@book{schmidt20_desig_high_perfor_mechat_third_revis_edition,
  author          = {Schmidt, R Munnig and Schitter, Georg and Rankers, Adrian},
  title           = {The Design of High Performance Mechatronics - Third Revised
                  Edition},
  year            = 2020,
  publisher       = {Ios Press},
  keywords        = {favorite},
}



@article{shinno11_newly_devel_long_range_posit,
  author          = {H. Shinno and H. Yoshioka and H. Sawano},
  title           = {A Newly Developed Long Range Positioning Table System With
                  a Sub-Nanometer Resolution},
  journal         = {CIRP Annals},
  volume          = 60,
  number          = 1,
  pages           = {403-406},
  year            = 2011,
  doi             = {10.1016/j.cirp.2011.03.027},
  url             = {http://dx.doi.org/10.1016/j.cirp.2011.03.027},
  keywords        = {Two Stage Actuator},
}



@article{hauge04_sensor_contr_space_based_six,
  author          = {G.S. Hauge and M.E. Campbell},
  title           = {Sensors and Control of a Space-Based Six-Axis Vibration
                  Isolation System},
  journal         = {Journal of Sound and Vibration},
  volume          = 269,
  number          = {3-5},
  pages           = {913-931},
  year            = 2004,
  doi             = {10.1016/s0022-460x(03)00206-2},
  url             = {https://doi.org/10.1016/s0022-460x(03)00206-2},
  keywords        = {parallel robot, favorite},
}



@article{thayer02_six_axis_vibrat_isolat_system,
  author          = {Doug Thayer and Mark Campbell and Juris Vagners and Andrew
                  von Flotow},
  title           = {Six-Axis Vibration Isolation System Using Soft Actuators
                  and Multiple Sensors},
  journal         = {Journal of Spacecraft and Rockets},
  volume          = 39,
  number          = 2,
  pages           = {206-212},
  year            = 2002,
  doi             = {10.2514/2.3821},
  url             = {https://doi.org/10.2514/2.3821},
  keywords        = {parallel robot},
}



@article{tang18_decen_vibrat_contr_voice_coil,
  author          = {Jie Tang and Dengqing Cao and Tianhu Yu},
  title           = {Decentralized Vibration Control of a Voice Coil Motor-Based
                  Stewart Parallel Mechanism: Simulation and Experiments},
  journal         = {Proceedings of the Institution of Mechanical Engineers,
                  Part C: Journal of Mechanical Engineering Science},
  volume          = 233,
  number          = 1,
  pages           = {132-145},
  year            = 2018,
  doi             = {10.1177/0954406218756941},
  url             = {https://doi.org/10.1177/0954406218756941},
  keywords        = {parallel robot},
}



@article{du14_piezo_actuat_high_precis_flexib,
  author          = {Zhijiang Du and Ruochong Shi and Wei Dong},
  title           = {A Piezo-Actuated High-Precision Flexible Parallel Pointing
                  Mechanism: Conceptual Design, Development, and Experiments},
  journal         = {IEEE Transactions on Robotics},
  volume          = 30,
  number          = 1,
  pages           = {131-137},
  year            = 2014,
  doi             = {10.1109/tro.2013.2288800},
  url             = {https://doi.org/10.1109/tro.2013.2288800},
  keywords        = {parallel robot},
}



@article{yang19_dynam_model_decoup_contr_flexib,
  author          = {Yang, XiaoLong and Wu, HongTao and Chen, Bai and Kang,
                  ShengZheng and Cheng, ShiLi},
  title           = {Dynamic Modeling and Decoupled Control of a Flexible
                  Stewart Platform for Vibration Isolation},
  journal         = {Journal of Sound and Vibration},
  volume          = 439,
  pages           = {398-412},
  year            = 2019,
  doi             = {10.1016/j.jsv.2018.10.007},
  url             = {https://doi.org/10.1016/j.jsv.2018.10.007},
  issn            = {0022-460X},
  keywords        = {parallel robot, flexure, decoupled control},
  month           = {Jan},
  publisher       = {Elsevier BV},
}



@phdthesis{li01_simul_fault_vibrat_isolat_point,
  author          = {Li, Xiaochun},
  keywords        = {parallel robot},
  school          = {University of Wyoming},
  title           = {Simultaneous, Fault-tolerant Vibration Isolation and
                  Pointing Control of Flexure Jointed Hexapods},
  year            = 2001,
}



@phdthesis{bishop02_devel_precis_point_contr_vibrat,
  author          = {Bishop Jr, Ronald M},
  school          = {Naval Postgraduate School, Monterey, California},
  title           = {Development of Precision Pointing Controllers with and
                  without Vibration Suppression for the {NPS} Precision Pointing
                  Hexapod},
  year            = 2002,
  keywords        = {parallel robot},
}



@phdthesis{hanieh03_activ_stewar,
  author          = {Hanieh, Ahmed Abu},
  keywords        = {parallel robot},
  school          = {Universit{\'e} Libre de Bruxelles, Brussels, Belgium},
  title           = {Active isolation and damping of vibrations via Stewart
                  platform},
  year            = 2003,
}



@phdthesis{afzali-far16_vibrat_dynam_isotr_hexap_analy_studies,
  author          = {Afzali-Far, Behrouz},
  school          = {Lund University},
  title           = {Vibrations and Dynamic Isotropy in Hexapods-Analytical
                  Studies},
  year            = 2016,
  keywords        = {parallel robot},
}



@article{kong18_vibrat_isolat_dual_stage_actuat,
  author          = {Yongfang Kong and Hai Huang},
  title           = {Vibration Isolation and Dual-Stage Actuation Pointing
                  System for Space Precision Payloads},
  journal         = {Acta Astronautica},
  volume          = 143,
  pages           = {183-192},
  year            = 2018,
  doi             = {10.1016/j.actaastro.2017.11.038},
  url             = {https://doi.org/10.1016/j.actaastro.2017.11.038},
  keywords        = {Two Stage Actuator, parallel robot},
}



@phdthesis{naves20_desig,
  author          = {Mark Naves},
  school          = {Univeristy of Twente},
  title           = {Design and optimization of large stroke flexure mechanisms},
  year            = 2020,
  keywords        = {flexure},
}



