% Created 2021-07-22 jeu. 08:10 % Intended LaTeX compiler: pdflatex \documentclass[aspectratio=169, t]{clean-beamer} \usepackage[utf8]{inputenc} \usepackage[T1]{fontenc} \usepackage{graphicx} \usepackage{grffile} \usepackage{longtable} \usepackage{wrapfig} \usepackage{rotating} \usepackage[normalem]{ulem} \usepackage{amsmath} \usepackage{textcomp} \usepackage{amssymb} \usepackage{capt-of} \usepackage{hyperref} \usepackage[most]{tcolorbox} \usepackage{bm} \usepackage{booktabs} \usepackage{tabularx} \usepackage{array} \usepackage{siunitx} \usepackage{mathtools} \author[shortname]{Thomas Dehaeze \inst{1,2}, Julien Bonnefoy \inst{1} \and Christophe Collette \inst{2,3}} \institute[shortinst]{\inst{1} European Synchrotron Radiation Facility, Grenoble, France \and % \inst{2} Precision Mechatronics Laboratory, University of Liege, Belgium \and % \inst{3} BEAMS Department, Free University of Brussels, Belgium} \titlegraphic{\includegraphics[height=1.5cm]{figs/logo_pml_full.pdf} \hspace{5em} % \includegraphics[height=1.5cm]{figs/logo_esrf.pdf} \hspace{5em} % \includegraphics[height=1.5cm]{figs/logo_medsi.jpg}} \beamertemplatenavigationsymbolsempty \addtobeamertemplate{navigation symbols}{}{% \usebeamerfont{footline}% \usebeamercolor[fg]{footline}% \hspace{1em}% \insertframenumber/\inserttotalframenumber } \setlength{\leftmargini}{5pt} \setbeamertemplate{itemize items}[circle] \usefonttheme[onlymath]{serif} \makeatletter \preto\Gin@extensions{png,} \DeclareGraphicsRule{.png}{pdf}{.pdf}{\noexpand\Gin@base.pdf} \makeatother \setbeamertemplate{bibliography item}[text] \DeclareSIUnit\rms{rms} \usetheme{default} \author{Dehaeze Thomas, Bonnefoy Julien and Collette Christophe} \date{} \title{Mechatronics Approach for the Development of a Nano-Active-Stabilization-System} \subtitle{MEDSI2020, July 26-29, 2021} \hypersetup{ pdfauthor={Dehaeze Thomas, Bonnefoy Julien and Collette Christophe}, pdftitle={Mechatronics Approach for the Development of a Nano-Active-Stabilization-System}, pdfkeywords={}, pdfsubject={}, pdfcreator={Emacs 27.2 (Org mode 9.5)}, pdflang={English}} \begin{document} \maketitle \section*{Introduction} \begin{frame}[label={sec:orgdc51d45}]{The ID31 Micro Station} \begin{center} \includegraphics[scale=1,width=0.95\linewidth]{figs/micro_hexapod_render.pdf} \end{center} \begin{tikzpicture}[remember picture,overlay] \node[anchor=north east, padding=5pt] at (current page.north east){% \includegraphics[width=2em]{figs/icon_animation.pdf}}; \end{tikzpicture} \end{frame} \begin{frame}[label={sec:orgd54db4c}]{Introduction - The Nano Active Stabilization System} \textbf{Objective}: Improve the position accuracy from \(\approx 10\,\mu m\) down to \(\approx 10\,nm\) \newline \textbf{Design approach}: ``Model based design'' / ``Predictive Design'' \begin{center} \includegraphics[scale=1,width=\linewidth]{figs/nass-concept.pdf} \end{center} \end{frame} \begin{frame}[label={sec:org58304ff}]{Overview of the Mechatronic Approach - Model Based Design} \begin{center} \includegraphics[scale=1,width=\linewidth]{figs/nass_mechatronics_approach.png} \end{center} \end{frame} \section{Conceptual Phase} \begin{frame}[label={sec:org95b2a1a}]{Outline - Conceptual Phase} \begin{center} \includegraphics[scale=1,width=\linewidth]{figs/nass_mechatronics_approach_conceptual_phase.png} \end{center} \end{frame} \begin{frame}[label={sec:org612b41f}]{Feedback Control - The Control