A survey of control issues in nanopositioning
Contents
Tags :
- Reference
- (Devasia {\it et al.}, 2007)
- Author(s)
- Devasia, S., Eleftheriou, E., & Moheimani, S. R.
- Year
- 2007
- Talks about Scanning Tunneling Microscope (STM) and Scanning Probe Microscope (SPM)
- Piezoelectric actuators: Creep, Hysteresis, Vibrations, Modeling errors
- Interesting analysis about Bandwidth-Precision-Range tradeoffs
- Control approaches for piezoelectric actuators: feedforward, Feedback, Iterative, Sensorless controls
Figure 1: Tradeoffs between bandwidth, precision and range
Bibliography
Devasia, S., Eleftheriou, E., & Moheimani, S. R., A survey of control issues in nanopositioning, IEEE Transactions on Control Systems Technology, 15(5), 802–823 (2007). ↩