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diff --git a/nass-introduction.bib b/nass-introduction.bib
index 31f025d..8a46741 100644
--- a/nass-introduction.bib
+++ b/nass-introduction.bib
@@ -1,3 +1,115 @@
+@book{schmidt20_desig_high_perfor_mechat_third_revis_edition,
+ author = {Schmidt, R Munnig and Schitter, Georg and Rankers, Adrian},
+ title = {The Design of High Performance Mechatronics - Third Revised
+ Edition},
+ year = 2020,
+ publisher = {Ios Press},
+ keywords = {favorite},
+}
+
+
+
+@article{shinno11_newly_devel_long_range_posit,
+ author = {H. Shinno and H. Yoshioka and H. Sawano},
+ title = {A Newly Developed Long Range Positioning Table System With
+ a Sub-Nanometer Resolution},
+ journal = {CIRP Annals},
+ volume = 60,
+ number = 1,
+ pages = {403-406},
+ year = 2011,
+ doi = {10.1016/j.cirp.2011.03.027},
+ url = {http://dx.doi.org/10.1016/j.cirp.2011.03.027},
+ keywords = {Two Stage Actuator},
+}
+
+
+
+@article{hauge04_sensor_contr_space_based_six,
+ author = {G.S. Hauge and M.E. Campbell},
+ title = {Sensors and Control of a Space-Based Six-Axis Vibration
+ Isolation System},
+ journal = {Journal of Sound and Vibration},
+ volume = 269,
+ number = {3-5},
+ pages = {913-931},
+ year = 2004,
+ doi = {10.1016/s0022-460x(03)00206-2},
+ url = {https://doi.org/10.1016/s0022-460x(03)00206-2},
+ keywords = {parallel robot, favorite},
+}
+
+
+
+@article{thayer02_six_axis_vibrat_isolat_system,
+ author = {Doug Thayer and Mark Campbell and Juris Vagners and Andrew
+ von Flotow},
+ title = {Six-Axis Vibration Isolation System Using Soft Actuators
+ and Multiple Sensors},
+ journal = {Journal of Spacecraft and Rockets},
+ volume = 39,
+ number = 2,
+ pages = {206-212},
+ year = 2002,
+ doi = {10.2514/2.3821},
+ url = {https://doi.org/10.2514/2.3821},
+ keywords = {parallel robot},
+}
+
+
+
+@article{tang18_decen_vibrat_contr_voice_coil,
+ author = {Jie Tang and Dengqing Cao and Tianhu Yu},
+ title = {Decentralized Vibration Control of a Voice Coil Motor-Based
+ Stewart Parallel Mechanism: Simulation and Experiments},
+ journal = {Proceedings of the Institution of Mechanical Engineers,
+ Part C: Journal of Mechanical Engineering Science},
+ volume = 233,
+ number = 1,
+ pages = {132-145},
+ year = 2018,
+ doi = {10.1177/0954406218756941},
+ url = {https://doi.org/10.1177/0954406218756941},
+ keywords = {parallel robot},
+}
+
+
+
+@article{du14_piezo_actuat_high_precis_flexib,
+ author = {Zhijiang Du and Ruochong Shi and Wei Dong},
+ title = {A Piezo-Actuated High-Precision Flexible Parallel Pointing
+ Mechanism: Conceptual Design, Development, and Experiments},
+ journal = {IEEE Transactions on Robotics},
+ volume = 30,
+ number = 1,
+ pages = {131-137},
+ year = 2014,
+ doi = {10.1109/tro.2013.2288800},
+ url = {https://doi.org/10.1109/tro.2013.2288800},
+ keywords = {parallel robot},
+}
+
+
+
+@article{yang19_dynam_model_decoup_contr_flexib,
+ author = {Yang, XiaoLong and Wu, HongTao and Chen, Bai and Kang,
+ ShengZheng and Cheng, ShiLi},
+ title = {Dynamic Modeling and Decoupled Control of a Flexible
+ Stewart Platform for Vibration Isolation},
+ journal = {Journal of Sound and Vibration},
+ volume = 439,
+ pages = {398-412},
+ year = 2019,
+ doi = {10.1016/j.jsv.2018.10.007},
+ url = {https://doi.org/10.1016/j.jsv.2018.10.007},
+ issn = {0022-460X},
+ keywords = {parallel robot, flexure, decoupled control},
+ month = {Jan},
+ publisher = {Elsevier BV},
+}
+
+
+
@phdthesis{li01_simul_fault_vibrat_isolat_point,
author = {Li, Xiaochun},
keywords = {parallel robot},
@@ -43,6 +155,21 @@
+@article{kong18_vibrat_isolat_dual_stage_actuat,
+ author = {Yongfang Kong and Hai Huang},
+ title = {Vibration Isolation and Dual-Stage Actuation Pointing
+ System for Space Precision Payloads},
+ journal = {Acta Astronautica},
+ volume = 143,
+ pages = {183-192},
+ year = 2018,
+ doi = {10.1016/j.actaastro.2017.11.038},
+ url = {https://doi.org/10.1016/j.actaastro.2017.11.038},
+ keywords = {Two Stage Actuator, parallel robot},
+}
+
+
+
@phdthesis{naves20_desig,
author = {Mark Naves},
school = {Univeristy of Twente},
@@ -53,6 +180,254 @@
+@inproceedings{schroer17_ptynam,
+ author = {Christian G. Schroer and Martin Seyrich and Maik Kahnt and
+ Stephan Botta and Ralph D{\"o}hrmann and Gerald Falkenberg and
+ Jan Garrevoet and Mikhail Lyubomirskiy and Maria Scholz and
+ Andreas Schropp and Felix Wittwer},
+ title = {PtyNAMi: Ptychographic Nano-Analytical Microscope at PETRA
+ III: interferometrically tracking positions for 3D x-ray
+ scanning microscopy using a ball-lens retroreflector},
+ booktitle = {X-Ray Nanoimaging: Instruments and Methods III},
+ year = 2017,
+ doi = {10.1117/12.2273710},
+ url = {https://doi.org/10.1117/12.2273710},
+ keywords = {nass, metrology},
+ month = 9,
+}
+
+
+
+@article{villar18_nanop_esrf_id16a_nano_imagin_beaml,
+ author = {F. Villar and L. Andre and R. Baker and S. Bohic and J. C.
+ da Silva and C. Guilloud and O. Hignette and J. Meyer and A.
+ Pacureanu and M. Perez and M. Salome and P. van der Linden and
+ Y. Yang and P. Cloetens},
+ title = {Nanopositioning for the Esrf Id16a Nano-Imaging Beamline},
+ journal = {Synchrotron Radiation News},
+ volume = 31,
+ number = 5,
+ pages = {9-14},
+ year = 2018,
+ doi = {10.1080/08940886.2018.1506234},
+ url = {http://dx.doi.org/10.1080/08940886.2018.1506234},
+ keywords = {esrf},
+}
+
+
+
+
+@article{schropp20_ptynam,
+ author = {Andreas Schropp and Ralph D{\"o}hrmann and Stephan Botta
+ and Dennis Br{\"u}ckner and Maik Kahnt and Mikhail
+ Lyubomirskiy and Christina Ossig and Maria Scholz and Martin
+ Seyrich and Michael E. Stuckelberger and Patrik Wiljes and
+ Felix Wittwer and Jan Garrevoet and Gerald Falkenberg and
+ Yakub Fam and Thomas L. Sheppard and Jan-Dierk Grunwaldt and
+ Christian G. Schroer},
+ title = {Ptynami: Ptychographic Nano-Analytical Microscope},
+ journal = {Journal of Applied Crystallography},
+ volume = 53,
+ number = 4,
+ pages = {957-971},
+ year = 2020,
+ doi = {10.1107/s1600576720008420},
+ url = {http://dx.doi.org/10.1107/s1600576720008420},
+ DATE_ADDED = {Thu May 2 16:01:03 2024},
+}
+
+
+
+@article{nazaretski15_pushin_limit,
+ author = {E. Nazaretski and K. Lauer and H. Yan and N. Bouet and J.
+ Zhou and R. Conley and X. Huang and W. Xu and M. Lu and K.
+ Gofron and S. Kalbfleisch and U. Wagner and C. Rau and Y. S.
+ Chu},
+ title = {Pushing the Limits: an Instrument for Hard X-Ray Imaging
+ Below 20 Nm},
+ journal = {Journal of Synchrotron Radiation},
+ volume = 22,
+ number = 2,
+ pages = {336-341},
+ year = 2015,
+ doi = {10.1107/s1600577514025715},
+ url = {https://doi.org/10.1107/s1600577514025715},
+ keywords = {nass},
+}
+
+
+
+@article{stankevic17_inter_charac_rotat_stages_x_ray_nanot,
+ author = {Tomas Stankevic and Christer Engblom and Florent Langlois
+ and Filipe Alves and Alain Lestrade and Nicolas Jobert and
+ Gilles Cauchon and Ulrich Vogt and Stefan Kubsky},
+ title = {Interferometric Characterization of Rotation Stages for
+ X-Ray Nanotomography},
+ journal = {Review of Scientific Instruments},
+ volume = 88,
+ number = 5,
+ pages = 053703,
+ year = 2017,
+ doi = {10.1063/1.4983405},
+ url = {https://doi.org/10.1063/1.4983405},
+ keywords = {nass, metrology},
+}
+
+
+
+@inproceedings{engblom18_nanop_resul,
+ author = {C. Engblom and others},
+ title = {Nanoprobe Results: Metrology \& Control in Stacked
+ Closed-Loop Systems},
+ booktitle = {Proc. of International Conference on Accelerator and Large
+ Experimental Control Systems (ICALEPCS'17)},
+ year = 2018,
+ doi = {10.18429/JACoW-ICALEPCS2017-WEAPL04},
+ url = {https://doi.org/10.18429/JACoW-ICALEPCS2017-WEAPL04},
+ isbn = {978-3-95450-193-9},
+ month = {Jan.},
+ publisher = {JACoW},
+ keywords = {nass},
+}
+
+
+
+@article{nazaretski22_new_kirkp_baez_based_scann,
+ author = {E. Nazaretski and D. S. Coburn and W. Xu and J. Ma and H.
+ Xu and R. Smith and X. Huang and Y. Yang and L. Huang and M.
+ Idir and A. Kiss and Y. S. Chu},
+ title = {A New Kirkpatrick-Baez-Based Scanning Microscope for the
+ Submicron Resolution X-Ray Spectroscopy (SRX) Beamline At
+ Nsls-Ii},
+ journal = {Journal of Synchrotron Radiation},
+ volume = 29,
+ number = 5,
+ pages = {1284-1291},
+ year = 2022,
+ doi = {10.1107/s1600577522007056},
+ url = {http://dx.doi.org/10.1107/s1600577522007056},
+ DATE_ADDED = {Thu May 2 16:33:47 2024},
+}
+
+
+
+
+@article{holler17_omny_pin_versat_sampl_holder,
+ author = {M. Holler and J. Raabe and R. Wepf and S. H. Shahmoradian
+ and A. Diaz and B. Sarafimov and T. Lachat and H. Walther and
+ M. Vitins},
+ title = {Omny Pin-A Versatile Sample Holder for Tomographic
+ Measurements At Room and Cryogenic Temperatures},
+ journal = {Review of Scientific Instruments},
+ volume = 88,
+ number = 11,
+ pages = 113701,
+ year = 2017,
+ doi = {10.1063/1.4996092},
+ url = {https://doi.org/10.1063/1.4996092},
+ keywords = {nass},
+}
+
+
+
+@article{holler18_omny_tomog_nano_cryo_stage,
+ author = {M. Holler and J. Raabe and A. Diaz and M. Guizar-Sicairos
+ and R. Wepf and M. Odstrcil and F. R. Shaik and V. Panneels
+ and A. Menzel and B. Sarafimov and S. Maag and X. Wang and V.
+ Thominet and H. Walther and T. Lachat and M. Vitins and O.
+ Bunk},
+ title = {Omny-A Tomography Nano Cryo Stage},
+ journal = {Review of Scientific Instruments},
+ volume = 89,
+ number = 4,
+ pages = 043706,
+ year = 2018,
+ doi = {10.1063/1.5020247},
+ url = {https://doi.org/10.1063/1.5020247},
+ keywords = {nass},
+}
+
+
+
+@article{kelly22_delta_robot_long_travel_nano,
+ author = {Jon Kelly and Andrew Male and Nicholas Rubies and David
+ Mahoney and Jessica M. Walker and Miguel A. Gomez-Gonzalez and
+ Guy Wilkin and Julia E. Parker and Paul D. Quinn},
+ title = {The Delta Robot-A Long Travel Nano-Positioning Stage for
+ Scanning X-Ray Microscopy},
+ journal = {Review of Scientific Instruments},
+ volume = 93,
+ number = 4,
+ pages = {nil},
+ year = 2022,
+ doi = {10.1063/5.0084806},
+ url = {http://dx.doi.org/10.1063/5.0084806},
+ DATE_ADDED = {Thu May 2 20:27:54 2024},
+}
+
+
+
+
+@inproceedings{xu23_high_nsls_ii,
+ author = {Weihe Xu and Huijuan Xu and Dmitri Gavrilov and Xiaojing
+ Huang and Hanfei Yan and Yong S. Chu and Evgeny Nazaretski},
+ title = {High-speed fly-scan capabilities for x-ray microscopy
+ systems at NSLS-II},
+ booktitle = {X-Ray Nanoimaging: Instruments and Methods VI},
+ year = 2023,
+ pages = {nil},
+ doi = {10.1117/12.2675940},
+ url = {http://dx.doi.org/10.1117/12.2675940},
+ DATE_ADDED = {Thu May 2 16:24:55 2024},
+ month = 10,
+}
+
+
+
+
+@inproceedings{geraldes23_sapot_carnaub_sirius_lnls,
+ author = {Renan R. Geraldes and Gabriel B. Z. L. Moreno and Francesco
+ R. Lena and Erik O. Pereira and Matheus H. S. da Silva and
+ Gabriel G. Bas{\'i}lio and Pedro P. R. Proen{\c{c}}a and
+ Rodrigo C. Gomes and Cassiano S. N. C. Bueno and Sergio A. L.
+ Luiz and Artur C. Pinto and Bernd C. Meyer and Douglas Galante
+ and Carlos A. P{\'e}rez and Verônica C. Teixeira and Leonardo
+ M. Kofukuda and Anna P. S. Sotero and Theo A. M. Ruijl and
+ Walter Aarden and Piet Peters and Maryn Wijnhoven and Helio C.
+ N. Tolentino},
+ title = {The high-dynamic cryogenic sample stage for
+ SAPOTI/CARNA{\'U}BA at Sirius/LNLS},
+ booktitle = {PROCEEDINGS OF THE 15TH INTERNATIONAL CONFERENCE ON X-RAY
+ MICROSCOPY - XRM2022},
+ year = 2023,
+ pages = {nil},
+ doi = {10.1063/5.0168438},
+ url = {http://dx.doi.org/10.1063/5.0168438},
+ DATE_ADDED = {Thu May 2 18:09:04 2024},
+ month = {-},
+}
+
+
+
+
+@article{wang12_autom_marker_full_field_hard,
+ author = {Jun Wang and Yu-chen Karen Chen and Qingxi Yuan and Andrei
+ Tkachuk and Can Erdonmez and Benjamin Hornberger and Michael
+ Feser},
+ title = {Automated Markerless Full Field Hard X-Ray Microscopic
+ Tomography At Sub-50 Nm 3-dimension Spatial Resolution},
+ journal = {Applied Physics Letters},
+ volume = 100,
+ number = 14,
+ pages = 143107,
+ year = 2012,
+ doi = {10.1063/1.3701579},
+ url = {https://doi.org/10.1063/1.3701579},
+ keywords = {nass},
+}
+
+
+
@article{xu12_desig_devel_flexur_based_dual,
author = {Xu, Qingsong},
title = {Design and Development of a Flexure-Based Dual-Stage
@@ -419,21 +794,6 @@
-@article{kong18_vibrat_isolat_dual_stage_actuat,
- author = {Yongfang Kong and Hai Huang},
- title = {Vibration Isolation and Dual-Stage Actuation Pointing
- System for Space Precision Payloads},
- journal = {Acta Astronautica},
- volume = 143,
- pages = {183-192},
- year = 2018,
- doi = {10.1016/j.actaastro.2017.11.038},
- url = {https://doi.org/10.1016/j.actaastro.2017.11.038},
- keywords = {Two Stage Actuator, parallel robot},
-}
-
-
-
@book{du19_multi_actuat_system_contr,
author = {Chunling Du and Chee Khiang Pang},
title = {Multi-stage Actuation Systems and Control},
@@ -508,22 +868,6 @@
-@article{shinno11_newly_devel_long_range_posit,
- author = {H. Shinno and H. Yoshioka and H. Sawano},
- title = {A Newly Developed Long Range Positioning Table System With
- a Sub-Nanometer Resolution},
- journal = {CIRP Annals},
- volume = 60,
- number = 1,
- pages = {403-406},
- year = 2011,
- doi = {10.1016/j.cirp.2011.03.027},
- url = {http://dx.doi.org/10.1016/j.cirp.2011.03.027},
- keywords = {Two Stage Actuator},
-}
-
-
-
@article{shan15_contr_review,
author = {Guanqiao Shan and Yingzi Li and Liwen Zhang and Zhenyu Wang
and Yingxu Zhang and Jianqiang Qian},
@@ -561,71 +905,6 @@
-@book{schmidt20_desig_high_perfor_mechat_third_revis_edition,
- author = {Schmidt, R Munnig and Schitter, Georg and Rankers, Adrian},
- title = {The Design of High Performance Mechatronics - Third Revised
- Edition},
- year = 2020,
- publisher = {Ios Press},
- keywords = {favorite},
-}
-
-
-
-@article{wang12_autom_marker_full_field_hard,
- author = {Jun Wang and Yu-chen Karen Chen and Qingxi Yuan and Andrei
- Tkachuk and Can Erdonmez and Benjamin Hornberger and Michael
- Feser},
- title = {Automated Markerless Full Field Hard X-Ray Microscopic
- Tomography At Sub-50 Nm 3-dimension Spatial Resolution},
- journal = {Applied Physics Letters},
- volume = 100,
- number = 14,
- pages = 143107,
- year = 2012,
- doi = {10.1063/1.3701579},
- url = {https://doi.org/10.1063/1.3701579},
- keywords = {nass},
-}
-
-
-
-@article{stankevic17_inter_charac_rotat_stages_x_ray_nanot,
- author = {Tomas Stankevic and Christer Engblom and Florent Langlois
- and Filipe Alves and Alain Lestrade and Nicolas Jobert and
- Gilles Cauchon and Ulrich Vogt and Stefan Kubsky},
- title = {Interferometric Characterization of Rotation Stages for
- X-Ray Nanotomography},
- journal = {Review of Scientific Instruments},
- volume = 88,
- number = 5,
- pages = 053703,
- year = 2017,
- doi = {10.1063/1.4983405},
- url = {https://doi.org/10.1063/1.4983405},
- keywords = {nass, metrology},
-}
-
-
-
-@inproceedings{schroer17_ptynam,
- author = {Christian G. Schroer and Martin Seyrich and Maik Kahnt and
- Stephan Botta and Ralph D{\"o}hrmann and Gerald Falkenberg and
- Jan Garrevoet and Mikhail Lyubomirskiy and Maria Scholz and
- Andreas Schropp and Felix Wittwer},
- title = {PtyNAMi: Ptychographic Nano-Analytical Microscope at PETRA
- III: interferometrically tracking positions for 3D x-ray
- scanning microscopy using a ball-lens retroreflector},
- booktitle = {X-Ray Nanoimaging: Instruments and Methods III},
- year = 2017,
- doi = {10.1117/12.2273710},
- url = {https://doi.org/10.1117/12.2273710},
- keywords = {nass, metrology},
- month = 9,
-}
-
-
-
@article{nazaretski17_desig_perfor_x_ray_scann,
author = {E. Nazaretski and H. Yan and K. Lauer and N. Bouet and X.
Huang and W. Xu and J. Zhou and D. Shu and Y Hwu and Y. S.
@@ -644,45 +923,6 @@
-@article{nazaretski15_pushin_limit,
- author = {E. Nazaretski and K. Lauer and H. Yan and N. Bouet and J.
- Zhou and R. Conley and X. Huang and W. Xu and M. Lu and K.
- Gofron and S. Kalbfleisch and U. Wagner and C. Rau and Y. S.
- Chu},
- title = {Pushing the Limits: an Instrument for Hard X-Ray Imaging
- Below 20 Nm},
- journal = {Journal of Synchrotron Radiation},
- volume = 22,
- number = 2,
- pages = {336-341},
- year = 2015,
- doi = {10.1107/s1600577514025715},
- url = {https://doi.org/10.1107/s1600577514025715},
- keywords = {nass},
-}
-
-
-
-@article{nazaretski22_new_kirkp_baez_based_scann,
- author = {E. Nazaretski and D. S. Coburn and W. Xu and J. Ma and H.
- Xu and R. Smith and X. Huang and Y. Yang and L. Huang and M.
- Idir and A. Kiss and Y. S. Chu},
- title = {A New Kirkpatrick-Baez-Based Scanning Microscope for the
- Submicron Resolution X-Ray Spectroscopy (SRX) Beamline At
- Nsls-Ii},
- journal = {Journal of Synchrotron Radiation},
- volume = 29,
- number = 5,
- pages = {1284-1291},
- year = 2022,
- doi = {10.1107/s1600577522007056},
- url = {http://dx.doi.org/10.1107/s1600577522007056},
- DATE_ADDED = {Thu May 2 16:33:47 2024},
-}
-
-
-
-
@inproceedings{naves20_t_flex,
author = {Naves, M and Hakvoort, WBJ and Nijenhuis, M and Brouwer,
DM},
@@ -725,60 +965,6 @@
-@article{holler18_omny_tomog_nano_cryo_stage,
- author = {M. Holler and J. Raabe and A. Diaz and M. Guizar-Sicairos
- and R. Wepf and M. Odstrcil and F. R. Shaik and V. Panneels
- and A. Menzel and B. Sarafimov and S. Maag and X. Wang and V.
- Thominet and H. Walther and T. Lachat and M. Vitins and O.
- Bunk},
- title = {Omny-A Tomography Nano Cryo Stage},
- journal = {Review of Scientific Instruments},
- volume = 89,
- number = 4,
- pages = 043706,
- year = 2018,
- doi = {10.1063/1.5020247},
- url = {https://doi.org/10.1063/1.5020247},
- keywords = {nass},
-}
-
-
-
-@article{holler17_omny_pin_versat_sampl_holder,
- author = {M. Holler and J. Raabe and R. Wepf and S. H. Shahmoradian
- and A. Diaz and B. Sarafimov and T. Lachat and H. Walther and
- M. Vitins},
- title = {Omny Pin-A Versatile Sample Holder for Tomographic
- Measurements At Room and Cryogenic Temperatures},
- journal = {Review of Scientific Instruments},
- volume = 88,
- number = 11,
- pages = 113701,
- year = 2017,
- doi = {10.1063/1.4996092},
- url = {https://doi.org/10.1063/1.4996092},
- keywords = {nass},
-}
-
-
-
-@inproceedings{engblom18_nanop_resul,
- author = {C. Engblom and others},
- title = {Nanoprobe Results: Metrology \& Control in Stacked
- Closed-Loop Systems},
- booktitle = {Proc. of International Conference on Accelerator and Large
- Experimental Control Systems (ICALEPCS'17)},
- year = 2018,
- doi = {10.18429/JACoW-ICALEPCS2017-WEAPL04},
- url = {https://doi.org/10.18429/JACoW-ICALEPCS2017-WEAPL04},
- isbn = {978-3-95450-193-9},
- month = {Jan.},
- publisher = {JACoW},
- keywords = {nass},
-}
-
-
-
@inproceedings{dehaeze18_sampl_stabil_for_tomog_exper,
author = {Thomas Dehaeze and M. Magnin Mattenet and Christophe
Collette},
@@ -803,23 +989,6 @@
-@inproceedings{xu23_high_nsls_ii,
- author = {Weihe Xu and Huijuan Xu and Dmitri Gavrilov and Xiaojing
- Huang and Hanfei Yan and Yong S. Chu and Evgeny Nazaretski},
- title = {High-speed fly-scan capabilities for x-ray microscopy
- systems at NSLS-II},
- booktitle = {X-Ray Nanoimaging: Instruments and Methods VI},
- year = 2023,
- pages = {nil},
- doi = {10.1117/12.2675940},
- url = {http://dx.doi.org/10.1117/12.2675940},
- DATE_ADDED = {Thu May 2 16:24:55 2024},
- month = 10,
-}
-
-
-
-
@article{raimondi21_commis_hybrid_multib_achrom_lattic,
author = {P. Raimondi and N. Carmignani and L. R. Carver and J.
Chavanne and L. Farvacque and G. Le Bec and D. Martin and S.
@@ -887,25 +1056,6 @@
-@article{villar18_nanop_esrf_id16a_nano_imagin_beaml,
- author = {F. Villar and L. Andre and R. Baker and S. Bohic and J. C.
- da Silva and C. Guilloud and O. Hignette and J. Meyer and A.
- Pacureanu and M. Perez and M. Salome and P. van der Linden and
- Y. Yang and P. Cloetens},
- title = {Nanopositioning for the Esrf Id16a Nano-Imaging Beamline},
- journal = {Synchrotron Radiation News},
- volume = 31,
- number = 5,
- pages = {9-14},
- year = 2018,
- doi = {10.1080/08940886.2018.1506234},
- url = {http://dx.doi.org/10.1080/08940886.2018.1506234},
- keywords = {esrf},
-}
-
-
-
-
@article{riekel10_progr_micro_nano_diffr_at,
author = {Christian Riekel and Manfred Burghammer and Richard Davies},
title = {Progress in Micro- and Nano-Diffraction At the Esrf Id13
@@ -1368,27 +1518,6 @@
-@article{schropp20_ptynam,
- author = {Andreas Schropp and Ralph D{\"o}hrmann and Stephan Botta
- and Dennis Br{\"u}ckner and Maik Kahnt and Mikhail
- Lyubomirskiy and Christina Ossig and Maria Scholz and Martin
- Seyrich and Michael E. Stuckelberger and Patrik Wiljes and
- Felix Wittwer and Jan Garrevoet and Gerald Falkenberg and
- Yakub Fam and Thomas L. Sheppard and Jan-Dierk Grunwaldt and
- Christian G. Schroer},
- title = {Ptynami: Ptychographic Nano-Analytical Microscope},
- journal = {Journal of Applied Crystallography},
- volume = 53,
- number = 4,
- pages = {957-971},
- year = 2020,
- doi = {10.1107/s1600576720008420},
- url = {http://dx.doi.org/10.1107/s1600576720008420},
- DATE_ADDED = {Thu May 2 16:01:03 2024},
-}
-
-
-
@article{schroeck01_compen_desig_linear_time_invar,
author = {S.J. Schroeck and W.C. Messner and R.J. McNab},
title = {On Compensator Design for Linear Time-Invariant Dual-Input
@@ -1404,50 +1533,38 @@
-@inproceedings{geraldes23_sapot_carnaub_sirius_lnls,
- author = {Renan R. Geraldes and Gabriel B. Z. L. Moreno and Francesco
- R. Lena and Erik O. Pereira and Matheus H. S. da Silva and
- Gabriel G. Bas{\'i}lio and Pedro P. R. Proen{\c{c}}a and
- Rodrigo C. Gomes and Cassiano S. N. C. Bueno and Sergio A. L.
- Luiz and Artur C. Pinto and Bernd C. Meyer and Douglas Galante
- and Carlos A. P{\'e}rez and Verônica C. Teixeira and Leonardo
- M. Kofukuda and Anna P. S. Sotero and Theo A. M. Ruijl and
- Walter Aarden and Piet Peters and Maryn Wijnhoven and Helio C.
