From 1125a9b1ea53524a9f15b4a8ff4e0ae7c6277232 Mon Sep 17 00:00:00 2001 From: Thomas Dehaeze Date: Fri, 13 Dec 2019 09:31:19 +0100 Subject: [PATCH] [major-change] start to change the axis of all stages to match id31 The idea is have the world frame the same as the one defined for id31. Also all the actuators should actuate in the positive direction of the axes --- identification/index.html | 490 +++++++++++++++++- identification/index.org | 67 ++- .../sim_micro_station_modal_analysis.slx | Bin 37809 -> 38654 bytes mat/nass_references.mat | Bin 36427 -> 36480 bytes positioning_error/index.org | 25 +- .../matlab/sim_nano_station_metrology.slx | Bin 36338 -> 36697 bytes simscape_subsystems/granite_rigid.slx | Bin 28039 -> 28035 bytes simscape_subsystems/ground.slx | Bin 26163 -> 26165 bytes simscape_subsystems/spindle_rigid.slx | Bin 28431 -> 28439 bytes simscape_subsystems/tilt_stage_rigid.slx | Bin 31600 -> 31587 bytes simscape_subsystems/translation_stage_D.slx | Bin 37364 -> 37353 bytes .../translation_stage_rigid.slx | Bin 30594 -> 30621 bytes simulink_project/index.org | 3 + src/project_startup.m | 3 + 14 files changed, 545 insertions(+), 43 deletions(-) diff --git a/identification/index.html b/identification/index.html index 7652f1f..6fe712b 100644 --- a/identification/index.html +++ b/identification/index.html @@ -3,7 +3,7 @@ "http://www.w3.org/TR/xhtml1/DTD/xhtml1-strict.dtd"> - + Identification @@ -258,16 +258,41 @@ for the JavaScript code in this tag.

Table of Contents

-The goal here is to make an identification of the micro-station in order to compare the model with the measurements on the real micro-station. +The goal here is to make an identification of the micro-station in order to compare the model with the measurements on the real micro-station.

@@ -288,41 +313,462 @@ One solution could be to use one STEP file for one solid body. However, the position of the center of mass can be exported using simulink and then defined on Simscape.

-
+
+

1 Identification of the Micro-Station

+
+
+
+

1.1 Compute the transfer functions

+

-All the files (data and Matlab scripts) are accessible here. +We first define some parameters for the identification. +The simulink file for the identification is sim_micro_station_id.slx.

-
- -
-

1 Identification of the micro-station

-
-
simulinkproject('../');
+
open('identification/matlab/sim_micro_station_id.slx')
 
-
open sim_micro_station_id.slx
+
%% Options for Linearized
+options = linearizeOptions;
+options.SampleTime = 0;
+
+%% Name of the Simulink File
+mdl = 'sim_micro_station_id';
+
+
+ +
+
%% Micro-Hexapod
+% Input/Output definition
+io(1) = linio([mdl, '/Micro-Station/Fm_ext'],1,'openinput');
+io(2) = linio([mdl, '/Micro-Station/Fg_ext'],1,'openinput');
+io(3) = linio([mdl, '/Micro-Station/Dm_inertial'],1,'output');
+io(4) = linio([mdl, '/Micro-Station/Ty_inertial'],1,'output');
+io(5) = linio([mdl, '/Micro-Station/Ry_inertial'],1,'output');
+io(6) = linio([mdl, '/Micro-Station/Dg_inertial'],1,'output');
+
+
+ +
+
% Run the linearization
+G_ms = linearize(mdl, io, 0);
+
+% Input/Output names
+G_ms.InputName  = {'Fmx', 'Fmy', 'Fmz',...
+                   'Fgx', 'Fgy', 'Fgz'};
+G_ms.OutputName = {'Dmx', 'Dmy', 'Dmz', ...
+                   'Tyx', 'Tyy', 'Tyz', ...
+                   'Ryx', 'Ryy', 'Ryz', ...
+                   'Dgx', 'Dgy', 'Dgz'};
+
+
+ +
+
%% Save the obtained transfer functions
+save('./mat/id_micro_station.mat', 'G_ms');
 