@inproceedings{schroer17_ptynam,
  author          = {Christian G. Schroer and Martin Seyrich and Maik Kahnt and
                  Stephan Botta and Ralph D{\"o}hrmann and Gerald Falkenberg and
                  Jan Garrevoet and Mikhail Lyubomirskiy and Maria Scholz and
                  Andreas Schropp and Felix Wittwer},
  title           = {PtyNAMi: Ptychographic Nano-Analytical Microscope at PETRA
                  III: interferometrically tracking positions for 3D x-ray
                  scanning microscopy using a ball-lens retroreflector},
  booktitle       = {X-Ray Nanoimaging: Instruments and Methods III},
  year            = 2017,
  doi             = {10.1117/12.2273710},
  url             = {https://doi.org/10.1117/12.2273710},
  keywords        = {nass, metrology},
  month           = 9,
}



@article{villar18_nanop_esrf_id16a_nano_imagin_beaml,
  author          = {F. Villar and L. Andre and R. Baker and S. Bohic and J. C.
                  da Silva and C. Guilloud and O. Hignette and J. Meyer and A.
                  Pacureanu and M. Perez and M. Salome and P. van der Linden and
                  Y. Yang and P. Cloetens},
  title           = {Nanopositioning for the Esrf Id16a Nano-Imaging Beamline},
  journal         = {Synchrotron Radiation News},
  volume          = 31,
  number          = 5,
  pages           = {9-14},
  year            = 2018,
  doi             = {10.1080/08940886.2018.1506234},
  url             = {http://dx.doi.org/10.1080/08940886.2018.1506234},
  keywords        = {esrf},
}




@article{schropp20_ptynam,
  author          = {Andreas Schropp and Ralph D{\"o}hrmann and Stephan Botta
                  and Dennis Br{\"u}ckner and Maik Kahnt and Mikhail
                  Lyubomirskiy and Christina Ossig and Maria Scholz and Martin
                  Seyrich and Michael E. Stuckelberger and Patrik Wiljes and
                  Felix Wittwer and Jan Garrevoet and Gerald Falkenberg and
                  Yakub Fam and Thomas L. Sheppard and Jan-Dierk Grunwaldt and
                  Christian G. Schroer},
  title           = {Ptynami: Ptychographic Nano-Analytical Microscope},
  journal         = {Journal of Applied Crystallography},
  volume          = 53,
  number          = 4,
  pages           = {957-971},
  year            = 2020,
  doi             = {10.1107/s1600576720008420},
  url             = {http://dx.doi.org/10.1107/s1600576720008420},
  DATE_ADDED      = {Thu May 2 16:01:03 2024},
}



@article{nazaretski15_pushin_limit,
  author          = {E. Nazaretski and K. Lauer and H. Yan and N. Bouet and J.
                  Zhou and R. Conley and X. Huang and W. Xu and M. Lu and K.
                  Gofron and S. Kalbfleisch and U. Wagner and C. Rau and Y. S.
                  Chu},
  title           = {Pushing the Limits: an Instrument for Hard X-Ray Imaging
                  Below 20 Nm},
  journal         = {Journal of Synchrotron Radiation},
  volume          = 22,
  number          = 2,
  pages           = {336-341},
  year            = 2015,
  doi             = {10.1107/s1600577514025715},
  url             = {https://doi.org/10.1107/s1600577514025715},
  keywords        = {nass},
}



@article{stankevic17_inter_charac_rotat_stages_x_ray_nanot,
  author          = {Tomas Stankevic and Christer Engblom and Florent Langlois
                  and Filipe Alves and Alain Lestrade and Nicolas Jobert and
                  Gilles Cauchon and Ulrich Vogt and Stefan Kubsky},
  title           = {Interferometric Characterization of Rotation Stages for
                  X-Ray Nanotomography},
  journal         = {Review of Scientific Instruments},
  volume          = 88,
  number          = 5,
  pages           = 053703,
  year            = 2017,
  doi             = {10.1063/1.4983405},
  url             = {https://doi.org/10.1063/1.4983405},
  keywords        = {nass, metrology},
}



@inproceedings{engblom18_nanop_resul,
  author          = {C. Engblom and others},
  title           = {Nanoprobe Results: Metrology \& Control in Stacked
                  Closed-Loop Systems},
  booktitle       = {Proc. of International Conference on Accelerator and Large
                  Experimental Control Systems (ICALEPCS'17)},
  year            = 2018,
  doi             = {10.18429/JACoW-ICALEPCS2017-WEAPL04},
  url             = {https://doi.org/10.18429/JACoW-ICALEPCS2017-WEAPL04},
  isbn            = {978-3-95450-193-9},
  month           = {Jan.},
  publisher       = {JACoW},
  keywords        = {nass},
}



@article{nazaretski22_new_kirkp_baez_based_scann,
  author          = {E. Nazaretski and D. S. Coburn and W. Xu and J. Ma and H.
                  Xu and R. Smith and X. Huang and Y. Yang and L. Huang and M.
                  Idir and A. Kiss and Y. S. Chu},
  title           = {A New Kirkpatrick-Baez-Based Scanning Microscope for the
                  Submicron Resolution X-Ray Spectroscopy (SRX) Beamline At
                  Nsls-Ii},
  journal         = {Journal of Synchrotron Radiation},
  volume          = 29,
  number          = 5,
  pages           = {1284-1291},
  year            = 2022,
  doi             = {10.1107/s1600577522007056},
  url             = {http://dx.doi.org/10.1107/s1600577522007056},
  DATE_ADDED      = {Thu May 2 16:33:47 2024},
}




@article{holler17_omny_pin_versat_sampl_holder,
  author          = {M. Holler and J. Raabe and R. Wepf and S. H. Shahmoradian
                  and A. Diaz and B. Sarafimov and T. Lachat and H. Walther and
                  M. Vitins},
  title           = {Omny Pin-A Versatile Sample Holder for Tomographic
                  Measurements At Room and Cryogenic Temperatures},
  journal         = {Review of Scientific Instruments},
  volume          = 88,
  number          = 11,
  pages           = 113701,
  year            = 2017,
  doi             = {10.1063/1.4996092},
  url             = {https://doi.org/10.1063/1.4996092},
  keywords        = {nass},
}



@article{holler18_omny_tomog_nano_cryo_stage,
  author          = {M. Holler and J. Raabe and A. Diaz and M. Guizar-Sicairos
                  and R. Wepf and M. Odstrcil and F. R. Shaik and V. Panneels
                  and A. Menzel and B. Sarafimov and S. Maag and X. Wang and V.
                  Thominet and H. Walther and T. Lachat and M. Vitins and O.
                  Bunk},
  title           = {Omny-A Tomography Nano Cryo Stage},
  journal         = {Review of Scientific Instruments},
  volume          = 89,
  number          = 4,
  pages           = 043706,
  year            = 2018,
  doi             = {10.1063/1.5020247},
  url             = {https://doi.org/10.1063/1.5020247},
  keywords        = {nass},
}



