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Sensors</a> <ul> <li><a href="#org0f9067d">1.1. Accelerometers</a> <ul> <li><a href="#org50d4ba8">1.1.1. Wireless Accelerometers</a></li> <li><a href="#org134088a">1.1.2. Suppliers</a></li> </ul> </li> <li><a href="#org8ec4751">1.2. Geophones</a> <ul> <li><a href="#org8e6d70a">1.2.1. Suppliers</a></li> </ul> </li> <li><a href="#orgf507ccd">1.3. Force Sensors</a></li> <li><a href="#orgee047f1">1.4. Interferometers</a> <ul> <li><a href="#org0f1d0d2">1.4.1. Suppliers</a></li> </ul> </li> <li><a href="#org42be721">1.5. Bibliography</a></li> </ul> </li> <li><a href="#org1842230">2. Actuators</a> <ul> <li><a href="#orgf8ebfb9">2.1. Piezoelectric</a> <ul> <li><a href="#org9f1f9aa">2.1.1. Suppliers</a></li> </ul> </li> <li><a href="#org28a0a09">2.2. Voice Coil</a> <ul> <li><a href="#org1cd9e7a">2.2.1. Suppliers</a></li> </ul> </li> </ul> </li> <li><a href="#orgff8ace1">3. Positioning Stages</a></li> <li><a href="#orga87a28b">4. Amplifiers</a> <ul> <li><a href="#org5e80f3f">4.1. Current Amplifiers</a></li> <li><a href="#org8a52f21">4.2. Voltage Amplifiers</a></li> </ul> </li> <li><a href="#org9fd690a">5. ESRF Equipment</a> <ul> <li><a href="#orgeeb5ae9">5.1. Geophones</a> <ul> <li><a href="#orga599ac3">5.1.1. L-28LB</a></li> <li><a href="#org49a7bec">5.1.2. L-4C</a></li> </ul> </li> <li><a href="#org97faad3">5.2. Accelerometers</a> <ul> <li><a href="#orgfcc2631">5.2.1. Pieozoelectric acc. 356b18 - 3 axis</a></li> <li><a href="#org6f5fe88">5.2.2. Ceramic acc. 393B05 - 1 axis</a></li> </ul> </li> </ul> </li> </ul> </div> </div> <p> <a href="../index.html">Back to main page</a>. </p> <div id="outline-container-orgdc1fb77" class="outline-2"> <h2 id="orgdc1fb77"><span class="section-number-2">1</span> Sensors</h2> <div class="outline-text-2" id="text-1"> </div> <div id="outline-container-org0f9067d" class="outline-3"> <h3 id="org0f9067d"><span class="section-number-3">1.1</span> Accelerometers</h3> <div class="outline-text-3" id="text-1-1"> </div> <div id="outline-container-org50d4ba8" class="outline-4"> <h4 id="org50d4ba8"><span class="section-number-4">1.1.1</span> Wireless Accelerometers</h4> <div class="outline-text-4" id="text-1-1-1"> <ul class="org-ul"> <li><a href="https://micromega-dynamics.com/products/recovib/miniature-vibration-recorder/">https://micromega-dynamics.com/products/recovib/miniature-vibration-recorder/</a></li> </ul> </div> </div> <div id="outline-container-org134088a" class="outline-4"> <h4 id="org134088a"><span class="section-number-4">1.1.2</span> Suppliers</h4> <div class="outline-text-4" id="text-1-1-2"> <ul class="org-ul"> <li><a href="https://micromega-dynamics.com/products/">https://micromega-dynamics.com/products/</a></li> </ul> </div> </div> </div> <div id="outline-container-org8ec4751" class="outline-3"> <h3 id="org8ec4751"><span class="section-number-3">1.2</span> Geophones</h3> <div class="outline-text-3" id="text-1-2"> </div> <div id="outline-container-org8e6d70a" class="outline-4"> <h4 id="org8e6d70a"><span class="section-number-4">1.2.1</span> Suppliers</h4> <div class="outline-text-4" id="text-1-2-1"> <ul class="org-ul"> <li><a href="http://www.sercel.com/products/Pages/seismometers.aspx">http://www.sercel.com/products/Pages/seismometers.aspx</a></li> </ul> </div> </div> </div> <div