# Interferometric characterization of rotation stages for x-ray nanotomography - My digital brain
Tags Nano Active Stabilization System, Positioning Stations Reference (Tomas Stankevic {\it et al.}, 2017) Author(s) Stankevic, T., Engblom, C., Langlois, F., Alves, F., Lestrade, A., Jobert, N., Cauchon, G., … Year 2017 Similar Station than the NASS Similar Metrology with fiber based interferometers and cylindrical reference mirror Figure 1: Positioning Station Thermal expansion: Stabilized down to \(5mK/h\) using passive water flow through the baseplate below the sample stage and in the interferometry reference frame.
Author: — Thomas Dehaeze

# Interferometric characterization of rotation stages for x-ray nanotomography

Tags
  Nano Active Stabilization System, Positioning Stations
Reference
  (Tomas Stankevic {\it et al.}, 2017)
Author(s)
  Stankevic, T., Engblom, C., Langlois, F., Alves, F., Lestrade, A., Jobert, N., Cauchon, G., …
Year
  2017

- Similar Station than the NASS
- Similar Metrology with fiber based interferometers and cylindrical reference mirror

Figure 1: Positioning Station

- Thermal expansion: Stabilized down to \(5mK/h\) using passive water flow through the baseplate below the sample stage and in the interferometry reference frame.
- Controller: Two Independant PID loops
- Repeatable errors => feedforward (Look Up Table)
- Non-repeatable errors => feedback
- Result: 40nm runout error

# Bibliography

Stankevic, T., Engblom, C., Langlois, F., Alves, F., Lestrade, A., Jobert, N., Cauchon, G., …, Interferometric characterization of rotation stages for x-ray nanotomography, Review of Scientific Instruments, 88(5), 053703 (2017). http://dx.doi.org/10.1063/1.4983405 ↩