@article{kelly22_delta_robot_long_travel_nano,
  author          = {Jon Kelly and Andrew Male and Nicholas Rubies and David
                  Mahoney and Jessica M. Walker and Miguel A. Gomez-Gonzalez and
                  Guy Wilkin and Julia E. Parker and Paul D. Quinn},
  title           = {The Delta Robot-A Long Travel Nano-Positioning Stage for
                  Scanning X-Ray Microscopy},
  journal         = {Review of Scientific Instruments},
  volume          = 93,
  number          = 4,
  pages           = {nil},
  year            = 2022,
  doi             = {10.1063/5.0084806},
  url             = {http://dx.doi.org/10.1063/5.0084806},
  DATE_ADDED      = {Thu May 2 20:27:54 2024},
}




@inproceedings{xu23_high_nsls_ii,
  author          = {Weihe Xu and Huijuan Xu and Dmitri Gavrilov and Xiaojing
                  Huang and Hanfei Yan and Yong S. Chu and Evgeny Nazaretski},
  title           = {High-speed fly-scan capabilities for x-ray microscopy
                  systems at NSLS-II},
  booktitle       = {X-Ray Nanoimaging: Instruments and Methods VI},
  year            = 2023,
  pages           = {nil},
  doi             = {10.1117/12.2675940},
  url             = {http://dx.doi.org/10.1117/12.2675940},
  DATE_ADDED      = {Thu May 2 16:24:55 2024},
  month           = 10,
}




@inproceedings{geraldes23_sapot_carnaub_sirius_lnls,
  author          = {Renan R. Geraldes and Gabriel B. Z. L. Moreno and Francesco
                  R. Lena and Erik O. Pereira and Matheus H. S. da Silva and
                  Gabriel G. Bas{\'i}lio and Pedro P. R. Proen{\c{c}}a and
                  Rodrigo C. Gomes and Cassiano S. N. C. Bueno and Sergio A. L.
                  Luiz and Artur C. Pinto and Bernd C. Meyer and Douglas Galante
                  and Carlos A. P{\'e}rez and Verônica C. Teixeira and Leonardo
                  M. Kofukuda and Anna P. S. Sotero and Theo A. M. Ruijl and
                  Walter Aarden and Piet Peters and Maryn Wijnhoven and Helio C.
                  N. Tolentino},
  title           = {The high-dynamic cryogenic sample stage for
                  SAPOTI/CARNA{\'U}BA at Sirius/LNLS},
  booktitle       = {PROCEEDINGS OF THE 15TH INTERNATIONAL CONFERENCE ON X-RAY
                  MICROSCOPY - XRM2022},
  year            = 2023,
  pages           = {nil},
  doi             = {10.1063/5.0168438},
  url             = {http://dx.doi.org/10.1063/5.0168438},
  DATE_ADDED      = {Thu May 2 18:09:04 2024},
  month           = {-},
}




@article{wang12_autom_marker_full_field_hard,
  author          = {Jun Wang and Yu-chen Karen Chen and Qingxi Yuan and Andrei
                  Tkachuk and Can Erdonmez and Benjamin Hornberger and Michael
                  Feser},
  title           = {Automated Markerless Full Field Hard X-Ray Microscopic
                  Tomography At Sub-50 Nm 3-dimension Spatial Resolution},
  journal         = {Applied Physics Letters},
  volume          = 100,
  number          = 14,
  pages           = 143107,
  year            = 2012,
  doi             = {10.1063/1.3701579},
  url             = {https://doi.org/10.1063/1.3701579},
  keywords        = {nass},
}



@article{xu12_desig_devel_flexur_based_dual,
  author          = {Xu, Qingsong},
  title           = {Design and Development of a Flexure-Based Dual-Stage
                  Nanopositioning System With Minimum Interference Behavior},
  journal         = {IEEE Transactions on Automation Science and Engineering},
  volume          = 9,
  number          = 3,
  pages           = {554--563},
  year            = 2012,
  publisher       = {IEEE},
  keywords        = {Two Stage Actuator},
}



@article{pahk01_ultra_precis_posit_system_servo_motor,
  author          = {Pahk, Heui Jae and Lee, Dong Sung and Park, Jong Ho},
  title           = {Ultra Precision Positioning System for Servo Motor--piezo
                  Actuator Using the Dual Servo Loop and Digital Filter
                  Implementation},
  journal         = {International Journal of Machine Tools and Manufacture},
  volume          = 41,
  number          = 1,
  pages           = {51--63},
  year            = 2001,
  publisher       = {Elsevier},
  keywords        = {Two Stage Actuator},
}



@article{kobayashi03_phase_stabil_servo_contr_dual,
  author          = {M. Kobayashi and S. Nakagawa and S. Nakamura},
  title           = {A Phase-Stabilized Servo Controller for Dual-Stage
                  Actuators in Hard Disk Drives},
  journal         = {IEEE Transactions on Magnetics},
  volume          = 39,
  number          = 2,
  pages           = {844-850},
  year            = 2003,
  doi             = {10.1109/tmag.2003.808938},
  url             = {https://doi.org/10.1109/tmag.2003.808938},
  keywords        = {Two Stage Actuator},
}



@inproceedings{michellod06_strat_contr_dual_nano_system_singl_metrol,
  author          = {Michellod, Yvan and Mullhaupt, Philippe and Gillet, Denis},
  title           = {Strategy for the Control of a Dual-stage Nano-positioning
                  System with a Single Metrology},
  booktitle       = {2006 IEEE Conference on Robotics, Automation and
                  Mechatronics},
  year            = 2006,
  pages           = {1--8},
  organization    = {IEEE},
  keywords        = {Two Stage Actuator},
}



@article{woody06_desig_perfor_dual_drive_system,
  author          = {Shane Woody and Stuart Smith},
  title           = {Design and Performance of a Dual Drive System for Tip-Tilt
                  Angular Control of a 300mm Diameter Mirror},
  journal         = {Mechatronics},
  volume          = 16,
  number          = 7,
  pages           = {389-397},
  year            = 2006,
  doi             = {10.1016/j.mechatronics.2006.03.006},
  url             = {https://doi.org/10.1016/j.mechatronics.2006.03.006},
  keywords        = {Two Stage Actuator},
}