Loop} \vspace{-1em} \begin{center} \includegraphics[scale=1,width=\linewidth]{figs/classical_feedback_schematic.png} \end{center} \vspace{-1em} \begin{columns} \begin{column}{0.4\columnwidth} \begin{tcolorbox}[title=Why Feedback?] \begin{itemize} \item Model uncertainties \item Unknown disturbances \end{itemize} \end{tcolorbox} \end{column} \begin{column}{0.6\columnwidth} \begin{tcolorbox}[title=Every elements can limit the performances] \begin{itemize} \item Drivers, Actuators, Sensors \item Mechanical System \item Controller \end{itemize} \end{tcolorbox} \end{column} \end{columns} \end{frame} \begin{frame}[label={sec:orga5ea61a}]{Noise Budgeting and Required Control Bandwidth} \vspace{-1em} \begin{center} \includegraphics[scale=1,width=\linewidth]{figs/identification_control_noise_budget.red.pdf} \end{center} \end{frame} \begin{frame}[label={sec:orgd23064f}]{Limitation of the Controller Bandwidth?} \begin{columns} \begin{column}{0.6\columnwidth} \vspace{-2em} \only<1>{ \begin{center} \includegraphics[scale=1,width=\linewidth]{figs/control_bandwidth_1_classical.pdf} \end{center} }\only<2>{ \begin{center} \includegraphics[scale=1,width=\linewidth]{figs/control_bandwidth_2_above_res.pdf} \end{center} }\only<3>{ \begin{center} \includegraphics[scale=1,width=\linewidth]{figs/control_bandwidth_3_next_gen.pdf} \end{center} } \end{column} \begin{column}{0.4\columnwidth} \vspace{-2em} \begin{center} \includegraphics[scale=1,width=\linewidth]{figs/test_bench_apa_simple.pdf} \end{center} \only<1>{ \begin{tcolorbox}[title=Typical Approach, fontupper=\small] ``As stiff as possible'' \newline Simple controller (e.g. PID) \end{tcolorbox} }\only<2>{ \begin{tcolorbox}[title=Alternative Approach, fontupper=\small] Limited by complex dynamics\newline Model based controller \end{tcolorbox} }\only<3>{ \begin{tcolorbox}[title=Next-Gen Systems, fontupper=\small] Active research topic\newline Complex controllers \end{tcolorbox} } \end{column} \end{columns} \end{frame} \begin{frame}[label={sec:org9493c8d}]{Soft or Stiff \(\nu\text{-hexapod}\) ? Interaction with the \(\mu\text{-station}\)} \vspace{-3em} \begin{columns} \begin{column}{0.3\columnwidth} \onslide<1->{ \begin{center} \includegraphics[scale=1,width=\linewidth]{figs/nass_example_uncertainty_support_only_hexapod.pdf} \end{center} }\onslide<2->{ \begin{center} \includegraphics[scale=1,width=\linewidth]{figs/nass_example_uncertainty_support.pdf} \end{center} } \end{column} \begin{column}{0.7\columnwidth} \onslide<1->{ \begin{center} \includegraphics[scale=1,width=\linewidth]{figs/nass_example_alone.pdf} \end{center} \vspace{-2em} }\onslide<2->{ \begin{center} \includegraphics[scale=1,width=\linewidth]{figs/nass_example_support_uncertainty_d_L.pdf} \end{center} } \end{column} \end{columns} \end{frame} \begin{frame}[label={sec:orgddab963}]{Complexity of the Micro-Station Dynamics (Model Analysis)} \vspace{-1em} \begin{center} \includegraphics[scale=1,width=0.95\linewidth]{figs/modes_annotated.png} \end{center} \begin{tikzpicture}[remember picture,overlay] \node[anchor=north east, padding=5pt] at (current page.north east){% \includegraphics[width=2em]{figs/icon_animation.pdf}}; \end{tikzpicture} \end{frame} \begin{frame}[label={sec:org3dfae25}]{Control Strategy: HAC-LAC} \vspace{-0.5em} \begin{center} \includegraphics[scale=1,width=\linewidth]{figs/nass_schematic_test.pdf} \end{center} \vspace{-2.0em} \begin{columns} \begin{column}{0.5\columnwidth} \begin{tcolorbox}[title=Low Authority Control] \begin{itemize} \item