+++ title = "Capacitive Sensors" author = ["Dehaeze Thomas"] draft = false category = "equipment" +++ Tags : [Position Sensors]({{< relref "position_sensors.md" >}}) ## Description of Capacitive Sensors {#description-of-capacitive-sensors} - - ## Manufacturers {#manufacturers} | Manufacturers | Country | |--------------------------------------------------------------------------------------------------------|-------------| | [Micro Sense](http://www.microsense.net/products-position-sensors.htm) | USA | | [Micro-Epsilon](https://www.micro-epsilon.com/displacement-position-sensors/capacitive-sensor/) | Germany | | [PI](https://www.physikinstrumente.com/en/technology/sensor-technologies/capacitive-sensors/) | Germany | | [Unipulse](https://www.unipulse.com/product/ps-ia/) | Japan | | [Lion-Precision](https://www.lionprecision.com/products/capacitive-sensors) | USA | | [Fogale](http://www.fogale.fr/brochures.html) | USA | | [Queensgate](https://www.nanopositioning.com/product-category/nanopositioning/nanopositioning-sensors) | UK | | [Capacitec](https://www.capacitec.com/Displacement-Sensing-Systems) | USA | | [MTIinstruments](https://vitrek.com/mti-instruments/non-contact-measurement/) | USA | | [Althen](https://www.althensensors.com/sensors/linear-position-sensors/capacitive-position-sensors/) | Netherlands | ## Comparison {#comparison} | | RMS noise | Noise Density (%/Hz^.5) | Linearity | |----------------------|---------------------|-------------------------|-----------| | Fogale MC900 | < 0.005% (10kHz) | 0.00005 | <0.2% | | micro-epsilon DL6230 | 0.005% (5kHz) | 0.00007 | 0.05% | | Lion CPL290 | 0.003% (15kHz) | 0.000025 | <0.2% | | PI | | | | ## Bibliography {#bibliography}