Interferometric characterization of rotation stages for x-ray nanotomography
Contents
- Tags
- Nano Active Stabilization System, Positioning Stations
- Reference
- (Tomas Stankevic {\it et al.}, 2017)
- Author(s)
- Stankevic, T., Engblom, C., Langlois, F., Alves, F., Lestrade, A., Jobert, N., Cauchon, G., …
- Year
- 2017
- Similar Station than the NASS
- Similar Metrology with fiber based interferometers and cylindrical reference mirror

Figure 1: Positioning Station
- Thermal expansion: Stabilized down to \(5mK/h\) using passive water flow through the baseplate below the sample stage and in the interferometry reference frame.
- Controller: Two Independant PID loops
- Repeatable errors => feedforward (Look Up Table)
- Non-repeatable errors => feedback
- Result: 40nm runout error
Bibliography
Stankevic, T., Engblom, C., Langlois, F., Alves, F., Lestrade, A., Jobert, N., Cauchon, G., …, Interferometric characterization of rotation stages for x-ray nanotomography, Review of Scientific Instruments, 88(5), 053703 (2017). http://dx.doi.org/10.1063/1.4983405 ↩