Collocated sensors/actuators \item Guaranteed Stability \item Adds damping \item \(\searrow\) vibration near resonances \end{itemize} \end{tcolorbox} \end{column} \begin{column}{0.5\columnwidth} \begin{tcolorbox}[title=High Authority Control] \begin{itemize} \item Position sensors \item Complex dynamics \item \(\searrow\) vibration in the bandwidth \item Use transformation matrices \end{itemize} \end{tcolorbox} \end{column} \end{columns} \end{frame} \begin{frame}[label={sec:orgb8b73a0}]{Multi-Body Models - Simulations} \begin{center} \includegraphics[scale=1,width=\linewidth]{figs/simscape_simulation.jpg} \end{center} \begin{tikzpicture}[remember picture, overlay] \node[align=left, anchor=south east, text width=5.5cm,shift={(-1em, 1em)}] at (current page.south east){% \begin{tcolorbox} \begin{center} Validation of the concept \end{center} \end{tcolorbox}}; \end{tikzpicture} \begin{tikzpicture}[remember picture,overlay] \node[anchor=north east, padding=5pt] at (current page.north east){% \includegraphics[width=2em]{figs/icon_animation.pdf}}; \end{tikzpicture} \end{frame} \section{Detail Design Phase} \begin{frame}[label={sec:org6378434}]{Outline - Detail Design Phase} \begin{center} \includegraphics[scale=1,width=\linewidth]{figs/nass_mechatronics_approach_detailed_phase.png} \end{center} \end{frame} \begin{frame}[label={sec:orgc57fa9c}]{Nano-Hexapod Overview - Key elements} \begin{center} \includegraphics[scale=1,width=\linewidth]{figs/nano_hexapod_elements.red.pdf} \end{center} \end{frame} \begin{frame}[label={sec:orga847212}]{Include Flexible Elements in a Multi-Body model} \begin{center} \includegraphics[scale=1,width=\linewidth]{figs/super_element_simscape.pdf} \end{center} \end{frame} \begin{frame}[label={sec:org36e74d8}]{Choice of Actuator - Amplifier Piezoelectric Actuator} \vspace{-2em} \begin{columns} \begin{column}{0.5\columnwidth} \scriptsize \begin{center} \begin{tabularx}{0.8\linewidth}{ccc} \toprule \textbf{Characteristic} & \textbf{Specs} & \textbf{Doc.}\\ \midrule Axial Stiff. & \SI{\approx 1}{\newton/\micro\meter} & \SI{1.8}{\newton/\micro\meter}\\ Sufficient Stroke & \SI{> 100}{\micro\meter} & \SI{368}{\micro\meter}\\ Height & \SI{< 50}{\milli\meter} & \SI{30}{\milli\meter}\\ High Resolution & \SI{< 5}{\nano\meter} & \SI{3}{\nano\meter}\\ \bottomrule \end{tabularx} \end{center} \normalsize \vspace{-1em} \begin{figure}[htbp] \centering \includegraphics[scale=1,width=0.9\linewidth]{figs/apa300ml_picture.jpg} \caption{Picture of the APA300ML} \end{figure} \end{column} \begin{column}{0.5\columnwidth} \vspace{-1em} \begin{columns} \begin{column}{0.4\columnwidth} \begin{figure}[htbp] \centering \includegraphics[scale=1,width=0.8\linewidth]{figs/2dof_apa_model.pdf} \caption{2-DoF Model} \end{figure} \end{column} \begin{column}{0.6\columnwidth} \vspace{-1.6em} \begin{figure}[htbp] \centering \includegraphics[scale=1,width=0.9\linewidth]{figs/mesh_APA_schematic.pdf} \caption{APA Finite Element Model} \end{figure} \end{column} \end{columns} \begin{figure}[htbp] \centering \includegraphics[scale=1,width=\linewidth]{figs/mode_shapes_annotated.pdf} \caption{Flexible Modes due to limited APA stiffness} \end{figure} \end{column} \end{columns} \end{frame} \begin{frame}[label={sec:orgaefb8a2}]{Flexible Joints - Specifications and Optimization (\href{https://research.tdehaeze.xyz/test-bench-nass-flexible-joints/}{link})} \vspace{-2em} \begin{columns} \begin{column}{0.75\columnwidth} \scriptsize \begin{center} \begin{tabularx}{\linewidth}{ccccc} \toprule \textbf{Goal} & \textbf{Stiffness} & \textbf{Specs} & \textbf{FEM} & \textbf{Measured}\\ \midrule High DVF Damping & Axial & \SI{> 100}{\newton/\micro\meter} & 94 & \\ Low Coupling & Bending & \SI{< 100}{\newton\meter/\radian} & 5 & 3.8\\ Low Coupling & Torsion & \SI{< 500}{\newton\meter/\radian} & 260 & \\ Sufficient Stroke & Bending Stroke & \SI{> 1}{\milli\radian} & 20 & 18\\ \bottomrule \end{tabularx} \end{center} \normalsize \end{column} \begin{column}{0.25\columnwidth} \vspace{-3em} \begin{figure}[htbp] \centering \includegraphics[scale=1,width=\linewidth]{figs/flexible_joint_dimensions.pdf} \caption{Dimensions after optimization} \end{figure} \end{column} \end{columns} \vspace{-3em} \begin{columns} \begin{column}{0.45\columnwidth} \begin{figure}[htbp] \centering \includegraphics[scale=1,width=\linewidth]{figs/location_top_flexible_joints.pdf} \caption{Positioning of the top joint} \end{figure} \end{column} \begin{column}{0.55\columnwidth} \vspace{2em} \begin{figure}[htbp] \centering \includegraphics[scale=1,width=\linewidth]{figs/simscape_model_flexible_joint.pdf} \caption{Simscape Model} \end{figure} \end{column} \end{columns} \end{frame} \begin{frame}[label={sec:org1666f90}]{Instrumentation} \begin{itemize} \item PD200 amplifier \item Encoders \item Speedgoat, DAC, ADC \item PEPU \item Attocube \end{itemize} \end{frame} \section{Experimental Phase} \begin{frame}[label={sec:org8c075cc}]{Outline - Experimental Phase} \begin{center} \includegraphics[scale=1,width=\linewidth]{figs/nass_mechatronics_approach_experimental_phase.png} \end{center} \end{frame} \begin{frame}[label={sec:org57e9067}]{Flexible Joints - Measurements} \vspace{-2em} \begin{columns} \begin{column}{0.45\columnwidth} \begin{figure}[htbp] \centering \includegraphics[scale=1,width=\linewidth]{figs/flexible_joint_bench.pdf} \caption{Measurement bench} \end{figure} \end{column} \begin{column}{0.55\columnwidth} \begin{figure}[htbp] \centering \includegraphics[scale=1,width=\linewidth]{figs/flex_joint_meas_example_F_d_lin_fit.pdf} \caption{Measured displacement and force} \end{figure} \end{column} \end{columns} \end{frame} \begin{frame}[label={sec:org230d623}]{Amplified Piezoelectric Actuator - Test Bench} \vspace{-1em} \begin{center} \includegraphics[scale=1,width=\linewidth]{figs/test_bench_apa300ml.red.pdf} \end{center} \begin{tikzpicture}[remember picture, overlay] \node[align=left, anchor=north east, text width=4.5cm] at (current page.north east){% \begin{tcolorbox}[title=Goals] \begin{itemize} \item Identify Dynamics \item Tune APA Model \item Test IFF \end{itemize} \end{tcolorbox}}; \end{tikzpicture} \end{frame} \begin{frame}[label={sec:org9368c73}]{Amplified Piezoelectric Actuator - Extracted Model} \begin{center} \includegraphics[scale=1,width=\linewidth]{figs/apa_comp_model_frf.pdf} \end{center} \end{frame} \begin{frame}[label={sec:orga3a7c76}]{Amplified Piezoelectric Actuator - Integral Force Feedback} \vspace{-3em} \begin{columns} \begin{column}{0.62\columnwidth} \begin{center} \includegraphics[scale=1,width=\linewidth]{figs/test_bench_apa300ml_iff.pdf} \end{center} \[ K_{\text{IFF}}(s) = \frac{g}{s} \] \end{column} \begin{column}{0.38\columnwidth} \begin{center} \includegraphics[scale=1,width=\linewidth]{figs/iff_results_apa95ml.pdf} \end{center} \end{column} \end{columns} \end{frame} \begin{frame}[label={sec:org4e8f560}]{Strut - Mounting