- N. Tolentino},
- title = {The high-dynamic cryogenic sample stage for
- SAPOTI/CARNA{\'U}BA at Sirius/LNLS},
- booktitle = {PROCEEDINGS OF THE 15TH INTERNATIONAL CONFERENCE ON X-RAY
- MICROSCOPY - XRM2022},
- year = 2023,
- pages = {nil},
- doi = {10.1063/5.0168438},
- url = {http://dx.doi.org/10.1063/5.0168438},
- DATE_ADDED = {Thu May 2 18:09:04 2024},
- month = {-},
+@article{schoeppler17_shapin_highl_regul_glass_archit,
+ author = {Vanessa Schoeppler and Elke Reich and Jean Vacelet and
+ Martin Rosenthal and Alexandra Pacureanu and Alexander Rack
+ and Paul Zaslansky and Emil Zolotoyabko and Igor Zlotnikov },
+ title = {Shaping Highly Regular Glass Architectures: a Lesson From
+ Nature},
+ journal = {Science Advances},
+ volume = 3,
+ number = 10,
+ pages = {eaao2047},
+ year = 2017,
+ doi = {10.1126/sciadv.aao2047},
+ URL = {https://www.science.org/doi/abs/10.1126/sciadv.aao2047},
}
-
-@article{kelly22_delta_robot_long_travel_nano,
- author = {Jon Kelly and Andrew Male and Nicholas Rubies and David
- Mahoney and Jessica M. Walker and Miguel A. Gomez-Gonzalez and
- Guy Wilkin and Julia E. Parker and Paul D. Quinn},
- title = {The Delta Robot-A Long Travel Nano-Positioning Stage for
- Scanning X-Ray Microscopy},
- journal = {Review of Scientific Instruments},
- volume = 93,
- number = 4,
- pages = {nil},
- year = 2022,
- doi = {10.1063/5.0084806},
- url = {http://dx.doi.org/10.1063/5.0084806},
- DATE_ADDED = {Thu May 2 20:27:54 2024},
+@article{sanchez-cano17_synch_x_ray_fluor_nanop,
+ author = {Sanchez-Cano, Carlos and Romero-Canel{\'o}n, Isolda and
+ Yang, Yang and Hands-Portman, Ian J. and Bohic, Sylvain and
+ Cloetens, Peter and Sadler, Peter J.},
+ title = {Synchrotron X-Ray Fluorescence Nanoprobe Reveals Target
+ Sites for Organo-Osmium Complex in Human Ovarian Cancer Cells},
+ journal = {Chemistry - A European Journal},
+ volume = 23,
+ number = 11,
+ pages = {2512-2516},
+ year = 2017,
+ doi = {10.1002/chem.201605911},
}
-
-
@article{barrett16_reflec_optic_hard_x_ray,
author = {R. Barrett and R. Baker and P. Cloetens and C. Morawe and
R. Tucoulou and A. Vivo},
@@ -1529,6 +1646,163 @@
+@article{collette11_review_activ_vibrat_isolat_strat,
+ author = {Christophe Collette and Stef Janssens and Kurt Artoos},
+ title = {Review of Active Vibration Isolation Strategies},
+ journal = {Recent Patents on Mechanical Engineeringe},
+ volume = 4,
+ number = 3,
+ pages = {212-219},
+ year = 2011,
+ doi = {10.2174/2212797611104030212},
+ url = {https://doi.org/10.2174/2212797611104030212},
+ keywords = {favorite},
+}
+
+
+
+@article{chesne16_enhan_dampin_flexib_struc_using_force_feedb,
+ author = {Simon Chesn{\'e} and Ariston Milhomem and Christophe
+ Collette},
+ title = {Enhanced Damping of Flexible Structures Using Force
+ Feedback},
+ journal = {Journal of Guidance, Control, and Dynamics},
+ volume = 39,
+ number = 7,
+ pages = {1654-1658},
+ year = 2016,
+ doi = {10.2514/1.g001620},
+ url = {https://doi.org/10.2514/1.g001620},
+ keywords = {active damping, integral force feedback},
+}
+
+
+
+@article{geng95_intel_contr_system_multip_degree,
+ author = {Z. Jason Geng and George G. Pan and Leonard S. Haynes and
+ Ben K. Wada and John A. Garba},
+ title = {An Intelligent Control System for Multiple
+ Degree-Of-Freedom Vibration Isolation},
+ journal = {Journal of Intelligent Material Systems and Structures},
+ volume = 6,
+ number = 6,
+ pages = {787-800},
+ year = 1995,
+ doi = {10.1177/1045389x9500600607},
+ url = {https://doi.org/10.1177/1045389x9500600607},
+ keywords = {parallel robot},
+}
+
+
+
+@article{wang16_inves_activ_vibrat_isolat_stewar,
+ author = {Wang, Chaoxin and Xie, Xiling and Chen, Yanhao and Zhang,
+ Zhiyi},
+ title = {Investigation on Active Vibration Isolation of a Stewart
+ Platform With Piezoelectric Actuators},
+ journal = {Journal of Sound and Vibration},
+ volume = 383,
+ pages = {1-19},
+ year = 2016,
+ doi = {10.1016/j.jsv.2016.07.021},
+ url = {https://doi.org/10.1016/j.jsv.2016.07.021},
+ issn = {0022-460X},
+ keywords = {parallel robot},
+ month = {Nov},
+ publisher = {Elsevier BV},
+}
+
+
+
+@inproceedings{li01_simul_vibrat_isolat_point_contr,
+ author = {Xiaochun Li and Jerry C. Hamann and John E. McInroy},
+ title = {Simultaneous Vibration Isolation and Pointing Control of
+ Flexure Jointed Hexapods},
+ booktitle = {Smart Structures and Materials 2001: Smart Structures and
+ Integrated Systems},
+ year = 2001,
+ doi = {10.1117/12.436521},
+ url = {https://doi.org/10.1117/12.436521},
+ keywords = {parallel robot},
+ month = 8,
+}
+
+
+
+@article{pu11_six_degree_of_freed_activ,
+ author = {H Pu and X Chen and Z Zhou and X Luo},
+ title = {Six-Degree-Of-Freedom Active Vibration Isolation System
+ With Decoupled Collocated Control},
+ journal = {Proceedings of the Institution of Mechanical Engineers,
+ Part B: Journal of Engineering Manufacture},
+ volume = 226,
+ number = 2,
+ pages = {313-325},
+ year = 2011,
+ doi = {10.1177/0954405411414336},
+ url = {https://doi.org/10.1177/0954405411414336},
+ keywords = {parallel robot},
+}
+
+
+
+@inproceedings{xie17_model_contr_hybrid_passiv_activ,
+ author = {Xie, Xiling and Wang, Chaoxin and Zhang, Zhiyi},
+ title = {Modeling and Control of A Hybrid Passive/Active Stewart
+ Vibration Isolation Platform},
+ booktitle = {INTER-NOISE and NOISE-CON Congress and Conference
+ Proceedings},
+ year = 2017,
+ volume = 255,
+ number = 6,
+ pages = {1844--1853},
+ keywords = {parallel robot},
+ organization = {Institute of Noise Control Engineering},
+}
+
+
+
+@phdthesis{tjepkema12_activ_ph,
+ author = {Tjepkema, D},
+ title = {Active hard mount vibration isolation for precision
+ equipment [Ph. D. thesis]},
+ university = {University of Twente, Enschede, The Netherlands},
+ year = {2012},
+}
+
+
+
+@article{tjepkema12_sensor_fusion_activ_vibrat_isolat_precis_equip,
+ author = {D. Tjepkema and J. van Dijk and H.M.J.R. Soemers},
+ title = {Sensor Fusion for Active Vibration Isolation in Precision
+ Equipment},
+ journal = {Journal of Sound and Vibration},
+ volume = 331,
+ number = 4,
+ pages = {735-749},
+ year = 2012,
+ doi = {10.1016/j.jsv.2011.09.022},
+ url = {https://doi.org/10.1016/j.jsv.2011.09.022},
+ keywords = {complementary filters},
+}
+
+
+
+@article{beijen14_two_sensor_contr_activ_vibrat,
+ author = {Michiel A. Beijen and Dirk Tjepkema and Johannes van Dijk},
+ title = {Two-Sensor Control in Active Vibration Isolation Using Hard
+ Mounts},
+ journal = {Control Engineering Practice},
+ volume = 26,
+ pages = {82-90},
+ year = 2014,
+ doi = {10.1016/j.conengprac.2013.12.015},
+ url = {https://doi.org/10.1016/j.conengprac.2013.12.015},
+ keywords = {complementary filters},
+}
+
+
+
@inproceedings{dehaeze20_activ_dampin_rotat_platf_integ_force_feedb,
author = {Dehaeze, T. and Collette, C.},
title = {Active Damping of Rotating Platforms using Integral Force
diff --git a/nass-introduction.org b/nass-introduction.org
index 9995d34..d34a6d2 100644
--- a/nass-introduction.org
+++ b/nass-introduction.org
@@ -88,7 +88,80 @@
Prefix is =introduction=
-** TODO [#C] Synchrotron moore laws
+** Figures [11/11]
+*** DONE [#C] Make all the figures
+CLOSED: [2024-05-30 Thu 08:36]
+
+1. [X] Map with all the Synchrotrons in the World: =introduction_synchrotrons=
+ Show Synchrotron going to 4th generation, Highlight ESRF
+2. [X] =introduction_esrf_schematic=
+ highlight Linac, Booster, Storage ring, ID31 beamline
+3. [X] Good Picture of ESRF: =introduction_esrf_picture=
+4. [X] Synchrotron Moore law =fig:introduction_moore_law_brillance=
+5. [X] Picture of the beam =introduction_beam_3rd_generation= and =introduction_beam_4th_generation=
+6. [X] ID31/typical beamline layout with: =introduction_id31_layout=
+ - Insertion device
+7. [X] CAD view of the ID31 EH: =introduction_id31_cad=
+ - Highlight focussing optics, positioning station, sample, detector
+ - Show X-Y-Z vectors
+8. [X] Micro-Station with each stage in different color and associated motions
+ - [X] =introduction_micro_station_dof=
+ - [X] =introduction_id31_microstation_picture=
+9. [X] Typical experiment (ideally from ID31 experiments):
+ - [X] tomography: =introduction_exp_tomography= and =introduction_exp_tomography_image=
+ - [X] scanning: =introduction_exp_scanning= and =introduction_exp_scanning_image=
+10. [X] Typical linear stage =introduction_translation_stage=
+ - [X] Show: stepper motor, ball screw, linear guides
+ - [X] Show: straightness, flatness, etc...
+11. [X] Flexure based stage =introduction_flexure_stage=
+12. [X] NASS concept: =introduction_nass_concept_schematic=
+ - 4 elements: micro-station, nano-hexapod, metrology, control system
+13. [X] NASS metrology schematic: =introduction_nass_metrology=
+ - Nano-hexapod, sample, spherical mirror with flat bottom surface
+ - several fiber interferometers with tracking systems (arrows showing that they can move in Rx/Ry)
+14. [ ] straightness, flatness and issue with stack stages? (already have a figure comparing serial vs parallel kinematics)
+15. [X] Show some passive end-stations =introduction_passive_stations=
+ - [X] ID16b
+ - [X] ID11
+16. [X] Show passive end-stations with extral metrology =introduction_metrology_stations=
+17. [X] Show active end-stations =introduction_acti_stations=
+ - [X] ID16a
+ - [X] Nazaretski
+18. [X] Two stage control =introduction_two_stage_control=
+ Schematic with the long stroke, short stroke, metrology and control architecture: trajectory generation => long stroke & short stroke + feedback on the short stroke
+19. [X] Examples of two stage control:
+ - [X] =introduction_two_stage_control_h_bridge= from [[cite:&schmidt20_desig_high_perfor_mechat_third_revis_edition]]
+ - [X] =introduction_two_stage_control_example= from [[cite:&shinno11_newly_devel_long_range_posit]]
+20. [X] Serial VS Parallel: comparison of X-Y-Rz stages
+ - [X] =introduction_kinematics_serial=
+ - [X] =introduction_kinematics_parallel=
+21. [X] Stewart platform architecture =introduction_stewart_platform=
+ Show the classical architecture (two plates, 6 struts, spherical joints)
+ Maybe two pose to show that by changing the length of each strut, it is possible to change the relative position between the two plates?
+ Maybe do that with Matlab and then editing with Inkscape
+22. [X] Example of Stewart platforms found in the literature
+ - [X] Voice coil based (maybe 2?)
+ - [X] cite:hauge04_sensor_contr_space_based_six, cite:thayer02_six_axis_vibrat_isolat_system
+ - [X] cite:tang18_decen_vibrat_contr_voice_coil
+ - [X] Piezo based (maybe 2?)
+ - [X] cite:du14_piezo_actuat_high_precis_flexib
+ - [X] cite:yang19_dynam_model_decoup_contr_flexib
+23. [X] Different model types
+ - [X] =introduction_model_lumped=
+ - [X] =introduction_model_multibody=
+ - [X] =introduction_model_fem=
+24. [X] Feedback System / Closed loop simulations =introduction_close_loop=
+ - feedback model with: controller =K=, plant =G=, disturbances (plant output) =dy=, sensor with noise =n=, actuator with noise =du=
+ - (no feedforward)
+25. [X] Dynamic Error Budgeting =introduction_dyn_error_budget=
+ - PSD + CPS ? => understand what are the limitations?, similar to what is in [[cite:&schmidt20_desig_high_perfor_mechat_third_revis_edition]]
+ - Use the same signals than for the previous figure
+ - Concrete example? Open-Loop? Close Loop?
+26. [X] About Stewart platform control? Centralized / Decentralized? MIMO / 6 SISO?
+
+*** DONE [#C] Create figures with Matlab
+CLOSED: [2024-05-14 Tue 18:12]
+*** Matlab Init
#+begin_src matlab :tangle no :exports none :results silent :noweb yes :var current_dir=(file-name-directory buffer-file-name)
<<matlab-dir>>
#+end_src
@@ -98,58 +171,761 @@ Prefix is =introduction=
#+end_src
#+begin_src matlab
-brilliances = [1e7, 1e8, 5e11, 2e12, 1e14, 1e15, 1e19, 1e21, 2e22, ]
+colors = colororder;
#+end_src
+*** DONE [#C] Brilliance
+CLOSED: [2024-05-30 Thu 09:30]
+#+begin_src matlab
+%% Data
+dates = [1900, 1956, 1970, 1973, 1978, 1982, 2000, 2010, 2020];
+brilliances = [10^6.9, 10^8.3, 10^11.7, 10^12.5, 10^14.0, 10^15.0, 10^19.0, 10^21.0, 10^22.6];
+#+end_src
-** TODO [#C] Complete list of Synchrotrons
+#+begin_src matlab :exports none :results none
+%% Evolution of the Brilliance for light sources
+figure;
+hold on;
+plot([1900, 1950, 2020], [10^6.9, 10^6.9, 10^23], 'k--', 'HandleVisibility', 'off')
+plot(dates(1:2), brilliances(1:2), 'o', 'DisplayName', 'X-ray tubes')
+plot(dates(3:4), brilliances(3:4), 'o', 'DisplayName', '$1^{st}$ generation')
+plot(dates(5:6), brilliances(5:6), 'o', 'DisplayName', '$2^{nd}$ generation')
+plot(dates(7:8), brilliances(7:8), 'o', 'DisplayName', '$3^{rd}$ generation')
+plot(dates(9), brilliances(9), 'o', 'DisplayName', '$4^{th}$ generation')
+hold off;
+set(gca, 'XScale', 'lin'); set(gca, 'YScale', 'log');
+xlabel(''); ylabel('Brilliance');
+legend('location', 'northwest', 'FontSize', 8, 'NumColumns', 1);
+xticks([1900:20:2020]);
+xlim([1895, 2025]);
+ylim([1e6, 1e24])
+#+end_src
-| Name | Country | Generation | Energy | Brightness | Status |
-|------------------------+------------------+------------+--------+------------+--------|
-| ESRF | France, Grenoble | 4th | | | |
-| Soleil | France, Paris | 3rd | | | |
-| Diamond | UK, Oxfordshire | 3rd | 3GeV | | |
-| ALS | US | | | | |
-| SLAC | US | | | | |
-| APS | US | 4th | | | |
-| NSLS II | US, New York | 3rd | 3GeV | 10^21 | |
-| Alba | Spain | | | | |
-| PSI | Switzerland | | | | |
-| Elettra | Italy | | | | |
-| Max IV | Sweden | 4th | 3GeV | | |
-| DESY | Germany | | | | |
-| BESSY | Germany | | | | |
-| SESAME | Jordan | | | | |
-| LNLS | Brazil | 4th | | | |
-| HEPS | China | | | | |
-| NSRL | China | | | | |
-| SSRF | China | | | | |
-| Spring 8 | Japan | | | | |
-| Australian Synchrotron | Australy | | | | |
-| Canadian Light Source | Canada | | | | |
+#+begin_src matlab :tangle no :exports results :results file replace
+exportFig('figs/introduction_moore_law_brillance.pdf', 'width', 'wide', 'height', 'normal');
+#+end_src
+
+#+name: fig:introduction_moore_law_brillance
+#+caption: Evolution of the Brilliance for light sources
+#+RESULTS:
+[[file:figs/introduction_moore_law_brillance.png]]
+
+*** DONE [#C] Focus
+CLOSED: [2024-05-30 Thu 09:31]
+
+#+begin_src matlab :exports none :results none
+%%
+figure;
+set(gca, 'XScale', 'lin'); set(gca, 'YScale', 'log');
+xlabel(''); ylabel('Spot Size');
+% legend('location', 'northwest', 'FontSize', 8, 'NumColumns', 1);
+xticks([1995:5:2020]);
+xlim([1995, 2020]);
+yticks([1, 10, 100, 1000, 10000]);
+yticklabels({'$1\,nm$', '$10\,nm$', '$100\,nm$', '$1\,\mu m$', '$10\,\mu m$'})
+ylim([1, 1e4])
+#+end_src
+
+#+begin_src matlab :tangle no :exports results :results file replace
+exportFig('figs/introduction_moore_law_focus.pdf', 'width', 'wide', 'height', 'normal');
+#+end_src
+
+#+RESULTS:
+[[file:figs/introduction_moore_law_focus.png]]
+
+*** DONE [#C] PSD / CPS figures
+CLOSED: [2024-05-30 Thu 09:31]
+#+begin_src matlab
+% Plant
+m = 1;
+k = (2*pi*10)^2*m;
+c = 0.02*2*sqrt(k*m);
+G = 1e9/(m*s^2 + c*s + k); % [nm/V]
+Gd = (c*s + k)/(m*s^2 + c*s + k);
+
+% PSD
+asd_du = tf(1e-5); % [V/sqrt(Hz)]
+asd_n = tf(1); % [nm/sqrt(Hz)]
+asd_dy = 10/(s + 0.1*2*pi)^2*(s + 2*pi*1)^2*(1/((1 + s/2/pi/10)^3)); % [nm/sqrt(Hz)]
+
+f = logspace(0, 2, 500);
+#+end_src
+
+#+begin_src matlab
+%% PSD
+figure;
+hold on;
+plot(f, abs(squeeze(freqresp(asd_du*G, f, 'Hz'))).^2, 'DisplayName', '$d_u$')
+plot(f, abs(squeeze(freqresp(asd_dy*Gd, f, 'Hz'))).^2, 'DisplayName', '$d_y$')
+plot(f, abs(squeeze(freqresp(asd_n, f, 'Hz'))).^2, '--', 'DisplayName', '$n$')
+plot(f, abs(squeeze(freqresp(asd_du*G, f, 'Hz'))).^2 + abs(squeeze(freqresp(asd_dy*Gd, f, 'Hz'))).^2, 'k--', 'DisplayName', 'tot')
+hold off;
+set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log');
+leg = legend('location', 'southwest', 'FontSize', 8, 'NumColumns', 1);
+leg.ItemTokenSize(1) = 20;
+xlabel('Frequency [Hz]');
+ylabel('PSD [$nm^2/Hz$]');
+ylim([1e-4, 1e4]);
+xlim([1, 100]);
+#+end_src
+
+#+begin_src matlab :tangle no :exports results :results file replace
+exportFig('figs/introduction_psd.pdf', 'width', 600, 'height', 550);
+#+end_src
+
+#+RESULTS:
+[[file:figs/introduction_psd.png]]
+
+#+begin_src matlab
+%% CPS
+cps_du = cumtrapz(f, abs(squeeze(freqresp(asd_du*G, f, 'Hz'))).^2);
+cps_dy = cumtrapz(f, abs(squeeze(freqresp(asd_dy*Gd, f, 'Hz'))).^2);
+cps_tot = cps_du+cps_dy;
+figure;
+hold on;
+plot(f, cps_du, 'DisplayName', '$d_u$')
+plot(f, cps_dy, 'DisplayName', '$d_y$')
+plot(f, cps_tot, 'k--', 'DisplayName', 'tot')
+text(80, 9000, sprintf('%.0f nm RMS', sqrt(cps_tot(end))), 'horizontalalignment', 'right');
+hold off;
+set(gca, 'XScale', 'log'); set(gca, 'YScale', 'lin');
+leg = legend('location', 'northwest', 'FontSize', 8, 'NumColumns', 1);
+leg.ItemTokenSize(1) = 20;
+xlabel('Frequency [Hz]');
+ylabel('CPS [$nm^2$]');
+xlim([1, 100]);
+ylim([0, 1e4]);
+#+end_src
+
+#+begin_src matlab :tangle no :exports results :results file replace
+exportFig('figs/introduction_cps.pdf', 'width', 600, 'height', 550);
+#+end_src
+
+#+RESULTS:
+[[file:figs/introduction_cps.png]]
+
+#+begin_src matlab
+%% Damped plant
+c = 0.5*2*sqrt(k*m);
+G_damp = 1e9/(m*s^2 + c*s + k); % [nm/V]
+Gd_damp = (c*s + k)/(m*s^2 + c*s + k);
+
+%% Closed loop
+a_lead = 8;
+fb = 20;
+K = 1/abs(squeeze(freqresp(G, fb, 'Hz'))) * ...
+ (s + 2*pi*5)/s * ...
+ 1/(sqrt(a_lead))*(1 + s/(2*pi*fb/sqrt(a_lead)))/(1 + s/(2*pi*fb*sqrt(a_lead))); % Lead
+
+S = 1/(1 + K*G);
+T = K*G/(1 + K*G);
+#+end_src
+
+#+begin_src matlab
+%% CPS
+cps_ol = cumtrapz(f, abs(squeeze(freqresp(asd_du*G, f, 'Hz'))).^2 + abs(squeeze(freqresp(asd_dy*Gd, f, 'Hz'))).^2);
+cps_dp = cumtrapz(f, abs(squeeze(freqresp(asd_du*G_damp, f, 'Hz'))).^2 + abs(squeeze(freqresp(asd_dy*Gd_damp, f, 'Hz'))).^2);
+cps_cl = cumtrapz(f, abs(squeeze(freqresp(asd_du*G*S, f, 'Hz'))).^2 + abs(squeeze(freqresp(asd_dy*Gd*S, f, 'Hz'))).^2 + abs(squeeze(freqresp(asd_n*T, f, 'Hz'))).^2);
+
+figure;
+hold on;
+plot(f, cps_ol, 'DisplayName', 'Open Loop')
+plot(f, cps_dp, 'DisplayName', 'Damped')
+plot(f, cps_cl, 'DisplayName', 'Closed Loop')
+text(80, 9000, sprintf('%.0f nm RMS', sqrt(cps_ol(end))), 'horizontalalignment', 'right', 'color', colors(1,:));
+text(80, 1500, sprintf('%.0f nm RMS', sqrt(cps_dp(end))), 'horizontalalignment', 'right', 'color', colors(2,:));
+text(80, 500, sprintf('%.0f nm RMS', sqrt(cps_cl(end))), 'horizontalalignment', 'right', 'color', colors(3,:));
+hold off;
+set(gca, 'XScale', 'log'); set(gca, 'YScale', 'lin');
+leg = legend('location', 'northwest', 'FontSize', 8, 'NumColumns', 1);
+leg.ItemTokenSize(1) = 20;
+xlabel('Frequency [Hz]');
+ylabel('CPS [$nm^2$]');
+#+end_src
+
+#+begin_src matlab :tangle no :exports results :results file replace
+exportFig('figs/introduction_cps_cl.pdf', 'width', 600, 'height', 550);
+#+end_src
+
+#+RESULTS:
+[[file:figs/introduction_cps_cl.png]]
+
+*** DONE [#C] Schematic that compares step-by-step scan and "fly-scan"
+CLOSED: [2024-05-30 Thu 10:37]
+
+Y position as a function of time.
+
+Show when the shutter is opened and closed.
+Show when the detector is integrating the photons.
+
+Show that /fly-scan/ is much faster.