id="outline-container-orgf507ccd" class="outline-3"> <h3 id="orgf507ccd"><span class="section-number-3">1.3</span> Force Sensors</h3> </div> <div id="outline-container-orgee047f1" class="outline-3"> <h3 id="orgee047f1"><span class="section-number-3">1.4</span> Interferometers</h3> <div class="outline-text-3" id="text-1-4"> </div> <div id="outline-container-org0f1d0d2" class="outline-4"> <h4 id="org0f1d0d2"><span class="section-number-4">1.4.1</span> Suppliers</h4> <div class="outline-text-4" id="text-1-4-1"> <ul class="org-ul"> <li><a href="http://www.attocube.com/">http://www.attocube.com/</a></li> </ul> </div> </div> </div> <div id="outline-container-org42be721" class="outline-3"> <h3 id="org42be721"><span class="section-number-3">1.5</span> Bibliography</h3> <div class="outline-text-3" id="text-1-5"> <p> [<a href="#collette12_compar">collette12_compar</a>,<a href="#collette12_review">collette12_review</a>,<a href="#fleming13_review_nanom_resol_posit_sensor">fleming13_review_nanom_resol_posit_sensor</a>]</p> </div> </div> </div> <div id="outline-container-org1842230" class="outline-2"> <h2 id="org1842230"><span class="section-number-2">2</span> Actuators</h2> <div class="outline-text-2" id="text-2"> </div> <div id="outline-container-orgf8ebfb9" class="outline-3"> <h3 id="orgf8ebfb9"><span class="section-number-3">2.1</span> Piezoelectric</h3> <div class="outline-text-3" id="text-2-1"> </div> <div id="outline-container-org9f1f9aa" class="outline-4"> <h4 id="org9f1f9aa"><span class="section-number-4">2.1.1</span> Suppliers</h4> <div class="outline-text-4" id="text-2-1-1"> <ul class="org-ul"> <li><a href="http://www.cedrat-technologies.com/">http://www.cedrat-technologies.com/</a></li> <li><a href="https://www.physikinstrumente.com/en/">https://www.physikinstrumente.com/en/</a></li> </ul> </div> </div> </div> <div id="outline-container-org28a0a09" class="outline-3"> <h3 id="org28a0a09"><span class="section-number-3">2.2</span> Voice Coil</h3> <div class="outline-text-3" id="text-2-2"> </div> <div id="outline-container-org1cd9e7a" class="outline-4"> <h4 id="org1cd9e7a"><span class="section-number-4">2.2.1</span> Suppliers</h4> <div class="outline-text-4" id="text-2-2-1"> <ul class="org-ul"> <li><a href="https://www.geeplus.com/">https://www.geeplus.com/</a></li> <li><a href="https://www.maccon.de/en.html">https://www.maccon.de/en.html</a></li> <li><a href="https://www.tds-pp.com/en/">https://www.tds-pp.com/en/</a></li> <li><a href="https://www.h2wtech.com/">https://www.h2wtech.com/</a></li> <li><a href="http://www.pbasystems.com.sg/">http://www.pbasystems.com.sg/</a></li> <li><a href="https://www.celeramotion.com/">https://www.celeramotion.com/</a></li> <li><a href="http://www.beikimco.com/">http://www.beikimco.com/</a></li> <li><a href="https://www.electromate.com/">https://www.electromate.com/</a></li> <li><a href="https://www.magneticinnovations.com/">https://www.magneticinnovations.com/</a></li> </ul> </div> </div> </div> </div> <div id="outline-container-orgff8ace1" class="outline-2"> <h2 id="orgff8ace1"><span class="section-number-2">3</span> Positioning Stages</h2> <div class="outline-text-2" id="text-3"> <ul class="org-ul"> <li><a href="https://www.aerotech.com/">https://www.aerotech.com/</a></li> </ul> </div> </div> <div