Measurement of the ID31 Micro-Station
Table of Contents
1 Measurements of the dynamics of the station
1.1 Measurement 1
1.1.1 Notes
| Date | 2017-11-17 |
| Sensors | Accelerometers |
| Excitation | Instrumented Hammer |
| Location | Laboratory |
Dynamics of the station is evaluated using instrumented hammer and accelerometers fixed on each stage.
1.1.2 Goal
- Obtain a first estimation of resonance frequencies
1.1.3 Results
Resonances have been identified at 45Hz and 75Hz. However, the quality of the measurements are bad at low frequency. New measurements should be done with Geophones.
1.2 Measurement 2
1.2.1 Notes
| Date | 2018-01-12 |
| Sensors | Geophones |
| Excitation | Instrumented Hammer |
| Location | Laboratory |
| Notes | Unglued Granite |
1.2.2 Goal
Obtain better coherence at low frequency.
1.2.3 Results
Resonances at 42Hz, 70Hz and 125Hz have been identified. The coherence is much better than when using accelerometers.
1.3 Measurement 3
1.3.1 Notes
| Date | 2018-10-12 |
| Sensors | Geophones |
| Excitation | Instrumented Hammer |
| Location | Experimental Hutch |
1.3.2 Goal
The station is now installed on the experimental hutch with a glued granite (final location). The station is identified again.
1.3.3 Results
2 Measurements of perturbations
2.1 Noise coming from the control loop of each stage
2.1.1 Notes
| Date | 2018-10-15 |
| Sensors | Geophones |
| Location | Experimental Hutch |
2.1.2 Goal
The objective is to estimate how much perturbation is injected in the system by the control systems of each stages of the micro station.
Geophones are located on the structure. Each stage is turned on and off. The signals of the geophones are then compared when the stage is on and off.
2.1.3 Results
- The translation stage seems to have effect on the tilt stage at 20Hz.
- The Tilt stage and the Hexapod control systems have no effect on the motion of the other stages.
- The spindle stage control system seems to induce a motion of the Hexapod on the Z direction around 20Hz.
2.2 Static guiding error estimation
2.2.1 Notes
| Date | 2019-01-09 |
| Sensors | Interferometer |
| Location | Experimental Hutch |
Each stage is statically moved of all its stroke on after the other. A metrology element is located at the sample position and its motion is measured in translations and rotations. For each small displacement, the stage is stopped and the motion of the sample is recorded and averaged.
2.2.2 Goal
The goal is to estimate the guiding errors of each stage.
2.2.3 Results
2.3 Ground motion measurements
2.3.1 Notes
| Date | 2014-10 |
| Sensors | Geophone |
| Location | ID31 Floor |
2.3.2 Goal
The objective is to obtain the Power Spectral Density of the ground motion at the ID31 floor.
2.3.3 Results
2.4 Spindle Measurements
2.4.1 Notes
| Date | 2017-04-25 |
| Location | PEL Lab |
2.4.2 Goal
The goal is to estimate all the error motions induced by the Spindle