+
+#+begin_src matlab
+v_max = 1;
+d = 6;
+
+t = [0, 2, 8, 10];
+x = [1, 1, 7, 7];
+#+end_src
+
+#+begin_src matlab :exports none :results none
+%%
+figure;
+plot(t, x);
+xlabel('Time [s]');
+ylabel('Displacement [$\mu m$]');
+xticks([0:1:10]);
+xlim([0, 10]);
+yticks([0:1:8])
+ylim([0, 8]);
+#+end_src
+
+#+begin_src matlab :tangle no :exports results :results file replace
+exportFig('figs/introduction_scan_fly.pdf', 'width', 'half', 'height', 'normal');
+#+end_src
+
+[[file:figs/introduction_scan_fly.png]]
-** TODO [#C] Review about Stewart platforms
+*** DONE [#C] Make figures for multiple sensor control
+CLOSED: [2024-05-29 Wed 14:56]
-# [[file:~/Cloud/work-projects/ID31-NASS/matlab/stewart-simscape/org/bibliography.org]]
+#+begin_src latex :file introduction_architecture_hac_lac.pdf
+\begin{tikzpicture}
+ % Blocs
+ \node[block={2.0cm}{2.0cm}] (P) {Plant};
+ \coordinate[] (input) at ($(P.south west)!0.5!(P.north west)$);
+ \coordinate[] (outputH) at ($(P.south east)!0.2!(P.north east)$);
+ \coordinate[] (outputL) at ($(P.south east)!0.8!(P.north east)$);
+ \node[block, above=0.2 of P] (Klac) {$K_\text{LAC}$};
+ \node[addb, left=0.5 of input] (addF) {};
+ \node[block, left=0.6 of addF] (Khac) {$K_\text{HAC}$};
+ % \node[addb={+}{}{}{}{-}, left=0.5 of Khac] (subr) {};
+
+ % Connections and labels
+ \draw[->] (outputL) -- ++(0.5, 0) coordinate(eastlac) |- (Klac.east);
+ \node[above right] at (outputL){$x^\prime$};
+ \draw[->] (Klac.west) -| (addF.north);
+ \draw[->] (addF.east) -- (input) node[above left]{$u$};
+
+ % \draw[<-] (subr.west)node[above left]{$r$} -- ++(-0.5, 0);
+ % \draw[->] (outputH) -- ++(0.5, 0) -- ++(0, -1.0) -| (subr.south);
+ \draw[->] (outputH) -- ++(0.5, 0) -- ++(0, -0.7) -| ($(Khac.west)+(-0.5, 0)$) -- (Khac.west);
+ \node[above right] at (outputH){$x$};
+ % \draw[->] (subr.east) -- (Khac.west) node[above left]{$\epsilon$};
+ \draw[->] (Khac.east) node[above right]{$u^\prime$} -- (addF.west);
+
+ \begin{scope}[on background layer]
+ \node[fit={(Klac.north-|eastlac) (addF.west|-P.south)}, fill=black!20!white, draw, dashed, inner sep=4pt] (Pi) {};
+ % \node[anchor={north west}, align=left] at (Pi.north west){\scriptsize{Damped}\\\scriptsize{Plant}};
+ \node[above=0 of Pi]{\scriptsize{Damped Plant}};
+ \end{scope}
+\end{tikzpicture}
+#+end_src
+
+#+RESULTS:
+[[file:figs/introduction_architecture_hac_lac.png]]
+
+#+begin_src latex :file introduction_architecture_sensor_fusion.pdf
+\begin{tikzpicture}
+ % Blocs
+ \node[block={2.0cm}{2.0cm}] (P) {Plant};
+ \coordinate[] (input) at ($(P.south west)!0.5!(P.north west)$);
+ \coordinate[] (outputH) at ($(P.south east)!0.2!(P.north east)$);
+ \coordinate[] (outputL) at ($(P.south east)!0.8!(P.north east)$);
+ \coordinate[] (outputSS) at ($(P.south east)!0.5!(P.north east)$);
+
+ \node[block, right=0.8 of outputH] (KH) {$H_\text{HPF}$};
+ \node[block, right=0.8 of outputL] (KL) {$H_\text{LPF}$};
+ \node[addb={+}{}{}{}{}, right=2.2 of outputSS] (addss) {};
+ \node[block, left=0.6 of input] (K) {$K_{ss}$};
+
+ % Connections and labels
+ \draw[->] (outputL) -- (KL.west);
+ \draw[->] (outputH) -- (KH.west);
+ \node[above right] at (outputL){$x_L$};
+ \node[above right] at (outputH){$x_H$};
+ \draw[->] (KL.east) -| (addss.north);
+ \draw[->] (KH.east) -| (addss.south);
+ \draw[->] (addss.east) -- ++(0.9, 0);
+ \draw[->] ($(addss.east) + (0.5, 0)$)node[branch]{}node[above]{$x_{ss}$} -- ++(0, -1.6) -| ($(K.west)+(-0.5, 0)$) -- (K.west);
+ \draw[->] (K.east) -- (input) node[above left]{$u$};
+
+ \begin{scope}[on background layer]
+ \node[fit={(KL.north west) (KH.south-|addss.east)}, fill=black!20!white, draw, dashed, inner sep=4pt] (Pss) {};
+ \node[above=0 of Pss]{\scriptsize{Sensor Fusion}};
+ \end{scope}
+\end{tikzpicture}
+#+end_src
+
+#+RESULTS:
+[[file:figs/introduction_architecture_sensor_fusion.png]]
+
+#+begin_src latex :file introduction_architecture_two_sensor_control.pdf
+\begin{tikzpicture}
+ % Blocs
+ \node[block={2.0cm}{2.0cm}] (P) {Plant};
+ \coordinate[] (input) at ($(P.south west)!0.5!(P.north west)$);
+ \coordinate[] (output1) at ($(P.south east)!0.8!(P.north east)$);
+ \coordinate[] (output2) at ($(P.south east)!0.2!(P.north east)$);
+
+ \node[addb={+}{}{}{}{}, left=0.8 of input] (addF) {};
+ \coordinate[left= 1.0 of addF] (Ks);
+ \node[block] (K1) at (Ks|-output1) {$K_\text{1}$};
+ \node[block] (K2) at (Ks|-output2) {$K_\text{2}$};
+
+ \draw[->] (output1) -| ++(0.6, 1.2) -| ($(K1.west)+(-0.5, 0)$) -- (K1.west);
+ \draw[->] (output2) -| ++(0.6,-1.0) -| ($(K2.west)+(-0.5, 0)$) -- (K2.west);
+
+ \draw[->] (K1.east)node[above right]{$u_1$} -| (addF.north);
+ \draw[->] (K2.east)node[above right]{$u_2$} -| (addF.south);
+ \draw[->] (addF.east) -- (input) node[above left=0 and 0.2]{$u$};
+
+ \node[above right] at (output1){$x_1$};
+ \node[above right] at (output2){$x_2$};
+
+ \begin{scope}[on background layer]
+ \node[fit={(K1.north west) (K2.south-|addF.east)}, fill=black!20!white, draw, dashed, inner sep=4pt] (Pss) {};
+ \node[above=0 of Pss]{\scriptsize{Two-Sensor Control}};
+ \end{scope}
+\end{tikzpicture}
+#+end_src
+
+#+RESULTS:
+[[file:figs/introduction_architecture_two_sensor_control.png]]
+
+*** DONE [#C] Make figures for active damping strategies / Vibration Control
+CLOSED: [2024-05-29 Wed 18:58]
+
+- [X] =introduction_damping_iff=
+- [X] =introduction_damping_skyhook=
+- [X] Decentralized Control
+ =introduction_control_decentralized=
+- [X] Maybe a schematic of the Stewart platform with several independent loops
+ =introduction_control_decentralized_schematic=
+
+#+begin_src latex :file introduction_damping_iff.pdf
+\begin{tikzpicture}
+ % ====================
+ % Parameters
+ % ====================
+ \def\massw{2.2} % Width of the masses
+ \def\massh{0.8} % Height of the masses
+ \def\spaceh{1.4} % Height of the springs/dampers
+ \def\dispw{0.4} % Width of the dashed line for the displacement
+ \def\disph{0.3} % Height of the arrow for the displacements
+ \def\bracs{0.05} % Brace spacing vertically
+ \def\brach{-12pt} % Brace shift horizontaly
+ \def\fsensh{0.2} % Height of the force sensor
+ \def\velsize{0.2} % Size of the velocity sensor
+ % ====================
+
+ \begin{scope}
+ % ====================
+ % Stage Below
+ \begin{scope}
+ \draw[fill=white] (-0.5*\massw, 1.0) rectangle (0.5*\massw, 1.0+\massh);
+ \draw[spring] (-0.25*\massw, 0) -- (-0.25*\massw, 1.0);
+ \draw[damper] ( 0.25*\massw, 0) -- ( 0.25*\massw, 1.0);
+
+ \draw[decorate,decoration={zigzag,segment length=6pt},draw=black!50!white,very thick] (-0.5*\massw, 0) -- (0.5*\massw, 0);
+ \draw[draw=black!50!white,very thick, dashed] (-0.5*\massw, 0) -- ++(-0.5, 0);
+ \draw[draw=black!50!white,very thick, dashed] ( 0.5*\massw, 0) -- ++( 0.5, 0);
+ \end{scope}
+ % ====================
+
+ % ====================
+ % NASS
+ \begin{scope}[shift={(0, 1.0+\massh)}]
+ \draw[fill=white] (-0.5*\massw, \spaceh) rectangle (0.5*\massw, \spaceh+\massh);
+ \node[forcesensor={\massw}{\fsensh}{colorblue}] (fsensn) at (0, \spaceh-\fsensh){};
+
+ \node[left, color=colorblue] at (fsensn.west) {Load Cell};
+
+ \draw[spring] (-0.4*\massw, 0) -- (-0.4*\massw, \spaceh-\fsensh);
+ \draw[damper] ( 0, 0) -- ( 0, \spaceh-\fsensh);
+ \draw[actuator={0.6}{0.2}{black}] ( 0.4*\massw, 0) -- (0.4*\massw, \spaceh-\fsensh) coordinate[midway, shift={(0.1,0)}](f);
+ \end{scope}
+ % ====================
+
+ % ====================
+ % IFF Control
+ \node[block={2em}{2em}, right=0.6 of f, color=colorblue, fill=colorblue!10!white] (iff) {$g/s$};
+ \draw[->, draw=colorblue] (fsensn.east)node[above right, color=colorblue]{$f_m$} -- ++(1.6, 0) |- (iff.east);
+ \draw[->, draw=colorblue] (iff.west) -- (f.east) node[above right, color=colorblue]{$f$};
+ % ====================
+ \end{scope}
+\end{tikzpicture}
+#+end_src
+
+#+RESULTS:
+[[file:figs/introduction_damping_iff.png]]
+
+#+begin_src latex :file introduction_damping_skyhook.pdf
+\begin{tikzpicture}
+ % ====================
+ % Parameters
+ % ====================
+ \def\massw{2.2} % Width of the masses
+ \def\massh{0.8} % Height of the masses
+ \def\spaceh{1.2} % Height of the springs/dampers
+ \def\dispw{0.4} % Width of the dashed line for the displacement
+ \def\disph{0.3} % Height of the arrow for the displacements
+ \def\bracs{0.05} % Brace spacing vertically
+ \def\brach{-12pt} % Brace shift horizontaly
+ \def\fsensh{0.2} % Height of the force sensor
+ \def\velsize{0.2} % Size of the velocity sensor
+ % ====================
+
+ \begin{scope}
+ % ====================
+ % Stage Below
+ \begin{scope}
+ \draw[fill=white] (-0.5*\massw, 1.0) rectangle (0.5*\massw, 1.0+\massh);
+ \draw[spring] (-0.25*\massw, 0) -- (-0.25*\massw, 1.0);
+ \draw[damper] ( 0.25*\massw, 0) -- ( 0.25*\massw, 1.0);
+
+ \draw[decorate,decoration={zigzag,segment length=6pt},draw=black!50!white,very thick] (-0.5*\massw, 0) -- (0.5*\massw, 0);
+ \draw[draw=black!50!white,very thick, dashed] (-0.5*\massw, 0) -- ++(-0.5, 0);
+ \draw[draw=black!50!white,very thick, dashed] ( 0.5*\massw, 0) -- ++( 0.5, 0);
+ \end{scope}
+ % ====================
+
+ % ====================
+ % NASS
+ \begin{scope}[shift={(0, 1.0+\massh)}]
+ \draw[fill=white] (-0.5*\massw, \spaceh) rectangle (0.5*\massw, \spaceh+\massh);
+ \draw[spring] (-0.4*\massw, 0) -- (-0.4*\massw, \spaceh);
+ \draw[damper] (0, 0) -- ( 0, \spaceh);
+ \draw[actuator={0.6}{0.2}{black}] ( 0.4*\massw, 0) -- (0.4*\massw, \spaceh) coordinate[midway, shift={(0.1,0)}](f);
+
+ % Velocity Sensor
+ \node[inertialsensor={\velsize}{colorred}] (veln) at (0.5*\massw, \spaceh+\massh) {};
+
+ \node[left, color=colorred] at (veln.north west) {Geophone};
+ \end{scope}
+ % ====================
+
+ % ====================
+ % DVF Control
+ \node[block={2em}{2em}, below right=0.3 and 0.4 of veln, color=colorred, fill=colorred!10!white] (ppf) {$-g$};
+ \draw[->, draw=colorred] (veln.east) node[above right, color=colorred]{$v$} -| (ppf.north);
+ \draw[->, draw=colorred] (ppf.south) |- (f.east) node[above right, color=colorred]{$f$};
+ % ====================
+ \end{scope}
+\end{tikzpicture}
+#+end_src
+
+#+RESULTS:
+[[file:figs/introduction_damping_skyhook.png]]
+
+#+begin_src latex :file introduction_control_decentralized_diagram.pdf
+\begin{tikzpicture}
+ % Blocs
+ \node[block={2.0cm}{2.0cm}] (P) {Plant};
+ \node[block={2.0cm}{2.0cm}, left=0.8 of P] (K) {\begin{matrix}K_1 & & 0 \\ & \ddots & \\ 0 & & K_6\end{matrix}};
+
+ % Connections and labels
+ \draw[->] (P.east)node[above right]{$\begin{bmatrix}y_1 \\ \vdots \\ y_6 \end{bmatrix}$} -| ++(0.5, -1.5) -| ($(K.west)+(-0.5, 0)$) -- (K.west);
+ \draw[->] (K.east) --node[midway, above]{$\begin{bmatrix}u_1 \\ \vdots \\ u_6 \end{bmatrix}$} (P.west);
+\end{tikzpicture}
+#+end_src
+
+#+RESULTS:
+[[file:figs/introduction_control_decentralized_diagram.png]]
+
+*** DONE [#C] Make figures for control strategies
+CLOSED: [2024-05-29 Wed 17:20]
+
+- [X] Full MIMO control
+ =introduction_control_mimo=
+- [X] Decoupling Frame
+ =introduction_control_decoupling=
+
+#+begin_src latex :file introduction_control_mimo.pdf
+\begin{tikzpicture}
+ % Blocs
+ \node[block={2.0cm}{2.0cm}] (P) {Plant};
+ \coordinate[] (input) at ($(P.south west)!0.5!(P.north west)$);
+ \coordinate[] (output) at ($(P.south east)!0.5!(P.north east)$);
+ \node[block, left=0.6 of input] (K) {$\bm{K}$};
+ % \node[addb={+}{}{}{}{-}, left=0.5 of Khac] (subr) {};
+
+ % Connections and labels
+ \draw[->] (output) -| ++(0.5, -1.5) -| ($(K.west)+(-0.5, 0)$) -- (K.west);
+ \draw[->] (K.east) -- (input);
+\end{tikzpicture}
+#+end_src
+
+#+RESULTS:
+[[file:figs/introduction_control_mimo.png]]
+
+#+begin_src latex :file introduction_control_decoupling.pdf
+\begin{tikzpicture}
+ % Blocs
+ \node[block={2.0cm}{2.0cm}] (P) {Plant};
+
+ \node[block, left=0.5 of P] (Hpost) {$H_{\text{post}}$};
+ \node[block={2.0cm}{2.0cm}, left=0.5 of Hpost] (K) {\begin{matrix}K_1 & & 0 \\ & \ddots & \\ 0 & & K_n\end{matrix}};
+ \node[block, left=0.5 of K] (Hpre) {$H_{\text{pre}}$};
+
+ \draw[->] (P.east) -| ++(0.5, -1.5) -| ($(Hpre.west)+(-0.5, 0)$) -- (Hpre.west);
+ \draw[->] (Hpre.east) -- (K.west);
+ \draw[->] (K.east) -- (Hpost.west);
+ \draw[->] (Hpost.east) -- (P.west);
+
+ \begin{scope}[on background layer]
+ \node[fit={(Hpre.north west) (K.south-|Hpost.east)}, fill=black!20!white, inner sep=8pt] (Pi) {};
+ \node[fit={(K.north west) (K.south east)}, fill=white, inner sep=4pt] {};
+ \end{scope}
+\end{tikzpicture}
+#+end_src
+
+#+RESULTS:
+[[file:figs/introduction_control_decoupling.png]]
+
+*** DONE [#C] Centralized Control
+CLOSED: [2024-05-29 Wed 17:09]
+
+- [X] Centralized Control - Struts
+ =introduction_control_centralized_struts=
+- [X] Centralized Control - Cartesian
+ =introduction_control_centralized_cartesian=
+
+#+begin_src latex :file introduction_control_centralized_cartesian.pdf
+\begin{tikzpicture}
+ % Blocs
+ \node[block={2.0cm}{2.0cm}] (P) {Plant};
+ \coordinate[] (inputF) at ($(P.south west)!0.5!(P.north west)$);
+ \coordinate[] (outputX) at ($(P.south east)!0.5!(P.north east)$);
+
+ \node[block, left=0.8 of inputF] (J) {$\bm{J}^{-T}$};
+ \node[block={2.0cm}{2.0cm}, left=0.8 of J] (K) {\begin{matrix}K_x & & 0 \\ & \ddots & \\ 0 & & K_z\end{matrix}};
+ \node[addb={+}{}{}{}{-}, left=0.8 of K] (subr) {};
+
+ % Connections and labels
+ \draw[->] (outputX) -- ++(0.8, 0);
+ \draw[->] ($(outputX) + (0.3, 0)$)node[branch]{} node[above]{$\bm{\mathcal{X}}$} -- ++(0, -1.2) -| (subr.south);
+
+ \draw[->] (subr.east) -- node[midway, above]{$\bm{\epsilon}_{\mathcal{X}}$} (K.west);
+ \draw[->] (K.east) -- node[midway, above]{$\bm{\mathcal{F}}$} (J.west);
+ \draw[->] (J.east) -- node[midway, above]{$\bm{\tau}$} (inputF.west);
+ \draw[<-] (subr.west)node[above left]{$\bm{r}_{\mathcal{X}}$} -- ++(-0.8, 0);
+\end{tikzpicture}
+#+end_src
+
+#+RESULTS:
+[[file:figs/introduction_control_centralized_cartesian.png]]
+
+#+begin_src latex :file introduction_control_centralized_struts.pdf
+\begin{tikzpicture}
+ % Blocs
+ \node[block={2.0cm}{2.0cm}] (P) {Plant};
+ \coordinate[] (inputF) at ($(P.south west)!0.5!(P.north west)$);
+ \coordinate[] (outputX) at ($(P.south east)!0.5!(P.north east)$);
+
+ \node[block={2.0cm}{2.0cm}, left=0.8 of inputF] (K) {\begin{matrix}K_1 & & 0 \\ & \ddots & \\ 0 & & K_6\end{matrix}};
+ \node[block, left=0.8 of K] (J) {$\bm{J}$};
+ \node[addb={+}{}{}{}{-}, left=0.8 of J] (subr) {};
+ % \node[block, align=center, left=0.6 of subr] (J) {Inverse\\Kinematics};
+
+ % Connections and labels
+ \draw[->] (outputX) -- ++(0.8, 0);
+ \draw[->] ($(outputX) + (0.3, 0)$)node[branch]{} node[above]{$\bm{\mathcal{X}}$} -- ++(0, -1.2) -| (subr.south);
+ \draw[->] (subr.east) -- node[midway, above]{$\bm{\epsilon}_{\mathcal{X}}$} (J.west);
+ \draw[->] (J.east) -- node[midway, above]{$\bm{\epsilon}_{\mathcal{L}}$} (K.west);
+ \draw[->] (K.east) -- node[midway, above]{$\bm{\tau}$} (inputF);
+
+ \draw[<-] (subr.west)node[above left]{$\bm{r}_{\mathcal{X}}$} -- ++(-0.8, 0);
+\end{tikzpicture}
+#+end_src
+
+#+RESULTS:
+[[file:figs/introduction_control_centralized_struts.png]]
+
+
+*** CANC [#C] Schematic for Cubic Architecture
+CLOSED: [2024-05-30 Thu 08:36]
+
+- State "CANC" from "TODO" [2024-05-30 Thu 08:36]
+#+begin_src latex :file introduction_stewart_cubic.pdf
+ \begin{tikzpicture}
+ \begin{scope}[rotate={45}, shift={(0, 0, -4)}]
+ % We first define the coordinate of the points of the Cube
+ \coordinate[] (bot) at (0,0,4);
+ \coordinate[] (top) at (4,4,0);
+ \coordinate[] (A1) at (0,0,0);
+ \coordinate[] (A2) at (4,0,4);
+ \coordinate[] (A3) at (0,4,4);
+ \coordinate[] (B1) at (4,0,0);
+ \coordinate[] (B2) at (4,4,4);
+ \coordinate[] (B3) at (0,4,0);
+
+ % Center of the Cube
+ % \node[] at ($0.5*(bot) + 0.5*(top)$){$\bullet$};
+
+ % We then draw parts of the cube that is not part of the Stewart platform
+ \draw[dashed] (A1) -- (bot);
+ \draw[dashed] (A2) -- (bot);
+ \draw[dashed] (A3) -- (bot);
+ \draw[dashed] (B1) -- (top);
+ \draw[dashed] (B2) -- (top);
+ \draw[dashed] (B3) -- (top);
+
+ % We draw parts of the cube that corresponds to the Stewart platform
+ \draw[] (A1) -- (B1) -- (A2) -- (B2) -- (A3) -- (B3) -- (A1);
+
+ % ai and bi are computed
+ \def\lfrom{0.2}
+ \def\lto{0.8}
+
+ \coordinate(a1) at ($(A1) - \lfrom*(A1) + \lfrom*(B1)$);
+ \coordinate(b1) at ($(A1) - \lto*(A1) + \lto*(B1)$);
+ \coordinate(a2) at ($(A2) - \lfrom*(A2) + \lfrom*(B1)$);
+ \coordinate(b2) at ($(A2) - \lto*(A2) + \lto*(B1)$);
+ \coordinate(a3) at ($(A2) - \lfrom*(A2) + \lfrom*(B2)$);
+ \coordinate(b3) at ($(A2) - \lto*(A2) + \lto*(B2)$);
+ \coordinate(a4) at ($(A3) - \lfrom*(A3) + \lfrom*(B2)$);
+ \coordinate(b4) at ($(A3) - \lto*(A3) + \lto*(B2)$);
+ \coordinate(a5) at ($(A3) - \lfrom*(A3) + \lfrom*(B3)$);
+ \coordinate(b5) at ($(A3) - \lto*(A3) + \lto*(B3)$);
+ \coordinate(a6) at ($(A1) - \lfrom*(A1) + \lfrom*(B3)$);
+ \coordinate(b6) at ($(A1) - \lto*(A1) + \lto*(B3)$);
+
+ % Center of the Stewart Platform
+ % \node[color=colorblue] at ($0.25*(a1) + 0.25*(a6) + 0.25*(b3) + 0.25*(b4)$){$\bullet$};
+
+ % We draw the fixed and mobiles platforms
+ \path[fill=colorblue, opacity=0.2] (a1) -- (a2) -- (a3) -- (a4) -- (a5) -- (a6) -- cycle;
+ \path[fill=colorblue, opacity=0.2] (b1) -- (b2) -- (b3) -- (b4) -- (b5) -- (b6) -- cycle;
+ \draw[color=colorblue, dashed] (a1) -- (a2) -- (a3) -- (a4) -- (a5) -- (a6) -- cycle;
+ \draw[color=colorblue, dashed] (b1) -- (b2) -- (b3) -- (b4) -- (b5) -- (b6) -- cycle;
+
+ % The legs of the hexapod are drawn
+ \draw[color=colorblue] (a1)node{$\bullet$} -- (b1)node{$\bullet$};
+ \draw[color=colorblue] (a2)node{$\bullet$} -- (b2)node{$\bullet$};
+ \draw[color=colorblue] (a3)node{$\bullet$} -- (b3)node{$\bullet$};
+ \draw[color=colorblue] (a4)node{$\bullet$} -- (b4)node{$\bullet$};
+ \draw[color=colorblue] (a5)node{$\bullet$} -- (b5)node{$\bullet$};
+ \draw[color=colorblue] (a6)node{$\bullet$} -- (b6)node{$\bullet$};
+
+ % Labels
+ % \node[left=0.1 of a5] {$a_i$};
+ % \node[left=0.1 of b5] {$b_i$};
+
+ \end{scope}
+
+ % % Height of the Hexapod
+ % \coordinate[] (sizepos) at ($(a2)+(0.2, 0)$);
+ % \coordinate[] (origin) at (0,0,0);
+ % \draw[<->, dashed] (a2-|sizepos) -- node[midway, right]{$H$} (b2-|sizepos);
+ % % Height offset
+ % \draw[<->, dashed] (a2-|sizepos) -- node[midway, right]{$H_0$} (origin-|sizepos);
+
+ % \draw[->] (0,0,0) -- (0,0,1)node[left]{$x$};
+ % \draw[->] (0,0,0) -- (1,0,0)node[above]{$y$};
+ % \draw[->] (0,0,0) -- (0,1,0)node[right]{$z$};
+ \end{tikzpicture}
+#+end_src
+
+#+RESULTS:
+[[file:figs/introduction_stewart_cubic.png]]
+
+** DONE [#C] Complete list of Synchrotrons
+CLOSED: [2024-05-14 Tue 17:28]
+
+| Name | Country | Gen | Status | Energy | Brightness | Emittance | Current |
+|------------------------+----------------------+-------------+-----------------+---------+------------+--------------------+---------|
+| [[https://www.esrf.fr/about/upgrade][ESRF]] | France, Grenoble | 4th | In operation | 6GeV | | 110pm.rad, 5pm.rad | 200mA |
+| [[https://www.synchrotron-soleil.fr/fr][Soleil II]] | France, Paris | 3rd => 4th | Upgrade planned | 2.75GeV | | 83pm.rad | 500mA |
+| [[https://www.diamond.ac.uk/Home/About/Vision/Diamond-II.html][Diamond II]] | UK, Oxfordshire | 3rd => 4th | Upgrade planned | 3GeV | | 3nm.rad, 8pm.rad | 300mA |
+| [[https://als.lbl.gov/als-u/als-u-approach/][ALS-U]] | US, Berkeley | 3rd => 4th | Ongoing upgrade | 2Gev | | | 500mA |
+| [[https://www-ssrl.slac.stanford.edu/content/spear3/photon-source-parameters][SLAC]] | US, Standford | 3rd | | 3GeV | | 10nm.rad, 14pm.rad | 500mA |
+| [[https://www.aps.anl.gov/About/Overview][APS]] | US, Lemont | 4th | In operation | 7GeV | | | |
+| [[https://www.bnl.gov/nsls2/][NSLS II]] | US, New York | 3rd | | 3GeV | 10^21 | 0.5nm.rad, 8pm.rad | |
+| [[https://www.cells.es/en/about/welcome][Alba]] | Spain, Barcelona | 3rd | | 3GeV | | | |
+| [[https://www.psi.ch/en/sls/about-sls][PSI, SLS]] | Switzerland | 3rd => 4th | Ongoing upgrade | 2.4GeV | | | |
+| [[https://www.elettra.eu/lightsources/elettra/machine.html][Elettra 2.0]] | Italy, Triestre | 3rd => 4th | Upgrade planned | 2.4GeV | | 0.2nm.rad | |
+| [[https://www.maxiv.lu.se/beamlines-accelerators/accelerators/][Max IV]] | Sweden, Lund | 4th | In operation | 3GeV | | 0.2nm.rad, 2pm.rad | 500mA |
+| [[https://petra4.desy.de/index_eng.html][DESY, PETRA IV]] | Germany, Hamburg | 3rd => 4th | Upgrade planned | 6GeV | | 10pm.rad, 10pm.rad | 100mA |
+| [[https://www.helmholtz-berlin.de/forschung/quellen/bessy/bessy-in-zahlen_en.html][BESSY II]] | Germany, Berlin | 3rd => 4th | Upgrade planned | 1.7GeV | | | |
+| [[https://www.sesame.org.jo/accelerators][SESAME]] | Jordan | 3rd | | 2.5GeV | | | |
+| [[https://lnls.cnpem.br/accelerators/][LNLS, Sirius]] | Brazil | 4th | In operation | 3Gev | | 0.25nm.rad | 100mA |
+| [[http://english.ihep.cas.cn/heps/nae/nh/][HEPS]] | China, Huairou | 4th | In operation | 6GeV | 10^22 | 60pm.rad | 200mA |
+| [[https://en.nsrl.ustc.edu.cn/2015/0128/c10878a117870/page.htm][NSRL]] | China, Hefei | 3rd | | 0.8Gev | | | 300mA |
+| [[https://lssf.cas.cn/en/facilities-view.jsp?id=ff8080814ff56599014ff599b8550033][SSRF]] | China, Shangai | 3rd | | 3.5GeV | | 4nm.rad | 300mA |
+| [[http://www.spring8.or.jp/en/][Spring-8 II]] | Japan, Himeji | 3rd => 4th | Upgrade planned | 6Gev | | 50pm.rad | 200mA |
+| [[https://www.qst.go.jp/site/3gev-eng/][NanoTerasu]] | Japan | 4th | In operation | 3GeV | | 1nm.rad | 400mA |
+| [[https://www.ansto.gov.au/facilities/australian-synchrotron][Australian Synchrotron]] | Australia, Clayton | 3rd | | 3GeV | | 16nm.rad | 200mA |
+| [[https://www.lightsource.ca/index.php][Canadian Light Source]] | Canada, Saskatchewan | 3rd | | 3GeV | | 18nm.rad | 220mA |
+
+** DONE [#C] Review about Stewart platforms
+CLOSED: [2024-05-30 Thu 09:16]
+
+- [X] [[file:~/Cloud/work-projects/ID31-NASS/matlab/stewart-simscape/org/bibliography.org]]
- [ ] cite:li01_simul_fault_vibrat_isolat_point
- [ ] cite:bishop02_devel_precis_point_contr_vibrat
- [ ] cite:hanieh03_activ_stewar
- [ ] cite:afzali-far16_vibrat_dynam_isotr_hexap_analy_studies
+- [ ] [[cite:kong18_vibrat_isolat_dual_stage_actuat]]
- [ ] cite:naves20_desig
-** TODO [#C] Review about Stewart platform control
+** DONE [#B] Review of stages with online metrology for Synchrotrons
+CLOSED: [2024-05-30 Thu 14:24]
-Based on [[file:~/Cloud/work-projects/ID31-NASS/matlab/stewart-simscape/org/bibliography.org]]
+*Sensors*:
+- Capacitive: [[cite:&schroer17_ptynam;&villar18_nanop_esrf_id16a_nano_imagin_beaml;&schropp20_ptynam]]
+- Fiber Interferometers Interferometers:
+ - Attocube FPS3010 Fabry-Pérot interferometers: [[cite:&nazaretski15_pushin_limit;&stankevic17_inter_charac_rotat_stages_x_ray_nanot;&engblom18_nanop_resul;&nazaretski22_new_kirkp_baez_based_scann]]
+ - Attocube IDS3010 Fabry-Pérot interferometers: [[cite:&holler17_omny_pin_versat_sampl_holder;&holler18_omny_tomog_nano_cryo_stage;&kelly22_delta_robot_long_travel_nano]]
+ - PicoScale SmarAct Michelson interferometers: [[cite:&schroer17_ptynam;&schropp20_ptynam;&xu23_high_nsls_ii;&geraldes23_sapot_carnaub_sirius_lnls]]
-Broad subject (MIMO control), maybe talk only about vibration control based on external metrology.
+*Actuators*:
+- Piezoelectric: [[cite:&nazaretski15_pushin_limit;&holler17_omny_pin_versat_sampl_holder;&holler18_omny_tomog_nano_cryo_stage;&villar18_nanop_esrf_id16a_nano_imagin_beaml;&nazaretski22_new_kirkp_baez_based_scann]]
+- 3-phase linear motor: [[cite:&stankevic17_inter_charac_rotat_stages_x_ray_nanot;&engblom18_nanop_resul]]
+- Voice Coil: [[cite:&kelly22_delta_robot_long_travel_nano;&geraldes23_sapot_carnaub_sirius_lnls]]
-- Active Damping
-- Decentralized
-- Centralized
-- Manually tuned: PID, lead lag, etc...
-- Automatic / Optimal: LQG, H-Infinity
+*Bandwidth*: rarely specificity.
+Usually slow, so that only drifts are compensated.
+Only recently, high bandwidth (100Hz) have been reported with the use of voice coil actuators [[cite:&kelly22_delta_robot_long_travel_nano;&geraldes23_sapot_carnaub_sirius_lnls]].
+
+*Degrees of Freedom*:
+- Full rotation for tomography:
+ - Spindle bellow YZ stage: [[cite:&wang12_autom_marker_full_field_hard;&schroer17_ptynam;&schropp20_ptynam;&geraldes23_sapot_carnaub_sirius_lnls]]
+ - Spindle above YZ stage: [[cite:&stankevic17_inter_charac_rotat_stages_x_ray_nanot;&holler17_omny_pin_versat_sampl_holder;&holler18_omny_tomog_nano_cryo_stage;&villar18_nanop_esrf_id16a_nano_imagin_beaml;&engblom18_nanop_resul;&nazaretski22_new_kirkp_baez_based_scann;&xu23_high_nsls_ii]]
+- Only for mapping: [[cite:&nazaretski15_pushin_limit;&kelly22_delta_robot_long_travel_nano]]
+
+*Stroke*:
+- > 1mm: [[cite:&nazaretski15_pushin_limit;&kelly22_delta_robot_long_travel_nano;&geraldes23_sapot_carnaub_sirius_lnls]]
+
+*Payload capabilities*:
+- Micron scale samples
+- Samples up to 500g [[cite:&nazaretski22_new_kirkp_baez_based_scann;&kelly22_delta_robot_long_travel_nano]]
+
+#+caption: End-Station with integrated online metrology
+#+attr_latex: :environment tabularx :width \linewidth :align lllllllX
+#+attr_latex: :center t :booktabs t :font \scriptsize
+| Architecture | Sensors and measured DoFs | Metrology Use | Stroke, DoF | Samples | Institute, BL | Ref |
+|-----------------------------------------------------------------+--------------------------------+---------------------+-------------------------+--------------+----------------+-------------------------------------------|
+| Spindle / *XYZ piezo stage* / Spherical retroreflector / Sample | 3 interferometers[fn:1]: $YZ$ | Characterization | XYZ: 100um, Rz: 180 deg | micron scale | PETRA III, P06 | [[cite:&schroer17_ptynam;&schropp20_ptynam]] |
+| Spindle / Metrology Ring / *XYZ* Stage / Sample | 3 Capacitive: $YZR_x$ | Post processing | | micron scale | NSLS, X8C | cite:&wang12_autom_marker_full_field_hard |
+| *XYZ piezo stage* / Spindle / Metrology Ring / Sample | 2 interferometers [fn:1]: $YZ$ | Detector triggering | | micron scale | NSLS, HRX | [[cite:&xu23_high_nsls_ii]] |
+
+- [ ] Maybe only keep the scanning DoF
+
+#+caption: End-Station with integrated feedback loops based on online metrology. Stages used for feedback are indicated in bold font.
