}}}_{\text{lead}} \cdot + \underbrace{\frac{1}{1 + \frac{s}{\omega_l}}}_{\text{LPF}} \\ +K_{\text{stiff}}(s) &= g \cdot + \underbrace{\left(\frac{1}{s + \omega_i}\right)^2}_{\text{2 lags}} \cdot + \underbrace{\left(\frac{1 + \frac{s}{\omega_c/\sqrt{a}}}{1 + \frac{s}{\omega_c \sqrt{a}}}\right)^2}_{\text{2 leads}} \cdot + \underbrace{\frac{1}{1 + \frac{s}{\omega_l}}}_{\text{LPF}} +\end{align} +\end{subequations} + +\begin{table}[htbp] +\caption{\label{tab:uniaxial_feedback_controller_parameters}Parameters used for the position feedback controllers} +\centering +\begin{tabularx}{\linewidth}{lXXX} +\toprule + & \textbf{Soft} & \textbf{Moderately stiff} & \textbf{Stiff}\\ +\midrule +\textbf{Gain} & \(g = 4 \cdot 10^5\) & \(g = 3 \cdot 10^6\) & \(g = 6 \cdot 10^12\)\\ +\textbf{Lead} & \(a = 5\), \(\omega_c = 20\,Hz\) & \(a = 4\), \(\omega_c = 70\,Hz\) & \(a = 5\), \(\omega_c = 100\,Hz\)\\ +\textbf{Lag} & \(\omega_0 = 5\,Hz\), \(\omega_i = 0.01\,Hz\) & \(\omega_0 = 20\,Hz\), \(\omega_i = 0.01\,Hz\) & \(\omega_i = 0.01\,Hz\)\\ +\textbf{LPF} & \(\omega_l = 200\,Hz\) & \(\omega_l = 300\,Hz\) & \(\omega_l = 500\,Hz\)\\ +\bottomrule +\end{tabularx} +\end{table} + The loop gains for the three nano-hexapod are shown in Figure \ref{fig:uniaxial_loop_gain_hac}. We can see that: \begin{itemize} @@ -727,8 +663,8 @@ This is due to the fact that the crossover frequency corresponds to the mass lin The crossover frequency in that case is close to the stiffness line of the plant, which makes the robust design of the controller easier. \end{itemize} -Note that these controller were quickly tuned by hand and not designed using any optimization methods. -The goal is just to have a first estimation of the attainable performances. +Note that these controllers were quickly tuned by hand and not designed using any optimization methods. +The goal is just to have a first estimation of the attainable performance. \begin{figure}[htbp] \centering @@ -743,7 +679,8 @@ The goal is just to have a first estimation of the attainable performances. \end{figure} \section{Closed-Loop Noise Budgeting} -\label{sec:org6f05561} +\label{ssec:uniaxial_position_control_cl_noise_budget} + The high authority position feedback controllers are then implemented and the closed-loop sensitivity to disturbances are computed. These are compared with the open-loop and damped plants cases in Figure \ref{fig:uniaxial_sensitivity_dist_hac_lac} for just one configuration (moderately stiff nano-hexapod with 25kg sample's mass). As expected, the sensitivity to disturbances is decreased in the controller bandwidth and slightly increase outside this bandwidth. @@ -751,7 +688,7 @@ As expected, the sensitivity to disturbances is decreased in the controller band \begin{figure}[htbp] \centering \includegraphics[scale=1]{figs/uniaxial_sensitivity_dist_hac_lac.png} -\caption{\label{fig:uniaxial_sensitivity_dist_hac_lac}Change of sensitivity to disturbances with LAC and with HAC-LAC} +\caption{\label{fig:uniaxial_sensitivity_dist_hac_lac}Change of sensitivity to disturbances with LAC and with HAC-LAC. Nano-Hexapod with \(k_n = 1\,N/\mu m\) and sample mass of \(25\,kg\) are used.} \end{figure} The cumulative amplitude spectrum of the motion \(d\) is computed for all nano-hexapod configurations, all sample masses and in the open-loop (OL), damped (IFF) and position controlled (HAC-IFF) cases. @@ -764,8 +701,241 @@ Obtained root mean square values of the distance \(d\) are better for the soft n \caption{\label{fig:uniaxial_cas_hac_lac}Cumulative Amplitude Spectrum for all three nano-hexapod stiffnesses - Comparison of OL, IFF and HAC-LAC cases} \end{figure} +\section{Conclusion} +\begin{important} +Based on the open-loop noise budgeting made in Section \ref{sec:uniaxial_noise_budgeting}, the closed-loop bandwidth required to obtain acceptable vibration levels was estimated. +In order