+++
title = "Control of wafer scanners: methods and developments"
author = ["Thomas Dehaeze"]
draft = false
+++

Tags
:


Reference
: ([Heertjes et al. 2020](#org38a977c))

Author(s)
: Heertjes, Marcel Fran\ccois, Butler, H., Dirkx, N., van der Meulen, S., Ahlawat, R., O'Brien, K., Simonelli, J., …

Year
: 2020


## Bibliography {#bibliography}

<a id="org38a977c"></a>Heertjes, Marcel François, Hans Butler, NJ Dirkx, SH van der Meulen, R Ahlawat, K O’Brien, J Simonelli, KT Teng, and Y Zhao. 2020. “Control of Wafer Scanners: Methods and Developments.” In _2020 American Control Conference (ACC)_, 3686–3703. IEEE.
