Tags
Inertial Sensors

Reviews of position sensors

Relative Position Sensors

Table 1: Characteristics of relative measurement sensors collette11_review
Technology Frequency Resolution Range T Range
LVDT DC-200 Hz 10 nm rms 1-10 mm -50,100 °C
Eddy current 5 kHz 0.1-100 nm rms 0.5-55 mm -50,100 °C
Capacitive DC-100 kHz 0.05-50 nm rms 50 nm - 1 cm -40,100 °C
Interferometer 300 kHz 0.1 nm rms 10 cm -250,100 °C
Encoder DC-1 MHz 1 nm rms 7-27 mm 0,40 °C
Bragg Fibers DC-150 Hz 0.3 nm rms 3.5 cm -30,80 °C

Table 2: Summary of position sensor characteristics. The dynamic range (DNR) and resolution are approximations based on a full-scale range of \(100 \mu m\) and a first order bandwidth of \(1 kHz\) fleming13_review_nanom_resol_posit_sensor
Sensor Type Range DNR Resolution Max. BW Accuracy
Metal foil \(10-500 \mu m\) 230 ppm 23 nm 1-10 kHz 1% FSR
Piezoresistive \(1-500 \mu m\) 5 ppm 0.5 nm >100 kHz 1% FSR
Capacitive \(10 \mu m\) to \(10 mm\) 24 ppm 2.4 nm 100 kHz 0.1% FSR
Electrothermal \(10 \mu m\) to \(1 mm\) 100 ppm 10 nm 10 kHz 1% FSR
Eddy current \(100 \mu m\) to \(80 mm\) 10 ppm 1 nm 40 kHz 0.1% FSR
LVDT \(0.5-500 mm\) 10 ppm 5 nm 1 kHz 0.25% FSR
Interferometer Meters 0.5 nm >100kHz 1 ppm FSR
Encoder Meters 6 nm >100kHz 5 ppm FSR

Strain Gauge

Capacitive Sensor

Description:
Micro Sense link
Micro-Epsilon link
PI link
Unipulse link
Lion-Precision link

Inductive Sensor (Eddy Current)
Micro-Epsilon link
Lion Precision link

Inductive Sensor (LVDT)
Micro-Epsilon link
Keyence link

Interferometers
Attocube link
Zygo link
Smaract link
Qutools link
Renishaw link
Sios link
Keysight link
Table 3: Characteristics of Environmental Units
Temperature (\(\pm\ ^oC\)) Pressure (\(\pm\ hPa\)) Humidity \(\pm\% RH\) Wavelength Accuracy (\(\pm\ \text{ppm}\))
Attocube 0.1 1 2 0.5
Renishaw 0.2 1 6 1
Picoscale 0.2 2 2 1

(Yoon-Soo Jang & Seung-Woo Kim, 2017)

Figure 1: Expected precision of interferometer as a function of measured distance

Figure 1: Expected precision of interferometer as a function of measured distance

Fiber Optic Displacement Sensor
Unipulse link

Bibliography

Collette, C., Janssens, S., Mokrani, B., Fueyo-Roza, L., Artoos, K., Esposito, M., Fernandez-Carmona, P., …, Comparison of new absolute displacement sensors, In , International Conference on Noise and Vibration Engineering (ISMA) (pp. ) (2012). : . ↩

Fleming, A. J., A review of nanometer resolution position sensors: operation and performance, Sensors and Actuators A: Physical, 190(nil), 106–126 (2013). http://dx.doi.org/10.1016/j.sna.2012.10.016 ↩

Collette, C., Artoos, K., Guinchard, M., Janssens, S., Carmona Fernandez, P., & Hauviller, C., Review of sensors for low frequency seismic vibration measurement (2011). ↩

Jang, Y., & Kim, S., Compensation of the refractive index of air in laser interferometer for distance measurement: a review, International Journal of Precision Engineering and Manufacturing, 18(12), 1881–1890 (2017). http://dx.doi.org/10.1007/s12541-017-0217-y ↩