From 7ad9601cbf3ce972c5bb1652e336cc55680527e1 Mon Sep 17 00:00:00 2001 From: Thomas Dehaeze Date: Wed, 29 Apr 2020 14:55:15 +0200 Subject: [PATCH] Reworked the tables --- content/zettels/position_sensors.md | 57 ++++++++++++++--------------- 1 file changed, 28 insertions(+), 29 deletions(-) diff --git a/content/zettels/position_sensors.md b/content/zettels/position_sensors.md index 82e05ac..5442342 100644 --- a/content/zettels/position_sensors.md +++ b/content/zettels/position_sensors.md @@ -5,14 +5,14 @@ draft = false +++ Tags -: +: [Inertial Sensors]({{< relref "inertial_sensors" >}}) ## Reviews of position sensors {#reviews-of-position-sensors} - (Collette {\it et al.}, 2012) -- (Andrew Fleming, 2013) +- Fleming, A. J., A review of nanometer resolution position sensors: operation and performance (Andrew Fleming, 2013) ([Notes]({{< relref "fleming13_review_nanom_resol_posit_sensor" >}})) ## Relative Position Sensors {#relative-position-sensors} @@ -23,31 +23,31 @@ Tags Characteristics of relative measurement sensors collette11_review -| Technology | Frequency | Resolution | Range | T Range | -|----------------|----------------------------|--------------------------|--------------------------|------------------------| -| LVDT | \\(\text{DC}-200\,[Hz]\\) | \\(10\,[nm\ rms]\\) | \\(1-10\,[mm]\\) | \\(-50,100\,[^o C]\\) | -| Eddy current | \\(5\,[kHz]\\) | \\(0.1-100\,[nm\ rms]\\) | \\(0.5-55\,[mm]\\) | \\(-50,100\,[^o C]\\) | -| Capacitive | \\(\text{DC}-100\,[kHz]\\) | \\(0.05-50\,[nm\ rms]\\) | \\(50\,[nm] - 1\,[cm]\\) | \\(-40,100\,[^o C]\\) | -| Interferometer | \\(300\,[kHz]\\) | \\(0.1\,[nm\ rms]\\) | \\(10\,[cm]\\) | \\(-250,100\,[^o C]\\) | -| Encoder | \\(\text{DC}-1\,[MHz]\\) | \\(1\,[nm\ rms]\\) | \\(7-27\,[mm]\\) | \\(0,40\,[^o C]\\) | -| Bragg Fibers | \\(\text{DC}-150\,[Hz]\\) | \\(0.3\,[nm\ rms]\\) | \\(3.5\,[cm]\\) | \\(-30,80\,[^o C]\\) | +| Technology | Frequency | Resolution | Range | T Range | +|----------------|------------|----------------|--------------|-------------| +| LVDT | DC-200 Hz | 10 nm rms | 1-10 mm | -50,100 °C | +| Eddy current | 5 kHz | 0.1-100 nm rms | 0.5-55 mm | -50,100 °C | +| Capacitive | DC-100 kHz | 0.05-50 nm rms | 50 nm - 1 cm | -40,100 °C | +| Interferometer | 300 kHz | 0.1 nm rms | 10 cm | -250,100 °C | +| Encoder | DC-1 MHz | 1 nm rms | 7-27 mm | 0,40 °C | +| Bragg Fibers | DC-150 Hz | 0.3 nm rms | 3.5 cm | -30,80 °C |
Table 2: - Summary of position sensor characteristics. The dynamic range (DNR) and resolution are approximations based on a full-scale range of \(100\,\mu m\) and a first order bandwidth of \(1\,kHz\) fleming13_review_nanom_resol_posit_sensor (notes) + Summary of position sensor characteristics. The dynamic range (DNR) and resolution are approximations based on a full-scale range of \(100 \mu m\) and a first order bandwidth of \(1 kHz\) fleming13_review_nanom_resol_posit_sensor