+#+attr_latex: :environment tabularx :width \linewidth :align lllllllX
+#+attr_latex: :center t :booktabs t :font \scriptsize
+| Architecture | Sensors and measured DoFs | Bandwidth | Stroke, DoF | Samples | Institute, BL | Ref |
+|--------------------------------------------------------------------+--------------------------------------+-----------+--------------------------------------+------------+-------------------+----------------------------------------------------------------------------------|
+| *XYZ piezo motors* / Mirrors / Sample | 3 interferometers[fn:3]: $XYZ$ | 3 PID | XYZ: 3mm | light | APS | [[cite:&nazaretski15_pushin_limit]] |
+| *Piezo Hexapod* / Spindle / Metrology Ring / Sample | 12 Capacitive[fn:4]: $XYZR_xR_y$ | 10Hz | XYZ: 50um, Rx/Ry:500urad, Rz: 180deg | light | ESRF, ID16a | [[cite:&villar18_nanop_esrf_id16a_nano_imagin_beaml]] |
+| *Piezo Tripod* / Spindle / Spherical Reference / Sample | 5 Custom interferometers: $YZR_x$ | PID | XYZ: 400um, Rz: 365 deg | light | PSI, OMNY | [[cite:&holler17_omny_pin_versat_sampl_holder;&holler18_omny_tomog_nano_cryo_stage]] |
+| *Stacked XYZ linear motors* / Spindle / XY / Cylindrical Reference | 5 interferometers[fn:3]: $XYZR_xR_y$ | | XYZ: 400um, Rz: 360 deg | light | Soleil, Nanoprobe | [[cite:&stankevic17_inter_charac_rotat_stages_x_ray_nanot;&engblom18_nanop_resul]] |
+| *XYZ piezo* / Spindle / Metrology Ring / Sample | 3 interferometers [fn:3]: $XYZ$ | | XYZ: 100um, Rz: 360 deg | up to 500g | NSLS, SRX | [[cite:&nazaretski22_new_kirkp_baez_based_scann]] |
+| *Parallel XYZ voice coil stage* / Sample | 3 interferometers[fn:2]: $XYZ$ | 100Hz | XYZ: 3mm | up to 350g | Diamond, I14 | [[cite:&kelly22_delta_robot_long_travel_nano]] |
+| Rz / *Parallel XYZ voice coil stage* / Sample | 3 interferometers[fn:1]: $XYZ$ | 100Hz | YZ: 3mm, Rz: +-110deg | light | LNLS, CARNAUBA | [[cite:&geraldes23_sapot_carnaub_sirius_lnls]] |
** TODO [#C] Review of two stage control
@@ -217,61 +993,18 @@ Stick-slip occurs due to the difference between static and dynamic coefficients
| X | 1 axis, Servo motor, ball screw | 1 VCM | | cite:&shinno11_newly_devel_long_range_posit |
| X | 1 axis, VCM | 1 piezo stack | | cite:&xu12_desig_devel_flexur_based_dual |
-** TODO [#C] Make all the figures
+** DONE [#C] Review about Stewart platform control
+CLOSED: [2024-05-29 Wed 16:16]
-1. [ ] [[file:figs/introduction_esrf_schematic.svg]]
- highlight Linac, Booster, Storage ring, ID31 beamline
-2. [ ] Good Picture of ESRF: =introduction_esrf_picture=
-3. [ ] Map with all the Synchrotrons in the World: =introduction_synchrotrons=
- Show Synchrotron going to 4th generation, Highlight ESRF
-4. [ ] Synchrotron Moore law =introduction_moore_law=
-5. [ ] Picture of the beam =introduction_beam_3rd_generation= and =introduction_beam_4th_generation=
-6. [ ] ID31/typical beamline layout with: =introduction_id31_layout=
- - Insertion device
-7. [ ] CAD view of the ID31 EH: =introduction_id31_cad=
- - Highlight focussing optics, positioning station, sample, detector
- - Show X-Y-Z vectors
-8. [ ] Micro-Station with each stage in different color and associated motions
- =introduction_id31_microstation_cad=
- =introduction_id31_microstation_picture=
-9. [ ] Typical experiment (ideally from ID31 experiments):
- - [ ] tomography: =introduction_exp_tomography= and =introduction_exp_tomography_image=
- - [ ] scanning: =introduction_exp_scanning= and =introduction_exp_scanning_image=
-10. [ ] Typical linear stage =introduction_linear_stage=
- - Show: stepper motor, ball screw, linear guides
- - Show: straightness, flatness, etc...
-11. [ ] Flexure based stage =introduction_flexure_stage=
-12. [ ] NASS concept: =introduction_nass_concept_schematic=
- - 4 elements: micro-station, nano-hexapod, metrology, control system
-13. [ ] NASS metrology schematic: =introduction_nass_metrology=
- - Nano-hexapod, sample, spherical mirror with flat bottom surface
- - several fiber interferometers with tracking systems (arrows showing that they can move in Rx/Ry)
-14. [ ] Show some passive end-stations =introduction_pass_stations=
- - ID16b
- - ID11
-15. [ ] Show active passive end-stations =introduction_acti_stations=
- - ID16a
-16. [ ] Two stage control =introduction_two_stage_control=
- Schematic with the long stroke, short stroke, metrology and control architecture: trajectory generation => long stroke & short stroke + feedback on the short stroke
-17. [ ] Examples of two stage control:
- - =introduction_two_stage_control_h_bridge= from [[cite:&schmidt20_desig_high_perfor_mechat_third_revis_edition]]
- - =introduction_two_stage_control_example= from [[cite:&shinno11_newly_devel_long_range_posit]]
-18. [ ] Serial VS Parallel: comparison of X-Y-Rz stages
- - =introduction_kinematics_serial=
- - =introduction_kinematics_parallel=
-19. [ ] Stewart platform architecture =introduction_stewart_platform=
- Maybe two pose to show that by changing the length of each strut, it is possible to change the relative position between the two plates?
- Maybe do that with Matlab and then editing with Inkscape
-20. [ ] Different model types
- - =introduction_model_lumped=
- - =introduction_model_fem=
- - =introduction_model_multi_body=
-21. [ ] Feedback System / Closed loop simulations =introduction_close_loop=
- - feedback model with: controller, plant, disturbances (plant output), sensor with noise, actuator with noise
-22. [ ] Dynamic Error Budgeting =introduction_dyn_error_budget=
- - PSD + CPS ? => understand what are the limitations?, similar to what is in [[cite:&schmidt20_desig_high_perfor_mechat_third_revis_edition]] ?
- - Use the same signals than for the previous figure
-23. [ ] About Stewart platform control? Centralized / Decentralized? MIMO / 6 SISO?
+Based on [[file:~/Cloud/work-projects/ID31-NASS/matlab/stewart-simscape/org/bibliography.org]]
+
+Broad subject (MIMO control), maybe talk only about vibration control based on external metrology.
+
+- Active Damping
+- Decentralized
+- Centralized
+- Manually tuned: PID, lead lag, etc...
+- Automatic / Optimal: LQG, H-Infinity
** DONE [#B] Check these papers for literature review
CLOSED: [2024-05-05 Sun 16:22]
@@ -379,16 +1112,30 @@ Bandwidth is rarely specified
Same table for nano positioning stages without integrated metrology?
+** TODO [#C] Ask for permission to use figures
+
+- [ ] Veijo (OH1, OH2)
+- [ ] Cloetens (tomo + mapping)
+- [ ] Focus size (Ray Barret)
+- [ ] ID16b
+- [ ] ID11
+- [ ] Wang
+- [ ] Chroer
+- [ ] Villar
+- [ ] Nazaretski
+- [ ] Shinno
+- [ ] Schmidth
+- [ ]
* Context of this thesis
** Synchrotron Radiation Facilities
**** Accelerating electrons to produce intense X-ray
- Explain what is a Synchrotron: light source
-- Say how many there are in the world (~50)
+- Say how many there are in the world (~50). The main ones are shown in Figure ref:fig:introduction_synchrotrons.
#+name: fig:introduction_synchrotrons
-#+caption: 4th generation Synchrotrons in operation (red). Upgrade or new 4th generation projects (green). 3rd generation Synchrotrons (blue).
+#+caption: Major synchrotron radiation facilities in the world. 3rd generation Synchrotrons are shown in blue. Planned upgrades to 4th generation are shown in green, and 4th generation Synchrotrons in operation are shown in red.
#+attr_latex: :width \linewidth
[[file:figs/introduction_synchrotrons.png]]
@@ -398,20 +1145,19 @@ Same table for nano positioning stages without integrated metrology?
- Science that can be performed:
- structural biology, structure of materials, matter at extreme, ...
-
**** The European Synchrotron Radiation Facility
-#+name: fig:fig_label
-#+caption: Caption with reference to sub figure (\subref{fig:fig_label_a})
+#+name: fig:instroduction_esrf
+#+caption: Schematic (\subref{fig:introduction_esrf_schematic}) and picture (\subref{fig:introduction_esrf_picture}) of the European Synchrotron Radiation Facility
#+attr_latex: :options [htbp]
#+begin_figure
-#+attr_latex: :caption \subcaption{\label{fig:introduction_esrf_schematic}Schematic of the ESRF - Over 40 beamlines. Booster, Linac, storage ring}
+#+attr_latex: :caption \subcaption{\label{fig:introduction_esrf_schematic} Schematic of the ESRF. The linear accelerator is shown in blue, the booster synchrotron in purple and the storage ring in green. There are over 40 beamlines, the ID31 beamline is highlighted in red}
#+attr_latex: :options {0.49\textwidth}
#+begin_subfigure
#+attr_latex: :width 0.95\linewidth
[[file:figs/introduction_esrf_schematic.png]]
#+end_subfigure
-#+attr_latex: :caption \subcaption{\label{fig:introduction_esrf_picture}European Synchrotron Radiation Facility}
+#+attr_latex: :caption \subcaption{\label{fig:introduction_esrf_picture} European Synchrotron Radiation Facility}
#+attr_latex: :options {0.49\textwidth}
#+begin_subfigure
#+attr_latex: :width 0.95\linewidth
@@ -423,30 +1169,46 @@ Same table for nano positioning stages without integrated metrology?
Brilliance: figure of merit for synchrotron
-- 4th generation light sources
- - [[cite:&raimondi21_commis_hybrid_multib_achrom_lattic]]
- - [ ] Picture of 3rd generation "beam source" vs 4th generation?
-- [ ] Picture showing Synchrotron "moore's law"
-
-#+name: fig:introduction_moore_law
-#+caption: Figure caption
-[[file:figs/introduction_moore_law.pdf]]
-
+- 4th generation light sources [[cite:&raimondi21_commis_hybrid_multib_achrom_lattic]]
+#+name: fig:introduction_moore_law_brillance
+#+caption: Evolution of the peak brilliance (expressed in $\text{photons}/s/mm^2/mrad^2/0.1\%BW$) of synchrotron radiation facilities. Note the vertical logarithmic scale.
+[[file:figs/introduction_moore_law_brillance.png]]
** The ID31 ESRF Beamline
**** Beamline Layout
-- [ ] Beamline layout (OH, EH)
-- ID31 and Micro Station (Figure ref:fig:introduction_id31_microstation_picture)
+- General layout: source (insertion device), optical hutches (OH1, OH2), experimental hutch (EH)
+- Beamline layout (OH Figure ref:fig:introduction_id31_oh, EH ref:fig:introduction_id31_cad)
+ All these optical instruments are used to "shape" the x-ray beam as wanted (monochromatic, wanted size, focused, etc...)
+- ID31 and Micro Station (Figure ref:fig:introduction_id31_cad)
Check https://www.esrf.fr/UsersAndScience/Experiments/StructMaterials/ID31
https://www.wayforlight.eu/beamline/23244
-- X-ray beam + detectors + sample stage (Figure ref:fig:introduction_id31_beamline_schematic)
+- X-ray beam + detectors + sample stage
- Focusing optics
- Optical schematic with: source, lens, sample and detector.
Explain that what is the most important is the relative position between the sample and the lens.
- Explain the XYZ frame for all the thesis (ESRF convention: X: x-ray, Z gravity up)
- - [ ] Add XYZ on figure ref:fig:introduction_id31_cad
+
+#+name: fig:introduction_id31_oh
+#+caption: Schematic of the two ID31 optical hutches: OH1 (\subref{fig:introduction_id31_oh1}) and OH2 (\subref{fig:introduction_id31_oh2}). Distance from the source (the insertion device) is indicated in meters.
+#+attr_latex: :options [htbp]
+#+begin_figure
+#+attr_latex: :caption \subcaption{\label{fig:introduction_id31_oh1}OH1}
+#+attr_latex: :options {\textwidth}
+#+begin_subfigure
+#+attr_latex: :scale 0.9
+[[file:figs/introduction_id31_oh1.png]]
+#+end_subfigure
+
+\bigskip
+#+attr_latex: :caption \subcaption{\label{fig:introduction_id31_oh2}OH2}
+#+attr_latex: :options {\textwidth}
+#+begin_subfigure
+#+attr_latex: :scale 0.9
+[[file:figs/introduction_id31_oh2.png]]
+#+end_subfigure
+#+end_figure
#+begin_src latex :file id31_microstation_picture.pdf
\begin{tikzpicture}
@@ -483,9 +1245,9 @@ Brilliance: figure of merit for synchrotron
#+end_src
#+name: fig:introduction_id31_cad
-#+caption: CAD view of the optical hutch with the nano-focusing optics, the micro-station
+#+caption: CAD view of the ID31 Experimal Hutch (EH). There are typically four main elements: the focusing optics in yellow, the sample stage in green, the sample itself in purple and the detector in blue. All these elements are fixed to the same granite.
#+attr_latex: :width 0.8\linewidth
-[[file:figs/introduction_id31_cad.jpg]]
+[[file:figs/introduction_id31_station_detector.png]]
**** Positioning End Station: The Micro-Station
@@ -496,150 +1258,25 @@ Micro-Station:
- Explain how it is used (positioning, scans), what it does. But not about the performances
- Different sample environments
-#+begin_src latex :file id31_beamline_schematic.pdf
- \begin{tikzpicture}
- % Parameters
- \def\blockw{6.0cm}
- \def\blockh{1.2cm}
+#+name: fig:introduction_micro_station
+#+caption: The micro-station. CAD view is shown in (\subref{fig:introduction_micro_station_dof}) with the associated degrees of freedom. A picture of the micro-station is shown in (\subref{fig:introduction_micro_station_picture}) during the assembly process.
+#+attr_latex: :options [htbp]
+#+begin_figure
+#+attr_latex: :caption \subcaption{\label{fig:introduction_micro_station_dof} CAD view}
+#+attr_latex: :options {0.49\textwidth}
+#+begin_subfigure
+#+attr_latex: :width 0.95\linewidth
+[[file:figs/introduction_micro_station_dof.png]]
+#+end_subfigure
+#+attr_latex: :caption \subcaption{\label{fig:introduction_micro_station_picture} Picture}
+#+attr_latex: :options {0.49\textwidth}
+#+begin_subfigure
+#+attr_latex: :width 0.95\linewidth
+[[file:figs/introduction_micro_station_picture.png]]
+#+end_subfigure
+#+end_figure
- \def\tiltdeg{3}
- \coordinate[] (rotationpoint) at (0, 4.5*\blockh);
-
- \begin{scope}[rotate around={\tiltdeg:(rotationpoint)}]
- % Tilt
- \path[] ([shift=(-120:4*\blockh)]rotationpoint) coordinate(beginarc) arc (-120:-110:4*\blockh) %
- -- ([shift=(-70:4*\blockh)]rotationpoint) arc (-70:-60:4*\blockh)%
- |- ++(-0.15*\blockw, 0.6*\blockh) coordinate (spindlene)%
- |- ($(beginarc) + (0.15*\blockw, 0.2*\blockh)$) coordinate (spindlesw) -- ++(0, 0.4*\blockh) coordinate(tiltte) -| cycle;
-
- % Spindle
- \coordinate[] (spindlese) at (spindlesw-|spindlene);
- \draw[fill=black!30] ($(spindlese)+(-0.1,0.1)+(-0.1*\blockw, 0)$) -| ($(spindlene)+(-0.1, 0)$) -| coordinate[pos=0.25](spindletop) ($(spindlesw)+(0.1,0.1)$) -| ++(0.1*\blockw, -\blockh) -| coordinate[pos=0.25](spindlebot) cycle;
-
- % \draw[dashed, color=black!60] ($(spindletop)+(0, 0.2)$) -- ($(spindlebot)+(0,-0.2)$);
-
- % Tilt
- \draw[fill=black!60] ([shift=(-120:4*\blockh)]rotationpoint) coordinate(beginarc) arc (-120:-110:4*\blockh) %
- -- ([shift=(-70:4*\blockh)]rotationpoint) arc (-70:-60:4*\blockh)%
- |- coordinate (tiltne) ++(-0.15*\blockw, 0.6*\blockh) coordinate (spindlene)%
- |- ($(beginarc) + (0.15*\blockw, 0.2*\blockh)$) coordinate (spindlesw) -- ++(0, 0.4*\blockh) -| cycle;
-
- % Micro-Hexapod
- \begin{scope}[shift={(spindletop)}]
- % Parameters definitions
- \def\baseh{0.22*\blockh} % Height of the base
- \def\naceh{0.18*\blockh} % Height of the nacelle
- \def\baser{0.22*\blockw} % Radius of the base
- \def\nacer{0.18*\blockw} % Radius of the nacelle
-
- \def\armr{0.2*\blockh} % Radius of the arms
- \def\basearmborder{0.2}
- \def\nacearmborder{0.2}
-
- \def\xnace{0} \def\ynace{\blockh-\naceh} \def\anace{0}
- \def\xbase{0} \def\ybase{0} \def\abase{0}
-
- % Hexapod1
- \begin{scope}[shift={(\xbase, \ybase)}, rotate=\abase]
- % Base
- \draw[fill=white] (-\baser, 0) coordinate[](uhexabot) rectangle (\baser, \baseh);
-
- \coordinate[] (armbasel) at (-\baser+\basearmborder+\armr, \baseh);
- \coordinate[] (armbasec) at (0, \baseh);
- \coordinate[] (armbaser) at (\baser-\basearmborder-\armr, \baseh);
-
- \begin{scope}[shift={(\xnace, \ynace)}, rotate=\anace]
- \draw[fill=white] (-\nacer, 0) rectangle (\nacer, \naceh);
- \coordinate[] (uhexatop) at (0, \naceh);
- \coordinate[] (armnacel) at (-\nacer+\nacearmborder+\armr, 0);
- \coordinate[] (armnacec) at (0, 0);
- \coordinate[] (armnacer) at (\nacer-\nacearmborder-\armr, 0);
- \end{scope}
-
- \draw[] (armbasec) -- (armnacer);
- \draw[] (armbasec) -- (armnacel);
- \draw[] (armbasel) -- coordinate(mhexaw) (armnacel);
- \draw[] (armbasel) -- (armnacec);
- \draw[] (armbaser) -- (armnacec);
- \draw[] (armbaser) -- coordinate(mhexae) (armnacer);
- \end{scope}
- \end{scope}
-
- % Sample
- \begin{scope}[shift={(uhexatop)}]
- \draw[fill=white] (-0.1*\blockw, 0) coordinate[](samplebot) rectangle coordinate[pos=0.5](samplecenter) node[pos=0.5, above]{Sample} (0.1*\blockw, \blockh) coordinate[](samplene);
- \coordinate[](samplenw) at (-0.1*\blockw, \blockh);
- \end{scope}
- \end{scope}
-
- \begin{scope}[shift={(0, -0.3*\blockh)}]
- % Translation Stage - fixed part
- \draw[fill=black!40] (-0.5*\blockw, 0) coordinate[](tyb) rectangle (0.5*\blockw, 0.15*\blockh);
- \coordinate[] (measposbot) at (0.5*\blockw, 0);
-
- % Translation Stage - mobile part
- \draw[fill=black!10, fill opacity=0.5] (-0.5*\blockw, 0.2*\blockh) -- (-0.5*\blockw, 1.5*\blockh) coordinate[](tyt) -- (0.5*\blockw, 1.5*\blockh) -- (0.5*\blockw, 0.2*\blockh) -- (0.35*\blockw, 0.2*\blockh) -- (0.35*\blockw, 0.8*\blockh) -- (-0.35*\blockw, 0.8*\blockh) -- (-0.35*\blockw, 0.2*\blockh) -- cycle;
-
- % Translation Guidance
- \draw[dashed, color=black!60] ($(-0.5*\blockw, 0)+( 0.075*\blockw,0.5*\blockh)$) circle (0.2*\blockh);
- \draw[dashed, color=black!60] ($( 0.5*\blockw, 0)+(-0.075*\blockw,0.5*\blockh)$) circle (0.2*\blockh);
-
- % Tilt Guidance
- \draw[dashed, color=black!60] ([shift=(-107:4.1*\blockh)]rotationpoint) arc (-107:-120:4.1*\blockh);
- \draw[dashed, color=black!60] ([shift=( -73:4.1*\blockh)]rotationpoint) arc (-73:-60:4.1*\blockh);
- \end{scope}
-
- % % Vertical line
- % \draw[dashed, color=black] (samplecenter) -- ++(0, -4*\blockh);
- % \begin{scope}[rotate around={\tiltdeg:(samplecenter)}]
- % \draw[dashed, color=black] (samplecenter) -- ++(0, -4*\blockh);
- % \node[] at ($(samplecenter)+(0, -2.3*\blockh)$) {\AxisRotator[rotate=-90]};
- % \node[right, shift={(0.3,0)}] at ($(samplecenter)+(0, -2.3*\blockh)$) {$\theta_z$};
- % \end{scope}
- % \draw[->] ([shift=(-90:3.6*\blockh)]samplecenter) arc (-90:-87:3.6*\blockh) node[right]{$\theta_y$};
-
- % Laser
- \begin{scope}[shift={(samplecenter)}]
- \draw[color=red, -<-=0.3] (samplecenter) node[circle, fill=red, inner sep=0pt, minimum size=3pt]{} -- node[pos=0.3, above, color=black]{X-ray} ($(samplecenter)+(1.2*\blockw,0)$);
- \end{scope}
-
- % Axis
- \begin{scope}[shift={(-0.35*\blockw, 3*\blockh)}]
- \def\axissize{0.8cm}
- \draw[->] (0, 0) -- ++(0, \axissize) node[right]{$z$};
- \draw[->] (0, 0) -- ++(-\axissize, 0) node[above]{$x$};
- \draw[fill, color=black] (0, 0) circle (0.05*\axissize);
- \node[draw, circle, inner sep=0pt, minimum size=0.4*\axissize, label=right:$y$] (yaxis) at (0, 0){};
- % \node[draw, circle, inner sep=0pt, cross, minimum size=0.4*\axissize, label=left:$y$] (yaxis) at (0, 0){};
- \end{scope}
-
- \node[fit={($(-0.6*\blockw, -0.5*\blockh)$) ($(0.6*\blockw, 4*\blockh)$)}, inner sep=0pt, draw, dashed, color=gray, label={Positioning Station}] (possystem) {};
-
- \draw[fill=black!30] ($(tyb)+(-5, -1)$) coordinate[](granitesw) rectangle node[pos=0.5]{Granite Frame} ($(measposbot)+(5, 0)$) coordinate[](granitene);
-
- % Focusing Optics
- \draw[fill=black!20] ($(granitene)+(-1.5, 3)$) rectangle ++(-1, 2);
- \draw[spring] ($(granitene)+(-2, 0)$) -- ++(0, 3);
-
- \node[fit={($(granitene)+(-2.8, -0.2)$) ($(granitene)+(-1.2, 5.2)$)}, inner sep=0pt, draw, dashed, color=gray, label={Focusing Optics}] () {};
-
- % Measurement Optics
- \draw[fill=black!20] ($(granitesw)+(1.5, 4)$) rectangle ++(1, 2);
- \draw[spring] ($(granitesw)+(2, 1)$) -- ++(0, 3);
-
- \node[fit={($(granitesw)+(2.8, 0.8)$) ($(granitesw)+(1.2, 6.2)$)}, inner sep=0pt, draw, dashed, color=gray, label={Imagery System}] () {};
- \end{tikzpicture}
-#+end_src
-
-- Alternative: =id31_microstation_cad_view.png= (CAD view)
-
-#+name: fig:introduction_id31_microstation_picture
-#+caption: Picture of the ID31 Micro-Station with annotations
-#+attr_latex: :width 0.49\linewidth
-#+RESULTS:
-[[file:figs/introduction_id31_microstation_picture.png]]
-
-**** Science performed on ID31
+**** Scientific experiments performed on ID31
- Few words about science made on ID31 and why nano-meter accuracy is required
- Typical experiments (tomography, ...), various samples (up to 50kg), sample environments (high temp, cryo, etc..)
@@ -647,33 +1284,86 @@ Micro-Station:
- Reflectivity
- Tomography
- Diffraction tomography: most critical
-- Example of picture obtained (Figure ref:fig:introduction_id31_tomography_result) with resolution
+- Two example:
+ - Tomography: compute image as a function of the angle. To reconstruct 3D image, the position has to be known with good accuracy
+ [[cite:&schoeppler17_shapin_highl_regul_glass_archit]]
+ - Mapping: focused beam on the sample, 20nm step size, accuracy of the obtained image is directly linked to the beam size and the position accuracy/vibrations
+ [[cite:&sanchez-cano17_synch_x_ray_fluor_nanop]]
+
+# From [[cite:&schropp20_ptynam;&schroer17_ptynam;&schroeck01_compen_desig_linear_time_invar]]
+# For scanning microscopy and tomography it is essential to know where the beam hits the sample.
+# Position uncertainties can arise from vibrations of the focusing optics and of the sample.
+# The sample is scanned through the nanobeam, while the optics are kept fixed after initial alignment.
+
+#+name: fig:introduction_tomography
+#+caption: Exemple of a tomography experiment. The sample is rotated and images are taken at several angles (\subref{fig:introduction_tomography_schematic}). Example of one 3D image obtained after tomography (\subref{fig:introduction_tomography_results}).
+#+attr_latex: :options [htbp]
+#+begin_figure
+#+attr_latex: :caption \subcaption{\label{fig:introduction_tomography_schematic} Experimental setup}
+#+attr_latex: :options {0.65\textwidth}
+#+begin_subfigure
+#+attr_latex: :width 0.95\linewidth
+[[file:figs/introduction_tomography_schematic.png]]
+#+end_subfigure
+#+attr_latex: :caption \subcaption{\label{fig:introduction_tomography_results} Obtained image \cite{schoeppler17_shapin_highl_regul_glass_archit}}
+#+attr_latex: :options {0.34\textwidth}
+#+begin_subfigure
+#+attr_latex: :width 0.95\linewidth
+[[file:figs/introduction_tomography_picture.png]]
+#+end_subfigure
+#+end_figure
-=introduction_exp_scanning= and =introduction_exp_scanning_image=
+#+name: fig:introduction_scanning
+#+caption: Exemple of a scanning experiment. The sample is scanned in the Y-Z plane (\subref{fig:introduction_scanning_schematic}). Example of one 2D image obtained after scanning with a step size of 20nm (\subref{fig:introduction_scanning_results}).
+#+attr_latex: :options [htbp]
+#+begin_figure
+#+attr_latex: :caption \subcaption{\label{fig:introduction_scanning_schematic} Experimental setup}
+#+attr_latex: :options {0.65\textwidth}
+#+begin_subfigure
+#+attr_latex: :width 0.95\linewidth
+[[file:figs/introduction_scanning_schematic.png]]
+#+end_subfigure
+#+attr_latex: :caption \subcaption{\label{fig:introduction_scanning_results} Obtained image \cite{sanchez-cano17_synch_x_ray_fluor_nanop}}
+#+attr_latex: :options {0.34\textwidth}
+#+begin_subfigure
+#+attr_latex: :width 0.95\linewidth
+[[file:figs/introduction_scanning_picture.png]]
+#+end_subfigure
+#+end_figure
-#+name: fig:introduction_id31_tomography_result
-#+caption: Image obtained on the ID31 beamline
-#+attr_latex: :width 0.49\linewidth
-[[file:example-image-c.png]]
-
-** Need of accurate positioning end stations with high dynamics
-**** A push towards brighter and smaller beams...
+** Need of Accurate Positioning End-Stations with High Dynamics
+**** A push towards brighter and smaller beams
Improvement of both the light source and the instrumentation:
-- EBS: smaller source + higher flux ref:fig:introduction_beam_ebs
-
-#+name: fig:introduction_beam_ebs
-#+caption: View of the ESRF X-ray beam before the EBS upgrade (top) and after the EBS upgrade (bottom)
-[[file:figs/introduction_beam_ebs.png]]
+- EBS: smaller source + higher flux ref:fig:introduction_beam_3rd_4th_gen
+#+name: fig:introduction_beam_3rd_4th_gen
+#+caption: View of the ESRF X-ray beam before the EBS upgrade (\subref{fig:introduction_beam_3rd_gen}) and after the EBS upgrade (\subref{fig:introduction_beam_4th_gen}). The brilliance is increased, whereas the horizontal size and emittance are reduced.