-
-

2 Plot the obtained transfer functions

+ +
+

1.2 Plots the transfer functions

-
-

3 Compare with the modal measurements

+ +
+

1.3 Compare with the measurements

+
+
+ + +
+

2 Modal Analysis of the Micro-Station

+
+
+
+

2.1 Simscape Model

+
+
+
open('identification/matlab/sim_micro_station_modal_analysis.slx')
+
+
+ +
+
%% Options for Linearized
+options = linearizeOptions;
+options.SampleTime = 0;
+
+%% Name of the Simulink File
+mdl = 'sim_micro_station_modal_analysis';
+
+
+ +
+
%% Micro-Hexapod
+% Input/Output definition
+io(1) = linio([mdl, '/Micro-Station/F_hammer'],1,'openinput');
+io(2) = linio([mdl, '/Micro-Station/acc9'],1,'output');
+io(3) = linio([mdl, '/Micro-Station/acc10'],1,'output');
+io(4) = linio([mdl, '/Micro-Station/acc11'],1,'output');
+io(5) = linio([mdl, '/Micro-Station/acc12'],1,'output');
+
+
+ +
+
% Run the linearization
+G_ms = linearize(mdl, io, 0);
+
+% Input/Output names
+G_ms.InputName  = {'Fx', 'Fy', 'Fz'};
+G_ms.OutputName = {'x9', 'y9', 'z9', ...
+                   'x10', 'y10', 'z10', ...
+                   'x11', 'y11', 'z11', ...
+                   'x12', 'y12', 'z12'};
+
+
+
+
+ +
+

2.2 Plot Results

+
+
+
figure;
+hold on;
+plot(freqs, abs(squeeze(freqresp(G_ms('x9', 'Fx'), freqs, 'Hz'))));
+set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log');
+ylabel('Amplitude [m/N]');
+hold off;
+
+
+
+
+ +
+

2.3 Compare with measurements

+
+
+
load('../meas/modal-analysis/mat/frf_coh_matrices.mat', 'FRFs', 'COHs', 'freqs');
+
+
+ +
+
dirs = {'x', 'y', 'z'};
+
+n_acc = 9;
+n_dir = 1; % x, y, z
+n_exc = 1; % x, y, z
+
+figure;
+hold on;
+plot(freqs, abs(squeeze(FRFs(3*(n_acc-1) + n_dir, n_exc, :)))./((2*pi*freqs).^2)');
+plot(freqs, abs(squeeze(freqresp(G_ms([dirs{n_dir}, num2str(n_acc)], ['F', dirs{n_dir}]), freqs, 'Hz'))));
+set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log');
+ylabel('Amplitude [m/N]');
+hold off;
+
+
+
+
+
+ +
+

3 Compare with measurements at the CoM of each element

+
+
+
+

3.1 Init

+
+
+
initializeGround();
+initializeGranite();
+initializeTy();
+initializeRy();
+initializeRz();
+initializeMicroHexapod();
+initializeAxisc();
+
+
+
+
+ +
+

3.2 TODO Center of Mass of each solid body

+
+
    +
  • [ ] Verify that this is coherent with the simscape and with the measurements
  • +
+ + + + + +++ ++ ++ ++ ++ ++ ++ + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + +
 granite botgranite toptyryrzhexa
X [mm]4552000-4
Y [mm]14425814-506
Z [mm]-1251-778-600-628-580-319
+ +
+
open('identification/matlab/sim_micro_station_modal_analysis_com.slx')
+
+
+
+
+ +
+

3.3 Simscape Model

+
+
+
%% Options for Linearized
+options = linearizeOptions;
+options.SampleTime = 0;
+
+%% Name of the Simulink File
+mdl = 'sim_micro_station_modal_analysis_com';
+
+
+ +
+
%% Micro-Hexapod
+% Input/Output definition
+io(1) = linio([mdl, '/Micro-Station/F_hammer'],1,'openinput');
+io(2) = linio([mdl, '/Micro-Station/acc_gtop'],1,'output');
+io(3) = linio([mdl, '/Micro-Station/acc_ty'],1,'output');
+io(4) = linio([mdl, '/Micro-Station/acc_ry'],1,'output');
+io(5) = linio([mdl, '/Micro-Station/acc_rz'],1,'output');
+io(6) = linio([mdl, '/Micro-Station/acc_hexa'],1,'output');
+
+
+ +
+
% Run the linearization
+G_ms = linearize(mdl, io, 0);
+
+% Input/Output names
+G_ms.InputName  = {'Fx', 'Fy', 'Fz'};
+G_ms.OutputName = {'gtop_x', 'gtop_y', 'gtop_z', 'gtop_rx', 'gtop_ry', 'gtop_rz', ...
+                   'ty_x', 'ty_y', 'ty_z', 'ty_rx', 'ty_ry', 'ty_rz', ...
+                   'ry_x', 'ry_y', 'ry_z', 'ry_rx', 'ry_ry', 'ry_rz', ...
+                   'rz_x', 'rz_y', 'rz_z', 'rz_rx', 'rz_ry', 'rz_rz', ...
+                   'hexa_x', 'hexa_y', 'hexa_z', 'hexa_rx', 'hexa_ry', 'hexa_rz'};
+
+
+
+
+ +
+