-| Sensor Type | Range | DNR | Resolution | Max. BW | Accuracy | -|----------------|----------------------------------|---------|------------|----------|-----------| -| Metal foil | \\(10-500\,\mu m\\) | 230 ppm | 23 nm | 1-10 kHz | 1% FSR | -| Piezoresistive | \\(1-500\,\mu m\\) | 5 ppm | 0.5 nm | >100 kHz | 1% FSR | -| Capacitive | \\(10\,\mu m\\) to \\(10\,mm\\) | 24 ppm | 2.4 nm | 100 kHz | 0.1% FSR | -| Electrothermal | \\(10\,\mu m\\) to \\(1\,mm\\) | 100 ppm | 10 nm | 10 kHz | 1% FSR | -| Eddy current | \\(100\,\mu m\\) to \\(80\,mm\\) | 10 ppm | 1 nm | 40 kHz | 0.1% FSR | -| LVDT | \\(0.5-500\,mm\\) | 10 ppm | 5 nm | 1 kHz | 0.25% FSR | -| Interferometer | Meters | | 0.5 nm | >100kHz | 1 ppm FSR | -| Encoder | Meters | | 6 nm | >100kHz | 5 ppm FSR | +| Sensor Type | Range | DNR | Resolution | Max. BW | Accuracy | +|----------------|--------------------------------|---------|------------|----------|-----------| +| Metal foil | \\(10-500 \mu m\\) | 230 ppm | 23 nm | 1-10 kHz | 1% FSR | +| Piezoresistive | \\(1-500 \mu m\\) | 5 ppm | 0.5 nm | >100 kHz | 1% FSR | +| Capacitive | \\(10 \mu m\\) to \\(10 mm\\) | 24 ppm | 2.4 nm | 100 kHz | 0.1% FSR | +| Electrothermal | \\(10 \mu m\\) to \\(1 mm\\) | 100 ppm | 10 nm | 10 kHz | 1% FSR | +| Eddy current | \\(100 \mu m\\) to \\(80 mm\\) | 10 ppm | 1 nm | 40 kHz | 0.1% FSR | +| LVDT | \\(0.5-500 mm\\) | 10 ppm | 5 nm | 1 kHz | 0.25% FSR | +| Interferometer | Meters | | 0.5 nm | >100kHz | 1 ppm FSR | +| Encoder | Meters | | 6 nm | >100kHz | 5 ppm FSR | ### Strain Gauge {#strain-gauge} @@ -102,17 +102,16 @@ Description: Characteristics of Environmental Units -| | Temperature (\\(\pm\ ^oC\\)) | Pressure (\\(\pm\ hPa\\)) | Humidity \\(\pm\ \% RH\\) | Wavelength Accuracy (\\(\pm\ \text{ppm}\\)) | -|-----------|------------------------------|---------------------------|---------------------------|---------------------------------------------| -| Attocube | 0.1 | 1 | 2 | 0.5 | -| Renishaw | 0.2 | 1 | 6 | 1 | -| Picoscale | 0.2 | 2 | 2 | 1 | +| | Temperature (\\(\pm\ ^oC\\)) | Pressure (\\(\pm\ hPa\\)) | Humidity \\(\pm\\% RH\\) | Wavelength Accuracy (\\(\pm\ \text{ppm}\\)) | +|-----------|------------------------------|---------------------------|--------------------------|---------------------------------------------| +| Attocube | 0.1 | 1 | 2 | 0.5 | +| Renishaw | 0.2 | 1 | 6 | 1 | +| Picoscale | 0.2 | 2 | 2 | 1 | -Figure [1](#org35ec018) is taken from (Yoon-Soo Jang \& Seung-Woo Kim, 2017). + Manufacturing}, v(12), 1881-1890 (2017).">(Yoon-Soo Jang \& Seung-Woo Kim, 2017) - + {{< figure src="/ox-hugo/position_sensor_interferometer_precision.png" caption="Figure 1: Expected precision of interferometer as a function of measured distance" >}}