@article{chassagne07_nano_posit_system_with_sub,
  author          = {L Chassagne and M Wakim and S Xu and S Top{\c{c}}u and P
                  Ruaux and P Juncar and Y Alayli},
  title           = {A 2d Nano-Positioning System With Sub-Nanometric
                  Repeatability Over the Millimetre Displacement Range},
  journal         = {Measurement Science and Technology},
  volume          = 18,
  number          = 11,
  pages           = {3267--3272},
  year            = 2007,
  doi             = {10.1088/0957-0233/18/11/001},
  url             = {https://doi.org/10.1088%2F0957-0233%2F18%2F11%2F001},
  keywords        = {Two Stage Actuator},
  month           = {sep},
  publisher       = {{IOP} Publishing},
}



@inproceedings{schitter08_dual,
  author          = {Georg Schitter and Wouter F. Rijkee and Nghi Phan},
  title           = {Dual actuation for high-bandwidth nanopositioning},
  booktitle       = {2008 47th IEEE Conference on Decision and Control},
  year            = 2008,
  doi             = {10.1109/cdc.2008.4738876},
  url             = {https://doi.org/10.1109/cdc.2008.4738876},
  keywords        = {Two Stage Actuator},
}



@article{buice09_desig_evaluat_singl_axis_precis,
  author          = {Eric S. Buice and David Otten and Raymond H. Yang and
                  Stuart T. Smith and Robert J. Hocken and David L. Trumper},
  title           = {Design Evaluation of a Single-Axis Precision Controlled
                  Positioning Stage},
  journal         = {Precision Engineering},
  volume          = 33,
  number          = 4,
  pages           = {418-424},
  year            = 2009,
  doi             = {10.1016/j.precisioneng.2008.11.001},
  url             = {http://dx.doi.org/10.1016/j.precisioneng.2008.11.001},
  keywords        = {Two Stage Actuator},
}



@article{liu10_desig_contr_long_travel_nano_posit_stage,
  author          = {Chien-Hung Liu and Wen-Yuh Jywe and Yeau-Ren Jeng and
                  Tung-Hui Hsu and Yi-tsung Li},
  title           = {Design and Control of a Long-Traveling Nano-Positioning
                  Stage},
  journal         = {Precision Engineering},
  volume          = 34,
  number          = 3,
  pages           = {497-506},
  year            = 2010,
  doi             = {10.1016/j.precisioneng.2010.01.003},
  url             = {http://dx.doi.org/10.1016/j.precisioneng.2010.01.003},
  keywords        = {Two Stage Actuator},
}




@article{ting11_contr_desig_high_frequen_cuttin,
  author          = {Y. Ting and C.C. Li and C.M. Lin},
  title           = {Controller Design for High-Frequency Cutting Using a
                  Piezo-Driven Microstage},
  journal         = {Precision Engineering},
  volume          = 35,
  number          = 3,
  pages           = {455--463},
  year            = 2011,
  doi             = {10.1016/j.precisioneng.2011.02.004},
  url             = {https://doi.org/10.1016%2Fj.precisioneng.2011.02.004},
  keywords        = {Two Stage Actuator},
  month           = {jul},
  publisher       = {Elsevier {BV}},
}



@article{okazaki12_dual_servo_mechan_stage_contin_posit,
  author          = {Okazaki, Yuichi and Asano, Shin and Goto, Takayuki},
  title           = {Dual-Servo Mechanical Stage for Continuous Positioning},
  journal         = {International Journal of the Japan Society for Precision
                  Engineering},
  volume          = 27,
  number          = 2,
  pages           = {172--173},
  year            = 2012,
  keywords        = {Two Stage Actuator},
}



@article{ito13_high_precis_posit_system_using,
  author          = {Shingo Ito and Juergen Steininger and Peter I. Chang and
                  Georg Schitter},
  title           = {High-Precision Positioning System Using a Low-Stiffness
                  Dual Stage Actuator},
  journal         = {IFAC Proceedings Volumes},
  volume          = 46,
  number          = 5,
  pages           = {20-27},
  year            = 2013,
  doi             = {10.3182/20130410-3-cn-2034.00025},
  url             = {https://doi.org/10.3182/20130410-3-cn-2034.00025},
  keywords        = {Two Stage Actuator},
}



@book{yamaguchi13_advan_high_perfor_motion_contr_mechat_system,
  author          = {Takashi Yamaguchi and Mitsuo Hirata and C Pang},
  title           = {Advances in High-Performance Motion Control of Mechatronic
                  Systems},
  year            = 2013,
  publisher       = {CRC Press},
  url             = {https://doi.org/10.1201/b15321-7},
  doi             = {10.1201/b15321-7},
  keywords        = {Two Stage Actuator},
}



@article{kim13_desig_contr_singl_stage_dual,
  author          = {Michael D. Kim and Kwang-Hee Lee and Kyung-Tae Nam and
                  Sang-Moo Lee},
  title           = {Design and Control of a Single-Stage Dual-Actuator System
                  for High-Precision Manufacturing},
  journal         = {Microsystem Technologies},
  volume          = 20,
  number          = 2,
  pages           = {175--183},
  year            = 2013,
  doi             = {10.1007/s00542-013-1979-5},
  url             = {https://doi.org/10.1007%2Fs00542-013-1979-5},
  keywords        = {Two Stage Actuator},
  month           = {dec},
  publisher       = {Springer Science and Business Media {LLC}},
}



@inproceedings{wu13_desig,
  author          = {R.C. Wu and I.H. Tsai and F.C. Wang and J.Y. Yen},
  title           = {Design and control of a long-stroke nano-positioning stage},
  booktitle       = {Proceedings of the 2013 IEEE/SICE International Symposium
                  on System Integration},
  year            = 2013,
  doi             = {10.1109/sii.2013.6776643},
  url             = {http://dx.doi.org/10.1109/SII.2013.6776643},
  month           = 12,
  keywords        = {Two Stage Actuator},
}