to obtain such bandwidth, the HAC-LAC strategy was followed which consists of applying an active damping controller and then a high authority position feedback controller. + +In this section, feedback controllers were design in such a way that the required closed-loop bandwidth was reached while being robust to a change of payload mass. +The attainable vibration control performances were estimated for the three nano-hexapod stiffnesses and were found to be close to the required values. +A slight advantage can be given to the soft nano-hexapod as it requires less feedback bandwidth while giving better stability results. +\end{important} + +\chapter{Effect of limited micro-station compliance} +\label{sec:uniaxial_support_compliance} +In this section, the impact of the compliance of the support (i.e. the micro-station) on the dynamics of the plant to control will be studied. + +This is a critical point as the dynamics of the micro-station is complex, depends on the considered direction (see measurements in Figure \ref{fig:uniaxial_comp_frf_meas_model}) and may vary with position and time. +It would be much better to have a plant dynamics which is not impacted by the micro-station. + +Therefore, the objective in this section is to obtain some guidance for the design of a nano-hexapod that will not by impacted by the complex micro-station dynamics. + +In order to study this, two models are used (Figure \ref{fig:uniaxial_support_compliance_models}) with: +\begin{itemize} +\item the nano-hexapod directly fixed on top of the granite, therefore neglecting any support compliance (Figure \ref{fig:uniaxial_support_compliance_nano_hexapod_only}) +\item the nano-hexapod fixed on top of the micro-station having some limited compliance (Figure \ref{fig:uniaxial_support_compliance_test_system}) +\end{itemize} + +\begin{figure} +\begin{subfigure}{0.49\textwidth} +\begin{center} +\includegraphics[scale=1,scale=1]{figs/uniaxial_support_compliance_nano_hexapod_only.png} +\end{center} +\subcaption{\label{fig:uniaxial_support_compliance_nano_hexapod_only}Nano-Hexapod fixed directly on the Granite} +\end{subfigure} +\begin{subfigure}{0.49\textwidth} +\begin{center} +\includegraphics[scale=1,scale=1]{figs/uniaxial_support_compliance_test_system.png} +\end{center} +\subcaption{\label{fig:uniaxial_support_compliance_test_system}Nano-Hexapod fixed on top of the Micro-Station} +\end{subfigure} +\caption{\label{fig:uniaxial_support_compliance_models}Models used to study the effect of limited support compliance} +\end{figure} +\section{Neglected support compliance} + +Let's first neglect the limited compliance of the micro-station and use the uniaxial model show in Figure \ref{fig:uniaxial_support_compliance_nano_hexapod_only}. +Let's choose a nano-hexapod mass (including the payload) of \(20\,\text{kg}\) and three hexapod stiffnesses such that their resonance frequencies are at \(\omega_{\nu} = 10\,\text{Hz}\), \(\omega_{\nu} = 70\,\text{Hz}\) and \(\omega_{\nu} = 400\,\text{Hz}\). + +The obtained transfer functions from \(F\) to \(L^\prime\) are shown in Figure \ref{fig:uniaxial_effect_support_compliance_neglected}. +When neglecting the support compliance, large feedback bandwidth can be achieve for all three Nano-Hexapod. + +\begin{figure}[htbp] +\centering +\includegraphics[scale=1]{figs/uniaxial_effect_support_compliance_neglected.png} +\caption{\label{fig:uniaxial_effect_support_compliance_neglected}Obtained transfer functions from \(F\) to \(L^{\prime}\) when neglecing support compliance} +\end{figure} + +\section{Effect of support compliance on \(L/F\)} + +Let's now add some support compliance and use the model shown in Figure \ref{fig:uniaxial_support_compliance_test_system}. +The parameters of the support (i.e. \(m^{\prime}\), \(c^{\prime}\) and \(k^{\prime}\)) are chosen in such a way that the main vertical mode at \(\omega_\mu = 70\,\text{Hz}\) seen on the micro-station is matched (Figure \ref{fig:uniaxial_comp_frf_meas_model}, yellow curve). + +The transfer functions from \(F\) to \(L\) (i.e. control of the relative motion of the nano-hexapod) and from \(L\) to \(d\) (i.e. control of the position between the nano-hexapod and the fixed granite) can then be computed. + +When the relative displacement of the nano-hexapod \(L\) is to be controlled (dynamics shown in Figure \ref{fig:uniaxial_effect_support_compliance_dynamics}), having a stiff nano-hexapod (i.e. with a suspension mode at higher frequency than the mode of the support) makes the dynamics less affected by the limited support compliance (Figure \ref{fig:uniaxial_effect_support_compliance_dynamics}, right). + +This is why it is very common to have stiff piezoelectric stages fixed at the very top of positioning stages. +In such case, the control of the piezoelectric stage using its integrated metrology (typically capacitive sensors) is quite simple as the plant is not much affected by the dynamics of the support on which is it fixed. +If a soft nano-hexapod is used, the support dynamics appears in the dynamics between \(F\) and \(L\) (see Figure \ref{fig:uniaxial_effect_support_compliance_dynamics}, left) which will impact the control robustness and performance. + +\begin{figure}[htbp] +\centering +\includegraphics[scale=1]{figs/uniaxial_effect_support_compliance_dynamics.png} +\caption{\label{fig:uniaxial_effect_support_compliance_dynamics}Effect of the support compliance on the transfer functions from \(F\) to \(L\)} +\end{figure} + +\section{Effect of support compliance on \(d/F\)} + +When the motion to be controlled is the relative displacement \(d\) between the granite and the nano-hexapod's top platform, the effect of the support compliance on the plant dynamics is opposite than what was previously observed. +Indeed, using a ``soft'' nano-hexapod (i.e. with a suspension mode at lower frequency than the mode of the support) makes the dynamics less affected by the support dynamics (Figure \ref{fig:uniaxial_effect_support_compliance_dynamics_d}, left). +On the contrary, if a ``stiff'' nano-hexapod is used, the support dynamics appears in the plant dynamics (Figure \ref{fig:uniaxial_effect_support_compliance_dynamics_d}, right). + +\begin{figure}[htbp] +\centering +\includegraphics[scale=1]{figs/uniaxial_effect_support_compliance_dynamics_d.png} +\caption{\label{fig:uniaxial_effect_support_compliance_dynamics_d}Effect of the support compliance on the transfer functions from \(F\) to \(d\)} +\end{figure} + +\section{Conclusion} +\begin{important} +In order to study the impact of the support compliance on the plant dynamics, simple models shown in Figure \ref{fig:uniaxial_support_compliance_models} were used. + +Depending on the quantity to be controlled (\(L\) or \(d\) in Figure \ref{fig:uniaxial_support_compliance_test_system}) and on the relative location of \(\omega_\nu\) (suspension mode of the nano-hexapod) and \(\omega_\mu\) (modes of the support), the interaction between the support and the nano-hexapod dynamics can change drastically (observations made are summarized in Table \ref{tab:uniaxial_effect_compliance}). + +For the NASS, having the suspension mode of the nano-hexapod at lower frequencies than the suspension modes of the micro-station would make the plant less dependent on the micro-station dynamics, and therefore easier to control. + +Note that observations made in this section are also affected by the ratio between the support mass \(m^{\prime}\) and the nano-hexapod mass \(m\) (the effect is more pronounced when the ratio \(m/m^{\prime}\) increases). +\end{important} + +\begin{table}[htbp] +\caption{\label{tab:uniaxial_effect_compliance}Impact of the support dynamics on the plant dynamics} +\centering +\begin{tabularx}{0.4\linewidth}{Xccc} +\toprule + & \(\omega_{\nu} \ll \omega_{\mu}\) & \(\omega_{\nu} \approx \omega_{\mu}\) & \(\omega_{\nu} \gg \omega_{\mu}\)\\ +\midrule +\(d/F\): & small & large & large\\ +\(L/F\): & large & large & small\\ +\bottomrule +\end{tabularx} +\end{table} + +\chapter{Effect of Payload Dynamics} +\label{sec:uniaxial_payload_dynamics} +Up to this section, the sample was modelled as a mass rigidly fixed to the nano-hexapod (as shown in Figure \ref{fig:uniaxial_paylaod_dynamics_rigid_schematic}). +However, such sample may present internal dynamics and its fixation to the nano-hexapod may have limited stiffness. + +To study the effect of the sample dynamics, models shown in Figure \ref{fig:uniaxial_paylaod_dynamics_schematic} are used is this Section. + +\begin{figure} +\begin{subfigure}{0.49\textwidth} +\begin{center} +\includegraphics[scale=1,scale=1]{figs/uniaxial_paylaod_dynamics_rigid_schematic.png} +\end{center} +\subcaption{\label{fig:uniaxial_paylaod_dynamics_rigid_schematic}Rigid payload} +\end{subfigure} +\begin{subfigure}{0.49\textwidth} +\begin{center} +\includegraphics[scale=1,scale=1]{figs/uniaxial_paylaod_dynamics_schematic.png} +\end{center} +\subcaption{\label{fig:uniaxial_paylaod_dynamics_schematic}Payload with some flexibility} +\end{subfigure} +\caption{\label{fig:uniaxial_payload_dynamics_models}Models used to study the effect of payload dynamics} +\end{figure} + +\section{Impact on the plant dynamics} +\label{ssec:uniaxial_payload_dynamics_effect_dynamics} + +To study the impact of sample dynamics, the following sample configurations are considered: +\begin{itemize} +\item rigid sample, corresponding to Figure \ref{fig:uniaxial_paylaod_dynamics_rigid_schematic} +\item two flexible samples with a resonance at \(\omega_s = 200\,\text{Hz}\) and at \(\omega_s = 20\,\text{Hz}\) respectively, corresponding to Figure \ref{fig:uniaxial_paylaod_dynamics_schematic} +\item for all cases, two sample masses are considered: \(m_s = 1\,\text{kg}\) and \(m_s = 50\,\text{kg}\) +\end{itemize} + +The transfer functions from the nano-hexapod force to the motion of the nano-hexapod top platform are computed for all the above configurations and are compared for a soft Nano-Hexapod \(k_n = 0.01\,N/\mu m\) in Figure \ref{fig:uniaxial_payload_dynamics_soft_nano_hexapod}. + +It can be seen that the mode of the sample adds an anti-resonance followed by a resonance (zero/pole pattern). +The frequency of the anti-resonance corresponds to the ``free'' resonance of the sample \(\omega_s = \sqrt{k_s/m_s}\). +The flexibility of the sample also changes the high frequency gain (the mass line is shifted from \(\frac{1}{(m_n + m_s)s^2}\) to \(\frac{1}{m_ns^2}\)). + +\begin{figure}[htbp] +\centering +\includegraphics[scale=1]{figs/uniaxial_payload_dynamics_soft_nano_hexapod.png} +\caption{\label{fig:uniaxial_payload_dynamics_soft_nano_hexapod}Effect of the payload dynamics on the soft Nano-Hexapod. Light sample on the right, and heavy sample on the left} +\end{figure} + +The same transfer functions are now compared when using a stiff nano-hexapod (\(k_n = 100\,N/\mu m\)) in Figure \ref{fig:uniaxial_payload_dynamics_stiff_nano_hexapod}. +In that case, the sample's resonance \(\omega_n\) is smaller than the nano-hexapod resonance \(\omega_n\). +This changes the zero/pole pattern to a pole/zero pattern (the frequency of the zero still being equal to \(\omega_s\)). +Even tough the added sample's flexibility still changes the high frequency mass line from \(\frac{1}{(m_n + m_s)s^2}\) to \(\frac{1}{m_ns^2}\), the overall dynamics is much less impacted, even if the sample mass is high (see yellow curve in Figure \ref{fig:uniaxial_payload_dynamics_stiff_nano_hexapod}, right). + +\begin{figure}[htbp] +\centering +\includegraphics[scale=1]{figs/uniaxial_payload_dynamics_stiff_nano_hexapod.png} +\caption{\label{fig:uniaxial_payload_dynamics_stiff_nano_hexapod}Effect