Tags
Nano Active Stabilization System, Positioning Stations
Reference
(Tomas Stankevic {\it et al.}, 2017)
Author(s)
Stankevic, T., Engblom, C., Langlois, F., Alves, F., Lestrade, A., Jobert, N., Cauchon, G., …
Year
2017
  • Similar Station than the NASS
  • Similar Metrology with fiber based interferometers and cylindrical reference mirror

Figure 1: Positioning Station

Figure 1: Positioning Station

  • Thermal expansion: Stabilized down to \(5mK/h\) using passive water flow through the baseplate below the sample stage and in the interferometry reference frame.
  • Controller: Two Independant PID loops
  • Repeatable errors => feedforward (Look Up Table)
  • Non-repeatable errors => feedback
  • Result: 40nm runout error

Bibliography

Stankevic, T., Engblom, C., Langlois, F., Alves, F., Lestrade, A., Jobert, N., Cauchon, G., …, Interferometric characterization of rotation stages for x-ray nanotomography, Review of Scientific Instruments, 88(5), 053703 (2017). http://dx.doi.org/10.1063/1.4983405