@article{parmar14_large_dynam_range_nanop_using,
  author          = {Gaurav Parmar and Kira Barton and Shorya Awtar},
  title           = {Large Dynamic Range Nanopositioning Using Iterative
                  Learning Control},
  journal         = {Precision Engineering},
  volume          = 38,
  number          = 1,
  pages           = {48--56},
  year            = 2014,
  doi             = {10.1016/j.precisioneng.2013.07.003},
  url             = {https://doi.org/10.1016%2Fj.precisioneng.2013.07.003},
  keywords        = {Two Stage Actuator},
  month           = {jan},
  publisher       = {Elsevier {BV}},
}



@article{ito15_low_stiff_dual_stage_actuat,
  author          = {Shingo Ito and Juergen Steininger and Georg Schitter},
  title           = {Low-Stiffness Dual Stage Actuator for Long Rage Positioning
                  With Nanometer Resolution},
  journal         = {Mechatronics},
  volume          = 29,
  pages           = {46-56},
  year            = 2015,
  doi             = {10.1016/j.mechatronics.2015.05.007},
  url             = {https://doi.org/10.1016/j.mechatronics.2015.05.007},
  keywords        = {Two Stage Actuator},
}



@book{qingsong16_desig_implem_large_range_compl_microp_system,
  author          = {Qingsong, },
  title           = {Design and Implementation of Large-Range Compliant
                  Micropositioning Systems},
  year            = 2016,
  publisher       = {Wiley},
  address         = {Singapore},
  isbn            = 9781119131458,
  keywords        = {Two Stage Actuator},
}



@article{zhu17_flexur_based_paral_actuat_dual,
  author          = {Haiyue Zhu and Chee Khiang Pang and Tat Joo Teo},
  title           = {A Flexure-Based Parallel Actuation Dual-Stage System for
                  Large-Stroke Nanopositioning},
  journal         = {IEEE Transactions on Industrial Electronics},
  volume          = 64,
  number          = 7,
  pages           = {5553-5563},
  year            = 2017,
  doi             = {10.1109/tie.2017.2677306},
  url             = {https://doi.org/10.1109/tie.2017.2677306},
  keywords        = {Two Stage Actuator},
}



@article{wang17_devel_contr_long_strok_precis_stage,
  author          = {Kou-An Wang and Yi-Kai Peng and Fu-Cheng Wang},
  title           = {The Development and Control of a Long-Stroke Precision
                  Stage},
  journal         = {Smart Science},
  volume          = 5,
  number          = 2,
  pages           = {85--93},
  year            = 2017,
  doi             = {10.1080/23080477.2017.1313693},
  url             = {https://doi.org/10.1080%2F23080477.2017.1313693},
  keywords        = {Two Stage Actuator},
  month           = {apr},
  publisher       = {Informa {UK} Limited},
}



@article{okyay18_modal_analy_metrol_error_budget,
  author          = {Ahmet Okyay and Kaan Erkorkmaz and Mir Khamesee},
  title           = {Modal Analysis, Metrology, and Error Budgeting of a
                  Precision Motion Stage},
  journal         = {Journal of Manufacturing and Materials Processing},
  volume          = 2,
  number          = 1,
  pages           = 8,
  year            = 2018,
  doi             = {10.3390/jmmp2010008},
  url             = {https://doi.org/10.3390/jmmp2010008},
  keywords        = {Two Stage Actuator},
}



@article{csencsics18_system_contr_desig_voice_coil,
  author          = {Ernst Csencsics and Markus Thier and Reinhard Hainisch and
                  Georg Schitter},
  title           = {System and Control Design of a Voice Coil Actuated
                  Mechanically Decoupling Two-Body Vibration Isolation System},
  journal         = {IEEE/ASME Transactions on Mechatronics},
  volume          = 23,
  number          = 1,
  pages           = {321-330},
  year            = 2018,
  doi             = {10.1109/tmech.2017.2771440},
  url             = {https://doi.org/10.1109/tmech.2017.2771440},
  keywords        = {Two Stage Actuator},
}



@article{okyay18_mechat_desig_actuat_optim_contr,
  author          = {Ahmet Okyay and Kaan Erkorkmaz and Mir Behrad Khamesee},
  title           = {Mechatronic Design, Actuator Optimization, and Control of a
                  Long Stroke Linear Nano-Positioner},
  journal         = {Precision Engineering},
  volume          = 52,
  pages           = {308-322},
  year            = 2018,
  doi             = {10.1016/j.precisioneng.2018.01.007},
  url             = {https://doi.org/10.1016/j.precisioneng.2018.01.007},
  keywords        = {Two Stage Actuator},
}



@book{du19_multi_actuat_system_contr,
  author          = {Chunling Du and Chee Khiang Pang},
  title           = {Multi-stage Actuation Systems and Control},
  year            = 2019,
  publisher       = {CRC Press},
  address         = {Boca Raton, FL},
  isbn            = 9781138480759,
  keywords        = {Two Stage Actuator},
}



@article{yun20_inves_two_stage_vibrat_suppr,
  author          = {Hai Yun and Lei Liu and Qing Li and Hongjie Yang},
  title           = {Investigation on Two-Stage Vibration Suppression and
                  Precision Pointing for Space Optical Payloads},
  journal         = {Aerospace Science and Technology},
  volume          = 96,
  pages           = 105543,
  year            = 2020,
  doi             = {10.1016/j.ast.2019.105543},
  url             = {https://doi.org/10.1016/j.ast.2019.105543},
  keywords        = {parallel robot, Two Stage Actuator},
}



@article{mukherjee20_hybrid_contr_precis_posit_applic,
  author          = {A MUKHERJEE and S K SHOME and P KARMAKAR and P
                  BHATTACHARJEE},
  title           = {Hybrid Controller for Precision Positioning Application},
  journal         = {S{\={a}}dhan{\={a}}},
  volume          = 45,
  number          = 1,
  year            = 2020,
  doi             = {10.1007/s12046-020-1323-6},
  url             = {https://doi.org/10.1007%2Fs12046-020-1323-6},
  keywords        = {Two Stage Actuator},
  month           = {mar},
  publisher       = {Springer Science and Business Media {LLC}},
}



@inproceedings{barros21_feedf_contr_piezoel_dual_actuat_system,
  author          = {Barros, Clarisse P{\'e}tua Bosman and Butler, Hans and van
                  de Wijdeven, Jeroen and T{\'o}th, Roland},
  title           = {On Feedforward Control of Piezoelectric Dual-stage Actuator
                  Systems},
  booktitle       = {2021 60th IEEE Conference on Decision and Control (CDC)},
  year            = 2021,
  pages           = {5588--5594},
  keywords        = {Two Stage Actuator},
  organization    = {IEEE},
}