+#+attr_latex: :options [htbp]
+#+begin_figure
+#+attr_latex: :caption \subcaption{\label{fig:introduction_beam_3rd_gen}$3^{rd}$ generation}
+#+attr_latex: :options {0.69\textwidth}
+#+begin_subfigure
+#+attr_latex: :height 1.6cm
+[[file:figs/introduction_beam_3rd_gen.png]]
+#+end_subfigure
+#+attr_latex: :caption \subcaption{\label{fig:introduction_beam_4th_gen}$4^{th}$ generation}
+#+attr_latex: :options {0.29\textwidth}
+#+begin_subfigure
+#+attr_latex: :height 1.6cm
+[[file:figs/introduction_beam_4th_gen.png]]
+#+end_subfigure
+#+end_figure
+- ESRF Red Book (1987): very few beamline projects aiming even for 10 micron sized beams
+ Now optics exist for 10nm beams
- Better focusing optic (add some links): beam size in the order of 10 to 20nm FWHM (reference) ref:fig:introduction_moore_law_focus
crossed silicon compound refractive lenses, KB mirrors [17], zone plates [18], or multilayer Laue lenses [19]
[[cite:&barrett16_reflec_optic_hard_x_ray]]
#+name: fig:introduction_moore_law_focus
-#+caption: Figure caption
+#+caption: Evolution of the measured spot size for different hard x-ray focusing elements. CRL, KB, FZP, MLL
[[file:figs/introduction_moore_law_focus.png]]
Higher flux density (+high energy of the ID31 beamline) => Radiation damage: needs to scan the sample quite fast with respect to the focused beam
@@ -681,7 +1371,8 @@ Higher flux density (+high energy of the ID31 beamline) => Radiation damage: nee
- Allowed by better detectors: higher sampling rates and lower noise => possible to scan fast
[[cite:&hatsui15_x_ray_imagin_detec_synch_xfel_sourc]]
-**** ...Requires the use of dynamical positioning
+**** New dynamical positioning needs
+
"from traditional step by step scans to /fly-scan/"
Fast scans + needs of high accuracy and stability => need mechatronics system with:
@@ -701,43 +1392,67 @@ In fly-scan mode, the sample keeps moving and a triggering system generates trig
The trigger signals are used to control detector exposure.
#+end_quote
-- [ ] Make picture representing a typical experiment (maybe YZ scan?) with:
- Probably already shown earlier =introduction_exp_scanning=
- - nano focusing optics (see the beam focused)
- - positioning stage with displayed YZ motion (pixel by pixel in the YZ plane)
- - detector
+
+#+name: fig:introduction_scan_mode
+#+caption: Two acquisition modes. In step-by-step mode (\subref{fig:introduction_scan_step}), the motor moves at the wanted imaged position, the detector acquisition is started, the shutter is openned briefly to have the wanted exposition, the detector acquisition is stopped, and the motor can move to a new position. In /fly-scan/ mode (\subref{fig:introduction_scan_fly}), the shutter is openned during all the motion, and the detector is acquired only at the wanted positions, on the /fly/.
+#+attr_latex: :options [htbp]
+#+begin_figure
+#+attr_latex: :caption \subcaption{\label{fig:introduction_scan_step} Step by step scan}
+#+attr_latex: :options {0.55\textwidth}
+#+begin_subfigure
+#+attr_latex: :height 6cm
+[[file:figs/introduction_scan_step.png]]
+#+end_subfigure
+#+attr_latex: :caption \subcaption{\label{fig:introduction_scan_fly} Fly scan}
+#+attr_latex: :options {0.44\textwidth}
+#+begin_subfigure
+#+attr_latex: :height 6cm
+[[file:figs/introduction_scan_fly.png]]
+#+end_subfigure
+#+end_figure
Subject of this thesis: design of high performance positioning station with high dynamics and nanometer accuracy
* Challenge definition
-** Multi DoF, Highly accurate, and Long stroke positioning end station?
-**** Performance limitation of "stacked stages" end-stations
+** Multi degrees of freedom, long stroke and highly accurate positioning end station
+**** Performance limitation of "stacked-stages" end-stations
-Typical positioning end station:
+Typical positioning end station (Figure ref:fig:introduction_translation_stage):
- stacked stages
-- ballscrew, linear guides, rotary motor
-
+- Ball-screw, linear guides, rotary motor
Explain the limitation of performances:
- Backlash, play, thermal expansion, guiding imperfections, ...
- Give some numbers: straightness of the Ty stage for instance, change of $0.1^oC$ with steel gives x nm of motion
- Vibrations
-- Explain that this micro-station can only have ~10um of accuracy due to physical limitation
- Possibility to have linear/rotary encoders that correct the motion in the considered DoF, but does not change anything to the other 5DoF
+#+name: fig:introduction_translation_stage
+#+caption: A classical translation stage composed of: a rotary motor and possibly reduction gears (in blue), a mechanism to transform the rotary motion to a translation (here a lead screw in green), a guiding mechanism (here linear rails and bearings in red). The mobile platform (in yellow) can then translate with respect to the fixed base.
+[[file:figs/introduction_translation_stage.png]]
-Talk about flexure based positioning stations?
+Flexure based positioning stations may give better positioning requirements, but are limited to short stroke.
Advantages: no backlash, etc...
But: limited to short stroke
Picture of schematic of one positioning station based on flexure
-**** The ID31 Micro-Station
+Explain example of Figure ref:fig:introduction_flexure_stage.
-Presentation of the Micro-Station in details ref:fig:introduction_id31_microstation_cad:
+#+name: fig:introduction_flexure_stage
+#+caption: A simple flexure stage
+[[file:figs/introduction_flexure_stage.png]]
+
+Combining, long stroke and accuracy in multi-DoF is challenging.
+
+**** Positioning accuracy of the ID31 Micro-Station
+
+Presentation of the Micro-Station in details ref:fig:introduction_micro_station:
- Goal of each stage (e.g. micro-hexapod: static positioning, Ty and Rz: scans, ...)
- Stroke
- Initial design objectives: as stiff as possible, smallest errors as possible
+Explain that this micro-station can only have ~10um / 10urad of accuracy due to physical limitation.
+
**** New positioning requirements
- To benefits from nano-focusing optics, new source, etc... new positioning requirements
@@ -753,22 +1468,24 @@ The goal in this thesis is to increase the positioning accuracy of the micro-sta
** The Nano Active Stabilization System
**** NASS Concept
-Briefly describe the NASS concept.
-4 parts:
-- Micro Station
-- multi-DoF positioning system with good dynamics
-- 5DoF metrology system
-- Control system and associated instrumentation
+In order to address the new positioning requirements, the concept of...
+Briefly describe the NASS concept.
6DoF vibration control platform on top of a complex positioning platform that correct positioning errors based on an external metrology
-- [ ] Add the control system in the schematic
+It is composed of mainly four elements:
+- The micro station
+- A 5 degrees of freedom metrology system
+- A 5 or 6 degrees of freedom stabilization platform
+- Control system and associated instrumentation
#+name: fig:introduction_nass_concept_schematic
-#+caption: Nass Concept. 1: micro-station, 2: nano-hexapod, 3: sample, 4: 5DoF metrology
+#+caption: The Nano Active Stabilization System concept
[[file:figs/introduction_nass_concept_schematic.png]]
-**** Metrology system
+**** Online Metrology system
+
+The accuracy of the NASS will only depend on the accuracy of the metrology system.
Requirements:
- 5 DoF
@@ -776,26 +1493,27 @@ Requirements:
- nano-meter accurate
- high bandwidth
-The accuracy of the NASS will only depend on the accuracy of the metrology system.
-
Concept:
- Fiber interferometers
- Spherical reflector with flat bottom
-- Tracking system
+- Tracking system (tip-tilt mechanism) to keep the beam perpendicular to the mirror surface: Spherical mirror with center at the point of interest => No Abbe errors
+
+- XYZ positions from at least 3 interferometers pointing at the spherical surface
+- Rx/Ry angles from at least 3 interferometers pointing at the bottom flat surface
+
+#+name: fig:introduction_nass_metrology
+#+caption: 2D representation of the NASS metrology system.
+[[file:figs/introduction_nass_metrology.png]]
Complex mechatronics system on its own.
-
This metrology system is not further discussed in this thesis as it is still under active development.
-
In the following of this thesis, it is supposed that the metrology system is accurate, etc..
-- Say that there are several high precision sensors, but only interferometers for long stroke / high accuracy?
-
-**** Multi-DoF Positioning stage for error compensation
+**** Active Stabilization Platform
- 5 DoF
- High dynamics
-- nano-meter capable (no backlash,)
+- Nano-meter capable (no backlash)
- Accept payloads up to 50kg
**** MIMO robust control strategies
@@ -814,10 +1532,12 @@ Trade-off between robustness and performance in the design of feedback system.
- actuators
- mechanical design
- achievable bandwidth
- - ...
- Need to evaluate the different concepts, and predict the performances to guide the design
- The goal is to design, built and test this system such that it work as expected the first time.
- Very costly system, so much be correct.
+ Very costly system, so must be correct.
+- Challenge:
+ - proper design methodology
+ - accurate models
** Control Challenge
@@ -831,8 +1551,8 @@ High bandwidth, 6 DoF system for vibration control, fixed on top of a complex mu
Being robust to change of payload inertia means large stability margins and therefore less performance.
* Literature Review
-** Nano Positioning end-stations
-**** End Station with Stacked Stages
+** Nano Positioning End-Stations
+**** End-Station with Stacked Stages
Stacked stages:
- errors are combined
@@ -842,11 +1562,27 @@ To have acceptable performances / stability:
- high performances stages (air bearing etc...)
Examples:
-- ID16b [[cite:&martinez-criado16_id16b]]
-- ID13 [[cite:&riekel10_progr_micro_nano_diffr_at]]
-- ID11 cite:wright20_new_oppor_at_mater_scien
- ID01 [[cite:&leake19_nanod_beaml_id01]]
-- [ ] Maybe make a table to compare stations
+- ID11 [[cite:&wright20_new_oppor_at_mater_scien]]
+- ID13 [[cite:&riekel10_progr_micro_nano_diffr_at]]
+
+#+name: fig:introduction_passive_stations
+#+caption: Example of two nano end-stations without online metrology: (\subref{fig:introduction_endstation_id16b}) cite:&martinez-criado16_id16b and (\subref{fig:introduction_endstation_id11}) cite:wright20_new_oppor_at_mater_scien
+#+attr_latex: :options [htbp]
+#+begin_figure
+#+attr_latex: :caption \subcaption{\label{fig:introduction_endstation_id16b}ID16b}
+#+attr_latex: :options {0.49\textwidth}
+#+begin_subfigure
+#+attr_latex: :scale 1
+[[file:figs/introduction_endstation_id16b.png]]
+#+end_subfigure
+#+attr_latex: :caption \subcaption{\label{fig:introduction_endstation_id11}ID11}
+#+attr_latex: :options {0.49\textwidth}
+#+begin_subfigure
+#+attr_latex: :scale 1
+[[file:figs/introduction_endstation_id11.png]]
+#+end_subfigure
+#+end_figure
Explain limitations => Thermal drifts, run-out errors of spindles (improved by using air bearing), straightness of translation stages, ...
@@ -854,41 +1590,119 @@ Explain limitations => Thermal drifts, run-out errors of spindles (improved by u
The idea of having an external metrology to correct for errors is not new.
-- To have even better performances: online metrology are required.
-- Several strategies:
- - only used for measurements (post processing)
- - for calibration
- - for triggering detectors
- - for real time positioning control
+Several strategies:
+- only used for measurements (post processing)
+- for calibration
+- for triggering detectors
+- for real time positioning control (Figure ref:fig:introduction_active_stations)
+
+Sensors:
+- Capacitive: [[cite:&schroer17_ptynam;&villar18_nanop_esrf_id16a_nano_imagin_beaml;&schropp20_ptynam]]
+- Fiber Interferometers Interferometers:
+ - Attocube FPS3010 Fabry-Pérot interferometers: [[cite:&nazaretski15_pushin_limit;&stankevic17_inter_charac_rotat_stages_x_ray_nanot;&engblom18_nanop_resul;&nazaretski22_new_kirkp_baez_based_scann]]
+ - Attocube IDS3010 Fabry-Pérot interferometers: [[cite:&holler17_omny_pin_versat_sampl_holder;&holler18_omny_tomog_nano_cryo_stage;&kelly22_delta_robot_long_travel_nano]]
+ - PicoScale SmarAct Michelson interferometers: [[cite:&schroer17_ptynam;&schropp20_ptynam;&xu23_high_nsls_ii;&geraldes23_sapot_carnaub_sirius_lnls]]
+
+#+name: fig:introduction_metrology_stations
+#+caption: Two examples of end-station with integrated online metrology. (\subref{fig:introduction_stages_wang}) [[cite:&wang12_autom_marker_full_field_hard]] and (\subref{fig:introduction_stages_schroer}) [[cite:&schroer17_ptynam]]
+#+attr_latex: :options [htbp]
+#+begin_figure
+#+attr_latex: :caption \subcaption{\label{fig:introduction_stages_wang} Wang}
+#+attr_latex: :options {0.49\textwidth}
+#+begin_subfigure
+#+attr_latex: :scale 1
+[[file:figs/introduction_stages_wang.png]]
+#+end_subfigure
+#+attr_latex: :caption \subcaption{\label{fig:introduction_stages_schroer} Schroer}
+#+attr_latex: :options {0.49\textwidth}
+#+begin_subfigure
+#+attr_latex: :scale 1
+[[file:figs/introduction_stages_schroer.png]]
+#+end_subfigure
+#+end_figure
+
+For some applications (especially when using a nano-beam), the position has not only to be measured, but to be controlled.
+
+*Actuators*:
+- Piezoelectric: [[cite:&nazaretski15_pushin_limit;&holler17_omny_pin_versat_sampl_holder;&holler18_omny_tomog_nano_cryo_stage;&villar18_nanop_esrf_id16a_nano_imagin_beaml;&nazaretski22_new_kirkp_baez_based_scann]]
+- 3-phase linear motor: [[cite:&stankevic17_inter_charac_rotat_stages_x_ray_nanot;&engblom18_nanop_resul]]
+- Voice Coil: [[cite:&kelly22_delta_robot_long_travel_nano;&geraldes23_sapot_carnaub_sirius_lnls]]
+Bandwidth: rarely specificity.
+Usually slow, so that only drifts are compensated.
+Only recently, high bandwidth (100Hz) have been reported with the use of voice coil actuators [[cite:&kelly22_delta_robot_long_travel_nano;&geraldes23_sapot_carnaub_sirius_lnls]].
-- [ ] HXN [[cite:&xu23_high_nsls_ii]]
- Laser interferometers on reference ring (on top of rotary stage).
- Used to trigger the detectors (ptychography, microscope)
- Similar to cite:&wang12_autom_marker_full_field_hard
+Full rotation for tomography:
+- Spindle above XYZ stage: [[cite:&stankevic17_inter_charac_rotat_stages_x_ray_nanot;&holler17_omny_pin_versat_sampl_holder;&holler18_omny_tomog_nano_cryo_stage;&villar18_nanop_esrf_id16a_nano_imagin_beaml;&engblom18_nanop_resul;&nazaretski22_new_kirkp_baez_based_scann;&xu23_high_nsls_ii]]
+- Spindle bellow XYZ stage: [[cite:&wang12_autom_marker_full_field_hard;&schroer17_ptynam;&schropp20_ptynam;&geraldes23_sapot_carnaub_sirius_lnls]]
+Only for mapping: [[cite:&nazaretski15_pushin_limit;&kelly22_delta_robot_long_travel_nano]]
-#+name: tab:introduction_sample_stages
-#+caption: Table caption
-#+attr_latex: :environment tabularx :width \linewidth :align lllllllX
-#+attr_latex: :center t :booktabs t
-| Architecture | Sensors and measured DoFs | Actuators and controlled DoFs | Institute, BL | OL/CL (bandwidth) | Stroke, DoF | Samples | Ref |
-|-----------------------------------------------+--------------------------------------+-------------------------------+----------------+---------------------+-----------------------+--------------+----------------------------------------------------------------------------------|
-| XYZ, Spherical retroreflector, Sample | 3 interferometers[fn:1], Y,Z | YZ piezo stages | PETRA III, P06 | OL | 100um | light | [[cite:&schroer17_ptynam;&schropp20_ptynam]] |
-| Spindle / Metrology Ring / XYZ Stage / Sample | 3 Capacitive, Y,Z,Rx | | NSLS, X8C | OL, post processing | | micron scale | cite:&wang12_autom_marker_full_field_hard |
-| *Hexapod* / Spindle / Metrology Ring / Sample | 12 Capacitive[fn:4], X,Y,Z,Rx,Ry | Piezo (Hexapod) | ESRF, ID16a | CL, 10Hz bandwidth | 50um, 500urad | light | [[cite:&villar18_nanop_esrf_id16a_nano_imagin_beaml]] |
-| XYZ, Rz, XY, Cylindrical reference | 5 interferometers[fn:3], X,Y,Z,Rx,Ry | XYZ linear motors | Soleil | CL | | light | [[cite:&engblom18_nanop_resul;&stankevic17_inter_charac_rotat_stages_x_ray_nanot]] |
-| XYZ, Rz, XYZ Spherical reference | 3 Interferometers[fn:2], Y,Z,Rx | XYZ parallel piezo stage | PSI, OMNY | CL | 400um | light | [[cite:&holler18_omny_tomog_nano_cryo_stage;&holler17_omny_pin_versat_sampl_holder]] |
-| XYZ, mirrors/sample | 3 interferometers[fn:3], XYZ | XYZ piezo stage | APS | CL, 3 PID | 3mm | light | [[cite:&nazaretski15_pushin_limit]] |
-| Rz, Parallel XYZ stage | 3 interferometers[fn:1] | 3xVCM parallel stage | LNLS, CARNAUBA | CL, 100Hz bandwidth | YZ: 3mm, Rz: +-110deg | light | [[cite:&geraldes23_sapot_carnaub_sirius_lnls]] |
-| Parallel XYZ stage | 3 interferometers[fn:2], XYZ | 3xVCM parallel stage | Diamond, I14 | CL, 100Hz bandwidth | XYZ: 3mm | up to 350g | [[cite:&kelly22_delta_robot_long_travel_nano]] |
+#+name: fig:introduction_active_stations
+#+caption: Example of two end-stations with real-time position feedback based on an online metrology. (\subref{fig:introduction_stages_villar}) [[cite:&villar18_nanop_esrf_id16a_nano_imagin_beaml]]. (\subref{fig:introduction_stages_nazaretski}) [[cite:&nazaretski17_desig_perfor_x_ray_scann;&nazaretski15_pushin_limit]]
+#+attr_latex: :options [htbp]
+#+begin_figure
+#+attr_latex: :caption \subcaption{\label{fig:introduction_stages_villar} ID16a}
+#+attr_latex: :options {0.49\textwidth}
+#+begin_subfigure
+#+attr_latex: :width 0.95\linewidth
+[[file:figs/introduction_stages_villar.png]]
+#+end_subfigure
+#+attr_latex: :caption \subcaption{\label{fig:introduction_stages_nazaretski} 1 and 2 are stage to position the focusing optics. 3 is the sample location, 4 the sample stage and 5 the interferometers}
+#+attr_latex: :options {0.49\textwidth}
+#+begin_subfigure
+#+attr_latex: :scale 1
+[[file:figs/introduction_stages_nazaretski.png]]
+#+end_subfigure
+#+end_figure
-- [ ] Figure with different stages
-- [ ] Compared to the existing stages (see table), what are the challenges here? Rotation, large stroke, light to heavy payloads, lots of DoF (5 to be controlled)
-- [ ] Comparison with NASS?
-| Architecture | Sensors | Actuators | Institute, BL | OL/CL (bandwidth) | Stroke, DoF | Samples | Ref |
-|-------------------------+--------------------+-----------+---------------+-------------------+------------------+------------+-----|
-| Ty,Ry,Rz,Hexapod,Sample | 6+ Interferometers | | ESRF, ID31 | CL | Ty, Ry, Rz, Hexa | up to 50kg | |
+Payload capabilities:
+- All are only supported calibrated, micron scale samples
+- Higher sample masses to up to 500g have been reported in [[cite:&nazaretski22_new_kirkp_baez_based_scann;&kelly22_delta_robot_long_travel_nano]]
+
+100 times heavier payload capabilities than previous stations with similar performances.
+
+# #+attr_latex: :environment tabularx :width \linewidth :align lllll
+# #+attr_latex: :center t :booktabs t :font \scriptsize
+
+#+name: tab:introduction_active_stations
+#+caption: End-Stations with integrated feedback loops based on online metrology. Stages used for static positioning are ommited for readability. Stages used for feedback are indicated in bold font.
+#+attr_latex: :environment tabularx :width 1.0\linewidth :align cccccc
+#+attr_latex: :center t :booktabs t :font \scriptsize
+| *Architecture* | *Metrology* | *Stroke* | *Bandwidth* | *Institute* | *References* |
+|--------------------------------+-------------------+--------------------------------+-------------+-------------+-------------------------------------------------------------------------------------------------------|
+| Mirror / Sample | 3 Interferometers | | | APS | [[cite:&nazaretski15_pushin_limit]] |
+| *XYZ piezo motors* | $D_xD_yD_z$ | $D_xD_yD_z: 3\,\text{mm}$ | | | Figure ref:fig:introduction_stages_nazaretski |
+|--------------------------------+-------------------+--------------------------------+-------------+-------------+-------------------------------------------------------------------------------------------------------|
+| Metrology Ring / Sample | 12 Capacitive | light | 10 Hz | ESRF | [[cite:&villar18_nanop_esrf_id16a_nano_imagin_beaml]] |
+| Spindle | $D_xD_yD_zR_xR_y$ | $R_z: 180\,\text{deg}$ | | (ID16a) | Figure ref:fig:introduction_stages_villar |
+| *Piezo Hexapod* | | $D_xD_yD_z: 50\,\mu m$ | | | |
+| | | $R_x R_y: 500\,\mu \text{rad}$ | | | |
+|--------------------------------+-------------------+--------------------------------+-------------+-------------+-------------------------------------------------------------------------------------------------------|
+| Spherical Reference / Sample | 5 Interferometers | light | | PSI | [[cite:&holler17_omny_pin_versat_sampl_holder;&holler18_omny_tomog_nano_cryo_stage]] |
+| Spindle | $D_yD_zR_x$ | $R_z: 365\,\text{deg}$ | | (OMNY) | |
+| *Piezo Tripod* | | $D_xD_yD_z: 400\,\mu m$ | | | |
+|--------------------------------+-------------------+--------------------------------+-------------+-------------+-------------------------------------------------------------------------------------------------------|
+| Cylindrical Reference / Sample | 5 Interferometers | light | | Soleil | [[cite:&stankevic17_inter_charac_rotat_stages_x_ray_nanot;&engblom18_nanop_resul]] |
+| Spindle | $D_xD_yD_zR_xR_y$ | $R_z: 360\,\text{deg}$ | | | |
+| *Stacked XYZ linear motors* | | $D_xD_yD_z: 400\,\mu m$ | | | |
+|--------------------------------+-------------------+--------------------------------+-------------+-------------+-------------------------------------------------------------------------------------------------------|
+| Metrology Ring / Sample | 3 Interferometers | up to 500g | | NSLS | [[cite:&nazaretski22_new_kirkp_baez_based_scann]] |
+| Spindle | $D_xD_yD_z$ | $R_z: 360\,\text{deg}$ | | (SRX) | |
+| *XYZ piezo* | | $D_xD_yD_z: 100\,\mu m$ | | | |
+|--------------------------------+-------------------+--------------------------------+-------------+-------------+-------------------------------------------------------------------------------------------------------|
+| Mirrors / Sample | 3 Interferometers | up to 350g | 100 Hz | Diamond | [[cite:&kelly22_delta_robot_long_travel_nano]] |
+| *Parallel XYZ voice coil* | $D_xD_yD_z$ | $D_xD_yD_z: 3\,\text{mm}$ | | (I14) | |
+|--------------------------------+-------------------+--------------------------------+-------------+-------------+-------------------------------------------------------------------------------------------------------|
+| Retroreflectors / Samples | 3 Interferometers | light | 100 Hz | LNLS | [[cite:&geraldes23_sapot_carnaub_sirius_lnls]] |
+| *Parallel XYZ voice coil* | $D_xD_yD_z$ | $D_yD_z: 3\,\text{mm}$ | | (Carnauba) | |
+| Spindle | | $R_z: \pm 110\,\text{deg}$ | | | |
+|--------------------------------+-------------------+--------------------------------+-------------+-------------+-------------------------------------------------------------------------------------------------------|
+| Sample | 6 Interferometers | *up to 50kg* | | ESRF | [[cite:&dehaeze18_sampl_stabil_for_tomog_exper;&dehaeze21_mechat_approac_devel_nano_activ_stabil_system]] |
+| *Hexapod* | $D_xD_yD_zR_xR_y$ | | | (ID31) | Figure ref:fig:introduction_nass_concept_schematic |
+| Spindle | | $R_z : 360\,\text{deg}$ | | | |
+| Ry | | $R_y : \pm 3\,\text{deg}$ | | | |
+| Ty | | $D_y : \pm 5\,\text{mm}$ | | | |
**** Long Stroke - Short Stroke architecture
@@ -899,6 +1713,28 @@ Speak about two stage control?
- Any application in 6DoF? Maybe new!
- In the table, say which ones are long stroke / short stroke. Some new stages are just long stroke (voice coil)
+#+name: fig:introduction_two_stage_schematic
+#+caption: Typical Long Stroke - Short Stroke architecture. The long stroke stage is ...
+[[file:figs/introduction_two_stage_schematic.png]]
+
+#+name: fig:introduction_two_stage_example
+#+caption: (\subref{fig:introduction_two_stage_control_example}) [[cite:&shinno11_newly_devel_long_range_posit]], (\subref{fig:introduction_two_stage_control_h_bridge}) [[cite:&schmidt20_desig_high_perfor_mechat_third_revis_edition]]
+#+attr_latex: :options [htbp]
+#+begin_figure
+#+attr_latex: :caption \subcaption{\label{fig:introduction_two_stage_control_example} Two stage control with classical stage and voice coil}
+#+attr_latex: :options {0.59\textwidth}
+#+begin_subfigure
+#+attr_latex: :width 0.95\linewidth
+[[file:figs/introduction_two_stage_control_example.png]]
+#+end_subfigure
+#+attr_latex: :caption \subcaption{\label{fig:introduction_two_stage_control_h_bridge} H-bridge. $y_1$, $y_2$ and $x$ are 3-phase linear motors. Short stroke actuators are voice coils.}
+#+attr_latex: :options {0.39\textwidth}
+#+begin_subfigure
+#+attr_latex: :width 0.95\linewidth
+[[file:figs/introduction_two_stage_control_h_bridge.png]]
+#+end_subfigure
+#+end_figure
+
** Multi-DoF dynamical positioning stations
**** Serial and Parallel Kinematics
@@ -909,100 +1745,465 @@ Example of several dynamical stations:
Serial vs parallel kinematics (table?)
+#+name: fig:introduction_kinematics
+#+caption: Two positioning platforms with $D_x/D_y/R_z$ degrees of freedom. One is using serial kinematics (\subref{fig:introduction_serial_kinematics}), while the other uses parallel kinematics (\subref{fig:introduction_parallel_kinematics})
+#+attr_latex: :options [htbp]
+#+begin_figure
+#+attr_latex: :caption \subcaption{\label{fig:introduction_serial_kinematics} Serial Kinematics}
+#+attr_latex: :options {0.49\textwidth}
+#+begin_subfigure
+#+attr_latex: :scale 1
+[[file:figs/introduction_serial_kinematics.png]]
+#+end_subfigure
+#+attr_latex: :caption \subcaption{\label{fig:introduction_parallel_kinematics} Parallel Kinematics}
+#+attr_latex: :options {0.49\textwidth}
+#+begin_subfigure
+#+attr_latex: :scale 1
+[[file:figs/introduction_parallel_kinematics.png]]
+#+end_subfigure
+#+end_figure
+
**** Stewart platforms
- [ ] Explain the normal stewart platform architecture
- [ ] Make a table that compares the different stewart platforms for vibration control.
Geometry (cubic), Actuator (soft, stiff), Sensor, Flexible joints, etc.
