# Position Sensors - My digital brain
Tags Inertial Sensors Reviews of position sensors (Collette {\it et al.}, 2012) Fleming, A. J., A review of nanometer resolution position sensors: operation and performance (Andrew Fleming, 2013) (Notes) Relative Position Sensors Table 1: Characteristics of relative measurement sensors collette11_review Technology Frequency Resolution Range T Range LVDT DC-200 Hz 10 nm rms 1-10 mm -50,100 °C Eddy current 5 kHz 0.
Author: — Thomas Dehaeze

# Position Sensors

Tags
  Inertial Sensors

## Reviews of position sensors

- (Collette {\it et al.}, 2012)
- Fleming, A. J., A review of nanometer resolution position sensors: operation and performance (Andrew Fleming, 2013) (Notes)

## Relative Position Sensors

Table 1: Characteristics of relative measurement sensors collette11_review

Technology | Frequency | Resolution | Range | T Range
--- | --- | --- | --- | ---
LVDT | DC-200 Hz | 10 nm rms | 1-10 mm | -50,100 °C
Eddy current | 5 kHz | 0.1-100 nm rms | 0.5-55 mm | -50,100 °C
Capacitive | DC-100 kHz | 0.05-50 nm rms | 50 nm - 1 cm | -40,100 °C
Interferometer | 300 kHz | 0.1 nm rms | 10 cm | -250,100 °C
Encoder | DC-1 MHz | 1 nm rms | 7-27 mm | 0,40 °C
Bragg Fibers | DC-150 Hz | 0.3 nm rms | 3.5 cm | -30,80 °C

Table 2: Summary of position sensor characteristics. The dynamic range (DNR) and resolution are approximations based on a full-scale range of \(100 \mu m\) and a first order bandwidth of \(1 kHz\) fleming13_review_nanom_resol_posit_sensor

Sensor Type | Range | DNR | Resolution | Max. BW | Accuracy
--- | --- | --- | --- | --- | ---
Metal foil | \(10-500 \mu m\) | 230 ppm | 23 nm | 1-10 kHz | 1% FSR
Piezoresistive | \(1-500 \mu m\) | 5 ppm | 0.5 nm | >100 kHz | 1% FSR
Capacitive | \(10 \mu m\) to \(10 mm\) | 24 ppm | 2.4 nm | 100 kHz | 0.1% FSR
Electrothermal | \(10 \mu m\) to \(1 mm\) | 100 ppm | 10 nm | 10 kHz | 1% FSR
Eddy current | \(100 \mu m\) to \(80 mm\) | 10 ppm | 1 nm | 40 kHz | 0.1% FSR
LVDT | \(0.5-500 mm\) | 10 ppm | 5 nm | 1 kHz | 0.25% FSR
Interferometer | Meters |  | 0.5 nm | >100kHz | 1 ppm FSR
Encoder | Meters |  | 6 nm | >100kHz | 5 ppm FSR

### Strain Gauge

### Capacitive Sensor

Description:

- http://www.lionprecision.com/tech-library/technotes/cap-0020-sensor-theory.html
- https://www.lionprecision.com/comparing-capacitive-and-eddy-current-sensors

Micro Sense | link
Micro-Epsilon | link
PI | link
Unipulse | link
Lion-Precision | link

### Inductive Sensor (Eddy Current)

Micro-Epsilon | link
Lion Precision | link

### Inductive Sensor (LVDT)

Micro-Epsilon | link
Keyence | link

### Interferometers

Attocube | link
Zygo | link
Smaract | link
Qutools | link
Renishaw | link
Sios | link
Keysight | link

Table 3: Characteristics of Environmental Units

| Temperature (\(\pm\ ^oC\)) | Pressure (\(\pm\ hPa\)) | Humidity \(\pm\% RH\) | Wavelength Accuracy (\(\pm\ \text{ppm}\))
--- | --- | --- | --- | ---
Attocube | 0.1 | 1 | 2 | 0.5
Renishaw | 0.2 | 1 | 6 | 1
Picoscale | 0.2 | 2 | 2 | 1

(Yoon-Soo Jang & Seung-Woo Kim, 2017)

Figure 1: Expected precision of interferometer as a function of measured distance

### Fiber Optic Displacement Sensor

Unipulse | link

# Bibliography

Collette, C., Janssens, S., Mokrani, B., Fueyo-Roza, L., Artoos, K., Esposito, M., Fernandez-Carmona, P., …, Comparison of new absolute displacement sensors, In , International Conference on Noise and Vibration Engineering (ISMA) (pp. ) (2012). : . ↩

Fleming, A. J., A review of nanometer resolution position sensors: operation and performance, Sensors and Actuators A: Physical, 190(nil), 106–126 (2013). http://dx.doi.org/10.1016/j.sna.2012.10.016 ↩

Collette, C., Artoos, K., Guinchard, M., Janssens, S., Carmona Fernandez, P., & Hauviller, C., Review of sensors for low frequency seismic vibration measurement (2011). ↩

Jang, Y., & Kim, S., Compensation of the refractive index of air in laser interferometer for distance measurement: a review, International Journal of Precision Engineering and Manufacturing, 18(12), 1881–1890 (2017). http://dx.doi.org/10.1007/s12541-017-0217-y ↩

## Backlinks

- Measurement technologies for precision positioning
- A review of nanometer resolution position sensors: operation and performance