3.4 Compare with measurements

+
+
+
load('../meas/modal-analysis/mat/frf_coh_matrices.mat', 'freqs');
+load('../meas/modal-analysis/mat/frf_com.mat', 'FRFs_CoM');
+
+
+ +
+
dirs = {'x', 'y', 'z', 'rx', 'ry', 'rz'};
+stages = {'gbot', 'gtop', 'ty', 'ry', 'rz', 'hexa'}
+
+n_stg = 2;
+n_dir = 5; % x, y, z, Rx, Ry, Rz
+n_exc = 2; % x, y, z
+
+f = logspace(0, 3, 1000);
+
+figure;
+hold on;
+plot(freqs, abs(squeeze(FRFs_CoM(6*(n_stg-1) + n_dir, n_exc, :)))./((2*pi*freqs).^2)');
+plot(f, abs(squeeze(freqresp(G_ms([stages{n_stg}, '_', dirs{n_dir}], ['F', dirs{n_exc}]), f, 'Hz'))));
+set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log');
+ylabel('Amplitude [m/N]');
+hold off;
+xlim([1, 200]);
+
+
+ +
+
dirs = {'x', 'y', 'z', 'rx', 'ry', 'rz'};
+stages = {'gtop', 'ty', 'ry', 'rz', 'hexa'}
+
+f = logspace(1, 3, 1000);
+
+figure;
+for n_stg = 1:2
+  for n_dir = 1:3
+    subplot(3, 2, (n_dir-1)*2 + n_stg);
+    title(['F ', dirs{n_dir}, ' to ', stages{n_stg}, ' ', dirs{n_dir}]);
+    hold on;
+    plot(freqs, abs(squeeze(FRFs_CoM(6*(n_stg) + n_dir, n_dir, :)))./((2*pi*freqs).^2)');
+    plot(f, abs(squeeze(freqresp(G_ms([stages{n_stg}, '_', dirs{n_dir}], ['F', dirs{n_dir}]), f, 'Hz'))));
+    set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log');
+    ylabel('Amplitude [m/N]');
+    if n_dir == 3
+      xlabel('Frequency [Hz]');
+    end
+    hold off;
+    xlim([10, 1000]);
+    ylim([1e-12, 1e-6]);
+  end
+end
+
+
+ + +
+

identification_comp_bot_stages.png +

+

Figure 1: caption (png, pdf)

+
+ + +
+
dirs = {'x', 'y', 'z', 'rx', 'ry', 'rz'};
+stages = {'ry', 'rz', 'hexa'}
+
+f = logspace(1, 3, 1000);
+
+figure;
+for n_stg = 1:2
+  for n_dir = 1:3
+    subplot(3, 2, (n_dir-1)*2 + n_stg);
+    title(['F ', dirs{n_dir}, ' to ', stages{n_stg}, ' ', dirs{n_dir}]);
+    hold on;
+    plot(freqs, abs(squeeze(FRFs_CoM(6*(n_stg+2) + n_dir, n_dir, :)))./((2*pi*freqs).^2)');
+    plot(f, abs(squeeze(freqresp(G_ms([stages{n_stg}, '_', dirs{n_dir}], ['F', dirs{n_dir}]), f, 'Hz'))));
+    set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log');
+    ylabel('Amplitude [m/N]');
+    if n_dir == 3
+      xlabel('Frequency [Hz]');
+    end
+    hold off;
+    xlim([10, 1000]);
+    ylim([1e-12, 1e-6]);
+  end
+end
+
+
+ + +
+

identification_comp_mid_stages.png +

+

Figure 2: caption (png, pdf)

+
+ + +
+
dirs = {'x', 'y', 'z', 'rx', 'ry', 'rz'};
+stages = {'hexa'}
+
+f = logspace(1, 3, 1000);
+
+figure;
+for n_stg = 1
+  for n_dir = 1:3
+    subplot(3, 1, (n_dir-1)*2 + n_stg);
+    title(['F ', dirs{n_dir}, ' to ', stages{n_stg}, ' ', dirs{n_dir}]);
+    hold on;
+    plot(freqs, abs(squeeze(FRFs_CoM(6*(n_stg+4) + n_dir, n_dir, :)))./((2*pi*freqs).^2)');
+    plot(f, abs(squeeze(freqresp(G_ms([stages{n_stg}, '_', dirs{n_dir}], ['F', dirs{n_dir}]), f, 'Hz'))));
+    set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log');
+    ylabel('Amplitude [m/N]');
+    if n_dir == 3
+      xlabel('Frequency [Hz]');
+    end
+    hold off;
+    xlim([10, 1000]);
+    ylim([1e-12, 1e-6]);
+  end
+end
+
+
+ + +
+

identification_comp_top_stages.png +

+

Figure 3: caption (png, pdf)