of the payload dynamics on the stiff Nano-Hexapod. Light sample on the right, and heavy sample on the left} +\end{figure} + + +\begin{important} +The impact of the sample dynamics on the plant varies with the sample mass and the relative resonance frequency of the sample \(\omega_s\) and of the nano-hexapod \(\omega_n\). +The larger the sample mass, the larger the effect (i.e. change of high frequency gain, appearance of additional resonances and anti-resonances). +A zero/pole pattern is observed if \(\omega_s > \omega_n\) and a pole/zero pattern if \(\omega_s > \omega_n\). +Such additional dynamics can induce stability issues depending on their position relative to the wanted feedback bandwidth as explained in \cite[Section 4.2]{rankers98_machin}. + +The general conclusion is that the stiffer the nano-hexapod, the less it is impacted by the payload's dynamics, which would make the feedback controller more robust to a change of payload. + +This is why high-bandwidth soft positioning stages are usually restricted to constant and calibrated payloads (CD-player, lithography machines, isolation system for gravitational wave detectors, \ldots{}), while stiff positioning systems can more easily accept various payloads. +\end{important} + +\section{Impact on the positioning stability} +\label{ssec:uniaxial_payload_dynamics_effect_stability} + +Having a flexibility between the measured position (i.e. the top platform of the nano-hexapod) and the point-of-interest to be positioned relative to the x-ray can also impact the positioning stability. +This is due to the fact that the measured (and therefore controlled) distance is no longer equal to the important distance for the experiment. + +In order to estimate if the sample flexibility is critical for the position stability of the point of interest, the model shown in Figure \ref{fig:uniaxial_sample_flexibility_control} is used. +This is the same model that was used in Section \ref{sec:uniaxial_position_control} but with an added flexibility between the nano-hexapod and the sample (considered sample modes are at \(\omega_s = 20\,\text{Hz}\) and \(\omega_n = 200\,\text{Hz}\)). + +\begin{figure}[htbp] +\centering +\includegraphics[scale=1]{figs/uniaxial_sample_flexibility_control.png} +\caption{\label{fig:uniaxial_sample_flexibility_control}Uniaxial model considering a flexibility between the nano-hexapod top platform and the sample. In that case the measured and controlled distance \(d\) is different from the distance \(y\) that is wish to be controlled} +\end{figure} + +After the system dynamics extracted from the model, IFF is applied using the same gains as the ones used in Section \ref{sec:uniaxial_active_damping}. +Thanks to the collocation between the nano-hexapod and the force sensor used for IFF, the damped plants are still stable and similar damping values are obtained than when considering a rigid sample. + +The High Authority Controllers used in Section \ref{sec:uniaxial_position_control} are then implemented on the damped plants. +The obtained closed-loop systems are stable, indicating good robustness. + +Finally, closed-loop noise budgeting is computed for the obtained the closed-loop system and the cumulative amplitude spectrum of \(d\) and \(y\) are shown in Figure \ref{fig:uniaxial_sample_flexibility_noise_budget_y}. +The cumulative amplitude spectrum of the measured distance \(d\) (Figure \ref{fig:uniaxial_sample_flexibility_noise_budget_d}) shows that the added flexibility at the sample location have very little effect on the control performance. +However, the cumulative amplitude spectrum of the distance \(y\) (Figure \ref{fig:uniaxial_sample_flexibility_noise_budget_y}) shows that the stability of \(y\) is degraded when the sample flexibility is considered and is degraded as \(\omega_s\) is lowered. + +What happens is