id="outline-container-orga87a28b" class="outline-2"> <h2 id="orga87a28b"><span class="section-number-2">4</span> Amplifiers</h2> <div class="outline-text-2" id="text-4"> </div> <div id="outline-container-org5e80f3f" class="outline-3"> <h3 id="org5e80f3f"><span class="section-number-3">4.1</span> Current Amplifiers</h3> </div> <div id="outline-container-org8a52f21" class="outline-3"> <h3 id="org8a52f21"><span class="section-number-3">4.2</span> Voltage Amplifiers</h3> </div> </div> <div id="outline-container-org9fd690a" class="outline-2"> <h2 id="org9fd690a"><span class="section-number-2">5</span> ESRF Equipment</h2> <div class="outline-text-2" id="text-5"> </div> <div id="outline-container-orgeeb5ae9" class="outline-3"> <h3 id="orgeeb5ae9"><span class="section-number-3">5.1</span> Geophones</h3> <div class="outline-text-3" id="text-5-1"> </div> <div id="outline-container-orga599ac3" class="outline-4"> <h4 id="orga599ac3"><span class="section-number-4">5.1.1</span> L-28LB</h4> <div class="outline-text-4" id="text-5-1-1"> <ul class="org-ul"> <li><a href="http://www.sercel.com/products/Pages/seismometers.aspx">http://www.sercel.com/products/Pages/seismometers.aspx</a></li> <li><a href="files/Geophones_specifications_Sercel_EN.pdf">Data Sheet</a>.</li> </ul> <div id="orgc5277fc" class="figure"> <p><img src="./figs/L28LB.png" alt="L28LB.png" /> </p> <p><span class="figure-number">Figure 1: </span>Picture of the L-28LB Geophone</p> </div> <table id="org54ca92c" border="2" cellspacing="0" cellpadding="6" rules="groups" frame="hsides"> <caption class="t-above"><span class="table-number">Table 1:</span> L-28LB Parameters</caption> <colgroup> <col class="org-left" /> <col class="org-right" /> </colgroup> <tbody> <tr> <td class="org-left">Natural Frequency [Hz]</td> <td class="org-right">4.5</td> </tr> <tr> <td class="org-left">Weight [g]</td> <td class="org-right">140</td> </tr> <tr> <td class="org-left">Sensitivity [V/(m/s)]</td> <td class="org-right">31.3</td> </tr> </tbody> </table> <p> We define the parameters of the geophone and we plot its bode plot (figure <a href="#orgdc200c1">2</a>). </p> <div class="org-src-container"> <pre class="src src-matlab">w0 = <span style="color: #BFEBBF;">4</span>.<span style="color: #BFEBBF;">5</span><span style="color: #7CB8BB;">*</span><span style="color: #BFEBBF;">2</span><span style="color: #7CB8BB;">*</span><span style="color: #BFEBBF;">pi</span>; <span style="color: #7F9F7F;">% [rad/s]</span> ksi = <span style="color: #BFEBBF;">0</span>.<span style="color: #BFEBBF;">38</span>; G0 = <span style="color: #BFEBBF;">31</span>.<span style="color: #BFEBBF;">3</span>; <span style="color: #7F9F7F;">% [V/(m/s)]</span> G = G0<span style="color: #7CB8BB;">*</span><span style="color: #DCDCCC;">(</span>s<span style="color: #7CB8BB;">/</span>w0<span style="color: #DCDCCC;">)</span><span style="color: #7CB8BB;">^</span><span style="color: #BFEBBF;">2</span><span style="color: #7CB8BB;">/</span><span style="color: #DCDCCC;">(</span><span style="color: #BFEBBF;">(</span>s<span style="color: #7CB8BB;">/</span>w0<span style="color: #BFEBBF;">)</span><span style="color: #7CB8BB;">^</span><span style="color: #BFEBBF;">2</span> <span style="color: #7CB8BB;">+</span> <span style="color: #BFEBBF;">2</span><span style="color: #7CB8BB;">*</span>ksi<span