+
+
+
+
+ +
+

4 Other analysis

+
+
+
+

4.1 Plot the obtained transfer functions

+
+
+

4.2 Compare with the modal measurements

+
+
+

4.3 Modal Identification of the micro station

-
-

4 Modal Identification of the micro station

Author: Dehaeze Thomas

-

Created: 2019-10-08 mar. 11:13

+

Created: 2019-12-12 jeu. 13:54

Validate

diff --git a/identification/index.org b/identification/index.org index 3f5a0ac..69ab46d 100644 --- a/identification/index.org +++ b/identification/index.org @@ -176,12 +176,12 @@ io(5) = linio([mdl, '/Micro-Station/acc12'],1,'output'); ** Plot Results #+begin_src matlab -figure; -hold on; -plot(freqs, abs(squeeze(freqresp(G_ms('x9', 'Fx'), freqs, 'Hz')))); -set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); -ylabel('Amplitude [m/N]'); -hold off; + figure; + hold on; + plot(freqs, abs(squeeze(freqresp(G_ms('x9', 'Fx'), freqs, 'Hz')))); + set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); + ylabel('Amplitude [m/N]'); + hold off; #+end_src ** Compare with measurements @@ -206,6 +206,9 @@ hold off; #+end_src * Compare with measurements at the CoM of each element +** Introduction :ignore: +[[file:../../meas/modal-analysis/index.org][here]] + ** Matlab Init :noexport:ignore: #+begin_src matlab :tangle no :exports none :results silent :noweb yes :var current_dir=(file-name-directory buffer-file-name) <> @@ -219,6 +222,58 @@ hold off; simulinkproject('../'); #+end_src +** Prepare the Simulation +We load the configuration. +#+begin_src matlab + load('mat/conf_simscape.mat'); +#+end_src + +We set a small =StopTime=. +#+begin_src matlab + set_param(conf_simscape, 'StopTime', '0.5'); +#+end_src + +We initialize all the stages. +#+begin_src matlab + initializeGround(); + initializeGranite(); + initializeTy(); + initializeRy(); + initializeRz(); + initializeMicroHexapod(); + initializeAxisc(); + initializeMirror(); + initializeNanoHexapod(struct('actuator', 'piezo')); + initializeSample(struct('mass', 50)); +#+end_src + +#+begin_src matlab + open('identification/matlab/sim_micro_station_com.slx') +#+end_src + +** Estimate the position of the CoM of each solid +#+begin_src matlab + sim('sim_micro_station_com') +#+end_src + +#+begin_src matlab :exports results :results value table replace :tangle no :post addhdr(*this*) + stages_com = 1e3*[granite_bot_com.Data(end, :) ; + granite_top_com.Data(end, :) ; + ty_com.Data(end, :) ; + ry_com.Data(end, :) ; + rz_com.Data(end, :) ; + hexa_com.Data(end, :) ]'; + + data2orgtable(stages_com, {'X [mm]', 'Y [mm]', 'Z [mm]'}, {'granite bot', 'granite top', 'ty', 'ry', 'rz', 'hexa'}, ' %.1f '); +#+end_src + +#+RESULTS: +| | granite bot | granite top | ty | ry | rz | hexa | +|--------+-------------+-------------+--------+--------+--------+--------| +| X [mm] | -52.4 | -51.7 | -0.9 | -0.1 | 0.0 | -0.0 | +| Y [mm] | -190.4 | -263.2 | -0.7 | 5.2 | -0.0 | 0.1 | +| Z [mm] | -1200.0 | -777.1 | -598.9 | -627.7 | -643.2 | -317.1 | + ** Init #+begin_src matlab :results none initializeGround(); diff --git a/identification/matlab/sim_micro_station_modal_analysis.slx b/identification/matlab/sim_micro_station_modal_analysis.slx index 0814fcf6e6f4d9adb60877e5be901eeca4603da1..69a181f72ec974001df59f3d2a3048b6e22200f8 100644 GIT binary patch delta 31552 zcmZs?V{{-*u=pKpwAt9+*qdzZY;4=M?aaouZQHgswr$(~=ehUGd(V02oI2gpQ(b5J 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=project_startup.m= s 'CacheFolder', myCacheFolder,... 'CodeGenFolder', myCodeFolder,... 'createDir', true); + + %% Load the Simscape Configuration + load('mat/conf_simscape.mat'); #+end_src When the project closes, it runs the =project_shutdown.m= script defined below. diff --git a/src/project_startup.m b/src/project_startup.m index f7204f9..0cca35e 100644 --- a/src/project_startup.m +++ b/src/project_startup.m @@ -13,3 +13,6 @@ Simulink.fileGenControl('set',... 'CacheFolder', myCacheFolder,... 'CodeGenFolder', myCodeFolder,... 'createDir', true); + +%% Load the Simscape Configuration +load('mat/conf_simscape.mat');