Determination of the optimal nano-hexapod’s stiffness
Table of Contents
As shown before, many parameters other than the nano-hexapod itself do influence the plant dynamics:
- The micro-station compliance (studied here)
- The payload mass and dynamical properties (studied here and here)
- The experimental conditions, mainly the spindle rotation speed (studied here)
As seen before, the stiffness of the nano-hexapod greatly influence the effect of such parameters.
We wish here to see if we can determine an optimal stiffness of the nano-hexapod such that:
- Section 1: the change of its dynamics due to the spindle rotation speed is acceptable
- Section 2: the support compliance dynamics is not much present in the nano-hexapod dynamics
- Section 3: the change of payload impedance has acceptable effect on the plant dynamics