style="color: #7CB8BB;">*</span><span style="color: #BFEBBF;">(</span>s<span style="color: #7CB8BB;">/</span>w0<span style="color: #BFEBBF;">)</span> <span style="color: #7CB8BB;">+</span> <span style="color: #BFEBBF;">1</span><span style="color: #DCDCCC;">)</span>; </pre> </div> <div id="orgdc200c1" class="figure"> <p><img src="figs/L28LB_bode_plot.png" alt="L28LB_bode_plot.png" /> </p> <p><span class="figure-number">Figure 2: </span>Bode plot of the L-28LB Geophone</p> </div> </div> </div> <div id="outline-container-org49a7bec" class="outline-4"> <h4 id="org49a7bec"><span class="section-number-4">5.1.2</span> L-4C</h4> <div class="outline-text-4" id="text-5-1-2"> <ul class="org-ul"> <li><a href="http://www.sercel.com/products/Pages/seismometers.aspx">http://www.sercel.com/products/Pages/seismometers.aspx</a></li> <li><a href="files/Geophones_specifications_Sercel_EN.pdf">Data Sheet</a>.</li> </ul> <div id="org2d4a6cd" class="figure"> <p><img src="./figs/L4C.png" alt="L4C.png" /> </p> <p><span class="figure-number">Figure 3: </span>Picture of the L-4C Geophone</p> </div> <table id="org12d1b71" border="2" cellspacing="0" cellpadding="6" rules="groups" frame="hsides"> <caption class="t-above"><span class="table-number">Table 2:</span> L4C Parameters</caption> <colgroup> <col class="org-left" /> <col class="org-right" /> </colgroup> <tbody> <tr> <td class="org-left">Natural Frequency [Hz]</td> <td class="org-right">1</td> </tr> <tr> <td class="org-left">Weight [g]</td> <td class="org-right">2150</td> </tr> <tr> <td class="org-left">Sensitivity [V/(m/s)]</td> <td class="org-right">276.8</td> </tr> </tbody> </table> <p> The transfer function from the velocity and the measured voltage is defined below. </p> <p> Its bode plot is shown on figure <a href="#orga651aed">4</a>. </p> <div class="org-src-container"> <pre class="src src-matlab">w0 = <span style="color: #BFEBBF;">2</span><span style="color: #7CB8BB;">*</span><span style="color: #BFEBBF;">pi</span>; <span style="color: #7F9F7F;">% [rad/s]</span> ksi = <span style="color: #BFEBBF;">0</span>.<span style="color: #BFEBBF;">28</span>; G0 = <span style="color: #BFEBBF;">276</span>.<span style="color: #BFEBBF;">8</span>; <span style="color: #7F9F7F;">% [V/(m/s)]</span> G = G0<span style="color: #7CB8BB;">*</span><span style="color: #DCDCCC;">(</span>s<span style="color: #7CB8BB;">/</span>w0<span style="color: #DCDCCC;">)</span><span style="color: #7CB8BB;">^</span><span style="color: #BFEBBF;">2</span><span style="color: #7CB8BB;">/</span><span style="color: #DCDCCC;">(</span><span style="color: #BFEBBF;">(</span>s<span style="color: #7CB8BB;">/</span>w0<span style="color: #BFEBBF;">)</span><span style="color: #7CB8BB;">^</span><span style="color: #BFEBBF;">2</span> <span style="color: #7CB8BB;">+</span> <span style="color: #BFEBBF;">2</span><span style="color: #7CB8BB;">*</span>ksi<span style="color: #7CB8BB;">*</span><span style="color: #BFEBBF;">(</span>s<span style="color: #7CB8BB;">/</span>w0<span style="color: #BFEBBF;">)</span> <span style="color: #7CB8BB;">+</span> <span style="color: #BFEBBF;">1</span><span style="color: #DCDCCC;">)</span>; </pre> </div> <div id="orga651aed" class="figure"> <p><img src="figs/L4C_bode_plot.png" alt="L4C_bode_plot.png" /> </p> <p><span class="figure-number">Figure 4: </span>Bode plot of the L4C Geophone</p> </div> </div> </div> </div> <div id="outline-container-org97faad3" class="outline-3"> <h3 id="org97faad3"><span class="section-number-3">5.2</span> Accelerometers</h3> <div class="outline-text-3" id="text-5-2"> </div> <div id="outline-container-orgfcc2631" class="outline-4"> <h4 id="orgfcc2631"><span class="section-number-4">5.2.1</span> Pieozoelectric acc. 356b18 - 3 axis</h4> <div class="outline-text-4" id="text-5-2-1"> <ul class="org-ul"> <li><a href="https://www.pcbpiezotronics.fr/produit/accelerometres/356b18/">https://www.pcbpiezotronics.fr/produit/accelerometres/356b18/</a></li> <li><a href="files/356B18_G.pdf">Data Sheet</a>.</li> </ul> <div id="org2083433" class="figure"> <p><img src="./figs/356b18.jpg" alt="356b18.jpg" /> </p> <p><span class="figure-number">Figure 5: </span>Pieozoelectric acc. 356b18 - 3 axis</p> </div> <table id="org1eeb30f" border="2" cellspacing="0" cellpadding="6" rules="groups" frame="hsides"> <caption class="t-above"><span class="table-number">Table 3:</span> 356b18 Parameters</caption> <colgroup> <col class="org-left" /> <col class="org-left" /> </colgroup> <tbody> <tr> <td class="org-left">Sensitivity</td> <td class="org-left">0.102 \(V/(m/s^2)\)</td> </tr> <tr> <td class="org-left">Measurement Range</td> <td class="org-left">4.9 \(m/s^2\) pk</td> </tr> <tr> <td class="org-left">Frequency Range</td> <td class="org-left">0.5 to 3000 Hz</td> </tr> <tr> <td class="org-left">resonant frequency</td> <td class="org-left">> 20000 hz</td> </tr> <tr> <td class="org-left">broadband resolution</td> <td class="org-left">0.0005 \(m/s^2\) rms</td> </tr> </tbody> </table> </div> </div> <div id="outline-container-org6f5fe88" class="outline-4"> <h4 id="org6f5fe88"><span class="section-number-4">5.2.2</span> Ceramic acc. 393B05 - 1 axis</h4> <div class="outline-text-4" id="text-5-2-2"> <ul class="org-ul"> <li><a href="http://www.pcb.com/products.aspx?m=393B05">http://www.pcb.com/products.aspx?m=393B05</a></li> <li><a href="files/393B05_K.pdf">Data Sheet</a>.</li> </ul> <div id="orge0ccf06" class="figure"> <p><img src="./figs/393b05.jpg" alt="393b05.jpg" /> </p> <p><span class="figure-number">Figure 6: </span>Ceramic acc. 393B05 - 1 axis</p> </div> <table id="org39951fd" border="2" cellspacing="0" cellpadding="6" rules="groups" frame="hsides"> <caption class="t-above"><span class="table-number">Table 4:</span> 393B05 Parameters</caption> <colgroup> <col class="org-left" /> <col class="org-left" /> </colgroup> <tbody> <tr> <td class="org-left">Sensitivity (±10 %)</td> <td class="org-left">1.02 \(V/(m/s^2)\)</td> </tr> <tr> <td class="org-left">Measurement Range</td> <td class="org-left">4.9 \(m/s^2\) pk</td> </tr> <tr> <td class="org-left">Frequency Range (±5 %)</td> <td class="org-left">0.7 to 450 Hz</td> </tr> <tr> <td class="org-left">resonant frequency</td> <td class="org-left">> 2500 hz</td> </tr> <tr> <td class="org-left">broadband resolution</td> <td class="org-left">0.00004 \(m/s^2\) rms</td> </tr> </tbody> </table> </div> </div> </div> </div> </div> <div id="postamble" class="status"> <p class="author">Author: Thomas Dehaeze</p> <p class="date">Created: 2019-03-19 mar. 16:44</p> <p class="validation"><a href="http://validator.w3.org/check?uri=referer">Validate</a></p> </div> </body> </html>