@article{choi08_desig_contr_nanop_xy_theta_scann,
  author          = {Young-Man Choi and Jung Jae Kim and Jinwoo Kim and Dae-Gab
                  Gweon},
  title           = {Design and Control of a Nanoprecision XY$\THETA$ Scanner},
  journal         = {Review of Scientific Instruments},
  volume          = 79,
  number          = 4,
  pages           = 045109,
  year            = 2008,
  doi             = {10.1063/1.2902276},
  url             = {http://dx.doi.org/10.1063/1.2902276},
  keywords        = {Two Stage Actuator},
}



@article{shan15_contr_review,
  author          = {Guanqiao Shan and Yingzi Li and Liwen Zhang and Zhenyu Wang
                  and Yingxu Zhang and Jianqiang Qian},
  title           = {Contributed Review: Application of Voice Coil Motors in
                  High-Precision Positioning Stages With Large Travel Ranges},
  journal         = {Review of Scientific Instruments},
  volume          = 86,
  number          = 10,
  pages           = 101501,
  year            = 2015,
  doi             = {10.1063/1.4932580},
  url             = {https://doi.org/10.1063/1.4932580},
  keywords        = {Two Stage Actuator},
}



@phdthesis{okyay16_mechat_desig_dynam_contr_metrol,
  author          = {Okyay, Ahmet},
  school          = {University of Waterloo},
  title           = {Mechatronic Design, Dynamics, Controls, and Metrology of a
                  Long-Stroke Linear Nano-Positioner},
  year            = 2016,
  keywords        = {Two Stage Actuator},
}



@book{slocum92_precis_machin_desig,
  author          = {Slocum, Alexander H},
  title           = {Precision Machine Design},
  year            = 1992,
  publisher       = {Society of Manufacturing Engineers},
}



@article{nazaretski17_desig_perfor_x_ray_scann,
  author          = {E. Nazaretski and H. Yan and K. Lauer and N. Bouet and X.
                  Huang and W. Xu and J. Zhou and D. Shu and Y Hwu and Y. S.
                  Chu},
  title           = {Design and Performance of an X-Ray Scanning Microscope At
                  the Hard X-Ray Nanoprobe Beamline of Nsls-Ii},
  journal         = {Journal of Synchrotron Radiation},
  volume          = 24,
  number          = 6,
  pages           = {1113-1119},
  year            = 2017,
  doi             = {10.1107/s1600577517011183},
  url             = {https://doi.org/10.1107/s1600577517011183},
  keywords        = {nass},
}



@inproceedings{naves20_t_flex,
  author          = {Naves, M and Hakvoort, WBJ and Nijenhuis, M and Brouwer,
                  DM},
  title           = {T-Flex: A large range of motion fully flexure-based 6-DOF
                  hexapod},
  booktitle       = {20th EUSPEN International Conference \& Exhibition, EUSPEN
                  2020},
  year            = 2020,
  pages           = {205--208},
  keywords        = {parallel robot, nass},
  organization    = {EUSPEN},
}



@article{kim13_compac_protot_appar_reduc_circl,
  author          = {Jungdae Kim and K. Lauer and H. Yan and Y. S. Chu and E.
                  Nazaretski},
  title           = {Compact Prototype Apparatus for Reducing the Circle of
                  Confusion Down To 40 Nm for X-Ray Nanotomography},
  journal         = {Review of Scientific Instruments},
  volume          = 84,
  number          = 3,
  pages           = 035006,
  year            = 2013,
  doi             = {10.1063/1.4798546},
  url             = {https://doi.org/10.1063/1.4798546},
  keywords        = {nass},
}



@book{khaled18_pract_desig_applic_model_predic_contr,
  author          = {Nassim Khaled and Bibin Pattel},
  title           = {Practical Design and Application of Model Predictive
                  Control},
  year            = 2018,
  publisher       = {Butterworth-Heinemann},
}



@inproceedings{dehaeze18_sampl_stabil_for_tomog_exper,
  author          = {Thomas Dehaeze and M. Magnin Mattenet and Christophe
                  Collette},
  title           = {Sample Stabilization For Tomography Experiments In Presence
                  Of Large Plant Uncertainty},
  booktitle       = {MEDSI'18},
  year            = 2018,
  number          = 10,
  pages           = {153--157},
  doi             = {10.18429/JACoW-MEDSI2018-WEOAMA02},
  url             = {https://doi.org/10.18429/JACoW-MEDSI2018-WEOAMA02},
  address         = {Geneva, Switzerland},
  isbn            = {978-3-95450-207-3},
  keywords        = {nass, esrf},
  language        = {english},
  month           = {Dec},
  publisher       = {JACoW Publishing},
  series          = {Mechanical Engineering Design of Synchrotron Radiation
                  Equipment and Instrumentation},
  venue           = {Paris, France},
}



@article{raimondi21_commis_hybrid_multib_achrom_lattic,
  author          = {P. Raimondi and N. Carmignani and L. R. Carver and J.
                  Chavanne and L. Farvacque and G. Le Bec and D. Martin and S.
                  M. Liuzzo and T. Perron and S. White},
  title           = {Commissioning of the Hybrid Multibend Achromat Lattice At
                  the European Synchrotron Radiation Facility},
  journal         = {Physical Review Accelerators and Beams},
  volume          = 24,
  number          = 11,
  pages           = 110701,
  year            = 2021,
  doi             = {10.1103/physrevaccelbeams.24.110701},
  url             = {http://dx.doi.org/10.1103/physrevaccelbeams.24.110701},
  keywords        = {esrf},
}




@article{cotte17_id21_x_ray_infrar_micros,
  author          = {Marine Cotte and Emeline Pouyet and Murielle Salom{\'e} and
                  Camille Rivard and Wout De Nolf and Hiram Castillo-Michel and
                  Tiphaine Fabris and Letizia Monico and Koen Janssens and Tian
                  Wang and Philippe Sciau and Louisiane Verger and Laurent
                  Cormier and Olivier Dargaud and Emmanuel Brun and David
                  Bugnazet and Barbara Fayard and Bernhard Hesse and Ana Elena
                  Pradas del Real and Giulia Veronesi and Juliette Langlois and
                  Nathalie Balcar and Yannick Vandenberghe and Vicente Armando
                  Sol{\'e} and J{\'e}rôme Kieffer and Ray Barrett and C{\'e}dric
                  Cohen and Claude Cornu and Robert Baker and Eric Gagliardini
                  and Emmanuel Papillon and Jean Susini},
  title           = {The Id21 X-Ray and Infrared Microscopy Beamline At the
                  Esrf: Status and Recent Applications To Artistic Materials},
  journal         = {Journal of Analytical Atomic Spectrometry},
  volume          = 32,
  number          = 3,
  pages           = {477-493},
  year            = 2017,
  doi             = {10.1039/c6ja00356g},
  url             = {http://dx.doi.org/10.1039/c6ja00356g},
  keywords        = {esrf},
}