that above \(\omega_s\), even though the motion \(d\) can be controlled perfectly, the sample's mass is ``isolated'' from the motion of the nano-hexapod and the control on \(y\) is not effective. + +\begin{figure} +\begin{subfigure}{0.95\textwidth} +\begin{center} +\includegraphics[scale=1,scale=1]{figs/uniaxial_sample_flexibility_noise_budget_d.png} +\end{center} +\subcaption{\label{fig:uniaxial_sample_flexibility_noise_budget_d}Cumulative Amplitude Spectrum of $d$} +\end{subfigure} +\begin{subfigure}{0.95\textwidth} +\begin{center} +\includegraphics[scale=1,scale=1]{figs/uniaxial_sample_flexibility_noise_budget_y.png} +\end{center} +\subcaption{\label{fig:uniaxial_sample_flexibility_noise_budget_y}Cumulative Amplitude Spectrum of $y$} +\end{subfigure} +\caption{\label{fig:uniaxial_sample_flexibility_noise_budget}Cumulative Amplitude Spectrum of the distances \(d\) and \(y\). The effect of the sample's flexibility does not affects much \(d\) but is detrimental to the stability of \(y\). A sample mass \(m_s = 1\,\text{kg}\) is used for the simulations.} +\end{figure} + +\section{Conclusion} +\begin{important} +Payload dynamics is usually a major concern when designing a positioning system. +For the NASS, the sample may present internal dynamics and limited fixation stiffness to the nano-hexapod platform. +On top of that, its mass can vary from 1kg up to 50kg which is a first challenge. + +This sample dynamics can add pole/zero or zero/pole pattern in the plant as shown in Section \ref{ssec:uniaxial_payload_dynamics_effect_dynamics} which may impact the stability and makes the design of the controller more complex. +However, it was shown that this issue is less critical if a stiff nano-hexapod is used. + +Having some flexibility between the measurement point and the point of interest (i.e. the sample point to be position on the x-ray) also degrades the position stability as shown in Section \ref{ssec:uniaxial_payload_dynamics_effect_stability}. + +It will be therefore important to take special care when designing sampling environments, especially is a soft nano-hexapod is used. +\end{important} + \chapter{Conclusion} -\label{sec:org1cd0a09} \label{sec:conclusion} In this study, a uniaxial model of the nano-active-stabilization-system has been tuned both from dynamical measurements (Section \ref{sec:micro_station_model}) and from disturbances measurements (Section \ref{sec:uniaxial_disturbances}). @@ -777,5 +947,8 @@ Finally, position feedback controllers have been developed for three considered These controllers were shown to be robust to the change of sample's masses, and to provide good rejection of disturbances. It has been found that having a soft nano-hexapod makes the plant dynamics easier to control (because decoupled from the micro-station dynamics) and requires less position feedback bandwidth to fulfill the requirements. The moderately stiff nano-hexapod (\(k_n = 1\,N/\mu m\)) is requiring a bit more position feedback bandwidth, but it still seems to give acceptable results. -However, the stiff nano-hexapod is the most complex to control and gives the worst positioning performances. +However, the stiff nano-hexapod is the most complex to control and gives the worst positioning performance. + + +\printbibliography[heading=bibintoc,title={Bibliography}] \end{document} diff --git a/preamble.tex b/preamble.tex index bf18bb9..d18dbd9 100644 --- a/preamble.tex +++ b/preamble.tex @@ -3,6 +3,7 @@ \usepackage{caption,tabularx,booktabs} \usepackage{bm} +\usepackage{xpatch} % Recommanded for biblatex \usepackage[ % use biblatex for bibliography backend=biber, % use biber backend (bibtex replacement) or bibtex style=ieee, % bib style @@ -20,6 +21,10 @@ mincitenames=1 % ]{biblatex} +\setlength\bibitemsep{1.1\itemsep} + +% \renewcommand*{\bibfont}{\footnotesize} + \usepackage{fontawesome} \usepackage{caption}