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Determination of the optimal nano-hexapod’s stiffness

Table of Contents

As shown before, many parameters other than the nano-hexapod itself do influence the plant dynamics:

As seen before, the stiffness of the nano-hexapod greatly influence the effect of such parameters.

We wish here to see if we can determine an optimal stiffness of the nano-hexapod such that:

1 Spindle Rotation Speed

2 Micro-Station Compliance Effect

  • take the 6dof compliance of the micro-station
  • simple model + uncertainty

3 Payload “Impedance” Effect

Author: Dehaeze Thomas

Created: 2020-04-01 mer. 17:19