Tool} \vspace{-2.5em} \begin{columns} \begin{column}{0.63\columnwidth} \begin{center} \includegraphics[scale=1,width=\linewidth]{figs/image_mounting_strut_bench.JPG} \end{center} \end{column} \begin{column}{0.37\columnwidth} \begin{center} \includegraphics[scale=1,width=\linewidth]{figs/mounted_strut_picture.jpg} \end{center} \begin{tikzpicture}[remember picture,overlay] \node[anchor=north east, padding=5pt] at (current page.north east){% \includegraphics[width=2em]{figs/icon_animation.pdf}}; \end{tikzpicture} \end{column} \end{columns} \end{frame} \begin{frame}[label={sec:orge547304}]{Strut - Dynamical Measurements} \vspace{-1em} \begin{center} \includegraphics[scale=1,width=\linewidth]{figs/test_bench_strut.red.pdf} \end{center} \begin{tikzpicture}[remember picture, overlay] \node[align=left, anchor=north east, text width=5cm] at (current page.north east){% \begin{tcolorbox}[title=Goals] \begin{itemize} \item Identify Dynamics \item Tune Model \item Flexible joints effects \item Encoder effect \end{itemize} \end{tcolorbox}}; \end{tikzpicture} \end{frame} \begin{frame}[label={sec:org76a12db}]{Strut - Encoders Output and Spurious Modes} \vspace{-3em} \begin{columns} \begin{column}{0.45\columnwidth} \begin{center} \includegraphics[scale=1,width=\linewidth]{figs/frf_model_encoder_strut.pdf} \end{center} \end{column} \begin{column}{0.55\columnwidth} \begin{center} \includegraphics[scale=1,width=\linewidth]{figs/meas_spur_res_struts_2_encoder.jpg} \end{center} \begin{center} \includegraphics[scale=1,width=\linewidth]{figs/mode_shapes_annotated.pdf} \end{center} \begin{tikzpicture}[remember picture,overlay] \node[anchor=north east, padding=5pt] at (current page.north east){% \includegraphics[width=2em]{figs/icon_animation.pdf}}; \end{tikzpicture} \end{column} \end{columns} \end{frame} \begin{frame}[label={sec:org416c1db}]{Strut - Extracted Model} \vspace{-1em} \begin{center} \includegraphics[scale=1,width=\linewidth]{figs/strut_meas_frf_model_int_force.pdf} \end{center} \end{frame} \begin{frame}[label={sec:orgd58b991}]{Nano-Hexapod Mounting Tool} \begin{center} \includegraphics[scale=1,width=0.9\linewidth]{figs/nano_hexapod_mounting.JPG} \end{center} \begin{tikzpicture}[remember picture,overlay] \node[anchor=north east, padding=5pt] at (current page.north east){% \includegraphics[width=2em]{figs/icon_animation.pdf}}; \end{tikzpicture} \end{frame} \begin{frame}[label={sec:orgb957064}]{Mounted Nano-Hexapod} \vspace{-1em} \begin{center} \includegraphics[scale=1,width=\linewidth]{figs/mounted_nano_hexapod_picture.jpg} \end{center} \end{frame} \begin{frame}[label={sec:org92c51de}]{Nano-Hexapod - Identified Dynamics} Diagonal + off-diagonal transfer function from Va to De (comp with model) \end{frame} \begin{frame}[label={sec:orgafcfc6b}]{Nano-Hexapod - Force Sensors} Diagonal + off-diagonal transfer function from Va to Vs \end{frame} \begin{frame}[label={sec:org2608c34}]{Nano-Hexapod - Damped Dynamics} Damped and Undamped, Diagonal + off-diagonal transfer function from Va to De \end{frame} \begin{frame}[label={sec:org9e7c6f4}]{The Nano-Hexapod on top of the Micro-Station} \vspace{-0.5em} \only<1>{ \begin{center} \includegraphics[scale=1,width=0.85\linewidth]{figs/nano_hexapod_id31.jpg} \end{center} }\only<2>{ \begin{center} \includegraphics[scale=1,width=0.85\linewidth]{figs/nano_hexapod_id31_zoom.jpg} \end{center} } \end{frame} \section{Conclusion} \begin{frame}[label={sec:orgee0f6f0}]{Conclusion} \end{frame} \end{document}