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Dynamics and Noise of a piezoelectric force sensor

An analysis the dynamics and noise of a piezoelectric force sensor is done in (Fleming, 2010) (Notes).

Bibliography

Fleming, A., Nanopositioning system with force feedback for high-performance tracking and vibration control, IEEE/ASME Transactions on Mechatronics, 15(3), 433–447 (2010). http://dx.doi.org/10.1109/tmech.2009.2028422