-#+name: fig:introduction_stewart_platform_examples
-#+caption: Examples of Stewart Platforms
+#+name: fig:introduction_stewart_platform
+#+caption: The Stewart Platform. Architecutre is shown in (\subref{fig:introduction_stewart_architecture}). Change of pose induce by change of strut length is shown in (\subref{fig:introduction_stewart_pose})
+#+attr_latex: :options [htbp]
#+begin_figure
-#+name: fig:introduction_stewart_platform_a
-#+attr_latex: :caption \subcaption{Stewart platform based on voice coil actuators}
+#+attr_latex: :caption \subcaption{\label{fig:introduction_stewart_architecture} Stewart Platform Architecture}
#+attr_latex: :options {0.49\textwidth}
#+begin_subfigure
-#+attr_latex: :width 0.8\linewidth
-[[file:example-image-a.png]]
+#+attr_latex: :scale 0.8
+[[file:figs/introduction_stewart_architecture.png]]
#+end_subfigure
-#+name: fig:introduction_stewart_platform_a
+#+attr_latex: :caption \subcaption{\label{fig:introduction_stewart_pose} Change of mobile platform pose}
#+attr_latex: :options {0.49\textwidth}
-#+attr_latex: :caption \subcaption{Stewart platform based on piezoelectric actuators}
#+begin_subfigure
-#+attr_latex: :width 0.8\linewidth
-[[file:example-image-b.png]]
+#+attr_latex: :scale 0.8
+[[file:figs/introduction_stewart_pose.png]]
+#+end_subfigure
+#+end_figure
+
+#+name: fig:introduction_stewart_platform_piezo
+#+caption: Example of Stewart platforms. (\subref{fig:introduction_stewart_du14}) [[cite:&du14_piezo_actuat_high_precis_flexib]] and (\subref{fig:introduction_stewart_hauge04}) [[cite:&hauge04_sensor_contr_space_based_six]]
+#+attr_latex: :options [htbp]
+#+begin_figure
+#+attr_latex: :caption \subcaption{\label{fig:introduction_stewart_du14}PZT based, for positioning purposes}
+#+attr_latex: :options {0.49\textwidth}
+#+begin_subfigure
+#+attr_latex: :width 0.95\linewidth
+[[file:figs/introduction_stewart_du14.png]]
+#+end_subfigure
+#+attr_latex: :caption \subcaption{\label{fig:introduction_stewart_hauge04}Voice coil based, Cubic architecture, for vibration isolation}
+#+attr_latex: :options {0.49\textwidth}
+#+begin_subfigure
+#+attr_latex: :width 0.95\linewidth
+[[file:figs/introduction_stewart_hauge04.png]]
#+end_subfigure
#+end_figure
** Mechatronics approach
**** Predicting performances using models
-- [[cite:&monkhorst04_dynam_error_budget]]
- #+begin_quote
- high costs of the design process: the designed system must be *first time right*.
- When the system is finally build, its performance level should satisfy the specifications.
- No significant changes are allowed in the post design phase.
- Because of this, the designer wants to be able to predict the performance of the system a-priori and gain insight in the performance limiting factors of the system.
- #+end_quote
+[[cite:&monkhorst04_dynam_error_budget]]
+# high costs of the design process: the designed system must be *first time right*.
+# When the system is finally build, its performance level should satisfy the specifications.
+# No significant changes are allowed in the post design phase.
+# Because of this, the designer wants to be able to predict the performance of the system a-priori and gain insight in the performance limiting factors of the system.
Can use several models:
-- Lumped mass-spring-damper models
+- Lumped mass-spring-damper models ::
+ usually uniaxial, easily put into equations, 1dof per considered mass
cite:rankers98_machin
-- Multi-Body Models
-- Finite element models
- Sub structuring?
+- Multi-Body Models ::
+ usually 6dof per considered solid body, some may be constrained using joints
+- Finite element models ::
+ Can include FEM into multi-body models: Sub structuring ([[cite:&brumund21_multib_simul_reduc_order_flexib_bodies_fea]])
+
+#+begin_src latex :file introduction_model_lumped.pdf :results file raw silent
+\begin{tikzpicture}
+ % ====================
+ % Parameters
+ % ====================
+ \def\massw{2.2} % Width of the masses
+ \def\massh{0.8} % Height of the masses
+ \def\spaceh{1.2} % Height of the springs/dampers
+ \def\dispw{0.4} % Width of the dashed line for the displacement
+ \def\disph{0.4} % Height of the arrow for the displacements
+ \def\bracs{0.05} % Brace spacing vertically
+ \def\brach{-12pt} % Brace shift horizontaly
+ \def\fsensh{0.2} % Height of the force sensor
+ \def\velsize{0.2} % Size of the velocity sensor
+ % ====================
+
+
+ % ====================
+ % Floor
+ % ====================
+ \draw (-0.5*\massw, 0) -- (0.5*\massw, 0);
+ % \draw[dashed] (0.5*\massw, 0) -- ++(\dispw, 0);
+ % \draw[->, draw=colorred] (0.5*\massw+0.5*\dispw, 0) -- ++(0, \disph) node[right, color=colorred]{$x_{f}$};
+ % ====================
+
+ % ====================
+ % Granite
+ \begin{scope}[shift={(0, 0)}]
+ % Mass
+ \draw[fill=white] (-0.5*\massw, \spaceh) rectangle (0.5*\massw, \spaceh+\massh) node[pos=0.5]{$m_{1}$};
+
+ % Spring, Damper, and Actuator
+ \draw[spring] (-0.3*\massw, 0) -- (-0.3*\massw, \spaceh) node[midway, left=0.1]{$k_{1}$};
+ \draw[damper] ( 0.3*\massw, 0) -- ( 0.3*\massw, \spaceh) node[midway, left=0.2]{$c_{1}$};
+
+ % Displacement
+ \draw[dashed] (0.5*\massw, \spaceh+\massh) -- ++(\dispw, 0);
+ \draw[->] (0.5*\massw+0.5*\dispw, \spaceh+\massh) -- ++(0, \disph) node[right]{$x_{1}$};
+ \end{scope}
+ % ====================
+
+
+ % ====================
+ % Stages
+ \begin{scope}[shift={(0, \spaceh+\massh)}]
+ % Mass
+ \draw[fill=white] (-0.5*\massw, \spaceh) rectangle (0.5*\massw, \spaceh+\massh) node[pos=0.5]{$m_{2}$};
+
+ % Spring, Damper, and Actuator
+ \draw[spring] (-0.4*\massw, 0) -- (-0.4*\massw, \spaceh) node[midway, left=0.1]{$k_{1}$};
+ \draw[damper] (0, 0) -- ( 0, \spaceh) node[midway, left=0.2]{$c_{2}$};
+ \draw[actuator={0.45}{0.2}{black}] ( 0.4*\massw, 0) -- (0.4*\massw, \spaceh) node[midway, left=0.1]{$F$};
+
+ % Displacement
+ \draw[dashed] (0.5*\massw, \spaceh+\massh) -- ++(\dispw, 0);
+ \draw[->] (0.5*\massw+0.5*\dispw, \spaceh+\massh) -- ++(0, \disph) node[right]{$x_{2}$};
+ \end{scope}
+ % ====================
+\end{tikzpicture}
+#+end_src
+
+#+name: fig:introduction_models
+#+caption: Types of models used when using a mechatronics approach. (\subref{fig:introduction_model_lumped}) (\subref{fig:introduction_model_multibody}) (\subref{fig:introduction_model_fem})
+#+attr_latex: :options [htbp]
+#+begin_figure
+#+attr_latex: :caption \subcaption{\label{fig:introduction_model_lumped} Mass-Spring-Damper model}
+#+attr_latex: :options {0.3\textwidth}
+#+begin_subfigure
+#+attr_latex: :scale 1
+[[file:figs/introduction_model_lumped.png]]
+#+end_subfigure
+#+attr_latex: :caption \subcaption{\label{fig:introduction_model_multibody} Multi-Body model}
+#+attr_latex: :options {0.39\textwidth}
+#+begin_subfigure
+#+attr_latex: :width 0.9\linewidth
+[[file:figs/introduction_model_multibody.png]]
+#+end_subfigure
+#+attr_latex: :caption \subcaption{\label{fig:introduction_model_fem} Finite Element Model}
+#+attr_latex: :options {0.3\textwidth}
+#+begin_subfigure
+#+attr_latex: :width 0.9\linewidth
+[[file:figs/introduction_model_fem.jpg]]
+#+end_subfigure
+#+end_figure
**** Closed-Loop Simulations
[[cite:&schmidt20_desig_high_perfor_mechat_third_revis_edition]]
+Once a model of the system is obtained: develop controller based on linearized model.
+
+#+begin_src latex :file introduction_closed_loop.pdf
+\begin{tikzpicture}
+ \node[block] (controller) {Controller};
+ \node[block, right = 1 of controller] (driver) {Driver};
+ \node[block, right = 1 of driver] (actuator) {Actuator};
+ \node[block, right = 1 of actuator, align=center] (system) {Mechanical\\System};
+ \node[block, right = 1 of system] (sensor) {Sensor};
+
+ % Connections and labels
+ \draw[->] (controller.east) node[above right]{$u$} -- (driver.west);
+ \draw[->] (driver.east) -- (actuator.west);
+ \draw[->] (actuator.east) -- (system.west);
+ \draw[->] (system.east) --node[midway, above]{$y$} (sensor.west);
+ \draw[->] (sensor.east) -- ++(1.2, 0);
+ \draw[->] ($(sensor.east)+(0.6,0)$)node[branch]{}node[above]{$y_m$} -- ++(0, -2.0) -| (controller.south);
+
+ \draw[<-] (controller.west) -- ++(-1.0, 0) node[above right]{$r$};
+ \draw[<-] (driver.north) -- ++(0, 1.2) node[below right, align=left]{$d_u$};
+ \draw[<-] (system.north) -- ++(0, 1.2) node[below right, align=left]{$d_y$};
+ \draw[<-] (sensor.north) -- ++(0, 1.2) node[below right, align=left](sensornoise){$n$};
+
+ % Plant
+ \begin{scope}[on background layer]
+ \node[fit={(driver.south west) (sensornoise.north -| sensor.east)}, fill=black!20!white, draw, dashed, inner sep=8pt] (plant) {};
+ \node[below] at (plant.north) {\textbf{Plant}};
+ \end{scope}
+
+ \draw[->, dashed] ($(plant.south) + (0, -0.3)$) arc (90:-90:0.3) -- ++(-2.5, 0) arc (-90:-270:0.3);
+ \node[left] at ($(plant.south) + (0, -0.6)$) {Feedback Loop}
+\end{tikzpicture}
+#+end_src
+
+#+RESULTS:
+#+name: fig:introduction_closed_loop
+#+caption: Block diagram of a typical feedback control architecture
+[[file:figs/introduction_closed_loop.png]]
+
Say what can limit the performances for a complex mechatronics systems as this one:
-- disturbances
-- measurement noise
-- DAC / amplifier noise (actuator)
-- feedback system / bandwidth
+- Disturbances affecting the plant output $d_y$
+- Measurement noise $n$
+- DAC / amplifier noise (actuator) $d_u$
+- Feedback system / bandwidth
+- $r$, $y_m$
Simulations can help evaluate the behavior of the system.
**** Dynamic Error Budgeting
-- [[cite:&monkhorst04_dynam_error_budget]]
- #+begin_quote
- high costs of the design process: the designed system must be *first time right*.
- When the system is finally build, its performance level should satisfy the specifications.
- No significant changes are allowed in the post design phase.
- Because of this, the designer wants to be able to predict the performance of the system a-priori and gain insight in the performance limiting factors of the system.
- #+end_quote
-- cite:jabben07_mechat
-- [[cite:&okyay16_mechat_desig_dynam_contr_metrol]]
- #+begin_quote
-Error budgets [23] are frequently used in the design of precision machines, in order to assess the
-contributions of different factors such as parasitic motions, thermal expansion, and servo accuracy, on
-the positioning accuracy of a machine. Dynamic Error Budgeting (DEB) or ‘Spectral Analysis’
-extends this concept to the realm of feedback control. Recognizing that the controller can provide
-only a finite attenuation of disturbance signals interfering with the servo, DEB provides a
-methodology for predicting the cumulative effect of such signals on the control error as a function of
-their spectral (frequency) content. The method can be used to predict the control accuracy of a system
-implemented using a set of certain devices under certain conditions before it is realized. Furthermore,
-as it is formulated in the frequency domain, it can be used to optimize the controller design as well,
-typically leading to an H2 - optimal control framework. In DEB, the disturbance signals are modeled
-with their power spectral density (PSD), assuming that they are stationary stochastic processes which
-are not correlated with each other. Then, these PSD’s are transmitted to the performance goal, most
-often the positioning error, using linear time invariant (LTI) system theory. The transmitted PSD’s are
-summed up into the variance of the performance goal, which constitutes a comparative measure of
-performance. Most importantly, the influence of different dynamic factors and disturbance sources,
-which have the greatest impact on the achievable performance (e.g., accuracy) can be easily spotted
-and improved, through this kind of analysis. An approach similar to DEB was followed to decompose
-the contribution of different noise sources on the hard disk position error in [1], [2], [45]. DEB has
-been used to assess the performance of a geophone and a vibration isolation system in [75]. Jabben
-[49] has used DEB in the mechatronic design of a magnetically suspended rotating platform. Aguirre
-et al. [3] have analyzed the performance of active aerostatic thrust bearings using DEB.
- #+end_quote
+[[cite:&monkhorst04_dynam_error_budget]]
+# high costs of the design process: the designed system must be *first time right*.
+# When the system is finally build, its performance level should satisfy the specifications.
+# No significant changes are allowed in the post design phase.
+# Because of this, the designer wants to be able to predict the performance of the system a-priori and gain insight in the performance limiting factors of the system.
-** TODO Control architecture
+cite:jabben07_mechat
-Maybe make a simple review of control strategies for Stewart platform control.
+[[cite:&okyay16_mechat_desig_dynam_contr_metrol]]
+# *Classical error budgets*:
+# Error budgets [23] are frequently used in the design of precision machines, in order to assess the contributions of different factors such as parasitic motions, thermal expansion, and servo accuracy, on the positioning accuracy of a machine.
+# *Dynamic Error Budgeting*:
+# Dynamic Error Budgeting (DEB) or ‘Spectral Analysis’ extends this concept to the realm of feedback control.
+# Recognizing that the controller can provide only a finite attenuation of disturbance signals interfering with the servo, DEB provides a methodology for predicting the cumulative effect of such signals on the control error as a function of
+# their spectral (frequency) content.
+# The method can be used to predict the control accuracy of a system implemented using a set of certain devices under certain conditions before it is realized.
+# Furthermore, as it is formulated in the frequency domain, it can be used to optimize the controller design as well, typically leading to an H2 - optimal control framework.
+# In DEB, the disturbance signals are modeled with their power spectral density (PSD), assuming that they are stationary stochastic processes which are not correlated with each other.
+# Then, these PSD’s are transmitted to the performance goal, most often the positioning error, using linear time invariant (LTI) system theory.
+# The transmitted PSD’s are summed up into the variance of the performance goal, which constitutes a comparative measure of performance.
+# Most importantly, the influence of different dynamic factors and disturbance sources, which have the greatest impact on the achievable performance (e.g., accuracy) can be easily spotted and improved, through this kind of analysis.
+# *Applications*:
+# An approach similar to DEB was followed to decompose the contribution of different noise sources on the hard disk position error in [1], [2], [45].
+# DEB has been used to assess the performance of a geophone and a vibration isolation system in [75].
+# Jabben[49] has used DEB in the mechatronic design of a magnetically suspended rotating platform.
+# Aguirre et al. [3] have analyzed the performance of active aerostatic thrust bearings using DEB.
+
+- "the disturbance signals are modeled with their power spectral density (PSD), assuming that they are stationary stochastic processes which are not correlated with each other"
+- Effects of $d_u$, $d_y$ and $n$ on $y$ can be estimated from their PSD and the closed-loop transfer functions
+ This gives a first idea of the limiting factor as a function of frequency.
+ In order to determine whether each disturbance/noise impact the performances, cumulative power spectrum can be used: this gives the RMS value
+ Then, this help to know the different actions to improve the performances: reduce sensor noise or driver electrical noise, work on reducing disturbances like damping resonances, increase feedback bandwidth, ...)
+
+#+name: fig:introduction_deb
+#+caption: Tools used for the dynamic error budgeting. First the Power Spectral Density can be compared (\subref{fig:introduction_psd}). The cumulative power spectrum is shown in (\subref{fig:introduction_cps}). To compare the effectivness of different strategies, the cumulative power spectrum can be compared (\subref{fig:introduction_cps_cl})
+#+attr_latex: :options [htbp]
+#+begin_figure
+#+attr_latex: :caption \subcaption{\label{fig:introduction_psd} Power Spectral Density - Open Loop}
+#+attr_latex: :options {0.33\textwidth}
+#+begin_subfigure
+#+attr_latex: :width 0.9\linewidth
+[[file:figs/introduction_psd.png]]
+#+end_subfigure
+#+attr_latex: :caption \subcaption{\label{fig:introduction_cps} Cumulative Power Spectrum - Open Loop}
+#+attr_latex: :options {0.33\textwidth}
+#+begin_subfigure
+#+attr_latex: :width 0.9\linewidth
+[[file:figs/introduction_cps.png]]
+#+end_subfigure
+#+attr_latex: :caption \subcaption{\label{fig:introduction_cps_cl} Cumulative Power Spectrum - Comparison}
+#+attr_latex: :options {0.33\textwidth}
+#+begin_subfigure
+#+attr_latex: :width 0.9\linewidth
+[[file:figs/introduction_cps_cl.png]]
+#+end_subfigure
+#+end_figure
+
+** Stewart platforms: Control architecture
+**** Introduction :ignore:
+
+Different control goals:
+- Vibration Isolation ref:fig:introduction_stewart_isolation
+- Position ref:fig:introduction_stewart_positioning
+
+Depending on the goal, different sensors and different architectures.
+
+For the NASS, both objectives.
+
+#+name: fig:introduction_stewart_control_goal
+#+caption: Example of two control goals. In (\subref{fig:introduction_stewart_isolation}), the Stewart platform is used to isolate the payload from a vibration environment. In (\subref{fig:introduction_stewart_positioning}), the Stewart platform is used to position the payload along a defined trajectory.
+#+attr_latex: :options [htbp]
+#+begin_figure
+#+attr_latex: :caption \subcaption{\label{fig:introduction_stewart_isolation} Vibration Isolation}
+#+attr_latex: :options {0.49\textwidth}
+#+begin_subfigure
+#+attr_latex: :scale 1
+[[file:figs/introduction_stewart_isolation.png]]
+#+end_subfigure
+#+attr_latex: :caption \subcaption{\label{fig:introduction_stewart_positioning} Positioning}
+#+attr_latex: :options {0.49\textwidth}
+#+begin_subfigure
+#+attr_latex: :scale 1
+[[file:figs/introduction_stewart_positioning.png]]
+#+end_subfigure
+#+end_figure
+
+
+**** Active Damping and Vibration Control
+
+Two main active vibration isolation strategies [[cite:&collette11_review_activ_vibrat_isolat_strat]]:
+- IFF using collocated force sensors / load cell [[cite:&chesne16_enhan_dampin_flexib_struc_using_force_feedb]]
+- Skyhook damping using inertial sensors (accelerometers, geophones), usually in the frame of the struts
+
+Usually, "decentralized", in the frame of the struts (Figure ref:fig:introduction_control_decentralized).
+Optimization based on one "strut", and then applied to all the struts simultaneously to obtained a 6-DoF active damping / vibration control system.
+
+If narrow band disturbances: Adaptive feedforward control.
+
+
+#+name: fig:introduction_damping
+#+caption: Uniaxial vibration isolation strategies. Integral force feedback (\subref{fig:introduction_damping_iff}) and "sky-hook" damping (\subref{fig:introduction_damping_skyhook}).
+#+attr_latex: :options [htbp]
+#+begin_figure
+#+attr_latex: :caption \subcaption{\label{fig:introduction_damping_iff} Integral Force Feedback}
+#+attr_latex: :options {0.49\textwidth}
+#+begin_subfigure
+#+attr_latex: :scale 1
+[[file:figs/introduction_damping_iff.png]]
+#+end_subfigure
+#+attr_latex: :caption \subcaption{\label{fig:introduction_damping_skyhook} "Sky-hook" Damping}
+#+attr_latex: :options {0.49\textwidth}
+#+begin_subfigure
+#+attr_latex: :scale 1
+[[file:figs/introduction_damping_skyhook.png]]
+#+end_subfigure
+#+end_figure
+
+
+#+name: fig:introduction_control_decentralized
+#+caption: Decentralized control. Example of decentralized force feedback (\subref{fig:introduction_control_decentralized_schematic}), only three struts are shown for simplicity. Equivalent block diagram (\subref{fig:introduction_control_decentralized_diagram}), the controller is then diagonal.
+#+attr_latex: :options [htbp]
+#+begin_figure
+#+attr_latex: :caption \subcaption{\label{fig:introduction_control_decentralized_schematic} Decentralized Control applied on Stewart platform}
+#+attr_latex: :options {0.54\textwidth}
+#+begin_subfigure
+#+attr_latex: :width 0.95\linewidth
+[[file:figs/introduction_control_decentralized_schematic.png]]
+#+end_subfigure
+#+attr_latex: :caption \subcaption{\label{fig:introduction_control_decentralized_diagram} Equivalent block diagram}
+#+attr_latex: :options {0.45\textwidth}
+#+begin_subfigure
+#+attr_latex: :width 0.95\linewidth
+[[file:figs/introduction_control_decentralized_diagram.png]]
+#+end_subfigure
+#+end_figure
+
+**** Position and Pointing Control
+
+Control based on position sensors.
+Wanted position is generally expressed in the cartesian frame.
+
+Sensors can be:
+- In the frame of the struts (LVDT, Encoder, Strain gauges): usually decentralized control (Figure ref:fig:introduction_control_decentralized_diagram)
+- External sensors: centralized
+
+When using external sensors, a decoupling strategy is usually employed (Figure ref:fig:introduction_control_decoupling):
+- Jacobian matrices: frame of the struts or cartesian frame
+- Modal control
+- Singular Value Decomposition
+- Multivariable control: LQG, H-Infinity (Figure ref:fig:introduction_control_mimo)
+
+From [[cite:&thayer02_six_axis_vibrat_isolat_system]]:
+#+begin_quote
+Experimental closed-loop control results using the hexapod have shown that controllers designed using a decentralized single-strut design work well when compared to full multivariable methodologies.
+#+end_quote
+
+
+#+name: fig:introduction_control_mimo_vs_decoupling
+#+caption: Two strategies to control a multi-inputs-multi-outputs system. Use of a multivariable controller (\subref{fig:introduction_control_mimo}), or first decouple the plant with matrices, and then designing several single-input-single-output controllers (\subref{fig:introduction_control_decoupling})
+#+attr_latex: :options [htbp]
+#+begin_figure
+#+attr_latex: :caption \subcaption{\label{fig:introduction_control_mimo} Multivariable Control}
+#+attr_latex: :options {0.33\textwidth}
+#+begin_subfigure
+#+attr_latex: :scale 1
+[[file:figs/introduction_control_mimo.png]]
+#+end_subfigure
+#+attr_latex: :caption \subcaption{\label{fig:introduction_control_decoupling} Decoupling Control}
+#+attr_latex: :options {0.66\textwidth}
+#+begin_subfigure
+#+attr_latex: :scale 1
+[[file:figs/introduction_control_decoupling.png]]
+#+end_subfigure
+#+end_figure
+
+- Explain the Jacobian matrix
+
+When decoupling using the Jacobian matrix, the control can be performed in the frame of the struts (Figure ref:fig:introduction_control_centralized_struts) or in the cartesian frame (Figure ref:fig:introduction_control_centralized_cartesian).
+
+#+name: fig:introduction_control_centralized
+#+caption: Two centralized control strategies. Express the position error in the frame of the struts and design one controller for each strut (\subref{fig:introduction_control_centralized_struts}). Design one controller for each direction, and then map the forces and torques to each struts (\subref{fig:introduction_control_centralized_cartesian}).
+#+attr_latex: :options [htbp]
+#+begin_figure
+#+attr_latex: :caption \subcaption{\label{fig:introduction_control_centralized_struts} Control in the frame of the struts}
+#+attr_latex: :options {0.95\textwidth}
+#+begin_subfigure
+#+attr_latex: :scale 1
+[[file:figs/introduction_control_centralized_struts.png]]
+#+end_subfigure
+
+\bigskip
+#+attr_latex: :caption \subcaption{\label{fig:introduction_control_centralized_cartesian} Control in the cartesian frame}
+#+attr_latex: :options {0.95\textwidth}
+#+begin_subfigure
+#+attr_latex: :scale 1
+[[file:figs/introduction_control_centralized_cartesian.png]]
+#+end_subfigure
+#+end_figure
+
+**** Use of Multiple Sensors
+
+Often, both vibration control and position control is wanted.
+In that case, the use of multiple sensors can lead to improved performances.
+
+Sensors:
+- collocated force (load cell) sensors
+- collocated accelerometer
+- displacement (eddy current)
+
+Several strategies can be employed:
+- HAC-LAC cite:geng95_intel_contr_system_multip_degree,wang16_inves_activ_vibrat_isolat_stewar,li01_simul_vibrat_isolat_point_contr,pu11_six_degree_of_freed_activ,xie17_model_contr_hybrid_passiv_activ
+- Sensor Fusion cite:tjepkema12_activ_ph,tjepkema12_sensor_fusion_activ_vibrat_isolat_precis_equip,hauge04_sensor_contr_space_based_six
+- Two Sensor control: cite:hauge04_sensor_contr_space_based_six,tjepkema12_activ_ph
+
+Comparison between "two sensor control" and "sensor fusion" is given in [[cite:&beijen14_two_sensor_contr_activ_vibrat]].
+
+#+name: fig:introduction_control_multiple_sensors
+#+caption: Different control strategies when using multiple sensors. High Authority Control / Low Authority Control (\subref{fig:introduction_architecture_hac_lac}). Sensor Fusion (\subref{fig:introduction_architecture_sensor_fusion}). Two-Sensor Control (\subref{fig:introduction_architecture_two_sensor_control})
+#+attr_latex: :options [htbp]
+#+begin_figure
+#+attr_latex: :caption \subcaption{\label{fig:introduction_architecture_hac_lac} HAC-LAC}
+#+attr_latex: :options {0.48\textwidth}
+#+begin_subfigure
+#+attr_latex: :scale 1
+[[file:figs/introduction_architecture_hac_lac.png]]
+#+end_subfigure
+#+attr_latex: :caption \subcaption{\label{fig:introduction_architecture_two_sensor_control} Two Sensor Control}
+#+attr_latex: :options {0.48\textwidth}
+#+begin_subfigure
+#+attr_latex: :scale 1
+[[file:figs/introduction_architecture_two_sensor_control.png]]
+#+end_subfigure
+
+\bigskip
+#+attr_latex: :caption \subcaption{\label{fig:introduction_architecture_sensor_fusion} Sensor Fusion}
+#+attr_latex: :options {0.95\textwidth}
+#+begin_subfigure
+#+attr_latex: :scale 1
+[[file:figs/introduction_architecture_sensor_fusion.png]]
+#+end_subfigure
+#+end_figure
* Original Contributions
**** Introduction :ignore:
diff --git a/nass-introduction.pdf b/nass-introduction.pdf
index ce1f0c7..0baaba0 100644
Binary files a/nass-introduction.pdf and b/nass-introduction.pdf differ
diff --git a/nass-introduction.tex b/nass-introduction.tex
index 71e2862..443163f 100644
--- a/nass-introduction.tex
+++ b/nass-introduction.tex
@@ -1,4 +1,4 @@
-% Created 2024-05-06 Mon 14:50
+% Created 2024-05-30 Thu 15:40
% Intended LaTeX compiler: pdflatex
\documentclass[a4paper, 10pt, DIV=12, parskip=full, bibliography=totoc]{scrreprt}
@@ -30,7 +30,16 @@
\begin{itemize}
\item Explain what is a Synchrotron: light source
-\item Say how many there are in the world (\textasciitilde{}50)
+\item Say how many there are in the world (\textasciitilde{}50). The main ones are shown in Figure \ref{fig:introduction_synchrotrons}.
+\end{itemize}
+
+\begin{figure}[htbp]
+\centering
+\includegraphics[scale=1,width=\linewidth]{figs/introduction_synchrotrons.png}
+\caption{\label{fig:introduction_synchrotrons}Major synchrotron radiation facilities in the world. 3rd generation Synchrotrons are shown in blue. Planned upgrades to 4th generation are shown in green, and 4th generation Synchrotrons in operation are shown in red.}
+\end{figure}
+
+\begin{itemize}
\item Electron part: LINAC, Booster, Storage Ring \ref{fig:introduction_esrf_schematic}
\item Synchrotron radiation: Insertion device / Bending magnet
\item Many beamlines (large diversity in terms of instrumentation and science)
@@ -43,50 +52,74 @@
\paragraph{The European Synchrotron Radiation Facility}
\begin{figure}[htbp]
-\centering
-\includegraphics[scale=1,width=0.7\linewidth]{figs/introduction_esrf_picture.jpg}
-\caption{\label{fig:introduction_esrf_picture}European Synchrotron Radiation Facility}
-\end{figure}
-
-\begin{figure}[htbp]
-\centering
-\includesvg[scale=1,width=0.7\linewidth]{figs/introduction_esrf_schematic}
-\caption{\label{fig:introduction_esrf_schematic}Schematic of the ESRF - Over 40 beamlines. Booster, Linac, storage ring}
+\begin{subfigure}{0.49\textwidth}
+\begin{center}
+\includegraphics[scale=1,width=0.95\linewidth]{figs/introduction_esrf_schematic.png}
+\end{center}
+\subcaption{\label{fig:introduction_esrf_schematic} Schematic of the ESRF. The linear accelerator is shown in blue, the booster synchrotron in purple and the storage ring in green. There are over 40 beamlines, the ID31 beamline is highlighted in red}
+\end{subfigure}
+\begin{subfigure}{0.49\textwidth}
+\begin{center}
+\includegraphics[scale=1,width=0.95\linewidth]{figs/introduction_esrf_picture.jpg}
+\end{center}
+\subcaption{\label{fig:introduction_esrf_picture} European Synchrotron Radiation Facility}
+\end{subfigure}
+\caption{\label{fig:instroduction_esrf}Schematic (\subref{fig:introduction_esrf_schematic}) and picture (\subref{fig:introduction_esrf_picture}) of the European Synchrotron Radiation Facility}
\end{figure}
\paragraph{3rd and 4th generation Synchrotrons}
+Brilliance: figure of merit for synchrotron
+
\begin{itemize}
-\item 4th generation light sources
-\begin{itemize}
-\item \cite{raimondi21_commis_hybrid_multib_achrom_lattic}
-\item[{$\square$}] Picture of 3rd generation ``beam source'' vs 4th generation?