@article{martinez-criado16_id16b,
  author          = {Gema Mart{\'i}nez-Criado and Julie Villanova and R{\'e}mi
                  Tucoulou and Damien Salomon and Jussi-Petteri Suuronen and
                  Sylvain Labour{\'e} and Cyril Guilloud and Valentin Valls and
                  Raymond Barrett and Eric Gagliardini and Yves Dabin and Robert
                  Baker and Sylvain Bohic and C{\'e}dric Cohen and John Morse},
  title           = {Id16b: a Hard X-Ray Nanoprobe Beamline At the Esrf for
                  Nano-Analysis},
  journal         = {Journal of Synchrotron Radiation},
  volume          = 23,
  number          = 1,
  pages           = {344-352},
  year            = 2016,
  doi             = {10.1107/s1600577515019839},
  url             = {http://dx.doi.org/10.1107/s1600577515019839},
  keywords        = {esrf},
}




@article{riekel10_progr_micro_nano_diffr_at,
  author          = {Christian Riekel and Manfred Burghammer and Richard Davies},
  title           = {Progress in Micro- and Nano-Diffraction At the Esrf Id13
                  Beamline},
  journal         = {IOP Conference Series: Materials Science and Engineering},
  volume          = 14,
  number          = {nil},
  pages           = 012013,
  year            = 2010,
  doi             = {10.1088/1757-899x/14/1/012013},
  url             = {http://dx.doi.org/10.1088/1757-899x/14/1/012013},
  keywords        = {esrf},
}




@article{wright20_new_oppor_at_mater_scien,
  author          = {Jonathan Wright and Carlotta Giacobbe and Marta Majkut},
  title           = {New Opportunities At the Materials Science Beamline At Esrf
                  To Exploit High Energy Nano-Focus X-Ray Beams},
  journal         = {Current Opinion in Solid State and Materials Science},
  volume          = 24,
  number          = 2,
  pages           = 100818,
  year            = 2020,
  doi             = {10.1016/j.cossms.2020.100818},
  url             = {http://dx.doi.org/10.1016/j.cossms.2020.100818},
  keywords        = {esrf},
}




@article{leake19_nanod_beaml_id01,
  author          = {Steven J. Leake and Gilbert A. Chahine and Hamid Djazouli
                  and Tao Zhou and Carsten Richter and Jan Hilhorst and Lucien
                  Petit and Marie-Ingrid Richard and Christian Morawe and
                  Raymond Barrett and Lin Zhang and Roberto A. Homs-Regojo and
                  Vincent Favre-Nicolin and Peter Boesecke and Tobias U.
                  Sch{\"u}lli},
  title           = {The Nanodiffraction Beamline Id01/esrf: a Microscope for
                  Imaging Strain and Structure},
  journal         = {Journal of Synchrotron Radiation},
  volume          = 26,
  number          = 2,
  pages           = {571-584},
  year            = 2019,
  doi             = {10.1107/s160057751900078x},
  url             = {http://dx.doi.org/10.1107/s160057751900078x},
  keywords        = {esrf},
}




@misc{versteegen23_inser_devic_contr,
  author          = {Reine Versteegen},
  keywords        = {esrf},
  publisher       = {ASD Workshop},
  title           = {Insertion Devices Control},
  year            = 2023,
}




@inproceedings{marion04_hexap_esrf,
  author          = {Marion, Ph and Comin, F and Rostaining, G and others},
  title           = {Hexapods at the ESRF: mechanical aspects results obtained},
  booktitle       = {MEDSI 2004 proceedings},
  year            = 2004,
  pages           = {1--9},
  keywords        = {esrf},
}



@article{fajardo95_contr_six_degree_paral_manip,
  author          = {P. Fajardo and V. Rey‐Bakaikoa},
  title           = {Control of Six Degree‐of‐freedom Parallel Manipulators for
                  Synchrotron Radiation Applications},
  journal         = {Review of Scientific Instruments},
  volume          = 66,
  number          = 2,
  pages           = {1758-1761},
  year            = 1995,
  doi             = {10.1063/1.1145842},
  url             = {http://dx.doi.org/10.1063/1.1145842},
  keywords        = {esrf},
}



@article{cammarata09_chopp_system_time_resol_exper,
  author          = {Marco Cammarata and Laurent Eybert and Friederike Ewald and
                  Wolfgang Reichenbach and Michael Wulff and Philip Anfinrud and
                  Friedrich Schotte and Anton Plech and Qingyu Kong and Maciej
                  Lorenc and Bernd Lindenau and J{\"u}rgen R{\"a}biger and
                  Stephan Polachowski},
  title           = {Chopper System for Time Resolved Experiments With
                  Synchrotron Radiation},
  journal         = {Review of Scientific Instruments},
  volume          = 80,
  number          = 1,
  pages           = 015101,
  year            = 2009,
  doi             = {10.1063/1.3036983},
  url             = {http://dx.doi.org/10.1063/1.3036983},
  keywords        = {esrf},
}




@article{dabin02_mechan_desig_high_precis_posit,
  author          = {Dabin, Y and Rostaing, G and Gagliardini, E and Nicola, M
                  and Borrel, J},
  title           = {The Mechanical Design of High Precision Positioning
                  Instruments, Used for X-Ray Microscopy At the Esrf},
  journal         = {Proceedings of the 2nd Mechanical Engineering Design of
                  Synchrotron Radiation Equipment and Instrumentation},
  volume          = {MEDSI2020},
  year            = 2002,
  keywords        = {Stepper Motors, esrf},
}



@article{dabin03_precis_mechan_high_accur_beaml,
  author          = {Y. Dabin and G. Rostaing and E. Gagliardini and M. Nicola
                  and R. Barrett and J. Susini},
  title           = {Precision-Mechanisms for High Accuracy Beamline Instruments
                  At the Esrf: a Review},
  journal         = {Journal de Physique IV (Proceedings)},
  volume          = 104,
  pages           = {109-112},
  year            = 2003,
  doi             = {10.1051/jp4:200300040},
  url             = {http://dx.doi.org/10.1051/jp4:200300040},
  keywords        = {Stepper Motors, esrf},
}



