%% Clear Workspace and Close figures clear; close all; clc; %% Intialize Laplace variable s = zpk('s'); %% Path for functions, data and scripts addpath('./mat/'); % Path for data %% Colors for the figures colors = colororder; %% Frequency Vector [Hz] freqs = logspace(0, 3, 1000); %% Load the PSD of disturbances load('uniaxial_disturbance_psd.mat', 'f', 'psd_ft', 'psd_xf'); %% Load Plants Dynamics load('uniaxial_plants.mat', 'G_vc_light', 'G_md_light', 'G_pz_light', ... 'G_vc_mid', 'G_md_mid', 'G_pz_mid', ... 'G_vc_heavy', 'G_md_heavy', 'G_pz_heavy'); %% Sensitivity to disturbances for three different nano-hexpod stiffnesses figure; hold on; plot(freqs, abs(squeeze(freqresp(G_vc_light('d', 'fs'), freqs, 'Hz')))); plot(freqs, abs(squeeze(freqresp(G_md_light('d', 'fs'), freqs, 'Hz')))); plot(freqs, abs(squeeze(freqresp(G_pz_light('d', 'fs'), freqs, 'Hz')))); hold off; set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); ylabel('Amplitude $d/f_{s}$ [m/N]'); xlabel('Frequency [Hz]'); xticks([1e0, 1e1, 1e2]); xlim([1, 500]); %% Sensitivity to disturbances for three different nano-hexpod stiffnesses figure; hold on; plot(freqs, abs(squeeze(freqresp(G_vc_light('d', 'ft'), freqs, 'Hz')))); plot(freqs, abs(squeeze(freqresp(G_md_light('d', 'ft'), freqs, 'Hz')))); plot(freqs, abs(squeeze(freqresp(G_pz_light('d', 'ft'), freqs, 'Hz')))); hold off; set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); ylabel('Amplitude $d/f_{t}$ [m/N]'); xlabel('Frequency [Hz]'); xticks([1e0, 1e1, 1e2]); xlim([1, 500]); %% Sensitivity to disturbances for three different nano-hexpod stiffnesses figure; hold on; plot(freqs, abs(squeeze(freqresp(G_vc_light('d', 'xf'), freqs, 'Hz'))), 'DisplayName', '$k_n = 0.01\,N/\mu m$'); plot(freqs, abs(squeeze(freqresp(G_md_light('d', 'xf'), freqs, 'Hz'))), 'DisplayName', '$k_n = 1 \,N/\mu m$'); plot(freqs, abs(squeeze(freqresp(G_pz_light('d', 'xf'), freqs, 'Hz'))), 'DisplayName', '$k_n = 100 \,N/\mu m$'); hold off; set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); ylabel('Amplitude $d/x_{f}$ [m/m]'); xlabel('Frequency [Hz]'); xticks([1e0, 1e1, 1e2]); leg = legend('location', 'southeast', 'FontSize', 8, 'NumColumns', 1); leg.ItemTokenSize(1) = 15; xlim([1, 500]); %% Cumulative Amplitude Spectrum of the relative motion d, due to both the floor motion and the stage vibrations figure; hold on; plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_vc_light('d', 'ft'), f, 'Hz'))).^2)))), '-', 'color', colors(1,:), 'DisplayName', '$f_t$'); plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_md_light('d', 'ft'), f, 'Hz'))).^2)))), '-', 'color', colors(2,:), 'DisplayName', '$f_t$'); plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_pz_light('d', 'ft'), f, 'Hz'))).^2)))), '-', 'color', colors(3,:), 'DisplayName', '$f_t$'); plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_xf.*abs(squeeze(freqresp(G_vc_light('d', 'xf'), f, 'Hz'))).^2)))), '--', 'color', colors(1,:), 'DisplayName', '$x_f$ ($k_n = 0.01\,N/\mu m$)'); plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_xf.*abs(squeeze(freqresp(G_md_light('d', 'xf'), f, 'Hz'))).^2)))), '--', 'color', colors(2,:), 'DisplayName', '$x_f$ ($k_n = 1 \,N/\mu m$)'); plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_xf.*abs(squeeze(freqresp(G_pz_light('d', 'xf'), f, 'Hz'))).^2)))), '--', 'color', colors(3,:), 'DisplayName', '$x_f$ ($k_n = 100 \,N/\mu m$)'); hold off; set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); ylabel('CAS [m]'); xlabel('Frequency [Hz]'); leg = legend('location', 'southwest', 'FontSize', 8, 'NumColumns', 2); leg.ItemTokenSize(1) = 15; xlim([1, 500]); ylim([1e-12, 3e-6]) %% Cumulative Amplitude Spectrum of the relative motion d due to all disturbances, for two sample masses figure; hold on; plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_vc_light('d', 'ft'), f, 'Hz'))).^2 + ... psd_xf.*abs(squeeze(freqresp(G_vc_light('d', 'xf'), f, 'Hz'))).^2)))), '-', ... 'color', colors(1,:), 'DisplayName', '$m_s = 1\,kg$, $k_n = 0.01\,N/\mu m$'); plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_md_light('d', 'ft'), f, 'Hz'))).^2 + ... psd_xf.*abs(squeeze(freqresp(G_md_light('d', 'xf'), f, 'Hz'))).^2)))), '-', ... 'color', colors(2,:), 'DisplayName', '$m_s = 1\,kg$, $k_n = 1\,N/\mu m$'); plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_pz_light('d', 'ft'), f, 'Hz'))).^2 + ... psd_xf.*abs(squeeze(freqresp(G_pz_light('d', 'xf'), f, 'Hz'))).^2)))), '-', ... 'color', colors(3,:), 'DisplayName', '$m_s = 1\,kg$, $k_n = 100\,N/\mu m$'); plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_vc_heavy('d', 'ft'), f, 'Hz'))).^2 + ... psd_xf.*abs(squeeze(freqresp(G_vc_heavy('d', 'xf'), f, 'Hz'))).^2)))), '--', ... 'color', colors(1,:), 'DisplayName', '$m_s = 50\,kg$, $k_n = 0.01\,N/\mu m$'); plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_md_heavy('d', 'ft'), f, 'Hz'))).^2 + ... psd_xf.*abs(squeeze(freqresp(G_md_heavy('d', 'xf'), f, 'Hz'))).^2)))), '--', ... 'color', colors(2,:), 'DisplayName', '$m_s = 50\,kg$, $k_n = 1\,N/\mu m$'); plot(f, sqrt(flip(-cumtrapz(flip(f), flip(psd_ft.*abs(squeeze(freqresp(G_pz_heavy('d', 'ft'), f, 'Hz'))).^2 + ... psd_xf.*abs(squeeze(freqresp(G_pz_heavy('d', 'xf'), f, 'Hz'))).^2)))), '--', ... 'color', colors(3,:), 'DisplayName', '$m_s = 50\,kg$, $k_n = 100\,N/\mu m$'); plot([1, 1e3], [20e-9, 20e-9], 'k--', 'HandleVisibility', 'off'); text(4, 1e-8, '20 nm RMS', 'horizontalalignment', 'center'); hold off; set(gca, 'XScale', 'log'); set(gca, 'YScale', 'log'); ylabel('CAS [m]'); xlabel('Frequency [Hz]'); leg = legend('location', 'southwest', 'FontSize', 8, 'NumColumns', 1); leg.ItemTokenSize(1) = 15; xlim([1, 500]); ylim([1e-12, 3e-6])