-\end{itemize}
-\item[{$\square$}] Picture showing Synchrotron ``moore's law''
+\item 4th generation light sources \cite{raimondi21_commis_hybrid_multib_achrom_lattic}
\end{itemize}
+\begin{figure}[htbp]
+\centering
+\includegraphics[scale=1]{figs/introduction_moore_law_brillance.png}
+\caption{\label{fig:introduction_moore_law_brillance}Evolution of the peak brilliance (expressed in \(\text{photons}/s/mm^2/mrad^2/0.1\%BW\)) of synchrotron radiation facilities. Note the vertical logarithmic scale.}
+\end{figure}
+
\section{The ID31 ESRF Beamline}
\paragraph{Beamline Layout}
\begin{itemize}
-\item[{$\square$}] Beamline layout (OH, EH)
-\item ID31 and Micro Station (Figure \ref{fig:introduction_id31_microstation_picture})
+\item General layout: source (insertion device), optical hutches (OH1, OH2), experimental hutch (EH)
+\item Beamline layout (OH Figure \ref{fig:introduction_id31_oh}, EH \ref{fig:introduction_id31_cad})
+All these optical instruments are used to ``shape'' the x-ray beam as wanted (monochromatic, wanted size, focused, etc\ldots{})
+\item ID31 and Micro Station (Figure \ref{fig:introduction_id31_cad})
Check \url{https://www.esrf.fr/UsersAndScience/Experiments/StructMaterials/ID31}
\url{https://www.wayforlight.eu/beamline/23244}
-\item X-ray beam + detectors + sample stage (Figure \ref{fig:introduction_id31_beamline_schematic})
+\item X-ray beam + detectors + sample stage
\item Focusing optics
\item Optical schematic with: source, lens, sample and detector.
Explain that what is the most important is the relative position between the sample and the lens.
\item Explain the XYZ frame for all the thesis (ESRF convention: X: x-ray, Z gravity up)
-\begin{itemize}
-\item[{$\square$}] Add XYZ on figure \ref{fig:introduction_id31_cad}
-\end{itemize}
\end{itemize}
+\begin{figure}[htbp]
+\begin{subfigure}{\textwidth}
+\begin{center}
+\includegraphics[scale=1,scale=0.9]{figs/introduction_id31_oh1.png}
+\end{center}
+\subcaption{\label{fig:introduction_id31_oh1}OH1}
+\end{subfigure}
+
+\bigskip
+\begin{subfigure}{\textwidth}
+\begin{center}
+\includegraphics[scale=1,scale=0.9]{figs/introduction_id31_oh2.png}
+\end{center}
+\subcaption{\label{fig:introduction_id31_oh2}OH2}
+\end{subfigure}
+\caption{\label{fig:introduction_id31_oh}Schematic of the two ID31 optical hutches: OH1 (\subref{fig:introduction_id31_oh1}) and OH2 (\subref{fig:introduction_id31_oh2}). Distance from the source (the insertion device) is indicated in meters.}
+\end{figure}
+
\begin{figure}[htbp]
\centering
-\includegraphics[scale=1,width=0.8\linewidth]{figs/introduction_id31_cad.jpg}
-\caption{\label{fig:introduction_id31_cad}CAD view of the optical hutch with the nano-focusing optics, the micro-station}
+\includegraphics[scale=1,width=0.8\linewidth]{figs/introduction_id31_station_detector.png}
+\caption{\label{fig:introduction_id31_cad}CAD view of the ID31 Experimal Hutch (EH). There are typically four main elements: the focusing optics in yellow, the sample stage in green, the sample itself in purple and the detector in blue. All these elements are fixed to the same granite.}
\end{figure}
\paragraph{Positioning End Station: The Micro-Station}
@@ -98,17 +131,25 @@ Micro-Station:
Make a table to explain the different ``experiments''
\item Explain how it is used (positioning, scans), what it does. But not about the performances
\item Different sample environments
-
-\item Alternative: \texttt{id31\_microstation\_cad\_view.png} (CAD view)
\end{itemize}
\begin{figure}[htbp]
-\centering
-\includegraphics[scale=1,width=0.49\linewidth]{figs/introduction_id31_microstation_picture.png}
-\caption{\label{fig:introduction_id31_microstation_picture}Picture of the ID31 Micro-Station with annotations}
+\begin{subfigure}{0.49\textwidth}
+\begin{center}
+\includegraphics[scale=1,width=0.95\linewidth]{figs/introduction_micro_station_dof.png}
+\end{center}
+\subcaption{\label{fig:introduction_micro_station_dof} CAD view}
+\end{subfigure}
+\begin{subfigure}{0.49\textwidth}
+\begin{center}
+\includegraphics[scale=1,width=0.95\linewidth]{figs/introduction_micro_station_picture.png}
+\end{center}
+\subcaption{\label{fig:introduction_micro_station_picture} Picture}
+\end{subfigure}
+\caption{\label{fig:introduction_micro_station}The micro-station. CAD view is shown in (\subref{fig:introduction_micro_station_dof}) with the associated degrees of freedom. A picture of the micro-station is shown in (\subref{fig:introduction_micro_station_picture}) during the assembly process.}
\end{figure}
-\paragraph{Science performed on ID31}
+\paragraph{Scientific experiments performed on ID31}
\begin{itemize}
\item Few words about science made on ID31 and why nano-meter accuracy is required
@@ -119,32 +160,86 @@ Make a table to explain the different ``experiments''
\item Tomography
\item Diffraction tomography: most critical
\end{itemize}
-\item Example of picture obtained (Figure \ref{fig:introduction_id31_tomography_result}) with resolution
+\item Two example:
+\begin{itemize}
+\item Tomography: compute image as a function of the angle. To reconstruct 3D image, the position has to be known with good accuracy
+\cite{schoeppler17_shapin_highl_regul_glass_archit}
+\item Mapping: focused beam on the sample, 20nm step size, accuracy of the obtained image is directly linked to the beam size and the position accuracy/vibrations
+\cite{sanchez-cano17_synch_x_ray_fluor_nanop}
+\end{itemize}
\end{itemize}
-
-\texttt{introduction\_exp\_scanning} and \texttt{introduction\_exp\_scanning\_image}
-
\begin{figure}[htbp]
-\centering
-\includegraphics[scale=1,width=0.49\linewidth]{example-image-c.png}
-\caption{\label{fig:introduction_id31_tomography_result}Image obtained on the ID31 beamline}
+\begin{subfigure}{0.65\textwidth}
+\begin{center}
+\includegraphics[scale=1,width=0.95\linewidth]{figs/introduction_tomography_schematic.png}
+\end{center}
+\subcaption{\label{fig:introduction_tomography_schematic} Experimental setup}
+\end{subfigure}
+\begin{subfigure}{0.34\textwidth}
+\begin{center}
+\includegraphics[scale=1,width=0.95\linewidth]{figs/introduction_tomography_picture.png}
+\end{center}
+\subcaption{\label{fig:introduction_tomography_results} Obtained image \cite{schoeppler17_shapin_highl_regul_glass_archit}}
+\end{subfigure}
+\caption{\label{fig:introduction_tomography}Exemple of a tomography experiment. The sample is rotated and images are taken at several angles (\subref{fig:introduction_tomography_schematic}). Example of one 3D image obtained after tomography (\subref{fig:introduction_tomography_results}).}
\end{figure}
-\section{Need of accurate positioning end stations with high dynamics}
-\paragraph{A push towards brighter and smaller beams\ldots{}}
+
+\begin{figure}[htbp]
+\begin{subfigure}{0.65\textwidth}
+\begin{center}
+\includegraphics[scale=1,width=0.95\linewidth]{figs/introduction_scanning_schematic.png}
+\end{center}
+\subcaption{\label{fig:introduction_scanning_schematic} Experimental setup}
+\end{subfigure}
+\begin{subfigure}{0.34\textwidth}
+\begin{center}
+\includegraphics[scale=1,width=0.95\linewidth]{figs/introduction_scanning_picture.png}
+\end{center}
+\subcaption{\label{fig:introduction_scanning_results} Obtained image \cite{sanchez-cano17_synch_x_ray_fluor_nanop}}
+\end{subfigure}
+\caption{\label{fig:introduction_scanning}Exemple of a scanning experiment. The sample is scanned in the Y-Z plane (\subref{fig:introduction_scanning_schematic}). Example of one 2D image obtained after scanning with a step size of 20nm (\subref{fig:introduction_scanning_results}).}
+\end{figure}
+
+\section{Need of Accurate Positioning End-Stations with High Dynamics}
+\paragraph{A push towards brighter and smaller beams}
Improvement of both the light source and the instrumentation:
\begin{itemize}
-\item EBS: smaller source + higher flux
-\item Better focusing optic (add some links): beam size in the order of 10 to 20nm FWHM (reference)
-\begin{itemize}
-\item[{$\square$}] Show picture or measurement of the beam size
+\item EBS: smaller source + higher flux \ref{fig:introduction_beam_3rd_4th_gen}
\end{itemize}
+
+\begin{figure}[htbp]
+\begin{subfigure}{0.69\textwidth}
+\begin{center}
+\includegraphics[scale=1,height=1.6cm]{figs/introduction_beam_3rd_gen.png}
+\end{center}
+\subcaption{\label{fig:introduction_beam_3rd_gen}$3^{rd}$ generation}
+\end{subfigure}
+\begin{subfigure}{0.29\textwidth}
+\begin{center}
+\includegraphics[scale=1,height=1.6cm]{figs/introduction_beam_4th_gen.png}
+\end{center}
+\subcaption{\label{fig:introduction_beam_4th_gen}$4^{th}$ generation}
+\end{subfigure}
+\caption{\label{fig:introduction_beam_3rd_4th_gen}View of the ESRF X-ray beam before the EBS upgrade (\subref{fig:introduction_beam_3rd_gen}) and after the EBS upgrade (\subref{fig:introduction_beam_4th_gen}). The brilliance is increased, whereas the horizontal size and emittance are reduced.}
+\end{figure}
+
+\begin{itemize}
+\item ESRF Red Book (1987): very few beamline projects aiming even for 10 micron sized beams
+Now optics exist for 10nm beams
+\item Better focusing optic (add some links): beam size in the order of 10 to 20nm FWHM (reference) \ref{fig:introduction_moore_law_focus}
crossed silicon compound refractive lenses, KB mirrors [17], zone plates [18], or multilayer Laue lenses [19]
\cite{barrett16_reflec_optic_hard_x_ray}
\end{itemize}
+\begin{figure}[htbp]
+\centering
+\includegraphics[scale=1]{figs/introduction_moore_law_focus.png}
+\caption{\label{fig:introduction_moore_law_focus}Evolution of the measured spot size for different hard x-ray focusing elements. CRL, KB, FZP, MLL}
+\end{figure}
+
Higher flux density (+high energy of the ID31 beamline) => Radiation damage: needs to scan the sample quite fast with respect to the focused beam
\begin{itemize}
@@ -152,7 +247,8 @@ Higher flux density (+high energy of the ID31 beamline) => Radiation damage: nee
\cite{hatsui15_x_ray_imagin_detec_synch_xfel_sourc}
\end{itemize}
-\paragraph{\ldots{}Requires the use of dynamical positioning}
+\paragraph{New dynamical positioning needs}
+
``from traditional step by step scans to \emph{fly-scan}''
Fast scans + needs of high accuracy and stability => need mechatronics system with:
@@ -176,53 +272,75 @@ In fly-scan mode, the sample keeps moving and a triggering system generates trig
The trigger signals are used to control detector exposure.
\end{quote}
-\begin{itemize}
-\item[{$\square$}] Make picture representing a typical experiment (maybe YZ scan?) with:
-Probably already shown earlier \texttt{introduction\_exp\_scanning}
-\begin{itemize}
-\item nano focusing optics (see the beam focused)
-\item positioning stage with displayed YZ motion (pixel by pixel in the YZ plane)
-\item detector
-\end{itemize}
-\end{itemize}
+
+\begin{figure}[htbp]
+\begin{subfigure}{0.55\textwidth}
+\begin{center}
+\includegraphics[scale=1,height=6cm]{figs/introduction_scan_step.png}
+\end{center}
+\subcaption{\label{fig:introduction_scan_step} Step by step scan}
+\end{subfigure}
+\begin{subfigure}{0.44\textwidth}
+\begin{center}
+\includegraphics[scale=1,height=6cm]{figs/introduction_scan_fly.png}
+\end{center}
+\subcaption{\label{fig:introduction_scan_fly} Fly scan}
+\end{subfigure}
+\caption{\label{fig:introduction_scan_mode}Two acquisition modes. In step-by-step mode (\subref{fig:introduction_scan_step}), the motor moves at the wanted imaged position, the detector acquisition is started, the shutter is openned briefly to have the wanted exposition, the detector acquisition is stopped, and the motor can move to a new position. In \emph{fly-scan} mode (\subref{fig:introduction_scan_fly}), the shutter is openned during all the motion, and the detector is acquired only at the wanted positions, on the \emph{fly}.}
+\end{figure}
Subject of this thesis: design of high performance positioning station with high dynamics and nanometer accuracy
\chapter{Challenge definition}
-\section{Multi DoF, Highly accurate, and Long stroke positioning end station?}
-\paragraph{Performance limitation of ``stacked stages'' end-stations}
+\section{Multi degrees of freedom, long stroke and highly accurate positioning end station}
+\paragraph{Performance limitation of ``stacked-stages'' end-stations}
-Typical positioning end station:
+Typical positioning end station (Figure \ref{fig:introduction_translation_stage}):
\begin{itemize}
\item stacked stages
-\item ballscrew, linear guides, rotary motor
+\item Ball-screw, linear guides, rotary motor
\end{itemize}
-
Explain the limitation of performances:
\begin{itemize}
\item Backlash, play, thermal expansion, guiding imperfections, \ldots{}
\item Give some numbers: straightness of the Ty stage for instance, change of \(0.1^oC\) with steel gives x nm of motion
\item Vibrations
-\item Explain that this micro-station can only have \textasciitilde{}10um of accuracy due to physical limitation
\item Possibility to have linear/rotary encoders that correct the motion in the considered DoF, but does not change anything to the other 5DoF
\end{itemize}
+\begin{figure}[htbp]
+\centering
+\includegraphics[scale=1]{figs/introduction_translation_stage.png}
+\caption{\label{fig:introduction_translation_stage}A classical translation stage composed of: a rotary motor and possibly reduction gears (in blue), a mechanism to transform the rotary motion to a translation (here a lead screw in green), a guiding mechanism (here linear rails and bearings in red). The mobile platform (in yellow) can then translate with respect to the fixed base.}
+\end{figure}
-Talk about flexure based positioning stations?
+Flexure based positioning stations may give better positioning requirements, but are limited to short stroke.
Advantages: no backlash, etc\ldots{}
But: limited to short stroke
Picture of schematic of one positioning station based on flexure
-\paragraph{The ID31 Micro-Station}
+Explain example of Figure \ref{fig:introduction_flexure_stage}.
-Presentation of the Micro-Station in details \ref{fig:introduction_id31_microstation_cad}:
+\begin{figure}[htbp]
+\centering
+\includegraphics[scale=1]{figs/introduction_flexure_stage.png}
+\caption{\label{fig:introduction_flexure_stage}A simple flexure stage}
+\end{figure}
+
+Combining, long stroke and accuracy in multi-DoF is challenging.
+
+\paragraph{Positioning accuracy of the ID31 Micro-Station}
+
+Presentation of the Micro-Station in details \ref{fig:introduction_micro_station}:
\begin{itemize}
\item Goal of each stage (e.g. micro-hexapod: static positioning, Ty and Rz: scans, \ldots{})
\item Stroke
\item Initial design objectives: as stiff as possible, smallest errors as possible
\end{itemize}
+Explain that this micro-station can only have \textasciitilde{}10um / 10urad of accuracy due to physical limitation.
+
\paragraph{New positioning requirements}
\begin{itemize}
@@ -242,28 +360,28 @@ The goal in this thesis is to increase the positioning accuracy of the micro-sta
\section{The Nano Active Stabilization System}
\paragraph{NASS Concept}
-Briefly describe the NASS concept.
-4 parts:
-\begin{itemize}
-\item Micro Station
-\item multi-DoF positioning system with good dynamics
-\item 5DoF metrology system
-\item Control system and associated instrumentation
-\end{itemize}
+In order to address the new positioning requirements, the concept of\ldots{}
+Briefly describe the NASS concept.
6DoF vibration control platform on top of a complex positioning platform that correct positioning errors based on an external metrology
+It is composed of mainly four elements:
\begin{itemize}
-\item[{$\square$}] Add the control system in the schematic
+\item The micro station
+\item A 5 degrees of freedom metrology system
+\item A 5 or 6 degrees of freedom stabilization platform
+\item Control system and associated instrumentation
\end{itemize}
\begin{figure}[htbp]
\centering
\includegraphics[scale=1]{figs/introduction_nass_concept_schematic.png}
-\caption{\label{fig:introduction_nass_concept_schematic}Nass Concept. 1: micro-station, 2: nano-hexapod, 3: sample, 4: 5DoF metrology}
+\caption{\label{fig:introduction_nass_concept_schematic}The Nano Active Stabilization System concept}
\end{figure}
-\paragraph{Metrology system}
+\paragraph{Online Metrology system}
+
+The accuracy of the NASS will only depend on the accuracy of the metrology system.
Requirements:
\begin{itemize}
@@ -273,31 +391,32 @@ Requirements:
\item high bandwidth
\end{itemize}
-The accuracy of the NASS will only depend on the accuracy of the metrology system.
-
Concept:
\begin{itemize}
\item Fiber interferometers
\item Spherical reflector with flat bottom
-\item Tracking system
+\item Tracking system (tip-tilt mechanism) to keep the beam perpendicular to the mirror surface: Spherical mirror with center at the point of interest => No Abbe errors
+
+\item XYZ positions from at least 3 interferometers pointing at the spherical surface
+\item Rx/Ry angles from at least 3 interferometers pointing at the bottom flat surface
\end{itemize}
+\begin{figure}[htbp]
+\centering
+\includegraphics[scale=1]{figs/introduction_nass_metrology.png}
+\caption{\label{fig:introduction_nass_metrology}2D representation of the NASS metrology system.}
+\end{figure}
+
Complex mechatronics system on its own.
-
This metrology system is not further discussed in this thesis as it is still under active development.
-
In the following of this thesis, it is supposed that the metrology system is accurate, etc..
-\begin{itemize}
-\item Say that there are several high precision sensors, but only interferometers for long stroke / high accuracy?
-\end{itemize}
-
-\paragraph{Multi-DoF Positioning stage for error compensation}
+\paragraph{Active Stabilization Platform}
\begin{itemize}
\item 5 DoF
\item High dynamics
-\item nano-meter capable (no backlash,)
+\item Nano-meter capable (no backlash)
\item Accept payloads up to 50kg
\end{itemize}
@@ -321,11 +440,15 @@ Trade-off between robustness and performance in the design of feedback system.
\item actuators
\item mechanical design
\item achievable bandwidth
-\item \ldots{}
\end{itemize}
\item Need to evaluate the different concepts, and predict the performances to guide the design
\item The goal is to design, built and test this system such that it work as expected the first time.
-Very costly system, so much be correct.
+Very costly system, so must be correct.
+\item Challenge:
+\begin{itemize}
+\item proper design methodology
+\item accurate models
+\end{itemize}
\end{itemize}
\section{Control Challenge}
@@ -342,8 +465,8 @@ Being robust to change of payload inertia means large stability margins and ther
\end{itemize}
\chapter{Literature Review}
-\section{Nano Positioning end-stations}
-\paragraph{End Station with Stacked Stages}
+\section{Nano Positioning End-Stations}
+\paragraph{End-Station with Stacked Stages}
Stacked stages:
\begin{itemize}
@@ -358,70 +481,156 @@ To have acceptable performances / stability:
Examples:
\begin{itemize}
-\item ID16b \cite{martinez-criado16_id16b}
-\item ID13 \cite{riekel10_progr_micro_nano_diffr_at}
-\item ID11 \cite{wright20_new_oppor_at_mater_scien}
\item ID01 \cite{leake19_nanod_beaml_id01}
-\item[{$\square$}] Maybe make a table to compare stations
+\item ID11 \cite{wright20_new_oppor_at_mater_scien}
+\item ID13 \cite{riekel10_progr_micro_nano_diffr_at}
\end{itemize}
+\begin{figure}[htbp]
+\begin{subfigure}{0.49\textwidth}
+\begin{center}
+\includegraphics[scale=1,scale=1]{figs/introduction_endstation_id16b.png}
+\end{center}
+\subcaption{\label{fig:introduction_endstation_id16b}ID16b}
+\end{subfigure}
+\begin{subfigure}{0.49\textwidth}
+\begin{center}
+\includegraphics[scale=1,scale=1]{figs/introduction_endstation_id11.png}
+\end{center}
+\subcaption{\label{fig:introduction_endstation_id11}ID11}
+\end{subfigure}
+\caption{\label{fig:introduction_passive_stations}Example of two nano end-stations without online metrology: (\subref{fig:introduction_endstation_id16b}) \cite{martinez-criado16_id16b} and (\subref{fig:introduction_endstation_id11}) \cite{wright20_new_oppor_at_mater_scien}}
+\end{figure}
+
Explain limitations => Thermal drifts, run-out errors of spindles (improved by using air bearing), straightness of translation stages, \ldots{}
\paragraph{Online Metrology and Active Control of Positioning Errors}
The idea of having an external metrology to correct for errors is not new.
-\begin{itemize}
-\item To have even better performances: online metrology are required.
-\item Several strategies:
+Several strategies:
\begin{itemize}
\item only used for measurements (post processing)
\item for calibration
\item for triggering detectors
-\item for real time positioning control
-\end{itemize}
+\item for real time positioning control (Figure \ref{fig:introduction_active_stations})
\end{itemize}
-
-
+Sensors:
\begin{itemize}
-\item[{$\square$}] HXN \cite{xu23_high_nsls_ii}
-Laser interferometers on reference ring (on top of rotary stage).
-Used to trigger the detectors (ptychography, microscope)
-Similar to \cite{wang12_autom_marker_full_field_hard}
+\item Capacitive: \cite{schroer17_ptynam,villar18_nanop_esrf_id16a_nano_imagin_beaml,schropp20_ptynam}
+\item Fiber Interferometers Interferometers:
+\begin{itemize}
+\item Attocube FPS3010 Fabry-Pérot interferometers: \cite{nazaretski15_pushin_limit,stankevic17_inter_charac_rotat_stages_x_ray_nanot,engblom18_nanop_resul,nazaretski22_new_kirkp_baez_based_scann}
+\item Attocube IDS3010 Fabry-Pérot interferometers: \cite{holler17_omny_pin_versat_sampl_holder,holler18_omny_tomog_nano_cryo_stage,kelly22_delta_robot_long_travel_nano}
+\item PicoScale SmarAct Michelson interferometers: \cite{schroer17_ptynam,schropp20_ptynam,xu23_high_nsls_ii,geraldes23_sapot_carnaub_sirius_lnls}
\end{itemize}
+\end{itemize}
+
+\begin{figure}[htbp]
+\begin{subfigure}{0.49\textwidth}
+\begin{center}
+\includegraphics[scale=1,scale=1]{figs/introduction_stages_wang.png}
+\end{center}
+\subcaption{\label{fig:introduction_stages_wang} Wang}
+\end{subfigure}
+\begin{subfigure}{0.49\textwidth}
+\begin{center}
+\includegraphics[scale=1,scale=1]{figs/introduction_stages_schroer.png}
+\end{center}
+\subcaption{\label{fig:introduction_stages_schroer} Schroer}
+\end{subfigure}
+\caption{\label{fig:introduction_metrology_stations}Two examples of end-station with integrated online metrology. (\subref{fig:introduction_stages_wang}) \cite{wang12_autom_marker_full_field_hard} and (\subref{fig:introduction_stages_schroer}) \cite{schroer17_ptynam}}
+\end{figure}
+
+For some applications (especially when using a nano-beam), the position has not only to be measured, but to be controlled.
+
+\textbf{Actuators}:
+\begin{itemize}
+\item Piezoelectric: \cite{nazaretski15_pushin_limit,holler17_omny_pin_versat_sampl_holder,holler18_omny_tomog_nano_cryo_stage,villar18_nanop_esrf_id16a_nano_imagin_beaml,nazaretski22_new_kirkp_baez_based_scann}
+\item 3-phase linear motor: \cite{stankevic17_inter_charac_rotat_stages_x_ray_nanot,engblom18_nanop_resul}
+\item Voice Coil: \cite{kelly22_delta_robot_long_travel_nano,geraldes23_sapot_carnaub_sirius_lnls}
+\end{itemize}
+
+
+Bandwidth: rarely specificity.
+Usually slow, so that only drifts are compensated.
+Only recently, high bandwidth (100Hz) have been reported with the use of voice coil actuators \cite{kelly22_delta_robot_long_travel_nano,geraldes23_sapot_carnaub_sirius_lnls}.