@inproceedings{guijarro17_bliss_exper_contr_esrf_ebs_beaml,
  author          = {Guijarro, Matias and Beteva, Antonia and Coutinho, Tiago
                  and Dominguez, Marie-Christine and Guilloud, Cyril and Homs,
                  Alejandro and Meyer, Jens and Michel, Vincent and Papillon,
                  Emmanuel and Perez, Manuel and others},
  title           = {BLISS-Experiments Control for ESRF EBS Beamlines},
  booktitle       = {Proc. 16th Int. Conf. on Accelerator and Large Experimental
                  Control Systems (ICALEPCS'17)},
  year            = 2017,
  pages           = {1060--1066},
  keywords        = {esrf},
}




@article{janvier13_icepap,
  author          = {Janvier, N and Clement, JM and Fajardo, P and Cun{\'\i}, G},
  title           = {Icepap: an Advanced Motor Controller for Scientific
                  Applications in Large User Facilities},
  journal         = {TUPPC081, ICALEPCS2013, San Francisco},
  volume          = 2016,
  year            = 2013,
  keywords        = {esrf},
}



@article{baker18_esrf_doubl_cryst_monoc_protot_projec,
  author          = {Baker, Robert and Baboulin, Delphine and Barrett, Raymond
                  and Bernard, Pascal and Berruyer, Gilles and Bonnefoy, Julien
                  and Brendike, Maxim and Brumund, Philipp and Dabin, Yves and
                  Ducott{\'e}, Ludovic and others},
  title           = {Esrf Double Crystal Monochromator Prototype Project},
  journal         = {Proc. MEDSI'18},
  pages           = {440--444},
  year            = 2018,
  keywords        = {dcm, esrf},
}



@misc{dabin04_mecan,
  author          = {Yves Dabin},
  keywords        = {flexure, esrf},
  note            = {5eme rencontre national des M{\'e}caniciens du CNRS},
  title           = {M{\'e}canismes et positionnement de haute pr{\'e}cision},
  year            = 2004,
}



@MastersThesis{reichert21_stiff_hexap,
  author          = {Reichert, Martin},
  school          = {ESRF},
  title           = {Stiffness validation of Hexapod flexures},
  year            = 2021,
  keywords        = {flexure, esrf},
}



@inproceedings{dehaeze21_mechat_approac_devel_nano_activ_stabil_system,
  author          = {Dehaeze, T. and Bonnefoy, J. and Collette, C.},
  title           = {Mechatronics Approach for the Development of a
                  Nano-Active-Stabilization-System},
  booktitle       = {MEDSI'20},
  year            = 2021,
  language        = {english},
  publisher       = {JACoW Publishing},
  series          = {Mechanical Engineering Design of Synchrotron Radiation
                  Equipment and Instrumentation},
  venue           = {Chicago, USA},
  keywords        = {nass, esrf},
}



@inproceedings{brumund21_multib_simul_reduc_order_flexib_bodies_fea,
  author          = {Philipp Brumund and Thomas Dehaeze},
  title           = {Multibody Simulations with Reduced Order Flexible Bodies
                  obtained by FEA},
  booktitle       = {MEDSI'20},
  year            = 2021,
  language        = {english},
  publisher       = {JACoW Publishing},
  series          = {Mechanical Engineering Design of Synchrotron Radiation
                  Equipment and Instrumentation},
  venue           = {Chicago, USA},
  keywords        = {nass, esrf},
}



@article{dehaeze21_activ_dampin_rotat_platf_using,
  author          = {Thomas Dehaeze and Christophe Collette},
  title           = {Active Damping of Rotating Platforms Using Integral Force
                  Feedback},
  journal         = {Engineering Research Express},
  year            = 2021,
  doi             = {10.1088/2631-8695/abe803},
  url             = {https://doi.org/10.1088/2631-8695/abe803},
  month           = {Feb},
  keywords        = {nass, esrf},
}



@unpublished{zhang96_groun_vibrat_orme_meris_super_esrf,
  author          = {Zhang, L.},
  note            = {Ground motion Measurements at Synchrotron sites},
  title           = {Ground Vibrations at the sites of Orme des Merisiers,
                  SuperACO and ESRF},
  year            = 1996,
  keywords        = {esrf},
}



@inproceedings{zelenika04_flexur_use_elast_sr_instr_desig,
  author          = {Zelenika, Sa{\v{s}}a},
  title           = {Flexures-The Use of Elasticity in SR Instruments Design},
  booktitle       = {3rd International Workshop on Mechanical Engineering Design
                  of Synchrotron Radiation Equipment and Instrumentation (MEDSI
                  2004)},
  year            = 2004,
  keywords        = {flexure, esrf},
}



@mastersthesis{youness20_concep,
  author          = {Benyakhlef Youness},
  school          = {ULB},
  title           = {Conception d'un banc de test opto-mecanique},
  year            = 2020,
  keywords        = {esrf},
}



@unpublished{ravy18_shinin_light_synch_light,
  author          = {Sylvain RAVY},
  note            = {MEDSI 2018},
  title           = {Shining a Light on Synchrotron Light},
  year            = 2018,
  keywords        = {esrf},
}



@article{dimper15_esrf_upgrad_progr_phase_ii,
  author          = {Dimper, R and Reichert, H and Raimondi, P and Ortiz, L
                  Sanchez and Sette, F and Susini, J},
  title           = {Esrf Upgrade Programme Phase Ii (2015-2022) Technical
                  Design Study},
  journal         = {The orange book, ESRF},
  year            = 2015,
  keywords        = {esrf},
}



@InProceedings{brendike19_esrf_doubl_cryst_monoc_protot_contr_concep,
  author          = {M. Brendike and G. Berruyer and H. Gonzalez and L.
                  Ducott{\'e} and C. Guilloud and M. Perez, R. Baker},
  title           = {ESRF-Double Crystal Monochromator Prototype - Control
                  Concept},
  year            = {2019},
  keywords        = {esrf, dcm},
}



@inbook{yong16_mechan_desig_high_speed_nanop_system,
  author          = {Yuen Kuan Yong and Kam K. Leang},
  booktitle       = {Nanopositioning Technologies},
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