+++
title = "Position control in lithographic equipment"
author = ["Thomas Dehaeze"]
draft = false
+++

Tags
: [Multivariable Control]({{< relref "multivariable_control" >}}), [Positioning Stations]({{< relref "positioning_stations" >}})

Reference
: ([Butler 2011](#org79c48f7))

Author(s)
: Butler, H.

Year
: 2011


## Bibliography {#bibliography}

<a id="org79c48f7"></a>Butler, Hans. 2011. “Position Control in Lithographic Equipment.” _IEEE Control Systems_ 31 (5):28–47. <https://doi.org/10.1109/mcs.2011.941882>.