+
+Full rotation for tomography:
+\begin{itemize}
+\item Spindle above XYZ stage: \cite{stankevic17_inter_charac_rotat_stages_x_ray_nanot,holler17_omny_pin_versat_sampl_holder,holler18_omny_tomog_nano_cryo_stage,villar18_nanop_esrf_id16a_nano_imagin_beaml,engblom18_nanop_resul,nazaretski22_new_kirkp_baez_based_scann,xu23_high_nsls_ii}
+\item Spindle bellow XYZ stage: \cite{wang12_autom_marker_full_field_hard,schroer17_ptynam,schropp20_ptynam,geraldes23_sapot_carnaub_sirius_lnls}
+\end{itemize}
+Only for mapping: \cite{nazaretski15_pushin_limit,kelly22_delta_robot_long_travel_nano}
+
+\begin{figure}[htbp]
+\begin{subfigure}{0.49\textwidth}
+\begin{center}
+\includegraphics[scale=1,width=0.95\linewidth]{figs/introduction_stages_villar.png}
+\end{center}
+\subcaption{\label{fig:introduction_stages_villar} ID16a}
+\end{subfigure}
+\begin{subfigure}{0.49\textwidth}
+\begin{center}
+\includegraphics[scale=1,scale=1]{figs/introduction_stages_nazaretski.png}
+\end{center}
+\subcaption{\label{fig:introduction_stages_nazaretski} 1 and 2 are stage to position the focusing optics. 3 is the sample location, 4 the sample stage and 5 the interferometers}
+\end{subfigure}
+\caption{\label{fig:introduction_active_stations}Example of two end-stations with real-time position feedback based on an online metrology. (\subref{fig:introduction_stages_villar}) \cite{villar18_nanop_esrf_id16a_nano_imagin_beaml}. (\subref{fig:introduction_stages_nazaretski}) \cite{nazaretski17_desig_perfor_x_ray_scann,nazaretski15_pushin_limit}}
+\end{figure}
+
+Payload capabilities:
+\begin{itemize}
+\item All are only supported calibrated, micron scale samples
+\item Higher sample masses to up to 500g have been reported in \cite{nazaretski22_new_kirkp_baez_based_scann,kelly22_delta_robot_long_travel_nano}
+\end{itemize}
+
+100 times heavier payload capabilities than previous stations with similar performances.
\begin{table}[htbp]
-\caption{\label{tab:introduction_sample_stages}Table caption}
+\caption{\label{tab:introduction_active_stations}End-Stations with integrated feedback loops based on online metrology. Stages used for static positioning are ommited for readability. Stages used for feedback are indicated in bold font.}
\centering
-\begin{tabularx}{\linewidth}{lllllllX}
+\scriptsize
+\begin{tabularx}{0.95\linewidth}{cccccc}
\toprule
-Architecture & Sensors and measured DoFs & Actuators and controlled DoFs & Institute, BL & OL/CL (bandwidth) & Stroke, DoF & Samples & Ref\\
+\textbf{Architecture} & \textbf{Metrology} & \textbf{Stroke} & \textbf{Bandwidth} & \textbf{Institute} & \textbf{References}\\
\midrule
-XYZ, Spherical retroreflector, Sample & 3 interferometers\footnotemark, Y,Z & YZ piezo stages & PETRA III, P06 & OL & 100um & light & \cite{schroer17_ptynam,schropp20_ptynam}\\
-Spindle / Metrology Ring / XYZ Stage / Sample & 3 Capacitive, Y,Z,Rx & & NSLS, X8C & OL, post processing & & micron scale & \cite{wang12_autom_marker_full_field_hard}\\
-\textbf{Hexapod} / Spindle / Metrology Ring / Sample & 12 Capacitive\footnotemark, X,Y,Z,Rx,Ry & Piezo (Hexapod) & ESRF, ID16a & CL, 10Hz bandwidth & 50um, 500urad & light & \cite{villar18_nanop_esrf_id16a_nano_imagin_beaml}\\
-XYZ, Rz, XY, Cylindrical reference & 5 interferometers\footnotemark, X,Y,Z,Rx,Ry & XYZ linear motors & Soleil & CL & & light & \cite{engblom18_nanop_resul,stankevic17_inter_charac_rotat_stages_x_ray_nanot}\\
-XYZ, Rz, XYZ Spherical reference & 3 Interferometers\footnotemark, Y,Z,Rx & XYZ parallel piezo stage & PSI, OMNY & CL & 400um & light & \cite{holler18_omny_tomog_nano_cryo_stage,holler17_omny_pin_versat_sampl_holder}\\
-XYZ, mirrors/sample & 3 interferometers\textsuperscript{\ref{org12e9b3b}}, XYZ & XYZ piezo stage & APS & CL, 3 PID & 3mm & light & \cite{nazaretski15_pushin_limit}\\
-Rz, Parallel XYZ stage & 3 interferometers\textsuperscript{\ref{orgd8c7548}} & 3xVCM parallel stage & LNLS, CARNAUBA & CL, 100Hz bandwidth & YZ: 3mm, Rz: +-110deg & light & \cite{geraldes23_sapot_carnaub_sirius_lnls}\\
-Parallel XYZ stage & 3 interferometers\textsuperscript{\ref{org65d59ad}}, XYZ & 3xVCM parallel stage & Diamond, I14 & CL, 100Hz bandwidth & XYZ: 3mm & up to 350g & \cite{kelly22_delta_robot_long_travel_nano}\\
+Mirror / Sample & 3 Interferometers & & & APS & \cite{nazaretski15_pushin_limit}\\
+\textbf{XYZ piezo motors} & \(D_xD_yD_z\) & \(D_xD_yD_z: 3\,\text{mm}\) & & & Figure \ref{fig:introduction_stages_nazaretski}\\
+\midrule
+Metrology Ring / Sample & 12 Capacitive & light & 10 Hz & ESRF & \cite{villar18_nanop_esrf_id16a_nano_imagin_beaml}\\
+Spindle & \(D_xD_yD_zR_xR_y\) & \(R_z: 180\,\text{deg}\) & & (ID16a) & Figure \ref{fig:introduction_stages_villar}\\
+\textbf{Piezo Hexapod} & & \(D_xD_yD_z: 50\,\mu m\) & & & \\
+ & & \(R_x R_y: 500\,\mu \text{rad}\) & & & \\
+\midrule
+Spherical Reference / Sample & 5 Interferometers & light & & PSI & \cite{holler17_omny_pin_versat_sampl_holder,holler18_omny_tomog_nano_cryo_stage}\\
+Spindle & \(D_yD_zR_x\) & \(R_z: 365\,\text{deg}\) & & (OMNY) & \\
+\textbf{Piezo Tripod} & & \(D_xD_yD_z: 400\,\mu m\) & & & \\
+\midrule
+Cylindrical Reference / Sample & 5 Interferometers & light & & Soleil & \cite{stankevic17_inter_charac_rotat_stages_x_ray_nanot,engblom18_nanop_resul}\\
+Spindle & \(D_xD_yD_zR_xR_y\) & \(R_z: 360\,\text{deg}\) & & & \\
+\textbf{Stacked XYZ linear motors} & & \(D_xD_yD_z: 400\,\mu m\) & & & \\
+\midrule
+Metrology Ring / Sample & 3 Interferometers & up to 500g & & NSLS & \cite{nazaretski22_new_kirkp_baez_based_scann}\\
+Spindle & \(D_xD_yD_z\) & \(R_z: 360\,\text{deg}\) & & (SRX) & \\
+\textbf{XYZ piezo} & & \(D_xD_yD_z: 100\,\mu m\) & & & \\
+\midrule
+Mirrors / Sample & 3 Interferometers & up to 350g & 100 Hz & Diamond & \cite{kelly22_delta_robot_long_travel_nano}\\
+\textbf{Parallel XYZ voice coil} & \(D_xD_yD_z\) & \(D_xD_yD_z: 3\,\text{mm}\) & & (I14) & \\
+\midrule
+Retroreflectors / Samples & 3 Interferometers & light & 100 Hz & LNLS & \cite{geraldes23_sapot_carnaub_sirius_lnls}\\
+\textbf{Parallel XYZ voice coil} & \(D_xD_yD_z\) & \(D_yD_z: 3\,\text{mm}\) & & (Carnauba) & \\
+Spindle & & \(R_z: \pm 110\,\text{deg}\) & & & \\
+\midrule
+Sample & 6 Interferometers & \textbf{up to 50kg} & & ESRF & \cite{dehaeze18_sampl_stabil_for_tomog_exper,dehaeze21_mechat_approac_devel_nano_activ_stabil_system}\\
+\textbf{Hexapod} & \(D_xD_yD_zR_xR_y\) & & & (ID31) & \\
+Spindle & & \(R_z : 360\,\text{deg}\) & & & \\
+Ry & & \(R_y : \pm 3\,\text{deg}\) & & & \\
+Ty & & \(D_y : \pm 5\,\text{mm}\) & & & \\
\bottomrule
\end{tabularx}
-\end{table}\footnotetext[1]{\label{orgd8c7548}PicoScale SmarAct Michelson interferometers}\footnotetext[2]{\label{orgcd87c48}Capacitive sensors from Fogale Sensors}\footnotetext[3]{\label{org12e9b3b}Attocube FPS3010 Fabry-Pérot interferometers}\footnotetext[4]{\label{org65d59ad}Attocube IDS3010 Fabry-Pérot interferometers}
-
-\begin{itemize}
-\item[{$\square$}] Figure with different stages
-\item[{$\square$}] Compared to the existing stages (see table), what are the challenges here? Rotation, large stroke, light to heavy payloads, lots of DoF (5 to be controlled)
-\item[{$\square$}] Comparison with NASS?
-\end{itemize}
-\begin{center}
-\begin{tabular}{llllllll}
-Architecture & Sensors & Actuators & Institute, BL & OL/CL (bandwidth) & Stroke, DoF & Samples & Ref\\
-\hline
-Ty,Ry,Rz,Hexapod,Sample & 6+ Interferometers & & ESRF, ID31 & CL & Ty, Ry, Rz, Hexa & up to 50kg & \\
-\end{tabular}
-\end{center}
+\end{table}
\paragraph{Long Stroke - Short Stroke architecture}
@@ -434,6 +643,28 @@ Speak about two stage control?
\item In the table, say which ones are long stroke / short stroke. Some new stages are just long stroke (voice coil)
\end{itemize}
+\begin{figure}[htbp]
+\centering
+\includegraphics[scale=1]{figs/introduction_two_stage_schematic.png}
+\caption{\label{fig:introduction_two_stage_schematic}Typical Long Stroke - Short Stroke architecture. The long stroke stage is \ldots{}}
+\end{figure}
+
+\begin{figure}[htbp]
+\begin{subfigure}{0.59\textwidth}
+\begin{center}
+\includegraphics[scale=1,width=0.95\linewidth]{figs/introduction_two_stage_control_example.png}
+\end{center}
+\subcaption{\label{fig:introduction_two_stage_control_example} Two stage control with classical stage and voice coil}
+\end{subfigure}
+\begin{subfigure}{0.39\textwidth}
+\begin{center}
+\includegraphics[scale=1,width=0.95\linewidth]{figs/introduction_two_stage_control_h_bridge.png}
+\end{center}
+\subcaption{\label{fig:introduction_two_stage_control_h_bridge} H-bridge. $y_1$, $y_2$ and $x$ are 3-phase linear motors. Short stroke actuators are voice coils.}
+\end{subfigure}
+\caption{\label{fig:introduction_two_stage_example}(\subref{fig:introduction_two_stage_control_example}) \cite{shinno11_newly_devel_long_range_posit}, (\subref{fig:introduction_two_stage_control_h_bridge}) \cite{schmidt20_desig_high_perfor_mechat_third_revis_edition}}
+\end{figure}
+
\section{Multi-DoF dynamical positioning stations}
\paragraph{Serial and Parallel Kinematics}
@@ -446,6 +677,22 @@ Example of several dynamical stations:
Serial vs parallel kinematics (table?)
+\begin{figure}[htbp]
+\begin{subfigure}{0.49\textwidth}
+\begin{center}
+\includegraphics[scale=1,scale=1]{figs/introduction_serial_kinematics.png}
+\end{center}
+\subcaption{\label{fig:introduction_serial_kinematics} Serial Kinematics}
+\end{subfigure}
+\begin{subfigure}{0.49\textwidth}
+\begin{center}
+\includegraphics[scale=1,scale=1]{figs/introduction_parallel_kinematics.png}
+\end{center}
+\subcaption{\label{fig:introduction_parallel_kinematics} Parallel Kinematics}
+\end{subfigure}
+\caption{\label{fig:introduction_kinematics}Two positioning platforms with \(D_x/D_y/R_z\) degrees of freedom. One is using serial kinematics (\subref{fig:introduction_serial_kinematics}), while the other uses parallel kinematics (\subref{fig:introduction_parallel_kinematics})}
+\end{figure}
+
\paragraph{Stewart platforms}
\begin{itemize}
@@ -454,111 +701,316 @@ Serial vs parallel kinematics (table?)
Geometry (cubic), Actuator (soft, stiff), Sensor, Flexible joints, etc.
\end{itemize}
-\begin{figure}
+\begin{figure}[htbp]
\begin{subfigure}{0.49\textwidth}
\begin{center}
-\includegraphics[scale=1,width=0.8\linewidth]{example-image-a.png}
+\includegraphics[scale=1,scale=0.8]{figs/introduction_stewart_architecture.png}
\end{center}
-\subcaption{Stewart platform based on voice coil actuators}
+\subcaption{\label{fig:introduction_stewart_architecture} Stewart Platform Architecture}
\end{subfigure}
\begin{subfigure}{0.49\textwidth}
\begin{center}
-\includegraphics[scale=1,width=0.8\linewidth]{example-image-b.png}
+\includegraphics[scale=1,scale=0.8]{figs/introduction_stewart_pose.png}
\end{center}
-\subcaption{Stewart platform based on piezoelectric actuators}
+\subcaption{\label{fig:introduction_stewart_pose} Change of mobile platform pose}
\end{subfigure}
-\caption{\label{fig:introduction_stewart_platform_examples}Examples of Stewart Platforms}
+\caption{\label{fig:introduction_stewart_platform}The Stewart Platform. Architecutre is shown in (\subref{fig:introduction_stewart_architecture}). Change of pose induce by change of strut length is shown in (\subref{fig:introduction_stewart_pose})}
+\end{figure}
+
+\begin{figure}[htbp]
+\begin{subfigure}{0.49\textwidth}
+\begin{center}
+\includegraphics[scale=1,width=0.95\linewidth]{figs/introduction_stewart_du14.png}
+\end{center}
+\subcaption{\label{fig:introduction_stewart_du14}PZT based, for positioning purposes}
+\end{subfigure}
+\begin{subfigure}{0.49\textwidth}
+\begin{center}
+\includegraphics[scale=1,width=0.95\linewidth]{figs/introduction_stewart_hauge04.png}
+\end{center}
+\subcaption{\label{fig:introduction_stewart_hauge04}Voice coil based, Cubic architecture, for vibration isolation}
+\end{subfigure}
+\caption{\label{fig:introduction_stewart_platform_piezo}Example of Stewart platforms. (\subref{fig:introduction_stewart_du14}) \cite{du14_piezo_actuat_high_precis_flexib} and (\subref{fig:introduction_stewart_hauge04}) \cite{hauge04_sensor_contr_space_based_six}}
\end{figure}
\section{Mechatronics approach}
\paragraph{Predicting performances using models}
-\begin{itemize}
-\item \cite{monkhorst04_dynam_error_budget}
-\begin{quote}
-high costs of the design process: the designed system must be \textbf{first time right}.
-When the system is finally build, its performance level should satisfy the specifications.
-No significant changes are allowed in the post design phase.
-Because of this, the designer wants to be able to predict the performance of the system a-priori and gain insight in the performance limiting factors of the system.
-\end{quote}
-\end{itemize}
-
-
+\cite{monkhorst04_dynam_error_budget}
Can use several models:
-\begin{itemize}
-\item Lumped mass-spring-damper models
+\begin{description}
+\item[{Lumped mass-spring-damper models}] usually uniaxial, easily put into equations, 1dof per considered mass
\cite{rankers98_machin}
-\item Multi-Body Models
-\item Finite element models
-Sub structuring?
-\end{itemize}
+\item[{Multi-Body Models}] usually 6dof per considered solid body, some may be constrained using joints
+\item[{Finite element models}] Can include FEM into multi-body models: Sub structuring (\cite{brumund21_multib_simul_reduc_order_flexib_bodies_fea})
+\end{description}
+
+\begin{figure}[htbp]
+\begin{subfigure}{0.3\textwidth}
+\begin{center}
+\includegraphics[scale=1,scale=1]{figs/introduction_model_lumped.png}
+\end{center}
+\subcaption{\label{fig:introduction_model_lumped} Mass-Spring-Damper model}
+\end{subfigure}
+\begin{subfigure}{0.39\textwidth}
+\begin{center}
+\includegraphics[scale=1,width=0.9\linewidth]{figs/introduction_model_multibody.png}
+\end{center}
+\subcaption{\label{fig:introduction_model_multibody} Multi-Body model}
+\end{subfigure}
+\begin{subfigure}{0.3\textwidth}
+\begin{center}
+\includegraphics[scale=1,width=0.9\linewidth]{figs/introduction_model_fem.jpg}
+\end{center}
+\subcaption{\label{fig:introduction_model_fem} Finite Element Model}
+\end{subfigure}
+\caption{\label{fig:introduction_models}Types of models used when using a mechatronics approach. (\subref{fig:introduction_model_lumped}) (\subref{fig:introduction_model_multibody}) (\subref{fig:introduction_model_fem})}
+\end{figure}
\paragraph{Closed-Loop Simulations}
\cite{schmidt20_desig_high_perfor_mechat_third_revis_edition}
+Once a model of the system is obtained: develop controller based on linearized model.
+
+\begin{figure}[htbp]
+\centering
+\includegraphics[scale=1]{figs/introduction_closed_loop.png}
+\caption{\label{fig:introduction_closed_loop}Block diagram of a typical feedback control architecture}
+\end{figure}
+
Say what can limit the performances for a complex mechatronics systems as this one:
\begin{itemize}
-\item disturbances
-\item measurement noise
-\item DAC / amplifier noise (actuator)
-\item feedback system / bandwidth
+\item Disturbances affecting the plant output \(d_y\)
+\item Measurement noise \(n\)
+\item DAC / amplifier noise (actuator) \(d_u\)
+\item Feedback system / bandwidth
+\item \(r\), \(y_m\)
\end{itemize}
Simulations can help evaluate the behavior of the system.
\paragraph{Dynamic Error Budgeting}
+\cite{monkhorst04_dynam_error_budget}
+\cite{jabben07_mechat}
+
+\cite{okyay16_mechat_desig_dynam_contr_metrol}
\begin{itemize}
-\item \cite{monkhorst04_dynam_error_budget}
-\begin{quote}
-high costs of the design process: the designed system must be \textbf{first time right}.
-When the system is finally build, its performance level should satisfy the specifications.
-No significant changes are allowed in the post design phase.
-Because of this, the designer wants to be able to predict the performance of the system a-priori and gain insight in the performance limiting factors of the system.
-\end{quote}
-\item \cite{jabben07_mechat}
-\item \cite{okyay16_mechat_desig_dynam_contr_metrol}
-\begin{quote}
-Error budgets [23] are frequently used in the design of precision machines, in order to assess the
-contributions of different factors such as parasitic motions, thermal expansion, and servo accuracy, on
-the positioning accuracy of a machine. Dynamic Error Budgeting (DEB) or ‘Spectral Analysis’
-extends this concept to the realm of feedback control. Recognizing that the controller can provide
-only a finite attenuation of disturbance signals interfering with the servo, DEB provides a
-methodology for predicting the cumulative effect of such signals on the control error as a function of
-their spectral (frequency) content. The method can be used to predict the control accuracy of a system
-implemented using a set of certain devices under certain conditions before it is realized. Furthermore,
-as it is formulated in the frequency domain, it can be used to optimize the controller design as well,
-typically leading to an H2 - optimal control framework. In DEB, the disturbance signals are modeled
-with their power spectral density (PSD), assuming that they are stationary stochastic processes which
-are not correlated with each other. Then, these PSD’s are transmitted to the performance goal, most
-often the positioning error, using linear time invariant (LTI) system theory. The transmitted PSD’s are
-summed up into the variance of the performance goal, which constitutes a comparative measure of
-performance. Most importantly, the influence of different dynamic factors and disturbance sources,
-which have the greatest impact on the achievable performance (e.g., accuracy) can be easily spotted
-and improved, through this kind of analysis. An approach similar to DEB was followed to decompose
-the contribution of different noise sources on the hard disk position error in [1], [2], [45]. DEB has
-been used to assess the performance of a geophone and a vibration isolation system in [75]. Jabben
-[49] has used DEB in the mechatronic design of a magnetically suspended rotating platform. Aguirre
-et al. [3] have analyzed the performance of active aerostatic thrust bearings using DEB.
-\end{quote}
+\item ``the disturbance signals are modeled with their power spectral density (PSD), assuming that they are stationary stochastic processes which are not correlated with each other''
+\item Effects of \(d_u\), \(d_y\) and \(n\) on \(y\) can be estimated from their PSD and the closed-loop transfer functions
+This gives a first idea of the limiting factor as a function of frequency.
+In order to determine whether each disturbance/noise impact the performances, cumulative power spectrum can be used: this gives the RMS value
+Then, this help to know the different actions to improve the performances: reduce sensor noise or driver electrical noise, work on reducing disturbances like damping resonances, increase feedback bandwidth, \ldots{})
\end{itemize}
-\section{Control architecture}
+\begin{figure}[htbp]
+\begin{subfigure}{0.33\textwidth}
+\begin{center}
+\includegraphics[scale=1,width=0.9\linewidth]{figs/introduction_psd.png}
+\end{center}
+\subcaption{\label{fig:introduction_psd} Power Spectral Density - Open Loop}
+\end{subfigure}
+\begin{subfigure}{0.33\textwidth}
+\begin{center}
+\includegraphics[scale=1,width=0.9\linewidth]{figs/introduction_cps.png}
+\end{center}
+\subcaption{\label{fig:introduction_cps} Cumulative Power Spectrum - Open Loop}
+\end{subfigure}
+\begin{subfigure}{0.33\textwidth}
+\begin{center}
+\includegraphics[scale=1,width=0.9\linewidth]{figs/introduction_cps_cl.png}
+\end{center}
+\subcaption{\label{fig:introduction_cps_cl} Cumulative Power Spectrum - Comparison}
+\end{subfigure}
+\caption{\label{fig:introduction_deb}Tools used for the dynamic error budgeting. First the Power Spectral Density can be compared (\subref{fig:introduction_psd}). The cumulative power spectrum is shown in (\subref{fig:introduction_cps}). To compare the effectivness of different strategies, the cumulative power spectrum can be compared (\subref{fig:introduction_cps_cl})}
+\end{figure}
-Maybe make a simple review of control strategies for Stewart platform control.
-Based on \url{file:///home/thomas/Cloud/work-projects/ID31-NASS/matlab/stewart-simscape/org/bibliography.org}
+\section{Stewart platforms: Control architecture}
+Different control goals:
+\begin{itemize}
+\item Vibration Isolation \ref{fig:introduction_stewart_isolation}
+\item Position \ref{fig:introduction_stewart_positioning}
+\end{itemize}
-Broad subject (MIMO control), maybe talk only about vibration control based on external metrology.
+Depending on the goal, different sensors and different architectures.
+
+For the NASS, both objectives.
+
+\begin{figure}[htbp]
+\begin{subfigure}{0.49\textwidth}
+\begin{center}
+\includegraphics[scale=1,scale=1]{figs/introduction_stewart_isolation.png}
+\end{center}
+\subcaption{\label{fig:introduction_stewart_isolation} Vibration Isolation}
+\end{subfigure}
+\begin{subfigure}{0.49\textwidth}
+\begin{center}
+\includegraphics[scale=1,scale=1]{figs/introduction_stewart_positioning.png}
+\end{center}
+\subcaption{\label{fig:introduction_stewart_positioning} Positioning}
+\end{subfigure}
+\caption{\label{fig:introduction_stewart_control_goal}Example of two control goals. In (\subref{fig:introduction_stewart_isolation}), the Stewart platform is used to isolate the payload from a vibration environment. In (\subref{fig:introduction_stewart_positioning}), the Stewart platform is used to position the payload along a defined trajectory.}
+\end{figure}
+
+
+\paragraph{Active Damping and Vibration Control}
+
+Two main active vibration isolation strategies \cite{collette11_review_activ_vibrat_isolat_strat}:
+\begin{itemize}
+\item IFF using collocated force sensors / load cell \cite{chesne16_enhan_dampin_flexib_struc_using_force_feedb}
+\item Skyhook damping using inertial sensors (accelerometers, geophones), usually in the frame of the struts
+\end{itemize}
+
+Usually, ``decentralized'', in the frame of the struts (Figure \ref{fig:introduction_control_decentralized}).
+Optimization based on one ``strut'', and then applied to all the struts simultaneously to obtained a 6-DoF active damping / vibration control system.
+
+If narrow band disturbances: Adaptive feedforward control.
+
+
+\begin{figure}[htbp]
+\begin{subfigure}{0.49\textwidth}
+\begin{center}
+\includegraphics[scale=1,scale=1]{figs/introduction_damping_iff.png}
+\end{center}
+\subcaption{\label{fig:introduction_damping_iff} Integral Force Feedback}
+\end{subfigure}
+\begin{subfigure}{0.49\textwidth}
+\begin{center}
+\includegraphics[scale=1,scale=1]{figs/introduction_damping_skyhook.png}
+\end{center}
+\subcaption{\label{fig:introduction_damping_skyhook} "Sky-hook" Damping}
+\end{subfigure}
+\caption{\label{fig:introduction_damping}Uniaxial vibration isolation strategies. Integral force feedback (\subref{fig:introduction_damping_iff}) and ``sky-hook'' damping (\subref{fig:introduction_damping_skyhook}).}
+\end{figure}
+
+
+\begin{figure}[htbp]
+\begin{subfigure}{0.54\textwidth}
+\begin{center}
+\includegraphics[scale=1,width=0.95\linewidth]{figs/introduction_control_decentralized_schematic.png}
+\end{center}
+\subcaption{\label{fig:introduction_control_decentralized_schematic} Decentralized Control applied on Stewart platform}
+\end{subfigure}
+\begin{subfigure}{0.45\textwidth}
+\begin{center}
+\includegraphics[scale=1,width=0.95\linewidth]{figs/introduction_control_decentralized_diagram.png}
+\end{center}
+\subcaption{\label{fig:introduction_control_decentralized_diagram} Equivalent block diagram}
+\end{subfigure}
+\caption{\label{fig:introduction_control_decentralized}Decentralized control. Example of decentralized force feedback (\subref{fig:introduction_control_decentralized_schematic}), only three struts are shown for simplicity. Equivalent block diagram (\subref{fig:introduction_control_decentralized_diagram}), the controller is then diagonal.}
+\end{figure}
+
+\paragraph{Position and Pointing Control}
+
+Control based on position sensors.
+Wanted position is generally expressed in the cartesian frame.
+
+Sensors can be:
+\begin{itemize}
+\item In the frame of the struts (LVDT, Encoder, Strain gauges): usually decentralized control (Figure \ref{fig:introduction_control_decentralized_diagram})
+\item External sensors: centralized
+\end{itemize}
+
+When using external sensors, a decoupling strategy is usually employed (Figure \ref{fig:introduction_control_decoupling}):
+\begin{itemize}
+\item Jacobian matrices: frame of the struts or cartesian frame
+\item Modal control
+\item Singular Value Decomposition
+\item Multivariable control: LQG, H-Infinity (Figure \ref{fig:introduction_control_mimo})
+\end{itemize}
+
+From \cite{thayer02_six_axis_vibrat_isolat_system}:
+\begin{quote}
+Experimental closed-loop control results using the hexapod have shown that controllers designed using a decentralized single-strut design work well when compared to full multivariable methodologies.
+\end{quote}
+
+
+\begin{figure}[htbp]
+\begin{subfigure}{0.33\textwidth}
+\begin{center}
+\includegraphics[scale=1,scale=1]{figs/introduction_control_mimo.png}
+\end{center}
+\subcaption{\label{fig:introduction_control_mimo} Multivariable Control}
+\end{subfigure}
+\begin{subfigure}{0.66\textwidth}
+\begin{center}
+\includegraphics[scale=1,scale=1]{figs/introduction_control_decoupling.png}
+\end{center}
+\subcaption{\label{fig:introduction_control_decoupling} Decoupling Control}
+\end{subfigure}
+\caption{\label{fig:introduction_control_mimo_vs_decoupling}Two strategies to control a multi-inputs-multi-outputs system. Use of a multivariable controller (\subref{fig:introduction_control_mimo}), or first decouple the plant with matrices, and then designing several single-input-single-output controllers (\subref{fig:introduction_control_decoupling})}
+\end{figure}
\begin{itemize}
-\item Active Damping
-\item Decentralized
-\item Centralized
-\item Manually tuned: PID, lead lag, etc\ldots{}
-\item Automatic / Optimal: LQG, H-Infinity
+\item Explain the Jacobian matrix
\end{itemize}
+When decoupling using the Jacobian matrix, the control can be performed in the frame of the struts (Figure \ref{fig:introduction_control_centralized_struts}) or in the cartesian frame (Figure \ref{fig:introduction_control_centralized_cartesian}).
+
+\begin{figure}[htbp]
+\begin{subfigure}{0.95\textwidth}
+\begin{center}
+\includegraphics[scale=1,scale=1]{figs/introduction_control_centralized_struts.png}
+\end{center}
+\subcaption{\label{fig:introduction_control_centralized_struts} Control in the frame of the struts}
+\end{subfigure}
+
+\bigskip
+\begin{subfigure}{0.95\textwidth}
+\begin{center}
+\includegraphics[scale=1,scale=1]{figs/introduction_control_centralized_cartesian.png}
+\end{center}
+\subcaption{\label{fig:introduction_control_centralized_cartesian} Control in the cartesian frame}
+\end{subfigure}
+\caption{\label{fig:introduction_control_centralized}Two centralized control strategies. Express the position error in the frame of the struts and design one controller for each strut (\subref{fig:introduction_control_centralized_struts}). Design one controller for each direction, and then map the forces and torques to each struts (\subref{fig:introduction_control_centralized_cartesian}).}
+\end{figure}
+
+\paragraph{Use of Multiple Sensors}
+
+Often, both vibration control and position control is wanted.
+In that case, the use of multiple sensors can lead to improved performances.
+
+Sensors:
+\begin{itemize}
+\item collocated force (load cell) sensors
+\item collocated accelerometer
+\item displacement (eddy current)
+\end{itemize}
+
+Several strategies can be employed:
+\begin{itemize}
+\item HAC-LAC \cite{geng95_intel_contr_system_multip_degree,wang16_inves_activ_vibrat_isolat_stewar,li01_simul_vibrat_isolat_point_contr,pu11_six_degree_of_freed_activ,xie17_model_contr_hybrid_passiv_activ}
+\item Sensor Fusion \cite{tjepkema12_activ_ph,tjepkema12_sensor_fusion_activ_vibrat_isolat_precis_equip,hauge04_sensor_contr_space_based_six}
+\item Two Sensor control: \cite{hauge04_sensor_contr_space_based_six,tjepkema12_activ_ph}
+\end{itemize}
+
+Comparison between ``two sensor control'' and ``sensor fusion'' is given in \cite{beijen14_two_sensor_contr_activ_vibrat}.
+
+\begin{figure}[htbp]
+\begin{subfigure}{0.48\textwidth}
+\begin{center}
+\includegraphics[scale=1,scale=1]{figs/introduction_architecture_hac_lac.png}
+\end{center}
+\subcaption{\label{fig:introduction_architecture_hac_lac} HAC-LAC}
+\end{subfigure}
+\begin{subfigure}{0.48\textwidth}
+\begin{center}
+\includegraphics[scale=1,scale=1]{figs/introduction_architecture_two_sensor_control.png}
+\end{center}
+\subcaption{\label{fig:introduction_architecture_two_sensor_control} Two Sensor Control}
+\end{subfigure}
+
+\bigskip
+\begin{subfigure}{0.95\textwidth}
+\begin{center}
+\includegraphics[scale=1,scale=1]{figs/introduction_architecture_sensor_fusion.png}
+\end{center}
+\subcaption{\label{fig:introduction_architecture_sensor_fusion} Sensor Fusion}
+\end{subfigure}
+\caption{\label{fig:introduction_control_multiple_sensors}Different control strategies when using multiple sensors. High Authority Control / Low Authority Control (\subref{fig:introduction_architecture_hac_lac}). Sensor Fusion (\subref{fig:introduction_architecture_sensor_fusion}). Two-Sensor Control (\subref{fig:introduction_architecture_two_sensor_control})}
+\end{figure}
+
\chapter{Original Contributions}
This thesis proposes several contributions in the fields of Control, Mechatronics Design and Experimental validation.